A multi-temperature-zone cooperative control method and system for flow channel coupling

Abstract

This invention proposes a multi-temperature zone collaborative control method and system oriented towards flow channel coupling. By real-time acquisition of state data from each flow channel node in a shared cooling channel, including real-time temperature, pressure, and flow rate data, the inter-regional coupling transfer matrix between each temperature zone is updated based on the state data of each flow channel node. The optimal temperature trajectory of each temperature zone and the optimal opening trajectory of each distribution valve are calculated. The optimal temperature trajectory is mapped to the decoupling setpoint of each temperature zone. Collaborative scheduling instructions are generated based on the optimal opening trajectories of each distribution valve in the shared cooling channel. Control parameters for each temperature zone are calculated based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone. The temperature and flow rate of each temperature zone are controlled using these control parameters, thereby improving the accuracy, stability, and dynamic response speed of multi-temperature zone temperature control.

Description

Technical Field

[0001] This invention relates to the field of temperature control technology for lithography machines, and in particular to a multi-temperature zone collaborative control method and system for flow channel coupling. Background Technology

[0002] In fields such as precision manufacturing equipment, semiconductor lithography equipment, and high-precision optical systems, the stability and precise control of the temperature field are key factors determining the overall performance and processing accuracy of the machine. Taking a lithography machine as an example, many functional components, such as the objective lens assembly, wafer stage, mask stage, and light source cavity, are highly sensitive to temperature. Submicron to nanometer-level thermal deformation can directly affect overlay accuracy and imaging quality. Therefore, these components are usually divided into independent temperature zones and equipped with heating, cooling, and heat exchange devices to precisely maintain their respective target temperatures.

[0003] Traditional temperature control schemes commonly employ a zone-based independent control architecture, where each temperature zone adjusts independently based on its own temperature deviation, ignoring or only compensating for the coupling effects between zones in a simplistic way. The fundamental flaw of this zone-based independent control architecture is that when multiple temperature zones simultaneously change their target temperature, the controllers in each zone act independently. The resulting flow and temperature disturbances superimpose, forming a positive feedback loop. This manifests as a recurring process where one zone's adjustment disturbs adjacent zones, and the adjacent zones, after adjustment, in turn disturb the previous zone. Ultimately, this results in low-frequency oscillations with periods ranging from tens of seconds to several minutes, leading to extremely slow or even nonexistent system convergence. In scenarios where multiple temperature zones share a cooling channel, existing technologies struggle to achieve rapid global temperature field stabilization while maintaining the independent temperature accuracy of each zone due to dynamic cross-interference caused by fluid dynamic coupling and thermal inertia mismatch. Summary of the Invention

[0004] Based on the above problems, this invention proposes a multi-temperature zone collaborative control method and system for flow channel coupling, which can improve the accuracy, stability and dynamic response speed of multi-temperature zone temperature control.

[0005] In view of this, a first aspect of the present invention proposes a multi-temperature zone cooperative control method for flow channel coupling, comprising: The status data of each flow channel node in the shared cooling channel is collected in real time, including real-time temperature, pressure and flow data; Update the inter-regional coupling transfer matrix between each temperature zone based on the state data of each flow channel node; Calculate the optimal temperature trajectory for each temperature zone and the optimal opening trajectory for each distribution valve; The optimal temperature trajectory is mapped to decoupled setpoints for each temperature zone; Cooperative scheduling instructions are generated based on the optimal opening trajectory of each distribution valve in the shared cooling channel; Calculate the control parameters for each temperature zone based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone. The temperature and flow rate of each temperature zone are controlled by the aforementioned control parameters.

[0006] Optionally, the steps of updating the inter-region coupling transfer matrix between each temperature zone based on the state data of each flow channel node specifically include: For any two temperature zones and Obtain the first historical observation within the time window The state disturbance signal of each temperature zone and the Response signal of each temperature zone ; Based on the state disturbance signal and the response signal Construct the input data matrix and output data matrix ; The input data matrix and the output data matrix Construct as containing A region coupling transfer matrix with 1 element.

[0007] Optionally, the steps for calculating the optimal temperature trajectory for each temperature zone and the optimal opening trajectory for each distribution valve specifically include: Configure global optimization parameters; Based on the global optimization parameters, a minimization objective function is constructed for the discrete coupled dynamic constraint model of each temperature zone in the prediction time domain; Heat exchange power of each temperature zone and the opening degree of each distribution valve Using the total power consumption constraint, valve stroke rate of change constraint, temperature rate of change constraint and physical boundary constraint as decision variables, the minimum objective function is solved under the constraints of total power consumption, valve stroke rate of change, temperature rate of change and physical boundary constraints in the global optimization parameters; Output the optimal temperature trajectory for each temperature zone based on the solution results. And the optimal opening trajectory of each distribution valve .

[0008] Optionally, the step of mapping the optimal temperature trajectory to decoupled setpoints for each temperature zone specifically includes: The optimal temperature trajectory Convert to frequency domain representation ; The inverse of the inter-regional coupling transfer matrix is ​​combined with the optimal temperature trajectory. Frequency domain representation Multiplication yields their matrix product. ; For the matrix product The decoupling setpoint is obtained by performing an inverse Laplace transform to convert it into a time-domain signal. .

