Dual line film change detection apparatus

Abstract

The application discloses a double-line detection and wafer changing device, which comprises a detection mechanism, a feeding mechanism and a discharging mechanism. The detection mechanism comprises a first conveying line and a second conveying line arranged side by side and a detection device arranged on the paths of the two conveying lines. An upper feeding station is formed at the front end of the conveying direction, and a lower discharging station is formed at the rear end. The feeding mechanism selectively sends a crystal boat in a first box into the first conveying line or the second conveying line through a feeding device, a feeding-in device and a front moving carrying device with two working states. The discharging mechanism transfers the detected crystal boat from the first conveying line or the second conveying line to a second box through a rear moving carrying device with two working states and a discharging device. The double-line detection and wafer changing device can realize the split-flow detection and combined-flow discharging of the crystal boat between the two lines, which is beneficial to improving the transfer and detection connection efficiency and improving the overall wafer changing efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to a dual-line inspection and wafer changing device. Background Technology

[0002] In semiconductor and related processes, crystal boats typically need to undergo appearance and condition inspections before being put into use or during the transfer process to identify defects such as deformation, delamination, and abnormal pin positions.

[0003] In existing technologies, crystal boat inspection equipment mostly uses a single transmission path for sequential conveying. That is, after loading, crystal boats enter the inspection area one by one along a single line, and then are sent to the unloading position after inspection. While this structure can complete the basic inspection process, in continuous feeding and unloading operations, loading, inspection, and unloading are usually sequentially connected along the same path, easily leading to waiting between processes. When the inspection mechanism has a fast processing cycle, or when continuous material box replacement is required, the single-line transmission method can easily make the transmission path a limiting factor for overall processing capacity.

[0004] Therefore, it is still necessary to improve the overall wafer changing and transmission organization of the existing technology to enable the loading and unloading of the crystal boat testing equipment to match multiple transmission paths at the front and back ends of the testing mechanism, reduce process waiting time, and improve the continuity and cycle coordination of the crystal boat in the loading, testing and unloading process. Summary of the Invention

[0005] The present invention aims to provide a dual-line inspection and wafer changing device to solve the technical problems of single-line inspection devices, such as limited cycle time, long transfer waiting time, low utilization rate of inspection mechanism, and difficulty in improving overall throughput during the wafer loading, inspection and unloading process.

[0006] To solve the above-mentioned technical problems, the present invention provides a dual-line inspection and changing device, comprising: The testing mechanism includes a testing device and a first transmission line and a second transmission line arranged side by side. The first transmission line and the second transmission line are respectively provided with traction components for conveying crystal boats along the transmission direction. The testing device is arranged on the transmission path of the first transmission line and the second transmission line and is used to test the crystal boats transported by the traction components. The testing mechanism has a loading station at the front end and a unloading station at the rear end in the transmission direction. A loading mechanism, disposed at the loading station, includes a loading device, a front transfer device, and a feeding device. The loading device is used to load a first material box carrying a crystal boat. The front transfer device has a first operating state and a second operating state. In the first operating state, the feeding device is used to transport the crystal boat from the first material box to the front transfer device, while the traction member is used to transport the crystal boat from the front transfer device to the first transmission line. In the second operating state, the feeding device is used to transport the crystal boat from the first material box to the front transfer device, while the traction member is used to transport the crystal boat from the front transfer device to the second transmission line. A feeding mechanism is provided at the feeding station. The feeding mechanism includes a feeding device, a rear transfer device, and a discharging device. The feeding device is used to feed the second material box of the crystal boat after load testing. The rear transfer device has a third working state and a fourth working state. In the third working state, the traction member is used to transport the crystal boat from the first transmission line to the rear transfer device, and the discharging device is used to transport the crystal boat from the rear transfer device to the second material box. In the fourth working state, the traction member is used to transport the crystal boat from the second transmission line to the rear transfer device, and the discharging device is used to transport the crystal boat from the rear transfer device to the second material box.

[0007] Optionally, the front transfer device is movably arranged relative to the detection mechanism and the feeding device to switch between a first working state and a second working state. The front transfer device has at least a first station and a second station. In the first working state, the feeding device is used to transport the crystal boat from the first material box to the second station, and the traction member is used to transport the crystal boat from the first station to the first transmission line. In the second working state, the feeding device is used to transport the crystal boat from the first material box to the first station, and the traction member is used to transport the crystal boat from the second station to the second transmission line. The rear transfer device is movably arranged relative to the detection mechanism and the unloading device to switch between a third working state and a fourth working state. The rear transfer device has at least a third station and a fourth station. In the third working state, the traction member is used to transport the crystal boat from the first transmission line to the third station, and the unloading device is used to transport the crystal boat from the fourth station to the second material box. In the fourth working state, the traction member is used to transport the crystal boat from the second transmission line to the fourth station, and the unloading device is used to transport the crystal boat from the third station to the second material box.

[0008] Optionally, the first transmission line and the second transmission line are arranged side by side with a gap in the lateral direction, and a gap is defined between the first transmission line and the second transmission line, with the lateral direction perpendicular to the transmission direction; The front transfer device and the rear transfer device are respectively movably arranged in the lateral direction, the first station and the second station are arranged sequentially in the lateral direction, and the third station and the fourth station are arranged sequentially in the lateral direction. In the first working state, the first station is aligned with the first transmission line in the transmission direction, and the second station is aligned with the gap in the transmission direction; In the second working state, the first station is aligned with the gap in the transmission direction, and the second station is aligned with the second transmission line in the transmission direction. In the third working state, the third station is aligned with the first transmission line in the transmission direction, and the fourth station is aligned with the gap in the transmission direction. In the fourth working state, the third station is aligned with the gap in the transmission direction, and the fourth station is aligned with the second transmission line in the transmission direction.

[0009] Optionally, the feeding device includes a feeding push rod that is movably disposed along the conveying direction. The feeding push rod is aligned with the gap in the lateral direction, and the feeding push rod, the output end of the loading device, and the front transfer device are arranged sequentially in the conveying direction.

[0010] Optionally, the discharge device includes a discharge push rod movably disposed along the transmission direction, the discharge push rod being at least partially disposed in the gap, and the discharge push rod, the rear transfer device, and the input end of the unloading device being arranged sequentially in the transmission direction.

[0011] Optionally, the feeding device includes a first output channel and a second output channel for feeding a fully loaded second material box. The second material box includes a qualified material box and an NG material box. The qualified material box is used to carry a crystal boat that has passed the inspection by the inspection device, and the NG material box is used to carry a crystal boat that has failed the inspection by the inspection device. The discharging device is used to distribute the qualified material box to one of the first output channel and the second output channel, and to distribute the NG material box to the other of the first output channel and the second output channel.

