Faceted reflector device

Abstract

The multi-faceted reflecting device 7 of the present disclosure is characterized by having a multi-faceted portion 72 having a plurality of reflecting surfaces 721 each having a different angle to reflect light emitted from a light source 41 toward a detection portion 431, and a fixed portion 71 fixed to a detection object supported in a tiltable manner with respect to the light source 41 and the detection portion 431.

Description

Technical Field

[0001] This disclosure relates to a multifaceted reflective device applicable to tilt detection technology. Background Technology

[0002] Previously, technologies have been proposed concerning scanner devices with reflectors that control the direction of light reflection. For example, Patent Document 1 discloses a reflector rotation angle detection device, which includes a reflector that changes the emission direction of laser light emitted from a laser source and a light-receiving sensor that receives reflected light reflected from a second reflector disposed on a first reflector and a second reflector of the reflector.

[0003] Existing technical documents Patent documents Patent Document 1: Japanese Patent No. 5293686 Summary of the Invention The problem the invention aims to solve In the scanner device of Patent Document 1, in order to detect the angle of the reflector, light reflected at a reflection angle corresponding to the tilt of the reflector is detected, thus the angle range of the reflected light is large. If the angle range of the reflected light is large, the detection range of the light-receiving sensor that receives the reflected light also needs to be expanded, which may result in a decrease in detection function.

[0004] The purpose of this disclosure is to provide a multi-faceted reflective device that can improve the detection function of tilt (tilt direction, tilt angle) of components.

[0005] means for solving problems The multifaceted reflection device disclosed herein includes: a multifaceted part having multiple reflective surfaces, each having a different angle, which reflect light irradiated from a light source toward a detection part; and a fixed part fixed to a detection object, the detection object being supported relative to the light source and the detection part in a tiltable manner.

[0006] Invention Effects The multi-faceted reflection device disclosed herein can improve the detection function of component tilt (tilt direction, tilt angle). Attached Figure Description

[0007] Figure 1 This is a structural diagram of the light source device in the implementation method.

[0008] Figure 2 It is a three-dimensional view of a partial structure of the scanner device.

[0009] Figure 3 It is a three-dimensional diagram of the structure including the multi-faceted reflective device.

[0010] Figure 4This is a bottom view of the structure of the multi-faceted reflector.

[0011] Figure 5 This is a side view of the tilt detection device, showing the initial tilt state of the deflection component.

[0012] Figure 6A This is an explanatory diagram (1) illustrating the configuration where the light-receiving points are not arranged in a straight line.

[0013] Figure 6B This is an explanatory diagram (2) illustrating the configuration where the light-receiving points are not arranged in a straight line.

[0014] Figure 7 This is a side view of the tilt detection device, showing the tilt state of the deflection member (1).

[0015] Figure 8 This is a side view of the tilt detection device, showing the tilt state of the deflection member (2).

[0016] Figure 9 This is a side view of the tilt detection device, showing the tilt state of the deflection component (3).

[0017] Figure 10 This is a bottom view of the multifaceted reflective device in variation 1.

[0018] Figure 11 This is a bottom view of the multifaceted reflective device in variation example 2.

[0019] Figure 12 This is a bottom view of the multifaceted reflective device in variation example 3.

[0020] Figure 13 This is a side view of the multifaceted reflective device in variation example 4. Detailed Implementation

[0021] The embodiments of this disclosure are described below based on the accompanying drawings. Figure 1 This is a structural diagram of the light source device 1. The light source device 1 has the function of emitting laser light into space. The light source device 1 can be used, for example, as a light source for laser rangefinders or LiDAR (Light Detection and Ranging) sensors. The light source device 1 includes a control unit 11, a rangefinder optical system 12, an optical system drive circuit 13, and a scanner device 2.

[0022] The control unit 11 controls the operation of the optical system drive circuit 13, the scanner device drive circuit 14, and the angle sensor circuit 15, etc. The control unit 11 executes functions and / or methods implemented by code or instructions contained in a program stored in the storage unit (not shown). The control unit 11 can be, as an example, a central processing unit (CPU), an MPU (Micro Processing Unit), a GPU (Graphics Processing Unit), a MCU (Micro Controller Unit), a processor core, a multiprocessor, an ASIC (Application-Specific Integrated Circuit), or a FPGA (Field-Programmable Gate Array). The control unit 11 can also implement the various processes disclosed in each embodiment through logic circuits or dedicated circuits formed in integrated circuits, etc. Furthermore, these circuits can be implemented by one or more integrated circuits, or multiple processes shown in each embodiment can be implemented by a single integrated circuit.

[0023] The storage unit (not shown) of the light source device 1 has the function of storing various programs or data as required. In addition, the storage unit can store information acquired such as measured signals. The storage unit is implemented using various storage media such as HDD (Hard Disk Drive), SSD (Solid-State Drive), and flash memory.

[0024] The ranging optical system 12 includes a laser-emitting element, optical components such as lenses or mirrors that guide the laser emitted from the laser-emitting element, and a light-receiving element that detects the laser. The optical components may also include diffusers, optical tunnels, microlens arrays, condenser lenses, and filters for adjusting the beam width or brightness distribution. The light-receiving element receives reflected light emitted from the laser-emitting element and reflected by an external object of the light source device 1. The ranging optical system 12 emits laser L1 as ranging light towards the deflection member 6 of the scanner device 2.

[0025] The optical system drive circuit 13 controls the light emission of the light-emitting element of the ranging optical system 12. In addition, the optical system drive circuit 13 transmits information such as detecting the light received by the light-receiving element of the ranging optical system 12 and converting it into an electrical signal to the control unit 11.

