Multi-station rotary drive device

Abstract

This application provides a multi-station rotary drive device. By arranging a first rotating component within a process cavity and multiple second rotating components spaced circumferentially along its periphery for supporting substrates, the multiple second rotating components can revolve with the first rotating component, thereby forming multiple substrate-supporting stations within the same process cavity, which improves substrate processing capacity. Simultaneously, a first rotary drive mechanism and a second rotary drive mechanism are respectively provided to provide independent first and second rotary powers, allowing independent control of the revolving and rotating motions of the second rotating components. Therefore, the revolving and rotating motions of the substrate-supporting stations can be controlled separately according to different deposition processes, achieving multi-station rotary processing while improving the flexibility of motion control, providing a structural basis for improving deposition process stability and film uniformity.

Description

Technical Field

[0001] This application relates to the field of semiconductor deposition equipment technology, and in particular to a multi-station rotary drive device. Background Technology

[0002] With the development of semiconductor manufacturing technology, deposition processes are increasingly widely used in semiconductor device manufacturing. For deposition processes such as chemical vapor deposition and physical vapor deposition, in order to improve equipment processing efficiency and throughput, deposition equipment typically needs to simultaneously carry and process multiple substrates within the same process chamber. To address this, some existing deposition equipment incorporates a multi-station rotating mechanism within the process chamber. This mechanism uses multiple carrier stations to carry substrates, and these stations are arranged circumferentially around the process chamber, allowing multiple substrates to sequentially pass through their respective process areas, thus achieving synchronous or continuous processing of multiple substrates.

[0003] In the aforementioned multi-station deposition equipment, to improve the uniformity of the film layer on the substrate during the deposition process, it is generally necessary for the station carrying the substrate to not only revolve around the center of the process cavity with the overall rotating structure, but also rotate around its own axis of rotation. In existing technologies, multiple stations typically achieve both revolution and rotation through mechanical transmission structures such as planetary gear mechanisms, or by employing an air-floating rotating structure where gas acts on the rotating components to achieve rotational drive. While these rotational drive structures can meet the requirements of multi-station rotation to a certain extent, there is usually a transmission correlation between their revolution and rotational motions, and their motion states are mutually restrictive, making it difficult to independently control the revolution and rotational motions according to different deposition process requirements. Furthermore, some rotational drive structures also suffer from problems such as complex structures, long transmission chains, or high requirements for processing and assembly precision. Summary of the Invention

[0004] The technical problem to be solved by this application is to provide a multi-station rotary drive device to solve the problem that the revolution and rotation of multi-station deposition equipment in the prior art are interrelated and difficult to control independently, thus limiting the flexibility of substrate rotation control.

[0005] To address the aforementioned technical problems, this application provides a multi-station rotary drive device applied to a deposition equipment, the deposition equipment including a process chamber, comprising: The first rotating component is rotatably disposed within the process cavity; Multiple second rotating members are rotatably connected to the first rotating member and are spaced apart along the circumference of the first rotating member. The second rotating members are used to support the substrate. A first rotary drive mechanism is connected to the first rotary component for driving the first rotary component to rotate around a first rotation axis, thereby driving multiple second rotary components to revolve around the first rotation axis. The second rotary drive mechanism is connected to a plurality of second rotating components via a transmission mechanism, and is used to drive the plurality of second rotating components to rotate around their respective second rotation axes. The second rotation axes are parallel to and spaced apart from the first rotation axis. The first rotary drive mechanism and the second rotary drive mechanism respectively provide independent first rotary power and second rotary power, so that the revolution and rotation of the multiple second rotary components are independent of each other.

[0006] Optionally, the second rotary drive mechanism is rotatably disposed within the first rotary drive mechanism and extends to the outside of the first rotary drive mechanism, and is connected to the second rotating member via the transmission mechanism.

[0007] Optionally, the first rotary drive mechanism includes: A first rotating shaft is rotatably disposed within the process cavity and connected to the first rotating component; The first driving component is connected to the first rotating shaft for driving the first rotating shaft to rotate.

[0008] Optionally, the second rotary drive mechanism includes: The second rotating shaft is rotatably disposed within the first rotating shaft and can rotate independently relative to the first rotating shaft. The second rotating shaft is connected to the second rotating component via a transmission connection. The second driving component is connected to the second rotating shaft for driving the second rotating shaft to rotate.

