An ultrasonic spray device and an ultrasonic spray method

Abstract

This invention discloses an ultrasonic spraying device and an ultrasonic spraying method. The ultrasonic spraying device includes a support rod, a nozzle assembly mounted on the support rod, and a support column for supporting the support rod. The support point of the support rod is connected to the support column. The length of a first portion of the support rod located on one side of the support point is greater than the length of a second portion of the support rod located on the other side of the support point. The first portion is used to mount the nozzle assembly. The second portion is equipped with a liquid supply assembly, which supplies liquid toward the nozzle assembly. The liquid supply assembly provides counterweight to the second portion to balance the weight of the support rod on both sides of the support point. Using the support point as a fulcrum, the torque of the second portion and the liquid supply assembly combined is the same as the torque of the first portion. The ultrasonic spraying device of this invention improves the stability of the support rod mounting the nozzle assembly, reduces unexpected vibrations of the nozzle assembly during spraying, and improves the spraying uniformity and the thickness uniformity of the prepared film.

Description

Technical Field

[0001] This invention relates to the field of thin film coating technology, and in particular to an ultrasonic spraying device and ultrasonic spraying method. Background Technology

[0002] Coating equipment is a low-cost device that can coat a substrate with a desired film layer. It is commonly used in chip manufacturing, display manufacturing, solar cell manufacturing, and lithium battery manufacturing. The coating methods typically include slot coating, spin coating, or spray coating. The thin film formed on the substrate by the coating equipment, after drying, can form the desired coating or layer.

[0003] In coating equipment, slot coating uses a narrow slit from which the slurry flows out. The consistency of the slurry flow rate throughout the slit is difficult to control precisely, resulting in limited coating uniformity. Spin coating relies on centrifugal force to uniformly coat a film on the substrate; however, spin coating has low material utilization and is not suitable for coating large-area films. Spray coating atomizes liquid into uniform droplets and sprays them evenly onto the substrate surface to form a film. Spray coating is valued for its uniform film thickness, high material utilization, and suitability for coating large-area films.

[0004] Therefore, spraying is typically used in thin film fabrication scenarios where high uniformity of thickness is required, and the uniformity of the film thickness directly affects the quality of the final coating. As the performance requirements for thin films increase, higher demands are placed on film thickness uniformity. During the operation of an ultrasonic nozzle, the nozzle generates a relative force with its supporting structure. If the support structure of the ultrasonic nozzle has poor stability, it will vibrate due to this relative force during operation. This vibration will be transmitted to the ultrasonic nozzle, causing unexpected vibrations and affecting the spraying quality. Summary of the Invention

[0005] The purpose of this invention is to provide an ultrasonic spraying device and an ultrasonic spraying method, which improves the stability of the support rod for mounting the spray head assembly, reduces the unexpected vibration of the spray head assembly during the spraying process, and improves the spraying uniformity of the spraying device and the thickness uniformity of the prepared film.

[0006] The objective of this invention is achieved through the following technical solution:

[0007] An ultrasonic spraying device includes a support rod, a nozzle assembly mounted on the support rod, and a support column for supporting the support rod; the support point of the support rod is directly or indirectly connected to the support column for support by the support column, and the length of a first portion of the support rod located on one side of the support point is greater than the length of a second portion of the support rod located on the other side of the support point, the first portion being used to mount the nozzle assembly;

[0008] The second part is equipped with a liquid supply assembly, which supplies liquid toward the nozzle assembly. The liquid supply assembly provides counterweight to the second part to balance the weight of the support rod on both sides of the support point. With the support point of the support rod as the fulcrum, the torque of the second part and the liquid supply assembly combined is the same as the torque of the first part.

[0009] Preferably, it further includes a Z-axis moving unit, which is installed on the support column and connected to the support rod. The support column is connected to the support point of the support rod through the Z-axis moving unit. The Z-axis moving unit is used to drive the support rod to move along the Z-axis.

[0010] Preferably, it further includes a guide support rod, the guide support rod and the support column are located on opposite sides of the first part, and the guide support rod and the support column guide the movement of the first part along the Z-axis through the sliding fit structure of the slider guide rail.

[0011] Preferably, the first part is equipped with a Y-axis moving unit, and the first part is connected to the nozzle assembly through the Y-axis moving unit. The Y-axis moving unit is used to drive the nozzle assembly to move along the Y-axis.

[0012] Preferably, the nozzle assembly includes a plurality of nozzle units, each containing an ultrasonic nozzle, and the plurality of nozzle units are respectively connected to the Y-axis moving unit and are independently driven by the Y-axis moving unit;

[0013] One or more of the ultrasonic nozzles are moved along the Y-axis above the substrate for spraying operations, and the spacing between adjacent ultrasonic nozzles along the Y-axis is adjusted by the Y-axis moving unit.

[0014] Preferably, the system further includes a carrier module and an X-axis moving unit connected to the carrier module. The carrier module is used to carry the substrate to be coated, and the X-axis moving unit is used to drive the carrier module to move along the X-axis, which is parallel to the coating direction of the substrate.

[0015] Preferably, the liquid supply assembly includes multiple precision injection pumps, each precision injection pump including a liquid reservoir and a servo motor. The drive shaft of the servo motor is connected to a piston located in the liquid reservoir, and the servo motor is used to drive the piston to move within the liquid reservoir to control the flow of liquid within the liquid reservoir.

[0016] Preferably, the precision injection pump is equipped with a miniature three-way valve, which has a liquid outlet, a liquid inlet, and a vent, and the liquid outlet, the liquid inlet, and the vent can be selectively connected to the liquid storage chamber of the precision injection pump;

[0017] The liquid outlet is used to connect the liquid storage chamber and the nozzle assembly, the liquid replenishment port is used to connect the liquid storage chamber and the liquid storage tank, and the vent is used to connect the liquid storage chamber and the venting device.

[0018] Preferably, it also includes a housing, wherein a partition is provided inside the housing and a spraying space and an installation space are separated by the partition, the spraying space being used to accommodate the spray nozzle assembly and the installation space being used to accommodate the circuit board.

[0019] An ultrasonic spraying method, wherein the ultrasonic spraying method is performed using any of the above-mentioned ultrasonic spraying equipment, the ultrasonic spraying method comprising:

[0020] A substrate to be coated is provided, which is mounted on the stage of an ultrasonic coating equipment and fixed by adsorption;

[0021] The required number of ultrasonic nozzles are moved above the substrate by the Y-axis moving unit and the spacing between adjacent ultrasonic nozzles along the Y-axis is adjusted; and / or, the spraying spacing between the ultrasonic nozzles and the substrate in the vertical direction is adjusted by the Z-axis moving unit.

