A double-sided processing system and method

Abstract

This invention relates to a double-sided processing system and method, comprising a loading unit, a processing unit, an unloading unit, a preliminary positioning unit, and a transfer unit. The preliminary positioning unit includes a leveling table located at the preliminary positioning station. The processing unit includes a support table that moves between the loading / unloading station and the processing station. The unloading unit includes an unloading temporary storage unit located at the temporary storage station for temporarily storing workpieces that have undergone single-sided or double-sided processing. The transfer unit moves the workpieces between the preliminary positioning station, the loading / unloading station, and the temporary storage station. The transfer unit includes a left-flipping mechanism and a right-flipping mechanism. The adsorption mechanism of the flipping mechanism picks up the workpiece, and a rotation drive mechanism rotates the adsorption mechanism. The transfer unit can simultaneously pick up and place workpieces and rotate the workpieces during the process. The same processing equipment completes double-sided exposure of the workpiece, requiring less space and achieving higher processing accuracy.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device processing technology, and in particular to a double-sided processing system and method for semiconductor devices. Background Technology

[0002] Currently, in the semiconductor device manufacturing process, it is necessary to process both sides of the semiconductor workpiece. At present, double-sided processing is usually carried out by setting up a flipping device between two machines or between two worktables to achieve double-sided exposure of the workpiece. A single machine or a single worktable can only complete single-sided exposure, which occupies a large space. Moreover, different machines and different worktables have different processing accuracy and other parameters, which affect the processing accuracy. Summary of the Invention

[0003] The purpose of this invention is to provide a double-sided light processing system and method, which completes double-sided processing through a single worktable, thereby improving processing accuracy.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a double-sided processing system, comprising a loading unit, a processing unit, and an unloading unit. The loading unit is used to pick up workpieces, the processing unit is used to process workpieces, and the unloading unit is used to pick up and place workpieces. The double-sided processing system further includes a preliminary positioning unit and a transfer unit. The loading unit includes a loading pallet, a loading vertical drive mechanism, and a loading and unloading arm unit. The loading pallet is used to place a workpiece-loaded box. The loading pallet is mounted on the vertical drive mechanism. The vertical drive mechanism drives the loading pallet to move up and down, moving the workpiece box to the loading plane. The loading and unloading arm unit moves the workpiece in the workpiece box to the preliminary positioning unit. The preliminary positioning unit includes a leveling table for leveling and coarsely positioning the workpiece and temporarily storing the completed workpiece. The workpiece for surface machining is located at the initial positioning station. The machining unit includes a support platform that moves between the loading / unloading station and the machining station. The loading / unloading station is used for loading and unloading the workpiece, and the machining station is used for machining the workpiece. The unloading unit includes an unloading temporary storage unit for temporarily storing workpieces that have completed single-sided or double-sided machining. This unit is located at the temporary storage station. The intermediate transfer unit moves the workpiece between the initial positioning station, the loading / unloading station, and the temporary storage station. The intermediate transfer unit includes a left-flipping mechanism and a right-flipping mechanism. Both the left-flipping mechanism and the right-flipping mechanism include a rotary drive mechanism and a suction mechanism. The suction mechanism picks up the workpiece, and the rotary drive mechanism rotates the suction mechanism. The intermediate transfer unit can simultaneously pick up and place workpieces and rotate the workpieces during the picking and placing process.

[0005] In one embodiment, the intermediate transfer unit simultaneously picks up workpieces placed at the initial positioning station and the loading / unloading station, moves the workpiece placed at the initial positioning station to the loading / unloading station, and moves the workpiece placed at the loading / unloading station to the temporary storage station; or the intermediate transfer unit simultaneously picks up workpieces placed at the loading / unloading station and the temporary storage station, moves the workpiece at the loading / unloading station to the initial positioning station, and moves the workpiece at the temporary storage station to the loading station; when moving a workpiece that has completed front-side processing, the workpiece that has completed front-side processing is flipped over before placing the workpiece.

[0006] In one embodiment, the initial positioning station, the loading / unloading station, and the temporary storage station are arranged linearly. The initial positioning station, the loading / unloading station, and the temporary storage station are set according to the spacing between the left-flipping mechanical parts and the right-flipping mechanical parts of the intermediate transfer assembly, so as to facilitate the simultaneous loading and unloading of parts by the intermediate transfer assembly.

