Switching device and electronic apparatus

Abstract

The application provides a switching device and an electronic device, wherein the switching device comprises: a base body provided with a receiving groove, the receiving groove comprising a first receiving area, a second receiving area and a spacing area between the first receiving area and the second receiving area; a first liquid conductor is arranged in the first receiving area, and a second liquid conductor is arranged in the second receiving area; an actuating piece is arranged opposite to the receiving groove and is configured to switch from a natural state to a deformed state in response to a preset stimulation signal; the material of the actuating piece comprises a liquid crystal elastic material; a transmission piece is connected with the actuating piece, and the transmission piece is configured to switch between a second state and a first state along with the switching of the actuating piece between the natural state and the deformed state; wherein the transmission piece in the first state is used for controlling the electrical connection of the first liquid conductor and the second liquid conductor, and the transmission piece in the second state is used for controlling the disconnection of the first liquid conductor and the second liquid conductor.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a switching device and an electronic device. Background Technology

[0002] Liquid crystal elastomers are a new type of smart soft material that combines the anisotropic order of liquid crystals with the entropic elasticity of polymer elastomers. They can undergo reversible and large-scale macroscopic deformations such as contraction, bending, and twisting under external stimuli such as heat, light, electricity, and magnetic fields. The deformation can typically reach 20% to 50% or even higher. Summary of the Invention

[0003] In a first aspect, the present invention provides a switching device comprising:

[0004] The substrate has a receiving groove, the receiving groove including a first receiving area, a second receiving area and a spacer area located between the first receiving area and the second receiving area; a first liquid conductor is disposed in the first receiving area and a second liquid conductor is disposed in the second receiving area;

[0005] An actuator is disposed opposite to the receiving groove and configured to switch from a natural state to a deformed state in response to a preset stimulus signal; the actuator material includes a liquid crystal elastic material.

[0006] A transmission element, connected to the actuator, is configured to switch between a second state and a first state as the actuator switches between the natural state and the deformed state; wherein, in the first state, the transmission element controls the electrical connection between the first liquid conductor and the second liquid conductor, and in the second state, the transmission element controls the disconnection between the first liquid conductor and the second liquid conductor.

[0007] Optionally, the transmission element includes a flexible insulating layer configured to, in the first state, compress the first liquid conductor and / or the second liquid conductor to bring them into contact with each other in the spacer region; and in the second state, separate from the first liquid conductor and the second liquid conductor to separate the first liquid conductor and the second liquid conductor by the spacer region.

[0008] Optionally, the flexible insulating layer is sealed to the substrate, and the connection position surrounds the receiving groove.

[0009] Optionally, the transmission component further includes a transmission link located on the side of the flexible insulating layer away from the substrate;

[0010] The flexible insulating layer and the actuator are connected by the transmission link.

[0011] Optionally, the actuator includes a plurality of actuating parts spaced apart, the actuating parts having the natural state and the deformed state;

[0012] The transmission member is connected to a plurality of the actuating parts and is configured to switch to the first state when all the actuating parts are in the deformed state; and to switch to the second state when at least one of the actuating parts is in the natural state.

[0013] Optionally, the transmission component is made of a conductive material; when the transmission component is in the first state, it is in contact with the first liquid conductor and the second liquid conductor; when the transmission component is in the second state, it is separated from at least one of the first liquid conductor and the second liquid conductor.

[0014] Optionally, the actuator includes:

[0015] An elastic arm has a fixed end fixed to the base and a free end spaced apart from the base; the transmission member is connected to the elastic arm in a transmission manner.

[0016] The elastic arm is configured to bend toward the substrate in response to the preset stimulation signal, thereby driving the transmission member to switch to the first state; the elastic arm is also configured to return to its natural state in response to not receiving the preset stimulation signal, thereby driving the transmission member to switch to the second state.

[0017] Optionally, the actuator includes:

[0018] Multiple elastic arms, each elastic arm having a fixed end fixed to the base and a free end spaced apart from the base, the multiple elastic arms being arranged crosswise and connected to each other at a designated intersection position between their respective fixed ends and free ends; the transmission member is connected to the designated intersection position;

[0019] The elastic arm is configured to bend toward the substrate in response to the preset stimulation signal, and the transmission member is configured to switch to the first state when all the elastic arms are bent toward the substrate; and to switch to the second state when at least one of the elastic arms is in a natural state.

[0020] Optionally, the switching device also includes:

[0021] The first solid electrode is electrically connected to the first liquid conductor;

[0022] The second solid electrode is electrically connected to the second liquid conductor.

[0023] Optionally, the preset stimulation signal includes at least one of preset temperature, preset level, preset light intensity, and preset magnetic field.

[0024] Optionally, the material of the liquid conductor includes a gallium-containing alloy.

[0025] Optionally, the width of the interval region is 50μm to 500μm.

[0026] Optionally, the substrate is made of a flexible material.

