Gas circuit system and heat treatment apparatus

Abstract

This application provides a gas path system and heat treatment equipment, including an exhaust module. The exhaust module includes: a first main pipeline; a first transfer pipeline connected to the first main pipeline; a condensation connection pipeline connected to the first transfer pipeline; a first condensation mechanism connected to the condensation connection pipeline; a first acid discharge mechanism connected to the first condensation mechanism; a second main pipeline connected to the upper end of the first condensation mechanism; a diaphragm pump mechanism connected to the suction port of the diaphragm pump mechanism; a second transfer pipeline connected to the discharge port of the diaphragm pump mechanism; a second condensation mechanism connected to the second end of the second transfer pipeline, wherein the second end of the second transfer pipeline is lower than the first end of the second transfer pipeline; and a second acid discharge mechanism connected to the lower end of the second condensation mechanism. The diaphragm pump mechanism is used as a negative pressure power source for pressure control, ensuring the control range, accuracy, and stability of the absolute pressure of the oxidation furnace, and improving the uniformity of the thin film in the oxidation process.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a gas path system and heat treatment equipment. Background Technology

[0002] Oxidation furnaces are one of the core pieces of equipment in semiconductor manufacturing. They provide a high-temperature environment for heat treatment processes such as oxidation and diffusion of semiconductor materials. Oxidation furnaces are typically equipped with an intake system and an exhaust system. The intake system introduces process gases into the furnace, while the exhaust system removes process decomposition products and maintains stable absolute pressure within the furnace. However, existing exhaust systems usually use butterfly valves in conjunction with mechanical pumps for pressure control. This results in a narrow pressure control range and poor accuracy and stability, affecting the uniformity of the thin film during the oxidation process. Summary of the Invention

[0003] In view of the above, it is necessary to provide a gas path system and heat treatment equipment that can improve the uniformity of thin films in the oxidation process.

[0004] This application provides a gas path system, including an exhaust module. The exhaust module includes: a first main pipeline for connecting to the exhaust pipe of an oxidizer; a first transfer pipeline, the first end of which is connected to the first main pipeline; a condensation connection pipeline connected to the second end of the first transfer pipeline; a first condensation mechanism connected to the condensation connection pipeline; a first acid discharge mechanism connected to the lower end of the first condensation mechanism; a second main pipeline, the first end of which is connected to the upper end of the first condensation mechanism; a diaphragm pump mechanism, the second end of which is connected to the suction port of the diaphragm pump mechanism; a second transfer pipeline, the first end of which is connected to the discharge port of the diaphragm pump mechanism; a second condensation mechanism connected to the second end of the second transfer pipeline, and the second end of the second transfer pipeline is lower than the first end of the second transfer pipeline; a second acid discharge mechanism connected to the lower end of the second condensation mechanism; and a tail gas treatment mechanism connected to the second condensation mechanism.

[0005] In some embodiments, the first end of the first transfer pipe is higher than the second end of the first transfer pipe.

[0006] In some embodiments, the first condensation mechanism includes a first condensation pipe and a second condensation pipe. The upper end of the first condensation pipe is connected to the lower end of the condensation connecting pipe, and the lower end of the first condensation pipe is connected to the first acid discharge mechanism. The lower end of the second condensation pipe is connected to the upper end of the condensation connecting pipe, and the upper end of the second condensation pipe is connected to the first end of the second main pipe.

[0007] In some embodiments, the first acid removal mechanism is provided with a negative pressure generator, which is connected to the lower end of the first condensation pipe.

[0008] In some embodiments, the exhaust module further includes: a pressure testing pipeline, the first end of which is connected to a condenser connection pipeline; a gas purging mechanism, which is connected to the second end of the pressure testing pipeline and is used to blow inert gas into the pressure testing pipeline; and a pressure detection mechanism, which is disposed in the pressure testing pipeline.

[0009] In some embodiments, the pressure testing pipeline is provided with a longitudinal section, the extension direction of the longitudinal section having an angle with the horizontal direction, and the pressure detection mechanism is provided in the longitudinal section.

[0010] In some embodiments, the pressure detection mechanism includes a plurality of vacuum gauges, which are spaced apart along the extension direction of the longitudinal pipe section.

[0011] In some embodiments, the condensation connection pipeline is provided with a first connection point and a second connection point. The first connection point is connected to a first transfer pipeline, and the second connection point is connected to a pressure measuring pipeline. The second connection point is higher than the first connection point.

[0012] In some embodiments, the exhaust module further includes a third acid discharge mechanism; the second condensation mechanism includes a third condensation pipe and a fourth condensation pipe, which are arranged in parallel, a second transfer pipe is connected to the third condensation pipe, the upper end of the third condensation pipe and the upper end of the fourth condensation pipe are connected, the upper end of the third condensation pipe is connected to the second acid discharge mechanism, the fourth condensation pipe is connected to the third acid discharge mechanism, and the exhaust gas treatment mechanism is connected to the upper end and / or the lower end of the fourth condensation pipe.

[0013] In some embodiments, the exhaust module further includes a pressure sensor disposed in the third condenser line.

[0014] In some embodiments, the gas path system further includes an air intake module, which includes: a first gas supply pipeline for connecting to a first gas source; a first air intake branch with an air intake point and a first air outlet point, the air intake point of the first air intake branch being connected to the first gas supply pipeline; a precursor device, the first air outlet point of the first air intake branch being connected to the air intake end of the precursor device; a second air intake branch, the first end of the second air intake branch being connected to the air outlet end of the precursor device; and an ignition device, the second end of the second air intake branch being connected to the air intake end of the ignition device, the air outlet end of the ignition device being used to connect to the air intake pipe of the oxidation furnace.

[0015] In some embodiments, the first intake branch is further provided with a second outlet point, and a first switching valve is provided between the second outlet point and the first outlet point; the intake module further includes: a first exhaust branch, the first end of which is connected to the second outlet point of the first intake branch; a precursor exhaust branch, provided with a first access point and an exhaust output point, the first access point of the precursor exhaust branch being connected to the second end of the first exhaust branch, and the exhaust output point of the precursor exhaust branch being connected to the second condensing mechanism; when the first switching valve is closed, the gas passes sequentially through the first gas supply line, the first intake branch, the first exhaust branch, the precursor exhaust branch, and the second condensing mechanism.

[0016] In some embodiments, the first intake branch is further provided with a third outlet point, and the first switch valve is located between the third outlet point and the first outlet point; the precursor exhaust branch is further provided with a second access point, and the first access point is located between the second access point and the exhaust outlet point; the intake module further includes: a second exhaust branch, which is distributed parallel to the first exhaust branch at intervals, and is provided with a second switch valve; the first end of the second exhaust branch is connected to the third outlet point of the first air supply pipeline, and the second end of the second exhaust branch is connected to the second access point of the precursor exhaust branch; when the second switch valve is opened, the gas passes sequentially through the first air supply pipeline, the first intake branch, the second exhaust branch, the precursor exhaust branch, and the second condensation mechanism.

[0017] In some embodiments, a first exhaust branch is provided with a first check valve, and a second exhaust branch is provided with a second check valve; wherein, the preset pressure value for opening the first check valve is configured to be greater than the preset pressure value for opening the second check valve, and the preset pressure value for opening the second check valve is configured to be less than or equal to the maximum pressure value that the precursor device can withstand.

[0018] In some embodiments, the second intake branch is provided with a transition point, a third switch valve, and a fourth switch valve, with the transition point located between the third switch valve and the fourth switch valve; the precursor exhaust branch is also provided with a third access point and a fifth switch valve, with the third access point located between the first access point and the second access point, and the fifth switch valve located between the first access point and the third access point. The intake module also includes a transition exhaust branch, with its two ends connected to the transition point and the third access point, respectively; when the first switch valve is open, the second switch valve is closed, the third switch valve is open, the fourth switch valve is closed, and the fifth switch valve is open, the gas sequentially passes through the first gas supply line, the first intake branch, the precursor device, the second intake branch, the transition exhaust branch, the precursor exhaust branch, and the second condensation mechanism.

