Mask drying apparatus and mask drying method using the same

Abstract

This invention relates to a mask drying apparatus and a mask drying method using the same apparatus. The mask drying apparatus includes: a first plate; a first heating element extending along the edge of the first plate inside the first plate; a first air nozzle disposed on a first surface of the first plate and discharging air; a second heating element bypassing the first air nozzle and traversing the first plate in a plane inside the first plate; a second plate disposed on the first plate; and a second air nozzle disposed on the first surface of the second plate and discharging air.

Description

Technical Field

[0001] This invention relates to a mask drying apparatus and a mask drying method using the same apparatus. More specifically, this invention relates to a mask drying apparatus for a display device and a mask drying method using the same apparatus. Background Technology

[0002] A display device is a device that displays images to provide visual information to a user. Recently, organic light-emitting diode (OLED) display devices have attracted much attention.

[0003] Organic light-emitting display devices may include light-emitting elements, which may include an anode electrode, a light-emitting layer, and a cathode electrode. To form the light-emitting layer, a mask such as a fine metal mask can be used. An organic thin film with a desired pattern can be deposited on a substrate using a fine metal mask.

[0004] When a light-emitting layer is formed through a mask, organic matter may be deposited on the mask's surface. Therefore, a mask cleaning process may be necessary. For example, the mask can be cleaned by spraying a cleaning solution onto it or immersing it in the solution. In this case, cleaning solution residue may remain on the mask's surface, potentially causing water spots, thus requiring a process to remove the residual cleaning solution. Summary of the Invention

[0005] One object of the present invention is to provide a simplified mask drying apparatus.

[0006] Another object of the present invention is to provide a mask drying method using the mask drying apparatus.

[0007] However, the purpose of this invention is not limited to the above-described purpose, and can be extended in various ways without departing from the concept and scope of this invention.

[0008] To achieve the above-mentioned objective of the present invention, a mask drying apparatus according to an embodiment of the present invention includes: a first plate; a first heating member extending along the edge of the first plate inside the first plate; a first air nozzle disposed on a first surface of the first plate and discharging air; a second heating member bypassing the first air nozzle and traversing the first plate in a plane inside the first plate; a second plate disposed on the first plate; and a second air nozzle disposed on a first surface of the second plate and discharging air.

[0009] In one embodiment, the first surface of the first plate and the first surface of the second plate may be opposite to each other.

[0010] In one embodiment, the first heating element may include a coil housing and an induction coil disposed inside the coil housing.

[0011] In one embodiment, the mask drying apparatus may further include: a vortex tube connected to the first air nozzle and including an air inlet for compressed air to flow in, an internal space for generating a vortex, a first outlet for discharging air with a first temperature, and a second outlet for discharging air with a second temperature lower than the first temperature.

[0012] In one embodiment, the first air nozzle may be connected to either the first outlet or the second outlet.

[0013] In one embodiment, the second heating element may include a sheath heater.

[0014] In one embodiment, a portion of the second heating element may extend along a first direction, and another portion of the second heating element may extend along a second direction intersecting the first direction.

[0015] In one embodiment, the mask drying apparatus may further include: a vortex tube connected to the second air nozzle and including an air inlet for allowing compressed air to flow in, an internal space for generating a vortex, a first outlet for discharging air having a first temperature, and a second outlet for discharging air having a second temperature lower than the first temperature.

[0016] In one embodiment, the second air nozzle may be connected to either the first outlet or the second outlet.

[0017] In one embodiment, at least a portion of the cleaning fluid remaining in the mask assembly can be removed by the first heating element, the second heating element, the first air nozzle, and the second air nozzle. The mask assembly may include a mask frame and a mask attached to the mask frame via a joint.

[0018] In one embodiment, the first heating element may at least partially overlap the joint in a plane.

[0019] In one embodiment, the first heating element may surround the first air nozzle in a plane.

[0020] In one embodiment, the first air nozzle may be repeatedly arranged along a first direction and a second direction intersecting the first direction, a portion of the first heating element may extend along the first direction, and another portion of the first heating element may extend along the second direction.

[0021] To achieve another objective of the present invention described above, a mask drying method according to an embodiment of the present invention includes the following steps: placing a mask assembly comprising a mask frame and a mask attached to the mask frame on a platform; moving a first drying module toward the mask assembly, the first drying module comprising a first plate, a first heating element extending along the edge of the first plate inside the first plate, a first air nozzle disposed on a first surface of the first plate and discharging air, and a second heating element disposed inside the first plate around the first air nozzle and traversing the first plate in a plane; and moving a second drying module toward the mask assembly, the second drying module comprising a second plate disposed on the first plate and a second air nozzle disposed on a first surface of the second plate and discharging air.

[0022] In one embodiment, the step of moving the first drying module toward the mask assembly may include moving the first drying module below the mask assembly toward the mask assembly, and the step of moving the second drying module toward the mask assembly may include moving the second drying module above the mask assembly toward the mask assembly.