[0009] Optionally, the multi-station rotary drive device further includes: A magnetohydrodynamic sealing assembly is disposed outside the first rotating shaft and between the first rotating shaft and the second rotating shaft to seal the first rotating shaft and the second rotating shaft with respect to the process cavity, respectively.

[0010] Optionally, the transmission mechanism includes: The first transmission component is connected to the second rotary drive mechanism; The second transmission component is connected to the second rotating component; The first transmission member is connected to the second transmission member to transmit the second rotational power output by the second rotational drive mechanism to the second rotational member.

[0011] Optionally, the first transmission member and the second transmission member are respectively a first magnetic transmission member and a second magnetic transmission member, and the first magnetic transmission member and the second magnetic transmission member transmit the second rotational power through the action of a magnetic field.

[0012] Optionally, the first transmission member and the second transmission member are respectively a first gear and a second gear, and the first gear and the second gear mesh with each other to transmit the second rotational power.

[0013] Optionally, the first transmission component and the second transmission component are respectively a first sprocket and a second sprocket, and a chain is connected between the first sprocket and the second sprocket to transmit the second rotational power.

[0014] Optionally, the first transmission component and the second transmission component are respectively a first pulley and a second pulley, and a transmission belt is connected between the first pulley and the second pulley to transmit the second rotational power.

[0015] The beneficial effects of this application are as follows: Compared with the prior art, the multi-station rotary drive device provided by this application, by setting a first rotating component in the process cavity and setting a plurality of second rotating components for carrying substrates at circumferential intervals on the first rotating component, enables the plurality of second rotating components to revolve around the first rotating component with the first rotating component, thereby forming a plurality of substrate carrying stations in the same process cavity, which is beneficial to improving the substrate processing capacity of the deposition equipment; at the same time, this application sets a first rotary drive mechanism and a second rotary drive mechanism respectively connected to the first rotating component and the plurality of second rotating components for transmission, so that the first rotary drive mechanism is used to drive the first rotating component to revolve, and the second rotary drive mechanism is used to drive the plurality of second rotating components to rotate on their own axis, and the first rotary drive mechanism and the second rotary drive mechanism respectively provide independent first rotary power and second rotary power. Therefore, the revolution and rotation of multiple second rotating components can be independent of each other, so that the revolution state of the second rotating component is no longer necessarily limited by its rotation state. Thus, the revolution and rotation of the second rotating component can be controlled separately according to the actual deposition process requirements. Therefore, this application can realize multi-station rotation processing of multiple substrates, while giving the revolution and rotation of the substrate bearing station higher motion control flexibility, which is conducive to adapting to different deposition process requirements and provides a structural basis for improving the process stability and film uniformity of the substrate deposition process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the multi-station rotary drive device provided in this application.

[0017] Explanation of reference numerals in the attached figures: 10. Process chamber; 20. First rotating component; 30. Second rotating component; 40. First rotary drive mechanism; 41. First rotating shaft; 42. First driven pulley; 50. Second rotary drive mechanism; 51. Second rotating shaft; 52. Second driven pulley; 60. Transmission mechanism; 61. First transmission component; 62. Second transmission component; 70. Fixed base; 71. Sealing ring; 80. Magnetohydrodynamic sealing assembly. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this application pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0019] Furthermore, it should be understood that the orientations or positional relationships indicated by terms such as "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" in this document are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. The terms "first" and "second" in this document are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more.

[0020] To address the problems existing in the prior art, embodiments of this application provide a multi-station rotary drive device applied to a deposition equipment. The deposition equipment includes a process cavity 10, which provides a process space for substrate deposition. The multi-station rotary drive device is disposed within the process cavity 10, and is used to support multiple substrates and drive the multiple substrates to revolve and rotate respectively.

[0021] like Figure 1As shown, the multi-station rotary drive device includes a first rotating component 20, multiple second rotating components 30, a first rotary drive mechanism 40, a second rotary drive mechanism 50, and a transmission mechanism 60.

[0022] The first rotating member 20 is rotatably disposed within the process cavity 10 and is capable of rotating about a first rotation axis. A plurality of second rotating members 30 are rotatably connected to the first rotating member 20 and are spaced apart circumferentially along the first rotating member 20. The second rotating members 30 are used to support the substrate. Each second rotating member 30 has a corresponding second rotation axis, which is parallel to and spaced apart from the first rotation axis.