[0027] In a second aspect, the present invention discloses an electronic device comprising:

[0028] At least one switching device as described above; and

[0029] A triggering device is used to apply a preset stimulation signal to the actuator in the switching device. Attached Figure Description

[0030] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention and do not constitute a limitation thereof. The above and other features and advantages will become more apparent to those skilled in the art from the detailed description of exemplary embodiments with reference to the accompanying drawings, in which:

[0031] Figure 1 A schematic cross-sectional view of the flexible insulating layer in the second state in the switching device provided in an embodiment of the present invention;

[0032] Figure 2 A schematic cross-sectional view of the flexible insulating layer in the first state in the switching device provided in an embodiment of the present invention;

[0033] Figure 3 A schematic diagram of a first distribution of two actuating parts provided for an embodiment of the present invention;

[0034] Figure 4 A second schematic diagram of the distribution of two actuating parts provided in an embodiment of the present invention;

[0035] Figure 5 A first schematic diagram of the distribution of a switching device including an actuating part provided in an embodiment of the present invention;

[0036] Figure 6 A second schematic diagram of the distribution of a switching device including an actuating part provided in an embodiment of the present invention;

[0037] Figure 7 A third schematic diagram of the distribution of a switching device including two actuating parts provided in an embodiment of the present invention;

[0038] Figure 8 A third schematic diagram of the distribution of a switching device including an actuating part provided in an embodiment of the present invention;

[0039] Figure 9 A fourth schematic diagram of the distribution of a switching device including two actuating parts provided in an embodiment of the present invention;

[0040] Figure 10 A cross-sectional schematic diagram of a switching device provided in an embodiment of the present invention, comprising an elastic arm and a transmission member in a second state;

[0041] Figure 11 A cross-sectional schematic diagram of a switching device provided in an embodiment of the present invention, including an elastic arm and a transmission member in a first state;

[0042] Figure 12 A cross-sectional schematic diagram of a switching device provided in an embodiment of the present invention, comprising two elastic arms and a transmission member in a second state;

[0043] Figure 13 A cross-sectional schematic diagram of a switching device provided in an embodiment of the present invention, comprising two elastic arms and a transmission member in a first state;

[0044] Figure 14 A schematic cross-sectional view of a switching device provided in an embodiment of the present invention, comprising two elastic arms, one of which is in a deformed state;

[0045] Figure 15 This is a schematic diagram showing the distribution of a switching device with two elastic arms, as provided in an embodiment of the present invention.

[0046] Reference numerals: Substrate 1; Receiving tank 11; First receiving area 11A; Second receiving area 11B; Spacing area 11C; First liquid conductor 21; Second liquid conductor 22; Third receiving area 11D; Third liquid conductor 23; Actuator 3; Actuating part 31; Elastic arm 32; Transmission element 4; Flexible insulating layer 41; Transmission link 42; First solid electrode 51; Second solid electrode 52; Third solid electrode 53. Detailed Implementation

[0047] To enable those skilled in the art to better understand the technical solutions of the present invention, exemplary embodiments of the present invention are described below in conjunction with the accompanying drawings, including various details of the embodiments of the present invention to aid understanding. These should be considered merely exemplary. Therefore, those skilled in the art should recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0048] Where there is no conflict, the various embodiments of the present invention and the features thereof may be combined with each other.

[0049] As used herein, the term “and / or” includes any and all combinations of one or more related enumerated entries.

[0050] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used herein, the singular forms “a” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will also be understood that when the terms “comprising” and / or “made of” are used in this specification, the presence of the stated feature, integral, step, operation, element, and / or component is specified, but the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof is not excluded. Terms such as “connected” or “linked” are not limited to physical or mechanical connections but can include electrical connections, whether direct or indirect.

[0051] Unless otherwise specified, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art. It will also be understood that terms such as those defined in commonly used dictionaries should be interpreted as having the meaning consistent with their meaning in the context of the relevant art and the invention, and will not be interpreted as having an idealized or overly formal meaning unless expressly so defined herein.

[0052] In related technologies, in schemes that utilize liquid metal to control circuit switching, a movable piston and a pump that can maintain driving pressure are typically used to apply mechanical pressure to a dielectric gas or liquid, and then the dielectric medium transmits the pressure to the liquid metal, causing it to move at different positions, thereby realizing circuit switching; or, an electric pump is used to control the flow of driving fluid between the liquid storage tank and the switch channel to drive the flow of liquid metal.

[0053] However, regardless of whether a piston pump or a piezoelectric pump is used, both require a complex external power source and control system, which leads to complex device structures and large sizes, making it difficult to achieve miniaturization and integration.

[0054] Please refer to Figures 1 to 15 This disclosure provides a switching device, which includes a base 1, an actuator 3, and a transmission element 4.

[0055] The substrate 1 has a receiving groove 11; the receiving groove 11 includes a first receiving area 11A, a second receiving area 11B and a gap area 11C located between the first receiving area 11A and the second receiving area 11B; a first liquid conductor 21 is provided in the first receiving area 11A and a second liquid conductor 22 is provided in the second receiving area 11B. Under the guiding action of the receiving groove 11, the first liquid conductor 21 and the second liquid conductor 22 can move along the receiving groove 11 to achieve connection or separation.

[0056] The actuator 3 is disposed opposite to the receiving groove 11, and the actuator 3 is configured to switch from a natural state to a deformed state in response to a preset stimulus signal. Specifically, the actuator 3 is made of a liquid crystal elastic material, which can undergo reversible macroscopic deformation under the stimulation of the preset stimulus signal, so that the actuator 3 can switch between a natural state and a deformed state.