[0007] In one embodiment, the loading and unloading arm unit includes a moving mechanism, an L-shaped robotic arm connected to the moving mechanism, and a picking mechanism connected to the end of the robotic arm. The moving mechanism drives the L-shaped robotic arm to move to the picking station, and the picking mechanism picks up the workpiece.

[0008] In one embodiment, the double-sided processing system further includes a vision inspection unit, which is located above the moving path of the support platform. After the workpiece is processed, it passes through the vision inspection unit to check whether the workpiece is a qualified product.

[0009] In one embodiment, the material unloading temporary storage unit includes a temporary storage platform and a storage platform. The temporary storage platform is used to store qualified parts, and the storage platform is used to store unqualified parts. The material unloading and transfer unit includes a sliding mechanism and a main body connected to the sliding mechanism. A first material unloading robotic arm and a second material unloading robotic arm are provided at both ends of the main body. The first material unloading robotic arm is used to pick up qualified parts on the temporary storage platform, and the second material unloading robotic arm is used to pick up unqualified parts on the storage platform.

[0010] In one embodiment, the first or second unloading robotic arm is connected to the main body via an adjustment plate. The adjustment plate is provided with an adjustment hole that extends in a direction perpendicular to the first or second unloading robotic arm. The distance between the first and second unloading robotic arms is adjusted through the adjustment hole.

[0011] A double-sided processing method includes a loading and unloading arm unit of a loading unit that moves a workpiece from a material box to an initial positioning station. The initial positioning unit acquires coarse positioning information of the workpiece and performs center positioning. A transfer unit simultaneously transfers the unprocessed workpiece from the initial positioning station and the workpiece that has completed front-side processing at the loading / unloading station. The unprocessed workpiece at the initial positioning station is moved to a support platform at the loading / unloading station. The workpiece that has completed front-side processing is moved to an unloading temporary storage unit. Before the workpiece is placed in front of the unloading temporary storage unit, it is flipped so that its reverse side is facing up in the unloading temporary storage unit. The support platform carries the workpiece to the processing station for processing. After the front-side processing is completed, the support platform returns to the loading / unloading station. The transfer unit simultaneously transfers the workpiece that has completed front-side processing and the workpiece placed reverse-side up in the unloading temporary storage unit. The workpieces in the temporary storage unit are moved to the initial positioning station after front-side machining. Before the front-side machined workpieces are placed at the initial positioning station, they are flipped so that the reverse side is facing up and placed at the initial positioning station. The workpieces placed reverse-side up in the unloading temporary storage unit are moved to the support platform at the loading / unloading station. The support platform carries the workpieces to the machining station for reverse-side machining. After reverse-side machining is completed, the workpieces return to the loading / unloading station. The intermediate transfer unit simultaneously transfers the workpieces placed reverse-side up at the initial positioning station and the workpieces that have completed double-sided machining at the loading / unloading station. The workpieces placed reverse-side up at the initial positioning station are moved to the support platform at the loading / unloading station. The workpieces placed on the support platform that have completed double-sided machining are moved to the unloading temporary storage unit. The support platform carries the workpieces to the machining station for reverse-side machining. The unloading temporary storage unit unloads the finished workpieces, while the loading unit and the loading arm unit move the workpieces in the material box to the initial positioning station. The initial positioning unit obtains the coarse positioning information of the workpieces and performs center positioning. The intermediate transfer unit simultaneously transfers the unprocessed workpieces at the initial positioning station and the workpieces that have completed reverse processing at the loading and unloading stations. The unprocessed workpieces at the initial positioning station are moved to the support platform at the loading and unloading station, while the workpieces that have completed reverse processing are moved to the unloading temporary storage unit. The support platform carries the workpieces to the processing station for processing. After the front processing of the workpieces is completed, the support platform returns to the loading and unloading station, and the loading unit continues to load. The above steps are repeated to complete the continuous processing of the workpieces.

[0012] In one embodiment, after the workpiece is processed, a quality inspection is performed. Qualified products are placed on the temporary storage platform of the unloading temporary storage unit, while unqualified products are placed on the storage platform of the unloading temporary storage unit.

[0013] Compared with existing technologies, the technical solution of this invention completes double-sided exposure of the workpiece using a single support stage, resulting in higher processing accuracy. Furthermore, the coordination between the intermediate transfer unit, the initial positioning unit, and the material unloading temporary storage unit ensures smooth workpiece flow and improves processing efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of an embodiment of the double-sided processing system of the present invention.

