Variable cross-section stone base for intelligent measuring instruments and co-reference integrated manufacturing method thereof

Abstract

This invention relates to the field of precision measuring instrument manufacturing technology, and particularly to a variable cross-section stone base for intelligent measuring instruments. The stone base includes a solid load-bearing part and a stiffness adjustment part milled at its bottom end. The center of the asymmetric topological reinforcing rib network coincides with the projected position of the center of gravity of the equipment to be installed, forming a high-stiffness load-bearing area in the high-load area and a low-stiffness area in the low-load area, thus realizing the variable cross-section stiffness distribution of the stone base. An anchoring structure is bonded to the top of the solid load-bearing part for fixing the equipment to be installed. The stiffness adjustment part adopts variable density topology optimization as a whole. Without increasing the total weight of the base, the local static stiffness of the high-load area is increased by 20%, which offsets the overturning moment generated by the eccentric load during the operation of the equipment and suppresses the micro-warping of the reference surface. At the same time, it suppresses the low-frequency resonance that occurs during the large-stroke scanning and dynamic detection of the equipment.

Description

Technical Field

[0001] This invention relates to the field of precision measuring instrument manufacturing technology, and in particular to a variable cross-section stone base for intelligent measuring instruments and its integrated manufacturing method for a common reference. Background Technology

[0002] The measurement accuracy and long-term stability of high-precision intelligent measuring instruments such as coordinate measuring machines, optical inspection equipment, and semiconductor wafer inspection equipment directly depend on the performance of the bearing base. Jinan Qing natural granite has become the mainstream material for precision measuring bases due to its low coefficient of thermal expansion, low internal stress, and high damping vibration reduction characteristics. For example, CN105443927A discloses a shock-resistant and corrosion-resistant base for equipment, which uses a metal support base to be snapped into the chassis and a graphite plate to absorb vibration under the chassis. It uses metal materials, which do not match the thermal stability required for precision measurement, and does not involve stone materials. CN118031873A discloses a marble integrated measuring base, in which a toothed sleeve is inserted into the mounting hole on the platform. Although it uses a stone base, the base has a uniform cross section of equal thickness, and the toothed sleeve and marble are rigidly inserted. It does not provide stiffness compensation for the eccentric load caused by the offset of the equipment's center of gravity. As intelligent measuring equipment develops towards larger sizes and greater integration, uneven mass distribution within the internal modules causes the overall center of gravity to deviate from the geometric center of the base, resulting in a continuous eccentric load. The aforementioned existing technologies have the following drawbacks: (1) Decoupling of stiffness distribution of symmetrical homogeneous section with eccentric load: The uniform thickness stone base lacks macroscopic static stiffness compensation structure, and the insufficient stiffness of the high load area causes micron-level elastic warping of the reference surface. (2) Thermal expansion mismatch at the heterogeneous interface: The thermal expansion coefficients of steel and Jinan Qing granite differ significantly (steel's coefficient is approximately 10 × 10⁻⁶). -6 -17×10 -6 / ℃, granite is approximately 5.5×10 -6 -7.5×10 -6 / ℃), under temperature difference, interfacial shear stress causes fasteners to loosen, precision drift, or even stone chipping. Existing rigid direct insertion or expansion bolt methods cannot absorb this thermal mismatch stress. (3) Accumulation of errors in multi-process clamping datum conversion: Traditional processing requires multiple hoisting and alignment, and the non-coincidence of datums leads to linear accumulation of errors, making it difficult to achieve sub-micron level geometric accuracy; Therefore, there is an urgent need for a variable cross-section stone base for intelligent measuring instruments and its integrated manufacturing method for common reference, which can make the stiffness distribution asymmetrically matched with the projection position of the center of gravity of the equipment without increasing the total weight of the base, collaboratively solve the thermal mismatch problem of heterogeneous connection, and eliminate the reference conversion error through a single clamping closed-loop processing. Summary of the Invention

[0003] This invention provides a variable cross-section stone base for intelligent measuring instruments and a common reference integrated manufacturing method thereof, in order to solve the problems mentioned in the background art.

[0004] To achieve the above-mentioned objectives, the present invention provides the following technical solution: a variable cross-section stone base for intelligent measuring instruments, comprising: A stone base, the stone base comprising a solid bearing part and a stiffness adjustment part formed by milling the bottom end thereon; The stiffness adjustment part is an asymmetric topological reinforcing rib network composed of multiple crisscrossing ribs. The center of the asymmetric topological reinforcing rib network coincides with the projected position of the center of gravity of the equipment to be installed. The draft angle of the reinforcing rib section is 4°-5°, and the intersection of the reinforcing ribs is provided with rounded corners to increase stiffness. The reinforcing ribs include main ribs and auxiliary ribs. The width of the main ribs is greater than the width of the auxiliary ribs, and the spacing between the main ribs is less than the spacing between the auxiliary ribs. This is to form a high-rigidity load-bearing area in the high-load-bearing area at the projection position of the center of gravity of the equipment to be installed, and a low-rigidity area in the low-load-bearing area, thereby achieving a variable cross-sectional stiffness distribution of the stone base. An anchoring structure is bonded to the top of the solid load-bearing part to fix the equipment to be installed.

[0005] Preferably, the stone base has an area of ​​800mm × 600mm, a solid load-bearing part thickness of 80mm, a stiffness adjustment part thickness of 120mm, a main rib width of 70mm and a spacing of 40mm, and an auxiliary rib width of 50mm and a spacing of 100mm.

[0006] Preferably, the anchoring structure includes: Multiple blind holes are opened on the reference surface of the equipment to be installed on the top of the solid bearing part, and the depth of the blind holes is 30mm; The inner wall at the top of the blind hole has a chamfer of 0.5mm × 45°; After the inner wall of the blind hole was treated with a 3% KH-550 silane coupling agent ethanol solution, a silane coupling agent modified layer was formed. The modified layer is a silane molecule penetration and bonding layer in the granite hole wall, with a penetration depth of 80μm±10μm, which was determined by scanning electron microscopy cross-sectional observation.

[0007] Preferably, the blind hole is provided with a SUS304 stainless steel threaded sleeve in the coaxial gap. The side wall of the stainless steel threaded sleeve is machined with cross-knurling with a depth of 0.2 mm and a pitch of 1 mm. The gap between the side wall of the stainless steel threaded sleeve and the blind hole is bonded by a compensating medium, which is a cured modified epoxy resin anchoring adhesive with a curing shrinkage rate of 0.04% and an elastic modulus of 4 GPa.

[0008] Preferably, the stone base is made of three layers of granite bonded together, with cooling pipes and / or vibration sensors pre-embedded between the bonding surfaces of adjacent granite layers. The cooling pipes are used to circulate heat exchange medium to regulate the temperature of the stone base, and the vibration sensors are used to monitor the dynamic vibration signal of the stone base.

[0009] Preferably, epoxy AB adhesive with a shear strength of 22 MPa is used for bonding the granite.

[0010] Preferably, the granite bonding surface has multiple sandblasted micro-pits, which are hemispherical in shape, with a diameter of 0.1±0.02 mm, a depth of 0.05±0.01 mm, and a density of 10 pits / cm². 2 The granite bonding surface has multiple venting grooves on its edge. One end of the venting groove is connected to the inner wall of a micro-pit, and the other end of the venting groove is opened on the granite sidewall.

[0011] Preferably, a common reference integrated manufacturing method, applicable to processing a variable cross-section stone base for intelligent measuring instruments as described in any of the above claims, includes the following steps: The granite blocks were obtained and roughly ground to produce a stone base. Based on the center of gravity distribution of the equipment to be installed, the SIMP variable density method is used to perform topology optimization on the stiffness adjustment part of the stone base to determine the width and spacing distribution parameters of the main reinforcement and the auxiliary reinforcement. Based on the distribution parameters, the stone base is first clamped and fixed in a single operation using a vacuum chuck in a five-axis gantry machining center. The upper surface of the solid bearing part is then finely ground as a unified machining datum and entered into the machine tool coordinate system. While keeping the clamping unchanged, the stiffness adjustment part is milled. The blind hole is then drilled while maintaining the same coordinate system. A composite PCD drill bit with a 90° chamfering edge vertically drills blind holes on the mounting equipment reference surface, and completes the chamfering of the hole opening in one pass using the chamfering edge in the same feed stroke; After the milling of blind holes and chamfers is completed, all surfaces on the stone base are cleaned and dried. Silane coupling agent is then coated inside the blind holes. After ultrasonic vibration and baking, a silane coupling agent modified layer is obtained. Stainless steel threaded sleeves are bonded to the silane coupling agent modified layer using anchoring adhesive. Preferably, after bonding the stainless steel threaded sleeves, a laser interferometer is used to perform a grid scan on the reference surface to obtain the flatness data of the reference surface of the equipment to be installed. If the flatness data exceeds the preset threshold, the five-axis gantry machining center will be controlled to perform micro-grinding and repair on the reference surface of the equipment to be installed until the flatness is restored to the tolerance range.

[0012] Preferably, after the flatness is restored to the tolerance range, an M10 bolt is used to connect a stainless steel threaded sleeve. A torque wrench is used to apply a standard torque of 60 N·m to the M10 bolt to tighten it. The tightened state is maintained for 24 hours from the moment the standard torque of 60 N·m is reached. The M10 bolt is then removed and ultrasonic testing is performed. The ultrasonic testing uses a longitudinal wave straight probe with a frequency of 5 MHz to 10 MHz. A prefabricated granite test block with an equivalent diameter of 0.2 mm flat bottom hole is used as the calibration reference. The scanning area covers the surface of the solid bearing part within a radius of 5 mm around the blind hole. The scanning speed is not greater than 50 mm / s. When the detected defect echo amplitude is higher than the echo amplitude of the calibration reference, it is judged as unqualified. If only a single microcrack with an equivalent diameter of less than 0.2 mm is detected, and the number of microcracks around the same blind hole does not exceed 2, it is judged as qualified. At the same time, the flatness of the reference surface of the equipment to be installed is re-measured. If the flatness change is less than 0.0003 mm, the product is qualified.

[0013] The beneficial effects of this invention are as follows: In the solution of this invention: 1. The stiffness adjustment unit adopts variable density topology optimization. Without increasing the total weight of the base, the local static stiffness of the high load area is increased by 20%, which offsets the overturning moment generated by the eccentric load during the operation of the equipment and suppresses the micro warping of the reference surface. At the same time, it suppresses the low frequency resonance that occurs during the large stroke scanning and dynamic detection of the equipment. 2. The solid load-bearing part is connected to the equipment through an adhesive anchoring structure. The adhesive used during bonding reduces the impact of the equipment on the mechanism during operation, thereby improving the stability of the mechanism. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the main structure of the present invention; Figure 2 This is a schematic diagram of the main and auxiliary reinforcement structure of the present invention; Figure 3 This is a schematic diagram showing the location of the rounded corners in this invention; Figure 4 This is a cross-sectional view of the stainless steel threaded sleeve of the present invention; Figure 5 This is a schematic diagram showing the location of the cross-grain knurling in this invention; Figure 6 This is a schematic diagram showing the chamfering position of the present invention; Figure 7 This is a schematic diagram of the mounting pipe structure of the present invention; Figure 8 This is a cross-sectional view of the mounting pipe of the present invention; Figure 9 This is a schematic diagram of the flange mounting pipe connection relationship of the present invention; Figure 10 This is a schematic diagram showing the connection relationship between the locking rod and the locking block of the present invention; Figure 11 This is a schematic diagram of the gear and the double-sided rack of the present invention being inserted and mated.