[0026] The scanner device 2 reflects the laser L1 emitted from the ranging optical system 12 in a direction and angle selected within a pre-set solid angle range, and emits it as ranging light towards the outside of the light source device 1. By controlling the angle of the deflection member 6, the scanner device 2 can emit the laser L1 in different directions, exemplified by laser L11 or laser L12. Furthermore, the scanner device 2 guides light incident from outside the light source device 1 to the ranging optical system 12. The light incident from outside the light source device 1 is reflected light L3 reflected from an external object. Moreover, depending on the structure of the light source device 1, the light source device 1 can also guide the laser L1 emitted outward via other optical systems within the light source device 1.

[0027] The scanner device 2 includes a deflection control device 3 and a tilt detection device 4. In this embodiment, the deflection control device 3 includes a magnetic yoke member 5, a deflection member 6, and a scanner device drive circuit 14. Furthermore, the tilt detection device 4 in this embodiment includes a light source 41 for emitting laser L2, a first lens 42, a detection circuit board 43, a beam splitter 44, a second lens 46, and an angle sensor circuit 15. The tilt detection device 4 uses laser L2 as the detection light for detecting the tilt of the deflection member 6. The deflection member 6 also functions as part of the tilt detection device 4.

[0028] Figure 2 This is a perspective view of a partial structure of the deflection control device 3 and the tilt detection device 4 of the scanner device 2. Furthermore, in the description of the scanner device 2, the deflection member 6 side is designated as the upper side of the scanner device 2, and the base member 55 side is designated as the lower side.

[0029] The magnetic yoke member 5 has a first magnetic yoke 51 and a second magnetic yoke 52, which is different from the first magnetic yoke 51 and is arranged in a rotationally symmetrical position about the axis P of the scanner device 2. The first magnetic yoke 51 has a pair of first arm members 53, 53, each having a first end 532a, 532a, and a base member 55 connected to the portion opposite to the first end 532a, 532a of the first arm members 53, 53. The second magnetic yoke 52 has a pair of second arm members 54, 54, each having a second end 542a, 542a, and a base member 55 connected to the portion opposite to the second end 542a, 542a of the second arm members 54, 54.

[0030] The first magnetic yoke 51 and the second magnetic yoke 52 have magnetic properties. The first arm member 53 and the second arm member 54 have generally rectangular columnar bodies 531 and 541 with rectangular cross-sections, and protrusions 532 and 542 extending from one side of the bodies 531 and 541 in a generally L-shaped bend. The protrusions 532 and 542 have planar first end portion 532a and second end portion 542a at their front ends, respectively.

[0031] The body 531 of the first arm member 53 has a magnetic yoke coil 533 wound around its outer periphery (see reference). Figure 1 The magnetic yoke coils 533 of a pair of first arm members 53 are connected in series with each other. Additionally, the body 541 of the second arm member 54 has a magnetic yoke coil 543 wound around its outer periphery. Figure 1 Only one of the second arm members 54 and the yoke coil 543 is shown in the diagram. The yoke coils 543 of the pair of second arm members 54 are also connected in series. Therefore, the yoke member 5 and the yoke coils 533 and 543 constitute an electromagnet. The scanner device drive circuit 14 drives the electromagnet according to the instructions of the control unit 11, thereby controlling the angle of the deflection member 6.

[0032] The base member 55 is a component with magnetic properties. The base member 55 has a first base member 55-1 in the shape of a circular plate and a second base member 55-2 in the shape of a circular plate. The first base member 55-1 has notches 551 at two sets of opposing side edges 55a. The outer circumference of the first base member 55-1 and the outer circumference of the second base member 55-2 are approximately the same diameter (see reference). Figure 2 The first base member 55-1 has a notch 551 (details not shown) that is generally rectangular when viewed from above, and a circular opening 553 that extends through the thickness direction. Figure 2 As shown in the assembled state of the magnetic yoke member 5, the opening 553 is disposed on the axis P passing through the gap G (magnetic gap), which is located between a pair of first ends 532a and a pair of second ends 542a.

[0033] The second base member 55-2 has approximately the same thickness as the first base member 55-1. The second base member 55-2 has a circular opening 554 extending through the thickness direction (see reference). Figure 1 ).like Figure 2 As shown in the assembled state of the magnetic yoke member 5, the opening 554 is disposed on the axis P passing through the gap G. Therefore, the opening 554 and the opening 553 are disposed coaxially. In addition, the inner diameter of the opening 554 and the inner diameter of the opening 553 are approximately the same.

[0034] The first arm member 53 and the second arm member 54 are respectively housed within the notch 551 and connected to the first base member 55-1. The first arm member 53 is housed in the notch 551 such that its end portion 531a abuts against the inner surface 551a of the first base member 55-1 in the central direction and substantially abuts against the upper surface of the second base member 55-2. Similarly, the second arm member 54 is housed in the notch 551 such that its end portion 541a abuts against the inner surface 551a of the first base member 55-1 in the central direction and substantially abuts against the upper surface of the second base member 55-2 (see also...). Figure 4Therefore, the second base member 55-2 is arranged to overlap with the first base member 55-1 in such a way that it covers the ends 531a and 541a of the first arm member 53 and the second arm member 54 housed in the notch 551.

[0035] exist Figure 2 In the assembled state shown, the first ends 532a, 532a of a pair of first magnetic yokes 51 are arranged opposite each other. In addition, the second ends 542a, 542a of a pair of second magnetic yokes 52 are opposite each other in a direction (second direction D2) that is orthogonal to the relative direction (first direction D1) of the first ends 532a, 532a when viewed from above.