[0009] Optionally, the step of generating collaborative scheduling instructions based on the optimal opening trajectory of each distribution valve in the shared cooling channel specifically includes: Based on the optimal opening trajectory Determine the first The target opening degree of each distribution valve Target opening rate of change Response time ; Construct the first Each distribution valve contains the target opening degree. Target opening rate of change and the response time Coordinated scheduling instructions ; Will Coordinated scheduling instructions for distribution valves in each temperature zone Packaged into a coordinated scheduling instruction package .

[0010] Optionally, the control parameters include the heat exchange power of each temperature zone and the target opening degree of the local fine-tuning valve. The specific steps for calculating the control parameters of each temperature zone based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone include: Calculate the first Error signal for each temperature zone and disturbance estimation ; Based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone ; The total control signal The heat exchange power channel and the local fine-tuning valve channel are allocated to obtain the first Heat exchange power of each temperature zone and the target opening of the local fine-tuning valve .

[0011] Optionally, based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone Before the steps, it also includes: Iterative calculation of the first The temperature zone in the first Online adaptive estimate for each control cycle and ; Calculate the filter correction factor: ; in, For the low-pass filter in the first The filter time constant for each temperature zone.

[0012] Optionally, the steps of controlling the temperature and flow rate of each temperature zone using the control parameters specifically include: The first Heat exchange power of each temperature zone Issued to the Heating or cooling actuators for each temperature zone; The first Local fine-tuning valve target opening for each temperature zone Issued to the Local fine-tuning valves for each temperature zone; The coordinated scheduling command is sent to the distribution valves of each temperature zone.

[0013] Optionally, after the step of controlling the temperature and flow rate of each temperature zone using the control parameters, the method further includes: The target temperature is determined based on the optimal temperature trajectory of each temperature zone; The absolute value of the difference between the actual temperature and the target temperature in each temperature zone is compared with the preset accuracy threshold. Compare the rate of temperature change in each temperature zone with a preset rate threshold. When the absolute value of the difference between the actual temperature and the target temperature in all temperature zones is less than the preset accuracy threshold, and the temperature change rate is less than the preset rate threshold, the temperature control system will be switched to low-frequency monitoring mode.

[0014] A second aspect of the present invention proposes a multi-temperature zone cooperative control system oriented towards flow channel coupling, comprising a shared cooling flow channel, a distributed sensor array, and an actuator module. The shared cooling flow channel consists of cooling branches of several temperature zones and flow channel nodes at their intersections. The distributed sensors include temperature sensors, pressure sensors, and flow sensors arranged at the flow channel nodes of the shared cooling flow channel. The actuator module includes a group of zone heat exchange actuators, a group of local fine-tuning valves, and a group of distribution valves distributed in each temperature zone. The multi-temperature zone cooperative control system is configured to implement the multi-temperature zone cooperative control method oriented towards flow channel coupling as described in any of the first aspects of the present invention.

[0015] This invention proposes a multi-temperature zone collaborative control method and system oriented towards flow channel coupling. By real-time acquisition of state data from each flow channel node in a shared cooling channel, including real-time temperature, pressure, and flow rate data, the inter-regional coupling transfer matrix between each temperature zone is updated based on the state data of each flow channel node. The optimal temperature trajectory of each temperature zone and the optimal opening trajectory of each distribution valve are calculated. The optimal temperature trajectory is mapped to the decoupling setpoint of each temperature zone. Collaborative scheduling instructions are generated based on the optimal opening trajectories of each distribution valve in the shared cooling channel. Control parameters for each temperature zone are calculated based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone. The temperature and flow rate of each temperature zone are controlled using these control parameters, thereby improving the accuracy, stability, and dynamic response speed of multi-temperature zone temperature control. Attached Figure Description

[0016] Figure 1 This is a flowchart of a multi-temperature zone cooperative control method for flow channel coupling provided in one embodiment of the present invention; Figure 2 This is a schematic diagram of a multi-temperature zone cooperative control system oriented towards flow channel coupling provided in one embodiment of the present invention. Detailed Implementation

[0017] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0018] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the scope of protection of the invention is not limited to the specific embodiments disclosed below.

[0019] In the description of this invention, the term "multiple" refers to two or more. Unless otherwise explicitly defined, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. The terms "connect," "install," "fix," etc., should be interpreted broadly. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0020] In the description of this specification, the terms "one embodiment," "some implementations," "specific embodiment," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0021] The following description, with reference to the accompanying drawings, illustrates a multi-temperature zone collaborative control method and system for flow channel coupling according to some embodiments of the present invention.

[0022] like Figure 1 As shown, the first aspect of the present invention proposes a multi-temperature zone cooperative control method for flow channel coupling, comprising: The status data of each flow channel node in the shared cooling channel is collected in real time, including real-time temperature, pressure and flow data; Update the inter-regional coupling transfer matrix between each temperature zone based on the state data of each flow channel node; Calculate the optimal temperature trajectory for each temperature zone and the optimal opening trajectory for each distribution valve; The optimal temperature trajectory is mapped to decoupled setpoints for each temperature zone; Cooperative scheduling instructions are generated based on the optimal opening trajectory of each distribution valve in the shared cooling channel; Calculate the control parameters for each temperature zone based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone. The temperature and flow rate of each temperature zone are controlled by the aforementioned control parameters.

[0023] The multi-temperature zone collaborative control method proposed in this invention, which is oriented towards flow channel coupling, is applied to a temperature control system that includes multiple temperature zones and a shared cooling flow channel connecting the multiple temperature zones.