[0023] In one embodiment, the mask frame may define a frame opening, and the step of moving the first drying module may include moving a portion of the first drying module into the interior of the frame opening of the mask frame.

[0024] In one embodiment, the mask may be attached to the mask frame via a joint, and the first heating element may at least partially overlap the joint in a plane.

[0025] In one embodiment, the mask drying method may further include the step of connecting the first air nozzle to a vortex tube, the vortex tube including a first outlet for discharging air with a first temperature and a second outlet for discharging air with a second temperature lower than the first temperature.

[0026] In one embodiment, the step of connecting the first air nozzle to the vortex tube includes: connecting the first air nozzle to the first outlet; and separating the first air nozzle from the first outlet and connecting the first air nozzle to the second outlet.

[0027] In one embodiment, the mask drying method may further include the steps of: moving the first drying module away from the mask assembly; and moving the second drying module away from the mask assembly.

[0028] A mask drying apparatus according to an embodiment of the present invention includes: a first plate; a first heating element extending along the edge of the first plate inside the first plate; a first air nozzle disposed on a first surface of the first plate and discharging air; a second heating element bypassing the first air nozzle and traversing the first plate in a plane inside the first plate; a second plate disposed on the first plate; and a second air nozzle disposed on a first surface of the second plate and discharging air.

[0029] Therefore, the mask drying device can effectively remove cleaning fluid residue from the mask assembly. Furthermore, it simplifies the configuration of the mask drying device and reduces the cost of drying the mask assembly.

[0030] However, the effects of the present invention are not limited to those described above, and can be extended in various ways without departing from the concept and scope of the present invention. Attached Figure Description

[0031] Figure 1 This is an exploded perspective view showing a mask assembly being dried using a mask drying apparatus according to an embodiment of the present invention.

[0032] Figure 2 It is shown Figure 1 A three-dimensional view of the mask assembly.

[0033] Figure 3 It is Figure 2 A cross-sectional view of the mask assembly taken along line I-I'.

[0034] Figure 4 It is shown in magnification Figure 3 A cross-sectional view of region A.

[0035] Figure 5 This is a cross-sectional view showing a mask drying apparatus according to an embodiment of the present invention.

[0036] Figure 6 It is shown that it includes Figure 5 A plan view of the first drying module in the mask drying apparatus.

[0037] Figure 7 It is shown that it includes Figure 5 The bottom view of the second drying module in the mask drying device.

[0038] Figure 8 It is shown that it includes Figure 5 A plan view of the first heating element in the mask drying device.

[0039] Figure 9 It is shown and included Figure 5A cross-sectional view of the vortex tube connected to the first and second air nozzles in the mask drying device.

[0040] Figures 10 to 12 This is a cross-sectional view illustrating a mask drying method according to an embodiment of the present invention.

[0041] Explanation of reference numerals in the attached figures Detailed Implementation

[0042] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same constituent elements in the drawings, and repeated descriptions of the same constituent elements are omitted.

[0043] Figure 1 This is an exploded perspective view showing a mask assembly being dried using a mask drying apparatus according to an embodiment of the present invention. Figure 2 It is shown Figure 1 A three-dimensional view of the mask assembly. Figure 3 It is Figure 2 A cross-sectional view of the mask assembly taken along line I-I'. Figure 4 It is shown in magnification Figure 3 A cross-sectional view of region A.

[0044] Reference Figures 1 to 3 The mask assembly MKA can utilize a mask drying apparatus according to an embodiment of the present invention (e.g., Figure 5 The mask assembly MKA is dried using a mask drying apparatus 1000. For example, the mask assembly MKA can be used to form an organic layer that is included in an organic light-emitting display device and emits light. An organic thin film with a desired pattern can be formed on a substrate (not shown) using the mask assembly MKA. However, the present invention is not limited thereto, and the application of the mask assembly MKA can be varied.

[0045] The mask assembly MKA may include a mask frame MF, a first rod ST1, a second rod ST2, and a mask MK.

[0046] The mask frame MF can define a frame opening MF-OP. For example, the mask frame MF can have a quadrilateral shape on a plane that defines a rectangular opening (i.e., the frame opening MF-OP), but the invention is not limited to this, and the shape of the mask frame MF and the frame opening MF-OP can be varied according to the embodiments.

[0047] Mask frames (MFs) can include materials with high rigidity. For example, mask frames (MFs) can include stainless steel, Invar, nickel, cobalt, etc. These can be used individually or in combination with each other.