[0023] The first rotary drive mechanism 40 is connected to the first rotating member 20 for transmission, and is used to provide the first rotary member 20 with the first rotary power to drive the first rotating member 20 to rotate around the first rotation axis. Since multiple second rotating members 30 are connected to the first rotating member 20, the rotation of the first rotating member 20 can drive multiple second rotating members 30 to move around the first rotation axis, thereby realizing the revolution of multiple second rotating members 30.

[0024] The second rotary drive mechanism 50 is connected to multiple second rotary components 30 via a transmission mechanism 60. It provides second rotary power to the multiple second rotary components 30 to drive them to rotate around their respective second rotary axes 51, thereby realizing the rotation of the multiple second rotary components 30.

[0025] The first rotary drive mechanism 40 and the second rotary drive mechanism 50 provide a first rotary power and a second rotary power, respectively, which are independent of each other. The first rotary power drives the first rotating component 20 to revolve, and the second rotary power drives multiple second rotating components 30 to rotate on their own axes. Since the two rotary powers have independent power sources and transmission paths, the revolve of the first rotating component 20 does not necessarily drive the rotation of the second rotating components 30, nor does the rotation of the second rotating components 30 serve as the power source for the revolve of the first rotating component 20. This ensures that the revolve and rotation of the multiple second rotating components 30 are independent of each other.

[0026] Furthermore, by controlling the first rotational power and the second rotational power respectively, multiple second rotating components 30 can be in different motion states.

[0027] In one embodiment of this application, when multiple second rotating members 30 are required to revolve around the sun, the first rotating member 20 can be driven to rotate by the first rotating drive mechanism 40 without providing the second rotational power, so that the multiple second rotating members 30 revolve around the sun with the first rotating member 20.

[0028] In another embodiment of this application, when multiple second rotating members 30 need to maintain their respective positions and rotate, the first rotational power can be stopped to keep the first rotating member 20 in its respective position, while the second rotational drive mechanism 50 provides the second rotational power to the multiple second rotating members 30, so that the multiple second rotating members 30 rotate around their respective second rotational axes 51.

[0029] In another embodiment of this application, when multiple second rotating members 30 need to revolve and rotate simultaneously, a first rotational power and a second rotational power can be provided simultaneously, so that the first rotating member 20 drives multiple second rotating members 30 to revolve, and at the same time drives multiple second rotating members 30 to rotate via the transmission mechanism 60.

[0030] During the multi-station deposition process in the deposition equipment, multiple second rotating components 30 can sequentially pass through different deposition areas along with the first rotating component 20. When the multiple second rotating components 30 move to the target deposition area, the first rotational power can be stopped, and the multiple second rotating components 30 can be driven to rotate by the second rotational power, so that the substrate supported on the second rotating components 30 can be rotated and deposited in the corresponding deposition area; after the corresponding deposition process is completed, the first rotating component 20 can be driven to rotate by the first rotational power, so that the multiple second rotating components 30 can enter the next deposition area.

[0031] During continuous deposition, a first rotational force and a second rotational force can be provided simultaneously, so that multiple second rotating members 30 rotate on their own axis while revolving with the first rotating member 20, thereby keeping the substrate in a rotating state as it passes through different deposition areas.

[0032] In summary, this application utilizes a first rotating component 20 to support multiple second rotating components 30 spaced circumferentially, and employs independent first and second rotational forces to drive the multiple second rotating components 30 in revolution and rotation respectively, thereby enabling independent control of the revolution and rotation of the multiple second rotating components 30. Consequently, during multi-station deposition, the motion states of the multiple second rotating components 30 can be independently controlled according to different deposition processes, thereby improving the motion control flexibility of the multi-station rotary drive device and providing a structural basis for multi-station semi-continuous and continuous deposition.

