Polarization encoded high-efficiency directional luminescent metasurface and preparation method thereof

Abstract

This invention discloses a polarization-encoded, high-efficiency directional light-emitting metasurface and its fabrication method, relating to the field of micro / nano photonics. The metasurface comprises a transparent quartz substrate, a diatomic lattice array disposed on the substrate, and a light-emitting layer covering it. The diatomic lattice array consists of multiple periodically arranged lattice units, each containing an eccentric nanodisk. This disk has an eccentric displacement relative to the lattice center and can rotate around the center by an angle. The polarization direction of the emitted light is controlled by the rotation angle, and the emitted light beam width and quality factor are modulated by the eccentric displacement. This invention utilizes the rotational displacement of the eccentric nanodisk in the diatomic lattice to achieve continuously tunable linear polarization direction while maintaining a high quality factor, and obtains high circular polarization directional emission by constructing a supercell phase gradient. This invention provides a new solution for polarization-encoded light sources, metasurface lasers, and integrated photonic devices.

Description

Technical Field

[0001] This invention relates to the field of micro-nano photonics technology, and in particular to a polarization-encoded high-efficiency directional light-emitting metasurface and its preparation method. Background Technology

[0002] Polarized light sources are core components in the field of photonics, possessing irreplaceable application value in numerous areas such as flat panel displays, semiconductor lasers, quantum secure communication, and biomedical imaging. Traditional methods of obtaining polarized light mainly rely on external polarizers to filter unpolarized light sources. While this method is simple in principle, it has inherent drawbacks: at least 50% of photons are lost due to polarization filtering, severely limiting photon energy utilization efficiency. Furthermore, the systems are large in size and have low integration, making it difficult to meet the miniaturization and integration requirements of micro- and nano-photonic devices.

[0003] Therefore, research has gradually shifted from external polarization control of large-volume optical components to the optimization of the light emission characteristics of the light source itself and the planar integrated control of micro / nano structures. Among these, luminescent metasurfaces, as a type of compact artificial micro / nano structure for actively controlling light emission, can actively control the polarization, phase, and direction of the light source from the emission source through the functional and structural reconstruction of optical materials. This not only yields high-purity linearly polarized or circularly polarized light but also optimizes the beam output quality, achieving directional emission and high monochromatic light emission, making it the mainstream research direction for high-performance polarized light sources.

[0004] The quality factor is a key indicator for evaluating the performance of luminescent metasurfaces. It is defined as the ratio of the center wavelength of the resonant mode to the spectral linewidth, directly determining the device's emission monochromaticity and laser generation threshold. Currently, mainstream polarization control schemes fall into two main categories: one utilizes the natural rotational freedom of anisotropic nanostructures such as rectangular and elliptical shapes, forming a phase gradient through the constant rotation angle of adjacent units to excite surface lattice resonance and achieve polarized light emission. However, this scheme has a fatal limitation: the rotation of a single resonant unit disrupts the lattice coherence of the entire array, causing resonance peak broadening, wavelength shift, and a significant decrease in the quality factor, drastically reducing spectral purity. The other category employs a completely symmetrical circular nanounit array, which can achieve high quality factor resonance and efficient optical field confinement. However, due to the lack of structural anisotropy, it cannot achieve geometric phase control and polarization encoding, making it difficult to meet the application requirements of complex photonic systems.

[0005] To address these contradictions, researchers attempted to artificially create symmetry-breaking by introducing structural defects (such as eccentric holes in nanodisks or notches in rectangular blocks) to gain rotational degrees of freedom. However, the near-field hotspots of such structures are concentrated and confined within tiny holes or notches, which not only makes it difficult to fill the gain medium and integrate and fabricate it, but also results in extremely low spatial overlap between the light field and the gain medium, weak light-matter interaction, and luminous efficiency far below expectations.