[0048] A first rod ST1 can be arranged on the mask frame MF. The first rod ST1 can overlap with the frame opening MF-OP in a plane. For example, the first rod ST1 can extend in the second direction DR2 and can traverse the frame opening MF-OP in a plane. A portion of the first rod ST1 can overlap with the frame opening MF-OP in a plane, and another portion of the first rod ST1 can be spaced apart from the frame opening MF-OP in a plane. The first rod ST1 can be attached (or bonded) to the mask frame MF. In one embodiment, the first rod ST1 can be attached (or bonded) to the mask frame MF by a welding process, but the invention is not limited thereto. Multiple first rods ST1 can be arranged along the first direction DR1. For example, the number of first rods ST1 can be four, but this is merely an exemplary number of first rods ST1, and the number of first rods ST1 can vary depending on the embodiment.

[0049] The second rod ST2 can be arranged on the mask frame MF. The second rod ST2 can overlap with the frame opening MF-OP in a plane. For example, the second rod ST2 can extend in the first direction DR1 and can cross the frame opening MF-OP in a plane. A portion of the second rod ST2 can overlap with the frame opening MF-OP in a plane, and another portion of the second rod ST2 can be spaced apart from the frame opening MF-OP in a plane. The second rod ST2 can be attached (or bonded) to the mask frame MF. In one embodiment, the second rod ST2 can be attached (or bonded) to the mask frame MF by a welding process, but the invention is not limited thereto. A plurality of second rods ST2 can be arranged along the second direction DR2. For example, the number of second rods ST2 can be three, but this is merely an exemplary number of second rods ST2, and the number of second rods ST2 can vary depending on the embodiment.

[0050] In one embodiment, the second rod ST2 may be arranged on the first rod ST1. For example, in a plane, the second rod ST2 may contact the upper surface of the first rod ST1 at a position where the first rod ST1 and the second rod ST2 intersect each other. However, the invention is not limited to this, and the arrangement relationship of the first rod ST1 and the second rod ST2 can be varied according to the embodiment. For example, the first rod ST1 may also be arranged on the second rod ST2. In this case, in a plane, the first rod ST1 may contact the upper surface of the second rod ST2 at a position where the first rod ST1 and the second rod ST2 intersect each other. The first rod ST1 and the second rod ST2 may perform the function of preventing the mask MK from detaching from the mask frame MF. Each of the first rod ST1 and the second rod ST2 may include aluminum, but the invention is not limited to this.

[0051] The mask MK can be disposed on the second rod ST2. The mask MK can be attached (or bonded) to the mask frame MF. For example, the mask MK may include a first portion that overlaps with the frame opening MF-OP in a plane and a second portion that is spaced apart from the frame opening MF-OP in a plane. The second portion of the mask MK can be attached (or bonded) to the mask frame MF. In one embodiment, the mask MK can be attached (or bonded) to the mask frame MF by a welding process, but the invention is not limited thereto.

[0052] In one embodiment, the mask MK may include an active region AA and an inactive region NA. The active region AA may overlap with the frame opening MF-OP in a plane. The active region AA may be spaced apart from the first rod ST1 in a plane. The active region AA may be spaced apart from the second rod ST2 in a plane. The inactive region NA may surround the active region AA. The inactive region NA may overlap with the first rod ST1 and the second rod ST2 in a plane. The mask MK may define a mask opening MK-OP within the active region AA. The mask opening MK-OP may be arranged only in the active region AA and may not be arranged in the inactive region NA. For example, the mask opening MK-OP may overlap with the frame opening MF-OP in a plane and may be spaced apart from the first rod ST1 and the second rod ST2 in a plane.

[0053] Multiple masks MK can be arranged along the first direction DR1. For example, the number of masks MK can be five, but this is merely an exemplary number of masks MK, and the number of masks MK can vary depending on the embodiment. In one embodiment, the masks MK can be fine metal masks, but the invention is not limited thereto. The masks MK can include Invar, but the invention is not limited thereto.

[0054] Organic material can be deposited on a substrate (not shown) via a mask assembly MKA. A light-emitting layer, included in an organic light-emitting display device, can be formed using this organic material, but the invention is not limited thereto. The organic material can be supplied to the mask assembly MKA. For example, the organic material can be supplied to the mask MK via a frame opening MF-OP. The organic material can be supplied onto the substrate via the mask opening MK-OP.

[0055] Further reference Figure 4The mask MK can be attached (or bonded) to the mask frame MF via the joint AP. As described above, the mask MK can also be attached (or bonded) to the mask frame MF via a welding process, and the joint AP can be the portion of the mask MK attached (or bonded) to the mask frame MF via the welding process. For example, the joint AP can connect the mask MK and the mask frame MF to each other. When the mask MK is attached to the mask frame MF via the welding process, it is possible that a portion of the mask MK and the mask frame MF will not be bonded to each other. For example, a portion of the mask MK that is not welded to the mask frame MF may be formed. For example, a portion of the mask MK and the mask frame MF that is not bonded to each other may be formed (i.e., a gap SL).

