Micromechanical return element, structural element

Abstract

The invention relates to a micromechanical return element having a first micromechanical element and a second micromechanical element. The first micromechanical element and the second micromechanical element are movable relative to one another. The micromechanical return element has a first movement range and a second movement range. In the first movement range, a recess of the first micromechanical element is at least partially closed by the second micromechanical element. In the second movement range, the recess is open. In the first movement range, a return force acts onto the second micromechanical element as a result of the recess being at least partially closed.

Description

Technical Field

[0001] This invention relates to a micromechanical return element and a micromechanical or microelectromechanical structural element. Background Technology

[0002] Micromechanical and microelectromechanical structural elements are known from the prior art. These structural elements can, in particular, have structures that can move relative to each other. One challenge in designs for such structural elements is absorbing shocks and vibrations from the structural elements in a way that prevents damage to the moving structures. Summary of the Invention

[0003] One object of the present invention is to provide a micromechanical return element that reduces damage to movable structures. Another object of the present invention is to provide a structural element. These objects are addressed by the subject matter of the independent claims. Advantageous extensions are given in the dependent claims.

[0004] According to a first aspect, the present invention relates to a micromechanical return element having a first micromechanical element and a second micromechanical element. The first micromechanical element and the second micromechanical element are movable relative to each other. In particular, the first micromechanical element is directly or indirectly mechanically connected to a first movable functional element of a movable structure of a structural element. In particular, the second micromechanical element is directly or indirectly mechanically connected to a second movable functional element of a movable structure of a structural element. Here, the functional elements are particularly movable relative to each other, and one of the functional elements may, in principle, be immovable, as long as the other functional element is movable relative to this immovable functional element. The micromechanical return element has a first range of motion and a second range of motion. In the first range of motion, a groove in the first micromechanical element is at least partially closed by the second micromechanical element. In the second range of motion, the groove is open. In the first range of motion, since the groove is at least partially closed, a return force acts on the second micromechanical element.

[0005] Here, the first range of motion can constitute an overload range in which the movement of the movable structure can be decelerated and / or damped due to the return force. This can prevent functional components from colliding with each other, or at least reduce the relative collision velocity of the functional components. This can lead to a reduction in damage. The second range of motion can in particular constitute an operating range in which the movement of the functional components should be as unaffected as possible.

[0006] In one embodiment of the micromechanical return element, the return force acting on the second micromechanical element in the second range of motion is significantly smaller than that in the first range of motion. In the second range of motion, the return force is particularly likely to be at most 10%, preferably at most 5%, more preferably at most 1%, particularly preferably at most 0.5%, and ideally at most 0.1%. Here, the force arising from the relative movement of the functional elements relative to each other in the second range of motion is particularly likely to be greater than the return force in the second range of motion, such that the micromechanical return element has no effect or only a minor effect on the relative movement of the functional elements in the second range of motion.

[0007] In one embodiment of the micromechanical return element, the return force has a component proportional to the relative position of the micromechanical elements. The micromechanical return element here functions similarly to a spring. In particular, this prevents the functional elements from sticking together, as the return force loosens them from each other. In another embodiment of the micromechanical return element, the return force has a component proportional to the relative velocity of the micromechanical elements. The micromechanical return element then acts as a damper. In particular, this reduces the relative velocity of the functional elements relative to each other before a collision, thereby reducing damage. Alternatively, the return force can be configured to have both a component proportional to the relative position of the micromechanical elements and a component proportional to their relative velocity. This constitutes a combination of a spring and a damper, thus the micromechanical return element functions as both a spring and a damper.

[0008] In one embodiment of the micromechanical return element, the opening of the groove is at least partially closed by a second micromechanical element during a first range of motion. During a second range of motion, the opening is opened. Therefore, fluid (e.g., ambient air) in the groove is compressed by the second micromechanical element, and / or the outflow velocity of the fluid from the groove is set by the second micromechanical element. This allows the micromechanical return element to function as a spring or as a damper.

[0009] In one embodiment of the micromechanical return element, the first micromechanical element and the second micromechanical element form a closed element. The closed element has a closing pin that can move into a closed cavity. Specifically, the closing pin can move into the closed cavity based on the relative movement of the micromechanical elements relative to each other. Here, the closing pin can be associated with the first micromechanical element, and the closed cavity can be associated with the second micromechanical element. By using the closed element, the compression of fluid and / or the outflow of fluid from the groove can be more precisely set and controlled, making the micromechanical return element adaptable to different situations.

