Method and device for changing the liquid in a wet process plant liquid tank and wet process plant

Abstract

This application provides a method, apparatus, and wet processing equipment for changing the liquid in the chemical tanks of a wet processing plant. When the cumulative usage time of any chemical tank reaches a preset lifespan threshold, a first liquid change trigger signal is generated for the corresponding chemical tank. When the current system time of the industrial control computer reaches a preset fixed time point, a second liquid change trigger signal is generated for the corresponding chemical tank. Based on the generated liquid change trigger signals, the corresponding chemical tank is controlled to perform a liquid change operation, and the cumulative usage time of the corresponding chemical tank is reset after the liquid change is completed. If the second liquid change trigger signal is not generated at the preset fixed time point, the cumulative usage time is monitored after the wet processing equipment malfunction is resolved. When the cumulative usage time reaches the preset lifespan threshold again, the first liquid change trigger signal is generated, and a liquid change operation is performed based on this. This solves the problem of chaotic and unpredictable liquid change times caused by independent liquid change of each chemical tank based on its lifespan in wet processing equipment, which leads to production line dispatch conflicts and delivery failures.

Description

Technical Field

[0001] This application relates to semiconductor manufacturing equipment technology, and more specifically, to a method for changing the solution in a wet process equipment's chemical solution tank, an apparatus for changing the solution in a wet process equipment's chemical solution tank, and a wet process equipment. Background Technology

[0002] In semiconductor manufacturing, the cleaning and etching effects of the solutions in wet process equipment gradually decline with increasing lifespan, affecting wafer yield. Existing wet process equipment suffers from inconsistent solution change times and timer reset mechanisms, leading to frequent and staggered solution change times across different tanks. This causes the equipment to frequently enter a maintenance state where work is prohibited. This asynchronous solution change conflict with the overhead crane transport rhythm on the production line, easily resulting in failed deliveries due to solution changes, leading to engineer error handling and material errors, while also reducing equipment production continuity. Summary of the Invention

[0003] The main objective of this application is to provide a method, apparatus, and wet process equipment for changing the liquid in the chemical tanks of a wet process equipment, so as to at least solve the problem in the prior art where the liquid changing time of each chemical tank is chaotic and unpredictable due to independent liquid changing based on the lifespan of each tank, which leads to production line dispatch conflicts and delivery failures.

[0004] To achieve the above objectives, according to one aspect of this application, a method for changing the solution in a chemical tank of a wet processing equipment is provided. The wet processing equipment includes at least one chemical tank. The method includes: monitoring the cumulative usage time of the chemical solution in the at least one chemical tank and obtaining the current system time of an industrial control computer; generating a first solution change trigger signal for the corresponding chemical tank when the cumulative usage time of any of the chemical tanks reaches a preset lifespan threshold; generating a second solution change trigger signal for the corresponding chemical tank when the current system time reaches a preset fixed time point; controlling the corresponding chemical tank to perform a solution change operation according to the first solution change trigger signal or the second solution change trigger signal, and resetting the cumulative usage time of the corresponding chemical tank after the solution change operation is completed; wherein, if the second solution change trigger signal is not generated at the preset fixed time point due to an abnormality in the wet processing equipment, the cumulative usage time is monitored after the abnormality in the wet processing equipment is resolved; the first solution change trigger signal is generated when the cumulative usage time reaches the preset lifespan threshold again, and the wet processing equipment is controlled to perform the solution change operation according to the first solution change trigger signal.

[0005] Optionally, before controlling the wet processing equipment to perform a liquid replacement operation based on the first liquid replacement trigger signal or the second liquid replacement trigger signal, the method further includes: updating the state of the wet processing equipment to a maintenance state based on the first liquid replacement trigger signal or the second liquid replacement trigger signal; sending a signal that the wet processing equipment is in the maintenance state to an external scheduling system within a preset time window, so that the external scheduling system stops dispatching semiconductor devices to be processed to the wet processing equipment; wherein the preset time window includes: starting from a first preset duration before the current system time reaches the preset fixed time point, until the liquid replacement operation is completed; or, starting from the generation of the first liquid replacement trigger signal, until the liquid replacement operation is completed.

[0006] Optionally, the wet processing equipment includes multiple chemical tanks, each chemical tank being equipped with a timing unit and a liquid replacement unit, and the method further includes: setting a corresponding preset lifespan threshold and a corresponding preset fixed time point for each chemical tank.

[0007] Optionally, a corresponding preset fixed time point is set for each of the medicine tanks, including: setting the preset fixed time point to the same time every day; or setting the preset fixed time point to a repeating time point every preset number of days or preset number of hours.

[0008] Optionally, according to the first liquid replacement trigger signal or the second liquid replacement trigger signal, controlling the corresponding liquid tank to perform a liquid replacement operation includes: when the first liquid replacement trigger signal or the second liquid replacement trigger signal is generated, determining whether there is a semiconductor to be processed in the liquid tank undergoing process processing; if there is a semiconductor to be processed in the liquid tank undergoing process processing, then delaying the liquid replacement operation until the process processing is completed; if there is no semiconductor to be processed in the liquid tank undergoing process processing, then performing the liquid replacement operation.

[0009] Optionally, monitoring the cumulative usage time of the medicine in the at least one medicine tank includes: accumulating the cumulative usage time when the medicine tank is in the process of the process; and stopping the accumulation of the cumulative usage time when the medicine tank is not in the process of the process.

[0010] Optionally, resetting the cumulative usage time of the corresponding chemical tank after the liquid replacement operation is completed includes: after the liquid replacement operation is completed and the state of the wet processing equipment is reset from the maintenance state to the running state, resetting the cumulative usage time to zero.

[0011] Optionally, the wet process equipment further includes a valve unit and a temperature control unit to control the corresponding chemical solution tank to perform a liquid replacement operation, including: sending a drain command to the valve unit to drain the old chemical solution and sending an injection command to the valve unit to inject new chemical solution; monitoring the liquid level of the chemical solution tank and controlling the injection to stop when the liquid level of the chemical solution tank reaches a preset value; and controlling the temperature control unit to adjust the temperature of the new chemical solution until the temperature of the new chemical solution reaches the process set temperature.