[0015] Figure 2 This is a schematic diagram of the transfer unit in an embodiment of the double-sided processing system of the present invention.

[0016] Figure 3 This is a schematic diagram of a flipping mechanical component in an embodiment of the double-sided processing system of the present invention.

[0017] Figure 4 This is a schematic diagram of the unloading and transfer unit of an embodiment of the double-sided processing system of the present invention.

[0018] Figure 5 This is a schematic flowchart of one embodiment of the double-sided processing method of the present invention (I).

[0019] Figure 6 This is a schematic flowchart (II) of an embodiment of the double-sided processing method of the present invention.

[0020] Figure 7 This is a schematic flowchart (III) of an embodiment of the double-sided processing method of the present invention.

[0021] Figure 8 This is a schematic flowchart (IV) of an embodiment of the double-sided processing method of the present invention.

[0022] Figure 9 This is a flowchart illustrating the steps of an embodiment of the double-sided processing method of the present invention (V).

[0023] Figure 10 This is a schematic flowchart (VI) of an embodiment of the double-sided processing method of the present invention.

[0024] Figure 11 This is a schematic flowchart (VII) of an embodiment of the double-sided processing method of the present invention.

[0025] Figure 12 This is a schematic flowchart (VIII) of an embodiment of the double-sided processing method of the present invention.

[0026] Figure 13 This is a schematic flowchart (IX) of an embodiment of the double-sided processing method of the present invention. Detailed Implementation

[0027] To make the technical solution of the present invention clearer, embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the specific description of the embodiments is only for teaching those skilled in the art how to implement the present invention, and is not intended to exhaustively describe all feasible methods of the present invention, nor is it intended to limit the specific scope of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0028] In the description of this invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed, installed, or operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0029] Reference Figures 1 to 4 This invention provides a double-sided processing system capable of processing both the front and back sides of semiconductor materials. The semiconductor materials can be wafers, silicon wafers, etc., of different sizes. The double-sided processing system includes a loading unit 1, a processing unit 2, a preliminary positioning unit 3, a vision inspection unit 4, a transfer unit 5, and an unloading unit 7. The loading unit 1 is used for loading and conveying workpieces; the processing unit 2 is used for processing the workpieces; the preliminary positioning unit 3 is used for preliminary positioning of the workpieces; the vision inspection unit 4 is used for positioning the workpieces and detecting whether they are qualified; the transfer unit 5 is used for moving the workpieces between different workstations; and the unloading unit 7 is used for loading the processed workpieces into an unloading box.

[0030] The loading unit 1 includes a loading tray 10, a loading vertical drive mechanism, a loading and unloading arm unit 12, and an inspection mechanism 13. The loading tray 10 is used to place the material box 14 loaded with workpieces. The loading tray is equipped with a detection mechanism to detect the size of the workpiece. The loading tray 10 is installed on the vertical drive mechanism. The loading vertical drive mechanism drives the loading tray 10 to move up and down, moving the material box to the loading plane. The inspection mechanism 13 is located at the front end of the loading tray 10. Based on the size of the workpiece, it obtains the number of wafer layers, the position of each layer, and the height difference of each wafer to determine whether there are stacked or misaligned layers. The layer number, position, height, and other data are stored for subsequent accurate material handling. The loading and unloading arm unit 12 moves the workpiece in the material box to the initial positioning unit 3. The loading and unloading arm unit 12 includes a moving mechanism, an L-shaped robotic arm connected to the moving mechanism, and a picking mechanism connected to the end of the robotic arm. The moving mechanism drives the L-shaped robotic arm to move to the picking station, and the picking mechanism picks up the workpiece and places it in the initial positioning unit 3.

[0031] The processing unit 2 includes a support platform 20 and a motion mechanism 21. The support platform 20 is mounted on the motion mechanism 21, and the motion mechanism 21 is used to drive the workpiece to move between the loading / unloading position and the processing position.

[0032] The initial positioning unit 3 includes a leveling table 30 and an initial positioning camera unit. The workpiece is placed on the leveling table 30, and the initial positioning camera unit is located above the leveling table 30 to acquire images of the workpiece. The leveling table is equipped with positioning components, which push the workpiece to perform concentric leveling and initially position the workpiece in the same position, which facilitates accurate placement of the workpiece in the subsequent process.