[0056] As described above, organic matter can be deposited on the substrate through the mask assembly MKA. In this case, organic matter may also remain on the surface of the mask assembly MKA. Therefore, it may be necessary to clean the mask assembly MKA. For example, a cleaning fluid can be sprayed onto the mask assembly MKA, or the mask assembly MKA can be immersed in the cleaning fluid. In this case, the cleaning fluid may remain on the mask assembly MKA. For example, the cleaning fluid may remain on the surface of the mask MK, the surface of the mask frame MF, the surface of the first rod ST1, the surface of the second rod ST2, etc. In particular, the cleaning fluid may excessively remain in the gap SL. Furthermore, gaps may also be formed at the intersection of the first rod ST1 and the second rod ST2 in the plane, and the cleaning fluid may also excessively remain in the gaps. Therefore, a process of drying the cleaning fluid may be necessary. Hereinafter, a mask drying apparatus according to an embodiment of the present invention (e.g., ...) will be described. Figure 5 The mask drying apparatus 1000 and the mask drying method using the mask drying apparatus will be described.

[0057] In one embodiment, a first direction DR1 and a second direction DR2 intersecting the first direction DR1 can be defined. For example, the second direction DR2 can be substantially perpendicular to the first direction DR1. However, the invention is not limited to this; the second direction DR2 can form an acute or obtuse angle with the first direction DR1. Furthermore, a third direction DR3 intersecting the plane formed by the first direction DR1 and the second direction DR2 can be defined. For example, the third direction DR3 can be substantially perpendicular to the plane formed by the first direction DR1 and the second direction DR2. However, the invention is not limited to this; the third direction DR3 can form an acute or obtuse angle with the plane formed by the first direction DR1 and the second direction DR2.

[0058] Figure 5 This is a cross-sectional view showing a mask drying apparatus according to an embodiment of the present invention. Figure 6 It is shown that it includes Figure 5 A plan view of the first drying module in the mask drying apparatus. Figure 7 It is shown that it includes Figure 5 The bottom view of the second drying module in the mask drying device. Figure 8 It is shown that it includes Figure 5 A plan view of the first heating element in the mask drying device. Figure 9 It is shown and included Figure 5 A cross-sectional view of the vortex tube connected to the first and second air nozzles in the mask drying device.

[0059] Reference Figure 5 A mask drying apparatus 1000 according to an embodiment of the present invention may include a first drying module 100 and a second drying module 200. The second drying module 200 may be disposed on the first drying module 100. For example, the second drying module 200 may be spaced apart from the first drying module 100 on a third-direction DR3. Each of the first drying module 100 and the second drying module 200 may heat (or dry) the mask assembly (e.g., Figure 1 (The mask assembly MKA). Therefore, cleaning fluid remaining in the mask assembly can be removed. For example, the mask assembly can be arranged between the first drying module 100 and the second drying module 200.

[0060] Reference Figure 5 , Figure 6 and Figure 8 The first drying module 100 may include a first plate PL1, a first heating element HM1, a second heating element HM2, and a first air nozzle AH1.

[0061] The shape of the first plate PL1 may substantially correspond to the shape of the mask assembly. For example, the shape of the first plate PL1 may substantially correspond to the shape of the mask assembly, such that the mask assembly can be heated (or dried) as a whole by the first drying module 100. In one embodiment, the first plate PL1 may have a cuboid shape. For example, the first plate PL1 may have a hollow cuboid shape or a solid cuboid shape. However, the invention is not limited thereto, and the shape of the first plate PL1 may vary depending on the embodiment. The first plate PL1 may include a material with high rigidity. For example, the first plate PL1 may include stainless steel, Invar, nickel, cobalt, etc. These may be used alone or in combination with each other. However, the invention is not limited thereto, and the material included in the first plate PL1 may be any material with high rigidity.

[0062] The first heating element HM1 may be disposed inside the first plate PL1. In one embodiment, the first heating element HM1 may extend along the edge of the first plate PL1 in a plane. For example, a portion of the first heating element HM1 may extend along a first direction DR1, and another portion of the first heating element HM1 may extend along a second direction DR2. In one embodiment, the first heating element HM1 may surround the first air nozzle AH1 in a plane. For example, the first heating element HM1 may have a quadrilateral ring shape surrounding the first air nozzle AH1, but the invention is not limited thereto.

[0063] like Figure 8 As shown, the first heating element HM1 may include a coil housing CA and an induction coil IC. For example, the coil housing CA may have a quadrilateral ring shape. The induction coil IC may be housed in the coil housing CA. For example, the induction coil IC may be arranged within the coil housing CA and may have a ring shape on a plane, but the invention is not limited thereto. The first heating element HM1 can heat (or dry) the mask assembly by induction heating. If a high-frequency induced current flows through the induction coil IC, a high-frequency magnetic field can be generated around the induction coil IC. For example, the strength of the magnetic field formed around the induction coil IC can change as the strength and direction of the induced current flowing through the induction coil IC change. As the strength of the magnetic field formed around the induction coil IC changes, an induced current can be generated within the mask assembly, which is a conductor. In this case, Joule heating occurs due to the resistance of the mask assembly, and the mask assembly can be heated (or dried).

