Clamping and releasing device, substrate processing apparatus, and device control method

Abstract

The embodiment of the present specification provides a clamping and releasing device, a substrate processing device and a device control method, wherein the clamping and releasing device comprises: a chuck base rotating around a center axis; a plurality of clamping mechanisms arranged around the chuck base, the clamping mechanism has a limiting part, and the clamping mechanism is movably arranged on the chuck base to switch the limiting part between a clamping position and a releasing position; a linkage mechanism synchronously rotating with the chuck base, the clamping mechanism and the linkage mechanism are linked; and a releasing mechanism arranged independently of the chuck base; the releasing mechanism is selectively matched with the linkage mechanism under control to limit the synchronous rotation of the linkage mechanism with the chuck base; when the releasing mechanism limits the linkage mechanism and the chuck base rotates, relative motion is generated between the linkage mechanism and the chuck base, and the clamping mechanism moves under the action of the relative motion to switch the limiting part from the clamping position to the releasing position. While ensuring the stability of clamping, the structure of the clamping and releasing device is simplified.

Description

Technical Field

[0001] This specification relates to the field of semiconductor process equipment, and particularly to clamping and releasing devices, substrate processing equipment, and device control methods. Background Technology

[0002] In semiconductor cleaning, spin coating, developing, and resist removal equipment, substrates are typically supported by chucks, Bernoulli cups, or other carrier structures. Substrates are prone to radial displacement during rotational processing, liquid impact, airflow disturbance, or handling; therefore, clamping or limiting mechanisms are needed to constrain the substrate edges.

[0003] In related technologies, substrate clamping and release typically rely on independent drive components such as additional cylinders or motors, or on complex transmission structures passing through the spindle. This results in complex rotating side structures, increased weight, affects dynamic balance, and increases assembly and maintenance costs. Therefore, there is an urgent need for a clamping and release device that is simple in structure, can stably maintain the clamped state, and facilitates substrate release. Summary of the Invention

[0004] In view of this, embodiments of this specification provide a clamping and releasing device. One or more embodiments of this specification also relate to a substrate processing apparatus and a clamping and releasing device control method, to address the technical deficiencies existing in the prior art.

[0005] According to a first aspect of the embodiments of this specification, a clamping and releasing device is provided, including a chuck base that rotates about a central axis; a plurality of clamping mechanisms arranged around the chuck base, each clamping mechanism having a limiting portion, the clamping mechanisms being movably disposed on the chuck base to allow the limiting portions to switch between a clamping position and a releasing position; a linkage mechanism that rotates synchronously with the chuck base, the clamping mechanisms and the linkage mechanism being linked and engaged; and a release mechanism disposed independently of the chuck base; the release mechanism selectively and controllably engages with the linkage mechanisms to restrict the linkage mechanisms from rotating synchronously with the chuck base; when the release mechanism restricts the linkage mechanisms and the chuck base rotates, relative motion occurs between the linkage mechanisms and the chuck base, and the clamping mechanisms are moved by the relative motion to allow the limiting portions to switch from the clamping position to the releasing position.

[0006] According to a second aspect of the embodiments of this specification, a substrate processing apparatus is provided, including the clamping and releasing device described in the first aspect of the embodiments of this specification.

[0007] According to a third aspect of the embodiments of this specification, a method for controlling a clamping and releasing device is provided, applied to a clamping and releasing device, the method comprising: The release mechanism is controlled to cooperate with the linkage mechanism to restrict the linkage mechanism from rotating synchronously with the chuck base; the rotation of the chuck base is controlled to generate relative motion between the chuck base and the linkage mechanism, and the clamping mechanism is moved by the relative motion to move the limiting part to the release position; a base plate is placed or removed from the chuck base; the release mechanism is controlled to disengage from the linkage mechanism to restore the synchronous rotation of the linkage mechanism and the chuck base, and the limiting part is moved to the clamping position and held under the action of the holding mechanism.

[0008] This specification provides a clamping and releasing device, a substrate processing equipment, and a device control method. The clamping and releasing device includes: a chuck base that rotates about a central axis; a plurality of clamping mechanisms arranged around the chuck base, each clamping mechanism having a limiting portion, and the clamping mechanisms being movably disposed on the chuck base to allow the limiting portions to switch between a clamping position and a releasing position; a linkage mechanism that rotates synchronously with the chuck base, and the clamping mechanisms and the linkage mechanism being linked and cooperated; and a release mechanism disposed independently of the chuck base. The release mechanism selectively cooperates with the linkage mechanism in a controlled manner to restrict the linkage mechanism from rotating synchronously with the chuck base. When the release mechanism restricts the linkage mechanism and the chuck base rotates, relative motion occurs between the linkage mechanism and the chuck base, and the clamping mechanism moves under the action of the relative motion to allow the limiting portion to switch from the clamping position to the releasing position. By employing the above method, the relative motion between the chuck base and the linkage mechanism can be used as the basis for the release action, eliminating the need for an additional independent drive structure on the chuck base to directly drive the release of the clamping mechanism. This simplifies the rotating side structure, reduces the weight of rotating components, and improves the stability and reliability of the clamping and release device during rotational operation. Furthermore, the selective engagement between the release mechanism and the linkage mechanism allows the release action to be triggered according to equipment control requirements, enhancing the controllability of the substrate clamping and release process. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the overall structure of a clamping and releasing device provided in one embodiment of this specification; Figure 2 This is a schematic diagram of the linkage mechanism in a clamping and releasing device according to one embodiment of this specification; Figure 3 This is a schematic diagram of the structure of a clamping and releasing device in which a lever and a variable radius cam mechanism cooperate, according to one embodiment of this specification. Figure 4 This is a schematic diagram of the structure of a clamping and releasing device according to one embodiment of the present specification, showing the cooperation between a limiting slider and a variable radius cam mechanism; Figure 5This is a schematic diagram of another type of clamping and releasing device in which a limiting slider and a variable radius cam mechanism cooperate, provided in one embodiment of this specification. Figure 6 This is a schematic diagram of the structure of a clamping and releasing device according to an embodiment of the present specification, showing the release member of the release mechanism in an avoidance position and a limiting position; Figure 7 This is a cross-sectional view of a clamping and releasing device according to an embodiment of this specification, showing the release element and the mating part on the linkage mechanism before and after engagement. Figure 8 This is a schematic diagram of the holding mechanism in a clamping and releasing device according to one embodiment of this specification; Figure 9 This is a schematic diagram of the gas flow direction during operation of a clamping and releasing device provided in one embodiment of this specification; Figure 10 This is an exploded structural diagram of a substrate processing apparatus provided in one embodiment of this specification; Figure 11 This is a flowchart of a clamping and releasing device control method provided in one embodiment of this specification; Figure 12 This is a schematic diagram of the structure of a clamping mechanism in the clamping position according to one embodiment of this specification; Figure 13 This is a schematic diagram of the structure of a clamping mechanism in the released position according to one embodiment of this specification.

[0010] Explanation of reference numerals in the attached figures: 100-Chuck base, 120-Air supply channel, 200-Clamping mechanism, 220-Limiting part, 240-Flow guide channel, 300-Linkage mechanism, 320-Active mechanism, 340-Driven mechanism, 400-Release mechanism, 420-Release base, 440-Release component, 500-Holding mechanism, 520-Elastic component, 540-Limiting component, 600-Base plate. Detailed Implementation

[0011] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and should not be construed as limiting the scope of protection of the present invention. Many specific details are set forth in the following description to provide a thorough understanding of this specification. However, this specification can be implemented in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of this specification. Therefore, this specification is not limited to the specific embodiments disclosed below.

[0012] The terminology used in one or more embodiments of this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of one or more embodiments of this specification. The singular forms “a,” “described,” and “the” used in one or more embodiments of this specification and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” used in one or more embodiments of this specification refers to and includes any or all possible combinations of one or more associated listed items. The term “at least one” in one or more embodiments of this specification means “one or more,” and “a plurality of” means “two or more.” The term “comprising” is an open-ended description and should be understood as “including but not limiting,” and may include other content in addition to what has been described. The terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the invention. Furthermore, although the terms first, second, etc., may be used to describe various information in one or more embodiments of this specification, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from one another. For example, first may also be referred to as second without departing from the scope of one or more embodiments of this specification, and similarly, second may also be referred to as first.

[0013] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0014] This specification provides a clamping and releasing device, and also relates to a substrate processing equipment and a clamping and releasing device control method, which will be described in detail in the following embodiments.

[0015] See Figure 1 , Figure 1This diagram illustrates the overall structure of a clamping and releasing device according to one embodiment of this specification. In one embodiment, the clamping and releasing device includes a chuck base 100 that rotates about a central axis, a plurality of clamping mechanisms 200 arranged around the chuck base 100, each clamping mechanism 200 having a limiting portion 220, and the clamping mechanisms 200 being movably disposed on the chuck base 100 to allow the limiting portion 220 to switch between a clamping position and a releasing position; and a linkage mechanism 300 that rotates synchronously with the chuck base 100, with the clamping mechanisms 200 and the linkage mechanism 300 working in conjunction. The release mechanism 400 is set independently of the chuck base 100. The release mechanism 400 selectively cooperates with the linkage mechanism 300 in a controlled manner to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100. When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, relative movement occurs between the linkage mechanism 300 and the chuck base 100. The clamping mechanism 200 moves under the action of the relative movement so that the limiting part 220 switches from the clamping position to the release position.

[0016] It should be noted that the chuck base 100 is the basic structure in the clamping and releasing device used to install or support multiple clamping mechanisms 200. The chuck base 100 can rotate about a central axis, which can be understood as the central axis around which the clamping and releasing device rotates during rotation, or as the rotation center line around which the chuck base 100 rotates during machining. As a component mounted on the chuck base 100, the clamping mechanism 200 can rotate synchronously with the chuck base 100 as a whole; at the same time, the clamping mechanism 200 can also move relative to the chuck base 100 to drive the limiting part 220 to switch between the clamping position and the releasing position. In some embodiments, the clamping and releasing device may further include a spindle, to which the chuck base 100 is connected, and the spindle can serve as a drive source or power input end for driving the chuck base 100 to rotate about the rotation center axis. It should be noted that the spindle can be directly connected to the chuck base 100, or it can be connected to the chuck base 100 through a connecting seat, flange, coupling structure, adapter plate, or other connecting structure to transmit rotational power to the chuck base 100. The axis of the spindle can serve as the rotation center axis of the chuck base 100, or the axis of the spindle can be coaxial with the rotation center axis of the chuck base 100.

[0017] In some embodiments, the chuck base 100 can be a disc-shaped body. The disc-shaped body may have a central region and a circumferential region surrounding the central region, and a plurality of clamping mechanisms 200 may be disposed in the circumferential region of the disc-shaped body. When the disc-shaped body rotates about its central axis, the plurality of clamping mechanisms 200 can rotate synchronously with the disc-shaped body as a whole, and limit or avoid the substrate 600 on the circumferential outer side of the substrate 600 through the limiting portion 220.

[0018] In some embodiments, the chuck base 100 may also be an annular body. The annular body may be arranged around a central axis, and mounting positions for mounting the clamping mechanisms 200 may be provided on the inner circumferential side, outer circumferential side, or end face of the annular body. The base plate 600 may be located within the area formed around the annular body, and the plurality of clamping mechanisms 200 may be arranged circumferentially spaced along the annular body, so that when the chuck base 100 rotates around the central axis, the entire assembly moves synchronously with the chuck base 100 and can move relative to the chuck base 100 to switch the limiting portion 220 between a clamping position and a releasing position.

[0019] Any structure described above that can rotate around the central axis and provide an installation or support base for the clamping mechanism 200, the linkage mechanism 300, or other related structures can be used as a specific implementation of the chuck base 100.

[0020] The clamping mechanism 200 is a moving unit surrounding the chuck base 100, used to support the limiting part 220 and to drive the limiting part 220 to switch between a clamping position and a releasing position through its own movement. The clamping mechanisms 200 can be arranged at intervals along the circumference of the chuck base 100 or around the substrate placement area. There can be three, four, five, or more clamping mechanisms 200, the specific number depending on the size of the substrate 600, the limiting stability requirements, and the installation space on the chuck base 100. Multiple clamping mechanisms 200 can limit the edge of the substrate 600 from multiple positions along its circumference. The clamping mechanisms 200 are movably disposed on the chuck base 100, meaning they can rotate, swing, slide, move, or undergo at least one of these combined movements relative to the chuck base 100, thereby changing the position of the limiting part 220. The clamping mechanism 200 is not limited to a single rotational movement. As long as the clamping mechanism 200 can move under the linkage of the linkage mechanism 300 and drive the limiting part 220 to switch between the clamping position and the release position, this can be considered a specific mode of movement for the clamping mechanism 200. In some embodiments, the clamping mechanism 200 can be a rotary clamping mechanism. The rotary clamping mechanism may have a rotation axis, which can be understood as the axis around which the clamping mechanism 200 rotates under the linkage of the linkage mechanism 300. This rotation axis can be determined by the installation relationship between the clamping mechanism 200 and the chuck base 100. For example, it can be determined by mounting holes, shaft holes, bushings, bearings, or rotary support parts on the chuck base 100 for mounting the clamping mechanism 200; it can also be determined by the centerline of the clamping mechanism 200's own shaft, pin, rotating shaft, or rotating column. It should be noted that the rotation axis is not limited to a separate physical shaft. As long as the clamping mechanism 200 can rotate around an axis under the linkage of the linkage mechanism 300, that axis can serve as the rotation axis of the clamping mechanism 200. In some embodiments, the clamping mechanism 200 may include any one of a limiting pin, a limiting lever, and a limiting slider. The limiting pin can rotate to move the limiting part 220 closer to or away from the edge of the substrate 600; the limiting lever can swing to switch the limiting part 220 between the clamping position and the release position; the limiting slider can slide or move with a radial component to move the limiting part 220 closer to or away from the edge of the substrate 600. As long as the clamping mechanism 200 can be linked and cooperated with the linkage mechanism 300 and can be moved by the relative motion between the linkage mechanism 300 and the chuck base 100, it can be used as a specific implementation of the clamping mechanism 200.

[0021] The limiting part 220 is disposed on the clamping mechanism 200, and the limiting part 220 is offset from the rotation axis of the clamping mechanism 200. The axis of the clamping mechanism 200 can be understood as the central axis, rotation axis, mounting axis, or equivalent motion reference line of the clamping mechanism 200 itself. The offset of the limiting part 220 from the axis of the clamping mechanism 200 can be understood as the center line, geometric center, equivalent center, or limiting area of ​​the limiting part 220 not coinciding with the axis of the clamping mechanism 200, or it can be understood as the limiting part 220 being offset relative to the axis of the clamping mechanism 200. For example, when the clamping mechanism 200 is a limiting pin, a rotating shaft, a rotating column, or other rotating clamping mechanism, the clamping mechanism 200 can rotate around its axis under the linkage action of the linkage mechanism 300. Because the limiting part 220 is offset from the axis of the clamping mechanism 200, when the clamping mechanism 200 rotates, the limiting part 220 can undergo eccentric movement with the clamping mechanism 200, causing the position of the limiting part 220 relative to the edge of the substrate 600 to change, thereby switching between the clamping position and the release position. For example, when the clamping mechanism 200 is a limiting lever or a swing-type clamping mechanism, the clamping mechanism 200 can swing around a fulcrum or swing axis, and the limiting part 220 can be located on the side away from the fulcrum or swing axis. When the clamping mechanism 200 swings under the linkage of the linkage mechanism 300, the limiting part 220 can move closer to or further away from the edge of the substrate 600 with the clamping mechanism 200, thereby switching between the clamping position and the release position.

[0022] It should be noted that the offset of the limiting part 220 from the axis of the clamping mechanism 200 is merely a specific arrangement of the limiting part 220 relative to the clamping mechanism 200, and does not limit the clamping mechanism 200 to have a separate physical shaft. As long as the limiting part 220 can change its position relative to the edge of the substrate 600 with the movement of the clamping mechanism 200, the switching between the limiting part 220 and the release position can be realized.