[0036] Figure 3 This is a perspective view showing the deflection member 6. The deflection member 6 is an optical component positioned between a pair of first ends 532a and a pair of second ends 542a from a top view of the scanner device 2 (see reference). Figure 1 , Figure 2 The deflection member 6 includes a reflector 61, a permanent magnet 62, and a multi-faceted reflector 7. The reflector 61 has a circular flat plate shape and a reflective portion 611 that serves as a functional surface for reflecting the laser L1 (see reference). Figure 2 The reflective part 611 has a metal reflective film formed by methods such as vapor deposition.

[0037] The permanent magnet 62 is fixed relative to the reflector 61. The control unit 11 controls the tilting direction and tilting angle of the deflecting member 6 by energizing the magnetic yoke coils 533 and 543, thereby applying an external force to the deflecting member 6 via the magnetic yoke member 5 and the permanent magnet 62.

[0038] The multifaceted reflector 7 has a fixed portion 71 and multiple portions 72. The fixed portion 71 has a base portion 711, a base portion 712, and a base section 713. The base portion 711 is fixed relative to the permanent magnet 62. The base portion 711 has a generally square plate-like shape. The base portion 711 has a recess 711a at an opposite position and a recess 711b near one corner. The recess 711a has a generally semi-circular shape that curves from the sidewall of the base portion 711 toward the center. The recess 711b is a mark used to identify the orientation when the multifaceted reflector 7 is fixed relative to the permanent magnet 62. In addition, the recess 711a functions as a positioning recess. The deflecting member 6 has, for example, a pair of cylindrical retaining posts (not shown) on the back of the permanent magnet 62 or the reflector plate 61. By abutting and positioning these retaining posts against each recess 711a, the circumferential position of the multifaceted reflector 7 can be positioned. In addition, the multifaceted reflector 7 can also be rotated in the circumferential direction by a pair of retaining posts to adjust and position the angle of the multifaceted surface 72 relative to the deflection member 6.

[0039] A base portion 712 in the shape of a frustum is fixed to the surface of the base portion 711 opposite to the surface fixed to the permanent magnet 62. The end of the base portion 712 opposite to the end connected to the base portion 711 in the axial direction is connected to a base body 713. The base body 713 has a short cylindrical shape, and the end opposite to the end connected to the base portion 712 in the axial direction is a front end face 713a. Multiple facets 72 are formed on the front end face 713a.

[0040] Figure 4 This is a bottom view showing the multifaceted reflective device 7. The multifaceted surface 72 has multiple reflective surfaces 721. Each reflective surface 721 has a generally hexagonal shape with a smooth surface. Regarding the multifaceted surface 72, the reflective surfaces 721 are arranged at different angles to each other, forming an overall protruding dome shape (see reference). Figure 3 The multiple reflective surfaces 721 of the multi-faceted structure 72 are configured in a seamless honeycomb pattern. For example... Figure 4 As shown, multiple reflective surfaces 721 are arranged in a straight line at equal angles. Furthermore, multiple rows of these reflective surfaces 721 arranged in a straight line at equal angles are arranged adjacent to each other. In this embodiment, for the generally spherical cap-shaped multifaceted surface 72, seven rows of multiple reflective surfaces 721 arranged in a straight line at 60-degree angles are arranged adjacent to each other. Further, as... Figure 4 As shown, multiple reflective surfaces 721 are arranged in a roughly spherical band (roughly concentric circles) with the reflective surface 721 through which the axis P passes as the center. In this embodiment, six reflective surfaces 721 are arranged with the reflective surface 721 through which the axis P passes as the center, and twelve reflective surfaces 721 are arranged around it in a roughly spherical band (roughly concentric circles). The front end surface 713a of the multiple surfaces 72 is formed by cutting.

[0041] In addition to being formed by cutting, the multiple reflective surfaces 721 can also be manufactured by resin molding, for example. When the reflective surface 721 is manufactured by resin molding, the reflective surface 721 can also be formed by mirror finishing the surface of the flat reflective member and fixing the back side of the reflective surface 721 formed on the reflective member to the front end surface 713a by bonding or the like.

[0042] Figure 5 This is a schematic side view of the tilt detection device 4. The light source 41 is a laser emission element that emits laser light L2 as the detection light. The first lens 42 is a focusing lens that focuses the laser light L2 emitted from the light source 41. The laser light L2 focused by the first lens 42 is irradiated onto the beam splitter 44 through an aperture plate 45. The aperture plate 45 has an opening (aperture) and functions to determine the transmission path of the laser light L2 and change the irradiation range (width of the light) of the laser light L2.

[0043] Beam splitter 44 is a semi-reflective mirror. Beam splitter 44 allows a portion of the laser L2 emitted from the first lens 42 to pass along axis P through the multifaceted reflector 72 of the multifaceted reflector 7. Additionally, beam splitter 44 reflects a portion of the laser L2 reflected by the multifaceted reflector 72 and guides it to the detection unit 431. A second lens 46 is disposed between beam splitter 44 and detection unit 431. The second lens 46 is a focusing lens that focuses a portion of the laser L2 reflected by beam splitter 44.

[0044] exist Figure 5 In its initial state, the permanent magnet 62 has a generally circular plate shape that is rotationally symmetrical about the axis P of the deflection member 6 without tilting. The permanent magnet 62 has one of the S and N poles at one end in the thickness direction (axis P direction), and the other of the S and N poles at the other end.

[0045] The deflecting member 6 has a virtual point, namely the rotation center point Q. The deflecting member 6 has a multifaceted surface 72 of the multifaceted reflective device 7 on the opposite side of the reflective part 611 and away from the rotation center point Q. The multiple reflective surfaces 721 of the multifaceted surface 72 are arranged at equal distances from the rotation center point Q.