[0057] The transmission component 4 is connected to the actuator 3. The transmission component 4 is configured to switch between a second state and a first state as the actuator 3 switches between a natural state and a deformed state. That is, the transmission component 4 will deform or displace accordingly with the deformation of the actuator 3, so that the positional state of the transmission component 4 in space changes. For example, when a preset stimulus signal is applied to the actuator 3, the actuator 3 deforms, driving the transmission component 4 to switch to the first state; or when a preset stimulus signal is applied to the actuator 3, the actuator 3 deforms, driving the transmission component 4 to switch to the second state. The transmission component 4 in the first state is used to control the electrical connection between the first liquid conductor 21 and the second liquid conductor 22, and the transmission component 4 in the second state is used to control the disconnection between the first liquid conductor 21 and the second liquid conductor 22.

[0058] This embodiment of the invention, by combining the actuator 3 and the transmission component 4, enables the actuator 3 to be controlled by an externally preset stimulus signal, thereby indirectly controlling the transmission component 4, and further indirectly controlling the flow of the first liquid conductor 21 and the second liquid conductor 22 within the receiving tank 11. This allows control over the connection or physical disconnection of the first liquid conductor 21 and the second liquid conductor 22, controlling whether the first liquid conductor 21 and the second liquid conductor 22 are electrically connected or insulated, thus enabling the switching device to be turned on or off. Moreover, because the liquid conductor has fluidity, it can flow within the receiving tank 11, allowing for flexible arrangement of the receiving tank 11 in the substrate 1. Even if the substrate 1 deforms, the liquid conductor within the receiving tank will still deform accordingly, ensuring the stability of the switching device circuit.

[0059] Moreover, since the actuator 3 proposed in this embodiment uses liquid crystal elastic material, its structure is extremely simple, thus the space occupied by the actuator 3 is very small, thereby enabling the switching device to have a wider range of applications. For example, it can be used in devices such as microcircuits, soft robots, or smart wearable devices, which are difficult to apply to traditional rigid semiconductor devices. Furthermore, since the liquid crystal elastic material only responds to specific external stimulus signals and is not affected by other signals, the switching device can be used in environments with strong electromagnetic interference, radiation, or extreme humidity that are not suitable for traditional semiconductor chips.

[0060] Specifically, the material of actuator 3 may include liquid crystal elastomer (LCE). Liquid crystal elastomers can undergo reversible, large-amplitude macroscopic deformation under external stimuli. Specifically, when the intensity of the external stimulus signal received locally by the liquid crystal elastomer reaches the condition for a nematic-isotropic phase transition, the liquid crystal elastomer will undergo macroscopic contraction along its orientation direction (i.e., the extension length direction), which will lead to local bending or bulging deformation of the liquid crystal elastomer, thereby causing the transmission component 4 to undergo corresponding deformation or displacement.

[0061] Furthermore, by adjusting various properties such as the crosslinking density, liquid crystal type, and dopants in the chemical formulation of liquid crystal elastomer materials, the type of external stimulus signal that the liquid crystal elastomer responds to can be adjusted, and the variation parameters such as the amplitude of deformation of the liquid crystal elastomer in response to external stimulus signals can also be precisely adjusted.

[0062] In some embodiments, the preset stimulation signal includes at least one of preset temperature, preset level, preset light intensity, and preset magnetic field.

[0063] For example, if the preset stimulus signal is a preset light intensity, such as near-infrared light (NIR) of a specified intensity irradiating the surface of the liquid crystal elastomer, the liquid crystal elastomer can be a photoresponsive liquid crystal elastomer material. For example, the liquid crystal elastomer material may include a nematic liquid crystal monomer, a photothermal dye, a crosslinking agent, an initiator, and a solvent. The nematic liquid crystal monomer is, for example, RM257; the photothermal dye is, for example, tetraphenylporphyrin.

[0064] For example, if the preset stimulus signal is a preset temperature, such as a temperature field environment at a specified temperature, the liquid crystal elastomer can be a temperature-responsive liquid crystal elastomer material. For example, the liquid crystal elastomer material may include nematic liquid crystal monomers, a low concentration of thermosensitive agent, a crosslinking agent, an initiator, and a solvent; and, by adjusting the proportion of the thermosensitive agent, the nematic-isotropic phase transition temperature of the liquid crystal elastomer can be adjusted.

[0065] For example, if the preset stimulation mode is a preset level, such as a low-voltage DC electric field applied to the liquid crystal elastomer at a specified voltage, the liquid crystal elastomer can be an ion-exchange type liquid crystal elastomer, which contains mobile ions that migrate under the action of an external level, thereby creating an osmotic pressure difference between different regions inside the liquid crystal elastomer. This causes the liquid crystal molecules inside the liquid crystal elastomer to change orientation under the action of the osmotic pressure difference, thereby causing the liquid crystal elastomer as a whole to undergo rapid and reversible bending or stretching deformation.

[0066] In some embodiments, the material of the liquid conductor includes a gallium-containing alloy, i.e., the liquid conductor is a liquid metal. For example, a gallium-indium (GaIn) alloy has good fluidity and conductivity.

[0067] For example, the liquid conductor can be a eutectic gallium indium alloy (EGaIn).

[0068] For example, the mass ratio of gallium to indium in the liquid conductor of a eutectic gallium-indium alloy can range from 75:25 to 76:24.

[0069] In some embodiments, the substrate 1 is made of a flexible organic material, so that the substrate 1 is a flexible substrate, thereby enabling the switching device to be flexibly applied to a variety of different scenarios, such as flexible circuits.

[0070] For example, the matrix 1 material may include polydimethylsiloxane (PDMS), or polyethylene terephthalate or silicone rubber, etc.

