An ultrasonic atomization precise and uniform humidifying device and method for perovskite cell annealing

Abstract

The present application relates to the technical field of perovskite battery preparation, and discloses an ultrasonic atomization precise and uniform humidifying device and method for perovskite battery annealing, which comprises an annealing furnace body, an ultrasonic atomization assembly, a humidity control assembly, an airflow uniform distribution assembly and a control unit. The annealing furnace body is internally provided with an annealing cavity, and the ultrasonic atomization assembly is in communication with the annealing cavity. An airflow channel is arranged in the annealing cavity, the airflow uniform distribution assembly is arranged on the airflow channel of the annealing cavity, the detection end of the humidity control assembly extends into the interior of the annealing cavity, and the control unit is electrically connected with the ultrasonic atomization assembly, the humidity control assembly and the annealing furnace body. The present application generates micron-level uniform water mist through the integrated ultrasonic atomization assembly, solves the problem that the oversize water mist particle size is easy to pollute the cavity and damage the film, the humidity control assembly extends into the interior of the annealing cavity to realize real-time monitoring of the humidity, and the control unit is combined to close-loop regulate the water mist amount, thereby solving the problems of low humidity control precision, easy film cracking and insufficient crystallization.

Description

Technical Field

[0001] This invention relates to the field of perovskite battery manufacturing technology, specifically to an ultrasonic atomization precise and uniform humidification device and method for annealing perovskite batteries. Background Technology

[0002] Annealing is a core step in the fabrication of perovskite solar cells, and a precise and uniform humidification environment is crucial for controlling the crystallization quality and defect density of the thin film. However, traditional annealing humidification methods have significant drawbacks: low humidity control precision (deviation ≥1%RH), which can easily lead to film cracking or insufficient crystallization; large humidity differences in different areas of the furnace (≥5%RH), resulting in uneven crystal grain size and dense local defects, which impairs cell efficiency and consistency; large water mist particle size (≥10μm), which easily condenses into water droplets on the film surface and contaminates the furnace environment; and the lack of coordinated control of humidity and temperature, with temperature fluctuations exacerbating crystallization inhomogeneity.

[0003] To address the aforementioned issues, existing improvement solutions are mostly limited to humidity monitoring and alarm systems or spray nozzle structure optimization, failing to solve the core challenges of precise humidity control and uniform spatial distribution. Existing solutions lack multi-point sensing layouts and closed-loop feedback architectures, making it impossible to detect and dynamically compensate for humidity differences within the chamber in real time. Furthermore, water mist generation still primarily relies on airflow carrying or pressure atomization, resulting in poor droplet size controllability. In addition, these improvement measures suffer from insufficient compatibility with existing mass-produced annealing equipment, leading to high modification costs and significant implementation difficulties. Summary of the Invention

[0004] To address existing problems, this invention provides a precise and uniform ultrasonic atomization humidification device and method for perovskite solar cell annealing. By integrating an ultrasonic atomization component to generate micron-level uniform water mist, it solves the problem of excessively large water mist particles that easily contaminate the cavity and damage the film. The humidity control component's detection end extends into the annealing chamber to monitor humidity in real time, and combined with a control unit to adjust the water mist volume in a closed loop, it solves the problems of low humidity control accuracy and the risk of film cracking or insufficient crystallization. By setting up an airflow distribution component to optimize the airflow path within the chamber, and coordinating with the control unit to regulate water mist and temperature, it improves humidification uniformity and achieves stable temperature and humidity coupling, thereby effectively improving the crystallization quality and batch consistency of the perovskite film.

[0005] To achieve the above objectives, the present invention provides the following technical solution.

[0006] This invention provides an ultrasonic atomization precision and uniform humidification device for annealing perovskite solar cells, comprising an annealing furnace body, an ultrasonic atomization component, a humidity control component, an airflow distribution component, and a control unit. The annealing furnace body has an annealing chamber inside, and the ultrasonic atomization component is connected to the annealing chamber. An airflow channel is provided inside the annealing chamber, and the airflow distribution component is disposed on the airflow channel. The detection end of the humidity control component extends into the annealing chamber. The control unit is electrically connected to the ultrasonic atomization component, the humidity control component, and the annealing furnace body, respectively, and is used to control the water mist and temperature within the annealing chamber.