[0019] In some embodiments, the outlet end of the ignition device is provided with a dilution inlet; the intake module further includes a dilution supply pipeline, the first end of which is used to connect to a dilution gas source, and the second end of which is connected to the dilution inlet.

[0020] In some embodiments, the air intake end of the ignition device is provided with a first air intake and a second air intake, and the second end of the second air intake branch is connected to the first air intake; the air intake module further includes: a second air supply pipeline for connecting to a second air source and connecting to the second air intake; and a third air supply pipeline for connecting to a third air source and connecting to the first air intake.

[0021] The second aspect of this application provides a heat treatment apparatus, including an oxidation furnace and a gas path system as provided in the first aspect; the gas path system includes an inlet module and an exhaust module, the inlet module being connected to the inlet pipe of the oxidation furnace, and the exhaust module being connected to the exhaust pipe of the oxidation furnace.

[0022] The gas path system and heat treatment equipment provided in this application employ a diaphragm pump mechanism as the negative pressure power source for pressure control. This results in a larger pressure control window, ensuring the control range, accuracy, and stability of the absolute pressure of the oxidizer. It also improves the uniformity of the thin film during the oxidation process and can meet the pressure control range required by different processes. Therefore, the oxidizer is suitable not only for atmospheric pressure processes but also for negative pressure processes, resulting in a wider range of applications and higher utilization. Furthermore, the second transfer pipeline has a high inlet and low outlet drop, allowing any condensate that may be present in the pipeline to flow naturally to the second condensation mechanism using gravity. This prevents backflow of condensate from the second condensation mechanism to the diaphragm pump mechanism, avoiding the risk of liquid accumulation in the diaphragm pump or absolute pressure diaphragm gauge due to backflow, and extending the service life of the diaphragm pump mechanism. Attached Figure Description

[0023] Figure 1 A schematic diagram of the heat treatment equipment provided in this application.

[0024] Figure 2 This is a schematic diagram of the oxidation furnace provided in this application.

[0025] Figure 3 This is a structural schematic diagram of the exhaust module provided in this application.

[0026] Figure 4 This is a schematic diagram of the intake module provided in this application.

[0027] Figure 5 This is a schematic diagram of the air path of the intake module in its first working state, as provided in this application.

[0028] Figure 6 This is a schematic diagram of the air path of the intake module in its second working state, as provided in this application.

[0029] Figure 7 This is a schematic diagram of the air path of the intake module in the third working state provided in this application.

[0030] Figure 8This is a schematic diagram of the air path of the intake module in its fourth working state, as provided in this application.

[0031] Explanation of main component symbols 10. Oxidation furnace; 101. Furnace tube; 1011. Inlet pipe; 1012. Exhaust pipe; 102. Loading chamber; 1021. Furnace door; 103. Furnace shell; 20. Exhaust module; 201. First main pipeline; 202. First transfer pipeline; 203. Condensation connection pipe; 2031. First connection point; 2032. Second connection point; 204. First condensing mechanism; 2041. First condensing pipe; 2042. Second condensing pipe; 205. First acid discharge mechanism; 2051. Negative pressure generator; 2052. First acid discharge valve; 206. Second main pipeline; 2061. First branch pipeline; 2062. Second branch pipeline; 2063. Transfer valve; 207. Diaphragm pump mechanism; 208. Second transfer pipeline; 209. Second condensing mechanism; 2091. Third condensing pipeline; 2092. Fourth condensing pipeline; 2093. First adapter; 2094. Second adapter; 2095. Second acid drain valve; 2096. Third acid drain valve; 210. Second acid removal mechanism; 211. Exhaust gas treatment mechanism; 2111. First exhaust fan; 2112. Second exhaust fan; 212. Pressure measuring pipeline; 2121. Longitudinal pipe section; 2122. Vacuum gauge; 213. Third transfer pipeline; 214. The third acid removal mechanism; 215. Pressure measuring instrument; 216. First discharge pipeline; 217. Second discharge pipe; 2171. Exhaust branch pipe; 218. Gas purging mechanism; 30. Intake module; 301. First gas supply pipeline; 302. Second gas supply line; 303. Third gas supply pipeline; 304. Dilution gas supply line; 3041. Dilution check valve; 3042. Dilution switch valve; 305. Precursor device; 306. First intake branch; 3061. Intake point; 3062. First outlet point; 3063. Second outlet point; 3064. Third outlet point; 3065. First switching valve; 3066. First intake check valve; 307. Second intake branch; 3071. Third switching valve; 3072. Fourth switching valve; 3073. Adapter point; 3074. Second intake check valve; 308. Exhaust branch of the front drive unit; 3081. Exhaust output point; 3082. First access point; 3083. Second access point; 3084. Third access point; 3085. Fifth switching valve; 3086. Exhaust check valve; 309. Ignition device; 3091. First air inlet; 3092. Second air inlet; 3093. Dilute air inlet; 310. Ignition and intake piping; 311, First exhaust branch; 3111, First check valve; 312, Second exhaust branch; 3121, Second switching valve; 3122, Second check valve; 313. Connect the exhaust branch; 401. First gas source; 402. Second gas source; 403. Third gas source; 404. Dilution gas source. Detailed Implementation

[0032] In the description of the embodiments of this application, when an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an element centrally located simultaneously. When an element is considered to be "set" on another element, it can be directly set on the other element or there may be an element centrally located simultaneously. In this application, unless otherwise expressly specified and limited, the terms "installed," "connected," "attached," "fixed," etc., should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "up," "down," "top," "bottom," etc., are all based on the direction of the product in the actual use scenario.

[0033] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0034] In the semiconductor manufacturing industry, high-temperature oxidation furnaces, as core equipment for wafer heat treatment, are widely used in key processes such as thermal oxidation, annealing, and in-situ cleaning. As advanced processes continue to demand higher thin film quality and process precision, the market's performance requirements for high-temperature oxidation furnaces have expanded from simple temperature control to include wide temperature range coverage, precise pressure regulation, and high-safety operation, among other multi-dimensional indicators.

[0035] Currently, high-temperature oxidation furnaces on the market are mainly divided into two typical structures, but both have significant technical limitations. The first type of equipment adopts an internal ignition combustion method, which can realize the oxidation process and DCE in-situ cleaning under a temperature range of 600-1500℃ and a pressure condition of 100mbar-900mbar / ATM. DCE in-situ cleaning refers to the process of using dichloroethylene (DCE) as a cleaning medium to remove metal impurities or residues deposited inside the furnace tubes (quartz tube walls, heating components, etc.) through high-temperature chemical reaction without disassembling the equipment.

[0036] However, such equipment, with the ignition device directly inside the furnace tube, presents multiple safety hazards: Firstly, the lack of a real-time detection mechanism for ignition failure allows unburned gas to accumulate, potentially leading to tube explosions. Secondly, the localized high temperatures generated by ignition inside the furnace can disrupt the temperature uniformity of the constant-temperature zone, and the disturbance of the combustion airflow can cause fluctuations in the airflow field within the furnace, affecting the consistency of the oxide layer thickness. Furthermore, limited by the temperature resistance characteristics of the furnace tube material, this type of structure cannot support ultra-high temperature processes above 1500℃, making it difficult to meet the urgent needs of advanced devices for ultra-high temperature heat treatment.

[0037] Although the second type of equipment has achieved ultra-high temperature oxidation capability of 600-1700℃ through optimized heating structure and can perform DCE cleaning under normal pressure, it has two key defects: First, the equipment only supports oxidation process under atmospheric pressure and lacks pressure control function, which limits the flexibility of the process; Second, this type of equipment is not equipped with an external ignition system, which limits the scope of application of the process.

[0038] Therefore, this application provides a gas path system and heat treatment equipment with ultra-high temperature oxidation capability, while being compatible with external ignition and DCE in-situ cleaning, to improve process stability, safety and applicability.

[0039] This application first provides a gas path system.

[0040] like Figure 1 and Figure 2 As shown, the gas path system can be applied to heat treatment equipment, which includes an oxidizing furnace 10 and the gas path system. The oxidizing furnace 10 has an inlet pipe 1011 and an exhaust pipe 1012. The gas path system includes an exhaust module 20 and an inlet module 30. The inlet module 30 is connected to the inlet pipe 1011 of the oxidizing furnace 10, and the exhaust module 20 is connected to the exhaust pipe 1012 of the oxidizing furnace 10.