[0071] For example, the thickness of substrate 1 is approximately 500 μm.

[0072] In some embodiments, the width of the interval 11C is 50μm to 500μm. Specifically, the width of the interval 11C is the distance between the boundary between the interval 11C and the first receiving area 11A and the boundary between the interval 11C and the second receiving area 11B. The width range proposed in this embodiment can ensure that the interval 11C is not too wide, so as to ensure that the first liquid conductor 21 and the second liquid conductor 22 can converge and contact when the actuator 3 drives the transmission component 4 to switch to the first state. The width range proposed in this embodiment can also ensure that the interval 11C is not too narrow, so as to avoid the first liquid conductor 21 and the second liquid conductor 22 from easily converging in one place, which would cause the switching device to conduct unexpectedly.

[0073] For example, such as Figure 4 and Figure 5As shown, the aforementioned receiving groove 11 includes at least two parallel and spaced-apart straight grooves and arc-shaped grooves; wherein, the two straight grooves may be located in the first receiving area 11A and the second receiving area 11B respectively; and, the first ends of the two straight grooves are connected through the arc-shaped grooves, and the arc-shaped grooves are located in the interval area 11C.

[0074] Or, such as Figure 7 As shown, the first end of one of the two straight grooves is connected to the second end of the other, and the connection point of the two straight grooves is located within the interval 11C.

[0075] For example, the width of the straight groove is about 200 μm, and the depth of the straight groove in the thickness direction of the substrate 1 is about 100 μm.

[0076] In some embodiments, such as Figures 3 to 7 As shown, the switching device also includes a first solid-state electrode 51 and a second solid-state electrode 52. The first solid-state electrode 51 is electrically connected to the first liquid conductor 21, and the second solid-state electrode 52 is electrically connected to the second liquid conductor 22. The first solid-state electrode 51 serves as one end of the switching device, and the second solid-state electrode 52 serves as the other end of the switching device.

[0077] For example, the materials of the first solid electrode 51 and the second solid electrode 52 may include one or an alloy of gold and chromium.

[0078] In some embodiments, such as Figure 1 and Figure 2 As shown, the transmission component 4 includes a flexible insulating layer 41. The flexible insulating layer 41 is configured as follows: Figure 2 As shown, in the first state, the first liquid conductor 21 and / or the second liquid conductor 22 are squeezed to cause them to converge in the spacer region 11C, thereby making them contact each other and electrically conductive; as Figure 1 As shown, in the second state, it is separated from the first liquid conductor 21 and the second liquid conductor 22, so that the first liquid conductor 21 and the second liquid conductor 22 are separated by the spacing region 11C. Specifically, when the actuator 3 presses the flexible insulating layer 41, the flexible insulating layer 41 switches to the first state, and when the actuator 3 does not apply pressure to the flexible insulating layer 41, the flexible insulating layer 41 switches to the second state.

[0079] For example, when the liquid crystal elastomer receives a preset stimulation signal, the liquid crystal elastomer partially contracts and protrudes towards the flexible insulating layer 41 to compress the flexible insulating layer 41, so that the flexible insulating layer 41 switches to the first state. When the flexible insulating layer 41 is in the first state, it squeezes the first liquid conductor 21 and / or the second liquid conductor 22 so that they come into contact with each other and are electrically connected in the spacer region 11C, thereby closing the switching device. After the preset stimulation signal on the liquid crystal elastomer is removed, the liquid crystal elastomer quickly relaxes and returns to its natural state, and no longer applies pressure to the flexible insulating layer 41, so that the flexible insulating layer 41 will rebound to the second state under its own elastic restoring force. The flexible insulating layer 41 no longer squeezes the first liquid conductor 21 and / or the second liquid conductor 22. The first liquid conductor 21 and / or the second liquid conductor 22 will return to the corresponding first receiving region 11A or second receiving region 11B under the action of its own liquid surface tension, so that the first liquid conductor 21 and the second liquid conductor 22 are electrically insulated, thereby opening the switching device.

[0080] For example, when the liquid crystal elastomer does not receive a preset stimulus signal, the shape of the liquid crystal elastomer can be designed to protrude towards the flexible insulating layer 41 in its natural state, so as to keep pressing the flexible insulating layer 41 in its natural state, thereby keeping the flexible insulating layer 41 pressing the first liquid conductor 21 and / or the second liquid conductor 22, so that the first liquid conductor 21 and the second liquid conductor 22 are in contact, thereby keeping the switching device on when it does not receive a preset stimulus signal; when the liquid crystal elastomer receives a preset stimulus signal, a part of the liquid crystal elastomer protrudes away from the flexible insulating layer 41, so as not to apply pressure to the flexible insulating layer 41, thereby switching the flexible insulating layer 41 to the second state, so that the flexible insulating layer 41 does not press the first liquid conductor 21 and / or the second liquid conductor 22, and the first liquid conductor 21 and / or the second liquid conductor 22 will return to the corresponding first receiving area 11A or second receiving area 11B under the action of their own liquid surface tension, so that the first liquid conductor 21 and the second liquid conductor 22 are electrically insulated, thereby turning off the switching device. In this case, the switching device can be used as a normally closed switch.

[0081] Based on this, in some specific implementations, such as Figure 8 As shown, the actuator 3 covers one of the first receiving area 11A and the second receiving area 11B, so that the flexible insulating layer 41 can squeeze the first liquid conductor 21 in the first receiving area 11A into the spacer area 11C and contact the second liquid conductor 22 in the first state, or squeeze the second liquid conductor 22 in the second receiving area 11B into the spacer area 11C and contact the first liquid conductor 21.