[0012] Optionally, the discharge device further includes a vertical moving component and an input channel, the input channel being used to transport an empty second material box to the vertical moving component, and the first output channel, the input channel, and the second output channel being arranged sequentially from top to bottom; The vertical moving component has a first support member and a second support member arranged side by side in the vertical direction. The first support member is used to support the qualified material box, and the second support member is used to support the NG material box. The vertical moving component drives the first support member and the second support member to move synchronously in the vertical direction, so that the first support member has multiple working positions that are vertically aligned with one of the rear transfer device, the input channel, the first output channel, and the second output channel, respectively. The second support member has multiple working positions that are vertically aligned with the other of the rear transfer device, the input channel, the first output channel, and the second output channel, respectively.

[0013] Optionally, each of the traction components includes a front traction component and a rear traction component arranged sequentially along the transmission direction. The front traction component is used to transport the crystal boat from the front transfer device to the detection device, and the rear traction component is used to transport the crystal boat from the detection device to the rear transfer device.

[0014] Optionally, the first transmission line and the second transmission line each include a front moving module and a rear moving module that are independent of each other. The front moving module drives the front traction member to move along the transmission direction, and the rear moving module drives the rear traction member to move along the transmission direction.

[0015] Optionally, the detection device includes a 3D laser line scanning device, a first 2D vision detection device, and a second 2D vision detection device arranged sequentially along the transmission direction.

[0016] The dual-line inspection and wafer changing equipment provided by this invention forms a parallel transmission architecture by setting up a first and a second transmission line side by side. This allows the transport and inspection of wafer boats to be performed synchronously on both lines. Compared to a single-line transmission scheme, it can process more wafer boats in the same amount of time, significantly improving the transmission throughput. Simultaneously, when the front transfer device switches between the first and second operating states, the feeding device transports the wafer boat from the first material box to the station of the front transfer device, which is performed in parallel with the traction component transporting the wafer boat from the front transfer device to the corresponding transmission line. This ensures that the feeding action on the loading side and the action of feeding to the inspection line do not wait for each other. Correspondingly, when the rear transfer device switches between the third and fourth operating states, the traction component transports the wafer boat from the transmission line to the station of the rear transfer device, which is performed in parallel with the unloading device transporting the wafer boat from the rear transfer device to the second material box. This ensures that the receiving action on the unloading side and the boxing action do not interfere with each other. As a result, the three processes of loading, inspection and unloading can be decoupled and run in parallel, effectively reducing the waiting time between processes. Compared with the traditional single-line serial loading and unloading method, it can achieve continuous operation without stopping the machine, significantly improving the overall efficiency of changing and inspection. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 A three-dimensional structural schematic diagram of an embodiment of the dual-line detection and plate changing device provided by the present invention; Figure 2 for Figure 1 A three-dimensional structural diagram of a Chinese testing institution; Figure 3 for Figure 1 A three-dimensional structural diagram of the feeding device; Figure 4 for Figure 3 A three-dimensional structural diagram of the feeder; Figure 5 for Figure 3 A three-dimensional structural diagram of the vertical drive component; Figure 6 for Figure 1 A three-dimensional structural diagram of the feeding device.

[0019] Explanation of reference numerals in the attached figures: 100-Dual-line inspection and changing equipment; 10-Inspection mechanism; 101-Loading station; 102-Unloading station; 11-First transmission line; 12-Second transmission line; 13-Inspection device; 131-3D laser line scanning device; 132-First 2D vision inspection device; 133-Second 2D vision inspection device; 14-Traction component; 15-Gap; 20-Loading mechanism; 21-Loading device; 211-First transmission belt; 212-Second transmission belt; 213-Vertical drive assembly; 2131-Vertical drive component; 2132-Horizontal transfer component; 22 - Front transfer device; 221- First station; 222- Second station; 23- Feeding device; 231- Feeding push rod; 30- Unloading mechanism; 31- Unloading device; 311- First output channel; 312- Second output channel; 313- Input channel; 314- Vertical moving component; 3141- First carrier; 3142- Second carrier; 32- Rear transfer device; 321- Third station; 322- Fourth station; 33- Discharge device; 200- First material box; 300- Second material box; 301- Qualified material box; 302- NG material box. Detailed Implementation

[0020] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The present invention will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of the present invention can be combined with each other.

[0021] It should be noted that the terms "first," "second," etc., in the specification, claims, and drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0022] Please see Figures 1 to 6 This invention provides a dual-line inspection and wafer changing device for inspecting and changing wafer boats. It should be noted that, in this invention, a wafer boat refers to a carrier used to hold semiconductor wafers, also known as a boat or tray. The first tray refers to an older specification tray for accommodating multiple wafer boats to be inspected, and the second tray refers to a newer specification tray for accommodating multiple wafer boats that have completed inspection. The wafer boats are typically stacked in both the first and second trays.

[0023] To clearly describe the positional and kinematic relationships between the components of this invention, the directions involved in this application are first uniformly defined. For example... Figure 1 As shown, the direction in which the crystal boat is conveyed on the detection mechanism 10 is defined as the transmission direction, the horizontal direction perpendicular to the transmission direction is defined as the transverse direction, and the up-down direction is approximately parallel to the direction of gravity extension and perpendicular to both the transmission direction and the transverse direction. The above directional definitions are only for the convenience of describing the relative positions and movement relationships between the components and do not constitute a limitation on the scope of protection of this invention. Furthermore, unless otherwise explicitly specified and limited, "above" or "below" the second component can include direct contact between the first and second components, or contact between the first and second components through another component between them. Moreover, "above" or "on top" the second component includes the first component directly above or diagonally above the second component, or simply indicates that the first component is at a higher horizontal level than the second component. "Below" or "below" the second component includes the first component directly below or diagonally below the second component, or simply indicates that the first component is at a lower horizontal level than the second component.

[0024] Please see Figure 1 and Figure 2In the embodiments provided by this invention, the dual-line inspection and wafer changing device 100 includes an inspection mechanism 10, a feeding mechanism 20, and a discharging mechanism 30. The inspection mechanism 10 is located in the middle region of the device, while the feeding mechanism 20 and the discharging mechanism 30 are respectively located at the front and rear ends of the inspection mechanism 10 along the transmission direction. The overall device has a three-section layout. The wafer boat enters from the feeding mechanism 20 along the transmission direction, and while being transported along the transmission direction, it is inspected by the inspection device 13 of the inspection mechanism 10. Afterward, it is output by the discharging mechanism 30 to the second material box 300, thereby completing the inspection and wafer changing of the wafer boat.

[0025] like Figure 2 As shown, the detection mechanism 10 includes a first transmission line 11 and a second transmission line 12 arranged side by side, with the first transmission line 11 and the second transmission line 12 spaced laterally and having parallel transmission directions. Each transmission line is used to carry and transport the crystal boat, enabling the crystal boat to move along the transmission direction from the loading station 101 at the front end to the unloading station 102 at the rear end. The first transmission line 11 and the second transmission line 12 can adopt common structures in the art, such as conveyor belt structures, roller conveyor structures, linear guide rail and slider structures, or chain drive structures, as long as they can achieve stable transport of the crystal boat along the transmission direction. In an optional embodiment, the first transmission line 11 and the second transmission line 12 adopt the form of parallel linear guide rails and sliders to ensure smoothness and positioning accuracy during the transport process.

