Anti-toppling trough cleaning and shaking device

Abstract

This invention relates to the field of silicon wafer cleaning equipment technology, and discloses an anti-tipping trough-type cleaning shaking device, including a cleaning trough and a cleaning basket. A cam-driven shaking assembly is installed inside the cleaning trough, and a bracket assembly is installed on the cleaning trough. The bracket assembly includes a mounting frame, a top rod, a rotating rod, and a tray. The mounting frame is detachably and fixedly installed inside the cleaning trough, and the top rod is vertically and slidably installed on the mounting frame. This trough-type cleaning shaking device drives the top rod to move up and down reciprocally through the cam-driven shaking assembly. The rotating rod is rotatably connected to the top rod and rotates intermittently along its axis during the up-and-down movement. The tray is fixedly installed on the upper end of the rotating rod to support the cleaning basket, allowing the cleaning basket to intermittently rotate while shaking up and down, avoiding cleaning dead zones caused by unidirectional disturbance. Simultaneously, the tray structure prevents the basket from tipping over, solving the problem of wafer cassette tipping and silicon wafer displacement caused by lateral force due to the narrow tip support of existing cams.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer cleaning equipment technology, specifically to an anti-tipping tank-type cleaning shaking device. Background Technology

[0002] Tank-type silicon wafer cleaning equipment is widely used in the silicon wafer surface cleaning process in semiconductor manufacturing. By placing cassettes containing 5-inch and 6-inch silicon wafers on the support frame of the cleaning tank, the matching cam rocker arm reciprocates and lifts the silicon wafers, causing them to rise, fall, rotate, and agitate within the cleaning solution. This improves the contact effect between the cleaning solution and the silicon wafer surface, effectively removing particles and organic impurities from the silicon wafer surface.

[0003] Existing trough-type silicon wafer cleaning equipment uses a narrow, pointed support structure for its cam rocker arm, resulting in a small contact area between the cam lifting head and the bottom of the wafer cassette. When the cam lifts and rotates upwards, the support point only contacts a localized area at the bottom of the wafer cassette, leading to uneven lifting force. Simultaneously, the cam's inclined surface generates a lateral horizontal force during the lifting process, causing the entire wafer cassette to shift laterally, tilt, or even tip over, displacing the silicon wafers inside.

[0004] The aforementioned problems cause the robotic arm to deviate in gripping position when it grabs silicon wafers or wafer cassettes according to preset reference coordinates in fully automatic operation mode. This leads to defects such as wafer grabbing failure, wafer dropping, and scratches on the silicon wafer surface. In severe cases, it can cause equipment shutdown and product scrapping, significantly reducing production line uptime and yield. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides an anti-tipping trough-type cleaning and shaking device that prevents the tablet cassette from tipping over and achieves stable shaking and cleaning, thus solving the problems mentioned in the background section.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: An anti-tipping trough-type washing and shaking device includes a washing trough and a washing basket. The washing trough is equipped with a cam-driven shaking assembly, and a bracket assembly is provided on the washing trough. The bracket assembly includes a mounting frame, a top rod, a rotating rod, and a tray. The mounting frame is detachably and fixedly installed inside the washing trough. The top rod is vertically and slidably installed on the mounting frame and can move up and down reciprocally driven by the cam-driven shaking assembly. The rotating rod is rotatably connected to the top rod and can rotate intermittently along its axis when moving up and down. The tray is fixedly installed on the upper end of the rotating rod to support the washing basket and prevent the washing basket from tipping over.

[0007] Preferably, a vertical column is fixedly installed at the middle position of the mounting bracket. A sliding groove is provided inside the vertical column. A guide hole extending to the upper end of the vertical column and a sliding hole extending to the lower end of the vertical column are respectively provided at the upper and lower ends of the sliding groove. The top rod slides through the sliding hole and extends into the interior of the sliding groove. A sliding plate that is slidably connected to the sliding groove is fixedly installed at the upper end of the top rod. The rotating rod extends through the guide hole and extends into the interior of the sliding groove. The lower end of the rotating rod is rotatably connected to the upper surface of the sliding plate. A guide groove is provided on the inner side wall of the guide hole. A guide rod that matches the guide groove is provided on the side wall of the rotating rod.