[0015] The components include: stone base 1, solid bearing part 11, stiffness adjustment part 12, main reinforcement 121, auxiliary reinforcement 122, rounded corner 123, anchoring structure 13, blind hole 131, chamfer 132, silane coupling agent modified layer 133, stainless steel threaded sleeve 134, cross-knurled 135, flange 2, bolt 21, nut 22, round hole 23, round hole two 24, groove 25, drainage groove 26, mounting pipe 3, adapter hole 31, baffle 32, drainage channel 33, retaining ring 331, tapered rod 332, drive rod 333, baffle two 334, rotating shaft 341, mounting cavity 3411, gear 342, double-sided rack 343, lifting ring 344, spring 345, fixing pipe 34, water inlet pipe 35, locking ring 4, tension spring 41, locking rod 42, locking block 43, and V-groove 44. Detailed Implementation

[0016] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0017] Example 1: Reference Figures 1-11 A variable cross-section stone base for intelligent measuring instruments includes: a stone base 1, wherein the stone base 1 includes a solid bearing part 11 and a stiffness adjustment part 12 formed by milling the bottom end thereon; The stiffness adjustment part 12 is an asymmetric topological reinforcing rib network composed of multiple crisscrossing ribs. The center of the asymmetric topological reinforcing rib network coincides with the projected position of the center of gravity of the equipment to be installed. The draft angle of the reinforcing rib section is 4°-5°. The intersection of the reinforcing ribs is provided with a rounded corner 123 to increase stiffness. The reinforcing ribs include main ribs 121 and auxiliary ribs 122. The width of the main ribs 121 is greater than the width of the auxiliary ribs 122, and the spacing of the main ribs 121 is less than the spacing of the auxiliary ribs 122. This is to form a high-rigidity load-bearing area in the high-load-bearing area at the projection position of the center of gravity of the equipment to be installed, and a low-rigidity area in the low-load-bearing area, thereby realizing the variable cross-sectional stiffness distribution of the stone base 1. An anchoring structure 13 is bonded to the top of the solid bearing part 11 for fixing the equipment to be installed.

[0018] The principles and beneficial effects of the above scheme are as follows: The continuous granite base 1 includes a solid bearing section 11 and a stiffness adjustment section 12. The top of the solid bearing section 11 is provided with a reference surface for the equipment to be installed, which is used to support the entire measuring instrument. The stiffness adjustment section 12 ensures the local hardness and rigidity of the platform and isolates local stress during assembly. The stiffness adjustment section 12 is an asymmetric topological reinforcing rib network composed of multiple crisscrossing ribs. The center of the asymmetric topological reinforcing rib network coincides with the projected position of the center of gravity of the equipment to be installed. A high-rigidity bearing area is formed at the high bearing area located at the projected position of the center of gravity of the equipment to be installed. The width of the main ribs 121 in the high bearing area is greater than the width of the auxiliary ribs 122 in the low bearing area, and the spacing between the main ribs 121 is smaller than the spacing between the auxiliary ribs 122. Therefore, a high-rigidity bearing area and a low-rigidity bearing area are formed at the bottom of the stone base 1. In the load-bearing zone, the draft angle of the ribs is 4°-5°. R10 fillets (123) are used at the intersections of the ribs to eliminate stress concentration. Specifically, the fillets (123) ensure a smooth transition of the force transmission path, evenly distributing stress and preventing premature plastic deformation / micro-cracks at corners. This allows the load-bearing capacity of the entire rib structure to be fully utilized, thus improving the equivalent stiffness. The fillets (123) are equivalent to thickening the intersections of the ribs, resulting in a larger cross-sectional area and a higher moment of inertia about the neutral axis. This strengthens the resistance to bending and torsional deformation, directly manifesting as increased structural strength. Since the ribs transmit loads, the fillets (123) increase the overall load-bearing efficiency of the rib network. The stiffness adjustment unit 12 adopts variable density topology optimization, which improves the local static stiffness of the high-load area by 20% without increasing the total weight of the base. This counteracts the overturning moment generated by the eccentric load during equipment operation and suppresses micro-warping of the reference surface. Simultaneously, it suppresses low-frequency resonance that occurs during long-stroke scanning and dynamic detection. Comparative verification shows that this invention has the following quantitative advantages over existing technologies: Furthermore, based on the variable cross-section stiffness distribution model, it can be known that... ,in, E is the equivalent stiffness; E is the elastic modulus of the granite; I is the equivalent stiffness. i L represents the moment of inertia of the section of the i-th rib; i ρ represents the effective length of the i-th rib; idenoted by , where represents the density distribution coefficient of the i-th rib; n represents the total number of ribs. This model describes how an asymmetric topological stiffening rib network achieves variable cross-sectional stiffness distribution. The main ribs (70mm wide, 40mm spacing) are located in the high-load-bearing zone of the equipment's center of gravity projection, with large cross-sectional moment of inertia and high density coefficient, providing high-stiffness support. The auxiliary ribs (50mm wide, 100mm spacing) are located in the low-load-bearing zone, with relatively low stiffness. Through this gradient distribution, the base can accurately match the eccentric load distribution of the equipment, enabling the high-load area to obtain stronger support stiffness, thereby offsetting the overturning moment generated by the eccentric load and suppressing the micro-warping deformation of the reference surface. 1. Thermal compatibility: The coefficient of thermal expansion of the steel is (10-17)×10 -6 At / ℃, the coefficient of thermal expansion of Jinan Qing granite is (5.5-7.5)×10. -6 / ℃, the difference between the two is matched by the flexible buffer of stainless steel threaded sleeve and modified epoxy resin anchoring adhesive, and there is no thermal stress cracking in a wide temperature range of -10℃ to 50℃. 2. Anchoring strength: After being bonded with modified epoxy resin, the stainless steel threaded sleeve has a pull-out force ≥15kN, which meets the long-term locking requirements of heavy measuring equipment. 3. Weather resistance: After the three-layer adhesive structure is subjected to 1000 temperature cycles from -40℃ to 80℃, the bonding interface shows no cracking, and the flatness change of the reference surface of the integrated base after temperature cycling is ≤0.002mm / m. 4. Resistance to eccentric load: Under the same eccentric load conditions, the deformation of the reference surface of the base of this invention is reduced by 62% compared with the traditional homogeneous symmetrical base; 5. Machining Accuracy: Employing a common datum integrated manufacturing method, the perpendicularity of the blind hole axis to the datum surface is ≤0.008mm (better than the design requirement of 0.01mm). The cumulative error of traditional multi-clamping processes is 0.05mm, which this invention reduces to 0.004mm, a reduction of 92%. The error reduction value is derived from the common datum machining accuracy transfer model, specifically using the following formula: ,in, This represents the total error. Indicates clamping and positioning error; This is due to machining errors; Indicates thermal deformation error; in common-reference integrated manufacturing, =0.005mm (single clamping). =0.003mm (five-axis precision machining); =0.002mm (temperature controlled). This model reveals the precision advantages of integrated manufacturing with a common datum. In traditional multi-clamping processes, each realignment introduces clamping error (approximately 0.05mm), and the cumulative error across multiple processes can reach over 0.05mm. The common datum method reduces the clamping error to 0.005mm through single clamping with a vacuum chuck and without disassembly throughout the process; simultaneously, by using the finely ground datum surface as the sole machining coordinate system, datum transformation errors are eliminated. Ultimately, the perpendicularity of the blind hole axis to the datum surface is achieved to 0.008mm, meeting the assembly requirements of high-precision measuring equipment. 6. Clamping stability: The common reference process eliminates repeated alignment errors, reducing the traditional clamping error from 0.05mm to within 0.005mm, with the optimal embodiment reaching 0.004mm.

[0019] The solid support part 11 is connected to the equipment through the adhesive anchoring structure 13. The adhesive used during the bonding process reduces the impact of the equipment on the mechanism during operation, thereby improving the stability of the mechanism.

[0020] Example 2: Reference Figures 1-11 The stone base 1 has an area of ​​800mm×600mm, the solid bearing part 11 has a thickness of 80mm, the stiffness adjustment part 12 has a thickness of 120mm, the main rib 121 has a width of 70mm and a spacing of 40mm, and the auxiliary rib 122 has a width of 50mm and a spacing of 100mm. The principles and beneficial effects of the above scheme are as follows: The width of the main rib 121 is greater than the width of the auxiliary rib 122, and the spacing between the main ribs 121 is smaller than the spacing between the auxiliary ribs 122. The densely arranged main ribs 121 are located in the high load-bearing area of ​​the mechanism, so their cross-section can be used to resist large moments of inertia. The auxiliary ribs 122 are located in the low load-bearing area of ​​the mechanism, and their cross-sectional moments of inertia are small. The main ribs 121 and the auxiliary ribs 122 form a variable cross-section stiffness bearing structure that changes with the load gradient, and evenly distributes the overturning moment of the equipment during operation. The local static stiffness of the high-load area is increased by 20%, controlling the warping of the reference surface. The high-load area is machined by milling, so the overall weight is not increased. The dynamic characteristics of the mechanism are optimized. The natural frequency of the stone base 1 avoids the resonant frequency band of the equipment, ensuring the accuracy of dynamic measurement.

[0021] Example 3: Reference Figures 1-11 The anchoring structure 13 includes: Multiple blind holes 131 are opened on the reference surface of the equipment to be installed on the top of the solid bearing part 11, and the depth of the blind holes 131 is 30mm. The inner wall of the top of the blind hole 131 is provided with a chamfer 132 of 0.5mm × 45°; After the inner wall of blind hole 131 is treated with ethanol solution of KH-550 silane coupling agent with a concentration of 3%, a silane coupling agent modified layer 133 is formed. The modified layer is a silane molecule penetration bonding layer in the granite hole wall with a penetration depth of 80μm±10μm. It is determined by the following method: (1) Section sample preparation: The blind hole sample after KH-550 treatment is cut along the diameter direction to take a semi-cylindrical section. It is then cold-mounted with epoxy resin, ground with 400#–2000# sandpaper in sequence, and finally polished with 1μm diamond polishing paste to obtain a flat observation surface. The sample preparation process avoids contact with aqueous solution to prevent the coupling agent layer from dissolving and being lost. (2) Selection of Characteristic Elements: Nitrogen (N) was selected as the tracer characteristic element for KH-550 silane coupling agent. Granite matrix minerals (quartz, feldspar, mica) do not contain nitrogen, while the KH-550 molecular structure contains amino groups (–NH4+). 2) Therefore, the distribution of N element in the cross section is entirely derived from the coupling agent permeation layer and is not affected by the matrix background; (3) Test method: The field emission scanning electron microscope (FE-SEM) equipped with the energy dispersive spectrometer (EDS) is used to perform line scanning from the surface to the interior of the matrix in a direction perpendicular to the hole wall, with a step size of 2μm, an accelerating voltage of 15kV, and a beam current of 1.0nA, and collect the characteristic X-ray count of N element. (4) Permeation boundary determination threshold: The depth position corresponding to the N element count rate dropping to 10% of the maximum count within the window closest to the surface is defined as the boundary point of the permeation depth. This threshold setting eliminates the interference of instrument background noise (<5%), while ensuring that low-concentration tailing areas are not missed. (5) Sample size and statistics: Three independent cross-sectional line scans are taken at 120° intervals in the circumferential direction for each blind hole sample, and a total of 5 blind hole samples are tested, with a total of 15 effective line scan curves. The penetration depth was taken as the average ± standard deviation of 15 curves, and the result was 80 μm ± 10 μm (mean 78–82 μm, covering the ±10 μm range). (6) Original data retention: The N element count-depth curve of each line scan was archived for future reference. The typical curve showed that the N count was the highest at the surface and decreased monotonically with depth, falling back to the background level at 70–90 μm, which was consistent with the modified layer morphology boundary observed by SEM; This penetrating layer effectively seals the micropores of granite, significantly improving the bonding strength of subsequent rebar adhesive. The inner wall of the blind hole 131 is modified with a silane coupling agent. The specific process is as follows: a 3% KH-550 silane coupling agent ethanol solution is injected into the blind hole 131, followed by ultrasonic vibration at 30-50 kHz for 10 minutes, and then baked at a constant temperature of 80℃ for 30 minutes to allow the silane molecules to fully hydrolyze and condense, forming a silane coupling agent modified layer 133 on the inner wall of the blind hole. This modified layer 133 is essentially a silane molecule penetration bonding layer into the micropores of granite. Characterized by SEM cross-section, its penetration depth is 80 μm ± 10 μm. This penetrating layer can seal the microcracks and pores inside the blind hole and modify the polar surface of the granite into a hydrophobic interface, significantly improving the chemical bonding strength with the epoxy resin rebar adhesive. The blind hole 131 is provided with a coaxial gap by a SUS304 stainless steel threaded sleeve 134. The side wall of the stainless steel threaded sleeve 134 is machined with a cross-knurled knurling 135 with a depth of 0.2 mm and a pitch of 1 mm. The gap between the side wall of the stainless steel threaded sleeve 134 and the blind hole 131 is bonded by a compensating medium, which is a cured modified epoxy resin anchoring adhesive with a curing shrinkage rate of 0.04% and an elastic modulus of 4 GPa.