[0006] In summary, existing technologies have consistently failed to simultaneously achieve the three core objectives of high quality factor, high field gain overlap, and phase codedability, severely hindering the industrial application of high-performance coded polarization-oriented emission light sources. Summary of the Invention

[0007] To address this, embodiments of the present invention provide a polarization-encoded high-efficiency directional light-emitting metasurface and its preparation method, which solves the problem in the prior art that it is impossible to simultaneously achieve high quality factor, high optical near-field and gain medium overlap and phase encodeability, resulting in poor monochromaticity of polarized light sources, low luminous efficiency and difficulty in achieving coded polarization directional emission.

[0008] To address the aforementioned technical problems, embodiments of the present invention provide a polarization-encoded, high-efficiency directional light-emitting metasurface, comprising:

[0009] Transparent quartz substrate;

[0010] A diatomic lattice array is disposed on the transparent quartz substrate. The diatomic lattice array is composed of multiple periodically arranged lattice units. Each lattice unit has a lattice center and an eccentric nanodisk disposed within each lattice unit. The eccentric nanodisk has a predetermined eccentric displacement relative to the lattice center. It can rotate in-plane around the center of the lattice by a preset rotation angle. So as to pass through the rotation angle The polarization direction of the emitted light is controlled by adjusting the linewidth of the emitted light through the eccentric displacement δ; and

[0011] A light-emitting layer covering the two-atom lattice array.

[0012] Preferably, the eccentric nanodisc is made of titanium dioxide, with a height of 100 nm and a diameter of 140 nm to 220 nm.

[0013] Preferably, the lattice period P of the lattice unit is 420 nm to 600 nm, and the eccentric displacement The range is 0nm to 50nm.

[0014] Preferably, the light-emitting layer is a polymer film doped with organic dye molecules.

[0015] Preferably, the polymer film is a polyvinyl alcohol film doped with 0.1 wt% Rhodamine 101 dye molecules, and its thickness is 440 nm.

[0016] Preferably, by adjusting the rotation angle Controlling the linear polarization direction of the emitted light, and the polarization angle of the linearly polarized light. With rotation angle Satisfies a linear relationship: or .

[0017] Preferably, the eccentric displacement Quality factor of resonance mode satisfy By adjusting the eccentric displacement By adjusting the quality factor and linewidth, the emission intensity of polarized light can be controlled.

[0018] Preferably, the diatomic lattice array consists of N lattice units forming a supercell, and the rotation angle of each lattice unit within the supercell is... The gradient changes to achieve directional emission of circularly polarized light.

[0019] Preferably, in the diatomic lattice array, the near-field enhancement region of the light field is located in the gap between the eccentric nanodisks within the lattice unit, and has a high spatial overlap with the light-emitting layer.

[0020] This invention also provides a method for preparing a highly efficient directional light-emitting metasurface based on the polarization encoding described above, characterized by comprising the following steps:

[0021] Depositing a titanium dioxide thin film on a transparent quartz substrate;

[0022] A chromium hard mask layer is coated on the titanium dioxide film, and a hydrogen silsesquioxane resist is spin-coated.

[0023] The titanium dioxide thin film is patterned by electron beam lithography and dry metal etching to form the diatomic lattice array.

[0024] Remove residual chromium hard mask layer and hydrogen silsesquioxane resist;

[0025] A polymer solution doped with organic dye molecules is spin-coated onto the patterned biatomic lattice array, and then baked to obtain the polarization-encoded high-efficiency directional light-emitting metasurface.

[0026] As can be seen from the above technical solutions, this invention application has the following beneficial effects:

[0027] First, this invention introduces the rotational degree of freedom of the eccentric nanodisk through a diatomic lattice structure, achieving continuous control of the polarization direction by the rotation angle while maintaining the synergistic effect of local Mie resonance and collective lattice effect. Compared with the problem in the prior art where rotating anisotropic units destroys lattice coherence and leads to a decrease in quality factor, this invention maintains stable resonance wavelength, quality factor, and electric field enhancement characteristics within the rotation range of 0° to 180°, ensuring luminescence monochromaticity and polarization encoding accuracy.

[0028] Second, the near-field enhancement region of this invention is located in the four nano-gap areas between the eccentric nanodisks, rather than being confined to the tiny pores or gaps inside the nanodisks. This design allows for a very high spatial overlap between the light field and the doped dye polymer luminescent layer covering it, significantly increasing directional emission enhancement (DEE) and improving the efficiency of light-matter interaction, while avoiding the processing difficulties caused by the difficulty in filling the microstructure with the gain medium.

