Ion beam polisher magnetic type quick-change diaphragm neutralizer

Abstract

This invention relates to the field of ion beam polishing equipment technology, and discloses a magnetically attached quick-change aperture neutralizer for an ion beam polishing machine, comprising a neutralizer body, a magnetically attached positioning component, and an aperture assembly. The aperture assembly includes a carbon aperture and a permalloy positioning ring. The magnetically attached positioning component includes a samarium cobalt magnet, a permalloy cooling ring, an oxygen-free copper connecting cover, and a cooling water pipe. The permalloy positioning ring and the permalloy cooling ring are respectively provided with mutually mating conical mating surfaces. The aperture assembly is attracted to the magnetically attached positioning component under the magnetic attraction of the samarium cobalt magnet on the permalloy positioning ring, and the conical mating surfaces position the aperture hole relative to the beam channel of the neutralizer body. The cylindrical part of the carbon aperture sequentially passes through the corresponding through holes of the permalloy positioning ring, the permalloy cooling ring, and the oxygen-free copper connecting cover. The cooling water pipe is connected to the permalloy cooling ring. This invention improves the convenience of aperture assembly replacement and the stability of repeated installation positioning.

Description

Technical Field

[0001] This invention relates to the field of ion beam polishing equipment technology, and specifically to a magnetic quick-change aperture neutralizer for an ion beam polishing machine. Background Technology

[0002] Ion beam polishing machines typically utilize an ion source to generate an ion beam with specific energy and shape to reshape optical components, precision parts, or other surfaces to be processed. Radio frequency ion sources usually require the use of a neutralizer during operation to neutralize the space charge of the ion beam, thereby ensuring the stability of the ion beam polishing process.

[0003] In ion beam polishing, apertures are used to limit or adjust the beam passage area. Different processing tasks, beam spot sizes, or process parameters may require different aperture specifications. Existing neutralizer front-end apertures typically require mechanical fixing structures to be installed on the neutralizer body or neutralizer front-end connectors, making the assembly and disassembly process cumbersome. Furthermore, after repeated assembly and disassembly, the position of the aperture aperture relative to the beam channel of the neutralizer body is prone to deviation, affecting the positioning stability of the aperture after repeated installation.

[0004] While using a standard magnetic attraction structure for quick aperture replacement improves ease of assembly and disassembly, the primary function of a standard magnetic connection is adsorption and retention, making it difficult to guarantee the repeatability of the aperture's positioning relative to the beam channel. Furthermore, the presence of heating components such as tungsten filaments and electrodes near the radio frequency ion source neutralizer, coupled with the weak air convection and gas heat conduction in a high-vacuum environment, makes the permanent magnet susceptible to magnetic attenuation due to high temperatures. Additionally, the absence of a corresponding magnetically conductive or magnetically confined structure when the permanent magnet is positioned near the beam channel can negatively impact the working area in that region.

[0005] Therefore, it is necessary to provide an aperture quick-change structure that is adapted to the operating environment of the radio frequency ion source neutralizer of the ion beam polishing machine. This structure can achieve detachable magnetic connection of the aperture assembly, ensure the positioning stability of the aperture hole relative to the beam channel, and reduce the adverse effects of the high temperature environment of the neutralizer and the magnetic field distribution of the permanent magnet on the stable operation of the aperture quick-change structure. Summary of the Invention

[0006] Therefore, the purpose of this invention is to overcome the above-mentioned technical problems and provide a magnetic quick-change aperture neutralizer for an ion beam polishing machine; A magnetic quick-change aperture neutralizer for an ion beam polishing machine includes a neutralizer body, a magnetic positioning component, and an aperture component. The magnetic positioning component is installed on the neutralizer body, and the aperture component is detachably connected to the magnetic positioning component; The aperture assembly includes a carbon aperture and a permalloy positioning ring fixedly connected to the carbon aperture. The carbon aperture is provided with an aperture hole for the ion beam to pass through. The magnetic positioning assembly includes a samarium cobalt magnet, a permalloy cooling ring, an oxygen-free copper connecting cover, and a cooling water pipe. The oxygen-free copper connecting cover is installed on the neutralizer body, the permalloy cooling ring is installed on the oxygen-free copper connecting cover, the samarium cobalt magnet is disposed on the permalloy cooling ring, and the cooling water pipe is connected to the permalloy cooling ring. The permalloy positioning ring has a first conical mating surface on the side near the permalloy cooling ring, and the permalloy cooling ring has a second conical mating surface on the side near the permalloy positioning ring. When the aperture assembly is attracted to the magnetic positioning assembly by the magnetic attraction of the samarium cobalt magnet to the permalloy positioning ring, the first tapered mating surface and the second tapered mating surface fit together to position the aperture hole relative to the beam channel of the neutralizer body.

