Ultrasonic scanning microscope device, operation system and stage thereof

Abstract

This invention relates to a scanning acoustic microscope (SAM) device, its operating system, and a stage. The SAM device includes a stage, an ultrasonic scanning microscope, and at least one isolation component. The isolation component isolates the analyte on the stage from the detection liquid. The operating system includes a control component configured to receive or plan a custom path and drive a detection probe to scan along the custom path. The stage, through which the detection liquid flows, creates suction to adsorb the analyte. The ultrasonic scanning microscope moves along the custom path via the detection probe, providing ultrasonic waves that penetrate the detection liquid and the isolation component between the analyte and the detection probe, and receives ultrasonic waves reflected from the analyte to generate an ultrasonic signal for performing an ultrasonic scanning detection procedure.

Description

Technical Field

[0001] This invention relates to an ultrasonic device, and more particularly to an ultrasonic scanning microscope (SAM) device, its operating system, and stage. Background Technology

[0002] Ultrasonic waves are transmitted through a medium capable of conducting sound waves. When an ultrasonic wave encounters an interface between media of different densities, some of its energy is reflected back. This reflected sound energy is then received by the inspection probe, converted into electrical signals, and finally transformed into an image displayed on a screen. Traditional ultrasonic scanning technology uses water as the medium for transmitting sound waves, and the object under test (e.g., electronic components) and the inspection probe must be immersed in the detection liquid to maintain a distance between them during the ultrasonic scanning process. However, many electronic components are not suitable for contact with water, and regardless of whether they are suitable for water contact, a time-consuming or high-risk drying process is required after ultrasonic scanning.

[0003] Secondly, in conventional ultrasonic scanning inspection procedures, the object under test (DUT) is typically placed simply on a stage or secured using mechanical clamps. However, when the DUT (e.g., a thin wafer or substrate) is immersed in the inspection liquid, placing it solely on a stage may cause it to shift or float due to liquid disturbance. Using mechanical clamps may apply uneven stress to the DUT, leading to deformation or warping, and the clamps themselves may obstruct part of the inspection area, limiting the integrity of the scan. Therefore, providing a stable, uniform, and non-obstructive fixation method in a liquid environment remains a problem to be solved.

[0004] Furthermore, conventional ultrasonic scanning microscopes mostly employ standard XY-axis scanning paths for comprehensive inspection of the test object. This fixed scanning path lacks flexibility, resulting in low efficiency not only when only specific areas need to be inspected (such as circular wafers or specific square regions), but also being completely ineffective in handling test objects with non-flat surfaces or curved structures. When scanning curved surfaces, the fixed scanning plane causes the focal length between the detection probe and the test object surface to constantly change, resulting in most of the scanned image being out of focus and failing to obtain effective inspection results.

[0005] Those familiar with underwater technology who attempt to use pumps to generate suction face a critical problem: when the object being tested (such as a flat wafer) completely covers the pump's fluid inlet, the fluid channel becomes blocked, preventing the pump from drawing enough fluid and leading to dry run, which severely shortens the pump's lifespan. Therefore, ensuring sufficient fluid flow through the pump while providing suction is a pressing technical challenge that needs to be addressed. Summary of the Invention

[0006] In view of this, one or more objectives of the present invention is to provide an ultrasonic scanning microscope device and its operating system and stage, so as to solve many problems of the above-mentioned conventional technology.

[0007] This invention proposes an ultrasonic scanning microscope device, comprising: a stage for supporting at least one object to be tested; at least one isolation component for isolating the object to be tested from a detection liquid; and an ultrasonic scanning microscope having a detection probe and an operating system. The operating system has a control component, wherein the control component controls the detection probe to perform an ultrasonic scanning detection procedure on the object to be tested according to a custom path. The custom path includes a motion trajectory and a detection sequence. The ultrasonic scanning microscope moves via the detection probe according to the motion trajectory of the custom path, and provides an ultrasonic wave that penetrates the detection liquid and the isolation component disposed between the object to be tested and the detection probe according to the detection sequence. It also receives the ultrasonic wave reflected by the object to be tested to generate an ultrasonic signal, thereby performing the ultrasonic scanning detection procedure on the object to be tested on the stage.

[0008] Another aspect of the present invention provides an operating system for an ultrasonic scanning microscope, for operating an ultrasonic scanning microscope with a detection probe, the ultrasonic scanning microscope performing an ultrasonic scanning detection procedure on a test object on a stage, wherein a detection liquid and an isolation component are disposed between the test object and the detection probe, the operating system comprising: a control component configured to: (a) receive or formulate a custom path, the custom path including a motion trajectory and a detection sequence; and (b) generate a control signal and transmit the control signal to the ultrasonic scanning microscope to drive the detection probe of the ultrasonic scanning microscope to move according to the motion trajectory of the custom path, and provide an ultrasonic wave that penetrates the detection liquid and the isolation component disposed between the test object and the detection probe according to the detection sequence, and receive the ultrasonic wave reflected by the test object to generate an ultrasonic signal, thereby performing the ultrasonic scanning detection procedure on the test object on the stage.

[0009] Another aspect of the present invention provides a stage comprising: a platform having a bearing surface for bearing a test object, and the platform having at least one fluid channel penetrating the bearing surface; and a base having a chamber formed between the base and the platform, wherein the base has at least one inlet and at least one outlet communicating with the chamber, wherein a test liquid flows from the inlet of the base through the chamber and flows out from the outlet of the base, thereby forming a continuous flow in the chamber, thereby generating a negative pressure at the fluid channel of the platform, and the negative pressure forming a suction force to adsorb the test object.

[0010] In summary, the ultrasonic scanning microscope device, its operating system, and the stage of the present invention have the following advantages: (1) Using a waterproof isolation component to cover the test object, the detection probe and / or the detection liquid can create an isolation effect between the test object (e.g., electronic components) and the detection liquid (e.g., water).

[0011] (2) The thickness of the isolation component does not affect the transmission of ultrasonic waves. The acoustic impedance of the isolation component is substantially similar to or the same as that of the detection liquid, and it can be tightly or conformally attached to the surface of the measurement area of ​​the test object.

[0012] (3) Using an isolation component to block the contact between the analyte and the test liquid can effectively solve the problem that electronic components are not suitable for contact with the test liquid, and at the same time avoid the problem of time-consuming or high-risk drying process.

[0013] (4) The platform is equipped with an adjustment device that can provide functions such as lifting, turning, translation, tilt adjustment, flatness adjustment and / or straightness adjustment.

[0014] (5) The adjustment device can be used to suspend the stage and the test object it carries in the test liquid by means of suspension or lifting. In addition, the control components of the present invention can be located outside the liquid surface, without the need to increase the waterproof rating, while still being able to fully control the adjustment of the stage, the planning of the scanning path, and the execution of the test procedure.

[0015] (6) The stage is composed of multiple combined expansion platforms spliced ​​or assembled, which can adapt to the size of different processing tanks. It only needs to make the measurement area have high precision flatness, without having to make each part have high precision flatness, so that the ultrasonic scanning test procedure can be performed.

[0016] (7) By combining optical sensing device and ultrasonic scanning microscope, automatic optical surface inspection and ultrasonic scanning inspection can be performed on the liquid surface and below the liquid surface, respectively, and positioning and anti-collision functions can be provided.

[0017] (8) The operating system of the present invention can flexibly scan the test object using a single-axis motion path, a two-axis motion path, a three-axis motion path, or a four-axis motion path by using a custom path.

[0018] (9) The fluid flow adsorption stage of the present invention can provide a stable and controllable negative pressure suction in the detection liquid environment, firmly hold the analyte on the platform, and effectively solve the risk of pump dry run and damage in the prior art by ensuring constant fluid flow, thereby improving detection stability.

[0019] (10) The fluid flow adsorption stage of the present invention provides uniform and gentle adsorption force by means of fluid negative pressure, which enables it to effectively adsorb test objects with slightly uneven or warped surfaces, and can significantly reduce the deformation or damage of thin test objects caused by adsorption stress.

[0020] To enable you to have a better understanding of the technical features and effects of this invention, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0021] Figure 1 The diagram illustrates the operation of the ultrasonic scanning microscope device of the present invention, which uses an isolation component to prevent the analyte from contacting the detection liquid. The ultrasonic scanning microscope employs reflective detection technology.

[0022] Figure 2 The diagram illustrates the operation of the ultrasonic scanning microscope device of the present invention, which uses an isolation component to prevent the analyte from contacting the detection liquid. The ultrasonic scanning microscope employs a transmission detection technology.

[0023] Figure 3 A schematic diagram illustrating the operation of the ultrasonic scanning microscope device of the present invention in a processing tank for ultrasonic scanning detection.

[0024] Figure 4 A cross-sectional schematic diagram of the ultrasonic scanning microscope device of the present invention, showing the object to be tested enclosed by an isolation component.

[0025] Figure 5 A cross-sectional schematic diagram of the ultrasonic scanning microscope device of the present invention is shown, in which the detection probe is fixedly covered by an isolation component.

[0026] Figure 6 A cross-sectional schematic diagram of the ultrasonic scanning microscope device of the present invention is shown, in which the isolation component can be unfolded to cover the detection probe.

[0027] Figure 7 A cross-sectional schematic diagram of the ultrasonic scanning microscope device of the present invention is shown, in which the isolation component can be unfolded to cover the detection liquid.

[0028] Figure 8 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus of the present invention is shown, wherein the adjustment device is suspended on the processing tank.

[0029] Figure 9 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus of the present invention is shown, wherein the adjustment device raises the stage from the bottom of the processing tank.

[0030] Figure 10 The diagram above illustrates the ultrasonic scanning microscope apparatus of the present invention with an adjustment device, wherein only the stage, the object to be tested, and the adjustment device are shown for simplification.

[0031] Figure 11 The diagram illustrates a cross-sectional view of the stage of the ultrasonic scanning microscope apparatus of the present invention, which includes multiple combined extended platforms.

[0032] Figure 12 The diagram illustrates a top view of the stage of the ultrasonic scanning microscope apparatus of the present invention, which includes multiple combined extended platforms. For the sake of simplification, only a portion of the structure is shown.

[0033] Figure 13 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus of the present invention with an optical sensing device is shown, wherein the object to be measured is located on the surface of a liquid.

[0034] Figure 14 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus of the present invention is shown, wherein the position of the object to be measured is moved below the liquid surface.

[0035] Figure 15 A schematic diagram illustrating the ultrasonic scanning microscope device of the present invention has an operating system and a multi-axis drive mechanism.

[0036] Figure 16 A functional block diagram illustrating a preferred embodiment of the operating system of the present invention is shown.

[0037] Figure 17 A flowchart illustrating the scanning mode selection process of the programmable logic controller (PLC) of this invention is shown.

[0038] Figure 18 A schematic diagram illustrating one embodiment of the custom path of the present invention (serpentine path).

[0039] Figure 19 A schematic diagram illustrating the scanning surface of the detection probe of the present invention based on a four-axis motion path is shown.

[0040] Figure 20 A schematic diagram illustrating the detection probe of the present invention performing detection by stamping.

[0041] Figure 21 A three-dimensional schematic diagram of the fluid flow adsorption platform of the present invention is shown, obtained from the top side.

[0042] Figure 22 A three-dimensional schematic diagram of the fluid flow adsorption stage of the present invention is shown, obtained from the bottom side.

[0043] Figure 23 An exploded three-dimensional diagram illustrating the fluid flow adsorption platform of the present invention.

