Quartz pin production process and bonding and welding device thereof

Abstract

The present application belongs to the technical field of quartz products, and particularly relates to a quartz pin production process and a bonding and welding device thereof. The quartz pin production process comprises the following steps: a component processing procedure: quartz pins are split into pin shafts and pin plates which are processed into predetermined sizes respectively; a melting combination procedure: a bonding and welding position of the pin shaft is heated to a melting state, then the melting end of the pin shaft is in extrusion contact with the bonding and welding position of the pin plate, and after cooling, an integrated quartz pin product is formed. The present application enables each component to be processed by using a bar material closest to the product size, greatly reduces the grinding removal amount, and significantly improves the material utilization rate of the quartz bar material. At the same time, due to the small processing allowance and small grinding amount of each component, the single-piece processing time is greatly shortened, the processing efficiency is significantly improved, the labor cost and equipment loss are effectively reduced, and low-cost and high-efficiency batch production is realized.

Description

Technical Field

[0001] This invention belongs to the field of quartz product technology, and particularly relates to a quartz pin manufacturing process and its bonding and welding device. Background Technology

[0002] Quartz pins are key quartz components widely used in semiconductor equipment. Their overall shape is T-shaped, consisting of a circular plate and a cylindrical section. In semiconductor manufacturing, quartz pins are commonly used for wafer carrying, transporting, and positioning, with stringent requirements for dimensional accuracy, surface quality, and metal impurity content. With the rapid development of the semiconductor industry, market demand for quartz pins is increasing daily, placing higher demands on their production costs and delivery cycles.

[0003] Currently, the traditional processing method for quartz pins is as follows: First, in the blanking process, the blank of the required length is cut from the quartz round bar blank using a cutting method; then, in the machining process, the blank is ground using a metal grinding head to gradually process the dimensions of each part of the product to meet the requirements of the drawing; finally, in the cleaning process, the product is cleaned with acid to remove impurities that have been adhering to the surface of the product during the processing, ensuring that there are no metal impurities remaining on the surface of the product.

[0004] However, the aforementioned traditional quartz dowel processing methods have significant shortcomings. First, because quartz dowels have a "T"-shaped structure, one-piece processing requires cutting the circular portion from a large-diameter quartz rod, while the cylindrical portion can be formed using only a smaller-diameter rod. This structural characteristic leads to a large amount of raw material being removed during processing, resulting in extremely low raw material utilization, significant waste, and high costs. Second, quartz is a hard and brittle non-metallic material with high hardness but poor toughness. When using metal grinding heads for grinding, the cutting resistance is high, and the grinding efficiency is low. Processing a single product from raw material to finished product takes a very long time, and the grinding head wears out significantly, further increasing processing costs. These defects make it difficult for traditional processing methods to meet the demands of mass production of quartz dowels, restricting the product's capacity expansion and cost control. Summary of the Invention

[0005] The purpose of this invention is to address the aforementioned technical problems by providing a quartz pin manufacturing process and its bonding and welding device. This process allows each component to be processed using bar stock closest to the finished product size, significantly reducing grinding material removal and greatly improving the material utilization rate of the quartz bar stock. Simultaneously, due to the small machining allowance and minimal grinding amount for each component, the processing time per piece is significantly shortened, processing efficiency is significantly improved, effectively reducing labor costs and equipment wear, and achieving low-cost, high-efficiency mass production.

[0006] In view of this, the present invention provides a quartz pin manufacturing process, comprising the following steps: Component processing steps: The quartz pin is disassembled into two independent parts, the pin shaft and the pin plate, and each part is processed to the predetermined size; Melting and assembly process: The bonding and welding parts of the pin shaft are heated to a molten state, and then the molten end of the pin shaft is pressed into contact with the bonding and welding parts of the pin plate. After cooling, an integral quartz pin product is formed.