[0024] In this embodiment of the invention, a temperature zone refers to a functional area or component area in the temperature control system that requires independent temperature control. Each temperature zone has its own target temperature setpoint and is equipped with corresponding heating, cooling, and heat exchange devices. The temperature zone is the basic unit of temperature control and the object of multi-temperature zone collaborative control in this embodiment of the invention. Each temperature zone is interconnected through a shared cooling channel, and its temperature state is affected not only by the control commands of its own zone but also by the coupling disturbances transmitted between adjacent temperature zones through the channel. For example, in a lithography machine temperature control system, the objective lens assembly (containing dozens of mirrors, each requiring independent temperature control), wafer stage, mask stage, and light source cavity can all be divided into independent temperature zones, with significant differences in heat capacity between different temperature zones.

[0025] The shared cooling channel refers to a coolant circulation pipeline system connecting multiple temperature zones. Branches in multiple temperature zones are connected by a shared main pipeline, with the same coolant loop circulating between different areas to carry away heat, forming a tree-like or ring-shaped channel topology with one pump and multiple channels. As the coolant flows through different temperature zones, its flow distribution and temperature state are redistributed due to changes in the heat exchange requirements of each zone, resulting in cross-temperature interference between them. For example, in lithography machines, to reduce the number of pumps, pipeline complexity, and manufacturing costs, the cooling branches of multiple temperature zones such as the objective lens assembly, wafer stage, and mask stage are usually connected by a shared main coolant pipeline, with one or a few pumps driving the coolant to circulate throughout the channel. When the valve opening of a branch in a certain temperature zone changes, the local pressure drop in the main pipeline changes accordingly, and the flow rate of the remaining branches is redistributed according to their respective resistance characteristics, causing changes in the heat transfer coefficients of adjacent temperature zones, and thus leading to temperature drift.

[0026] The flow channel nodes are connection points or branch points in the flow channel topology of the shared cooling flow channel. The flow channel nodes are connected by pipes (edges of the flow channel topology), forming a node-edge graph structure flow channel network model. In this embodiment of the invention, a distributed sensor array is arranged at each flow channel node to collect node temperature, node pressure, and node flow data. The distributed sensor array is a collection of miniature sensors, including but not limited to temperature sensors, pressure sensors, flow sensors, and valve position feedback sensors, used to collect real-time status data at each flow channel node.

[0027] The coupling transfer matrix is ​​a transfer function matrix describing the cross-coupling relationship between multiple temperature zones. Each element in the matrix represents the degree of influence of the control input of one temperature zone, such as a change in valve opening or heat exchange power, on the temperature output of another temperature zone. For example, in a temperature zone containing... In a temperature control system with multiple temperature zones, the coupling transfer matrix for Matrix, elements Indicates the first The control input for the temperature zone is for the first The transfer function for the temperature output of each temperature zone, where: ,and .

[0028] The optimal temperature trajectory is the optimal reference trajectory of temperature change over time for each temperature zone, obtained through joint solution during the global temperature field constraint optimization process, based on the coupling transfer matrix and preset constraints such as power consumption upper limit, valve stroke change rate upper limit, and response time constraint. The optimal temperature trajectory is a globally optimal allocation result considering the coupling relationships between all temperature zones, thus avoiding strategy conflicts and positive feedback oscillations caused by each temperature zone acting independently.

[0029] The distribution valve refers to an electrically operated valve located between the main cooling channel and the branch channels of each temperature zone, used to regulate the flow distribution ratio of coolant between the branches. For example, when the objective lens group temperature zone needs to be heated while the wafer stage temperature zone needs to be cooled, the temperature control system not only adjusts the heating or cooling power of each temperature zone, but also actively changes the flow ratio of coolant to the objective lens group and the wafer stage in the main channel by adjusting the opening of the distribution valve. This appropriately reduces the flow to the objective lens group and appropriately increases the flow to the wafer stage, thereby reducing thermal crosstalk between the two temperature zones at the fluid source.

[0030] The optimal opening trajectory is the optimal reference trajectory of the opening of each distribution valve in the shared cooling channel as a function of time, obtained by jointly solving with the optimal temperature trajectory of each temperature zone during the global temperature field constraint optimization process. In this embodiment of the invention, by actively adjusting the opening of each distribution valve, the temperature control system can change the flow distribution ratio of coolant between each branch at the fluid source, completing the flow redistribution before thermal disturbances are transmitted to adjacent temperature zones.

[0031] The decoupling setpoint is the independent control target value for each temperature zone obtained by decoupling and mapping the optimal temperature trajectory of each temperature zone obtained by global temperature field constraint optimization based on the coupling transfer matrix.

[0032] The coordinated scheduling command is a control command generated based on the optimal opening trajectory of each distribution valve obtained from global temperature field constraint optimization. It drives the action of each distribution valve in the shared cooling channel, including the target opening and opening change rate of each distribution valve. In this embodiment of the invention, the coordinated scheduling command controls the coordinated action of each distribution valve according to a global optimization strategy, actively changing the flow distribution ratio of coolant between branches and suppressing thermal coupling between fluid source regions.

[0033] Optionally, the steps of updating the inter-region coupling transfer matrix between each temperature zone based on the state data of each flow channel node specifically include: For any two temperature zones and Obtain the first historical observation within the time window The state disturbance signal of each temperature zone and the Response signal of each temperature zone ; Based on the state disturbance signal and the response signal Construct the input data matrix and output data matrix ; The input data matrix and the output data matrix Construct as containing A region coupling transfer matrix with 1 element.

