Mask plate, Evaporation system

Abstract

This application discloses a photomask and a vapor deposition system. The photomask includes a photomask frame, a first photomask layer, and a second photomask layer. The photomask frame has a cutout area. The first photomask layer includes multiple first photomask strips that span the cutout area. The second photomask layer is stacked on top of the first photomask layer. The second photomask layer includes multiple second photomask strips that span the cutout area. The second photomask strips intersect with the first photomask strips. The second photomask strips and the first photomask strips are independent of each other. The area formed by two adjacent first photomask strips and two adjacent second photomask strips is defined as a vapor deposition area. Multiple first photomask strips and multiple second photomask strips cooperate to form multiple vapor deposition areas. The outline shape of the vapor deposition area is configured to be the same as the outline of the display panel to be vapor deposited. With the above configuration, the first photomask strips and / or the second photomask strips can be replaced according to the needs of different display panels to be vapor deposited, which is beneficial to improving the utilization rate of materials.

Description

Technical Field

[0001] This application relates to the field of manufacturing, specifically to a photomask and a vapor deposition system. Background Technology

[0002] The fabrication process of display devices includes a vapor deposition process. Vapor deposition typically requires the use of a photomask. However, existing photomask products can only be used for vapor deposition on one type of display panel, resulting in low material utilization. Summary of the Invention

[0003] The photomask and vapor deposition system provided in this application are intended to improve material utilization and reduce costs.

[0004] To solve the aforementioned technical problems, the first technical solution provided in this application is as follows: a mask plate is provided, including a mask frame, a first mask layer, and a second mask layer; the mask frame is a ring structure, and the mask frame forms a hollow area; the first mask layer includes a plurality of first mask strips, which are spaced apart; the first mask strips extend in a straight line; the first mask strips cross the hollow area; the second mask layer is stacked with the first mask layer; the second mask layer includes a plurality of second mask strips, which are spaced apart; the second mask strips extend in a straight line; the second mask strips cross the hollow area; the second mask strips intersect with the first mask strips; the second mask strips and the first mask strips are independent of each other; wherein, the area formed by two adjacent first mask strips and two adjacent second mask strips is defined as a vapor deposition area; the plurality of first mask strips and the plurality of second mask strips form a plurality of vapor deposition areas; the outline shape of the vapor deposition area is configured to be the same as the outline of the display panel to be vapor deposited.

[0005] In one embodiment, the plurality of vapor deposition regions include a plurality of first vapor deposition regions and a plurality of second vapor deposition regions, wherein the first vapor deposition regions and the second vapor deposition regions have different area sizes and / or different outline shapes.

[0006] In one embodiment, the first mask strip includes a first body and a first protrusion. The first body spans the hollow area, and the first protrusion is disposed on the surface of the first body facing the vapor deposition area. The side of the first protrusion facing the vapor deposition area is curved. The side of the first protrusion facing the vapor deposition area is smoothly connected to the surface of the first body facing the vapor deposition area. The intersection of the second mask strip and the first mask strip is adjacent to the first protrusion. The side of the first protrusion facing the vapor deposition area is smoothly connected to the surface of the second mask strip facing the vapor deposition area.

[0007] In one embodiment, the side of the first protrusion facing the vapor deposition area is a concave arc surface, and the surface of the second mask strip facing the vapor deposition area is a plane, so that two adjacent first mask strips and two adjacent second mask strips cooperate to form a vapor deposition area with a rounded rectangular outline.

[0008] Optionally, the multiple first mask strips are not equally spaced; and / or, the multiple second mask strips are not equally spaced; and / or, the curved angles of the multiple first bumps facing the vapor deposition area are different.

[0009] In one embodiment, the first protrusion includes a first side surface and a second side surface disposed opposite to each other. Both the first side surface and the second side surface are concave arc surfaces, and the curvature angle of the arc surface of the first side surface is different from that of the arc surface of the second side surface. The second mask strip includes a second body and a second protrusion. The second body spans the hollow area, and the second protrusion is disposed on the surface of the second body near the first side surface. The second protrusion is offset from the first mask strip. The surface of the second protrusion facing away from the second body is a concave arc surface, and the surface of the second protrusion facing away from the second body is smoothly connected to the first side surface. The surface of the second body near the second side surface is a plane, and the surface of the second body near the second side surface is smoothly connected to the second side surface, so that the multiple vapor deposition areas formed by two adjacent first mask strips and multiple second mask strips are alternately arranged as rounded rectangular vapor deposition areas and circular or elliptical vapor deposition areas.

[0010] Optionally, the multiple first mask strips are not equally spaced; and / or, the multiple second mask strips are not equally spaced; and / or, the arc bending angles of the first sides of the multiple first protrusions are different; and / or, the arc bending angles of the second sides of the multiple first protrusions are different; and / or, the arc bending angles of the surfaces of the multiple second protrusions facing away from the second body are different.

[0011] In one embodiment, the second mask strip includes a second body and a second protrusion. The second body spans the hollow area, and the second protrusion is disposed on the surface of the second body facing the vapor deposition area. The second protrusion is offset from the first mask strip. The surface of the second protrusion facing away from the second body is the surface of the second mask strip facing the vapor deposition area. The side of the first protrusion facing the vapor deposition area is a concave arc surface, and the surface of the second protrusion facing away from the second body is a concave arc surface. The side of the first protrusion facing the vapor deposition area and the surface of the second protrusion facing away from the second body are smoothly connected, so that the outline of the vapor deposition area formed by the cooperation of two adjacent first mask strips and two adjacent second mask strips is either circular or elliptical.

[0012] Optionally, the multiple first mask strips are not equally spaced; and / or, the multiple second mask strips are not equally spaced; and / or, the arc bending angles of the multiple first protrusions facing the vapor deposition area are different; and / or, the arc bending angles of the multiple second protrusions facing away from the surface of the second body are different.

