A sliding column with automatic flip-over wafer carrier

Abstract

This invention discloses a sliding column with an automatically flipping crystal tray, relating to the field of crystal rod transportation technology. It includes: a sliding column body; a fixed crystal tray assembly fixed to the bottom end of the sliding column body; and a flipping crystal tray assembly fixed to the sliding column body, located above the fixed crystal tray assembly and spaced at a predetermined distance. The sliding column with an automatically flipping crystal tray disclosed in this invention, due to the fixed crystal tray assembly fixed to the bottom end of the sliding column body and the flipping crystal tray assembly fixed to the sliding column body, located above the fixed crystal tray assembly and spaced at a predetermined distance, can realize the picking and transport of both long and short crystal rods, and has advantages such as small footprint, high reliability, high efficiency, and low energy consumption.

Description

Technical Field

[0001] This invention relates to the field of crystal rod transportation technology, and in particular to a sliding column with an automatic flipping crystal holder. Background Technology

[0002] After the crystal ingot has grown in the single crystal furnace, it needs to be removed from the furnace using equipment such as a crystal removal cart. The crystal removal cart includes a sliding column with a crystal support assembly, a gripper assembly, a crystal removal cart lifting mechanism, and a column lifting mechanism. The crystal support assembly on the sliding column supports the bottom of the crystal ingot, the gripper assembly holds the crystal ingot, and the crystal removal cart lifting mechanism drives the sliding column and gripper assembly to lift and lower the crystal ingot. The column lifting mechanism drives the sliding column to rise and fall relative to the gripper assembly, thereby extending the bottom end of the sliding column (crystal support assembly) into the through hole of the crystal removal station in the single crystal furnace, reducing the height of the sliding column and avoiding motion interference between the sliding column and the single crystal furnace. However, for long crystal rods, when the bottom end of the sliding column extends into the bottom end of the through hole of the crystal picking station, the gripper assembly on the crystal picking cart can still effectively clamp the crystal rod; but for short crystal rods, when the bottom end of the sliding column extends into the bottom end of the through hole of the crystal picking station, the distance between the gripper assembly on the crystal picking cart and the crystal support assembly on the sliding column makes it impossible for the gripper assembly to effectively clamp the crystal rod or to hold the crystal rod.

[0003] To enable the crystal-retrieving vehicle to retrieve crystal rods of different lengths, existing technologies have employed a position-adjustable structure for the crystal holder assembly on the sliding column. However, this structure still suffers from the following problems: (1) Large space occupation: Existing crystal picking carts generally use chains and other structures to suspend and lift crystal tray assemblies for picking crystal rods of different lengths. However, by setting up chains and other drive structures, the chains will increase the space occupied on both the front and back sides of the sliding column, resulting in an increase in the width of the sliding column (crystal tray assembly). Consequently, it cannot be used for the through holes at the crystal picking station of the existing single crystal furnace, or the through holes at the crystal picking station need to be enlarged to ensure the passage of the sliding column and the crystal tray assembly, which increases the construction cost. (2) Low reliability: The weight of crystal rods is generally between tens of kilograms and hundreds of kilograms. Existing crystal picking vehicles use chains and other structures to lift and lower the crystal holder assembly for picking crystal rods of different lengths. In other words, the weight of the crystal holder assembly and the weight of the crystal rod are both borne by the chain structure, which leads to the problem of crystal rod damage caused by chain breakage or wear. (3) Low efficiency: The existing crystal picking cart uses a chain and other structure to lift and lower the crystal tray assembly for picking crystals of different lengths. Since the lengths of different crystals vary greatly, the chain needs to drive the crystal tray assembly to run a long distance, which results in a long adjustment time for the position of the crystal tray assembly and affects work efficiency. (4) High energy consumption: The existing crystal picking vehicle uses chains and other structures to lift and lower the crystal tray assembly for picking crystal rods of different lengths. In other words, the weight of the crystal tray assembly and the weight of the crystal rod are both borne by the chain structure. That is, the power output of the electric cylinder and other drive structure that drives the chain needs to meet the movement of the chain, the crystal tray assembly and the crystal rod, resulting in high energy consumption. Summary of the Invention

[0004] This invention addresses the problems existing in the prior art by proposing a sliding column with an automatically flipping crystal holder.