[0007] In this technical solution, the traditional one-piece quartz pin is separated into two independent components: the pin shaft and the pin plate. This allows the pin shaft to be machined from smaller diameter quartz rods, while the pin plate can be machined from larger diameter quartz rods. Both are formed separately and then bonded together. This "separate machining + bonding" process route allows each component to be machined from rods closest to the finished product size, significantly reducing grinding material removal and greatly improving the material utilization rate of the quartz rods. Simultaneously, due to the small machining allowance and minimal grinding of each component, the processing time per piece is significantly shortened, processing efficiency is significantly improved, effectively reducing labor costs and equipment wear, and achieving low-cost, high-efficiency mass production.

[0008] Furthermore, the fusion assembly process is completed on the bonding and welding device, and the specific steps are as follows: The processed pin shaft is clamped on the bonding and welding device, and the pin plate is positioned in the bonding and welding device; The welded portion of the pin shaft is heated to a molten state; The pin shaft is driven to move in the direction of the pin plate, so that the molten end of the pin shaft is pressed into contact with the welded part of the pin plate, and after cooling, an integral quartz pin product is formed.

[0009] In this technical solution, the use of a dedicated bonding and welding device can improve precision and increase production efficiency.

[0010] Furthermore, the machining of the pin shaft includes the following steps: A quartz rod with a diameter of D1 is obtained; the quartz rod is machined to a total length of L1, and a spherical protrusion with a height of 0.5mm is machined on the end face; Clean the processed pin shaft.

[0011] In this technical solution, the spherical protrusion on the end face of the pin shaft can effectively expel the gas between the two mating surfaces when it comes into contact with and is squeezed against the plane of the pin plate during the subsequent bonding process of the spherical bonding area. This avoids the problem of air bubbles and gas lines that are easy to be generated at the welding area during plane-to-plane extrusion bonding, making it easier for the two parts to fuse into one and ensuring the welding strength.

[0012] Furthermore, the processing of the pin plate includes the following steps: A quartz rod with a diameter of D2 is obtained; the quartz rod is machined to a total length of L2, and a positioning groove matching the diameter of the end of the pin shaft is machined on the bonding end face. The diameter of the positioning groove is D1+0.2mm and the groove depth is 0.2mm. Clean the processed pin plate.

[0013] In this technical solution, the positioning groove on the welding end face of the pin plate can play a visual auxiliary positioning role during the extrusion welding process, making it easier for the operator to accurately align the pin shaft with the pin plate; at the same time, the groove structure can provide a space for the molten quartz material during the extrusion process, avoiding overflow and ensuring the appearance quality of the product.

[0014] Furthermore, the present invention also provides a bonding and welding apparatus for the above-mentioned quartz pin manufacturing process, comprising: body; The screw handle is movably mounted on the upper part of the machine body and can reciprocate vertically relative to the machine body; A graphite sleeve is disposed inside the machine body and is used to clamp and fix the pin shaft; Nuts are fitted onto the outside of the graphite sleeve and are used to lock or loosen the graphite sleeve. A positioning plate is fixedly installed inside the machine body and located below the graphite jacket for positioning and placing the pin plate; One end of the screw handle is connected to the graphite sleeve. By operating the screw handle, the graphite sleeve and the pin shaft are moved downward, so that the pin shaft is pressed into contact with the pin plate.

[0015] In this technical solution, the bonding and welding device achieves stable clamping of the pin shaft through a graphite jacket, precise positioning of the pin plate through a positioning plate, and precise control of the pin shaft's downward stroke through a screw handle. The overall structure is simple and compact, easy to operate, and offers high positioning accuracy, ensuring consistent bonding and welding quality and making it suitable for mass production. Furthermore, the graphite jacket and positioning plate, which come into direct contact with the product, are made of high-purity graphite material, preventing metal impurity contamination of the quartz product and meeting the cleanliness requirements of semiconductor equipment for core components.

[0016] Furthermore, the screw handle includes: A disc handle is located at the top of the screw handle for the operator to hold and rotate. A screw, which is threadedly connected to the machine body and fixedly connected to the disc handle; A limiting plate is fixedly installed at the lower end of the screw. The limiting plate moves up and down with the screw. When the limiting plate contacts the machine body, it achieves downward limiting.

[0017] In this technical solution, the disc handle is easy for the operator to grip and apply force, the screw and the machine body threaded together can achieve precise feed control, and the contact limit between the limit plate and the machine body can ensure that the stroke position of the pin shaft is consistent each time it is pressed down, thereby ensuring that the bonding and welding quality of each product in mass production is stable and controllable.