[0033] The visual inspection unit 4 comprises a fine alignment front-side visual inspection mechanism and a fine alignment back-side visual inspection mechanism. The fine alignment front-side visual inspection mechanism is arranged above the moving path of the loading stage 20, and is configured to acquire alignment information of the front side of the workpiece placed on the loading stage 20. The fine alignment back-side visual inspection mechanism is arranged on the loading stage, and is configured to acquire the alignment information of the front side of the workpiece when the workpiece is placed on the loading stage with its front side facing downward. The loading stage 20 performs processing according to the alignment information from the visual inspection unit. During the processing of the back side of the workpiece, overlay marks are fabricated on the back side of the workpiece, and the overlay marks can be arranged correspondingly according to the front-side alignment information, for example, arranged in correspondence with the front-side alignment information. After the double-side processing of the workpiece is completed, the workpiece passes through the fine alignment front-side visual inspection mechanism again. The fine alignment front-side visual inspection mechanism acquires the information of the overlay marks on the back side of the workpiece, and the fine alignment back-side visual inspection mechanism acquires the front-side alignment information of the workpiece. The acquired overlay mark information on the back side of the workpiece and the front-side alignment information of the workpiece are compared to determine whether the overlay accuracy of the workpiece meets the requirements. If the deviation between the overlay information and the alignment information is within the allowable range of the overlay accuracy, the workpiece is deemed to be qualified. If the deviation between the overlay information and the alignment information exceeds the allowable range of the overlay accuracy, the workpiece is deemed to be unqualified. By distinguishing qualified workpieces from unqualified workpieces, unqualified workpieces are prevented from flowing into subsequent processes.

[0034] The intermediate transfer unit 5 comprises a driving mechanism 50 and a dual-wafer handling mechanism. The dual-wafer handling mechanism is mounted on the driving unit 50, and the driving unit drives the dual-wafer handling mechanism to move. The dual-wafer handling mechanism comprises a left turning mechanical member 51 and a right turning mechanical member 52. Each of the left turning mechanical member 51 and the right turning mechanical member 52 includes a rotary driving mechanism 53 and a suction mechanism 54. The suction mechanism 54 picks up the workpiece, and the rotary driving mechanism 53 rotates the suction mechanism 4, so as to turn the workpiece from a state with the front side facing upward to a state with the back side facing upward. The left turning mechanical member 51 and the right turning mechanical member 52 can be fixed to a connecting plate, the connecting plate is connected to the driving mechanism 50, and the driving mechanism 50 drives the left turning mechanical member 51 and the right turning mechanical member 52 to move integrally through the connecting plate. The left turning mechanical member 51 and the right turning mechanical member 52 can also be connected to the driving mechanism 50 respectively, the driving mechanism 50 controls the left turning mechanical member 51 and the right turning mechanical member 52 respectively, and the spacing between the left turning mechanical member 51 and the right turning mechanical member 52 is adjustable, which facilitates the unloading operation of unqualified products and reduces the waiting time for waiting to handle the workpiece.

[0035] The unloading unit 7 includes unloading trays (70, 71), an unloading vertical drive mechanism, unloading temporary storage units (74, 75), and an unloading transfer unit 76. The unloading trays (70, 71) are used to hold material boxes and are installed on the vertical drive mechanism. The vertical drive mechanism drives the unloading trays (70, 71) to move the material boxes to the loading plane to load the processed workpieces. The unloading transfer unit 76 moves the processed workpieces into the material boxes. The unloading unit 7 is divided into two groups, corresponding to qualified products and unqualified products respectively. The unloading tray corresponding to qualified products is the first unloading tray 70, used to support the material boxes containing qualified products. The unloading tray corresponding to unqualified products is the second unloading tray 71, used to support the material boxes containing unqualified products. The temporary storage unit for qualified products is a temporary storage platform 74, used to place workpieces that have completed single-sided processing or qualified workpieces that have completed double-sided processing. The temporary storage unit for unqualified products is a storage platform 75, used to place unqualified workpieces. The unloading and transfer unit 76 includes a sliding mechanism 760 and a main body 761 connected to the sliding mechanism 760. A first unloading robotic arm 762 and a second unloading robotic arm 763 are provided at both ends of the main body 761. The first unloading robotic arm 762 or the second unloading robotic arm 763 is connected to the main body 761 through an adjusting plate 764. The adjusting plate 764 is provided with an adjusting hole 765. The adjusting hole 765 extends in a direction perpendicular to the first unloading robotic arm 762 or the second unloading robotic arm 763. The distance between the first unloading robotic arm 762 and the second unloading robotic arm 763 is adjusted through the adjusting hole 765 so that the first unloading robotic arm and the second unloading robotic arm are adapted to the interval size between the temporary storage platform 74 and the storage platform 75.