[0064] The second heating element HM2 may be disposed inside the first plate PL1. In one embodiment, the second heating element HM2 may bypass the first air nozzle AH1 and traverse the first plate PL1 in a plane. For example, a portion of the second heating element HM2 may extend along a first direction DR1, and another portion of the second heating element HM2 may extend along a second direction DR2. However, the invention is not limited thereto, and the shape of the second heating element HM2 may be any shape that bypasses the first air nozzle AH1 and traverses the first plate PL1 in a plane.

[0065] The second heating element HM2 may include a sheathed heater, an infrared heater, or a lamp. In one embodiment, the second heating element HM2 may include a sheathed heater. The sheathed heater may include a metal tube and a coil inserted into the metal tube. Furthermore, the sheathed heater may include insulating powder filling the metal tube. For example, the sheathed heater may include magnesium oxide (MgO) or the like filling the metal tube.

[0066] In one embodiment, the first plate PL1 may include a first surface S1 and a second surface S2 in cross-section. The first surface S1 of the first plate PL1 may be the surface facing the second plate PL2. The first surface S1 of the first plate PL1 may be the surface facing the mask assembly. For example, the first surface S1 of the first plate PL1 may be the upper surface of the first plate PL1. The second surface S2 of the first plate PL1 may be the surface opposite to the first surface S1. For example, the second surface S2 of the first plate PL1 may be the lower surface of the first plate PL1.

[0067] In one embodiment, a first air nozzle AH1 may be disposed on a first surface S1. For example, the first air nozzle AH1 may penetrate the first surface S1. The first air nozzle AH1 may discharge air. For example, the first air nozzle AH1 may discharge air toward the mask assembly. The first air nozzle AH1 may be repeatedly disposed along a first direction DR1 and a second direction DR2.

[0068] Reference Figure 5 and Figure 7 The second drying module 200 may include a second plate PL2 and a second air nozzle AH2.

[0069] The shape of the second plate PL2 may substantially correspond to the shape of the mask assembly. For example, the shape of the second plate PL2 may substantially correspond to the shape of the mask assembly, such that the mask assembly can be heated (or dried) as a whole by the second drying module 200. In one embodiment, the second plate PL2 may have a cuboid shape. For example, the second plate PL2 may have a hollow cuboid shape or a solid cuboid shape. However, the invention is not limited to this, and the shape of the second plate PL2 may be varied according to embodiments. The second plate PL2 may include a material with high rigidity. For example, the second plate PL2 may include stainless steel, Invar, nickel, cobalt, etc. These may be used alone or in combination with each other. However, the invention is not limited to this, and the material included in the second plate PL2 may be any material with high rigidity.

[0070] In one embodiment, the second plate PL2 may include a first surface S3 and a second surface S4 in cross-section. The first surface S3 of the second plate PL2 may be a surface facing the first plate PL1. The first surface S3 of the second plate PL2 may be a surface facing the mask assembly. For example, the first surface S3 of the second plate PL2 may be the lower surface of the second plate PL2. The second surface S4 of the second plate PL2 may be a surface opposite to the first surface S3. For example, the second surface S4 of the second plate PL2 may be the upper surface of the second plate PL2.

[0071] In one embodiment, the second air nozzle AH2 may be disposed on the first surface S3. For example, the second air nozzle AH2 may penetrate the first surface S3. The second air nozzle AH2 may discharge air. For example, the second air nozzle AH2 may discharge air toward the mask assembly. The second air nozzle AH2 may be repeatedly disposed along the first direction DR1 and the second direction DR2. In one embodiment, the second air nozzle AH2 may be opposite to the first air nozzle AH1.

[0072] Reference Figure 5 , Figure 6 , Figure 7 and Figure 9 The mask drying device 1000 may also include a vortex tube VT. The vortex tube VT may include an air inlet AI, an internal space VS, an air circulation space CT, a valve VL, a first outlet OL1, and a second outlet OL2.

[0073] Compressed air flows into the internal space VS through the air inlet AI. As compressed air flows into the internal space VS, vortices / eddies may be generated. These vortices / eddies can traverse the air circulation space CT to reach the valve VL. If the valve VL is slightly opened, hot air can be discharged to the outside of the scroll tube VT through the first outlet OL1. Air not discharged to the outside of the scroll tube VT can change direction and traverse the air circulation space CT and the internal space VS to reach the second outlet OL2. Cold air can be discharged to the outside of the scroll tube VT through the second outlet OL2. For example, air with a first temperature can be discharged through the first outlet OL1, and air with a second temperature can be discharged through the second outlet OL2, the second temperature being lower than the first temperature. For example, air with a temperature above approximately 50°C and below approximately 130°C can be discharged through the first outlet OL1, and air with a temperature above approximately -50°C and below approximately -10°C can be discharged through the second outlet OL2. The present invention is not limited thereto, and the temperature of the air discharged through the first outlet OL1 and the temperature of the air discharged through the second outlet OL2 can be varied according to the embodiments.

