Rotational speed sensor with a base and a double rotor and method for operating a rotational speed sensor with a base and a double rotor

Abstract

A speed sensor and a method for operating a speed sensor having a base and two rotors are proposed. The base has a main extending plane with an X-direction and a Y-direction perpendicular to the X-direction. The two rotors have a first rotor and a second rotor arranged at a distance from the first rotor in the X-direction. These two rotors are elastically connected to the base via respective suspension devices and elastically connected to each other via a first coupling element. The first rotor is connected to a first vibrating mass and a second vibrating mass. The second rotor is connected to a third vibrating mass and a fourth vibrating mass. The first and third vibrating masses are connected via a first pendulum element extending substantially in the X-direction such that the third vibrating mass deflects in the opposite direction to the radial deflection of the first vibrating mass when the first vibrating mass deflects radially. The second and fourth vibrating masses are connected via a second pendulum element extending substantially in the X-direction such that the fourth vibrating mass deflects in the opposite direction to the radial deflection of the second vibrating mass when the second vibrating mass deflects radially.

Description

Technical Field

[0001] The present invention is based on the speed sensor having a base and dual rotors as described in the preamble of claim 1. Background Technology

[0002] This type of speed sensor, which has a base and dual rotors, is commonly known.

[0003] For example, a triaxial speed sensor with a base and two rotors is known from document DE 10 2021 200 483 A1, wherein the two rotors have a first rotor and a second rotor, which are elastically connected to each other via a first coupling element such that the two rotors can be excited to rotate in opposite phases. The first rotor has a first vibrating mass and a second vibrating mass that can be deflected relative to the first rotor, and the second rotor has a third vibrating mass and a fourth vibrating mass that can be deflected relative to the second rotor. Furthermore, the first mass and the third mass are connected via a first wippenelement such that the third mass deflects in the opposite radial direction when the first mass deflects radially. Similarly, the second mass and the fourth mass are connected via a second wippenelement such that the fourth mass deflects in the opposite radial direction when the second mass deflects radially.

[0004] A drawback of this known speed sensor is that the first and second pendulum elements are coupled via a second coupling element within a layer used for the contact electrode structure. When the rotors are laterally spaced, the second coupling element is located in the middle of the speed sensor, i.e., between the rotors. Such a contact layer is typically several times thinner than the functional layer of such a speed sensor, which is usually designed to withstand mechanical loads, for example, due to different vibration modes; therefore, such a contact layer typically has a poorer mechanical load capacity than such a functional layer. Correspondingly, the mechanical stability and robustness of such coupling with the second coupling element constructed in this way are lower relative to external (disturbance) influences, such as acceleration. Summary of the Invention

[0005] In this context, the objective is to provide a speed sensor with a substrate and dual rotors, which, by means of its design, does not suffer from the aforementioned drawbacks.

[0006] The speed sensor with a base and dual rotors according to the invention has the following advantages over the prior art: the first and second pendulum elements are elastically connected to each other via a first and a second coupling frame element such that the radial deflections of the first and second vibrating masses are antiparallel, and the radial deflections of the third and fourth vibrating masses are also antiparallel; and the first and second coupling frame elements, together with the pendulum elements, at least approximately surround the rotor in a plane parallel to the main extension plane. Due to this arrangement of the first and second coupling frame elements in a plane parallel to the main extension plane of the speed sensor, and thus the mutual coupling of the pendulum elements, force transmission does not occur at the center between the rotors, but rather around or envelops the rotors. Advantageously, according to the invention, the coupling frame elements can also be implemented within a mechanically load-bearing functional layer (or a layer mechanically more load-bearing than the layer equivalent to the contact layer), thus advantageously ensuring the mechanical stability and robustness of this coupling of the pendulum elements. Furthermore, the advantageous connection between the first and second coupling frame elements, particularly within the plane of the functional layer, effectively and efficiently facilitates or supports the operation of the speed sensor. Therefore, by means of the speed sensor's design according to the invention, particularly the coupling of the first and second rocker elements through the first and second coupling frame elements and their enclosing of the two rotors, robustness and mechanical stability against mechanical (interference) influences can be ensured, as is preferably required for the application or operation of the speed sensor in automotive or consumer applications.