[0046] like Figure 5 As shown in the enlarged view, when the deflector 6 is not tilted (initial state), the laser L2 irradiating the multi-faceted surface 72 is incident on multiple reflecting surfaces 721a, 721b, and 721c, and is reflected by each reflecting surface 721a to 721c. Figure 5 In the enlarged view, the optical axis is shown as the reflected light (light component) reflected by each reflecting surface 721. Each reflecting surface 721 reflects light at the same reflection angle as the incident light. For example, regarding the reflected light (light component) L2b reflected by reflecting surface 721b, since the incident angle of laser L2 is 0 degrees (perpendicular incidence), it is the optical axis that emerges perpendicularly to reflecting surface 721b. On the other hand, when the incident angle of laser L2 is greater than 0 degrees, the reflected light (light components) L2a and L2c reflected by reflecting surfaces 721a and 721c are reflected at the same reflection angle as the incident angle. Furthermore, the irradiation range of laser L2 is the range that does not irradiate the base 712 of the multifaceted reflector 7 when tilted at the maximum tilt angle of the pre-set deflection member 6.

[0047] The deflecting member 6 is supported by a support (not shown) and is rotatable on two axes. The scanner device drive circuit 14 controls the deflecting member 6 to rotate about the rotation center point Q. For example, the deflecting member 6 can rotate about a first direction D1 or about a second direction D2 relative to the rotation center point Q. Furthermore, the deflecting member 6 can be supported by a support with three or more axes of multi-axis rotatability, allowing it to rotate about the rotation center point Q. Additionally, in an unloaded state where no magnetic field generated by the electromagnet is applied, the deflecting member 6 is subjected to an elastic force and directed towards a reference position, which is approximately perpendicular to the axis P of the yoke member 5 and the reflector 611. Figure 1 (The state of deflection component 6).

[0048] Figure 1 The scanner device drive circuit 14 shown includes yoke coils 533 and 543 as load circuits and a drive circuit (or switching circuit) not shown. The control unit 11 controls the scanner device drive circuit 14 to supply excitation current to the yoke coils 533 and 543. This generates magnetic fields in the first magnetic circuit C1 of the first yoke 51 and the second magnetic circuit C2 of the second yoke 52, producing a magnetic field in a first direction D1 between the first ends 532a of the first yoke 51 and a magnetic field in a second direction D2 between the second ends 542a of the second yoke 52, with the intensity indicated by the control unit 11. The permanent magnet 62 experiences attractive or repulsive forces from the magnetic fields generated in the first direction D1 and the second direction D2. Based on the intensity of these magnetic fields, the deflection member 6 controls the tilt direction and tilt angle around the rotation center point Q to achieve a predetermined tilt direction and tilt angle.

[0049] The detection circuit board 43 has a detection section 431 that serves as a light-receiving element. The detection section 431 is disposed on the opposite side of the reflective section 611, i.e., on the side of the multi-faceted reflective device 7, relative to the deflection member 6 (see reference). Figure 5 (etc.). The detection unit 431 detects the laser L2 reflected by the multifaceted surface 72.

[0050] Figure 5 and Figures 7 to 9This is a side view of the tilt detection device, showing a top view of the light-receiving unit 432 provided in the detection unit 431. The detection unit 431 is a two-dimensional sensor, such as a contour sensor that is an assembly of pixels. The pixels of the light-receiving unit 432 are arranged in a grid pattern, and the pixel information (light intensity) of each column in two orthogonal directions (X-axis direction Dx, Y-axis direction Dy) is detected. The control unit 11 detects the position (e.g., centroid) of the laser L2 detected based on this pixel information as coordinate data (two-dimensional coordinates). In addition, the detection unit 431 can also use a CCD (Charge Coupled Device) or CMOS (Complementary Metal-Oxide-Semiconductor) sensor.

[0051] The reference point O of the light-receiving part 432 is configured such that when the deflection member 6 is not tilted (initial state), the light-receiving point of the laser L2 received is located approximately at the center of the light-receiving part 432. The size of the irradiation area (light-receiving point) of the laser L2 received by the light-receiving part 432 is determined by the size of the reflecting surface 721 and the focal length of the second lens 46.

[0052] Here, sometimes the light-receiving unit 432 receives laser L2 at two or more light-receiving points. When using a contour sensor, if detection is performed with two or more light-receiving points (or light-receiving areas, the same below) arranged in a straight line in the X-axis direction Dx (and / or Y-axis direction Dy), the outputs in the X-axis direction Dx (and / or Y-axis direction Dy) of the light-receiving unit 432 will overlap, and the detection accuracy of pixel information may deteriorate (for example, it will become difficult to separate the two lasers L2 and determine the accurate position coordinates).

[0053] In this embodiment, when the recessed portion 711a of the fixed portion 71 of the multi-faceted reflector 7 is disposed in the first direction D1, and the recessed portion 711b is disposed in... Figure 4 When the light is positioned to the lower left, a plurality of reflective surfaces 721 arranged in a straight line are arranged along the first direction D1. Using the plurality of reflective surfaces 721 arranged in the first direction D1 as a reference line S, the plurality of reflective surfaces 721 arranged in a straight line are arranged horizontally at intervals of 60 degrees around the axis P and the reference line S. The surface of the beam splitter 44 that guides the light to the detection unit 431 faces the area between the first direction D1 and the second direction D2. Figure 5 (Right rear), and the guide surface is configured in an upwardly inclined position. The detection unit 431 is disposed between the first direction D1 and the second direction D2 ( Figure 5 (Right rear) and the position where the light guided by beam splitter 44 is received. Figure 5 In the two orthogonal directions of the light-receiving part 432, the X-axis direction Dx is the horizontal direction and the Y-axis direction Dy is the vertical direction.