[0034] Embodiments of the present invention include Taking a temperature control system with multiple temperature zones as an example, this illustrates how to construct and update the inter-zone coupling transfer matrix. In this embodiment, the inter-zone coupling transfer matrix is ​​a matrix containing... A matrix of n elements.

[0035] Furthermore, within the historical observation time window, the first The state disturbance signal of each temperature zone and the Response signal of each temperature zone Prior to this step, the system also includes constructing a system state vector from the raw data collected by the distributed sensor array. ,in Include Temperature values ​​at each flow channel node at any given time. Include The flow rate value of each flow channel node at any given time. Include The pressure values ​​at each flow channel node at any given time. The historical observation time window is a sliding time window of a preset length.

[0036] The state disturbance signal Used to express the first The temperature zone itself experiences state deviations due to external changes such as load variations or sudden changes in coolant flow. For any given moment... , No. The state disturbance signal of each temperature zone satisfy: ; in For the first Each temperature zone at time The state vector, For the first The moving average of each temperature zone within the historical observation time window.

[0037] The response signal Used to indicate the first The degree of deviation of the state of each temperature zone, such as node temperature, node flow rate, and node pressure, from its preset reference state value. In some embodiments, a digital filter can be used to extract components within a specific frequency range from the signal as the response signal. Since the steady-state values ​​of temperature, flow rate, and pressure, as well as their associated periodic components such as power frequency noise and constant load, are located at low frequencies or are directly DC components, these low-frequency components can be filtered out using a high-pass filter (HPF). This retains only the high-frequency information containing dynamic trends such as thermal inertia and fluid transport delay as the primary data source. Each temperature zone at time response signal : ; in For the first Each temperature zone at time The state vector, This is the preset cutoff frequency of the high-pass filter.

[0038] In some embodiments of the present invention, the historical observation time window includes... Taking one sampling point as an example, based on the state disturbance signal and the response signal Construct the input data matrix and output data matrix The specific steps include: The first in the historical observation time window The state disturbance signal of each temperature zone Construct the input data matrix The List: ; In the input data matrix The List middle, For the first The state disturbance signal of each temperature zone at the first sampling point within the historical observation time window. For the first The state disturbance signal of each temperature zone at the second sampling point in the historical observation time window, and so on; The first in the historical observation time window Response signal of each temperature zone Construct the output data matrix The OK: ; In the output data matrix The OK middle, For the first The response signal of each temperature zone at the first sampling point within the historical observation time window. For the first The response signal of each temperature zone at the second sampling point within the historical observation time window is used, and so on.

[0039] Furthermore, the inter-region coupling transfer matrix is ​​represented as follows: Then, in the input data matrix and the output data matrix Construct as containing In the step of transferring the inter-regional coupling matrix of elements: ; Inter-region coupling transfer matrix middle, Let Laplace's variable represent the frequency response of the system. Indicates time Coupling characteristics corresponding to a specific frequency.

[0040] In an embodiment of the present invention, it is assumed that the first The temperature zone for the first If the coupling response of each temperature region is a first-order inertial element, then the frequency domain representation of the inter-region coupling transfer matrix is: ; in The time-domain gain coefficient is obtained from least squares regression. For the first The temperature zone is related to the first temperature zone The coupling time constant of each temperature zone can be determined by the response signal. The step response or frequency response is identified.

[0041] Furthermore, in the input data matrix and the output data matrix Construct as containing In the step of the inter-regional coupling transfer matrix of each element, the diagonal elements Indicates the first The transfer function of the self-control input to its own temperature output for each temperature zone, i.e., the self-channel gain, can be obtained by adjusting the value of the first... The temperature range is identified by applying a control input of known amplitude and observing the temperature response, or by using the nominal thermal time constant. and steady-state gain Determined as: .

[0042] Optionally, the steps for calculating the optimal temperature trajectory for each temperature zone and the optimal opening trajectory for each distribution valve specifically include: Configure global optimization parameters; Based on the global optimization parameters, a minimization objective function is constructed for the discrete coupled dynamic constraint model of each temperature zone in the prediction time domain; Heat exchange power of each temperature zone and the opening degree of each distribution valve Using the total power consumption constraint, valve stroke rate of change constraint, temperature rate of change constraint and physical boundary constraint as decision variables, the minimum objective function is solved under the constraints of total power consumption, valve stroke rate of change, temperature rate of change and physical boundary constraints in the global optimization parameters; Output the optimal temperature trajectory for each temperature zone based on the solution results. And the optimal opening trajectory of each distribution valve .

[0043] In the technical solution of the embodiments of the present invention, the global optimization parameters include the total power consumption limit. Upper limit of travel change rate Maximum temperature variation range Time domain Temperature upper and lower limits for each temperature zone , the opening range of each temperature zone Nominal thermal time constants for each temperature zone Ambient reference temperature and the target temperature for each temperature zone. One or more of them.

[0044] Furthermore, in the step of constructing the minimization objective function of the discrete coupled dynamic constraint model for each temperature zone in the prediction time domain based on the global optimization parameters, the minimization objective function is used to solve for the minimum value of the sum of the weighted square sum of temperature deviations and the weighted square sum of total energy consumption for each temperature zone, which can be specifically expressed as: ; in, For the first The temperature deviation weighting coefficient for each temperature zone This is the weighting factor for heat exchange power and energy consumption. This is the weighting coefficient for valve energy consumption.