[0013] In one embodiment, both the first mask strip and the second mask strip are connected to the mask frame;

[0014] Optionally, the first mask strip is detachably connected to the mask frame; and / or, the second mask strip is detachably connected to the mask frame.

[0015] In one embodiment, the first mask strip and the second mask strip are detachably connected.

[0016] In one embodiment, the materials of the first mask strip and the second mask strip include Invar alloy.

[0017] The second technical solution provided in this application is: a vapor deposition system, comprising: multiple display panels to be vapor deposited and a mask, wherein the mask is any of the above-mentioned mask; the mask is used to simultaneously vapor deposit multiple display panels to be vapor deposited.

[0018] The beneficial effects of this application are as follows: Unlike the prior art, this application discloses a mask and a vapor deposition system. The mask includes a mask frame, a first mask layer, and a second mask layer. The mask frame has a ring-shaped structure and a hollow area. The first mask layer includes multiple first mask strips, which are spaced apart. The first mask strips extend in a straight line and cross the hollow area. The second mask layer is stacked on top of the first mask layer. The second mask layer includes multiple second mask strips, which are spaced apart. The second mask strips extend in a straight line and cross the hollow area. The second mask strips intersect with the first mask strips. The second mask strips are independent of the first mask strips. The area formed by two adjacent first mask strips and two adjacent second mask strips is defined as a vapor deposition area. Multiple first mask strips and multiple second mask strips form multiple vapor deposition areas. The outline shape of the vapor deposition area is configured to be the same as the outline of the display panel to be vapor deposited. With the above settings, the first mask strip and / or the second mask strip can be replaced according to the needs of different display panels to be vapor-deposited. The mask frame can be used for different display panels to be vapor-deposited, which helps to improve the utilization rate of materials and reduce costs. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the mask provided in the embodiments of this application;

[0021] Figure 2 yes Figure 1 The diagram shows the exploded structure of the mask.

[0022] Figure 3This is a schematic diagram of another embodiment of the multiple vapor deposition areas formed by the mask plate provided in the embodiments of this application;

[0023] Figure 4 This is a schematic diagram of another embodiment of the multiple vapor deposition areas formed by the mask plate provided in this application;

[0024] Figure 5 This is a schematic diagram of another embodiment of the multiple vapor deposition areas formed by the mask plate provided in this application;

[0025] Figure 6 This is a partial structural schematic diagram of an embodiment of the cooperation between two adjacent first mask strips and two adjacent second mask strips provided in this application;

[0026] Figure 7 This is a partial structural diagram of another embodiment of the cooperation between two adjacent first mask strips and two adjacent second mask strips provided in this application;

[0027] Figure 8 This is a partial structural schematic diagram of another embodiment of the cooperation between two adjacent first mask strips and two adjacent second mask strips provided in this application;

[0028] Figure 9 yes Figure 4 A partial structural diagram of the first and second mask strips of the mask plate shown. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0030] In the following description, specific details such as particular system architectures, interfaces, and technologies are presented for illustrative purposes rather than for limiting purposes, in order to provide a thorough understanding of this application.

[0031] The terms "first," "second," and "third" in this application are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of the stated features. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movement of components in a specific posture (as shown in the figures). If the specific posture changes, the directional indications also change accordingly. The terms "comprising" and "having," and any variations thereof, in the embodiments of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or components inherent to these processes, methods, products, or devices.

[0032] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0033] The present application will now be described in detail with reference to the accompanying drawings and embodiments.

[0034] Masks are required during the formation of the various functional layers of a display panel. To improve manufacturing efficiency, multiple display panels are typically vapor-deposited simultaneously to form the functional layers of each panel.

[0035] The photomask has multiple evaporation zones, each of which can be configured to deposit one display panel. Currently, the evaporation zones formed by a photomask are fixed and cannot be adjusted, and can only be deposited on one type of display panel. If display panels of different shapes and / or sizes are to be deposited, the entire photomask needs to be replaced, resulting in low material utilization.

[0036] In view of this, this application provides a photomask and a vapor deposition system to improve material utilization and reduce costs.

[0037] Please see Figure 1 and Figure 2 , Figure 1This is a schematic diagram of the structure of the mask provided in the embodiments of this application. Figure 2 yes Figure 1 The diagram shows the exploded structure of the mask.

[0038] The mask plate includes a mask frame 1, a first mask layer 2, and a second mask layer 3.

[0039] The mask frame 1 is a ring-shaped structure. The mask frame 1 has a hollow area; specifically, the internal space enclosed by the ring-shaped structure is the hollow area.

[0040] The first mask layer 2 includes a plurality of first mask strips 21. The plurality of first mask strips 21 are spaced apart. The first mask strips 21 extend in a straight line. The first mask strips 21 span the cutout area of ​​the mask frame 1.

[0041] The second mask layer 3 is stacked on top of the first mask layer 2; specifically, the second mask layer 3 can be located on the side of the first mask layer 2 closest to the mask frame 1, or the first mask layer 2 can be located on the side of the second mask layer 3 closest to the mask frame 1. The second mask layer 3 includes a plurality of second mask strips 31; the plurality of second mask strips 31 are located on the same side of the plurality of first mask strips 21. The plurality of second mask strips 31 are spaced apart. The second mask strips 31 extend in a straight line. The second mask strips 31 span the cutout area of ​​the mask frame 1. The second mask strips 31 and the first mask strips 21 are intersecting; specifically, each second mask strip 31 intersects with each first mask strip 21. The second mask strips 31 and the first mask strips 21 are independent of each other.