[0026] Specifically, traction components 14 are respectively provided on the first transmission line 11 and the second transmission line 12. The traction components 14 are used to transport the crystal boat along the transmission direction, enabling the crystal boat to move reliably between the loading station 101 and the unloading station 102. The traction component 14 can be in the form of a gripper-type robot that slides along a linear guide rail, a vacuum suction cup, a pusher, or a hook, as long as it can be detachably connected to the crystal boat and drive it to move along the transmission direction. The power source of the traction component 14 can be a lead screw and nut pair driven by a servo motor, a synchronous belt drive mechanism, or a linear motor, etc. Those skilled in the art can select a suitable drive form according to actual needs.

[0027] The detection mechanism 10 also includes a detection device 13, which is disposed on the transmission path of the first transmission line 11 and the second transmission line 12, and is used to detect the crystal boat transported by the traction member 14. Specifically, the detection device 13 can be located directly above, to the side, or below the first transmission line 11 and the second transmission line 12, as long as its detection area can cover the crystal boat passing through the transmission lines. In this embodiment, the detection device 13 is fixed to both sides and above the two transmission lines by a frame or cantilever bracket, and faces the crystal boat passing along the transmission direction. The specific composition of the detection device 13 will be described in detail in subsequent embodiments.

[0028] The testing mechanism 10 has a loading station 101 at the front end and a unloading station 102 at the rear end in the transmission direction. The loading station 101 is the connection area where the crystal boat is taken out of the first material box 200 and enters the first transmission line 11 or the second transmission line 12. The unloading station 102 is the connection area where the crystal boat leaves the first transmission line 11 or the second transmission line 12 after testing and is loaded into the second material box 300.

[0029] The loading mechanism 20 is located at the loading station 101 and includes a loading device 21, a front transfer device 22, and a feeding device 23. The loading device 21 is used to load the first material box 200 carrying the crystal boat, that is, to transport the first material box 200 filled with the crystal boat to be tested to the picking position. The specific structure of the loading device 21 can adopt a material box conveying mechanism commonly used in the art, such as mechanical gripper loading, conveyor belt loading, etc. In this embodiment, as shown... Figure 3 and Figure 4 As shown, the loading device 21 is a double-layer conveyor structure including a first conveyor belt 211 and a second conveyor belt 212. The first conveyor belt 211 is used to feed a fully loaded first material box 200, and the second conveyor belt 212 is used to send an empty first material box 200 out. The loading device 21 may also include a vertical drive assembly 213 to realize the vertical movement of the first material box 200, so that crystal boats of different heights can be aligned with the first conveyor belt 211 or the second conveyor belt 212 in the horizontal direction in sequence, realizing the loading and unloading of the first material box 200.

[0030] Furthermore, such as Figure 4 As shown, the vertical drive assembly 213 includes a horizontal transfer member 2132 for carrying the first material box 200, and a vertical drive member 2131 for driving the horizontal transfer member 2132 to move up and down. The vertical drive member 2131 can be a lead screw and nut drive mechanism, or a drive mechanism such as a cylinder or hydraulic cylinder. The horizontal transfer member 2132 can drive the first material box 200 to move in the horizontal direction, thereby cooperating with the first conveyor belt 211 to load the fully loaded first material box 200, or cooperating with the second conveyor belt 212 to unload the empty first material box 200.

[0031] The feeding device 23 is used to transfer the crystal boat from the first material box 200 to the front transfer device 22. The feeding device 23 can be a linear drive mechanism such as a push rod, pull rod, or lever, capable of passing through the through-side wall of the first material box 200 and horizontally pushing the crystal boat located in the material box. In this embodiment, as... Figure 5 As shown, the feeding device 23 is preferably a feeding push rod 231 that is movable along the conveying direction.

[0032] The front transfer device 22 is a crucial transfer device connecting the feeding device 23 and the detection mechanism 10, and it has a first operating state and a second operating state. In the first operating state, the feeding device 23 transports the crystal boat from the first material box 200 to the front transfer device 22, while the traction member 14 transports the crystal boat from the front transfer device 22 to the first transmission line 11. In the second operating state, the feeding device 23 transports the crystal boat from the first material box 200 to the front transfer device 22, while the traction member 14 transports the crystal boat from the front transfer device 22 to the second transmission line 12. It should be noted that "simultaneously" here does not mean that the two actions must occur strictly synchronously, but rather that in the same operating state, the two different stations of the front transfer device 22 respectively handle the feeding and discharging actions, allowing the feeding and discharging to be performed in parallel without interfering with each other.

[0033] With the above structure, in the first operating state, one station of the front transfer device 22 receives a new crystal boat from the feeding device 23, while the crystal boat at the other station is taken away by the traction member 14 and sent into the first transmission line 11. In the second operating state, the station roles are reversed, and the new crystal boat is sent into the second transmission line 12. Thus, the front transfer device 22 can alternately distribute crystal boats from the feeding device 23 to the first transmission line 11 and the second transmission line 12, realizing alternating feeding on two lines.

[0034] The unloading mechanism 30 is located at the unloading station 102. The unloading mechanism 30 includes an unloading device 31, a rear transfer device 32, and an output device 33. The unloading device 31 is used to transport the empty second material box 300 to the rear end of the inspection mechanism 10, and to unload the second material box 300 after it is fully loaded with the inspection vessel, that is, to receive the second material box 300 that is full of the inspection vessel and output it. The specific structure of the unloading device 31 can be referred to the loading device 21, and will be described in detail in subsequent embodiments.

[0035] The rear transfer device 32 is a key transfer device connecting the detection mechanism 10 and the discharge device 33, and it has a third operating state and a fourth operating state. In the third operating state, the traction member 14 is used to transport the crystal boat from the first transmission line 11 to the rear transfer device 32, and the discharge device 33 is used to transport the crystal boat from the rear transfer device 32 to the second material box 300. In the fourth operating state, the traction member 14 is used to transport the crystal boat from the second transmission line 12 to the rear transfer device 32, and the discharge device 33 is used to transport the crystal boat from the rear transfer device 32 to the second material box 300. Similarly, the simultaneous operation mentioned here means that in the same operating state, the two different stations of the rear transfer device 32 respectively carry out the receiving and discharging actions, so that receiving and discharging can be performed in parallel.

[0036] With the above structure, in the third operating state, one station of the rear transfer device 32 receives the inspected crystal boat from the first transmission line 11, while the crystal boat at the other station is taken away by the discharge device 33 and sent into the second material box 300. In the fourth operating state, the station roles are reversed, receiving the crystal boat from the second transmission line 12 and sending out the crystal boat at the other station. Thus, the rear transfer device 32 can alternately receive crystal boats from the first transmission line 11 and the second transmission line 12, and alternately send the crystal boats out to the discharge device 33, realizing alternating material feeding from two lines.