[0029] Third, this invention only requires setting the eccentric displacement and rotation angle of the eccentric nanodisk in a diatomic lattice, eliminating the need to fabricate complex defects such as nanopores or notches on the nanostructure, thus reducing the fabrication difficulty and facilitating integrated production. Furthermore, by assembling multiple lattice units into a supercell and setting the rotation angle to vary in a gradient, geometric phase modulation can be achieved, resulting in directional tilted emission with high circular polarization, without the need for chiral materials or external polarization optics. This provides a simple and efficient solution for high-performance coded polarization light sources. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly described below. Referring to the drawings will make the features and advantages of the present invention clearer. The drawings are illustrative and should not be construed as limiting the present invention in any way. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0031] Figure 1 This is a schematic diagram of the high-efficiency directional light-emitting metasurface structure with polarization encoding in this invention, wherein the eccentric nanodisc has a unit intracellular radius of... The circular track rotates, the rotation angle The linear polarization direction that determines the dual nonlocal modes ;

[0032] Figure 2 This is a simulation result diagram of the directional emission enhancement spectrum in this invention;

[0033] Figure 3 This is a schematic diagram of the nonlocal electric quadrupole mode supported by the metasurface in this invention, wherein (a) is a schematic diagram of the rotation angle and resonant wavelength, (b) is a schematic diagram of the rotation angle and quality factor, and (c) is a schematic diagram of the rotation angle and electric field enhancement characteristics.

[0034] Figure 4 This is a schematic diagram showing the change of polarization angle with rotation angle obtained from experiments in this invention;

[0035] Figure 5 This is a planar schematic diagram of the geometric phase gradient metasurface used to emit circularly polarized light in this invention;

[0036] Figure 6 The figures show the experimental results of this invention, where (a) and (b) are the wave vector-resolved spectra of left-handed and right-handed circularly polarized laser emission measured in the experiment, (c) is the distribution of Stokes parameter S3 in the wave vector-resolved spectra, and (d) is the relationship between the degree of circular polarization S3 as a function of the wave vector variation.

[0037] Figure 7 This is a schematic diagram of the fabrication process of the polarization-encoded high-efficiency directional light-emitting metasurface in this invention. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] Example 1:

[0040] To address the problem in existing technologies that cannot simultaneously achieve high quality factor, high optical near-field and gain medium overlap, and phase encodeability, resulting in poor monochromaticity, low luminous efficiency, and difficulty in achieving coded polarization-oriented emission, this embodiment provides a polarization-coded, high-efficiency directional emission metasurface. For example... Figure 1 As shown, the metasurface includes: a transparent quartz substrate (quartz substrate), a two-atom lattice array disposed on the transparent quartz substrate, and a light-emitting layer (dye film) covering the two-atom lattice array.

[0041] Specifically, in this embodiment, a transparent quartz substrate (refractive index n=1.45) is used as the supporting substrate for the entire device. In other embodiments, other transparent insulating substrates may also be used.

[0042] Specifically, in this embodiment, the diatomic lattice array is composed of multiple periodically arranged lattice units, each lattice unit having a lattice center (virtual geometric point). An eccentric nanodisk is disposed within each lattice unit. The diatomic lattice structure consists of two staggered square sublattices, forming a diatomic square lattice. The material of the eccentric nanodisk is titanium dioxide (TiO2). The height of the lattice unit is fixed at 100 nm, and its diameter D is 140 nm to 220 nm. The lattice period P of the lattice unit is 420 nm to 600 nm. The eccentric nanodisk has a preset eccentric displacement relative to the lattice center. (Value range 0nm~50nm), and can be measured around the center of the lattice along a radius of [missing value]. The circular track rotates at a preset rotation angle. (like Figure 1 (As shown). By the rotation angle The polarization direction of the emitted light is controlled by the eccentric displacement. Adjusting the linewidth of the emitted light. By continuously tuning the above parameters, applications can be realized in the visible light to near-infrared (600nm~1000nm) wavelength range.