[0042] The area formed by two adjacent first mask strips 21 and two adjacent second mask strips 31 is defined as a vapor deposition area 100. Multiple first mask strips 21 and multiple second mask strips 31 cooperate to form multiple vapor deposition areas 100; that is, multiple first mask strips 21 and multiple second mask strips 31 cooperate to divide the cutout area of ​​the mask frame 1 into multiple vapor deposition areas 100. The outline shape of the vapor deposition area 100 is configured to be the same as the outline of the display panel to be vapor deposited; one vapor deposition area 100 is configured to correspond to one display panel to be vapor deposited; using this mask, multiple display panels to be vapor deposited can be vapor deposited simultaneously.

[0043] By setting multiple first mask strips 21 and multiple second mask strips 31 to cooperate in dividing the hollow area of ​​the mask frame 1 into multiple vapor deposition areas 100, and by stacking the first mask strips 21 and the second mask strips 31 independently of each other, the shape and / or area size of at least some of the multiple vapor deposition areas 100 can be changed by replacing at least some of the first mask strips 21 and / or at least some of the second mask strips 31, so as to adapt to different display panels to be vapor deposited. The mask plate provided in this application embodiment can be adapted to different display panels to be vapor deposited by only replacing the first mask strips 21 and / or the second mask strips 31. The mask frame 1 can be reused for different display panels to be vapor deposited, and different products can use the mask frame 1, which helps to reduce the amount of materials prepared, improve the utilization rate of materials, and reduce costs.

[0044] By setting multiple first mask strips 21 and multiple second mask strips 31 to cooperate, the hollow area of ​​the mask frame 1 is divided into multiple vapor deposition areas 100. The first mask strips 21 and the second mask strips 31 are stacked and independent of each other. During the mesh stretching process, since the first mask strips 21 and the second mask strips 31 are assembled independently, the sag and wrinkles of the mesh can be better controlled. After stretching, for problematic positions (e.g., sag or wrinkles that do not meet requirements), only the corresponding first mask strip 21 or second mask strip 31 needs to be adjusted or replaced. It is not necessary to tear up the whole mesh and stretch it again, which helps to improve material utilization.

[0045] It should be noted that replacing only the first mask strip 21 will not significantly affect the structure of the second mask strip 31; similarly, replacing only the second mask strip 31 will not significantly affect the structure of the first mask strip 21. The mask provided in this embodiment can be used to form functional layers other than the light-emitting material layer of the display panel to be vapor-deposited, such as encapsulation layers.

[0046] Please see Figures 3-5 , Figure 3 This is a schematic diagram of another embodiment of the multiple vapor deposition areas formed by the mask plate provided in this application. Figure 4 This is a schematic diagram of another embodiment of the multiple vapor deposition areas formed by the mask plate provided in this application. Figure 5 This is a schematic diagram of another embodiment of the multiple vapor deposition areas formed by the mask plate provided in this application.

[0047] In one embodiment, the plurality of vapor deposition regions 100 include a plurality of first vapor deposition regions 101 and a plurality of second vapor deposition regions 102, wherein the first vapor deposition regions 101 and the second vapor deposition regions 102 have different area sizes, and / or, the first vapor deposition regions 101 and the second vapor deposition regions 102 have different outline shapes. For example, as... Figure 3 and Figure 5 As shown, the first vapor deposition region 101 and the second vapor deposition region 102 have different areas. As another example, such as... Figure 4 As shown, the first vapor deposition region 101 and the second vapor deposition region 102 have different shapes and different sizes.

[0048] With the above settings, display panels of different sizes and / or shapes can be mixed and arranged, and the mask can simultaneously vapor deposit display panels of different sizes and / or shapes, thereby improving the layout efficiency.

[0049] It should be noted that the plurality of vapor deposition regions 100 formed by the mask plate provided in this application embodiment are not limited to including only two vapor deposition regions 100 with different area sizes, nor are they limited to including only two vapor deposition regions 100 with different contour shapes. For example, the plurality of vapor deposition regions 100 include three vapor deposition regions 100 with different area sizes and the same contour shape. For example, the plurality of vapor deposition regions 100 include four vapor deposition regions 100 with different area sizes and contour shapes.

[0050] Please see Figure 6 , Figure 6 This is a partial structural schematic diagram of an embodiment of the cooperation between two adjacent first mask strips and two adjacent second mask strips provided in this application.

[0051] In one implementation, such as Figure 6 As shown, the surface of the first mask strip 21 facing the vapor deposition area 100 is a plane, the surface of the second mask strip 31 facing the vapor deposition area 100 is a plane, and the outline shape of the vapor deposition area 100 formed by two adjacent first mask strips 21 and two adjacent second mask strips 31 is rectangular.

[0052] Optionally, the multiple first mask strips 21 are arranged at non-equidistant intervals; and / or, the multiple second mask strips 31 are arranged at non-equidistant intervals, so that the multiple vapor deposition areas 100 formed by the multiple first mask strips 21 and the multiple second mask strips 31 include multiple vapor deposition areas 100 with different area sizes and rectangular outlines. That is, by adjusting the spacing between any two adjacent first mask strips 21, and / or adjusting the spacing between any two adjacent second mask strips 31, multiple vapor deposition areas 100 with different area sizes and the same outline shape can be formed, and multiple display panels with the same outline shape but different area sizes can be vapor deposited simultaneously.

[0053] Please see Figures 7-9 , Figure 7 This is a partial structural diagram of another embodiment of the cooperation between two adjacent first mask strips and two adjacent second mask strips provided in this application. Figure 8This is a partial structural diagram of another embodiment of the cooperation between two adjacent first mask strips and two adjacent second mask strips provided in this application. Figure 9 yes Figure 4 A partial structural diagram of the first and second mask strips of the mask plate shown.