[0022] The principles and beneficial effects of the above scheme are as follows: After the inner wall of the blind hole 131 is modified with KH-550 silane coupling agent, a silane coupling agent modified layer 133 is formed, which can seal the micropores inside the blind hole 131. The chamfer 132 converts the edge shear stress generated by the pre-tightening force after the stainless steel threaded sleeve 134 is connected to the equipment into the compressive stress of the inner wall of the blind hole 131, which can prevent the blind hole 131 from cracking, thereby preventing the stone from cracking, improving the installation stability of the equipment, and preventing vibration. The cross-knurling 135 on the sidewall of the stainless steel threaded sleeve 134 can increase the adhesion between the modified epoxy resin anchoring adhesive and the silane coupling agent modified layer 133. Based on empirical estimates, the cross-knurling 135 is expected to improve the pull-out strength by more than 30%. The modified epoxy resin anchoring adhesive has a low shrinkage rate after curing, and its moderate elastic modulus can buffer structural failure caused by temperature rise.

[0023] Example 4: Reference Figures 1-11 The stone base 1 is made of three layers of granite bonded together. Cooling pipes and / or vibration sensors are pre-embedded between the bonding surfaces of adjacent granite layers. The cooling pipes are used to circulate heat exchange medium to regulate the temperature of the stone base 1. The vibration sensors are used to monitor the dynamic vibration signal of the stone base 1. Temperature monitoring optical fibers are also pre-embedded between the bonding surfaces of adjacent granite layers. The temperature monitoring optical fibers are arranged in parallel along the winding path of the cooling pipes to monitor the temperature distribution of the stone base 1 in real time.

[0024] The granite is bonded using epoxy AB adhesive with a shear strength of 22 MPa. The damping between the epoxy AB adhesives attenuates vibrations above 100 Hz by 90%.

[0025] The principles and beneficial effects of the above scheme are as follows: In addition to the one-piece molded stone base 1, the stone base 1 can also be made by bonding three layers of granite stone with epoxy AB glue. After bonding, the stone base 1 is a composite material of stone and epoxy AB glue. Epoxy AB glue can be used as a damping material to buffer vibration, providing multi-layer damping for the working equipment and using it to consume vibration; the damping between epoxy AB glues attenuates vibrations above 100Hz. Cooling pipes and vibration sensors are pre-embedded between the bonding surfaces of two adjacent granite layers. Specifically, the cooling pipes are copper capillaries with an inner diameter of φ6mm, coiled in a serpentine pattern around the edge of the bonding surface. The inlet and outlet of the pipes extend to the outside of the stone base 1, used to circulate constant-temperature circulating water to precisely control the base temperature (temperature control accuracy ±0.05℃), adapting to the constant-temperature requirements of semiconductor testing equipment. The vibration sensor is a miniature piezoelectric accelerometer, embedded in the central area of ​​the bonding surface, used to monitor the micro-vibration signals of the base in the X / Y / Z directions in real time (frequency response range 1Hz-10kHz), and led out to the data acquisition interface on the outside of the base via a signal line. The pre-embedded components and the bonding surface... The conformal bonding is achieved through local clearance grooves, with a groove depth of no more than 0.5mm, ensuring that the overall bonding strength is not affected. After testing, the flatness change of the base in a wide temperature range of 10℃-50℃ is less than 0.0005mm / m after the addition of cooling pipes. After the addition of vibration sensors, micro-vibrations can be identified and suppressed in real time. A liquid circulation pump and flow valve are connected to the pre-embedded cooling pipes. The liquid circulation pump, flow valve and temperature detection fiber are all electrically connected to the controller (PLC) to control the flow rate of the coolant and whether cooling is performed. The vibration sensor and display are also electrically connected to the controller. Micro-vibrations are identified through the display. When micro-vibrations are present, the operation of the device is stopped immediately to avoid the occurrence of processing errors. Temperature monitoring optical fibers, 0.9 mm in diameter and coated with polyimide, are arranged in parallel along the serpentine path of the cooling pipes. The fiber Bragg grating pitch is 1 mm, covering the entire temperature range of the base (-10℃ to 80℃). The signal output of the temperature monitoring fiber connects to an external demodulator, enabling real-time acquisition of the temperature field distribution within the base plane (spatial resolution 5 mm, temperature measurement accuracy ±0.1℃). Based on this temperature data, the flow rate of the heat exchange medium in the cooling pipes can be adjusted, forming a closed-loop control system of "temperature measurement-temperature control." This ensures that the temperature fluctuation of the base during long-term operation is controlled within ±0.05℃, meeting the constant temperature requirements of semiconductor wafer inspection equipment. Actual measurements showed that after adding a temperature monitoring fiber optic cable, the thermal drift error of the base was reduced from 0.5μm / ℃ to below 0.1μm / ℃. The pre-embedded cooling pipes, vibration sensors, and temperature monitoring fiber optic cables, with the temperature monitoring fiber optic cable running in parallel along the cooling pipes, formed a closed-loop system of "temperature measurement and control." This system enabled active and precise temperature control, real-time vibration monitoring, and accurate compensation for thermal drift, significantly expanding the environmental adaptability and long-term stability of the intelligent measuring instrument.

[0026] Example 5: Reference Figures 1-11 The granite bonding surface has multiple sandblasted micro-pits, each hemispherical in shape, with a diameter of 0.1±0.02mm, a depth of 0.05±0.01mm, and a density of 10 pits / cm². 2 The granite bonding surface has multiple venting grooves on its edge. One end of the venting groove is connected to the inner wall of a micro-pit, and the other end of the venting groove is opened on the granite sidewall.

[0027] The principles and beneficial effects of the above scheme are as follows: The micro-dimpled structure was formed using a white corundum sandblasting process with a sandblasting pressure of 0.6 MPa, a blasting distance of 150 mm, and a scanning speed of 50 mm / s. The bonding surface was sampled and observed using a laser confocal microscope (CLSM). Five independent regions were randomly selected on the sandblasted bonding surface, and three non-overlapping 5 mm × 5 mm fields of view were captured for each region (a total of 15 fields of view). The pits were automatically identified through 3D topography reconstruction, with the criteria being a diameter of 0.08 mm to 0.12 mm (corresponding to the 0.1 mm ± 0.02 mm specified in the claims) and a depth ≥ 0.03 mm. The number of pits per field of view in each of the 15 fields of view was 2 to 3 (equivalent to a surface density of 8 to 12 pits / cm²). Taking the average of all 15 fields of view, the surface density was approximately 10 pits / cm², demonstrating that the uniformity of the pit distribution meets the design requirements. The hemispherical pits not only increase the roughness of the bonding surface, but also form a mechanical interlocking structure similar to "mortise and tenon" at the microscopic level, which improves the interlayer peel strength by more than 40% according to empirical measurements and observations.

[0028] Example 6: Reference Figures 1-11 A common reference integrated manufacturing method, applicable to processing the variable cross-section stone base for intelligent measuring instruments described above, includes the following steps: The granite blocks were obtained and roughly ground to produce the stone base 1. Based on the center of gravity distribution of the equipment to be installed, the SIMP variable density method is used to perform topology optimization on the stiffness adjustment part 12 of the stone base 1 to determine the width and spacing distribution parameters of the main rib 121 and the auxiliary rib 122. Based on the distributed parameters, the stone base 1 is first clamped and fixed in a single clamping motion using a vacuum chuck in a five-axis gantry machining center. The upper surface of the solid bearing part 11 is finely ground as a unified machining datum and entered into the machine tool coordinate system. While keeping the clamping unchanged, the rigidity adjustment part 12 is milled. The blind hole is drilled while maintaining the same coordinate system. A composite PCD drill bit with a 90° chamfering edge vertically drills a blind hole 131 on the mounting equipment reference surface, and completes the chamfering of the hole opening 132 in one pass using the chamfering edge in the same feed stroke; After the milling of blind hole 131 and chamfer 132 is completed, all surfaces on the stone base 1 are cleaned. The surface adsorbed by the vacuum suction cup is not attached to the dust during processing, so only the side wall of the stone needs to be processed. After drying, silane coupling agent is coated in blind hole 131. After ultrasonic vibration and baking, silane coupling agent modified layer 133 is obtained. Stainless steel threaded sleeves 134 are bonded to the silane coupling agent modified layer 133 using anchoring adhesive. Based on the distribution parameters, the stone base 1 is machined using a five-axis gantry machining center, specifically including the following steps: S1: Using the bottom surface of the granite block as a rough reference, the side wall of the block is fixed by vacuum suction cup. First, the upper surface of the solid bearing part 11 (i.e. the reference surface of the equipment to be installed) is finely ground by a bowl-shaped diamond grinding wheel, and the flatness reaches 0.001mm / m. The finely ground upper surface is recorded into the machine tool coordinate system as the only machining reference. S2: Keep the workpiece in vacuum adsorption state without disassembling, adjust the swivel of the five-axis gantry machining center to the range of -90° to -180°, use an extended neck PCD milling cutter to feed from the side of the stone base 1, and mill the stiffness adjustment part 12 at the bottom end to form an asymmetric topological reinforcing rib network. S3: Continue to maintain the original clamping state, return the swivel head to zero, replace the PCD drill bit, use the finely ground upper surface as the axial positioning reference, vertically drill the blind hole 131 and use the chamfering edge to complete the chamfering (132) of the hole opening in one go in the same feed stroke; S4: The workpiece is kept in place for adsorption, and the cleaning, silane coupling agent coating, ultrasonic vibration and baking processes are completed in sequence. S5: Keep the clamping state unchanged and complete the bonding and curing of the anchoring adhesive for the stainless steel threaded sleeve 134; S6: Use a laser interferometer in situ to perform grid scanning and minor adjustments on the reference surface.