[0044] Figure 24 A cross-sectional schematic diagram illustrating the operation of the fluid flow adsorption platform of the present invention in a detection liquid.

[0045] Figure 25 A top view schematic diagram of the fluid flow adsorption stage of the present invention with baffles is shown.

[0046] Figure 26 An exploded perspective view of another embodiment of the fluid flow adsorption platform of the present invention is shown.

[0047] Figure 27 A schematic diagram illustrating the piping configuration of the stage of the present invention with a control device is shown.

[0048] Figure 28 A schematic diagram illustrating the pipeline configuration of the control device for the platform of the present invention, which has a water exchange function.

[0049] Figure 29 A schematic diagram illustrating the pipeline configuration of the stage control device of the present invention, which has a zoned adsorption control function.

[0050] Figure 30 A schematic diagram illustrating the waveform conversion of the feature extraction program and the feature restoration program executed by the signal processing module of the present invention is shown.

[0051] Figure 31 A schematic diagram illustrating the action flow of the detection probe of the present invention performing a step-and-repeat detection.

[0052] Figure 32 A timing diagram illustrating the dual-channel interleaved sampling procedure of the present invention is shown.

[0053] Explanation of reference numerals in the attached figures: 10: Ultrasonic scanning microscope device 20: Platform 21: Limiting component 22: Storage Platform 22': Modular Expansion Platform 23a: Area 1 23b: Second Region 24: Adjustment device 25: Adjust components 26: Actuation Components 27: Hook fittings 36: Control Components 40: Ultrasonic scanning microscope 41: Drive mechanism 42: Detection probe 42a: Ultrasonic transmitter 42b: Ultrasonic receiver 43: End 44: Detection solution 50: Isolation Component 52: Outer surface 54: Inner surface 55: Container 56: Fixtures 60: External supply source 70: Processing tank 80: Optical sensing device 82: Vibration sensor 100: Test Item 102: Effective adsorption area 110: Measurement Area 120: Object 150: Operating System 151: Programmable Logic Controller 152: Motor driver 153: Optical Linear Encoder 154: Optical Isolator 155: High-speed I / O module 156: Front-end fetching unit 158: Transmission Unit 160: Backend processing unit 202: Fluid Channel 210: Base 212: Entrance 214: Exports 220: Spacer box 221: Bearing surface 222: Ribs 224: Circular frame 230: Chamber 240: Pump 260: Baffle 272: Multichannel piping network 300: Control device 350: Diverter pipe 352: Main valve 354: Flow divider and pressure regulating valve 400: External plant supply sources 450: Drainage outlet C1: First Channel C2: Second Channel D1: Track Path Archive D2: Trigger Path Archive S1: Trigger signal P: Measurement point F: External force F1: Suction F2: Thrust FF: Suction RD: Raw waveform data KD: Feature Data BD: Reconstructed Image Data X, Y, Z, T: Axes FTP: File Transfer Protocol Detailed Implementation

[0054] To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with reference to accompanying drawings and embodiments. The drawings used are for illustrative purposes only and do not necessarily represent the actual scale and precise configuration of the invention. Therefore, the scale and configuration of the accompanying drawings should not be used to interpret or limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

[0055] Furthermore, unless otherwise specified, the terms used throughout this specification and claims generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

[0056] The use of terms such as "first," "second," "third," and "fourth" in this document does not specifically refer to any order or sequence, nor is it intended to limit the invention. Rather, it is merely used to distinguish components or operations described using the same technical terms.

[0057] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0058] This invention provides a scanning acoustic microscope (SAM) device that uses a waterproof isolation component to create an isolation effect (or barrier effect) between the analyte (e.g., electronic component) and the detection liquid (e.g., water). The isolation component used in this invention has a low acoustic impedance difference with water, and the isolation component does not obstruct the penetration of ultrasonic signals. Therefore, it effectively reduces the adverse effects of the isolation component on the ultrasonic scanning detection process, avoids the problem of electronic components being unsuitable for contact with the detection liquid, and avoids the problem of time-consuming or high-risk drying processes. The isolation component of this invention can be used in various ways to keep the measurement area of ​​the analyte from contacting the detection liquid during the ultrasonic scanning detection process. For example, the isolation component can cover the analyte, the detection probe, and / or the detection liquid, thus isolating the analyte from the detection liquid, for example, at least ensuring that the measurement area of ​​the analyte remains free from contact with the detection liquid during the ultrasonic scanning detection process.

[0059] Please see Figures 1 to 14 As shown, Figure 1 The diagram illustrates the operation of the ultrasonic scanning microscope device of the present invention, which uses an isolation component to prevent the analyte from contacting the detection liquid. The ultrasonic scanning microscope employs reflective detection technology. Figure 2 This diagram illustrates the operation of the ultrasonic scanning microscope apparatus of the present invention, which uses an isolation component to prevent the analyte from contacting the detection liquid. The ultrasonic scanning microscope employs a transmission detection technique. The ultrasonic scanning microscope apparatus 10 of the present invention includes a stage 20, an ultrasonic scanning microscope 40, and at least one isolation component 50. The stage 20 is used to support at least one analyte 100, and the isolation component 50 is used to prevent the detection liquid 44 from contacting the analyte 100. The ultrasonic scanning microscope 40 has at least one detection probe 42, and the ultrasonic scanning microscope 40 is used to provide and / or receive ultrasonic waves via the detection probe 42, thereby performing an ultrasonic scanning detection procedure on the analyte 100. The detection probe 42 includes an ultrasonic transmitter 42a and an ultrasonic receiver 42b. The ultrasonic transmitter 42a is used to output ultrasonic waves, and the ultrasonic receiver 42b is used to receive ultrasonic waves. The ultrasonic transmitter 42a and ultrasonic receiver 42b of the present invention are not limited to a specific relative position, wherein the ultrasonic transmitter 42a and ultrasonic receiver 42b can be located on the same side of the analyte 100 (e.g., Figure 1 The example shown is integrated into the detection probe 42, and it can also be located on different sides (e.g. Figure 2(As exemplified, each component is located within the detection probe 42). Any structural or positional adjustments to the ultrasonic scanning microscope device and its components, as long as they can be used for the ultrasonic scanning detection procedure of this invention, fall within the scope of protection claimed by this invention. Furthermore, to avoid further complicating the description of the embodiments of this invention, only the example of the ultrasonic transmitter 42a and ultrasonic receiver 42b being located on the same side of the object under test 100 is used as an illustrative example. This invention can employ various conventional ultrasonic scanning microscopes 40 and various conventional ultrasonic scanning detection principles to perform ultrasonic scanning detection procedures, and their structures and operations are well known to those skilled in the art to which this invention pertains; therefore, they will not be described in detail here. In one embodiment, the detection probe 42 can also be designed as a modular probe, which has the possibility of expansion or extension, for example, allowing the replacement of probe modules with different frequencies or focal lengths; or, the probe can be a broadband (or multi-frequency) design, with a single probe applicable to different frequencies to meet different detection needs.

[0060] The stage 20 of the ultrasonic scanning microscope apparatus 10 of the present invention includes, for example, at least one placement platform 22, on which the object to be tested 100 can be placed. The placement platform 22 can be, for example, built-in or externally mounted on the stage 20, or even a defined area on the stage 20 can be used as the placement platform 22. The stage 20 is not limited to a fixed or movable stage. A movable stage is, for example, a support platform with functions such as lifting, turning, translation, tilt adjustment, flatness adjustment, and / or straightness adjustment. Furthermore, the stage 20 is not limited to a fixed or movable support for the object to be tested 100. Although the present invention proposes a fluid-flow adsorption stage to improve the shortcomings of conventional stages, the present invention is not limited thereto. Any stage design that can be used to support the object under test 100, such as placing the object under test 100 on a stage or using conventional techniques such as mechanical clamps for fixation, can be applied to the ultrasonic scanning microscope device 10 and its operation method of the present invention.

[0061] One feature of this invention is the inclusion of an isolation component 50, which isolates the test sample 100 from the detection liquid 44. This prevents all or part of the test sample 100 from contacting the detection liquid 44, thus preventing the test sample 100 from contacting the detection liquid 44 (e.g., liquid or moisture) and eliminating the need for drying the test sample 100. The number of test samples 100 and isolation components 50 can be one or more, and they are not limited to having the same number of corresponding components; the number of test samples 100 and isolation components 50 can also be different. In the ultrasonic scanning inspection procedure, the ultrasonic scanning microscope 40 provides ultrasonic waves through the inspection probe 42, which penetrate the detection liquid 44 and the isolation component 50 attached (or covered) to the test sample 100, thereby performing an ultrasonic scanning inspection on the test sample 100 carried on the stage 20. Next, by processing the detection signal obtained from the ultrasonic scanning detection procedure and separating (or filtering) the signal from the isolation component 50, the measurement result of the test object 100 can be obtained. Therefore, the isolation component 50 of the present invention does not substantially affect the operation of the ultrasonic scanning detection procedure, nor does it affect the provision and / or reception of ultrasonic waves by the detection probe 42. To avoid reducing the reflection and refraction of ultrasonic waves at the interface between the isolation component 50 and the detection liquid 44, thereby affecting the propagation, absorption, reflection, and penetration characteristics of ultrasonic waves, the acoustic impedance of the isolation component 50 is preferably approximately or the same as that of the detection liquid 44. For example, if the detection liquid 44 is water, and the acoustic impedance of water is approximately 1.5 MRayl, then the acoustic impedance of the isolation component 50 is preferably approximately or the same as 1.5 MRayl, and the closer the better, wherein the acoustic impedance of the isolation component 50 is approximately 1.5 MRayl to approximately 3.5 MRayl. The detection liquid 44 used in this invention is not limited to traditional water, and can also be selectively replaced with a liquid component whose acoustic impedance is close to or the same as that of the selected isolation component 50, such as an aqueous solution or other liquid. Furthermore, the difference between the acoustic impedance of the isolation component 50 and the acoustic impedance of the detection liquid 44 can be used in this invention as long as it does not affect the operation of the ultrasonic scanning detection procedure, and is not limited to being similar or the same.

[0062] To avoid interference from ultrasonic signals, energy loss from absorbed sound energy, and interference from additional media (e.g., air), the higher the degree of fit (i.e., the degree of contact) between the isolation component 50 and the object 120 (e.g., electronic component) on the test object 100, the better. A higher degree of fit means a smaller or even eliminated gap between the isolation component 50 and the test object 100, thus minimizing the adverse effects of the isolation component 50 on the ultrasonic scanning inspection process. Preferably, the isolation component 50 has (but is not limited to) a deformable structure, and is partially or entirely deformable. The material of the isolation component 50 is, for example, (but not limited to) an elastic and / or stretchable material, and the thinner the isolation component 50, the better, so that the isolation component 50 can fit tightly or conformally against the test object 100 after being subjected to an external force F (e.g., suction F1 or thrust F2). For example, the isolation component 50 may be a membrane structure, preferably a thin film. The thickness of the isolation component 50 may be (but is not limited to) less than or equal to about 100 µm, and the thinner the better. The thinner the isolation component 50 and the better its elasticity and / or stretchability, the better the adhesion effect and the lower the signal noise and energy absorption loss. For example, the material of the isolation component 50 may be selected from the group of polymers composed of silicone, rubber, plastic and composite polymers. However, as long as there is no concern that the test object 100 will come into contact with the test liquid 44, and for example, if the flatness of the surface of the test object 100 (e.g., a flat surface) is sufficient to allow the isolation component 50 attached thereto to provide an isolation effect, the material of the isolation component 50 of the present invention is not limited to using elastic and / or stretchable materials. It can be any suitable material, as long as it can provide an isolation effect, it can be used in the present invention. In addition, the isolation component 50 is not limited to a single-layer membrane structure; it can also be selectively a multi-layer membrane structure, and the materials of each membrane layer in the multi-layer membrane structure can be the same or different. Moreover, the isolation component 50 is not limited to a specific shape; its shape can be selectively determined according to the shape of the test object 100 to which it is to be attached. Furthermore, if the isolation component 50 has elastic or tensile properties, its shape can be changed according to the shape of the test object 100.