[0023] The clamping position refers to the state in which the limiting part 220 is capable of limiting, abutting, clamping, or blocking the object being clamped. It should be noted that the clamping position is not limited to the limiting part 220 applying a large clamping force to the object being clamped; it can also be a position where the limiting part 220 is located outside the edge of the object being clamped, thus limiting radial displacement of the object. Therefore, as long as the limiting part 220 is in a position that can constrain the edge of the object being clamped, it can be understood that the limiting part 220 is in the clamping position.

[0024] The release position refers to the state in which the limiting part 220 is in a position where it is released from or avoids the clamped object. It should be noted that the release position is not limited to the limiting part 220 being completely away from the clamped object, nor is it limited to the limiting part 220 being completely retracted into the chuck base 100; as long as the limiting part 220 is in a position where it no longer obstructs the picking or placing of the clamped object, or no longer forms an edge constraint on the clamped object, it can be understood as the limiting part 220 being in the release position. The clamping position and the release position can be formed by the movement of the clamping mechanism 200 relative to the chuck base 100. The movement of the clamping mechanism 200 can include at least one of rotation, swinging, sliding, moving, or a combination of these movements. When the limiting part 220 moves with the clamping mechanism 200, the position of the limiting part 220 relative to the edge of the clamped object changes. When the limiting part 220 is relatively close to the edge of the clamped object, it can be in the clamping position; when the limiting part 220 is relatively far away from or avoids the edge of the clamped object, it can be in the release position. The clamping position and the release position can be two definite position states, or they can be a range of states formed within a certain range of motion.

[0025] In some embodiments, the clamping position and the release position can be formed by rotating the clamping mechanism 200 about its own axis to different angular positions. The limiting portion 220 can be offset relative to the axis of the clamping mechanism 200, so the position of the limiting portion 220 relative to the center of the chuck base 100 will change when the clamping mechanism 200 rotates to different angles. For example, when the limiting portion 220 is a limiting pin, when the clamping mechanism 200 rotates to a position where the limiting pin is biased toward the center of the chuck base 100, the limiting pin can be in the clamping position; when the clamping mechanism 200 rotates to a position where the limiting pin is biased away from the center of the chuck base 100, the limiting pin can be in the release position. In some embodiments, the clamping position and the release position can also be formed by swinging or moving the clamping mechanism 200. For example, when the clamping mechanism 200 is a limiting lever, the limiting portion 220 can be in a clamping position when the limiting lever swings to a position where the limiting portion 220 is close to the edge of the substrate 600; the limiting portion 220 can be in a released position when the limiting lever swings to a position where the limiting portion 220 is away from the edge of the substrate 600. Similarly, when the clamping mechanism 200 is a limiting slider, the limiting portion 220 can be in a clamping position when the limiting slider moves to a position where the limiting portion 220 is close to the edge of the substrate 600; the limiting portion 220 can be in a released position when the limiting slider moves to a position where the limiting portion 220 is away from the edge of the substrate 600. In some embodiments, multiple limiting portions 220 can be distributed circumferentially along the chuck base 100. When multiple limiting portions 220 simultaneously approach the edge of the substrate 600, they can collectively form a clamping position; when multiple limiting portions 220 simultaneously move away from the edge of the substrate 600, they can collectively form a release position.

[0026] The linkage mechanism 300 is a mechanism that rotates synchronously with the chuck base 100 in a controlled manner and is used to link the movement of the clamping mechanism 200. The linkage mechanism 300 can be directly or indirectly connected to the clamping mechanism 200, so that the clamping mechanism 200 moves relative to the chuck base under the linkage action of the linkage mechanism 300, and drives the limiting part 220 provided on the clamping mechanism 200 to switch between the clamping position and the release position. It should be noted that the linkage mechanism 300 itself is not limited to a drive mechanism with an independent power source. When the clamping and releasing device is in the normal rotation state, the linkage mechanism 300 can rotate synchronously with the chuck base 100; when it is necessary to release the base plate 600, the release mechanism 400 cooperates with the linkage mechanism 300 and restricts the linkage mechanism 300 from rotating synchronously with the chuck base 100, so that relative movement occurs between the linkage mechanism 300 and the chuck base 100. This relative motion can be converted into rotation, oscillation, sliding, or combined motion of the clamping mechanism 200 through the cooperation between the linkage mechanism 300 and the clamping mechanism 200, thereby switching the limiting part 220 from the clamping position to the releasing position. The linkage mechanism 300 can be a single integral linkage structure or a linkage structure formed by combining multiple linkage components. The linkage mechanism 300 can simultaneously link multiple clamping mechanisms 200 to move, or it can act on corresponding clamping mechanisms 200 separately through multiple branch linkage structures. The linkage mechanism 300 can form a gear transmission relationship, a prying engagement relationship, a cam engagement relationship, a slotted pin guiding engagement relationship, or other engagement relationships with the clamping mechanism 200 that enable the clamping mechanism 200 to move.

[0027] In some embodiments, the linkage mechanism 300 can be a gear linkage mechanism. The gear linkage mechanism can include at least one of a gear ring, gear, internal gear, external gear, bevel gear, and sector gear. The clamping mechanism 200 can be connected to the gear or gear ring in the gear linkage structure. In one possible embodiment of the present invention, the driven mechanism 340 can be coaxially fixed with the clamping mechanism 200. That is, the rotation axis of the driven mechanism 340 can be coaxially arranged with the rotation axis of the clamping mechanism 200. When the driven mechanism 340 rotates around its own axis, it can drive the corresponding clamping mechanism 200 to rotate synchronously around the rotation axis. A limiting portion 220 is provided on the clamping mechanism 200, and the limiting portion 220 can be offset from the rotation axis of the clamping mechanism 200. The offset of the limiting portion 220 from the rotation axis can be understood as the center of the limiting portion 220, the limiting area, or the limiting surface used to contact the edge of the substrate 600 being offset relative to the rotation axis of the clamping mechanism 200.

[0028] When the clamping mechanism 200 rotates around the rotation axis, the limiting portion 220, which is offset from the rotation axis, undergoes an eccentric movement with the clamping mechanism 200, causing the position of the limiting portion 220 relative to the edge of the substrate 600 to change. When the limiting portion 220 rotates to a position close to or abutting the edge of the substrate 600, the limiting portion 220 can be in the clamping position; when the limiting portion 220 rotates to a position away from or avoiding the edge of the substrate 600, the limiting portion 220 can be in the released position. Thus, through the transmission cooperation between the active mechanism 320 and the multiple driven mechanisms 340, the relative motion between the chuck base 100 and the active mechanism 320 can be converted into the synchronous rotation of the multiple clamping mechanisms 200, and the switching between the clamping position and the released position can be achieved through the eccentric movement of the limiting portion 220.

[0029] In one possible embodiment of the present invention, the linkage mechanism 300 can be a variable radius cam linkage mechanism. The variable radius cam linkage mechanism may include a cam disk, cam ring, eccentric wheel, variable diameter profile member, or other structures with a variable radius profile. The clamping mechanism 200 may include a swing arm, lever member, or other limiting structure capable of swinging around a fulcrum. The clamping mechanism 200 may have a fulcrum end, a force-bearing end, and a limiting end. The fulcrum end is rotatably connected to the chuck base 100, the force-bearing end is used to cooperate with the variable radius cam linkage mechanism, and the limiting part 220 may be provided at the limiting end. It should be noted that the variable radius cam linkage mechanism can be understood as a linkage structure in which the distance from the outer periphery profile to the central axis of the chuck base 100 changes circumferentially. That is, the outer periphery profile of the variable radius cam linkage mechanism may include a protruding profile segment with a larger radius and a clearance profile segment with a smaller radius. When the linkage mechanism 300 rotates relative to the chuck base 100, the force-bearing end of the clamping mechanism 200 engages with different contour segments of the variable radius cam linkage mechanism. The variable radius cam linkage mechanism can cause the clamping mechanism 200 to swing around its fulcrum end through abutment, pushing, or avoidance actions. Through the swinging process, the clamping mechanism 200 can drive the limiting part 220 to move closer to or further away from the edge of the substrate 600, thereby switching the limiting part 220 between the clamping position and the release position.

[0030] In one possible embodiment of the present invention, the linkage mechanism 300 can be a variable radius cam linkage mechanism. The clamping mechanism 200 can include a limiting slider capable of radial or near-radial movement. The limiting slider can be disposed in a radial groove, radial guide rail, radial guide seat, or other guide structure on the chuck base 100, and can move in a direction toward or away from the central axis of the chuck base 100. The follower portion on the limiting slider can abut against the outer periphery of the variable radius cam linkage mechanism. When the linkage mechanism 300 rotates relative to the chuck base 100, the follower portion on the limiting slider can engage with different contour segments of the variable radius cam linkage mechanism, thereby causing the limiting slider to move along a path with a radial component toward or away from the edge of the base plate 600. This path does not have to be a purely radial straight path; as long as the movement path has a radial component toward or away from the central axis of the chuck base 100, it can drive the limiting slider to move accordingly, causing the limiting portion 220 to move closer to or away from the edge of the base plate 600, thereby switching the limiting portion 220 between a clamping position and a release position. Therefore, the slider guide linkage mechanism can cover both the implementation of radial movement of the follower and the implementation of composite movement with radial component of the follower.

[0031] In some embodiments, the linkage mechanism 300 can also be a synchronous belt linkage mechanism or a friction wheel linkage mechanism. The synchronous belt linkage mechanism may include a synchronous belt, a synchronous pulley, and a tensioning pulley, and multiple clamping mechanisms 200 may be connected to the synchronous pulley respectively; the friction wheel linkage mechanism can transmit motion to the clamping mechanism 200 through frictional contact. Any mechanism that can convert relative motion between the linkage mechanism 300 and the chuck base 100 into synchronous motion of the multiple clamping mechanisms 200, and cause a change in the radial distance from the multiple limiting portions 220 to the central axis of the chuck base 100, can be used as a specific implementation of the linkage mechanism 300.

[0032] The release mechanism 400 is a limiting actuator independently of the chuck base 100. It works in conjunction with the linkage mechanism 300 to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100 when the base plate 600 needs to be released. It should be noted that the release mechanism 400 is independent of the chuck base 100, meaning it does not rotate synchronously with the chuck base 100 around its central axis. The release mechanism 400 can be mounted on a fixed frame, mounting base, support plate, base, or other fixed structure of the equipment containing the clamping and releasing device.

[0033] The release mechanism 400 cooperates with the linkage mechanism 300 in a controlled manner. This can be understood as the release mechanism 400 responding to a control signal to perform mechanical actions, switching from an avoidance state to a limit state cooperating with the linkage mechanism 300, or vice versa. The control signal can be generated by the control system of the substrate processing equipment, a host computer, a programmable logic controller (PLC), a motion controller, a sensor detection unit, or other control units. It should be noted that the control signal is not limited to directly providing mechanical driving force to the release mechanism 400, but can be used to trigger or control the actions of the actuators in the release mechanism 400, enabling the release mechanism 400 to perform actions such as lifting, extending, swinging, rotating, or translating.

[0034] In some embodiments, the release mechanism 400 may include a release base 420 and a release element 440. The release base 420 may be used to mount, support, or guide the release element 440, and may be mounted on a fixed frame, mounting base, support plate, base, or other fixed structure. The release element 440 may be a limit pin, stop pin, latch, push rod, stop block, lever, pawl, or other structure capable of forming a limit engagement with the linkage mechanism 300. The release element 440 may switch between an avoidance position and a limit position under the control of a control signal.

[0035] When the release member 440 is in the avoidance position, it avoids the linkage mechanism 300, allowing the linkage mechanism 300 to rotate synchronously with the chuck base 100. When the release member 440 is in the limit position, it cooperates with the linkage mechanism 300 to restrict the linkage mechanism 300 from continuing to rotate synchronously with the chuck base 100. At this time, when the chuck base 100 continues to rotate around its central axis, the linkage mechanism 300 is restricted by the release mechanism 400 and cannot maintain synchronous rotation with the chuck base 100, thus creating relative movement between the linkage mechanism 300 and the chuck base 100.

[0036] In some embodiments, the release mechanism 400 can be a lifting limiting mechanism. Specifically, the release member 440 can move axially along the chuck base 100 under the drive of the release base 420. The linkage mechanism 300 can be provided with limiting holes, limiting grooves, limiting notches, or limiting protrusions. When it is necessary to release the base plate 600, the control system outputs a control signal, and the release base 420 drives the release member 440 to rise or fall, so that the release member 440 extends into the limiting hole, limiting groove, or limiting notch of the linkage mechanism 300, or abuts against the limiting protrusion of the linkage mechanism 300, thereby restricting the linkage mechanism 300 from rotating synchronously with the chuck base 100.

[0037] In some embodiments, the release mechanism 400 may also be a telescopic limiting mechanism. The release member 440 can move towards or away from the linkage mechanism 300 under the drive of the release base 420. When the release member 440 extends, it can abut, engage, or insert with the limiting hole, limiting groove, or limiting notch on the linkage mechanism 300 to limit the linkage mechanism 300 from rotating synchronously with the chuck base 100; when the release member 440 retracts, it avoids the linkage mechanism 300, allowing the linkage mechanism 300 to rotate synchronously with the chuck base 100.

[0038] It should be noted that the cooperation between the release mechanism 400 and the linkage mechanism 300 does not mean that the release mechanism 400 directly drives the clamping mechanism 200 to rotate. The function of the release mechanism 400 is to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100, and to create relative motion between the linkage mechanism 300 and the chuck base 100 when the chuck base is driven to rotate. The clamping mechanism 200 is activated by the linkage mechanism 300, which in turn causes the limiting part 220 to move from the clamping position to the release position due to the relative motion between the linkage mechanism 300 and the chuck base 100. In other words, the release mechanism 400 indirectly triggers the release action of the limiting part 220 by restricting the synchronous rotation of the linkage mechanism 300.

[0039] After the substrate 600 is released or removed, the release mechanism 400 can disengage from the linkage mechanism 300 under the control of a control signal. For example, the release member 440 can exit the limiting hole, limiting groove, or limiting notch, or it can retract or swing to an avoidance position. After the release mechanism 400 releases the restriction on the linkage mechanism 300, the linkage mechanism 300 can rotate synchronously with the chuck base 100 again, and the clamping mechanism 200 and the limiting part 220 can return to the clamping position or the position to be clamped under the action of the linkage mechanism 300 or other reset structures.

[0040] In the embodiment of this specification, the clamping mechanism 200 is arranged around the chuck base 100 and is movably disposed on the chuck base 100. Therefore, the clamping mechanism 200 can drive the limiting part 220 to switch between a clamping position and a releasing position through its own movement. When the limiting part 220 is in the clamping position, it can limit, abut, or block the edge of the substrate 600; when the limiting part 220 is in the releasing position, it can release or avoid the edge of the substrate 600 to facilitate the insertion or removal of the substrate 600. Thus, the clamping and releasing of the substrate 600 can be achieved through the movement of the clamping mechanism 200. The structure is relatively flexible and can be adapted to different types of clamping mechanisms 200 such as limiting pins, limiting levers, and limiting sliders. The linkage mechanism 300 can rotate synchronously with the chuck base 100 and cooperate with the clamping mechanism 200. Therefore, during the normal rotation of the chuck base 100, the linkage mechanism 300 can rotate synchronously with the chuck base 100. When it is necessary to release the base plate 600, the linkage mechanism 300 can form a linkage relationship with the clamping mechanism 200, transmitting the relative motion between the linkage mechanism 300 and the chuck base 100 to the clamping mechanism 200, causing the clamping mechanism 200 to move under the action of this relative motion, thereby driving the limiting part 220 to switch from the clamping position to the release position. The release mechanism 400 is set independently of the chuck base 100, and the release mechanism 400 can selectively cooperate with the linkage mechanism 300 in a controlled manner to limit the linkage mechanism 300 from rotating synchronously with the chuck base 100. Therefore, the release mechanism 400 does not need to rotate synchronously with the chuck base 100, nor does it need to be directly set on the chuck base 100 as a rotating side structure. When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 continues to rotate, relative motion can be generated between the linkage mechanism 300 and the chuck base 100. This relative motion further acts on the clamping mechanism 200, causing the limiting part 220 to switch from the clamping position to the release position. In this way, the relative motion between the chuck base 100 and the linkage mechanism 300 can be used as the basis for the release action, without the need for an additional independent drive structure on the chuck base 100 to directly drive the clamping mechanism 200 to release. This simplifies the rotating side structure, reduces the weight of rotating components, and improves the stability and reliability of the clamping and release device during rotational operation. Simultaneously, the release mechanism 400 and the linkage mechanism 300 have a selective engagement relationship, allowing the release action to be triggered according to equipment control requirements, which improves the controllability of the clamping and release process of the substrate 600.