[0007] As a further improvement of the present invention, the top and bottom of the annealing furnace body are respectively provided with an air inlet and an air outlet, and the air inlet and the air outlet are located at both ends of the airflow channel. A heating platform is provided between the air inlet and the air outlet, and a perovskite battery can be placed on the heating platform.

[0008] As a further improvement of the present invention, the ultrasonic atomization assembly includes an ultrasonic atomizer, an atomization delivery pipe and a deionized water storage tank. One end of the ultrasonic atomizer is connected to the air inlet through the atomization delivery pipe, and the other end is connected to the deionized water storage tank through the atomization delivery pipe. The ultrasonic atomizer includes a high-frequency piezoelectric ceramic atomizing plate and an atomizing filter.

[0009] As a further improvement of the present invention, the atomization frequency of the high-frequency piezoelectric ceramic atomizing sheet is 1.7-2.4MHz, which can produce uniform water mist with a particle size of 1-5μm.

[0010] As a further improvement of the present invention, the ultrasonic atomizing component further includes the atomizing filter element, which is a polytetrafluoroethylene microporous filter membrane with a pore size of 0.22-0.45 μm.

[0011] As a further improvement of the present invention, the humidity control component includes at least three sets of high-precision humidity sensors and a humidity regulating valve; the high-precision humidity sensors are evenly distributed at the top, middle and bottom of the annealing chamber, with a measurement accuracy of ±0.1%RH and a measurement range of 10-90%RH; the humidity regulating valve is installed on the atomizing delivery pipe; the humidity regulating valve is electrically connected to the control unit, and the control unit realizes closed-loop humidity control by adjusting the atomizing gas flow rate.

[0012] As a further improvement of the present invention, the humidity control component further includes a drying air path, which is connected in parallel with the atomizing delivery pipe, and a dryness regulating valve is provided on the drying air path; the dryness regulating valve is electrically connected to the control unit, and the control unit realizes closed-loop humidity control by adjusting the atomizing air flow rate and the drying air flow rate.

[0013] As a further improvement of the present invention, the airflow distribution component includes a honeycomb structure flow distribution plate and a flow guide fan; the honeycomb structure flow distribution plate is disposed between the air inlet and the heating platform; the flow guide fan is disposed inside the air outlet.

[0014] This invention also discloses a method for precise and uniform humidification using ultrasonic atomization for annealing perovskite solar cells. Based on the aforementioned device for precise and uniform humidification using ultrasonic atomization for annealing perovskite solar cells, the method includes the following steps: S1. Equipment pretreatment: Check the working status of the ultrasonic atomization component, humidity control component and airflow distribution component, and set the annealing temperature curve and humidification process curve. S2. Furnace preheating: Start the annealing furnace and heat it according to the preset annealing temperature curve, while keeping the airflow inside the annealing chamber in a stable circulation state. S3, Precise Humidification: When the temperature of the annealing furnace body reaches the preset value, the ultrasonic atomization component is activated to generate 1-5μm water mist, which enters the annealing chamber; the humidity control component detects the humidity at different locations in the annealing chamber in real time and transmits the data to the control unit, which stabilizes the humidity of the annealing chamber within the target value ±0.1%RH range. S4. Annealing and Humidification: The perovskite solar cell substrate is placed into the annealing chamber and the temperature and humidity are kept stable according to the preset annealing temperature curve and humidification process curve to complete the annealing and crystallization process of the perovskite film. S5. Process completion: After annealing, first turn off the ultrasonic atomization component, reduce the humidity of the annealing chamber to 10-20%RH, then turn off the annealing furnace and remove the perovskite solar cell substrate.

[0015] As a further improvement of the present invention, the following steps are included: In step S3, when the humidity deviation at a certain position in the annealing chamber exceeds 0.2%RH, the control unit automatically adjusts the atomization amount to achieve humidification and dehumidification.

[0016] Compared with the prior art, the present invention has the following beneficial effects: This device integrates ultrasonic atomization, humidity detection, airflow uniformity, and intelligent control to construct a closed-loop system that actively regulates the humidity within the annealing chamber, solving the core problem of uncontrollable or uneven humidity distribution in traditional annealing. The device achieves precise control and uniform humidity distribution during the annealing process, providing a stable humidity environment for perovskite thin film crystallization. This directly contributes to improving the performance consistency and production yield of perovskite solar cells.

