Linear evaporation source and evaporation apparatus

Abstract

The application provides a linear evaporation source and an evaporation equipment. The linear evaporation source comprises a crucible, a containing cavity and a spray hole in communication with the containing cavity; a nozzle arranged in the containing cavity and extending out of the spray hole; a first driving device arranged on the crucible, the first driving device comprising a rotating shaft in transmission connection with the nozzle to drive the nozzle to rotate in the spray hole; and a control device connected with the first driving device to control the first driving device to drive the nozzle to rotate. The linear evaporation source is used to achieve the effects of flexibly adjusting an evaporation range and improving film uniformity.

Description

Technical Field

[0001] This application relates to the field of vapor deposition technology, and more particularly to a linear evaporation source and vapor deposition equipment. Background Technology

[0002] With the continuous development of science and technology and society, energy issues have become increasingly prominent. Solar energy, as a new type of clean energy that is inexhaustible, especially perovskite solar cells, has attracted much attention due to its advantages such as high light absorption coefficient, long carrier diffusion length, adjustable band gap, high photoelectric conversion efficiency, and low cost.

[0003] The conversion efficiency (PCE) of perovskite solar cells has increased from 3.8% to over 25%, making them one of the most promising solar cells currently available. The conversion efficiency of perovskite solar cells depends on the quality of the perovskite film, which is typically formed by vapor deposition. This involves heating and evaporating or sublimating the material, then allowing it to condense or deposit on a low-temperature surface to form a coating.

[0004] However, during the vapor deposition process, the vapor deposition area of ​​the nozzle is fixed, resulting in poor uniformity of the film thickness. Summary of the Invention

[0005] This application provides a linear evaporation source and evaporation equipment to achieve the effect of flexibly adjusting the evaporation area and improving the uniformity of film formation.

[0006] In a first aspect, embodiments of this application provide a linear evaporation source, including:

[0007] A crucible having a receiving cavity and an ejection port communicating with the receiving cavity;

[0008] A nozzle is disposed within the receiving cavity and extends outward from the ejection orifice;

[0009] A first driving device is disposed on the crucible. The first driving device includes a rotating shaft, which is throttlely connected to the nozzle to drive the nozzle to rotate within the ejection orifice.

[0010] A control device is connected to the first drive device to control the first drive device to drive the nozzle to rotate.

[0011] In some possible implementations, the nozzle includes:

[0012] The connecting part has a mounting cavity at its first end;

[0013] A head is disposed on the connecting part, the head extends out of the ejection hole, and communicates with the receiving cavity through the connecting part;

[0014] The mounting cavity and the rotating shaft have a limiting protrusion on one of their opposing surfaces and a limiting groove on the other, with the limiting protrusion and the limiting groove being compatible with each other.

[0015] In some possible implementations, the inner wall of the mounting cavity is provided with the limiting protrusion, and the limiting protrusion extends to the first end of the connecting portion;

[0016] The outer circumferential surface of the rotating shaft is provided with the limiting groove, which extends to one end of the rotating shaft adjacent to the connecting part.

[0017] In some possible implementations, the head is provided with a first through hole, which extends to and through the connecting portion.

[0018] In some possible implementations, the crucible is provided with a plurality of ejection holes, each ejection hole is provided with a corresponding nozzle, and each nozzle is connected to a first driving device.

[0019] In some possible implementations, the diameters of the first through holes of the plurality of nozzles are different.

[0020] In some possible implementations, the crucible includes:

[0021] The pot body has a first cavity and a first strip-shaped opening communicating with the first cavity;

[0022] A lid is attached to the pot body. The lid has the ejection hole and is equipped with the first driving device. The lid has a second cavity and a second strip opening that communicates with the second cavity. The second strip opening is opposite to and communicates with the first strip opening.

[0023] Wherein, along the direction close to the first strip opening, the circumferential dimension of the pot body near the first strip opening gradually decreases; and / or, along the direction close to the second strip opening, the circumferential dimension of the cover body near the second strip opening gradually decreases.