[0012] According to another aspect of this application, an apparatus for changing the liquid in a chemical tank of a wet processing equipment is provided, comprising: a monitoring unit for monitoring the cumulative usage time of the liquid in at least one chemical tank and acquiring the current system time of an industrial control computer; a first generation unit for generating a first liquid change trigger signal for the corresponding chemical tank when the cumulative usage time of any of the chemical tanks reaches a preset lifespan threshold; a second generation unit for generating a second liquid change trigger signal for the corresponding chemical tank when the current system time reaches a preset fixed time point; and a control unit for controlling the corresponding chemical tank to perform a liquid change operation according to the first liquid change trigger signal or the second liquid change trigger signal, and resetting the cumulative usage time of the corresponding chemical tank after the liquid change operation is completed; wherein, if the second liquid change trigger signal is not generated at the preset fixed time point due to an abnormality in the wet processing equipment, the cumulative usage time is monitored after the abnormality in the wet processing equipment is resolved; when the cumulative usage time reaches the preset lifespan threshold again, the first liquid change trigger signal is generated, and the wet processing equipment is controlled to perform the liquid change operation according to the first liquid change trigger signal.

[0013] According to another aspect of this application, a wet process apparatus is provided, comprising: at least one chemical solution tank for containing process chemical solution; a valve unit connected to the chemical solution tank, including a drain valve and an injection valve; a temperature control unit connected to the chemical solution tank for adjusting the temperature of the chemical solution in the chemical solution tank; and a controller connected to the chemical solution tank, the valve unit, and the temperature control unit respectively, for performing the chemical solution tank replacement method of any of the wet process apparatuses described above.

[0014] By applying the technical solution of this application, the cumulative usage time of the liquid in at least one liquid tank is monitored, and the current system time of the industrial control computer is obtained; when the cumulative usage time of any liquid tank reaches a preset lifespan threshold, a first liquid replacement trigger signal is generated for the corresponding liquid tank; when the current system time reaches a preset fixed time point, a second liquid replacement trigger signal is generated for the corresponding liquid tank; according to the first liquid replacement trigger signal or the second liquid replacement trigger signal, the corresponding liquid tank is controlled to perform a liquid replacement operation, and the cumulative usage time of the corresponding liquid tank is reset after the liquid replacement operation is completed; wherein, if the second liquid replacement trigger signal is not generated at the preset fixed time point due to an abnormality in the wet processing equipment, the cumulative usage time is monitored after the abnormality in the wet processing equipment is resolved; when the cumulative usage time reaches the preset lifespan threshold again, a first liquid replacement trigger signal is generated, and the wet processing equipment is controlled to perform a liquid replacement operation according to the first liquid replacement trigger signal. This solution uses a dual-trigger mechanism of lifespan threshold (cumulative usage time) and fixed time points to ensure that the liquid is used within its expiration period. This achieves uniformity and predictability of liquid replacement time for each tank, solving the problem of chaotic and unpredictable liquid replacement time caused by independent liquid replacement of each liquid tank based on its lifespan in existing wet processing equipment, which leads to production line dispatch conflicts and delivery failures. Attached Figure Description

[0015] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0016] Figure 1 A schematic flowchart of a method for changing the solution in a chemical tank of a wet processing equipment is shown according to an embodiment of this application.

[0017] Figure 2 A schematic diagram showing the number and type of tanks in the wet process equipment's chemical solution tanks is provided.

[0018] Figure 3 A schematic diagram of the control logic of the wet processing equipment control unit is shown;

[0019] Figure 4 A flowchart of a conventional wet process equipment solution tank replacement method is shown;

[0020] Figure 5 This diagram illustrates the increased dispersion and chaos in liquid replacement time across multiple tanks in the equipment due to the existing liquid replacement logic.

[0021] Figure 6 A schematic diagram of the existing wet process equipment's dispatching logic is shown;

[0022] Figure 7 A flowchart is shown illustrating a specific method for changing the solution in a wet processing equipment chemical tank according to an embodiment of this application;

[0023] Figure 8 A schematic diagram of the abnormal handling and life timer compensation mechanism after the equipment malfunctions and misses the scheduled fluid replacement according to an embodiment of this application is shown.

[0024] Figure 9 A schematic diagram illustrating the liquid replacement cycle setting of the pharmaceutical tank according to an embodiment of this application is shown;

[0025] Figure 10 A flowchart illustrating the process of verifying incoming goods for wet processing equipment is shown.

[0026] Figure 11 A schematic diagram showing the comparison of liquid exchange time in each process tank under different liquid exchange modes is shown.

[0027] Figure 12 A structural block diagram of a wet process equipment liquid tank replacement device provided according to an embodiment of this application is shown. Detailed Implementation

[0028] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0029] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0030] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0031] As described in the background section, in the prior art, asynchronous liquid changing conflicts with the production line overhead crane transport rhythm, which can easily lead to delivery failures due to liquid changing during dispatch, resulting in abnormal handling by engineers and the risk of incorrect materials. At the same time, it reduces the continuity of equipment production. In order to solve the problem that in the prior art, the liquid changing time of each chemical tank in wet processing equipment is chaotic and unpredictable due to independent liquid changing based on the life of each chemical tank, which leads to dispatch conflicts and delivery failures, the embodiments of this application provide a method for liquid changing of chemical tanks in wet processing equipment, a device for liquid changing of chemical tanks in wet processing equipment, and wet processing equipment.

[0032] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0033] This embodiment provides a method for changing the liquid in a wet processing equipment liquid tank, which runs on a mobile terminal, computer terminal or similar computing device. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Also, although the logical order is shown in the flowchart, in some cases the steps shown or described may be executed in a different order than that shown here.

[0034] Figure 1 This is a schematic flowchart of a method for changing the solution in a wet process equipment chemical tank according to an embodiment of this application. Figure 1 As shown, the method includes the following steps:

[0035] Step S101: Monitor the cumulative usage time of the medicine in at least one of the above-mentioned medicine tanks, and obtain the current system time of the industrial control computer;

[0036] Specifically, firstly, it is necessary to monitor the equipment's operating status and time baseline in real time. Continuous monitoring of the cumulative usage time of the liquid in each tank is crucial to assess the degree of aging. Simultaneously, the current system time provided by the industrial control computer must be obtained to ensure that the equipment time is synchronized with the factory's scheduling time. This step forms the basis for implementing subsequent dual-track control, retaining lifespan management based on physical consumption while introducing a clock-based time management dimension.

[0037] Step S102: When the cumulative usage time of any of the above-mentioned medicine tanks reaches a preset lifespan threshold, a first liquid replacement trigger signal is generated for the corresponding medicine tank.

[0038] Specifically, step S102 is the first path to trigger liquid replacement, namely lifespan triggering. When the cumulative usage time of any liquid tank reaches a preset lifespan threshold (i.e., the liquid may fail and affect the yield), a first liquid replacement trigger signal is generated, requiring the liquid tank to be replaced.