[0054] In this case, there are three methods for arranging the light-receiving points not in a straight line along the X-axis direction Dx (and / or the Y-axis direction Dy). Firstly, the first method is to make the deflecting member 6 (or the multi-faceted reflector 7) circumferentially (around axis P) Figure 5 The first method involves rotating the light-receiving part 432 in the horizontal direction (e.g., at 15, 45, or 75 degrees to the reference line S). The second method involves rotating the two orthogonal directions of the light-receiving part 432 around the normal (central axis, etc.) of the light-receiving part 432 (e.g., at 15, 45, or 75 degrees). Based on Figure 6A and Figure 6B Explain the third method.

[0055] Figure 6A This is a simplified top view showing the multi-faceted surface 72, the incident surface PL of the beam splitter 44, and the light-receiving part 432. Additionally, Figure 6B View from the front Figure 6A The main view. Figure 6B The enlarged view is a view along line A-A' (the beam splitter 44 itself is not shown). The multi-faceted surface 72 is configured with multiple reflecting surfaces 721 arranged in a straight line at R-degree intervals around axis P and reference line S in the horizontal direction (in... Figure 6A , Figure 6B (The enlarged view is described as a "straight-line reflecting surface"). In this embodiment, R = 60 degrees. In this case, as... Figure 6A and Figure 6B As shown in the enlarged view, the incident surface PL is tilted counterclockwise by an angle θ1 from the linear reflecting surface coinciding with the baseline S. Since the linear reflecting surfaces are arranged at R-degree intervals, the angle of the incident surface PL relative to each linear reflecting surface is R×m (m is an integer) + θ1 (60° in this embodiment). (m+θ1). The angle at which the light-receiving part 432 is tilted in the vertical direction is set as the angle θ2 formed by the incident surface PL and the Y-axis direction Dy of the light-receiving part 432. In this case, the tilt of the light-receiving part 432 is tilted clockwise from the incident surface PL by an angle θ2. Here, regarding the arrangement of the light-receiving points in a straight line along the Y-axis direction Dy (and / or the X-axis direction Dx) of the light-receiving part 432, when there are two orthogonal directions (X-axis direction Dx, Y-axis direction Dy), the interval is 90 degrees, which is 90×n (n is an integer). Therefore, in order to achieve a configuration in which the light-receiving points are not arranged in a straight line along the Y-axis direction Dy (and / or the X-axis direction Dx), it is only necessary to make θ1+R The positions and / or orientations (postures) of the deflection member 6 (or multi-faceted reflector 7), beam splitter 44, and light-receiving part 432 can be set in the manner of m+θ2≠90n (n and m are integers). Furthermore, in Figure 5 and Figures 7 to 9In this case, θ1=0, θ2=0. Furthermore, when a CCD or CMOS sensor is used as the detection unit 431, accurate position coordinates can be determined even when the light-receiving points are arranged in a straight line along the X-axis direction Dx (and / or the Y-axis direction Dy).

[0056] The control unit 11 can calculate the position of the reflecting surface 721 based on the tilt information of the deflecting member 6 and the signal corresponding to the position of the optical axis (light receiving point) or the distribution position of the laser L2 detected by the detection unit 431 (hereinafter, the two positions are also referred to as "optical axis position signals"). Specifically, the control unit 11 has the following function: it additionally provides an angle sensor to detect the tilt state of the deflecting member 6; based on the tilt information of the approximate tilt angle obtained from the angle sensor, it determines which reflecting surface 721 the light is guided to the light receiving unit 432; and based on the determined information of the reflecting surface 721 and the coordinate data of the laser L2 detected by the light receiving unit 432, it detects the tilt of the deflecting member 6. Furthermore, the approximate tilt state of the deflecting member 6 can be determined not only by the angle sensor but also by the input voltage (driving voltage) or input current (driving current) to the magnetic yoke coils 533 and 543.

[0057] For example, Figure 5 and Figures 7 to 9 The diagram shows the optical axis and light-receiving point illuminating the detection unit 431 when the tilt of the deflection member 6 is changed (tilt direction and tilt angle). Furthermore, the tilt of the deflection member 6 is adjusted according to... Figure 5 and Figures 7 to 9 To grow larger. For example... Figure 5 As shown, when the optical axis L of laser L2 is aligned with the axis P and the deflection member 6 is not tilted relative to the optical axis L, the irradiation range of laser L2 irradiates the reflecting surfaces 721a, 721b, and 721c. In this case, a portion of the light (L2b) reflected by the reflecting surface 721b irradiates the detection unit 431. On the other hand, the laser L2 that irradiates the reflecting surfaces 721a and 721c is emitted as reflected light L2a and L2c, but does not irradiate the beam splitter 44 or reach the light-receiving part 432 of the detection unit 431, and therefore cannot be detected in the light-receiving part 432. The detection unit 431 uses a point that is approximately aligned with the optical axis B from the reflecting surface 721b in this case as a reference point O.

[0058] In addition, such as Figure 7 As shown, if the deflection member 6 is in the first direction D1 Figure 7 If the axis is tilted to the right, then the reflecting surface 721b will move to the left relative to the axis P. Figure 7In the magnified view, the irradiation range of laser L2 extends to reflecting surfaces 721a, 721b, and 721c. Among the reflecting surfaces 721 illuminated by laser L2, reflecting surface 721b treats laser L2 as having an optical axis L-direction relative to the incident optical axis. Figure 7 The light (L2b) moving along the upper left side of the optical axis B is emitted. Since optical axis B is tilted to the right compared to optical axis L, it... Figure 7 The detection unit 431 shown irradiates the reflected light L2b, which is located on the upper left side of the reference point O, along the optical axis B. In addition, the laser L2 incident on the reflecting surfaces 721a and 721c is emitted as reflected light L2a and L2c, but since it does not irradiate the beam splitter 44, it cannot be detected by the detection unit 431.