[0063] The isolation component 50 of this invention can, for example, isolate the test object 100 from the detection liquid 44 by covering the test object 100, the detection probe 42, and / or the detection liquid 44, that is, at least ensure that the measurement area 110 of the test object 100 does not come into contact with the detection liquid 44 during the ultrasonic scanning detection procedure. In short, the purpose of this invention is to prevent a portion or all of the test object 100 from contacting the detection liquid 44. Therefore, this portion or all of the test object 100 must be in a non-liquid environment (i.e., not in contact with the detection liquid 44). The ultrasonic scanning microscope 40 is not limited to this; the detection probe 42 of the ultrasonic scanning microscope 40 can be in a liquid environment or a non-liquid environment. The stage 20, the ultrasonic scanning microscope 40, and the isolation component 50 of this invention are not limited to a specific configuration or a specific operating mode. Their configuration or operating mode can be adjusted accordingly based on the actual needs of the ultrasonic scanning microscope device 10 for performing the ultrasonic scanning detection procedure.

[0064] Please see Figure 3 Please also refer to the other illustrations shown. Figure 3 This diagram illustrates the operation of the ultrasonic scanning microscope apparatus 10 of the present invention performing an ultrasonic scanning detection procedure in the processing tank 70. The ultrasonic scanning microscope apparatus 10 of the present invention may also optionally include a processing tank 70 to contain the detection liquid 44 to provide a liquid environment, and can... Figure 1 The structure shown is placed in the processing tank 70 to perform an ultrasonic scanning inspection procedure in the liquid environment provided by the processing tank 70. However, the present invention is not limited to this. The processing tank 70 can also be selectively omitted, as long as the detection liquid 44 provides the liquid environment required by the ultrasonic scanning microscope 40 to perform an ultrasonic scanning inspection procedure on the test object 100, it can be applied to the present invention.

[0065] Please see Figure 4 Please also refer to the other illustrations shown. Figure 4 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus 10 of the present invention, showing the object 100 to be tested enclosed by an isolation component 50. In a first embodiment, the present invention uses an isolation component 50 to enclose the object 100 to prevent the object 100 from contacting the detection liquid 44, wherein the object 100 is located in a non-liquid environment (i.e., not in contact with the detection liquid 44), and the detection probe 42 of the ultrasonic scanning microscope 40 is located in the liquid environment provided by the detection liquid 44.

[0066] For example, the isolation component 50 is a bag, which serves as a protective bag to enclose part or all of the test object 100 inside the bag, wherein the inner surface 54 of the bag is attached to the test object 100, thus allowing the test object 100 to be located in a non-liquid environment (i.e., non-contact with the test liquid 44).

[0067] In the first embodiment, the detection liquid 44 is located, for example, in the processing tank 70 to provide a liquid environment. During the ultrasonic scanning inspection process, the test object 100 is immersed in the detection liquid 44 in the processing tank 70 under the protection of the isolation component 50, thus isolating the test object 100 from the detection liquid 44. Furthermore, the detection probe 42 of the ultrasonic scanning microscope 40 is immersed in the detection liquid 44 in the processing tank 70 and located a distance outside the isolation component 50. This distance is not limited to a specific value and can be determined according to the actual operation of the ultrasonic scanning inspection process. In this way, the ultrasonic scanning microscope 40 can provide ultrasonic waves that penetrate the detection liquid 44 and the isolation component 50 attached to the test object 100 via the detection probe 42, and receive ultrasonic waves, thereby performing an ultrasonic scanning inspection on the test object 100 on the stage 20.

[0068] The present invention can also selectively use an external force F to make the inner surface 54 of the isolation component 50 adhere more closely to all or at least a portion of the test object 100, for example, to the entire test object 100 or to a portion of the test object 100 (e.g., measurement area 110). The external force F can be, for example, a one-time or continuous suction, thrust, and / or other type of force. The ultrasonic scanning microscope device 10 of the present invention can selectively use an external force supply source 60 to provide the aforementioned external force F. For example, the external force supply source 60 can be, for example, a vacuum device to provide suction F1 (i.e., vacuum suction) as an external force. The vacuum device removes the gas (e.g., air) between the isolation component 50 and the test object 100, causing the isolation component 50 to adhere (e.g., tightly or conformally) to the measurement area 110 of the test object 100. Taking the vacuum attachment of the isolation component 50 to the test object 100 as an example, the present invention can selectively cover the test object 100 with the isolation component 50 before immersing it in the test liquid 44, and, for example, use a vacuum pump to remove the gas between the isolation component 50 and the test object 100, so that the isolation component 50 is vacuum-adsorbed on the surface of the test object 100. Then, the test object 100 covered with the isolation component 50 is immersed in the test liquid 44 for ultrasonic scanning detection. In addition, the external force supply source 60 can also be a thrust source to provide thrust F2 and apply pressure to the test object 100. The thrust source can be any object that can apply pressure once or continuously, such as a pusher component. By applying pressure, the gas between the isolation component 50 and the test object 100 can be expelled, so that the isolation component 50 is tightly or conformally attached to the test object 100. In other words, since the detection liquid 44 can apply liquid weight to the test object 100, the detection liquid 44 is also a kind of thrust source.

[0069] Please see Figure 5 and Figure 6 Please also refer to the other illustrations shown. Figure 5A cross-sectional schematic diagram of the ultrasonic scanning microscope device 10 of the present invention is shown, in which the detection probe 42 is fixedly covered by the isolation component 50. Figure 6 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus 10 of the present invention is shown, in which the detection probe 42 is retractably covered by the isolation component 50. In the second embodiment, the present invention uses the isolation component 50 to cover the detection probe 42 to prevent the analyte 100 from contacting the detection liquid 44. Therefore, the analyte 100 can be located in a non-liquid environment (e.g., an atmospheric environment or a gaseous environment), while the detection probe 42 of the ultrasonic scanning microscope 40 is located in the liquid environment provided by the detection liquid 44 (e.g., water).

[0070] For example, the isolation component 50 is, for instance, a bag. A detection liquid 44 fills the interior of the isolation component 50 to provide a liquid environment, and the detection probe 42 is immersed in the detection liquid 44 within the isolation component 50. The analyte 100 is located outside the isolation component 50 and in a non-liquid environment (i.e., not in contact with the detection liquid 44). The isolation component 50 (bag) is attached to the analyte 100 with its outer surface 52. Therefore, in the ultrasonic scanning detection procedure of the second embodiment, the analyte 100 can also be located in a non-liquid environment.

[0071] In the second embodiment, the isolation component 50 is not limited to a fixed or non-fixed type that simultaneously covers the detection probe 42 and the detection liquid 44. For example, the ultrasonic scanning microscope device 10 further includes a fixing device 56 disposed on the isolation component 50, wherein the fixing device 56 (e.g., a fixing ring) selectively fixes the isolation component 50 to at least one end 43 of the detection probe 42 (e.g., ...). Figure 5 As shown), it facilitates small-area scanning, enabling the measurement of multiple samples (i.e., multiple analytes 100) over a small area, or the fixing device 56 (e.g., a deployable fixing bracket) can unfold the isolation component 50 into a container 55 filled with the detection liquid 44 (e.g., Figure 6 As shown, the liquid environment provided allows the detection probe 42 to move within the container 55, facilitating large-area scanning and enabling large-area measurement of a single sample (i.e., a single analyte 100). In this way, the ultrasonic scanning microscope 40 can transmit ultrasonic waves through the detection probe 42, passing through the detection liquid 44 and the isolation component 50 attached to the analyte 100, and receive ultrasonic waves reflected from the analyte 100 to generate an ultrasonic signal, thereby performing an ultrasonic scanning detection procedure on the analyte 100 on the stage 20.

[0072] The present invention can also selectively use an external force F to make the outer surface 52 of the isolation component 50 adhere more closely to all or at least a portion of the test object 100, for example, to the entire test object 100 or to a portion of the test object 100 (e.g., measurement area 110). The external force F can be, for example, a one-time or continuous suction, thrust, and / or other type of force. The ultrasonic scanning microscope device 10 of the present invention may optionally further include an external force supply source 60 for providing the aforementioned external force F. For example, the external force supply source 60 can be, for example, a suction device for providing suction as an external force. The suction device removes the gas (e.g., air) between the isolation component 50 and the test object 100, causing the isolation component 50 to adhere (e.g., tightly or conformally) to the measurement area 110 of the test object 100. Taking the external force F as an example of suction, the present invention can, for example, place the test object 100 in an empty processing tank 70, that is, place the test object 100 inside the processing tank 70 that is not filled with the detection liquid 44, and attach the outer surface 52 of the isolation component 50 to the processing tank 70 and / or the test object 100. Then, for example, the gas between the test object 100 and the isolation component 50 is removed by a vacuum device, thereby allowing the isolation component 50 to adhere (e.g., tightly or conformally) to the measurement area 110 of the test object 100. The external force supply source 60 can also be a thrust source (e.g., a push rod or even the detection liquid 44 itself is a thrust source) to provide thrust.

[0073] Please see Figure 7 Please also refer to the other figures shown. In the third embodiment, the present invention uses an isolation component 50 (e.g., a bag) to cover the detection liquid 44, thereby preventing the test object 100 from contacting the detection liquid 44. The test object 100 is located in a non-liquid environment (i.e., not in contact with the detection liquid 44), and the detection probe 42 of the ultrasonic scanning microscope 40 is selectively located in either a non-liquid or liquid environment. In the ultrasonic scanning detection procedure, the present invention can place the isolation component 50 covered with the detection liquid 44 on the test object 100, and then place the detection probe 42 of the ultrasonic scanning microscope 40 on the isolation component 50 (bag). That is, in the third embodiment, the present invention allows the two opposite outer surfaces 52 of the isolation component 50 (bag) to be attached to the test object 100 and the detection probe 42, respectively. In this way, the ultrasonic scanning microscope 40 can provide ultrasonic waves through the detection probe 42, penetrating the detection liquid 44 and the isolation component 50, to perform an ultrasonic scanning detection procedure on the test object 100 on the stage 20.

[0074] Similar to the first and second embodiments, the present invention can also selectively use an external force F to make the outer surface 52 of the isolation component 50 adhere more closely to all or at least a portion of the test object 100, for example, to adhere to all or part of the test object 100 (e.g., measurement area 110). The external force F can be, for example, a one-time or continuous suction, pushing, and / or other type of force. In addition, the present invention can also selectively use an external force F to make the outer surface 52 of the isolation component 50 adhere closely to the detection probe 42. However, since the detection probe 42 is not afraid of contact with the detection liquid 44 and even if it comes into contact with the detection liquid 44, the interference or influence is quite small, the present invention can also selectively provide the detection liquid 44 between the outer surface 52 of the isolation component 50 and the detection probe 42. For example, the detection liquid 44 can be dripped between the outer surface 52 of the isolation component 50 and the detection probe 42, or an ultrasonic scanning detection procedure can be performed in the processing tank 70 filled with the detection liquid 44, so that the detection liquid 44 is automatically filled between the outer surface 52 of the isolation component 50 and the detection probe 42, which is helpful for the measurement of small areas of multiple samples (i.e., multiple analytes 100) or the measurement of large areas of a single sample (i.e., a single analyte 100).

