Airflow-guiding cleaning device

Abstract

An airflow guiding cleaning device includes a base unit, a driving unit, a spray seat unit and at least one nozzle unit. The base unit is used for placing materials. The driving unit includes a carrier. The spray seat unit is arranged on the carrier and above the materials. The at least one nozzle unit is fixedly connected to the spray seat unit and includes a flushing liquid nozzle member and an airflow supporting nozzle member. The flushing liquid nozzle member is used for spraying flushing liquid forward and downward. The airflow supporting nozzle member is fixedly connected behind and below the flushing liquid nozzle member and is used for providing supporting airflow to the flushing liquid forward and downward, and a trajectory projected by the flushing liquid relative to a left-right direction and a trajectory projected by the supporting airflow relative to the left-right direction are at an angle, thereby improving the impact force of the flushing liquid applied to the surface of the materials.

Description

Technical Field

[0001] This invention relates to a cleaning device, and more particularly to an airflow-guided cleaning device. Background Technology

[0002] An existing wafer cleaning apparatus, as shown in Taiwan Patent Publication No. TW I733268B, includes a spray container, a nozzle, and a droplet size sorting device. The droplet size sorting device is connected to the spray container via a first connecting pipe and to an inner core of the nozzle via a second connecting pipe. In this way, the droplet size sorting device can be used to adjust the droplet size and control the droplet flow rate, ensuring effective cleaning of the wafer surface.

[0003] However, the existing wafer cleaning apparatus has a relatively complex structure, resulting in relatively high manufacturing costs. Therefore, researchers in the field are still exploring other feasible alternatives. Summary of the Invention

[0004] The purpose of this invention is to provide an airflow-guided cleaning device that can ensure the cleaning effect on the wafer surface.

[0005] This invention relates to an airflow-guided cleaning device suitable for rinsing materials with a rinsing liquid. The airflow-guided cleaning device includes a base unit, a drive unit, a spray base unit, and at least one nozzle unit. The base unit is used to place the material. The drive unit includes a support member extending in a vertical direction. The spray base unit is disposed on the support member and located above the material in the vertical direction. The at least one nozzle unit is fixedly connected to the spray base unit and includes a rinsing liquid nozzle and an airflow support nozzle. The rinsing liquid nozzle is used to spray the rinsing liquid in a forward-backward direction substantially perpendicular to the vertical direction and forward and downward in the vertical direction. The airflow support nozzle is fixedly connected to the rear and lower side of the rinsing liquid nozzle in the forward-backward direction and the vertical direction, and is used to provide a supporting airflow to the rinsing liquid in a forward and downward direction. The trajectory projected by the rinsing liquid relative to the left-right direction substantially perpendicular to the forward-backward direction and the vertical direction forms an angle with the trajectory projected by the supporting airflow relative to the left-right direction.

[0006] The airflow guiding cleaning device of the present invention includes a base unit comprising a base bottom wall, a base surrounding wall that surrounds and connects to the upper edge of the base bottom wall along the vertical direction, and a base top wall disposed at the upper edge of the base surrounding wall along the vertical direction. The base bottom wall, the base surrounding wall, and the base top wall together define a cleaning space. The drive unit, the spray base unit, and the at least one nozzle unit are located in the cleaning space. The base bottom wall is used for placing the material.

[0007] The airflow guiding cleaning device of the present invention further includes a vacuum extraction unit. One of the base bottom wall, the base surrounding wall and the base top wall defines a vacuum extraction port that communicates with the cleaning space. The vacuum extraction unit communicates with the cleaning space through the vacuum extraction port to extract gas in the cleaning space.

[0008] The airflow guiding cleaning device of the present invention further includes an auxiliary exhaust unit. One of the base bottom wall, the base surrounding wall, and the base top wall defines an installation port communicating with the cleaning space. The auxiliary exhaust unit includes an exhaust fan and an exhaust nozzle installed on the exhaust fan and passing through the installation port. The exhaust nozzle defines an exhaust port located in the cleaning space. The exhaust port faces the rinsing liquid nozzle and the airflow support nozzle along the front-back direction. The exhaust fan is used to extract air from the rinsing liquid nozzle and the airflow support nozzle via the exhaust nozzle.

[0009] The airflow guiding cleaning device of the present invention further includes an auxiliary exhaust unit, which includes an exhaust fan and an exhaust nozzle component installed on the exhaust fan. The exhaust nozzle component defines an exhaust port, which faces the flushing liquid nozzle component and the airflow support nozzle component along the front-back direction. The exhaust fan is used to extract air from the flushing liquid nozzle component and the airflow support nozzle component via the exhaust nozzle component.

