Electrochemical polishing system and method
Patent Information
- Application Number
- CN202611034404.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-13
- Publication Date
- 2026-10-20
AI Technical Summary
[0005]1.非实时性:检测与调整发生在抛光工序之前和之后,无法在加工过程中实时捕捉和纠正偏差
本发明对待抛光工件进行同步、原位、在线监测。基于多源监测数据,通过智能控制算法进行融合分析,实时决策并动态调整电解抛光参数、激光参数,形成全过程的自适应闭环控制。将本智能闭环控制系统应用于激光复合电化学抛光等先进工艺,实现多能场参数的智能协同优化,从而显著提升复杂曲面、难加工材料工件的抛光一致性、表面完整性和工艺稳健性。
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Abstract
Description
Technical Field
[0001] This invention relates to the field of laser composite electrochemical polishing technology, specifically to an electrochemical polishing system and method. Background Technology
[0002] Laser-assisted electrochemical polishing, as a non-contact, macroscopic-force-free precision surface treatment technology, has shown great potential in polishing complex components, especially difficult-to-machine materials such as titanium alloys, in fields such as medical devices and aerospace. However, traditional and existing improved laser-assisted electrochemical polishing technologies still face challenges such as process obscurity, lag in control, and insufficient adaptability to complex surfaces.
[0003] Patent CN113897664B discloses a laser-composite electrochemical polishing technology. It uses a laser to first rough polish the surface to reduce the initial roughness, and then performs electrochemical fine polishing in an electrolyte environment. The two work together to achieve nanoscale surface roughness and avoid some of the problems that titanium alloys encounter in the polishing process alone.
[0004] The patent with publication number CN121472960A discloses a vision-guided electrochemical polishing system. This system is designed for complex integral components. It introduces an image acquisition system to obtain the surface morphology of the workpiece, and the motion control system plans the cathode motion trajectory and dynamically adjusts the processing parameters based on the visual information, which has a high degree of intelligence.
[0005] 1. Non-real-time nature: Detection and adjustment occur before and after the polishing process, making it impossible to capture and correct deviations in real time during processing.
[0006] 2. Limited information dimensions: It mainly relies on macroscopic visual morphology and lacks direct monitoring of the core physical and chemical processes of processing.
[0007] 3. Control delay: Repairing areas that do not meet the standards is a post-processing remedy, which increases the total processing time and may affect geometric accuracy due to over-polishing.
[0008] To address the above shortcomings, those skilled in the art urgently need to improve existing intelligent electrochemical polishing systems and methods. Summary of the Invention
[0009] Therefore, the technical problem to be solved by the present invention is to overcome the defects existing in the prior art, thereby providing an electrochemical polishing system and method.
[0010] An electrochemical polishing system includes: a polishing execution body, a multimodal online monitoring unit, a control unit, and a parameter execution unit; Polishing execution entity: Polishing is performed by the combination of laser, electrolyte, and tool electrode; The multimodal online monitoring unit collects voltage, current and temperature data in real time at the polishing point and within a preset range nearby, acquiring multi-source monitoring data. The control unit is connected to the multimodal online monitoring unit, receives and processes multi-source monitoring data, and generates parameter adjustment instructions; The parameter execution unit is connected to the control unit, and adjusts the programmable power output value connected to the tool electrode in the polishing execution body, the attitude of the multi-dimensional displacement platform carrying the workpiece to be polished, and the circulation rate of the electrolyte in the electrolyte tank based on the parameter adjustment instructions. The control unit is connected to the polishing execution body, which receives parameter adjustment instructions to adjust the laser scanning speed and laser power of the laser.
[0011] Preferably, the polishing execution body consists of a laser, a beam transmission and focusing system, a workpiece to be polished, an insulating fixture, a tool electrode, an electrolyte tank, a multi-dimensional displacement platform, and a storage tank; Among them, the electrolyte tank fixed to the top surface of the multidimensional displacement platform is connected to the liquid storage tank for liquid guiding; In the electrolyte tank: the tool electrode is placed at the bottom of the insulating fixture; the workpiece to be polished is placed at the top of the insulating fixture, and the shape of the tool electrode is adapted to the shape of the workpiece to be polished; the laser beam emitted from the laser is adjusted by the beam transmission and focusing system and then acts on the workpiece to be polished.
[0012] Preferably, the multimodal online monitoring unit consists of an infrared temperature probe and an electrical parameter sensor; The voltage and current data collected by the electrical parameter sensor are specifically the voltage and current of the electrochemical interface state at and near the polishing point within a preset range. The temperature data collected by the infrared temperature probe specifically includes the temperature data of the electrochemical interface temperature distribution within a preset range around the polishing point.