[0036] The loading and unloading positions of the aligning table 30 of the initial positioning unit 3, the bearing table 20 of the processing unit 2, and the temporary storage table 74 of the unloading unit 7 are located on the same straight line. The distance between the loading and unloading positions of the aligning table 30 and the bearing table 30 is equal to the distance between the loading and unloading positions of the temporary storage table 74 and the bearing table 30. The distance between the two flipping mechanical parts (left flipping mechanical part 51 and right flipping mechanical part 52) ​​of the intermediate transfer unit 5 is set to correspond to the distance between the loading and unloading positions of the aligning table 30 and the bearing table 20 or the distance between the loading and unloading positions of the temporary storage table 74 and the bearing table 20.

[0037] See attached document Figure 5 To be continued Figure 13 The processing method of the double-sided processing system will be described in detail below.

[0038] The inspection mechanism checks the workpiece size, and the vertical drive mechanism, through a descent action, works in conjunction with the inspection mechanism 13 to check the wafer distribution in the wafer cassette. The loading and unloading arm unit 12 moves the workpiece from the cassette to the initial positioning unit 3, which performs center positioning on the workpiece and obtains the coarse positioning information of the workpiece. The intermediate transfer unit 5 simultaneously transfers the unprocessed workpiece placed on the initial positioning unit and the workpiece that has completed front-side processing. The unprocessed workpiece placed on the initial positioning unit's alignment table 30 is moved to the platform unit's support table 20 for front-side processing. The workpiece that has completed front-side processing on the support table 20 is moved to the unloading temporary storage unit. Before the workpiece that has completed front-side processing is placed in the unloading temporary storage unit, the workpiece that has completed front-side processing is flipped over and placed in the unloading temporary storage unit with its reverse side facing up.

[0039] The transfer unit 5 simultaneously transfers the workpieces that have completed front-side processing and the workpieces placed face-up in the unloading temporary storage unit. The workpieces that have completed front-side processing are moved from the support platform 20 to the aligning platform 30 of the initial positioning unit. Before the workpieces that have completed front-side processing are placed on the aligning platform 30, the workpieces that have completed front-side processing are flipped over and placed face-up on the aligning platform 30. The workpieces that have been placed face-up in the unloading temporary storage unit are moved to the support platform 20 of the platform unit for face-up processing.

[0040] The intermediate transfer unit 5 simultaneously transfers the workpiece placed face-up on the grading table 30 and the workpiece that has been processed on both sides placed on the support table 20. The workpiece placed face-up on the grading table 30 is moved to the support table 20 of the platform unit for face-up processing. The workpiece that has been processed on both sides placed on the support table 20 is moved to the unloading temporary storage unit.

[0041] During workpiece processing, the precision positioning front vision inspection mechanism acquires the front alignment information of the workpiece and performs front processing based on the front alignment information. When processing the back side of the workpiece, the precision positioning back vision inspection mechanism acquires the front alignment information of the workpiece and performs back processing. During back processing, overlay points are created on the back side of the workpiece. These overlay points can be set according to the front alignment information. After the workpiece completes double-sided processing, it passes through the precision positioning front vision inspection mechanism again. The precision positioning front vision inspection mechanism acquires the overlay point information on the back side of the workpiece, and the precision positioning back vision inspection mechanism acquires the front alignment information of the workpiece. The acquired overlay point information on the back side of the workpiece is compared with the front alignment information to determine whether the overlay accuracy of the workpiece meets the requirements. If the deviation between the overlay information and the alignment information is within the allowable range of overlay accuracy, the workpiece is considered qualified. If the deviation exceeds the allowable range of overlay accuracy, the workpiece is considered unqualified. Qualified products are placed on the temporary storage table of the unloading temporary storage unit, and unqualified products are placed on the storage table of the unloading temporary storage unit. By distinguishing between qualified and unqualified workpieces, unqualified workpieces are prevented from flowing into subsequent processes.

[0042] The unloading unit unloads the processed workpieces.