[0041] For example, the oxidation furnace 10 includes a furnace tube 101, a loading chamber 102, and a furnace shell 103. The furnace tube 101 is a pure CVD-SiC (chemical vapor deposition silicon carbide) furnace tube, formed directly from pure process gas via chemical vapor deposition. It is a single-tube structure with a dense crystal structure and excellent high-temperature stability. The furnace tube 101 is equipped with an inlet pipe 1011 and an exhaust pipe 1012. The inlet pipe 1011 is connected to an inlet module 30, which is connected to an external gas source to introduce gas into the furnace tube 101 to participate in the oxidation reaction. The exhaust pipe 1012 is connected to an exhaust module 20 to discharge the reaction exhaust gas and by-products to the exhaust module 20 for treatment.

[0042] The loading chamber 102 is located below the furnace tube 101. The loading chamber 102 is used to place the carrier to be oxidized and the semiconductor material, and is connected to the furnace tube 101 through the furnace door 1021. The furnace shell 103 covers the outside of the furnace tube 101 for heat insulation and to maintain the uniformity of the temperature inside the furnace, while protecting the furnace tube 101 from external environmental interference.

[0043] like Figure 2 and Figure 3 As shown, in this embodiment, the exhaust module 20 of the gas path system includes a first main pipeline 201, a first transfer pipeline 202, a condenser connection pipeline 203, a first condenser mechanism 204, a first acid discharge mechanism 205, a second main pipeline 206, a diaphragm pump mechanism 207, a second transfer pipeline 208, a second condenser mechanism 209, a second acid discharge mechanism 210, and an exhaust gas treatment mechanism 211.

[0044] The first main pipeline 201 is connected to the exhaust pipe 1012 of the oxidizer 10. The first end of the first transfer pipeline 202 is connected to the first main pipeline 201, and the second end of the first transfer pipeline 202 is connected to the condenser connection pipeline 203. The first condenser mechanism 204 is connected to the condenser connection pipeline 203. The lower end of the first condenser mechanism 204 is connected to the first acid discharge mechanism 205, and the upper end of the first condenser mechanism 204 is connected to the second main pipeline 206. The first end of the second main pipeline 206 is connected to the upper end of the first condenser mechanism 204.

[0045] The diaphragm pump mechanism 207 includes a diaphragm pump and an absolute pressure diaphragm gauge. The diaphragm pump provides stable exhaust power to maintain stable process pressure within the oxidation furnace 10. The diaphragm pump has an inlet and an outlet. The absolute pressure diaphragm gauge is used to monitor the pressure status before or after the pump in real time. The second end of the second main pipeline 206 is connected to the inlet of the diaphragm pump mechanism 207, and the first end of the second transfer pipeline 208 is connected to the outlet of the diaphragm pump mechanism 207. The second condensation mechanism 209 is connected to the second end of the second transfer pipeline 208. The second acid discharge mechanism 210 is connected to the lower end of the second condensation mechanism 209, and the exhaust gas treatment mechanism 211 is connected to the second condensation mechanism 209.

[0046] During the high-temperature oxidation process, the oxidizer 10 will produce exhaust gas containing acidic byproducts. This exhaust gas is discharged from the exhaust pipe 1012 of the oxidizer 10 and then passes through the first main pipeline 201, the first transfer pipeline 202, the condensation connection pipeline 203, and the first condensation mechanism 204 in sequence.

[0047] The first condensation mechanism 204 cools the pipeline with a cooling medium, causing some of the water vapor and acidic gas in the exhaust gas to condense into liquid acidic liquid and deposit. The first acid discharge mechanism 205 extracts the accumulated acidic liquid and exhausts it from the exhaust module 20.

[0048] Another portion of the exhaust gas, after passing through the first condensation mechanism 204, flows out from the upper end of the first condensation mechanism 204, and then sequentially passes through the second main pipeline 206, the diaphragm pump mechanism 207, the second transfer pipeline 208, and the second condensation mechanism 209. The second condensation mechanism 209 cools the pipeline with a cooling medium, causing some of the water vapor and acidic gases in the exhaust gas to condense into liquid acidic liquid and deposit. The accumulated acidic liquid is extracted by the second acid discharge mechanism 210 and discharged through the exhaust module 20. The gas after the two-stage condensation treatment can enter the exhaust gas treatment mechanism 211, where the gas undergoes final harmless treatment.

[0049] Thus, by using the first condensation mechanism 204 and the second condensation mechanism 209 connected in series, the exhaust gas temperature is reduced step by step through the two-stage condensation mechanism, and water vapor and acidic gases are efficiently converted into liquid and separated, thereby improving the exhaust gas purification depth.

[0050] It is worth noting that the exhaust module 20 in this application uses a diaphragm pump mechanism 207 as a negative pressure power source for pressure control. The pressure control window of the diaphragm pump can reach: a pressure control range of 100mBar-900mBar or ATM atmospheric pressure. Compared with the butterfly valve pressure control commonly used in the prior art, the pressure control window of the diaphragm pump is larger, which can cover the actual pressure fluctuation range within the furnace tube 101, ensuring the pressure control range, accuracy, and stability of the absolute pressure of the oxidation furnace 10, and improving the film uniformity of the oxidation furnace 10 in the oxidation process. On the other hand, the diaphragm pump mechanism 207 can meet the required pressure control range of different processes, so that the oxidation furnace 10 can not only be used for atmospheric pressure processes, but also be compatible with negative pressure processes, thus having a wider range of applications and higher utilization rate.

[0051] It is understood that the terms "first end" and "second end" used in this application are used to define the two ends of the pipeline and are intended to clearly express the connection direction and spatial location of the pipeline connection. For example, the first end can be one section of the pipeline and the second end can be the other end of the pipeline. They should not be interpreted as limitations on the specific structure of the pipeline.

[0052] In some embodiments, the first main pipeline 201 is parallel to the horizontal direction, and the first end of the first main pipeline 201 is fixed and connected to the exhaust pipe 1012 of the oxidizer 10. The second end of the first main pipeline 201 is bent downward and connected to the first transfer pipeline 202.

[0053] The first transfer pipe 202 is made of a flexible hose. The first transfer pipe 202 is flexible in its entirety, and the first end of the first transfer pipe 202 is higher than the second end of the first transfer pipe 202.

[0054] Thus, the first transfer pipeline 202 has a drop direction with a high inlet and a low outlet, which can use gravity to allow any condensate that may be present in the pipeline to flow naturally to the first condensation mechanism 204, blocking the backflow of condensate from the first condensation mechanism 204 to the first main pipeline 201, and preventing acidic liquid from flowing back into the oxidation furnace 10.

[0055] Understandably, the first main pipeline 201 typically adopts a rigid pipe structure, while the first transfer pipeline 202 adopts a flexible pipe structure. This allows for a flexible transition between the first main pipeline 201 and the first condensing mechanism 204, enabling fine-tuning of the angle and micro-expansion to compensate for installation tolerances. This avoids the risk of leakage accidents caused by improper installation due to installation tolerances when assembling rigid pipes, thus improving sealing safety and long-term operational stability.

[0056] In some embodiments, the first condensation mechanism 204 includes a first condensation pipe 2041 and a second condensation pipe 2042. The upper end of the first condensation pipe 2041 is connected to the lower end of the condensation connecting pipe 203, and the lower end of the first condensation pipe 2041 is connected to the first acid discharge mechanism 205. The lower end of the second condensation pipe 2042 is connected to the upper end of the condensation connecting pipe 203, and the upper end of the second condensation pipe 2042 is connected to the first end of the second main pipe 206.

[0057] The condenser connection pipe 203 extends parallel to the vertical direction and is located between the first condenser pipe 2041 and the second condenser pipe 2042. The lower end of the condenser connection pipe 203 is provided with a first connecting joint that matches the diameter of the pipe connected to the first condenser pipe 2041, and the first connecting joint is fixedly assembled to the upper end of the first condenser pipe 2041. The upper end of the condenser connection pipe 203 is provided with a second connecting joint that matches the diameter of the pipe connected to the second condenser pipe 2042, and the second connecting joint is fixedly assembled to the lower end of the second condenser pipe 2042.