[0010] In one embodiment of the micromechanical return element, the closing element is formed by multiple closed cavities and multiple closing pins. This enables a greater return force, and consequently a greater spring action and / or a greater damping action.

[0011] In one embodiment of the micromechanical return element, the opening defines an outflow direction. The outflow direction is at an angle to the relative movement direction of the micromechanical element, particularly a right angle.

[0012] In one embodiment of the micromechanical return element, the groove has another opening. This other opening is arranged opposite to the second micromechanical element.

[0013] In one embodiment of the micromechanical return element, the second micromechanical element has a slider with a through opening. In a second range of motion, the opening and the through opening are at least partially aligned. In a first range of motion, the opening is at least partially closed by the slider.

[0014] According to a second aspect, the present invention relates to a micromechanical or microelectromechanical structural element. This structural element can be, for example, a microphone, a speaker, or a miniature pump, but other structural elements are also conceivable. The micromechanical or microelectromechanical structural element has a first movable functional element and a second functional element, and also has a micromechanical return element. Here, the micromechanical return element can correspond to a configuration already described. The first movable functional element is directly or indirectly mechanically connected to the first micromechanical element of the micromechanical return element, and the second movable functional element is directly or indirectly mechanically connected to the second micromechanical element of the micromechanical return element. The functional elements can constitute a movable structure of the structural element. In particular, the functional elements can move relative to each other. The first movable functional element can be integrally configured with the first micromechanical element. The second movable functional element can be integrally configured with the second micromechanical element. Attached Figure Description

[0015] Embodiments of the present invention will be illustrated with reference to the following drawings. As shown in the schematic diagrams: Figure 1 Microelectromechanical structural components; Figure 2 The first micromechanical return element is in the first position; Figure 3 The first micromechanical return element is in the second position; Figure 4 The second micromechanical return element is in the first position; Figure 5The second micromechanical return element is in the second position; Figure 6 The third micromechanical return element is in the first position; Figure 7 The third micromechanical return element is in the second position; Figure 8 The fourth micromechanical return element is in the first position; Figure 9 The fourth micromechanical return element is in the second position; Figure 10 The fifth micromechanical return element is in the first position; Figure 11 The fifth micromechanical return element is in the second position; Figure 12 The sixth micromechanical return element is in the first position; Figure 13 The sixth micromechanical return element is in the second position; Figure 14 The seventh micromechanical return element is in the first position; Figure 15 The seventh micromechanical return element is in the second position; Figure 16 The seventh micromechanical return element is located in the third position; Figure 17 The eighth micromechanical return element is in the first position; Figure 18 The eighth micromechanical return element is in the second position; and Figure 19 The eighth micromechanical return element is located in the third position. Detailed Implementation

[0016] In the following description of the accompanying drawings, the same reference numerals may be used for elements and features that serve the same function. In particular, features disclosed in conjunction with the drawings may also be provided separately in specific configurations if necessary.

[0017] Figure 1A microelectromechanical (MEMS) structural element 10 is shown, which has a chip frame 11 as a first functional element 12 and a diaphragm 13 as a second functional element 14. The diaphragm 13 can be vibrated by an optional driving element 15, and / or its movement can be read by an optional reading element 16. For this purpose, the structural element 10 can have an internal space 17 and an acoustic opening 18, wherein sound generated by the diaphragm 13 by the driving element 15 can exit the structural element 10 (speaker) through the acoustic opening 18, or sound incident through the acoustic opening 18 can be transmitted to the reading element 16 (microphone) via the diaphragm 13. However, via... Figure 1 The principle shown can also be used to set other micromechanical or microelectromechanical structural components 10.

[0018] The structural element 10 also has a plurality of micromechanical return elements 100. The micromechanical return elements 100 are used to absorb shocks and vibrations of the structural element 10, so that the movable structures (i.e., diaphragm 13 and / or drive element 15 and / or read element 16) are not damaged. Here, the micromechanical return elements 100 can be arranged between the chip frame 12 and the diaphragm 13.