[0007] The adsorption end of the samarium cobalt magnet is positioned toward the permalloy positioning ring. The samarium cobalt magnet is used to apply a magnetic attraction force along the axial direction of the beam channel to the permalloy positioning ring, so that the first tapered mating surface is pressed against the second tapered mating surface.

[0008] The carbon aperture includes a cylindrical portion extending along the beam direction and a radial flange disposed at one end of the cylindrical portion. The aperture hole is disposed through the cylindrical portion along the axial direction. When the aperture assembly is attracted to the magnetic positioning assembly, the cylindrical portion is sequentially inserted into the corresponding through holes of the permalloy positioning ring, the permalloy cooling ring, and the oxygen-free copper connecting cover.

[0009] The carbon aperture and the permalloy positioning ring are fixedly connected by fasteners.

[0010] The outer circumferential surface of the permalloy positioning ring is provided with an annular groove, which extends along the circumference of the permalloy positioning ring.

[0011] There are multiple samarium cobalt magnets, which are arranged at circumferential intervals along the permalloy cooling ring.

[0012] The permalloy cooling ring is provided with magnet mounting holes spaced apart along the circumference, and multiple samarium cobalt magnets are respectively embedded in the corresponding magnet mounting holes.

[0013] The permalloy cooling ring at least partially surrounds the samarium cobalt magnet; when the aperture assembly and the magnetic positioning assembly are attracted together, the permalloy positioning ring and the permalloy cooling ring are in direct contact and form a continuous magnetic conductive structure.

[0014] The oxygen-free copper connecting cover has a through hole corresponding to the beam channel, and the permalloy cooling ring is installed on the side of the oxygen-free copper connecting cover near the aperture assembly.

[0015] The cooling water pipe includes a bent pipe section extending along the outer periphery of the permalloy cooling ring, and the bent pipe section is welded to the permalloy cooling ring.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects: 1. The present invention detachably connects the aperture assembly to the magnetic positioning assembly, and achieves the attraction between the aperture assembly and the magnetic positioning assembly by the magnetic attraction of the permalloy positioning ring by the samarium cobalt magnet, which can improve the ease of disassembly and assembly of the aperture assembly and facilitate the replacement of the aperture assembly according to the requirements of the ion beam polishing process.

[0017] 2. In this invention, a first conical mating surface is provided on the side of the permalloy positioning ring near the permalloy cooling ring, and a second conical mating surface is provided on the side of the permalloy cooling ring near the permalloy positioning ring. When the aperture assembly is engaged, the first conical mating surface and the second conical mating surface fit together, which can position the aperture hole relative to the beam channel of the neutralizer body, thereby improving the positioning stability of the aperture assembly after repeated installation.

[0018] 3. The adsorption end of the samarium cobalt magnet of the present invention is oriented towards the permalloy positioning ring, which can apply a magnetic attraction force along the beam channel axis to the permalloy positioning ring, so that the first conical mating surface is pressed against the second conical mating surface, thereby combining the magnetic attraction holding effect with the conical surface positioning effect, avoiding the problem of insufficient positioning stability of simple magnetic attraction connection.

[0019] 4. The carbon aperture of the present invention includes a cylindrical portion extending along the beam direction. When the aperture assembly and the magnetic positioning assembly are attracted together, the cylindrical portion is sequentially inserted into the corresponding through holes of the permalloy positioning ring, the permalloy cooling ring and the oxygen-free copper connecting cover, so that the carbon aperture, the permalloy positioning ring, the permalloy cooling ring and the oxygen-free copper connecting cover form a stable assembly relationship along the beam direction.

