A worktable cleaning device based on cutting depth adaptive speed control and a control method thereof

Abstract

The application relates to the technical field of workpiece surface treatment, in particular to a workbench cleaning device based on adaptive variable-speed control of cutting depth and a control method thereof. The device comprises a conveying and limiting system, a processing head assembly and a detection and monitoring assembly. The cutting depth parameter of the processing head relative to the workpiece surface is detected in real time, the lifting speed of the workbench is automatically adjusted based on a U-shaped speed-depth mapping curve, the processing speed is reduced in a key depth area to prolong the action time of the cleaning liquid or the coating on the workpiece surface, and the high speed is maintained in a non-key area to improve the processing efficiency. The processing head assembly adopts a slit flow channel module to convert high-pressure fluid into a flat high-speed jet, and a spiral scraper is arranged on a rotating processing shaft to realize the synergistic effect of physical scraping and fluid spraying. The application can realize the best balance between the cleaning effect and the processing efficiency, supports three working modes of cleaning, synergistic cleaning and coating, and has the advantages of high universality and high intelligence.

Description

Technical Field

[0001] This invention belongs to the field of automated cleaning and surface treatment equipment, specifically a device and control method for cleaning, coating or decontamination of workpiece surfaces on a conveyor belt production line. Background Technology

[0002] Silicon carbide (SiC), as an important third-generation semiconductor material, is widely used in power electronic devices, new energy vehicles, and smart grids due to its excellent physicochemical properties. In the manufacturing process of SiC wafers, multi-wire dicing is a key technology for achieving wafer thinning. This process uses multiple diamond dicing wires to simultaneously cut the SiC crystal, effectively improving production efficiency and obtaining wafers with high flatness. After multi-wire dicing, the surface of the SiC wafer typically retains various impurities such as dicing fluid, metal debris, abrasive particles, and organic contaminants. If these surface contaminants are not effectively removed, they will seriously affect the quality of subsequent wafer grinding, polishing, and epitaxy processes, ultimately impacting the electrical performance and reliability of the final device.

[0003] Currently, the cleaning of silicon carbide wafers after dicing mainly employs offline cleaning methods, where the wafers are transferred to separate cleaning equipment for processing immediately after the dicing process. This offline cleaning mode suffers from inherent drawbacks such as low cleaning efficiency and long production cycles, failing to meet the demands of large-scale industrial production. Furthermore, existing cleaning methods have limited effectiveness in removing fine particulate contaminants from the silicon carbide wafer surface, especially for submicron-sized abrasive particles and metal debris, which are difficult to completely remove, easily causing scratches on the wafer surface or leaving hidden sources of contamination. More critically, the wafers undergo multiple transfers and storage during offline cleaning, making them susceptible to secondary contamination from environmental factors. Moreover, improper handling of residual moisture on the wafer surface after cleaning can lead to surface state changes.

[0004] Therefore, there is an urgent need to develop an online cleaning method for silicon carbide wafers after multi-wire dicing, so as to achieve effective connection between dicing and cleaning processes, improve cleaning efficiency while ensuring the cleanliness and integrity of the wafer surface, and provide high-quality substrate guarantee for subsequent processing. Summary of the Invention

[0005] This invention addresses the problems of incomplete cleaning or low processing efficiency caused by the fixed parameter processing method of existing workpiece surface cleaning equipment, as well as the technical defects of existing equipment that lack accurate detection of processing depth and closed-loop feedback mechanism. It provides a worktable cleaning device and its control method based on adaptive speed control of cutting depth.

[0006] This invention proposes a workbench cleaning device based on adaptive speed control of cutting depth, comprising a conveying and limiting system, a processing head assembly, and a detection and monitoring assembly. The conveying and limiting system includes a conveyor belt body, drive rollers, and splash guards. The conveyor belt body carries the workpiece to be processed and moves along a preset direction. The drive rollers are disposed on both sides of the conveyor belt body and rotate in opposite directions under the drive of a drive motor to drive the conveyor belt body to achieve bidirectional conveying of the workpiece. The splash guards are vertically disposed on both sides of the conveyor belt assembly to form a semi-enclosed or enclosed processing chamber to limit the splashing of fluids and solid debris generated during the processing to the outside of the equipment.

[0007] The treatment head assembly includes a main treatment head, a slit-type flow channel module, and a rotating treatment shaft. The main treatment head is positioned above the conveyor belt assembly and is vertically adjustable. Its bottom has a serrated or wavy edge structure. The main treatment head is connected to an external fluid supply system for downward spraying of high-pressure cleaning fluid, solvent, or coating. The slit-type flow channel module is located inside the main treatment head and includes a solid body and a slit flow channel extending through it. The slit flow channel extends along the length of the main treatment head to convert the high-pressure fluid into a flat, high-speed jet that is ejected in a fan-shaped planar form, thereby increasing the coverage area of ​​a single action.

[0008] The rotary processing shaft is located below the main processing head and includes a hollow shaft body, spray nozzles, and spiral scrapers. The hollow shaft body has a hollow interior structure for introducing cleaning fluid or exhaust gas. Several rectangular spray nozzles are distributed axially on the shaft body surface to spray cleaning fluid at a specific angle onto the workpiece surface or discharge it into the exhaust gas collection system. The spiral scrapers are arranged in a spiral or inclined blade structure on the outside of the hollow shaft body. The initial gap between the outer edge of the spiral scraper blades and the workpiece surface is 0.5mm to 1.5mm. When the rotary processing shaft rotates at a low speed of 50rpm to 200rpm... During high-speed operation, the spiral scraper maintains a constant gap with the initial position due to the small centrifugal force, only disturbing the cleaning fluid to promote its circulation and prevent solid particles from settling in the treatment area. When the rotational speed of the processing shaft increases to 1000 rpm to 3000 rpm, the spiral scraper expands radially under the action of centrifugal force, and the gap between the outer edge of the blade and the workpiece surface shrinks to less than 0.05 mm, allowing the edge of the spiral scraper to directly contact the workpiece surface, scraping and cutting the stubborn dirt on the workpiece surface, forming a synergistic effect with the slit-type fluid jet.

[0009] The detection and monitoring components are located on both sides of the equipment. Each component includes a sensor mounting base and a detection field of view. The sensor mounting base is fixed to a preset position on the side wall for mounting detection elements such as displacement sensors, vision cameras, or ultrasonic sensors. The detection field of view is the intersection area covered by the detection signals emitted by the sensors on both sides. This intersection area covers at least a portion of the workpiece's travel range during processing. The detection components continuously collect cutting depth data within the processing area as the workpiece moves, enabling continuous monitoring of the workpiece from its entry into the processing area to its exit. The detection components monitor the position and transit time of the workpiece on the conveyor belt in real time, and detect the pressing depth or cutting depth parameters of the processing head in real time. The collected data is then transmitted to the control system as a feedback signal input for adaptive speed adjustment.

[0010] Furthermore, this embodiment of the invention also provides a control method based on depth-adaptive variable speed control. This control method implements variable speed control based on a preset nonlinear speed-depth mapping relationship, wherein the speed-depth mapping curve has U-shaped or parabolic characteristics, including a first high-speed region when the depth of cut is in the first shallow layer region, a low-speed region when the depth of cut is in the middle deep layer region, and a second high-speed region when the depth of cut is in the second deep layer region.