[0074] In one embodiment, the first air nozzle AH1 can be connected to a vortex tube VT. For example, the first air nozzle AH1 can be connected to a first outlet OL1. Therefore, air with the first temperature discharged through the first outlet OL1 can be discharged towards the mask assembly through the first air nozzle AH1. Therefore, the mask assembly can be heated (or dried). After heating (or drying) the mask assembly to remove residual cleaning fluid from the mask assembly, the first air nozzle AH1 can be disconnected from the first outlet OL1. After the first air nozzle AH1 is disconnected from the first outlet OL1, the first air nozzle AH1 can be connected to a second outlet OL2. Therefore, air with the second temperature discharged through the second outlet OL2 can be discharged towards the mask assembly through the first air nozzle AH1. Therefore, the temperature of the mask assembly can be changed to the temperature before being heated (or dried) by the mask drying apparatus 1000. In one embodiment, the first air nozzle AH1 can be connected to one vortex tube VT, but the invention is not limited to this, and the first air nozzle AH1 can also be connected to multiple vortex tubes VT. For example, in Figure 6 In the first air nozzle AH1 arranged in the first row, the first air nozzle AH1 arranged in the second row, and the first air nozzle AH1 arranged in the third row can be connected to the first vortex tube, and the first air nozzle AH1 arranged in the fourth row, the first air nozzle AH1 arranged in the fifth row, and the first air nozzle AH1 arranged in the sixth row can be connected to the second vortex tube, but the present invention is not limited thereto.

[0075] In one embodiment, the second air nozzle AH2 can be connected to a vortex tube VT. For example, the second air nozzle AH2 can be connected to a first outlet OL1. Therefore, air with the first temperature discharged through the first outlet OL1 can be discharged towards the mask assembly through the second air nozzle AH2. Therefore, the mask assembly can be heated (or dried). After heating (or drying) the mask assembly to remove residual cleaning fluid, the second air nozzle AH2 can be disconnected from the first outlet OL1. After the second air nozzle AH2 is disconnected from the first outlet OL1, the second air nozzle AH2 can be connected to the second outlet OL2. Therefore, air with the second temperature discharged through the second outlet OL2 can be discharged towards the mask assembly through the second air nozzle AH2. Therefore, the temperature of the mask assembly can be changed to the temperature before being heated (or dried) by the mask drying apparatus 1000. In one embodiment, the second air nozzle AH2 can be connected to one vortex tube VT, but the invention is not limited to this, and the second air nozzle AH2 can also be connected to multiple vortex tubes VT. For example, in Figure 7In the invention, the second air nozzle AH2 arranged in the first row, the second air nozzle AH2 arranged in the second row, and the second air nozzle AH2 arranged in the third row can be connected to the third vortex tube, and the second air nozzle AH2 arranged in the fourth row, the fifth row, and the sixth row can be connected to the fourth vortex tube, but the invention is not limited thereto.

[0076] In one embodiment, the vortex tube VT connected to the first air nozzle AH1 and the vortex tube VT connected to the second air nozzle AH2 may refer to the same vortex tube, but the present invention is not limited thereto. The vortex tube VT connected to the first air nozzle AH1 may be a separate component that is distinct from the vortex tube VT connected to the second air nozzle AH2.

[0077] Figures 10 to 12 This is a cross-sectional view illustrating a mask drying method according to an embodiment of the present invention.

[0078] Reference Figure 10 The mask assembly MKA can be mounted on the platform ST. The first drying module 100 can move below the mask assembly MKA toward the mask assembly MKA. For example, the first drying module 100 can move along a third direction DR3. The second drying module 200 can move above the mask assembly MKA toward the mask assembly MKA. For example, the second drying module 200 can move in the opposite direction to the third direction DR3.

[0079] Further reference Figure 11 The first drying module 100 can be moved to the frame opening defined in the mask frame MF (e.g., Figure 1 The first drying module 100 is arranged in close contact with the mask assembly MKA (MF-OP) within the frame opening. For example, the first drying module 100 can be arranged in close contact with both the mask frame MF and the mask MK. Therefore, the first drying module 100 can effectively heat (or dry) the mask assembly MKA. Thus, the first drying module 100 can effectively remove cleaning fluid remaining in the mask assembly MKA. Furthermore, with the second drying module 200 arranged in close contact with the mask assembly MKA, the second drying module 200 can effectively heat (or dry) the mask assembly MKA. Therefore, the second drying module 200 can effectively remove cleaning fluid remaining in the mask assembly MKA.

[0080] As described above, the mask MK can be connected through the joint (e.g., Figure 4 The joint (AP) is attached (or bonded) to the mask frame MF. In this case, it is possible to form a part where the mask MK and the mask frame MF are not bonded to each other (i.e., a gap (e.g., Figure 4The gap (SL) may contain excessive amounts of cleaning fluid. For example, more cleaning fluid may remain in the gap than in other parts of the mask assembly MKA. Therefore, the portions where the joint and the gap are located may require concentrated heating (or drying).