[0019] Figure 2 The first micromechanical return element 100 is shown in the first position. Figure 3 A first micromechanical return element 100 in a second position is shown. The micromechanical return element 100 has a first micromechanical element 110 and a second micromechanical element 120. (As shown by...) Figure 2 and Figure 3 As shown in different positions, the first micromechanical element 110 and the second micromechanical element 120 are capable of moving relative to each other. In particular, the first micromechanical element 110 is capable of being directly or indirectly mechanically connected to a first movable functional element of the movable structure of the structural element 10. In particular, the second micromechanical element 120 is capable of being directly or indirectly mechanically connected to a second movable functional element of the movable structure of the structural element 10. Here, the functional element can be, for example, a... Figure 1 The diaphragm 13 shown and Figure 1 The chip frame 11 is shown. Here, functional elements are particularly capable of moving relative to each other, and one of the functional elements (e.g., chip frame 11) can in principle be immovable, as long as the other functional element (diaphragm 13) is movable relative to the immovable functional element. The micromechanical return element 100 has a first range of motion and a second range of motion. In the first range of motion, the groove 111 of the first micromechanical element 100 is at least partially closed by the second micromechanical element 120 (e.g., ...). Figure 1 (As shown in the diagram). In the second range of motion, the groove 111 is open, here opened through an optional opening 112 (as shown in the diagram). Figure 2 (As shown in the diagram). During the first range of motion, since the groove 111 is at least partially closed, the return force acts on the second micromechanical element 120.

[0020] Here, the first range of motion can constitute an overload range, in which the movement of the movable structure can be decelerated and / or damped due to the return force. This can prevent functional components from colliding with each other, or at least reduce the relative collision velocity of the functional components. This can lead to a reduction in damage. The second range of motion can particularly constitute an operating range, in which the movement of the functional components should be as unaffected as possible. This can mean that, in Figure 1 During normal operation of structural component 10, the micromechanical return element 100 is always arranged in... Figure 3 In the second position shown, and only during overload. Figure 2 The arrangement shown. Fluid present in the groove 111 can flow through the fluid channel 113 and the opening 112, thereby damping the movement of the second micromechanical element 120.

[0021] Here, the cross-section of the opening 112 can be 2.5 to 100 times, particularly 2.5 to 50 times, the cross-section of the fluid channel 113. For example, the size 114 of the opening 112 can be between 1 micrometer and 500 micrometers, particularly between 5 micrometers and 50 micrometers. The distance 115 of the second micromechanical element 120 in the region of the fluid channel 113 can be between 10 nanometers and 100 micrometers, particularly between 100 nanometers and 20 micrometers.

[0022] Here, the return force has a component proportional to the relative velocity of the micromechanical elements 110 and 120. The micromechanical return element 100 acts as a damper here. In particular, this reduces the relative velocity of the functional elements 110 and 120 relative to each other before a collision, thereby reducing damage.

[0023] By appropriately selecting the distance 115, in an alternative configuration, it is possible to achieve a situation where only a very small amount of fluid, or no fluid at all, can flow out from the groove 111 through the fluid channel 113 and the opening. Figure 2 In the first position, the second micromechanical element closes the groove 111. The return force here has a component proportional to the relative position of the micromechanical elements 110 and 120. The micromechanical return element 100 here functions similarly to a spring. In particular, this prevents the functional elements 110 and 120 from sticking together, because the functional elements 110 and 120 are separated from each other by the return force.

[0024] Alternatively, the return force can be configured to have both a component proportional to the relative position of the micromechanical elements 110 and 120 and a component proportional to their relative velocity. This constitutes a combination of spring and damper, thus the micromechanical return element 100 functions as both a spring and a damper. This can also be achieved by appropriately selecting the distance 115.

[0025] It can be configured such that the return force acting on the second micromechanical element 120 is significantly smaller in the second range of motion than in the first range of motion. In the second range of motion, the return force can be at most 10% of the original return force, preferably at most 5%, more preferably at most 1%, particularly preferably at most 0.5%, and ideally at most 0.1%. Here, the force arising from the relative movement of the functional elements relative to each other in the second range of motion can be significantly greater than the return force in the second range of motion, such that the micromechanical return element 100 has no effect or only a minor effect on the relative movement of the functional elements in the second range of motion.

[0026] exist Figure 2 and Figure 3 In this embodiment, the opening 112 of the groove 111 is at least partially closed by the second micromechanical element 120 during a first range of motion. During a second range of motion, the opening 112 is opened. Therefore, the fluid (e.g., ambient air) in the groove 111 is compressed by the second micromechanical element 120, and / or the outflow velocity of the fluid from the groove 111 is set by the second micromechanical element 120. This allows the micromechanical return element 100 to function as a spring or as a damper.

[0027] It can be configured such that opening 112 defines the outflow direction 116. The outflow direction 116 is at an angle to the relative motion direction of micromechanical components 110 and 120, and in particular, it is at a right angle to the relative motion direction of micromechanical components 110 and 120.