[0033] Compared with the prior art, the multi-station rotary drive device provided in this application, by setting a first rotating member 20 in the process cavity 10 and setting a plurality of second rotating members 30 for carrying substrates at circumferential intervals on the first rotating member 20, enables the plurality of second rotating members 30 to revolve around the first rotating member 20 around the first rotating axis 41, thereby forming a plurality of substrate carrying stations in the same process cavity 10, which is beneficial to improving the substrate processing capacity of the deposition equipment; at the same time, this application sets a first rotary drive mechanism 40 and a second rotary drive mechanism 50 respectively connected to the first rotating member 20 and the plurality of second rotating members 30, so that the first rotary drive mechanism 40 is used to drive the first rotating member 20 to revolve, and the second rotary drive mechanism 50 is used to drive the plurality of second rotating members 30 to rotate on their own axis, and the first rotary drive mechanism 40 and the second rotary drive mechanism 50 respectively provide independent first rotary power and second rotary power. Therefore, the revolution and rotation of multiple second rotating components 30 can be independent of each other, so that the revolution state of the second rotating component 30 is no longer necessarily limited by its rotation state. Thus, the revolution and rotation of the second rotating component 30 can be controlled separately according to the actual deposition process requirements. Therefore, this application can realize multi-station rotation processing of multiple substrates, while giving the revolution and rotation of the substrate bearing station higher motion control flexibility, which is conducive to adapting to different deposition process requirements and provides a structural basis for improving the process stability and film uniformity in the substrate deposition process.

[0034] In this application, the second rotary drive mechanism 50 is rotatably disposed inside the first rotary drive mechanism 40 and extends to the outside of the first rotary drive mechanism 40, and is connected to the second rotating member 30 via the transmission mechanism 60.

[0035] Specifically, the second rotary drive mechanism 50 is disposed inside the first rotary drive mechanism 40, so that the second rotary drive mechanism 50 and the first rotary drive mechanism 40 form an internal and external structural relationship, and can rotate relative to the first rotary drive mechanism 40.

[0036] One end of the second rotary drive mechanism 50 extends to the outside of the first rotary drive mechanism 40 and is connected to the transmission mechanism 60 to transmit the second rotary power to the second rotating member 30, causing the second rotating member 30 to rotate around the corresponding second rotation axis 51. Thus, the first rotary drive mechanism 40 and the second rotary drive mechanism 50 can cooperate to provide rotary power to the first rotating member 20 and the second rotating member 30 respectively, and through the rotational relationship between the second rotary drive mechanism 50 and the first rotary drive mechanism 40, the two rotary powers can be transmitted independently.

[0037] By placing the second rotary drive mechanism 50 inside the first rotary drive mechanism 40 and extending the second rotary drive mechanism 50 to the outside of the first rotary drive mechanism 40 and connecting it with the transmission mechanism 60, two rotary power transmission structures for revolution and rotation can be arranged in a relatively compact space, which is beneficial to realize the revolution drive of the first rotating component 20 and the rotation drive of the second rotating component 30.

[0038] In this application, the first rotary drive mechanism 40 includes a first rotary shaft 41 and a first drive member (not shown). The first rotary shaft 41 is rotatably disposed within the process cavity 10 and is connected to the first rotary member 20. The first drive member is drively connected to the first rotary shaft 41 and is used to drive the first rotary shaft 41 to rotate.

[0039] Specifically, the first rotating shaft 41 is connected to the first rotating member 20, and the rotation of the first rotating shaft 41 can be transmitted to the first rotating member 20, thereby causing the first rotating member 20 to rotate around the first rotating shaft 41. Since multiple second rotating members 30 are rotatably connected to the first rotating member 20, the rotation of the first rotating member 20 can drive the multiple second rotating members 30 to move synchronously around the first rotating shaft 41, realizing the revolution of the multiple second rotating members 30.

[0040] In this application, the first driving member uses a pulley transmission mechanism to drive the first rotating shaft 41 to rotate. Specifically, the first rotating shaft 41 is provided with a first driven pulley 42, the first driving member is a servo motor, and the drive shaft of the first driving member is provided with a first driving pulley. The first driving pulley drives the first driven pulley 42 to drive the first rotating shaft 41 to rotate through a first synchronous belt.

[0041] In another embodiment of this application, the first driving member uses a sprocket transmission mechanism to drive the first rotating shaft to rotate. Specifically, the first rotating shaft 41 is provided with a first driven sprocket, the first driving member is a servo motor, and the drive shaft of the first driving member is provided with a first driving sprocket. The first driving sprocket drives the first driven sprocket to rotate the first rotating shaft 41 through a first chain.