[0037] The workflow of the dual-line inspection and wafer changing equipment 100 provided in this embodiment is as follows: First, the loading device 21 transports the first material box 200, fully loaded with wafer boats to be inspected, to the material picking position. The feeding device 23 pushes the wafer boat at the bottom of the first material box 200 to the corresponding station of the front transfer device 22. The front transfer device 22 alternately switches between the first working state and the second working state, respectively sending the wafer boats into the first transmission line 11 and the second transmission line 12. The traction member 14 on each transmission line drives the wafer boat to move along the transmission direction, and the inspection is completed when passing through the inspection area of ​​the inspection device 13. After the inspection is completed, the wafer boat arrives at the rear transfer device 32, which alternately switches between the third working state and the fourth working state, alternately receiving wafer boats from the two transmission lines, and the unloading device 33 loads the wafer boat into the second material box 300. When the second material box 300 is full, the unloading device 31 outputs it.

[0038] This embodiment establishes a parallel transmission structure by setting up a first transmission line 11 and a second transmission line 12 side by side. This allows the transport and inspection of wafer boats to be performed synchronously on both lines. Compared to a single-line transmission scheme, more wafer boats can be processed in the same amount of time, significantly improving the transmission throughput. Simultaneously, by setting up a front transfer device 22 with first and second operating states, and a rear transfer device 32 with third and fourth operating states, the functions of alternating distribution and alternating merging of the two lines are realized at the inlet and outlet ends of the inspection mechanism 10, respectively. This transmission structure design enables the decoupled parallel operation of the loading, inspection, and unloading processes. The feeding action on the loading side and the action of feeding onto the inspection line can be executed synchronously, as can the receiving action on the unloading side and the action of loading into the second material box 300, thereby effectively reducing the waiting time between processes. Compared to the traditional single-line serial loading and unloading method, this invention enables continuous operation without downtime, significantly improving the overall efficiency of wafer changing and inspection.

[0039] Based on the previous embodiment, the specific workstation configuration and connection relationship of the front transfer device 22 and the rear transfer device 32 are further defined. Please refer to the following: Figures 1 to 3The front transfer device 22 is movably disposed relative to the detection mechanism 10 and the feeding device 21 to switch between a first operating state and a second operating state. The front transfer device 22 has at least a first station 221 and a second station 222. The first station 221 and the second station 222 are two bearing positions disposed on the front transfer device 22, each used to bear a crystal boat. In the first operating state, the feeding device 23 is used to transport the crystal boat from the first material box 200 to the second station 222, and the traction member 14 is used to transport the crystal boat from the first station 221 to the first transmission line 11. In the second operating state, the feeding device 23 is used to transport the crystal boat from the first material box 200 to the first station 221, and the traction member 14 is used to transport the crystal boat from the second station 222 to the second transmission line 12.

[0040] Thus, in the first operating state, the first station 221 is connected to the first transmission line 11 (i.e., the crystal boat on the first station 221 can be taken away by the traction member 14 and sent into the first transmission line 11), and the second station 222 is connected to the loading device 21 (i.e., the second station 222 can receive the crystal boat sent by the feeding device 23). In the second operating state, the second station 222 is connected to the second transmission line 12, and the first station 221 is connected to the loading device 21. Therefore, the roles of the first and second stations are interchanged between the two operating states; when one station is responsible for receiving a new crystal boat, the other station is responsible for sending a crystal boat to the inspection line, and the two work in parallel. This dual-station alternating operation structure allows the forward transfer device 22 to seamlessly connect the feeding action and the action of distributing crystal boats to the inspection line, eliminating feeding waiting time.

[0041] Similarly, the rear transfer device 32 is movably arranged relative to the detection mechanism 10 and the unloading device 31 to switch between a third operating state and a fourth operating state. The rear transfer device 32 has at least a third station 321 and a fourth station 322. In the third operating state, the traction member 14 is used to transport the crystal boat from the first transmission line 11 to the third station 321, and the unloading device 33 is used to transport the crystal boat from the fourth station 322 to the second material box 300. In the fourth operating state, the traction member 14 is used to transport the crystal boat from the second transmission line 12 to the fourth station 322, and the unloading device 33 is used to transport the crystal boat from the third station 321 to the second material box 300. Thus, the third station 321 and the fourth station 322 exchange roles between the two operating states, with one station responsible for receiving the inspected crystal boat while the other station is responsible for sending the crystal boat out for packaging, realizing parallel execution of receiving and sending.

[0042] In this embodiment, the movement of the front transfer device 22 and the rear transfer device 32 can be achieved using linear movement mechanisms commonly used in the art, such as a slide rail slider mechanism combined with a cylinder, electric cylinder, or motor-driven screw and nut pair. The front transfer device 22 and the rear transfer device 32 are movably arranged laterally, so that their two stations can be aligned with the output end of the loading device 21 and the input end of the first or second transmission line, respectively. This lateral movement switching method has a simple structure, reliable operation, and fast switching speed, which is beneficial to improving the response efficiency of alternating allocation.

[0043] This embodiment clarifies the connection relationships between the first station 221 and the second station 222 of the front transfer device 22 and the loading device 21 and the two transmission lines, as well as the connection relationships between the third station 321 and the fourth station 322 of the rear transfer device 32 and the two transmission lines and the unloading device 31. That is, whether it is the transfer device 22 or the rear transfer device 32, when one station receives, the other station sends out, and the two stations are always in a parallel working state, maximizing the utilization of the transfer device's working time and further improving loading and unloading efficiency.

[0044] Specifically, please refer to Figure 1 and Figure 2 The first transmission line 11 and the second transmission line 12 are arranged side by side with intervals in the transverse direction, forming a gap 15 between them, which is perpendicular to the transmission direction in the transverse direction. This gap 15 provides clearance for the switching of the workstations of the front transfer device 22 and the rear transfer device 32, and also provides a passage for the operation of the feeding device 23 and the discharging device 33. Specifically, the front transfer device 22 and the rear transfer device 32 are respectively movably arranged in the transverse direction. The first workstation 221 and the second workstation 222 of the front transfer device 22 are arranged sequentially in the transverse direction, that is, the two workstations are arranged in the transverse direction. The third workstation 321 and the fourth workstation 322 of the rear transfer device 32 are also arranged sequentially in the transverse direction.