[0029] The principles and beneficial effects of the above scheme are as follows: This invention utilizes a dedicated five-axis gantry machining center with matching tooling to achieve integrated manufacturing based on a common reference. The tooling includes a porous ceramic vacuum chuck platform and adjustable auxiliary support columns. The porous ceramic vacuum chuck platform is fixed above the machine tool table, with suction holes evenly distributed on its surface for adsorbing and fixing the side wall of the solid bearing part 11 of the stone base 1. The adjustable auxiliary support columns are distributed around the vacuum chuck platform, with elastic rubber pads at the upper end for laterally abutting against the side of the base when milling the stiffness adjustment part 12 to prevent overhang vibration. This tooling supports stable adsorption of the workpiece within an inclination angle range of -90° to +90°, ensuring that the workpiece does not shift or overturn when machining the bottom rib mesh with the swing head. The rib mesh is machined using a tool mounted on the swing head, which can move with the swing head with a high degree of freedom to achieve the purpose of machining the rib mesh. To meet the process requirements of completing cleaning, baking, and glue application in situ, the five-axis gantry machining center is equipped with a movable process arm. The process arm integrates a high-pressure spray cleaning head, an ultrasonic vibration probe, an infrared heating lamp, and a glue application needle. Under the scheduling of the machine tool control system, the process arm can move sequentially to the processing point to complete the cleaning, ultrasonic, baking, and glue application operations while the workpiece is under vacuum adsorption. There is no need to transfer the workpiece to external equipment, thus achieving "common reference and no disassembly" for the entire process. In summary, the common reference integrated manufacturing equipment system adopted in this embodiment includes the following mechanical structure improvements: (1) a multi-hole ceramic vacuum chuck clamping mechanism to achieve single clamping and fixing; (2) a five-axis gantry machining center with a swivel head side milling host to complete rib milling and blind hole drilling; (3) a movable in-situ process arm that integrates cleaning, ultrasonic, baking and glue injection functions without disassembling the workpiece; (4) a rough grinding diamond grinding head and a cooling displacement adjustment fixture, including a tapered rod-retaining ring adjustment mechanism and a locking anti-loosening mechanism; (5) a laser interferometer online detection and CNC micro-grinding closed-loop compensation mechanism. The core improvement of the above equipment system is that: through single clamping of the vacuum chuck + swivel head side milling + in-situ execution of the process arm + online laser detection, the entire process of "no disassembly, no station transfer, common reference" processing is achieved. In traditional sequential machining, the workpiece undergoes multiple hoisting and repeated alignment, with each clamping requiring an independent machining coordinate system. The references for each process do not coincide, leading to linear accumulation of errors. This invention uses a vacuum chuck to adsorb and fix the granite block onto the machine tool table in one go, without disassembly throughout the process. First, the upper surface is finely ground to form an installation reference surface, which is then entered into the machine tool coordinate system as the sole machining reference. All subsequent machining processes—including milling of the stiffness adjustment section, drilling of blind holes, and chamfering—are completed within this same coordinate system. Although the fine-grinding process precedes it, thanks to the five-axis gantry machining... The central spindle tilt function and lateral feed strategy allow for smooth milling of the bottom stiffness adjustment section without flipping the workpiece. Furthermore, the entire process utilizes the unique coordinate system established during precision machining, eliminating the positioning error transmission chain caused by datum transformation. Employing the SIMP variable density method, and using the simulation results of the center of gravity distribution and eccentric load of the equipment to be installed as input, a material density-stiffness mapping model is established. This model iteratively solves for the optimal rib topology configuration that satisfies the target stiffness constraint, automatically outputting the width and spacing distribution parameters of the main and auxiliary ribs to guide the milling process. The specific method for topology optimization of the stiffness adjustment part 12 of the stone base 1 using the SIMP variable density method is as follows: List the SIMP optimization model; 1. Design variables: Discretize the spatial region where the stiffness adjustment part 12 is located into a finite element mesh, and assign a relative density design variable to each element: ρ e ∈[ρ min ,1], where e is the unit number, ρ min The minimum relative density has a value range of 10. -4 -10 -3 1. To avoid singularity in the stiffness matrix; 2. The material interpolation model and penalty factor are discretely valued, and the relationship between the element elastic modulus Ee and the relative density ρe adopts the SIMP interpolation model: E(ρ e )=E min +ρ (E0-E) min ), where E(ρ) e E0 is the interpolated elastic modulus of the element, and E0 is the true elastic modulus of the matrix material. min ρ is the minimum elastic modulus of the void region. e Let p be the normalized density of the e-th unit, and p be the penalty factor, with a penalty factor of p = 3.0; when the relative density ρ e When ρ = 1, the element is solid (the location of the reinforcing rib); when ρ e When p = 0, the element is a cavity. The penalty factor p = 3.0 forces the density distribution to tend towards 0 / 1 binarization, eliminating gray-scale elements. The optimization process, by minimizing structural flexibility (maximizing stiffness), automatically determines which areas should have stiffeners and which areas should be cavities under given material usage constraints, thereby achieving the optimal stiffness distribution for eccentric loads. The larger the p value, the better the stiffness distribution for intermediate densities (0 < p).e <1) The stronger the penalty, the more the topology tends to be a 0 / 1 binary distribution; the smaller the p value, the more intermediate density regions are retained, and the smoother the topology. In this invention, the p=3 region is taken as the mandatory placement region for the reinforcing ribs; 3. Optimization objective and constraints: The optimization objective is to optimize the material usage within the given constraints. Minimize structural flexibility (i.e., maximum static stiffness): C(ρ) = F T U(ρ), constraint condition: stK(ρ)U=F, ρ e v e ≤V frac , 0 < ρ min <ρ e <1, e=1,2,...,N, where: C is the structural flexibility (strain energy), F is the external load vector, U is the displacement vector, K is the global stiffness matrix, V0 is the total volume of the design domain, v e V is the volume of the e-th unit, N is the total number of units, and V frac The upper limit of the volume fraction constraint is [0.25, 0.55]; the iterative solution process is executed according to the following rules to ensure that the calculation results are stable and reproducible: (1) Initialization method: the initial relative density ρ of each element e Unified initialization as volume fraction constraint V frac (2) Solver selection: When the total number of design domain elements N≥100000, the moving asymptote method (MMA) is used, and when N<100000, the optimization criterion method (OC method) is used; (3) Convergence criterion: The relative change rate of structural flexibility |C(i)-C(i-1)| / C(i-1)<0.1% in two consecutive iterations is used as the convergence criterion, and the maximum number of iterations is set to 200. The iteration is terminated when any condition is met; (4) Filtering rules: Sensitivity filtering is used to suppress the checkerboard phenomenon, and the filtering radius is fixed at 2mm; (5) Minimum component size constraint: The minimum rib wall thickness is not less than 10mm to match the subsequent PCD milling cutter. Minimum processing capacity; (6) Abnormal handling: If a checkerboard phenomenon occurs during the iteration process, increase the filter radius to 3mm and iterate again; If other values ​​do not converge, terminate the iteration and re-initialize the density field and solve again. If it fails to converge for 3 consecutive times, the current topology configuration is determined to be infeasible, a warning message is output and the current parameter combination is recorded. The maximum number of iterations is set to 200 times. Stop when any termination condition is reached; 4. Discrete value of penalty factor and threshold setting: The penalty factor p in this application is fixed at 3.0. After simulation verification, the topology configuration when p=3.0 has both 0 / 1 distribution clarity and engineering feasibility, which is the preferred solution in this application. Based on this, the threshold τ for high-sensitivity areas is determined. highThe threshold τ for determining low-sensitivity regions is fixed at 0.75. low Fixed at 0.30, no longer using a floating range, the density field classification rule is uniformly defined as: High-sensitivity region: ≥0.75·max( Low-sensitivity areas: ≤0.30·max( The above threshold selection takes into account both the requirement for stiffness continuity and the need to maximize stiffness, ensuring the uniqueness and reproducibility of the topological result. When p is large, the density distribution tends to be binary (0 / 1), so the threshold is set relatively low. 5. Determination of topological configuration: Since the penalty factor p is fixed at 3.0, the condition p=3.0 is directly satisfied. ≥0.75·max( The area designated as the mandatory reinforcement zone is used to arrange the main reinforcement bars; it will meet the following requirements. ≤0.30·max( The area with a density of 0.30 is designated as a low-stiffness area, used for arranging auxiliary reinforcement or forming cavities; the intermediate density area (0.30·max( )< <0.75·max( ()) Selectively add auxiliary reinforcements according to the actual load distribution to ensure structural continuity and avoid stress concentration; (II) Determination of the range of structural parameters of the ribs: After the density field is output by the SIMP method, this invention further determines each structural parameter through process feasibility domain constraints and size optimization. The following parameters (Table 1) are all actual engineering value ranges, which are used as inputs for subsequent interval calculations. Table 1: 1. Determining the range of main reinforcement width and spacing: Step 1, feasible region constraint: the reinforcement width b and spacing L must satisfy the minimum machining dimension constraint: b ≥ d min +2t min , L≥d min +2t min Substitute d min ∈[16, 20]mm,t min =10mm: b≥16+2×10=36mm, L≥16+2×10=36mm, that is, the lower limit of b and L is 36mm; Step 2: Maximize the stiffness of the high-sensitivity area. In the area where p is 3.0, the bending stiffness contribution needs to be maximized. Under the assumptions of the same stiffener height, the same material and simply supported boundary, the relative stiffness evaluation index of a single stiffener to the overall bending stiffness is defined as: K rib ∝ (This formula is not the complete structural stiffness, but only a relative ranking index for engineering selection), where b is the stiffener width and L is the stiffener spacing; constraint condition one (processing feasibility), b ≥ dmin +2t min , L≥d min +2t min Substitute d min ∈[16,20]mm,t min =10mm: For b=70mm: 70≥d is required min +2t min , that is, d min ≤70-2t min Substitute t min =10mm, therefore d min ≤50mm, with d min For a non-empty intersection of [16,20] mm, for L=40 mm: 40≥d is required. min +2t min , that is, d min ≤40-2t min Substitute t min =10mm, therefore d min ≤20mm, with d min The intersection of ∈[16,20]mm is nonempty, i.e., there exists d. min =16-20mm, t min The input combination of =10mm makes b=70mm and L=40mm feasible; Constraint 2 (Optimal Selection of Relative Stiffness Evaluation Index): Within the feasible region, optimize the relative stiffness evaluation index K. rib = When b is 70mm and L is 40mm, This is a relatively high value within the feasible region, balancing processing economy and rigidity requirements, and d min ≤20mm within the tooling range; Constraint 3 (Machining Economy): Considering the versatility of roughing and finishing milling tools, b should not be too large (excessive width increases tool wear and machining time) nor too small (failing to meet stiffness requirements). In combinations where p = 3.0 satisfies stiffness requirements, b = 70mm and L = 40mm represent the relative stiffness evaluation index K within the feasible machining region. rib The engineering compromise result achieves a higher value while also considering tool versatility and machining economy; therefore, it can be concluded that b 主 =70mm, L 主 =40mm; 2. Determining the width and spacing of auxiliary reinforcement bars: In the low-sensitivity region where p = 3.0, only structural connectivity needs to be guaranteed. The constraint condition is: K low ≤( )·K high，min ,(in =1250 / 8575 ≈ 0.146, which is much lower than the stiffness of the main reinforcement, consistent with the design objective of maintaining continuity only in low-sensitivity areas), K high，min The minimum stiffness of the main reinforcement is determined by taking the smallest combination within the range of the main reinforcement, b. 主 =70mm, L 主 =40mm calculation: K high，min = =8575, Constraint 1 (Processing Feasibility), b 辅 ≥d min +2t min L 辅 ≥d min +2t min , for b 辅 =50mm: Requires 50≥d min +2t min Substitute t min =10mm, therefore d min ≤30mm, with d min The intersection of ∈[16,20]mm is non-empty (requires d) min ≤20mm precision milling cutter), for L 辅 =100mm: Requires 100≥d min +2t min Substitute t min =10mm, therefore d min ≤80mm, with d min The intersection of ∈[16,20]mm is non-empty. Constraint condition two (stiffness constraint): after selecting bauxiliary = 50mm and Lauxiliary = 100mm, K is calculated. 辅 = =1250, K 主 = =8575, K 辅 / K 主 =1250 / 8575≈0.146, which is much less than 1, indicating that the stiffness of the auxiliary reinforcement area is significantly lower than that of the main reinforcement area, which is in line with the design objective of maintaining connectivity in the low-sensitivity area without pursuing high stiffness; Constraint condition three (maximizing weight reduction): Under the premise of satisfying the above constraints, L 辅 Taking a larger value reduces material usage, while taking a smaller value for 'b' reduces material usage. In combinations that satisfy the low-sensitivity zone constraint at p=3.0, 'b' = 50 mm and 'L' = 100 mm are manually selected engineering compromise values. Therefore, the width and spacing of the auxiliary reinforcement are determined as follows: b 辅 =50mm, L 辅 =100mm; 3. Determining the thickness of the solid load-bearing part and the stiffness adjustment part: The total height H of the base is limited to 200mm by the space along the Z direction of the equipment (the allowable range in engineering is 195~205mm). The thickness h of the solid load-bearing part needs to be divided within H. top With stiffness adjustment part thickness h bottom =Hh top The reason why this scheme does not solve the division by simplifying the analytical model is as follows: (1) The base is a composite thick plate structure of "solid granite on the top and reinforced granite on the bottom", and the bending stiffness cannot be simply applied to the thin plate D∝h. 3 The separation of variables; (2) If calculated according to the thick plate composite section, the position of the overall neutral axis must be determined first and the parallel axis term must be included. Then, the non-uniform rib distribution output by SIMP is combined to perform a full finite element solution. The analytical closed solution does not exist. Therefore, the path of engineering selection and finite element verification is adopted: Based on the limitation of the pre-tightening force of the equipment assembly on the local indentation of the table, h is taken. top ≥70mm; Based on the PCD milling cutter's depth requirement for complete milling of the ribs (main rib width 70mm, spacing 40mm, draft angle 5°), h is taken as... bottom ≥80mm; in h top ∈[70,120]mm、h bottom =200-h top Within the window, three typical combinations (70 / 130, 80 / 120, 100 / 100) were selected to establish a three-dimensional finite element model. The same eccentric load was applied, and the maximum elastic deformation on the reference plane was compared with the first-order natural frequency. Theoretical evaluation results show that: h top =80mm, h bottom When the thickness is 120mm, the elastic deformation of the reference surface is ≤0.0008mm / m, and the first natural frequency is 122~126Hz, resulting in the best overall performance. Furthermore, a 120mm rib depth can completely accommodate the milling of the main ribs without damaging the bottom surface of the load-bearing section. Based on this, the thickness of the load-bearing section is set at 80mm, and the thickness of the stiffness adjustment section is set at 120mm. These dimensions are preferred engineering values, not derived from analytical formulas. 4. Determination of draft angle: The draft angle α is determined by the diameter of the finish milling cutter and the depth of the rib. It is defined as the angle between the outer wall of the rib and the vertical plane, and the calculation formula is tanα ≥ , where d finish The diameter of the finish milling cutter is d, and h is the rib depth (i.e., the thickness of the stiffness adjustment part). The PCD end mill described in this application is used, with a cutter diameter d. finishThe rib depth h ∈ [16, 20] mm, and the rib depth h ∈ [115, 125] mm. Calculations show that when using a minimum tool diameter of 16 mm and a maximum rib depth of 125 mm, tanα ≥ 16 / (2 × 125) = 0.064, corresponding to α ≥ 3.66°. This is the theoretical minimum draft angle under this condition. In engineering, a standard series angle range of 4°-5° is used, where 4° is the standardized rounded value closest to the theoretical lower limit. In actual machining, by reducing the feed rate, increasing the number of passes, and using a sharp-edged PCD milling cutter, it can be ensured that there is no interference on the sidewall and a surface roughness Ra ≤ 1.6 μm when drafting at 4°. 5° is the preferred angle for tool standardization and machining management; within this range, tool retraction is smooth and rib forming quality is good. 5. Determining the fillet radius: The fillet radius r is used to reduce stress concentration at the intersection of ribs. Based on engineering experience, it is taken as: r = (0.12-0.18)b 主 , where b 主 =70mm, r min =0.12×70=8.4mm, r max =0.18×70=12.6mm. Within the above range, the standard fillet value is taken, r=R10, where R10 is the standard tool radius. It can be machined in one step with a standard R10 fillet milling cutter without increasing the cost of additional tools. Based on the above principles, we can conclude that: (i) the volume of the original base: V0 = L b ×W b ×H, where L b ∈[795,805]mm, Wb∈[595,605], H∈[195,205]mm, V0∈[795×595×195,805×605×205]=[92.1×10 6 99.8×10 6 mm 3 Take the typical design value V0 = 800 × 600 × 200 = 96 × 10 6 mm 3 (H=200mm is the sum of the solid load-bearing part (80mm) and the stiffness adjustment part (120mm), falling within the range of 195–205mm, consistent with Table 1). After optimization, the stiffness adjustment part forms a cavity and rib structure inside, and the volume of the bottom solid box-shaped area is: V bottom-box =L b ×W b ×h bottom Take the typical value L b =800mm, W b =600mm, h bottom =120mm, then V bottom-box =800×600×120=57.6×106 mm 3 The volume fraction ρ based on SIMP topology optimization at p=3.0 rib =0.32–0.48 (see Table 1), taking the median value of 0.40 for theoretical estimation: Theoretical material volume V of the reinforcement rib,theoretical =ρ rib ×V bottom-box =0.40×57.6×10 6 ≈23.0×10 6 If estimated based on a safe volume fraction range of 0.32-0.48, then V rib,theoretical（min） =0.32×57.6×10 6 =18.4×10 6 mm 3 V rib,theoretical（max） =0.48×57.6×10 6 ≈27.6×10 6 mm 3 For ease of engineering calculations, 24.0 × 10⁻⁶ is selected in this embodiment. 6 mm 3 As a typical estimate (corresponding to the equivalent volume fraction ρ) rib =24.0 / 57.6≈0.417, which falls within the range of 0.32–0.48, i.e., V rib,theoretical The theoretical estimation range is 18.4 × 10⁻⁶. 6 -27.6×10 6 mm 3 Theoretical estimated value of the total volume V of the optimized base opt =V top +V rib,theoretical =800×600×80+24.0×10 6 =62.4×10 6 mm 3 ; Remove material volume V removed =V bottom-box -V rib,theoretical =57.6×10 6 -24.0×10 6 =33.6×10 6 mm 3 Meanwhile, V removed =V0-V opt =96×10 6 -62.4×10 6 =33.6×10 6 mm 3 The two paths lead to the same result, so volume conservation holds; weight loss rate η = (V0 - V opt ) / V0×100%=(96×10 6-62.4×10 6 ) / 96×10 6 ×100%=35%; The above volume data is a theoretical estimate based on the median volume fraction. The actual value varies depending on the details of the topological configuration and can be accurately extracted and verified after CAD solid modeling. (ii) Local static stiffness improvement, defined as the local static stiffness improvement rate as: ,in, This represents the maximum normalized displacement under eccentric load on the solid base. To optimize the maximum normalized displacement of the base under the same load, in a linear elastic system, this ratio depends only on the relative stiffness distribution of the topology and not on the specific value of the material's elastic modulus (E0∈[40.90]GPa). A full three-dimensional finite element model of the p=3.0 topology was established, and a typical eccentric load (the load magnitude and constraint conditions are consistent with the actual center of gravity projection position of the equipment to be installed) was applied for static solution. The direct output results of the finite element model are as follows: Maximum displacement of the solid homogeneous base: δ base =1.00 (normalized reference value); Maximum displacement of the optimized base: δopt=0.832 (finite element direct output value); Local static stiffness improvement rate: The finite element calculation result of 20.1% is rounded to 20%, so the local static stiffness improvement rate in the high load area of ​​this scheme is determined to be 20%.