[0005] The technical means employed in this invention are as follows: A sliding column with an automatically flipping crystal holder includes: Sliding column body; A fixed crystal support assembly is fixed at the bottom end of the sliding column body; And a flip crystal tray assembly fixed on the sliding column body, located on the upper side of the fixed crystal tray assembly and spaced at a set distance; The flip-top crystal tray assembly includes a flip-top tray for supporting crystal rods, a tray drive mechanism for driving the flip-top tray to flip in the horizontal and vertical directions, and a flip-top tray support for supporting the flip-top tray when the flip-top tray is in a horizontal state.

[0006] Furthermore, the flipping tray includes two flipping tray flaps, and a pivot is fixed to the outer side of each flipping tray flap; A set of tray drive mechanisms connected to the rotating shaft are respectively installed on both sides of the sliding column body.

[0007] Furthermore, the pallet driving mechanism includes a linear drive mechanism and a rocker arm; The linear drive mechanism is fixed to the side of the sliding column body. The output end of the linear drive mechanism is connected to one end of the swing rod, and the other end of the swing rod is connected to the rotating shaft. The linear drive mechanism can drive the flipping tray to flip in the horizontal and vertical directions through the swing rod.

[0008] Furthermore, the flip-up tray support is fixed to the sliding column body, and the flip-up tray is rotatably mounted on the flip-up tray support via the rotating shaft.

[0009] Furthermore, the flip tray support includes a fixing part for fixed connection with the sliding column body, a connecting ear for rotatably connecting with the rotating shaft on the flip tray, and a support part for supporting the flip tray when the flip tray is in a horizontal state.

[0010] Furthermore, the support portion is also provided with a stop for adjusting the horizontal flipping position of the flipping tray.

[0011] Furthermore, the flip tray is also equipped with a crystal rod positioning detection mechanism.

[0012] Furthermore, the linear drive mechanism is an electric cylinder.

[0013] Compared with the prior art, the sliding column with automatic flip crystal holder disclosed in this invention has the following beneficial effects: The sliding column with automatic flip crystal holder disclosed in this invention, due to the presence of a fixed crystal holder assembly fixed at the bottom of the sliding column body and a flip crystal holder assembly fixed on the sliding column body and located above the fixed crystal holder assembly and spaced at a set distance, can realize the crystal picking and handling of long and short crystal rods, and has the advantages of small space occupation, high reliability, high efficiency and low energy consumption. Attached Figure Description

[0014] Figure 1 This is a structural diagram of the sliding column with automatic flip-up crystal tray disclosed in this invention in its first state. In the diagram, the flip-up tray of the flip-up tray assembly is in a horizontal state. Figure 2 This is a structural diagram of the second state of the sliding column with automatic flipping crystal tray disclosed in this invention. In the diagram, the flipping tray of the flipping tray assembly is in a vertical state. Figure 3 This is a structural diagram of the sliding column with an automatically flipping crystal holder disclosed in this invention from another direction; Figure 4 for Figure 2 Enlarged view of the dashed box; In the diagram: 1. Sliding column main body; 2. Fixed crystal tray assembly; 20. Fixed crystal tray base plate; 21. Fixed crystal tray surrounding plate; 22. Fixed crystal tray pad plate; 23. Fixed crystal tray fixing plate; 24. Clearance hole; 3. Flip crystal tray assembly; 30. Flip tray plate; 300. Flip tray plate flap; 301. Rotating shaft; 302. Flip crystal tray base plate; 303. Flip crystal tray surrounding plate; 304. Flip crystal tray pad plate; 31. Tray drive mechanism; 310. Linear drive mechanism; 311. Swing rod; 312. Long hole; 313. Pin shaft; 32. Flip tray support base; 320. Fixing part; 321. Connecting ear; 322. Support part; 323. Stop; 33. Detection port; 4. Crystal rod arrival detection mechanism. Detailed Implementation