[0020] 5. In this invention, a samarium cobalt magnet is placed on a permalloy cooling ring, and the permalloy cooling ring at least partially surrounds the samarium cobalt magnet. When the aperture assembly and the magnetic positioning assembly are attracted, the permalloy positioning ring and the permalloy cooling ring are in direct contact and form a continuous magnetic conductive structure, which is beneficial for constraining the magnetic circuit distribution in the area where the samarium cobalt magnet is located and reducing the risk of adverse effects on the working area near the beam channel when the permanent magnet is placed at the front end of the neutralizer.

[0021] 6. The present invention connects the cooling water pipe to the permalloy cooling ring and extends the bent section of the cooling water pipe along the outer periphery of the permalloy cooling ring. This allows the permalloy cooling ring to conduct heat to the area where the samarium cobalt magnet is located, thereby reducing the impact of the high-temperature environment of the neutralizer on the magnetic stability of the samarium cobalt magnet.

[0022] 7. The present invention uses an oxygen-free copper connecting cover as the connection support structure between the permalloy cooling ring and the neutralizer body, and the oxygen-free copper connecting cover has through holes corresponding to the beam channel, which can ensure structural support and thermal conductivity while avoiding the introduction of ferromagnetic support components near the beam channel. Attached Figure Description

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a side view of the present invention; Figure 3 This is a cross-sectional view of the present invention; Figure 4 This is an exploded view of the present invention; Figure 5 This is a schematic diagram illustrating the principle of the magnetic conductive path around the samarium cobalt magnet in this invention.

[0025] Explanation of reference numerals in the attached figures: 1. Carbon aperture; 2. Permalloy positioning ring; 3. Samarium cobalt magnet; 4. Permalloy cooling ring; 5. Oxygen-free copper connecting cover; 6. Cooling water pipe; 7. Neutralizer body. Detailed Implementation

[0026] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0030] like Figures 1 to 4 As shown, this embodiment provides a magnetic quick-change aperture neutralizer for an ion beam polishing machine, including a neutralizer body 7, a magnetic positioning component, and an aperture assembly. The magnetic positioning component is installed on the neutralizer body 7, and the aperture assembly is detachably connected to the magnetic positioning component. The neutralizer body 7 has a beam channel for the ion beam to pass through, and the aperture assembly is provided with an aperture hole corresponding to the beam channel.

[0031] The aperture assembly includes a carbon aperture 1 and a permalloy positioning ring 2. The carbon aperture 1 is made of carbon material and has an aperture hole for the ion beam to pass through. The carbon aperture 1 is fixedly connected to the permalloy positioning ring 2, allowing the carbon aperture 1 to be disassembled and reassembled as a whole with the permalloy positioning ring 2. In one specific embodiment, the carbon aperture 1 and the permalloy positioning ring 2 are locked together by screws or other fasteners, thus forming an aperture assembly that can be removed, placed, and replaced as a whole.

[0032] The carbon aperture 1 includes a cylindrical portion extending along the beam direction and a radial flange disposed at one end of the cylindrical portion. The aperture hole is axially penetrating the cylindrical portion. The cylindrical portion can form a beam-limiting channel with a certain axial length, and the radial flange can serve as a limiting structure or connecting structure when the carbon aperture 1 is connected to the permalloy positioning ring 2. The permalloy positioning ring 2, the permalloy cooling ring 4, and the oxygen-free copper connecting cover 5 are respectively provided with through holes corresponding to the cylindrical portion of the carbon aperture 1. When the aperture assembly is attracted to the magnetic positioning assembly, the cylindrical portion of the carbon aperture 1 is sequentially inserted into the corresponding through holes of the permalloy positioning ring 2, the permalloy cooling ring 4, and the oxygen-free copper connecting cover 5, so that the aperture hole corresponds to the beam channel of the neutralizer body 7 along the beam direction.

[0033] The outer circumferential surface of the permalloy positioning ring 2 is provided with an annular groove, which extends circumferentially along the permalloy positioning ring 2. The annular groove can be used to form a clearance space on the outer circumference of the permalloy positioning ring 2, or it can serve as a structural area for picking up, placing, clamping, or identifying the assembly position of the aperture assembly. This annular groove does not affect the tapered fit positioning between the permalloy positioning ring 2 and the permalloy cooling ring 4.