[0022] An ultrasonic nozzle sprays liquid. The ultrasonic nozzle is fixed in position, and the substrate is driven to move relative to the ultrasonic nozzle along the X-axis by an X-axis moving unit.

[0023] Compared with the prior art, the beneficial effects of the present invention include at least the following:

[0024] By installing the liquid supply assembly on the second part of the support rod, the liquid supply assembly provides counterweight to the second part. The liquid supply assembly and the second part can be balanced or nearly balanced with the weight of the first part. At this time, the center of gravity support point of the support rod coincides or nearly coincides. Without adding additional counterweight components, the stability of the support rod can be improved. As a result, when the nozzle assembly is working or moving, the support rod is less likely to vibrate due to the relative force applied by the nozzle assembly. This prevents the nozzle assembly from vibrating with the support rod and affecting the uniformity of spraying. In other words, it can reduce the unexpected vibration of the nozzle assembly during the spraying process and improve the uniformity of spraying equipment, thereby improving the thickness uniformity of the prepared film. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the ultrasonic spraying equipment according to an embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the ultrasonic spraying equipment according to an embodiment of the present invention after removing part of the outer shell;

[0027] Figure 3 This is a partial structural schematic diagram of the ultrasonic spraying equipment according to an embodiment of the present invention;

[0028] Figure 4 This is a partial structural schematic diagram of the ultrasonic spraying equipment according to an embodiment of the present invention from another perspective.

[0029] Figure 5 This is another structural schematic diagram of the ultrasonic spraying equipment according to an embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the structure of a precision injection pump according to an embodiment of the present invention;

[0031] Figure 7 This is a schematic diagram of the structure of the carrier module according to an embodiment of the present invention;

[0032] Figure 8 This is a structural schematic diagram of the carrier module from another perspective in an embodiment of the present invention.

[0033] In the diagram: 1. Spraying module; 11. Support column; 12. Guide support rod; 121. Guide rail; 122. Guide slider; 13. Support rod; 131. First part; 132. Second part; 14. Spray head assembly; 141. Ultrasonic spray head; 142. Spray head mounting component; 143. Y-axis moving unit; 1431. Y-axis drive assembly; 1432. Y-axis guide rail; 1433. Y-axis slider; 144. Z-axis moving unit; 1441. Z-axis drive assembly; 1442. Z-axis guide rail; 1443. Z-axis slider 1. Block; 15. Liquid supply assembly; 151. Precision injection pump; 152. Miniature three-way valve; 1521. Liquid outlet; 1522. Liquid replenishment port; 1523. Exhaust port; 2. Bearing module; 21. Platform; 22. X-axis moving unit; 221. X-axis drive assembly; 222. X-axis guide rail; 223. X-axis slider; 3. Control module; 4. Housing; 41. Partition; 42. Spraying space; 43. Installation space; 44. Circuit board; 45. Three-color light; 46. Universal casters; 47. Foot brackets; 48. Human-machine interface panel. Detailed Implementation

[0034] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided to make the invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0035] The terms used to express position and direction in this invention are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this invention.

[0036] like Figures 1 to 8 As shown, this invention provides an ultrasonic spraying device. The ultrasonic spraying device uses high-frequency vibration to atomize liquid into micron or nano-sized particles. By precisely controlling the ultrasonic spraying parameters, the atomized micro-droplets can be uniformly deposited on the substrate surface. Ultrasonic spraying offers high material utilization, is suitable for large-area fabrication (substrate requiring a film area greater than 10 square meters), and is applicable to both rigid and flexible substrates. The ultrasonic spraying device includes a housing 4, and a spraying module 1, a support module 2, and a control module 3 disposed within the housing 4.

[0037] Reference Figure 2 and Figure 3 The spraying module 1 includes a support column 11, a guide support rod 12, a support rod 13, a nozzle assembly 14, and a liquid supply assembly 15.

[0038] Reference Figure 3 and Figure 5 The nozzle assembly 14 may include multiple ultrasonic nozzles 141 and nozzle mounting members 142 for mounting the multiple ultrasonic nozzles 141. The ultrasonic nozzles 141 receive liquid supplied by the liquid supply assembly 15. Each ultrasonic nozzle 141 has a built-in atomizing spraying unit for atomizing the liquid and spraying it outwards. The atomized liquid is sprayed onto the substrate surface to form a thin film. The thin film can be a functional film layer required on the substrate, and the liquid is a functional liquid required to form the thin film. Specifically, the thin film can be a functional film layer that needs to be formed on the substrate in fields such as chip manufacturing, display manufacturing, solar cell manufacturing, or lithium battery manufacturing. As a specific example, in perovskite solar cells, the thin film that needs to be formed on the substrate is a perovskite film layer, and the liquid corresponds to a perovskite precursor liquid. The perovskite film layer serves as a perovskite light-absorbing layer, and its performance directly affects the photoelectric conversion efficiency of the solar cell. The most important factor affecting the performance of the perovskite film layer is its thickness uniformity.

[0039] The atomizing jet unit of the ultrasonic nozzle 141 may include components such as a piezoelectric ceramic transducer, an ultrasonic amplitude transformer, and an atomizing nozzle. The piezoelectric ceramic transducer generates high-frequency mechanical vibration under the drive of a high-frequency alternating electrical signal. After the amplitude is amplified by the ultrasonic amplitude transformer, it is transmitted to the end face of the atomizing nozzle, causing the liquid flowing through the atomizing nozzle to be broken and atomized into micron-sized fine droplets and ejected from the atomizing nozzle.

[0040] One end of the nozzle mounting component 142 is connected to the ultrasonic nozzle 141. For example, one end of the nozzle mounting component 142 is provided with a clamping component that clamps the ultrasonic nozzle 141. The other end of the nozzle mounting component 142 can be connected to the support rod 13 so that the nozzle mounting component 142 and the ultrasonic nozzle 141 mounted on the nozzle mounting component 142 can be supported by the support rod 13. Each nozzle mounting component 142 and the corresponding ultrasonic nozzle 141 constitute a nozzle unit. Each nozzle unit can be independently mounted on the support rod 13, and each nozzle unit can perform spraying operations independently. When multiple spraying units are provided, the multiple spraying units can be arranged sequentially along the spraying width direction.