[0058] Part of the gas from the first transfer pipe 202 enters the first condenser pipe 2041 through the lower end of the condenser connection pipe 203. The first condenser pipe 2041 condenses the gas and guides the condensed liquid acid to settle naturally under gravity and gather at the bottom, and then flows into the first acid discharge mechanism 205 for discharge.

[0059] Another portion of the gas from the first transfer pipe 202 enters the second condensing pipe 2042 through the upper end of the condensing connection pipe 203. The second condensing pipe 2042 condenses a portion of the gas and guides the condensed liquid acid to flow into the condensing connection pipe 203 and the first condensing pipe 2041 under the action of gravity. Meanwhile, another portion of the gas enters the second main pipe 206 through the upper end of the second condensing pipe 2042.

[0060] In some embodiments, the first acid drainage mechanism 205 is provided with a negative pressure generator 2051, which is connected to the lower end of the first condenser pipe 2041. Exemplarily, the negative pressure generator 2051 is a miniature diaphragm pump, and the lower end of the first condenser pipe 2041 is connected to the suction port of the miniature diaphragm pump. The miniature diaphragm pump can provide stable and corrosion-resistant suction power to draw away and discharge the acidic liquid deposited at the bottom of the first condenser pipe 2041, reducing the accumulation of acidic liquid in the pipe.

[0061] In some embodiments, a first acid drain valve 2052 is provided at the lower end of the first condensing pipe 2041. The first acid drain valve 2052 is used to control the opening or closing of the lower end of the first condensing pipe 2041. The first acid drain valve 2052 can open or close according to a liquid level sensor or a timing control signal to achieve precise control of the acid draining timing.

[0062] In some embodiments, the exhaust module 20 further includes a pressure measuring line 212, a gas purging mechanism 218, and a pressure detection mechanism. The first end of the pressure measuring line 212 is connected to the condenser connection line 203. The gas purging mechanism 218 is connected to the second end of the pressure measuring line 212 and is used to blow inert gas into the pressure measuring line 212. The pressure detection mechanism is disposed on the pressure measuring line 212.

[0063] The pressure measuring line 212 transmits the internal pressure status of the system in real time. The pressure detection mechanism reads the pressure value transmitted from the pressure measuring line 212 to analyze whether the system has reached the required vacuum level and to perform process control accordingly. The gas purging mechanism 218 outputs inert gas into the pressure measuring line 212 to prevent acidic liquids from entering the pressure measuring line 212 and corroding the pressure detection mechanism, thus affecting the measurement accuracy.

[0064] For example, the pressure testing pipeline 212 is provided with a longitudinal pipe section 2121, the extension direction of the longitudinal pipe section 2121 is at an angle to the horizontal direction, specifically, the extension direction of the longitudinal pipe section 2121 is perpendicular to the horizontal direction.

[0065] The pressure detection mechanism is located in the upper part of the longitudinal pipe section 2121. Utilizing the vertical arrangement of the longitudinal pipe section 2121, the acidic liquid is guided downwards by gravity, preventing corrosion of the pressure detection mechanism and thus ensuring measurement accuracy.

[0066] The gas purging mechanism 218 is located at the end of the longitudinal pipe section 2121 away from the condenser connection pipe 203. The gas purging mechanism 218 can be a nitrogen source. By outputting nitrogen to the longitudinal pipe section 2121, the gas purging mechanism 218 further prevents acidic liquid from entering the pressure measuring pipe 212.

[0067] In some embodiments, the pressure detection mechanism includes a plurality of vacuum gauges 2122, which are spaced apart along the extension direction of the longitudinal pipe section 2121. Exemplarily, the number of vacuum gauges 2122 is at least three, namely a first vacuum gauge 2122a, a second vacuum gauge 2122b, and a third vacuum gauge 2122c. The first vacuum gauge 2122a, the second vacuum gauge 2122b, and the third vacuum gauge 2122c are distributed sequentially from top to bottom.

[0068] The first vacuum gauge 2122a is used to perform pressure control. During the system vacuuming phase, the first vacuum gauge 2122a monitors the pressure value in real time and feeds back control signals to adjust the operating status of the diaphragm pump mechanism 207.

[0069] The second vacuum gauge 2122b is used to monitor the pressure value during the heat treatment process in the process chamber, ensuring that the process environment is maintained within the preset pressure parameter range.

[0070] The third vacuum gauge 2122c is used to implement a safety interlock. After the heat treatment process is completed, the third vacuum gauge 2122c monitors whether the pressure value in the process chamber has returned to normal pressure. When the third vacuum gauge 2122c detects that the pressure value has returned to the normal pressure threshold, it sends an allow signal to the main controller, triggering the furnace door 1021 opening mechanism to perform the opening action, so as to prevent the furnace door 1021 from being opened accidentally under negative pressure.

[0071] By configuring a first vacuum gauge 2122a, a second vacuum gauge 2122b, and a third vacuum gauge 2122c, the main controller can receive and process the detection values ​​of each vacuum gauge 2122 one by one, and calculate the numerical differences between the first vacuum gauge 2122a, the second vacuum gauge 2122b, and the third vacuum gauge 2122c in real time. When the numerical difference exceeds a preset deviation threshold, the system determines that at least one of the vacuum gauges 2122 is faulty and triggers an alarm, prompting maintenance or replacement. This eliminates the technical deficiency of a single sensor's inability to self-diagnose, improving the accuracy of pressure monitoring and the operational safety of the system.

[0072] In addition, the furnace tube 101 usually needs to be purged or evacuated before the heat treatment process begins. The diaphragm pump mechanism 207 can accelerate the exhaust work. At the same time, the pressure value measured by the vacuum gauge 2122 of the pressure measuring pipeline 212 is used to determine whether the furnace tube 101 and the furnace door 1021 are sealed. If the pressure value measured by the vacuum gauge 2122 cannot reach the preset ideal value, it means that the furnace tube 101 and the furnace door 1021 have poor sealing and there is a gas leak. The process gas entering the furnace tube 101 is toxic. This helps to avoid gas leak accidents and improve process safety.

[0073] In some embodiments, the condensation connection pipe 203 is provided with a first connection point 2031 and a second connection point 2032. The first connection point 2031 and the second connection point 2032 are located between the upper and lower ends of the condensation connection pipe 203, and the second connection point 2032 is higher than the first connection point 2031. The second end of the first transfer pipe 202 is connected to the first connection point 2031, and the first end of the pressure measuring pipe 212 is connected to the second connection point 2032.

[0074] For example, the condenser connection pipe 203 is provided with a first connector at the first connection point 2031 and a second connector at the second connection point 2032. Both the first connector and the second connector are T-type connectors. The second end of the first adapter pipe 202 is connected to the first connector, and the first end of the pressure testing pipe 212 is connected to the second connector.

[0075] As is understandable, the condenser connection pipe 203, acting as a vertical fluid manifold, is longitudinally connected in series with the first condenser pipe 2041 and the second condenser pipe 2042. It also features a first connection point 2031 and a second connection point 2032, which are respectively connected to the first transfer pipe 202 and the pressure testing pipe 212 via T-joints. In this way, the condenser connection pipe 203 can accommodate various pipe interfaces of different specifications without altering its pipe diameter. This solves the problem of large-diameter condenser pipes being difficult to directly connect to smaller-diameter pipes or require T-joints. Furthermore, the use of T-joints makes pipe connections more precise and reduces the risk of gas and acidic liquid leakage.

[0076] In some embodiments, the second main pipeline 206 includes a first branch pipe 2061 and a second branch pipe 2062. The extension direction of the first branch pipe 2061 is parallel to the horizontal direction, and the extension direction of the second branch pipe 2062 is parallel to the vertical direction. The first end of the first branch pipe 2061 is connected to the upper end of the second condenser pipeline 2042, the second end of the first branch pipe 2061 is connected to the upper end of the second branch pipe 2062, and the lower end of the second branch pipe 2062 is connected to the diaphragm pump mechanism 207.