[0028] Figure 4 The second micromechanical return element 100 in the first position is shown. Figure 5 A second micromechanical return element 100 in the second position is shown. Unless otherwise described below, the second micromechanical return element 100 corresponds to Figure 2 and Figure 3The first micromechanical return element 100. The first micromechanical element 110 and the second micromechanical element 120 form a closing element 130. The closing element 130 has a closing pin 132 that can move into the closing cavity 131. In particular, the closing pin 132 can move into the closing cavity 131 based on the relative movement of the micromechanical elements 110 and 120 relative to each other. Here, the closing pin 132 can be associated with the second micromechanical element 120, and the closing cavity 131 can be associated with the first micromechanical element 110, such as... Figure 4 and Figure 5 As shown in the diagram. However, the closing pin 132 can also be associated with the first micromechanical element 110, and the closed cavity 131 can also be associated with the second micromechanical element 120. Through the closing element 130, the compression of the fluid and / or the outflow of the fluid from the groove 111 can be more precisely set and controlled, making the micromechanical return element 100 adaptable to different situations. In particular, the outflow of fluid from the groove 111 can enter the closed cavity 131 via the fluid channel 113, and then pass from the closed cavity 131 through the fluid channel 113 through the opening 112. This, in turn, results in damping. However, similar to... Figure 2 and Figure 3 The groove 111 can also be completely or almost completely closed by means of the closing element 130, thus making the micromechanical return element 100 function as a spring.

[0029] Figure 6 The third micromechanical return element 100 is shown in the first position. Figure 7 The third micromechanical return element 100 in the second position is shown. Unless otherwise described below, the third micromechanical return element 100 corresponds to Figure 4 and Figure 5 The second micromechanical return element 100. The closing element 130 is formed by a plurality of closed cavities 131 and a plurality of closing pins 132. This enables a greater return force, and thus a greater spring action and / or a greater damping action. Figure 6 and Figure 7 In the illustration, the closing element 130 is formed by three closing cavities 131 and three closing pins 132, but a different number of closing cavities 131 and closing pins 132 may also be provided.

[0030] Figure 8 The fourth micromechanical return element 100 is shown in the first position. Figure 9 The fourth micromechanical return element 100 in the second position is shown. Unless otherwise described below, the fourth micromechanical return element 100 corresponds to Figure 2 and Figure 3The first micromechanical return element 100. The groove 111 has another opening 117. The other opening 117 is arranged opposite to the opening 112 with respect to the second micromechanical element 120. The groove forms two fluid channels 113 that lead to the openings 112 and 117.

[0031] Figure 10 The fifth micromechanical return element 100 is shown in the first position. Figure 11 The fifth micromechanical return element 100 in the second position is shown. Unless otherwise described below, the fifth micromechanical return element corresponds to Figure 4 and Figure 5 The second micromechanical return element 100. Similar to... Figure 8 and Figure 9 The fourth micromechanical return element 100 has a groove 111 with another opening 117. This other opening 117 is arranged opposite to the opening 112 of the second micromechanical element 120. Two fluid channels 113 are formed by the groove, leading to the openings 112 and 117. These two openings 112 and 117 are connected by means of... Figure 4 and Figure 5 The explained closing element 130 is closed or can be closed.

[0032] Figure 12 The sixth micromechanical return element 100 is shown in the first position. Figure 13 The sixth micromechanical return element 100 in the second position is shown. Unless otherwise described below, the sixth micromechanical return element corresponds to Figure 4 and Figure 5 The second micromechanical return element 100. The second micromechanical element 120 has a slider 121 with a through opening 122. In the second range of motion ( Figure 13 The opening 112 and the through opening 122 are at least partially aligned. Within the first range of motion ( Figure 12 The opening 112 is at least partially closed by the slider 121. In this way, the opening in the first position ( Figure 12 The fluid channel 113 can also be used for damping.

[0033] exist Figures 6 to 13 In this configuration, the groove 111 is connected to the corresponding openings 112 and 117 via one or more fluid channels 113. The micromechanical return element functions as a spring here. Similarly, in... Figures 6 to 13 In the configuration, the groove 111 can also be completely or almost completely closed by means of the closing element 130, thus making the micromechanical return element 100 function as a spring.