[0082] Or, in other specific implementations, such as Figures 4 to 7As shown, the flexible insulating layer 41 covers the first receiving area 11A and the second receiving area 11B, so that the flexible insulating layer 41 can squeeze the first liquid conductor 21 in the first receiving area 11A and the second liquid conductor 22 in the second receiving area 11B in the first state, so that the first liquid conductor 21 and the second liquid conductor 22 flow into the spacer area 11C and come into contact with each other.

[0083] For example, the flexible insulating layer 41 may also cover the first receiving area 11A, the second receiving area 11B and the spacer area 11C.

[0084] For example, the actuator 3 is in the form of a long strip of thin sheet.

[0085] For example, the actuator 3 can be attached to the surface of the flexible insulating layer 41 away from the substrate 1.

[0086] For example, the flexible insulating layer 41 material may include polydimethylsiloxane (PDMS).

[0087] For example, the thickness of the flexible insulating layer 41 can be 45μm to 55μm.

[0088] Furthermore, in some embodiments, the flexible insulating layer 41 is sealed to the substrate 1, and the connection position surrounds the receiving groove 11, so that the flexible insulating layer 41 and the receiving groove 11 together form a sealed receiving cavity to seal the first liquid conductor 21 and the second liquid conductor 22 inside, thereby enabling the switching device to be used in high humidity environments.

[0089] For example, the orthographic projection of the flexible insulating layer 41 in the substrate 1 covers the orthographic projection of the receiving groove 11 in the substrate 1, and the flexible insulating layer 41 is sealed to the edge region of the groove opening of the receiving groove 11.

[0090] For example, the flexible insulating layer 41 covers the entire surface of the substrate 1 and is sealed to the surface of the substrate 1 by adhesive bonding.

[0091] In some embodiments, such as Figure 3 and Figure 4As shown, the actuator 3 includes a plurality of actuating parts 31 spaced apart, each actuating part 31 having a natural state and a deformed state. A transmission member 4 is connected to the plurality of actuating parts 31, and the transmission member 4 is configured to switch to a first state when all actuating parts 31 are in the deformed state; and to switch to a second state when at least one actuating part is in the natural state. Thus, the flexible insulating layer 41 will only compress the first liquid conductor 21 and / or the second liquid conductor 22 to bring them into contact when all actuating parts 31 are in the deformed state; and when at least one actuating part 31 is in the natural state, the flexible insulating layer 41 cannot compress the first liquid conductor 21 and / or the second liquid conductor 22 to the position of contact. In this way, the switching device can be used as an AND gate logic switch or a NOT gate logic switch. Correspondingly, the multiple input terminals of the logic switch are multiple actuators 31. The output terminal of the logic switch is connected to one of the first liquid conductor 21 and the second liquid conductor 22, and the reference voltage terminal of the logic switch is connected to the other of the first liquid conductor 21 and the second liquid conductor 22, so as to output an electrical signal when electrically connected to the first liquid conductor 21 and the second liquid conductor 22, and the voltage of the electrical signal is the reference voltage.

[0092] Specifically, multiple actuators 31 can contact the flexible insulating layer 41, and the dimensions of the multiple actuators 31 can be designed such that only when the multiple actuators 31 are simultaneously deformed can the combined force of the pressure applied by the multiple actuators 31 cause the deformation of the flexible insulating layer 41 to be sufficient to compress the first liquid conductor 21 and / or the second liquid conductor 22 to a position of mutual contact. Alternatively, the elastic modulus of the flexible insulating layer 41 can be designed such that only when the multiple actuators 31 simultaneously apply pressure to the flexible insulating layer 41 can the flexible insulating layer 41 compress the first liquid conductor 21 and / or the second liquid conductor 22 to a position of mutual contact.

[0093] For example, such as Figure 3 As shown, the first receiving area 11A of the receiving tank 11 has a first sub-tank and a first liquid pool that are connected to each other. The first liquid pool is connected to the partition area 11C, and the width of the first liquid pool is greater than the width of the first sub-tank. The first liquid conductor 21 fills the first sub-tank and the first liquid pool. A flexible insulating layer 41 covers the first liquid pool, and a plurality of actuators 31 are disposed on and connected to the flexible insulating layer 41; or, as shown... Figure 9 As shown, multiple actuators 31 are connected to the flexible insulating layer 41 via multiple transmission links 42.

[0094] For example, such as Figure 9As shown, the receiving tank 11 also includes a third receiving area 11D, which is connected to the first sub-cavity in the first receiving area 11A; the third receiving area 11D is filled with a third liquid conductor 23, which is in contact with the first liquid conductor 21, and the third liquid conductor 23 is used for grounding; thus, the third liquid conductor 23 can be used as the grounding electrode of the switching device.