[0007] Advantageous configurations and further extensions of the invention can be obtained from the dependent claims and the description with reference to the accompanying drawings.

[0008] According to an advantageous configuration of the invention, one of the first coupling frame elements and one of the second coupling frame elements are attached to or connected to each other via a first spring element, such that the first rotor is at least partially surrounded, and the other of the first coupling frame elements and the other of the second coupling frame elements are attached to or connected to each other via a second spring element, such that the second rotor is at least partially surrounded. It is advantageously possible, through the attachment of one of the first coupling frame elements to one of the second coupling frame elements via the first and second spring elements, that (in conjunction with the first and second pendulum elements) this coupling so advantageously promotes or supports the deflection of the vibrating masses, causing the vibrating masses to undergo an antiparallel radial deflection (i.e., the first and second vibrating masses, as well as the third and fourth vibrating masses, deflect radially in an antiparallel manner), while simultaneously ensuring advantageous mechanical stability and robustness relative to external (disturbance) influences.

[0009] According to an advantageous configuration of the invention, the first spring element and / or the second spring element each include at least one base suspension device, wherein the first spring element and / or the second spring element are respectively connected to the base via at least one base suspension device. Therefore, effective and efficient operation of the speed sensor can be advantageously ensured.

[0010] According to an advantageous configuration of the invention, the first and / or second spring elements have, or are constituted by, beam elements that extend substantially in a straight line, between their attachment points on the base suspension device and their attachment points on the first and second coupling frame elements. With the aid of these substantially in a straight line, it is advantageous to buffer, or thus utilize, the mechanical effects or bending acting on the spring elements due to the attachment of the spring elements to the coupling frame elements during mechanical loading (tilting) triggered, particularly by mechanical actions (deflection of the vibrating mass) on the first and second pendulum elements, thereby facilitating or supporting the operation of the speed sensor.

[0011] According to an advantageous configuration of the invention, each base suspension device has three beam elements attached to or connected to each other at at least one location. With the aid of said at least one location, the mechanical effects or bending acting on the spring element can be effectively and efficiently utilized for the advantageous operation of the speed sensor.

[0012] According to an advantageous configuration of the invention: the beam elements extending linearly in sections of the first spring element and / or the second spring element are arranged such that... --The first spring element and / or the second spring element form or have a meandering structure that generally extends along the X direction, and / or --The first spring element and / or the second spring element form or have a meandering structure that generally extends along the Y direction, and / or --The first and / or second spring elements form or have a superposition of meandering structures along the X-direction and along the Y-direction. Due to the meandering structures arranged in different directions or superimposed by beam elements extending substantially linearly within the first and / or second spring elements, it is advantageous to ensure or support the functional mode of the first and second spring elements within the coupling of the first and second coupling frame elements with the first and second rocker elements. Due to the special structuring of the meandering structure, mechanical influences or bending acting on the spring elements can be appropriately buffered and utilized. Therefore, it is advantageous to ensure the effective and efficient operation of the speed sensor.

[0013] Another subject of the invention is a method for operating a speed sensor having a base and dual rotors, according to the parallel method claims.

[0014] The method according to the invention for operating a speed sensor having a base and two rotors has proven advantageous over the prior art in that a first pendulum element and a second pendulum element are elastically connected to each other via a first coupling frame element and via a second coupling frame element, wherein the radial deflections of the first and second vibrating masses are antiparallel, and the radial deflections of the third and fourth vibrating masses are also antiparallel, and wherein the first and second coupling frame elements, together with the pendulum elements, at least approximately surround the rotor in a plane parallel to the main extension plane.

[0015] For methods of operating a speed sensor having a base and dual rotors, the advantages and configurations described in conjunction with embodiments of the speed sensor having a base and dual rotors according to the present invention can be applied. Attached Figure Description

[0016] Embodiments of the present invention are shown in the accompanying drawings and explained in detail in the following description.