[0011] Furthermore, in the first high-speed zone, when the cutting depth is in the range of 0 to 20 mm, the lifting speed is at a high level of 120 mm / min to 160 mm / min. This stage corresponds to the processing head rapidly approaching the workpiece surface or the non-contact area above the dirt layer. The high-speed movement reduces ineffective action time and improves the overall cycle time of the equipment. In the low-speed zone, when the cutting depth is in the range of 40 mm to 90 mm, the lifting speed significantly decreases to a minimum of 10 mm / min to 15 mm / min. This stage corresponds to the processing head penetrating deep into the dirt layer or the processing area requiring precise control. The low-speed movement prolongs the action time of fluid jetting or physical scraping, thereby facilitating the full removal of dirt or the uniform spreading of coating. In the second high-speed zone, when the cutting depth is between 130mm and 146.775mm, the lifting speed is increased again to 120mm / min to 160mm / min. This stage corresponds to the processing head rapidly retracting from the workpiece surface or entering the final stage of processing completion. The specific parameter values ​​of the above speed-depth mapping curve can be adaptively adjusted according to the workpiece material (such as aluminum alloy, stainless steel, silicon carbide, etc.), the type of dirt (such as oil, oxide scale, abrasive particles, etc.), and the processing requirements (such as cleaning cleanliness, coating thickness, etc.). For aluminum alloy workpieces with low hardness, the lifting speed in the first high-speed zone can be set to 150mm / min, and the lifting speed in the low-speed zone can be set to 12mm / min. For heavy oil stains on stainless steel workpieces, the lifting speed in the low-speed zone can be further reduced to 8mm / min. For abrasive particles on the surface of silicon carbide wafers, the lifting speed in the low-speed zone can be set to 10mm / min and combined with a co-cleaning mode. When the measured depth is in the range of 20mm to 60mm, the cosine smooth transition formula is used to smoothly transition the lifting speed from the first high-speed zone to the low-speed zone; when the measured depth is in the range of 120mm to 130mm, the same cosine smooth transition formula is used to smoothly transition the lifting speed from the low-speed zone to the second high-speed zone, so as to ensure that the entire speed-depth curve is smooth and continuous and to avoid impact vibration caused by sudden speed changes.

[0012] Furthermore, the control method includes the following steps: an initialization setting step, which presets speed-depth mapping curve parameters according to the type, material, and expected processing effect of the workpiece to be processed, or selects an applicable mapping curve from a preset curve library; a real-time detection step, which collects the cutting depth data of the processing head relative to the workpiece surface in real time through a detection component and transmits the data to the control system in real time; a speed calculation step, in which the control system calculates the target lifting speed corresponding to the current moment based on the real-time collected cutting depth value through table lookup or interpolation; a speed execution step, in which the control system sends a speed command to the drive motor to adjust the lifting speed of the conveyor belt or the worktable of the processing head to track the target lifting speed; and a cyclic feedback step, which repeats the real-time detection to the speed execution step to achieve continuous adaptive speed adjustment during the processing.

[0013] Furthermore, the depth of cut is measured based on the following geometric parameters: the reference plane is a horizontal reference line representing the workpiece surface, liquid surface, or a preset measurement reference; the vertical depth is the distance from the center of the rotating processing axis or the rotation center vertically downwards to the reference plane; the oblique distance is the distance from the center along a specific angle to the intersection of the outer circle of the rotating processing axis and the reference plane. The vertical depth, as the primary measurement value of the depth of cut, is acquired in real time by the detection system and transmitted to the control system. The oblique distance is used to assist in correcting the measurement error of the vertical depth, especially when the rotating processing axis is installed at an angle or when there are local protrusions on the workpiece surface. In actual measurement, the oblique distance d... oblique The method for obtaining the vertical depth is as follows: The detection component is equipped with two sets of laser displacement sensors. One set is vertically mounted on the processing head assembly bracket, and its measuring beam illuminates the reference surface vertically to directly obtain the real-time value of the vertical depth. The other set is mounted on the same bracket at a fixed angle θ, and its measuring beam illuminates the intersection of the outer circle of the rotating processing axis and the reference surface at an angle θ to the vertical direction to obtain the real-time value of the oblique distance. Both sets of sensors sample synchronously at a sampling frequency of 50Hz. The obtained data is amplified and filtered by the signal conditioning circuit, and then transmitted to the calculation unit of the control system via an analog-to-digital converter. The correction formula for the vertical depth is: d corrected =d oblique *cos(θ), where d oblique θ is the oblique distance, and θ is the angle between the oblique distance and the vertical direction. When the measured value of the oblique distance is erroneous due to installation deviation or local protrusions on the surface, the oblique distance is converted into a correction value in the vertical direction through the above cosine projection relationship. The control system queries the preset speed-depth mapping curve based on the real-time acquired vertical depth value to obtain the target lifting speed at the current moment, and realizes real-time tracking and adjustment of the speed through the drive motor.

[0014] Furthermore, when the present invention is implemented in cleaning mode, the slit channel in the main treatment head is connected to the high-pressure cleaning fluid supply system. After being pressurized by the high-pressure pump, the cleaning fluid is converted into a flat, high-speed jet through the slit channel and sprayed vertically downwards onto the workpiece surface. The rotating treatment shaft rotates at a low speed so that the spiral scraper mainly plays a stirring role to prevent solid particles in the cleaning fluid from settling. The detection component measures the cutting depth of the treatment head in real time. The control system obtains the target speed from a table based on the measured depth and performs speed adjustment. When the cutting depth reaches the preset key area, the lifting speed is automatically reduced, and the action time of the high-pressure jet on the dirt surface is extended, thereby improving the cleaning effect.

[0015] To verify the improvement effect of the above-mentioned adaptive speed control method on the cleaning effect, this embodiment uses silicon carbide wafers with abrasive particles (average particle size of 0.5 μm) on the surface as the test object, and conducts a comparative cleaning test using the following three control strategies: (1) constant speed control, with a constant lifting speed of 140 mm / min; (2) U-shaped speed control of the present invention, with a high speed of 140 mm / min and a low speed of 12 mm / min; (3) low speed control throughout the process, with a constant lifting speed of 12 mm / min. The cleaning time is 60 s. After cleaning, the wafer surface is inspected using a scanning electron microscope, and the number of residual particles is counted. The test results show that: the number of residual particles on the surface of the constant speed control group is an average of 127 particles per square centimeter, and the residual coverage area is about 23% of the initial contaminated area; the number of residual particles in the low speed control group throughout the process is an average of 89 particles per square centimeter, and the residual coverage area is about 16% of the initial contaminated area; the number of residual particles in the U-shaped speed control group of the present invention is an average of 42 particles per square centimeter, and the residual coverage area is about 7% of the initial contaminated area. As can be seen, the present invention provides sufficient action time in the critical depth area through U-shaped speed control, while maintaining high speed in non-critical areas, so that the cleaning effect is close to that of cleaning with low speed control throughout, while the processing cycle is increased by about 65% compared with low speed control throughout, achieving the best balance between cleaning effect and processing efficiency.