[0075] Since the object under test 100 often has undulations and imperfect horizontal surfaces, when the object under test 100 has a tilt angle, the ultrasonic image that is outside the focal length range of the detection probe 42 of the ultrasonic scanning microscope 40 will be out of focus. And when the height difference of the object under test 100 is greater than the focal length range, the ultrasonic image will also be out of focus.

[0076] Therefore, taking platform 20 as an example, it is a movable platform, such as a bearing platform with functions such as lifting, turning, translation, tilt adjustment, flatness adjustment, and / or straightness adjustment. Please refer to... Figures 8 to 10 Please also refer to other figures. The platform 20 of the present invention may selectively include at least one adjustment device 24. The platform 20 can be positioned at any location via the adjustment device 24, for example, at the bottom of the processing tank 70 (e.g., Figure 9 (as shown) or suspended on the processing tank 70 (e.g.) Figure 8 As shown), or on any workbench, wherein the number of adjustment devices 24 is, for example, one or more, for adjusting the height and / or tilt angle of at least one side of the object to be tested 100 on the placement platform 22 of the stage 20.

[0077] The adjustment device 24 is not limited to manual or electric adjustment components, nor is it limited to manually or electrically controlled electric adjustment components; it can operate according to manual or electronic control commands. Furthermore, the adjustment device 24 can be, for example, an adjustment component 25 with single or multiple axes, such as a screw-type lifting component. Taking an electric adjustment component as an example, the adjustment device 24 includes, for example, at least an actuating element 26 located on the adjustment component 25, which can operate according to manual or electronic control commands to control the adjustment device 24 to adjust the height and / or tilt angle of at least one side of the object 100 on the platform 22. The adjustment device 24 of the present invention is not limited to a specific form of adjustment component 25; it can be, for example, but not limited to, a conventional gear-and-screw lifting component. Depending on whether the actuator 26 is operated manually or electrically, the actuator 26 may be driven by a manual drive component (e.g., a turntable) or an electric drive component (e.g., a motor) to rotate gears and screws, thereby adjusting the height and / or tilt angle of at least one side of the object to be tested 100 on the platform 22 of the stage 20.

[0078] For example, such as Figure 8 As shown, the adjustment device 24 of the present invention may optionally have a hook 27, which can be used to suspend the adjustment device 24 and the connected and adjusted platform 20 together in the tank of the processing tank 70, so that the platform 20 and the test object 100 it carries can perform the above-mentioned adjustment operation in the test liquid 44 in the processing tank 70.

[0079] Since the actuator 26 requires a higher waterproof rating if it operates while immersed in the detection liquid 44, during the ultrasonic scanning inspection process, if the stage 20 is immersed in the detection liquid 44, to prevent the actuator 26 from contacting the detection liquid 44, the actuator 26 is preferably located outside the detection liquid 44 (i.e., above the liquid surface), thereby eliminating the need for a higher waterproof rating. The adjustment device 24 of this invention can suspend the stage 20 in the detection liquid 44 of the processing tank 70 via the hook 27, and position the actuator 26 above the liquid surface of the detection liquid 44 in the processing tank 70, thereby reducing the waterproof rating requirement. Alternatively, the adjustment device 24 of the present invention can also be located at the bottom of the processing tank 70 and the platform 20 can be raised from the bottom of the processing tank 70 to suspend it in the air. The top of the adjustment device 24 extends to the outside of the liquid surface of the detection liquid 44, so that the actuation component 26 provided on the adjustment device 24 can be located above the liquid surface of the detection liquid 44, thereby reducing the waterproof rating requirement.

[0080] Please see Figure 11 and Figure 12 Please also refer to the other illustrations shown. Figure 11A cross-sectional schematic diagram illustrating the stage of the ultrasonic scanning microscope apparatus of the present invention includes multiple combined extended platforms. Figure 12 The diagram illustrates a top view of the stage of the ultrasonic scanning microscope apparatus of the present invention, which includes multiple combined expansion platforms. For simplification, only a portion of the structure is shown. Since the dimensions of the processing tank 70 (e.g., a water tank) and stage 20 used in various ultrasonic scanning inspection procedures are not fixed, the structure of the ultrasonic scanning microscope apparatus 10, such as its stage 20 and / or adjustment device 24, is not easily accommodated within the processing tank 70. Therefore, the stage 20 of the present invention can selectively have a splicing or modular design, for example, comprising a plurality of combined expansion platforms 22' to form the stage 20, and one or more of these combined expansion platforms 22' constitute a placement platform 22 for placing the object to be tested 100. By adjusting the number and size of the combined expansion platforms 22', the present invention allows the assembled stage 20 to adapt to the dimensions of different processing tanks 70 (e.g., water tanks).

[0081] The present invention can also adjust the flatness of the placement platform 22 and the measurement area 110 of the test object 100 on it by adjusting the combined expansion platform 22' in other positions. Since only the measurement area 110 of the test object 100 requires high precision flatness, the present invention does not require all the surfaces of the combined expansion platforms 22' constituting the stage 20 to have the same high precision flatness. In other words, the flatness of at least one first region 23a of the stage 20 of the present invention is better than the flatness of at least one second region 23b, wherein the first region 23a corresponds to the placement platform 22 and / or the measurement area 110 of the test object 100 disposed on the placement platform 22.

[0082] Furthermore, in traditional ultrasonic scanning inspection procedures, when the inspection probe and other structures move, an additional positioning system is required to help the user identify and locate them. Moreover, traditionally, adjusting the stage height to achieve zoom functionality also requires an additional positioning and determination system.

[0083] This invention is based on the superior performance of optical detection technology on the surface of an object (e.g., the object under test 100) and ultrasonic detection technology on its internal structure. Therefore, by combining an optical sensing device (e.g., a CCD camera) with an ultrasonic scanning microscope 40 (e.g., a detection probe 42), this invention can first perform an automated optical surface inspection procedure, and then use a side-mounted optical sensing device for observation and positioning, such as image recognition, to achieve positioning and collision avoidance functions.

[0084] For example, please see Figure 13 and 14 Please also refer to other illustrations. Figure 13A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus of the present invention with an optical sensing device is shown, wherein the object to be measured is located on the liquid surface. Figure 14 A cross-sectional schematic diagram of the ultrasonic scanning microscope apparatus of the present invention, including an optical sensing device, is shown, wherein the position of the object to be tested is moved below the liquid surface. The ultrasonic scanning microscope apparatus 10 of the present invention selectively includes at least one optical sensing device 80 for performing an automated optical inspection and / or position detection procedure on the object to be tested 100 on the stage 20 above the detection liquid 44. The number of optical sensing devices 80 may be one or more. For example, in the case of multiple devices, a first optical sensing device 80 may be located at a position where optical inspection can be performed (e.g., adjacent to the detection probe 42), and a second optical sensing device 80 may be located at a position where positioning and collision avoidance mechanisms can be detected (e.g., above the side of the stage 20 and / or the object to be tested 100). Accordingly, the first of the plurality of optical sensing devices 80 and the ultrasonic scanning microscope 40 perform automatic optical detection and / or ultrasonic scanning detection procedures on the test object 100, which is attached with the isolation component 50, before and / or after it enters the detection liquid 44. The second of the plurality of optical sensing devices 80 performs positioning detection procedures on the test object 100 and / or the stage 20 before and / or after it enters the detection liquid 44 to provide positioning and collision avoidance effects. However, the present invention is not limited thereto; the above-described automatic optical detection and / or positioning detection procedures can also be performed by a single optical sensing device 80.

[0085] For example, the detection process of the positioning and collision avoidance mechanism of the present invention includes, but is not limited to, the following steps: before the test object 100 and the stage 20 enter the detection liquid 44, an optical sensing device 80 located on the side is used to perform image recognition on the test object 100, marking and positioning each object 120; an optical sensing device 80 next to the detection probe 42 is used to perform optical detection on the surface of the measurement area 110 of the test object 100; after the surface detection is completed, the test object 100, the stage 20 and the detection probe 42 are lowered below the surface of the detection liquid 44 to perform an ultrasonic scanning detection procedure. During the descent of the stage 20 and the detection probe 42, the optical sensing device 80 located on the side is used simultaneously to perform the positioning and collision avoidance mechanism detection steps; after the ultrasonic scanning detection procedure is completed, each component is returned to its initial position.

[0086] The optical sensing device 80 of this invention can perform optical surface detection and detection of positioning and anti-collision mechanisms on an object 120 positioned in different media environments (e.g., above and below the liquid surface) in a non-liquid environment (e.g., above the detection liquid 44). However, the optical image sensed by the optical sensing device 80 may produce errors due to changes in the angle of incidence of light and the media environment. Therefore, this invention can also selectively perform an error correction procedure according to changes in the media environment (e.g., non-liquid environment / liquid environment) of the object 120 to correct the surface detection results of the automatic optical detection procedure and / or the positioning detection results of the positioning detection procedure.

[0087] Please see Figure 15 , Figure 16 and Figure 17 Please refer to the following as well. Figures 1 to 14 The present invention further provides an operating system 150 for an ultrasonic scanning microscope device 10, for operating the aforementioned ultrasonic scanning microscope 40. The ultrasonic scanning microscope of the present invention has a detection probe 42 and an operating system 150. The operating system 150 includes a control component 36, which controls the detection probe 42 to perform an ultrasonic scanning detection procedure on the object 100 according to a custom path. Specifically, the control component 36 of the operating system 150 is configured to: (a) receive or generate a custom path, the custom path including a motion trajectory and a detection timing; and (b) generate a control signal and transmit the control signal to the ultrasonic scanning microscope 40 to drive the detection probe 42 to perform an ultrasonic scanning detection procedure on the object 100 according to the motion trajectory and detection timing of the custom path.

[0088] In a preferred embodiment of the above-described operating system 150 (e.g.) Figure 16The control component 36 may include a programmable logic controller (PLC) 151. The PLC 151 may use, for example, a high-speed I / O module 155 to ensure accurate real-time signal processing. The operating system 150 may further include a motor driver 152 electrically connected to the PLC 151. The operating system 150 may also include an optical linear encoder 153 to provide at least one position feedback signal to the PLC 151. In this embodiment, the PLC 151 is configured to receive a trajectory path file D1 defining a motion trajectory and a trigger path file D2 defining a detection timing sequence. The trajectory path file D1 and the trigger path file D2 are, for example, but not limited to, independent, separable, and arbitrarily editable (e.g., binary .bin format), and the PLC 151 supports receiving these files via a file transfer protocol (FTP), enabling flexible transmission in a separable architecture. The trajectory path described in this specification refers to spatial path data predefined by the user or generated by an algorithm, which is stored in the trajectory path file. When the operating system 150 executes the ultrasonic scanning inspection program, the control component 36 (PLC 151) drives the inspection probe to generate a corresponding motion trajectory according to the trajectory path. The PLC 151 then controls the motor driver 152 according to the trajectory path file D1, which includes at least one target position and one target velocity (e.g., 50 mm / s), so that the inspection probe 42 of the ultrasonic scanning microscope 40 moves according to the corresponding motion trajectory. Furthermore, PLC 151 is configured to: use high-speed I / O module 155 to compare the position feedback signal of optical linear encoder 153 with the trigger position defined in trigger path file D2; when the position feedback signal of optical linear encoder 153 matches one of the trigger positions defined in trigger path file D2, output a control signal as a trigger signal S1 via optical isolator 154 to perform precise signal acquisition. The target speed mentioned above is, for example, but not limited to, 50 mm / s. The trajectory path file D1 and trigger path file D2 mentioned above are, for example, binary (.bin) file format.