[0041] The support column 11 is vertically arranged and can be directly or indirectly connected to the support rod 13 to directly or indirectly support the support rod 13. The support rod 13 is horizontally arranged and is used to connect to the nozzle assembly 14. The position where the support rod 13 is directly or indirectly connected to the support column 11 serves as the support point of the support rod 13. The first part 131 of the support rod 13 on one side of the support point is used to install the nozzle assembly 14, and the second part 132 of the support rod 13 on the other side of the support point is not connected to the nozzle assembly 14. To facilitate the installation of the nozzle assembly 14, the first part 131 of the support rod 13 is relatively long, so that the first part 131 has enough space for the installation of the nozzle assembly 14. To reduce the size of the ultrasonic spraying equipment, the length of the second part 132 of the support rod 13 that is not connected to the nozzle assembly 14 can be set to be shorter than the length of the first part 131. Shortening the length of the second part 132 can reduce the size of the support rod 13, thereby reducing the size of the ultrasonic spraying equipment.

[0042] The support rod 13 can be movably connected to the nozzle assembly 14, so that the nozzle assembly 14 can move laterally to multiple positions and remain relatively fixed to the support rod 13. The first part 131 of the support rod 13 has a relatively long length, which not only facilitates the installation of the nozzle assembly 14, but also provides space for the lateral movement of the nozzle assembly 14, so that the nozzle assembly 14 has a large adjustment range in the lateral direction, making it easy to adjust the nozzle assembly 14 to the desired position.

[0043] When the length of the first part 131 of the support rod 13 is greater than the length of the second part 132, the weight of the first part 131 is greater than the weight of the second part 132. At this time, the center of gravity of the support rod 13 does not coincide with the support point. This shift in the center of gravity relative to the support point reduces the stability of the support rod 13, making it prone to wobbling when subjected to external forces. Specifically, when the nozzle assembly 14 moves laterally or performs spraying operations on the less stable support rod 13, it generates an interaction force on the support rod 13. The less stable support rod 13 will experience unexpected vibrations due to this interaction force. Consequently, the nozzle assembly 14 will also experience unexpected vibrations synchronously with the support rod 13. These unexpected vibrations reduce the uniformity of the spraying, resulting in lower uniformity of the film thickness prepared by the ultrasonic spraying equipment, and also lower consistency among multiple batches of films.

[0044] When the ultrasonic nozzle 141 of the nozzle assembly 14 uses an auxiliary airflow field to guide the flow of atomized droplets, if the nozzle assembly 14 experiences unexpected vibration, the vibration of the nozzle assembly 14 will be transmitted to the auxiliary airflow field. This causes the auxiliary airflow field, which was originally designed to be laminar or steady-state, to experience instantaneous pressure fluctuations and turbulent disturbances. The guiding ability of the auxiliary airflow field changes, and the pressure fluctuations and turbulent disturbances of the auxiliary airflow field will cause random changes in the initial velocity direction and particle size distribution of the atomized droplets. Ultimately, this leads to the offset of the atomized droplet landing point, blurred edges of the sprayed pattern, and microscopic ripple defects on the film surface.

[0045] To improve the uniformity of spraying from the nozzle assembly 14, the installation position of components within the ultrasonic spraying equipment can be adjusted to enhance the stability of the support rod 13. Increased stability of the support rod 13 reduces its tendency to wobble due to the interaction forces generated during the lateral movement of the nozzle assembly 14 or during spraying operations. This mitigates or eliminates unintended vibrations of the nozzle assembly 14, reducing or eliminating their impact on spraying uniformity and ensuring consistency of films prepared in multiple batches using the ultrasonic spraying equipment of this application. Furthermore, reducing or eliminating unintended vibrations of the nozzle assembly 14 prevents vibrations from being transmitted to the auxiliary airflow field, ensuring accurate guidance of the atomized droplets by the auxiliary airflow field.

[0046] Specifically, in the ultrasonic spraying equipment, the liquid supply component 15 is installed on the second part 132 of the support rod 13. After the liquid supply component 15 is installed on the second part 132 of the support rod 13, the liquid supply component 15 and the second part 132 can be balanced or nearly balanced with the weight of the first part 131. That is, while supplying liquid, the liquid supply component 15 can also counterweight the second part 132. After the liquid supply component 15 counterweights the second part 132, the center of gravity of the support rod 13 can coincide with or nearly coincide with the support point, thus effectively increasing the stability of the support rod 13. In addition, by installing the liquid supply component 15 on the second part 132, the distance between the liquid supply component 15 and the nozzle assembly 14 is reduced, and the liquid supply component 15 and the nozzle assembly 14 can move synchronously with the support rod 13, thereby shortening the liquid flow path length between the liquid supply component 15 and the nozzle assembly 14, facilitating efficient liquid supply towards the nozzle assembly 14.

[0047] It should be noted that the support rod 13 is designed to effectively support the nozzle assembly 14. The support rod 13 is generally made of metal and has a high volume and strength; therefore, its weight is significantly greater than that of the nozzle assembly 14. When installing the liquid supply assembly 15, its installation position on the second part 132 of the support rod 13 can be adjusted, using the support point connecting the support rod 13 and the support column 11 as the fulcrum. This ensures that the torque of the second part 132 and the liquid supply assembly 15 is the same as or similar to the torque of the first part 131. At this point, the center of gravity of the support rod 13 coincides with or approximately coincides with the support point. Since the nozzle assembly 14 is lighter than the support rod 13, its installation on the first part 131 or lateral movement will not significantly change the weight of the first part 131. Therefore, the center of gravity of the support rod 13 only changes slightly, having a minimal impact on its stability. Therefore, the stability of the support rod 13 can be effectively increased simply by balancing the weight of the whole formed by the second part 132 and the liquid supply component 15 with that of the first part 131.

[0048] To facilitate the adjustment of the position of the nozzle assembly 14, the nozzle assembly 14 can be connected to a Y-axis moving unit 143 and a Z-axis moving unit 144. The Y-axis moving unit 143 and the Z-axis moving unit 144 are used to adjust the position of the nozzle assembly 14 along the Y-axis and Z-axis, respectively.