[0095] Taking the actuator 3, which includes a first actuating part 31 responsive to a temperature of 40°C and a second actuating part 31 responsive to a temperature of 60°C, as an example, when the first actuating part 31 is heated to 40°C or higher, but the temperature of the second actuating part 31 does not reach 60°C, the first actuating part 31 protrudes towards the flexible insulating layer 41 to press a portion of the flexible insulating layer 41, causing the flexible insulating layer 41 to tilt partially. However, this is insufficient to squeeze the first liquid conductor 21 in the receiving groove 11 below the flexible insulating layer 41 to the second liquid conductor 22, thereby causing the first liquid conductor 21 and the second liquid conductor 22 to... The two liquid conductors 22 will not conduct electricity; similarly, when the second actuator 31 is heated to 60°C or above, but the temperature of the first actuator 31 does not reach 40°C, the first liquid conductor 21 and the second liquid conductor 22 will not conduct electricity; and when the first actuator 31 is heated to 40°C or above, and the second actuator 31 is heated to 60°C or above, the first actuator 31 and the second actuator 31 simultaneously press the flexible insulating layer 41, and the flexible insulating layer 41 can squeeze the first liquid conductor 21 to a position where it contacts the second liquid conductor 22.

[0096] Furthermore, in some embodiments, such as Figure 9 As shown, the transmission component 4 also includes a transmission link 42; the transmission link 42 is located on the side of the flexible insulating layer 41 away from the substrate 1; the flexible insulating layer 41 and the actuator 3 are connected by the transmission link 42 so that the relative position between the actuator 3 and the flexible insulating layer 41 can be flexibly set.

[0097] It should be noted that this disclosure does not impose too many restrictions on the structure of the transmission link 42, which can be a rigid link or a flexible hinge, etc.

[0098] For example, the transmission link 42 can be made of a flexible organic material.

[0099] Alternatively, in some embodiments, where the actuator 3 includes a plurality of actuating parts 31 spaced apart, the transmission member 4 can also be configured to: switch to a first state when any actuating part 31 is in a deformed state; and switch to a second state when all actuating parts are in a relaxed state. Thus, as long as at least one actuating part 31 is in a deformed state, the flexible insulating layer 41 can compress the first liquid conductor 21 and / or the second liquid conductor 22 to make them flow to a position where they come into contact; and only when all actuating parts 31 are in a relaxed state can the flexible insulating layer 41 prevent the first liquid conductor 21 and / or the second liquid conductor 22 from being compressed to a position where they come into contact. In this way, the switching device can be used as an OR gate logic switch. Accordingly, the multiple input terminals of the logic switch are multiple actuators 31. The output terminal of the logic switch is connected to one of the first liquid conductor 21 and the second liquid conductor 22. The reference voltage terminal of the logic switch is connected to the other of the first liquid conductor 21 and the second liquid conductor 22 to output an electrical signal when electrically connected to the first liquid conductor 21 and the second liquid conductor 22. The voltage of the electrical signal is the reference voltage.

[0100] Unlike the cases where the transmission component 4 is a flexible insulating layer 41 as described in the aforementioned embodiments, this disclosure also provides other design schemes for the transmission component 4. Specifically, in some embodiments, such as... Figures 10 to 14 As shown, the transmission component 4 is made of conductive material; when the transmission component 4 is in the first state, it is in contact with the first liquid conductor 21 and the second liquid conductor 22; when the transmission component 4 is in the second state, it is separated from at least one of the first liquid conductor 21 and the second liquid conductor 22.

[0101] The conductive transmission element 4 proposed in this embodiment can switch between a first state and a second state by displacement. Specifically, the transmission element 4 is disposed facing the opening of the receiving groove 11; when the transmission element 4 is in the first state, the transmission element 4 can move into the receiving groove 11 to contact the first liquid conductor 21 and the second liquid conductor 22, thereby conducting electricity between the two; when the transmission element 4 is in the second state, the transmission element 4 moves out of the receiving groove 11 to move away from the first liquid conductor 21 and the second liquid conductor 22.

[0102] Furthermore, in some embodiments, such as Figure 10 and Figure 11As shown, the actuator 3 includes an elastic arm 32, which has a fixed end fixed to the base 1 and a free end spaced apart from the base 1. The transmission member 4 is connected to the elastic arm 32. The elastic arm 32 is configured to bend towards the base 1 in response to a preset stimulation signal, thereby moving the transmission member 4 into the receiving groove 11, i.e., switching to the first state; the elastic arm 32 is also configured to return to its natural state in response to the absence of a preset stimulation signal, thereby moving the transmission member 4 out of the receiving groove 11, i.e., switching to the second state. The elastic arm 32 proposed in this embodiment has a simple structure and is easy to fix to the base 1.

[0103] For example, the fixed end and the free end of the elastic arm 32 can be located at opposite ends of the elastic arm 32 to form a single cantilever structure.

[0104] For example, the fixed ends of the elastic arm 32 can be the two opposite ends of the elastic arm 32, and the free ends of the elastic arm 32 can be located between the two ends of the elastic arm 32 to form an arched structure.

[0105] Alternatively, in some embodiments, such as Figures 12 to 14 As shown, the actuator 3 includes multiple elastic arms 32. Each elastic arm 32 has a fixed end fixed to the base 1 and a free end spaced apart from the base 1. The multiple elastic arms 32 are arranged crosswise and connected to each other at designated intersection positions between their respective fixed ends and free ends to form an arched structure. The transmission member 4 is connected to the designated intersection position for transmission.