[0089] For information on hardware expandability, please refer to [link / reference]. Figure 16The operating system 150 of this invention selectively adopts a detachable architecture and supports the transfer of path files via the FTP protocol. Furthermore, the ultrasonic scanning microscope device 10 of this invention may further include a vibration sensor 82, mounted on the detection probe 42 or the stage 20. This vibration sensor 82 is used to monitor the real-time vibration during the scanning process. When the detected real-time vibration exceeds a preset threshold, the control component 36 will automatically reduce the movement speed of the detection probe 42 or pause the scanning to avoid vibration noise affecting image quality. In addition, the operating system 150 also supports Network Attached Storage (NAS) connectivity or Internet of Things (IoT) communication protocols (e.g., via the communication port of PLC 151 (not shown)), allowing the large data obtained from scanning to be directly streamed and stored to an external server or cloud database. Custom path settings (recipes) can also be directly loaded from external storage devices (such as SD cards or USB devices), improving the flexibility of production line management.

[0090] To ensure signal stability, the operating system 150 of the present invention may further include an optical isolator 154 disposed between the output port of the PLC 151 and the trigger signal S1, for isolating the signal from the PLC 151 and outputting it as the trigger signal S1.

[0091] In one embodiment of the invention, the control component 36 of the operating system 150 (e.g., Figure 16 The PLC 151 shown acts as a central controller (or operating system control component) to plan paths and issue main commands; while the actuation component 26 of the adjustment device 24 (e.g., a motor driver or its controller) acts as a local controller (or platform control component) to receive commands and execute the lifting or tilting of the platform 20. In this architecture, the control component 36 can transmit signals to the actuation component 26 for coordinated operation.

[0092] However, the present invention is not limited thereto. In another embodiment, the function of the actuation component 26 may also be integrated into the control component 36. In this case, the actuation component 26 of the stage 20 and the control component 36 of the operating system 150 can be regarded as the same control entity.

[0093] In addition, such as Figure 17As shown, PLC 151 can be further configured to receive a scan mode selection. When the scan mode is selected as a first scan mode (A Scan; Amplitude Scan), a predefined triggering step is executed. The predefined triggering step includes selecting from triggering modes such as a cycle trigger or a point trigger to output a trigger signal. In some embodiments, the operating system 150 can also be configured to execute a B-Scan (Brightness Scan) scan mode (third scan mode), for example, by continuously acquiring data along a single axial path to form a cross-sectional image. When the scan mode is selected as a second scan mode (C Scan; Constant-Depth Scan), PLC 151 executes the steps described above of receiving the trajectory path file and the trigger path file, controlling the motor driver 152, and outputting the trigger signal S1.

[0094] The control component 36 (whether in a general configuration or a specific PLC implementation) can be configured to perform flexible control tasks. For example, the control component 36 can generate control signals and transmit them to the drive mechanism 41 of the ultrasonic scanning microscope 40 to drive the detection probe 42 to perform an ultrasonic scanning detection program on the test object 100 according to the aforementioned custom path. The drive mechanism 41 is, for example, but not limited to, a multi-axis adjustment component, thereby enabling detection selected from a family of single-axis motion path detection, two-axis motion path detection, three-axis motion path detection, and four-axis motion path detection. This multi-axis adjustment component is, for example, a four-axis adjustment component including an X-axis, Y-axis, Z-axis, and a rotation / tilt axis T. The X-axis of the four-axis adjustment component is used for linear left-right movement, the Y-axis for linear forward-backward movement, the Z-axis for vertical up-down movement, and the rotation / tilt axis for tilt / rotation movement.

[0095] The motion trajectory of the aforementioned custom path may include a two-axis motion path. For example, to improve detection efficiency, this two-axis motion path can be defined based on the shape of the area to be measured (e.g., measurement area 110) of the object under test 100 or the area of ​​interest, and can be selected from a serpentine path (e.g., Figure 18 As shown), a group consisting of a circular path, an S-shaped path, and a square path. Furthermore, the motion trajectory of the aforementioned custom path can also include a three-axis motion path. In another embodiment, as... Figure 19As shown, the motion trajectory of the aforementioned custom path can also include a four-axis motion path. Specifically, the four-axis motion path can correspond to the curved surface of the object under test 100, and the four-axis motion path is composed of, for example, a three-axis motion path and a rotational path. When scanning the measurement area 110 of the object under test 100, the control component 36 is further configured to generate and transmit adjustment signals to the adjustment device (e.g., drive mechanism 41) of the ultrasonic scanning microscope 40 and / or the adjustment device 24 of the stage 20. In detail, in some embodiments, the control component 36 of the operating system 150 can transmit the adjustment signal to the actuation component 26 of the adjustment device 24 of the stage 20, and the adjustment signal includes a set of control data for dynamically compensating for a height and / or a tilt angle of the measurement area 110 (e.g., curved surface) of the object under test 100, and the actuation component 26 then drives the adjustment device 24 accordingly. Furthermore, the control component 36 can calculate the normal vector of the surface of the object under test 100 at each measurement point, and generate the adjustment signal based on the normal vector. This is to coordinate with the detection probe 42 scanning along the measurement area 110 (e.g., the surface) of the object under test 100, dynamically adjust the relative angle (e.g., keep it perpendicular) between the detection probe 42 and the surface of the object under test 100, and selectively dynamically adjust the height and / or tilt angle of the measurement area 110 (e.g., the surface) of the object under test 100, thereby ensuring that the detection probe 42 is constantly maintained at the optimal focal length.

[0096] In the operation of ultrasonic scanning microscopes, a common scanning method is continuous scanning, also known as raster scanning. In this mode, the control unit 36 ​​controls the detection probe 42 to move continuously along a main axis (e.g., the X-axis) at a constant speed, continuously emitting and receiving ultrasonic signals to acquire data during the movement. After the detection probe 42 has scanned an entire line, it steps over a small, fixed distance on another vertical axis (e.g., the Y-axis) before scanning the next line along the X-axis. This action of continuously acquiring data along one axis and stepping over it along another axis is repeated until the detection probe 42 has completely scanned the entire pre-defined target area, ultimately combining the data into a high-resolution two-dimensional planar image (e.g., a C-scan image).

[0097] Furthermore, as another embodiment of a custom path, the control component 36 can also control the detection probe 42 (e.g. Figures 1 to 15 and Figure 19 As shown, the detection is performed by stamping. This custom path contains a plurality of discrete measurement points P (e.g., ...). Figure 20 As shown), and the control component 36 controls the movement of the detection probe 42 between these measurement points P (e.g., Figure 20(As indicated by the arrow) and performs the detection. For example, in an ultrasonic scanning microscope, the stamping method (or point-to-point and step-repeated scanning) is a non-continuous detection mode. Its detailed operation process includes: the control component 36 drives the detection probe 42 to move precisely to the first preset discrete measurement point P, and then stops completely; then, the detection probe 42 performs a complete ultrasonic measurement (e.g., acquiring an A-Scan waveform) while stationary. After the data acquisition of the discrete measurement point P is completed, the detection probe 42 moves to the next discrete measurement point P and repeats this "move, stop, detect" cycle to complete the scanning of all specified measurement points P in sequence.

[0098] There are several embodiments regarding the method of obtaining the custom path. In one embodiment, the control component 36 is configured to use the optical sensing device 80 and / or the detection probe 42 to perform an autofocus or surface ranging procedure on the object to be measured 100 to obtain a three-dimensional contour of the area to be measured (e.g., the measurement area 110) of the object to be measured 100, and generate a custom path based on the three-dimensional contour.

[0099] In another embodiment, particularly when based on the aforementioned implementation of PLC 151, the control component 36 determines the trajectory path file and trigger path file to be received by loading a predefined task setting (also known as a setting parameter, Recipe), and thereby determines the custom path.

[0100] To further improve the detection quality, the control component 36 is further configured to dynamically adjust the moving speed of the detection probe 42 or the stage 20 based on the relative position (e.g., distance) between the detection probe 42 and one of the test objects 100 during the execution of the ultrasonic scanning detection procedure. For example, the moving speed is reduced when the detection probe 42 is close to the test object 100 to reduce vibration interference. Specifically, the moving speed of the detection probe 42 or the stage 20 is inversely proportional to the distance between the detection probe 42 and the test object 100.

[0101] The operating system 150 of this invention selectively integrates advanced signal processing functions to effectively extend the performance of the hardware sampling rate. Please refer to... Figure 32 The control component 36 of the operating system 150 of this invention is configured to execute a dual-channel interleaved sampling procedure. This procedure can selectively call two existing or additional analog-to-digital conversion (ADC) channels in the ultrasonic scanning microscope (i.e., Figure 32 The first channel C1 and the second channel C2 shown are used to sample the same ultrasonic signal source in parallel.

[0102] During operation, the control component 36 precisely controls the sampling frequency of the two channels, causing a phase shift with a specific time difference on the time axis; specifically, this phase shift is set to half the sampling period (i.e., a 180-degree phase difference). Thus, as... Figure 32 As shown, if the physical sampling rate of a single channel is 1 GHz, by interleaving the two channels and using a signal reconstruction algorithm to interleave the data captured by the two channels according to the time series, effective waveform data equivalent to a 2 GHz sampling rate can be obtained. This technique can significantly improve the ability to capture details of the echo signal, thereby greatly optimizing the resolution of minute defects.

[0103] To address the significant data transmission latency issues arising from high-resolution scanning and improve system throughput, the control component 36 of the operating system 150 of this invention employs a pipeline data processing architecture. This architecture allows the signal acquisition operation of the detection probe 42, the feature data transmission operation, and the back-end image reconstruction operation to be processed in parallel over time, thereby reducing detection latency. Under this pipeline data processing architecture, the operating system 150 of this invention divides the ultrasonic scanning detection process into multiple independent stages that are processed in parallel over time. These stages include signal acquisition, feature acquisition, data transmission, and image reconstruction. For example, such as... Figure 30 As shown, the control component 36 of the operating system 150 of the present invention operates in a multitasking mode: while the back-end processing unit 160 is reconstructing the image of the earliest captured first data, the transmission unit 158 ​​is simultaneously transmitting the second data captured later, and the front-end capturing unit 156 is simultaneously capturing the latest third data. Therefore, the operating system 150 of the present invention does not need to wait for the previous data to complete all steps before processing the next data, thereby significantly reducing the overall detection latency.