[0081] According to an embodiment of the present invention, the first heating element HM1 may overlap the joint and the gap in a plane. For example, the joint and the gap may extend along the edge of the mask MK, and the first heating element HM1 may extend along the edge of the first plate PL1. Furthermore, as described above, the first heating element HM1 can heat (or dry) the mask assembly MKA by induction heating. Therefore, the first heating element HM1 can heat (or dry) the mask assembly MKA more intensely than the second heating element HM2 and the first air nozzle AH1. As the first heating element HM1 overlaps the joint and the gap in a plane, and the first heating element HM1 heats (or dries) the mask assembly MKA by induction heating, the cleaning fluid excessively remaining in the gap can be effectively (or completely) removed. Furthermore, the inner surface of the mask frame MF exposed through the frame opening can be heated (or dried) by the first heating element HM1. Therefore, the cleaning fluid remaining on the inner surface of the mask frame MF can be removed.

[0082] The first air nozzle AH1 can be connected to a vortex tube (e.g., Figure 9 The vortex tube VT is connected. In one embodiment, the first air nozzle AH1 may be connected to the first outlet (e.g., Figure 9 The first outlet (OL1) is connected. For example, the first air nozzle AH1 can be connected to the first outlet through a pipe, tube, etc., but the present invention is not limited to this. Therefore, air with the first temperature discharged through the first outlet can be discharged toward the mask assembly MKA through the first air nozzle AH1. Therefore, the mask assembly MKA can be heated (or dried). For example, the portion that overlaps with the frame opening of the mask MK on the plane can be heated (or dried) through the first air nozzle AH1. For example, the lower surface of the mask MK can be concentratedly heated (or dried) through the first air nozzle AH1. Therefore, cleaning fluid remaining on the lower surface of the mask MK can be removed through the first air nozzle AH1. And, the first rod (e.g., Figure 1 The first shot (ST1) and the second shot (e.g., Figure 1 The area where the second rod (ST2) intersects with each other can be heated (or dried) by the first air nozzle (AH1). Therefore, the cleaning fluid remaining at the intersection of the first and second rods can be removed by the first air nozzle (AH1).

[0083] The second air nozzle AH2 can be connected to the vortex tube. In one embodiment, the second air nozzle AH2 can be connected to the first outlet. For example, the second air nozzle AH2 can be connected to the first outlet via a pipe, conduit, etc., but the invention is not limited thereto. Therefore, air with the first temperature discharged through the first outlet can be discharged towards the mask assembly MKA through the second air nozzle AH2. Therefore, the mask assembly MKA can be heated (or dried). For example, the portion overlapping the frame opening of the mask MK on the plane can be heated (or dried) through the second air nozzle AH2. The upper surface of the mask MK can be concentratedly heated (or dried) through the second air nozzle AH2. Therefore, cleaning fluid remaining on the upper surface of the mask MK can be effectively removed through the second air nozzle AH2.

[0084] The second heating element HM2 can heat (or dry) the mask assembly MKA. For example, the portion of the mask MK that overlaps with the frame opening on the plane can be heated (or dried) by the second heating element HM2. For example, the lower surface of the mask MK can be concentratedly heated (or dried) by the second heating element HM2. Therefore, cleaning fluid remaining on the lower surface of the mask MK can be removed by the second heating element HM2. Furthermore, the location where the first and second rods intersect can be heated (or dried) by the second heating element HM2. Therefore, cleaning fluid remaining at the location where the first and second rods intersect can be removed by the second heating element HM2. Furthermore, the inner surface of the mask frame MF exposed through the frame opening can be heated (or dried) by the second heating element HM2. Therefore, cleaning fluid remaining on the inner surface of the mask frame MF can be removed.

[0085] According to one embodiment of the present invention, the mask drying apparatus 1000 includes a first heating element HM1, a second heating element HM2, a first air nozzle AH1, and a second air nozzle AH2, thereby heating (or drying) the entire mask assembly MKA. Therefore, cleaning fluid remaining in the mask assembly MKA can be completely removed.

[0086] The mask drying apparatus 1000 for drying mask assembly MKA may consist of only a first drying module 100 and a second drying module 200. For example, the mask drying apparatus 1000 can effectively remove cleaning fluid remaining on the mask assembly MKA without the need for pressure reduction equipment, vacuum equipment, etc. Therefore, the configuration of the mask drying apparatus 1000 can be simplified, and the cost of drying mask assembly MKA can be reduced.