[0054] In one implementation, such as Figures 7-9 As shown, the first mask strip 21 includes a first body 211 and a first protrusion 212. The first body 211 spans the hollow area of ​​the mask frame 1, and the first protrusion 212 is disposed on the surface of the first body 211 facing the vapor deposition area 100. The side of the first protrusion 212 facing the vapor deposition area 100 is curved. The side of the first protrusion 212 facing the vapor deposition area 100 is smoothly connected to the surface of the first body 211 facing the vapor deposition area 100. The intersection of the second mask strip 31 and the first mask strip 21 is adjacent to the first protrusion 212; the side of the first protrusion 212 facing the vapor deposition area 100 is smoothly connected to the surface of the second mask strip 31 facing the vapor deposition area 100.

[0055] By designing the first protrusion 212, the side of the first protrusion 212 facing the vapor deposition area 100 is curved. The first protrusion 212, the first body 211 and the second mask strip 31 are arranged together to form a vapor deposition area 100 with a curved contour shape, so that the mask can be adapted to various display panels with curved contour shapes to be vapor deposited.

[0056] Optional, such as Figures 7-9 As shown, the orthographic projection of the second mask strip 31 onto the first mask strip 21 covers the first protrusion 212. The two opposite sides of the first protrusion 212 are located on opposite sides of the second mask strip 31.

[0057] In one implementation, such as Figure 7 As shown, the first mask strip 21 includes a first body 211 and a first protrusion 212. The first body 211 spans the hollow area of ​​the mask frame 1, and the first protrusion 212 is disposed on the surface of the first body 211 facing the vapor deposition area 100. The side of the first protrusion 212 facing the vapor deposition area 100 is a concave arc surface, and the surface of the second mask strip 31 facing the vapor deposition area 100 is a plane. The side of the first protrusion 212 facing the vapor deposition area 100 is smoothly connected to the surface of the first body 211 facing the vapor deposition area 100, and the side of the first protrusion 212 facing the vapor deposition area 100 is smoothly connected to the surface of the second mask strip 31 facing the vapor deposition area 100, so that two adjacent first mask strips 21 and two adjacent second mask strips 31 cooperate to form a vapor deposition area 100 with a rounded rectangular outline.

[0058] Specifically, along the arrangement direction X of the plurality of first mask strips 21, the first body 211 of the first mask strip 21 includes a first surface 211a and a second surface 211b disposed opposite to each other; both the first surface 211a and the second surface 211b can be the surface of the first body 211 facing the vapor deposition area 100; the first surface 211a is provided with a plurality of first protrusions 212, and the side surface of the first protrusions 212 is a concave arc surface; the second surface 211b is provided with a plurality of first protrusions 212, and the side surface of the first protrusions 212 is a concave arc surface. Along the arrangement direction Y of the plurality of second mask strips 31, the second mask strip 31 includes a third surface 31a and a fourth surface 31b disposed opposite to each other; both the third surface 31a and the fourth surface 31b can be the surface of the second mask strip 31 facing the vapor deposition area 100; both the third surface 31a and the fourth surface 31b are planar. A first body 211 and two first protrusions 212 on the second surface 211b of the first body 211, another first body 211 and two first protrusions 212 on the first surface 211a of the first body 211, together with two second mask strips 31, define a vapor deposition area 100 with a rounded rectangular outline. Figure 1 or Figure 3 As shown.

[0059] Optionally, the first protrusion 212 on the first surface 211a of the first body 211 and the first protrusion 212 on the second surface 211b are symmetrically arranged (e.g., Figure 7 (As shown).

[0060] Optionally, along the arrangement direction Y of the plurality of second mask strips 31, the first protrusion 212 includes two opposing side surfaces 212a, both of which are arc surfaces and symmetrically arranged; the orthographic projection of the axis of the second mask strip 31 onto the first mask strip 21 coincides with the axis of the first protrusion 212 of the first mask strip 21 (e.g., Figure 7 (As shown). The two sides 212a of the first bump 212 each serve as part of two adjacent vapor deposition regions 100. This arrangement helps reduce the number of first bumps 212 and lowers the processing complexity of the first mask strip 21.

[0061] Optionally, the multiple first mask strips 21 are not equally spaced; and / or, the multiple second mask strips 31 are not equally spaced; and / or, the curved angles of the arc surfaces of the multiple first protrusions 212 facing the vapor deposition area 100 are different, so that the multiple vapor deposition areas 100 formed by the multiple first mask strips 21 and the multiple second mask strips 31 include multiple vapor deposition areas 100 with different area sizes and rounded rectangular outlines. That is, by adjusting the spacing between any two adjacent first mask strips 21, and / or adjusting the spacing between any two adjacent second mask strips 31, and / or adjusting the curved angle of the arc surfaces of the first protrusions 212 to form multiple vapor deposition areas 100 with different area sizes and the same outline shape, multiple display panels with the same outline shape but different area sizes can be vapor deposited simultaneously.

[0062] For example, by adjusting the spacing between any two adjacent second mask strips 31, multiple vapor deposition areas 100 with different areas and rounded rectangular outlines are formed. Specifically, some of the second mask strips 31 have a spacing of a first value between adjacent pairs, while others have a spacing of a second value. The first and second values ​​are not equal, and the spacing is alternately set to form... Figure 3 The structure shows multiple vapor deposition zones 100.