[0015] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the sliding column with an automatically flipping crystal holder disclosed in this invention includes: Sliding column body 1; Fixed crystal support assembly 2 is fixed at the bottom end of the sliding column body 1; And a flip crystal tray assembly 3 fixed on the sliding column body 1, located on the upper side of the fixed crystal tray assembly 2 and spaced at a set distance; The flip-top crystal tray assembly 3 includes a flip-top tray 30 for supporting crystal rods, a tray drive mechanism 31 for driving the flip-top tray 30 to flip in the horizontal and vertical directions, and a flip-top tray support 32 for supporting the flip-top tray 30 when the flip-top tray 30 is in a horizontal state.

[0016] Specifically, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the sliding column with an automatic flip-over crystal tray disclosed in this invention includes a sliding column body 1, which is mounted on a stacker truck. The stacker truck 1 is equipped with a lifting drive device (generally using a sprocket and chain structure) capable of driving the sliding column body 1 to rise and fall. A fixed crystal tray assembly 2 is fixed to the bottom end of the sliding column body 1. The fixed crystal tray assembly 2 includes a fixed crystal tray base plate 20, a fixed crystal tray surrounding plate 21, a fixed crystal tray pad 22, and a fixed crystal tray fixing plate 23, etc. The crystal ingot is fixed to the bottom of the sliding column body 1 by two fixed crystal ingot fixing plates 23. A fixed crystal ingot surrounding plate 21 is fixed to the edge of the fixed crystal ingot base plate 20 to form an enclosing space to limit the bottom of the crystal ingot and ensure the reliability of the support. A spring or other buffer and shock absorption structure is also provided between the fixed crystal ingot pad plate 22 and the fixed crystal ingot base plate 20 to reduce the force of the crystal ingot placed on the fixed crystal ingot assembly 2. The fixed crystal ingot pad plate 22 and the fixed crystal ingot base plate 20 are also provided with avoidance holes 2 for avoiding the tip of the bottom of the crystal ingot. 4; A flip crystal tray assembly 3 is also installed on the upper side of the fixed crystal tray assembly 2 on the sliding column body 1. The distance between the flip crystal tray assembly 3 and the fixed crystal tray assembly 2 is set according to actual needs. The flip crystal tray assembly 3 includes a flip tray 30, a tray driving mechanism 31, and a flip tray support 32. The flip tray 30 includes a flip crystal tray base 302, a flip crystal tray surrounding plate 303, and a flip crystal tray pad 304. A spring or other buffer and shock absorption structure is also provided between the flip crystal tray base 302 and the flip crystal tray pad 304. The specific structure of the flip tray 30 is similar to that of the fixed crystal tray assembly 2. The tray driving mechanism 31 is fixed on the side of the sliding column body 1. The tray driving mechanism 31 can drive the flip tray 30 to flip in the vertical and horizontal directions. The flip tray support 32 is also fixed on the sliding column body 1. The flip tray support 32 is used to support the flip tray 30 when it is in a horizontal state, thereby supporting the crystal rod through the flip tray 30.

[0017] The sliding column with an automatically flipping crystal tray disclosed in this application, due to the presence of a fixed crystal tray assembly 2 and a flipping crystal tray assembly 3, with the flipping crystal tray assembly 3 located above the fixed crystal tray assembly 2, enables the crystal picking vehicle equipped with the sliding column with an automatically flipping crystal tray disclosed in this application to pick and transport both long and short crystal rods. Specifically, when picking long crystal rods, the flipping tray 30 of the flipping crystal tray assembly 3 is in a vertical state under the drive of the tray driving mechanism 31, thereby forming a crystal rod clearance space. At this time, the lower end of the long crystal rod can be supported by the fixed crystal tray assembly 2. When picking short crystal rods, the flipping tray 30 of the flipping crystal tray assembly 3 is in a horizontal state under the drive of the tray driving mechanism 31 and supported by the flipping tray support 32. At this time, the lower end of the short crystal rod can be supported by the flipping crystal tray assembly 3.