[0017] Preferably, by setting air inlets and outlets at the top and bottom of the annealing chamber, and placing a heating stage between them, a unidirectional flow path is created for the moisture to flow from top to bottom and across the surface of the battery substrate. This structure ensures that the airflow carrying water mist can be directed and fully sweep across the surface of the perovskite battery. This significantly improves the uniformity and efficiency of humidification and avoids humidity dead zones within the chamber.

[0018] Preferably, an ultrasonic atomizer with a high-frequency piezoelectric ceramic plate is used, along with a deionized water source and a dedicated delivery pipe, to produce a fine and pure water mist, ensuring the quality of the humidifying medium from the source. This component can efficiently generate fine and pure water mist, effectively preventing impurities from contaminating the perovskite film. This lays an important foundation for obtaining a high-quality crystalline layer.

[0019] Preferably, the atomization frequency is 1.7-2.4MHz, corresponding to the generation of uniform water mist of 1-5μm. The micron-sized water mist generated at this frequency has the required suspension and diffusion properties, and can form a stable mist environment in the chamber. This ensures rapid humidity response and highly uniform distribution.

[0020] Preferably, a polytetrafluoroethylene microporous filter membrane with a pore size of 0.22-0.45 μm can effectively intercept extremely small particulate matter in the water, ensuring that the water mist entering the annealing chamber is absolutely pure. This fundamentally eliminates the risk of pinholes or defects in the perovskite film caused by particulate contamination.

[0021] Preferably, by deploying at least three sets of high-precision humidity sensors at different positions in the upper, middle, and lower parts of the annealing chamber, comprehensive three-dimensional monitoring of the humidity distribution within the chamber is achieved. Combined with a humidity regulating valve installed on the atomizing delivery pipe, this forms a basic architecture for closed-loop humidity control based on multi-point feedback. This solution can accurately sense humidity differences in different areas within the chamber and compensate for these differences by adjusting the atomization volume and increasing the gas delivery rate, thus eliminating humidity unevenness. This significantly improves the spatial consistency of humidity throughout the annealing chamber, creating crucial conditions for the uniform crystallization of perovskite films.

[0022] Preferably, a drying gas path connected in parallel with the atomizing delivery pipe and its independently controlled dryness regulating valve are added, enabling the control system to simultaneously possess both humidification and dehumidification active regulation methods. This design achieves bidirectional and precise regulation of the chamber humidity, not only enabling rapid humidification but also quickly introducing drying gas to intervene when humidity exceeds the standard. This enhances the system's ability to cope with humidity fluctuations and its response speed, ensuring high humidity stability during the annealing process. Preferably, by installing a honeycomb-shaped flow equalization plate between the air inlet and the heating platform, and a guide fan at the air outlet, the airflow pattern within the chamber is optimized and controlled from both the inlet rectification and outlet guidance aspects. The honeycomb flow equalization plate cuts and disperses the atomized airflow into uniform fine airflows, while the guide fan at the air outlet provides stable suction, guiding the airflow neatly across the surface of the battery substrate. The combined effect of these two components effectively eliminates airflow eddies and deposition, ensuring a highly uniform distribution of humidity and temperature throughout the annealing area.

[0023] This humidification method discloses a complete humidification annealing process from equipment pretreatment to process completion. The key lies in the precise humidification steps after preheating and before annealing, as well as the dehumidification treatment after completion. This method provides a standardized and automated operating procedure to ensure that precise humidification annealing can be stably achieved in different batches of production.

[0024] Preferably, an automatic adjustment threshold is set when the humidity deviation exceeds 0.2%RH, clarifying the active intervention mechanism of the control system. This allows for immediate correction of any minute humidity fluctuations within the chamber, preventing excessively high or low local humidity from affecting crystallization quality. This further enhances the process's fault tolerance and the photoelectric performance of the final product. Attached Figure Description

[0025] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of the invention in any way. Furthermore, the shapes and proportions of the components in the drawings are merely schematic to aid in understanding the invention and are not intended to specifically limit the shapes and proportions of the components. In the drawings: Figure 1 This is a schematic diagram of an ultrasonic atomization precise and uniform humidification device for annealing perovskite batteries in Example 1; Figure 2 This is a flowchart of a method for precise and uniform humidification using ultrasonic atomization for annealing perovskite solar cells, as described in Example 2.