[0024] In some possible implementations, the linear evaporation source further includes:

[0025] An angle plate is placed over the crucible and protrudes from the nozzle. The angle plate has a limiting orifice located above the nozzle to limit the vapor deposition range of the nozzle.

[0026] The second driving device is connected to the angle plate to drive the angle plate to move relative to the crucible.

[0027] In some possible implementations, the angle plate includes a first plate and a second plate, which are respectively disposed on both sides of the crucible and extend along the length direction of the linear evaporation source;

[0028] The limiting opening is formed between the first plate and the second plate, and at least one of the first plate and the second plate is connected to the second driving device in a transmission manner.

[0029] Secondly, embodiments of this application provide a vapor deposition apparatus, including a linear evaporation source as described above.

[0030] The linear evaporation source and vapor deposition equipment provided in this application include a crucible, a nozzle, a first driving device, and a control device. The crucible has a receiving cavity and an ejection orifice communicating with the receiving cavity. The nozzle is disposed within the receiving cavity and extends outward from the ejection orifice. The first driving device is disposed on the crucible and includes a rotating shaft, which is kinetically connected to the nozzle to drive the nozzle to rotate within the ejection orifice. The control device is connected to the first driving device to control the first driving device to drive the nozzle to rotate. The nozzle is driven by the first driving device and controlled by the control device, and can rotate within the ejection orifice of the crucible, so that the ejection direction and ejection range of the vapor deposition material in the receiving cavity are different, flexibly adjusting the vapor deposition range of the nozzle and adjusting the uniformity of the overall film layer. Attached Figure Description

[0031] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0032] Figure 1 A three-dimensional view of the linear evaporation source provided in this application;

[0033] Figure 2 A side view of the linear evaporation source provided in this application;

[0034] Figure 3 Exploded views of the nozzle and the first drive device provided in this application;

[0035] Figure 4 Assembly diagram of the nozzle and the first drive device provided in this application;

[0036] Figure 5 Partial view of the nozzle and the first drive device provided in this application;

[0037] Figure 6 A schematic diagram illustrating the vapor deposition range of the nozzle provided in this application;

[0038] Figure 7 A simplified structural diagram of the crucible provided in this application;

[0039] Figure 8 Another simplified structural diagram of the crucible provided in this application;

[0040] Figure 9 Another schematic diagram of the vapor deposition range of the crucible provided in this application;

[0041] Figure 10 A schematic diagram of the angle plate provided for this application.

[0042] Explanation of reference numerals in the attached figures:

[0043] 10-Crucible;

[0044] 11-Pot body;

[0045] 12-Cap;

[0046] 13-Ejector hole;

[0047] 14 - Receiving cavity;

[0048] 20-nozzle;

[0049] 21-Head;

[0050] 22 - First through hole;

[0051] 23-Connecting part;

[0052] 24 - Mounting cavity;

[0053] 25 - Limiting protrusion;

[0054] 30 - First drive unit;

[0055] 31-Rotating shaft;

[0056] 32-Limiting groove;

[0057] 40-angle plate;

[0058] 41-First plate;

[0059] 42-Second plate;

[0060] 50 - Evaporation material;

[0061] 60 - Target substrate.

[0062] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0063] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0064] First, let me explain the terms used in this application:

[0065] Evaporation deposition: refers to a process in which the vapor of the deposition material is vaporized under vacuum conditions using a certain heating and evaporation method, and then the vapor of the deposition material is condensed on the surface of the target substrate to form a coating.

[0066] Evaporation equipment: refers to a device used to deposit thin films on the surface of a target substrate.

[0067] Linear evaporation source: refers to a device used to heat the vaporized material, causing it to vaporize and evaporate, and to distribute the evaporated material evenly along a linear path.