[0010] In the airflow guiding cleaning device of the present invention, the spray base unit and the at least one nozzle unit are pivotally mounted on the carrier.

[0011] The airflow guiding cleaning device of the present invention further includes a first slide, a first moving member slidably disposed on the first slide in the left-right direction, a second slide disposed on the upper side of the first moving member, a second moving member slidably disposed on the second slide in the front-back direction, a third slide disposed on the upper side of the second moving member, and a third moving member slidably disposed on the third slide in the up-down direction, wherein the support member is fixedly connected to the third moving member.

[0012] The beneficial effects of the present invention are as follows: by setting the flushing liquid nozzle and the airflow support nozzle of the at least one nozzle unit, the flushing liquid nozzle is prompted to spray the flushing liquid forward and downward, and the airflow support nozzle is made to provide the supporting airflow to the flushing liquid forward and downward, thereby increasing the impact force of the flushing liquid applied to the material surface forward and downward, and ensuring that the material can be cleaned. Attached Figure Description

[0013] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, wherein:

[0014] Figure 1 This is an embodiment of the airflow guiding cleaning device of the present invention and a three-dimensional schematic diagram of a material;

[0015] Figure 2 This is an incomplete three-dimensional schematic diagram illustrating a drive unit, a spray base unit, multiple nozzle units, an auxiliary exhaust unit, and the material in the embodiment described.

[0016] Figure 3 This is an incomplete side view schematic diagram illustrating the drive unit, the spray base unit, the nozzle unit, the auxiliary exhaust unit, and the material in the described embodiment;

[0017] Figure 4 This is an incomplete three-dimensional schematic diagram illustrating the driving unit, the spray base unit, the nozzle unit, and the material in the described embodiment;

[0018] Figure 5 This is an incomplete front view schematic diagram illustrating the drive unit, the spray base unit, the nozzle unit, and the material in the described embodiment;

[0019] Figure 6 This is an incomplete side view schematic diagram illustrating the drive unit, the spray base unit, the nozzle unit, and the material in the described embodiment. Detailed Implementation

[0020] See Figure 1 and Figure 2 One embodiment of the airflow-guided cleaning apparatus of the present invention is suitable for rinsing a material 9 with a rinsing fluid, said material 9 being, for example but not limited to, a carrier plate and a wafer mounted on said carrier plate.

[0021] The embodiment includes a base unit 1, a drive unit 2, a spray base unit 3, multiple nozzle units 4, a vacuum extraction unit 5, and an auxiliary exhaust unit 6. In this embodiment, the number of nozzle units 4 is six. However, in variations of this embodiment, the number of nozzle units 4 may be one to five or more than six.

[0022] The base unit 1 is used to place the material 9. The base unit 1 includes a base bottom wall 11, a base surrounding wall 12 that surrounds and connects to the upper edge of the base bottom wall 11 along the vertical direction D1, and a base top wall 13 that is disposed along the vertical direction D1 at the upper edge of the base surrounding wall 12. The base bottom wall 11, the base surrounding wall 12, and the base top wall 13 together define a cleaning space 14.

[0023] One of the base bottom wall 11, the base surrounding wall 12, and the base top wall 13 defines a vacuum extraction port 15 communicating with the cleaning space 14. One of the base bottom wall 11, the base surrounding wall 12, and the base top wall 13 defines an installation port 16 communicating with the cleaning space 14. The base bottom wall 11 is used for placing the material 9.

[0024] The drive unit 2 is located in the cleaning space 14 and includes a first slide 21, a first moving member 22 slidably disposed on the first slide 21 along a left-right direction D2 substantially perpendicular to the vertical direction D1, a second slide 23 disposed on the upper side of the first moving member 22, a second moving member 24 slidably disposed on the second slide 23 along a front-back direction D3 substantially perpendicular to the vertical direction D1 and the left-right direction D2, a third slide 25 disposed on the upper side of the second moving member 24, a third moving member 26 slidably disposed on the third slide 25 along the vertical direction D1, and a support member 27 extending along the vertical direction D1. The support member 27 is fixedly connected to the third moving member 26.

[0025] See Figure 1 and Figure 3 The spray unit 3 is located in the cleaning space 14 and connects the nozzle unit 4 to a storage container (not shown) for storing the rinsing fluid. The spray unit 3 is positioned above the material 9 along the vertical direction D1. In this embodiment, the spray unit 3 is pivotally mounted on the support member 27.