[0016] Furthermore, when the present invention is implemented in the synergistic cleaning mode for treating stubborn dirt, while the cleaning fluid is sprayed from the slit channel of the main treatment head, the rotating treatment shaft rotates at a high speed so that the edge of the spiral scraper directly contacts the workpiece surface. The rotational motion of the spiral scraper and the lifting motion of the worktable form a composite motion trajectory that produces a combined effect of scraping, cutting and stirring on the workpiece surface. At this time, the speed-depth mapping curve has a lower set value in the middle depth region to provide more sufficient physical action time. The detection component monitors the cutting depth of the scraper, and the control system adjusts the lifting speed of the worktable and the rotation speed of the rotating shaft in real time accordingly to achieve optimal synergy between physical action and fluid action.

[0017] To verify the synergistic effect of physical scraping and fluid jetting in the collaborative cleaning mode, this embodiment uses a hot-rolled steel plate with an oxide scale and rust layer of approximately 50 μm thickness as the test object, and conducts comparative tests using the following four treatment methods: (1) pure fluid jetting, with the treatment shaft not rotating; (2) pure physical scraping, with no fluid jetting from the slit channel; (3) combination of fluid jetting and low-speed rotation stirring (200 rpm); (4) combination of fluid jetting and high-speed rotation scraping (1500 rpm), which is the collaborative cleaning mode of this invention. All four methods use U-shaped speed control, with a speed of 8 mm / min in the low-speed zone and a treatment time of 120 s. After treatment, the weight loss of each sample is measured by weighing, and the surface roughness Ra value is measured by a roughness meter. The experimental results are as follows: the weight loss of the pure fluid jet group was 0.23g, and the surface Ra was 3.2μm; the weight loss of the pure physical scraping group was 0.18g, and the surface Ra was 2.8μm; the weight loss of the low-speed combination group was 0.41g, and the surface Ra was 1.9μm; the weight loss of the high-speed synergistic cleaning group of this invention was 0.78g, and the surface Ra was 0.8μm. The experimental results demonstrate that the scraping and cutting action generated by the high-speed rotation of the spiral blades and the fluid scouring action of the slit-channel jet form a significant synergistic effect, resulting in a higher decontamination efficiency than the simple superposition of single actions, and the treated surface quality is significantly better than other comparative groups.

[0018] Furthermore, when the present invention is implemented in the coating mode, the main processing head sprays coating instead of cleaning liquid, the slit channel ensures that the coating covers the workpiece surface in a uniform film form, the rotating processing shaft rotates at an appropriate speed to assist in spreading and defoaming the coating, and the speed-depth mapping curve is set according to the viscosity, drying time and film thickness requirements of the coating to ensure the uniformity of coating thickness and surface quality.

[0019] To verify the effect of adaptive variable speed control on improving coating uniformity in coating mode, this embodiment uses a mobile phone metal shell as the substrate and coats it with an anti-corrosion coating. The following two control methods are used for comparative tests: (1) constant speed coating, with a constant lifting speed of 15 mm / min; (2) U-shaped variable speed coating of the present invention, with a high speed zone of 140 mm / min and a low speed zone of 15 mm / min. The coating viscosity is 1200 cps, and after coating, it is cured at 80℃ for 30 min. A coating thickness gauge is used to uniformly take 20 measurement points along the surface of the shell, calculate the average value and standard deviation of the coating thickness, and evaluate the coating uniformity; at the same time, the cross-cut adhesion test is used to test the coating adhesion. The experimental results show that the average coating thickness of the constant-speed coating group was 48 μm, with a standard deviation of 12.3 μm and a thickness deviation rate of 25.6%. Some areas exhibited sagging, and the adhesion test grade was 3. In contrast, the average coating thickness of the U-shaped variable-speed coating group of this invention was 52 μm, with a standard deviation of 3.7 μm and a thickness deviation rate of only 7.1%. The surface was smooth and free of sagging, and the adhesion test grade was 0 (the highest grade). These results demonstrate that this invention achieves uniform film coating through a slit channel and, combined with U-shaped variable-speed control to extend the coating leveling time in the low-speed zone, can significantly improve the uniformity of coating thickness and adhesion.

[0020] The workbench cleaning device and its control method of this invention extend the interaction time between the cleaning fluid or coating and the workpiece surface by reducing the processing speed in the critical depth area, thereby facilitating the full removal and dissolution of dirt or the uniform spreading of coating, significantly improving the consistency and reliability of the processing effect; by maintaining a higher processing speed in the non-critical depth area, the efficiency loss caused by low-speed operation throughout the process is avoided, achieving the best balance between processing quality and processing efficiency; the parameters of the U-shaped speed-depth mapping curve can be adjusted and set according to different workpiece materials, dirt types or coating characteristics, so that the same equipment can adapt to various working conditions, improving the versatility and flexibility of the equipment; the introduction of real-time detection and closed-loop feedback control mechanism realizes intelligent automatic control of the processing process, reducing the dependence on human experience and lowering the skill requirements of operators. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of the workbench cleaning device based on adaptive speed control of cutting depth according to an embodiment of the present invention.

[0022] Figure 2 This is a cross-sectional structural diagram of the slit-type flow channel module according to an embodiment of the present invention.

[0023] Figure 3 This is a schematic diagram of the structure of the rotation processing shaft according to an embodiment of the present invention.

[0024] Figure 4This is a schematic diagram of the structure of the detection and monitoring component according to an embodiment of the present invention.

[0025] Figure 5 This is a graph showing the mapping relationship between the cleaning and lifting speed of the workbench and the cutting depth in an embodiment of the present invention.

[0026] Figure 6 This is a schematic diagram illustrating the definition of geometric parameters for cutting depth measurement according to an embodiment of the present invention.

[0027] The attached figures are labeled as follows:

[0028] 1. Main processing head; 2. Workpiece or carrier; 3. Splash-proof sidewall; 4. Drive roller; 5. Exhaust arrow; 6. Slit channel; 7. Solid body; 8. Hollow shaft; 9. Rectangular nozzle; 10. Spiral scraper; 11. Inspection field of view; 12. Conveyor belt body; 13. Processing head; 16. Oblique distance; 17. Vertical depth; 18. Reference plane. Detailed Implementation

[0029] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings.

[0030] The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the invention, and should not be construed as limiting the invention.

[0031] like Figure 1 As shown in the figure, the workbench cleaning device based on adaptive speed control of cutting depth according to an embodiment of the present invention has an overall conveyor belt structure. It mainly consists of three major systems: a conveying and limiting system, a processing head assembly, and a detection and monitoring assembly. These systems cooperate with each other to achieve automated surface treatment of the workpiece. The conveying and limiting system is located at the bottom of the device to carry and convey the workpiece to be processed. The processing head assembly is located above the conveying and limiting system to apply cleaning fluid, solvent, or coating to the surface of the workpiece. The detection and monitoring assembly is located on both sides of the device to monitor key parameters in real time during the processing and provide feedback signals to the control system.