[0018] Furthermore, the graphite jacket is made entirely of high-purity graphite material, and the part of the graphite jacket used to clamp the pin shaft has four axially extending shrinkage grooves along the circumference. The four shrinkage grooves make the clamping part of the graphite jacket form a radially expandable and contractile clamping structure.

[0019] In this technical solution, four shrinkage grooves divide the clamping part of the graphite jacket into four radially opening and closing clamping segments. When the nut is tightened, the clamping segments radially shrink to clamp the pin shaft. When the nut is loosened, the clamping segments radially open to release the pin shaft. The clamping and unloading operations are convenient and reliable, and the clamping force is uniform and stable, which will not cause local stress damage to the quartz product.

[0020] Furthermore, the positioning plate is made entirely of high-purity graphite material, and the positioning plate has a positioning groove for placing the pin plate. The positioning plate also has a finger clearance structure on at least one side of the positioning groove.

[0021] In this technical solution, the finger-avoiding structure provides the operator with hand space to pick up and put down the pin plate, making the placement and removal of the pin plate more convenient and quick, and further improving the operational efficiency of mass production.

[0022] Furthermore, the inner wall of the nut is connected to the outer wall of the graphite jacket by a threaded connection, and the outer cylindrical surface of the nut is provided with a knurled structure.

[0023] In this technical solution, the knurled structure on the outer cylindrical surface of the nut increases the friction between the operator's hand and the nut when rotating it, making it easier to apply force and making the locking and unlocking actions easier and more reliable.

[0024] Furthermore, the machine body is integrally machined from stainless steel, and a guide channel extending vertically is provided inside the machine body, with the graphite jacket slidably disposed within the guide channel.

[0025] In this technical solution, the integral machining of the fuselage ensures the overall structural rigidity and dimensional accuracy of each mating part, while the guide channel provides precise guidance for the up-and-down sliding of the graphite jacket.

[0026] Furthermore, the positioning plate is detachably fixed to the inside of the machine body by bolts.

[0027] Furthermore, the present invention also provides a method for bonding quartz pins using the above-mentioned bonding device, comprising the following steps: Insert the finished pin shaft into the graphite sleeve, and tighten the nut to lock the graphite sleeve so that the graphite sleeve clamps and fixes the pin shaft. Place the finished pin plate into the positioning groove of the positioning plate; Turn on the welding torch and heat the bonding and welding parts of the pin shaft to a molten state with the flame; The screw handle moves downward, causing the graphite jacket and the pin shaft to move downward until the limiting plate of the screw handle contacts the machine body to complete the limiting, so that the molten end of the pin shaft is pressed and bonded to the welding part of the pin plate. After cooling, loosen the nut, operate the screw handle to move upward, and remove the finished one-piece quartz pin that has been bonded and welded.

[0028] In this technical solution, the entire bonding and welding operation process is clear and concise, with each step closely connected. The processing cycle for a single product is short, making it suitable for continuous mass production. Precise control of the bonding and welding stroke is achieved through the cooperation of the limiting plate and the machine body, ensuring the consistency of product dimensions and the stability of bonding and welding quality.

[0029] Furthermore, the welding torch is a handheld oxyhydrogen welding torch, and the flame is an oxyhydrogen flame.

[0030] In this technical solution, the hydrogen-oxygen flame has the advantages of high temperature and no pollution, high heating efficiency and does not introduce impurities into the high-purity quartz material, thus meeting the cleanliness requirements of quartz pins for semiconductors.

[0031] The beneficial effects of this invention are: 1. This invention separates the integrated quartz pin into two independent components, the pin shaft and the pin plate, for separate processing. This allows each component to use bar stock closest to the finished product size, significantly reducing grinding allowance and material removal. The utilization rate of quartz bar stock is several times higher than that of the traditional integrated processing method, significantly reducing raw material costs. The process route of separate processing combined with bonding and welding results in small processing allowances and less grinding for each component, greatly shortening the processing time per piece and significantly improving processing efficiency. Combined with the bonding and welding device of this invention, it can realize streamlined mass production, effectively reducing labor costs and equipment wear and tear.

