An automated device for cleaning pg cartridges

Abstract

The application relates to the technical field of semiconductor manufacturing, and discloses an automatic device for cleaning a PG barrel, which comprises a bottom plate, a box body fixed to the top surface of the bottom plate, the box body being open on one side and being provided with a box door, a negative pressure suction port being arranged on the side surface of the box body, an air suction pipe being fixed in the negative pressure suction port, an installation seat being arranged in the box body, the installation seat being fixed to the bottom plate through four assembling rods, a first through hole being arranged in the installation seat, and a rotating disc being rotatably arranged on the top surface of the installation seat. The box body closed structure is matched with the negative pressure suction port, a continuous negative pressure airflow field is formed in the cleaning cavity, the stripped dust can be sucked and collected in real time, the overflow and secondary dust raising of the graphite dust are reduced, and the operation environment is kept clean.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to an automated device for cleaning PG barrels. Background Technology

[0002] In silicon carbide crystal growth or epitaxial manufacturing processes, pyrolytic graphite and tantalum carbide have become mainstream coating materials due to their excellent high-temperature stability, low coefficient of thermal expansion, and corrosion resistance. Nearly half of the large-scale production manufacturers in China use PG porous coating technology, mainly due to its good gas permeability uniformity and high purity. As a core consumable in this process, the high purity, surface cleanliness, and gas permeability uniformity of the porous barrel directly determine the transport and distribution of gas phase components, thus having a crucial impact on the yield and crystal quality of the finished wafer. The porous barrel surface or micropores contain... Under the high temperature of crystal growth, particulate matter will migrate and arrange itself on the seed crystal surface as heterogeneous nucleation sites along with the gas phase components, directly inducing the formation of carbon inclusions inside the crystal. These inclusions will gradually expand from the crystal edge to the central region along the axial and radial gradient directions, severely damaging the integrity and uniformity of the crystal. Currently, the requirements for inclusion defects in wafers in power devices and AR optics are extremely stringent. Any tiny inclusion may cause a decrease in the breakdown voltage of power devices, an increase in on-resistance, or a decrease in the optical transmittance and imaging distortion of AR optical lenses. However, in actual production processes, after high-temperature thermal reactions or repeated cycles, the micropores and surface of porous barrels are prone to the adhesion and accumulation of tiny graphite dust and process by-product particles. These contaminants are not only difficult to remove effectively through conventional cleaning methods, but also continue to be released during subsequent use, causing cross-contamination, further aggravating the density of inclusion defects in the crystal, and significantly reducing wafer yield. Existing technologies for removing particulate matter from the surface of porous barrels typically have the following drawbacks: 1. Single-function purging is prone to secondary pollution: Although relying solely on high-pressure air guns or airflow to purge can remove some particles, the high-pressure airflow can easily cause fine graphite dust to be re-entrained in the air and re-adsorbed in other areas of the barrel under the action of static electricity, making it impossible to truly "carry away" the dust from the system. 2. Poor removal effect on large particles or strongly adhering dust: There are often some large particles or sticky dust with strong lattice adhesion on the surface of porous barrel and the edge of micropores, which are difficult to completely remove by fluid kinetic energy alone. 3. Manual wiping is inefficient and easily introduces impurities: Manual wiping with a clean cloth cannot reach the inner wall of the porous cylinder and the depth of the micropores, and the wiping force is uneven, which does not meet the requirements of automated and standardized mass production in wafer fabs.

[0003] Therefore, an automated device for cleaning PG barrels needs to be designed to solve the above problems. Summary of the Invention

[0004] The purpose of this invention is to solve the problem of incomplete cleaning caused by manual cleaning of PG barrels in the prior art, and to propose an automated device for cleaning PG barrels.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An automated device for cleaning PG barrels includes a base plate, a housing fixed to the top surface of the base plate, one side of the housing being open and equipped with a door, a negative pressure suction port on the side of the housing, a suction pipe fixed inside the negative pressure suction port, a mounting base inside the housing, the mounting base being fixed to the base plate by four mounting rods, a first opening on the mounting base, a rotating disk rotatably mounted on the top surface of the mounting base, a second opening on the rotating disk, a drive assembly inside the housing for driving the rotating disk to rotate, and a first cleaning assembly and a second cleaning assembly inside the housing.

[0006] As a preferred embodiment of the present invention, the second port is positioned directly opposite the first port, and the second port and the first port are coaxially aligned.