[0017] Figure 1 A speed sensor with a base and dual rotors according to the invention is shown in schematic diagrams and top views, that is, in drawing planes arranged parallel to the main extension plane (or base plane).

[0018] Figure 2 a to 2f schematically illustrate a first or second spring element according to an advantageous embodiment of the invention. Detailed Implementation

[0019] Figure 1A schematic diagram illustrates a speed sensor according to the invention, comprising a base and two rotors, the base having a main extending plane with an X-direction and a Y-direction extending perpendicularly to the X-direction (shown in the coordinate system at the lower left corner). The basic element is constituted by two rotors vibrating in opposite phases. Two vibrating masses 3, 4, 5, and 6 are respectively divided in the two rotors 1 and 2, these vibrating masses being flexibly supported radially along a direction perpendicular to the vibration axis of the rotors via springs 7; this means that the first rotor 1 is connected to the first vibrating mass 3 and the second vibrating mass 4 such that these vibrating masses are deflectably supported in a radial direction relative to the first rotor 1 and substantially parallel to the XY plane (mainly along the Y-direction), and the second rotor 2 is connected to the third vibrating mass 5 and the fourth vibrating mass 6 such that these vibrating masses are deflectably supported in a radial direction relative to the second rotor 2 and substantially parallel to the XY plane (and also mainly along the Y-direction). Two rotors 1 and 2 are coupled to each other via a first coupling element 8, which, in the illustrated embodiment, has a centrally located O-shaped section that is opened up under load in the X direction (e.g., when the rotational vibration deflection of rotors 1 and 2 is large). One of the two divided vibrating masses (3 and 5, and 4 and 6) of rotors 1 and 2 is coupled to each other via a pendulum element (first pendulum element 9 or second pendulum element 9'). Masses 4 and 6 or 3 and 5 are forced to deflect radially in opposite phases via pendulum elements 9 and 9'. The two pendulum elements 9 and 9' are respectively connected to the base via anchor points 14 and interconnected via a first coupling frame element 10 and a second coupling frame element 10'.

[0020] The first coupling frame element 10 and the second coupling frame element 10' together at least partially enclose the first rotor 1 (in Figure 1 (shown on the left) The first spring element 20 is attached to or connected to each other, such that the first rotor 1 is at least partially surrounded. The first coupling frame element 10 and the second coupling frame element 10' together at least partially enclose the second rotor 2 (in Figure 1(Seen on the right) The other one is attached or connected to each other via the second spring element 20', such that the second rotor 2 is at least partially surrounded. In the arrangement shown, the coupling frame elements 10, 10' are arranged such that the first and second coupling frame elements 10, 10' together with the rocker arm elements 9, 9' at least approximately surround the rotors 1, 2 in a plane parallel to the main extension plane. In particular, this achieves a mechanical frame structure that, on the one hand, facilitates or supports the radial deflection of the first and second vibrating masses 3, 4 in antiparallel motion, and similarly the radial deflection of the third and fourth vibrating masses 5, 6 in antiparallel motion, and on the other hand, ensures mechanical stability and robustness relative to external disturbances or accelerations due to the frame arrangement. Advantageously, this frame arrangement (essentially in the form of coupling frame elements 10, 10') can be implemented within the functional layer of the speed sensor. This has the following advantages compared to the prior art: compared to the lateral coupling between rotors 1 and 2, which is mostly within the layer used for the contact electrode structure, the frame-like arrangement according to the invention can achieve a more mechanically stable and robust functional layer in the speed sensor. This functional layer can have a greater layer thickness than the layer used for electrode contact. Furthermore, the connection or attachment to the coupling frame elements 10 and 10' (and therefore also through the elastic action of the spring elements 20 and 20') in this way facilitates the function of the rocker elements 9 and 9', because this supports the antiparallel radial deflection of the vibrating masses 3, 4, 5, and 6. The two rotors 1 and 2, their vibrating masses 3, 4, 5, and 6, the rocker elements 9 and 9', the first coupling element 8, the first coupling frame element and the second coupling frame element 10 and 10', and the first spring element and the second spring element 20 and 20', respectively, about the two central axes extending in the X and Y directions of the dual rotors (in... Figure 1 (Horizontal and vertical extensions) Mirror symmetric configuration.