[0043] The specific steps are as follows: The material box filled with workpieces is placed on the feeding tray 10 of the feeding unit. The size of the workpiece is detected by the detection mechanism set on the feeding tray 10. The vertical drive mechanism of the feeding unit drives the material box to move vertically. The inspection unit 13 detects the distribution of wafers in the material box. According to the detection structure, the feeding and picking arm unit 12 moves to pick up workpiece A in the material box and transports workpiece A to the straightening table 30 of the initial positioning unit 3. The initial positioning camera unit 31 of the initial positioning unit 3 acquires images of workpiece A. The positioning component 31 of the initial positioning unit 3 performs concentric straightening and center positioning of workpiece A placed on the straightening table 30.

[0044] After the workpiece A is shaped, the transfer unit 5 picks up the shaped workpiece A and transports it to the support platform 20 of the processing unit 2. The front vision inspection mechanism of the vision inspection unit 4 performs image acquisition on the workpiece A again to accurately position the workpiece A. The support platform 20 moves to the processing station for processing. The unprocessed second workpiece B completes loading and initial positioning when the workpiece A is being processed.

[0045] The right-flipping mechanism 52 of the transfer unit 5 picks up the workpiece A that has been machined on the front side, and the left-flipping mechanism 51 of the double-piece conveying mechanism picks up the next unprocessed second workpiece B that has been placed on the regularization table 30. The left-flipping mechanism 51 of the transfer unit 5 places the unprocessed second workpiece B on the support table 20, and the right-flipping mechanism 52 flips the workpiece A that has been machined on the front side so that the reverse side of workpiece A is facing up, and places the flipped workpiece on the temporary storage table 74.

[0046] The unprocessed second workpiece B, placed on the support platform 20, is moved to the processing station for processing. The left-flipping mechanical part 51 of the central transfer unit 5 picks up the second workpiece B, whose front side has been processed, and flips it to the straightening table 30, so that the second workpiece B is placed on the straightening table 30 with its back side facing up. The right-flipping mechanical part 52 of the double-piece transport mechanism picks up the first workpiece A and places it on the support platform 20, with the back side of the first workpiece A facing up. The support platform 20 moves to the processing position to process the back side of workpiece A. After processing, the support platform 20 moves to the loading and unloading position, and the vision inspection unit 4 inspects and judges workpiece A (which has completed processing on both the front and back sides).

[0047] After the judgment is completed, the first workpiece A, which has been judged by the right flipping mechanical part of the transfer mechanism, is moved to the temporary storage platform unit according to the judgment result. If it is a qualified product, it is placed on the temporary storage platform 74; if it is an unqualified product, it is placed on the storage platform 75. The left flipping mechanical part 51 of the transfer unit adsorbs the second workpiece B to the bearing platform 20, with the reverse side of the second workpiece B facing upward.

[0048] The support platform 20 moves to the processing position for processing. After processing, the support platform 20 moves to the loading / unloading position, and the vision inspection unit 4 inspects and judges the second workpiece B (which has completed processing on both the front and back sides). The third workpiece C is transferred to the straightening table through the loading mechanism 6 to complete the initial positioning.

[0049] After the judgment is completed, according to the judgment result, the second workpiece B after the judgment is detected by the right flipping mechanical part of the double-piece conveying mechanism is moved to the temporary storage platform unit. If it is a qualified product, it is placed on the temporary storage platform 74; if it is an unqualified product, it is placed on the storage platform 75. The left flipping mechanical part 51 of the double-piece conveying mechanism adsorbs the third workpiece C to the bearing platform 20, with the front of the third workpiece C facing upward.

[0050] The support platform 20 moves to the processing position for processing. After processing, the support platform 20 moves to the loading / unloading position. The fourth workpiece D is transferred to the leveling table via the loading mechanism 6 to complete the initial positioning.

[0051] The right-flipping mechanism 52 of the transfer unit 5 picks up the workpiece C that has been machined on the front side. The left-flipping mechanism 51 of the double-piece conveying mechanism picks up the next unprocessed fourth workpiece D that has been placed on the regularization table 30. The left-flipping mechanism 51 of the transfer unit 5 places the unprocessed fourth workpiece D on the support table 20. The right-flipping mechanism 52 flips the workpiece C that has been machined on the front side so that the reverse side of the workpiece C faces upward, and places the flipped workpiece on the temporary storage table 74.