[0039] Step S103: When the current system time reaches a preset fixed time point, generate a second liquid replacement trigger signal for the corresponding medicine tank;

[0040] Specifically, step S103 is another path to trigger the liquid change, namely time-triggered. When the current system time of the industrial control computer reaches a preset fixed time point (e.g., 10:00 AM every day), a second liquid change trigger signal will be generated regardless of whether the liquid life has been exhausted. This mechanism aims to unify the originally random and scattered liquid change actions into a specific time period, thereby eliminating the disorder of liquid change times in each tank.

[0041] Step S104: Based on the first liquid replacement trigger signal or the second liquid replacement trigger signal, control the corresponding liquid tank to perform a liquid replacement operation, and reset the cumulative usage time of the corresponding liquid tank after the liquid replacement operation is completed; wherein, if the second liquid replacement trigger signal is not generated at the preset fixed time point due to the malfunction of the wet processing equipment, the cumulative usage time is monitored after the malfunction of the wet processing equipment is resolved; when the cumulative usage time reaches the preset lifespan threshold again, the first liquid replacement trigger signal is generated, and the wet processing equipment is controlled to perform the liquid replacement operation based on the first liquid replacement trigger signal.

[0042] Specifically, once either the first fluid replacement trigger signal (lifespan reached) or the second fluid replacement trigger signal (time reached) is detected, the corresponding chemical solution tank will be controlled to perform a complete fluid replacement operation (including emptying, cleaning, and adding new solution). After the fluid replacement operation is completed, the cumulative usage time of the chemical solution tank is reset to zero, and a new round of timing begins to prepare for the next fluid replacement judgment. This mechanism ensures that the chemical solution will not continue to be used due to exceeding its lifespan, nor will fluid replacement be postponed indefinitely due to the expiration of time.

[0043] In addition, an anomaly compensation mechanism is included to prevent the risk of missed liquid replacement due to equipment failure. If, at a preset fixed time point, the wet processing equipment experiences a temporary malfunction or manual intervention that prevents it from operating normally and thus fails to generate a second liquid replacement trigger signal, the liquid replacement task will not be ignored. Once the wet processing equipment resolves the anomaly and resumes normal operation, the cumulative usage time of the chemical tank will continue to be monitored. If the cumulative usage time again reaches the preset lifespan threshold, a first liquid replacement trigger signal will be generated, and the equipment will be controlled to perform the liquid replacement operation accordingly. This mechanism ensures that even if the time trigger fails, the safety boundary of the chemical tank's lifespan is still strictly guaranteed, avoiding process risks caused by missing the fixed liquid replacement time.

[0044] This embodiment achieves uniformity and predictability of liquid replacement time for each tank by using a dual triggering mechanism of lifespan threshold (cumulative usage time) and fixed time point, while ensuring that the liquid is not used beyond its expiration date. This solves the problem of chaotic and unpredictable liquid replacement time caused by independent liquid replacement of each liquid tank based on its lifespan in existing wet processing equipment, which leads to production line dispatch conflicts and delivery failures.

[0045] In some embodiments of this application, before controlling the wet processing equipment to perform a liquid replacement operation based on the first liquid replacement trigger signal or the second liquid replacement trigger signal, the method further includes: updating the state of the wet processing equipment to a maintenance state based on the first liquid replacement trigger signal or the second liquid replacement trigger signal; sending a signal that the wet processing equipment is in the maintenance state to an external scheduling system within a preset time window, so that the external scheduling system stops dispatching semiconductor devices to be processed to the wet processing equipment; wherein the preset time window includes: starting from a first preset duration before the current system time reaches the preset fixed time point, until the liquid replacement operation is completed; or, starting from the generation of the first liquid replacement trigger signal, until the liquid replacement operation is completed.

[0046] Specifically, when the first liquid change trigger signal (lifespan reached) or the second liquid change trigger signal (time reached) is detected, the operating status of the wet processing equipment is updated to maintenance status. This status change is a prerequisite for executing subsequent liquid change operations, essentially informing the entire production system that the wet processing equipment is currently unavailable for normal production. When the wet processing equipment is in maintenance status, a status signal is sent to the external scheduling system, instructing it to suspend the dispatch of new semiconductor devices to be processed to that equipment. This ensures that the external scheduling system can know the unavailability status of the wet processing equipment in real time before dispatching work, thereby eliminating problems such as dispatch failures caused by the equipment being in the process of liquid change or about to be changed, and improving the accuracy and stability of production line scheduling.

[0047] Regarding the preset time window, there are two settings. The first is based on the second liquid change trigger signal (fixed time point trigger). The time window starts from the first preset duration (e.g., 10-15 minutes before) before the current system time reaches the preset fixed time point, and continues until the liquid change operation is completely completed. This early locking method provides a buffer time for the production line, allowing the batch being processed to complete its current process and leave smoothly, while preventing new batches from entering, ensuring that the liquid change process is not disturbed. The second is based on the first liquid change trigger signal (lifetime trigger). The time window starts from the moment the first liquid change trigger signal is generated and continues until the liquid change operation is completed. Because the time of lifetime trigger is uncertain, this instant locking strategy can quickly respond to the risk of liquid aging, minimize the impact of sudden liquid changes on production, and ensure that while maintaining process yield, the impact on continuous production is minimized.

[0048] By locking the equipment maintenance status in advance and notifying the external scheduling system to stop dispatching, delivery failures and production blockages during fluid changeovers are effectively avoided. At the same time, by setting flexible time windows based on fixed lead times or lifespan triggers, the disruption to production continuity caused by fluid changeovers is minimized while ensuring process safety, thus improving production line stability.

[0049] In some embodiments of this application, the wet processing equipment includes multiple liquid tanks, each of which is equipped with a timing unit and a liquid replacement unit. The method further includes setting a corresponding preset lifespan threshold and a corresponding preset fixed time point for each of the liquid tanks.

[0050] Specifically, the wet process equipment is configured with multiple independent chemical solution tanks, each equipped with its own timing unit and solution replacement unit. This configuration ensures that the lifespan accumulation, time monitoring, and solution replacement actions of each chemical solution tank do not interfere with each other, allowing each tank to operate its own control logic independently. Each chemical solution tank is set with a preset lifespan threshold and preset fixed time points. This means that tanks with different process requirements (such as cleaning tanks and etching tanks) have independent control parameters, no longer limited by a uniform, fixed solution replacement standard. For example, some tanks with extremely high chemical purity requirements can be set with shorter lifespan thresholds or more frequent fixed solution replacement times, while some tanks with better stability can be set with longer parameters.