[0043] In a specific example of this embodiment, the following parameters are used: diameter D = 170 nm, height H = 100 nm, lattice period P = 440 nm, and eccentric displacement. Rotation angle The size of the two-atom lattice array is .

[0044] Specifically, the luminescent layer is overlaid on the two-atom lattice array. In this embodiment, the luminescent layer is a polymer film doped with organic dye molecules. Specifically, a 440 nm thick polyvinyl alcohol (PVA) film is used, doped with 0.1 wt% Rhodamine 101 (Rh101) dye molecules. This luminescent layer is spin-coated onto the nanodisk array as an active emitting layer (e.g., ...). Figure 1 (As shown).

[0045] In this embodiment, the linearly polarized emission characteristics of the laser mode were first verified through simulation during the operation of the metasurface. For example... Figure 2 As shown, the nanodisk diameter D=170nm, period P=440nm, and eccentric displacement are given. Rotation angle Simulation results of metasurface directional emission enhancement (DEE) spectroscopy ( (where the polarization angle is 1). By calculating the average near-field enhancement at different wavelengths in the gain medium region surrounding the nanoparticles, the optical reciprocity theorem is used to equate it to a far-field DEE spectrum. Figure 2 It can be seen that after the polarization is rotated by 90°, the emission peaks representing the electric quadrupole (EQ) and out-of-plane magnetic dipole (MD) resonances disappear directly, indicating that the two modes have linear polarization characteristics.

[0046] Utilizing eccentric translation perturbation Based on the induced high-quality factor electric quadrupole lattice resonance radiation, this scheme introduces an in-plane rotation angle of the central atom. (The net dipole is perpendicular to it) serves as a degree of freedom for geometric phase adjustment. By breaking the higher-order rotational symmetry of the lattice, the superposition of the space vectors of the local electric dipoles is induced to generate a macroscopic net electric dipole moment, and the orientation of the net dipole moment is established with respect to... The quantitative mapping model provides a basis for the design of arbitrary linear polarization states.

[0047] To verify the feasibility of polarization-encoding through geometric phase design in a diatomic metasurface, simulation analysis was conducted on the center wavelength, quality factor, and near-field enhancement of the EQ resonance under different rotation angles. Figure 3 As shown, the nonlocal electric quadrupole mode supported by the diatomic TiO2 metasurface is illustrated, with its resonant wavelength ( Figure 3 (a) and quality factor ( Figure 3 (b) and electric field enhancement characteristics ( Figure 3 (c) remained stable regardless of changes in the rotation angle of the eccentric nanodisk. This is due to the quality factor and... Proportional The smaller the value, the larger the quality factor. Considering experimental fabrication errors, when the eccentric displacement is set to 10 nm, the results show that the resonant wavelength, quality factor, and electric field enhancement characteristics of this mode remain stable under different rotation angles. This indicates that the optical properties of the EQ mode have good stability with changes in rotation angle, providing a feasible basis for further realizing high-efficiency coded laser emission.

[0048] Having verified that the mode's emission characteristics do not change with the rotation angle, the mapping relationship between the rotation angle and the linearly polarized emission direction was further explored. All eccentric disks in the array rotate at the same angle. When rotating, when the rotation angle As the mode changes, the direction of its linear polarization also changes. For example... Figure 4 As shown, the polarization angle of the emitted light is summarized. With rotation angle The relationship between the polarization angles is shown in both simulations and experiments. and rotation angle The linear relationship between the two models is not directly related to the EQ model; rather, they exhibit a complementary relationship: the EQ model follows... MD mode follows .exist At that time, the EQ and MD modes are at the polarization angle The maximum DEE is reached at all locations; with As they increase, their optimal polarization directions will separate.