[0052] By repeating the above processing steps, the workpiece can be processed on both sides.

[0053] Finally, it should be noted that due to the limitations of written expression, the above description is merely exemplary and not exhaustive. The present invention is not limited to the disclosed embodiments. Without departing from the scope and spirit of the above examples, those skilled in the art can make several improvements and modifications, which should also be considered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the claims.

Claims

1. A double-sided processing system, comprising a loading unit, a processing unit, and an unloading unit, wherein the loading unit is used to pick up workpieces, the processing unit is used to process workpieces, and the unloading unit is used to pick up and place workpieces, characterized in that: The double-sided machining system also includes an initial positioning unit and an intermediate transfer unit; The feeding unit includes a feeding tray, a feeding vertical drive mechanism, and a feeding and picking arm unit. The feeding tray is used to place the material box loaded with the workpiece. The feeding tray is installed on the vertical drive mechanism. The vertical drive mechanism drives the feeding tray to move up and down to move the material box to the feeding plane. The feeding and picking arm unit moves the workpiece in the material box to the initial positioning unit. The initial positioning unit includes a leveling table, which is used to level and roughly position the workpiece and temporarily store the workpiece after single-sided machining. It is located at the initial positioning station. The processing unit includes a support platform that moves between a loading / unloading station and a processing station. The loading / unloading station is used to load and unload workpieces, and the processing station is used to process the workpieces. The unloading unit includes an unloading temporary storage unit for temporarily storing workpieces that have completed single-sided or double-sided processing, located at the temporary storage station. The intermediate transfer unit moves the workpieces between the initial positioning station, the unloading station, and the temporary storage station. The intermediate transfer unit includes a left-flipping mechanical component and a right-flipping mechanical component. Both the left-flipping mechanical component and the right-flipping mechanical component include a rotary drive mechanism and an adsorption mechanism. The adsorption mechanism picks up the workpiece, and the rotary drive mechanism rotates the adsorption mechanism. The intermediate transfer unit can simultaneously pick up and place workpieces and rotate the workpieces during the picking and placing process.

2. The double-sided processing system according to claim 1, characterized in that: The intermediate transfer unit simultaneously picks up workpieces placed at the initial positioning station and the loading / unloading station, moves the workpiece placed at the initial positioning station to the loading / unloading station, and moves the workpiece placed at the loading / unloading station to the temporary storage station; or the intermediate transfer unit simultaneously picks up workpieces placed at the loading / unloading station and the temporary storage station, moves the workpiece at the loading / unloading station to the initial positioning station, and moves the workpiece at the temporary storage station to the loading station; when moving a workpiece that has completed front-side processing, the workpiece that has completed front-side processing is flipped over before placing the workpiece.

3. The double-sided processing system according to claim 1, characterized in that: The initial positioning station, the loading / unloading station, and the temporary storage station are arranged linearly. The initial positioning station, the loading / unloading station, and the temporary storage station are set according to the spacing between the left-flipping mechanical parts and the right-flipping mechanical parts of the intermediate transfer assembly, so as to facilitate the simultaneous loading and unloading of parts by the intermediate transfer assembly.

4. The double-sided processing system according to claim 1, characterized in that: The loading and unloading arm unit includes a moving mechanism, an L-shaped robotic arm connected to the moving mechanism, and a picking mechanism connected to the end of the robotic arm. The moving mechanism drives the L-shaped robotic arm to move to the picking station, and the picking mechanism picks up the workpiece.

5. The double-sided processing system according to claim 1, characterized in that: The double-sided processing system also includes a vision inspection unit, which is located above the moving path of the support table. After the workpiece is processed, it passes through the vision inspection unit to check whether the workpiece is a qualified product.

6. The double-sided processing system according to claim 1, characterized in that: The material unloading temporary storage unit includes a temporary storage platform and a storage platform. The temporary storage platform is used to store qualified workpieces, and the storage platform is used to store unqualified workpieces. The material unloading and transfer unit includes a sliding mechanism and a main body connected to the sliding mechanism. A first material unloading robotic arm and a second material unloading robotic arm are provided at both ends of the main body. The first material unloading robotic arm is used to pick up qualified workpieces on the temporary storage platform, and the second material unloading robotic arm is used to pick up unqualified workpieces on the storage platform.