[0104] Furthermore, to further achieve data reduction and lower bandwidth requirements, the control component 36 of the operating system 150 of this invention is configured to execute a numerical analysis program. This program directly calculates the value of a specific physical quantity from characteristic data or the ultrasonic signal, including peak amplitude, time-of-flight (ToF) converted depth or thickness, and outputs it in the form of a numerical report. Specifically, this invention employs the concept of edge computing, and its detailed operation process is as follows: Figure 30As shown: First, in the signal acquisition stage, the detection probe 42 acquires the analog acoustic wave signal and converts it to generate raw waveform data (RD). This raw waveform data is typically large in size. Next, it enters the feature extraction stage, which is directly executed by the front-end acquisition unit 156 built into the control component 36 (or adjacent to the probe end). The front-end acquisition unit 156 performs a real-time feature extraction program on the raw waveform data RD, filtering and retaining key features from the large amount of data, such as peak amplitude, trough position, or time of flight (ToF), to generate lightweight feature data (Key Data, KD). Subsequently, in the data transmission stage, the transmission unit 158 ​​transmits the lightweight feature data KD to the back-end processing unit 160, for example, through a data transmission protocol (e.g., FTP, TCP / IP, or Industrial Ethernet protocol). Finally, in the image reconstruction stage, the back-end processing unit 160 (such as a computer workstation) executes an image generation program based on the received feature data KD, mapping the feature data into pixel information to generate a reconstructed image data (Built Data, BD), or directly performs numerical analysis to output physical quantity reports such as the thickness value of the object under test or the depth value of the defect.

[0105] This invention selectively integrates artificial intelligence (AI) technology to optimize detection results. The AI ​​model itself is not the focus of this invention; rather, it applies mature AI tools to the hardware architecture of this invention to address signal attenuation and noise issues arising from the use of isolation components or complex media. For example, this invention can utilize a trained convolutional neural network to process speckle noise specific to ultrasound, thereby filtering out reflections from the interface of the isolation component.

[0106] For example, the operating system 150 of the present invention optionally includes an artificial intelligence (AI) processing module configured (e.g., built-in) with a trained deep learning model, such as a convolutional neural network (CNN), to perform AI processing on the images or data obtained from the ultrasonic scanning inspection procedure. This AI processing includes image denoising, super-resolution enhancement, or automatic defect feature identification. To ensure that the deep learning model can accurately resolve acoustic characteristics, the input data of the deep learning model is selected, for example but not limited to, from a group consisting of raw radio frequency (RF) ultrasonic signals (A-Scan waveforms), a time-of-flight (ToF) data matrix, and preliminary scan images.

[0107] In one embodiment of the present invention, the convolutional neural network may employ an encoder-decoder architecture (such as the U-Net architecture) or a generative adversarial network (GAN) architecture. The deep learning model includes: an encoder for performing dimensionality reduction operations on the input ultrasonic signal to extract the time-frequency features of the sound wave; and a decoder for performing dimensionality up-construction of the extracted features to output a noise-removed ultra-high resolution image.

[0108] Furthermore, the operation of the convolutional neural network (CNN) is configured to perform deeper signal processing, including: (1) a feature extraction layer (corresponding to the encoder): used to identify speckle noise and scattering interference features unique to ultrasonic signals and caused by inhomogeneous media (including the detection liquid 44, the isolation component 50, or the test object 100 itself), and to perform image denoising through training weights; (2) a reconstruction layer (corresponding to the decoder): performing super-resolution operations to compensate for resolution loss caused by fast scanning or hardware sampling rate limitations, reconstructing low pixel density scanning data into high-definition images, thereby improving edge clarity; and (3) a interpretation layer (or post-processing module): for multi-layer or curved structures, automatically distinguishing between structural background echoes and real defect echoes by analyzing the temporal characteristics of the waveform (such as time of flight and amplitude attenuation rate), to perform automatic defect feature recognition and assist in the interpretation of microcracks or delamination.

[0109] It should be noted that, in order to adapt the model to the hardware architecture of the present invention, the deep learning model is trained in a supervised manner through a paired dataset, which contains a signal with interference from the isolation component 50 (as input) and a signal without interference from the isolation component 50 (as ground truth), thereby enabling the model to learn to eliminate interference from interface reflections or detection fluid disturbances originating from the isolation component.

[0110] Furthermore, for the multi-layered test object 100, the control component 36 of this invention can execute a multi-threshold gain imaging program. Specifically, this invention can apply a plurality of corresponding gain parameters or filtering thresholds to echo signals at different depth locations of ultrasonic signals, thereby simultaneously presenting features at different depth locations in a single scan image, or generating layered enhanced tomographic images.

[0111] Please continue reading. Figure 20 and Figure 31The control component 36 of this invention can also selectively drive the detection probe 42 to execute a step-and-repeat ultrasonic scanning detection procedure (hereinafter referred to as a step-and-repeat detection procedure). This involves controlling the detection probe 42 to descend and contact the surface of the object under test 100 to establish an ultrasonic path, and then rising and moving to the next point after signal acquisition is complete, to ensure optimal signal quality. For example, the step-and-repeat detection procedure of this invention includes: controlling the detection probe 42 to descend at each measurement point, thereby allowing at least one isolation component 50 disposed on the detection probe 42 to contact the surface of the object under test 100 to establish an ultrasonic transmission path; rising after acquiring the ultrasonic signal, causing the isolation component 50 to detach from the surface of the object under test 100; and moving to the next measurement point.

[0112] This invention Figures 1 to 20 The stage 20 disclosed herein can also be, for example, but not limited to, a fluid-flow adsorption stage suitable for operation in the detection liquid 44 environment. The fluid-flow adsorption stage of this invention can fix the analyte 100 without the use of mechanical clamps and the suction force can be adjusted, thus solving the problems of uneven fixation or warping of the analyte caused by conventional mechanical clamps. For details, please refer to... Figure 21 The stage 20 of the present invention includes a platform 22, a base 210, and a spacer frame 220, wherein the spacer frame 220 is disposed between the platform 22 and the base 210. The platform 22 has a bearing surface 221 for bearing the object to be tested 100, and the platform 22 has at least one fluid channel 202 penetrating the bearing surface 221. The spacer frame 220 allows a cavity 230 to be formed between the platform 22 and the base 210. The platform 22, the base 210, and / or the spacer frame 220 may be manufactured, for example, but not limited to, by laser cutting, 3D printing, or injection molding. The spacer frame 220 includes, for example, but not limited to, an annular frame 224 and ribs 222, the ribs 222 being connected to the interior of the annular frame 224, and for example, being cross-shaped ribs. The storage platform 22, base 210 and spacer frame 220 can be detachably combined together, for example by screwing or other means, or fixed together.

[0113] The base 210 is provided with at least one inlet 212 and at least one outlet 214 communicating with the chamber 230. The stage 20 may further include a pump 240. When the stage 20 is immersed in the detection liquid 44 in the processing tank 70, the pump 240 can draw the detection liquid 44 out of the chamber 230 through the outlet 214, and thereby draw the detection liquid 44 in the processing tank 70 into the chamber 230 through the inlet 212, so that the detection liquid 44 forms a continuous flow in the chamber 230. This continuous flow will generate a negative pressure at the fluid channel 202 of the placement platform 22, and the negative pressure will form a suction force FF (i.e., fluid suction) to adsorb the analyte 100 (e.g., fluid suction). Figure 24 (As shown).

[0114] To accommodate test objects 100 of different sizes, the stage 20 of the present invention may, for example but not limited to, include a mechanism for defining an effective adsorption region. Please refer to Figure 25 In one feasible embodiment, the stage 20 may further include at least one baffle 260. The baffle 260 (e.g., a plurality of concentric rings with different inner diameters) may be correspondingly arranged on the bearing surface 221 of the platform 22 according to the size of the test object 100 to shield a portion of the fluid channel 202, thereby defining an effective adsorption area 102 corresponding to the size of the test object 100.

[0115] To achieve adjustable suction and address the risk of pumps running idle due to channel blockage in conventional technologies, such as Figure 27 , Figure 28 and Figure 29 As shown, the stage 20 of the present invention may further include a regulation device 300. The regulation device 300 adjusts the magnitude of the negative pressure by regulating the inflow rate of the detection fluid 44 from the inlet 212 and the outflow rate from the outlet 214, thereby controlling the magnitude of the suction force generated by the negative pressure. The regulation device 300 includes, for example, a flow-dividing pipe 350. The flow-dividing pipe 350 is selected, for example, but not limited to, from the group consisting of T-shaped pipes, Y-shaped pipes, and multi-way pipes; the flow-dividing pipe 350 may also be, for example, other pipe fittings with a flow-dividing function. Taking a Y-shaped pipe as an example, the first end of the flow-dividing pipe 350 (e.g., equipped with a main valve 352) is connected to the chamber 230 (e.g., Figure 24The outlet 214 is formed by the diversion pipe 350. The second end of the diversion pipe 350 (e.g., equipped with a flow-dividing regulating valve 354) is directly connected to the processing tank 70, and the third end of the diversion pipe 350 is connected to the pump 240. The control device 300 of the present invention can control the magnitude of the negative pressure by adjusting the opening of the flow-dividing regulating valve 354, that is, adjust the magnitude of the suction force formed by the negative pressure. The present invention can not only ensure that the pump 240 always has fluid passing through it to prevent dry running by using the second end of the diversion pipe 350, but also precisely adjust the magnitude of the suction force to avoid deformation of the thin test object 100 due to excessive adsorption force. Figure 28 and Figure 29 Although only two pipe fittings with a main valve 352 and a diversion pressure regulating valve 354 are used as examples, since both pipe fittings are connected to the pump 240, their operating principle and operating effect are the same as the diversion pipe mentioned above.

[0116] Furthermore, this invention further enhances the integrated water exchange function, such as... Figure 28 and Figure 29 As shown, the test fluid 44 drawn out by pump 240 can be selectively delivered to the treatment tank 70 via a valved conduit (unnumbered) of the control device 300 to provide a circulation effect, or discharged to a drain outlet 450 outside the treatment tank 70. Furthermore, the test fluid 44 in the treatment tank 70 can also originate from an external plant supply source 400. For example, the present invention uses a valved conduit (unnumbered) to connect pump 240 and external plant supply source 400, thereby allowing the test fluid 44 to be added to the treatment tank 70 via the operation of pump 240. In other words, in the present invention, the test fluid 44 drawn into chamber 230 through inlet 212 can originate from an external plant supply source 400.

[0117] In addition, please see Figure 29 The number of outlets 214 can be multiple, and the multiple outlets 214 are distributed on the base 210. In this configuration, the platform 20 may further include a multi-channel piping network 272 for connecting one or more of the multiple outlets 214, and multiple control valves (e.g., main valve 352) connected to different areas of the multi-channel piping network 272. Thus, the control component 36 (or actuation component 26) can independently control the opening and closing of these control valves to perform zoned adsorption control on the bearing surface 221 of the placement platform 22. These control valves are, for example, but not limited to, solenoid valves.

[0118] In some embodiments, the platform 20 may optionally include at least one limiting member 21 disposed on the placement platform 22 (e.g., Figure 23The positioning area of ​​the limiting member 21 can be fixed or adjustable, thereby allowing the size of the positioning area to be adjusted according to the size of the object 100 being measured. The limiting member 21 can be detachably attached to the platform 22, for example, by screwing or other means, or fixed to the platform 22. Furthermore, the present invention can also selectively use, for example, the aforementioned baffle 260 (such as...). Figure 25 (As shown) Replaces the limiting member 21.

[0119] In other embodiments, the platform 22, the spacer frame 220, and the base 210 of the stage 20 can also be integrally formed. Furthermore, the stage 20 in this embodiment can also be mounted on the aforementioned adjustment device 24 (e.g., Figure 8 As shown), the adjustment device 24 is, for example, a multi-axis adjustment assembly, such as, but not limited to, a four-axis adjustment assembly, thereby enabling the aforementioned various adjustments to the bearing surface 221 of the storage platform 22.