[0030] (III) Determination of the first natural frequency: A full three-dimensional finite element model was established based on the p=3.0 topological configuration (model size 800×600×200mm, material is Jinan Qing granite, elastic modulus E0∈[40,90]GPa, Poisson's ratio 0.25, density approximately 2700kg / m³). 3 The schematic simplified constraint conditions are adopted (the upper surface of the solid load-bearing part is fully constrained, and the bottom stiffness adjustment part is free (the bottom surface is unconstrained). These constraints are uniform artificial boundary conditions, mainly used for relative stiffness ranking and comparison between different topological configurations. They do not reflect the actual support conditions under the actual installation state of the product. According to the analysis of this schematic model, the first natural frequency is proportional to the square root of the material's elastic modulus (f∝). Within the E0 range of 40–90 GPa, the first-order natural frequency of the optimized base is expected to be in the range of approximately 99–148 Hz. Combined with reports in publicly available literature that the elastic modulus test results of Jinan Qing granite are mostly concentrated in the 50–80 GPa range, the frequency corresponding to this commonly used range is approximately 110–140 Hz. This scheme uses 123 Hz as the design target reference value for the first-order natural frequency. This value comes from the expected performance index of topology optimization during the technical scheme design, and its corresponding elastic modulus level is approximately 62 GPa (within the concentrated range of 50–80 GPa reported in publicly available literature), which is consistent with the aforementioned frequency range. It should be clarified that 123 Hz is the target index value for this design, not a precise simulation result based on a specific real installation constraint condition. In actual products, due to differences in granite batches and installation conditions, the first-order natural frequency will fluctuate within the range of 99–148 Hz. The actual frequency should be accurately determined through complete finite element modal analysis, taking into account the specific installation method (bottom support stiffness, anchor bolt preload, top equipment mass distribution, etc.). (iv) Avoid operating frequencies of the equipment motors. With typical value f opt =123Hz is used as the main basis for frequency avoidance verification. At the same time, margin verification is carried out in combination with the first-order natural frequency across the entire range of 99–148Hz. The frequencies of the main excitation sources of the intelligent measurement equipment are as follows: (1) The control system bandwidth is approximately 20Hz; (2) The ball bearing of the lead screw passes through a frequency of about 40Hz (typically v=200mm / s, Ls=5mm). (3) The base frequency f of the servo motor motor =n / 60, n≤6000rpm, therefore f motor ≤100Hz; (4) Motor frequency doubled 2·f motor ≤200Hz; (5) Cogging frequency f cog =z·n / 60, z=8, n varies continuously from 0 to 6000 rpm, f cog The frequency ranges continuously from 0 to 800 Hz.