[0032] The conveying and limiting system includes a conveyor belt body 12, drive rollers 4, and splash guards 3. The conveyor belt body 12, as the main load-bearing and transport component for the workpiece, is made of corrosion-resistant and wear-resistant polyurethane or neoprene rubber to withstand the corrosive environment of the cleaning fluid or solvent and the continuous tensile load caused by the weight of the workpiece. The width of the conveyor belt body 12 is determined according to the maximum external dimensions of the workpiece to be processed, typically ranging from 300mm to 1500mm. The operating speed of the conveyor belt body 12 is steplessly adjustable by controlling the speed of the drive motor via a frequency converter, with an adjustment range covering 5mm / min to 180mm / min. The drive rollers 4 are located at both ends of the conveyor belt body 12. Each drive roller 4 is supported on the frame by bearings. The drive rollers 4 are connected to the drive motors by couplings. Under the control of the CNC system, the drive motors rotate in opposite directions, thereby driving the conveyor belt body 12 to move in a preset direction. The design of the drive rollers 4 rotating in opposite directions enables the conveyor belt body 12 to achieve bidirectional conveying function. After the workpiece is processed on one side, the conveyor belt body 12 can run in the opposite direction to transport the workpiece to the next station or perform secondary processing, which improves the flexibility of the production line and the utilization rate of the equipment. The splash guard 3 is vertically installed on both sides of the conveyor belt body 12, and its height is usually 300mm to 600mm. The splash guard 3 and the conveyor belt body 12 form a semi-closed or closed processing chamber. The splash guard 3 is made of stainless steel or engineering plastic to resist the chemical corrosion of the cleaning liquid. The inner surface can be coated with polytetrafluoroethylene to reduce the adhesion of the processing medium on the side wall. An exhaust port is provided at the top of the splash guard 3 for connecting the exhaust gas collection system 5. The steam, atomized cleaning liquid or organic solvent gas generated during the processing is extracted from the processing chamber through the exhaust port to keep the working environment clean and safe.

[0033] The processing head assembly is the core execution component of the device of this invention, including a main processing head 1, a slit-type flow channel module, and a rotating processing shaft. For example... Figure 1As shown, the main processing head 1 is positioned directly above the conveyor belt body 12. The main processing head 1 is precisely adjusted vertically via a vertically driven electric actuator or a pneumatic-hydraulic booster cylinder. The adjustment stroke is typically 200 to 300 millimeters. The output end of the electric actuator or pneumatic-hydraulic booster cylinder is fixedly connected to the top flange of the main processing head 1. The controller controls the downward pressure depth of the main processing head 1 by sending position commands to the electric actuator. The bottom edge of the main processing head 1 has a serrated or wavy structure. This design increases the turbulence effect when the cleaning fluid or coating contacts the workpiece surface, preventing the flow of the processing medium from forming stagnant zones on the workpiece surface, thus affecting the uniformity of processing. The main processing head 1 has an internal fluid channel, which is connected to an external fluid supply system via a high-pressure hose. The fluid supply system includes components such as a high-pressure pump, a flow meter, a pressure sensor, and a fluid control valve. The output pressure range of the high-pressure pump is 2MPa to 15MPa, and the flow rate adjustment range is 5L / min to 50L / min. The fluid control valve responds quickly to the instructions of the control system to adjust the flow rate and the on / off state of the fluid. Cleaning fluid, solvent, or coating is sprayed from the bottom of the main processing head 1 through the fluid channel under the drive of the high-pressure pump.

[0034] The slit-type flow channel module is located within the internal structure of the main processing head 1, and its detailed construction is as follows: Figure 2 As shown, the slit-type flow channel module includes a main body 7 and a slit flow channel 6 extending through the main body 7. The slit flow channel 6 extends along the length of the main processing head 1, and its slit width is typically 0.5mm to 3mm. The cross-sectional shape of the slit flow channel 6 can be designed as rectangular, trapezoidal, or Venturi-constricted to optimize the fluid jetting characteristics. When the high-pressure fluid enters the slit flow channel 6, the cross-sectional area of ​​the fluid channel suddenly contracts, causing the fluid velocity to increase sharply and forming a flat, high-speed jet at the slit outlet. This jet is sprayed vertically downwards onto the workpiece surface in the form of a fan-shaped plane. The coverage width of the fan-shaped jet can reach 50mm to 300mm, covering a large workpiece surface area in a single action, significantly reducing the dependence on the scanning path compared to traditional circular nozzles. The main body 7 is integrally machined from stainless steel to withstand the impact load of the high-pressure fluid. Both ends of the main body 7 are connected to the housing of the main processing head 1 through sealing flanges, and O-rings are provided at the connection to prevent high-pressure fluid leakage. The inner surface of the slit channel 6 is polished to reduce fluid flow resistance loss, and a chamfer transition can be provided at the inlet of the slit channel 6 to guide the fluid to smoothly enter the slit area.

[0035] The rotary processing axis is located below the main processing head 1, and its detailed structure is as follows: Figure 3As shown, the spiral scraper 10 is disposed on the outside of the hollow shaft 8. The spiral scraper 10 has a spiral or inclined blade structure. The number of spiral scrapers 10 is 2 to 6, and the spiral angle is 15° to 45°. The blade edge of the spiral scraper 10 can be designed as a sharp blade to enhance the physical scraping effect. The rotating processing shaft is driven by an independent drive motor via a pulley or gear reduction mechanism. The speed adjustment range of the drive motor is 50 rpm to 3000 rpm. The initial gap between the outer edge of the spiral scraper 10 blade and the workpiece surface is 0.5 mm to 1.5 mm. When the rotating processing shaft runs at a low speed of 50 rpm to 200 rpm, the spiral scraper 10 maintains a constant initial gap due to the small centrifugal force, only disturbing the cleaning fluid to promote its circulation and prevent solid particles from settling in the processing area. When the speed of the rotating processing shaft increases to 1000 rpm to 3000 rpm, the spiral scraper 10 expands radially under the action of centrifugal force, and the gap between the outer edge of the blade and the workpiece surface shrinks to less than 0.05 mm, allowing the edge of the spiral scraper 10 to directly contact the workpiece surface, scraping and cutting the stubborn dirt on the workpiece surface.

[0036] The detection and monitoring components are located on the side walls of both sides of the device, and their detailed arrangement is as follows: Figure 4As shown. The detection and monitoring component includes a sensor mounting base and a detection field of view 11. The sensor mounting base is fixed to a preset position on the splash-proof sidewall 3. Displacement sensors, vision cameras, or ultrasonic sensors can be installed on the sensor mounting base. These three types of detection elements are selectively used according to the operating conditions, with the following specific selection rules: The displacement sensor measures the vertical distance from the processing head to the workpiece surface, suitable for dry or thin liquid film conditions, with a measurement accuracy of ±0.05mm; the vision camera acquires images of the workpiece surface and calculates the boundary of the processing area, suitable for workpiece surface condition recognition and position positioning, with a sampling frequency of 30fps; the ultrasonic sensor measures the liquid level height when there is a thick liquid film or foam coverage, suitable for liquid level detection in cleaning mode. The signals from the three sensors are transmitted to the control system via an RS485 bus after passing through their respective pre-processing circuits. The control system selects the corresponding sensor data for subsequent processing based on preset operating condition flags. The detection field of view 11 is the intersection area covered by the detection signals emitted by the sensors on both sides. This intersection area covers at least a portion of the workpiece's travel range during processing. The detection component continuously collects cutting depth data within the processing area as the workpiece moves, enabling continuous monitoring of the workpiece from its entry into the processing area to its exit. The detection component functions to monitor the position and transit time of the workpiece on the conveyor belt in real time, detect the pressing depth or cutting depth parameters of the processing head 1 in real time, and transmit the collected data to the control system as a feedback signal input for adaptive speed adjustment. In specific implementation, the displacement sensor in the detection component is fixedly mounted on the bracket of the processing head assembly and moves up and down synchronously with the processing head. The measuring beam of the displacement sensor shines vertically downward onto the workpiece surface or the cleaning fluid surface and receives the reflected signal to determine the actual position of the processing head 1 relative to the workpiece surface.