[0041] In one optional embodiment of this specification, the clamping mechanism 200 has a rotating shaft, and the limiting part 220 is disposed off the rotating shaft; the clamping mechanism 200 rotates around the rotating shaft under the action of the relative movement between the linkage mechanism 300 and the chuck base 100, so that the limiting part 220 rotates from the clamping position to the release position.

[0042] It should be noted that the rotation axis of the clamping mechanism 200 can be understood as the axis around which the clamping mechanism 200 rotates relative to the chuck base 100. This rotation axis can be determined by the installation relationship between the clamping mechanism 200 and the chuck base 100. For example, it can be determined by mounting holes, shaft holes, bushings, bearings, rotating supports, or pin structures on the chuck base 100 for mounting the clamping mechanism 200; it can also be determined by the center line of the clamping mechanism 200's own shaft, rotating shaft, pin, rotating column, or connecting shaft. The rotation axis is not limited to a separate physical shaft component; as long as the clamping mechanism 200 can rotate relative to the chuck base 100 around an axis, that axis can serve as the rotation axis of the clamping mechanism 200.

[0043] The limiting portion 220 is offset from the rotation axis. This can be understood as the centerline, geometric center, limiting area, or limiting surface used to contact the edge of the substrate 600 of the limiting portion 220 not coinciding with the rotation axis of the clamping mechanism 200. Alternatively, it can be understood as the limiting portion 220 being eccentrically positioned relative to the rotation axis. Because the limiting portion 220 is offset from the rotation axis, when the clamping mechanism 200 rotates around the rotation axis, the limiting portion 220 will rotate eccentrically with the clamping mechanism 200, thereby changing the position of the limiting portion 220 relative to the edge of the substrate 600.

[0044] In some embodiments, the clamping mechanism 200 may be a limiting pin type clamping mechanism. The clamping mechanism 200 may include a pin portion or a rotating column portion extending along the rotation axis, and a limiting portion 220 may be disposed at one end of the pin portion or rotating column portion near the substrate 600 and offset relative to the rotation axis. When the clamping mechanism 200 rotates about the rotation axis to a position where the limiting portion 220 is close to the edge of the substrate 600, the limiting portion 220 may be in a clamping position and may abut, limit, or block the edge of the substrate 600; when the clamping mechanism 200 rotates about the rotation axis to a position where the limiting portion 220 is away from or avoids the edge of the substrate 600, the limiting portion 220 may be in a released position so that the substrate 600 can be inserted or removed.

[0045] When the release mechanism 400 does not restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100, the linkage mechanism 300 can rotate synchronously with the chuck base 100, and the clamping mechanism 200 can remain in the state where the limiting part 220 is in the clamping position. When it is necessary to release the substrate 600, the release mechanism 400 cooperates with the linkage mechanism 300 and restricts the linkage mechanism 300 from rotating synchronously with the chuck base 100; at this time, the chuck base 100 continues to rotate, and relative movement occurs between the linkage mechanism 300 and the chuck base 100. The clamping mechanism 200 is linked with the linkage mechanism 300, so the clamping mechanism 200 can rotate around the rotation axis under the action of this relative movement, and drive the limiting part 220 to rotate from the clamping position to the release position.

[0046] In some embodiments, the rotation angle corresponding to the clamping mechanism 200 rotating from the clamping position to the release position can be set according to the deviation distance of the limiting part 220 relative to the rotation axis, the distance between the edge of the substrate 600 and the clamping mechanism 200, the shape of the limiting part 220, and the required clearance space. For example, the clamping mechanism 200 can rotate by a predetermined angle under the action of the linkage mechanism 300, so that the limiting part 220 rotates from the side close to the edge of the substrate 600 to the side away from the edge of the substrate 600, thereby releasing the limiting of the edge of the substrate 600. Multiple clamping mechanisms 200 can rotate synchronously or substantially synchronously around their respective rotation axes under the action of the linkage mechanism 300, so that multiple limiting parts 220 switch from the clamping position to the release position synchronously or substantially synchronously.

[0047] By applying the scheme of the embodiments of this specification, the limiting part 220 is offset from the rotation axis of the clamping mechanism 200, so that when the clamping mechanism 200 rotates around the rotation axis, it can drive the limiting part 220 to change position relative to the edge of the substrate 600. Therefore, the rotation of the clamping mechanism 200 can achieve the switching of the limiting part 220 between the clamping position and the release position, without requiring the clamping mechanism 200 to extend or retract along a large radial stroke. This simplifies the movement form and installation structure of the clamping mechanism 200 and improves the consistency of synchronous switching of multiple limiting parts 220.

[0048] See Figure 2 As shown, Figure 2 This specification shows a schematic diagram of the linkage mechanism in a clamping and releasing device according to one embodiment. In an optional embodiment of this specification, the linkage mechanism 300 includes an active mechanism 320 and multiple driven mechanisms 340. The active mechanism 320 and the multiple driven mechanisms 340 are in transmission cooperation. The driven mechanisms 340 are coaxially fixed on the clamping mechanism 200. When the release mechanism 400 restricts the active mechanism 320 to rotate synchronously with the chuck base 100 and the chuck base 100 rotates, the multiple driven mechanisms 340 rotate under the action of relative motion, thereby driving the corresponding clamping mechanism 200 to rotate around the rotation axis.

[0049] It should be noted that the driving mechanism 320 can be understood as a common transmission mechanism in the linkage mechanism 300 used to form a transmission cooperation with multiple driven mechanisms 340. The driven mechanism 340 can be understood as the output-side transmission mechanism in the linkage mechanism 300, which is respectively set for multiple clamping mechanisms 200. The transmission cooperation between the driving mechanism 320 and the multiple driven mechanisms 340 can be formed through meshing, frictional contact, synchronous transmission, chain transmission, or other means that can transmit motion, so that when relative motion occurs between the driving mechanism 320 and the driven mechanism 340, the driven mechanism 340 can rotate around its own axis.

[0050] Multiple driven mechanisms 340 are coaxially fixed to the clamping mechanism 200. This can be understood as each driven mechanism 340 being coaxially arranged with the rotation axis of its corresponding clamping mechanism 200, and maintaining a synchronous rotational relationship between the driven mechanism 340 and its corresponding clamping mechanism 200. The driven mechanism 340 can be connected to the clamping mechanism 200 via a connecting shaft, bushing, key connection, pin connection, threaded connection, clamping connection, integral molding structure, or other fixed connection structure. Therefore, when the driven mechanism 340 rotates around its own axis, it can drive the corresponding clamping mechanism 200 to rotate synchronously around its rotation axis.

[0051] In some embodiments, the driving mechanism 320 may be disposed on the chuck base 100, inside the chuck base 100, on the underside of the chuck base 100, or in the circumferential region of the chuck base 100. A plurality of driven mechanisms 340 may be arranged at circumferential intervals along the driving mechanism 320 and respectively engage in transmission with the driving mechanism 320. A plurality of clamping mechanisms 200 may be respectively disposed corresponding to a plurality of driven mechanisms 340, such that the transmission between the driving mechanism 320 and the plurality of driven mechanisms 340 can act simultaneously or substantially simultaneously on the plurality of clamping mechanisms 200, thereby driving the plurality of clamping mechanisms 200 to rotate synchronously or substantially synchronously around their respective rotation axes.

[0052] When the release mechanism 400 does not restrict the active mechanism 320 from rotating synchronously with the chuck base 100, the active mechanism 320, the multiple driven mechanisms 340, and the chuck base 100 can rotate synchronously with the chuck base 100 as a whole. At this time, no relative motion is generated between the active mechanism 320 and the multiple driven mechanisms 340 to drive the driven mechanisms 340 to rotate. Therefore, the multiple driven mechanisms 340 can maintain their current angle state, and the corresponding multiple clamping mechanisms 200 can also maintain the state in which the limiting part 220 is in the clamping position.

[0053] When it is necessary to release the base plate 600, the release mechanism 400 can cooperate with the active mechanism 320 or the limiting engagement part connected to the active mechanism 320 to restrict the active mechanism 320 from rotating synchronously with the chuck base 100. When the active mechanism 320 is restricted by the release mechanism 400 and cannot continue to rotate synchronously with the chuck base 100, the chuck base 100 continues to rotate around the central axis, and the multiple driven mechanisms 340 move around the central axis with the chuck base 100. Since the multiple driven mechanisms 340 still maintain a transmission engagement with the active mechanism 320, while the active mechanism 320 is in a restricted state, the multiple driven mechanisms 340 will have relative motion with respect to the active mechanism 320 during the movement with the chuck base 100, and will rotate around their own axes under the action of this relative motion.

[0054] When the multiple driven mechanisms 340 rotate, since each driven mechanism 340 is coaxially fixed to the clamping mechanism 200, the driven mechanism 340 can drive the corresponding clamping mechanism 200 to rotate around the rotation axis. When the clamping mechanism 200 rotates around the rotation axis, the limiting part 220 provided on the clamping mechanism 200 rotates synchronously with the clamping mechanism 200. Since the limiting part 220 is offset from the rotation axis of the clamping mechanism 200, the position of the limiting part 220 relative to the edge of the substrate 600 changes during rotation, thereby allowing it to rotate from the clamping position to the release position.

[0055] For example, in one implementation, the driving mechanism 320 can be a ring gear, and the driven mechanism 340 can be a driven gear meshing with the ring gear. After the release mechanism 400 restricts the ring gear from rotating synchronously with the chuck base 100, the chuck base 100 continues to rotate. The driven gear moves around the ring gear with the chuck base 100 and rotates around its own axis under the meshing action with the ring gear, thereby driving the corresponding clamping mechanism 200 to rotate around the rotation axis.

[0056] For example, in another implementation, the active mechanism 320 can be an annular friction wheel, and the driven mechanism 340 can be a driven friction wheel that frictionally contacts the annular friction wheel. After the release mechanism 400 restricts the annular friction wheel to rotate synchronously with the chuck base 100, the chuck base 100 continues to rotate, and the driven friction wheel moves with the chuck base 100 and rotates around its own axis under the frictional action with the annular friction wheel, thereby driving the corresponding clamping mechanism 200 to rotate around the rotation axis.

[0057] By applying the scheme of the embodiments in this specification, the linkage mechanism 300 can utilize the transmission cooperation between the driving mechanism 320 and multiple driven mechanisms 340 to convert the relative motion between the chuck base 100 and the driving mechanism 320 into the rotational motion of the multiple driven mechanisms 340, and further into the rotation of the multiple clamping mechanisms 200 around the rotation axis. Thus, one driving mechanism 320 can simultaneously or substantially simultaneously drive multiple clamping mechanisms 200 to operate, causing multiple limiting parts 220 to synchronously or substantially synchronously switch from the clamping position to the release position, improving the consistency of clamping and releasing actions.

[0058] In one optional embodiment of this specification, the driving mechanism 320 is a ring gear or a ring friction wheel, and the driven mechanism 340 is a driven gear or a driven friction wheel.

[0059] It should be noted that the ring gear can be either an internal or external gear. When the ring gear is an internal gear, multiple driven gears can be positioned inside the ring gear and mesh with its internal teeth. When the ring gear is an external gear, multiple driven gears can be positioned outside the ring gear and mesh with its external teeth. As long as the ring gear can form a meshing transmission relationship with the multiple driven gears and drive the multiple driven gears to rotate when relative motion occurs between the ring gear and the chuck base 100, this can be considered a specific implementation of the driving mechanism 320.

[0060] When the release mechanism 400 does not restrict the ring gear to rotate synchronously with the chuck base 100, the ring gear, multiple driven gears, and the chuck base 100 can rotate synchronously as a whole, and the multiple driven gears do not generate rotation to drive the clamping mechanism 200 to release. When the release mechanism 400 restricts the ring gear to rotate synchronously with the chuck base 100 and the chuck base 100 continues to rotate, the multiple driven gears move around the central axis with the chuck base 100 and rotate around their own axes under the meshing action with the ring gear, thereby driving the corresponding clamping mechanism 200 to rotate around the rotation axis, causing the limiting part 220 to rotate from the clamping position to the release position.

[0061] In some embodiments, the driving mechanism 320 may also be an annular friction wheel, and the driven mechanism 340 may be a driven friction wheel. The annular friction wheel may have an annular friction surface, and multiple driven friction wheels may be spaced apart circumferentially along the annular friction wheel and respectively abut against the annular friction surface of the annular friction wheel. The multiple driven friction wheels are coaxially fixed on multiple clamping mechanisms 200, so that when the driven friction wheel rotates around its own axis, it can drive the corresponding clamping mechanism 200 to rotate around the rotation axis.

[0062] When the release mechanism 400 does not restrict the annular friction wheel from rotating synchronously with the chuck base 100, the annular friction wheel, multiple driven friction wheels, and the chuck base 100 can rotate synchronously as a whole, and the multiple driven friction wheels can maintain their current angle state. When the release mechanism 400 restricts the annular friction wheel from rotating synchronously with the chuck base 100, and the chuck base 100 continues to rotate, the multiple driven friction wheels move with the chuck base 100 and move relative to the restricted annular friction wheel. The annular friction wheel drives the multiple driven friction wheels to rotate around its own axis through frictional contact, thereby driving the corresponding clamping mechanism 200 to rotate around the rotation axis, causing the limiting part 220 to rotate from the clamping position to the release position.

[0063] By applying the scheme of the embodiments in this specification, the active mechanism 320 can simultaneously act on multiple driven mechanisms 340 through gear meshing or frictional contact, causing the multiple driven mechanisms 340 to rotate synchronously or substantially synchronously under relative motion, and driving multiple clamping mechanisms 200 to rotate synchronously or substantially synchronously. This improves the consistency of the multiple limiting parts 220 switching from the clamping position to the release position.

[0064] See Figure 3 , Figure 3 This specification illustrates a schematic diagram of a clamping and releasing device according to an embodiment of the present specification, showing the cooperation between a lever and a variable radius cam mechanism. The clamping mechanism 200 is a lever with a fulcrum end and a limiting end, and the limiting part 220 is disposed at the limiting end; the linkage mechanism 300 is a variable radius cam mechanism; under the action of relative motion, the variable radius cam mechanism abuts against and pushes the lever, causing the lever to swing around the fulcrum end, so that the limiting part 220 switches from the clamping position to the releasing position.

[0065] It should be noted that a variable radius cam mechanism refers to a linkage structure in which the distance from the outer periphery of the cam to the central axis of the chuck base 100 changes circumferentially. In other words, the outer periphery of the variable radius cam linkage mechanism can include a convex profile segment with a larger radius and a clearance profile segment with a smaller radius. A variable radius cam mechanism can include a cam disk, cam ring, sector cam, eccentric cam, arc cam, or other structures with a variable radius profile. The variable radius cam mechanism can directly abut against the lever or cooperate with the lever through a follower part provided on the lever.

[0066] The lever can be understood as a clamping mechanism 200 capable of swinging around a fulcrum. The fulcrum of the lever can be rotatably connected, hinged, or swingably connected to the chuck base 100, and the limiting end can be the end of the lever away from the fulcrum or the end for mounting the limiting part 220. The limiting part 220 is provided at the limiting end and can move closer to or further away from the edge of the base plate 600 as the lever swings, thereby switching between the clamping position and the release position.