[0049] Reference Figure 5A Y-axis moving unit 143 is mounted on a support rod 13. The Y-axis moving unit 143 drives the nozzle assembly 14 to move laterally along the Y-axis relative to the support rod 13. The Y-axis moving unit 143 may include a Y-axis drive assembly 1431, a Y-axis guide rail 1432, and a Y-axis slider 1433. The Y-axis guide rail 1432 extends along the Y-axis and can slide in conjunction with the Y-axis slider 1433. The Y-axis guide rail 1432 is fixedly connected to the support rod 13, specifically to the first part 131 of the support rod 13. The Y-axis slider 1433 is fixedly connected to the nozzle mounting part 142 of the nozzle assembly 14. The Y-axis drive assembly 1431 is connected to the Y-axis slider 1433 to drive the Y-axis slider 1433 to slide relative to the Y-axis guide rail 1432, thereby driving the nozzle assembly 14 along the Y-axis. The Y-axis drive assembly 1431 may include a servo motor and a precision ball screw. A servo motor is connected to a precision ball screw and provides rotational force. The precision ball screw converts the rotational force of the servo motor into a driving force along the Y-axis, thereby driving the Y-axis slider 1433 to move along the Y-axis. The Y-axis can be perpendicular or approximately perpendicular to the relative movement direction of the nozzle assembly 14 and the substrate. The Y-axis slider 1433 is specifically a nut seat connected to the precision ball screw.

[0050] When the spraying assembly 14 includes multiple spraying units, each spraying unit can be connected to the Y-axis moving unit 143, allowing each spraying unit to be driven independently by the Y-axis moving unit 143. In actual spraying operations, the required spraying width of the spraying assembly 14 varies depending on the size of the substrate. In this case, the Y-axis moving unit 143 can drive a corresponding number of spraying units to move above the substrate and perform the spraying operation. Controlling the number of spraying units allows control of the spraying width of the spraying assembly 14, adapting to substrates of different sizes. For example, controlling a single spraying unit to move above the substrate enables single-nozzle spraying, or controlling two or three units to move above the substrate enables parallel spraying by two or three nozzles. The spraying width direction is parallel to the Y-axis.

[0051] Furthermore, during the spraying process, the spraying areas of the ultrasonic nozzles 141 in adjacent spraying units may overlap. For example, the liquid content at the edge of the spraying area of ​​the ultrasonic nozzle 141 may be slightly lower than that in the center. By making the edges of the spraying areas of adjacent ultrasonic nozzles 141 overlap, the liquid content at the edge of the spraying area can be made consistent with the liquid content in the center or with the substrate. Whether the spraying areas of adjacent ultrasonic nozzles 141 overlap and the required size of the overlap will vary depending on the liquid formulation, substrate material, and process requirements. In this case, the Y-axis movement unit 143 can be used to control the movement of the spraying units, thereby controlling the spacing between adjacent ultrasonic nozzles 141 and adjusting whether or not the spraying areas of adjacent ultrasonic nozzles 141 overlap.

[0052] To achieve independent adjustment of multiple spraying units along the Y-axis, multiple Y-axis drive components 1431, Y-axis guide rails 1432, and Y-axis sliders 1433 can be provided. These components are combined to form a Y-axis drive group, with each group connected to a spraying unit to independently drive its movement. Alternatively, when a motor drives a screw in the Y-axis drive group, and the screw connects to a nut seat to convert the motor's rotational motion into linear motion, different parts of the screw can be configured with threads of different directions. These threads, through corresponding nut seats, engage with corresponding spraying units, allowing multiple spraying units indirectly connected to the screw to move in different directions under the same motor drive. This enables one Y-axis drive group to adjust the Y-axis position of multiple spraying units.

[0053] The Z-axis moving unit 144 is mounted on the support column 11, and its drive end is connected to the support rod 13. This allows the Z-axis moving unit 144 to drive the support rod 13 and the nozzle assembly 14 mounted on the support rod 13 to move along the Z-axis, thereby adjusting the nozzle assembly 14 along the Z-axis. Therefore, when the support column 11 is equipped with the Z-axis moving unit 144, the support column 11 is connected to the support rod 13 via the Z-axis moving unit 144 and indirectly supports the support rod 13. When the support column 11 is not equipped with the Z-axis moving unit 144, i.e., when the support rod 13 does not require Z-axis position adjustment, the support column 11 can be directly connected to the support rod 13 to directly support the support rod 13.

[0054] When the Z-axis moving unit 144 is installed on the support column 11, the support column 11 can be equipped with a clamp. The clamp clamps the support rod 11 after the Z-axis moving unit 144 stops operating, ensuring the position of the support rod 11 is fixed. The clamp is an existing mechanical component and will not be described in detail here. Furthermore, the Z-axis moving unit 144 is equipped with a mechanical limit block and a photoelectric limit switch at the upper and lower limit positions to which the support rod 11 can move. The mechanical limit block restricts further movement of the support rod 11 by abutting and limiting, while the photoelectric limit switch controls the Z-axis moving unit 144 to stop or reverse when it reaches the limit position, preventing overtravel of the support rod from causing component collision damage.

[0055] The vertical distance between the nozzle assembly 14 and the substrate can be adjusted by changing the position of the nozzle assembly 14 through the Z-axis movement unit 144. The optimal spraying distance between the nozzle assembly 14 and the substrate varies depending on the liquid formulation, substrate material, and process requirements. Therefore, the vertical distance between the nozzle assembly 14 and the substrate can be adjusted according to the specific requirements of the liquid formulation, substrate material, and process requirements, thereby ensuring spraying quality.

[0056] As a specific example, when the sprayed liquid is a perovskite precursor liquid and the substrate is FTO conductive glass, ITO conductive glass or flexible polymer substrate, the optimal spraying distance between the spraying component 14 and the substrate is about 45mm, and the relative moving speed between the spraying component 14 and the substrate on the X-axis is preferably about 150mm / s.

[0057] The Z-axis movement unit 144 may include a Z-axis drive assembly 1441, a Z-axis guide rail 1442, and a Z-axis slider 1443. The Z-axis guide rail 1442 extends along the Z-axis and can slide with the Z-axis slider 1443. The Z-axis guide rail 1442 is fixedly connected to the support column 11, and the Z-axis slider 1443 is fixedly connected to the support rod 13. The Z-axis drive assembly 1441 is used to connect with the Z-axis slider 1443 to drive the Z-axis slider 1443 to slide relative to the Z-axis guide rail 1442, thereby driving the support rod 13 along the Z-axis. The Z-axis drive assembly 1441 may include a servo motor and a precision ball screw. The servo motor is connected to the precision ball screw and provides rotational force. The precision ball screw converts the rotational force of the servo motor into a driving force along the Z-axis, thereby driving the Z-axis slider 1443 to move along the Z-axis. Specifically, the Z-axis slider 1443 is a nut seat connected to the precision ball screw, and the Z-axis can be vertical. The relative movement direction between the nozzle assembly 14 and the substrate is the X-axis direction, and the Z-axis, X-axis and Y-axis can be perpendicular to each other.