[0007] As a preferred embodiment of the present invention, the drive assembly includes a drive motor and a gear ring. The drive motor is mounted on a base plate, the gear ring is fixedly sleeved on a rotating disk, and the output shaft of the drive motor is fixed with a gear, which meshes with the gear ring.

[0008] As a preferred embodiment of the present invention, the top surface of the rotating disk is provided with a plurality of annular grooves, each annular groove having a different size, and the plurality of annular grooves being arranged coaxially with the rotating disk.

[0009] As a preferred embodiment of the present invention, the first cleaning component includes a first bracket and a vertical pole, both of which are fixed on a base plate. A fixing seat is fixed to the side of the first bracket, and an outer brush bristle is provided on the fixing seat. The vertical pole passes through a first opening, and an mounting rod is fixed to the top of the vertical pole. An inner brush bristle is arranged on the outer surface of the mounting rod.

[0010] As a preferred embodiment of the present invention, the upright, the mounting rod and the rotating disk are arranged coaxially.

[0011] As a preferred embodiment of the present invention, the second cleaning assembly includes a second bracket, a cavity, a plurality of air jet holes, and a pipe connector. The second bracket is fixed on a base plate, and an air jet pipe is fixed to the side of the second bracket. The cavity is opened inside the mounting rod, and the plurality of air jet holes are all opened on the outer surface of the mounting rod. Each air jet hole communicates with the interior of the cavity. The pipe connector is arranged at the top of the mounting rod and communicates with the cavity. The second cleaning assembly also includes a gas distributor, which is fixed on the base plate. A first gas supply pipe and a second gas supply pipe are connected to the gas distributor. The end of the first gas supply pipe away from the gas distributor is connected to the air jet pipe, and the end of the second gas supply pipe away from the gas distributor is connected to the pipe connector.

[0012] As a preferred embodiment of the present invention, a plurality of the jet holes are arranged in a circumferential array around the axis of the mounting rod, and each jet hole is arranged in a horizontal direction.

[0013] As a preferred embodiment of the present invention, an electrostatic eliminator is installed on the base plate.

[0014] The present invention has the following beneficial effects: This automated cleaning device, through the combination of a sealed housing structure and a negative pressure suction port, creates a continuous negative pressure airflow field within the cleaning chamber. This facilitates the real-time absorption and collection of detached dust, reducing graphite dust spillage and secondary dust generation, ensuring a clean operating environment. The rotating disc drives the PG barrel to rotate, allowing the outer and inner bristles to simultaneously act on the inner and outer surfaces of the barrel, achieving synchronous brushing. Combined with two air curtains ejected from the jet pipe and the cavity inside the mounting rod, the barrel surface undergoes mechanical brushing and high-pressure blowing sequentially with each rotation. This helps remove particles deep within micropores that are difficult for brushes to reach, reducing cleaning blind spots. The annular settling tank can accommodate barrels of different sizes, facilitating positioning and coaxial rotation, improving versatility. The electrostatic eliminator actively neutralizes the static charge on the barrel and particle surfaces, weakening the adsorption force between particles and the substrate. This makes it easier for particles to detach under the action of brushing and airflow and be carried away by negative pressure, while reducing the risk of discharge caused by static electricity accumulation. This has a positive effect on improving the removal efficiency of micro-nano particles and the overall cleaning quality. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of an automated device for cleaning PG barrels proposed in this invention; Figure 2 Schematic diagram of the internal structure of the box Figure 1 ; Figure 3 Schematic diagram of the internal structure of the box Figure 2 ; Figure 4 This is a schematic diagram of the drive component. Figure 5 This is a cross-sectional structural diagram of the upright and mounting rod; Figure 6 This is a diagram showing the airflow direction during the operation of the second cleaning component.

[0016] In the diagram: 1. Base plate; 2. Box body; 21. Box door; 22. Negative pressure air intake; 23. Air intake pipe; 31. Mounting base; 32. First port; 33. Assembly rod; 34. Rotary disk; 35. Second port; 41. Drive motor; 42. Gear ring; 43. Gear; 51. First bracket; 52. Fixed base; 53. Outer brush; 54. Upright pole; 55. Mounting rod; 56. Inner brush; 61. Second bracket; 62. Air jet pipe; 63. Cavity; 64. Air jet hole; 65. Pipe connector; 66. Gas distributor; 67. First air supply pipe; 68. Second air supply pipe; 7. Static eliminator. Detailed Implementation

