Mass spectrometer assembly ultrasonic cleaning device

Abstract

The present application relates to fluid jet cleaning, more particularly to the technical field of ultrasonic cleaning, and discloses a mass spectrometer component ultrasonic cleaning device, which comprises an ultrasonic cleaning machine and a control panel integrated with the ultrasonic cleaning machine, wherein the ultrasonic cleaning machine is provided with a vibration part, a partition, a flow guide part, a circulation part and a disturbance part; the ultrasonic cleaning machine comprises a working area at the bottom of the inner wall and a cleaning area at the top of the inner wall; and a machine cover is installed on the cleaning area of the ultrasonic cleaning machine; through the cooperation of the flow guide part, the impeller, the sector cam, the sleeve ring, the driven contact and the torsional spring, the hollow material cylinder is driven to swing intermittently and reciprocatingly by using the fluid power of the circulating cleaning liquid, the problem of structural complication caused by the swing mechanism driven by an external motor is solved, and the present application is different from the existing scheme of independent motor driving workpiece movement, and the number of driving components of the whole machine is simplified while the posture of the workpiece is changed.

Description

Technical Field

[0001] This invention relates to fluid jet cleaning, and more specifically to the field of ultrasonic cleaning technology, specifically to an ultrasonic cleaning device for mass spectrometer components. Background Technology

[0002] During sample detection, salts and organic pollutants can easily accumulate on the surfaces of components such as the ion source and sampling cone. These pollutants can directly interfere with the detection accuracy of the mass spectrometer. Therefore, it is necessary to clean these precision components regularly. Ultrasonic cleaning relies on the ultrasonic cavitation effect inside the liquid medium to remove the adhering substances from the surface of the components. It is a commonly used treatment method in the cleaning of precision parts.

[0003] Conventional ultrasonic cleaning equipment mainly consists of a cleaning tank, an ultrasonic transducer, and an ultrasonic power supply. During operation, the parts to be treated are placed directly at the bottom of the cleaning tank. After adding cleaning fluid into the tank, the ultrasonic power supply is turned on. The transducer generates high-frequency vibrations and transmits the vibrations into the cleaning fluid. The ultrasonic cavitation effect removes contaminants adhering to the surface of the workpiece. Some equipment is equipped with a simple liquid circulation pipeline to complete the circulation of the cleaning fluid, while some equipment is equipped with additional cooling components to suppress the temperature rise of the cleaning fluid. This type of equipment has been widely used in the decontamination treatment of various precision metal components.

[0004] Existing ultrasonic cleaning equipment, when dealing with the cleaning of special precision workpieces such as mass spectrometer components, places the workpiece directly at the bottom of the tank, placing it in the area of ​​strong cavitation around the transducer. The impact of cavitation can easily damage the coating and thin-walled structure of the workpiece. At the same time, conventional equipment generally requires an additional independent motor as a power source to change the workpiece's posture, which increases the number of parts and the complexity of the equipment structure. Ordinary circulation structures lack effective means of impurity interception. Solid particles that fall off the workpiece surface will be suspended in the cleaning fluid and re-adhere to the workpiece surface during the cleaning process, causing secondary pollution. The ultrasonic transducer will continuously input heat into the cleaning fluid during long-term operation. Without a reasonable heat exchange arrangement, the temperature of the cleaning fluid will continue to rise. High-temperature conditions will adversely affect the surface coating of the mass spectrometer component. Therefore, an ultrasonic cleaning device for mass spectrometer components is proposed to solve the above-mentioned problems. Summary of the Invention

[0005] (a) Technical problems to be solved To address the shortcomings of existing technologies, this invention provides an ultrasonic cleaning device for mass spectrometer components. This device solves the problems of existing ultrasonic cleaning equipment for cleaning precision components of mass spectrometers, such as the workpiece being easily damaged by cavitation impact, the workpiece attitude adjustment relying on an independent motor resulting in complex structure, dirt particles in the cleaning fluid easily causing secondary contamination of the workpiece, the working temperature rise of the cleaning fluid easily damaging the workpiece coating, and the lack of flexibility in adapting the various working unit processes.