[0051] By supporting the independent setting of lifespan thresholds and fixed liquid replacement time points for multiple chemical tanks in wet processing equipment, the specific requirements of different process tanks for chemical lifespan and liquid replacement frequency are met. Furthermore, the unified fixed time point control eliminates the disorder of liquid replacement time in each tank, thereby improving the predictability of equipment scheduling and the overall efficiency of production line operation while ensuring the yield of each process.

[0052] Furthermore, a corresponding preset fixed time point is set for each of the above-mentioned medicine tanks, including: setting the preset fixed time point to the same time every day; or setting the preset fixed time point to a repeating time point every preset number of days or preset number of hours.

[0053] Specifically, there are two ways to set the preset fixed time points to adapt to different production process requirements. The first is to set the preset fixed time point to the same moment every day. For example, it can be uniformly set to 10:00 AM every day. This daily cycle mode is suitable for scenarios that have high requirements for fluid change frequency and want to concentrate fluid change activities in a fixed time period every day to facilitate production line scheduling and maintenance personnel operation. By fixing the trigger time for all tanks that need fluid change at the same time every day, the production line can plan the production schedule within that time period in advance (such as pausing dispatch), thereby maximizing production continuity and avoiding conflicts between fluid change and production through a unified window period.

[0054] The second approach involves setting a preset fixed time point as a recurring point every preset number of days or hours. This means that the liquid change trigger is no longer limited to a single day but is based on a cyclical time period. For example, it can be set to trigger a liquid change every 24 hours, every 48 hours, or every 4 hours. This interval cycle mode offers greater flexibility and is suitable for chemical tanks that do not require daily liquid changes or have more relaxed process requirements. By setting different intervals of days or hours, factories can set flexible liquid change cycles based on the specific consumption rate of the chemical solution and process stability. This mode retains the determinism of fixed-time triggering (facilitating system prediction) while avoiding chemical waste or excessive maintenance caused by mandatory daily liquid changes.

[0055] With the two setting methods described above, both sensitive tanks that require frequent, fixed-time liquid changes and conventional tanks that require infrequent, periodic liquid changes can achieve automated management by configuring corresponding fixed time points.

[0056] In some embodiments of this application, controlling the corresponding liquid tank to perform a liquid replacement operation based on the first liquid replacement trigger signal or the second liquid replacement trigger signal includes: when the first liquid replacement trigger signal or the second liquid replacement trigger signal is generated, determining whether there is a semiconductor to be processed in the liquid tank undergoing the process; if there is a semiconductor to be processed in the liquid tank undergoing the process, then delaying the liquid replacement operation until the process is completed; if there is no semiconductor to be processed in the liquid tank undergoing the process, then performing the liquid replacement operation.

[0057] Specifically, upon generating the first solution replacement trigger signal (lifetime reached) or the second solution replacement trigger signal (time reached), the solution replacement operation is not initiated immediately. Instead, a judgment is first made to check whether there are any semiconductor devices currently undergoing processing in the solution tank. If the judgment indicates that there is an ongoing process in the solution tank, the solution replacement operation is delayed until the current process is completely completed. This mechanism ensures that the wafers being processed can complete the predetermined cleaning or etching processes without interference, protecting product integrity and yield. The solution replacement operation is only performed when it is confirmed that there are no work-in-process items in the tank.

[0058] By prioritizing the detection of whether a wafer is being processed in the tank after the liquid replacement signal is triggered, the liquid replacement is delayed until the process is completed if a wafer is found; otherwise, the liquid replacement operation is performed. This effectively avoids interruption or damage to the ongoing wafer process caused by the liquid replacement operation, ensuring the safety of the product and the integrity of the process during the liquid replacement period.

[0059] In some embodiments of this application, monitoring the cumulative usage time of the medicine in at least one medicine tank includes: accumulating the cumulative usage time when the medicine tank is in the process of the above-mentioned process; and stopping the accumulation of the cumulative usage time when the medicine tank is not in the process of the above-mentioned process.

[0060] Specifically, when the chemical solution tank is in the process of processing (i.e., when the wafer is being cleaned, etched, or otherwise processed in the tank), the timing unit starts working and accumulates the usage time of the chemical solution in real time; when the chemical solution tank is not in the process of processing (e.g., when the equipment is in standby, under maintenance, or waiting for a batch), the timing unit automatically stops accumulating.

[0061] This on-demand accumulation method can more accurately reflect the actual effective lifespan of the chemical solution. In semiconductor wet processes, the degradation of the chemical solution mainly stems from chemical consumption and contamination, processes that primarily occur when the wafer comes into contact with the solution and reacts. If the traditional full-cycle timing method is used, the chemical solution will be recorded as used even when the equipment is idle due to natural aging or evaporation. This can cause the lifespan threshold to be triggered prematurely, resulting in unnecessary and frequent solution changes.

[0062] In some embodiments of this application, resetting the cumulative usage time of the corresponding liquid tank after the liquid replacement operation is completed includes: after the liquid replacement operation is completed and the state of the wet processing equipment is reset from the maintenance state to the running state, resetting the cumulative usage time to zero.

[0063] Specifically, the accumulated usage time is reset to zero when both the liquid change and the wet processing equipment resume operation. In other words, simply completing the liquid change does not immediately reset the timer; instead, it confirms that the wet processing equipment has been reset from maintenance mode and re-entered operational mode. This ensures that the timing unit is reset before the equipment is fully ready to accept new batch production tasks, thus avoiding confusion in the timing starting point due to equipment instability or reset delays. This accumulated usage time reset mechanism guarantees the accuracy and continuity of liquid life measurement. If the timer is reset after a liquid change but before the equipment is fully reset, there is a risk that the equipment may unexpectedly receive production instructions or inconsistent status feedback during the reset process, thereby affecting the reliability of life monitoring.

[0064] The cumulative usage time is reset to zero only after the liquid replacement operation is completed and the equipment is successfully reset from maintenance to operation. This ensures that the starting point of the liquid life timer is synchronized with the actual production-ready state of the equipment, effectively avoiding timing errors caused by equipment state switching delays or abnormalities. This ensures the accuracy and reliability of the liquid life monitoring data and prevents process risks caused by miscalculation of lifespan when the equipment is not truly ready.