[0063] In one embodiment, the first mask strip 21 includes a first body 211 and a first protrusion 212. The first body 211 spans the cutout area of ​​the mask frame 1, and the first protrusion 212 is disposed on the surface of the first body 211 facing the vapor deposition area 100. The second mask strip 31 includes a second body 311 and a second protrusion 312. The second body 311 spans the cutout area of ​​the mask frame 1, and the second protrusion 312 is disposed on the surface of the second body 311 facing the vapor deposition area 100. The second protrusion 312 is offset from the first mask strip 21. The surface of the second protrusion 312 facing away from the second body 311 is the surface of the second mask strip 31 facing the vapor deposition area 100. The side of the first protrusion 212 facing the vapor deposition area 100 is a concave arc surface, and the surface of the second protrusion 312 facing away from the second body 311 is a concave arc surface. The side of the first protrusion 212 facing the vapor deposition area 100 is smoothly connected to the surface of the second protrusion 312 facing away from the second body 311, and the side of the first protrusion 212 facing the vapor deposition area 100 is smoothly connected to the surface of the first body 211 facing the vapor deposition area 100, so that the outline of the vapor deposition area 100 formed by the cooperation of two adjacent first mask strips 21 and two adjacent second mask strips 31 is either circular or elliptical. For example, Figure 8 As shown, the outline of the vapor deposition area 100 formed by the cooperation of two adjacent first mask strips 21 and two adjacent second mask strips 31 is circular.

[0064] Specifically, along the arrangement direction X of the plurality of first mask strips 21, the first body 211 of the first mask strip 21 includes a first surface 211a and a second surface 211b disposed opposite to each other; the first surface 211a and the second surface 211b can both be the surface of the first body 211 facing the vapor deposition area 100; the first surface 211a is provided with a plurality of first protrusions 212, and the side of the first protrusions 212 is a concave arc surface; the second surface 211b is provided with a plurality of first protrusions 212, and the side of the first protrusions 212 is a concave arc surface. Along the arrangement direction Y of the plurality of second mask strips 31, the second body 311 includes a fifth surface 311a and a sixth surface 311b disposed opposite to each other; both the fifth surface 311a and the sixth surface 311b can be the surfaces of the second body 311 facing the vapor deposition area 100; the fifth surface 311a is provided with a plurality of second protrusions 312, and the surface of the second protrusions 312 facing away from the second body 311 is a concave arc surface; the sixth surface 311b is provided with a plurality of second protrusions 312, and the surface of the second protrusions 312 facing away from the second body 311 is a concave arc surface. A first body 211 and the two first protrusions 212 of the second surface 211b of the first body 211, another first body 211 and the two first protrusions 212 of the first surface 211a of the first body 211, the second protrusions 312 of the sixth surface 311b of the second body 311, and the second protrusions 312 of the fifth surface 311a of the other second body 311 define a vapor deposition area 100 with a circular outline shape.

[0065] It is understandable that the specific structural arrangement of the first mask strip 21 and the second mask strip 31, which cooperate with the two adjacent first mask strips 21 and the two adjacent second mask strips 31 to form an elliptical vapor deposition area 100, is consistent with... Figure 8 The first mask strip 21 and the second mask strip 31 shown have similar structural configurations, with the only difference being that the arc bending angle of the first protrusion 212 is different, and the arc bending angle of the second protrusion 312 is different.

[0066] In one specific embodiment, the plurality of vapor deposition regions 100 formed by the cooperation of a plurality of first mask strips 21 and a plurality of second mask strips 31 can be as follows: Figure 5 As shown.

[0067] Optionally, along the arrangement direction Y of the plurality of second mask strips 31, the first protrusion 212 includes two opposing side surfaces 212a, both of which are concave arc surfaces and symmetrically arranged; the orthographic projection of the axis of the second body 311 of the second mask strip 31 onto the first mask strip 21 coincides with the axis of the first protrusion 212 of the first mask strip 21 (e.g., Figure 8(As shown). The two sides 212a of the first bump 212 each serve as part of two adjacent vapor deposition regions 100. This arrangement helps reduce the number of first bumps 212 and lowers the processing complexity of the first mask strip 21.

[0068] Optionally, the second protrusion 312 on the fifth surface 311a and the second protrusion 312 on the sixth surface 311b of the second body 311 are symmetrically arranged (e.g., Figure 8 (As shown).

[0069] Optionally, the first protrusion 212 on the first surface 211a of the first body 211 and the first protrusion 212 on the second surface 211b are symmetrically arranged (e.g., Figure 8 (As shown).

[0070] Optionally, the multiple first mask strips 21 are not equally spaced; and / or, the multiple second mask strips 31 are not equally spaced; and / or, the arc bending angles of the multiple first protrusions 212 facing the sides of the vapor deposition area 100 are different; and / or, the arc bending angles of the multiple second protrusions 312 facing away from the surface of the second body 311 are different, so that the multiple vapor deposition areas 100 formed by the multiple first mask strips 21 and the multiple second mask strips 31 include multiple vapor deposition areas 100 with different area sizes and / or different contour shapes. That is, by adjusting the spacing between any two adjacent first mask strips 21, and / or adjusting the spacing between any two adjacent second mask strips 31, and / or adjusting the arc bending angle of the first protrusions 212, and / or adjusting the arc bending angle of the second protrusions 312 facing away from the surface of the second body 311, multiple vapor deposition areas 100 with different area sizes and / or different contour shapes can be formed, and multiple different display panels to be vapor deposited can be vapor deposited simultaneously.

[0071] For example, by adjusting the spacing between any two adjacent second mask strips 31, the curvature angle of the arc surface of the first protrusion 212 is adjusted, and the curvature angle of the arc surface of the second protrusion 312 is adjusted, forming multiple vapor deposition areas 100 with different area sizes and circular outlines. Specifically, as shown... Figure 5 As shown, among the multiple second mask strips 31, the spacing between some adjacent second mask strips 31 is a first value, and the spacing between some adjacent second mask strips 31 is a second value. The first value and the second value are not equal, and the spacing is alternately set with the first value and the second value; the curvature angles of the arc surfaces on the two opposite sides of the first protrusion 212 are different; the curvature angles of the arc surfaces of the two second protrusions 312 on the opposite sides of the second body 311 are different, forming Figure 5 The structure shown.