[0018] The sliding column with automatic flip-up crystal holder disclosed in this application has the following advantages over the prior art: (1) Small space occupation: Existing crystal picking carts use chains and other structures to suspend and lift crystal tray assemblies for picking crystal rods of different lengths. However, by setting up chains and other drive structures, the chains will increase the space occupied on both sides of the sliding column, resulting in an increase in the width of the sliding column (crystal tray assembly). This makes it unsuitable for the through holes at the crystal picking station of existing single crystal furnaces, or requires the through holes at the crystal picking station to be enlarged to ensure the passage of the sliding column and crystal tray assembly. In this application, a flip crystal tray assembly 3 is set above the fixed crystal tray assembly 2. The horizontal size of the flip crystal tray assembly 3 is the same as the size of the fixed crystal tray assembly 2. Therefore, the sliding column with automatic flip crystal tray disclosed in this application does not increase the space occupied by the sliding column and crystal tray assembly, and there is no need to enlarge the through holes at the crystal picking station. (2) High reliability: The weight of crystal rods is generally between tens and hundreds of kilograms. Existing crystal picking vehicles use chains and other structures to lift and lower the crystal tray assembly for picking crystal rods of different lengths. In other words, the weight of the crystal tray assembly and the weight of the crystal rod are both borne by the chain structure, which can lead to problems such as damage to the crystal rod due to chain breakage or wear. In this application, the flip crystal tray assembly 3 is fixed on the sliding column body 1. In other words, the weight of the flip crystal tray assembly 3 and the weight of the crystal rod are both borne by the sliding column body 1, which improves the reliability of the crystal picking and crystal rod transportation process. (3) High efficiency: Existing crystal picking carts use chains and other structures to lift and lower the crystal tray assembly for picking crystals of different lengths. Since the lengths of different crystals vary greatly, the chain needs to drive the crystal tray assembly for a long distance, which results in a long adjustment time for the position of the crystal tray assembly and affects work efficiency. In this application, the flipping crystal tray assembly 3 only needs to switch the flipping tray 30 in the vertical and horizontal directions to pick and transport crystals of different crystals, which improves work efficiency. (4) Low energy consumption: Existing crystal picking vehicles use chains and other structures to lift and lower crystal tray assemblies for picking crystal rods of different lengths. In other words, the weight of the crystal tray assembly and the weight of the crystal rod are both borne by the chain structure. This means that the power output of the drive structure such as the electric cylinder that drives the chain needs to meet the movement of the chain, crystal tray assembly and crystal rod, resulting in high energy consumption. In this application, the flipping crystal tray assembly 3 is fixed on the sliding column body 1. The weight of the flipping crystal tray assembly 3 and the weight of the crystal rod are both borne by the sliding column body 1. In other words, the tray drive mechanism 31 used to drive the flipping tray 30 to flip only needs to complete the horizontal and vertical flipping of the flipping tray 30, without the need for additional power output. Therefore, it has the advantage of low energy consumption.

[0019] Furthermore, the flipping tray 30 includes two flipping tray flaps 300, and a rotating shaft 301 is fixed on the outer side of each flipping tray flap 300; A set of pallet drive mechanisms 31 connected to the rotating shaft 301 are respectively installed on both sides of the sliding column body 1.