[0008] Preferably, the guide groove includes an upper vertical part, a spiral part, and a lower vertical part, wherein the upper end of the spiral part is connected to the lower end of the upper vertical part, and the lower end of the spiral part is connected to the upper end of the lower vertical part.

[0009] Preferably, a blind groove is provided at the top of the slide, and a return spring is fixedly installed between the blind groove and the slide plate.

[0010] Preferably, the cleaning tank has an installation groove fixedly installed inside, the installation groove has a recess in the middle, and its outer edge is fixedly connected to the middle of the inner sidewall of the cleaning tank. The cam rocking assembly includes a drive shaft, a symmetrical cam, and a power output motor. The two ends of the drive shaft are rotatably connected to the two ends of the installation groove. The symmetrical cam is fixedly installed on the drive shaft. The power output motor is fixedly installed on the outer sidewall of the installation groove, and the output end of the power output motor is fixedly connected to the drive shaft.

[0011] Preferably, an arc-shaped support block is fixedly installed at the lower end of the top rod, and the arc-shaped support block is adapted to and abuts against the symmetrical cam.

[0012] Preferably, a stirring blade is fixedly mounted on the drive shaft, the stirring blade is disposed between two adjacent symmetrical cams, and baffles are provided on the inner walls of both sides of the mounting groove.

[0013] Preferably, a transverse positioning block is fixedly installed on the upper surface of the tray, and a positioning beam adapted to the transverse positioning block is provided at the bottom of the washing basket.

[0014] Compared with the prior art, the present invention provides an anti-tipping trough-type washing and shaking device, which has the following beneficial effects: This trough-type cleaning and shaking device drives a push rod to move up and down reciprocally via a cam-driven rocking assembly. The rotating rod is rotatably connected to the push rod and rotates intermittently along its axis during the up-and-down movement. A tray is fixedly installed on the upper end of the rotating rod to support the cleaning basket, allowing the cleaning basket to rotate intermittently while rocking up and down. This avoids cleaning dead zones caused by disturbances in one direction. At the same time, the tray structure prevents the basket from tipping over, solving the problem of wafer cassette tipping and silicon wafer displacement caused by lateral force due to the narrow tip support of the existing cam.

[0015] This trough-type cleaning and shaking device features a sliding groove, guide hole, and sliding hole inside the vertical column. The guide groove cooperates with the guide rod on the rotating rod to make the rotating rod rotate intermittently along the spiral section when the top rod is raised and lowered. A return spring ensures that the rotating rod returns to its original position. The arc-shaped support block and the symmetrical cam are adapted to abut against each other to increase the contact area and reduce the lateral force. The transverse positioning block on the tray cooperates with the positioning beam at the bottom of the cleaning basket to form a double limit. In this way, the basket's posture remains stable during the combined motion of up-and-down shaking and intermittent rotation, avoiding silicon wafer displacement and failure of the robotic arm to grasp. Attached Figure Description

[0016] Figure 1 This is one of the three-dimensional structural schematic diagrams of the trough-type cleaning and shaking device of the present invention; Figure 2 This is a second three-dimensional structural schematic diagram of the trough-type cleaning and shaking device of the present invention; Figure 3 For the present invention Figure 2 Enlarged schematic diagram of the local structure at point A; Figure 4 This is a three-dimensional structural breakdown diagram of the bracket in this invention; Figure 5 For the present invention Figure 4 Enlarged schematic diagram of the local structure at point B; Figure 6 This is the third three-dimensional structural schematic diagram of the trough-type cleaning and shaking device of the present invention; Figure 7 This is a partial three-dimensional structural breakdown diagram of the trough-type cleaning and shaking device of the present invention.