[0037] The core control principle of this invention is based on a preset nonlinear speed-depth mapping relationship to implement variable speed control. Figure 5The curve illustrating the mapping relationship between the lifting speed and the depth of cut in the cleaning process is shown. The horizontal axis represents the depth of cut from 0 to 146.775 mm, and the vertical axis represents the lifting speed from 0 to 180 mm / min. The curve exhibits a U-shaped or parabolic characteristic, specifically including three characteristic intervals. The first high-speed zone occurs when the depth of cut is in the shallow end of the 0-20 mm range, with the lifting speed at a high level of 120 mm / min to 160 mm / min. In this stage, the processing head rapidly approaches the workpiece surface or the non-contact area above the dirt layer. This high-speed movement reduces ineffective action time and significantly improves the overall cycle time of the equipment. When the cutting depth is in the middle deep range of 60mm to 120mm, it is the low speed zone. The lifting speed is significantly reduced to the lowest point of 10mm / min to 15mm / min. This stage corresponds to the treatment head penetrating the dirt layer or the treatment area that requires precise control. The low speed movement prolongs the action time of high-pressure fluid jet or spiral scraper physical scraping, which is conducive to the full removal of dirt or the uniform spread of coating. When the cutting depth is in the second deep layer range of 130mm to 146.775mm, it is the second high-speed zone, and the lifting speed is increased again to 120mm / min to 160mm / min. This stage corresponds to the processing head rapidly retracting from the workpiece surface or entering the finishing stage after processing is completed. For the speed calculation of the transition zone, when the measured depth d is in the range of 20mm to 60mm, the following smooth transition algorithm is adopted: when d < 20mm, v = 140mm / min (the upper limit of the first high-speed zone) is directly taken; when 20mm ≤ d < 40mm, the cosine smooth transition formula is adopted: v = 140 - 60[1 - cos(π(40-d) / 40)] / 2; when 40mm ≤ d ≤ 60mm, the cosine smooth transition formula is adopted: v = 80 + 60[1 - cos(π(d-40) / 40)] / 2; when d > 60mm, it directly enters the low-speed zone. When the measured depth d is in the range of 120mm to 130mm, a similar cosine smooth transition formula is used to smoothly transition the lifting speed from the low speed zone to the second high speed zone.

[0038] The parameters of the aforementioned U-shaped speed-depth mapping curve can be flexibly adjusted according to different workpiece materials, dirt types, or coating characteristics. When processing aluminum alloy workpieces with low hardness, the lifting speed in the first high-speed zone can be set to 150 mm / min, the lifting speed in the low-speed zone can be set to 12 mm / min, and the lifting speed in the second high-speed zone can be set to 150 mm / min. When processing heavily oiled stainless steel workpieces, the lifting speed in the low-speed zone can be further reduced to eight mm / min to provide a longer physical interaction time. When processing surfaces coated with high-viscosity paint, the lifting speed in the low-speed zone can be set to 15 mm / min, while simultaneously using a lower rotational speed of the processing shaft to ensure sufficient leveling and defoaming of the paint. The control system has a variety of preset speed-depth mapping curve parameter sets. The following five sets of standard parameter curves are preset in the control system database: (1) Standard cleaning parameters for aluminum alloy workpieces: high speed zone v=150mm / min, low speed zone v=12mm / min; (2) Parameters for heavily oiled stainless steel workpieces: high speed zone v=140mm / min, low speed zone v=8mm / min; (3) Precision cleaning parameters for silicon carbide wafers: high speed zone v=120mm / min, low speed zone v=10mm / min; (4) Anti-corrosion coating parameters: high speed zone v=130mm / min, low speed zone v=15mm / min; (5) high viscosity coating parameters: high speed zone v=120mm / min, low speed zone v=18mm / min; the operator selects the corresponding parameter group number through the human-machine interface, and the control system automatically loads the group of parameters into the speed-depth mapping table; if fine adjustment is required, the operator can only adjust the two parameters of high speed zone speed and low speed zone speed, and the adjustment range is 80-180mm / min and 5-25mm / min respectively.

[0039] The depth of cut is measured based on the following geometric parameters. Figure 6 The definition of the geometric parameters for depth of cut measurement is shown. For example... Figure 6 As shown, reference plane 18 is a horizontal reference line representing the workpiece surface, cleaning fluid level, or a preset measurement reference line. The position of reference plane 18 is determined in real time by a sensor in the detection assembly. Vertical depth 17 is the distance from the center of the rotary processing axis or the rotation center vertically downwards to reference plane 18. Vertical depth 17, as the main measurement value of the penetration depth, is acquired in real time by the detection system and transmitted to the control system via a signal line. Oblique distance 16 is the distance from the center of the rotary processing axis along a specific angle to the intersection of the outer circle of the rotary processing axis and reference plane 18. Oblique distance 16 is used to assist in correcting the measurement error of vertical depth 17, especially when the rotary processing axis is installed at an angle or when there are local protrusions on the workpiece surface. In actual measurement, oblique distance d obliqueThe acquisition method is as follows: The detection component is equipped with two sets of laser displacement sensors. One set is vertically mounted on the processing head assembly bracket, and its measuring beam illuminates the reference surface vertically to directly acquire the real-time value of the vertical depth 17. The other set is mounted on the same bracket at a fixed angle θ, and its measuring beam illuminates the intersection of the outer circle of the rotating processing axis and the reference surface at an angle θ to the vertical direction to acquire the real-time value of the oblique distance 16. Both sets of sensors sample synchronously at a sampling frequency of 50Hz. The acquired data is amplified and filtered by the signal conditioning circuit, and then transmitted to the processing unit of the control system via an analog-to-digital converter. The processing unit calculates the data according to the formula: d... corrected =d oblique *cos(θ) performs vertical projection correction on the oblique distance to eliminate measurement errors caused by the installation offset of the rotation processing axis or local tilt of the workpiece surface. The correction formula for the vertical depth is: d corrected =d oblique *cos(θ), where d oblique θ is the oblique distance, and θ is the angle between the oblique distance and the vertical direction. When the measurement value of the oblique distance is erroneous due to installation deviation or local protrusions on the surface, the oblique distance is converted into a correction value in the vertical direction through the above cosine projection relationship, thereby improving the accuracy of vertical depth measurement. The control system queries the preset speed-depth mapping curve based on the real-time acquired vertical depth 17 value to obtain the target lifting speed at the current moment, and realizes real-time tracking and adjustment of the speed through the drive motor.