[0026] The nozzle unit 4 is located in the cleaning space 14. In this embodiment, the nozzle unit 4 is fixedly connected to the spray base unit 3 and is pivotally mounted on the support member 27 together with the spray base unit 3. In this way, the direction in which the nozzle unit 4 faces can be easily adjusted.

[0027] See Figure 4 , Figure 5 and Figure 6 Each nozzle unit 4 includes a flushing fluid nozzle element 41 and an airflow support nozzle element 42. For the sake of brevity, the following paragraphs will be described using a single flushing fluid nozzle element 41 and a single airflow support nozzle element 42 as examples unless otherwise specified.

[0028] Each flushing fluid nozzle 41 is connected to the spray base unit 3, thereby connecting to the liquid storage container, and is used to spray the flushing fluid forward and downward along the front-back direction D3 and the up-down direction D1.

[0029] Each airflow support nozzle 42 is connected to a blower (not shown) and is fixedly connected to the rear and lower part of the flushing fluid nozzle 41 along the front-rear direction D3 and the vertical direction D1, and is used to provide a supporting airflow to the flushing fluid in a forward and downward direction. The trajectory projected by the flushing fluid relative to the left-right direction D2 is at an angle to the trajectory projected by the supporting airflow relative to the left-right direction D2.

[0030] See Figure 1 and Figure 3 The vacuum extraction unit 5 is connected to the cleaning space 14 via the vacuum extraction port 15 to extract gas from the cleaning space 14. In this embodiment, the vacuum extraction unit 5 is a vacuum pump.

[0031] The auxiliary exhaust unit 6 includes an exhaust fan 61 and an exhaust nozzle 62 mounted on the exhaust fan 61 and passing through the mounting port 16. The exhaust nozzle 62 defines an exhaust port 621 located in the cleaning space 14, and the exhaust port 621 faces the rinsing liquid nozzle 41 and the airflow support nozzle 42 along the front-rear direction D3. The exhaust fan 61 is used to extract air from the rinsing liquid nozzle 41 and the airflow support nozzle 42 via the exhaust nozzle 62. In this embodiment, the exhaust fan 61 is an axial flow exhaust fan, a centrifugal exhaust fan, or a mixed flow exhaust fan.

[0032] It is worth mentioning that in a variation of this embodiment, the base unit 1 omits the base enclosure 12 and the base top wall 13. Even so, the exhaust fan 61 can still draw air from the flushing liquid nozzle 41 and the airflow support nozzle 42 via the exhaust nozzle 62.

[0033] The actual cleaning of material 9 includes the following steps:

[0034] First, the drive unit 2 drives the spray base unit 3 and the nozzle unit 4 to approach the material 9.

[0035] Next, the flushing fluid is sprayed forward and downward through the flushing fluid nozzle 41 along the front-back direction D3 and the up-down direction D1.

[0036] At the same time, the airflow support nozzle 42 cooperates with the flushing fluid nozzle 41 to provide the support airflow to the flushing fluid in a forward and downward direction.

[0037] At the same time, the exhaust fan 61 draws air through the exhaust nozzle 62 toward the flushing fluid nozzle 41 and the airflow support nozzle 42 to provide a guiding airflow that guides the flushing fluid to spray forward and downward.

[0038] At the same time, the vacuum extraction unit 5 extracts the gas in the cleaning space 14 to reduce gas disturbance in the cleaning space 14.

[0039] In this way, this embodiment can increase the impact force of the rinsing liquid applied forward and downward to the surface of the material 9, ensuring that the grooves (gap) on the surface of the material 9 can be cleaned.

[0040] Therefore, this embodiment has the following advantages:

[0041] (i) By setting the flushing liquid nozzle 41 and the airflow support nozzle 42 of the nozzle unit 4, each flushing liquid nozzle 41 is made to spray the flushing liquid forward and downward, and the corresponding airflow support nozzle 42 is made to provide support airflow to the flushing liquid forward and downward, thereby supporting and increasing the impact force of the flushing liquid applied to the surface of the material 9 forward and downward, ensuring that the material 9 can be cleaned.

[0042] (ii) By setting the base bottom wall 11, the base surrounding wall 12 and the base top wall 13 of the base unit 1 and the vacuum extraction unit 5, the gas in the cleaning space 14 is extracted to reduce the gas disturbance in the cleaning space 14, thereby increasing the impact force of the rinsing liquid applied to the surface of the material 9 in a forward and downward direction, and ensuring that the material 9 can be cleaned.