[0045] In the first operating state, the first station 221 is aligned with the first transmission line 11 in the transmission direction, and the second station 222 is aligned with the gap 15 in the transmission direction. At this time, the crystal boat on the first station 221 can smoothly enter the first transmission line 11 along the transmission direction, while the second station 222 is located in the gap 15 area and can dock with the feeding device 23 to receive the crystal boat. In the second operating state, the first station 221 is aligned with the gap 15 in the transmission direction, and the second station 222 is aligned with the second transmission line 12 in the transmission direction. At this time, the first station 221 can receive the crystal boat from the feeding device 23, while the crystal boat on the second station 222 can be fed into the second transmission line 12. Similarly, in the third operating state, the third station 321 is aligned with the first transmission line 11 in the transmission direction, and the fourth station 322 is aligned with the gap 15 in the transmission direction. At this time, the third station 321 can receive the crystal boat from the first transmission line 11, while the crystal boat on the fourth station 322 can be discharged by the discharging device 33. In the fourth operating state, the third station 321 is aligned with the gap 15 in the transmission direction, and the fourth station 322 is aligned with the second transmission line 12 in the transmission direction. At this time, the fourth station 322 can receive the crystal boat from the second transmission line 12, while the crystal boat on the third station 321 can be sent out through the discharge device 33.

[0046] The alignment settings described above make full use of the space in gap 15. In any operating state, both the front transfer device 22 and the rear transfer device 32 have one station aligned with gap 15. This station is located in a non-transmission line area, allowing for safe feeding or discharging operations without interfering with the crystal boat transport on the transmission line. The other station is aligned with the transmission line for feeding or receiving crystal boats.

[0047] In this embodiment, by setting two transmission lines at intervals to form a gap 15, and aligning the two stations of the front transfer device 22 and the rear transfer device 32 with the transmission lines and the gap 15 respectively, the lateral movement distance for station switching is minimized. Specifically, movement is only required within the range of the width of the transmission line plus the width of the gap, thereby improving the speed and efficiency of the two station switching. Simultaneously, the presence of the gap 15 ensures that the actions of the feeding device 23 and the discharging device 33 do not interfere with the crystal boat transport on the transmission lines, guaranteeing spatial independence and operational safety between each process.

[0048] Further, please refer to Figure 3 and Figure 4The feeding device 23 includes a feeding push rod 231 movably disposed along the conveying direction. The feeding push rod 231 is aligned with the gap 15 in the transverse direction. The feeding push rod 231, the output end of the loading device 21, and the front transfer device 22 are arranged sequentially in the conveying direction. When the first material box 200 is conveyed to the picking position by the loading device 21, the feeding push rod 231 moves forward along the conveying direction, passes through the through side wall of the first material box 200, pushes out the crystal boat located at the bottom of the first material box 200, and pushes it to the station on the front transfer device 22 that is currently aligned with the gap 15 (i.e., the second station 222 in the first working state, or the first station 221 in the second working state).

[0049] The feeding push rod 231 can be driven by a linear drive mechanism such as a cylinder, electric cylinder, or motor-driven screw and nut pair. The front end of the feeding push rod 231 can be equipped with a push block or push plate that mates with the edge of the crystal boat to ensure stability and alignment accuracy during the pushing process. The stroke of the feeding push rod 231 can be set according to the depth of the first material box 200 and the position of the front transfer device 22, so as to completely push the crystal boat to the corresponding station of the front transfer device 22.

[0050] In this embodiment, the feed pusher 231 is aligned laterally with the gap 15, and the pushing path of the feed pusher 231 along the transmission direction coincides with the projection of the gap 15 in the transmission direction. This allows the feed pusher 231 to directly push the crystal boat to the current station aligned with the gap 15 on the forward transfer device 22. This layout makes full use of the space of the gap 15. The movement of the feed pusher 231 does not occupy the space of the transmission line, nor does it interfere with the crystal boat on the transmission line. This achieves spatial decoupling between feeding and transmission, ensuring the independence and safety of the movement.

[0051] Optionally, the discharge device 33 includes a discharge push rod movably disposed along the conveying direction. The discharge push rod is at least partially disposed in the gap 15, that is, the main body of the discharge push rod or its pushing end is located within the gap 15 or can extend into the gap 15. The input ends of the discharge push rod, the rear transfer device 32, and the unloading device 31 are arranged sequentially in the conveying direction. When a certain station of the rear transfer device 32 is aligned with the gap 15 (i.e., the fourth station 322 in the third working state, or the third station 321 in the fourth working state), the discharge push rod moves along the conveying direction, pushing the crystal boat that has completed testing at that station into the second material box 300 at the unloading device 31. The driving method of the discharge push rod is similar to that of the feeding push rod 231, and can be a cylinder, electric cylinder, or a screw and nut pair driven by a motor, etc. The way the discharge pusher is positioned in the gap 15 ensures that its pushing path is entirely within the extension range of the gap 15, and it will not interfere with the crystal boat on the first transmission line 11 or the second transmission line 12.

[0052] In this embodiment, the discharge pusher is positioned within the gap 15, making full use of the space between the transmission lines. This results in a compact arrangement of the discharge pusher without conflicting with the space occupied by the transmission lines. The sequential arrangement of the discharge pusher, the rear transfer device 32, and the unloading device 31 in the transmission direction ensures a short-distance, straight-line transmission of the crystal boat from the rear transfer device 32 to the unloading device 31, reducing the number of transfer steps and improving discharge efficiency.

[0053] Preferably, please refer to Figure 6 The unloading device 31 includes a first output channel 311 and a second output channel 312 for unloading fully loaded second material boxes 300. The second material box 300 includes a qualified material box 301 and an NG material box 302 (i.e., a material box carrying defective crystal boats). The qualified material box 301 is used to carry crystal boats that have passed the inspection by the inspection device 13, and the NG material box 302 is used to carry crystal boats that have failed the inspection by the inspection device 13. The unloading device 33 is used to distribute the qualified material box 301 to one of the first output channel 311 and the second output channel 312, and to distribute the NG material box 302 to the other of the first output channel 311 and the second output channel 312. In other words, the first output channel 311 and the second output channel 312 are used to output different types of material boxes, one for outputting qualified products and the other for outputting defective products.

[0054] Specifically, the first output channel 311 and the second output channel 312 can adopt a conveyor belt structure, such as a motor-driven belt conveyor or roller conveyor, to transport the fully loaded material boxes from the loading position to the material unloading position outside the equipment. The discharge device 33 loads the crystal boat into the corresponding qualified material box 301 or NG material box 302 according to the detection results. When the material box is full, it releases the material box to the corresponding output channel, from which it is sent out. The structure in the discharge device 33 that realizes the distribution function can adopt a switching door, guide plate, or movable pushing mechanism, etc. Alternatively, the discharge device 33 can move vertically to align different types of material boxes with different output channels and send them out.

[0055] This embodiment achieves complete physical isolation between qualified and unqualified products by setting up a first output channel 311 and a second output channel 312 for outputting qualified material boxes 301 and NG material boxes 302, respectively. Operators or subsequent equipment can directly take away different types of material boxes from the corresponding output channels without manual sorting, avoiding the risk of mixing materials and improving the convenience and reliability of production management.