[0077] Understandably, the second main pipeline 206 connects to the upper end of the second condenser pipeline 2042, which ensures that the uncondensed gas in the second condenser pipeline 2042 can be discharged smoothly, while the condensed liquid settles downward under the action of gravity, reducing the accumulation of acidic liquid in the subsequent pipeline.

[0078] In some embodiments, the lower end of the second branch pipe 2062 is provided with a transfer valve 2063 and a third transfer pipe 213. The first end of the third transfer pipe 213 is connected to the lower end of the second branch pipe 2062, and the second end of the third transfer pipe 213 is connected to the suction port of the diaphragm pump mechanism 207.

[0079] By adjusting the opening of the transfer valve 2063, the ventilation efficiency between the second branch pipe 2062 and the diaphragm pump mechanism 207 can be adjusted. On the one hand, this can help control the rate of pressure change. On the other hand, when it is necessary to repair or maintain the diaphragm pump mechanism 207, the transfer valve 2063 can be closed to cut off the air path, allowing equipment maintenance to be carried out safely.

[0080] In some embodiments, the third transfer pipe 213 is a flexible hose, and the third transfer pipe 213 is generally flexible.

[0081] Understandably, during actual installation, it is difficult to achieve precise alignment between the interface position of the diaphragm pump mechanism 207 and the interface position of the second branch pipe 2062. The flexibility of the third transfer pipe 213 can compensate for the spatial deviation, making the installation more convenient.

[0082] In some embodiments, the second end of the second connecting pipe 208 is lower than the first end of the second connecting pipe 208. The second condensing mechanism 209 is provided with a connection port. Vertically, the outlet of the diaphragm pump mechanism 207 is higher than the connection port of the second condensing mechanism 209. The second connecting pipe 208 has a flexible hose structure and is generally bendable. The first end of the second connecting pipe 208 connects to the outlet of the higher diaphragm pump mechanism 207, and the second end connects to the connection port of the lower second condensing mechanism 209.

[0083] Thus, the second transfer pipe 208 has a drop direction with a high inlet and a low outlet, which can use gravity to allow any condensate that may be present in the pipe to flow naturally to the second condensation mechanism 209, blocking the backflow of condensate from the second condensation mechanism 209 to the diaphragm pump mechanism 207. This avoids the risk of liquid accumulation in the diaphragm pump or absolute pressure diaphragm gauge due to liquid backflow and extends the service life of the diaphragm pump mechanism 207.

[0084] Furthermore, the diaphragm pump mechanism 207 will generate mechanical vibration during operation. The second transfer pipe 208 and the third transfer pipe 213 can isolate the diaphragm pump mechanism 207 from the rigid pipe structures on both sides, and use the flexibility of the hose to absorb the vibration, reducing the risk of pipe joints becoming loose or pipes being damaged due to vibration transmission.

[0085] In some embodiments, the exhaust module 20 further includes a third acid discharge mechanism 214 and a pressure detector 215. The pressure detector 215 is connected to the second condensation mechanism 209. The second condensation mechanism 209 includes a third condensation pipe 2091 and a fourth condensation pipe 2092, which are arranged side by side.

[0086] The second transfer pipe 208 connects to the third condenser pipe 2091. The upper end of the third condenser pipe 2091 is connected to the upper end of the fourth condenser pipe 2092. The upper end of the third condenser pipe 2091 connects to the second acid discharge mechanism 210, and the fourth condenser pipe 2092 connects to the third acid discharge mechanism 214. The exhaust gas treatment mechanism 211 connects to the upper end and / or lower end of the fourth condenser pipe 2092.

[0087] For example, a first adapter 2093 and a second adapter 2094 are provided on one side of the third condenser pipe 2091, located between the upper and lower ends of the third condenser pipe 2091. The first adapter 2093 is connected to the second end of the second adapter pipe 208, and the second adapter 2094 is connected to the air intake module 30. A pressure detector 215 is provided on the third condenser pipe 2091. A second acid discharge valve 2095 is provided between the lower end of the third condenser pipe 2091 and the second acid discharge mechanism 210, and a third acid discharge valve 2096 is provided between the lower end of the fourth condenser pipe 2092 and the third acid discharge mechanism 214.

[0088] The exhaust gas treatment mechanism 211 is used to generate negative pressure inside the third condenser pipe 2091 and the fourth condenser pipe 2092, and the pressure detector 215 is used to detect the internal pressure of the third condenser pipe 2091 to determine the working status of the exhaust gas treatment mechanism 211.

[0089] Under negative pressure, the waste gas containing acidic vapor is introduced into the third condenser pipe 2091 from the first adapter 2093 and the second adapter 2094. The third condenser pipe 2091 condenses part of the gas and guides the condensed liquid acid to settle naturally under gravity and gather at the bottom, and then flows into the second acid discharge mechanism 210 for discharge.

[0090] Another portion of the gas in the third condensing pipe 2091 enters the fourth condensing pipe 2092 from its upper end. The fourth condensing pipe 2092 condenses part of the gas and guides the condensed liquid acid to settle naturally under gravity and collect at the bottom, then flows into the third acid discharge mechanism 214 for discharge. After two stages of condensation by the third condensing pipe 2091 and the fourth condensing pipe 2092, the remaining gas is extracted and treated by the exhaust gas treatment mechanism 211.

[0091] In some embodiments, the exhaust gas treatment mechanism 211 includes a first exhaust fan 2111 and a second exhaust fan 2112. The upper end of the fourth condensate pipe 2092 is connected to a first discharge pipe 216, and the first exhaust fan 2111 is located at the upper end of the first discharge pipe 216. The lower end of the fourth condensate pipe 2092 is connected to a second discharge pipe 217, and a third acid discharge mechanism 214 is located at the lower end of the second discharge pipe 217. An exhaust branch pipe 2171 is connected to the middle of the second discharge pipe 217, and the second exhaust fan 2112 is located on the exhaust branch pipe 2171. The position of the second exhaust fan 2112 is higher than the position of the exhaust branch pipe 2171.

[0092] In practical operation, the first exhaust fan 2111 and the second exhaust fan 2112 can be operated individually or in combination, activated according to actual needs, while avoiding damage to a single exhaust fan that could affect exhaust operation. The first exhaust fan 2111 and / or the second exhaust fan 2112 can create a slight negative pressure between the third condenser pipe 2091, the fourth condenser pipe 2092, the first discharge pipe 216, and the second discharge pipe 217. This slight negative pressure is configured to primarily remove gas, while most of the liquid still settles downwards under gravity.

[0093] It is understandable that by utilizing the design of the first discharge pipe 216, the distance between the first exhaust fan 2111 and the fourth condenser pipe 2092 can be extended, so that the first exhaust fan 2111 is raised relative to the fourth condenser pipe 2092, thus preventing liquid in the fourth condenser pipe 2092 from flowing into the first exhaust fan 2111 and affecting the exhaust operation.

[0094] Furthermore, by utilizing the fact that the second exhaust fan 2112 is positioned higher than the exhaust branch pipe 2171, the liquid in the second discharge pipe 217 is allowed to settle downwards by gravity, thus preventing the liquid in the second discharge pipe 217 from flowing into the second exhaust fan 2112 and affecting the exhaust operation.

[0095] It is worth noting that the exhaust module 20 provided in this application is equipped with a variety of valves, including a first acid drain valve 2052 located at the lower end of the first condensing pipe 2041, a transfer valve 2063 located at the lower end of the second branch pipe 2062, a second acid drain valve 2095 located at the lower end of the third condensing pipe 2091, and a third acid drain valve 2096 located at the lower end of the fourth condensing pipe 2092. These valves can be opened when the exhaust module 20 is in operation and closed when the exhaust module 20 is not in operation. The exhaust module 20 is not in operation when: process gas needs to be introduced into the furnace tube 101 of the diffusion furnace until it has not been heated to the required reaction temperature, and when the exhaust process ends. Because opening these valves indirectly connects the furnace tube 101 to the outside, it is not conducive to maintaining the cleanliness of the furnace tube 101. By closing the valves in a timely manner, external gas impurities are prevented from entering the furnace tube 101 through the exhaust module 20, thus maintaining the sealing and cleanliness of the furnace tube 101.