[0031] Verification Analysis: 1. The control system bandwidth of 20Hz and the lead screw frequency of 40Hz are both far below the lower limit of the frequency range of 99Hz, with no resonance overlap; 2. Motor base frequency f motor ≤100Hz, completely avoided at a typical value of 123Hz; near 99Hz in the worst batch, f motor The 100Hz upper limit is only momentarily reached, and the actual operating frequency of motors is mostly concentrated in the 20-80Hz range, far from this range; 3. Motor frequency doubled operation: Frequency doubled is achieved when the motor speed is approximately 3690 rpm (f motor When the frequency crosses the first natural frequency (≈61.5Hz), although 3690rpm falls within the wide operating speed range of the equipment (2000–6000rpm), the control system usually smoothly transitions or avoids this specific resonance point during the core constant speed scanning stage of precision measurement. Furthermore, even if the equipment runs at a constant speed near 3690rpm, the initial vibration energy itself is extremely small because the excitation amplitude of the motor's second harmonic frequency is usually only 10%–20% of the fundamental frequency. More importantly, the epoxy AB glue in the three-layer granite bonding structure of this solution has a vibration attenuation rate of 90% for vibrations above 100Hz (see Example 4). Even if a transient or steady-state crossing occurs at this speed, the residual vibration after damping attenuation has a negligible impact on the accuracy of the reference surface. 4. Cogging frequency crossing: The cogging frequency crosses the first natural frequency at approximately 922.5 rpm. Although this speed is lower than the conventional measurement scanning range, if the equipment operates at a low constant speed near this speed, the excitation amplitude of the cogging frequency itself is also relatively small. After being damped by 90% with epoxy AB glue, the effect is negligible. 5. The upper limit of the cogging frequency is 800Hz, which is much higher than the upper limit of the frequency range of 148Hz, and there is no steady-state resonance overlap in the high-speed constant speed operation range; Conclusion: Under actual working conditions, the optimized base's natural frequency design (typical value 123Hz, full range 99–148Hz) does not coincide with the main low-frequency excitation sources (control system bandwidth, lead screw frequency, motor fundamental frequency). For frequency sweeps across the entire speed range of the second harmonic and cogging frequency, the relatively small excitation amplitude of the second harmonic and the 90% vibration attenuation provided by the epoxy AB adhesive damping layer will not substantially affect the measurement accuracy. The above frequency avoidance conclusion holds true across the entire batch range of elastic modulus (99–148Hz). (V) Flatness Guarantee: A full three-dimensional finite element model was established based on the p=3.0 topology. A typical eccentric load (consistent with the actual center-of-gravity projection position of the equipment to be installed) was applied, and static solutions were performed. The elastic deformation directly output by the finite element model (excluding the initial flatness of the machining) was ≤0.0008mm / m at the reference surface of the equipment to be installed, which met the design index for elastic deformation control. The initial flatness of the machining reference surface was independently guaranteed by the common reference integrated manufacturing process: After the upper surface of the solid bearing part was finely ground, the reference surface was meshed using a laser interferometer (measurement accuracy 0.1μm / m), and the measured flatness was ≤0.001mm / m. This measured value includes the surface morphology error of the fine grinding process itself and is not within the scope of finite element elastic deformation calculation. The spatial distribution trend of the finite element elastic deformation prediction result and the total deformation (elastic deformation + initial flatness) measured by the laser interferometer were compared. The two were in good agreement, indicating that the finite element model can reliably reflect the deformation characteristics of the base under eccentric load. Blind hole drilling uses the finely ground mounting reference surface as the axial positioning reference to ensure the high perpendicularity between the blind hole axis and the reference surface; the hole chamfering is completed with the same reference and the same step as the drilling process to ensure the geometric consistency of the stress relief structure. The stiffness adjustment part 12 and the solid bearing part 11 are provided with blind holes 3 that extend to the installation reference surface. The depth of the blind holes is 30mm. A stainless steel threaded sleeve 4 is coaxially assembled in the blind holes. A uniform micro gap of 0.2-0.5mm is reserved radially between the outer wall of the threaded sleeve and the inner wall of the blind holes. The gap is filled with a stress-compensating filling medium 5 of cured modified epoxy resin to form a flexible anchoring structure with micro-slits in heterogeneous materials. A chamfer 31 of 0.3-0.8mm × 40°-50° is opened at the opening of the blind holes as a stress-relieving structure. The inner wall of the blind holes is modified by silane coupling agent to form a chemically hardened infiltration and strengthening layer 32 with a depth of 30-120μm. The outer wall of the stainless steel threaded sleeve is machined with a cross-knurled knurling 41 with a depth of 0.15-0.30mm and a pitch of 0.8-1.5mm. The basis for determining the blind hole depth of 30mm is: the standard threaded sleeve length (M6-M12 threaded sleeve) is usually 25-35mm, and 30mm is the midpoint of the standard length range, taking into account both the anchoring strength and the integrity of the base structure (without penetrating the base). During processing, single-clamping positioning: The granite block / multi-layer bonded stone blank is placed on the machine tool worktable, and fixed by vacuum suction cup negative pressure control of -80kPa to 100kPa, without disassembling the workpiece throughout the process; datum surface forming processing: The upper surface of the blank is finely ground with a 2000-4000 grit diamond grinding disc to process a flat mounting datum surface; The machine tool is equipped with an online probe (triggering accuracy better than 1μm) to scan the datum surface and input it into the machine tool coordinate system as a unified processing datum; In-situ drilling of preset holes: Maintaining vacuum With the clamping unchanged, replace the PCD polycrystalline diamond coated drill bit (coating thickness 5-15μm), and drill a blind hole to a depth of 30mm vertically, using the already formed installation reference surface as a reference. Simultaneously mill a 0.3-0.8mm × 40°-50° chamfer at the hole opening. After ultrasonic cleaning of the hole wall, apply a 1%-6% concentration of KH-550 silane coupling agent, ultrasonically vibrate at 30-50kHz for 3-10 minutes, and bake at a constant temperature of 70-90℃ for 20-40 minutes to form an inner wall reinforcement layer. Then, perform flexible anchoring assembly curing. Insert the SUS304 stainless steel threaded sleeve into the blind hole, ensuring a uniform radial clearance of 0.2-0.5mm; inject modified epoxy resin anchoring adhesive into the clearance, filling 55%-75% of the blind hole volume, and allow it to fully cure at room temperature; precision closed-loop compensation machining: keep the workpiece in its original clamping state unchanged, and use a laser interferometer (measurement accuracy 0.1μm / m) to scan the mounting reference surface with a grid, with no less than 20 grid sampling points; if the curing shrinkage of the adhesive causes a slight warping of the reference surface, the CNC system will automatically generate a micro-warping compensation. The grinding trajectory uses W1.0-W3.5 diamond grinding heads for micro-grinding, removing 0.5-3μm per pass, with grinding pressure controlled at 0.02-0.10MPa; factory stress verification test: threaded fittings are fitted with simulated load blocks, and bolts are tightened with a standard torque of 60N·m, continuously bearing pressure for 24 hours (standard test time); ultrasonic flaw detection is used to check for new micro-cracks in the stone around the blind holes, and the change in flatness of the reference surface is less than 0.0003-0.001mm. Only after meeting the standards can the product be shipped from the factory.

[0032] Example 7: Reference Figures 1-11 After bonding the stainless steel threaded sleeve 134, a laser interferometer is used to perform a grid scan on the reference surface to obtain the flatness data of the reference surface of the equipment to be installed. With the help of the laser interferometer module on the aforementioned movable process arm, the reference surface is scanned in a grid manner while the workpiece is held in a vacuum and adsorbed on the porous ceramic vacuum chuck platform. Since the detection process and the processing process share the same machine tool coordinate system, there is no need for secondary clamping or station transfer measurement, which completely eliminates the reference conversion error. If the flatness data exceeds the preset threshold, the five-axis gantry machining center will be controlled to perform micro-grinding and repair on the reference surface of the equipment to be installed until the flatness is restored to the tolerance range.

[0033] The principles and beneficial effects of the above scheme are as follows: After the stainless steel threaded sleeve 134 is bonded and cured, the workpiece remains on the vacuum chuck without being removed, that is, it is still in the unified machine tool coordinate system established when the initial fine grinding reference surface is used. At this time, a laser interferometer is used to perform grid scanning on the same mounting reference surface. Since the inspection and processing share the same reference and the same clamping state, the measured flatness deviation is the real deformation generated during the curing process, eliminating the additional measurement error introduced by the secondary clamping. Modified epoxy resin anchoring adhesive undergoes chemical shrinkage during curing. Although the shrinkage rate is controlled below 0.05%, micron-level shrinkage stress may still cause slight elastic rebound or warping in thin-walled granite areas. Laser interferometer grid scanning quantifies the amplitude and spatial distribution of this deformation with no less than 25 sampling points, generating an error cloud map to provide a precise basis for the removal amount distribution in compensation processing. The CNC system automatically generates a variable removal grinding trajectory based on error data. It uses a W1.5 diamond grinding head to trim the reference surface with a low pressure of 0.05MPa and a single 1-2μm micro-removal method. Micro-grinding only eliminates deformed protrusion areas without damaging the solidified colloidal anchoring structure. Moreover, the low-pressure process does not introduce new processing stress, achieving stress release rather than stress superposition. A standard torque of 60 N·m was applied to the M10 bolt using a torque wrench to tighten it. The tightened state was maintained for 24 hours after the standard torque of 60 N·m was reached to simulate the creep and stress relaxation behavior of the equipment under long-term working conditions. According to previous process verification, the creep deformation of the modified epoxy resin anchoring adhesive under 60 N·m torque tends to stabilize within the first 24 hours after loading. The increase in deformation after 24 hours is less than 0.0001 mm, and the impact on flatness is negligible. Therefore, 24 hours was selected as the load-bearing test time, which can fully expose potential microcracks and bonding defects while taking into account production efficiency. Ultrasonic flaw detection monitors the integrity of the stone around blind holes and re-measures whether the change in flatness meets the standard. As the final criterion for processing quality, an ultrasonic flaw detection method based on an equivalent diameter threshold of 0.2 mm is used to check for micro-cracks around blind holes. This threshold setting can effectively identify critical cracks that affect structural strength, while avoiding over-screening caused by the inherent micro-cracks in natural stone, thus ensuring the objectivity of the test results and production efficiency.

[0034] Example 8: Reference Figures 1-11After the flatness is restored to the tolerance range, the stainless steel threaded sleeve 134 is connected using an M10 bolt threaded connection. A torque wrench is used to apply a standard torque of 60 N·m to the M10 bolt to tighten it. The tightened state is maintained for 24 hours from the moment the standard torque of 60 N·m is reached. The M10 bolt is then removed and ultrasonic testing is performed. The ultrasonic testing uses a longitudinal wave straight probe with a frequency of 5 MHz to 10 MHz. A prefabricated granite test block with an equivalent diameter of 0.2 mm flat bottom hole is used as the calibration reference. The scanning area covers the surface of the solid bearing part 11 within a radius of 5 mm around the blind hole 131. The scanning speed is not greater than 50 mm / s. When the detected defect echo amplitude is higher than the echo amplitude of the calibration reference, it is judged as unqualified. If only a single microcrack with an equivalent diameter of less than 0.2 mm is detected, and the number of microcracks around the same blind hole does not exceed 2, it is judged as qualified. At the same time, the flatness of the reference surface of the equipment to be installed is re-measured. If the flatness change is less than 0.0003 mm, the product is qualified.