[0072] In one implementation, such as Figure 9As shown, the first mask strip 21 includes a first body 211 and a first protrusion 212. The first body 211 spans the hollow area of ​​the mask frame 1, and the first protrusion 212 is disposed on the surface of the first body 211 facing the vapor deposition area 100. Along the arrangement direction Y of the plurality of second mask strips 31, the first protrusion 212 includes a first side surface 212b and a second side surface 212c disposed opposite to each other. Both the first side surface 212b and the second side surface 212c are concave arc surfaces, and the curvature angle of the arc surface of the first side surface 212b is different from that of the arc surface of the second side surface 212c.

[0073] The second mask strip 31 includes a second body 311 and a second protrusion 312. The second body 311 spans the hollow area of ​​the mask frame 1. The second protrusion 312 is disposed on the surface of the second body 311 near the first side 212b. The surface of the second protrusion 312 facing away from the second body 311 is a concave arc surface. The second protrusion 312 is offset from the first mask strip 21. The surface of the second protrusion 312 facing away from the second body 311 is smoothly connected to the first side surface 212b, and the first side surface 212b is smoothly connected to the surface of the first body 211 facing the vapor deposition area 100. The surface of the second body 311 near the second side surface 212c is flat, and the surface of the second body 311 near the second side surface 212c is smoothly connected to the second side surface 212c, and the second side surface 212c is smoothly connected to the surface of the first body 211 facing the vapor deposition area 100, so that the multiple vapor deposition areas 100 formed by two adjacent first mask strips 21 and a plurality of continuously arranged second mask strips 31 are alternately arranged as rounded rectangular vapor deposition areas 100 and circular or elliptical vapor deposition areas 100. Among them, the orthographic projection of the second mask strip 31 on the first mask strip 21 covers the portion of the first protrusion 212; specifically, the orthographic projection of the second body 311 on the first mask strip 21 covers the portion of the first protrusion 212, and the first side surface 212b and the second side surface 212c of the first protrusion 212 are respectively located on opposite sides of the second body 311.

[0074] Specifically, along the arrangement direction X of the plurality of first mask strips 21, the first body 211 of the first mask strip 21 includes a first surface 211a and a second surface 211b disposed opposite to each other; the first surface 211a and the second surface 211b can both be the surfaces of the first body 211 facing the vapor deposition area 100; the first surface 211a is provided with a plurality of first protrusions 212, and the first side surface 212b and the second side surface 212c of the first protrusions 212 are both concave arc surfaces; the second surface 211b is provided with a plurality of first protrusions 212, and the first side surface 212b and the second side surface 212c of the first protrusions 212 are both concave arc surfaces.

[0075] Along the arrangement direction Y of the plurality of second mask strips 31, the second body 311 includes a fifth surface 311a and a sixth surface 311b disposed opposite to each other; the fifth surface 311a is planar; the sixth surface 311b is provided with a plurality of second protrusions 312, and the surface of the second protrusions 312 facing away from the second body 311 is a concave arc surface. The fifth surface 311a is smoothly connected to the second side surface 212c of the first protrusion 212, and the surface of the second protrusion 312 facing away from the second body 311 is smoothly connected to the first side surface 212b of the first protrusion 212. The plurality of vapor deposition areas 100 formed by the plurality of first mask strips 21 and the plurality of second mask strips 31 can be as follows: Figure 9 or Figure 4 As shown.

[0076] Optionally, the first protrusion 212 on the first surface 211a of the first body 211 and the first protrusion 212 on the second surface 211b are symmetrically arranged (e.g., Figure 9 (As shown).

[0077] Optionally, two adjacent second mask strips 31 are arranged symmetrically (e.g., Figure 9 (As shown).

[0078] Optionally, the multiple first mask strips 21 are not equally spaced; and / or, the multiple second mask strips 31 are not equally spaced; and / or, the first side surfaces 212b of the multiple first protrusions 212 have different curvature angles; and / or, the second side surfaces 212c of the multiple first protrusions 212 have different curvature angles; and / or, the surfaces of the multiple second protrusions 312 facing away from the second body 311 have different curvature angles. With the above configuration, multiple vapor deposition areas 100 with different area sizes and contour shapes can be formed, allowing simultaneous vapor deposition of multiple display panels with different contour shapes and area sizes.

[0079] In one embodiment, the second protrusion 312 and the second body 311 are integrally formed. The connection between the second protrusion 312 and the second body 311 can reduce the formation of weak points at the connection between the second protrusion 312 and the second body 311, thus maintaining the second mask strip 31 with high stability and strength.

[0080] In one embodiment, the first protrusion 212 and the first body 211 are integrally formed. The connection between the first protrusion 212 and the first body 211 can reduce the formation of weak points at the connection between the first protrusion 212 and the first body 211, thus maintaining the first mask strip 21 with high stability and strength.

[0081] In one embodiment, the width of the first body 211 is 0.5mm-2.5mm to maintain the structural stability of the first mask strip 21. The width of the first body 211 is the dimension of the first body 211 along the X-direction of the arrangement of the plurality of first mask strips 21.

[0082] In one embodiment, the width of the second body 311 is 0.5mm-2.5mm to maintain the structural stability of the second mask strip 31. The width of the second body 311 is the dimension of the second body 311 along the Y-direction of the arrangement of the plurality of second mask strips 31.

[0083] In one implementation, such as Figure 1 and Figure 2 As shown, the mask frame 1 includes a first frame strip 11, a second frame strip 12, a third frame strip 13, and a fourth frame strip 14 connected end to end. The first frame strip 11 and the third frame strip 13 are arranged opposite each other, and the second frame strip 12 and the fourth frame strip 14 are arranged opposite each other. The first mask strip 21 includes a first end 21a and a second end 21b arranged opposite each other. The first end 21a is connected to the first frame strip 11, and the second end 21b is connected to the third frame strip 13. The second mask strip 31 includes a third end 31c and a fourth end 31d arranged opposite each other. The third end 31c is connected to the second frame strip 12, and the fourth end 31d is connected to the fourth frame strip 14.