[0106] The elastic arm 32 is configured to bend toward the substrate 1 in response to a preset stimulation signal, and the transmission member 4 is configured to switch to a first state when all elastic arms are bent toward the substrate 1, and to switch to a second state when at least one elastic arm 32 is in a natural state. Specifically, as shown in... Figure 13 As shown, when all elastic arms 32 are in a deformed state, the conductive transmission element 4 can move into the receiving groove 11; and as Figure 14 As shown, when at least one of the multiple elastic arms 32 is in its natural state, uneven force distribution causes the cross position to shift and the travel of the transmission member 4 to be insufficient. This leads to the transmission member 4 deviating from the opening of the receiving groove 11, preventing it from entering the receiving groove 11 and thus preventing the connection of the first liquid conductor 21 and the second liquid conductor 22. The switching device proposed in this embodiment can be used as an AND gate logic switch or a NOT gate logic switch.

[0107] For example, the elastic arm 32 can be an electrically responsive liquid crystal elastomer. And, as... Figure 15As shown, the surface of the substrate 1 also has at least one third solid electrode 53 corresponding to the elastic arm 32. The third solid electrode 53 is in contact with and electrically connected to the fixed end of the corresponding elastic arm 32. Moreover, the external triggering device can be a trigger power supply. One end of the trigger power supply can be electrically connected to the elastic arm 32 through the third solid electrode 53, and the other end of the trigger power supply can be in contact with and electrically connected to the free end of the elastic arm 32 or the main body structure of the elastic arm 32 through a conductive structure, so that the electrical signal emitted by the trigger power supply can be applied to the elastic arm 32.

[0108] For example, the third solid electrode 53 may be made of a transparent conductive material.

[0109] For example, when the actuator 3 includes at least one elastic arm 32, the switching device may also include an encapsulation film covering the side of the elastic arm 32 away from the substrate 1 and the surface of the substrate 1 not covered by the elastic arm 32; the encapsulation film and the surface of the substrate 1 may together form a sealed space to protect the elastic arm 32 inside and prevent the opening of the spacer 11C from being exposed to the external environment.

[0110] This disclosure also proposes a fabrication process for a switching device:

[0111] S01: Prepare substrate 1 and open receiving groove 11 on the surface of substrate 1;

[0112] S02: Inject liquid metal into the channels of the receiving tank 11, excluding the interval zone 11C;

[0113] S03: Coating the surface of substrate 1 with a flexible insulating material:

[0114] Specifically, in step S03, a spin coating method can be used to coat the flexible insulating material;

[0115] S04: Preparation of liquid crystal elastomer;

[0116] Specifically, the steps for preparing a liquid crystal elastomer include: selecting a corresponding response type according to a preset stimulus signal and configuring a corresponding liquid crystal elastomer material, wherein the liquid crystal elastomer material includes liquid crystal monomers and additives corresponding to the response stimulus signal type; coating the liquid crystal elastomer material onto a mold of a preset shape, wherein the shape of the mold corresponds to the orientation of the liquid crystal elastomer; curing the liquid crystal elastomer material, peeling off the cured liquid crystal elastomer material, and then cutting it into strips to obtain a liquid crystal elastomer;

[0117] S05: Attach the liquid crystal elastomer to the surface of the substrate 1; wherein the liquid crystal elastomer may cover the first accommodating region 11A, or cover the second accommodating region 11B, or cover the first accommodating region 11A, the second accommodating region 11B, and the spacer region 11C.

[0118] Specifically, the step of attaching the liquid crystal elastomer to the surface of the substrate 1 may include: attaching the liquid crystal elastomer to the uncured portion of the flexible insulating material; and then performing secondary curing on the bonding area between the liquid crystal elastomer and the flexible insulating material to ensure a tight bond between the liquid crystal elastomer and the flexible insulating material.

[0119] This disclosure also proposes another fabrication process for the switching device:

[0120] S001: Prepare a substrate 1, and open a receiving groove 11 on the surface of the substrate 1, and form a plurality of third solid electrodes 53 in the substrate 1; wherein, the opening of the spacer region 11C in the receiving groove 11 is formed on the surface of the substrate 1; the plurality of third solid electrodes 53 are spaced apart from the receiving groove 11 to avoid the third solid electrodes 53 from communicating with the conductor in the receiving groove 11.

[0121] S002: Inject liquid metal into the channel of the receiving tank 11, excluding the interval zone 11C;

[0122] S003: Prepare multiple elastic arms 32;

[0123] Specifically, the steps for preparing each elastic arm 32 include: selecting a corresponding response type according to a preset stimulus signal and configuring a corresponding liquid crystal elastomer material, wherein the liquid crystal elastomer material includes liquid crystal monomers and additives corresponding to the response stimulus signal type; coating the liquid crystal elastomer material onto a mold of a preset shape, wherein the shape of the mold corresponds to the orientation of the liquid crystal elastomer; curing the liquid crystal elastomer material, peeling off the cured liquid crystal elastomer material, and then cutting it into strips to obtain the elastic arm 32;

[0124] S004: Multiple elastic arms 32 are cross-assembled to form an arch structure;

[0125] S005: Prepare a conductive block and connect the conductive block to a plurality of elastic arms 32; wherein the conductive block is connected to the cross positions of the plurality of elastic arms 32.

[0126] S006: A plurality of elastic arms 32 connected to conductive blocks are mounted on the base 1; wherein, after installation, the conductive blocks are positioned facing the opening of the interval region 11C, and the plurality of elastic arms 32 are fixedly connected to the base 1, and each elastic arm 32 is electrically connected to a third solid electrode 53.

[0127] For example, in addition to S01 and S001, the receiving groove 11 can be formed on the surface of the substrate 1 by laser engraving or photolithography.