[0032] 2. In the bonding and welding device of the present invention, the clamping and limiting components that come into direct contact with the quartz product are made of high-purity graphite material, which will not cause metal impurity contamination to the quartz product and ensure that the product meets the cleanliness requirements of semiconductor core components. At the same time, graphite material has good high temperature resistance and can withstand heat radiation and heat conduction during the bonding and welding process.

[0033] 3. The bonding and welding device of the present invention has a simple structure and is easy to operate. The threaded feed of the screw handle realizes precise control of the pin shaft pressing stroke. With the contact limit between the limit plate and the machine body, it ensures that the bonding and welding position and the degree of extrusion of each product are consistent in mass production, and the product quality is stable.

[0034] 4. The present invention provides a spherical protrusion on the end face of the pin shaft, which effectively avoids the problems of air bubbles and air lines that are easy to generate during plane-to-plane bonding welding, thus improving the welding quality; and provides a positioning groove on the end face of the pin plate, which not only realizes visual-assisted positioning, but also avoids extrusion overflow, further ensuring the appearance quality of the product. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of a quartz pin; Figure 2 This is an isometric view of the quartz pin bonding device of the present invention.

[0036] Figure 3 It is an isometric view of the welding device after the pin shaft and pin plate are installed.

[0037] Figure 4 This is a cross-sectional view of the quartz pin bonding device of the present invention.

[0038] Figure 5 This is a schematic diagram of the pin shaft of the present invention.

[0039] Figure 6 This is a schematic diagram of the pin plate of the present invention.

[0040] Figure 7 This is a schematic diagram of the graphite jacket structure of the present invention.

[0041] The markings in the diagram are as follows: 1. Screw handle; 2. Machine body; 3. Graphite jacket; 4. Nut; 5. Positioning plate; 6. Bolt; 7. Pin plate; 8. Pin shaft; 9. Positioning groove; 10. Shrinkage groove; 11. Disc handle; 12. Limiting plate; 13. Screw; 51. Finger clearance structure; 81. Spherical bonding welded part. Detailed Implementation

[0042] The technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0043] In the description of this application, it should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. For ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0044] It should be noted that the terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and are not limited in number; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0045] It should be noted that in the description of this application, the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0046] It should be noted that, in this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0047] Example 1 like Figure 1-7 As shown, a quartz pin manufacturing process includes the following steps: Component processing steps: The quartz pin is disassembled into two independent components, the pin shaft 8 and the pin plate 7, and each component is processed to the predetermined dimensions. Melting and assembly process: The bonding and welding parts of the pin shaft 8 are heated to a molten state, and then the molten end of the pin shaft 8 is pressed into contact with the bonding and welding parts of the pin plate 7. After cooling, an integral quartz pin product is formed.

[0048] By separating the traditional one-piece quartz pin into two independent components, the pin shaft 8 and the pin plate 7, the pin shaft 8 can be machined from quartz rods with a smaller diameter, while the pin plate 7 can be machined from quartz rods with a larger diameter. The two components are then formed separately and joined together by welding. This "separate machining + welding" process allows each component to be machined from rods closest to the finished product size, significantly reducing grinding material removal and greatly improving the material utilization rate of the quartz rods. Simultaneously, due to the small machining allowance and minimal grinding of each component, the processing time per piece is significantly shortened, processing efficiency is significantly improved, effectively reducing labor costs and equipment wear, and achieving low-cost, high-efficiency mass production.

[0049] The fusion assembly process is completed on the bonding and welding device, and the specific steps are as follows: The processed pin shaft 8 is clamped on the bonding and welding device, and the pin plate 7 is positioned in the bonding and welding device; The welded portion of the pin shaft 8 is heated to a molten state; The pin shaft 8 is driven to move towards the pin plate 7, so that the molten end of the pin shaft 8 is pressed into contact with the welded part of the pin plate 7, and after cooling, an integral quartz pin product is formed.

[0050] Specialized bonding and welding equipment can improve precision and increase production efficiency.