[0056] Preferably, please continue reading. Figure 6The discharge device 33 also includes a vertical moving component 314 and an input channel 313. The input channel 313 is used to transport the empty second material box 300 to the vertical moving component 314. The empty second material box 300 enters the device through the input channel 313, is received by the vertical moving component 314, and is ready to be loaded into the crystal boat that has completed testing. The first output channel 311, the input channel 313, and the second output channel 312 are arranged sequentially from top to bottom. That is, the input channel 313 is located in the middle layer, the first output channel 311 and the second output channel 312 are located in the upper and lower layers, respectively. In this embodiment, the first output channel 311 is located in the upper layer and is used to output qualified material boxes 301, the input channel 313 is located in the middle layer and is used to input empty second material boxes 300, and the second output channel 312 is located in the lower layer and is used to output NG material boxes 302. It is understandable that in the parallel implementation, the upper and lower positions of the first output channel 311 and the second output channel 312 can be interchanged, and the output layers of qualified products and NG products can also be interchanged, as long as the two types of material boxes can be output to different channels respectively.

[0057] The vertical moving assembly 314 has a first support member 3141 and a second support member 3142 arranged side-by-side in the vertical direction. The first support member 3141 is used to support the qualified material box 301, and the second support member 3142 is used to support the NG material box 302. The first support member 3141 and the second support member 3142 are fixedly connected side-by-side in the vertical direction, and both move up and down synchronously with the vertical moving assembly 314. The vertical moving assembly 314 drives the first support member 3141 and the second support member 3142 to move synchronously in the vertical direction, so that the first support member 3141 has multiple working positions that are vertically aligned with the rear transfer device 32, the input channel 313, and the first output channel 311, respectively. The second support member 3142 has multiple working positions that are vertically aligned with the rear transfer device 32, the input channel 313, and the second output channel 312, respectively.

[0058] Specifically, in one embodiment, the vertical moving component 314 first rises and falls to an initial position, aligning the second carrier 3142 with the input channel 313 to receive an empty second material box 300 as an NG material box 302. Then, the vertical moving component 314 continues to rise and fall, aligning the first carrier 3141 with the input channel 313 to receive another empty second material box 300 as a qualified material box 301. Afterwards, the vertical moving component 314 aligns the first carrier 3141 or the second carrier 3142 with the outlet of the rear transfer device 32 to receive the crystal boats that have completed inspection and been determined to be qualified or unqualified. When the qualified material box 301 is full, the vertical moving component 314 aligns the first carrier 3141 with the first output channel 311 to deliver the qualified material box 301. When the NG material box 302 is full, the second carrier 3142 aligns with the second output channel 312 to deliver the NG material box 302. The lifting drive method of the vertical moving component 314 can be a screw lifting mechanism, a synchronous belt lifting mechanism, or a cylinder lifting mechanism, etc.

[0059] This embodiment integrates empty material box input, qualified product output, and unqualified product output into a compact vertical space through a three-layer transmission channel layout and a vertical moving assembly 314 with dual load-bearing components, reducing the equipment's footprint. Simultaneously, the synchronous lifting structure of the first load-bearing component 3141 and the second load-bearing component 3142 allows for parallel management of the receiving and output of qualified material boxes 301 and unqualified material boxes 302, without interference, further improving the operational efficiency at the output end and the reliability of the sorting output.

[0060] Based on the above embodiments, optionally, each traction member 14 includes a front traction member and a rear traction member arranged sequentially along the transmission direction. The front traction member is located at one end near the loading station 101 and is used to transport the crystal boat from the front transfer device 22 to the detection area of ​​the detection device 13. The rear traction member is located at one end near the unloading station 102 and is used to transport the crystal boat from the detection area of ​​the detection device 13 to the rear transfer device 32. The front traction member and the rear traction member are arranged one after the other in the transmission direction and each has independent degrees of freedom of movement.

[0061] The front and rear traction components can take the form of gripper-type robotic arms, vacuum suction cups, or push-pull blocks, etc. In a preferred embodiment, both the front and rear traction components are gripper-type robotic arms, which achieve traction by gripping the edge or specific part of the crystal boat. The front and rear traction components can move independently along the transmission direction, so that while the rear traction component is transporting a crystal boat that has completed inspection from the inspection area to the rear transfer device 32, the front traction component can simultaneously transport the next crystal boat to be inspected from the front transfer device 22 to the inspection area. Thus, the feeding and discharging within the same transmission line can be performed in parallel, further reducing the idle waiting time of the inspection line.

[0062] This embodiment separates and parallels the pre-inspection and post-inspection transport within the transmission line by dividing the traction member 14 on each transmission line into a front traction member and a rear traction member. When a crystal boat is being inspected in the inspection area, the front traction member can return to the loading station 101 to prepare to remove another crystal boat, while the rear traction member can simultaneously send the inspected crystal boat to the unloading station 102. This segmented and independent traction structure further improves the utilization efficiency of the transmission line, which is beneficial for matching the cycle time requirements of high-speed inspection.

[0063] Preferably, the first transmission line 11 and the second transmission line 12 each include a front moving module and a rear moving module, which are independent of each other. The front moving module is used to drive the front traction member to move along the transmission direction, and the rear moving module is used to drive the rear traction member to move along the transmission direction. The front moving module and the rear moving module each have independent power sources and transmission mechanisms. Specifically, the front moving module may include a first linear guide rail, a first slider slidably connected to the first linear guide rail, and a first screw-nut pair or a first synchronous belt mechanism that is drivenly connected to the first slider, with the front traction member fixedly connected to the first slider. The rear moving module may include a second linear guide rail, a second slider slidably connected to the second linear guide rail, and a second screw-nut pair or a second synchronous belt mechanism that is drivenly connected to the second slider, with the rear traction member fixedly connected to the second slider. The drive sources for the front moving module and the rear moving module can be independent servo motors, and the timing of their movements is coordinated by a controller.

[0064] The travel range of the front and rear moving modules can be set according to the length of the transmission line and the location of the detection area. The travel range of the front moving module covers the area from the front transfer device 22 to the entrance of the detection device 13, and the travel range of the rear moving module covers the area from the exit of the detection device 13 to the rear transfer device 32. The travel ranges of the two modules can overlap or connect near the detection device 13 to ensure continuous transmission of the crystal boat within the detection area.

[0065] This embodiment utilizes the independent driving of the front and rear moving modules, allowing for complete decoupling of the movements of the front and rear traction components, preventing mutual interference. The front and rear traction components can independently adjust their speed, acceleration, and deceleration parameters according to their respective work cycles, facilitating precise control and optimal scheduling of the transmission motion, and further improving the flexibility and efficiency of the dual-line transmission system.