[0017] In the diagram: 1. Cleaning tank; 11. Mounting slot; 12. Baffle plate; 2. Cam rocking assembly; 21. Drive shaft; 22. Symmetrical cam; 23. Power output motor; 24. Stirring blade; 3. Bracket assembly; 31. Mounting bracket; 32. Top rod; 321. Slide plate; 322. Arc-shaped support block; 33. Rotating rod; 331. Guide rod; 34. Tray; 341. Horizontal positioning block; 35. Vertical column; 351. Slide groove; 352. Guide hole; 353. Slide hole; 354. Guide groove; 3541. Upper vertical part; 3542. Spiral part; 3543. Lower vertical part; 355. Blind groove; 356. Return spring; 4. Cleaning basket. Detailed Implementation

[0018] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0019] Example 1 Please see Figure 1This invention provides an anti-tipping trough-type washing and shaking device, including a washing trough 1 and a washing basket 4. The washing trough 1 is equipped with a cam shaking assembly 2 inside, and a bracket assembly 3 is provided on the washing trough 1. The bracket assembly 3 includes a mounting frame 31, a top rod 32, a rotating rod 33, and a tray 34. The mounting frame 31 is detachably and fixedly installed inside the washing trough 1. The top rod 32 is vertically and slidably installed on the mounting frame 31, and the top rod 32 is driven by the cam shaking assembly 2 to move up and down reciprocally. The rotating rod 33 is rotatably connected to the top rod 32, and the rotating rod 33 can rotate intermittently along its axis when moving up and down. The tray 34 is fixedly installed on the upper end of the rotating rod 33 to support the washing basket 4 and prevent the washing basket 4 from tipping over.

[0020] As can be seen from the above, by setting a detachable and fixed mounting bracket 31 inside the cleaning tank 1, a top rod 32 is vertically slidably mounted on the mounting bracket 31. The top rod 32 is driven by the cam rocking assembly 2 to move up and down reciprocally. The rotating rod 33 is rotatably connected to the top rod 32 and rotates intermittently along its axis when moving up and down. The tray 34 is fixedly mounted on the upper end of the rotating rod 33 to support the cleaning basket 4, so that the cleaning basket 4 can rotate intermittently around its own axis while rocking up and down, avoiding the cleaning dead angle caused by disturbance in one direction. At the same time, the tray 34 provides stable support for the cleaning basket 4 to prevent it from tipping over. The detachable design of the mounting bracket 31 makes it easy to replace or maintain the entire bracket assembly 3 as a whole without disassembling other parts of the cleaning tank 1, which solves the problem of the existing cam narrow tip support causing the wafer cassette to tip over and the silicon wafer to shift due to the lateral component force.

[0021] When using this device, firstly, the mounting bracket 31 is detachably fixed inside the cleaning tank 1. Then, the cleaning basket 4 containing silicon wafers is placed on the tray 34. Next, the cam rocking assembly 2 is activated. The cam rocking assembly 2 drives the push rod 32 to perform a vertical reciprocating lifting and lowering motion. The push rod 32 drives the rotating rod 33 to rise and fall together. During the lifting and lowering process, the rotating rod 33 achieves intermittent rotation along its own axis through its internal guide structure. The tray 34 at the upper end of the rotating rod 33 then drives the cleaning basket 4 to rock up and down and rotate intermittently, thereby creating multidimensional disturbance in the cleaning solution, improving the removal effect of particles and impurities on the silicon wafer surface. At the same time, the stable support of the tray 34 prevents the cleaning basket 4 from tilting or tipping over during the movement. When it is necessary to replace the cleaning basket 4 of different specifications or to repair the bracket assembly 3, the entire mounting bracket 31 can be removed from the cleaning tank 1, which is convenient and quick.