[0035] The principles and beneficial effects of the above scheme are as follows: After removing the M10 bolts, ultrasonic testing was used to inspect the quality around blind hole 131. The specific process parameters were as follows: a longitudinal wave straight probe with a frequency of 5MHz-10MHz was selected, and machine oil or special ultrasonic coupling paste was used as the coupling agent; the material of the calibration test block was the same as that of the stone base 1 (both were Jinan Qing granite), and a flat-bottomed hole with an equivalent diameter of 0.2mm was pre-drilled on the test block, and the echo amplitude of the test block was used as the judgment benchmark; during the scan, the center of the probe was aligned with the center of blind hole 131, and the annular area with a radius of 5mm around the blind hole was covered along the spiral or grid lines, and the scanning speed was controlled at 30mm / s-50mm / s to ensure full coverage and no missed detections. Judgment rules: If the detected defect echo amplitude is lower than or equal to the calibration reference echo amplitude (i.e., equivalent diameter less than 0.2 mm), and the number of such microcracks around the same blind hole does not exceed 2, it is judged as qualified; if the echo amplitude is higher than the calibration reference (equivalent diameter ≥ 0.2 mm), or microcracks appear in a network / aggregate distribution, it is judged as unqualified; the unqualified products detected by the above standard all showed a change of more than 0.0003 mm in flatness during the retest, which verified the high correlation between the ultrasonic judgment standard and the final flatness index. Subsequently, the flatness of the reference surface was retested. If the change in flatness was less than 0.0003 mm and the measurement uncertainty was better than ±0.00005 mm, the product was qualified.

[0036] Example 9: Reference Figures 1-11During the rough grinding process, a rotating 500-grit diamond grinding head is used to rough grind the raw material. The purpose of rough grinding is to initially shape the raw material, thereby reducing the difficulty of processing stone materials by the five-axis gantry machining center. At the same time, through staged grinding, the processing accuracy of the stone base 1, especially its mounting reference surface, can be gradually improved. The top of the rough grinding diamond grinding head contacts and fits with the bottom surface of the flange 2. The flange 2 has multiple through holes, and the top of the rough grinding diamond grinding head has multiple through holes II. The through holes and through holes II are arranged one-to-one. Bolts 21 are inserted into the through holes and through holes II. Nuts 22 are threaded onto the bolts 21. The bolt heads 21 and nuts 22 cooperate to clamp the rough grinding diamond grinding head and the flange 2.

[0037] The principles and beneficial effects of the above scheme are as follows: This embodiment provides a special roughing tooling adapted to the aforementioned common reference integrated manufacturing method, which is used to solve the process pain points of granite blocks being directly fine-ground on a five-axis gantry machining center, where the initial surface roughness is too large, resulting in rapid tool wear and difficulty in controlling machining thermal deformation. This tooling works in conjunction with a vacuum chuck to achieve efficient pre-treatment of the block surface while ensuring that the clamping reference remains unchanged, thus avoiding the reference offset caused by multiple hoisting and alignment in the traditional process. Bolt 21 can initially fix the flange 2 and the rough diamond grinding head relative to each other by inserting it into the through hole 2. Then, the threaded connection between nut 22 and bolt 21 is used to clamp the rough diamond grinding head and flange 2. By installing or removing nut 22, the rough diamond grinding head can be quickly installed and removed from the bottom of flange 2, which improves the efficiency of installing and removing the rough diamond grinding head.

[0038] Example 10: Reference Figures 1-11 The bottom end of the mounting pipe 3 is welded to the top of the flange 2. The mounting pipe 3 is connected to the round hole 23 in the middle of the flange and the round hole 24 in the middle of the rough diamond grinding head. The bottom end of the round hole 24 is opened in the groove 25 on the bottom surface of the rough diamond grinding head. Multiple drainage grooves 26 are opened at the bottom end of the rough diamond grinding head. The inner wall of the groove 25 is connected to the end of the drainage groove 26. The other end of the drainage groove 26 is opened on the side wall of the rough diamond grinding head.

[0039] The principles and beneficial effects of the above scheme are as follows: During rough grinding, the rough grinding diamond grinding head will generate a lot of heat through friction with the granite surface. To prevent the rough grinding diamond grinding head from being damaged during use, cooling water can be output to the outside through the installation pipe 3. The cooling water enters the groove 25 through the round hole 23 and the second round hole 24, and finally exits through the drain groove 26. The flow path of the cooling water can effectively cool the rough grinding diamond grinding head and its friction surface. At the same time, the water discharged through the drain groove 26 can also wash away the stone chips generated during grinding, preventing them from accumulating on the granite surface.

[0040] Example 11: Reference Figures 1-11 Multiple adapter holes 31 are arranged in a circular array on the side wall of the mounting pipe 3. A baffle 32 is connected to the inner wall of the mounting pipe 3. The bottom surface of the baffle 32 and the second circular hole 24 form a drainage channel 33. A fixed pipe 34 is rotatably sealed to the side wall of the mounting pipe 3. The inner wall of the fixed pipe 34 is connected to the end of the water inlet pipe 35. The water inlet pipe 35 is connected to the adapter hole 31. The other end of the water inlet pipe 35 is connected to the water pump output end of the water supply mechanism.

[0041] The principles and beneficial effects of the above scheme are as follows: When water supply is required using the installation pipe 3, the water pump starts and pumps the cooling water in the water storage tank of the water supply mechanism into the interior of the water inlet pipe 35. The water inlet pipe 35 then pumps the cooling water into the interior of the adapter hole 31. Since the installation pipe 3 needs to be kept rotating during rough grinding, multiple adapter holes 31 are provided. The fixed pipe 34 in the working state is stationary relative to the rotating installation pipe 3.

[0042] Example 12: Reference Figures 1-11 A retaining ring 331 is connected to the inner wall of the mounting tube 3. A concentric tapered rod 332 is arranged inside the retaining ring 331. The bottom of the tapered rod 332 is located below the retaining ring 331, and the top of the tapered rod 332 is located above the retaining ring 331. The top diameter of the tapered rod 332 is smaller than its bottom diameter. The top of the tapered rod 332 is connected to the bottom of the drive rod 333. The drive rod 333 and the baffle 32 are in sliding sealing fit. The baffle 32 and the baffle 334 sealed on the top of the mounting tube 3 form a mounting cavity 3411. Two rotating shafts 341 are rotatably connected to the inner wall of the mounting cavity 3411. Gears 342 are connected to the rotating shafts 341. The two gears 342 are respectively meshed with one side of the double-sided rack 343. The double-sided rack 343 is fixedly connected to the drive rod 333. Both ends of the rotating shaft 341 are set to protrude from the side wall of the mounting tube 3. Two locking gears 3421 are connected to each rotating shaft 341. The locking gears 3421 are located outside the mounting cavity 3411. The inverted V-shaped top of the locking block 3431 is inserted between the two teeth at the bottom of each locking gear 3421. The bottom end of the locking block 3431 is connected to the top surface of the lifting ring 344. The inner wall of the lifting ring 344 slides in fit with the top side wall of the fixed tube 34. The bottom surface of the lifting ring 344 is connected to the top surface of the water inlet pipe 35 through the spring 345.

[0043] The principles and beneficial effects of the above scheme are as follows: Meanwhile, since the surface roughness of the raw blocks is different, the pressure applied to the surface of the raw blocks during rough grinding is different. When the applied pressure is high, the heat generated by the rough grinding diamond grinding head is high, and when the applied pressure is low, the heat generated by the rough grinding diamond grinding head is low. In order to further improve the safety of the rough grinding diamond grinding head during operation, the volume of cooling water discharged from the drainage channel 33 is set to be adjusted synchronously based on the pressure applied to the raw blocks. The drive rod 333 can drive the tapered rod 332 to move along the axis of the mounting tube 3; The specific principle of cooling water discharge adjustment is as follows: when it is necessary to increase the drainage volume, the water pressure at the output end of the water pump increases synchronously, and at the same time, the drive rod 333 drives the conical rod 332 to move downward. The distance between the side wall of the conical rod 332 and the inner wall of the retaining ring 331 increases, so the volume of cooling water discharged through the bottom of the drainage channel 33 increases, thereby improving the cooling efficiency. When it is necessary to reduce the drainage volume, the water pressure at the pump output end decreases synchronously. At the same time, the drive rod 333 drives the conical rod 332 to move upward, and the distance between the side wall of the conical rod 332 and the inner wall of the retaining ring 331 decreases. Therefore, the volume of cooling water discharged through the bottom of the drainage channel 33 decreases, so as to reduce the use of cooling water and achieve the purpose of saving water. The specific principle of the movement of the drive rod 333 is that the rotation of the rotating shaft 341 drives the gear 342 to rotate, and one side of the double rack 343 that meshes with the gear 342 moves along the axis of the mounting tube 3, and the drive rod 333 drives the tapered rod 332 to move up or down synchronously. Since both racks 343 and gears 342 are placed in the mounting cavity 3411 and isolated from the flowing cooling water, lubricating oil can be filled into the mounting cavity 3411 to lubricate the transmission components and improve their service life. During grinding, the mounting tube 3 is in a high-speed rotating state. To prevent the rotating shaft 341 from rotating accidentally, a locking gear 3421 is coaxially installed on the part of the rotating shaft 341 located outside the outer wall of the mounting tube 3. The inverted V-shaped top of the locking block 3431 is inserted between the two teeth at the bottom of the locking gear 3421. The spring 345 applies an upward elastic force to the lifting ring 344. The top tip of the locking block 3431 can be stably inserted between the two teeth at the bottom of the locking gear 3421. Therefore, the rotating mounting tube 3 will not cause the rotating shaft 341 to rotate accidentally due to grinding, and thus will not cause the drive rod 333 to rise or fall accidentally. Therefore, the gap between the retaining ring 331 and the tapered rod 332 will not change, and the constant drainage volume can ensure that the coarse diamond grinding head is effectively cooled during operation. When the cooling water discharge volume needs to be adjusted, simply press the lifting ring 344 downwards, and the locking block 3431 moves downwards simultaneously. At this time, the spring 345 is compressed, and after the V-shaped top of the locking block 3431 stops locking the locking gear 3421, the flow rate of the discharged cooling water can be adjusted by rotating the shaft 341. After the adjustment is completed, release the lifting ring 344, and the locking block 3431 resets and relocks the shaft 341.

[0044] Example 13: Reference Figures 1-11 The top of the baffle plate 334 is coaxially connected to the output end of the motor. The motor is installed on the output end of the three-axis moving mechanism in the prior art. The fixed pipe 34 or the water inlet pipe 35 is connected to the output end of the three-axis moving mechanism.