[0049] For circularly polarized light emission, this invention further employs a supercell structure composed of N diatomic lattice units, based on the aforementioned metasurface structure. For example... Figure 5 The diagram shows a planar schematic of a geometrically phase-gradient metasurface used for emitting circularly polarized light. Specifically, the supercell is composed of N=7 diatomic lattice units, with an eccentric nanodisk rotating around the lattice center within each unit. Considering the influence of manufacturing errors on the emission characteristics, an eccentric displacement is set... Rotation angle The gradient decreases in 30° increments from 180° to 0°. A supercell array is constructed using a geometric phase mechanism. Combined with band folding theory, the momentum compensation provided by the phase gradient is used to replicate the Γ-point electric quadrupole lattice resonance to the off-axis momentum point. This enables the output of high-purity circularly polarized tilted lasers.

[0050] The results were verified through experiments. Figure 6 As shown. Figure 6 In the middle (a) and (b), respectively, the wave vector-resolved spectra of left-handed and right-handed circularly polarized laser emission measured in the experiment are shown. Figure 6 In the middle (c), the Stokes parameter S3 distribution in the wave vector resolved spectrum is shown. Figure 6 In the figure (d), the circular polarization degree S3 is expressed as a function of the wave vector variation. Wave vector-resolved emission spectra show that the EQ mode exhibits significant circular polarization characteristics while maintaining high spatial coherence. The calculated Stokes parameter S3 reaches a maximum value of 0.85. This result verifies that rotational displacement within the supercell structure can convert local perturbations into directional circularly polarized light emission without the need for chiral materials or external polarization optics, and that circular polarization control of the emitted light can be achieved through geometric phase gradient design.

[0051] Specifically, in the diatomic lattice array of this embodiment, the near-field enhancement region of the light field is not confined within the nanodisks, but is located in the four nano-gap regions between the eccentric nanodisks within the lattice unit. This distribution results in a high spatial overlap between the light field and the overlying luminescent layer, greatly enhancing directional emission enhancement (DEE) and improving the luminescence quality.

[0052] Through the above structure, the present invention achieves the following beneficial effects: by adjusting the rotation angle Controlling the linear polarization direction of the emitted light to satisfy a linear relationship or By adjusting the eccentric displacement Adjusting the quality factor and linewidth ( This allows for the regulation of the emission intensity of polarized light; the directional emission of circularly polarized light is achieved through the gradient change of the supercell rotation angle; simultaneously, the near-field distribution is located in the gaps between the nanodisks, highly overlapping with the gain medium, making it easy to fabricate and highly efficient.

[0053] Example 2:

[0054] As shown in the figure, this embodiment of the invention provides a method for preparing a polarization-coded, high-efficiency directional light-emitting metasurface. This method is used to prepare the polarization-coded, high-efficiency directional light-emitting metasurface of Example 1, such as... Figure 7 As shown, the specific steps include:

[0055] Step 1: Deposit a titanium dioxide thin film on a transparent quartz substrate.

[0056] Specifically, ion beam assisted deposition (IBAD, model OTFC-900) was used to deposit a 100 nm thick layer on a transparent quartz substrate. film.

[0057] Step 2: Cover the titanium dioxide film with a chromium hard mask layer and spin-coat with hydrogen silsesquioxane (HSQ) resist.

[0058] Specifically, using electron beam evaporation equipment, in A 30 nm thick chromium (Cr) hard mask layer was coated onto the thin film. Subsequently, a hydrogen silsesquioxane (HSQ) resist was spin-coated onto the structure.

[0059] Step 3: Pattern the titanium dioxide thin film using electron beam lithography and dry metal etching to form the diatomic lattice array.

[0060] Specifically, an electron beam lithography (EBL) system was used to expose the HSQ resist, and after development, a nanodisk array pattern was obtained. Then, a metal dry etching apparatus (LAM9600) was used to... The thin film is etched to transfer the pattern. Within the layer, a two-atom lattice array is formed. This array consists of multiple periodically arranged lattice units, each with a lattice center. Within each lattice unit is an eccentric nanodisk, which has a predetermined eccentric displacement relative to the lattice center. It can rotate in-plane around the lattice center at a preset rotation angle. In a specific example, an eccentric displacement is set. The lattice period is P=440nm, the nanodisk diameter is D=170nm, and the height is H=100nm.

[0061] Step 4: Remove the remaining chromium hard mask layer and hydrogen silsesquioxane (HSQ) resist.