[0013] Preferably, the parameter execution unit consists of a programmable power supply, an electrolyte circulation and regulation system, and a motion control system; The negative terminal of the programmable power supply is connected in sequence with the tool electrode, the electrical parameter sensor, and the positive terminal of the programmable power supply to form a closed loop. An electrolyte circulation and regulation system is provided between the electrolyte tank and the storage tank to control the circulation rate of the electrolyte; The motion control system is connected to the multi-dimensional displacement platform to control the attitude of the multi-dimensional displacement platform.
[0014] Preferably, the control unit includes an evaluation module and a parameter optimization module; The evaluation module integrates multi-source monitoring data and inputs the integrated multi-source monitoring data and historical polishing process data into a preset process state evaluation model. It then outputs the current polishing state evaluation result and quantitative indicators. Parameter optimization module: compares quantitative indicators with process targets, performs optimization calculations based on the comparison results, and generates parameter adjustment instructions.
[0015] An electrochemical polishing method, implemented using an electrochemical polishing system, includes: S1. System initialization and process target presetting: Assemble the workpiece to be polished into the electrolyte tank and inject electrolyte; set process targets and process constraints; S2. Start polishing and simultaneously enable multimodal monitoring: Start the programmable power supply and set the initial output value of the programmable power supply; adjust the laser spot to irradiate the initial area and start laser polishing; and simultaneously collect multi-source monitoring data. S3. Multi-source data fusion and real-time status assessment: Integrate multi-source monitoring data and use a preset process status assessment model combined with historical polishing data to assess the current polishing status and output quantitative indicators; S4. Intelligent Decision-Making and Parameter Optimization: Compare quantitative indicators with process objectives, perform optimization calculations based on the comparison results, and generate parameter adjustment instructions; S5. Multi-parameter collaborative execution and closed-loop control: Based on parameter adjustment instructions, the programmable power supply output value connected to the tool electrode, the attitude of the multi-dimensional displacement platform carrying the workpiece to be polished, the circulation rate of the electrolyte in the electrolyte tank, and the laser scanning speed and laser power of the laser are adjusted. S6. Determine if polishing is complete: Based on the overall cumulative processing time, the total estimated value of polishing removal, or the changing trend of multi-source monitoring data, determine whether the preset process endpoint has been reached; S7. If the result of step S6 is yes, the method execution ends; if the result of step S6 is no, then repeat steps S2 to S7 until the result of step S6 is yes.
[0016] Preferably, the sampling frequency during multi-source monitoring data acquisition is ≥1kHz.
[0017] The technical solution of this invention has the following advantages: This invention provides synchronous, in-situ, and online monitoring of the workpiece to be polished. Based on multi-source monitoring data, it uses intelligent control algorithms for fusion analysis, making real-time decisions and dynamically adjusting electrolytic polishing parameters and laser parameters to form an adaptive closed-loop control throughout the entire process. Applying this intelligent closed-loop control system to advanced processes such as laser-composite electrochemical polishing enables intelligent collaborative optimization of multiple energy field parameters, thereby significantly improving the polishing consistency, surface integrity, and process robustness of workpieces with complex curved surfaces and difficult-to-machine materials. Attached Figure Description
[0018] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0019] Figure 1 This is an overall block diagram of an electrochemical polishing system according to the present invention; Figure 2 This is a view showing the relationship between the components inside the electrolytic cell.
[0020] Explanation of reference numerals in the attached figures: 1-Laser, 2-Beam transmission and focusing system, 3-Workpiece to be polished, 4-Insulating fixture, 5-Tool electrode, 6-Electrolyte tank, 7-Infrared temperature probe, 8-Programmable power supply, 9-Electrical parameter sensor, 10-Reservoir. Detailed Implementation
[0021] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0022] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0023] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0024] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0025] Example 1 This embodiment discloses an electrochemical polishing system, which specifically includes: a polishing execution body, a multimodal online monitoring unit, a control unit, and a parameter execution unit; Polishing execution body: Polishing is performed by the cooperation of laser 1, electrolyte, and tool electrode 5; The multimodal online monitoring unit collects voltage, current and temperature data in real time at the polishing point and within a preset range nearby, acquiring multi-source monitoring data. The control unit is connected to the multimodal online monitoring unit, receives and processes multi-source monitoring data, and generates parameter adjustment instructions; In this embodiment, the present invention synchronously adjusts the laser scanning speed, laser power, and electrochemical polishing current density based on the real-time current, voltage, and temperature distribution of the electrochemical process to maintain the optimal process window. The parameter execution unit is connected to the control unit, and adjusts the output value of the programmable power supply 8 connected to the tool electrode 5 in the polishing execution body, the posture of the multi-dimensional displacement platform carrying the workpiece 3 to be polished, and the circulation rate of the electrolyte in the electrolyte tank 6 based on the parameter adjustment instructions. The control unit is connected to the polishing execution body, which receives parameter adjustment instructions to adjust the laser scanning speed and laser power of laser 1.