[0040] In actual measurements, the oblique distance d oblique The acquisition method is as follows: The detection component is equipped with two sets of laser displacement sensors. One set is vertically mounted on the processing head assembly bracket, and its measuring beam illuminates the reference surface vertically to directly acquire the real-time value of the vertical depth 17. The other set is mounted on the same bracket at a fixed angle θ, and its measuring beam illuminates the intersection of the outer circle of the rotating processing axis and the reference surface at an angle θ to the vertical direction to acquire the real-time value of the oblique distance 16. Both sets of sensors sample synchronously at a sampling frequency of 50Hz. The acquired data is amplified and filtered by the signal conditioning circuit, and then transmitted to the processing unit of the control system via an analog-to-digital converter. The processing unit calculates the data according to formula d... corrected =d oblique *cos(θ) performs vertical projection correction on the oblique distance to eliminate measurement errors caused by the installation angle of the rotation processing axis or the local tilt of the workpiece surface.

[0041] Based on the above device structure, this embodiment of the invention also provides a control method based on adaptive speed control of cutting depth, the implementation steps of which are as follows.

[0042] In the initial setup step, the operator presets the speed-depth mapping curve parameters according to the type, material, and expected processing effect of the workpiece, or selects a suitable mapping curve from a preset curve library. The preset mapping curve parameters are stored in the control system's database and can be edited and updated via host computer software. In the real-time detection step, the displacement sensor in the detection component collects real-time data on the cutting depth of the processing head relative to the workpiece surface, and the vision camera collects real-time image data of the workpiece surface to determine its position and surface condition. The detection component transmits the collected data to the control system in real-time via an industrial bus. In the velocity calculation step, the control system calculates the target lift velocity corresponding to the current moment based on the real-time acquired cut-in depth value through table lookup or linear interpolation. The control system includes a storage unit and a calculation unit. The storage unit pre-stores a velocity-depth mapping discrete point dataset, which includes N sets (depth value di, velocity value vi), where i=1...N, and the depth values ​​are arranged in ascending order. The calculation unit uses a binary search algorithm to locate the adjacent discrete points (dk, vk) and (dk+1, vk+1) of the real-time depth d, and then calculates the target lift velocity according to the linear interpolation formula v=vk+(vk+1-vk)*(d-dk) / (dk+1-dk). The execution cycle of the calculation unit is 50ms, the sampling frequency is 20Hz, and the calculation result is output to the drive motor through the PID controller. The calculation frequency is usually fifty to one hundred times per second to ensure the real-time response. In the speed execution step, the control system sends speed commands to the drive motor to adjust the running speed of the conveyor belt body 12 or the lifting speed of the worktable to track the target lifting speed. The drive motor adopts servo drive or vector frequency conversion drive to achieve high-precision speed tracking performance. In the cyclic feedback step, the control system repeatedly executes the real-time detection to speed execution step to achieve continuous adaptive speed adjustment during the processing, forming closed-loop feedback control.

[0043] During the cleaning process, the slit channel 6 inside the main processing head 1 is connected to the high-pressure cleaning fluid supply system. After being pressurized by the high-pressure pump, the cleaning fluid is converted into a flat, high-speed jet and sprayed vertically downwards onto the workpiece surface through the slit channel 6. The rotating processing shaft rotates at a low speed so that the spiral scraper 10 mainly plays a stirring role to prevent solid particles in the cleaning fluid from settling. The detection component measures the cutting depth of the processing head 1 in real time. The control system obtains the target speed by looking up a table based on the measured depth and performs speed adjustment. Taking the processing of automobile engine cylinder blocks as an example, the cylinder block to be cleaned is fixed on the workpiece carrier 2 and enters the processing chamber along with the conveyor belt body 12. The displacement sensor in the detection component measures the distance from the main processing head 1 to the upper surface of the cylinder block and transmits the data to the control system. The control system calculates the target lifting speed based on the initial depth value and drives the worktable to rise at a speed of 140 mm per minute. When the processing head 1 contacts the cylinder block surface and continues to press down to the critical area where the cutting depth reaches 70 mm, the control system automatically reduces the lifting speed to 12 mm / min. At this time, the action time of the high-pressure jet on the oil stain area on the cylinder block surface is extended from 0.1s to about 0.8s. The oil stains are fully softened and peeled off under the chemical action of the high-pressure jet and the cleaning fluid. Then, when the cutting depth reaches 140 mm and enters the final stage, the lifting speed is increased again to 140 mm / min to quickly complete the processing process.

[0044] To verify the improvement effect of the above-mentioned adaptive speed control method on the cleaning effect, this embodiment uses silicon carbide wafers with abrasive particles (average particle size of 0.5 μm) on the surface as the test object, and conducts a comparative cleaning test using the following three control strategies: (1) constant speed control, with a constant lifting speed of 140 mm / min; (2) U-shaped speed control of the present invention, with a high speed of 140 mm / min and a low speed of 12 mm / min; (3) low speed control throughout the process, with a constant lifting speed of 12 mm / min. The cleaning time is 60 s. After cleaning, the wafer surface is inspected using a scanning electron microscope, and the number of residual particles is counted. The test results show that: the number of residual particles on the surface of the constant speed control group is an average of 127 particles per square centimeter, and the residual coverage area is about 23% of the initial contaminated area; the number of residual particles in the low speed control group throughout the process is an average of 89 particles per square centimeter, and the residual coverage area is about 16% of the initial contaminated area; the number of residual particles in the U-shaped speed control group of the present invention is an average of 42 particles per square centimeter, and the residual coverage area is about 7% of the initial contaminated area. As can be seen, the present invention provides sufficient action time in the critical depth area through U-shaped speed control, while maintaining high speed in non-critical areas, so that the cleaning effect is close to that of cleaning with low speed control throughout, while the processing cycle is increased by about 65% compared with low speed control throughout, achieving the best balance between cleaning effect and processing efficiency.

[0045] In the implementation of the synergistic cleaning mode for treating stubborn dirt, while the cleaning fluid is sprayed from the slit channel 6 of the main treatment head 1, the rotating treatment shaft rotates at a high speed, causing the edge of the spiral scraper 10 to directly contact the workpiece surface. The rotational motion of the spiral scraper 10 and the lifting motion of the worktable form a composite motion trajectory, producing a combined effect of scraping, cutting, and stirring on the workpiece surface. Taking the treatment of hot-rolled steel plates with attached oxide scale and rust as an example, the control system first adjusts the set value of the speed-depth mapping curve in the middle depth region to a lower value of eight millimeters per minute to provide more sufficient physical action time. The rotational speed of the rotating treatment shaft is set to 1500 rpm to generate sufficient cutting torque for the spiral scraper 10. The displacement sensor in the detection component monitors the cutting depth of the spiral scraper 10, while the vision camera acquires images of the workpiece surface to evaluate the treatment effect. Based on this, the control system adjusts the lifting speed of the worktable and the rotational speed of the rotating shaft in real time to achieve optimal synergy between physical and fluid effects. When the detection component detects that the cutting depth has entered the range of 60mm to 120mm, the control system simultaneously reduces the lifting speed of the worktable and appropriately reduces the rotational speed of the rotating shaft to avoid vibration of the spiral scraper 10 due to excessive load. When the detection component detects that the surface condition has improved, the control system restores the normal speed parameters.