[0059] In addition, such as Figure 8 As shown, if the deflection member 6 is further in the first direction D1 Figure 8 If the axis is tilted to the right, then the reflecting surface 721b will move to the left relative to the axis P. Figure 8 In the magnified view, the irradiation range of laser L2 extends to reflecting surfaces 721a, 721b, 721c, and 721d. Among the reflecting surfaces 721 irradiated by laser L2, reflecting surfaces 721b and 721c treat laser L2 as having an optical axis L-direction relative to the incident optical axis. Figure 8 The light (L2b, L2c) emitted from the upper left side of the optical axis B and optical axis C, which have shifted. Since optical axis B is tilted to the right compared to optical axis L, the light emitted from these axes... Figure 8 The detection unit 431 shown irradiates reflected light L2b, whose optical axis B is located to the upper left of the reference point O. Since the optical axis C is tilted to the left of the optical axis L, the reflected light... Figure 8 The detection unit 431 shown irradiates reflected light L2c, whose optical axis C is located to the lower right of the reference point O. In addition, laser L2 incident on the reflecting surfaces 721a and 721d is emitted as reflected light L2a and L2d, but since it does not irradiate the beam splitter 44, it cannot be detected by the detection unit 431.

[0060] In addition, such as Figure 9 As shown, if the deflection member 6 is in the first direction D1 Figure 9 If the surface is tilted significantly to the right, then the reflecting surface 721b will move to the left relative to the axis P. From Figure 9 In the magnified view, the illumination range of laser L2 covers reflecting surfaces 721b, 721c, and 721d. Among the reflecting surfaces 721 illuminated by laser L2, reflecting surface 721c outputs laser L2 as light with an optical axis C approximately aligned with the incident optical axis L (L2c). Since the optical axis C is approximately aligned with the optical axis L, the reflected light L2c, located approximately at the reference point O, is illuminated. Figure 9The detection unit 431 is shown. In addition, the laser L2 incident on the reflecting surfaces 721b and 721d is emitted as reflected light L2b and L2d, but since it does not irradiate the beam splitter 44, it cannot be detected by the detection unit 431.

[0061] Thus, regarding the reflective surface 721, as... Figure 5 and Figures 7 to 9 As shown, the surface that reflects the laser L2 is different from the tilt of the deflection member 6, and it has the function of displacing the position of the optical axis irradiating the detection unit 431 according to the angle of each reflecting surface 721.

[0062] The control unit 11 determines the tilt (tilt direction and tilt angle) of the deflecting member 6 based on the light-receiving position of the laser L2 received by the light-receiving unit 432 and the reflecting surface 721 of the reflected laser L2. The control unit 11 can calculate the optical axis position of the laser L2 illuminating the light-receiving unit 432 relative to the reference point O and determine the tilt of the deflecting member 6. At this time, since the tilt information of the deflecting member 6 is obtained separately by the angle sensor, this tilt information is included in the calculation. The control unit 11 can determine the correspondence between the position of the optical axis relative to the reference point O and the tilt of the deflecting member 6 by calculation, or it can determine the correspondence between the position of the optical axis relative to the reference point O and the tilt of the deflecting member 6 in advance by referring to a correspondence table.

[0063] exist Figure 5 and Figures 7 to 9 The diagram shows the case where the laser L2 reflected by the reflective surface 721 moves in the first direction D1. However, when the laser L2 moves in the second direction D2 (or a direction that includes the first direction D1 and the second direction D2), the detection unit 431 can also output a signal to the control unit 11 to detect the optical axis position signal of the deflection member 6 relative to the second direction D2 (or a direction that includes the first direction D1 and the second direction D2).

[0064] Because the reflective surface 721 of the multifaceted reflective device 7 in this embodiment reflects the laser L2 differently depending on the tilt of the deflecting member 6, the tilt of the deflecting member 6 can be detected over a wide range by determining the reflective surface 721 of the laser L2. In addition, since it is only necessary to irradiate the detection unit 431 with reflected light from the reflective surface 721, it is not necessary to expand the detection range of the detection unit 431.

[0065] (Variation Example 1) Next, a variation of embodiment 1 will be described. Figure 10 This is a bottom view of the multifaceted surface 72A of the multifaceted reflective device 7 in Modified Example 1. In the description of the multifaceted reflective device 7 in Modified Example 1, regarding... Figure 3 For identical structures, identical reference numerals, etc., their descriptions are omitted or simplified.

[0066] In Modification 1, the multifaceted reflecting device 7 replaces the multifaceted face 72 with a multifaceted face 72A. The multifaceted face 72A has multiple reflecting surfaces 721A. The reflecting surfaces 721A have a generally triangular shape with a smooth surface. Since they are arranged along the crown-shaped front end face 713a, the multiple reflecting surfaces 721A each have a different angle.

[0067] In the multi-faceted reflection device 7 of Modified Example 1, since the number of reflective surfaces 721A is greater than that of reflective surfaces 721 in Embodiment 1, the tilt of the deflection member 6 can be detected more accurately even if the area of ​​the light-receiving part 432 is the same.

[0068] (Variation Example 2) Next, a variation of embodiment 1, example 2, will be described. Figure 11 This is a bottom view of the multifaceted surface 72B of the multifaceted reflecting device 7 in Modified Example 2. In the description of the multifaceted reflecting device 7 in Modified Example 2, regarding... Figure 3 For structures with identical reference numerals, the descriptions should be omitted or simplified.

[0069] In Modification 2, the multifaceted reflecting device 7 replaces the multifaceted face 72 with a multifaceted face 72B. The multifaceted face 72B has multiple reflecting surfaces 721B. The reflecting surfaces 721B have a generally circular shape with a smooth surface. Since they are arranged along the crown-shaped front end face 713a, the multiple reflecting surfaces 721B each have a different angle.