[0067] In one possible embodiment of this specification, the clamping mechanism 200 can be a swing-arm type clamping mechanism. One end of the swing-arm type clamping mechanism can serve as a fulcrum end, which is rotatably mounted on the chuck base 100; the side of the swing-arm type clamping mechanism near the linkage mechanism 300 can serve as a force-bearing end, which can be provided with rollers, guide pins, abutment protrusions, follower parts, or other structures that can abut and cooperate with the variable radius cam linkage mechanism; the other end or extension of the swing-arm type clamping mechanism can serve as a limiting end, and a limiting part 220 is provided at the limiting end.

[0068] When the release mechanism 400 does not restrict the linkage mechanism 300 to rotate synchronously with the chuck base 100, the linkage mechanism 300 can maintain synchronous rotation with the chuck base 100. At this time, the relative position between the variable radius cam linkage mechanism and the clamping mechanism 200 remains stable, and the clamping mechanism 200 can be maintained at a swing angle corresponding to the clamping position under the action of the holding mechanism 500. The limiting part 220 can approach, abut, or limit the edge of the base plate 600.

[0069] When the base plate 600 needs to be released, the release mechanism 400 cooperates with the linkage mechanism 300 to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100. Subsequently, the chuck base 100 continues to rotate, causing relative movement between the chuck base 100 and the restricted linkage mechanism 300. Since the clamping mechanism 200 is mounted on the chuck base 100, and the variable radius cam linkage mechanism belongs to the linkage mechanism 300, during this relative movement, the force-bearing end of the clamping mechanism 200 will move relative to the outer periphery of the variable radius cam linkage mechanism.

[0070] When the force-bearing end engages with the protruding contour section of the variable radius cam linkage mechanism, the protruding contour section can push the force-bearing end outward, causing the clamping mechanism 200 to swing around the fulcrum end in the first direction. When the force-bearing end engages with the clearance contour section of the variable radius cam linkage mechanism, the force-bearing end can return to the direction closer to the variable radius cam linkage mechanism under the elastic restoring force of the holding mechanism 500, causing the clamping mechanism 200 to swing around the fulcrum end in the second direction. Through the above swinging process, the clamping mechanism 200 can drive the limiting part 220 to approach or move away from the edge of the substrate 600, thereby switching the limiting part 220 between the clamping position and the release position.

[0071] In some embodiments, the outer periphery of the variable radius cam linkage mechanism can be set according to the swing angle required by the clamping mechanism 200. For example, the variable radius cam linkage mechanism can have a first contour position and a second contour position. When the force-bearing end of the clamping mechanism 200 is engaged with the first contour position, the clamping mechanism 200 can be in a state where the limiting part 220 is in the clamping position; when the force-bearing end of the clamping mechanism 200 is engaged with the second contour position, the clamping mechanism 200 can swing around the fulcrum end to a state where the limiting part 220 is in the release position. The radius change between the first contour position and the second contour position can be set according to the displacement required for the limiting part 220 to switch from the clamping position to the release position, the swing radius of the clamping mechanism 200, and the size of the substrate 600.

[0072] In some embodiments, the holding mechanism 500 may cooperate with the clamping mechanism 200. The holding mechanism 500 may include an elastic member 520 and a limiting member 540. The elastic member 520 is used to apply a restoring force to the clamping mechanism 200, causing the clamping mechanism 200 to tend to return to the swing position corresponding to the clamping position. The limiting member 540 is used to prevent the clamping mechanism 200 from going beyond a preset limiting position corresponding to the clamping position. The elastic member 520 and the limiting member 540 work together to keep the limiting portion 220 stably held in the clamping position.

[0073] See Figure 3 Multiple clamping mechanisms 200 can be arranged circumferentially around the linkage mechanism 300, and the linkage mechanism 300 can have a variable radius outer periphery. Each clamping mechanism 200 can include a swing arm or lever, one end of which is rotatably connected to the chuck base 100, and the other end or middle of which engages with the variable radius outer periphery of the linkage mechanism 300. A holding mechanism 500 can be located on the side of the clamping mechanism 200 away from the linkage mechanism 300, and applies a restoring force to the clamping mechanism 200 through an elastic member 520. Thus, when relative movement occurs between the linkage mechanism 300 and the chuck base 100, the variable radius outer periphery can push the multiple clamping mechanisms 200 to swing synchronously, causing the multiple limiting parts 220 to switch synchronously from the clamping position to the release position; when the release mechanism 400 releases the restriction on the linkage mechanism 300, the holding mechanism 500 can restore the clamping mechanism 200 and keep it in the clamping position.

[0074] Using the solutions described in the embodiments of this specification, the clamping mechanism 200 can employ a lever to switch the position of the limiting part 220, and the linkage mechanism 300 can convert the relative motion between itself and the chuck base 100 into the swing motion of the lever through a variable radius cam mechanism. This improves the adaptability of the clamping and releasing device to different structural spaces and different clamping methods.

[0075] See Figure 4 and Figure 5 , Figure 4 This specification shows a schematic diagram of the structure of a clamping and releasing device according to an embodiment of the present specification, in which a limiting slider and a variable radius cam mechanism cooperate. Figure 5 This specification illustrates a schematic diagram of another type of clamping and releasing device, according to one embodiment, in which a limiting slider and a variable radius cam mechanism cooperate. The clamping mechanism 200 is a limiting slider, with a limiting part 220 disposed on the limiting slider; the linkage mechanism 300 is a variable radius cam mechanism and a guide member disposed on the variable radius cam mechanism; the limiting slider has a follower part that cooperates with the guide member; driven by the variable radius cam mechanism, the guide member guides the follower part to generate a movement with a radial component, thereby causing the limiting slider to slide.

[0076] It should be noted that a guide member can be understood as a structure capable of guiding the movement path of the follower. The guide member can be a guide groove, guide rail, guide protrusion, guide hole, guide notch, or other structures with guiding functions. In some embodiments, the guide member can also be the outer periphery of a variable radius cam mechanism, a cam surface, or a guide surface, with the follower abutting against this outer periphery, cam surface, or guide surface. The guide member is not limited to a long groove structure; as long as it can guide the follower to move in a predetermined direction when relative movement occurs between the linkage mechanism 300 and the chuck base 100, it can be used as a specific implementation of the guide member.

[0077] In one possible implementation, see Figure 4 Multiple clamping mechanisms 200 can be arranged circumferentially along the linkage mechanism 300, and each clamping mechanism 200 can include a limiting slider capable of moving radially or approximately radially. The limiting slider can be disposed in a radial groove, radial guide rail, radial guide seat, or other guide structure on the chuck base 100, and can move in a direction toward or away from the central axis of the chuck base 100. The follower part on the limiting slider can abut against the outer peripheral contour of the variable radius cam linkage mechanism.

[0078] When the release mechanism 400 does not restrict the linkage mechanism 300 to rotate synchronously with the chuck base 100, the linkage mechanism 300 can rotate synchronously with the chuck base 100, and the relative position between the variable radius cam linkage mechanism and the limit slider remains stable, allowing the limit slider to be in a state where the limit part 220 is in the clamping position. When the release mechanism 400 restricts the linkage mechanism 300 to rotate synchronously with the chuck base 100, and the chuck base 100 continues to rotate, relative movement occurs between the chuck base 100 and the linkage mechanism 300. Since the limit slider is mounted on the chuck base 100, and the variable radius cam linkage mechanism is part of the linkage mechanism 300, the follower on the limit slider will move relative to the outer periphery of the variable radius cam linkage mechanism.

[0079] When the follower engages with the protruding profile section of the variable radius cam linkage mechanism, the protruding profile section can push the follower to move radially or approximately radially. The follower then drives the limiting slider to move synchronously, causing the limiting part 220 provided on the limiting slider to move closer to or further away from the edge of the substrate 600. When the follower engages with the clearance profile section, the limiting slider can move in the opposite direction under the action of an elastic member, a return member, or other reset structure. Thus, through the cooperation between the variable radius cam linkage mechanism and the follower, the relative rotation between the linkage mechanism 300 and the chuck base 100 can be converted into radial or approximately radial movement of the limiting slider, thereby allowing the limiting part 220 to switch between the clamping position and the release position.

[0080] In another possible implementation, see Figure 5 Multiple clamping mechanisms 200 may also be arranged circumferentially at intervals along the linkage mechanism 300, and each clamping mechanism 200 may include a limiting slider capable of moving obliquely. The limiting slider may be disposed in an oblique groove, oblique guide rail, oblique guide seat or other guide structure on the chuck base 100, and is capable of moving in a direction inclined relative to the radial direction. The direction of movement of the limiting slider may not be strictly radial, but the direction of movement has a radial component toward or away from the central axis of the chuck base 100.

[0081] exist Figure 5 In the structure shown, the follower on the limiting slider can also abut against the outer periphery of the variable radius cam linkage mechanism. When the linkage mechanism 300 rotates relative to the chuck base 100, the outer periphery of the variable radius cam linkage mechanism pushes the follower to move along an oblique path, and the follower drives the limiting slider to slide along the oblique guide structure. Since this oblique movement path has a radial component, the limiting slider can still drive the limiting part 220 to move closer to or away from the edge of the substrate 600, thereby realizing the switching of the limiting part 220 between the clamping position and the release position.

[0082] In other words, Figure 4 and Figure 5 The main difference lies in the different directions of movement of the limit slider. Figure 4 In the middle, the limiting slider mainly moves radially or approximately radially; Figure 5 In this process, the limiting slider moves along an oblique path, but this oblique path has a radial component. Regardless of whether radial or oblique movement is used, as long as the limiting slider can drive the limiting part 220 to approach or move away from the edge of the substrate 600 under the action of the variable radius cam linkage mechanism, the clamping and releasing functions can be realized.

[0083] In some embodiments, the limiting slider can be connected to an elastic element, which applies a restoring force to the limiting slider. When the protruding profile section of the variable radius cam linkage mechanism pushes the follower, the limiting slider can move against the force of the elastic element; when the follower moves to the clearance profile section of the variable radius cam linkage mechanism, the elastic element can drive the limiting slider to return to its original position. Thus, the limiting slider can stably switch between the clamping position and the release position under the combined action of the variable radius cam linkage mechanism and the elastic element.

[0084] By applying the scheme of the embodiments in this specification, the linkage mechanism 300 can push the limiting slider to move through the outer periphery of the variable radius cam linkage mechanism, and convert the relative motion between the linkage mechanism 300 and the chuck base 100 into the sliding motion of the limiting slider. As a result, the clamping mechanism 200 can be flexibly arranged according to the installation space, force direction and base plate size on the chuck base 100, thereby improving the structural adaptability of the clamping and releasing device.

[0085] See Figure 6 , Figure 6 This diagram illustrates a structural schematic of a clamping and releasing device according to an embodiment of this specification, showing the release member of the release mechanism in an avoidance position and a limiting position. Compared to Figure 6 (a) Release element 440 is in the avoidance position. Figure 6 (b) The release element 440 moves upward to the limit position. The release mechanism 400 includes a release base 420 and a release element 440. The release element 440 switches between an avoidance position and a limit position under the control of a control signal. When the release element 440 is in the limit position, the release element 440 cooperates with the linkage mechanism 300 to limit the linkage mechanism 300 from rotating synchronously with the chuck base 100.

[0086] It should be noted that the release base 420 is the basic structure in the release mechanism 400 used to install, support, or guide the release element 440. The release base 420 is independent of the chuck base 100, meaning it does not rotate synchronously with the chuck base 100 around its central axis. The release base 420 can be located outside the chuck base 100, for example, below, to the side, circumferentially outside, or in other positions that can support the release element 440 for lifting and lowering. The release base 420 can be directly mounted on the frame, base, support table, or mounting platform of the substrate processing equipment, or indirectly mounted on the equipment's fixed structure via a connecting plate, support frame, adapter, or other connecting structure.

[0087] The release element 440 is an actuating structure in the release mechanism 400 that can selectively cooperate with the linkage mechanism 300. The release element 440 can be disposed on the release base 420 and can move relative to the release base 420 to switch between a clearance position and a limit position. The movement of the release element 440 can include at least one of lifting, extending, swinging, rotating, translating, or a combination of these movements. As long as the release element 440 can avoid the linkage mechanism 300 in the clearance position and form a limit engagement with the linkage mechanism 300 in the limit position, it can be considered a specific implementation of the release element 440.

[0088] The release element 440 switches between a clearance position and a limit position under the control of the control signal. This can be understood as the release element 440 responding to the control signal to perform a mechanical action and switch from the clearance position to the limit position. The control signal can be generated by the control system of the substrate processing equipment, the host computer, the programmable logic controller, the motion controller, the sensor detection unit, or other control units.

[0089] When the release member 440 is in the avoidance position, it avoids the linkage mechanism 300, and the linkage mechanism 300 can rotate synchronously with the chuck base 100. At this time, the release member 440 does not restrict the rotation or movement of the linkage mechanism 300, and the clamping mechanism 200 can remain in the state where the limiting part 220 is in the clamping position.

[0090] When the release member 440 is in the limited position, it cooperates with the linkage mechanism 300 to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100. Specifically, the linkage mechanism 300 may be provided with a limiting hole, a limiting groove, a limiting notch, a limiting protrusion, a mating surface, or other limiting mating parts. After the release member 440 moves to the limited position, it may extend into the limiting hole, limiting groove, or limiting notch, or it may abut against the limiting protrusion or mating surface, thereby forming an insertion, abutment, locking, or blocking engagement with the linkage mechanism 300.

[0091] After the release member 440 restricts the linkage mechanism 300 to rotate synchronously with the chuck base 100, when the chuck base 100 continues to rotate, relative motion occurs between the linkage mechanism 300 and the chuck base 100. The clamping mechanism 200 is linked with the linkage mechanism 300, so the clamping mechanism 200 can move under the action of this relative motion, causing the limiting part 220 to switch from the clamping position to the release position.

[0092] In some embodiments, the release member 440 can be switched between a clearance position and a limit position by a drive mechanism. The drive mechanism may include a cylinder, an electric cylinder, an electric push rod, an electromagnetic drive, a linkage mechanism, or other structures capable of driving the release member 440. The drive mechanism may be mounted on the release base 420, or it may be separately mounted from the release base 420 and connected to the release member 440 via a connector.

[0093] With the above configuration, the release mechanism 400 can restrict the linkage mechanism 300 to rotate synchronously with the chuck base 100 through the selective action of the release member 440, thereby triggering the relative movement between the linkage mechanism 300 and the chuck base 100. Since the release mechanism 400 is set independently of the chuck base 100, the release member 440 does not need to rotate at high speed with the chuck base 100, which helps to reduce the arrangement of the rotational drive structure, simplify the structure of the clamping and release device, and improve the controllability of the release action.

[0094] In one optional embodiment of this specification, the release member 440 moves up and down along the axial direction of the chuck base 100 under the drive of the release base 420, or extends and retracts in the direction of approaching or moving away from the linkage mechanism 300, so as to selectively cooperate with the linkage mechanism 300.

[0095] It should be noted that the release element moves under the support or guidance of the release base, or driven by a drive structure mounted on the release base. This can be understood as the release element 440 moving under the installation, support, or guidance of the release base 420, or as the release element 440 moving under the drive structure mounted on the release base 420. The release base 420 provides a mounting foundation and motion guide for the release element 440, enabling the release element 440 to stably switch between an avoidance position and a limit position in a predetermined direction.

[0096] In some embodiments, the release member 440 can move up and down along the axial direction of the chuck base 100. The axial direction of the chuck base 100 can be understood as the direction of the central axis of the chuck base 100, or the direction that is substantially perpendicular to the surface of the chuck base 100 used to support the substrate 600. Specifically, the release base 420 may be provided with guide holes, slide rails, slide grooves, or other guide structures, and the release member 440 can rise or fall along the axial direction of the chuck base 100 under the guidance of the above-mentioned guide structures. When the release member 440 moves axially to the limit position, the release member 440 can extend into the limit hole, limit groove, or limit notch on the linkage mechanism 300, or abut against the limit protrusion or mating surface on the linkage mechanism 300, so as to limit the linkage mechanism 300 to rotate synchronously with the chuck base 100; when the release member 440 retracts axially to the avoidance position, the release member 440 releases its engagement with the linkage mechanism 300, so that the linkage mechanism 300 can rotate synchronously with the chuck base 100.