[0058] By installing the Z-axis moving unit 144 onto the support column 11, and by using the liquid supply assembly 15 to counterweight the second part 132, the center of gravity of the support rod 13 is adjusted to the support point connected to the support column 11. At this point, the Z-axis moving unit 144 installed on the support column 11 can connect to the center of gravity of the support rod 13, allowing the Z-axis moving unit 144 to support the center of gravity of the support rod 13 and drive the support rod 13 to move vertically along the Z-axis. Because the Z-axis moving unit 144 drives the center of gravity of the support rod 13, the stability of the support rod 13 when moving along the Z-axis is improved, ensuring that the support rod 13 maintains a stable state where its center of gravity coincides or approximately coincides with the support point when adjusted to multiple positions on the Z-axis.

[0059] The guide support rod 12 is vertically arranged, and the guide support rod 12 and the support column 11 are located on opposite sides of the nozzle assembly 14. Specifically, the guide support rod 12 and the support column 11 are located on opposite sides of the first part 131 of the support rod 13. The guide support rod 12 can be slidably connected to the support rod 13 to guide the support rod 13 in the vertical direction. Specifically, the guide support rod 12 is provided with a guide rail 121, which extends along the Z-axis. The end of the support rod 13 connected to the guide support rod 12 is provided with a guide slider 122, which is slidably connected to the guide rail 121 and slides along the extension direction of the guide rail 121.

[0060] When the support rod 13 is driven by the Z-axis moving assembly to move along the Z-axis, one end of the first part 131 of the support rod 13 is guided by the cooperation of the Z-axis guide rail 1442 and the Z-axis slider 1443, and the other end of the first part 131 is guided by the cooperation of the guide rail 121 and the guide slider 122, so as to ensure that the first part 131 of the support rod 13 used to install the nozzle assembly 14 can move accurately along the Z-axis under the guidance of both ends.

[0061] Reference Figure 3 , Figure 7 and Figure 8 The support module 2 can be located below the spraying module 1, and is used to support and carry the substrate. The substrate can be used to receive the liquid sprayed from the spraying module 1 so that the desired film can be formed on the substrate. The support module 2 includes a stage 21 and an X-axis moving unit 22 connected to the stage 21.

[0062] The stage 21 can be used to support the substrate. The upper surface of the stage 21, which supports the substrate, is a flat working surface formed by precision grinding. The upper surface of the stage 21 can be provided with multiple evenly distributed adsorption holes. Each adsorption hole is connected to a vacuum device such as a vacuum pump through a corresponding pipeline, so that each adsorption hole can generate adsorption force under the action of the vacuum pump. The adsorption force generated by the multiple adsorption holes adsorbs and fixes the substrate onto the stage 21, preventing the substrate from moving relative to the stage 21 during the spraying process. Furthermore, the multiple adsorption holes effectively adsorb various parts of the substrate, preventing local warping of the substrate during reciprocating motion and ensuring that the substrate maintains a stable flat state during the spraying process.

[0063] The X-axis moving unit 22 drives the stage 21 to move along the X-axis, allowing the substrate mounted on the stage 21 to move along the X-axis. The X-axis is parallel to the coating direction of the substrate. By driving the substrate to move along the X-axis, the substrate and the nozzle assembly 14 can move relative to each other along the coating direction, thereby achieving full coating of the substrate. Specifically, the length direction of the substrate is parallel to the X-axis, the width direction of the substrate is parallel to the Y-axis, the width of the spraying area of ​​the nozzle assembly 14 is greater than the width of the substrate, and the spraying area completely covers the substrate along the width direction. The length direction of the spraying area is less than the length of the substrate. By driving the substrate and the spraying area to move along the length direction (X-axis direction), the substrate can be effectively sprayed at all points along its length direction. The X-axis moving unit 22 drives the stage 21 to reciprocate along the X-axis, so that a thin film of the required thickness is gradually deposited on the substrate.

[0064] Existing spraying equipment relies on nozzle movement to allow the nozzle to move along the X-axis to multiple positions for comprehensive coating of the substrate. However, during the movement, the nozzle experiences vibration due to acceleration / deceleration inertia, as well as errors in the transmission and guiding structures. This vibration affects the uniformity of the coated film. Therefore, in applications requiring high film uniformity, even slight nozzle vibration can directly impact film uniformity, thereby affecting the quality of the formed functional layer. For example, in the fabrication of perovskite functional layers, the thickness uniformity of the perovskite functional layer directly affects its quality.

[0065] In this application, by using the X-axis moving unit 22 to drive the stage 21 to move, the nozzle assembly 14 can maintain a fixed position during the spraying process. The fixed position of the nozzle assembly 14 prevents vibration due to inertial forces during movement and errors in the transmission and guiding structures, thus effectively preventing vibration during spraying. The area and weight of the substrate and stage 21 are much larger than the nozzle assembly 14; therefore, the vibration of the substrate and stage 21 due to inertial forces and errors in the transmission and guiding structures during movement is small and negligible. Therefore, by using the X-axis moving unit 22 to drive the stage 21, the thickness consistency of the film sprayed by the nozzle assembly 14 can be effectively improved, ensuring the quality of the functional film layer formed.

[0066] Specifically, the X-axis moving unit 22 may include an X-axis drive assembly 221, an X-axis guide rail 222, and an X-axis slider 223. The X-axis guide rail 222 extends along the X-axis and can be fixedly installed in the ultrasonic spraying equipment, for example, on a mounting bracket within the ultrasonic spraying equipment. The X-axis slider 223 is slidably connected to the X-axis guide rail 222 and fixedly connected to the stage 21, so that the X-axis slider 223 can drive the stage 21 to move along the extension direction of the X-axis guide rail 222. The X-axis drive assembly 221 is connected to the X-axis slider 223 to drive the X-axis slider 223 to move, thereby enabling the X-axis slider 223 to drive the stage 21 to move. Specifically, the X-axis drive assembly 221 may include a drive motor and a precision ball screw. The drive motor is connected to the precision ball screw and provides rotational force. The precision ball screw converts the rotational force of the drive motor into a driving force along the X-axis, thereby driving the X-axis slider 223 to move along the X-axis. For example, the nut seat of the precision ball screw is fixedly connected to the X-axis slider 223, or the nut seat and the X-axis slider 223 are respectively fixedly connected to the stage 21, so that the nut seat can drive the X-axis slider 223 to move synchronously. The drive motor is preferably a servo motor or a stepper motor, and the drive motor is connected to the ball screw through a coupling.