[0070] In the multifaceted reflection device 7 of Modified Example 2, some gaps are generated between the reflective surfaces 721B and 721B, but the tilt of the deflection member 6 can be detected with the same accuracy as the reflective surface 721 in Embodiment 1.

[0071] (Variation Example 3) Next, a variation of embodiment 1, example 3, will be described. Figure 12 This is a bottom view of the multifaceted surface 72C of the multifaceted reflective device 7 in Modified Example 3. In the description of the multifaceted reflective device 7 in Modified Example 3, regarding... Figure 3 For structures with identical reference numerals, the descriptions should be omitted or simplified.

[0072] In Modification 3, the multifaceted reflecting device 7 replaces the multifaceted face 72 with a multifaceted face 72C. The multifaceted face 72C has multiple reflecting faces 721C. The reflecting faces 721C have a generally hexagonal shape with a smooth surface. The reflecting faces 721C have a predetermined interval and are arranged along the front end face 713a, which is spherical. The reflecting faces 721C each have a different angle.

[0073] In Modification 3, the reflective surfaces 721C of the multifaceted reflective device 7 are arranged at intervals, thus facilitating the formation of the multifaceted surfaces 72C. Modification 3's multifaceted reflective device 7 is used when the tilting accuracy of the deflecting member 6 is not high.

[0074] (Variation Example 4) Next, a variation 4 of embodiment 1 will be described. Figure 13 This is an enlarged side view of the multifaceted reflector 72D of Modified Example 4. In the description of the multifaceted reflector 7 of Modified Example 4, regarding... Figure 3 For structures with identical reference numerals, the descriptions should be omitted or simplified.

[0075] The base 713D of the multifaceted reflective device 7 is fixed to the surface opposite to the surface of the base 712 that is fixed to the root 711. The base 713D has a cylindrical shape and a concave surface 713b recessed inwards on the surface opposite to the surface fixed to the base 712. A multifaceted surface 72D is formed along the concave surface 713b. Multiple reflective surfaces 721D are arranged and fixed by adhesive or the like. The multifaceted surface 72D has multiple reflective surfaces 721D. The multiple reflective surfaces 721D are arranged adjacent to each other without gaps and fixed by adhesive or the like to cover the concave surface 713b. The reflective surfaces 721D have a generally hexagonal shape with a smooth surface. The multiple reflective surfaces 721D arranged along the concave surface 713b each have a different angle. Alternatively, as in this embodiment, multiple reflective surfaces 721D can also be formed by cutting.

[0076] In the multifaceted reflecting device 7 of Modified Example 4, the irradiation range of laser L2 illuminates reflecting surfaces 721a, 721b, and 721c. In this case, the reflected light L2a reflected by reflecting surface 721a is light tilted to the left of the optical axis L, therefore... Figure 13 The light exits from the right side. The reflected light L2b from reflecting surface 721b is parallel to the optical axis L, and therefore reflects in approximately the same direction as the incident light. The reflected light L2c from reflecting surface 721c is tilted to the right of the optical axis L, and therefore reflects in approximately the same direction as the incident light. Figure 13 The light exits from the left side. Therefore, depending on whether the surface of the base 713 is a spherical cap-shaped front end face 713a or an inwardly recessed concave surface 713b, the direction of the reflected light exits is different.

[0077] The present disclosure has described a multi-faceted reflection device 7 that can improve the detection function of tilt (tilt direction, tilt angle) of a component. The multi-faceted reflection device 7 has: a plurality of reflecting surfaces 721, each having a different angle, reflecting light (L2) irradiated from the light source 41 toward the detection unit 431; and a fixing part 71, which is fixed to the object to be detected, the object to be detected being supported in a tiltable manner relative to the light source 41 and the detection unit 431.

[0078] The tilt detection device 4 can detect the tilt of the deflection member 6 even if the detection light is not incident from the functional surface side of the deflection member 6. Therefore, the light source 41 and the detection unit 431 can be provided inside the yoke member 5 or outside the yoke member 5 on the opposite side of the deflection member 6. Therefore, devices such as the tilt detection device 4 and the light source device 1 equipped with the tilt detection device 4 can be miniaturized. For example, a LiDAR ranging device can have a tilt detection function and be configured to be miniaturized by using the tilt detection device 4 disclosed herein.

[0079] Furthermore, the tilt detection device 4 uses a multi-faceted reflector 7, which enables the detection of the tilt of the deflector 6 over a wide tilt angle range. Moreover, the tilt detection method using the tilt detection device 4 is a method for determining the reflecting surface 721, which directs light illuminating the multifaceted surfaces 72 of the multi-faceted reflector 7 onto the detection unit 431. Therefore, the tilt of the deflector 6 can be detected without expanding the detection range, thus suppressing a decrease in detection function.

[0080] This concludes the description of the embodiments of this disclosure, but the form of this disclosure is not limited to these embodiments.

[0081] For example, a polarized beam splitter, which serves as one of the beam splitters, can be used instead of a traditional beam splitter. Additionally, the tilt detection device can have a quarter-wave plate between the deflection member and the beam splitter. In this case, the light source is a laser light-emitting diode emitting laser L2. Therefore, laser L2 is linearly polarized light. The polarized beam splitter has the characteristic of reflecting one of the S-polarized and P-polarized beams while allowing the other of the S-polarized and P-polarized beams to pass through. The tilt detection device reflects the laser L2 emitted from the light source as linearly polarized light, i.e., the first polarized light, towards the quarter-wave plate. The quarter-wave plate converts the first polarized light, i.e., laser L2, guided by the polarized beam splitter from linearly polarized light into circularly polarized light and guides it to the multifaceted reflection device of the deflection member. The reflecting surfaces of the multifaceted reflection device into which laser L2 is incident are tilted by an amount corresponding to the tilt of the deflection member from the optical axis position (optical axis L) of laser L2, and reflected to the quarter-wave plate. The quarter-wave plate converts the circularly polarized laser L2 guided from the reflector surface into linearly polarized light, which is then emitted as a second polarized light in a polarization direction orthogonal to the first polarized light and exits to the polarization beam splitter. The polarization beam splitter reflects the laser L2 guided from the quarter-wave plate and guides it to the detection unit.