[0084] Optional, such as Figure 1 and Figure 2 As shown, the shape of the cutout area of ​​the mask frame 1 is rectangular.

[0085] Optional, such as Figure 1 and Figure 2 As shown, the mask frame 1 is a rectangular ring structure. Exemplarily, the widths of the first frame strip 11, the second frame strip 12, the third frame strip 13, and the fourth frame strip 14 are the same. In other embodiments, the widths of the first frame strip 11, the second frame strip 12, the third frame strip 13, and the fourth frame strip 14 may be different. Specifically, the width of the first frame strip 11 is the vertical distance between the surface of the first frame strip 11 near the third frame strip 13 and the surface of the first frame strip 11 away from the third frame strip 13; the width of the second frame strip 12 is the vertical distance between the surface of the second frame strip 12 near the fourth frame strip 14 and the surface of the second frame strip 12 away from the fourth frame strip 14; the width of the third frame strip 13 is the vertical distance between the surface of the third frame strip 13 near the first frame strip 11 and the surface of the third frame strip 13 away from the first frame strip 11; and the width of the fourth frame strip 14 is the vertical distance between the surface of the fourth frame strip 14 near the second frame strip 12 and the surface of the fourth frame strip 14 away from the second frame strip 12.

[0086] In one embodiment, at least one of the first mask strip 21 and the second mask strip 31 closest to the mask frame 1 is connected to the mask frame 1. Specifically, one of the first mask strip 21 and the second mask strip 31 closest to the mask frame 1 may be connected to the mask frame 1, and the first mask strip 21 and the second mask strip 31 may be connected to each other, thereby achieving a relatively fixed position between the first mask strip 21, the second mask strip 31, and the mask frame 1; alternatively, both the first mask strip 21 and the second mask strip 31 may be connected to the mask frame 1, thereby achieving a relatively fixed position between the first mask strip 21, the second mask strip 31, and the mask frame 1. By setting at least one of the first mask strip 21 and the second mask strip 31 closest to the mask frame 1 to be connected to the mask frame 1, maintaining a relatively fixed position between the first mask strip 21, the second mask strip 31, and the mask frame 1 is beneficial for maintaining the stability of the vapor deposition area 100 structure and achieving a better vapor deposition effect.

[0087] In one embodiment, at most one of the first mask strip 21 and the second mask strip 31 is fixedly connected to the mask frame 1. Specifically, only the first mask strip 21 may be fixedly connected to the mask frame 1; only the second mask strip 31 may be fixedly connected to the mask frame 1; or neither the first mask strip 21 nor the second mask strip 31 may be fixedly connected to the mask frame 1. In other words, both the first mask strip 21 and the second mask strip 31 may be detachably connected to the mask frame 1. By setting at most one of the first mask strip 21 and the second mask strip 31 to be fixedly connected to the mask frame 1, it is convenient to replace the first mask strip 21 and / or the second mask strip 31, which helps to reduce the amount of material to be prepared; it also reduces the damage to the structure of the mask frame 1 when disassembling the first mask strip 21 or the second mask strip 31 fixedly connected to the mask frame 1. Optionally, the method of fixing the first mask strip 21 or the second mask strip 31 to the mask frame 1 includes, but is not limited to, welding.

[0088] In one embodiment, both the first mask strip 21 and the second mask strip 31 are connected to the mask frame 1, and the first mask strip 21 is detachably connected to the mask frame 1, and / or the second mask strip 31 is detachably connected to the mask frame 1. By setting the first mask strip 21 and / or the second mask strip 31 to be detachably connected to the mask frame 1, it is convenient to replace the first mask strip 21 and / or the second mask strip 31, thereby improving material utilization; at the same time, it reduces the damage to the structure of the mask frame 1 during the replacement of the first mask strip 21 and / or the second mask strip 31, which helps to reduce costs.

[0089] Optionally, the first mask strip 21 or the second mask strip 31 can be detachably connected to the mask frame 1 by means including but not limited to snap-fit, magnetic attraction, or connection through a clamping structure.

[0090] Optionally, the first mask strip 21 and the second mask strip 31 are detachably connected to maintain their relatively fixed positions and ensure the stability of the vapor deposition area 100 structure. Furthermore, the detachable connection between the first mask strip 21 and the second mask strip 31 allows them to support each other, reducing deformation and maintaining the stability of the vapor deposition area 100 structure.

[0091] It should be noted that the detachable connection between the first mask strip 21 and the second mask strip 31 can be achieved through methods including, but not limited to, snap-fit, magnetic attraction, or connection via a clamping structure. In other embodiments, the first mask strip 21 and the second mask strip 31 may be in contact with each other without being connected to each other.

[0092] In one embodiment, a plurality of notches 10 are provided on the outer edge of the mask frame 1 to release stress. Optionally, multiple notches 10 are provided on the outer edge of the mask frame 1, and the multiple notches 10 are arranged symmetrically at the center. Optionally, the mask frame 1 is a rectangular ring structure, and a notch 10 is provided at each of the four corners of the outer edge of the rectangular ring structure (e.g., Figure 1 (As shown).

[0093] In one embodiment, the width of the end of the first mask strip 21 is greater than the width of the middle portion of the first mask strip 21. When the end of the first mask strip 21 is connected to the mask frame 1, it has a larger contact area, which is beneficial to improving the stability of the connection between the first mask strip 21 and the mask frame 1.

[0094] In one embodiment, the materials of the first mask strip 21 and the second mask strip 31 include Invar alloy, which has a low coefficient of thermal expansion and excellent dimensional stability within a certain temperature range, which is beneficial to maintaining the structural stability of the vapor deposition region 100.