[0120] The stage 20 of this invention provides controllable, uniform, and unobstructed adsorption force in a liquid environment. Because this fluid adsorption force is uniformly distributed across the surface of the analyte, stress concentration caused by traditional mechanical clamps is avoided. This effectively reduces deformation or warping of thin or fragile analytes (such as wafers) during adsorption and stably holds analytes with slightly uneven surfaces. This characteristic makes it particularly suitable as a stage for ultrasonic scanning microscopes.

[0121] It should be understood that any specific details of components, modules, or steps not described in detail in this specification can be implemented using techniques known in the art. Those skilled in the art will understand that, unless otherwise specified, the non-core auxiliary equipment, specific operating parameters, or software implementation details of the core inventions mentioned in this invention (e.g., isolation components, operating systems, and platforms) can be implemented with reference to common knowledge or techniques in the art during actual implementation. For example, regarding the operating system 150, its specific software programming language, the specific model of PLC 151, or the specifications of motor driver 152 and corresponding motor; regarding the platform 20, its specific pump 240 model, pipeline material, or the form of valves 352 and 354; and regarding the isolation component 50, its specific polymer formulation or molding method (e.g., other known manufacturing methods besides laser cutting, 3D printing, or injection molding as disclosed in this invention), unless otherwise specified, can be implemented with reference to common knowledge in the art. All such equivalent changes or modifications do not depart from the scope of protection of this invention.

[0122] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this invention should be included in the appended claims.

Claims

1. An ultrasonic scanning microscope device, characterized in that, Include: A platform is used to support at least one object to be tested; At least one isolation component is used to isolate the analyte from a detection liquid; and An ultrasonic scanning microscope has a detection probe and an operating system, the operating system having a control component. The control component controls the detection probe to perform an ultrasonic scanning detection procedure on the object under test according to a custom path. The custom path includes a motion trajectory and a detection sequence. The ultrasonic scanning microscope moves along the motion trajectory of the detection probe according to the custom path, and provides an ultrasonic wave that penetrates the detection liquid and the isolation component disposed between the test object and the detection probe according to the detection sequence. It also receives the ultrasonic wave reflected by the test object to generate an ultrasonic signal, thereby performing the ultrasonic scanning detection procedure on the test object on the stage.

2. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The motion trajectory and detection timing of the custom path are defined by an independent trajectory path file and a trigger path file, respectively, and the control component receives the trajectory path file and the trigger path file via a file transfer protocol.

3. The ultrasonic scanning microscope apparatus as described in claim 2, characterized in that, It also includes an optical linear encoder to provide a position feedback signal for the detection probe; wherein the control component controls the movement of the detection probe according to the trajectory path file and compares the position feedback signal with a trigger position defined in the trigger path file. When the position feedback signal matches the trigger position defined in the trigger path file, a trigger signal is output to control the detection timing.

4. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component of the operating system is configured to execute a dual-channel interleaved sampling procedure. The dual-channel interleaved sampling procedure controls the sampling timing of at least two sets of sampling channels, so that the ultrasonic signal is sampled with phase shift or time delay according to an interleaved time sequence to obtain a first sample data and a second sample data respectively. The first sample data and the second sample data are then recombined according to the time sequence through a signal combining algorithm to obtain an effective waveform data with a higher sampling rate than that of a single channel.

5. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component of the operating system further includes a front-end acquisition unit, a transmission unit, and a back-end processing unit. Before the transmission unit transmits the original waveform data obtained by the ultrasonic scanning detection program, the front-end acquisition unit first executes a feature acquisition program to extract feature data, including peaks, troughs, or time of flight, from the original waveform data for transmission. The back-end processing unit executes a feature restoration program to reconstruct a waveform or generate an image based on the feature data.

6. The ultrasonic scanning microscope apparatus as described in claim 5, characterized in that, The control component of the operating system is configured to execute a numerical analysis program that directly calculates the value of a specific physical quantity from the feature data or the ultrasonic signal, including the peak amplitude value, the depth value converted from the time of flight, or the thickness value, and outputs it in the form of a numerical report.

7. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The stage includes a placement platform and a base, which form a chamber. The control component of the operating system controls the detection liquid to flow from one inlet of the base through the chamber and out from one outlet of the base, forming a continuous flow to generate a negative pressure at the placement platform, thereby adsorbing the analyte.

8. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The detection probe is mounted on a multi-axis drive mechanism. The control component is configured to calculate a normal vector of a surface of the object under test, and dynamically adjust the angle of the detection probe to correspond to the normal vector during the execution of the custom path.

9. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component is configured to control the detection probe to perform a stamp-type detection procedure; the stamp-type detection procedure controls the detection probe to descend at a measurement point, so that the isolation component attached to the detection probe contacts one of the surfaces of the object to be tested to establish an ultrasonic transmission path, and after completing the acquisition of the ultrasonic signal, it rises, so that the isolation component detaches from the surface of the object to be tested and moves to another measurement point.

10. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component of the operating system further includes an artificial intelligence processing module, which is configured to use a deep learning model to perform AI processing on an image or data obtained from the ultrasonic scanning inspection procedure. The AI ​​processing includes image denoising, resolution enhancement, or automatic defect feature recognition.

11. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component of the operating system is configured to execute a multi-threshold gain imaging program, which applies a plurality of corresponding gain parameters or filtering thresholds to the echo signals at different depth locations of the ultrasonic signal to present the characteristics of the different depth locations or generate a layered enhanced tomographic image.

12. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component of the operating system adopts a pipelined data processing architecture, which allows the signal acquisition action of the detection probe, the transmission action of a feature data, and the reconstruction action of a back-end image to be overlapped and processed in parallel on the time axis, so as to reduce detection latency.

13. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component of the operating system supports a network-attached storage connection or an Internet of Things (IoT) communication protocol to directly stream and store data obtained from the ultrasonic scanning and detection program to an external server or a cloud database, or to support loading a set parameter of a custom path through an external storage device.

14. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, It also includes a vibration sensor mounted on the detection probe or the platform to detect a real-time vibration level. The control component is configured to adjust the moving speed of one of the detection probes or pause scanning in real time when the real-time vibration level exceeds a preset threshold, so as to ensure the quality of the detection signal.

15. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The isolation component is a bag, the detection liquid is filled in the bag to provide a liquid environment, and the detection probe is immersed in the detection liquid in the bag. The bag is attached to the test object with an outer surface, wherein the test object is located in a non-liquid environment.

16. The ultrasonic scanning microscope apparatus as described in claim 15, characterized in that, It further includes a fixing device disposed on the isolation assembly, wherein the fixing device fixes the isolation assembly to at least one end of the detection probe, or unfolds the isolation assembly into a liquid environment filled with the detection liquid, thereby allowing the detection probe to be movably located in the liquid environment.

17. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The isolation component is a bag, and the test object is enclosed in a non-liquid environment inside the bag, such that the bag is attached to the test object with an inner surface, and the detection probe is located outside the bag and in a liquid environment provided by the detection liquid.

18. The ultrasonic scanning microscope apparatus as described in claim 17, characterized in that, It further includes a processing tank in which the detection liquid is located to provide the liquid environment. The analyte is immersed in the detection liquid in the processing tank by means of the isolation component, so that the analyte and the detection liquid are isolated from each other.

19. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The isolation component is attached to all or part of the test object by an external force.

20. The ultrasonic scanning microscope apparatus as described in claim 19, characterized in that, It also includes an external force supply source, which is a suction device to provide a suction force as the external force. The suction device removes one of the gases between the isolation component and the test object, so that the isolation component is tightly or conformally attached to the test object.

21. The ultrasonic scanning microscope apparatus as described in claim 19, characterized in that, It also includes an external force supply source, which is a thrust source, used to provide a thrust as the external force, and the thrust source applies the external force to make the isolation component fit tightly or conformally onto the test object.

22. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The acoustic impedance of the isolation component is approximately the same as or the same as that of the detection liquid.

23. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The isolation component has a deformable structure.

24. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The isolation component includes elastic and / or stretchable materials.

25. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The material of the isolation component is selected from a group of polymers composed of silicone, rubber, plastic and composite polymers.

26. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The platform includes at least one placement platform for supporting the object to be tested.

27. The ultrasonic scanning microscope apparatus as described in claim 26, characterized in that, The platform includes at least one adjustment device for adjusting the height and / or tilt angle of at least one side of the object to be tested on the platform.

28. The ultrasonic scanning microscope apparatus as described in claim 27, characterized in that, The actuator of the adjustment device of the stage is used to control the adjustment device from outside the detection liquid to adjust the height and / or tilt angle of at least one side of the test object on the platform.

29. The ultrasonic scanning microscope apparatus as described in claim 26, characterized in that, It further includes at least one processing tank, in which the stage is located to hold the test sample, wherein the test liquid is filled in the processing tank to provide a liquid environment.

30. The ultrasonic scanning microscope apparatus as described in claim 27, characterized in that, The platform of the stage is suspended in the test liquid by means of the adjustment device in a suspended or raised manner.

31. The ultrasonic scanning microscope apparatus as described in claim 29, characterized in that, The platform includes a plurality of modular expansion platforms, one or more of which constitute the storage platform of the platform, thereby adjusting the size of the platform according to the size of the processing tank.

32. The ultrasonic scanning microscope apparatus as described in claim 31, characterized in that, The flatness of at least one first region of the platform is better than that of at least one second region, and the first region corresponds to the measurement area of ​​the platform and / or the object to be measured disposed on the platform.

33. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, It further includes at least one optical sensing device for performing an automatic optical detection procedure and / or a positioning detection procedure on the test object on the platform above the detection liquid.

34. The ultrasonic scanning microscope apparatus as described in claim 33, characterized in that, The optical sensing device and the ultrasonic scanning microscope perform the automatic optical detection procedure and / or the ultrasonic scanning detection procedure on the test object before and / or after the test object with the isolation component attached enters the detection liquid, respectively.

35. The ultrasonic scanning microscope apparatus as described in claim 33, characterized in that, The optical sensing device performs the positioning and detection procedure on the test object and / or the platform before and / or after the test object with the isolation component attached enters the detection liquid.

36. The ultrasonic scanning microscope apparatus as described in claim 35, characterized in that, The optical sensing device performs an error correction procedure based on changes in the medium environment of the object under test and / or the platform to correct the surface detection result of the automatic optical inspection program and / or the positioning detection result of the positioning detection program.

37. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The detection probe of the ultrasonic scanning microscope has an ultrasonic transmitter for outputting ultrasonic waves and an ultrasonic receiver for receiving ultrasonic waves, wherein the ultrasonic transmitter and the ultrasonic receiver are located on the same side or different sides of the object to be tested.

38. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The custom path is selected from a family consisting of a single-axis motion path, a two-axis motion path, a three-axis motion path, and a four-axis motion path.

39. The ultrasonic scanning microscope apparatus as described in claim 38, characterized in that, The two-axis motion path is selected from a group consisting of a serpentine path, a circular path, an S-shaped path, and a square path.

40. The ultrasonic scanning microscope apparatus as described in claim 38, characterized in that, The four-axis motion path corresponds to one of the surfaces of the object to be measured.

41. The ultrasonic scanning microscope apparatus as described in claim 40, characterized in that, The control component is further used in the ultrasonic scanning inspection procedure to control the rotation of the inspection probe to align with one of the normal directions of the surface.

42. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The custom path contains a plurality of discrete measurement points, and the control component controls the detection probe to move between these measurement points in a stamping manner to perform detection.

43. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component is further used to dynamically adjust the moving speed of the detection probe based on the relative position of the detection probe and the object under test when executing the ultrasonic scanning detection procedure, and to reduce the moving speed when the detection probe approaches the object under test in order to reduce vibration interference.

44. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component determines the custom path by loading a predefined task setting.

45. The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component uses an optical sensing device and / or the detection probe to perform an autofocus or surface ranging procedure on the object under test to obtain a three-dimensional contour of a test area of ​​the object under test, and generates the custom path based on the three-dimensional contour.

46. ​​The ultrasonic scanning microscope apparatus as described in claim 1, characterized in that, The control component is configured to generate and transmit an adjustment signal to a drive mechanism to cooperate with the detection probe to scan along one of the curved surfaces of the object under test, and to dynamically adjust the height and / or tilt angle of at least one side of the object under test.

47. An operating system for an ultrasonic scanning microscope, characterized in that, An ultrasonic scanning microscope having a detection probe is used to operate an ultrasonic scanning microscope to perform an ultrasonic scanning detection procedure on a test object on a stage, wherein a detection liquid and an isolation component are disposed between the test object and the detection probe. The operating system includes: a control component configured to: (a) receive or plan a custom path, the custom path including a motion trajectory and a detection sequence; and (b) generate a control signal and transmit the control signal to the ultrasonic scanning microscope to drive the detection probe of the ultrasonic scanning microscope to move according to the motion trajectory of the custom path, and to provide an ultrasonic wave to penetrate the detection liquid and the isolation component disposed between the test object and the detection probe according to the detection sequence, and to receive the ultrasonic wave reflected by the test object to generate an ultrasonic signal, thereby performing the ultrasonic scanning detection procedure on the test object on the stage.

48. The operating system as described in claim 47, characterized in that, The control component includes a programmable logic controller, and the operating system further includes: A motor driver is electrically connected to the programmable logic controller; An optical linear encoder is used to provide a position feedback signal to the programmable logic controller, wherein the programmable logic controller is configured to: Receive a trajectory path file for defining the motion trajectory and a trigger path file for defining the detection timing, wherein the trajectory path file and the trigger path file are separable and can be edited arbitrarily; Based on the trajectory path file containing at least one target position and one target velocity, the motor driver is controlled so that the ultrasonic scanning microscope produces a movement corresponding to the motion trajectory in the trajectory path file. as well as When the feedback signal from the position of the optical linear encoder matches a trigger position defined in the trigger path file, the control signal is output as a trigger signal.

49. The operating system as described in claim 48, characterized in that, It also includes an optical isolator, which is disposed between the programmable logic controller and one of the output ports of the trigger signal, to isolate and output a signal from the programmable logic controller as the trigger signal.

50. The operating system as described in claim 48, characterized in that, The programmable logic controller is further configured to: receive a scan mode selection, wherein when the scan mode selection is a first scan mode, execute a predefined trigger step, the predefined trigger step including selection from a cyclic trigger or a single-point trigger to output the trigger signal; wherein when the scan mode selection is a second scan mode, execute the steps of receiving the trajectory path file and the trigger path file, controlling the motor driver, and outputting the trigger signal.

51. The operating system as described in claim 47, characterized in that, The custom path is selected from a family consisting of a single-axis motion path, a two-axis motion path, a three-axis motion path, and a four-axis motion path.

52. The operating system as described in claim 51, characterized in that, The two-axis motion path is selected from a group consisting of a serpentine path, a circular path, an S-shaped path, and a square path.

53. The operating system as described in claim 51, characterized in that, The four-axis motion path corresponds to one of the surfaces of the object to be measured.

54. The operating system as described in claim 48, characterized in that, The control component determines the trajectory path file and the trigger path file to be received by loading a predefined task setting.

55. The operating system as described in claim 47, characterized in that, The control component is configured to use an optical sensing device and / or the detection probe to perform an autofocus or surface ranging procedure on the object under test to obtain a three-dimensional contour of a test area of ​​the object under test, and generate the custom path based on the three-dimensional contour.

56. The operating system as described in claim 47, characterized in that, The control component is further configured to dynamically adjust the moving speed of the detection probe or the stage based on the relative position of the detection probe and the object under test when executing the ultrasonic scanning detection procedure, and to reduce the moving speed when the detection probe approaches the object under test in order to reduce vibration interference.

57. The operating system as described in claim 47, characterized in that, The custom path corresponds to a surface of the object under test, and the control component is further configured to generate and transmit an adjustment signal to an adjustment device of the ultrasonic scanning microscope. The adjustment signal includes a set of control data for dynamically compensating for the height and / or tilt angle of the object under test.

58. The operating system as described in claim 47, characterized in that, The control component is configured to execute a dual-channel interleaved sampling procedure, which controls the sampling timing of at least two sampling channels to sample the ultrasonic signal with phase shift or time delay according to an interleaved time sequence, so as to obtain a first sampling data and a second sampling data respectively. The first sampling data and the second sampling data are then recombined according to the time sequence through a signal combining algorithm to obtain effective waveform data with a higher sampling rate than that of a single channel.

59. The operating system as described in claim 47, characterized in that, The control component is further configured to execute a data processing program, which includes a feature extraction step and a feature restoration step. The feature extraction step extracts at least one feature data, including peaks, troughs or time of flight, from the original waveform data before transmitting it. The feature restoration step reconstructs a waveform or generates an image based on the feature data in a back-end processing unit of the operating system.

60. The operating system as described in claim 47, characterized in that, It also includes an artificial intelligence processing module configured to use a deep learning model to perform AI processing on an image or data obtained from the ultrasonic scanning inspection procedure. The AI ​​processing includes image denoising, resolution enhancement, or automatic defect feature recognition.

61. The operating system as described in claim 47, characterized in that, The control component is configured to execute a multi-threshold gain imaging program, which applies a plurality of corresponding gain parameters or filtering thresholds to echo signals at different depth locations of the ultrasonic signal to present the characteristics of the different depth locations or generate a layered enhanced tomographic image.

62. The operating system as described in claim 47, characterized in that, The control component is configured to generate the control signal to drive the detection probe to perform a stamp-type detection procedure; the stamp-type detection procedure includes: controlling the detection probe to descend at a measurement point, such that the isolation component disposed on the detection probe contacts one of the surfaces of the object under test to establish an ultrasonic transmission path; rising after acquiring the ultrasonic signal, such that the isolation component detaches from the surface of the object under test; and moving to another measurement point.

63. The operating system as described in claim 47, characterized in that, The control component is configured to execute a numerical analysis program that directly calculates the value of a specific physical quantity from a feature data or the ultrasonic signal, including the peak amplitude value, the depth value converted from the time of flight, or the thickness value, and outputs it in the form of a numerical report.

64. The operating system as described in claim 47, characterized in that, The control component employs a pipelined data processing architecture, which allows the signal acquisition action of the detection probe, the transmission action of a feature data, and the reconstruction action of a back-end image to be overlapped and processed in parallel on the time axis, thereby reducing detection latency.

65. The operating system as described in claim 47, characterized in that, The control component supports a network-attached storage connection or an Internet of Things (IoT) communication protocol to directly stream and store data obtained from the ultrasonic scanning and detection program to an external server or a cloud database, or to load a set parameter of a custom path through an external storage device.

66. The operating system as described in claim 47, characterized in that, It also includes a vibration sensor to detect the real-time vibration of the detection probe or the platform. The control component is configured to adjust the movement speed of the detection probe or pause scanning in real time when the real-time vibration exceeds a preset threshold, so as to ensure the quality of the detection signal.

67. A platform, characterized in that, An ultrasonic scanning microscope apparatus as described in claim 1 is used for performing an ultrasonic scanning inspection procedure, the stage comprising: A platform having a support surface for supporting an object to be tested, and the platform having at least one fluid channel penetrating the support surface; and A base, with a cavity formed between the base and the storage platform, the base having at least one inlet and at least one outlet communicating with the cavity. One of the test liquids flows from the inlet of the base through the chamber and out of the outlet of the base, forming a continuous flow in the chamber, thereby generating a negative pressure at the fluid channel of the placement platform, and the negative pressure forms a suction force to adsorb the test object.

68. The platform as described in claim 67, characterized in that, It further includes a partition frame disposed between the platform and the base, thereby forming the cavity between the platform and the base.

69. The platform as described in claim 67, characterized in that, It also includes a regulating device for adjusting the magnitude of the negative pressure, thereby controlling the suction force generated by the negative pressure.

70. The platform as described in claim 69, characterized in that, The control device adjusts the negative pressure by regulating the inflow rate of the detection liquid from the inlet and the outflow rate from the outlet, thereby controlling the magnitude of the suction force generated by the negative pressure.

71. The platform as described in claim 67, characterized in that, It further includes a treatment tank for containing the test liquid, wherein the placement platform and the base are immersed in the test liquid in the treatment tank when in use.

72. The platform as described in claim 71, characterized in that, It also includes a pump for drawing the test liquid out of the chamber through the outlet of the base and thereby drawing the test liquid in the processing tank into the chamber through the inlet of the base, thus forming the continuous flow in the chamber.

73. The platform as described in claim 72, characterized in that, The pump is connected to a third end of a split tube, a first end of the split tube is connected to the chamber to form the outlet, and a second end of the split tube is connected to the processing tank.

74. The platform as described in claim 73, characterized in that, It further includes a main valve and a diversion pressure regulating valve. The main valve is located at the first end of the diversion pipe, and the diversion pressure regulating valve is located at the second end of the diversion pipe. The magnitude of the negative pressure is controlled by adjusting the opening of the diversion pressure regulating valve, thereby controlling the magnitude of the suction force formed by the negative pressure.

75. The platform as described in claim 74, characterized in that, The detection fluid drawn into the chamber through the inlet comes from an external plant supply source, or the detection fluid contained in the treatment tank comes from an external plant supply source.

76. The platform as described in claim 74, characterized in that, The test fluid drawn by the pump can be selectively delivered into the treatment tank or discharged to a drain outlet outside the treatment tank.

77. The platform as described in claim 74, characterized in that, The shunt tube is selected from a group consisting of T-shaped tubes, Y-shaped tubes and multi-port tubes.

78. The platform as described in claim 67, characterized in that, It also includes at least one limiting member, which is set on the placement platform to fix the position of the object to be tested carried on the placement platform.

79. The platform as described in claim 67, characterized in that, The storage platform and the base are integrally formed.

80. The platform as described in claim 67, characterized in that, It also includes an adjustment component, by which the storage platform adjusts the bearing surface of the storage platform.

81. The platform as described in claim 67, characterized in that, The platform has multiple outlets distributed on the base, and the platform further includes: a multi-channel pipeline network for connecting the multiple outlets; and multiple control valves connected to different areas of the multi-channel pipeline network for zoned adsorption control of the bearing surface of the platform.

82. The platform as described in claim 67, characterized in that, It also includes at least one baffle disposed on the bearing surface of the placement platform to block a portion of the fluid channel, thereby defining an effective adsorption area corresponding to the size of the object to be tested.

83. The platform as described in claim 67, characterized in that, The platform and / or base are made by laser cutting, 3D printing or injection molding.

84. The platform as described in claim 67, characterized in that, The object to be tested is the object to be examined by an ultrasonic scanning microscope.

85. The platform as described in claim 67, characterized in that, The detection solution is an aqueous solution.

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