[0006] (II) Technical Solution To achieve the above objectives, the present invention provides the following technical solution: an ultrasonic cleaning device for mass spectrometer components, comprising an ultrasonic cleaner and a control panel integrated therein. The ultrasonic cleaner includes a vibrating part, a partition, a flow guiding part, a circulation part, and a disturbance part. The ultrasonic cleaner includes a working area at the bottom of its inner wall and a cleaning area at the top of its inner wall. The cleaning area of ​​the ultrasonic cleaner is fitted with a cover. Ear hooks are installed on both sides of the outer wall of the ultrasonic cleaner. The disturbance part includes a rotating rod and a rotating shaft, with the bottom end of the rotating rod fixedly connected to... The device includes an impeller, a sector-shaped cam fixedly connected to the top of the rotating rod, a collar fixedly connected to the top of the rotating shaft, two driven contacts symmetrically connected to the outer wall of the collar, the two driven contacts being spaced 180 degrees apart, a sleeve rotatably connected to the outer wall of the rotating shaft, two limiting rods symmetrically connected to the outer wall of the sleeve, the ends of the two limiting rods extending to the sides of the two driven contacts respectively, a torsion spring elastically connected between the sleeve and the collar, the torsion spring being movably sleeved on the outer wall of the rotating shaft, and the sector-shaped cam contacting the driven contact on one side of the collar.

[0007] Preferably, the rotating rod, impeller, and sector cam together form a single-sided disturbance assembly, and the rotating shaft, collar, two driven contacts, sleeve, two limit rods, and torsion spring together form a single-sided swing mechanism. There are four single-sided disturbance assemblies and two single-sided swing mechanisms.

[0008] Preferably, the top of the rotating shaft in each of the two single-sided swing mechanisms is fixedly connected to a hollow material cylinder, which is horizontally divided into upper and lower parts along its own center line, and the upper and lower parts of the hollow material cylinder are hinged together.

[0009] Preferably, each pair of the single-sided disturbance components is respectively disposed on both sides of one of the single-sided swing mechanisms, and the two driven contacts on each collar abut against their respective adjacent sector cams.

[0010] Preferably, the partition is fixedly connected between the inner walls of the ultrasonic cleaner. The vibrating part includes two base plates, both of which are fixedly connected to the top of the partition. The two base plates are aligned with two hollow material cylinders. There is a gap between each hollow material cylinder and its aligned base plate. A transducer is installed at the bottom of each of the two base plates. Each base plate has one through hole and two rod holes. The top of the partition is pre-set with a slot adapted to the nesting of the transducer.

[0011] Preferably, the rotating shafts of the two single-sided swing mechanisms are rotatably connected to the inner walls of the through holes of the two base plates, the sleeves of the two single-sided swing mechanisms are respectively installed on the two base plates, the bottom end of each rotating rod is respectively attached to the through rod hole and the base plate and extends downward, and the impeller is located below the base plate.

[0012] Preferably, the flow guiding part includes a pad plate, which is fixedly connected to the bottom of the partition plate. A flow guiding groove is formed on the pad plate, and the inner wall of the flow guiding groove is provided with a mounting hole adapted to the rotation of the impeller. The extension end of each rotating rod is rotatably connected to the inner wall of each mounting hole. The blade end of each impeller is located within the path of the flow guiding groove. The two openings of the flow guiding groove are located on the same side of the pad plate, and each opening of the flow guiding groove is provided with a wedge-shaped opening.

[0013] Preferably, the circulation section includes two micro booster pumps, both of which are installed on one side of the outer wall of the ultrasonic cleaner. The pump ports on both sides of one of the micro booster pumps are respectively connected to the inner wall of the cleaning area of ​​the ultrasonic cleaner and the wedge-shaped port on the same side. The pump ports on both sides of the other micro booster pump are respectively connected to the inner wall of the working area of ​​the ultrasonic cleaner and the wedge-shaped port on the same side.