[0034] The magnetic positioning assembly includes a samarium cobalt magnet 3, a permalloy cooling ring 4, an oxygen-free copper connecting cover 5, and a cooling water pipe 6. The oxygen-free copper connecting cover 5 is installed on the neutralizer body 7, the permalloy cooling ring 4 is installed on the oxygen-free copper connecting cover 5, the samarium cobalt magnet 3 is located on the permalloy cooling ring 4, and the cooling water pipe 6 is connected to the permalloy cooling ring 4.

[0035] In one specific embodiment, a samarium cobalt magnet 3 is embedded in a permalloy cooling ring 4, which is fixed to the side of the oxygen-free copper connecting cover 5 near the aperture assembly by screws or other fasteners, thereby forming a magnetic positioning assembly. The oxygen-free copper connecting cover 5 is installed on the neutralizer body 7, and the magnetic positioning assembly can be locked and fixed to the neutralizer body 7 by screws or other fasteners. Furthermore, a mutually cooperating conical mounting structure can be provided between the magnetic positioning assembly and the neutralizer body 7 to achieve repeated installation and positioning of the magnetic positioning assembly relative to the neutralizer body 7 through conical contact.

[0036] The oxygen-free copper connecting cover 5 has through holes corresponding to the beam channel, and the permalloy cooling ring 4 is installed on the side of the oxygen-free copper connecting cover 5 near the aperture assembly. The oxygen-free copper connecting cover 5 serves as a connecting support between the magnetic positioning assembly and the neutralizer body 7, and it can be made of oxygen-free copper. Oxygen-free copper has good thermal conductivity and low magnetic permeability, which can ensure structural support and thermal conductivity while avoiding the introduction of ferromagnetic support components near the beam channel. The carbon aperture 1 is also located in the beam passage area, and its use of carbon material also helps to reduce the adverse effects on the magnetic field environment near the beam channel.

[0037] In one specific embodiment, the conical surface of the oxygen-free copper connecting cover 5 is provided with a plurality of circumferentially spaced through holes. These through holes communicate with the internal discharge region or electron release region of the neutralizer, allowing neutralized electrons to pass through and be released into the beam region. By providing multiple circumferentially spaced through holes, the effective electron release area can be increased, enabling the neutralizer to output a larger electron current. Simultaneously, dispersing the electron current across multiple through holes reduces the current density near individual through holes, decreasing the risk of sputtering or ablation due to excessively high current density in a single hole, thereby extending the neutralizer's lifespan.

[0038] Furthermore, the multiple through holes can maintain the gas pressure required for discharge inside the neutralizer while reducing the probability of high-energy ions in the beam reversing into the neutralizer, thereby reducing sputtering damage of ions to the electrodes and walls inside the neutralizer.

[0039] Furthermore, the multiple through holes are distributed circumferentially, which helps to improve the circumferential uniformity of electron release locations and improve the plasma density distribution inside the neutralizer, making it easier to maintain radio frequency discharge, thereby improving the operating stability of the neutralizer under different flow and power conditions.

[0040] The permalloy cooling ring 4 is provided with mounting areas for installing samarium cobalt magnets 3. In one specific embodiment, there are multiple samarium cobalt magnets 3, which are arranged at circumferential intervals along the permalloy cooling ring 4. The permalloy cooling ring 4 is provided with magnet mounting holes distributed at circumferential intervals, and the multiple samarium cobalt magnets 3 are respectively embedded in the corresponding magnet mounting holes. The adsorption ends of the samarium cobalt magnets 3 are positioned towards the permalloy positioning ring 2, so that the samarium cobalt magnets 3 can apply a magnetic attraction force to the permalloy positioning ring 2 along the beam channel axis.

[0041] The permalloy positioning ring 2 has a first conical mating surface on the side near the permalloy cooling ring 4, and the permalloy cooling ring 4 has a second conical mating surface on the side near the permalloy positioning ring 2. When the aperture assembly and the magnetic positioning assembly are attracted, the samarium cobalt magnet 3 exerts a magnetic attraction on the permalloy positioning ring 2. Under the action of the magnetic attraction, the permalloy positioning ring 2 moves closer to the permalloy cooling ring 4, causing the first conical mating surface and the second conical mating surface to come into contact with each other. After the first conical mating surface and the second conical mating surface come into contact, the radial and axial positions of the aperture assembly can be restricted, thereby positioning the aperture hole of the carbon aperture 1 relative to the beam channel of the neutralizer body 7.