[0034] Figure 14The seventh micromechanical return element 100 is shown in the first position. Figure 15 The seventh micromechanical return element 100 is shown in the second position. Figure 16 The seventh micromechanical return element 100 is shown in the third position. In the first position ( Figure 14 The first micromechanical element 110 and the second micromechanical element 120 are so far apart that no or only a small return force is generated between the micromechanical elements 110 and 120, especially because the openings 112 and 117 between the first and second micromechanical elements 120 are large. If the second micromechanical element 120 moves toward the first micromechanical element 110 ( Figure 15 Openings 112 and 117 are thus created, allowing fluid to flow through them from the groove 111 and creating a damping effect. If the second micromechanical element 120 moves further toward the first micromechanical element 110 ( Figure 16 If the openings 112 and 117 are closed, the remaining fluid inside the groove 111 is compressed. The resulting overpressure causes a return force that separates the micromechanical elements 110 and 120 from each other. In this configuration, the micromechanical return element initially acts as a damper as fluid flows out of the groove 111 through the openings 112 and 117. If subsequent contact occurs between the micromechanical elements 110 and 120, the micromechanical return element acts as a spring.

[0035] Figure 17 The eighth micromechanical return element 100 is shown in the first position. Figure 18 The eighth micromechanical return element 100 is shown in the second position. Figure 19 The eighth micromechanical return element 100 in the third position is shown. Unless otherwise described below, the eighth micromechanical return element 100 corresponds to Figures 13 to 15 The seventh micromechanical return element. Here, only an opening 112 is constructed between the first micromechanical element 110 and the second micromechanical element, and no other opening 117 is constructed.

[0036] Combination Figure 2 and Figure 3 The dimensions 114 and distance 115 described can also be set in the joint. Figures 4 to 19 In the described configuration.

[0037] Although the present invention has been described in detail through preferred embodiments, the present invention is not limited to the disclosed examples, and those skilled in the art can derive other variations therefrom without departing from the scope of protection of the present invention.

Claims

1. A micromechanical return element (100) comprising a first micromechanical element (110) and a second micromechanical element (120), wherein, The first micromechanical element (110) and the second micromechanical element (120) are movable relative to each other, wherein the micromechanical return element (100) has a first range of motion and a second range of motion, wherein in the first range of motion, the groove (111) of the first micromechanical element (110) is at least partially closed by the second micromechanical element (120), wherein in the second range of motion, the groove (111) is open, wherein in the first range of motion, since the groove (111) is at least partially closed, a return force is applied to the second micromechanical element (120).

2. The micromechanical return element (100) according to claim 1, wherein, In the second range of motion, the return force acting on the second micromechanical element (120) is significantly smaller than that in the first range of motion.

3. The micromechanical return element (100) according to any one of claims 1 or 2, wherein, The return force has a component proportional to the relative position of the micromechanical elements (110, 120) and / or a component proportional to the relative velocity of the micromechanical elements (110, 120).

4. The micromechanical return element (100) according to any one of the preceding claims, wherein, The opening (112) of the groove (111) is at least partially closed by the second micromechanical element (120) in the first range of motion, and the opening (112) is opened in the second range of motion.

5. The micromechanical return element (100) according to claim 4, wherein, The first micromechanical element (110) and the second micromechanical element (120) form a closed element (130), wherein the closed element (130) has a closing pin (132) that can move into a closed cavity (131).

6. The micromechanical return element (100) according to claim 5, wherein, The closing element (130) is formed by a plurality of closed cavities (131) and a plurality of closing pins (132).

7. The micromechanical return element (100) according to any one of claims 4 to 6, wherein, The opening (112) defines an outflow direction (116), wherein the outflow direction (116) is at an angle to the relative motion direction of the micromechanical components (110, 120), and in particular, is at a right angle to the relative motion direction of the micromechanical components (110, 120).

8. The micromechanical return element (100) according to claim 7, wherein, The groove (111) has another opening (117), wherein the other opening (117) is arranged opposite to the opening (112) with respect to the second micromechanical element (120).

9. The micromechanical return element (100) according to claim 7 or 8, wherein, The second micromechanical element (120) has a slider (121) with a through opening (122), wherein, in the second range of motion, the opening (112) and the through opening (122) are at least partially aligned, wherein, in the first range of motion, the slider (121) at least partially closes the opening (112).

10. A micromechanical or microelectromechanical structural element (10) having a first movable functional element (12) and a second functional element (14), and further having a micromechanical return element (100) according to any one of the preceding claims, wherein, The first movable functional element (12) is directly or indirectly mechanically connected to the first micromechanical element (110), and the second movable functional element (14) is directly or indirectly mechanically connected to the second micromechanical element (120).

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