[0014] Preferably, a sealing groove is fixedly connected between the bottom of the inner wall of the ultrasonic cleaner and the pad. A water outlet pipe is connected to the inner wall of the sealing groove. The water outlet pipe is fixedly extended through the working area of ​​the ultrasonic cleaner and connected to the cleaning area of ​​the ultrasonic cleaner. A one-way valve is installed in the through section of the water outlet pipe. A cooler is installed between the sealing groove and the working area of ​​the ultrasonic cleaner. The cooling end of the cooler is located inside the sealing groove, and the heat dissipation end of the cooler is located outside the ultrasonic cleaner. A filter chamber is installed inside the sealing groove. One side of the filter chamber is connected to the water outlet pipe, and the other side of the filter chamber is connected to the pump port of the working area of ​​the ultrasonic cleaner through the sealing groove.

[0015] Preferably, the ultrasonic cleaner integrates an ultrasonic power supply, a driving power supply, and a cooling power supply. The transducer is electrically connected to the control panel via the ultrasonic power supply, the micro booster pump is electrically connected to the control panel via the driving power supply, and the cooler is electrically connected to the control panel via the cooling power supply.

[0016] (III) Beneficial Effects Compared with the prior art, the present invention provides an ultrasonic cleaning device for mass spectrometer components, which has the following beneficial effects: 1. By cooperating with the guide section, impeller, fan-shaped cam, collar, driven contact and torsion spring, the hollow material cylinder is intermittently reciprocated by being driven by the hydrodynamic power of the circulating cleaning fluid. This solves the problem of structural complexity caused by relying on an external motor to drive the swing mechanism. Unlike the existing solution of driving the workpiece motion with an independent motor, this reduces the number of drive components of the whole machine while completing the workpiece posture change.

[0017] 2. By using a perforated material cylinder and a base plate with spacing, the mass spectrometer components to be cleaned are kept at a distance from the transducer vibration location, avoiding the direct impact of high-intensity cavitation near the transducer on the workpiece surface. This solves the problem that placing workpieces directly on the bottom of existing simple ultrasonic cleaning tanks can easily cause damage to the coating of precision parts. It is different from the traditional cleaning structure where workpieces are placed directly on the bottom of the tank, reducing the possibility of cavitation corrosion damage to thin-walled precision parts with coatings.

[0018] 3. By partitioning the internal space of the ultrasonic cleaner, and with the independent power supply and control of the transducer, micro booster pump and cooler by the ultrasonic power supply, drive power supply and cooling power supply respectively, the ultrasonic cleaning, fluid circulation and cooling processes can be operated separately or simultaneously. This solves the problem that the working units of traditional equipment cannot flexibly match the cleaning process. Unlike integrated cleaning equipment that cannot be separated and controlled, it is suitable for the selection of cleaning processes for different precision parts.

[0019] 4. By combining and linking the sealing groove, filter chamber, one-way valve and micro booster pump, the cleaning fluid is circulated in a closed loop inside the device, while the detached dirt particles are intercepted and filtered. This solves the problem of secondary pollution caused by suspended impurities in the cleaning fluid re-adhering to the workpiece. Unlike simple ultrasonic groove devices without filtration and circulation, this reduces the adverse effects of dirt re-adhesion on the workpiece during the cleaning process.

[0020] 5. By combining the sealed tank with the cooler, heat exchange and cooling of the circulating cleaning fluid are achieved, solving the problem that the continuous ultrasonic work causes the cleaning fluid temperature to rise and damage the coating on the surface of the parts. Unlike ordinary ultrasonic cleaning tanks without temperature control, this method maintains the cleaning fluid temperature in a manner suitable for the working conditions of cleaning precision components, ensuring the reliable operation of mass spectrometer component cleaning. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of one side of the overall structure of the present invention; Figure 2 This is a schematic diagram of the structure on the other side of the entire invention; Figure 3This is a schematic diagram of the internal structure of the ultrasonic cleaner of the present invention; Figure 4 This is a schematic diagram of the structure of the vibration part of the present invention; Figure 5 This is a diagram showing the fit between the flow guide and the circulation section of the present invention; Figure 6 This is a schematic diagram of the filter cavity structure of the present invention; Figure 7 This is a schematic diagram of the structure of the disturbance part of the present invention.