[0042] Compared to simple planar magnetic attraction, this embodiment utilizes both magnetic attraction and a tapered mating surface. The samarium-cobalt magnet 3 provides axial attraction between the aperture assembly and the magnetic positioning assembly, while the first and second tapered mating surfaces provide radial positioning. This allows for rapid assembly and disassembly of the aperture assembly, while maintaining a stable position relative to the beam channel even after multiple assembly and disassembly cycles. In one experimental verification method, the ion source can be fixed, and the aperture assembly can be manually assembled and disassembled multiple times. A laser tracker is used to measure the repeated installation positions of the aperture assembly. Through repeated assembly and disassembly measurements, the repeatability of the aperture assembly under the combined action of the tapered mating surface and magnetic attraction can be verified.

[0043] like Figure 5 As shown, the permalloy cooling ring 4 at least partially surrounds the samarium cobalt magnet 3. When the aperture assembly and the magnetic positioning assembly are engaged, the permalloy positioning ring 2 and the permalloy cooling ring 4 are in direct contact and form a continuous magnetically conductive structure. Both the permalloy positioning ring 2 and the permalloy cooling ring 4 are ring-shaped pieces made of highly permeable materials, and their contact provides a low magnetic reluctance magnetically conductive path for the area where the samarium cobalt magnet 3 is located. Therefore, some of the magnetic field lines generated by the samarium cobalt magnet 3 can be conducted through the permalloy cooling ring 4 and the permalloy positioning ring 2, which helps to constrain the magnetic field distribution of the magnetic attraction structure while ensuring the magnetic attraction connection force, reducing the risk of magnetic field diffusion to the vicinity of the beam channel. In one specific embodiment, both the permalloy positioning ring 2 and the permalloy cooling ring 4 are made of 1J79 permalloy. 1J79 permalloy has high initial permeability and low coercivity, is easily magnetized, and can conduct magnetic field lines, making it suitable for use as a magnetically conductive or magnetically shielding material. The Curie point of 1J79 permalloy is higher than the normal operating temperature of the neutralizer, making it suitable for use as a magnetic ring in the thermal environment near the neutralizer.

[0044] Cooling water pipe 6 is connected to permalloy cooling ring 4. In one specific embodiment, cooling water pipe 6 can be made of 316 stainless steel. Cooling water pipe 6 includes a bent pipe section extending along the outer periphery of permalloy cooling ring 4, and the bent pipe section is welded to permalloy cooling ring 4. When the cooling medium flows through cooling water pipe 6, it can carry away the heat in the vicinity of samarium cobalt magnet 3 through permalloy cooling ring 4, thereby reducing the degree to which samarium cobalt magnet 3 is affected by the high temperature environment of the neutralizer.

[0045] When the radio frequency ion source neutralizer is working, there are heat-generating components such as tungsten filaments near the neutralizer. Simultaneously, in a high vacuum environment, due to the lack of air medium, heat convection and gas heat conduction are weak, making it difficult for the area where the permanent magnet is located to effectively dissipate heat through air convection. By connecting the cooling water pipe 6 to the permalloy cooling ring 4, the permalloy cooling ring 4 can be conductively cooled, thereby reducing the temperature of the area where the samarium cobalt magnet 3 is located, allowing the samarium cobalt magnet 3 to maintain relatively stable magnetic attraction performance during long-term operation.

[0046] In one specific embodiment, the samarium cobalt magnet 3 can be a 2:17 type samarium cobalt magnet, i.e., Sm2Co 17 Samarium cobalt magnets. These types of samarium cobalt magnets have high temperature resistance, making them suitable for high-temperature operating environments near neutralizers. By using samarium cobalt magnets 3 in conjunction with permalloy cooling rings 4 and cooling water pipes 6, the risk of magnetic attraction attenuation due to high-temperature environments can be reduced.