[0026] Among them, 1. Ultrasonic atomization component; 11. Ultrasonic atomizer; 12. Atomization delivery pipe; 13. Deionized water storage tank; 2. Humidity control component; 3. Control unit; 4. Annealing furnace body; 5. Annealing chamber; 6. Air inlet; 7. Air outlet; 8. Heating table; 9. Honeycomb structure flow equalization plate. Detailed Implementation

[0027] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0028] It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0030] Example 1 like Figure 1 As shown, this embodiment provides an ultrasonic atomization precision and uniform humidification device for perovskite battery annealing, including an annealing furnace body 4, an ultrasonic atomization component 1, a humidity control component 2, an airflow distribution component, and a control unit 3. The control unit 3 is electrically connected to the ultrasonic atomization component 1, the humidity control component 2, and the annealing furnace body 4, and is used to control the water mist and temperature in the annealing chamber 5.

[0031] The annealing furnace body 4 is equipped with an annealing chamber 5 for placing perovskite solar cell substrates. It features a temperature control module capable of ±1℃ temperature control within a range of 80-200℃, linked to humidity control to meet the annealing requirements of different perovskite films. The annealing chamber 5 has a double-layer insulation structure, with the inner wall coated with a high-temperature resistant and corrosion-resistant coating to effectively reduce heat loss and prevent moisture corrosion. The annealing furnace body 4 is equipped with a temperature control module that links with the control unit 3 to achieve coordinated temperature and humidity control. The ultrasonic atomizing component 1 is connected to the annealing chamber 5. The top and bottom of the annealing furnace body 4 are respectively equipped with an air inlet 6 and an air outlet 7, located at opposite ends of the airflow channel. A heating platform 8 is positioned between the air inlet 6 and the air outlet 7, on which perovskite solar cells can be placed.

[0032] The ultrasonic atomizing assembly 1, used to generate water mist, includes an ultrasonic atomizer 11, an atomization delivery pipe 12, and a deionized water storage tank 13. One end of the ultrasonic atomizer 11 is connected to the air inlet 6 through the atomization delivery pipe 12, and the other end is connected to the deionized water storage tank 13 through the atomization delivery pipe 12. The ultrasonic atomizer 11 includes a high-frequency piezoelectric ceramic atomizing plate and an atomizing filter. A sealing gasket is provided at the connection end between the ultrasonic atomizer 11 and the annealing chamber 5 to prevent moisture leakage. The deionized water storage tank 13 is equipped with a liquid level sensor to monitor the liquid level in real time. When water is insufficient, an alarm is automatically triggered and liquid replenishment is initiated to ensure process continuity.

[0033] The high-frequency piezoelectric ceramic atomizing sheet has an atomization frequency of 1.7-2.4MHz, which can produce uniform water mist with a particle size of 1-5μm, avoiding damage to the film by large-diameter water droplets.

[0034] The ultrasonic atomizing component 1 also includes an atomizing filter element, which is a polytetrafluoroethylene microporous filter membrane with a pore size of 0.22-0.45μm. This filter element filters impurities and large particles in the water mist, ensuring the cleanliness of the humidified environment.

[0035] The detection end of the humidity control component 2 extends into the annealing chamber 5. The humidity control component 2 includes at least three sets of high-precision humidity sensors, a humidity regulating valve, and a drying gas path. The high-precision humidity sensors are evenly distributed at the top, middle, and bottom of the annealing chamber 5, with a measurement accuracy of ±0.1%RH and a measurement range of 10-90%RH. The humidity regulating valve is located on the atomizing delivery pipe 12, and the drying gas path is connected in parallel with the atomizing delivery pipe 12. A dryness regulating valve is installed on the drying gas path, and both the humidity regulating valve and the dryness regulating valve are used to regulate the water mist delivery volume. The drying gas path can be circulated with dry nitrogen or inert gas. When the humidity inside the furnace is too high, the moisture is diluted by the drying gas, achieving precise closed-loop humidity control and ensuring that the humidity remains stable within the target value range of ±0.1%RH. Both the humidity regulating valve and the dryness regulating valve are electrically connected to the control unit 3. The control unit 3 achieves closed-loop humidity control by adjusting the atomizing gas flow rate and the drying gas flow rate.