[0065] In some embodiments of this application, the wet processing equipment further includes a valve unit and a temperature control unit, which controls the corresponding chemical solution tank to perform a liquid replacement operation, including: sending a drain command to the valve unit to drain the old chemical solution and sending an injection command to the valve unit to inject new chemical solution; monitoring the liquid level of the chemical solution tank and controlling the injection to stop when the liquid level of the chemical solution tank reaches a preset value; and controlling the temperature control unit to adjust the temperature of the new chemical solution until the temperature of the new chemical solution reaches the process set temperature.

[0066] Specifically, at the beginning of the liquid replacement process, a drain command is sent to the valve unit to first open the valve and drain the old liquid from the tank. After draining, the valve unit is then controlled to inject fresh liquid. During the injection of new liquid, the liquid level in the tank is continuously monitored. Once the liquid level reaches the preset value, the injection is immediately stopped. This control method avoids overflow waste due to over-injection or process parameter deviations due to under-injection, ensuring the accuracy and consistency of the liquid replacement volume each time. After injection, the temperature control unit heats or cools the new liquid in the tank until the liquid temperature reaches the standard temperature set by the process (process set temperature). Only when the temperature stabilizes at the process set temperature is the liquid replacement operation truly complete, and the equipment is ready to enter production.

[0067] By integrating the valve unit's liquid discharge control, liquid level monitoring, and temperature control unit's temperature regulation, it is ensured that after the old liquid is discharged and the new liquid is injected, the solution can accurately reach the preset liquid level and the specific temperature required by the process. This ensures that the solution state after liquid replacement fully meets the semiconductor wet process standards, avoids process abnormalities caused by insufficient or excessive solution or temperature deviation, and thus improves the yield and stability of wafer processing.

[0068] To enable those skilled in the art to better understand the technical solution of this application, the implementation process of the method for changing the liquid in the chemical tank of the wet process equipment will be described in detail below with reference to specific embodiments.

[0069] This embodiment relates to a specific method for changing the solution in the chemical tank of a wet process equipment. The wet process equipment is custom-made, and the number and type of tanks will vary depending on the process requirements of each plant, such as... Figure 2 As shown, equipment A is equipped with a medicine solution tank 1, medicine solution tank 2, medicine solution tank 3, water tank 1, water tank 2, water tank 3 and a drying tank; equipment B is equipped with a medicine solution tank 1, medicine solution tank 2, medicine solution tank 3, medicine solution tank 4, water tank 1, water tank 2, water tank 3, water tank 4 and a drying tank; equipment C is equipped with a medicine solution tank 1, medicine solution tank 2, medicine solution tank 3, medicine solution tank 4, medicine solution tank 5, water tank 1, water tank 2, water tank 3, water tank 4, water tank 5 and a drying tank.

[0070] The control logic of the wet process equipment control unit (controller) is as follows: Figure 3As shown, the fluid change process is centrally controlled by a Programmable Logic Controller (PLC), with the temperature control unit, valve unit, circulation unit, and logic unit executing the complete fluid change operation. The IT network is used to implement the equipment automation program. The Automation Program (EAP) communication and data transmission system can remotely issue job tasks, obtain system time, and receive running data from the industrial control computer to complete data upload. The industrial control computer undertakes the functions of PLC human-machine interaction and EAP communication relay. On the one hand, it receives instruction information issued by the IT network, and on the other hand, it issues relevant setting modification instructions and operation requirements to the PLC. At the same time, it receives parameter display information fed back by the PLC to realize human-machine interaction. The PLC, as the central control unit of the machine, is responsible for the execution judgment of all actions. It receives operation instructions issued by the industrial control computer and controls the conveying unit, temperature control unit, valve unit, and circulation unit respectively. Among them, the conveying unit executes the mechanical action of the equipment and drives the water tank unit to execute the water tank menu instructions. The temperature control unit realizes the temperature control of the equipment. The valve unit realizes the liquid replenishment and drainage control. The circulation unit realizes the circulation flow control. The logic unit realizes the overall operation control of the equipment. The logic unit further drives the drying tank to execute the drying menu instructions. Each field unit feeds back the operating status to the PLC, and then transmits it back to the IT network through the industrial control computer to complete the control of the liquid change of the chemical tank of the whole wet process equipment.

[0071] All the medicine tanks in the equipment use PLC timers to record the lifespan of the medicine, and the medicine is changed at the same interval each time. Figure 4 As shown. First, the 1440-minute timer signal is acquired. Then, it is determined whether there are no products in operation in the process tank and whether the equipment is in automatic operation mode. If the result is no, the liquid change is paused and waits until the product operation is completed or the process tank returns to automatic mode before proceeding to the next liquid change step. If the result is yes, the liquid change operation is executed, the valve is controlled to complete the liquid change action, and the liquid change demand signal is cleared. Then, it is determined whether the liquid change is completed normally. When the liquid change is completed normally, the 1440-minute timer is reset to zero and the timing is restarted, and the equipment returns to normal production mode. If it is determined that the liquid change is not completed normally, personnel intervention is initiated. After the intervention is completed, the equipment returns to the liquid change execution step. After the timer is reset, the equipment resumes normal production and the above-mentioned timed liquid change process is executed cyclically.

[0072] Various chemical solution tanks differ in their liquid replacement life and duration due to variations in process requirements, solution composition, replenishment methods, and temperatures, as shown in Table 1. Without human intervention, after a few days, noticeable and disorganized liquid replacement patterns emerge. Figure 5 As shown, this phenomenon becomes increasingly serious as the number of devices increases and time goes on.

[0073] Table 1

[0074]

[0075] The dispatching logic of wet processing equipment is as follows: Figure 6 As shown, the technician dispatches goods for production, and the EAP checks whether the equipment status is Idle / Run. If the equipment is not in Idle / Run status, the batch of Lots cannot be dispatched, but there is no significant impact. If the equipment is in Idle / Run status, the overhead crane moves the Lots into the machine, which usually takes 1-10 minutes. After the movement is completed, the EAP checks the equipment status again to see if it is in Idle / Run status. If the equipment is not in Idle / Run status, the delivery of the Lots fails and requires engineer intervention. If the equipment is in Idle / Run status, the PP_Select (process program selection) of the Lots is executed successfully and production proceeds normally, and the liquid life increases normally. The equipment PLC checks whether the liquid life has reached the set upper limit. If it has, it starts liquid replacement, and the equipment switches to Auto_PM (automatic preventive maintenance) status, indicating that no new goods can be dispatched. Lots that have been moved into the machine by the overhead crane but have not been PP_Selected will fail to be delivered and require engineer intervention. The equipment can only dispatch goods for production when it is in Idle / Run mode. When the equipment starts to change the liquid, the status will automatically switch to Auto_PM mode. At this time, the conditions for dispatching goods and PP_Select are no longer available. If there is a Lot that needs to perform the PP_Select action at this time, the goods delivery will fail.