[0096] In some embodiments, the intake module 30 includes a first air supply line 301, a second air supply line 302, a third air supply line 303, a dilution air supply line 304, a precursor device 305, a first intake branch 306, a second intake branch 307, a precursor exhaust branch 308, and an ignition device 309.

[0097] The first gas supply line 301 is used to connect to the first gas source 401, the second gas supply line 302 is used to connect to the second gas source 402, the third gas supply line 303 is used to connect to the third gas source 403, and the dilution gas supply line 304 is used to connect to the dilution gas source 404.

[0098] The first gas source 401, the second gas source 402, the third gas source 403, and the dilution gas source 404 can be the same gas or different gases, arranged according to different process requirements. For example, in a purging process, the first gas source 401, the second gas source 402, the third gas source 403, and the dilution gas source 404 can all be nitrogen sources. Nitrogen is used to purge the inlet module 30, the oxidizer 10, and the exhaust module 20 to remove residual gaseous impurities from the previous process in preparation for the new process. For example, the first gas source 401 can be an Ar gas source or an N2 gas source; the second gas source 402 can be an H2 gas source or an N2 gas source; the third gas source 403 can be an O2 gas source, an Ar gas source, an N2O gas source, a NO gas source, or an N2 gas source; and the dilution gas source 404 can be an N2 gas source.

[0099] The precursor device 305 is a DCE (dichloroethylene) system, used to store, transport, and precisely control the entry of specific precursor materials (such as DCE, dichloroethylene) into the oxidation furnace 10. The precursor device 305 has an inlet end and an outlet end. The first gas source 401 is connected to the inlet end of the precursor device 305 through the first gas supply pipe 301 and the first inlet branch 306. The outlet end of the precursor device 305 is connected to the ignition device 309 through the second inlet branch 307. The outlet end of the precursor device 305 is also connected to the exhaust module 20 through the precursor exhaust branch 308.

[0100] During the process delivery stage, the first gas source 401 is turned on, and gas is output through the first gas supply pipeline 301 and the first gas inlet branch 306. The gas flows through the DCE source bottle of the precursor device 305, carries the precursor molecules into the ignition device 309, and is finally sent into the oxidation furnace 10 to participate in the reaction.

[0101] During the process preparation stage, the exhaust module 20 can generate negative pressure to extract the air, water vapor and other impurities that are originally present inside the precursor device 305 through the precursor exhaust branch 308, ensuring that the system is in a high-purity vacuum state and preventing the precursor from oxidizing or hydrolyzing.

[0102] During the DCE in-situ cleaning stage, the first gas source 401 is turned on, and gas is output through the first gas supply line 301 and the first gas inlet branch 306. The gas flows through the precursor device 305 and carries the DCE into the furnace tube 101 of the oxidation furnace 10, thereby corroding and peeling off the deposits on the inner wall of the furnace tube 101. During this period, the exhaust module 20 works to ensure the gas flow in the furnace tube 101 and to extract gas by-products for harmless treatment.

[0103] The ignition device 309 is used to process the gas through combustion. Located outside the oxidizer 10, the ignition device 309 can complete ignition and combustion before the gas enters the oxidizer 10, supporting external ignition mode and thus having a wider range of process applications. The ignition device 309 has a first inlet 3091 and a second inlet 3092 at its inlet end, and a dilution inlet 3093 and an ignition inlet pipe 310 at its outlet end.

[0104] The second gas supply line 302 and the third gas supply line 303 are both connected to the first gas inlet 3091. The second gas supply line 302 is connected to the second gas inlet 3092. The dilution gas supply line 304 is connected to the dilution gas inlet 3093. The dilution gas inlet 3093 is connected to the ignition gas inlet line 310, and the ignition gas inlet line 310 is connected to the gas inlet pipe 1011 of the oxidizer 10.

[0105] It is understood that the gas from the first gas source 401 can pass through the precursor device 305 and then enter the ignition device 309 through the first air inlet 3091 to complete ignition and combustion, and then enter the oxidizer 10 through the ignition air inlet pipe 310. The gas from the second gas source 402 can enter the ignition device 309 through the second air inlet 3092 to complete ignition and combustion, and then enter the oxidizer 10 through the ignition air inlet pipe 310. The gas from the third gas source 403 can enter the ignition device 309 through the first air inlet 3091 to complete ignition and combustion, and then enter the oxidizer 10 through the ignition air inlet pipe 310. The gas from the dilution gas source 404 can enter the ignition air inlet pipe 310 through the dilution air inlet 3093, and the concentration of the gas flowing out of the ignition device 309 is controlled by dilution. The dilution gas supply line 304 is equipped with a dilution check valve 3041 and a dilution switch valve 3042. The dilution check valve 3041 only allows the gas in the dilution gas supply line 304 to flow to the ignition device 309, and the dilution switch valve 3042 is used to control the gas flow between the dilution gas supply line 304 and the ignition device 309.

[0106] In some embodiments, the intake module 30 further includes a first exhaust branch 311, a second exhaust branch 312, and a transition exhaust branch 313.

[0107] The first intake branch 306 extends parallel to the vertical direction and is equipped with an intake point 3061, a first outlet point 3062, a second outlet point 3063, a third outlet point 3064, a first switching valve 3065, and a first intake check valve 3066. The intake point 3061 of the first intake branch 306 is located at the upper end and is connected to the first air supply line 301. The first outlet point 3062 of the first intake branch 306 is located at the lower end and is connected to the intake end of the front drive unit 305.

[0108] The first exhaust point 3062 is used to supply gas to the precursor device 305. The second exhaust point 3063 and the third exhaust point 3064 are used to output gas to the precursor exhaust branch 308. Specifically, the first exhaust branch 311 is connected to the second exhaust point 3063, and the second exhaust branch 312 is connected to the third exhaust point 3064. The first intake check valve 3066 only allows gas to flow from the third exhaust point 3064 of the first intake branch 306 to the first exhaust point 3062. The first switching valve 3065 is used to control the opening and closing of the gas passage between the first intake branch 306 and the precursor device 305.

[0109] When the first switching valve 3065 is closed, the gas passes through the first gas supply line 301, the first gas inlet branch 306, the first gas exhaust branch 311, the precursor exhaust branch 308, and the second condensation mechanism 209 in sequence.

[0110] For example, the second air outlet 3063, the third air outlet 3064, the first switching valve 3065, the first intake check valve 3066, and the first air outlet 3062 are distributed from top to bottom. Specifically, the second air outlet 3063 of the first intake branch 306 is located below the intake point 3061, the third air outlet 3064 of the first intake branch 306 is located below the second air outlet 3063, the first switching valve 3065 is located between the first air outlet 3062 and the third air outlet 3064, and the first intake check valve 3066 is located between the first switching valve 3065 and the first air outlet 3062.

[0111] The second intake branch 307 is arranged parallel to and spaced apart from the first intake branch 306, with the extension direction of the second intake branch 307 parallel to the vertical direction. The first end of the second intake branch 307 is connected to the outlet end of the precursor device 305, and the second end is connected to the intake end of the ignition device 309. Specifically, the first end of the second intake branch 307 is its lower end, and the second end is its upper end. The second end of the second intake branch 307 is connected to a third air supply pipe 303, which in turn connects to the first air inlet 3091 of the ignition device 309.

[0112] The second intake branch 307 is equipped with a third switching valve 3071, a fourth switching valve 3072, a transition point 3073, and a second intake check valve 3074. Among them, the second intake check valve 3074 only allows gas to flow from the first end to the second end of the second intake branch 307.

[0113] The transition point 3073 is used to connect the front drive exhaust branch 308 through the transition exhaust branch 313. The third switch valve 3071 is used to control the air passage between the front drive device 305 and the transition point 3073, and the fourth switch valve 3072 is used to control the air passage between the transition point 3073 and the second end of the second intake branch 307.

[0114] For example, the second intake check valve 3074, the fourth switching valve 3072, the transition point 3073, and the third switching valve 3071 are distributed from top to bottom. Specifically, the transition point 3073 is located between the third switching valve 3071 and the fourth switching valve 3072, the third switching valve 3071 is located below the transition point 3073, and the fourth switching valve 3072 is located above the transition point 3073.