[0087] After the cleaning fluid remaining in the mask assembly MKA is removed, the first air nozzle AH1 can be separated from the first outlet. Thereafter, the first air nozzle AH1 can be connected to the second outlet (e.g., Figure 9 The second outlet (OL2) is connected. For example, the first air nozzle AH1 can be connected to the second outlet via a pipe, tube, etc., but the invention is not limited thereto. Therefore, air with the second temperature discharged through the second outlet can be discharged towards the mask assembly MKA through the first air nozzle AH1. Therefore, the temperature of the mask assembly MKA can be changed to the temperature before it was heated (or dried) by the mask drying apparatus 1000. Although in Figure 5 , Figure 6 , Figure 10 and Figure 11 Although not shown in the diagram, the first drying module 100 may also include cooling paths for reducing the temperature of the mask assembly MKA. In this case, the cooling paths may be arranged inside the first plate PL1.

[0088] Furthermore, after the cleaning fluid remaining in the mask assembly MKA is removed, the second air nozzle AH2 can be separated from the first outlet. Then, the second air nozzle AH2 can be connected to the second outlet. For example, the second air nozzle AH2 can be connected to the second outlet via a pipe, conduit, etc., but the invention is not limited to this. Therefore, air with the second temperature discharged through the second outlet can be discharged towards the mask assembly MKA through the second air nozzle AH2. Thus, the temperature of the mask assembly MKA can be changed to the temperature before it was heated (or dried) by the mask drying apparatus 1000.

[0089] Reference Figure 11 and Figure 12 The first drying module 100 can be moved away from the mask assembly MKA. For example, the first drying module 100 can move in the opposite direction to the third party DR3. The second drying module 200 can also be moved away from the mask assembly MKA. For example, the second drying module 200 can move in the third party DR3.

[0090] The invention has been described above with reference to exemplary embodiments, but those skilled in the art will understand that various modifications and alterations can be made to the invention without departing from the spirit and scope of the invention as set forth in the claims.

[0091] Industrial availability

[0092] This invention is applicable to mask drying apparatuses and mask drying methods utilizing such apparatuses. For example, this invention is applicable to mask drying apparatuses for drying masks used to form high-resolution smartphones, mobile phones, smart tablets, smartwatches, tablets, vehicle navigation systems, televisions, computer monitors, laptops, etc., and mask drying methods utilizing such apparatuses.

Claims

1. A mask drying apparatus, comprising: First board; A first heating element extends along the edge of the first plate inside the first plate; A first air nozzle is disposed on the first surface of the first plate and discharges air. The second heating element is located inside the first plate, bypassing the first air nozzle and traversing the first plate in a plane; The second board is placed on top of the first board; as well as A second air nozzle is disposed on the first surface of the second plate and discharges air.

2. The mask drying apparatus according to claim 1, wherein, The first surface of the first plate and the first surface of the second plate are opposite to each other.

3. The mask drying apparatus according to claim 1, wherein, The first heating element includes: Coil housing section; and An induction coil is arranged inside the coil housing.

4. The mask drying apparatus according to claim 1, further comprising: The vortex tube, connected to the first air nozzle, includes an air inlet for allowing compressed air to flow in, an internal space for generating a vortex, a first outlet for discharging air with a first temperature, and a second outlet for discharging air with a second temperature lower than the first temperature. The first air nozzle is connected to either the first outlet or the second outlet.

5. The mask drying apparatus according to claim 1, wherein, A portion of the second heating element extends along a first direction, and another portion of the second heating element extends along a second direction that intersects the first direction.

6. The mask drying apparatus according to claim 1, further comprising: The vortex tube, connected to the second air nozzle, includes an air inlet for allowing compressed air to flow in, an internal space for generating a vortex, a first outlet for discharging air with a first temperature, and a second outlet for discharging air with a second temperature lower than the first temperature. The second air nozzle is connected to either the first outlet or the second outlet.

7. The mask drying apparatus according to claim 1, wherein, At least a portion of the cleaning fluid remaining in the mask assembly is removed by means of the first heating element, the second heating element, the first air nozzle, and the second air nozzle. The mask assembly includes a mask frame and a mask attached to the mask frame via a joint. The first heating element at least partially overlaps with the joint portion on a plane.

8. A mask drying method, comprising the following steps: A mask assembly, including a mask frame and a mask attached to the mask frame, is placed on the platform; The first drying module is moved toward the mask assembly. The first drying module includes a first plate, a first heating element extending along the edge of the first plate inside the first plate, a first air nozzle disposed on a first surface of the first plate and discharging air, and a second heating element that bypasses the first air nozzle and traverses the first plate in a plane inside the first plate; and The second drying module is moved toward the mask assembly. The second drying module includes a second plate disposed on the first plate and a second air nozzle disposed on the first surface of the second plate and discharging air.

9. The mask drying method according to claim 8, wherein, The mask frame defines the frame opening. The steps for moving the first drying module include: A portion of the first drying module is moved into the interior of the frame opening of the mask frame.

10. The mask drying method according to claim 8, wherein, The mask is attached to the mask frame via a joint. The first heating element at least partially overlaps with the joint in a plane.

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