[0076] The reasons why this phenomenon is prone to occur under the existing mechanism are: the overhead crane has a heavy handling task, which may lead to traffic jams or machine downtime, resulting in different handling times each time; there are many pieces of equipment, and the timing and duration of liquid replacement in each liquid tank are different, making it difficult for technicians to accurately remember the actual status of each piece of equipment; and in automated production lines, there are no extra technicians or engineers to go to the site every day to adjust the liquid replacement time.

[0077] To prevent delivery failures caused by the liquid tank being changed at the time of delivery by the technician, the method provided in this embodiment is as follows:

[0078] The time of use of the industrial control computer is prioritized as an indicator of fluid change preparation, such as... Figure 7 As shown, this means ensuring that the start time for changing the solution in each tank of each device is fixed at 10:00 a.m. or other fixed time each day (taking acid changing at 10:00 a.m. and 1440 a.m. every day as an example).

[0079] First, the system acquires the 10:00 signal from the industrial control computer. Then, it checks if there are no products in operation in the process tank and if the equipment is in automatic mode. If the result is negative, the liquid change is paused, waiting until the product operation is completed or the process tank returns to automatic mode. Then, the system acquires the 1440-minute timer signal and proceeds to the next liquid change step. If the result is positive, the liquid change operation is executed, controlling the valves to complete the liquid change and simultaneously eliminating the liquid change request signal. Next, it checks if the liquid change is completed normally. If it is, the 1440-minute timer is reset to zero and restarted, and the equipment returns to normal production. If the liquid change is not completed normally, personnel intervention is initiated. After intervention, the system returns to the liquid change execution step. After the timer is reset, the equipment resumes normal production, and the entire timed liquid change process is repeated.

[0080] If the equipment goes down at a fixed time and misses the liquid replacement opportunity, the PLC's timer will still automatically replace the liquid after the equipment recovers, preventing missed liquid replacements. Furthermore, the system will return to normal operation at the next set time. Figure 8 As shown.

[0081] The liquid change preparation started by the industrial control computer timer should still be executed only after the product production in the process tank area is completed, so as not to cause abnormalities in the product production process.

[0082] The system allows for setting liquid change frequencies for different chemical tanks, including multiple times per day, once per day, and once every few days, to meet diverse process requirements. Furthermore, each device can be configured independently. Figure 9 As shown.

[0083] Once the above fixed-time liquid change function is implemented, IT can control the device to prevent it from being dispatched 10-15 minutes before that time (e.g., ...). Figure 10 (As shown, this is reserved for overhead crane handling), thus completely eliminating the problem of incoming goods failure due to fluid changes. See also Figure 10The technician dispatches goods for production, sequentially verifying equipment constraints, monitor validity period, equipment status, carrier status, lot status, and available time. If not all verifications meet the requirements, dispatching is prohibited, the reason is investigated, and the process returns to the technician dispatching production step. When all verifications meet the requirements, the goods are transported to the machine (Smif) by overhead crane. After transport, the equipment constraints, monitor validity period, equipment status, carrier status, lot status, and recipe status are verified again. If not all verifications meet the requirements, the program fails, the reason is investigated, and the process returns to the technician dispatching production step. If all verifications meet the requirements, the goods are successfully received, and production begins.

[0084] This setting can also increase the efficiency of device usage (e.g.) Figure 11 As shown in the diagram (yellow marks indicate liquid change times), the original setting would result in liquid changes for each tank at different times each day, disrupting the actual production continuity of the equipment; the new liquid change setting can unify the liquid change times for each medicine tank every day, increasing the continuity of equipment production.

[0085] This embodiment helps production line technicians remember the multiple liquid change times of wet processing equipment, solves the problem of incorrect work assignments during liquid change of wet processing equipment, which can lead to delivery failures, thereby reducing the workload of engineers and the risk of handling the wrong products; and also indirectly improves the utilization rate of wet processing equipment, helping the equipment to increase its production capacity.

[0086] This application also provides an apparatus for changing the solution in a wet processing equipment's chemical tank. It should be noted that this apparatus can be used to execute the method for changing the solution in a wet processing equipment's chemical tank provided in this application. This apparatus is used to implement the above embodiments and preferred embodiments; details already described will not be repeated. As used below, the term "module" can refer to a combination of software and / or hardware that performs a predetermined function. Although the apparatus described in the following embodiments is preferably implemented in software, hardware implementation, or a combination of software and hardware, is also possible and contemplated.

[0087] The following describes the apparatus for changing the liquid in the chemical tank of a wet process equipment provided in the embodiments of this application.

[0088] Figure 12 This is a structural block diagram of a wet process equipment liquid tank changing device according to an embodiment of this application. Figure 12As shown, the device includes a monitoring unit 121, a first generation unit 122, a second generation unit 123, and a control unit 124. The monitoring unit is used to monitor the cumulative usage time of the liquid in at least one liquid tank and obtain the current system time of the industrial control computer; the first generation unit is used to generate a first liquid replacement trigger signal for the corresponding liquid tank when the cumulative usage time of any of the above-mentioned liquid tanks reaches a preset lifespan threshold; the second generation unit is used to generate a second liquid replacement trigger signal for the corresponding liquid tank when the current system time reaches a preset fixed time point; the control unit is used to control the corresponding liquid tank to perform a liquid replacement operation according to the first liquid replacement trigger signal or the second liquid replacement trigger signal, and reset the cumulative usage time of the corresponding liquid tank after the liquid replacement operation is completed; wherein, if the second liquid replacement trigger signal is not generated at the preset fixed time point due to the abnormality of the wet processing equipment, the cumulative usage time is monitored after the abnormality of the wet processing equipment is resolved; when the cumulative usage time reaches the preset lifespan threshold again, the first liquid replacement trigger signal is generated, and the wet processing equipment is controlled to perform the liquid replacement operation according to the first liquid replacement trigger signal.

[0089] This embodiment achieves uniformity and predictability of liquid replacement time for each tank by using a dual triggering mechanism of lifespan threshold (cumulative usage time) and fixed time point, while ensuring that the liquid is not used beyond its expiration date. This solves the problem of chaotic and unpredictable liquid replacement time caused by independent liquid replacement of each liquid tank based on its lifespan in existing wet processing equipment, which leads to production line dispatch conflicts and delivery failures.