[0045] In the above implementation, the total power consumption constraint means that the system power consumption does not exceed the total power consumption upper limit configured in the global optimization parameters. ,Right now: .

[0046] at the same time, , and The following discrete coupled dynamics constraints must be satisfied: ; in, For the first The heat capacity of each temperature zone For the first Each temperature zone Coolant mass flow rate within each control cycle The inter-region thermal coupling time constant, To control the cycle length.

[0047] The valve stroke change rate constraint is used to ensure the smoothness of valve operation. During two control cycles, its change rate should satisfy the following: ; in The duration of one control cycle.

[0048] The temperature change rate constraint is used to limit the rate of temperature change, and its rate of change should satisfy the following during two control cycles: .

[0049] The physical boundary constraints include upper and lower temperature limits for each temperature zone, and opening range constraints for each temperature zone.

[0050] Optionally, the step of mapping the optimal temperature trajectory to decoupled setpoints for each temperature zone specifically includes: The optimal temperature trajectory Convert to frequency domain representation ; The inverse of the inter-regional coupling transfer matrix is ​​combined with the optimal temperature trajectory. Frequency domain representation Multiplication yields their matrix product. ; For the matrix product The decoupling setpoint is obtained by performing an inverse Laplace transform to convert it into a time-domain signal. .

[0051] Furthermore, the inverse matrix of the inter-regional coupling transfer matrix is ​​combined with the optimal temperature trajectory. Frequency domain representation Multiplication yields their matrix product. In the steps: ; in For the inter-region coupling transfer matrix The inverse matrix.

[0052] In this embodiment of the invention, it is assumed that in a single control cycle If the internal coupling characteristics remain approximately constant, then within each control cycle It can be viewed as a time-invariant transfer function. Specifically, in the... Within each control cycle, take Coupling transfer matrix at point Calculate its inverse matrix and perform the inverse Laplace transform to obtain the decoupling setpoint within this period.

[0053] Optionally, the step of generating collaborative scheduling instructions based on the optimal opening trajectory of each distribution valve in the shared cooling channel specifically includes: Based on the optimal opening trajectory Determine the first The target opening degree of each distribution valve Target opening rate of change Response time ; Construct the first Each distribution valve contains the target opening degree. Target opening rate of change and the response time Coordinated scheduling instructions ; Will Coordinated scheduling instructions for distribution valves in each temperature zone Packaged into a coordinated scheduling instruction package .

[0054] In some embodiments of the present invention, the first The target opening degree of each distribution valve for: ; Specifically, Indicates the current time. Indicates the current time The corresponding control cycle number, For the optimal temperature trajectory The Middle The optimal opening degree of the first distribution valve in the next control cycle, that is, in this embodiment, the first... The optimal opening degree of each distribution valve in the next control cycle The target opening at the current moment .

[0055] In some embodiments of the present invention, the first Response time of each distribution valve satisfy: ; in For the first The inherent minimum response time of each distribution valve For the pre-configured first The rate of change of the maximum opening of the first distribution valve, both reflect the first... The physical limits of each distribution valve; The first valve position detected by the valve position feedback sensor in the distributed sensor array The current actual opening degree of each distribution valve, wherein the valve position feedback sensor is arranged at the valve stem position of each distribution valve; In this embodiment, the first Response time of each distribution valve Used to indicate the first The time window size required for each distribution valve to complete this adjustment.

[0056] In some embodiments of the present invention, the first The target opening rate of each distribution valve satisfy: .

[0057] In some embodiments of the present invention, the first Coordinated scheduling instructions for individual distribution valves It can be represented as follows: .

[0058] Furthermore, in the Coordinated scheduling instructions for distribution valves in each temperature zone Packaged into a coordinated scheduling instruction package In the steps: .

[0059] Optionally, the control parameters include the heat exchange power of each temperature zone and the target opening degree of the local fine-tuning valve. The specific steps for calculating the control parameters of each temperature zone based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone include: Calculate the first Error signal for each temperature zone and disturbance estimation ; Based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone ; The total control signal The heat exchange power channel and the local fine-tuning valve channel are allocated to obtain the first Heat exchange power of each temperature zone and the target opening of the local fine-tuning valve .

[0060] In an embodiment of the present invention, the error signal It is the first The temperature zone in the first Decoupling setpoint within each control cycle Compared with the actual measured temperature The difference. The disturbance estimate It is the first The temperature zone in the first All equivalent disturbances that are not explicitly modeled within a control cycle.

[0061] Furthermore, in calculating the first Error signal for each temperature zone and disturbance estimation In the steps: ; ; in, For the first The temperature zone in the first Decoupling setpoint for each control cycle For the first The temperature zone in the first The actual measured temperature for each control cycle For the first Temperature state estimation for each control cycle For the first Temperature change rate estimation for each control cycle For the first The nominal thermal time constant for each temperature zone This is a reference temperature.

[0062] The nominal thermal time constant It is the first The first-order inertial parameter of the first temperature region is used to reflect the first... The magnitude of the thermal inertia of each temperature zone can be measured in advance. The slower the temperature response of a temperature zone, the greater its heat capacity, and thus its nominal thermal time constant. The larger the nominal thermal time constant, the faster the temperature response of a temperature range, indicating a smaller heat capacity. The smaller.