[0022] Example 2 As shown in the figure, the difference between this embodiment and the above embodiment is that a vertical column 35 is fixedly installed in the middle position of the mounting bracket 31. A sliding groove 351 is opened inside the vertical column 35. A guide hole 352 penetrating to the upper end of the vertical column 35 and a sliding hole 353 penetrating to the lower end of the vertical column 35 are respectively opened at the upper and lower ends of the sliding groove 351. The top rod 32 slides through the sliding hole 353 and extends into the interior of the sliding groove 351. A sliding plate 321 that is slidably connected to the sliding groove 351 is fixedly installed at the upper end of the top rod 32. A rotating rod 33 extends through the guide hole 352 and extends into the interior of the sliding groove 351. The lower end of the rotating rod 33 is rotatably connected to the upper surface of the sliding plate 321. A guide groove 354 is opened on the inner side wall of the guide hole 352. A guide rod 331 that is adapted to the guide groove 354 is opened on the side wall of the rotating rod 33.

[0023] As can be seen from the above, the groove 351 inside the vertical column 35 provides a vertical sliding track for the slide plate 321. The slide plate 321 is fixed to the upper end of the top rod 32 and slides up and down along the groove 351, ensuring that the top rod 32 will not deflect or shake during the lifting and lowering process. The lower end of the rotating rod 33 is rotatably connected to the upper surface of the slide plate 321, allowing the rotating rod 33 to rotate freely on the slide plate 321. The guide groove 354 opened on the inner side wall of the guide hole 352 cooperates with the guide rod 331 on the side wall of the rotating rod 33. When the top rod 32 drives the rotating rod 33 to lift and lower together, the guide rod 331 is forced to move along the trajectory of the guide groove 354, thereby driving the rotating rod 33 to rotate around its own axis, realizing the function of converting vertical lifting and lowering motion into rotational motion.

[0024] The guide groove 354 includes an upper vertical part 3541, a spiral part 3542 and a lower vertical part 3543. The upper end of the spiral part 3542 is connected to the lower end of the upper vertical part 3541, and the lower end of the spiral part 3542 is connected to the upper end of the lower vertical part 3543.

[0025] As can be seen from the above, the guide groove 354 is composed of three interconnected sections: the upper vertical section 3541, the spiral section 3542, and the lower vertical section 3543. These three sections determine the rotation behavior of the rotating rod 33 in different lifting stages. When the top rod 32 begins to rise, the guide rod 331 first passes through the lower vertical section 3543. At this time, the rotating rod 33 only rises and does not rotate. After entering the spiral section 3542, the guide rod 331 moves along the spiral path, forcing the rotating rod 33 to gradually rotate at a certain angle. After reaching the upper vertical section 3541, the rotating rod 33 stops rotating again and maintains this angle until the top rod 32 reaches the highest point. The descent process is the opposite. The rotating rod 33 rotates in the opposite direction in the spiral section 3542 back to the initial angle, while in the upper and lower vertical sections, it only descends and does not rotate. This design allows the rotating rod 33 to rotate only in the middle section of the lifting stroke and remain stationary at the beginning and end positions, achieving the effect of intermittent rotation and avoiding excessive agitation of the liquid or displacement of the basket position that may be caused by continuous rotation.

[0026] A blind groove 355 is provided at the top of the slide 351, and a return spring 356 is fixedly installed between the blind groove 355 and the slide plate 321.

[0027] As can be seen from the above, the return spring 356 in the blind slot 355 provides a continuous downward thrust for the slide plate 321. When the symmetrical cam 22 pushes the push rod 32 upward, the return spring 356 is compressed and stores elastic potential energy. When the symmetrical cam 22 passes the highest point, the return spring 356 releases energy to push the slide plate 321 downward, so that the arc-shaped support block 322 at the lower end of the push rod 32 always maintains contact with the surface of the symmetrical cam 22 and will not jump or disengage. This elastic return method ensures that the push rod 32 can respond in a timely manner to the contour changes of the symmetrical cam 22, ensuring the continuity and stability of the lifting motion.