[0043] (iii) By setting the exhaust fan 61 and the exhaust nozzle 62 of the auxiliary exhaust unit 6 to exhaust air towards the flushing liquid nozzle 41 and the airflow support nozzle 42, a guiding airflow is provided to guide the flushing liquid to spray forward and downward, thereby increasing the impact force of the flushing liquid on the surface of the material 9 in a forward and downward manner, and ensuring that the material 9 can be cleaned.

[0044] In summary, the airflow-guided cleaning device of the present invention ensures the cleaning effect on the material and effectively achieves the purpose of the present invention.

[0045] The above description is merely an embodiment of the present invention and should not be construed as limiting the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the claims and description of the present invention shall still fall within the scope of the present invention.

Claims

1. An airflow-guided cleaning device, suitable for rinsing materials with a rinsing solution, characterized in that: The airflow guiding cleaning device includes a base unit, a drive unit, a spray base unit, and at least one nozzle unit. The base unit is used for placing the material. The drive unit includes a support member extending in the vertical direction. The spray base unit is disposed on the support member and located above the material in the vertical direction. The at least one nozzle unit is fixedly connected to the spray base unit and includes a flushing liquid nozzle and an airflow support nozzle. The flushing liquid nozzle is used to spray the flushing liquid in a forward and backward direction substantially perpendicular to the vertical direction and forward and downward in the vertical direction. The airflow support nozzle is fixedly connected to the rear and lower side of the flushing liquid nozzle in the forward and backward direction and the vertical direction, and is used to provide a supporting airflow to the flushing liquid in a forward and downward direction. The trajectory projected by the flushing liquid relative to the left and right direction substantially perpendicular to the forward and backward direction and the vertical direction forms an angle with the trajectory projected by the supporting airflow relative to the left and right direction.

2. The airflow guiding cleaning device according to claim 1, characterized in that: The base unit includes a base bottom wall, a base surrounding wall that surrounds and connects to the upper edge of the base bottom wall along the vertical direction, and a base top wall that is disposed at the upper edge of the base surrounding wall along the vertical direction. The base bottom wall, the base surrounding wall, and the base top wall together define a cleaning space. The drive unit, the spray base unit, and the at least one nozzle unit are located in the cleaning space. The base bottom wall is used for placing the material.

3. The airflow guiding cleaning device according to claim 2, characterized in that: The airflow guiding cleaning device also includes a vacuum extraction unit. One of the base bottom wall, the base surrounding wall and the base top wall defines a vacuum extraction port that communicates with the cleaning space. The vacuum extraction unit communicates with the cleaning space through the vacuum extraction port to extract gas from the cleaning space.

4. The airflow guiding cleaning device according to claim 3, characterized in that: The airflow guiding cleaning device further includes an auxiliary exhaust unit. One of the base bottom wall, the base surrounding wall, and the base top wall defines an installation port communicating with the cleaning space. The auxiliary exhaust unit includes an exhaust fan and an exhaust nozzle installed on the exhaust fan and passing through the installation port. The exhaust nozzle defines an exhaust port located in the cleaning space. The exhaust port faces the rinsing liquid nozzle and the airflow support nozzle along the front-back direction. The exhaust fan is used to extract air from the rinsing liquid nozzle and the airflow support nozzle via the exhaust nozzle.

5. The airflow guiding cleaning device according to claim 1, characterized in that: The airflow guiding cleaning device further includes an auxiliary exhaust unit, which includes an exhaust fan and an exhaust nozzle component installed on the exhaust fan. The exhaust nozzle component defines an exhaust port, which faces the flushing liquid nozzle component and the airflow support nozzle component along the front-back direction. The exhaust fan is used to extract air from the flushing liquid nozzle component and the airflow support nozzle component via the exhaust nozzle component.

6. The airflow guiding cleaning device according to claim 1, characterized in that: The spray base unit and the at least one nozzle unit are pivotally mounted on the carrier.

7. The airflow guiding cleaning device according to claim 1, characterized in that: The driving unit further includes a first slide block, a first moving member slidably disposed on the first slide block in the left-right direction, a second slide block disposed on the upper side of the first moving member, a second moving member slidably disposed on the second slide block in the front-back direction, a third slide block disposed on the upper side of the second moving member, and a third moving member slidably disposed on the third slide block in the up-down direction, wherein the bearing member is fixedly connected to the third moving member.

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