[0047] In one specific embodiment, the quantity and specifications of the samarium cobalt magnets 3 can be determined according to the following relationship: F min ≤ n·F a (T) ≤ F max ; Among them, F min To ensure reliable attraction of the aperture assembly and the minimum adsorption force required to stably fit the first and second conical mating surfaces, where n is the number of samarium cobalt magnets 3, F a (T) represents the effective adsorption force of a single samarium cobalt magnet 3 on the permalloy positioning ring 2 at the operating temperature T and under actual assembly conditions, and F represents the effective adsorption force of the magnet 3 on the permalloy positioning ring 2. max To allow for manual disassembly without damaging the carbon aperture 1, permalloy positioning ring 2, and permalloy cooling ring 4, the maximum adsorption force is required.

[0048] By making n·F a (T) is not less than F min This ensures that the permalloy positioning ring 2 is stably attracted to the permalloy cooling ring 4 under magnetic attraction, and that the first tapered mating surface and the second tapered mating surface remain in contact; by making n·F a (T) is not greater than F max This can avoid the difficulty in disassembling the aperture assembly due to excessive magnetic attraction, or the impact damage to the carbon aperture 1, permalloy positioning ring 2 and permalloy cooling ring 4 during the disassembly process.

[0049] Among them, the effective adsorption force F of a single samarium cobalt magnet 3 a (T) can be determined through the adsorption force parameters provided by the magnet manufacturer, pull-out force tests at operating temperature, or adsorption force tests in the prototype assembly state. Since the samarium cobalt magnet 3 is embedded within the permalloy cooling ring 4, and the permalloy positioning ring 2 and the permalloy cooling ring 4 are in direct contact and form a continuous magnetic conductive structure after the aperture assembly is engaged, therefore F a (T) represents the actual effective adsorption force of the samarium cobalt magnet 3 on the permalloy positioning ring 2 under the above-mentioned assembly structure and operating temperature conditions.

[0050] In one operational verification method, after the ion source has been operating continuously for a predetermined time, the temperature of the neutralizer or the region near the samarium cobalt magnet can be measured under both uncooled and water-cooled conditions. Measurements showed that after approximately 50 hours of ion source operation, the highest temperature of the neutralizer under uncooled conditions reached approximately 220°C. After water cooling via the cooling water pipe 6, the highest temperature was reduced to approximately 120°C. This demonstrates that the cooling water pipe 6, in conjunction with the permalloy cooling ring 4, effectively improves the thermal environment near the samarium cobalt magnet 3, thereby contributing to the long-term operational stability of the magnetic positioning assembly.

[0051] During assembly, the carbon aperture 1 and the permalloy positioning ring 2 can be locked and fixed with screws and other fasteners to form an aperture assembly; the samarium cobalt magnet 3 can be embedded or fixed to the permalloy cooling ring 4, the permalloy cooling ring 4 can be installed to the oxygen-free copper connecting cover 5, and the cooling water pipe 6 can be welded to the permalloy cooling ring 4 to form a magnetic positioning assembly; then the magnetic positioning assembly can be installed to the neutralizer body 7 and locked and fixed with fasteners.

[0052] When installing an aperture assembly, move it to the front of the magnetic positioning assembly. Under the magnetic attraction of the samarium cobalt magnet 3, the permalloy positioning ring 2 approaches the permalloy cooling ring 4, and the first conical mating surface mates with the second conical mating surface, completing the attraction and positioning of the aperture assembly. When replacing the aperture assembly, overcome the magnetic force of the samarium cobalt magnet 3 to remove it from the magnetic positioning assembly, and then attach another aperture assembly of a different specification to the magnetic positioning assembly. Different specifications of aperture assemblies can have different aperture aperture sizes to meet the requirements of different ion beam polishing processes.

[0053] The neutralizer provided in this embodiment achieves quick replacement of the aperture assembly via magnetic attraction, positions the aperture assembly relative to the beam channel via a tapered mating surface, forms a continuous magnetically conductive structure through a permalloy positioning ring 2 and a permalloy cooling ring 4, and cools the area where the samarium cobalt magnet 3 is located via a cooling water pipe 6. Therefore, this neutralizer can better meet the high vacuum, high temperature, and beam stability requirements of the RF ion source in an ion beam polishing machine.