[0042] In another embodiment of this application, the first driving component is a servo motor, including a first mounting base, a first stator, and a first rotor. The first stator is disposed on the first mounting base, and the first rotor is disposed on the first rotating shaft 41, with the first stator and the first rotor corresponding to each other. The first driving component transmits first rotational power to the first rotating component 20 through the first rotating shaft 41, thus forming a power transmission path from the first driving component, the first rotating shaft 41 to the first rotating component 20 in the first rotational drive mechanism 40. Therefore, the rotational power output by the first driving component can be transmitted to the first rotating component 20 through the first rotating shaft 41 to drive multiple second rotating components 30 to revolve.

[0043] In this application, the second rotary drive mechanism 50 includes a second rotary shaft 51 and a second drive member (not shown).

[0044] The second rotating shaft 51 is rotatably disposed within the first rotating shaft 41 and can rotate independently relative to the first rotating shaft 41. The second rotating shaft 51 is connected to the second rotating member 30 via a transmission connection. The second driving member is connected to the second rotating shaft 51 via a transmission connection and is used to drive the second rotating shaft 51 to rotate.

[0045] Specifically, the second rotating shaft 51 is disposed inside the first rotating shaft 41, so that the first rotating shaft 41 and the second rotating shaft 51 form an inner and outer rotating structure. The second rotating shaft 51 can rotate independently relative to the first rotating shaft 41, so that the rotation of the second rotating shaft 51 will not drive the first rotating shaft 41 to rotate synchronously, thereby enabling the second rotating shaft 51 and the first rotating shaft 41 to transmit independent rotational power respectively.

[0046] In this application, the second driving member uses a pulley transmission mechanism to drive the second rotating shaft to rotate. Specifically, the second rotating shaft 51 is provided with a second driven pulley 52, the second driving member is a servo motor, and the drive shaft of the second driving member is provided with a second driving pulley. The second driving pulley drives the second driven pulley to rotate the second rotating shaft 51 through a second synchronous belt.

[0047] In another embodiment of this application, the second driving member uses a sprocket transmission mechanism to drive the second rotating shaft 51 to rotate. Specifically, the second rotating shaft 51 is provided with a second driven sprocket, the second driving member is a servo motor, and the drive shaft of the second driving member is provided with a second driving sprocket. The second driving sprocket drives the second driven sprocket to rotate the second rotating shaft 51 through a second chain.

[0048] In another embodiment of this application, the second driving component is a servo motor, including a second mounting base, a second stator, and a second rotor. The second stator is disposed on the second mounting base, and the second rotor is disposed on the second rotating shaft 51, with the second stator and second rotor corresponding to each other. The rotational power output by the second driving component is transmitted to the second rotating shaft 51, and further transmitted from the second rotating shaft 51 to the second rotating member 30, causing the second rotating member 30 to rotate around the corresponding line of the second rotating shaft 51. Thus, the second driving component, the second rotating shaft 51, and the second rotating member 30 form a power transmission path for driving the second rotating member 30 to rotate.

[0049] Since the second rotating shaft 51 can rotate independently relative to the first rotating shaft 41, the two rotational forces are transmitted along different rotating shafts, thus making the revolution and rotation of the multiple second rotating components 30 independent of each other. By placing the second rotating shaft 51 inside the first rotating shaft 41, while achieving independent transmission of the two rotational forces, the first rotating shaft 41 and the second rotating shaft 51 form a relatively compact coaxial dual-axis structure, which is beneficial for realizing the revolution and rotation drive of the multiple second rotating components 30 within a limited installation space.

[0050] In this application, the first rotating shaft 41 and the second rotating shaft 51 are coaxially arranged.

[0051] Specifically, the second rotating shaft 51 is disposed within the first rotating shaft 41, and the rotation centers of the first rotating shaft 41 and the second rotating shaft 51 are located on the same axis, so that the first rotating shaft 41 and the second rotating shaft 51 form a coaxial dual-axis structure. The first rotating shaft 41 and the second rotating shaft 51 can rotate independently around the same axis, wherein the first rotating shaft 41 is used to transmit the first rotational power, and the second rotating shaft 51 is used to transmit the second rotational power.