[0115] The exhaust branch 308 and the first intake branch 306 are arranged side-by-side with intervals, and the extension direction of the exhaust branch 308 is parallel to the vertical direction. The exhaust branch 308 is provided with an exhaust outlet 3081, a first inlet 3082, a second inlet 3083, a third inlet 3084, a fifth switching valve 3085, and an exhaust check valve 3086. The exhaust outlet 3081 of the exhaust branch 308 is connected to the second condenser mechanism 209. Specifically, the exhaust outlet 3081 is connected to the second adapter 2094 of the third condenser pipe 2091.

[0116] The first access point 3082 is used to connect to the second outlet point 3063 of the first intake branch 306 via the first exhaust branch 311. The exhaust check valve 3086 only allows gas to flow from the third access point 3084 to the first access point 3082. The third access point 3084 is used to connect to the transition point 3073 of the second intake branch 307 via the transition exhaust branch 313.

[0117] The second access point 3083 is used to connect to the third outlet point 3064 of the first intake branch 306 via the second exhaust branch 312. The fifth switch valve 3085 is used to control the gas flow between the first access point 3082 and the third access point 3084. When the first switch valve 3065 is open, the second switch valve 3121 is closed, the third switch valve 3071 is open, the fourth switch valve 3072 is closed, and the fifth switch valve 3085 is open, the gas passes sequentially through the first gas supply line 301, the first intake branch 306, the precursor device 305, the second intake branch 307, the transfer exhaust branch 313, the precursor exhaust branch 308, and the second condensation mechanism 209.

[0118] For example, the exhaust outlet point 3081, the first access point 3082, the exhaust check valve 3086, the fifth switching valve 3085, the third access point 3084, and the second access point 3083 are distributed from top to bottom. Specifically, the first access point 3082 is located between the second access point 3083 and the exhaust outlet point 3081, the fifth switching valve 3085 is located between the first access point 3082 and the third access point 3084, and the third access point 3084 is located between the fifth switching valve 3085 and the second access point 3083.

[0119] The first exhaust branch 311 connects the first intake branch 306 and the front exhaust branch 308, and is equipped with a first one-way valve 3111. The first end of the first exhaust branch 311 is connected to the second outlet point 3063 of the first intake branch 306, and the second end of the first exhaust branch 311 is connected to the first inlet point 3082 of the front exhaust branch 308. The first one-way valve 3111 only allows airflow from the second outlet point 3063 to the first inlet point 3082, and is configured to open when the air pressure inside the first exhaust branch 311 reaches a preset value.

[0120] The second exhaust branch 312 connects the first intake branch 306 and the front exhaust branch 308, and is distributed side-by-side with the first exhaust branch 311 at intervals. The second exhaust branch 312 is equipped with a second switching valve 3121 and a second check valve 3122. The first end of the second exhaust branch 312 is connected to the third outlet point 3064 of the first air supply line 301, and the second end of the second exhaust branch 312 is connected to the second inlet point 3083 of the front exhaust branch 308.

[0121] The second one-way valve 3122 only allows airflow from the third outlet 3064 to the second inlet 3083, and the second one-way valve 3122 is configured to open when the air pressure inside the second exhaust branch 312 reaches a preset value.

[0122] The preset pressure value for opening the first check valve 3111 is configured to be greater than the preset pressure value for opening the second check valve 3122, and the preset pressure value for opening the second check valve 3122 is configured to be less than or equal to the maximum pressure value that the precursor device 305 can withstand.

[0123] The second switching valve 3121 is used to control the opening and closing of the gas path between the third gas outlet 3064 and the second access point 3083. When the second switching valve 3121 is opened, the gas passes through the first gas supply line 301, the first gas inlet branch 306, the second gas exhaust branch 312, the precursor exhaust branch 308, and the second condensing mechanism 209 in sequence.

[0124] The transition exhaust branch 313 is located between the second exhaust branch 312 and the first exhaust branch 311, and is connected between the second intake branch 307 and the front exhaust branch 308. The first end of the transition exhaust branch 313 is connected to the transition point 3073, and the second end of the transition exhaust branch 313 is connected to the third access point 3084.

[0125] The following describes the various operating states of the intake module 30. Some of these operating states can be executed simultaneously.

[0126] In the first working state (e.g.) Figure 5 As shown), the first switch valve 3065 is open, the second switch valve 3121 is closed, the third switch valve 3071 is open, and the fourth switch valve 3072 is open. The gas from the first gas supply line 301 passes through the first gas inlet branch 306 and the precursor device 305 in sequence, and carries the DCE through the second gas inlet branch 307 and the third gas supply line 303 in sequence, and enters the first gas inlet 3091 of the ignition device 309. After the ignition device 309 completes ignition and combustion, it enters the oxidizer 10.

[0127] In the second working state (e.g.) Figure 6 As shown), in the first working state, when the pressure value of the first exhaust branch 311 reaches the preset pressure value for opening the first one-way valve 3111, the first one-way valve 3111 opens, and the gas can enter the first exhaust branch 311 from the second exhaust point 3063, and enter the precursor exhaust branch 308 through the first access point 3082, and finally be discharged to the third condenser pipe 2091, thereby preventing the DCE source bottle of the precursor device 305 from being exploded by high pressure impact.

[0128] In the third working state (such as) Figure 7As shown), the gas from the first gas source 401 does not need to enter the precursor device 305, and when the pressure value of the second exhaust branch 312 is relatively low but reaches the preset pressure value for opening the second one-way valve 3122, the first switch valve 3065 closes, the second switch valve 3121 opens, and the fifth switch valve 3085 opens. The gas from the first gas supply pipeline 301 passes sequentially through the first intake branch 306, the third outlet point 3064, the second exhaust branch 312, the second access point 3083, the precursor exhaust branch 308, and the third condenser pipeline 2091, so that the gas from the first gas source 401 can quickly flow to the exhaust gas treatment mechanism 211 for treatment.

[0129] In the fourth working state (such as) Figure 8 As shown), the first switch valve 3065 is open, the second switch valve 3121 is closed, the third switch valve 3071 is open, the fourth switch valve 3072 is closed, and the fifth switch valve 3085 is open. The gas from the first gas supply line 301 passes through the first intake branch 306 and the precursor device 305 in sequence, and carries the DCE through the second intake branch 307, the transfer point 3073, the third access point 3084, the precursor exhaust branch 308, and the third condenser line 2091 in sequence. Finally, the gas can be treated by the exhaust gas treatment mechanism 211, and the DCE is discharged to the third condenser line 2091 and the fourth condenser line 2092 for condensation, deposition, and acid removal.

[0130] This application also provides a heat treatment apparatus.

[0131] like Figures 1 to 4 As shown, the heat treatment equipment includes an oxidizing furnace 10 and a gas path system. The oxidizing furnace 10 has an inlet pipe 1011 and an exhaust pipe 1012. The gas path system includes an inlet module 30 and an exhaust module 20. The inlet module 30 is connected to the inlet pipe 1011 of the oxidizing furnace 10, and the exhaust module 20 is connected to the exhaust pipe 1012 of the oxidizing furnace 10.

[0132] For example, the oxidation furnace 10 includes a furnace tube 101, a loading chamber 102, and a furnace shell 103. The furnace tube 101 is a pure CVD-SiC (chemical vapor deposition silicon carbide) furnace tube, which is directly grown from pure process gas using a chemical vapor deposition process. It has a single-tube structure, a dense crystal structure, and excellent high-temperature stability. The furnace tube 101 is provided with an inlet pipe 1011 and an exhaust pipe 1012. The inlet pipe 1011 is connected to an inlet module 30, which is connected to an external gas source to introduce gas into the furnace tube 101 to participate in the oxidation reaction. The exhaust pipe 1012 is connected to an exhaust module 20 to discharge the reaction exhaust gas and by-products to the exhaust module 20 for treatment.

[0133] The heat treatment equipment provided in this application achieves high process stability, long equipment life and multi-purpose compatibility through design optimization of the exhaust module 20 and the intake module 30.