[0026] Polishing execution body: The polishing execution unit consists of a laser 1, a beam transmission and focusing system 2, a workpiece to be polished 3, an insulating fixture 4, a tool electrode 5, an electrolyte tank 6, a multi-dimensional displacement platform, and a storage tank 10. The electrolyte tank 6, fixed to the top surface of the multidimensional displacement platform, is connected to the liquid storage tank 10 via a liquid guiding connection. Within the electrolyte in the electrolyte tank 6: the tool electrode 5 is placed at the bottom of the insulating fixture 4; the workpiece 3 to be polished is placed on top of the insulating fixture 4, and the shape of the tool electrode 5 is adapted to the shape of the workpiece 3 to be polished. This structural arrangement ensures the uniform distribution of current density during electrolytic processing and the stability of the optical path during laser processing, ensuring the consistency of polishing effect. The laser beam emitted by the laser 1 is adjusted by the beam transmission and focusing system 2 and then applied to the workpiece 3 to be polished. It should be noted that during the polishing process, the laser 1 and the beam transmission and focusing system 2 remain stationary, and the workpiece 3 to be polished is polished only by the movement of the multi-dimensional displacement platform.
[0027] Multimodal online monitoring unit: The multimodal online monitoring unit consists of an infrared temperature probe 7 and an electrical parameter sensor 9. The unit uses both the infrared temperature probe 7 and the electrical parameter sensor 9 to collect in-situ real-time data on the electrochemical interface state and temperature distribution within a preset range around the polishing point in the electrolyte environment. It should be noted that the number of infrared temperature probes 7 and electrical parameter sensors 9 in practical applications depends on the size and structural design of the workpiece 3 to be polished. The voltage and current data collected by the electrical parameter sensor 9 specifically represent the voltage and current at the electrochemical interface state within a preset range around the polishing point. The temperature data collected by the infrared temperature probe 7 is specifically the temperature data of the electrochemical interface temperature distribution within the polishing point and a preset range nearby.
[0028] The parameter execution unit consists of a programmable power supply, an electrolyte circulation and regulation system, and a motion control system. Among them, the negative terminal of the programmable power supply 8 is connected in sequence with the tool electrode 5, the electrical parameter sensor 9, and the positive terminal of the programmable power supply 8 to form a closed circuit. An electrolyte circulation and regulation system is provided between the electrolyte tank 6 and the storage tank 10 to control the circulation rate of the electrolyte; The motion control system is connected to the multi-dimensional displacement platform to control the attitude of the multi-dimensional displacement platform.
[0029] The control unit includes an evaluation module and a parameter optimization module; The evaluation module integrates multi-source monitoring data and inputs the integrated multi-source monitoring data and historical polishing process data into a preset process state evaluation model. It then outputs the current polishing state evaluation result and quantitative indicators. Parameter optimization module: compares quantitative indicators with process targets, performs optimization calculations based on the comparison results, and generates parameter adjustment instructions.
[0030] Example 2 This embodiment discloses an electrochemical polishing method, implemented using the system disclosed in Embodiment 1, and includes the following steps: S1. System initialization and process target presetting: Assemble the workpiece 3 to be polished into the electrolyte tank 6 and inject electrolyte; set process targets and process constraints; S2. Start polishing and simultaneously enable multimodal monitoring: Start the programmable power supply 8 and set the initial output value of the programmable power supply 8; adjust the laser spot of laser 1 to irradiate the initial area, start laser 1 polishing; and simultaneously collect multi-source monitoring data. S3. Multi-source data fusion and real-time status assessment: Integrate multi-source monitoring data and use a preset process status assessment model combined with historical polishing data to assess the current polishing status and output quantitative indicators; S4. Intelligent Decision-Making and Parameter Optimization: Compare quantitative indicators with process objectives, perform optimization calculations based on the comparison results, and generate parameter adjustment instructions; S5. Multi-parameter collaborative execution and closed-loop control: Based on parameter adjustment instructions, adjust the output value of the programmable power supply 8 connected to the tool electrode 5, the attitude of the multi-dimensional displacement platform carrying the workpiece 3 to be polished, the circulation rate of the electrolyte in the electrolyte tank 6, and the laser scanning speed and laser power of the laser 1. S6. Determine if polishing is complete: Based on the overall cumulative processing time, the total estimated value of polishing removal, or the changing trend of multi-source monitoring data, determine whether the preset process endpoint has been reached; S7. If the result of step S6 is yes, the method operation ends; if the result of step S6 is no, then repeat steps S2 to S7 until the result of step S6 is yes, then turn off the power, stop the motion and all monitoring sensors, the polishing process ends, and the workpiece cleaning and post-processing stage begins.