[0063] In an embodiment of the present invention, the first The temperature dynamic response model for each temperature zone is as follows: ; in For the first The heat capacity of each temperature zone For the first Coolant mass flow rate in each temperature zone This is the equivalent external disturbance.

[0064] In some embodiments, the reference temperature Each temperature zone can be taken at the first The average of the decoupled setpoints for each control cycle. Alternatively, an independent reference temperature can be configured for each temperature zone. And its value is pre-configured as the steady-state target temperature of the corresponding temperature zone.

[0065] In some embodiments of the present invention, the temperature state estimation and the estimated rate of temperature change It can be obtained through iterative calculation: ; ; in, The preset iteration step size, and For observer gain, and and The initial value is configured as follows: .

[0066] In some embodiments of the present invention, the observer gain and With the bandwidth of the extended state observer Relatedly, for example, the observer gain can be configured as follows: ; .

[0067] The extended state observer is a key component for implementing disturbance feedforward compensation. It consists of two first-order differential equations, and its gain is controlled by the observer. and Temperature state estimate Converging to the actual measured value The estimated rate of temperature change Converging to the actual rate of temperature change The bandwidth of the extended state observer This is a preset upper limit for the perturbation frequency; the lower the bandwidth, the longer the convergence time. The observer gain... and middle, Corrections applied to temperature state estimation Corrections applied to the estimation of the rate of temperature change.

[0068] The temperature state estimation The extended state observer is the first... The temperature zone in the first The actual temperature of each control cycle The online estimate of the temperature state estimate Through the observer gain Actual measured value The process is continuously refined until it converges to the true temperature. The estimated rate of temperature change... The extended state observer is the first... The temperature zone in the first Actual temperature change rate per control cycle The online estimate of the rate of temperature change. Through the observer gain Actual temperature change rate Continuous adjustments are made until the rate of temperature change converges to the true rate of change.

[0069] Optionally, based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone Before the steps, it also includes: Iterative calculation of the first The temperature zone in the first Online adaptive estimate for each control cycle and ; Calculate the filter correction factor: ; in, For the low-pass filter in the first The filter time constant for each temperature zone.

[0070] In the above embodiments, the filter time constant It reflects the first Closed-loop response speed for each temperature zone.

[0071] The filter correction factor The low-pass filter is in the first... The first temperature zone The equivalent correction amount for each control cycle, with a value range of (0,1). The filter correction factor... Acting on the main control signal This maps the continuous control law to a discrete period.

[0072] Furthermore, in the iterative calculation of the... The temperature zone in the first Online adaptive estimate for each control cycle and In the steps: ; ; in, and These are the preset upper and lower limits of the gain. and These are the preset upper and lower limits of the thermal time constant; and The adaptive learning rate is defined as follows: .

[0073] Similarly, the online adaptive estimate and The initial value is configured as follows: ; ; in and The first The preset initial values ​​for the nominal gain and nominal thermal time constant of each temperature zone.

[0074] Based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone In the steps: ; in This is a preset lower limit for the gain, used to prevent the control signal from diverging when the initial gain estimate is too small.

[0075] The total control signal It is the first The temperature zone in the first The comprehensive control output for each control cycle includes two physical execution channels: a heat exchange power channel and a local fine-tuning valve channel. The heat exchange power channel is the total control signal. The physical execution path assigned to a slow timescale corresponds to either a heating actuator or a cooling actuator. The local fine-tuning valve channel is the main control signal. The physical execution path assigned to the fast timescale corresponds to the local fine-tuning valve in this temperature zone.

[0076] Furthermore, in the case of the total control signal The heat exchange power channel and the local fine-tuning valve channel are allocated to obtain the first Heat exchange power of each temperature zone and the target opening of the local fine-tuning valve In the steps: ; ; in, For the first The basic heat exchange capacity of the temperature zone is the first Steady-state heat transfer power of each temperature zone under uncorrected conditions; For the first The basic valve opening for each temperature zone is the first... Each temperature zone locally fine-tunes the steady-state opening of the valve without correction. For the dimensionless coefficients of the power channel calibration, Dimensional coefficients for valve passages; For power channel allocation coefficients, Assign a valve channel allocation coefficient, and: .

[0077] heat exchange power It is the first The temperature zone in the first Within each control cycle, after heat exchange power channel allocation, anti-saturation, and rate limiting, the power value is finally sent to the heating actuator or cooling actuator. The target opening degree of the locally fine-tuned valve is also considered. It is the first The temperature zone in the first Within each control cycle, after local fine-tuning valve channel allocation, anti-saturation, and rate limiting, the final opening value of the local fine-tuning valve in this temperature zone is issued.

[0078] Optionally, the steps of controlling the temperature and flow rate of each temperature zone using the control parameters specifically include: The first Heat exchange power of each temperature zone Issued to the Heating or cooling actuators for each temperature zone; The first Local fine-tuning valve target opening for each temperature zone Issued to the Local fine-tuning valves for each temperature zone; The coordinated scheduling command is sent to the distribution valves of each temperature zone.

[0079] The heating actuator is an actuating element arranged in the local heat exchange circuit of each temperature zone to apply heat to the temperature zone, typically in the form of a resistance heating element, heating film, or heating rod. The cooling actuator is an actuating element arranged in the local heat exchange circuit of each temperature zone to remove heat from the temperature zone, typically in the form of a thermoelectric cooler, micro-refrigeration cycle, or phase change refrigeration. The output power of the heating actuator and the cooling actuator is controlled by a heat exchange power command.

