Test probe and test device

Abstract

Disclosed is a test probe for testing an electrical characteristic of an object to be tested. The test probe includes a cylindrical barrel; a plunger including a neck portion partially inserted into a first end portion of the barrel, and a head portion extending in a radial direction from the neck portion and having a tip on a top surface thereof to contact the object to be tested; and an insulator made of an insulating material and including a neck receiving portion formed with a neck hole to receive the neck portion and having a diameter smaller than a width of the barrel.

Description

Technical Field

[0001] This invention relates to a test probe and a test apparatus for testing the electrical characteristics of semiconductors or similar test objects. Background Technology

[0002] In a coaxial socket, the signal probes are supported without contact and spaced apart from the inner wall of the probe holes of the conductive block to shield noise between adjacent signal probes.

[0003] As semiconductor integration increases, the spacing between the ball terminals decreases further. Signal probes that contact these narrow-pitched ball terminals need to include thin-designed plungers that make contact with the ball terminals. The thinner the plunger, the smaller the contact area and size of the tip that contacts the ball terminal. Therefore, the tip may break, bend, or mis-contact the ball terminal.

[0004] To ensure stable contact with the ball terminal, a head extending radially along the plunger can be provided, and a tip can be formed on the head. However, combining the plunger with the extended head and the conductive block is not straightforward because the coaxial socket is assembled while the signal probe is held confined within the probe hole of the conductive block. Summary of the Invention

[0005] Technical issues

[0006] This disclosure is conceived to solve the aforementioned problems, and one aspect of this disclosure is to provide test probes and test apparatus that can test fine-pitch semiconductors.

[0007] Problem-solving methods

[0008] According to embodiments disclosed herein, a test probe is provided for testing the electrical properties of a test object. The test probe includes a cylindrical barrel; a plunger including a neck portion that is partially inserted into a first end of the barrel in an axial direction, and a head portion extending axially from the neck portion, the head portion having a width greater than the outer diameter of the neck portion and having a tip portion on its axially directed front surface that contacts the test object; an insulator made of an insulating material, annular in shape, and including a barrel support portion into which the outer surface of the first end of the barrel is inserted and supported; and a neck receiving portion extending axially from the barrel support portion, having an inner diameter smaller than the width of the head portion, and receiving the outer surface of the neck portion exposed from the barrel.

[0009] The cylinder support portion may have an inner diameter larger than the outer diameter of the cylinder in at least one cross-section in the axial direction. Therefore, the insulator can be easily assembled onto the probe with an extended head portion at the top of the support.

[0010] The plunger can be coupled to and inserted into the first end of the cylinder through the neck portion passing through the insulator. Therefore, the insulator can be easily assembled onto the probe, which supports the tip and has an extended head portion.

[0011] The head portion may include multiple tips on its top surface. Therefore, the probe can make stable contact with a ball terminal or a pad terminal.

[0012] According to an embodiment, a testing apparatus for testing the electrical characteristics of a device under test is provided. The testing apparatus includes: the aforementioned test probe; and a probe socket that houses and supports the test probe.

[0013] Advantages of the invention

[0014] According to an embodiment, a testing apparatus for testing the electrical characteristics of a device under test is provided. The testing apparatus includes: the aforementioned test probe; and a probe socket that houses and supports the test probe. Attached Figure Description

[0015] Figure 1 This is a view of a test probe according to an embodiment of the present disclosure.

[0016] Figure 2 It is along Figure 1 A cross-sectional view along line AA in the diagram.

[0017] Figure 3 yes Figure 1 The exploded view of the test probe shown is a structural diagram.

[0018] Figure 4 This is a view of a test apparatus according to an embodiment of the present disclosure.

[0019] Figure 5 It is along Figure 4 A cross-sectional view of the BB line.

[0020] Figure 6 This is a view illustrating a method of assembling test apparatus 1 according to an embodiment of the present disclosure.

[0021] Figure 7 This is a graph showing the insertion loss measured by the test apparatus according to an embodiment of this disclosure.

[0022] Figure 8 This is a graph showing the return loss measured by the test apparatus according to an embodiment of this disclosure. Detailed Implementation

[0023] Hereinafter, the test probes and test apparatus according to embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.

[0024] Figure 1This is a view of the test probe 100 according to an embodiment of the present disclosure. Figure 2 It is along Figure 1 A cross-sectional view of line AA in the middle. Figure 3 yes Figure 1 The exploded view of the test probe 100 shown.

[0025] refer to Figures 1 to 3 The test probe 100 includes a cylindrical tube 110, a plunger 120, an insulator 130, a terminal 140, and a spring 150.

[0026] Cylinder 110 is made of conductive material and is tubular.

[0027] The plunger 120 is made of a conductive material. The plunger 120 is partially inserted into the first end of the cylinder 110 and is fixed in the cylinder 110 by dimping the cylinder 110, or it can slide in the cylinder 110 along the test direction by closing the cylinder 110.