[0031] Specifically: S1. System initialization and process target presetting: S101. System Initialization: Assemble the workpiece 3 to be polished, the insulating fixture 4, and the tool electrode 5 into the electrolyte tank 6. Obtain the initial position of the workpiece 3 to be polished. Inject electrolyte from the storage tank 10 into the electrolyte tank 6.
[0032] S102. Start the system and input the process objectives and process constraints of the workpiece 3 to be polished into the control unit.
[0033] Process objectives include, but are not limited to, the final surface roughness value and the target material removal thickness; Process constraints, including but not limited to maximum allowable current and maximum allowable temperature; S2. Start polishing and simultaneously activate multimodal monitoring: S201. Start the programmable power supply 8, electrolyte circulation system, and laser 1; set the initial voltage value applied by the programmable power supply 8 between the tool electrode 5 and the workpiece 3 to be polished; adjust the laser beam emitted by laser 1 to irradiate the initial polishing area of the workpiece 3; S202. Execute synchronously with step S201, start the multimodal online monitoring unit to collect data, and upload it synchronously to the control unit in real time at a fixed sampling frequency. The sampling frequency is ≥1kHz.
[0034] S3. Multi-source data fusion and real-time status assessment: S301. The data fusion module built into the control unit is used to process the collected timing signals of voltage, current and temperature in real time; S302. The real-time features obtained after real-time processing in step S301 are input into the preset process status evaluation model in the control unit. The process status evaluation model combines historical polishing data to determine the current polishing status and output quantitative indicators.
[0035] S4. Intelligent Decision-Making and Parameter Optimization: S401. Based on the multi-objective optimization decision algorithm built into the control unit, the real-time polishing state evaluated in step S302 is compared with the process target set in step S102. If a deviation exists, optimization calculation is initiated to generate optimization adjustment parameters.
[0036] Taking the removal rate optimization calculation as an example: When step S401 determines that the removal rate is insufficient, the multi-objective optimization decision algorithm calculates the output voltage adjustment of the programmable power supply 8 and the scanning speed adjustment of the laser 1 under preset constraints, so that after adjusting the programmable power supply 8 and the laser 1 by applying the output voltage adjustment and scanning speed adjustment, the estimated removal rate approaches the process target at the fastest rate.
[0037] It should be noted that in practical applications, data fusion technology, process status assessment model and multi-objective optimization decision algorithm are all common technical means in the prior art. This embodiment does not improve the three technical means. Moreover, in practical applications, the three technical means can be selected according to actual needs. Therefore, the specific working principle and technical implementation of the three technical means will not be described in detail in this embodiment.
[0038] In summary, this embodiment upgrades from open-loop control with fixed parameters to closed-loop control based on dynamic parameter adjustment using real-time monitoring feedback, significantly improving process stability and consistency. Furthermore, it introduces on-site synchronous monitoring of voltage, current, and temperature in the processing area, building upon traditional laser + electrolyte polishing methods. This achieves process transparency and enables real-time early warning and intervention for abnormal states. It moves beyond relying solely on morphological information to a comprehensive assessment and decision-making process integrating morphological, electrochemical, and thermal field information, resulting in more precise and scientific control.
[0039] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.
Claims
1. An electrochemical polishing system, characterized in that, include: Polishing actuator, multimodal online monitoring unit, control unit, and parameter execution unit; Polishing execution body: Polishing is performed by the cooperation of laser (1) and electrolyte, and tool electrode (5); The multimodal online monitoring unit collects voltage, current and temperature data in real time at the polishing point and within a preset range nearby, acquiring multi-source monitoring data. The control unit is connected to the multimodal online monitoring unit, receives and processes multi-source monitoring data, and generates parameter adjustment instructions; The parameter execution unit and the control unit are connected, and the output value of the programmable power supply (8) connected to the tool electrode (5) in the polishing execution body is adjusted based on the parameter adjustment command, as well as the attitude of the multi-dimensional displacement platform carrying the workpiece (3) to be polished and the circulation rate of the electrolyte in the electrolyte tank (6). The control unit is connected to the polishing execution body, and the polishing execution body receives parameter adjustment instructions to adjust the laser scanning speed and laser power of the laser (1).