[0067] To ensure the smooth movement of the stage 21 driven by the X-axis moving unit 22, the X-axis moving unit 22 can be connected to a control device. The control device can optimize the settings based on the acceleration and deceleration curve of the X-axis moving unit 22 using control software, thereby optimizing the driving logic of the X-axis moving unit 22 and effectively reducing the interference of the acceleration and deceleration inertial forces of the stage 21 on the deposition process of the sprayed droplets on the substrate. The software for optimizing the driving logic of the driving device based on the acceleration and deceleration curve can use existing software, and therefore will not be described in detail here.

[0068] The liquid supply assembly 15 supplies liquid to the nozzle assembly 14. The stability of the liquid flow rate supplied by the liquid supply assembly 15 to the nozzle assembly 14 also affects the coating uniformity of the nozzle assembly 14. Specifically, when the liquid flow rate supplied by the liquid supply assembly 15 to the nozzle assembly 14 is unstable, the amount of liquid supplied to the nozzle assembly 14 varies at different times, and the amount of liquid atomized by the nozzle assembly 14 varies at different times. This leads to variations in the amount of coating applied by the nozzle assembly 14 at different times, directly affecting the uniformity of the coating film thickness of the nozzle assembly 14.

[0069] Reference Figures 4 to 6 To improve the stability of the liquid flow rate supplied by the liquid supply assembly 15 to the nozzle assembly 14, the liquid supply assembly 15 may include a precision injection pump 151. The precision injection pump 151 includes a liquid storage chamber and a servo motor. The drive shaft of the servo motor is connected to a piston located in the liquid storage chamber. The servo motor drives the piston to move within the liquid storage chamber, thereby causing the liquid in the liquid storage chamber to flow towards the nozzle assembly 14 or drawing liquid from the liquid storage tank. The servo motor can cooperate with a precision lead screw mechanism to drive the piston movement. The cooperation between the servo motor and the precision lead screw mechanism can achieve high-precision micro-step drive, enabling the piston's advance speed to reach sub-micron resolution. Furthermore, the backlash-free transmission design of the screw and nut seat in the precision lead screw mechanism allows the liquid supplied by the precision injection pump 151 to be output at an ultra-low flow rate of less than 0.1 μL / s, and ensures that the instantaneous fluctuation of the liquid flow rate is controlled within ±1%. This effectively reduces the phenomenon of uneven spraying of the nozzle assembly 14 caused by poor liquid supply stability of the liquid supply assembly 15. Multiple precision injection pumps 151 can be provided. Each precision injection pump 151 can be connected to the nozzle assembly 14 through a liquid supply pipe to supply liquid to the nozzle assembly 14. The multiple precision injection pumps 151 can be controlled by a PLC so that a portion of the precision injection pumps 151 can supply liquid to the nozzle assembly 14 at the same time, while the remaining portion of the precision injection pumps 151 can perform liquid replenishment operations. Continuous liquid supply is achieved through the cooperation of multiple precision injection pumps 151.

[0070] After the initial filling of the precision syringe pump 151 or replacement of the reservoir, microbubbles may be generated inside the precision syringe pump 151 due to residual gas. These microbubbles may flow with the liquid to the nozzle assembly 14, affecting the stability of the liquid supply flow rate; furthermore, microbubbles may cause intermittent liquid interruption and abrupt changes in droplet size in the nozzle assembly 14. The reservoir is a component that stores liquid and supplies liquid to the reservoir chamber of the precision syringe pump 151.

[0071] To eliminate the impact of microbubbles on the spraying stability of the nozzle assembly 14, the precision injection pump 151 may be equipped with a miniature three-way valve 152. The miniature three-way valve 152 is connected to a corresponding motor so that the miniature three-way valve 152 can switch the flow path through the motor drive. Specifically, the miniature three-way valve 152 is provided with a liquid outlet 1521, a liquid replenishment port 1522, and a vent port 1523. The miniature three-way valve 152 can control the liquid outlet 1521 to move between the liquid storage chamber and the nozzle assembly 14, so that the liquid storage chamber is connected to the nozzle assembly 14 through the liquid outlet 1521. At this time, the precision injection pump 151 can supply liquid to the nozzle assembly 14. Alternatively, the miniature three-way valve 152 can control the liquid replenishment port 1522 to move between the liquid storage chamber and the liquid storage tank, so that the liquid storage tank can replenish liquid into the liquid storage chamber. Alternatively, the miniature three-way valve 152 can control the vent port 1523 to move between the liquid storage chamber and the venting device, so that the venting device can vent the liquid in the liquid storage chamber to eliminate tiny air bubbles in the liquid in the liquid storage chamber.

[0072] In use, the miniature three-way valve 152 controls the liquid inlet 1522 to move between the liquid storage chamber and the liquid storage tank to replenish the liquid into the liquid storage chamber. Then, the miniature three-way valve 152 controls the vent 1523 to move between the liquid storage chamber and the venting device. At this time, the piston of the precision injection pump 151 advances at a low speed to push the gas of the mixed oil microbubbles into the venting chamber of the venting device. The microbubbles in the liquid rise to the top due to buoyancy and are discharged through the vent 1523 of the venting device. The vent 1523 of the venting device can be connected to a vacuum device to facilitate the extraction of microbubbles. After the venting is completed, the pure liquid flows into the liquid storage chamber. The miniature three-way valve 152 controls the liquid outlet 1521 to move between the liquid storage chamber and the nozzle assembly 14. The precision injection pump 151 drives the pure liquid to flow towards the nozzle assembly 14 to eliminate the influence of microbubbles on the spraying stability of the nozzle assembly 14.

[0073] In this application, by installing the liquid supply component 15 on the second part 132 and using a precision injection pump 151 and connecting the precision injection pump 151 to a miniature three-way valve 152 for venting, the ultrasonic spraying equipment of this application can ensure that the thickness error of the film is less than 10 nm when spraying a film with a surface area greater than 10 square meters, and the consistency of the film after coating reaches ±1.5% (the difference between the highest and lowest points of the film and the predetermined thickness of the film is less than 1.5% of the predetermined thickness of the film).

[0074] Reference Figure 2The outer wall of the housing 4 encloses an internal space, and the housing 4 may include a partition 41 disposed within the internal space, dividing the internal space of the housing 4 into a spraying space 42 and an installation space 43. The spraying space 42 houses the spraying module 1 and the carrier module 2, allowing the substrate to be sprayed within the spraying space 42. To ensure the air quality in the spraying space 42 during the spraying process, a filter unit may also be provided inside the housing 4. The filter unit filters the external air to ensure that the gas flowing into the spraying space 42 is clean gas. The gas in the spraying space 42 can be discharged through the gas outlet on the housing 4. The continuous supply of clean gas ensures the air quality in the spraying space 42. The filter unit may be a clean FFU (Fan Filter Unit). The installation space 43 can be used to install the control module 3. By installing the control module 3 in a different space from the spraying module 1 and the carrier module 2, the impact of droplets during the spraying process on the control module 3 can be prevented, ensuring the operation of the control module 3.