[0090] In some embodiments of this application, the above-described apparatus further includes an updating unit and a sending unit. The updating unit is used to update the state of the wet processing equipment to a maintenance state based on the first or second liquid replacement trigger signal before controlling the wet processing equipment to perform a liquid replacement operation according to the first or second liquid replacement trigger signal. The sending unit is used to send a signal indicating that the wet processing equipment is in the maintenance state to an external scheduling system within a preset time window, so that the external scheduling system stops dispatching semiconductor devices to be processed to the wet processing equipment. The preset time window includes: starting from a first preset duration before the current system time reaches the preset fixed time point, until the liquid replacement operation is completed; or, starting from the generation of the first liquid replacement trigger signal, until the liquid replacement operation is completed.

[0091] By locking the equipment maintenance status in advance and notifying the external scheduling system to stop dispatching, delivery failures and production blockages during fluid changeovers are effectively avoided. At the same time, by setting flexible time windows based on fixed lead times or lifespan triggers, the disruption to production continuity caused by fluid changeovers is minimized while ensuring process safety, thus improving production line stability.

[0092] In some embodiments of this application, the wet processing equipment includes multiple liquid tanks, each of which is equipped with a timing unit and a liquid replacement unit. The device also includes a setting unit for setting a corresponding preset lifespan threshold and a corresponding preset fixed time point for each of the liquid tanks.

[0093] By supporting the independent setting of lifespan thresholds and fixed liquid replacement time points for multiple chemical tanks in wet processing equipment, the specific requirements of different process tanks for chemical lifespan and liquid replacement frequency are met. Furthermore, the unified fixed time point control eliminates the disorder of liquid replacement time in each tank, thereby improving the predictability of equipment scheduling and the overall efficiency of production line operation while ensuring the yield of each process.

[0094] Furthermore, the aforementioned setting unit includes a setting module, used to set the aforementioned preset fixed time point to the same time every day; or, to set the aforementioned preset fixed time point to a repeating time point every preset number of days or preset number of hours.

[0095] With the two setting methods described above, both sensitive tanks that require frequent, fixed-time liquid changes and conventional tanks that require infrequent, periodic liquid changes can achieve automated management by configuring corresponding fixed time points.

[0096] In some embodiments of this application, the control unit includes a judgment module, a delay module, and an execution module. The judgment module is used to determine whether a semiconductor to be processed is being processed in the liquid tank when the first liquid replacement trigger signal or the second liquid replacement trigger signal is generated. The delay module is used to delay the liquid replacement operation if the semiconductor to be processed is being processed in the liquid tank until the processing is completed. The execution module is used to execute the liquid replacement operation if no semiconductor to be processed is being processed in the liquid tank.

[0097] By prioritizing the detection of whether a wafer is being processed in the tank after the liquid replacement signal is triggered, the liquid replacement is delayed until the process is completed if a wafer is found; otherwise, the liquid replacement operation is performed. This effectively avoids interruption or damage to the ongoing wafer process caused by the liquid replacement operation, ensuring the safety of the product and the integrity of the process during the liquid replacement period.

[0098] In some embodiments of this application, the monitoring unit includes a first processing module and a second processing module. The first processing module is used to accumulate the accumulated usage time when the medicine tank is in the process of the above-mentioned process; the second processing module is used to stop accumulating the accumulated usage time when the medicine tank is not in the process of the above-mentioned process.

[0099] This on-demand accumulation method can more accurately reflect the actual effective lifespan of the chemical solution. In semiconductor wet processes, the degradation of the chemical solution mainly stems from chemical consumption and contamination, processes that primarily occur when the wafer comes into contact with the solution and reacts. If the traditional full-cycle timing method is used, the chemical solution will be recorded as used even when the equipment is idle due to natural aging or evaporation. This can cause the lifespan threshold to be triggered prematurely, resulting in unnecessary and frequent solution changes.

[0100] In some embodiments of this application, the control unit includes a reset module for resetting the accumulated usage time to zero after the liquid replacement operation is completed and the state of the wet processing equipment is reset from the maintenance state to the running state.

[0101] The cumulative usage time is reset to zero only after the liquid replacement operation is completed and the equipment is successfully reset from maintenance to operation. This ensures that the starting point of the liquid life timer is synchronized with the actual production-ready state of the equipment, effectively avoiding timing errors caused by equipment state switching delays or abnormalities. This ensures the accuracy and reliability of the liquid life monitoring data and prevents process risks caused by miscalculation of lifespan when the equipment is not truly ready.

[0102] In some embodiments of this application, the control unit includes a sending module, a first control module, and a second control module. The sending module is used to send a drain command to the valve unit to drain the old medicine solution and to send an injection command to the valve unit to inject new medicine solution. The first control module is used to monitor the liquid level in the medicine solution tank and control the injection to stop when the liquid level in the medicine solution tank reaches a preset value. The second control module is used to control the temperature control unit to adjust the temperature of the new medicine solution until the temperature of the new medicine solution reaches the process set temperature.

[0103] By integrating the valve unit's liquid discharge control, liquid level monitoring, and temperature control unit's temperature regulation, it is ensured that after the old liquid is discharged and the new liquid is injected, the solution can accurately reach the preset liquid level and the specific temperature required by the process. This ensures that the solution state after liquid replacement fully meets the semiconductor wet process standards, avoids process abnormalities caused by insufficient or excessive solution or temperature deviation, and thus improves the yield and stability of wafer processing.

[0104] The aforementioned wet process equipment's solution tank replacement device includes a processor and a memory. The monitoring unit, first generation unit, second generation unit, control unit, etc., are all stored as program units in the memory. The processor executes these program units stored in the memory to achieve their respective functions. All of the above modules reside in the same processor; alternatively, the modules may be located in different processors in any combination.

[0105] The memory may include non-permanent memory in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM, and the memory includes at least one memory chip.

[0106] This invention provides a computer-readable storage medium including a stored program, wherein, when the program is executed, it controls the device containing the computer-readable storage medium to perform a method for changing the solution in the chemical tank of a wet processing equipment.

[0107] This invention provides a processor for running a program, wherein the program executes the method for changing the solution in the chemical tank of the wet processing equipment.

[0108] This invention provides a device including a processor, a memory, and a program stored in the memory and executable on the processor. When the processor executes the program, it implements the steps of the method for changing the solution in the chemical tank of the wet processing equipment described above. The device described herein can be a server, PC, PAD, mobile phone, etc.