[0017] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0018] Example 1: This example discloses an automated device for cleaning PG barrels, referring to... Figure 1-6 The system includes a base plate 1, with a housing 2 fixed to the top surface of the base plate 1. The interior of the housing 2 forms a relatively enclosed cleaning chamber, effectively preventing graphite dust from spilling out. One side of the housing 2 is open and equipped with a door 21. The door 21 is designed for easy access to the PG cartridge by the operator. The door 21 is made of transparent tempered glass, allowing the operator to observe the working status inside the housing 2 in real time during the cleaning process and promptly detect any abnormalities. A negative pressure suction port 22 is provided on the side of the housing 2, and a suction pipe is fixed inside the negative pressure suction port 22. 23. The suction pipe 23 is connected to the workshop vacuum dust collection system or an independent dust collection fan to form a stable negative pressure airflow field inside the box, ensuring that the stripped dust is sucked away and collected in real time to avoid secondary dispersion. This negative pressure system is always running during the cleaning process to ensure that the inside of the box 2 maintains a negative pressure environment, so that external particles cannot enter the inside of the box 2. At the same time, it ensures that once the stripped particles in the box 2 are separated from the surface of the PG cylinder, they are carried by the airflow and sucked into the suction pipe 23, preventing particles from accumulating at the bottom or side wall of the box 2 to form a secondary pollution source.

[0019] The housing 2 has a mounting base 31 inside, which is fixed to the base plate 1 by four mounting rods 33. The mounting base 31 has a first opening 32. A rotating disk 34 is rotatably mounted on the top surface of the mounting base 31. The rotating disk 34 has a second opening 35, which is directly opposite the first opening 32. The first opening 32, the second opening 35, the mounting base 31, and the rotating disk 34 are coaxially aligned to prevent uneven cleaning or mechanical collisions caused by eccentric rotation. The housing 2 also has a drive assembly inside for driving... The rotating disk 34 rotates, and the driving assembly includes a drive motor 41 and a gear ring 42. The drive motor 41 is mounted on the base plate 1. The drive motor 41 is a servo motor with a precision reducer, which can provide a stable and controllable speed output. The gear ring 42 is fixedly sleeved on the rotating disk 34. The output shaft of the drive motor 41 is fixed with a gear 43, and the gear 43 meshes with the gear ring 42. When the drive motor 41 is running, it can drive the gear 43 to rotate. When the gear 43 rotates, it can drive the gear ring 42 that meshes with it to rotate, thereby controlling the rotation of the rotating disk 34.

[0020] The top surface of the rotating disk 34 has several annular grooves, each with a different size. These grooves are coaxially aligned with the rotating disk 34. The grooves provide positioning for PG cylinders of different sizes, allowing operators to place them into the corresponding grooves to maintain coaxiality with the rotating disk 34. The inner walls of the grooves have anti-slip textures or elastic pads to improve the stability of the PG cylinders during rotation. The housing 2 contains a first cleaning assembly, which includes a first support 51 and a vertical rod 54. Both the first support 51 and the vertical rod 54 are fixed to the base plate 1. A fixing seat 52 is fixed to the side of the first support 51, and the fixing seat 52 has outer bristles 53. The vertical rod 54 passes through the first opening 32, and a mounting rod 55 is fixed to the top of the vertical rod 54. The outer surface of the mounting rod 55 is covered with inner bristles 56. Figure 2 As shown, when the PG barrel is placed on the rotating disk 34, the outer bristles 53 are in contact with the outer surface of the PG barrel, and the inner bristles 56 are in contact with the inner wall of the PG barrel. Both the outer bristles 53 and the inner bristles 56 are made of high-elasticity polyester or nylon filament material.

[0021] The housing 2 houses a second cleaning assembly, which includes a second bracket 61, a cavity 63, several air jet holes 64, and a pipe connector 65. The second bracket 61 is fixed to the base plate 1, and an air jet pipe 62 is fixed to the side of the second bracket 61. The nozzle of the air jet pipe 62 faces the outer surface of the PG barrel, and the nozzle is designed with a flat fan-shaped structure to expand the coverage width of the airflow on the surface of the PG barrel and improve the purging efficiency. The cavity 63 is opened inside the mounting rod 55, and the several air jet holes 64 are all opened in the mounting rod 55. On the outer surface of the rod 55, each jet hole 64 is connected to the interior of the cavity 63. Several jet holes 64 are located at the bottom of the mounting rod 55. The jet holes 64 are evenly distributed around the circumference of the mounting rod 55, so that the airflow ejected from the bottom of the PG barrel can flow evenly from bottom to top along the inner wall of the PG barrel, forming an air curtain that completely covers the inner wall. At the same time, it avoids the formation of turbulent dead zones inside the PG barrel due to uneven airflow speed. The pipe joint 65 is arranged at the top of the mounting rod 55 and is connected to the cavity 63.