[0052] By setting the first rotating shaft 41 and the second rotating shaft 51 coaxially, the two rotating forces can be input and transmitted along the same rotation center. While realizing the independent rotation of the first rotating shaft 41 and the second rotating shaft 51, the space occupied by the two rotating forces transmission structure is reduced.

[0053] In this application, the multi-station rotary drive device further includes a fixed base 70, which is connected to the bottom wall of the process cavity 10 by fasteners. A sealing ring 71 is provided between the fixed base 70 and the bottom wall of the process cavity 10. A portion of the first rotating shaft 41 is located inside the fixed base 70 and rotates relative to the fixed base 70, while another portion passes through the fixed base 70 and extends into the process cavity 10, connecting with the first rotating member 20. Thus, the first rotating shaft 41 can rotate relative to the fixed base 70 and transmit the first rotational power output by the first rotary drive mechanism 40 to the first rotating member 20, thereby driving multiple second rotating members 30 to revolve.

[0054] With the above configuration, the fixed seat 70 can provide rotational mounting and support for the first rotating shaft 41. At the same time, the fixed seat 70 seals the connection between the fixed seat 70 and the process cavity 10 through the sealing ring 43, thereby achieving rotational mounting of the first rotating shaft 41 while maintaining the airtightness of the process cavity 10.

[0055] In this application, the multi-station rotary drive device further includes a magnetic fluid sealing assembly 80, which is disposed outside the first rotating shaft 41 and between the first rotating shaft 41 and the second rotating shaft 51, to seal the first rotating shaft 41 and the second rotating shaft 51 with the process cavity 10, respectively.

[0056] Specifically, both the first rotating shaft 41 and the second rotating shaft 51 pass through the bottom wall of the process cavity 10, so that the rotational power outside the process cavity 10 can be transmitted to the first rotating member 20 and the second rotating member 30 inside the process cavity 10, respectively. Since the first rotating shaft 41 and the second rotating shaft 51 need to rotate relative to the process cavity 10, there is a gap between the first rotating shaft 41 and the second rotating shaft 51 and the process cavity 10 for the rotating shaft to rotate. The magnetic fluid sealing assembly 80 located outside the first rotating shaft 41 is disposed at the connection between the first rotating shaft 41 and the process cavity 10, or the magnetic fluid sealing assembly 80 located outside the first rotating shaft 41 is disposed between the first rotating shaft 41 and the fixed seat 70, so as to maintain the sealed state of the process cavity 10 during the rotation of the rotating shaft.

[0057] Furthermore, the magnetofluid sealing assembly 80 includes a magnetic source, pole shoes, and magnetofluid. The magnetic source generates a magnetic field, and the pole shoes guide and concentrate the magnetic field, keeping the magnetofluid within the corresponding sealing gap. Under the action of the magnetic field, the magnetofluid forms an annular sealing interface, thereby sealing the gap between the first rotating shaft 41 and the process cavity 10, and sealing the gap between the second rotating shaft 51 and the first rotating shaft 41. Since the magnetofluid seal is a non-contact sealing structure, the first rotating shaft 41 and the second rotating shaft 51 can reduce direct contact with the sealing structure during rotational transmission.

[0058] In this application, the transmission mechanism 60 includes a first transmission member 61 and a second transmission member 62. The first transmission member 61 is connected to the second rotary drive mechanism 50. The first transmission member 61 is also connected to the second rotating member 30. The first transmission member 61 and the second transmission member 62 are connected in a transmission manner to transmit the second rotational power output from the second rotary drive mechanism 50 to the second rotating member 30.

[0059] Specifically, the second rotational power output by the second rotational drive mechanism 50 is transmitted to the first transmission member 61. The first transmission member 61 moves under the action of the second rotational power and transmits the second rotational power to the second transmission member 62 through the transmission connection between the first transmission member 61 and the second transmission member 62, thereby driving the second rotating member 30 to rotate around the corresponding second rotational axis 51.

[0060] Multiple second rotating components 30 are respectively connected to the second rotating drive mechanism 50 through corresponding transmission mechanisms 60, so that the second rotating power output by the second rotating drive mechanism 50 can be transmitted to the multiple second rotating components 30 respectively, thereby driving the multiple second rotating components 30 to rotate on their own.