[0028] The plunger 120 includes a neck portion 121 that partially inserts into a first end of the cylinder 110, and a head portion 123 extending radially from the neck portion 121. A plurality of tips 122 are provided on the top surface of the head portion 123 to contact the spherical terminals of the test object OB. Because the head portion 123 providing the tips 122 has a large area, the size of the tips 122 can be relatively increased, thereby improving the durability of the tips 122 and increasing the stability of the contact between the tips 122 and the spherical terminals.

[0029] The insulator 130 is made of insulating material and is ring-shaped. The insulator 130 includes a neck receiving portion 131, wherein a neck portion 121 passes through the neck receiving portion 131, and a cylinder support portion 133 at the first end of the support cylinder 110.

[0030] The neck receiving portion 131 includes a neck opening 132 for receiving the neck portion 121.

[0031] The neck hole 132 has a first diameter t1 that is smaller than the width of the head portion 123 and smaller than the diameter of the cylinder 110. Therefore, the insulator 130 can be confined between the cylinder 110 and the head portion 123.

[0032] The cylinder support portion 133 includes a first cylinder support hole 134 for receiving the first end of the cylinder 110.

[0033] The first cylinder support hole 134 has a width greater than that of the cylinder 110 and a second diameter t2 greater than the first diameter t1, to accommodate the first end of the cylinder 110.

[0034] Terminal 140 is made of conductive material. Terminal 140 includes a tube insertion portion 141 that is partially inserted into the second end of tube 110, and a terminal contact portion 142 that is exposed outside tube 110 and has an end that contacts a pad terminal of the test circuit board (or printed circuit board, PCB). Terminal 140 is slidable within tube 110 along the test direction.

[0035] Spring 150 is disposed between plunger 120 and terminal 140 inside cylinder 110, and is compressed or restored by sliding plunger 120 or terminal 140.

[0036] The following will refer to Figure 3 Describe the assembly method of test probe 100.

[0037] 1. The first end of the closed cylinder 110.

[0038] 2. Insert the terminal contact portion 142 of terminal 140 into the second end of cylinder 110.

[0039] 3. Insert the spring 150 through the second end of the cylinder 110.

[0040] 4. Insert the neck portion 121 of the plunger 120 into the insulator 130, wherein the insulator 130 cannot pass through the head portion 123 because the neck hole 132 has a first diameter smaller than the width of the head portion 123 and the cylinder 110 (see...). Figure 2 (t1 in the middle).

[0041] 5. Insert the neck portion 121, which is joined to the insulator 130, into the second end of the cylinder 110, and then secure the neck portion 121 to the cylinder 110 such that the insulator 130 can be confined between the head portion 123 and the cylinder 110.

[0042] As an alternative embodiment, after the first end of the tube 110 is inserted into the tube insertion portion 141 of the terminal 140, the first end of the tube 110 can be closed.

[0043] Figure 4 This is a view of the test apparatus 1 according to an embodiment of the present disclosure. Figure 5 It is along Figure 4 A cross-sectional view of the BB line in the middle. Figure 6 This is a view illustrating a method of assembling the testing apparatus 1 according to an embodiment of this disclosure. Figure 7 This is a graph showing the insertion loss measured by the test apparatus 1 according to an embodiment of this disclosure. Figure 8 This is a graph showing the return loss measured by the test apparatus 1 according to an embodiment of this disclosure.

[0044] refer to Figures 4 to 6The test apparatus 1 includes a plurality of test probes 100 and a probe socket 200 supporting the plurality of test probes 100 such that opposite ends of the test probes 100 can partially protrude therefrom. The test probes 100 may include signal probes 101 for signal transmission or power probes 102 for power supply. Since the test probes 100 have already been described above, repeated descriptions will be omitted.

[0045] The probe socket 200 includes a conductive block 210 and an insulating support component 220.

[0046] The conductive block 210 may be made of a conductive material. Alternatively, the conductive block 210 may be provided as an insulating block coated with a conductive material. The conductive block 210 accommodates and supports the test probe 100, causing it to partially protrude from one surface.

[0047] The conductive block 210 includes a first conductive block 210a and a second conductive block 210b coupled to the lower part of the first conductive block 210a. Of course, the conductive block 210 can be formed as a single block.

[0048] The conductive block 210 has a probe hole 211 that accommodates the test probe 100 without electrical contact and supports a first end of the test probe 100. The probe hole 211 includes a large-diameter portion 212 through which the cylinder 110 of the test probe 100 passes, and a small-diameter portion 213 through which the neck portion 131 of the insulator 130 passes.

[0049] The large-diameter portion 212 has an inner diameter formed with a specific gap between it and the outer surface of the cylinder 110. An air layer or an insulating layer may be formed in said specific gap.

[0050] The small-diameter portion 213 has a smaller diameter than the large-diameter portion 212 and is formed continuously from the large-diameter portion 212. The boundary portion between the large-diameter portion 212 and the small-diameter portion 213 has an inner shape corresponding to the outer surface of the insulator 130 to accommodate the insulator 130 therein.