[0022] In the diagram: 1. Ultrasonic cleaner; 2. Control panel; 3. Machine cover; 4. Ear hook; 5. Vibrating part; 51. Base plate; 52. Transducer; 53. Through hole; 54. Rod hole; 6. Partition plate; 7. Flow guide; 71. Pad plate; 72. Flow guide groove; 73. Mounting hole; 74. Wedge-shaped opening; 8. Circulation part; 81. Sealing groove; 82. Water outlet pipe; 83. One-way valve; 84. Filter chamber; 85. Miniature booster pump; 9. Disturbance part; 91. Rotating rod; 92. Impeller; 93. Sector cam; 94. Rotating shaft; 95. Collar; 96. Driven contact; 97. Sleeve frame; 98. Limiting rod; 99. Torsion spring; 10. Hollowed-out material cylinder; 11. Refrigerator. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Please see Figure 1 - Figure 7 The present invention provides an ultrasonic cleaning device for mass spectrometer components, including an ultrasonic cleaner 1 and a control panel 2 integrated therewith. The ultrasonic cleaner 1 is provided with a vibration part 5, a partition 6, a flow guide part 7, a circulation part 8 and a disturbance part 9. The ultrasonic cleaner 1 includes a working area at the bottom of its inner wall and a cleaning area at the top of its inner wall. The cleaning area of ​​the ultrasonic cleaner 1 is equipped with a cover 3, and ear hooks 4 are installed on both sides of the outer wall of the ultrasonic cleaner 1.

[0025] In use, cleaning fluid is added to the cleaning zone of the ultrasonic cleaner 1, and the mass spectrometer components to be cleaned are placed inside the hollow material cylinder 10. The ultrasonic power supply, drive power supply and cooling power supply are turned on through the control panel 2 respectively. The transducer 52 works to generate ultrasonic vibration, the micro booster pump 85 is started to drive the cleaning fluid to circulate, and the cooler 11 is started to cool the circulating cleaning fluid. All mechanisms work together to carry out the cleaning operation.

[0026] Furthermore, the disturbance part 9 includes a rotating rod 91 and a rotating shaft 94. An impeller 92 is fixedly connected to the bottom end of the rotating rod 91, and a sector-shaped cam 93 is fixedly connected to the top end of the rotating rod 91. A collar 95 is fixedly connected to the top end of the rotating shaft 94. Two driven contacts 96 are symmetrically connected to the outer wall of the collar 95, spaced 180 degrees apart. A sleeve 97 is rotatably connected to the outer wall of the rotating shaft 94, and two limiting rods 98 are symmetrically connected to the outer wall of the sleeve 97. The ends of the two limiting rods 98 extend to the sides of the two driven contacts 96, respectively. A torsion spring 99 is elastically connected between the sleeve 97 and the collar 95, and the torsion spring 99 is movably sleeved on the outer wall of the rotating shaft 94. The sector-shaped cam 93 contacts the driven contact 96 on one side of the collar 95. The rotating rod 91, impeller 92, and sector cam 93 together form a single-sided disturbance component. The rotating shaft 94, collar 95, two driven contacts 96, sleeve 97, two limit rods 98, and torsion spring 99 together form a single-sided swing mechanism. There are four single-sided disturbance components and two single-sided swing mechanisms. The top of the rotating shaft 94 in both single-sided swing mechanisms is fixedly connected to a hollow material cylinder 10. The hollow material cylinder 10 is horizontally divided into upper and lower parts along its own center line. The upper and lower parts of the hollow material cylinder 10 are hinged together. Each pair of single-sided disturbance components is set on both sides of one of the single-sided swing mechanisms. The two driven contacts 96 on each collar 95 abut against their adjacent sector cam 93.

[0027] In use, the cleaning fluid flowing in the guide channel 72 drives the impeller 92 to rotate. The impeller 92 drives the rotating rod 91 and the sector cam 93 to rotate synchronously. When the working arc of the sector cam 93 contacts the driven contact 96, it pushes the collar 95, the rotating shaft 94 and the hollow material cylinder 10 to deflect at an angle. The torsion spring 99 is torsionally charged. When the sector cam 93 rotates to the avoidance notch position, the sector cam 93 disengages from the driven contact 96. The torsion spring 99 releases the torque to drive the collar 95 to reset. The limit rod 98 limits the position of the driven contact 96, so that the driven contact 96 stays in the alignment position that can cooperate with the sector cam 93 next time. During the continuous rotation of the rotating rod 91, the sector cam 93 repeatedly moves the driven contact 96, causing the hollow material cylinder 10 to oscillate intermittently.