[0051] The machining of the pin shaft 8 includes the following steps: A quartz rod with a diameter of D1 is obtained; the quartz rod is machined to a total length of L1, and a spherical protrusion with a height of 0.5mm is machined on the end face; Clean the processed pin shaft 8.

[0052] The spherical protrusion on the end face of the pin shaft 8 can effectively expel gas between the two surfaces when it comes into contact with and is pressed against the plane of the pin plate 7 during the subsequent bonding process of the spherical bonding part 81. This avoids the problem of air bubbles and gas lines that are easy to be generated at the welding part during plane-to-plane extrusion bonding, making it easier for the two parts to fuse into one and ensuring the welding strength.

[0053] The processing of the pin plate 7 includes the following steps: A quartz rod with a diameter of D2 is obtained; the quartz rod is machined to a total length of L2, and a positioning groove matching the diameter of the end of the pin shaft 8 is machined on the bonding end face. The diameter of the positioning groove is D1+0.2mm and the groove depth is 0.2mm. Clean the processed pin plate 7.

[0054] The positioning groove on the welding end face of the pin plate 7 can play a visual auxiliary positioning role during the extrusion welding process, making it easy for the operator to accurately align the pin shaft 8 with the pin plate 7; at the same time, the groove structure can provide a space for the molten quartz material during the extrusion process, avoiding overflow and ensuring the appearance quality of the product.

[0055] Example 2 like Figure 2-7 As shown, the present invention also provides a bonding and welding apparatus for the above-mentioned quartz pin manufacturing process, comprising: Fuselage 2; The screw handle 1 is movably disposed on the upper part of the machine body 2 and can reciprocate relative to the machine body 2 in the vertical direction; Graphite sleeve 3 is disposed inside the body 2 and is used to clamp and fix the pin shaft 8; Nut 4 is fitted onto the outside of the graphite sleeve 3 and is used to lock or loosen the graphite sleeve 3; Positioning plate 5 is fixedly installed inside the body 2 and located below the graphite sleeve 3, and is used to position and place pin plate 7; One end of the screw handle 1 is connected to the graphite sleeve 3. By operating the screw handle 1, the graphite sleeve 3 and the pin shaft 8 are moved downward, so that the pin shaft 8 is pressed into contact with the pin plate 7.

[0056] The bonding and welding device uses a graphite sleeve 3 to stably clamp the pin shaft 8, a positioning plate 5 to precisely position the pin plate 7, and a screw handle 1 to precisely control the downward stroke of the pin shaft 8. The overall structure is simple and compact, easy to operate, and offers high positioning accuracy, ensuring consistent bonding and welding quality and making it suitable for mass production. Furthermore, the graphite sleeve 3 and positioning plate 5, which come into direct contact with the product, are made of high-purity graphite, preventing metal impurity contamination of the quartz product and meeting the cleanliness requirements of semiconductor equipment for core components.

[0057] The screw handle 1 includes: A disc handle 11 is located at the top of the screw handle 1 for the operator to hold and rotate. Screw 13, which is threadedly connected to the machine body 2 and fixedly connected to the disc handle 11; The limiting plate 12 is fixedly disposed at the lower end of the screw 13. The limiting plate 12 moves up and down with the screw 13. When the limiting plate 12 contacts the body 2, it achieves downward limiting.

[0058] The disc handle 11 is easy for the operator to grip and apply force. The screw 13 and the machine body 2 are threaded together to achieve precise feed control. The contact limit plate 12 and the machine body 2 can ensure that the stroke position of the pin shaft 8 is consistent each time it is pressed down, thereby ensuring that the welding quality of each product in mass production is stable and controllable.

[0059] The graphite jacket 3 is made of high-purity graphite material. The part of the graphite jacket 3 used to clamp the pin shaft 8 has four axially extending shrinkage grooves 10 along the circumference. The four shrinkage grooves 10 make the clamping part of the graphite jacket 3 form a radially expandable and contractile clamping structure.