[0075] The control module 3 may include a circuit board 44, which includes a main control board, a motor drive board, an ultrasonic drive board, a vacuum control board, a temperature sensor acquisition board, and a communication interface board. The main control board may be an MCU or a PLC controller. The main control board can be connected to the motor drive board, ultrasonic drive board, vacuum control board, temperature sensor acquisition board, and communication interface board. The main control board can transmit control signals through preset program logic. Specifically, the main control board drives the motors of the X-axis moving unit 22, Y-axis moving unit 143, and Z-axis moving unit 144 to run or stop via the motor drive board, thereby controlling the movement of the nozzle assembly 14 and the stage 21, so that the stage 21 moves smoothly along a predetermined trajectory and controls the relative position of the nozzle assembly 14 and the substrate; the main control board controls the start and stop of the atomizing spray unit of the nozzle assembly and its output power via the ultrasonic drive board; the main control board controls the start and stop of the vacuum device connected to the suction port on the stage 21 or the suction force via the vacuum control board; the temperature sensor acquisition board collects the temperature in the spraying space 42 to transmit the ambient temperature signal to the main control board. The main control board can also control the flow rate of the precision infusion pump, and control the switching on and off of the filter unit and the fan speed adjustment.

[0076] Furthermore, the host computer on circuit board 44 can interact with the human-machine interface and host computer (such as an MES system) via a communication interface board to support the downloading and uploading of process recipes and the real-time recording and traceability of equipment operation data. For example, the outer casing of housing 4 can be fixedly connected to a human-machine interface panel 48, which can be operated by the operator to transmit control signals toward circuit board 44.

[0077] Reference Figure 1 and Figure 2To facilitate indication of equipment operating status, the outer casing 4 can be equipped with tri-color lights 45 located on its outer wall, for example, on the top of the casing 4. These lights 45 display the current operating status of the equipment to the operators through red, yellow, and green indicator lights and a buzzer. Specifically, a solid green light indicates normal operation; a flashing or solid yellow light indicates standby, pause, or maintenance reminder status; a solid or flashing red light accompanied by a buzzer alarm indicates a malfunction, such as jamming of the substrate moving platform, abnormal ultrasonic atomization, insufficient liquid supply, or vacuum adsorption failure, prompting the operator to intervene promptly. The tri-color lights 45 are electrically connected to the circuit board 44, which automatically controls the on / off state and color switching of the lights 45 based on the real-time operating status of the equipment. The circuit board 44 can also control the buzzer to sound or stop the alarm.

[0078] To facilitate position adjustment of the ultrasonic spraying equipment, the bottom of the equipment can be equipped with swivel casters 46 and foot brackets 47. The swivel casters 46 and foot brackets 47 can be fixedly installed at the four corners of the bottom wall of the housing, with each caster 46 corresponding to one foot bracket 47. The foot brackets 47 can be raised and lowered. For example, the foot brackets 47 are threadedly connected to a threaded post located at the bottom of the housing. By rotating the foot brackets 47, the depth of screwing into the threaded post can be adjusted, thereby adjusting the height of the foot brackets 47. When adjusting the position of the ultrasonic spraying equipment, the foot brackets 47 are raised so that the swivel casters 46 contact the ground, allowing the ultrasonic spraying equipment to be moved. After the position of the ultrasonic spraying equipment is adjusted, the height of the foot brackets 47 is lowered so that they contact the ground, thus ensuring that the ultrasonic spraying equipment maintains a horizontal and stable working posture during long-term operation, while avoiding unexpected displacement caused by the rolling of the swivel casters 46.

[0079] The present invention also provides an ultrasonic spraying method, which is performed using the ultrasonic spraying equipment described above; the ultrasonic spraying method includes steps S01 to S05.

[0080] Step S01: The substrate to be coated is mounted on the stage 21, and the adsorption holes on the stage 21 generate suction to fix the substrate. The substrate to be coated can be FTO conductive glass, ITO conductive glass, or a flexible polymer substrate.

[0081] Step S02: Drive the corresponding number of ultrasonic sprayers 141 to the spraying position through the Y-axis moving unit 143, and / or adjust the spacing of the ultrasonic sprayers 141 used for spraying through the Y-axis moving unit 143 to control whether the spraying areas of adjacent ultrasonic nozzles 141 overlap or control the size of the overlapping area.

[0082] Step S03: Adjust the vertical distance between the ultrasonic nozzle 141 and the substrate by the Z-axis moving unit 144 so that the ultrasonic spraying 141 and the substrate are adjusted to the optimal spraying distance.

[0083] Step S04: Control the ultrasonic nozzle 141 to atomize the liquid and spray it; keep the position of the ultrasonic nozzle 141 fixed, and drive the stage 21 to move through the X-axis moving unit 22 so that the substrate can be uniformly sprayed at various positions along the X-axis to form a thin film.

[0084] Step S05: After the spraying is completed, the ultrasonic nozzle 141 stops working, the X-axis moving unit 22 stops moving, the suction force of the adsorption hole of the stage 21 is canceled, and the sprayed substrate is removed. The sprayed substrate can be moved to a VCD (Vacuum Chamber Dryer) and annealing equipment for annealing treatment to obtain a uniform and dense film.

[0085] In step S01, if the position of the ultrasonic spraying equipment needs to be adjusted, the omnidirectional casters 46 can be used to contact the ground before installing the substrate to move the ultrasonic spraying equipment to the desired position. Then, the control feet 47 are made to contact the ground and support the equipment to ensure the stability of the ultrasonic spraying equipment. After the position adjustment of the ultrasonic spraying equipment is completed, the substrate is installed.

[0086] Furthermore, after the substrate is installed, clean and dry air can be supplied to the spraying space 42, and the ultrasonic spraying equipment can have a built-in filter to filter the air flowing into the spraying space 42. Through the continuous supply of clean and dry air, the air cleanliness within the spraying space 42 can be kept high (reaching ISO 5 level or even higher) and the humidity low, ensuring the air quality within the spraying space 42 during the spraying process and improving the spraying quality. Simultaneously with supplying clean and dry air to the spraying space 42, the ultrasonic spraying equipment can expel the gas from the spraying space 42 through the exhaust port, thus creating a stable slightly positive or slightly negative pressure environment within the spraying space 42.