[0061] With the above configuration, the first rotational power output by the first rotary drive mechanism 40 is transmitted to multiple second rotary components 30 through the first rotary component 20 to achieve the revolution of the multiple second rotary components 30; the second rotational power output by the second rotary drive mechanism 50 is transmitted to the multiple second rotary components 30 through the transmission mechanism 60 to achieve the rotation of the multiple second rotary components 30. Thus, the first rotational power and the second rotational power are transmitted along different power transmission paths, enabling the revolution and rotation of the multiple second rotary components 30 to be controlled separately.

[0062] In some embodiments of this application, the first transmission member 61 and the second transmission member 62 may adopt different transmission structures to realize the power transmission between the second rotary drive mechanism 50 and the second rotating member 30.

[0063] In one embodiment of this application, the first transmission member 61 and the second transmission member 62 are respectively a first magnetic transmission member and a second magnetic transmission member, and the first magnetic transmission member and the second magnetic transmission member transmit the second rotational power through the action of a magnetic field.

[0064] Specifically, the first magnetic transmission component is connected to the second rotary drive mechanism 50, and the second magnetic transmission component is connected to the second rotating component 30. The first and second magnetic transmission components are arranged correspondingly to each other. When the second rotary drive mechanism 50 outputs the second rotational power, it drives the first magnetic transmission component to rotate. The first magnetic transmission component transmits the second rotational power to the second magnetic transmission component through the magnetic field interaction between the first and second magnetic transmission components. In turn, the second magnetic transmission component drives the second rotating component 30 to rotate around the corresponding second rotation axis 51.

[0065] Since the first magnetic transmission component and the second magnetic transmission component transmit power through the action of a magnetic field, there is no need to rely on direct contact between the two to achieve the transmission of rotational power during the power transmission process.

[0066] In some deposition processes, the interior of the process chamber 10 is highly sensitive to particles. Using a first magnetic drive component and a second magnetic drive component for power transmission can reduce friction caused by direct contact between the drive components, thereby reducing the possibility of particle generation during transmission. This makes the magnetic coupling drive method suitable for deposition environments with high particle control requirements. Therefore, the transmission method using the first drive component 61 and the second drive component 62 as the first and second magnetic drive components respectively can simultaneously achieve the second rotational power transmission while adapting to the deposition equipment's requirements for substrate rotation and particle control within the process chamber 10. Furthermore, it coordinates with the independent rotational drive methods of revolution and rotation to achieve substrate rotation drive in multi-station deposition processes.

[0067] In another embodiment of this application, the first transmission member 61 and the second transmission member 62 are respectively a first gear and a second gear, and the first gear and the second gear mesh with each other to transmit a second rotational power.

[0068] Specifically, the first gear is connected to the second rotary drive mechanism 50, and the second gear is connected to the second rotating component 30. When the second rotary drive mechanism 50 outputs the second rotary power, it drives the first gear to rotate. The first gear transmits the second rotary power to the second gear through meshing with the second gear, and the second gear drives the second rotating component 30 to rotate around the corresponding second rotary axis 51.

[0069] Gear transmission structures are suitable for deposition processes that require high rotational driving force and transmission torque. Therefore, in applications with high deposition temperatures or where the second rotating component 30 requires a large rotational driving force, a first gear and a second gear can be used for power transmission to meet the substrate rotation requirements of the corresponding deposition process. Thus, in this embodiment, the second rotational power is transmitted to the second rotating component 30 through the meshing of the first gear and the second gear, and while maintaining the independence of the first and second rotational powers, a self-rotation drive method suitable for the corresponding deposition process is provided for the second rotating component 30.

[0070] In another embodiment of this application, the first transmission member 61 and the second transmission member 62 are respectively a first sprocket and a second sprocket, and a chain is connected between the first sprocket and the second sprocket to transmit the second rotational power.

[0071] Specifically, the first sprocket is connected to the second rotary drive mechanism 50, the second sprocket is connected to the second rotating component 30, and the chain is connected to both the first and second sprockets. When the second rotary drive mechanism 50 outputs the second rotary power, it drives the first sprocket to rotate. The first sprocket drives the second sprocket to rotate via the chain, and the second sprocket further drives the second rotating component 30 to rotate around the corresponding second rotary axis 51, thereby realizing the rotation of the second rotating component 30.