[0036] An airflow channel is provided inside the annealing chamber 5 to introduce water mist or gas. An airflow distribution assembly is installed on the airflow channel, comprising a honeycomb-structured flow equalization plate 9 and a guide fan. The honeycomb-structured flow equalization plate 9 is located between the air inlet 6 and the heating platform 8. The honeycomb-structured flow equalization plate 9 has a honeycomb structure with a pore size of 5-10 mm and is coated with an anti-fog coating to prevent water mist adhesion and blockage. The guide fan is located inside the air outlet 7 and is a low-noise centrifugal fan that generates a stable airflow. When a humidity sensor detects insufficient local humidity, such as insufficient humidity in the middle area of ​​the annealing chamber 5, the control unit 3 can increase the flow rate of the guide fan and simultaneously adjust the humidity regulating valve and the dryness regulating valve to increase the water mist delivery volume.

[0037] The control unit 3 includes a PLC controller, an HMI touch screen, and a data storage module; the PLC controller integrates a linkage control algorithm for humidity, temperature, and atomization amount, and can preset multiple annealing and humidification process curves; the HMI touch screen supports process parameter settings, real-time data display, and fault alarms; the data storage module can store at least 100 sets of process data, which is convenient for traceability and optimization.

[0038] Example 2 like Figure 2 As shown, this embodiment also provides a precise and uniform humidification method using ultrasonic atomization for annealing perovskite solar cells, including the following steps: S1. Equipment pretreatment: Check the working status of ultrasonic atomization component 1, humidity control component 2 and airflow distribution component, inject deionized water that meets the requirements into deionized water storage tank 13, and set annealing temperature, target humidity and humidification process curve. S2. Furnace preheating: Start the annealing furnace 4 and heat it according to the preset temperature curve. At the same time, start the guide fan to keep the airflow inside the annealing chamber 5 in a stable circulation state. S3, Precise Humidification: When the temperature of the annealing furnace body 4 reaches the preset value, the ultrasonic atomizing component 1 is activated to generate 1-5μm water mist. The water mist is filtered by the atomizing filter and enters the airflow distribution chamber. After being evenly distributed by the flow equalization plate, it is sent into the annealing chamber 5. The humidity sensor detects the humidity at different positions in the annealing chamber 5 in real time and transmits the data to the control unit 3. The PLC controller adjusts the opening of the humidity regulating valve and the flow rate of the drying air path according to the detection data to keep the humidity of the annealing chamber 5 stable within the target value ±0.1%RH range. S4. Annealing and Humidification: The perovskite solar cell substrate is sent into the annealing chamber 5. According to the preset annealing and humidification process curve, the temperature and humidity are kept stable to complete the annealing and crystallization process of the perovskite film. The humidification uniformity is ≤±2%RH. S5. Process completion: After annealing, first turn off the ultrasonic atomizing component 1, continue to introduce the drying airflow to reduce the humidity of the annealing chamber 5 to 10-20%RH, then turn off the annealing furnace body 4 and the guide fan, and take out the perovskite battery substrate.

[0039] Furthermore, in step S3, when the humidity deviation at a certain position of the annealing chamber 5 exceeds 0.2%RH, the control unit 3 automatically adjusts the atomization amount to achieve humidification and dehumidification.

[0040] Furthermore, in step S3, the water mist delivery speed of the ultrasonic atomizer 11 is 0.5-1.2 m / s.

[0041] Furthermore, in step S4, the annealing and humidification time is 10-60 min, which is dynamically adjusted according to the thickness of the perovskite film.

[0042] The above embodiments are merely one of the implementation methods for achieving the technical solution of the present invention. The scope of protection claimed by the present invention is not limited to this embodiment, but also includes any variations, substitutions and other implementation methods that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention.

Claims

1. An ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells, characterized in that, The system includes an annealing furnace body (4), an ultrasonic atomizing component (1), a humidity control component (2), an airflow distribution component, and a control unit (3). The annealing furnace body (4) has an annealing chamber (5) inside, and the ultrasonic atomizing component (1) is connected to the annealing chamber (5). An airflow channel is provided inside the annealing chamber (5), and the airflow distribution component is set on the airflow channel. The detection end of the humidity control component (2) extends into the annealing chamber (5). The control unit (3) is electrically connected to the ultrasonic atomizing component (1), the humidity control component (2), and the annealing furnace body (4) respectively, and is used to control the water mist and temperature in the annealing chamber (5).

2. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 1, characterized in that, The annealing furnace body (4) is provided with an air inlet (6) and an air outlet (7) at the top and bottom respectively, and the air inlet (6) and the air outlet (7) are located at both ends of the air flow channel. A heating platform (8) is provided between the air inlet (6) and the air outlet (7), and a perovskite battery can be placed on the heating platform (8).

3. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 2, characterized in that, The ultrasonic atomizing assembly (1) includes an ultrasonic atomizer (11), an atomizing delivery pipe (12), and a deionized water storage tank (13). One end of the ultrasonic atomizer (11) is connected to the air inlet (6) through the atomizing delivery pipe (12), and the other end is connected to the deionized water storage tank (13) through the atomizing delivery pipe (12). The ultrasonic atomizer (11) includes a high-frequency piezoelectric ceramic atomizing plate and an atomizing filter.

4. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 3, characterized in that, The high-frequency piezoelectric ceramic atomizing sheet has an atomization frequency of 1.7-2.4MHz and can produce uniform water mist with a particle size of 1-5μm.

5. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 3, characterized in that, The ultrasonic atomizing component (1) further includes the atomizing filter element, which is a polytetrafluoroethylene microporous filter membrane with a pore size of 0.22-0.45 μm.

6. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 1, characterized in that, The humidity control component (2) includes at least three sets of high-precision humidity sensors and humidity regulating valves; the high-precision humidity sensors are evenly distributed at the top, middle and bottom of the annealing chamber (5), with a measurement accuracy of ±0.1%RH and a measurement range of 10-90%RH; the humidity regulating valve is set on the atomizing delivery pipe (12); the humidity regulating valve is electrically connected to the control unit (3), and the control unit (3) realizes closed-loop humidity control by adjusting the atomizing gas flow rate.

7. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 6, characterized in that, The humidity control component (2) also includes a drying air path, which is connected in parallel with the atomizing delivery pipe (12). A dryness regulating valve is provided on the drying air path. The dryness regulating valve is electrically connected to the control unit (3). The control unit (3) achieves closed-loop humidity control by adjusting the atomizing air flow rate and the drying air flow rate.

8. The ultrasonic atomization precise and uniform humidification device for annealing perovskite solar cells according to claim 2, characterized in that, The airflow distribution assembly includes a honeycomb structure flow distribution plate (9) and a flow guide fan; the honeycomb structure flow distribution plate (9) is disposed between the air inlet (6) and the heating platform (8); the flow guide fan is disposed inside the air outlet (7).

9. A method for precise and uniform humidification using ultrasonic atomization for annealing perovskite solar cells, based on the ultrasonic atomization device for precise and uniform humidification using ultrasonic atomization for annealing perovskite solar cells according to any one of claims 1-8, characterized in that... Includes the following steps: S1. Equipment pretreatment: Check the working status of the ultrasonic atomization component (1), humidity control component (2) and airflow distribution component, and set the annealing temperature curve and humidification process curve. S2. Furnace preheating: Start the annealing furnace (4) and heat it according to the preset annealing temperature curve, while keeping the airflow inside the annealing chamber (5) in a stable circulation state. S3, Precise humidification: When the temperature of the annealing furnace body (4) reaches the preset value, the ultrasonic atomization component (1) is activated to generate 1-5μm water mist, which enters the annealing chamber (5); the humidity control component (2) detects the humidity at different positions in the annealing chamber (5) in real time and transmits the data to the control unit (3). The control unit (3) stabilizes the humidity of the annealing chamber (5) within the target value ±0.1%RH range. S4. Annealing and moisturizing: The perovskite battery substrate is sent into the annealing chamber (5). According to the preset annealing temperature curve and humidification process curve, the temperature and humidity are kept stable to complete the annealing and crystallization process of the perovskite film. S5. Process completion: After annealing, first turn off the ultrasonic atomization component (1), reduce the humidity of the annealing chamber (5) to 10-20%RH, then turn off the annealing furnace body (4) and take out the perovskite battery substrate.

10. The ultrasonic atomization method for precise and uniform humidification in the annealing of perovskite solar cells according to claim 9, characterized in that, Includes the following steps: In step S3, when the humidity deviation at a certain position of the annealing chamber (5) exceeds 0.2%RH, the control unit (3) automatically adjusts the atomization amount to achieve humidification and dehumidification.

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