[0087] After the substrate is adsorbed and fixed on the stage 21, a waste liquid collection tank can be set at the edge of the stage 21. The waste liquid collection tank is used to collect the liquid sprayed on the outside of the stage 21, and the waste liquid collection tank can be connected to a vacuum device to collect scattered droplets and extract organic vapors generated by liquid evaporation. The waste liquid collected by the waste liquid collection tank during the spraying process can be recycled for reuse after purification. The volatile organic vapors (such as DMF and DMSO vapors) continuously extracted during the spraying process can be sent to an external adsorption treatment device for adsorption purification before being discharged into the atmosphere.

[0088] When performing steps S02 and S03, the operator can input various parameters required for the current spraying process through the human-machine interface of the ultrasonic spraying equipment. The process parameters include: the power of the ultrasonic nozzle 141, the liquid supply flow rate of the precision injection pump 151, the carrier gas pressure, the distance between the ultrasonic nozzle 141 and the substrate (preferably 45 mm), the speed at which the X-axis moving unit 22 drives the substrate to move along the X-axis (preferably 150 mm / s), the required number of ultrasonic nozzles 141, and the distance between adjacent ultrasonic nozzles 141, etc.

[0089] In step S04, the liquid received by the ultrasonic nozzle 141 can be the liquid supplied after being vented by the liquid supply assembly 15. The acceleration and deceleration curve of the substrate moving along the X-axis is optimized and set by the control software to effectively avoid interference from acceleration and deceleration inertial forces on the spraying process. Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the invention without departing from the principles and spirit of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. An ultrasonic spraying device, characterized in that, It includes a support rod (13), a nozzle assembly (14) mounted on the support rod (13), and a support column (11) for supporting the support rod (13); the support point of the support rod (13) is directly or indirectly connected to the support column (11) for being supported by the support column (11), and the length of the first part (131) of the support rod (13) on one side of the support point is greater than the length of the second part (132) of the support rod (13) on the other side of the support point. The first part (131) is used to mount the nozzle assembly (14). The second part (132) is equipped with a liquid supply assembly (15), which is used to supply liquid toward the nozzle assembly (14). The liquid supply assembly (15) provides counterweight to the second part (132) to balance the weight of the support rod (13) on both sides of the support point. With the support point of the support rod (13) as the fulcrum, the torque of the combination of the second part (132) and the liquid supply assembly (15) is the same as the torque of the first part (131).

2. The ultrasonic spraying equipment according to claim 1, characterized in that, It also includes a Z-axis moving unit (144), which is installed on the support column (11) and connected to the support rod (13). The support column (11) is connected to the support point of the support rod (13) through the Z-axis moving unit (144). The Z-axis moving unit (144) is used to drive the support rod (13) to move along the Z-axis.

3. The ultrasonic spraying equipment according to claim 2, characterized in that, It also includes a guide support rod (13), which and the support column (11) are located on opposite sides of the first part (131). The guide support rod (13) and the support column (11) guide the movement of the first part (131) along the Z-axis through the sliding fit structure of the slider guide rail.

4. The ultrasonic spraying equipment according to claim 1, characterized in that, The first part (131) is equipped with a Y-axis moving unit (143), and the first part (131) is connected to the nozzle assembly (14) through the Y-axis moving unit (143). The Y-axis moving unit (143) is used to drive the nozzle assembly (14) to move along the Y-axis.

5. The ultrasonic spraying equipment according to claim 4, characterized in that, The nozzle assembly (14) includes a plurality of nozzle units, each containing an ultrasonic nozzle (141), and the plurality of nozzle units are connected to the Y-axis moving unit (143) and are independently driven by the Y-axis moving unit (143). One or more of the ultrasonic nozzles (141) are moved along the Y-axis to above the substrate for spraying operations, and the spacing between adjacent ultrasonic nozzles (141) along the Y-axis is adjusted by the Y-axis moving unit (143).

6. The ultrasonic spraying equipment according to claim 1, characterized in that, It also includes a carrier module (2) and an X-axis moving unit (22) connected to the carrier module (2). The carrier module (2) is used to carry the substrate to be coated, and the X-axis moving unit (22) is used to drive the carrier module (2) to move along the X-axis, which is parallel to the coating direction of the substrate.

7. The ultrasonic spraying equipment according to claim 1, characterized in that, The liquid supply assembly (15) includes multiple precision injection pumps (151), each precision injection pump (151) including a liquid storage chamber and a servo motor. The drive shaft of the servo motor is connected to a piston located in the liquid storage chamber. The servo motor is used to drive the piston to move in the liquid storage chamber to control the flow of liquid in the liquid storage chamber.

8. The ultrasonic spraying equipment according to claim 7, characterized in that, The precision injection pump (151) is equipped with a miniature three-way valve (152), which has an outlet (1521), a replenishment port (1522), and an exhaust port (1523). The outlet (1521), the replenishment port (1522), and the exhaust port (1523) can be selectively connected to the liquid storage chamber of the precision injection pump (151). The liquid outlet (1521) is used to connect the liquid storage chamber and the nozzle assembly (14), the liquid replenishment port (1522) is used to connect the liquid storage chamber and the liquid storage tank, and the exhaust port (1523) is used to connect the liquid storage chamber and the exhaust device.

9. The ultrasonic spraying equipment according to claim 1, characterized in that, It also includes a housing (4), which has a partition (41) and a spraying space (42) and an installation space (43) separated by the partition (41). The spraying space (42) is used to accommodate the nozzle assembly (14), and the installation space (43) is used to accommodate the circuit board (44).

10. An ultrasonic spraying method, characterized in that, The ultrasonic spraying method is performed using the ultrasonic spraying equipment as described in any one of claims 1 to 9, and the ultrasonic spraying method includes: A substrate to be sprayed is provided, which is mounted on the stage (21) of the ultrasonic spraying equipment and is adsorbed and fixed. The required number of ultrasonic nozzles (141) are moved above the substrate by the Y-axis moving unit (143) and the spacing between adjacent ultrasonic nozzles (141) along the Y-axis is adjusted; and / or, the spraying spacing between the ultrasonic nozzles (141) and the substrate in the vertical direction is adjusted by the Z-axis moving unit (144). An ultrasonic nozzle (141) sprays liquid. The ultrasonic nozzle (141) is fixed in position and the substrate is driven to move along the X-axis relative to the ultrasonic nozzle (141) by an X-axis moving unit (22).

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