[0097] In other embodiments, the release member 440 may also extend or retract in a direction approaching or away from the linkage mechanism 300. This direction may be radial, oblique, horizontal, or other directions that allow the release member 440 to approach or move away from the linkage mechanism 300. Specifically, the release member 440 may extend or retract under the action of a cylinder, electric cylinder, electric push rod, electromagnetic drive, lead screw mechanism, or other drive structure. When the release member 440 extends toward the linkage mechanism 300, it may engage with the linkage mechanism 300 through insertion, abutment, locking, or blocking to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100; when the release member 440 retracts away from the linkage mechanism 300, it may avoid the linkage mechanism 300 to release the restriction on the linkage mechanism 300.

[0098] In some embodiments, the selective engagement between the release member 440 and the linkage mechanism 300 can be achieved through a limiting hole, a limiting groove, a limiting notch, a limiting protrusion, a stop surface, or a mating surface. For example, the release member 440 can be a stop pin, and the linkage mechanism 300 can be provided with a limiting hole corresponding to the stop pin. After the stop pin rises along the axial direction of the chuck base 100, it extends into the limiting hole, thereby restricting the synchronous rotation of the linkage mechanism 300. As another example, the release member 440 can be a telescopic stop, and the linkage mechanism 300 can be provided with a limiting protrusion. After the telescopic stop extends toward the linkage mechanism 300, it abuts against the limiting protrusion, thereby restricting the linkage mechanism 300 from rotating synchronously with the chuck base 100.

[0099] With the above configuration, the release element 440 can cooperate with the linkage mechanism 300 either by axial lifting or by telescopic movement. Therefore, the movement direction and cooperation method of the release element 440 can be selected according to the specific arrangement of the chuck base 100, the linkage mechanism 300, and the equipment installation space, improving the layout flexibility of the release mechanism 400 and facilitating the release process of the limiting part 220 by selectively triggering the movement of the release element 440.

[0100] See Figure 7 , Figure 7 The diagram shows a cross-sectional view of a clamping and releasing device according to one embodiment of this specification, before and after the release member engages with the mating part on the linkage mechanism. The linkage mechanism has a mating part, which engages with the release member when it is in the limited position to restrict the linkage mechanism from rotating synchronously with the chuck base.

[0101] It should be noted that the mating part can be understood as a structure in the linkage mechanism 300 used to form a limiting engagement with the release member 440. The mating part can be provided on the driving mechanism 320 of the linkage mechanism 300, and can be a hole, groove, notch, recess, protrusion, stop surface, gap, or other structure that can form an insertion, abutment, snap, or blocking engagement with the release member 440. As long as the release member 440 can engage with the mating part when it is in the limiting position and restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100, it can be considered a specific implementation of the mating part.

[0102] exist Figure 7 In the illustrated embodiment, the linkage mechanism 300 may include an active mechanism 320, and the mating part may be a gap formed on the active mechanism 320. This gap can be understood as a clearance space or limiting space on the active mechanism 320 that allows the release member 440 to enter, abut, or form a blocking engagement. Figure 7 As shown, Figure 7 (a) shows the state of the release member 440 before it engages with the mating part. Before engaging with the mating part, the release member 440 is in a clearance position. The release member 440 does not enter the gap on the active mechanism 320, nor does it form a blocking engagement with the active mechanism 320. At this time, the active mechanism 320 can rotate synchronously with the chuck base 100, and the linkage mechanism 300 as a whole can maintain a synchronous rotation state with the chuck base 100. Figure 7 (b) shows the state after the release member 440 engages with the mating part. When it is necessary to release the base plate 600, the release member 440 can move from the avoidance position to the limit position under the control of the control signal, and at least partially extend into the gap on the active mechanism 320, or form an abutment or blocking engagement with the edge, sidewall, end face, etc. of the gap. At this time, the release member 440 engages with the mating part, which can restrict the active mechanism 320 from continuing to rotate synchronously with the chuck base 100. Since the active mechanism 320 is part of the linkage mechanism 300, the release member 440 can restrict the synchronous rotation of the linkage mechanism 300 by engaging with the mating part on the active mechanism 320.

[0103] After the release member 440 engages with the mating part and restricts the linkage mechanism 300 to rotate synchronously with the chuck base 100, if the chuck base 100 continues to rotate around its central axis, relative motion will occur between the chuck base 100 and the restricted linkage mechanism 300. The clamping mechanism 200 and the linkage mechanism 300 are linked and engaged; therefore, this relative motion can be transmitted to the clamping mechanism 200 through the linkage mechanism 300, causing the clamping mechanism 200 to rotate, swing, slide, or undergo a combination of movements, thereby driving the limiting part 220 to switch from the clamping position to the release position.

[0104] By applying the solutions described in the embodiments of this specification, the selective engagement between the release member 440 and the mating part on the linkage mechanism 300 can be used to restrict the synchronous rotation of the linkage mechanism 300. Specifically, Figure 7 In the embodiment shown, the mating part can be formed by the gap on the active mechanism 320. After the release member 440 moves to the limit position, it extends into the gap or forms a blocking engagement with the edge of the gap, thereby restricting the active mechanism 320 from rotating synchronously with the chuck base 100 and triggering the relative movement between the linkage mechanism 300 and the chuck base 100.

[0105] In one optional embodiment of this specification, the clamping and releasing device further includes a holding mechanism 500, which applies a force to the linkage mechanism 300 or the clamping mechanism 200 to keep the limiting portion 220 in the clamping position without the action of an external force.

[0106] It should be noted that the holding mechanism 500 is used to apply a holding force to the linkage mechanism 300, the clamping mechanism 200, or an intermediate mating structure between the two, so that the limiting part 220 remains in the clamping position without triggering a release action. Here, "no external force" can be understood as the release mechanism 400 not cooperating with the linkage mechanism 300, not restricting the linkage mechanism 300 from rotating synchronously with the chuck base 100, or not causing the clamping mechanism 200 to switch to the release position due to relative motion. This statement does not exclude the possibility that the holding mechanism 500 itself applies elastic force, frictional force, self-locking force, magnetic force, or other holding forces to the linkage mechanism 300 or the clamping mechanism 200.

[0107] The holding mechanism 500 can directly act on the clamping mechanism 200 to keep the clamping mechanism 200 in the clamping position of the limiting part 220; it can also act on the linkage mechanism 300 to keep the linkage mechanism 300 in the initial linkage state corresponding to the clamping position; it can also act on the intermediate transmission structure between the linkage mechanism 300 and the clamping mechanism 200 to keep the intermediate transmission structure in a state that allows the limiting part 220 to be in the clamping position.

[0108] In some embodiments, when the clamping mechanism 200 is a pin-type clamping mechanism with a rotating axis, the holding mechanism 500 can apply a force to the clamping mechanism 200 to cause it to move towards the clamping position around the rotating axis. For example, the holding mechanism 500 can be a torsion spring, tension spring, or spring sheet connected to the clamping mechanism 200, so that the clamping mechanism 200 is held at a predetermined angle position without external force. At this predetermined angle position, the limiting part 220 approaches or abuts the edge of the substrate 600 to limit the substrate 600. When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, the clamping mechanism 200 can overcome the force of the holding mechanism 500 and rotate around the rotating axis, so that the limiting part 220 switches from the clamping position to the release position.

[0109] In some embodiments, when the clamping mechanism 200 includes a lever, the retaining mechanism 500 can apply a force to the lever to cause the limiting end to approach the edge of the substrate 600. For example, the retaining mechanism 500 can be disposed at the fulcrum end of the lever, or connected between the lever and the chuck base 100, so that the lever is held in the clamping position of the limiting portion 220 without external force. When the variable radius cam mechanism abuts against and pushes the lever under relative motion, the lever can overcome the force of the retaining mechanism 500 and swing around the fulcrum end, causing the limiting portion 220 to switch from the clamping position to the release position.

[0110] In some embodiments, when the clamping mechanism 200 includes a limiting slider, the retaining mechanism 500 can apply a force to the limiting slider to cause it to move towards the clamping position. For example, the retaining mechanism 500 can be a tension spring, compression spring, or spring sheet disposed between the limiting slider and the chuck base 100, so that the limiting slider is held in a first position without external force, in which the limiting portion 220 is in the clamping position. When the guide member guides the follower to produce a movement with a radial component, the limiting slider can slide against the force of the retaining mechanism 500, causing the limiting portion 220 to switch from the clamping position to the release position.

[0111] In some embodiments, the holding mechanism 500 may also act on the linkage mechanism 300. For example, the holding mechanism 500 may apply a force to the linkage component containing the driving mechanism 320, the variable radius cam mechanism, or the guide member, so that the linkage mechanism 300 remains in the initial linkage position corresponding to the clamping position. When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, relative movement occurs between the linkage mechanism 300 and the chuck base 100, and the clamping mechanism 200 is triggered to move against the force of the holding mechanism 500; after the release mechanism 400 releases the restriction on the linkage mechanism 300, the holding mechanism 500 can return the linkage mechanism 300 to the initial linkage position and return the limiting part 220 to the clamping position or remain in the clamping position.

[0112] Through the above-described configuration, the retaining mechanism 500 can stably keep the limiting part 220 in the clamping position when the release action is not triggered, reducing the possibility that the limiting part 220 may deviate from the clamping position due to vibration, inertia, friction fluctuations, or other disturbances. Simultaneously, the retaining mechanism 500 can selectively act on either the linkage mechanism 300 or the clamping mechanism 200 depending on the specific form of the clamping mechanism 200 and the linkage mechanism 300, thereby adapting to different clamping structures such as limit pin type, lever type, and slider type.

[0113] In one optional embodiment of this specification, the retaining mechanism 500 includes an elastic element 520 connected to the linkage mechanism 300 or the clamping mechanism 200; when the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, the elastic element 520 undergoes elastic deformation and stores elastic potential energy; after the release mechanism 400 releases the restriction on the linkage mechanism 300, the elastic element releases the elastic potential energy and applies a restoring force, causing the limiting part 220 to return to the clamping position.

[0114] It should be noted that the elastic element 520 can be a tension spring, compression spring, torsion spring, coil spring, spring sheet, elastic block, or other structure capable of elastic deformation and providing a restoring force after being subjected to force. The connection of the elastic element 520 to the linkage mechanism 300 or the clamping mechanism 200 can be understood as the elastic element 520 being directly connected to the linkage mechanism 300 or the clamping mechanism 200, or indirectly connected to the linkage mechanism 300 or the clamping mechanism 200 through a connecting post, connecting hole, hook part, spring seat, connecting shaft, or intermediate connecting part. As long as the elastic element 520 can apply a restoring force to the linkage mechanism 300 or the clamping mechanism 200 to cause the limiting part 220 to tend towards the clamping position, it can be understood that the elastic element 520 is connected to the linkage mechanism 300 or the clamping mechanism 200.

[0115] In some embodiments, the elastic element 520 can be connected to the linkage mechanism 300. For example, one end of the elastic element 520 can be connected to the linkage mechanism 300, and the other end can be connected to the chuck base 100, mounting base, or other mounting foundation. The elastic element 520 can apply an elastic force to the linkage mechanism 300 to bring it toward the initial linkage position. In this initial linkage position, the linkage relationship between the linkage mechanism 300 and the clamping mechanism 200 keeps the limiting part 220 in the clamping position. When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, relative motion occurs between the linkage mechanism 300 and the chuck base 100. The linkage mechanism 300 rotates, swings, or moves relative to the initial linkage position, and the elastic element 520 is stretched, compressed, or twisted, thereby storing elastic potential energy. When the release mechanism 400 releases the restriction on the linkage mechanism 300, the elastic element 520 releases its elastic potential energy and applies a restoring force to the linkage mechanism 300, causing the linkage mechanism 300 to return to its initial linkage position. Through the linkage between the linkage mechanism 300 and the clamping mechanism 200, the limiting part 220 is driven to return to the clamping position.

[0116] In some embodiments, the elastic element 520 may also be connected to the clamping mechanism 200. For example, when the clamping mechanism 200 is a limit pin type clamping mechanism with a rotating shaft, the elastic element 520 may be a torsion spring, which may be sleeved on the rotation support portion of the clamping mechanism 200. One end of the torsion spring is connected to the clamping mechanism 200, and the other end is connected to the chuck base 100 to apply a restoring torque to the clamping mechanism 200 to cause the limit portion 220 to move toward the clamping position. Alternatively, when the clamping mechanism 200 is a lever, the elastic element 520 may be connected between the lever and the chuck base 100 to apply a force to the lever to cause the limit end to move toward the edge of the substrate 600. Furthermore, when the clamping mechanism 200 is a limit slider, the elastic element 520 may be connected between the limit slider and the chuck base 100 to apply a restoring force to the limit slider to cause the limit portion 220 to move toward the clamping position.

[0117] When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, the clamping mechanism 200 moves under the action of the relative motion between the linkage mechanism 300 and the chuck base 100, and overcomes the force of the elastic member 520, causing the limiting part 220 to switch from the clamping position to the release position. During this process, the elastic member 520 undergoes elastic deformation and stores elastic potential energy as the clamping mechanism 200 rotates, swings, slides, or moves. When the release mechanism 400 releases the restriction on the linkage mechanism 300, the elastic member 520 releases its elastic potential energy and applies a restoring force to the clamping mechanism 200, causing the clamping mechanism 200 to move in the opposite direction, thereby driving the limiting part 220 to return to the clamping position and maintain it.

[0118] Using the scheme of the embodiments in this specification, the elastic member 520 can apply a holding force to the linkage mechanism 300 or the clamping mechanism 200 when the release action is not triggered, so that the limiting part 220 is stably held in the clamping position; when the release action is triggered, the elastic member 520 can allow the linkage mechanism 300 or the clamping mechanism 200 to move against its elastic force, so that the limiting part 220 switches to the release position; after the release mechanism 400 releases the restriction, the elastic member 520 can provide a restoring force, so that the limiting part 220 returns to the clamping position. Therefore, the reset reliability and repeatability consistency of the clamping and release device can be improved.

[0119] See Figure 8 , Figure 8 A schematic diagram of a holding mechanism in a clamping and releasing device according to an embodiment of this specification is shown. The holding mechanism 500 further includes a limiting member 540, which cooperates with the elastic member 520 to keep the limiting portion 220 in the clamping position.

[0120] It should be noted that the elastic element 520 and the limiting element 540 play different roles in the holding mechanism 500. The elastic element 520 is mainly used to provide a restoring force, causing the linkage mechanism 300, the clamping mechanism 200, or the intermediate mating structure between them to tend to return to the state corresponding to the clamping position. The limiting element 540 is mainly used to form a mechanical limit when the linkage mechanism 300 or the clamping mechanism 200 returns to the preset limit position, so as to prevent the linkage mechanism 300 or the clamping mechanism 200 from exceeding the preset limit position. Thus, the elastic element 520 provides a restoring force, and the limiting element 540 determines the stop position. The two work together to ensure that the limiting part 220 can be stably maintained in the clamping position.

[0121] In some embodiments, the limiting member 540 can cooperate with the linkage mechanism 300. For example, the limiting member 540 can be disposed on the chuck base 100, mounting base, or other structure fixed to the chuck base 100, and abut against the driving mechanism 320, driven mechanism 340, or other linkage components in the linkage mechanism 300. When the elastic member 520 applies a restoring force to the linkage mechanism 300, the linkage mechanism 300 returns to the initial linkage position under the action of the elastic member 520; when the linkage mechanism 300 returns to the initial linkage position, the limiting member 540 can abut against the linkage mechanism 300 to prevent the linkage mechanism 300 from continuing to cross the initial linkage position. This initial linkage position can correspond to the state where the limiting part 220 is in the clamping position.

[0122] In other embodiments, the limiting member 540 may also cooperate with the clamping mechanism 200. For example, the limiting member 540 may abut against a stop surface, abutment portion, protrusion, or other limiting cooperation structure on the clamping mechanism 200. When the elastic member 520 applies a restoring force to the clamping mechanism 200, the clamping mechanism 200 returns to the state where the limiting portion 220 is in the clamping position under the action of the elastic member 520; after the limiting member 540 cooperates with the clamping mechanism 200, it can restrict the clamping mechanism 200 from continuing to cross the preset limiting position corresponding to the clamping position, thereby improving the positional stability of the limiting portion 220 when it is held in the clamping position.