[0060] Four shrinkage grooves 10 divide the clamping part of the graphite jacket 3 into four radially opening and closing clamping segments. When the nut 4 is tightened, the clamping segments radially shrink to clamp the pin shaft 8. When the nut 4 is loosened, the clamping segments radially open to release the pin shaft 8. The clamping and unloading operations are convenient and reliable, and the clamping force is uniform and stable, which will not cause local stress damage to the quartz product.

[0061] The positioning plate 5 is made of high-purity graphite material. The positioning plate 5 has a positioning groove 9 for placing the pin plate 7. The positioning plate 5 also has a finger clearance structure 51 on at least one side of the positioning groove 9.

[0062] The finger-avoiding structure 51 provides hand operating space for the operator to pick up and put down the pin plate 7, making the placement and removal of the pin plate 7 more convenient and quick, and further improving the operation efficiency of mass production.

[0063] The inner wall of the nut 4 is connected to the outer wall of the graphite jacket 3 by a threaded connection, and the outer cylindrical surface of the nut 4 is provided with a knurled structure. The knurled structure on the outer cylindrical surface of the nut 4 can increase the friction between the operator's hand and the nut 4 when rotating the nut 4, making it easier to apply force and making the locking and unlocking actions easier and more reliable.

[0064] The machine body 2 is integrally machined from stainless steel. A guide channel extending vertically is provided inside the machine body 2, and the graphite jacket 3 is slidably disposed within the guide channel. The integral machining of the machine body 2 ensures the overall structural rigidity and dimensional accuracy of all mating parts. The guide channel provides precise guidance for the vertical sliding of the graphite jacket 3, and the operating window allows the operator to easily observe and operate the heating process from the side.

[0065] The positioning plate 5 is detachably fixed to the inside of the body 2 by bolts 6.

[0066] Example 3 like Figure 2-7 As shown, the present invention also provides a method for bonding quartz pins using the above-mentioned bonding and welding device, comprising the following steps: Insert the finished pin shaft 8 into the graphite sleeve 3, and tighten the nut 4 to lock the graphite sleeve 3, so that the graphite sleeve 3 clamps and fixes the pin shaft 8. Place the finished pin plate 7 into the positioning groove 9 of the positioning plate 5; Turn on the welding torch and heat the welding area of ​​the pin shaft 8 until it melts; The screw handle 1 is moved downward, and the screw handle 1 drives the graphite jacket 3 and the pin shaft 8 to move downward until the limiting plate 12 of the screw handle 1 contacts the machine body 2 to complete the limiting, so that the molten end of the pin shaft 8 is pressed and bonded to the welding part of the pin plate 7. After cooling, loosen the nut 4, operate the screw handle 1 to move upward, and remove the finished one-piece quartz pin that has been welded.

[0067] The entire bonding and welding process is clear and concise, with each step closely linked. The processing cycle for a single product is short, making it suitable for continuous mass production. Precise control of the bonding and welding stroke is achieved through the cooperation of the limiting plate 12 and the machine body 2, ensuring the consistency of product dimensions and the stability of bonding and welding quality.

[0068] The welding torch is a handheld oxyhydrogen welding torch, and the flame is an oxyhydrogen flame. Oxyhydrogen flames have the advantages of high temperature and no pollution, high heating efficiency, and do not introduce impurities into high-purity quartz materials, thus meeting the cleanliness requirements for quartz pins used in semiconductors.

[0069] The embodiments of this application have been described above with reference to the accompanying drawings. Unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other. This application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A manufacturing process for quartz pins, characterized in that, Includes the following steps: Component processing steps: The quartz pin is split into two independent components, the pin shaft (8) and the pin plate (7), and processed to the predetermined dimensions respectively; Melting and assembly process: The bonding and welding parts of the pin shaft (8) are heated to a molten state, and then the molten end of the pin shaft (8) is pressed into contact with the bonding and welding parts of the pin plate (7). After cooling, an integral quartz pin product is formed.

2. The quartz pin manufacturing process according to claim 1, characterized in that, The fusion assembly process is completed on the bonding and welding device, and the specific steps are as follows: The processed pin shaft (8) is clamped on the bonding and welding device, and the pin plate (7) is positioned in the bonding and welding device; The welded portion of the pin shaft (8) is heated to a molten state; Drive the pin shaft (8) to move towards the pin plate (7), so that the molten end of the pin shaft (8) is pressed into contact with the welded part of the pin plate (7), and after cooling, an integral quartz pin product is formed.