[0080] The local fine-tuning valve is a small, electrically operated valve arranged in the local heat exchange loop of each temperature zone, used to finely adjust the coolant flow rate within its respective temperature zone. In this embodiment of the invention, the local fine-tuning valve is an actuator in the independent control loop of each temperature zone, and its scope of action is limited to the local heat exchange loop of that temperature zone. It is used to finely adjust the coolant flow rate within that temperature zone to accurately track the temperature of that zone in conjunction with the heat exchange power command. The adjustment range of the local fine-tuning valve is small, mainly used to compensate for local flow fluctuations and changes in heat exchange efficiency within the temperature zone.

[0081] The distribution valve is an electrically operated valve arranged between the main cooling channel and the branch channels of each temperature zone, used to adjust the flow distribution ratio of coolant among the branches. In this embodiment of the invention, the distribution valve is a control actuator for achieving active decoupling at the channel level. As a second degree of freedom of control independent of heat exchange power, it can actively counteract the thermal coupling effect between regions from the fluid source by changing the flow distribution ratio of each branch before thermal disturbance is transmitted to adjacent temperature zones.

[0082] Optionally, after the step of controlling the temperature and flow rate of each temperature zone using the control parameters, the method further includes: The target temperature is determined based on the optimal temperature trajectory of each temperature zone; The absolute value of the difference between the actual temperature and the target temperature in each temperature zone is compared with the preset accuracy threshold. Compare the rate of temperature change in each temperature zone with a preset rate threshold. When the absolute value of the difference between the actual temperature and the target temperature in all temperature zones is less than the preset accuracy threshold, and the temperature change rate is less than the preset rate threshold, the temperature control system will be switched to low-frequency monitoring mode.

[0083] Furthermore, in the step of determining the target temperature based on the optimal temperature trajectory of each temperature zone, the first... Each temperature zone in the current control cycle The target temperature is; .

[0084] In this embodiment of the invention, the low-frequency monitoring mode is the energy-saving and protection operation mode of the temperature control system after convergence. In the converged state, the temperature control system does not need to perform high-frequency global optimization and coupling / decoupling calculations, reducing the controller's computational load and power consumption, while also reducing the valve's operating frequency and extending its service life.

[0085] More specifically, when the absolute value of the difference between the actual temperature and the target temperature in all temperature zones is less than a preset accuracy threshold and the rate of temperature change is less than a preset rate threshold, the temperature control system determines that it has reached a convergence state and switches to a low-frequency operation mode. In this low-frequency monitoring mode, the controller's optimization solution frequency and coupling matrix update frequency are both reduced, maintaining only basic temperature monitoring and minor disturbance compensation.

[0086] Furthermore, when the absolute value of the difference between the actual temperature and the target temperature in any temperature zone is greater than the preset accuracy threshold, or the temperature change rate is greater than the preset rate threshold, the system switches from the low-frequency monitoring mode back to the high-frequency collaborative control mode, and returns to the execution of real-time acquisition of the status data of each flow channel node and subsequent steps.

[0087] like Figure 2As shown, a second aspect of the present invention proposes a multi-temperature zone cooperative control system oriented towards flow channel coupling, comprising a shared cooling flow channel, a distributed sensor array, and an actuator module. The shared cooling flow channel consists of cooling branches of several temperature zones and flow channel nodes at their intersections. The distributed sensors include temperature sensors, pressure sensors, and flow sensors arranged at the flow channel nodes of the shared cooling flow channel. The actuator module includes a group of regional heat exchange actuators, a group of local fine-tuning valves, and a group of distribution valves distributed in each temperature zone. The multi-temperature zone cooperative control system is configured to implement the multi-temperature zone cooperative control method oriented towards flow channel coupling as described in any of the first aspects of the present invention.

[0088] In an embodiment of the present invention, the zone heat exchange actuator group includes a heating actuator for generating heating energy and a cooling actuator for removing heat, for realizing thermal energy regulation of the temperature zone.

[0089] The local fine-tuning valve group includes at least one local fine-tuning valve arranged in the local cooling branch of each temperature zone for fine adjustment of coolant flow rate in a localized manner.

[0090] The distribution valve group includes independently controlled distribution valves connected between the main pipe of the shared cooling channel and the cooling branches of each temperature zone, which are used to actively regulate the coolant flow distribution of each temperature zone branch.

[0091] The multi-temperature zone collaborative control system also includes a central controller, which is configured to execute the real-time acquisition, coupling matrix update, global optimization solution, decoupling mapping, collaborative scheduling instruction generation and control parameter calculation steps in the multi-temperature zone collaborative control method oriented towards flow channel coupling, and to send control instructions to each actuator through a communication bus.

[0092] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0093] As described above, these embodiments of the present invention do not exhaustively cover all details, nor do they limit the invention to the specific embodiments described. Clearly, many modifications and variations can be made based on the above description. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to effectively utilize the invention and its modifications. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A multi-temperature zone collaborative control method for flow channel coupling, characterized in that, include: The status data of each flow channel node in the shared cooling channel is collected in real time, including real-time temperature, pressure and flow data; Update the inter-regional coupling transfer matrix between each temperature zone based on the state data of each flow channel node; Calculate the optimal temperature trajectory for each temperature zone and the optimal opening trajectory for each distribution valve; The optimal temperature trajectory is mapped to decoupled setpoints for each temperature zone; Cooperative scheduling instructions are generated based on the optimal opening trajectory of each distribution valve in the shared cooling channel; Calculate the control parameters for each temperature zone based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone. The temperature and flow rate of each temperature zone are controlled by the aforementioned control parameters.