[0123] In some embodiments, the limiting member 540 may be a limiting bolt, a limiting post, a limiting boss, a limiting pin, or other structure capable of forming a mechanical limit. See also Figure 8 The limiting member 540 can be an adjustable limiting bolt. The adjustable limiting bolt can be screwed in or out to adjust the end position, thereby adjusting the preset limiting position of the linkage mechanism 300 or the clamping mechanism 200. Since the preset limiting position is related to the position or angle of the limiting part 220 when it is in the clamping position, the position or angle of the limiting part 220 when it is in the clamping position can be finely adjusted by adjusting the position of the adjustable limiting bolt to adapt to different sizes of substrates 600, assembly errors, or clamping position adjustment requirements.

[0124] When the release mechanism 400 does not restrict the linkage mechanism 300, the elastic member 520 can apply a restoring force to the linkage mechanism 300 or the clamping mechanism 200, causing the linkage mechanism 300 or the clamping mechanism 200 to tend towards a state corresponding to the clamping position; the limiting member 540 can abut against the linkage mechanism 300 or the clamping mechanism 200 to determine the stop position in this state. Through the combined action of the elastic member 520 and the limiting member 540, the possibility of the linkage mechanism 300 or the clamping mechanism 200 deviating from the preset position due to vibration, inertia or assembly gaps can be reduced, thereby ensuring that the limiting part 220 is stably maintained in the clamping position.

[0125] When the release mechanism 400 restricts the linkage mechanism 300 and the chuck base 100 rotates, relative motion occurs between the linkage mechanism 300 and the chuck base 100. The clamping mechanism 200 moves under the action of this relative motion, causing the limiting part 220 to switch from the clamping position to the release position. During this process, the elastic member 520 can undergo elastic deformation and store elastic potential energy. When the release mechanism 400 releases the restriction on the linkage mechanism 300, the elastic member 520 releases its elastic potential energy and applies a restoring force, causing the linkage mechanism 300 or the clamping mechanism 200 to return to its original position. The limiting member 540 then forms a limiting engagement with the linkage mechanism 300 or the clamping mechanism 200 during the return process, causing the limiting part 220 to return to its original position and remain in the clamping position.

[0126] Using the scheme of the embodiments in this specification, the elastic member 520 can apply a restoring force to the linkage mechanism 300 or the clamping mechanism 200, causing the linkage mechanism 300 or the clamping mechanism 200 to tend to return to the state corresponding to the clamping position after the release action is completed; the limiting member 540 can mechanically limit the return position of the linkage mechanism 300 or the clamping mechanism 200, preventing it from exceeding the preset limit position under the action of the elastic member 520. Thus, the elastic member 520 and the limiting member 540 can work together to keep the limiting part 220 stably maintained in the clamping position, improve the accuracy and repeatability of the clamping position, and reduce the risk of the limiting part 220 deviating from the clamping position due to vibration, inertia, or assembly gaps.

[0127] See Figure 9 , Figure 9 This diagram illustrates the gas flow direction during operation of a clamping and releasing device according to an embodiment of this specification. The clamping mechanism 200 has a flow channel 240 communicating with the outside, and the chuck base 100 has a gas supply channel 120 communicating with the flow channel 240. The gas supply channel 120 is used to supply gas to the flow channel 240 to remove liquid around the clamping mechanism 200.

[0128] like Figure 9 As shown, Figure 9The square arrows in the diagram represent the main airflow entering the chuck base 100. The main airflow can enter the chuck base 100 from an external air source, a spindle air supply structure, or an equipment air supply pipeline, and serves as the air supply basis for the clamping and releasing device or the substrate support structure. The main airflow can flow inside the chuck base 100 and is distributed according to different functions to the supporting air path for supporting the substrate 600 and the air supply channel 120 for preventing liquid ingress.

[0129] Figure 9 The dotted arrows in the diagram represent the airflow used by the Bernoulli chuck to support the substrate 600. This airflow can flow through the supporting air passage within the chuck base 100 to the area below the substrate 600, and then exit from the upper side or supporting area of ​​the chuck base 100, thereby forming an air film or gas support between the substrate 600 and the chuck base 100. Thus, the Bernoulli effect or gas support can be used to support the substrate 600 non-contactly or with low contact.

[0130] Figure 9 The diagonal arrows in the diagram represent the airflow of the anti-seepage liquid. This airflow can enter the guide channel 240 of the clamping mechanism 200 through the air supply channel 120 on the chuck base 100, and flow along the guide channel 240 to the gap area around the clamping mechanism 200. Since the clamping mechanism 200 needs to move relative to the chuck base 100, there is usually an assembly gap or movement gap between the clamping mechanism 200 and the chuck base 100. During the cleaning, developing, desizing, spin drying, or other wet processing of the substrate 600, liquid may enter the clamping and releasing device through this gap. By allowing the anti-seepage liquid airflow to exit from the guide channel 240, a purging airflow or airflow isolation can be formed at this gap, thereby preventing or reducing the possibility of liquid entering the clamping and releasing device.

[0131] In some embodiments, the flow channel 240 may be disposed on the outer periphery, end, sidewall, or near the mating position of the clamping mechanism 200, or close to the chuck base 100. The flow channel 240 may be an annular groove, a flow groove, a flow hole, a flow gap, an annular channel, or other structures capable of guiding gas flow. The gas supply channel 120 may be disposed in the chuck base 100 and communicate with the flow channel 240, allowing gas to enter the flow channel 240 of the clamping mechanism 200 from the chuck base 100. The flow channel 240 may be disposed around the rotation axis of the clamping mechanism 200, or along the circumference, radial direction, or a local area of ​​the clamping mechanism 200, as long as it can guide the gas supplied by the gas supply channel 120 to a gap area where liquid can easily enter.

[0132] In some embodiments, the gas supply channel 120 can be a leak-proof liquid gas supply channel independent of the Bernoulli support gas path, or it can be a gas supply branch formed by splitting the same gas source. That is, the gas used to form the leak-proof liquid gas flow can come from the same gas source as the gas used to support the substrate 600, or it can come from a different gas source. Regardless of the gas supply method used, as long as the gas supply channel 120 can supply gas to the flow channel 240 and form a leak-proof liquid gas flow around the clamping mechanism 200, the function of preventing liquid from entering the clamping and releasing device can be achieved.

[0133] Using the scheme of the embodiments in this specification, the air supply channel 120 on the chuck base 100 can supply air to the guide channel 240 on the clamping mechanism 200, so that the gas flows through the guide channel 240 to the gap between the clamping mechanism 200 and the chuck base 100 or to the surrounding area of ​​the clamping mechanism 200, thereby forming a purge airflow or airflow isolation in locations where liquids are easily entered. This reduces the risk of cleaning fluid, developing fluid, adhesive remover, deionized water, or other process liquids entering the clamping and releasing device along the gaps around the clamping mechanism 200, improving the protective capability and operational reliability of the clamping and releasing device during wet processing.

[0134] See Figure 10 , Figure 10 An exploded view of a substrate processing apparatus according to one embodiment of this specification is shown. In one embodiment of this specification, a substrate processing apparatus is provided, including the clamping and releasing device from any of the above embodiments.

[0135] It should be noted that the substrate processing equipment is used to perform operations on the substrate 600, including but not limited to processing, picking, placing, transporting, carrying, or rotating. The substrate 600 can be a wafer or other sheet-like workpiece requiring edge limiting, clamping and releasing, or rotating processing. The substrate processing equipment may include a support structure for supporting the substrate 600, a drive structure for driving the substrate 600 or the support structure to move, a processing structure for processing the substrate 600, and a clamping and releasing device for clamping and releasing the substrate 600. It should be noted that the substrate processing equipment in this specification is not limited to a specific type of processing equipment. As long as the equipment requires operations on the substrate 600 during operation, including but not limited to carrying, clamping, releasing, rotating, or picking, it can be considered a specific type of substrate processing equipment.

[0136] In some embodiments, the clamping and releasing device can serve as a substrate edge limiting structure in a substrate processing apparatus, and is disposed in the chuck, spindle, support table, rotary platform, or process area of ​​the substrate processing apparatus. The substrate processing apparatus can use the clamping and releasing device to circumferentially limit, edge-grip, or pick up and release the substrate 600. The clamping and releasing device can be used in conjunction with the spindle drive mechanism, air supply mechanism, liquid supply mechanism, robot arm, lifting mechanism, or control system in the substrate processing apparatus. For example, the substrate processing apparatus can be a wafer cleaning apparatus, which can spray cleaning fluid, deionized water, or drying gas onto the substrate 600 during its rotation. The substrate processing apparatus can also be a photoresist coating apparatus, which can apply photoresist or other coating materials to the surface of the substrate 600 during its rotation. The substrate processing apparatus can also be a developing apparatus, which can perform developing processing on the substrate 600 during its carrying or rotation. Substrate processing equipment can also be resist removal equipment, post-etching cleaning equipment, spin-drying equipment, single-wafer wet processing equipment, substrate rotation processing equipment, substrate pre-inspection processing equipment, or other semiconductor process equipment. Any of the above equipment that includes clamping and releasing devices and requires the substrate 600 to be supported, clamped, released, rotated, picked up, or processed can be considered a specific implementation of substrate processing equipment.

[0137] By applying the solutions described in this specification, the substrate processing equipment can switch between a substrate processing state and a substrate pick-and-place state. Furthermore, the release mechanism 400 selectively restricts the linkage mechanism 300, and the relative movement between the linkage mechanism 300 and the chuck base 100 enables the release of the limiting part 220. This reduces the need for an independent release drive structure on the chuck base 100, simplifies the arrangement of the rotary-side clamping and release-related structures in the substrate processing equipment, reduces the weight of the rotary-side structures, and improves the convenience of substrate pick-and-place processes and the operational stability during substrate processing.

[0138] See Figure 11 , Figure 11 This specification shows a flowchart of a clamping and releasing device control method according to an embodiment of the present specification. The method includes: S1: Control the action of the release mechanism to make the release mechanism cooperate with the linkage mechanism to limit the linkage mechanism from rotating synchronously with the chuck base.

[0139] It should be noted that controlling the action of the release mechanism 400 can be understood as sending a control command to the release mechanism 400 through the control system, causing the release mechanism 400 to switch from the avoidance state to the limit state, and forming a limit engagement with the linkage mechanism 300. The engagement between the release mechanism 400 and the linkage mechanism 300 can be achieved by the release element 440 in the release mechanism 400 and the limit hole, limit groove, limit notch, limit protrusion, or other limit engagement part on the linkage mechanism 300, forming an insertion, abutment, locking, or blocking engagement. Through the above engagement, the linkage mechanism 300 is restricted by the release mechanism 400 and cannot continue to rotate synchronously with the chuck base 100, or cannot continue to move in the same motion state as the chuck base 100.

[0140] In practical applications, there are various ways to control the release mechanism 400 to cooperate with the linkage mechanism 300 to restrict the linkage mechanism 300 from rotating synchronously with the chuck base 100. The specific method is selected based on the actual situation, and this specification does not limit this approach. In one possible implementation, the release element 440 in the release mechanism 400 can be controlled to rise or fall along the axial direction of the chuck base 100, causing the release element 440 to extend into the limiting hole, limiting groove, or limiting notch on the linkage mechanism 300, thereby restricting the linkage mechanism 300 from rotating synchronously with the chuck base 100. In another possible implementation, the stop, block, or lever in the release mechanism 400 can be controlled to extend, swing, or translate in a direction close to the linkage mechanism 300, causing the stop, block, or lever to abut against the limiting protrusion, limiting edge, or mating surface on the linkage mechanism 300, thereby restricting the linkage mechanism 300 from continuing to rotate synchronously with the chuck base 100.

[0141] In one optional embodiment of this specification, the step of controlling the release mechanism 400 to cooperate with the linkage mechanism 300 includes: controlling the release member 440 in the release mechanism 400 to rise or fall along the axial direction of the chuck base 100, so that the release member 440 extends into the linkage mechanism 300, preventing the linkage mechanism 300 from rotating synchronously with the chuck base 100.

[0142] It should be noted that the release member 440 rising or falling along the axial direction of the chuck base 100 can be understood as the release member 440 moving along the central axis of the chuck base 100, or in a direction substantially perpendicular to the surface of the chuck base 100 used to support the substrate 600. The release member 440 can move axially under the support or guidance of the release base 420, or it can move axially under the action of a cylinder, electric cylinder, electric push rod, electromagnetic drive, or other drive structure disposed on the release base 420.

[0143] In some embodiments, the linkage mechanism 300 may be provided with a limiting hole, a limiting groove, a limiting notch, or other limiting engagement structure that allows the release member 440 to extend into. When the release member 440 is controlled to rise or fall along the axial direction of the chuck base 100, the release member 440 can move from the avoidance position to the limiting position and extend into the limiting hole, limiting groove, or limiting notch of the linkage mechanism 300. Through the insertion, locking, or blocking engagement between the release member 440 and the linkage mechanism 300, the linkage mechanism 300 can be restricted from continuing to rotate synchronously with the chuck base 100.

[0144] In some embodiments, the release member 440 may not completely penetrate the linkage mechanism 300, but may extend into the movement path of the linkage mechanism 300 or into the limiting engagement area of ​​the linkage mechanism 300. For example, the release member 440 may rise axially and abut against the limiting protrusion, limiting edge, or mating surface on the linkage mechanism 300 to prevent the linkage mechanism 300 from rotating synchronously with the chuck base 100. That is, as long as the release member 440 can form a limiting engagement with the linkage mechanism 300 after moving axially, preventing the linkage mechanism 300 from continuing to rotate synchronously with the chuck base 100, it can be understood that the release member 440 extends into the linkage mechanism 300 and prevents the linkage mechanism 300 from rotating synchronously with the chuck base 100.

[0145] After the release member 440 extends into the linkage mechanism 300 and restricts the linkage mechanism 300 to rotate synchronously with the chuck base 100, relative movement can occur between the chuck base 100 and the linkage mechanism 300 as the chuck base 100 continues to rotate. The clamping mechanism 200 is linked with the linkage mechanism 300, therefore, the clamping mechanism 200 can move under the action of this relative movement, causing the limiting part 220 to switch from the clamping position to the release position. Thus, the release process of the clamping and releasing device can be triggered by controlling the axial lifting and lowering action of the release member 440.

[0146] Using the scheme of the embodiments in this specification, the release member 440 can rise or fall along the axial direction of the chuck base 100, and prevent the linkage mechanism 300 from rotating synchronously with the chuck base 100 by extending into the linkage mechanism 300. Thus, the release mechanism 400 can selectively restrict the linkage mechanism 300 through simple axial movement, without requiring an additional complex release drive structure on the chuck base 100, nor requiring the release mechanism 400 to rotate synchronously with the chuck base 100 as a whole. Simultaneously, since the release member 440 can switch between a clearance position and a limit position by axial movement, when the release base plate 600 is not needed, the release member 440 can retract from the linkage mechanism 300 and clear it, allowing the linkage mechanism 300 to rotate synchronously with the chuck base 100; when the release base plate 600 is needed, the release member 440 can extend into the linkage mechanism 300 and restrict its synchronous rotation, thereby triggering relative movement between the chuck base 100 and the linkage mechanism 300. This improves the controllability of the release action and facilitates release control during the pick-up and drop-off process of the substrate 600.

[0147] S5: Control the rotation of the chuck base to generate relative motion between the chuck base and the linkage mechanism. The clamping mechanism moves under the action of the relative motion so that the limiting part moves to the release position.