[0134] Specifically, the exhaust module 20 utilizes a diaphragm pump and pipeline drop design to ensure precise pressure control and rapid product discharge during oxidation and DCE processes, while effectively preventing acidic condensate from damaging the pump body. Furthermore, the exhaust module 20 is equipped with a vertically arranged pressure measuring pipeline 212 with nitrogen purging and multiple vacuum gauges 2122 for comparison, achieving corrosion protection and data self-checking, ensuring monitoring accuracy. The intake module 30 features a flexible branch structure, supporting diverse intake and exhaust processes and operating states, improving the equipment's adaptability to different process flows and its overall utilization rate.

[0135] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. A gas path system, characterized in that, Includes an exhaust module, the exhaust module comprising: The first main pipeline is used to connect to the exhaust pipe of the oxidation furnace; The first transfer pipeline, the first end of the first transfer pipeline is connected to the first main pipeline; A condenser connection pipe is connected to the second end of the first transfer pipe; The first condensation mechanism is connected to the condensation connection pipeline; The first acid removal mechanism is connected to the lower end of the first condensation mechanism; The second main pipeline has its first end connected to the upper end of the first condensation mechanism; A diaphragm pump mechanism, wherein the second end of the second main pipeline is connected to the suction port of the diaphragm pump mechanism; The second transfer pipe, the first end of which is connected to the outlet of the diaphragm pump mechanism; The second condensation mechanism is connected to the second end of the second transfer pipe, and the second end of the second transfer pipe is lower than the first end of the second transfer pipe; The second acid discharge mechanism is connected to the lower end of the second condensation mechanism; The exhaust gas treatment mechanism is connected to the second condensation mechanism.

2. The gas path system according to claim 1, characterized in that, The first end of the first transfer pipe is higher than the second end of the first transfer pipe.

3. The gas path system according to claim 1, characterized in that, The first condensation mechanism includes a first condensation pipe and a second condensation pipe. The upper end of the first condensation pipe is connected to the lower end of the condensation connection pipe, and the lower end of the first condensation pipe is connected to the first acid discharge mechanism. The lower end of the second condenser pipe is connected to the upper end of the condenser connection pipe, and the upper end of the second condenser pipe is connected to the first end of the second main pipe.

4. The gas path system according to claim 3, characterized in that, The first acid removal mechanism is equipped with a negative pressure generator, which is connected to the lower end of the first condenser pipe.

5. The gas path system according to claim 2, characterized in that, The exhaust module also includes: A pressure testing pipeline, the first end of which is connected to the condenser connection pipeline; A gas purging mechanism is connected to the second end of the pressure measuring pipeline and is used to purge inert gas into the pressure measuring pipeline; A pressure detection mechanism is installed in the pressure testing pipeline.

6. The gas path system according to claim 5, characterized in that, The pressure testing pipeline is provided with a longitudinal pipe section, the extension direction of which forms an angle with the horizontal direction, and the pressure detection mechanism is located in the longitudinal pipe section.

7. The gas path system according to claim 6, characterized in that, The pressure detection mechanism includes multiple vacuum gauges, which are spaced apart along the extension direction of the longitudinal pipe section.

8. The gas path system according to claim 5, characterized in that, The condensation connection pipeline is provided with a first connection point and a second connection point. The first connection point is connected to the first transfer pipeline, and the second connection point is connected to the pressure measuring pipeline. The second connection point is higher than the first connection point.

9. The gas path system according to claim 1, characterized in that, The exhaust module also includes a third acid removal mechanism; The second condensation mechanism includes a third condensation pipe and a fourth condensation pipe, which are arranged in parallel. A second transfer pipe is connected to the third condensation pipe. The upper ends of the third condensation pipe and the fourth condensation pipe are connected. The upper end of the third condensation pipe is connected to the second acid discharge mechanism. The fourth condensation pipe is connected to the third acid discharge mechanism. The exhaust gas treatment mechanism is connected to the upper end and / or the lower end of the fourth condensation pipe.

10. The gas path system according to claim 9, characterized in that, The exhaust module also includes a pressure detector, which is located in the third condenser pipe.

11. The gas path system according to any one of claims 1 to 10, characterized in that, The air circuit system further includes an air intake module, which includes: The first gas supply line is used to connect to the first gas source; The first air intake branch is provided with an air intake point and a first air outlet point, and the air intake point of the first air intake branch is connected to the first air supply pipeline. A precursor device, wherein the first outlet point of the first intake branch is connected to the intake end of the precursor device; The second intake branch, the first end of the second intake branch is connected to the air outlet of the precursor device; An ignition device, wherein the second end of the second air intake branch is connected to the air intake end of the ignition device, and the air outlet end of the ignition device is used to connect to the air intake pipe of the oxidation furnace.

12. The gas path system according to claim 11, characterized in that, The first air intake branch is also provided with a second air outlet, and a first switching valve is provided between the second air outlet and the first air outlet; The air intake module also includes: The first exhaust branch, the first end of the first exhaust branch is connected to the second exhaust point of the first intake branch; The precursor exhaust branch is provided with a first access point and an exhaust output point. The first access point of the precursor exhaust branch is connected to the second end of the first exhaust branch, and the exhaust output point of the precursor exhaust branch is connected to the second condensation mechanism. When the first switch valve is closed, the gas passes sequentially through the first gas supply line, the first gas inlet branch, the first gas exhaust branch, the precursor exhaust branch, and the second condensation mechanism.

13. The gas path system according to claim 12, characterized in that, The first intake branch is also provided with a third exhaust point, and the first switch valve is located between the third exhaust point and the first exhaust point; the front exhaust branch is also provided with a second access point, and the first access point is located between the second access point and the exhaust output point. The air intake module also includes: The second exhaust branch is distributed parallel to the first exhaust branch at intervals and is equipped with a second switching valve; the first end of the second exhaust branch is connected to the third outlet point of the first air supply pipeline, and the second end of the second exhaust branch is connected to the second access point of the precursor exhaust branch. When the second switch valve is opened, the gas passes through the first gas supply line, the first gas inlet branch, the second gas exhaust branch, the precursor exhaust branch, and the second condensation mechanism in sequence.

14. The gas path system according to claim 13, characterized in that, The first exhaust branch is equipped with a first check valve, and the second exhaust branch is equipped with a second check valve; The preset pressure value for opening the first check valve is configured to be greater than the preset pressure value for opening the second check valve, and the preset pressure value for opening the second check valve is configured to be less than or equal to the maximum pressure value that the precursor device can withstand.

15. The gas path system according to claim 13, characterized in that, The second intake branch is provided with a transition point, a third switching valve and a fourth switching valve, wherein the transition point is located between the third switching valve and the fourth switching valve; The exhaust branch of the front drive unit is also provided with a third access point and a fifth switching valve. The third access point is located between the first access point and the second access point, and the fifth switching valve is located between the first access point and the third access point. The intake module also includes a transition exhaust branch, the two ends of which are respectively connected to the transition point and the third access point; When the first switch valve is open, the second switch valve is closed, the third switch valve is open, the fourth switch valve is closed, and the fifth switch valve is open, the gas passes sequentially through the first gas supply pipeline, the first gas inlet branch, the precursor device, the second gas inlet branch, the transfer exhaust branch, the precursor exhaust branch, and the second condensation mechanism.

16. The gas path system according to claim 13, characterized in that, The ignition device is provided with a dilution air inlet at its outlet end. The air intake module also includes a dilution air supply pipeline, the first end of which is used to connect to a dilution gas source, and the second end of which is connected to the dilution air inlet.

17. The gas path system according to claim 13, characterized in that, The ignition device is provided with a first air inlet and a second air inlet at its air inlet end, and the second end of the second air inlet branch is connected to the first air inlet. The air intake module also includes: The second gas supply line is used to connect to the second gas source and to the second air inlet; The third gas supply line is used to connect to the third gas source and is connected to the first gas inlet.

18. A heat treatment apparatus, characterized in that, It includes an oxidation furnace and a gas path system as described in any one of claims 1 to 17; the gas path system includes an air intake module and an exhaust module, the air intake module being connected to the air intake pipe of the oxidation furnace, and the exhaust module being connected to the exhaust pipe of the oxidation furnace.

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