[0046] To verify the synergistic effect of physical scraping and fluid jetting in the collaborative cleaning mode, this embodiment uses a hot-rolled steel plate with an oxide scale and rust layer of approximately 50 μm thickness as the test object, and conducts comparative tests using the following four treatment methods: (1) pure fluid jetting, with the treatment shaft not rotating; (2) pure physical scraping, with no fluid jetting from the slit channel; (3) combination of fluid jetting and low-speed rotation stirring (200 rpm); (4) combination of fluid jetting and high-speed rotation scraping (1500 rpm), which is the collaborative cleaning mode of this invention. All four methods use U-shaped speed control, with a speed of 8 mm / min in the low-speed zone and a treatment time of 120 s. After treatment, the weight loss of each sample is measured by weighing, and the surface roughness Ra value is measured by a roughness meter. The experimental results are as follows: the weight loss of the pure fluid jet group was 0.23g, and the surface Ra was 3.2μm; the weight loss of the pure physical scraping group was 0.18g, and the surface Ra was 2.8μm; the weight loss of the low-speed combination group was 0.41g, and the surface Ra was 1.9μm; the weight loss of the high-speed synergistic cleaning group of this invention was 0.78g, and the surface Ra was 0.8μm. The experimental results demonstrate that the scraping and cutting action generated by the high-speed rotation of the spiral blades and the fluid scouring action of the slit-channel jet form a significant synergistic effect, resulting in a higher decontamination efficiency than the simple superposition of single actions, and the treated surface quality is significantly better than other comparative groups.

[0047] In the coating application process, the main treatment head 1 sprays coating instead of cleaning fluid. The slit channel 6 ensures that the coating covers the workpiece surface in a uniform film form. The rotating treatment shaft rotates at an appropriate speed to assist in spreading and defoaming the coating. Taking the anti-corrosion coating of a mobile phone metal casing as an example, the coating is delivered to the slit channel 6 by a high-pressure pump and forms a 200mm wide, uniformly thick film jet at the outlet, covering the casing surface. The rotating treatment shaft rotates at 300rpm, causing the spiral scraper 10 to spread the coating on the casing surface and eliminate air bubbles. The detection component measures the distance from the treatment head to the casing surface to control the coating thickness. The speed-depth mapping curve is optimized and adjusted according to the coating viscosity, drying time, and film thickness requirements. When the coating viscosity is high, the lifting speed in the low-speed zone is set to 15mm / min to ensure sufficient time for the coating to level. When the coating viscosity is low, the lifting speed in the low-speed zone can be appropriately increased to 18mm / min to prevent the coating from becoming too thick and causing sagging. The control system can also automatically adjust the speed distribution throughout the entire process based on the drying time parameters of the coating to adapt to the process window requirements of different coatings.

[0048] To verify the effect of adaptive variable speed control on improving coating uniformity in coating mode, this embodiment uses a mobile phone metal shell as the substrate and coats it with an anti-corrosion coating. The following two control methods are used for comparative tests: (1) constant speed coating, with a constant lifting speed of 15 mm / min; (2) U-shaped variable speed coating of the present invention, with a high speed zone of 140 mm / min and a low speed zone of 15 mm / min. The coating viscosity is 1200 cps, and after coating, it is cured at 80℃ for 30 min. A coating thickness gauge is used to uniformly take 20 measurement points along the surface of the shell, calculate the average value and standard deviation of the coating thickness, and evaluate the coating uniformity; at the same time, the cross-cut adhesion test is used to test the coating adhesion. The experimental results show that the average coating thickness of the constant-speed coating group was 48 μm, with a standard deviation of 12.3 μm and a thickness deviation rate of 25.6%. Some areas exhibited sagging, and the adhesion test grade was 3. In contrast, the average coating thickness of the U-shaped variable-speed coating group of this invention was 52 μm, with a standard deviation of 3.7 μm and a thickness deviation rate of only 7.1%. The surface was smooth and free of sagging, and the adhesion test grade was 0 (the highest grade). These results demonstrate that this invention achieves uniform film coating through a slit channel and, combined with U-shaped variable-speed control to extend the coating leveling time in the low-speed zone, can significantly improve the uniformity of coating thickness and adhesion.

[0049] Furthermore, the workbench cleaning device of this embodiment also includes a safety protection mechanism. A liquid level sensor is installed in the processing chamber to monitor the liquid level of the cleaning fluid to prevent dry operation. An emergency stop button is located in a prominent position on the device to ensure that the operator can quickly stop the machine in an emergency. An overload protection function automatically cuts off the power supply to prevent equipment damage when the current of the drive motor exceeds a set threshold. The core controller of the control system adopts a programmable logic controller or an industrial-grade embedded controller. Its digital input / output channels are used to receive sensor signals and send actuator commands, and its analog input channels are used to receive real-time data from pressure sensors and flow meters. The communication interface uses Ethernet or fieldbus to connect with the host computer system to realize the acquisition of production data and remote monitoring.

[0050] In summary, the workbench cleaning device and its control method of this invention achieve efficient cleaning and coating of workpiece surfaces through the coordinated operation of the conveying and limiting system, the processing head assembly, and the detection and monitoring assembly. The slit-type flow channel module converts high-pressure fluid into a flat fan-shaped jet, increasing the coverage area of ​​a single action. The rotating processing shaft flexibly switches between stirring and physical scraping functions by changing its rotation speed. The U-shaped speed-depth mapping curve automatically reduces the processing speed in the critical depth region, prolonging the interaction time between the processing medium and the workpiece surface, thereby significantly improving the consistency and reliability of the processing effect. At the same time, maintaining a high processing speed in the non-critical depth region avoids the efficiency loss caused by low-speed operation throughout the process, achieving the best balance between processing quality and processing efficiency. The introduction of real-time detection and closed-loop feedback control mechanisms realizes intelligent automatic control of the processing process, reducing reliance on human experience.

[0051] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0052] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0053] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A workbench cleaning device based on adaptive speed control of cutting depth, comprising a conveying and limiting system, a processing head assembly, and a detection and monitoring assembly, characterized in that, The conveying and limiting system includes a conveyor belt body (12), drive rollers (4) and splash guards (3). The conveyor belt body (12) carries the movement of the workpiece. The drive rollers (4) are arranged on both sides of the conveyor belt body (12) and drive it to achieve bidirectional conveying. The splash guards (3) are arranged on both sides of the conveyor belt body (12) to form a processing chamber. The processing head assembly includes a main processing head (1), a slit-type flow channel module, and a rotating processing shaft. The main processing head (1) is located above the conveyor belt body (12) and can be adjusted vertically. It has a fluid channel inside to spray cleaning liquid, solvent, or coating. The slit-type flow channel module is located inside the main processing head (1) and includes a solid body (7) and a slit flow channel (6) that runs through it. It is used to convert high-pressure fluid into a flat high-speed jet. The rotating processing shaft is located below the main processing head (1) and includes a hollow shaft (8), a number of rectangular nozzles (9) distributed along the axial direction, and a spiral scraper (10) located outside the hollow shaft (8). The outer edge of the spiral scraper (10) is provided with an initial gap between the blade and the workpiece surface. When the rotating processing shaft rotates at low speed, the gap is maintained so that the spiral scraper (10) can play a stirring role. When the rotating processing shaft rotates at high speed, the gap is reduced so that the spiral scraper (10) can contact the workpiece surface to produce a scraping effect. The detection and monitoring components are located on both sides of the device, including sensor mounting bases and detection field of view (11), used to detect the vertical depth parameters of the processing head (1) in real time and transmit the collected data to the control system as a feedback signal for speed adaptive adjustment.