[0022] The second cleaning assembly also includes a gas distributor 66, which is fixed to the base plate 1. A first air supply pipe 67 and a second air supply pipe 68 are connected to the gas distributor 66. The end of the first air supply pipe 67 away from the gas distributor 66 is connected to the jet pipe 62, and the end of the second air supply pipe 68 away from the gas distributor 66 is connected to the pipe connector 65. The pipe connector 65 and the second air supply pipe 68 are freely detachable for easy installation of the PG cylinder. The gas distributor 66 integrates a pressure regulating valve and a flow control valve, which can independently adjust the output air pressure and flow rate of the first air supply pipe 67 and the second air supply pipe 68, allowing for external... Surface purging and inner wall purging each operate under optimal process parameters to meet cleaning needs with different levels of contamination. Gas distributor 66 is connected to a gas source, which supplies gas to the interior of gas distributor 66. The gas source is existing technology and is not shown in the figure, so it will not be described in detail here. The gas used is high-purity nitrogen or argon. Inert gases do not react chemically with graphite materials and will not have an adverse effect on the physicochemical properties of the PG barrel. At the same time, the high-pressure nitrogen purging can also have a reverse cleaning effect on the bristles. Particles accumulated in the gaps between the bristles are blown out by the high-pressure nitrogen, maintaining the continuous cleaning ability of the bristles.

[0023] When using this invention, at the start of operation, the operator opens the box door 21 and vertically places the PG cartridge to be cleaned on the rotating disk 34. The PG cartridge is then placed in the annular sink of the corresponding size, ensuring that the PG cartridge is coaxial with the rotating disk 34. After the PG cartridge is placed, the outer bristles 53 and the inner bristles 56 respectively adhere to the outer and inner surfaces of the PG cartridge, completing the preparatory actions before cleaning. When placing the PG cartridge, the operator visually checks to confirm the fit between the bottom of the PG cartridge and the annular sink, ensuring that the PG cartridge maintains uniform contact with the sink wall in the entire circumference of the annular sink, avoiding shaking of the PG cartridge or uneven contact with the bristles during rotation due to placement deviation.

[0024] Then close the box door 21 and start the workshop vacuum cleaning system or independent vacuum fan. Under the suction of the suction pipe 23, a stable negative pressure airflow field is formed inside the box 2. This negative pressure environment inhibits the outward escape of graphite dust stripped during the subsequent cleaning process from the source. On the other hand, it causes the micro-nano particles suspended in the chamber to move rapidly to the negative pressure suction port 22 under the traction of the airflow and be collected, providing a clean and safe working space for the entire cleaning process. The start-up of the negative pressure system should be completed at least 5 to 10 seconds before the start of the drive motor 41 to ensure that a stable negative pressure environment has been established inside the box 2 when the brushing action begins, so that the generated dust can be immediately drawn away instead of being suspended first and then drawn away.

[0025] Next, the staff starts the drive motor 41. When the drive motor 41 is running, it drives the rotating disk 34 to rotate through the gear 43 and the gear ring 42. The PG material cylinder on the rotating disk 34 rotates accordingly. The acceleration process of the drive motor 41 should adopt a soft start method, gradually increasing to the set speed within a few seconds to avoid instantaneous acceleration causing the PG material cylinder to slip or shift on the rotating disk 34. At the same time, the motor speed should be kept constant during the cleaning process to make the brushing force uniform and stable.

[0026] During the rotation of the PG barrel, the outer bristles 53 and inner bristles 56 maintain contact with the PG barrel. The brushing force generated by their relative motion can effectively break the physical adhesion of large particulate pollutants on the PG material surface. At the same time, through the mechanical squeezing and relative friction of the brushes, some particles blocked in the micropore opening area are pushed and loosened, initially clearing the channels. The contact pressure between the bristles and the PG barrel surface is determined by the elastic modulus and the bristle implantation density. The bristles continuously generate elastic deformation during rotation, and their elastic recovery force forms a uniform micro-compressive stress field on the PG barrel surface. The periodic change of this stress field helps to break the interfacial bond between the particles and the matrix. In particular, for the chemical bond between the oxide layer on the surface of graphite material after high-temperature sintering and the pollutant particles, the micro-shearing action of mechanical brushing can effectively weaken its bonding strength, creating favorable conditions for subsequent high-pressure airflow purging and cleaning.