[0082] In this disclosure, the multi-faceted reflective surfaces have a generally hexagonal shape, but are not limited to this shape. For example, they can be square or circular, as long as the multiple reflective surfaces have equal sizes.

[0083] In this disclosure, an example of a contour sensor as the detection unit has been described, but the detection unit may also be a position sensor (PSD) or a two-dimensional image sensor.

[0084] Furthermore, in the structure of the tilt detection device, the light source and the detection unit can be interchanged. When the light source and the detection unit are interchanged in the tilt detection device, the polarization beam splitter has the function of reflecting the first polarized light and allowing the transmission of the second polarized light in a polarization direction orthogonal to the first polarized light.

[0085] Alternatively, the tilt detection device can also have the light source, lens, beam splitter, and detection unit positioned outside the magnetic yoke member. The laser L2 is guided through the aforementioned opening located in the thickness direction of the base member.

[0086] In addition, the tilt detection device may be further equipped with a light leakage absorption device. This light leakage absorption device is, for example, a device that absorbs light that has escaped from the light source, beam splitter, reflector, or external illumination and extends beyond the range of the object being illuminated. This can suppress the decrease in detection accuracy or damage to other devices caused by light leakage.

[0087] Furthermore, the ranging optical system disclosed herein can be used to guide light for purposes other than ranging. Additionally, the tilt detection device is not limited to a deflector; it can also be applied to the tilt detection of other optical components that have the function of rotating around a rotation center point Q. The tilt detection device can detect tilt in optical components that have other functional surfaces such as light reflection or transmission. Furthermore, the tilt detection device can also be used as a device to detect the tilt of components other than optical components, replacing the deflector.

[0088] The structure of this disclosure is illustrated above as follows.

[0089] [1] A multi-faceted reflective device, comprising: The device has multiple reflective surfaces, each with a different angle, which reflect light from the light source toward the detection unit; and The fixed part is fixed to the object to be detected, and the object to be detected is supported in a tiltable manner relative to the light source and the detection part.

[0090] [2] According to the multifaceted reflective device described in [1], the reflective surface is hexagonal.

[0091] [3] According to the multifaceted reflective device described in [1], the multifaceted surface is spherical.

[0092] [4] According to the multifaceted reflective device described in [1], the multiple planar portions of the multifaceted face are adjacent to each other.

[0093] [5] According to the multifaceted reflective device described in [1], the multifaceted surfaces are arranged in a spherical strip shape.

[0094] [6] According to the multifaceted reflective device described in [1], the reflective surfaces of the multifaceted device are arranged in a straight line at equal angles.

[0095] Explanation of reference numerals in the attached figures 1: Light source device 2: Scanner device 3: Deflection control device 4: Tilt detection device 5: Magnetic yoke component 6: Deflection component 7: Multi-faceted reflection device 11: Control Department 12: Ranging Optical System 13: Optical system drive circuit 14: Scanner device drive circuit 15: Angle sensor circuit 41: Light source 42: First lens 43: Testing the circuit board 44: Beam splitter 45: Aperture plate 46: Second lens 51: First magnetic yoke 52: Second magnetic yoke 53: First arm component 54: Second arm component 55: Base components 55-1: First base component 55-2: Second base component 55a: Side edge 61: Reflector 62: Permanent magnet 71: Fixed part 72: Multifaceted 72A~72D: Multifaceted 431: Testing Department 432: Light-receiving part 531: Body 531a: End 532: Protrusion 532a: First end 533: Magnetic yoke coil 541: Body 541a: End 542: Protrusion 542a: Second end 543: Magnetic yoke coil 551: Notch 551a: Inner surface 553, 554: Opening 611: Reflector 711: Root base 711a: Depression 711b: concave part 712: Basic Department 713, 713D: Basic Cadre 713a: Front end face 713b: Concave surface 721: Reflective surface 721A~D: Reflecting surface 721a~d: Reflecting surface B, C, L: Optical axis C1: First magnetic circuit C2: Second magnetic circuit D1: First Direction D2: Second Direction Dx: X-axis direction Dy: Y-axis direction G: Gap L1, L11, L12, L2: Lasers L2a~L2d: reflected light L2b, L2c: Lasers L3: Reflected light L: Optical axis O: Reference point P: Axis Q: Center point of rotation R: angle S: Baseline.

Claims

1. A multi-faceted reflective device, wherein, have: The device has multiple reflective surfaces, each with a different angle, which reflect light from the light source toward the detection unit. as well as The fixed part is fixed to the object to be detected, and the object to be detected is supported in a tiltable manner relative to the light source and the detection part.

2. The multi-faceted reflective device according to claim 1, wherein, The reflective surface is hexagonal.

3. The multi-faceted reflective device according to claim 1, wherein, The multifaceted structure is spherical.

4. The multi-faceted reflective device according to claim 1, wherein, The multiple reflective surfaces of the multifaceted structure are in a state of mutual adjacency.

5. The multi-faceted reflective device according to claim 1, wherein, The multifaceted arrangement is spherical and ribbon-like.

6. The multi-faceted reflective device according to claim 1, wherein, The reflective surfaces of the multifaceted structure are arranged in straight lines at equal angles.

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