[0020] Specifically, such as Figure 1 and Figure 2 As shown, in this embodiment, the flipping tray 30 includes two flipping tray segments 300. A rotating shaft 301 is fixed to the outer side of each flipping tray segment 300. In this embodiment, the part connecting the rotating shaft 301 and the flipping tray segment 300 is a polygonal column structure and is fixed together by bolts or other means. A set of tray driving mechanisms 31 are respectively installed on both sides of the sliding column body 1. The tray driving mechanisms 31 can drive the flipping tray segments 300 to achieve horizontal and vertical flipping. In this embodiment, the flipping tray 30 is a two-body structure. The two flipping tray segments 300 can flip relative to each other under the drive of the tray driving mechanisms 31 to form a single flipping tray 30. This structure can effectively reduce the space required for the flipping process of the flipping tray 30. At the same time, it can further reduce the size of the tray driving mechanism 31 structure, while achieving structural symmetry to ensure the stability of the crystal rod support. In other embodiments, the flipping tray 30 may not be a split structure. That is, a tray driving mechanism 31 is fixed on one side of the sliding column body 1. The tray driving mechanism 31 can drive the flipping tray 30 to flip in the horizontal and vertical directions.

[0021] Furthermore, the pallet driving mechanism 31 includes a linear driving mechanism 310 and a rocker arm 311; The linear drive mechanism 310 is fixed to the side of the sliding column body 1. The output end of the linear drive mechanism 310 is connected to one end of the swing rod 311, and the other end of the swing rod 311 is connected to the rotating shaft 301. The linear drive mechanism 310 can drive the flipping tray 30 to flip in the horizontal and vertical directions through the swing rod 311.

[0022] Specifically, such as Figure 3 As shown, the pallet driving mechanism 31 includes a linear driving mechanism 310 and a swing rod 311. The linear driving mechanism 310 is fixed to the side of the sliding column body 1. One end of the swing rod 311 is provided with an elongated hole 312. The output end of the linear driving mechanism 310 is connected to the end of the swing rod 311 with the elongated hole 312 through a pin 313. Thus, the linear motion of the output end of the linear driving mechanism 310 forms the swing of the swing rod 311. The other end of the swing rod 311 is connected to a rotating shaft 301 fixed on the flipping pallet 30. The swing rod 311 and the rotating shaft 301 can be connected by a key or a non-cylindrical surface (i.e., the swing rod 311 is provided with a polygonal hole, and the position where the rotating shaft 301 is connected to the swing rod 311 is also a polygonal column structure). Thus, the swing rod 311 drives the flipping pallet 30 to swing synchronously during the swinging process, thereby realizing the flipping in the horizontal and vertical directions.

[0023] Furthermore, the flip-up tray support 32 is fixed on the sliding column body 1, and the flip-up tray 30 is rotatably mounted on the flip-up tray support 32 via the rotating shaft 301.

[0024] Specifically, in this embodiment, the flip tray support 32 is fixed on both sides of the sliding column body 1, and the flip tray 30 is mounted on the flip tray support 32 through the rotating shaft 301, thereby ensuring the stability of the flip tray and ensuring that the crystal rod can be effectively supported.

[0025] Furthermore, the flip tray support 32 includes a fixing part 320 for fixedly connecting with the sliding column body 1, a connecting ear part 321 for rotatably connecting with the rotating shaft 301 on the flip tray 30, and a support part 322 for supporting the flip tray 30 when the flip tray 30 is in a horizontal state.

[0026] Specifically, such as Figure 4As shown, in this embodiment, the flip-up tray support 32 includes a fixing part 320, a connecting ear 321, and a support part 322. The fixing part 320 is fixed to the side of the sliding column body 1 by means of bolt connection or welding. The fixing part 320 is provided with the connecting ear 321. One end of the rotating shaft 301 of the flip-up tray 30 is rotatably connected to the connecting ear 321. The upper end of the fixing part 320 extends forward of the sliding column body 1 to form the support part 322, so that when the flip-up tray 30 is flipped to the horizontal direction, the support part 322 can support the flip-up tray 30. In this embodiment, the flip-up tray support 32 is welded from multiple stiffening plate structures.

[0027] Furthermore, the support portion 322 is also provided with a stop 323 for adjusting the horizontal flipping position of the flipping tray 30.