[0028] Example 3 As shown in the figure, the difference between this embodiment and the above embodiment is that an installation groove 11 is fixedly installed inside the cleaning tank 1. The middle part of the installation groove 11 is recessed, and its outer edge is fixedly connected to the middle part of the inner sidewall of the cleaning tank 1. The cam rocking assembly 2 includes a drive shaft 21, a symmetrical cam 22, and a power output motor 23. The two ends of the drive shaft 21 are rotatably connected to the two ends of the installation groove 11. The symmetrical cam 22 is fixedly installed on the drive shaft 21. The power output motor 23 is fixedly installed on the outer sidewall of the installation groove 11, and the output end of the power output motor 23 is fixedly connected to the drive shaft 21.

[0029] As can be seen from the above, the symmetrical cam 22 is the power source of the entire rocking device, and its contour shape directly affects the motion characteristics of the push rod 32. The symmetrical cam 22 adopts a wide arc contour design with left and right symmetry. When the drive shaft 21 drives the symmetrical cam 22 to rotate at a constant speed, the contact point between the cam contour and the arc support block 322 gradually transitions from the lowest point to the highest point and then back to the lowest point, pushing the push rod 32 to complete a complete lifting cycle. Since the cam contour is left and right symmetrical and adopts a large radius arc transition, the horizontal component of the lifting force cancels each other out. The driving force acting on the push rod 32 is mainly in the vertical direction, which weakens the lateral overturning force generated by the traditional pointed cam.

[0030] An arc-shaped support block 322 is fixedly installed at the lower end of the push rod 32, and the arc-shaped support block 322 is adapted to and abuts against the symmetrical cam 22.

[0031] As can be seen from the above, the arc-shaped support block 322 is fixedly installed at the lower end of the top rod 32. Its top surface is concave arc-shaped and its width covers the bottom of the washing basket 4. The arc-shaped support block 322 and the symmetrical cam 22 are in surface contact rather than point contact, which increases the force-bearing area and allows the lifting force to be evenly distributed on the surface of the arc-shaped support block 322, avoiding wear or deformation caused by local stress concentration.

[0032] A stirring blade 24 is fixedly installed on the drive shaft 21. The stirring blade 24 is arranged between two adjacent symmetrical cams 22. Baffles 12 are provided on the inner walls of both sides of the mounting groove 11.

[0033] As can be seen from the above, the stirring plate 24 and the turbulence plate 12 are used to improve the flow state of the liquid in the cleaning tank 1. The stirring plate 24 is fixed on the drive shaft 21 and rotates with it to stir the liquid in the cleaning tank 1, forming forced convection. The turbulence plate 12 is fixed on the inner walls of both sides of the mounting groove 11, which changes the flow direction and speed distribution of the liquid and generates turbulence around the cleaning basket 4. The combined effect of the two accelerates the renewal speed of the liquid on the silicon wafer surface, promotes the detachment and diffusion of particles and impurities, and improves the cleaning effect. Since the stirring plate 24 is set between two adjacent symmetrical cams 22, its rotation will not interfere with the normal cooperation between the symmetrical cams 22 and the arc-shaped support block 322.

[0034] A transverse positioning block 341 is fixedly installed on the upper surface of the tray 34, and a positioning beam adapted to the transverse positioning block 341 is provided at the bottom of the washing basket 4.

[0035] As can be seen from the above, the horizontal positioning block 341 and the positioning beam are used to limit the horizontal position of the cleaning basket 4 on the tray 34. The horizontal positioning block 341 is fixed on the upper surface of the tray 34, and the positioning beam is set at the bottom of the cleaning basket 4. The two shapes are compatible with each other. When the cleaning basket 4 is placed on the tray 34, the positioning beam is embedded in the gap between the horizontal positioning blocks 341, which limits the movement of the cleaning basket 4 in the front-back and left-right directions, so that it always maintains the correct placement position during the up-and-down rocking and intermittent rotation, and will not slip or tip over. This positioning method, combined with the stable support formed by the symmetrical cam 22 and the arc-shaped support block 322 at the bottom, constitutes a double upper and lower limit, ensuring that the cleaning basket 4 maintains a stable posture throughout the entire cleaning cycle.