[0021] Rotors 1 and 2 are subjected to opposite-phase rotational vibrations by means of a driver (not shown) during the operation of the speed sensor. Rotors 1 and 2 thus experience or perform opposite-phase left-hand and right-hand rotations. This proceeds in each rotation up to a defined maximum deflection in the corresponding rotational direction. To enable the rotational vibrations of rotors 1 and 2, each rotor has a central recess in its center-of-gravity region, in which the rotor is connected to anchor point 13 via a spring element.

[0022] Rotational speeds about the Z-axis (i.e., perpendicular to the X and Y directions) cause radial deflection of vibrating masses 3, 4, 5, and 6, and thus tilting of pendulum elements 9 and 9' (rotation about the Z-axis). This, in turn, causes tilting of the first and second coupling elements 10 and 10', and ultimately bending of the first and second spring elements 20 and 20'. The bending of spring elements 20 and 20' and the tilting of coupling frame elements 10 and 10' promote antiparallel radial deflection of the vibrating masses (the deflection of the first and second vibrating masses 3 and 4, and the deflection of the third and fourth vibrating masses 5 and 6, respectively, occur in antiparallel directions).

[0023] Figure 2 a to 2f schematically illustrate a first spring element or a second spring element 20, 20' according to an advantageous embodiment of the invention. A beam element 23 extending substantially in a straight line in a substantially segmental manner is shown in the schematic diagram (exemplarily by...). Figure 2 (See reference numerals in figure a). Each spring element 20, 20' has, or is constituted by, a substantially segmentally linearly extending beam element 23 between its attachment point on the base suspension device 21 and its attachment points on the corresponding first coupling frame element 10 and the corresponding second coupling frame element 10'. Not only in Figure 2 a and in Figure 2 b and Figure 2 In section d, each spring element 20, 20' includes a unique base suspension device 21 and a unique location 22, at which three substantially segmentally linearly extending beam elements 23 are attached to or connected to each other. Each spring element 20, 20' is connected to the base via the base suspension device 21. The location 22, present once in each base suspension device 21, advantageously allows for the effective and efficient utilization or use of mechanical loads or bending acting on the first and second rocker elements 9, 9' during the operation of the speed sensor and on the spring elements 20, 20' due to their attachment to the coupling frame elements 10, 10' during tilting, particularly triggered by the deflection of the vibrating masses 3, 4, 5, 6, so that the tilting of the coupling frame elements 10, 10' is supported or facilitated. Furthermore, the substantially linearly extending beam elements 23 are arranged such that... -- Figure 2 The corresponding spring elements 20 and 20' in a form or have a meandering structure that generally extends along the X direction, and -- Figure 2The corresponding spring elements 20, 20' in b form or have a meandering structure that generally extends along the Y direction. This specific structuring of the meandering structure enables advantageous and appropriate cushioning and utilization of mechanical loads or bending acting on the corresponding spring elements 20, 20'. This preferred cushioning and utilization thus promotes or supports the tilting mechanical action on the first and second coupling elements 10, 10', and therefore (via the first and second rocker elements 9, 9') ultimately promotes or supports the radial deflection of the vibrating masses 3, 4, 5, 6.

[0024] Figure 2 c illustrates an arrangement with two base suspension devices 21 and two locations 22, at which three beam elements 23 are attached to or connected to each other. Furthermore, in Figure 2 The meandering structure arranged as beam element 23 is also shown in c. This embodiment with two base suspension devices 21 (and two parts 22) has the advantage that mechanical loads or bending are therefore preferably acted on the beam element 23 which extends substantially in a straight line between parts 22, and thus (in combination with the mechanically stable symmetrical arrangement of the base suspension devices 21 and parts 22) the tilt of the rocker arm elements 9, 9' and the coupling frame elements 10, 10' is supported.