[0072] In another embodiment of this application, the first transmission member 61 and the second transmission member 62 are respectively the first pulley and the second pulley, and a transmission belt is connected between the first pulley and the second pulley to transmit the second rotational power.

[0073] Specifically, the first pulley is connected to the second rotary drive mechanism 50, the second pulley is connected to the second rotating component 30, and the transmission belt is connected to both the first and second pulleys. When the second rotary drive mechanism 50 outputs the second rotary power, it drives the first pulley to rotate. The first pulley drives the second pulley to rotate via the transmission belt, and the second pulley further drives the second rotating component 30 to rotate around the corresponding second rotary axis 51, thereby realizing the rotation of the second rotating component 30.

[0074] In some deposition processes, when the operating temperature is relatively low and there are certain requirements for the flexibility of the transmission structure, a pulley transmission structure can be adopted according to the actual process requirements to achieve the self-rotation drive of the second rotating component 30.

[0075] The above are merely specific embodiments of this application, but the protection scope of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in this application should be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the scope of the claims.

Claims

1. A multi-station rotary drive device, applied to a deposition equipment, the deposition equipment including a process chamber, characterized in that, include: The first rotating component is rotatably disposed within the process cavity; Multiple second rotating members are rotatably connected to the first rotating member and are spaced apart along the circumference of the first rotating member. The second rotating members are used to support the substrate. A first rotary drive mechanism is connected to the first rotary component for driving the first rotary component to rotate around a first rotation axis, thereby driving multiple second rotary components to revolve around the first rotation axis. The second rotary drive mechanism is connected to a plurality of second rotating components via a transmission mechanism, and is used to drive the plurality of second rotating components to rotate around their respective second rotation axes. The second rotation axes are parallel to and spaced apart from the first rotation axis. The first rotary drive mechanism and the second rotary drive mechanism respectively provide independent first rotary power and second rotary power, so that the revolution and rotation of the multiple second rotary components are independent of each other.

2. The multi-station rotary drive device according to claim 1, characterized in that, The second rotary drive mechanism is rotatably disposed within the first rotary drive mechanism and extends to the outside of the first rotary drive mechanism, and is connected to the second rotating component via the transmission mechanism.

3. The multi-station rotary drive device according to claim 2, characterized in that, The first rotary drive mechanism includes: A first rotating shaft is rotatably disposed within the process cavity and connected to the first rotating component; The first driving component is connected to the first rotating shaft via a transmission connection and is used to drive the first rotating shaft to rotate.

4. The multi-station rotary drive device according to claim 3, characterized in that, The second rotary drive mechanism includes: The second rotating shaft is rotatably disposed within the first rotating shaft and can rotate independently relative to the first rotating shaft. The second rotating shaft is connected to the second rotating component via a transmission connection. The second driving component is connected to the second rotating shaft for driving the second rotating shaft to rotate.

5. The multi-station rotary drive device according to claim 4, characterized in that, Also includes: A magnetohydrodynamic sealing assembly is disposed outside the first rotating shaft and between the first rotating shaft and the second rotating shaft to seal the first rotating shaft and the second rotating shaft with respect to the process cavity, respectively.

6. The multi-station rotary drive device according to claim 1, characterized in that, The transmission mechanism includes: The first transmission component is connected to the second rotary drive mechanism; The second transmission component is connected to the second rotating component; The first transmission member is connected to the second transmission member to transmit the second rotational power output by the second rotational drive mechanism to the second rotational member.

7. The multi-station rotary drive device according to claim 6, characterized in that, The first transmission component and the second transmission component are respectively a first magnetic transmission component and a second magnetic transmission component, and the first magnetic transmission component and the second magnetic transmission component transmit the second rotational power through the action of a magnetic field.

8. The multi-station rotary drive device according to claim 6, characterized in that, The first transmission component and the second transmission component are respectively a first gear and a second gear, and the first gear and the second gear mesh with each other to transmit the second rotational power.

9. The multi-station rotary drive device according to claim 6, characterized in that, The first transmission component and the second transmission component are respectively a first sprocket and a second sprocket, and a chain is connected between the first sprocket and the second sprocket to transmit the second rotational power.

10. The multi-station rotary drive device according to claim 6, characterized in that, The first transmission component and the second transmission component are respectively a first pulley and a second pulley, and a transmission belt is connected between the first pulley and the second pulley to transmit the second rotational power.

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