[0028] In this embodiment, the partition 6 is fixedly connected between the inner walls of the ultrasonic cleaner 1. The vibrating part 5 includes two base plates 51, both of which are fixedly connected to the top of the partition 6. The two base plates 51 are aligned with the two hollow material cylinders 10, and there is a gap between each hollow material cylinder 10 and its aligned base plate 51. A transducer 52 is installed at the bottom of each of the two base plates 51. Each base plate 51 has a through hole 53 and two rod holes 54. The top of the partition 6 has a pre-set slot adapted to the nesting of the transducer 52. The rotating shafts 94 in the two single-sided swing mechanisms are rotatably connected to the inner walls of the through holes 53 of the two base plates 51. The intermediate frame 97 is installed on two base plates 51 respectively. The bottom end of each rotating rod 91 is respectively attached to the through rod hole 54 and the base plate 51 and extends downward. The impeller 92 is located below the base plate 51. The flow guide 7 includes a pad 71, which is fixedly connected to the bottom of the partition plate 6. A flow guide groove 72 is provided on the pad 71. The inner wall of the flow guide groove 72 is provided with a mounting hole 73 that is adapted to the rotation of the impeller 92. The extension end of each rotating rod 91 is rotatably connected to the inner wall of each mounting hole 73. The blade end of each impeller 92 is located in the path of the flow guide groove 72. The two slots of the flow guide groove 72 are located on the same side of the pad 71. The slots of the flow guide groove 72 are provided with wedge-shaped openings 74.

[0029] In use, the cleaning fluid output by the micro booster pump 85 enters the guide channel 72 through the wedge-shaped port 74. The wedge-shaped port 74 throttles and pressurizes the fluid. The high-pressure cleaning fluid inside the guide channel 72 impacts each impeller 92 in sequence, driving the impeller 92 to rotate. The rotating rod 91 passes through the rod hole 54 of the base plate 51 to achieve rotational support. The rotating shaft 94 rotates in the through hole 53 of the base plate 51. The ultrasonic vibration generated by the transducer 52 at the bottom of the base plate 51 is transmitted to the cleaning fluid in the cleaning zone. The hollow material cylinder 10 maintains a fixed distance from the base plate 51 to avoid the hollow material cylinder 10 directly bearing the strong impact of the transducer 52.

[0030] It is worth noting that the circulation unit 8 includes two miniature booster pumps 85 (DP-521 miniature diaphragm booster pumps, DC12V power supply, maximum working pressure 0.48MPa, open flow rate 3.5L / min). Both miniature booster pumps 85 are installed on one side of the outer wall of the ultrasonic cleaner 1. The pump ports on both sides of one miniature booster pump 85 are connected to the inner wall of the cleaning area of ​​the ultrasonic cleaner 1 and the wedge-shaped port 74 on the same side, respectively. The pump ports on both sides of the other miniature booster pump 85 are connected to the inner wall of the working area of ​​the ultrasonic cleaner 1 and the wedge-shaped port 74 on the same side, respectively. A sealing groove 81 is fixedly connected between the bottom of the inner wall of the ultrasonic cleaner 1 and the pad 71. A water outlet pipe 82 is connected to the inner wall of the sealing groove 81. The water outlet pipe 82 is fixedly extended through the working area of ​​the ultrasonic cleaner 1 and connected to the cleaning area of ​​the ultrasonic cleaner 1. A one-way valve 83 is installed in the through section. A cooler 11 (TEC1-12706 semiconductor cooling chip, with matching aluminum heat sink fins and cooling fan forming a complete cooler assembly, maximum operating voltage 12V, maximum cooling power 53.3W) is installed between the sealing groove 81 and the working area of ​​the ultrasonic cleaner 1. The cooling end of the cooler 11 is located inside the sealing groove 81, and the heat dissipation end of the cooler 11 is located outside the ultrasonic cleaner 1. A filter chamber 84 (with Ybs-316L-φ25×100 stainless steel sintered filter element as the internal filter element, with a filtration accuracy of 20μm, used to intercept solid salt scale and particulate impurities in the cleaning fluid) is installed inside the sealing groove 81. One side of the filter chamber 84 is connected to the water outlet pipe 82, and the other side of the filter chamber 84 is connected to the pump port of the micro booster pump 85 in the working area of ​​the ultrasonic cleaner 1 through the sealing groove 81.