7. The double-sided processing system according to claim 6, characterized in that: The first or second unloading robotic arm is connected to the main body via an adjustment plate. The adjustment plate is provided with an adjustment hole that extends in a direction perpendicular to the first or second unloading robotic arm. The distance between the first and second unloading robotic arms is adjusted through the adjustment hole.

8. A double-sided processing method, characterized in that: The loading and unloading arm unit of the loading unit moves the workpiece in the material box to the initial positioning unit. The initial positioning unit obtains the coarse positioning information of the workpiece and performs center positioning on the workpiece. The intermediate transfer unit simultaneously transfers the unprocessed workpiece at the initial positioning station and the workpiece that has completed front-side processing at the loading and unloading station. The unprocessed workpiece at the initial positioning station is moved to the support platform at the loading and unloading station. The workpiece that has completed front-side processing is moved to the unloading temporary storage unit. The workpiece that has completed front-side processing is placed in front of the unloading temporary storage unit and flipped. The workpiece that has completed front-side processing is placed in the unloading temporary storage unit with its reverse side facing up. The support platform carries the workpiece to the processing station for processing. After the front-side processing of the workpiece is completed, the support platform returns to the loading and unloading station. The intermediate transfer unit simultaneously transfers the workpiece that has completed front-side processing and the workpiece that has been placed face-up in the unloading temporary storage unit. The workpiece that has completed front-side processing is moved to the initial positioning station. Before the workpiece that has completed front-side processing is placed in the initial positioning station, the workpiece that has completed front-side processing is flipped over and placed face-up in the initial positioning station. The workpiece that has been placed face-up in the unloading temporary storage unit is moved to the support platform located at the loading and unloading station. The support platform carries the workpiece to the processing station for reverse processing. After the reverse processing of the workpiece is completed, it returns to the loading and unloading station. The intermediate transfer unit simultaneously transfers the workpiece placed face-up at the initial positioning station and the workpiece that has been processed on both sides at the loading and unloading station. The workpiece placed face-up at the initial positioning station is moved to the support platform at the loading and unloading station. The workpiece that has been processed on both sides at the support platform is moved to the unloading temporary storage unit. The support platform moves the workpiece to the processing station for reverse processing. The unloading temporary storage unit unloads the processed workpiece. The loading and unloading arm unit of the loading unit moves the workpiece in the material box to the initial positioning station. The initial positioning unit obtains the coarse positioning information of the workpiece and performs center positioning on the workpiece. The intermediate transfer unit simultaneously transfers the unprocessed workpiece at the initial positioning station and the workpiece that has completed reverse processing at the loading and unloading station. The unprocessed workpiece at the initial positioning station is moved to the support platform at the loading and unloading station, and the workpiece that has completed reverse processing is moved to the unloading temporary storage unit. The support platform carries the workpiece to the processing station for processing. After the front processing of the workpiece is completed, the support platform returns to the loading and unloading station, and the loading unit continues to load. The above steps are repeated to complete the continuous processing of the workpiece.

9. The double-sided processing method according to claim 8, characterized in that: The material unloading temporary storage unit includes a temporary storage platform for placing qualified workpieces and a storage platform for placing unqualified workpieces. After the workpieces are processed, a quality inspection is performed to determine whether they are qualified. Qualified workpieces are placed on the temporary storage platform of the material unloading temporary storage unit, and unqualified workpieces are placed on the storage platform of the material unloading temporary storage unit.

10. The double-sided processing method according to claim 9, characterized in that: When determining whether a workpiece is qualified, during the workpiece processing, the precision positioning front vision inspection mechanism acquires the front alignment information of the workpiece and performs front processing based on the front alignment information. When processing the back side of the workpiece, the precision positioning back vision inspection mechanism acquires the front alignment information of the workpiece and performs back processing. During back processing, overlay points are created on the back side of the workpiece. These overlay points are set according to the front alignment information. After the workpiece completes double-sided processing, it passes through the precision positioning front vision inspection mechanism again. The precision positioning front vision inspection mechanism acquires the overlay point information on the back side of the workpiece, and the precision positioning back vision inspection mechanism acquires the front alignment information of the workpiece. The acquired back overlay point information and the front alignment information are compared to determine whether the overlay accuracy of the workpiece meets the requirements. If the deviation between the overlay information and the alignment information is within the allowable range of overlay accuracy, the workpiece is considered qualified. If the deviation exceeds the allowable range of overlay accuracy, the workpiece is considered unqualified.

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