2. The workbench cleaning device based on adaptive speed control of cutting depth as described in claim 1, characterized in that, The slit width of the slit channel (6) is 0.5 to 3 mm. The cross-sectional shape of the slit channel (6) is rectangular, trapezoidal or Venturi contraction type. The main body (7) is made of stainless steel. The two ends of the main body (7) are connected to the shell of the main treatment head (1) through sealing flanges. An O-ring is provided at the connection. The inner surface of the slit channel (6) is polished. A chamfer transition is provided at the inlet of the slit channel (6) to guide the fluid to smoothly enter the slit area.

3. The workbench cleaning device based on adaptive speed control of cutting depth as described in claim 1, characterized in that, The upper end of the hollow shaft (8) of the rotary processing shaft is connected to the external fluid supply pipeline through a rotary joint. The rotary joint is equipped with a sealing ring made of graphite or silicon carbide. The number of rectangular spray holes (9) is 4 to 12, and the axial distance between adjacent rectangular spray holes (9) is 20 to 50 mm. The rectangular spray holes (9) are arranged at an angle of 30° to 60° with the normal direction of the workpiece surface. The number of spiral scrapers (10) is 2 to 6, and the spiral angle of the spiral scrapers (10) is 15° to 45°. The blade edge of the spiral scrapers (10) is blade-shaped to enhance the physical scraping effect. The rotary processing shaft is driven by an independent drive motor through a pulley or gear reduction mechanism. The speed adjustment range of the drive motor is 50 rpm to 3000 rpm.

4. The workbench cleaning device based on adaptive speed control of cutting depth as described in claim 1, characterized in that, The initial gap between the outer edge of the spiral scraper (10) and the workpiece surface is 0.5 mm to 1.5 mm. When the rotating processing shaft is running at a low speed of 50 rpm to 200 rpm, the gap remains constant to play a stirring role. When the rotating processing shaft is running at a high speed of 1000 rpm to 3000 rpm, the spiral scraper (10) expands radially under the action of centrifugal force, causing the gap to shrink to less than 0.05 mm to produce a scraping effect.

5. The control method for the workbench cleaning device based on adaptive speed control of cutting depth as described in claim 1, characterized in that, The control method implements variable speed control based on a preset nonlinear velocity-depth mapping relationship. The velocity-depth mapping curve has a U-shaped characteristic, including a first high-speed zone when the cutting depth is in the first shallow layer range, a low-speed zone when the cutting depth is in the middle depth range, and a second high-speed zone when the cutting depth is in the second deep layer range. When the cutting depth is in the range of 0 to 20 mm, the lifting speed is 120 mm / min to 160 mm / min. When the cutting depth is in the range of 60 mm to 120 mm, the lifting speed is 10 mm / min to 15 mm / min. When the cutting depth is in the range of 130 mm to 146.775 mm, the lifting speed increases again to 120 mm / min to 160 mm / min. When the measured depth is in the range of 20 mm to 60 mm, a cosine smooth transition formula is used to smoothly transition the lifting speed from the first high-speed zone to the low-speed zone. When the measured depth is in the range of 120 mm to 130 mm, the same cosine smooth transition formula is used to smoothly transition the lifting speed from the low-speed zone to the second high-speed zone.

6. The control method as described in claim 5, characterized in that, The control method includes the following steps: an initialization setting step, which presets speed-depth mapping curve parameters according to the type, material, and expected processing effect of the workpiece to be processed, or selects an applicable mapping curve from a preset curve library; a real-time detection step, which collects the cutting depth data of the processing head relative to the workpiece surface in real time through a detection component and transmits the data to the control system in real time; a speed calculation step, in which the control system calculates the target lifting speed corresponding to the current moment based on the real-time collected cutting depth value through table lookup or interpolation; a speed execution step, in which the control system sends a speed command to the drive motor to adjust the lifting speed of the conveyor belt or the worktable of the processing head to track the target lifting speed; and a cyclic feedback step, which repeats the steps from real-time detection to speed execution to achieve continuous adaptive speed adjustment during the processing.

7. The control method as described in claim 5, characterized in that, The depth of cut is measured based on the following geometric parameters: the reference plane (18) is a horizontal reference line representing the workpiece surface, liquid surface, or a preset measurement reference; the vertical depth (17) is the distance from the center of the rotation processing axis or the rotation center vertically downward to the reference plane (18), and the vertical depth (17) is the main measurement value of the depth of cut, which is acquired by the detection system in real time and transmitted to the control system; the oblique distance (16) is the distance from the center of the rotation processing axis along a specific angle to the intersection of the outer circle of the rotation processing axis and the reference plane (18), and the oblique distance (16) is used to assist in correcting the measurement error of the vertical depth (17). The measurement error of the vertical depth is corrected by the oblique distance, and the correction formula is: d corrected =d oblique* cos(θ), where d oblique Let θ be the oblique distance and θ be the angle between the oblique distance and the vertical direction. The oblique distance is converted into a corrected value in the vertical direction through this cosine projection relationship. The control system queries the preset speed-depth mapping curve based on the corrected vertical depth value to obtain the target lifting speed at the current moment and realizes real-time tracking and adjustment of the speed through the drive motor.

8. The cleaning method of the workbench cleaning device as described in claim 1, characterized in that, The slit channel (6) inside the main processing head (1) is connected to the high-pressure cleaning fluid supply system. After being pressurized by the high-pressure pump, the cleaning fluid is converted into a flat high-speed jet through the slit channel (6) and sprayed vertically downwards onto the workpiece surface. The rotating processing shaft rotates at a low speed so that the spiral scraper (10) mainly plays a stirring role to prevent solid particles in the cleaning fluid from settling. The detection component measures the vertical depth of the processing head (1) in real time. The control system obtains the target speed by looking up the table based on the measured depth and performs speed adjustment. When the vertical depth reaches the preset key area, the lifting speed is automatically reduced.

9. The collaborative cleaning method of the workbench cleaning device as described in claim 1, characterized in that, While the cleaning fluid is sprayed from the slit channel (6) of the main processing head (1), the rotating processing shaft rotates at a high speed so that the edge of the spiral scraper (10) directly contacts the workpiece surface. The rotational motion of the spiral scraper (10) and the lifting motion of the worktable form a composite motion trajectory that produces a combined effect of scraping, cutting and stirring on the workpiece surface. The speed-depth mapping curve is set at a lower value in the middle depth region than at the two ends depth regions. The detection component monitors the vertical depth of the spiral scraper (10), and the control system adjusts the lifting speed of the worktable and the rotational speed of the rotating processing shaft in real time to achieve the optimal synergy between physical action and fluid action.

Images