[0054] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A magnetic quick-change aperture neutralizer for an ion beam polishing machine, characterized in that, Includes the neutralizer body (7), magnetic positioning assembly, and aperture assembly; The magnetic positioning component is installed on the neutralizer body (7), and the aperture component is detachably connected to the magnetic positioning component; The aperture assembly includes a carbon aperture (1) and a permalloy positioning ring (2) fixedly connected to the carbon aperture (1). The carbon aperture (1) is provided with an aperture hole for the ion beam to pass through. The magnetic positioning assembly includes a samarium cobalt magnet (3), a permalloy cooling ring (4), an oxygen-free copper connecting cover (5), and a cooling water pipe (6). The oxygen-free copper connecting cover (5) is installed on the neutralizer body (7), the permalloy cooling ring (4) is installed on the oxygen-free copper connecting cover (5), the samarium cobalt magnet (3) is disposed on the permalloy cooling ring (4), and the cooling water pipe (6) is connected to the permalloy cooling ring (4). The permalloy positioning ring (2) has a first conical mating surface on the side near the permalloy cooling ring (4), and the permalloy cooling ring (4) has a second conical mating surface on the side near the permalloy positioning ring (2). When the aperture assembly is attracted to the magnetic positioning assembly under the magnetic attraction of the samarium cobalt magnet (3) to the permalloy positioning ring (2), the first conical mating surface and the second conical mating surface fit together to position the aperture hole relative to the beam channel of the neutralizer body (7).

2. The magnetic quick-change aperture neutralizer for ion beam polishing machines according to claim 1, characterized in that, The adsorption end of the samarium cobalt magnet (3) is positioned toward the permalloy positioning ring (2). The samarium cobalt magnet (3) is used to apply a magnetic attraction force along the axial direction of the beam channel to the permalloy positioning ring (2) so that the first conical mating surface is pressed against the second conical mating surface.

3. The magnetic quick-change aperture neutralizer for an ion beam polisher according to claim 1, characterized in that, The carbon aperture (1) includes a cylindrical portion extending along the beam direction and a radial flange disposed at one end of the cylindrical portion. The aperture hole is disposed through the cylindrical portion along the axial direction. When the aperture assembly is attracted to the magnetic positioning assembly, the cylindrical portion is sequentially inserted into the corresponding through holes of the permalloy positioning ring (2), the permalloy cooling ring (4), and the oxygen-free copper connecting cover (5).

4. The magnetic quick-change aperture neutralizer for an ion beam polisher according to claim 1, characterized in that, The carbon aperture (1) and the permalloy positioning ring (2) are fixedly connected by fasteners.

5. The magnetic quick-change aperture neutralizer for an ion beam polisher according to claim 1, characterized in that, The outer circumferential surface of the permalloy positioning ring (2) is provided with an annular groove, which extends along the circumference of the permalloy positioning ring (2).

6. The magnetic quick-change aperture neutralizer for an ion beam polisher according to claim 1, characterized in that, There are multiple samarium cobalt magnets (3), and the multiple samarium cobalt magnets (3) are arranged at intervals along the circumference of the permalloy cooling ring (4).

7. The magnetic quick-change aperture neutralizer for an ion beam polisher according to claim 6, characterized in that, The permalloy cooling ring (4) is provided with magnet mounting holes spaced apart along the circumference, and multiple samarium cobalt magnets (3) are respectively embedded in the corresponding magnet mounting holes.

8. The magnetic quick-change aperture neutralizer for an ion beam polishing machine according to claim 1, characterized in that, The permalloy cooling ring (4) at least partially surrounds the samarium cobalt magnet (3); when the aperture assembly and the magnetic positioning assembly are attracted together, the permalloy positioning ring (2) and the permalloy cooling ring (4) are in direct contact and form a continuous magnetic conductive structure.

9. The magnetic quick-change aperture neutralizer for an ion beam polishing machine according to claim 1, characterized in that, The oxygen-free copper connecting cover (5) has a through hole corresponding to the beam channel, and the permalloy cooling ring (4) is installed on the side of the oxygen-free copper connecting cover (5) near the aperture assembly.

10. The magnetic quick-change aperture neutralizer for an ion beam polishing machine according to claim 1, characterized in that, The cooling water pipe (6) includes a bent pipe section extending along the outer periphery of the permalloy cooling ring (4), and the bent pipe section is welded to the permalloy cooling ring (4).

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