[0109] This application also provides a computer program product that, when executed on a data processing device, is adapted to perform the steps of initializing the method for changing the liquid in the chemical tank of the above-described wet processing equipment.

[0110] It is obvious to those skilled in the art that the modules or steps of the present invention described above can be implemented using general-purpose computing devices. They can be centralized on a single computing device or distributed across a network of multiple computing devices. They can be implemented using computer-executable program code, and thus can be stored in a storage device for execution by a computing device. In some cases, the steps shown or described can be performed in a different order than those described herein, or they can be fabricated as separate integrated circuit modules, or multiple modules or steps can be fabricated as a single integrated circuit module. Thus, the present invention is not limited to any particular combination of hardware and software.

[0111] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0112] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0113] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0114] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0115] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0116] Memory may include non-persistent memory in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0117] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information by any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0118] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0119] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0120] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A method for changing the solution in a wet processing equipment's chemical solution tank, characterized in that, The wet processing equipment includes at least one chemical solution tank, and the method includes: Monitor the cumulative usage time of the medicine in the at least one medicine tank, and obtain the current system time of the industrial control computer; When the cumulative usage time of any of the aforementioned medicine tanks reaches a preset lifespan threshold, a first liquid replacement trigger signal is generated for the corresponding medicine tank. When the current system time reaches a preset fixed time point, a second liquid replacement trigger signal is generated for the corresponding medicine tank; Based on the first liquid replacement trigger signal or the second liquid replacement trigger signal, control the corresponding medicine tank to perform a liquid replacement operation, and reset the cumulative usage time of the corresponding medicine tank after the liquid replacement operation is completed; If the second liquid replacement trigger signal is not generated at the preset fixed time point due to an abnormality in the wet processing equipment, the cumulative usage time is monitored after the abnormality in the wet processing equipment is resolved; when the cumulative usage time reaches the preset lifespan threshold again, the first liquid replacement trigger signal is generated, and the wet processing equipment is controlled to perform the liquid replacement operation according to the first liquid replacement trigger signal.

2. The method according to claim 1, characterized in that, Before controlling the wet processing equipment to perform a liquid replacement operation based on the first liquid replacement trigger signal or the second liquid replacement trigger signal, the method further includes: Based on the first liquid change trigger signal or the second liquid change trigger signal, the status of the wet processing equipment is updated to maintenance status; Within a preset time window, a signal is sent to the external scheduling system that the wet processing equipment is in the maintenance state, so that the external scheduling system stops dispatching semiconductor devices to be processed to the wet processing equipment. The preset time window includes: starting from a first preset duration before the current system time reaches the preset fixed time point, until the liquid replacement operation is completed; or, starting from the generation of the first liquid replacement trigger signal, until the liquid replacement operation is completed.

3. The method according to claim 1, characterized in that, The wet processing equipment includes multiple chemical solution tanks, each of which is equipped with a timing unit and a solution replacement unit. The method further includes: Each of the aforementioned medicine tanks is assigned a corresponding preset lifespan threshold and a corresponding preset fixed time point.

4. The method according to claim 3, characterized in that, Setting corresponding preset fixed time points for each of the aforementioned medicine tanks includes: Set the preset fixed time point to the same time every day; Alternatively, the preset fixed time point can be set as a repeating time point every preset number of days or preset number of hours.

5. The method according to claim 1, characterized in that, Based on the first or second liquid replacement trigger signal, control the corresponding medicine tank to perform a liquid replacement operation, including: When generating the first liquid replacement trigger signal or the second liquid replacement trigger signal, it is determined whether there is a semiconductor to be processed in the drug solution tank. If the semiconductor to be processed is being processed in the solution tank, the solution replacement operation is delayed until the process is completed. If the semiconductor to be processed is not present in the solution tank and the process is being carried out, then the solution replacement operation is performed.

6. The method according to claim 5, characterized in that, Monitoring the cumulative usage time of the medicine solution in the at least one medicine solution tank includes: While the medicine tank is undergoing the process, the cumulative usage time is accumulated; When the medicine tank is not in the process of the process, the cumulative usage time is stopped.

7. The method according to claim 2, characterized in that, After the fluid replacement operation is completed, the cumulative usage time of the corresponding medicine tank is reset, including: After the liquid replacement operation is completed and the status of the wet process equipment is reset from the maintenance state to the running state, the cumulative usage time is reset to zero.

8. The method according to claim 1, characterized in that, The wet processing equipment also includes a valve unit and a temperature control unit, which control the corresponding chemical solution tank to perform a solution change operation, including: Send a drain command to the valve unit to drain the old medicine solution, and send an injection command to the valve unit to inject new medicine solution; Monitor the liquid level in the medicine tank, and control the injection to stop when the liquid level in the medicine tank reaches a preset value; The temperature control unit is used to adjust the temperature of the new drug solution until the temperature of the new drug solution reaches the process set temperature.

9. A device for changing the liquid in a chemical solution tank of a wet processing equipment, characterized in that, include: The monitoring unit is used to monitor the cumulative usage time of the liquid in at least one liquid tank and to obtain the current system time of the industrial control computer. The first generation unit is used to generate a first liquid replacement trigger signal for the corresponding liquid tank when the cumulative usage time of any of the liquid tanks reaches a preset lifespan threshold. The second generation unit is used to generate a second liquid replacement trigger signal for the corresponding medicine tank when the current system time reaches a preset fixed time point; The control unit is configured to control the corresponding liquid tank to perform a liquid replacement operation based on the first liquid replacement trigger signal or the second liquid replacement trigger signal, and to reset the cumulative usage time of the corresponding liquid tank after the liquid replacement operation is completed; wherein, if the second liquid replacement trigger signal is not generated at the preset fixed time point due to the malfunction of the wet processing equipment, the cumulative usage time is monitored after the malfunction of the wet processing equipment is resolved. When the cumulative usage time reaches the preset lifespan threshold again, the first liquid replacement trigger signal is generated, and the wet processing equipment is controlled to perform the liquid replacement operation according to the first liquid replacement trigger signal.

10. A wet process equipment, characterized in that, include: At least one chemical solution tank for containing process chemical solutions; The valve unit, which is connected to the liquid tank, includes a drain valve and an injection valve; A temperature control unit, connected to the medicine tank, is used to adjust the temperature of the medicine in the medicine tank; The controller is connected to the liquid tank, the valve unit and the temperature control unit respectively, and is used to perform the liquid replacement method of the liquid tank of the wet process equipment according to any one of claims 1 to 8.

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