[0025] exist Figure 2 Figures e and 2f show a hybrid form of the meandering structure, each having two base suspension devices 21 and two sections 22. In these two figures, the beam elements 23, extending substantially in a straight line in sections, are arranged such that the individual spring elements 20, 20' form or have a superposition of meandering structures along the X direction and along the Y direction. Therefore, Figure 2 e illustrates the superposition of a meandering structure, with two relatively far-off base suspension devices 21 arranged outside the meandering structure (here offset substantially along the X direction) and a relatively large gap between the portion 22 and the corresponding base suspension device 21. In contrast, Figure 2 f shows two relatively far base suspension devices 21 arranged within the meandering structure (also substantially offset along the X direction) and a relatively small distance between part 22 and the corresponding base suspension device 21.

[0026] exist Figure 2 In 2c, 2e and 2f, the beam elements 23 forming the meandering structure are respectively attached to or connected to each other by two successive beam elements of the beam element 23, such that the two related beam elements 23 form a 90° angle with each other or are attached to each other, such that the beam orientation changes by 90° at the attachment point.

[0027] Figure 2Figure d illustrates an arrangement in which a single base suspension device 21 and a single portion 22 are shown. Unlike the other figures, in... Figure 2 Figure d illustrates a meandering structure, however, this meandering structure is formed by two successive beam elements of the beam element 23 such that the two related beam elements 23 form an angle greater than 90°, or the two related beam elements 23 are attached to each other such that the beam orientation changes by more than 90° at the attachment point, particularly by about 135°. Alternatively, a meandering structure (not shown) is also conceivable, formed by two successive beam elements of the beam element 23 such that the two related beam elements 23 form an angle less than 90°, or the two related beam elements 23 are attached to each other such that the beam orientation changes by less than 90° at the attachment point.

Claims

1. A speed sensor with a base and dual rotors, wherein, The base has a main extending plane with an X direction and a Y direction perpendicular to the X direction. The dual rotors have a first rotor (1) and a second rotor (2) arranged at a distance from the first rotor (1) in the X direction. The first rotor and the second rotor are elastically connected to the base via their respective suspension devices (13), and are elastically connected to each other via a first coupling element (8) such that the two rotors (1, 2) can be excited to perform counter-phase rotational vibrations. The rotation axes of the rotors (1, 2) are parallel to the main extending plane perpendicular to the base. Extending in the Z direction, the first rotor (1) is connected to a first vibrating mass (3) and a second vibrating mass (4) such that the first and second vibrating masses are respectively supported in a radial direction relative to the first rotor (1) and substantially parallel to the Y direction, wherein the second rotor (2) is connected to a third vibrating mass (5) and a fourth vibrating mass (6) such that the third and fourth vibrating masses are respectively supported in a radial direction relative to the second rotor (2) and substantially parallel to the Y direction, wherein the first vibrating mass... (3) The third vibrating mass (5) is connected to the fourth vibrating mass (6) via a first pendulum element (9) extending substantially in the X direction such that the third vibrating mass (5) deflects in the opposite direction to the radial deflection of the first vibrating mass (3) when the first vibrating mass (3) deflects radially, wherein the second vibrating mass (4) and the fourth vibrating mass (6) are connected via a second pendulum element (9') extending substantially in the X direction such that the fourth vibrating mass (6) deflects in the opposite direction to the radial deflection of the second vibrating mass (4) when the second vibrating mass (4) deflects radially, characterized in that The first and second pendulum elements (9, 9') are elastically connected to each other via a first coupling frame element (10) and a second coupling frame element (10') such that the radial deflections of the first and second vibrating masses (3, 4) are parallel to each other, and the radial deflections of the third and fourth vibrating masses (5, 6) are also parallel to each other. The first and second coupling frame elements (10, 10') together with the pendulum elements (9, 9') at least approximately surround the rotor (1, 2) in a plane parallel to the main extension plane.