2. The electrochemical polishing system according to claim 1, characterized in that, The polishing execution body consists of a laser (1), a beam transmission and focusing system (2), a workpiece to be polished (3), an insulating fixture (4), a tool electrode (5), an electrolyte tank (6), a multi-dimensional displacement platform, and a storage tank (10); Among them, the electrolyte tank (6) fixed on the top surface of the multidimensional displacement platform is connected to the liquid storage tank (10) for liquid conduction; In the electrolyte of the electrolyte tank (6): the tool electrode (5) is placed at the bottom of the insulating fixture (4); the workpiece (3) to be polished is placed at the top of the insulating fixture (4), and the shape of the tool electrode (5) is adapted to the shape of the workpiece (3) to be polished; the laser beam emitted by the laser (1) is adjusted by the beam transmission and focusing system (2) and then acts on the workpiece (3) to be polished.
3. The electrochemical polishing system according to claim 2, characterized in that, The multimodal online monitoring unit consists of an infrared temperature probe (7) and an electrical parameter sensor (9); The voltage and current data collected by the electrical parameter sensor (9) are specifically the voltage and current of the electrochemical interface state at the polishing point and within a preset range. The temperature data collected by the infrared temperature probe (7) is specifically the temperature data of the electrochemical interface temperature distribution within the preset range of the polishing point.
4. The electrochemical polishing system according to claim 3, characterized in that, The parameter execution unit consists of a programmable power supply (8), an electrolyte circulation and regulation system, and a motion control system; Among them, the negative terminal of the programmable power supply (8) is connected in sequence with the tool electrode (5), the electrical parameter sensor (9), and the positive terminal of the programmable power supply (8) to form a closed loop; An electrolyte circulation and regulation system is provided between the electrolyte tank (6) and the storage tank (10) to control the circulation rate of the electrolyte; The motion control system is connected to the multi-dimensional displacement platform to control the attitude of the multi-dimensional displacement platform.
5. The electrochemical polishing system according to claim 4, characterized in that, The control unit includes an evaluation module and a parameter optimization module; The evaluation module integrates multi-source monitoring data and inputs the integrated multi-source monitoring data and historical polishing process data into a preset process state evaluation model. It then outputs the current polishing state evaluation result and quantitative indicators. Parameter optimization module: compares quantitative indicators with process targets, performs optimization calculations based on the comparison results, and generates parameter adjustment instructions.
6. An electrochemical polishing method, characterized in that, The electrochemical polishing system according to claim 5 is used to achieve the following: S1. System initialization and process target presetting: Assemble the workpiece (3) to be polished into the electrolyte tank (6) and inject electrolyte; set process targets and process constraints; S2. Start polishing and simultaneously enable multimodal monitoring: Start the programmable power supply (8) and set the initial output value of the programmable power supply (8); adjust the laser spot of the laser (1) to irradiate the initial area, start the laser (1) for polishing; and simultaneously collect multi-source monitoring data. S3. Multi-source data fusion and real-time status assessment: Integrate multi-source monitoring data and use a preset process status assessment model combined with historical polishing data to assess the current polishing status and output quantitative indicators; S4. Intelligent Decision-Making and Parameter Optimization: Compare quantitative indicators with process objectives, perform optimization calculations based on the comparison results, and generate parameter adjustment instructions; S5. Multi-parameter collaborative execution and closed-loop control: Based on parameter adjustment instructions, adjust the output value of the programmable power supply (8) connected to the tool electrode (5), the attitude of the multi-dimensional displacement platform carrying the workpiece to be polished (3), the circulation rate of the electrolyte in the electrolyte tank (6), and the laser scanning speed and laser power of the laser (1); S6. Determine if polishing is complete: Based on the overall cumulative processing time, the total estimated value of polishing removal, or the changing trend of multi-source monitoring data, determine whether the preset process endpoint has been reached; S7. If the result of step S6 is yes, the method execution ends; if the result of step S6 is no, then repeat steps S2 to S7 until the result of step S6 is yes.
7. The electrochemical polishing method according to claim 5, characterized in that, The sampling frequency during multi-source monitoring data acquisition is ≥1kHz.
Citation Information
Patent Citations
An apparatus and method for laser-based composite electrochemical polishing of titanium alloys.
CN113897664B
Visual guidance-based electrochemical polishing system and method for integral component with complex molded surface
CN121472960A