[0095] In one embodiment, the material of the mask frame 1 includes Invar alloy, which has a low coefficient of thermal expansion and excellent dimensional stability within a certain temperature range, which is beneficial for maintaining the structural stability of the vapor deposition area 100.

[0096] This application also provides a vapor deposition system, which includes multiple display panels to be vapor deposited and a mask. The outline shape and / or area size of the multiple display panels to be vapor deposited can be the same or different. The mask is the mask provided in the above embodiment. The mask is used to simultaneously vapor deposit multiple display panels to be vapor deposited; the mask can be used to form functional layers of the display panels to be vapor deposited, other than the light-emitting material layer, such as an encapsulation layer.

[0097] The above are merely embodiments of this application and do not limit the scope of this patent application. Any equivalent structural or procedural changes made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A photomask, characterized in that, include: A mask frame, wherein the mask frame has a ring structure and a hollow area is formed in the mask frame; A first mask layer, comprising a plurality of first mask strips spaced apart from each other; the first mask strips extend in a straight line; the first mask strips span the cutout area; A second mask layer is stacked on top of the first mask layer; the second mask layer includes a plurality of second mask strips, which are spaced apart; the second mask strips extend in a straight line; the second mask strips span the cutout area; the second mask strips intersect with the first mask strips; the second mask strips and the first mask strips are independent of each other; The area formed by two adjacent first mask strips and two adjacent second mask strips is defined as a vapor deposition area; multiple first mask strips and multiple second mask strips are combined to form multiple vapor deposition areas; The outline shape of the vapor deposition area is configured to be the same as the outline of the display panel to be vapor deposited.

2. The mask plate according to claim 1, characterized in that, The plurality of vapor deposition regions include several first vapor deposition regions and several second vapor deposition regions, wherein the first vapor deposition regions and the second vapor deposition regions have different area sizes and / or different outline shapes.

3. The mask plate according to claim 1 or 2, characterized in that, The first mask strip includes a first body and a first protrusion. The first body spans the hollow area, and the first protrusion is disposed on the surface of the first body facing the vapor deposition area. The side of the first protrusion facing the vapor deposition area is curved; the side of the first protrusion facing the vapor deposition area is smoothly connected to the surface of the first body facing the vapor deposition area; the intersection of the second mask strip and the first mask strip is adjacent to the first protrusion; the side of the first protrusion facing the vapor deposition area is smoothly connected to the surface of the second mask strip facing the vapor deposition area.

4. The mask plate according to claim 3, characterized in that, The side of the first protrusion facing the vapor deposition area is a concave arc surface, and the surface of the second mask strip facing the vapor deposition area is a plane, so that two adjacent first mask strips and two adjacent second mask strips cooperate to form a vapor deposition area with a rounded rectangular outline; Optionally, the plurality of first mask strips are arranged at non-equidistant intervals; and / or, the plurality of second mask strips are arranged at non-equidistant intervals; and / or, the arc bending angles of the sides of the plurality of first protrusions facing the vapor deposition area are different.

5. The mask plate according to claim 3, characterized in that, The first protrusion includes a first side and a second side disposed opposite to each other. Both the first side and the second side are concave arc surfaces. The curvature angle of the arc surface of the first side is different from that of the arc surface of the second side. The second mask strip includes a second body and a second protrusion. The second body spans the hollowed-out area, and the second protrusion is disposed on the surface of the second body near the first side. The second protrusion is offset from the first mask strip. The surface of the second protrusion facing away from the second body is a concave arc surface, and the surface of the second protrusion facing away from the second body is smoothly connected to the first side. The surface of the second body near the second side is a plane, and the surface of the second body near the second side is smoothly connected to the second side, so that the multiple vapor deposition areas formed by two adjacent first mask strips and multiple second mask strips are alternately arranged as rounded rectangular vapor deposition areas and circular or elliptical vapor deposition areas. Optionally, the plurality of first mask strips are not equally spaced; and / or, the plurality of second mask strips are not equally spaced; and / or, the arc bending angles of the first side surfaces of the plurality of first protrusions are different; and / or, the arc bending angles of the second side surfaces of the plurality of first protrusions are different; and / or, the arc bending angles of the surfaces of the plurality of second protrusions facing away from the second body are different.

6. The mask plate according to claim 3, characterized in that, The second mask strip includes a second body and a second protrusion. The second body spans the cutout area, and the second protrusion is disposed on the surface of the second body facing the vapor deposition area. The second protrusion is offset from the first mask strip. The surface of the second protrusion facing away from the second body is the surface of the second mask strip facing the vapor deposition area. The side of the first protrusion facing the vapor deposition area is a concave arc surface, and the surface of the second protrusion away from the second body is a concave arc surface. The side of the first protrusion facing the vapor deposition area and the surface of the second protrusion away from the second body are smoothly connected, so that the outline of the vapor deposition area formed by the cooperation of two adjacent first mask strips and two adjacent second mask strips is either circular or elliptical. Optionally, the plurality of first mask strips are not equally spaced; and / or, the plurality of second mask strips are not equally spaced; and / or, the arc bending angles of the sides of the plurality of first protrusions facing the vapor deposition area are different; and / or, the arc bending angles of the surfaces of the plurality of second protrusions away from the second body are different.

7. The mask plate according to claim 1, characterized in that, Both the first mask strip and the second mask strip are connected to the mask frame; Optionally, the first mask strip is detachably connected to the mask frame; and / or, the second mask strip is detachably connected to the mask frame.

8. The mask plate according to claim 7, characterized in that, The first mask strip and the second mask strip are detachably connected.

9. The mask plate according to claim 1, characterized in that, The materials of the first mask strip and the second mask strip include Invar alloy.

10. A vapor deposition system, characterized in that, include: Multiple display panels awaiting vapor deposition; The photomask is the photomask as described in any one of claims 1-9; The mask is used to simultaneously vapor deposit multiple display panels to be vapor deposited.

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