3. The quartz pin manufacturing process according to claim 2, characterized in that, The machining of the pin shaft (8) includes the following steps: A quartz rod with a diameter of D1 is obtained; the quartz rod is machined to a total length of L1, and a spherical protrusion with a height of 0.5mm is machined on the end face; Clean the processed pin shaft (8).

4. The quartz pin manufacturing process according to claim 3, characterized in that, The processing of the pin plate (7) includes the following steps: A quartz rod with a diameter of D2 is obtained; the quartz rod is machined to a total length of L2, and a positioning groove matching the diameter of the end of the pin shaft (8) is machined on the bonding end face. The diameter of the positioning groove is D1+0.2mm and the groove depth is 0.2mm. Clean the processed pin plate (7).

5. A quartz pin bonding and welding device, characterized in that, The quartz pin manufacturing process according to claim 1 includes: fuselage (2); The screw handle (1) is movably disposed on the upper part of the machine body (2) and can reciprocate in the vertical direction relative to the machine body (2); A graphite sleeve (3) is disposed inside the body (2) and is used to clamp and fix the pin shaft (8). Nut (4) is fitted onto the outside of the graphite sleeve (3) and is used to lock or loosen the graphite sleeve (3). The positioning plate (5) is fixedly installed inside the body (2) and located below the graphite jacket (3) for positioning and placing the pin plate (7). One end of the screw handle (1) is connected to the graphite sleeve (3). By operating the screw handle (1), the graphite sleeve (3) and the pin shaft (8) are moved downward, so that the pin shaft (8) and the pin plate (7) are pressed into contact.

6. The quartz pin bonding and welding device according to claim 5, characterized in that, The screw handle (1) includes: A disc handle (11) is provided on the top of the screw handle (1) for the operator to hold and rotate. The screw (13) is threadedly connected to the body (2) and fixedly connected to the disc handle (11); A limiting plate (12) is fixedly installed at the lower end of the screw (13). The limiting plate (12) moves up and down with the screw (13). When the limiting plate (12) contacts the body (2), it achieves downward limiting.

7. A quartz pin bonding and welding device according to claim 6, characterized in that, The graphite sleeve (3) is made of high-purity graphite material. The part of the graphite sleeve (3) used to hold the pin shaft (8) has four axially extending shrinkage grooves (10) in the circumferential direction. The four shrinkage grooves (10) make the clamping part of the graphite sleeve (3) form a radially expandable and contractile clamping structure.

8. A quartz pin bonding and welding device according to claim 7, characterized in that, The positioning plate (5) is made of high-purity graphite material. The positioning plate (5) has a positioning groove (9) for placing the pin plate (7). The positioning plate (5) also has a finger clearance structure (51) on at least one side of the positioning groove (9).

9. A quartz pin bonding and welding device according to claim 8, characterized in that, The inner wall of the nut (4) is connected to the outer wall of the graphite jacket (3) by a threaded connection, and the outer cylindrical surface of the nut (4) is provided with a knurled structure.

10. A method for bonding and welding quartz pins, characterized in that, The bonding apparatus according to any one of claims 5-9 comprises the following steps: Insert the finished pin shaft (8) into the graphite sleeve (3), and tighten the nut (4) to lock the graphite sleeve (3) so that the graphite sleeve (3) clamps and fixes the pin shaft (8). Place the finished pin plate (7) into the positioning groove (9) of the positioning plate (5); Turn on the welding torch and heat the flame to the welding part of the pin shaft (8) until it melts; The screw handle (1) is moved downwards, and the screw handle (1) drives the graphite jacket (3) and the pin shaft (8) to move downwards until the limiting plate (12) of the screw handle (1) contacts the machine body (2) to complete the limiting, so that the molten end of the pin shaft (8) is pressed and bonded to the welding part of the pin plate (7). After cooling, loosen the nut (4), operate the screw handle (1) to move upward, and take out the finished one-piece quartz pin that has been welded.

Images