[0027] Furthermore, the operator activates the gas source to supply gas to the gas distributor 66. The gas enters the jet pipe 62 through the first gas supply pipe 67 and simultaneously enters the cavity 63 through the second gas supply pipe 68. Subsequently, it is ejected through several jet holes 64. The nozzle of the jet pipe 62 is positioned facing the outer surface of the PG cylinder. The gas ejected from the jet pipe 62 can form a first air curtain on the outer surface of the PG cylinder. The several jet holes 64 can spray gas from the inner bottom of the PG cylinder. Subsequently, the gas surges upward to form a second air curtain. It should be noted that the gas used is high-purity nitrogen or argon.

[0028] The first and second air curtains use the shearing and peeling effect of airflow to force loosened but not yet detached particles, as well as micro-nano particles deep in the micropores that are difficult for the brush to directly reach, off the PG barrel surface. Because the outer brush bristles 53 and the air jet pipe 62 are arranged alternately along the rotation direction, during the cleaning process, the outer brush bristles 53 contact the contaminated area on the PG barrel surface before the air curtains, removing larger particles and contaminants with weak surface adhesion. Then, when rotating to the area of ​​the first air curtain, the residual particles softened by the outer brush bristles 53 are peeled off the surface under the impact of the high-pressure airflow. This front-brush-then-blow design avoids the airflow blowing particles deep into the micropores first. The difficulty in removing the bristles is then addressed, ensuring maximum cleaning efficiency. This cycle is repeated to essentially eliminate cleaning blind spots. After cleaning is completed and the pressure inside the chamber 2 returns to normal, the staff opens the chamber door 21 and takes out the cleaned PG cartridge. Once it passes inspection, it can be put into use. After the entire cleaning cycle is completed, the staff can periodically inspect the outer bristles 53, inner bristles 56, air jet pipe 62, and several air jet holes 64 inside the chamber 2. They can clean the stubborn dust accumulated at the roots of the outer bristles 53 and inner bristles 56, and check whether the air jet pipe 62 and air jet holes 64 are blocked by tiny particles, ensuring that the equipment maintains stable cleaning performance during long-term use.

[0029] Example 2: Based on Example 1, this example discloses an automated device for cleaning PG barrels, such as... Figure 3 As shown, an electrostatic eliminator 7 is installed on the base plate 1. The function of the electrostatic eliminator 7 is to actively neutralize the static charge on the surface of the PG barrel, improve the desorption conditions of micro and nano particles, and thus improve the cleaning effect. The electrostatic eliminator 7 adopts an AC corona discharge type or pulsed DC type ion bar structure, and is installed inside the housing 2 and facing the PG barrel on the rotating disk 34. Its ion emission needle is made of tungsten steel or titanium alloy material, which can withstand long-term operation of high voltage corona discharge without significant oxidation. The electrostatic eliminator 7 generates positive and negative ions to neutralize the static charge on the surface of the PG barrel and on the particles, so that the force between the particles and the substrate changes from strong electrostatic adsorption to weak van der Waals force. The particles are more likely to detach from the surface under the brushing of the brush and the shearing action of the airflow, and are promptly carried away by the negative pressure airflow.

[0030] During the rotation of the PG barrel, the electrostatic eliminator 7 continuously radiates positive and negative ions to its surface. The ions neutralize the positive and negative charges on the surface of the PG barrel and the attached particles, controlling the surface potential within a safe range of ±50V and eliminating the electrostatic adsorption effect. In particular, for silicon carbide or graphite particles with diameters in the micrometer range, the electrostatic adsorption force can be several to tens of times that of van der Waals forces. After neutralizing the static electricity, the difficulty of desorption is significantly reduced, and the cleaning efficiency is significantly improved.