[0128] It is understood that the various preparation method embodiments mentioned above in this invention can be combined with each other to form combined embodiments without violating the underlying principles and logic. Due to space limitations, these will not be elaborated upon further in this invention. Those skilled in the art will understand that the specific execution order of each step in the above preparation method of the specific embodiments should be determined based on its function and possible internal logic.

[0129] As another technical solution, this disclosure also provides an electronic device, which includes at least one switching device as described above, and a triggering device; the triggering device is used to apply a preset stimulation signal to the actuator 3 in the switching device.

[0130] Specifically, the type of preset stimulus signal emitted by the triggering device corresponds to the type of response signal of the liquid crystal elastomer material in the switching device; for example, if the liquid crystal elastomer material is a photoresponsive liquid crystal elastomer material, then the triggering device can be an infrared light source.

[0131] Specifically, the aforementioned electronic devices can be various types of electronic devices such as embedded controllers for soft robots, wearable intelligent interactive controllers, and reconfigurable radio frequency circuits.

[0132] This document has described exemplary embodiments, and while specific terminology has been used, it is intended and should be interpreted only in a general illustrative sense and is not intended to be limiting. In some instances, it will be apparent to those skilled in the art that features, characteristics, and / or elements described in conjunction with particular embodiments may be used alone, or in combination with features, characteristics, and / or elements described in conjunction with other embodiments, unless otherwise expressly indicated. Therefore, those skilled in the art will understand that various changes in form and detail may be made without departing from the scope of the invention as set forth in the appended claims.

Claims

1. A switching device, characterized in that, include: The substrate has a receiving groove, the receiving groove including a first receiving area, a second receiving area and a spacer area located between the first receiving area and the second receiving area; A first liquid conductor is disposed in the first containing area, and a second liquid conductor is disposed in the second containing area; An actuator is disposed opposite to the receiving groove and configured to switch from a natural state to a deformed state in response to a preset stimulus signal; the actuator material includes a liquid crystal elastic material. A transmission element, connected to the actuator, is configured to switch between a second state and a first state as the actuator switches between the natural state and the deformed state; wherein, in the first state, the transmission element controls the electrical connection between the first liquid conductor and the second liquid conductor, and in the second state, the transmission element controls the disconnection between the first liquid conductor and the second liquid conductor.

2. The switching device according to claim 1, characterized in that, The transmission component includes a flexible insulating layer configured to, in a first state, compress the first liquid conductor and / or the second liquid conductor to bring them into contact with each other in the spacer region; and in a second state, separate from the first liquid conductor and the second liquid conductor to separate the first liquid conductor and the second liquid conductor from each other by the spacer region.

3. The switching device according to claim 2, characterized in that, The flexible insulating layer is sealed to the substrate, and the connection position surrounds the receiving groove.

4. The switching device according to claim 2, characterized in that, The transmission component further includes a transmission link, which is located on the side of the flexible insulating layer away from the substrate; The flexible insulating layer and the actuator are connected by the transmission link.

5. The switching device according to claim 2, characterized in that, The actuator includes a plurality of actuating parts spaced apart, each actuating part having the natural state and the deformed state; The transmission member is connected to the plurality of actuating parts and is configured to switch to the first state when all the actuating parts are in the deformed state; The system switches to the second state when at least one of the actuators is in the natural state.

6. The switching device according to claim 1, characterized in that, The transmission component is made of a conductive material; when the transmission component is in the first state, it is in contact with the first liquid conductor and the second liquid conductor; when the transmission component is in the second state, it is separated from at least one of the first liquid conductor and the second liquid conductor.

7. The switching device according to claim 6, characterized in that, The actuator includes: An elastic arm has a fixed end fixed to the base and a free end spaced apart from the base; the transmission member is connected to the elastic arm in a transmission manner. The elastic arm is configured to bend toward the substrate in response to the preset stimulation signal, thereby driving the transmission member to switch to the first state; the elastic arm is also configured to return to its natural state in response to not receiving the preset stimulation signal, thereby driving the transmission member to switch to the second state.

8. The switching device according to claim 6, characterized in that, The actuator includes: Multiple elastic arms, each elastic arm having a fixed end fixed to the base and a free end spaced apart from the base, the multiple elastic arms being arranged crosswise and connected to each other at a designated intersection position between their respective fixed ends and free ends; the transmission member is connected to the designated intersection position; The elastic arm is configured to bend toward the substrate in response to the preset stimulation signal, and the transmission member is configured to switch to the first state when all the elastic arms are bent toward the substrate; and to switch to the second state when at least one of the elastic arms is in a natural state.

9. The switching device according to any one of claims 1 to 8, characterized in that, Also includes: The first solid electrode is electrically connected to the first liquid conductor; The second solid electrode is electrically connected to the second liquid conductor.

10. The switching device according to any one of claims 1 to 8, characterized in that, The preset stimulation signal includes at least one of preset temperature, preset level, preset light intensity, and preset magnetic field.

11. The switching device according to any one of claims 1 to 8, characterized in that, The liquid conductor is made of a gallium-containing alloy.

12. The switching device according to any one of claims 1 to 8, characterized in that, The width of the interval is 50μm to 500μm.

13. The switching device according to any one of claims 1 to 8, characterized in that, The substrate is made of a flexible material.

14. An electronic device, characterized in that, include: At least one switching device as described in any one of claims 1-13; as well as A triggering device is used to apply a preset stimulation signal to the actuator in the switching device.

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