[0062] Specifically, the covering Cr hard mask layer and residual HSQ resist are removed by ultrasonic stripping in conjunction with chromium etching solution (RSK-3005H), yielding a pure chromium-coated solution. Two-atom lattice array.

[0063] Step 5: Spin-coat a polymer solution doped with organic dye molecules onto the patterned biatomic lattice array, and bake to obtain the polarization-encoded high-efficiency directional light-emitting metasurface.

[0064] Specifically, a polyvinyl alcohol (PVA) solution doped with 0.1 wt% Rhodamine 101 (Rh101) dye molecules was spin-coated onto a diatomic lattice array at 2500 rpm for 30 seconds to form a luminescent layer with a thickness of 440 nm. The PVA film was then cured by baking on a hot plate at 160°C for 1.5 minutes, ultimately yielding a polarization-encoded, highly efficient, directional luminescent metasurface.

[0065] This embodiment describes a method for preparing a polarization-encoded, high-efficiency directional light-emitting metasurface. This method is used to prepare the aforementioned polarization-encoded, high-efficiency directional light-emitting metasurface. Therefore, the specific implementation method can be found in the previous section on the embodiments of polarization-encoded, high-efficiency directional light-emitting metasurfaces. To avoid redundancy, it will not be repeated here.

[0066] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A polarization-encoded, high-efficiency directional light-emitting metasurface, characterized in that, include: Transparent quartz substrate; A diatomic lattice array is disposed on the transparent quartz substrate. The diatomic lattice array is composed of multiple periodically arranged lattice units. Each lattice unit has a lattice center and an eccentric nanodisk disposed within each lattice unit. The eccentric nanodisk has a predetermined eccentric displacement relative to the lattice center. It can rotate in-plane around the center of the lattice by a preset rotation angle. So as to pass through the rotation angle The polarization direction of the emitted light is controlled by the eccentric displacement. Adjusting the linewidth of the emitted light; as well as A light-emitting layer covering the two-atom lattice array.

2. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, The eccentric nanodisc is made of titanium dioxide and has a height of 100 nm and a diameter of 140 nm to 220 nm.

3. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, The lattice period P of the lattice unit is 420nm to 600nm, and the eccentric displacement The range is 0nm to 50nm.

4. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, The light-emitting layer is a polymer film doped with organic dye molecules.

5. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 4, characterized in that, The polymer film is a polyvinyl alcohol film doped with 0.1 wt% Rhodamine 101 dye molecules, and its thickness is 440 nm.

6. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, By adjusting the rotation angle Controlling the linear polarization direction of the emitted light, and the polarization angle of the linearly polarized light. With rotation angle Satisfies a linear relationship: or .

7. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, The eccentric displacement Quality factor of resonance mode satisfy By adjusting the eccentric displacement By adjusting the quality factor and linewidth, the emission intensity of polarized light can be controlled.

8. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, The diatomic lattice array consists of N lattice units forming a supercell, and the rotation angle of each lattice unit within the supercell is... The gradient changes to achieve directional emission of circularly polarized light.

9. The polarization-encoded high-efficiency directional light-emitting metasurface according to claim 1, characterized in that, In the dual-atom lattice array, the near-field enhancement region of the light field is located in the gap between the eccentric nanodisks within the lattice unit, and has a high degree of spatial overlap with the light-emitting layer.

10. A method for preparing a polarization-encoded, high-efficiency directional light-emitting metasurface according to any one of claims 1 to 9, characterized in that, Includes the following steps: Depositing a titanium dioxide thin film on a transparent quartz substrate; A chromium hard mask layer is coated on the titanium dioxide film, and a hydrogen silsesquioxane resist is spin-coated. The titanium dioxide thin film is patterned by electron beam lithography and dry metal etching to form the diatomic lattice array. Remove residual chromium hard mask layer and hydrogen silsesquioxane resist; A polymer solution doped with organic dye molecules is spin-coated onto the patterned biatomic lattice array, and then baked to obtain the polarization-encoded high-efficiency directional light-emitting metasurface.

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