[0031] During use, the cleaning fluid inside the cleaning zone can flow into the filter chamber 84 inside the sealing groove 81 through the outlet pipe 82 and the one-way valve 83. The filter chamber 84 traps the solid dirt and impurities stripped from the cleaning fluid. The cooling end of the cooler 11 exchanges heat with and cools the cleaning fluid flowing inside the filter chamber 84. The heat dissipation end of the cooler 11 dissipates heat to the outside of the equipment. The filtered and cooled cleaning fluid is drawn by the micro booster pump 85, pressurized and sent into the guide groove 72. After passing through the guide groove 72 and the wedge-shaped port 74, the fluid flows back into the cleaning zone, completing the closed-loop circulation of the cleaning fluid. The one-way valve 83 restricts the fluid to flow only from the cleaning zone to the sealing groove 81 in one direction to prevent backflow of fluid.

[0032] It is worth noting that the ultrasonic cleaner 1 integrates an ultrasonic power supply, a drive power supply, and a cooling power supply. The transducer 52 is electrically connected to the control panel 2 via the ultrasonic power supply, the micro booster pump 85 is electrically connected to the control panel 2 via the drive power supply, and the cooler 11 is electrically connected to the control panel 2 via the cooling power supply.

[0033] In use, the control panel 2 outputs control signals, the ultrasonic power supply receives the signals and outputs high-frequency excitation electrical signals to the transducer 52 to control the start and stop of ultrasonic vibration and the working parameters. The drive power supply receives the signals from the control panel 2 and provides working power to the micro booster pump 85, controlling the start and stop of the booster pump. The cooling power supply receives the signals from the control panel 2 and supplies power to the cooler 11, controlling its start and stop. The control panel 2 can realize independent control of each electrical component, realizing independent or synchronous operation of ultrasonic cleaning, fluid circulation, and cooling processes.

[0034] Working principle: The mass spectrometer assembly is placed inside the hollow material cylinder 10. Cleaning fluid is added to the cleaning zone of the ultrasonic cleaner 1. The control panel 2 is turned on. The ultrasonic power supply, drive power supply and cooling power supply receive the control signals from the control panel 2 and supply power to the transducer 52, the micro booster pump 85 and the cooler 11 respectively. After receiving the high-frequency excitation electrical signal output by the ultrasonic power supply, the transducer 52 generates high-frequency mechanical vibration. The vibration is transmitted to the cleaning fluid inside the cleaning zone through the base plate 51. An ultrasonic cavitation effect is formed inside the cleaning fluid to peel off the adhering substances on the surface of the workpiece. A preset distance is maintained between the hollow material cylinder 10 and the base plate 51 to avoid damage to the workpiece coating caused by excessive cavitation impact near the transducer 52.

[0035] Simultaneously, the power supply drives two miniature booster pumps 85 to start. The cleaning fluid inside the cleaning zone flows into the filter chamber 84 inside the sealing groove 81 through the outlet pipe 82 and the one-way valve 83. The filter chamber 84 traps the salt scale and solid particle impurities that fall off from the surface of the workpiece during the cleaning process, preventing the impurities from adhering to the workpiece to be cleaned again. The cooling power supply drives the cooler 11 to work. The cooling end of the cooler 11 performs heat exchange and cooling on the cleaning fluid in the filter chamber 84, suppressing the temperature rise of the cleaning fluid caused by the continuous work of the ultrasound. The heat dissipation end of the cooler 11 discharges the heat to the outside of the ultrasonic cleaner 1.