[0028] Specifically, a stop 323 is also provided on the support part 322. In this embodiment, the stop 323 is a bolt. The bolt passes through the lower side of the support part 322 and is threadedly connected to the support part 322. By setting the stop 323 (bolt), the height of the top of the stop 323 can be adjusted, thereby causing the flip plate 30 to flip in the horizontal direction. When its bottom surface contacts the top surface of the stop 323, the flip plate 30 is in a horizontal state, thereby ensuring that the flip plate 30 can effectively support the crystal rod.

[0029] Furthermore, the flip tray 30 is also equipped with a crystal rod positioning detection mechanism 4.

[0030] Specifically, a crystal rod placement detection mechanism 4 is provided on the flip tray 30, which can automatically detect whether the lower end of the crystal rod has landed on the flip tray 30, so as to facilitate the subsequent control of the gripper assembly to hold the crystal rod. In this embodiment, a crystal rod placement detection mechanism 4 is fixed at the front end of each flip tray segment 300. The front end of the flip tray segment 300 is provided with a detection port 33. The crystal rod placement detection mechanism 4 can effectively detect whether there is a crystal rod on the flip tray 30 through the detection port 33, further realizing the automated control of the equipment.

[0031] Furthermore, the linear drive mechanism 310 is an electric cylinder.

[0032] Specifically, the linear drive mechanism 310 can be a hydraulic cylinder or a pneumatic cylinder. Preferably, the linear drive mechanism 310 is an electric cylinder, which reduces noise during operation and improves running accuracy. At the same time, it has the advantages of simple structure and convenient control, which further simplifies the structure of the sliding column with automatic flip crystal holder disclosed in this application and realizes automated control.

[0033] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A sliding column with an automatically flipping crystal holder, characterized in that, include: Sliding column main body; A fixed crystal support assembly is fixed at the bottom end of the sliding column body; And a flip crystal tray assembly fixed on the sliding column body, located on the upper side of the fixed crystal tray assembly and spaced at a set distance; The flip-top crystal tray assembly includes a flip-top tray for supporting crystal rods, a tray drive mechanism for driving the flip-top tray to flip in the horizontal and vertical directions, and a flip-top tray support for supporting the flip-top tray when the flip-top tray is in a horizontal state.

2. The sliding column with an automatic flip-up crystal holder according to claim 1, characterized in that: The flip-up tray includes two flip-up tray flaps, and a rotating shaft is fixed to the outer side of each flip-up tray flap; A set of tray drive mechanisms connected to the rotating shaft are respectively installed on both sides of the sliding column body.

3. The sliding column with an automatically flipping crystal holder according to claim 1 or 2, characterized in that: The pallet drive mechanism includes a linear drive mechanism and a swing arm; The linear drive mechanism is fixed to the side of the sliding column body. The output end of the linear drive mechanism is connected to one end of the swing rod, and the other end of the swing rod is connected to the rotating shaft. The linear drive mechanism can drive the flipping tray to flip in the horizontal and vertical directions through the swing rod.

4. The sliding column with an automatically flipping crystal holder according to claim 3, characterized in that: The flip-up tray support is fixed to the sliding column body, and the flip-up tray is rotatably mounted on the flip-up tray support via the rotating shaft.

5. The sliding column with an automatically flipping crystal holder according to claim 4, characterized in that: The flip tray support includes a fixing part for fixed connection with the sliding column body, a connecting ear for rotatably connecting with the rotating shaft on the flip tray, and a support part for supporting the flip tray when the flip tray is in a horizontal state.

6. The sliding column with an automatically flipping crystal holder according to claim 5, characterized in that: The support portion is also provided with a stop for adjusting the horizontal flipping position of the flipping tray.

7. The sliding column with an automatically flipping crystal holder according to claim 1, characterized in that: The flip tray is also equipped with a crystal rod positioning detection mechanism.

8. The sliding column with an automatically flipping crystal holder according to claim 3, characterized in that: The linear drive mechanism is an electric cylinder.

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