2. The multi-temperature zone cooperative control method for flow channel coupling according to claim 1, characterized in that, The specific steps for updating the inter-regional coupling transfer matrix between each temperature zone based on the state data of each flow channel node include: For any two temperature zones and Obtain the first historical observation within the time window The state disturbance signal of each temperature zone and the Response signal of each temperature zone ; Based on the state disturbance signal and the response signal Construct the input data matrix and output data matrix ; The input data matrix and the output data matrix Construct as containing A region coupling transfer matrix with 1 element.

3. The multi-temperature zone cooperative control method for flow channel coupling according to claim 2, characterized in that, The specific steps for calculating the optimal temperature trajectory for each temperature zone and the optimal opening trajectory for each distribution valve include: Configure global optimization parameters; Based on the global optimization parameters, a minimization objective function is constructed for the discrete coupled dynamic constraint model of each temperature zone in the prediction time domain; Heat exchange power of each temperature zone and the opening degree of each distribution valve Using the total power consumption constraint, valve stroke rate of change constraint, temperature rate of change constraint and physical boundary constraint as decision variables, the minimum objective function is solved under the constraints of total power consumption, valve stroke rate of change, temperature rate of change and physical boundary constraints in the global optimization parameters; Output the optimal temperature trajectory for each temperature zone based on the solution results. And the optimal opening trajectory of each distribution valve .

4. The multi-temperature zone cooperative control method for flow channel coupling according to claim 3, characterized in that, The specific steps of mapping the optimal temperature trajectory to decoupled setpoints for each temperature zone include: The optimal temperature trajectory Convert to frequency domain representation ; The inverse of the inter-regional coupling transfer matrix is ​​combined with the optimal temperature trajectory. Frequency domain representation Multiplication yields their matrix product. ; For the matrix product The decoupling setpoint is obtained by performing an inverse Laplace transform to convert it into a time-domain signal. 。 5. The multi-temperature zone cooperative control method for flow channel coupling according to claim 4, characterized in that, The steps for generating collaborative scheduling instructions based on the optimal opening trajectories of each distribution valve in the shared cooling channel specifically include: Based on the optimal opening trajectory Determine the first The target opening degree of each distribution valve Target opening rate of change Response time ; Construct the first Each distribution valve contains the target opening degree. Target opening rate of change and the response time Coordinated scheduling instructions ; Will Coordinated scheduling instructions for distribution valves in each temperature zone Packaged into a coordinated scheduling instruction package .

6. The multi-temperature zone cooperative control method for flow channel coupling according to claim 1, characterized in that, The control parameters include the heat exchange power of each temperature zone and the target opening degree of the local fine-tuning valve. The specific steps for calculating the control parameters of each temperature zone based on the decoupling setpoint and the real-time temperature of the corresponding temperature zone include: Calculate the first Error signal for each temperature zone and disturbance estimation ; Based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone ; The total control signal The heat exchange power channel and the local fine-tuning valve channel are allocated to obtain the first Heat exchange power of each temperature zone and the target opening of the local fine-tuning valve .

7. The multi-temperature zone cooperative control method for flow channel coupling according to claim 6, characterized in that, Based on the error signal and the disturbance estimation Calculate the first The overall control signal for each temperature zone Before the steps, it also includes: Iterative calculation of the first The temperature zone in the first Online adaptive estimate for each control cycle and ; Calculate the filter correction factor: ； in, For the low-pass filter in the first The filter time constant for each temperature zone.

8. The multi-temperature zone cooperative control method for flow channel coupling according to claim 6, characterized in that, The steps for controlling the temperature and flow rate of each temperature zone using the aforementioned control parameters specifically include: The first Heat exchange power of each temperature zone Issued to the Heating or cooling actuators for each temperature zone; The first Local fine-tuning valve target opening for each temperature zone Issued to the Local fine-tuning valves for each temperature zone; The coordinated scheduling command is sent to the distribution valves of each temperature zone.

9. The multi-temperature zone cooperative control method for flow channel coupling according to claim 1, characterized in that, After the step of controlling the temperature and flow rate of each temperature zone using the control parameters, the method further includes: The target temperature is determined based on the optimal temperature trajectory of each temperature zone; The absolute value of the difference between the actual temperature and the target temperature in each temperature zone is compared with the preset accuracy threshold. Compare the rate of temperature change in each temperature zone with a preset rate threshold. When the absolute value of the difference between the actual temperature and the target temperature in all temperature zones is less than the preset accuracy threshold, and the temperature change rate is less than the preset rate threshold, the temperature control system will be switched to low-frequency monitoring mode.

10. A multi-temperature zone cooperative control system for flow channel coupling, characterized in that, The system includes a shared cooling channel, a distributed sensor array, and an actuator module. The shared cooling channel consists of cooling branches in several temperature zones and channel nodes at their intersections. The distributed sensors include temperature sensors, pressure sensors, and flow sensors arranged at the channel nodes of the shared cooling channel. The actuator module includes a group of zone heat exchange actuators, a group of local fine-tuning valves, and a group of distribution valves distributed in each temperature zone. The multi-temperature zone cooperative control system is configured to implement the multi-temperature zone cooperative control method oriented towards channel coupling as described in any one of claims 1-9.

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