[0148] It should be noted that when the release mechanism 400 is already engaged with the linkage mechanism 300 and restricts the linkage mechanism 300 to rotate synchronously with the chuck base 100, controlling the rotation of the chuck base 100 can cause the chuck base 100 to have a rotational displacement relative to the restricted linkage mechanism 300. Since the clamping mechanism 200 is mounted on the chuck base 100 and is engaged with the linkage mechanism 300, when relative movement occurs between the chuck base 100 and the linkage mechanism 300, this relative movement can act on the clamping mechanism 200 through the linkage relationship between the linkage mechanism 300 and the clamping mechanism 200, causing the clamping mechanism 200 to rotate, swing, slide, move, or undergo a combination of movements, thereby switching the limiting part 220 from the clamping position to the release position.

[0149] In practical applications, there are various ways to control the chuck base 100 to rotate, so that there is relative motion between the chuck base 100 and the linkage mechanism 300. The clamping mechanism 200 moves under the action of the relative motion, so that the limiting part 220 moves to the release position. The specific method is selected according to the actual situation. This specification does not limit this in any way. In one possible implementation of this specification, the spindle drive mechanism connected to the chuck base 100 can be controlled to output a predetermined angle of rotation, causing the chuck base 100 to rotate relative to the linkage mechanism 300 restricted by the release mechanism 400 by a predetermined angle. The linkage mechanism 300 and the clamping mechanism 200 work together to convert this relative rotation into the movement of the clamping mechanism 200, thereby causing the limiting part 220 to move to the release position. In another possible implementation of this specification, the chuck base 100 can be controlled to move relative to the linkage mechanism 300 at a low speed, inching, or segmented rotation. The limiting part 220 can be determined to have moved to the release position by a position sensor, angle sensor, limit detection element, or preset angle parameters in the control system. After the limiting part 220 reaches the release position, the movement state of the chuck base 100 can be stopped or maintained.

[0150] In some embodiments, the linkage mechanism 300 can be a gear linkage mechanism, a variable radius cam linkage mechanism, or a slider guide linkage mechanism. When the linkage mechanism 300 is a gear linkage mechanism, the relative motion between the chuck base 100 and the gear linkage mechanism can be converted into the motion of the clamping mechanism 200 through the meshing relationship between the driving gear and multiple driven gears. When the linkage mechanism 300 is a variable radius cam linkage mechanism, the relative motion between the chuck base 100 and the variable radius cam linkage mechanism can cause the contour area of ​​the variable radius cam to push the follower, thereby driving the clamping mechanism 200 to move. When the linkage mechanism 300 is a slider guide linkage mechanism, the relative motion between the chuck base 100 and the slider guide linkage mechanism can cause the guide member to guide the follower to move, thereby driving the clamping mechanism 200 to move. All of the above methods can switch the limiting part 220 from the clamping position to the release position.

[0151] In one optional embodiment of this specification, the step of controlling the chuck base 100 to rotate so that relative motion occurs between the chuck base 100 and the linkage mechanism 300 includes: controlling the spindle drive mechanism connected to the chuck base 100 to output a predetermined angle of rotation, so that the chuck base 100 rotates relative to the linkage mechanism 300 restricted by the release mechanism 400 by a predetermined angle, and converting the relative rotation into motion of the clamping mechanism 200 through the linkage between the linkage mechanism 300 and the clamping mechanism 200.

[0152] It should be noted that the spindle drive mechanism can be understood as a drive mechanism used to drive the chuck base 100 to rotate around its central axis. The spindle drive mechanism may include a spindle, a motor, a rotary drive assembly, a reduction mechanism, a coupling structure, or other structures capable of inputting rotational power to the chuck base 100. The chuck base 100 can be directly connected to the spindle drive mechanism, or it can be connected to the spindle drive mechanism through a connecting seat, flange, coupling, adapter plate, or other connecting structure.

[0153] The predetermined angle can be understood as the rotation angle of the chuck base 100 required for the limiting part 220 to move from the clamping position to the release position. This predetermined angle can be set according to the transmission ratio between the linkage mechanism 300 and the clamping mechanism 200, the movement mode of the clamping mechanism 200, the travel distance of the limiting part 220, and the clearance space required for the placement and removal of the substrate 600. For example, if the clamping mechanism 200 is a limiting pin type clamping mechanism that rotates around a rotation axis, the predetermined angle can be determined according to the rotation angle required for the driven mechanism 340 to drive the clamping mechanism 200 to rotate to the release position; if the clamping mechanism 200 is a lever or a limiting slider, the predetermined angle can be determined according to the relative travel distance required for the variable radius cam mechanism to push the lever to swing or guide the limiting slider to slide.

[0154] In some embodiments, after the release mechanism 400 restricts the linkage mechanism 300, the control system can control the spindle drive mechanism to output a predetermined angle of rotation, causing the chuck base 100 to continue rotating around its central axis. Since the linkage mechanism 300 is restricted by the release mechanism 400 and cannot rotate synchronously with the chuck base 100, a relative rotation occurs between the chuck base 100 and the linkage mechanism 300. The clamping mechanism 200 is linked to the linkage mechanism 300; therefore, this relative rotation can be transmitted to the clamping mechanism 200 through the linkage mechanism 300 and converted into rotation, oscillation, sliding, or combined motion of the clamping mechanism 200, causing the limiting part 220 to switch from the clamping position to the release position.

[0155] In some embodiments, the control system can control the spindle drive mechanism to output rotation based on preset angle parameters. For example, after the release member 440 extends into the linkage mechanism 300 and completes the limiting action, the control system can control the spindle drive mechanism to drive the chuck base 100 to rotate a predetermined angle at low speed, inching, or in segments. The control system can also determine whether the chuck base 100 has rotated to the predetermined angle through feedback signals from an encoder, angle sensor, position sensor, limit detection member, or spindle drive mechanism. When the chuck base 100 rotates to the predetermined angle, the control system can control the spindle drive mechanism to stop rotating or maintain its current position, so that the limiting part 220 remains in the released position, facilitating the insertion or removal of the substrate 600.

[0156] In some embodiments, the predetermined angle can be a fixed angle, or it can be adjusted according to different sizes of substrates 600, different arrangements of clamping mechanisms 200, or different release strokes. For example, for substrates 600 with different diameters, different predetermined angles can be set so that the limiting part 220 has a clearance that meets the pick-and-place requirements when in the release position. As another example, for different types of linkage mechanisms 300, different predetermined angles can be set according to the gear transmission ratio, cam profile curve, or guide stroke to ensure that the clamping mechanism 200 can move to the corresponding release position.

[0157] By applying the solution described in this specification, the existing rotary drive capability of the spindle drive mechanism can be utilized to rotate the chuck base 100 relative to the linkage mechanism 300 restricted by the release mechanism 400 by a predetermined angle. The relative rotation is converted into motion of the clamping mechanism 200 through the linkage between the linkage mechanism 300 and the clamping mechanism 200. Therefore, without the need for a separate additional release drive source for the clamping mechanism 200, the switching of the limiting part 220 from the clamping position to the release position can be achieved, simplifying the rotary side structure and reducing device complexity. Simultaneously, by setting the rotation angle of the chuck base 100 to a predetermined angle, the travel distance of the clamping mechanism 200 can be controlled more accurately, allowing the limiting part 220 to move to a release position that meets the requirements for picking up and placing the substrate 600. This improves the positional controllability and repeatability of the release action, reducing the risk of incomplete release or excessive movement of the limiting part 220. Furthermore, since the control process achieves the release action by outputting a predetermined angle of rotation through the spindle drive mechanism, it can be combined with the original rotation control system of the substrate processing equipment, which facilitates the realization of automated control, position detection and action timing coordination, thereby improving the reliability of the substrate 600 pick-up and drop process and the convenience of equipment control.

[0158] S10: Place or remove the substrate onto the chuck substrate.

[0159] It should be noted that after the limiting part 220 moves to the release position, the limiting part 220 releases or avoids the edge of the substrate 600, so that the substrate 600 can be placed into or removed from the substrate placement area on the chuck base 100. Placing or removing the substrate 600 can be understood as moving the substrate 600 onto the chuck base 100 or removing the substrate 600 from the chuck base 100 by means of a robotic arm, a wafer transfer mechanism, a lifting and placing mechanism, a lifting mechanism, a suction mechanism, or other substrate transfer mechanism.

[0160] In practical applications, there are various ways to place or remove the substrate 600 from the chuck base 100, and the specific method is selected according to the actual situation. This specification does not limit this method in any way. In one possible implementation of this specification, a robotic arm can be controlled to remove the substrate 600 to be processed from the substrate box, transfer cavity, buffer table, or previous station and move it above the chuck base 100. After aligning the substrate 600 with the substrate placement area on the chuck base 100, the substrate 600 is placed on the chuck base 100. In another possible implementation of this specification, a lifting and picking mechanism can be controlled to carry the substrate 600 through a lifting pin, ejector pin, tray, bracket, or suction end, and move it up and down along the axial direction of the chuck base 100 to place the substrate 600 into the substrate placement area on the chuck base 100, or to lift, hold, suction, or remove the processed substrate 600 from the chuck base 100.

[0161] S15: Control the release mechanism to disengage from the linkage mechanism, thereby restoring the synchronous rotation of the linkage mechanism and the chuck base, and under the action of the holding mechanism, move the limiting part to the clamping position and hold it.

[0162] It should be noted that controlling the release mechanism 400 to disengage from the linkage mechanism 300 can be understood as sending a control command to the release mechanism 400 through the control system, causing the release mechanism 400 to switch from the limit state to the avoidance state and release the restriction on the linkage mechanism 300. After the release mechanism 400 disengages from the linkage mechanism 300, the linkage mechanism 300 is no longer subject to the obstruction, insertion, abutment, or jamming restrictions of the release mechanism 400. The linkage mechanism 300 can return to a state of synchronous rotation with the chuck base 100, or return to the initial linkage state in which it can rotate synchronously with the chuck base 100.

[0163] After the release mechanism 400 releases the restriction on the linkage mechanism 300, the holding mechanism 500 can apply a holding force or a reset force to the linkage mechanism 300 or the clamping mechanism 200, causing the linkage mechanism 300, the clamping mechanism 200, or the intermediate mating structure between them to return to the corresponding clamping state. When the clamping mechanism 200 moves under the action of the holding mechanism 500, the limiting part 220 can move from the release position to the clamping position and remain in the clamping position under the continuous action of the holding mechanism 500. Thus, the substrate 600 can be edge-limited after it is placed in, or the clamping and release device can be returned to the clamping state after the substrate 600 is removed.

[0164] In practical applications, there are various ways to control the release mechanism 400 to disengage from the linkage mechanism 300, thereby restoring the synchronous rotation of the linkage mechanism 300 and the chuck base 100, and to move the limiting part 220 to the clamping position and hold it under the action of the holding mechanism 500. The specific method can be selected according to the actual situation. This specification does not limit the specific method in this embodiment. In one possible implementation of this specification, the release member 440 in the release mechanism 400 can be controlled to descend or rise along the axial direction of the chuck base 100, causing the release member 440 to exit the limiting hole, limiting groove, or limiting notch on the linkage mechanism 300, thereby releasing the restriction on the linkage mechanism 300. Subsequently, the elastic member connected to the linkage mechanism 300 drives the linkage mechanism 300 to return to the initial linkage position, and causes the clamping mechanism 200 to move the limiting part 220 to the clamping position. In another possible implementation of this specification, the stop, block, or lever in the release mechanism 400 can be controlled to retract, swing, or translate to the avoidance position, so that it disengages from the limiting protrusion, limiting edge, or mating surface on the linkage mechanism 300. Subsequently, the elastic member, reset member, torsion spring, tension spring, or compression spring acting on the clamping mechanism 200 drives the clamping mechanism 200 to return, causing the limiting part 220 to move to the clamping position and remain there.

[0165] In some embodiments, the acceleration of the chuck base 100 during rotation is controlled to not exceed a preset threshold. It should be noted that the acceleration of the chuck base 100 can be understood as the angular acceleration of the chuck base 100 when rotating about its central axis. The preset threshold can be set based on the mass of the linkage mechanism 300, the elastic restoring force of the elastic element 520, the limiting position of the limiting element 540, the motion resistance of the clamping mechanism 200, and the stability requirements required for the limiting portion 220 to remain in the clamping position.

[0166] When the release mechanism 400 does not restrict the linkage mechanism 300, the linkage mechanism 300 can remain in the initial linkage position corresponding to the clamping position under the combined action of the elastic member 520 and the limiting member 540. When the chuck base 100 starts, stops, or changes speed, if the acceleration or deceleration of the chuck base 100 is too large, the linkage mechanism 300 may jitter, deviate, or undergo brief relative motion relative to the initial linkage position under inertia, thereby affecting the stability of the limiting part 220 when it remains in the clamping position. By controlling the acceleration of the chuck base 100 to not exceed a preset threshold, the possibility of the linkage mechanism 300 deviating from the initial linkage position due to inertia can be reduced.

[0167] In some embodiments, the control system can control the spindle drive mechanism to drive the chuck base 100 to rotate according to a preset speed curve. The preset speed curve may include an acceleration phase, a stable rotation phase, and a deceleration phase. During the acceleration and deceleration phases, the control system can limit the acceleration of the chuck base 100 to ensure it does not exceed a preset threshold; during the stable rotation phase, the chuck base 100 can rotate at the target speed. Therefore, while ensuring the chuck base 100 completes its release action or machining rotation, the risk of position fluctuations in the linkage mechanism 300, clamping mechanism 200, or limiting part 220 due to acceleration and deceleration impacts can be reduced.

[0168] Applying the scheme of the embodiments in this specification, the clamping and releasing device control method first controls the release mechanism 400 to cooperate with the linkage mechanism 300, preventing the linkage mechanism 300 from rotating synchronously with the chuck base 100; then controls the chuck base 100 to rotate, causing relative movement between the chuck base 100 and the linkage mechanism 300, and drives the clamping mechanism 200 to move, causing the limiting part 220 to switch to the release position; subsequently, the substrate 600 is placed or removed from the chuck base 100; finally, the release mechanism 400 is controlled to disengage from the linkage mechanism 300, and under the action of the holding mechanism 500, the limiting part 220 moves to the clamping position and is held. Thus, by utilizing the selective restriction of the linkage mechanism 300 by the release mechanism 400 and the relative movement between the chuck base 100 and the linkage mechanism 300, the release, placement, and clamping reset of the substrate 600 can be achieved, which is beneficial to improving the controllability of the substrate placement process and the reliability of the clamping reset.

[0169] See Figure 12 , Figure 12 This specification shows a schematic diagram of a clamping mechanism in the clamping position according to one embodiment; see also Figure 13 , Figure 13 A schematic diagram of a clamping mechanism provided in one embodiment of this specification is shown in the released position. Figure 12 and Figure 13 In this embodiment, taking a gear linkage mechanism and a limit pin type clamping mechanism 200 as examples, the release process of the substrate 600 in the clamping state is described. This embodiment is only used to illustrate a specific release process of the clamping and releasing device, and does not limit the linkage mechanism to a gear linkage mechanism, nor does it limit the clamping mechanism 200 to a limit pin type clamping mechanism. In other embodiments, the linkage mechanism may also be a variable radius cam linkage mechanism or a slider guide linkage mechanism, and the clamping mechanism 200 may also be a limit lever, a limit slider, or other structure that can drive the limit part 220 to switch between the clamping position and the release position.

[0170] In one optional embodiment of this specification, the clamping mechanism 200 can be a limit pin type clamping mechanism, the driven mechanism 340 can be coaxially fixed with the clamping mechanism 200, and the limiting part 220 can be offset from the axis of the clamping mechanism 200. That is, the rotation axis of the driven mechanism 340 can be coaxially arranged with the axis of the clamping mechanism 200, and when the driven mechanism 340 rotates around its own axis, it can drive the clamping mechanism 200 to rotate synchronously around the axis. The limiting part 220 can be provided on the clamping mechanism 200 and eccentrically arranged relative to the axis of the clamping mechanism 200. Because the limiting part 220 is eccentrically arranged relative to the axis of the clamping mechanism 200, when the clamping mechanism 200 rotates around its axis, the limiting part 220 does not just rotate in its original position, but will also generate eccentric movement around the axis with the clamping mechanism 200. This eccentric motion can change the position of the limiting part 220 relative to the edge of the substrate 600, allowing the limiting part 220 to switch between a position close to the edge of the substrate 600 and a position far from the edge of the substrate 600. Therefore, when the driven mechanism 340 rotates around its own axis under the action of the linkage mechanism 300, it can drive the clamping mechanism 200 to rotate synchronously, thereby achieving the switching of the limiting part 220 between the clamping position and the release position through the eccentric motion of the limiting part 220.