[0036] After filtration and cooling, the cleaning fluid is drawn and pressurized by the micro booster pump 85 and then delivered to the wedge-shaped port 74 on the same side of the pad 71. The change in the width of the wedge-shaped port 74 throttles and pressurizes the fluid, causing the high-pressure cleaning fluid to flow along the internal path of the guide channel 72. The high-speed flowing cleaning fluid impacts each impeller 92 in the guide channel 72 in sequence, driving the impeller 92, the rotating rod 91, and the fan-shaped cam 93 fixed at the top of the rotating rod 91 to rotate counterclockwise synchronously. The fan-shaped cam 93 continues to rotate with the rotating rod 91. When the 90° working arc segment of the fan-shaped cam 93 contacts the driven contact 96 on the collar 95, it pushes the collar 95 and the rotating shaft 96. 4. When the collar 95 rotates, the torsion spring 99 undergoes torsional deformation to accumulate elastic potential energy. The rotating shaft 94 then drives the hollow material cylinder 10 to deflect at an angle. When the sector cam 93 rotates to the 270° clearance area, the sector cam 93 disengages from the driven contact 96. The torsion spring 99 releases its elastic potential energy to drive the collar 95, rotating shaft 94, and hollow material cylinder 10 to reset. The limiting rod 98 on the sleeve 97 mechanically limits the driven contact 96 to prevent the collar 95 from rotating excessively and to ensure that the driven contact 96 remains in the alignment position that can cooperate with the working arc segment of the next sector cam 93.

[0037] The hollow material cylinder 10 generates intermittent reciprocating oscillations, changing the orientation of various surfaces of the internal mass spectrometer components and the micropore slits. Combined with the ultrasonic cavitation and the circulating jet output by the guide channel 72, it removes the air bubbles that isolate ultrasonic energy trapped inside the micropores of the workpiece, thereby forming a complete closed-loop fluid circulation. The cover 3 closes the upper opening of the cleaning area to reduce ultrasonic noise and liquid splashing. The ear hooks 4 are used for hoisting and transporting the whole machine.

[0038] In the entire cleaning process, ultrasonic cavitation decontamination, fluid filtration for impurity removal, fluid heat exchange and temperature control, and intermittent workpiece oscillation are all completed inside the same device. The workpiece remains inside the hollow material cylinder 10 throughout the process without needing to be removed or transferred, reducing secondary pollution introduced from the outside.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. An ultrasonic cleaning device for a mass spectrometer component, comprising an ultrasonic cleaner (1) and a control panel (2) integrated therewith, characterized in that: The ultrasonic cleaner (1) is equipped with a vibration section (5), a partition (6), a flow guide (7), a circulation section (8), and a disturbance section (9). The ultrasonic cleaner (1) includes a working area at the bottom of its inner wall and a cleaning area at the top of its inner wall. The cleaning area of ​​the ultrasonic cleaner (1) is fitted with a cover (3). Ear hooks (4) are installed on both sides of the outer wall of the ultrasonic cleaner (1). The disturbance section (9) includes a rotating rod (91) and a rotating shaft (94). An impeller (92) is fixedly connected to the bottom end of the rotating rod (91). A fan-shaped cam (93) is fixedly connected to the top end of the rotating rod (91). The top end of the rotating shaft (94) is fixedly connected to... There is a collar (95), and two driven contacts (96) are symmetrically connected to the outer wall of the collar (95). The two driven contacts (96) are spaced 180 degrees apart. A sleeve (97) is rotatably connected to the outer wall of the rotating shaft (94). Two limiting rods (98) are symmetrically connected to the outer wall of the sleeve (97). The ends of the two limiting rods (98) extend to the sides of the two driven contacts (96). A torsion spring (99) is elastically connected between the sleeve (97) and the collar (95). The torsion spring (99) is movably sleeved on the outer wall of the rotating shaft (94). The sector cam (93) contacts the driven contact (96) on one side of the collar (95).

2. The ultrasonic cleaning device for a mass spectrometer component according to claim 1, characterized in that: The rotating rod (91), impeller (92), and sector cam (93) together form a single-sided disturbance component. The rotating shaft (94), collar (95), two driven contacts (96), sleeve (97), two limit rods (98), and torsion spring (99) together form a single-sided swing mechanism. There are four single-sided disturbance components and two single-sided swing mechanisms.

3. The ultrasonic cleaning device for a mass spectrometer component according to claim 2, characterized in that: The top of the rotating shaft (94) in both of the single-sided swing mechanisms is fixedly connected to a hollow material cylinder (10). The hollow material cylinder (10) is horizontally divided into upper and lower parts along its own center line, and the upper and lower parts of the hollow material cylinder (10) are hinged together.