[0036] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A tilt-proof trough-type washing and shaking device, comprising a washing trough (1) and a washing basket (4), characterized in that: The cleaning tank (1) is equipped with a cam rocking assembly (2) inside, and a bracket assembly (3) is provided on the cleaning tank (1). The bracket assembly (3) includes a mounting frame (31), a top rod (32), a rotating rod (33), and a tray (34). The mounting frame (31) is detachably and fixedly installed inside the cleaning tank (1). The top rod (32) is vertically and slidably installed on the mounting frame (31), and the top rod (32) is driven by the cam rocking assembly (2) to move up and down reciprocally. The rotating rod (33) is rotatably connected to the top rod (32), and the rotating rod (33) can rotate intermittently along its axis when moving up and down. The tray (34) is fixedly installed on the upper end of the rotating rod (33) to support the cleaning basket (4) and prevent the cleaning basket (4) from tipping over.

2. The anti-tipping trough-type washing and shaking device according to claim 1, characterized in that: A vertical column (35) is fixedly installed in the middle of the mounting bracket (31). A sliding groove (351) is provided inside the vertical column (35). A guide hole (352) penetrating to the upper end of the vertical column (35) and a sliding hole (353) penetrating to the lower end of the vertical column (35) are respectively provided at the upper and lower ends of the sliding groove (351). The top rod (32) slides through the sliding hole (353) and extends into the interior of the sliding groove (351). A sliding plate (321) that is slidably connected to the sliding groove (351) is fixedly installed at the upper end of the top rod (32). A rotating rod (33) extends through the guide hole (352) and extends into the interior of the sliding groove (351). The lower end of the rotating rod (33) is rotatably connected to the upper surface of the sliding plate (321). A guide groove (354) is provided on the inner side wall of the guide hole (352). A guide rod (331) that is adapted to the guide groove (354) is provided on the side wall of the rotating rod (33).

3. The anti-tipping trough-type washing and shaking device according to claim 2, characterized in that: The guide groove (354) includes an upper vertical part (3541), a spiral part (3542) and a lower vertical part (3543). The upper end of the spiral part (3542) is connected to the lower end of the upper vertical part (3541), and the lower end of the spiral part (3542) is connected to the upper end of the lower vertical part (3543).

4. The anti-tipping trough-type washing and shaking device according to claim 2, characterized in that: A blind groove (355) is provided at the top of the slide (351), and a return spring (356) is fixedly installed between the blind groove (355) and the slide plate (321).

5. The anti-tipping trough-type washing and shaking device according to claim 1, characterized in that: The cleaning tank (1) has a fixed mounting groove (11) inside. The mounting groove (11) has a recess in the middle and its outer edge is fixedly connected to the middle of the inner side wall of the cleaning tank (1). The cam rocking assembly (2) includes a drive shaft (21), a symmetrical cam (22) and a power output motor (23). The two ends of the drive shaft (21) are rotatably connected to the two ends of the mounting groove (11). The symmetrical cam (22) is fixedly mounted on the drive shaft (21). The power output motor (23) is fixedly mounted on the outer side wall of the mounting groove (11) and the output end of the power output motor (23) is fixedly connected to the drive shaft (21).

6. The anti-tipping trough-type washing and shaking device according to claim 5, characterized in that: An arc-shaped support block (322) is fixedly installed at the lower end of the top rod (32), and the arc-shaped support block (322) is adapted to abut against the symmetrical cam (22).

7. The anti-tipping trough-type washing and shaking device according to claim 5, characterized in that: A stirring blade (24) is fixedly installed on the drive shaft (21). The stirring blade (24) is arranged between two adjacent symmetrical cams (22). A turbulence plate (12) is provided on the inner walls of both sides of the mounting groove (11).

8. The anti-tipping trough-type washing and shaking device according to claim 1, characterized in that: A transverse positioning block (341) is fixedly installed on the upper surface of the tray (34), and a positioning beam adapted to the transverse positioning block (341) is provided at the bottom of the cleaning basket (4).

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