[0066] Please continue reading. Figure 2In one embodiment, the detection device 13 includes a 3D laser line scanning device 131, a first 2D vision detection device 132, and a second 2D vision detection device 133 arranged sequentially along the transmission direction. The 3D laser line scanning device 131 is used to acquire the three-dimensional contour information of the crystal boat through laser line scanning, thereby detecting three-dimensional defects such as overall deformation of the crystal boat, interlayer delamination, and abnormal position and height of pins. The 3D laser line scanning device 131 can adopt a line laser contour sensor commonly used in the art, which emits a line laser beam to illuminate the surface of the crystal boat, receives the reflected light through a camera and generates three-dimensional point cloud data, and then processes it to determine whether there are defects such as deformation or delamination.

[0067] The first 2D vision inspection device 132 is used to detect small defects on the surface of the crystal boat, such as burrs, scratches, and stains. The first 2D vision inspection device 132 can employ a high-resolution area array camera, along with an appropriate illumination source, to capture images of the crystal boat and identify small appearance defects through image processing algorithms. In this embodiment, the first 2D vision inspection device 132 is mainly used for small defect detection and does not perform precise measurements of critical dimensions.

[0068] The second 2D vision inspection device 133 is used to inspect larger defects and critical dimensions on the crystal boat, such as cavity size, pin diameter and spacing, and residual adhesive. The second 2D vision inspection device 133 can employ a larger field-of-view area array camera, or a combination of multiple cameras to cover the entire inspection area of ​​the crystal boat. The difference between the second 2D vision inspection device 133 and the first 2D vision inspection device 132 lies in their inspection focus: the former focuses on dimensional accuracy and larger-scale defects, while the latter focuses on minor appearance flaws. When used together, they can achieve comprehensive inspection coverage of the crystal boat from macroscopic dimensions to microscopic appearance.

[0069] In parallel embodiments, the detection device 13 may also include other types of sensors or detection modules, such as infrared thermal imaging devices, ultrasonic detection devices, or eddy current detection devices, for detecting specific performance parameters of the crystal boat. Those skilled in the art can flexibly add, reduce, or replace detection modules along the transmission path according to actual detection needs.

[0070] In a preferred embodiment, the detection device 13 may further include an infeed barcode reader and an outfeed barcode reader. The infeed barcode reader is located upstream of the 3D laser line scanning device 131 along the transmission direction. It reads the QR code information on the crystal boat before it enters the detection area to confirm the crystal boat's identity and batch information, and uploads the relevant information to the control system. The outfeed barcode reader is located downstream of the second 2D vision detection device 133 along the transmission direction. It reads the QR code again after the crystal boat has completed all detection items to confirm that the crystal boat has completed the entire detection process. Based on the detection results of each detection device, it summarizes and determines whether the crystal boat is qualified or unqualified, binds the determination result to the crystal boat, and reports it to the system. The infeed and outfeed barcode readers can be QR code scanners or RFID readers commonly used in the art.

[0071] The beneficial effects of this embodiment are as follows: by sequentially arranging the 3D laser line scanning device 131, the first 2D vision inspection device 132, and the second 2D vision inspection device 133 along the transmission direction, a progressive inspection sequence from three-dimensional structure to two-dimensional appearance is constructed. The 3D inspection is responsible for determining structural integrity, while the two 2D inspections respectively cover minor defects and critical dimensions, forming a complementary inspection system that can comprehensively and accurately assess the quality status of the crystal boat. With each inspection device arranged along the line, the crystal boat sequentially passes through each inspection station during transmission. The inspection process is highly coupled with the transmission process, eliminating the need for additional transfer or waiting steps and achieving continuous online inspection.

[0072] The following is combined Figures 1 to 6 The overall working process of the dual-line detection and plate changing device 100 provided by the present invention will be described.

[0073] First, the loading device 21 transports the first material box 200, filled with crystal boats to be tested, along the first conveyor belt 211 to the picking position. The vertical drive assembly 213 raises and lowers the first material box 200 layer by layer according to the picking progress, so that the bottom crystal boat is aligned with the feeding push rod 231. The feeding push rod 231 extends forward along the conveying direction, pushing the bottom crystal boat out of the first material box 200 and pushing it to the current alignment gap 15 station on the forward transfer device 22 (second station 222 in the first working state, first station 221 in the second working state). After the feeding push rod 231 retracts, the vertical drive assembly 213 drives the first material box 200 to descend by the height of one crystal boat, so that the next layer of crystal boats is aligned with the feeding push rod 231.

[0074] The forward transfer device 22 moves laterally between a first operating state and a second operating state. In the first operating state, the first station 221 is aligned with the first transmission line 11, and the second station 222 is aligned with the gap 15. At this time, the forward traction member on the first transmission line 11 removes the crystal boat from the first station 221 and feeds it into the first transmission line 11, while the feed pusher 231 pushes a new crystal boat to the second station 222. Subsequently, the forward transfer device 22 switches to the second operating state, with the first station 221 aligned with the gap 15 and the second station 222 aligned with the second transmission line 12. At this time, the forward traction member on the second transmission line 12 removes the crystal boat from the second station 222 and feeds it into the second transmission line 12, while the feed pusher 231 pushes a new crystal boat to the first station 221. This alternating cycle achieves alternating feeding to the two transmission lines. After the crystal boat enters the first transmission line 11 or the second transmission line 12, it is conveyed backward by the front traction member along the transmission direction, passing sequentially through the detection areas of the 3D laser line scanning device 131, the first 2D vision inspection device 132, and the second 2D vision inspection device 133 to complete all inspection items. After the inspection is completed, the rear traction member continues to convey the crystal boat backward to the rear end of the transmission line.

[0075] The rear transfer device 32 moves laterally between a third operating state and a fourth operating state. In the third operating state, the third station 321 is aligned with the first transmission line 11, and the fourth station 322 is aligned with the gap 15. At this time, the rear traction member on the first transmission line 11 sends the inspected crystal boat into the third station 321, while the discharge pusher pushes the crystal boat on the fourth station 322 into the second material box 300 at the unloading device 31. Subsequently, the rear transfer device 32 switches to the fourth operating state, with the fourth station 322 aligned with the second transmission line 12 and the third station 321 aligned with the gap 15. At this time, the rear traction member on the second transmission line 12 sends the crystal boat into the fourth station 322, while the discharge pusher pushes the crystal boat on the third station 321 into the second material box 300. This alternating cycle achieves alternating reception and delivery from the two transmission lines.

[0076] At the unloading device 31, the vertical moving component 314, based on the detection result (qualified or unqualified) of the crystal boat, aligns the corresponding first carrier 3141 (carrying the qualified material box 301) or the second carrier 3142 (carrying the NG material box 302) with the discharge port of the rear transfer device 32 to receive the crystal boat delivered by the discharge pusher. When the qualified material box 301 is full, the vertical moving component 314 aligns the first carrier 3141 with the first output channel 311 and sends out the qualified material box 301. When the NG material box 302 is full, the vertical moving component 314 aligns the second carrier 3142 with the second output channel 312 and sends out the NG material box 302. At the same time, the vertical moving component 314 can receive new empty material boxes from the input channel 313 to continuously perform the loading operation. The above loading, detection, and unloading processes are continuously cycled, realizing continuous operation without stopping the machine.