[0045] The principles and beneficial effects of the above scheme are as follows: The output shaft of the motor provides power for the rotation of the second baffle 334, which ultimately enables the rough diamond grinding head to rotate. The device uses a three-axis moving mechanism in the prior art to drive the motor to move and control the grinding position and grinding pressure. Specifically, the three-axis moving mechanism connected to the top or side wall of the motor includes: an X-axis moving mechanism composed of a sprocket and chain mechanism or a screw mechanism, which is connected to the worktable; a Y-axis moving mechanism composed of a second sprocket and chain mechanism or a second screw mechanism, which is connected to the output end of the X-axis moving mechanism; and a Z-axis cylinder connected to the output end of the Y-axis moving mechanism, which can apply downward pressure to the rough diamond grinding head to ensure smooth rough grinding. The output end of the Z-axis cylinder is connected to the side wall or top of the motor. The raw material is placed on the worktable and clamped and fixed using the fixtures provided with the worktable. The X-axis and Y-axis moving mechanisms control the movement of the rough diamond grinding head on the horizontal plane, while the Z-axis cylinder drives the rough diamond grinding head to move longitudinally. The advantage of using the existing three-axis moving mechanism in rough grinding is that it has a simple structure and can select appropriate components for targeted assembly according to the parameters of the rough material being processed. The X-axis moving mechanism and the Y-axis moving mechanism have high motion accuracy, which can accurately drive the rough grinding diamond grinding head to move continuously and stably. The output end of the Z-axis cylinder is connected to the motor, which can ensure sufficient and stable grinding pressure during rough grinding, further improving the rough grinding accuracy.

[0046] Example 14: Reference Figures 1-11 A locking ring 4 is longitudinally slidably connected to the side wall of the mounting tube 3. The bottom surface of the locking ring 4 is connected to the top surface of the flange 2 through a tension spring 41. The bottom end of the locking rod 42 is connected to the bottom of the locking ring 4. The side wall of the locking rod 42 is connected to one end of the locking block 43. The bottom surface of the locking block 43 is coplanar with the top surface of the flange 2. The V-shaped tip of the locking block 43 is inserted into the V-shaped groove 44 that is opened through the top of the nut 22. The center line between the two inner walls of the V-shaped groove 44 intersects with the axis of the mounting tube 3.

[0047] The principles and beneficial effects of the above scheme are as follows: The rotating mounting tube 3 moves at a high speed, and without the installation of anti-loosening washers, the nut 22 is prone to loosening, which may lead to the nut 22 falling off the bolt 21. Even if the grinding head does not fall off the flange 2, a gap will appear between the grinding head and the flange 2, resulting in localized incomplete grinding of the raw material during rough grinding, thus reducing the accuracy of rough grinding and creating a grinding burden for subsequent fine grinding. At the same time, the accumulation of grinding errors will seriously affect the quality of product processing. Therefore, after the nut 22 is connected to the bolt 21, the V-shaped tip of the locking block 43 is inserted into the V-groove 44 to fix all the nuts 22 and prevent the nuts 22 from loosening. At this time, the use of anti-loosening washers can be avoided, and the disassembly and assembly efficiency of the nuts 22 and bolts 21 can be improved. When the bottom of flange 2 is damaged, or the top surface of the rough diamond grinding head is damaged, or there are foreign objects on the contact surface between the two, a local gap will appear between flange 2 and the rough diamond grinding head. The installed bolt 21 will be slightly tilted. After the nut 22 is threaded to the bolt 21, the V-groove 44 will not be able to be inserted into the V-shaped tip of the locking block 43. By judging the relative position of the V-groove 44, it can be determined that the rough diamond grinding head cannot be kept horizontal with the surface to be processed after installation, so as to remind the operator to check and replace the parts in time to avoid waste during processing. The upward movement of the locking ring 4 causes the locking rod 42 and the locking block 43 to move upward synchronously. At this time, the length of the tension spring 41 increases, and the V-shaped tip of the locking block 43 is disengaged from the V-shaped groove 44. After the locking ring 4 is pulled upward, it can be temporarily supported by a pad. The pad is placed between the locking ring 4 and the flange 2. Then, the operator unscrews the nuts 22 one by one to complete the disassembly of the rough diamond grinding head. After replacing the new rough diamond grinding head, tighten the nuts 22 one by one, remove the pads, and the locking ring 4 moves downward along the mounting tube 3 under the elastic force of the tension spring 41 returning to its original position. The locking rod 42 moves synchronously, driving the locking block 43 downward. After the V-shaped tip of the locking block 43 engages with the V-shaped groove 44, the multiple nuts 22 are locked simultaneously.

[0048] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for the present invention. Other modifications can be easily made by those skilled in the art. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and illustrations shown and described herein.

Claims

1. A variable cross-section stone base for intelligent measuring instruments, characterized in that, include: The stone base (1) includes a solid bearing part (11) and a stiffness adjustment part (12) formed by milling the bottom end of the stone base (1). The stiffness adjustment part (12) is an asymmetric topological reinforcing rib network composed of multiple intersecting ribs. The center of the asymmetric topological reinforcing rib network coincides with the projection position of the center of gravity of the equipment to be installed. The draft angle of the reinforcing rib section is 4°-5°. The intersection of the reinforcing ribs is provided with a rounded corner (123) to increase stiffness. The reinforcing ribs include main ribs (121) and auxiliary ribs (122). The width of the main ribs (121) is greater than the width of the auxiliary ribs (122), and the spacing of the main ribs (121) is less than the spacing of the auxiliary ribs (122). This is to form a high-rigidity load-bearing area in the high-load-bearing area at the projection position of the center of gravity of the equipment to be installed, and a low-rigidity area in the low-load-bearing area, thereby realizing the variable cross-sectional stiffness distribution of the stone base (1). An anchoring structure (13) is bonded to the top of the solid bearing part (11) for fixing the equipment to be installed.

2. The variable cross-section stone base for intelligent measuring instruments according to claim 1, characterized in that, The stone base (1) has an area of ​​800mm×600mm, the solid bearing part (11) has a thickness of 80mm, the stiffness adjustment part (12) has a thickness of 120mm, the main reinforcement (121) has a width of 70mm and a spacing of 40mm, and the auxiliary reinforcement (122) has a width of 50mm and a spacing of 100mm.

3. A variable cross-section stone base for intelligent measuring instruments according to claim 2, characterized in that, The anchoring structure (13) includes: Multiple blind holes (131) are opened on the reference surface of the equipment to be installed on the top of the solid support part (11), and the depth of the blind holes (131) is 30mm; The inner wall of the top of the blind hole (131) is provided with a chamfer (132) of 0.5mm×45°. After the inner wall of the blind hole (131) is treated with a 3% KH-550 silane coupling agent ethanol solution, a silane coupling agent modified layer (133) is formed. The modified layer is a silane molecule penetration and bonding layer in the granite hole wall, with a penetration depth of 80μm±10μm, which is determined by scanning electron microscopy cross-sectional observation method.

4. A variable cross-section stone base for intelligent measuring instruments according to claim 3, characterized in that, The blind hole (131) is provided with a coaxial gap of SUS304 stainless steel threaded sleeve (134). The side wall of the stainless steel threaded sleeve (134) is machined with cross-knurling (135) with a depth of 0.2 mm and a pitch of 1 mm. The gap between the side wall of the stainless steel threaded sleeve (134) and the blind hole (131) is bonded by a compensating medium, which is a cured modified epoxy resin anchoring adhesive with a curing shrinkage rate of 0.04% and an elastic modulus of 4 GPa.

5. A variable cross-section stone base for intelligent measuring instruments according to claim 2, characterized in that, The stone base (1) is made of three layers of granite bonded together. Cooling pipes and / or vibration sensors are pre-embedded between the bonding surfaces of two adjacent layers of granite. The cooling pipes are used to circulate heat exchange medium to regulate the temperature of the stone base (1). The vibration sensors are used to monitor the dynamic vibration signal of the stone base (1). Temperature monitoring optical fibers are also pre-embedded between the bonding surfaces of two adjacent layers of granite. The temperature monitoring optical fibers are laid in parallel along the winding path of the cooling pipes to monitor the temperature distribution of the stone base (1) in real time.

6. A variable cross-section stone base for an intelligent measuring instrument according to claim 5, characterized in that, The granite was bonded using epoxy AB adhesive with a shear strength of 22 MPa.

7. A variable cross-section stone base for an intelligent measuring instrument according to claim 6, characterized in that, The granite bonding surface has multiple sandblasted micro-pits, each hemispherical in shape, with a diameter of 0.1±0.02 mm and a depth of 0.05±0.01 mm. The density of the micro-pits is 10 pits / cm². 2 The granite bonding surface has multiple venting grooves on its edge. One end of the venting groove is connected to the inner wall of a micro-pit, and the other end of the venting groove is opened on the granite sidewall.

8. A common reference integrated manufacturing method, applicable to processing a variable cross-section stone base for an intelligent measuring instrument as described in any one of claims 1-7, characterized in that, Includes the following steps: The granite blocks were obtained and roughly ground to obtain a stone base (1). Based on the center of gravity distribution of the equipment to be installed, the SIMP variable density method is used to perform topology optimization on the stiffness adjustment part (12) of the stone base (1) to determine the width and spacing distribution parameters of the main reinforcement (121) and the auxiliary reinforcement (122). Based on the distribution parameters, the stone base (1) is first fixed by a vacuum chuck in the five-axis gantry machining center. The upper surface of the solid bearing part (11) is finely ground as a unified machining reference and entered into the machine tool coordinate system. The stiffness adjustment part (12) is milled while keeping the clamping unchanged. The blind hole is drilled while keeping the same coordinate system. A composite PCD drill bit with a 90° chamfering edge vertically drills a blind hole (131) on the mounting equipment reference surface, and completes the chamfering (132) of the hole opening in one pass using the chamfering edge in the same feed stroke; After the milling of the blind hole (131) and chamfer (132) is completed, all surfaces on the stone base (1) are cleaned and dried. Then, a silane coupling agent is coated inside the blind hole (131). After ultrasonic vibration and baking, a silane coupling agent modified layer (133) is obtained. Stainless steel threaded sleeves (134) are bonded within the silane coupling agent modified layer (133) using anchoring adhesive.

9. The common reference integrated manufacturing method according to claim 8, characterized in that, After bonding the stainless steel threaded sleeve (134), a laser interferometer is used to perform a grid scan on the reference surface to obtain the flatness data of the reference surface of the equipment to be installed; If the flatness data exceeds the preset threshold, the five-axis gantry machining center will be controlled to perform micro-grinding and repair on the reference surface of the equipment to be installed until the flatness is restored to the tolerance range.

10. The common reference integrated manufacturing method according to claim 9, characterized in that, After the flatness is restored to the tolerance range, the stainless steel threaded sleeve (134) is connected by an M10 bolt thread. A torque wrench is used to apply a standard torque of 60 N·m to the M10 bolt to tighten it. The tightening state is kept constant for 24 hours from the moment the standard torque of 60 N·m is reached. The M10 bolt is then removed and ultrasonic testing is performed. The ultrasonic testing uses a longitudinal wave straight probe with a frequency of 5 MHz to 10 MHz. A prefabricated granite test block with an equivalent diameter of 0.2 mm flat bottom hole is used as the calibration reference. The scanning area covers the surface of the solid bearing part (11) within a radius of 5 mm around the blind hole (131). The scanning speed is not greater than 50 mm / s. When the detected defect echo amplitude is higher than the echo amplitude of the calibration reference, it is judged as unqualified. If only a single microcrack with an equivalent diameter of less than 0.2 mm is detected, and the number of microcracks around the same blind hole does not exceed 2, it is judged as qualified. At the same time, the flatness of the reference surface of the equipment to be installed is re-measured. If the flatness change is less than 0.0003 mm, the product is qualified.

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