4. The ultrasonic cleaning device for a mass spectrometer component according to claim 2, characterized in that: Each pair of the single-sided disturbance components is respectively disposed on both sides of one of the single-sided swing mechanisms, and the two driven contacts (96) on each collar (95) abut against their respective adjacent sector cams (93).

5. The ultrasonic cleaning device for a mass spectrometer component according to claim 3, characterized in that: The partition (6) is fixedly connected to the inner wall of the ultrasonic cleaner (1). The vibrating part (5) includes two base plates (51). The two base plates (51) are fixedly connected to the top of the partition (6). The two base plates (51) are aligned with the two hollow material cylinders (10). There is a gap between each hollow material cylinder (10) and its aligned base plate (51). A transducer (52) is installed at the bottom of each of the two base plates (51). Each base plate (51) has a through hole (53) and two rod holes (54). The top of the partition (6) is pre-set with a slot that is nested and adapted to the transducer (52).

6. The ultrasonic cleaning device for a mass spectrometer component according to claim 5, characterized in that: The rotating shafts (94) of the two single-sided swing mechanisms are rotatably connected to the inner walls of the through holes (53) of the two base plates (51). The sleeves (97) of the two single-sided swing mechanisms are respectively installed on the two base plates (51). The bottom end of each rotating rod (91) is respectively attached to the through rod hole (54) and the base plate (51) and extends downward. The impeller (92) is located below the base plate (51).

7. The ultrasonic cleaning device for a mass spectrometer component according to claim 6, characterized in that: The flow guide (7) includes a pad (71), which is fixedly connected to the bottom of the partition (6). A flow guide groove (72) is provided on the pad (71). The inner wall of the flow guide groove (72) is provided with mounting holes (73) that are adapted to the rotation of the impeller (92). The extension end of each rotating rod (91) is rotatably connected to the inner wall of each mounting hole (73). The blade end of each impeller (92) is located in the path of the flow guide groove (72). The two slots of the flow guide groove (72) are located on the same side of the pad (71). The slots of the flow guide groove (72) are provided with wedge-shaped openings (74).

8. The ultrasonic cleaning device for a mass spectrometer component according to claim 7, characterized in that: The circulation unit (8) includes two micro booster pumps (85). Both micro booster pumps (85) are installed on one side of the outer wall of the ultrasonic cleaner (1). The pump ports on both sides of one of the micro booster pumps (85) are respectively connected to the inner wall of the cleaning area of ​​the ultrasonic cleaner (1) and the wedge-shaped port (74) on the same side. The pump ports on both sides of the other micro booster pump (85) are respectively connected to the inner wall of the working area of ​​the ultrasonic cleaner (1) and the wedge-shaped port (74) on the same side.

9. The ultrasonic cleaning device for a mass spectrometer component according to claim 8, characterized in that: A sealing groove (81) is fixedly connected between the bottom of the inner wall of the ultrasonic cleaner (1) and the pad (71). A water outlet pipe (82) is connected to the inner wall of the sealing groove (81). The water outlet pipe (82) is fixedly connected to the working area of ​​the ultrasonic cleaner (1) and is connected to the cleaning area of ​​the ultrasonic cleaner (1). A one-way valve (83) is installed in the through section of the water outlet pipe (82). A cooler (11) is installed between the sealing groove (81) and the working area of ​​the ultrasonic cleaner (1). The cooling end of the cooler (11) is located inside the sealing groove (81), and the heat dissipation end of the cooler (11) is located outside the ultrasonic cleaner (1). A filter chamber (84) is installed inside the sealing groove (81). One side of the filter chamber (84) is connected to the water outlet pipe (82), and the other side of the filter chamber (84) is connected to the pump port of the working area of ​​the ultrasonic cleaner (1) through the sealing groove (81).

10. The ultrasonic cleaning device for a mass spectrometer component according to claim 9, characterized in that: The ultrasonic cleaner (1) integrates an ultrasonic power supply, a driving power supply and a cooling power supply. The transducer (52) is electrically connected to the control panel (2) through the ultrasonic power supply. The micro booster pump (85) is electrically connected to the control panel (2) through the driving power supply. The cooler (11) is electrically connected to the control panel (2) through the cooling power supply.

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