[0077] The dual-line inspection and wafer changing equipment 100 of the present invention realizes a complete automated process from the removal of the crystal boat from the old material box, dual-line diversion inspection, dual-line merging discharge to classification and boxing through a dual-line parallel transmission architecture, an alternating distribution mechanism for front and rear transfer, and a layered and classified discharge structure, which significantly improves the overall efficiency of crystal boat changing and inspection.

[0078] Obviously, the embodiments described above are merely some, not all, embodiments of the present invention. Based on the embodiments of the present invention, those skilled in the art can make other variations or modifications without creative effort, and all such variations or modifications should fall within the scope of protection of the present invention.

Claims

1. A dual-line inspection and changing device, characterized in that, include: The testing mechanism includes a testing device and a first transmission line and a second transmission line arranged side by side. The first transmission line and the second transmission line are respectively provided with traction components for conveying crystal boats along the transmission direction. The testing device is arranged on the transmission path of the first transmission line and the second transmission line and is used to test the crystal boats transported by the traction components. The testing mechanism has a loading station at the front end and a unloading station at the rear end in the transmission direction. A loading mechanism is provided at the loading station. The loading mechanism includes a loading device, a front transfer device, and a feeding device. The loading device is used to load a first material box carrying a crystal boat. The front transfer device has a first working state and a second working state. In the first working state, the feeding device is used to transport the crystal boat from the first material box to the front transfer device, and the traction member is used to transport the crystal boat from the front transfer device to the first transmission line. In the second working state, the feeding device is used to transport the crystal boat from the first material box to the front transfer device, and the traction member is used to transport the crystal boat from the front transfer device to the second transmission line. as well as, A feeding mechanism is provided at the feeding station. The feeding mechanism includes a feeding device, a rear transfer device, and a discharging device. The feeding device is used to feed the second material box of the crystal boat after load testing. The rear transfer device has a third working state and a fourth working state. In the third working state, the traction member is used to transport the crystal boat from the first transmission line to the rear transfer device, and the discharging device is used to transport the crystal boat from the rear transfer device to the second material box. In the fourth working state, the traction member is used to transport the crystal boat from the second transmission line to the rear transfer device, and the discharging device is used to transport the crystal boat from the rear transfer device to the second material box.

2. The dual-line inspection and changing device according to claim 1, characterized in that, The front transfer device is movably arranged relative to the detection mechanism and the feeding device to switch between a first working state and a second working state. The front transfer device has at least a first station and a second station. In the first working state, the feeding device is used to transport the crystal boat from the first material box to the second station, and the traction member is used to transport the crystal boat from the first station to the first transmission line. In the second working state, the feeding device is used to transport the crystal boat from the first material box to the first station, and the traction member is used to transport the crystal boat from the second station to the second transmission line. The rear transfer device is movably arranged relative to the detection mechanism and the unloading device to switch between a third working state and a fourth working state. The rear transfer device has at least a third station and a fourth station. In the third working state, the traction member is used to transport the crystal boat from the first transmission line to the third station, and the unloading device is used to transport the crystal boat from the fourth station to the second material box. In the fourth working state, the traction member is used to transport the crystal boat from the second transmission line to the fourth station, and the unloading device is used to transport the crystal boat from the third station to the second material box.

3. The dual-line inspection and changing device according to claim 2, characterized in that, The first transmission line and the second transmission line are arranged side by side with a gap in the horizontal direction, and a gap is defined between the first transmission line and the second transmission line, which is perpendicular to the transmission direction in the horizontal direction; The front transfer device and the rear transfer device are respectively movably arranged in the lateral direction, the first station and the second station are arranged sequentially in the lateral direction, and the third station and the fourth station are arranged sequentially in the lateral direction. In the first working state, the first station is aligned with the first transmission line in the transmission direction, and the second station is aligned with the gap in the transmission direction; In the second working state, the first station is aligned with the gap in the transmission direction, and the second station is aligned with the second transmission line in the transmission direction. In the third working state, the third station is aligned with the first transmission line in the transmission direction, and the fourth station is aligned with the gap in the transmission direction. In the fourth working state, the third station is aligned with the gap in the transmission direction, and the fourth station is aligned with the second transmission line in the transmission direction.

4. The dual-line inspection and changing device according to claim 3, characterized in that, The feeding device includes a feeding push rod that is movably arranged along the transmission direction. The feeding push rod is aligned with the gap in the lateral direction. The feeding push rod, the output end of the loading device, and the front transfer device are arranged sequentially in the transmission direction.

5. The dual-line inspection and changing device according to claim 3, characterized in that, The discharge device includes a discharge push rod that is movably disposed along the transmission direction. The discharge push rod is at least partially disposed in the gap, and the discharge push rod, the rear transfer device, and the input end of the unloading device are arranged sequentially in the transmission direction.

6. The dual-line inspection and changing device according to claim 1, characterized in that, The feeding device includes a first output channel and a second output channel for feeding a fully loaded second material box. The second material box includes a qualified material box and an NG material box. The qualified material box is used to carry crystal boats that have passed the detection device, and the NG material box is used to carry crystal boats that have failed the detection device. The discharge device is used to distribute the qualified material box to one of the first output channel and the second output channel, and to distribute the NG material box to the other of the first output channel and the second output channel.

7. The dual-line inspection and changing device according to claim 6, characterized in that, The discharge device further includes a vertical moving component and an input channel. The input channel is used to transport an empty second material box to the vertical moving component, and the first output channel, the input channel and the second output channel are arranged sequentially from top to bottom. The vertical moving component has a first support member and a second support member arranged side by side in the vertical direction. The first support member is used to support the qualified material box, and the second support member is used to support the NG material box. The vertical moving component drives the first support member and the second support member to move synchronously in the vertical direction, so that the first support member has multiple working positions that are vertically aligned with one of the rear transfer device, the input channel, the first output channel, and the second output channel, respectively. The second support member has multiple working positions that are vertically aligned with the other of the rear transfer device, the input channel, the first output channel, and the second output channel, respectively.

8. The dual-line inspection and changing device according to claim 1, characterized in that, Each of the aforementioned traction components includes a front traction component and a rear traction component arranged sequentially along the transmission direction. The front traction component is used to transport the crystal boat from the front transfer device to the detection device, and the rear traction component is used to transport the crystal boat from the detection device to the rear transfer device.

9. The dual-line inspection and changing device according to claim 8, characterized in that, The first transmission line and the second transmission line each include a front moving module and a rear moving module that are independent of each other. The front moving module drives the front traction member to move along the transmission direction, and the rear moving module drives the rear traction member to move along the transmission direction.

10. The dual-line inspection and changing device according to claim 1, characterized in that, The detection device includes a 3D laser line scanning device, a first 2D vision detection device, and a second 2D vision detection device arranged sequentially along the transmission direction.

Images