[0051] The conductive block 210 includes a first recessed portion 214 and a second recessed portion 215, which are extensively recessed at the top and bottom, respectively, to surround at least one test probe 100. The first and second recessed portions 214 and 215 may be formed together to surround two or more test probes, namely signal probe 101 and / or power probe 102. The first and second recessed portions 214 and 215 prevent short circuits during testing due to contact between the device under test or test circuit board and the conductive block 210.

[0052] The insulating support member 220 may be made of an insulating material. The insulating support member 220 includes a cover portion 221 to fill a second recess 215 disposed at the bottom of the conductive block 210, and a support portion 222 to be inserted into a probe hole 211. The support portion 222 includes a support hole 223 for receiving and supporting a first end of the test probe 100. The support hole 223 includes a terminal through hole 223a through which a terminal 140 of the test probe 100 passes, and a second cylinder support hole 223b for receiving and supporting a second end of the cylinder 110.

[0053] As an alternative embodiment, the insulating support member 220 may be replaced by another insulator.

[0054] As an alternative embodiment, the large-diameter portion and the small-diameter portion may be disposed at the lower part of the probe hole 211 of the conductive block 210, and another insulator, rather than an insulating support member 220, may be inserted into the lower part of the probe hole 211 to support the second end of the test probe 100.

[0055] refer to Figure 6 Describe the method for assembling test apparatus 1.

[0056] 1. The insulating support member 220 is coupled to the lower surface of the second conductive block 210b, wherein the insulating support member 220 is inserted into the lower part of the second recessed portion 215 and the probe hole 211.

[0057] 2. Insert the terminal 140 of the test probe 100 into the probe hole 211 on the upper side of the second conductive block 210b, which is coupled to the insulating support member 220, wherein the outer surface of the cylinder 110 is spaced apart from the probe hole 211, and the end of the terminal 140 is exposed on the lower surface of the insulating support member 220.

[0058] 3. Insert the plunger 120 of the test probe 100 together with the insulator 130 into the probe hole 211 on the lower side of the first conductive block 210a, wherein the outer surface of the cylinder 110 is spaced apart from the probe hole 211, and the head portion 123 of the plunger 120 is exposed on the upper surface of the first conductive block 210a.

[0059] 4. Couple the first conductive block 210a and the second conductive block 210b.

[0060] As an alternative embodiment, the first conductive block 210a and the second conductive block 210b can be coupled first, the plunger 120 of the test probe 100 can be inserted into the probe hole 211 provided on the lower surface of the second conductive block 210b, the terminal 140 of the test probe 100 can be inserted into the support hole 223 of the insulating support member 220, and the insulating support member 220 can be fixedly coupled to the lower surface of the second conductive block 210b.

[0061] Figure 7 This is a graph showing the insertion loss measured by the test apparatus 1 according to an embodiment of the present disclosure.

[0062] Ideally, insertion loss can approach zero. (Reference) Figure 7 The test apparatus 1 disclosed herein exhibits excellent insertion loss characteristics, meeting the allowable insertion loss of -1.0 dB or less.

[0063] Figure 8 This is a graph showing the return loss measured by the test apparatus 1 according to an embodiment of the present disclosure.

[0064] Ideally, the lower the return loss, the better. (Reference) Figure 8 According to the test apparatus 1 disclosed herein, it exhibits very good return loss characteristics, meeting the allowable return loss of -10 dB or less.

[0065] According to an embodiment, a testing apparatus for testing the electrical characteristics of a device under test is provided. The testing apparatus includes: the aforementioned test probe; and a probe socket that houses and supports the test probe.

[0066] Although several embodiments of this disclosure have been described and illustrated above, this disclosure is not limited to the specific embodiments described above. Those skilled in the art can make various modifications to the embodiments without departing from the scope of this disclosure as claimed in the claims, and these modified embodiments should not be understood separately from the technical spirit or vision of this disclosure.

Claims

1. A test probe for testing the electrical characteristics of an object under test. Cylindrical tube; A plunger includes a neck portion that is partially inserted into a first end of the cylinder in an axial direction, and a head portion that extends from the neck portion in the axial direction, has a width greater than the outer diameter of the neck portion, and has a front end surface in the axial direction including a tip for contacting the test object. as well as An insulator, made of insulating material, is annular and includes a cylinder support portion into which the outer surface of a first end of the cylinder is inserted and supported, and a neck receiving portion extending from the cylinder support portion along the axial direction, having an inner diameter smaller than the width of the head portion, and receiving the outer surface of the neck portion exposed from the cylinder.

2. The test probe according to claim 1, wherein the cylinder support portion has an inner diameter larger than the outer diameter of the cylinder in at least one cross section in the axial direction.

3. The test probe of claim 1, wherein the plunger is coupled to and inserted into the first end of the cylinder through the neck portion of the insulator.

4. The test probe of claim 1, wherein the head portion includes a plurality of tips on its top surface.

5. A testing apparatus for testing the electrical characteristics of an object under test, comprising: At least one test probe according to any one of claims 1 to 4; as well as A probe socket that accommodates and supports the at least one test probe.

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