[0031] Simultaneously, the elimination of static electricity helps maintain stable airflow within chamber 2, reducing particle deflection and retention during suction, ensuring the real-time collection efficiency of the negative pressure dust removal system for suspended dust. Static-charged particles are more likely to adhere to the inner wall of chamber 2 or the surface of the brush bristles during turbulent airflow, causing secondary pollution and dust accumulation. After neutralizing static electricity, particle migration is dominated by airflow, making their trajectory more predictable and controllable. This facilitates efficient collection of all suspended particles at the designated suction port, reducing particle deposition inside chamber 2 and extending equipment maintenance cycles. Furthermore, the continuous operation of the static eliminator 7 prevents discharge phenomena caused by static electricity accumulation, avoiding potential damage to precision electronic components and ensuring the safety and cleanliness of the silicon carbide wafer manufacturing environment. In the cleaning of conductor-grade PG barrels, electrostatic discharge (ESD) may cause electromigration of trace metal impurities remaining inside the PG barrel, or generate microscopic arc burns on the surface of the PG barrel. These damages may become sources of dislocations and defects in the subsequent silicon carbide crystal growth process. The introduction of the static eliminator 7 effectively eliminates this potential risk. From an overall perspective, the setting of the static eliminator 7 significantly improves the system's cleaning efficiency for micro- and nano-sized particles, reduces cleaning blind spots, and provides reliable assurance for the surface cleanliness and air permeability uniformity of the PG barrel. At the same time, during use, the ion output and ozone concentration of the static eliminator 7 should be checked regularly to ensure that it is in good working condition and will not have an adverse effect on the working environment and the health of the staff due to ozone accumulation.

[0032] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An automated device for cleaning PG barrels, characterized in that, Includes a base plate (1), on the top surface of the base plate (1) is a box body (2), one side of the box body (2) is open and a box door (21) is installed, a negative pressure air intake (22) is opened on the side of the box body (2), an air intake pipe (23) is fixed inside the negative pressure air intake (22), an installation seat (31) is provided inside the box body (2), the installation seat (31) is fixed on the base plate (1) by four assembly rods (33), a first through-hole (32) is opened on the installation seat (31), a rotating disk (34) is rotatably installed on the top surface of the installation seat (31), a second through-hole (35) is opened on the rotating disk (34), a driving component is provided inside the box body (2), the driving component is used to drive the rotating disk (34) to rotate, and a first cleaning component and a second cleaning component are provided inside the box body (2).

2. The automated device for cleaning PG barrels according to claim 1, characterized in that, The second port (35) is positioned opposite the first port (32), and the second port (35) and the first port (32) are coaxially positioned.

3. The automated device for cleaning PG barrels according to claim 1, characterized in that, The drive assembly includes a drive motor (41) and a gear ring (42). The drive motor (41) is mounted on the base plate (1), and the gear ring (42) is fixedly sleeved on the rotating disk (34). The output shaft of the drive motor (41) is fixed with a gear (43), and the gear (43) meshes with the gear ring (42).

4. The automated device for cleaning PG barrels according to claim 1, characterized in that, The top surface of the rotating disk (34) is provided with several annular grooves, each annular groove having a different size, and the several annular grooves are arranged coaxially with the rotating disk (34).

5. The automated device for cleaning PG barrels according to claim 1, characterized in that, The first cleaning component includes a first bracket (51) and a pole (54). Both the first bracket (51) and the pole (54) are fixed on the base plate (1). A fixing seat (52) is fixed on the side of the first bracket (51). An outer brush bristle (53) is provided on the fixing seat (52). The pole (54) passes through the first opening (32). An installation rod (55) is fixed at the top of the pole (54). An inner brush bristle (56) is arranged on the outer surface of the installation rod (55).

6. An automated device for cleaning PG barrels according to claim 5, characterized in that, The upright (54), the mounting rod (55), and the rotating disk (34) are arranged coaxially.

7. An automated device for cleaning PG barrels according to claim 5, characterized in that, The second cleaning assembly includes a second bracket (61), a cavity (63), a plurality of air jet holes (64), and a pipe connector (65). The second bracket (61) is fixed on the base plate (1), and an air jet pipe (62) is fixed on the side of the second bracket (61). The cavity (63) is opened inside the mounting rod (55), and the plurality of air jet holes (64) are all opened on the outer surface of the mounting rod (55). Each air jet hole (64) communicates with the interior of the cavity (63). The pipe connector (65) is arranged on the mounting rod. The top of (55) and the pipe joint (65) are connected to the cavity (63). The second cleaning assembly also includes a gas distributor (66), which is fixed on the base plate (1). A first gas supply pipe (67) and a second gas supply pipe (68) are connected to the gas distributor (66). The end of the first gas supply pipe (67) away from the gas distributor (66) is connected to the jet pipe (62), and the end of the second gas supply pipe (68) away from the gas distributor (66) is connected to the pipe joint (65).

8. An automated device for cleaning PG barrels according to claim 7, characterized in that, A plurality of the jet holes (64) are arranged in a circumferential array around the axis of the mounting rod (55), and each of the jet holes (64) is arranged in a horizontal direction.

9. An automated device for cleaning PG barrels according to any one of claims 1-8, characterized in that, An electrostatic eliminator (7) is installed on the base plate (1).

Images