2. The speed sensor according to claim 1, characterized in that, One of the first coupling frame elements (10) and one of the second coupling frame elements (10') are attached to or connected to each other via a first spring element (20) such that the first rotor (1) is at least partially surrounded, and the other of the first coupling frame elements (10) and the other of the second coupling frame elements (10') are attached to or connected to each other via a second spring element (20') such that the second rotor (2) is at least partially surrounded.

3. The speed sensor according to any one of the preceding claims, characterized in that, The first spring element (20) and / or the second spring element (20') each include at least one base suspension device (21), wherein the first spring element (20) and / or the second spring element (20') are respectively connected to the base by means of the at least one base suspension device (21).

4. The speed sensor according to any one of the preceding claims, characterized in that, The first spring element (20) and / or the second spring element (20') have or are constituted by a beam element (23) that extends substantially in a straight line between their attachments on the base suspension device (21) and their attachments on one of the first coupling frame elements and the second coupling frame elements (10, 10').

5. The speed sensor according to any one of the preceding claims, characterized in that, Each base suspension device (21) has three beam elements (23) that are substantially segmentally straight and attached to or connected to each other at at least one location (22).

6. The speed sensor according to any one of the preceding claims, characterized in that, The beam element (23) extending linearly in the section of the first spring element and / or the second spring element (20') is arranged such that... --The first spring element and / or the second spring element (20, 20') form or have a meandering structure that generally extends along the X direction, and / or --The first spring element and / or the second spring element (20, 20') form or have a meandering structure that generally extends along the Y direction, and / or --The first spring element and / or the second spring element (20, 20') form or have a superposition of a meandering structure along the X direction and a meandering structure along the Y direction.

7. A method for operating a speed sensor having a substrate and dual rotors, wherein, The substrate has a main extending plane with an X-direction and a Y-direction perpendicular to the X-direction. The dual rotors have a first rotor (1) and a second rotor (2) arranged at a distance from the first rotor (1) in the X-direction. The first rotor and the second rotor are elastically connected to the substrate via their respective suspension devices (13), and are elastically connected to each other via a first coupling element (8). The two rotors (1, 2) can be excited to perform counter-phase rotational vibrations. The rotation axes of the rotors (1, 2) are parallel to the Z-axis perpendicular to the main extending plane of the substrate. Extending in the direction, wherein the first rotor (1) is connected to the first vibrating mass (3) and the second vibrating mass (4) such that the first vibrating mass and the second vibrating mass can be supported respectively in a radial direction relative to the first rotor (1) and substantially parallel to the Y direction, wherein the second rotor (2) is connected to the third vibrating mass (5) and the fourth vibrating mass (6) such that the third vibrating mass and the fourth vibrating mass can be supported respectively in a radial direction relative to the second rotor (2) and substantially parallel to the Y direction, wherein the first vibrating mass (3) The third vibrating mass (5) is connected to the fourth vibrating mass (6) via a first pendulum element (9) extending substantially along the X direction, wherein the third vibrating mass (5) deflects in the opposite direction to the radial deflection of the first vibrating mass (3) when the first vibrating mass (3) deflects radially, wherein the second vibrating mass (4) is connected to the fourth vibrating mass (6) via a second pendulum element (9') extending substantially along the X direction, wherein the fourth vibrating mass (6) deflects in the opposite direction to the radial deflection of the second vibrating mass (4) when the second vibrating mass (4) deflects radially, characterized in that the The first and second pendulum elements (9, 9') are elastically connected to each other via a first coupling frame element (10) and a second coupling frame element (10'), wherein the radial deflections of the first and second vibrating masses (3, 4) are parallel to each other, and the radial deflections of the third and fourth vibrating masses (5, 6) are also parallel to each other, and wherein the first and second coupling frame elements (10, 10') together with the pendulum elements (9, 9') at least approximately surround the rotor (1, 2) in a plane parallel to the main extension plane.

Images