[0171] like Figure 12 As shown, when the clamping mechanism 200 is in the clamping position, the limiting part 220 can be located near the edge of the substrate 600, and can abut, limit, or block the edge of the substrate 600. At this time, the limiting part 220 can restrict the radial displacement of the substrate 600, keeping the substrate 600 in a relatively stable position on the chuck base 100. It should be noted that... Figure 12 The clamping position shown is not limited to the limiting part 220 having to apply a large clamping force to the substrate 600. As long as the limiting part 220 can constrain the edge of the substrate 600, it can be understood that the limiting part 220 is in the clamping position.

[0172] like Figure 13 As shown, when the clamping mechanism 200 is in the released position, it can rotate by a predetermined angle under the drive of the driven mechanism 340, causing the limiting part 220 to switch from a position close to the edge of the substrate 600 to a position away from or avoiding the edge of the substrate 600. At this time, the limiting part 220 no longer clamps, limits, or blocks the edge of the substrate 600, and the substrate 600 can be placed into the substrate placement area on the chuck base 100, or removed from the substrate placement area on the chuck base 100.

[0173] It should be noted that the above embodiment is a specific implementation of the limiting pin clamping mechanism. In other embodiments, the clamping mechanism 200 may also be a limiting lever, a limiting slider, or other structure capable of driving the limiting part 220 to switch between the clamping position and the release position. As long as the clamping mechanism 200 can move under the action of the linkage mechanism 300 and cause the limiting part 220 to switch between the clamping position and the release position, the clamping and release of the substrate 600 can be realized.

[0174] In one optional embodiment of this specification, when it is necessary to switch the clamping and releasing device from a clamping state to a releasing state, the release mechanism 400 can perform an action. Specifically, the release mechanism 400 drives the release member 440 to rise axially along the chuck base 100, causing the release member 440 to gradually approach the mating part provided on the linkage mechanism 300. Under the action of, but not limited to, a cylinder, electric cylinder, electric push rod, electromagnetic drive or other drive structure, the release member 440 moves from a clearance position to a limit position so as to subsequently form a mating part.

[0175] Before the release member 440 engages with the mating part, the chuck base 100 has not yet generated relative movement with respect to the linkage mechanism 300 for release. Therefore, the multiple clamping mechanisms 200 remain in the angle state corresponding to the clamping position, the multiple limiting parts 220 remain in the clamping position, and can still clamp, limit, or block the edge of the substrate 600.

[0176] After the release mechanism 400 moves to the limit position, the release member 440 can engage with the mating part to restrict the linkage mechanism 300 from continuing to rotate synchronously with the chuck base 100. At this time, the linkage mechanism 300 is in a restricted state. Subsequently, the chuck base 100 continues to rotate in a predetermined direction under the action of the spindle or other rotary drive structure, causing the chuck base 100 to rotate relative to the restricted linkage mechanism 300.

[0177] The linkage mechanism 300 includes a driving mechanism 320 and multiple driven mechanisms 340. The driving mechanism 320 is a driving gear or a driving gear ring, and the multiple driven mechanisms 340 can be multiple driven gears. After the release member 440 engages with the mating part, it can restrict the driving mechanism 320 from rotating synchronously with the chuck base 100. The multiple driven mechanisms 340 move around the central axis of the chuck base 100 with the chuck base 100. At the same time, since the multiple driven mechanisms 340 mesh with the driving mechanism 320, and the driving mechanism 320 is restricted by the release member 440, the driven mechanisms 340 will mesh and rotate relative to the driving mechanism 320 during the movement with the chuck base 100. Through this relative movement, the multiple driven mechanisms 340 can rotate around their own axes.

[0178] In some embodiments, the clamping mechanism 200 can be a limit pin type clamping mechanism, and multiple driven mechanisms 340 can be coaxially fixed to multiple clamping mechanisms 200 respectively. That is, the rotation axis of the driven mechanism 340 can be coaxially arranged with the axis of the corresponding clamping mechanism 200. When the driven mechanism 340 rotates around its own axis, it can drive the corresponding clamping mechanism 200 to rotate synchronously around the axis. The limiting part 220 can be provided on the clamping mechanism 200 and eccentrically arranged relative to the axis of the clamping mechanism 200. Since the limiting part 220 is eccentrically arranged relative to the axis of the clamping mechanism 200, when the clamping mechanism 200 rotates around its own axis, the limiting part 220 can generate eccentric movement with the clamping mechanism 200, thereby changing the position of the limiting part 220 relative to the edge of the substrate 600.

[0179] In some embodiments, the angle at which the chuck base 100 continues to rotate can be set according to the travel distance required for the limiting portion 220 to switch from the clamping position to the release position. For example, the chuck base 100 can continue to rotate by a predetermined angle after the release member 440 engages with the mating portion, causing the multiple driven mechanisms 340 to drive the multiple clamping mechanisms 200 to rotate synchronously, thereby causing the multiple limiting portions 220 to gradually move away from or avoid the edge of the substrate 600. Through the above process, the synchronous switching of the multiple limiting portions 220 from the clamping position to the release position can be achieved by utilizing the relative movement between the chuck base 100 and the linkage mechanism 300.

[0180] In some embodiments, while controlling the chuck base 100 to continue rotating, the acceleration of the chuck base 100 can also be controlled to not exceed a preset threshold. Since the linkage mechanism 300 can be held in the initial linkage position corresponding to the clamping position under the combined action of the elastic member 520 and the limiting member 540, if the acceleration or deceleration is too large when the chuck base 100 starts, stops, or changes speed, the linkage mechanism 300 may vibrate or shift relative to the initial linkage position due to inertia. By limiting the acceleration of the chuck base 100, the possibility of the linkage mechanism 300 generating unexpected relative motion can be reduced, and the stability of the limiting part 220 when held in the clamping position can be improved.

[0181] After the linkage mechanism 300 drives the multiple clamping mechanisms 200 to move, the multiple clamping mechanisms 200 can continue to move to the state corresponding to the release position. At this time, the multiple limiting parts 220 rotate synchronously with the corresponding clamping mechanism 200 and move from the original position close to the edge of the substrate 600 to a position away from or avoiding the edge of the substrate 600. That is to say, the multiple limiting parts 220 no longer clamp, limit or block the edge of the substrate 600, and the substrate 600 can be removed from the chuck base 100, or can be transferred by the substrate placement mechanism, robot, lifting and picking mechanism or other structures.

[0182] At this time, the linkage mechanism 300 and the chuck base 100 have driven multiple clamping mechanisms 200 to complete a predetermined movement through relative motion, and multiple limiting parts 220 have switched to the release position. Since the limiting part 220 is eccentrically set relative to the axis of the clamping mechanism 200, after the clamping mechanism 200 moves to the release state, the position of the limiting part 220 relative to the edge of the substrate 600 changes, thereby releasing or avoiding the edge of the substrate 600.

[0183] In some embodiments, after all the limiting parts 220 have switched to the release position, the chuck base 100 can be controlled to stop rotating, or the chuck base 100 can be controlled to remain in a position that facilitates the placement and removal of the substrate 600. Subsequently, the substrate placement mechanism, robot, lifting and placing mechanism, or other placing and removing mechanism can be controlled to place or remove the substrate 600. After the placement and removal are completed, the release member 440 in the release mechanism 400 can descend along the axial direction of the chuck base 100 or move in the opposite direction, so that the release member 440 exits the mating position with the mating part, thereby releasing the restriction on the linkage mechanism 300.

[0184] In some embodiments, after the release member 440 disengages from the mating part, the retaining mechanism 500 can restore the linkage mechanism 300, the clamping mechanism 200, or the intermediate mating structure between them to their initial state corresponding to the clamping position. The retaining mechanism 500 may include an elastic member 520 and a limiting member 540. The elastic member 520 is used to apply a restoring force to the linkage mechanism 300 or the clamping mechanism 200, and the limiting member 540 is used to prevent the linkage mechanism 300 or the clamping mechanism 200 from exceeding a preset limiting position corresponding to the clamping position. The elastic member 520 and the limiting member 540 work together to restore the limiting part 220 to and maintain it in the clamping position.

[0185] In some embodiments, the limiting member 540 can be an adjustable limiting bolt. The adjustable limiting bolt can be screwed in or out to adjust its end position, thereby adjusting the preset limiting position of the linkage mechanism 300 or the clamping mechanism 200. Since the preset limiting position is related to the position or angle of the limiting part 220 when it is in the clamping position, the position or angle of the limiting part 220 when it is in the clamping position can be finely adjusted by adjusting the position of the adjustable limiting bolt to adapt to different sizes of substrates 600, assembly errors, or clamping position adjustment requirements. Thus, the clamping and releasing device can proceed to the next substrate placement, clamping, or processing process after release.

[0186] The foregoing has described specific embodiments of this specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims may be performed in a different order than that shown in the embodiments and may still achieve the desired result. Furthermore, the processes depicted in the drawings do not necessarily require the specific or sequential order shown to achieve the desired result. In some embodiments, multitasking and parallel processing are possible or may be advantageous.

[0187] It should be noted that, for the sake of simplicity, the foregoing method embodiments are all described as a series of actions. However, those skilled in the art should understand that the embodiments in this specification are not limited to the described order of actions, because according to the embodiments in this specification, some steps can be performed in other orders or simultaneously. Furthermore, those skilled in the art should also understand that the embodiments described in this specification are all preferred embodiments, and the actions and modules involved are not necessarily essential to the embodiments in this specification.

[0188] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0189] The preferred embodiments disclosed above are merely illustrative of this specification. The optional embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the embodiments described herein. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of the embodiments, thereby enabling those skilled in the art to better understand and utilize this specification. This specification is limited only by the claims and their full scope and equivalents.

Claims

1. A clamping and releasing device, characterized in that, include: The chuck base that rotates about its central axis; Multiple clamping mechanisms are arranged around the chuck base. Each clamping mechanism has a limiting part and is movably disposed on the chuck base so that the limiting part can switch between a clamping position and a releasing position. The linkage mechanism rotates synchronously with the chuck base, and the clamping mechanism is linked and cooperates with the linkage mechanism; and The release mechanism is set independently of the chuck base; the release mechanism selectively cooperates with the linkage mechanism in a controlled manner to limit the linkage mechanism from rotating synchronously with the chuck base; When the release mechanism restricts the linkage mechanism and the chuck base rotates, relative movement occurs between the linkage mechanism and the chuck base. The clamping mechanism moves under the action of the relative movement, so that the limiting part switches from the clamping position to the release position.

2. The clamping and releasing device as described in claim 1, characterized in that, The clamping mechanism has a rotating shaft, and the limiting part is set off from the rotating shaft; the clamping mechanism rotates around the rotating shaft due to the relative movement between the linkage mechanism and the chuck base, so that the limiting part rotates from the clamping position to the release position.

3. The clamping and releasing device as described in claim 2, characterized in that, The linkage mechanism includes an active mechanism and multiple driven mechanisms. The active mechanism is driven by multiple driven mechanisms, and the driven mechanisms are coaxially fixed on the clamping mechanism. When the release mechanism restricts the active mechanism from rotating synchronously with the chuck base and the chuck base rotates, the multiple driven mechanisms rotate under the action of the relative motion, thereby driving the corresponding clamping mechanism to rotate around the rotation axis.

4. The clamping and releasing device as described in claim 3, characterized in that, The driving mechanism is a ring gear or a ring friction wheel, and the driven mechanism is a driven gear or a driven friction wheel.

5. The clamping and releasing device as described in claim 1, characterized in that, The clamping mechanism includes a lever with a fulcrum end and a limiting end, and the limiting part is disposed at the limiting end; the linkage mechanism includes a variable radius cam mechanism; under the action of the relative motion, the variable radius cam mechanism abuts against and pushes the lever, causing the lever to swing around the fulcrum end, so that the limiting part switches from the clamping position to the releasing position.

6. The clamping and releasing device as described in claim 1, characterized in that, The clamping mechanism includes a limiting slider, and the limiting part is disposed on the limiting slider; the linkage mechanism includes a variable radius cam mechanism and a guide member disposed on the variable radius cam mechanism, and the limiting slider is provided with a follower part that cooperates with the guide member; under the drive of the variable radius cam mechanism, the guide member guides the follower part to generate a movement with a radial component, so as to drive the limiting slider to slide.

7. The clamping and releasing device as described in claim 1, characterized in that, The release mechanism includes a release base and a release component. The release component switches between an avoidance position and a limit position under the control of a control signal. When the release component is in the limit position, the release component cooperates with the linkage mechanism to restrict the linkage mechanism from rotating synchronously with the chuck base.

8. The clamping and releasing device as described in claim 7, characterized in that, The release member moves up and down along the axial direction of the chuck base under the drive of the release base, or extends and retracts in the direction of approaching or moving away from the linkage mechanism, so as to selectively cooperate with the linkage mechanism.

9. The clamping and releasing device as described in claim 8, characterized in that, The linkage mechanism is provided with a cooperating part. When the release member is in the limiting position, it cooperates with the cooperating part to restrict the linkage mechanism from rotating synchronously with the chuck base.

10. The clamping and releasing device as claimed in claim 1, characterized in that, It also includes a retaining mechanism that applies a force to the linkage mechanism or the clamping mechanism to keep the limiting part in the clamping position without the action of an external force.

11. The clamping and releasing device as described in claim 10, characterized in that, The retaining mechanism includes an elastic element, which is connected to the linkage mechanism or the clamping mechanism. When the release mechanism restricts the linkage mechanism and the chuck base rotates, the elastic element undergoes elastic deformation and stores elastic potential energy. After the release mechanism releases the restriction on the linkage mechanism, the elastic element releases the elastic potential energy and applies a restoring force, causing the limiting part to return to the clamping position.

12. The clamping and releasing device as described in claim 11, characterized in that, The retaining mechanism further includes a limiting member, which cooperates with the elastic member to keep the limiting portion in the clamping position.

13. The clamping and releasing device according to any one of claims 1 to 12, characterized in that, The clamping mechanism has a flow channel communicating with the outside, and the chuck base has an air supply channel communicating with the flow channel. The air supply channel is used to supply air to the flow channel to remove the liquid around the clamping mechanism.

14. A substrate processing apparatus, characterized in that, Includes the clamping and releasing device as described in any one of claims 1-13.

15. A method for controlling a clamping and releasing device, applied to the clamping and releasing device as described in any one of claims 1-13, characterized in that, The method includes: Control the release mechanism to cooperate with the linkage mechanism to restrict the linkage mechanism from rotating synchronously with the chuck base; The chuck base is controlled to rotate, so that there is relative movement between the chuck base and the linkage mechanism. The clamping mechanism moves under the action of the relative movement, so that the limiting part moves to the release position. Place or remove the substrate onto the chuck base; Control the release mechanism to disengage from the linkage mechanism, thereby restoring the synchronous rotation of the linkage mechanism and the chuck base. Under the action of the holding mechanism, the limiting part moves to the clamping position and is held.

16. The clamping and releasing device control method as described in claim 15, characterized in that: The steps for controlling the release mechanism to operate, and for the release mechanism to cooperate with the linkage mechanism, include: The release element in the release mechanism is controlled to rise or fall along the axial direction of the chuck base, so that the release element extends into the linkage mechanism and prevents the linkage mechanism from rotating synchronously with the chuck base.

17. The clamping and releasing device control method as described in claim 16, characterized in that: The step of controlling the rotation of the chuck base to generate relative motion between the chuck base and the linkage mechanism includes: The spindle drive mechanism connected to the chuck base is controlled to output a predetermined angle of rotation, causing the chuck base to rotate relative to the linkage mechanism restricted by the release mechanism by the predetermined angle. The relative rotation is converted into the motion of the clamping mechanism through the linkage between the linkage mechanism and the clamping mechanism.

Images