[0068] In the prior art, nozzles are often fixed on a crucible, so that the nozzle corresponds to a fixed evaporation range on the target substrate. To address this, the linear evaporation source provided in this application uses a first driving device to drive the nozzle to rotate within the ejection orifice, thereby changing the ejection direction and range of the evaporation material, flexibly adjusting the evaporation range of the nozzle, and adjusting the uniformity of the overall film layer.

[0069] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.

[0070] See Figures 1 to 10 This application provides a vapor deposition apparatus for forming a thin film on a target substrate 60. The thin film can be a perovskite film layer, made of perovskite material, such as an organic-inorganic halide perovskite material. The thin film can also be a film layer in an organic light-emitting diode (OLED), such as a light-emitting layer, made of an organic light-emitting material. The specific film layer formed is not limited in this application.

[0071] The vapor deposition equipment includes a linear evaporation source to improve the utilization rate of the vapor deposition material 50 and the uniformity of film formation, thereby increasing vapor deposition efficiency and production efficiency. Furthermore, the linear evaporation source forms the film in a high vacuum environment, meaning almost no other impurity particles vaporize along with the vapor deposition material 50, preventing impurities from affecting the coating effect and ensuring a high yield of the formed film.

[0072] Continue reading Figures 1 to 10 The linear evaporation source includes a crucible 10, a nozzle 20, a first driving device 30, and a control device. The crucible 10 has a receiving cavity 14 to hold the vaporized material 50, which is heated and vaporized within the receiving cavity 14. The crucible 10 also has an ejection hole 13 communicating with the receiving cavity 14, which is used to eject the vaporized vaporized material 50 to condense into a film on the surface of the target substrate 60.

[0073] In some possible implementations, there are multiple ejector holes 13, which are spaced apart. For example... Figure 1 As shown, multiple ejection holes 13 are arranged sequentially along the length of the crucible 10, forming a linear arrangement to create a linear evaporation source. The multiple ejection holes 13 can be equally spaced, and the length of the crucible 10 is as follows: Figure 1 The X direction is shown. For example, the crucible 10 can be rectangular, and the length direction of the crucible 10 is also the direction of its long side.

[0074] See Figure 1 and Figure 2 The crucible 10 includes a pot body 11 and a lid 12 arranged opposite to each other. The pot body 11 has a first cavity and a first strip opening communicating with the first cavity. The lid 12 is fastened to the pot body 11. The lid 12 has a jet hole 13 and a first driving device 30. The lid 12 has a second cavity and a second strip opening communicating with the second cavity. The second strip opening is opposite to and communicates with the first strip opening.

[0075] like Figure 1 and Figure 2 As shown, the pot body 11 and the lid 12 are fitted together, with the lid 12 mounted on and connected to the pot body 11. The lid 12 and pot body 11 are separate components, facilitating the installation of structures such as the nozzle 20. The pot body 11 and lid 12 are made of at least one of the following materials: aluminum, titanium, nickel-based alloy, 304 stainless steel, 316 stainless steel, quartz, and pyrolytic boron nitride. The materials of the pot body 11 and lid 12 can be the same or different. Using these materials avoids reaction with the vapor-deposited material 50, thus preventing the consumption of the vapor-deposited material 50 and the formation of impurities. Furthermore, the pot body 11 and lid 12 have good corrosion resistance, do not produce impurity particles, and are not prone to thermal deformation, thereby improving their service life.

[0076] The pot body 11 has a first cavity and a first strip-shaped opening. The bottom of the first cavity carries the vapor-deposited material 50, and the first strip-shaped opening is located at one end of the first cavity adjacent to the lid 12, for example, the upper end. The lid 12 includes a second cavity and a second strip-shaped opening. The top of the second cavity has a spray hole 13, and the second strip-shaped opening is located at one end of the second cavity adjacent to the pot body 11, for example, the lower end. The first strip-shaped opening and the second strip-shaped opening are adapted to each other, that is, their shapes and sizes match, so that the first strip-shaped opening and the second strip-shaped opening can be aligned well, and the first cavity and the second cavity are connected to form a receiving cavity 14.

[0077] By using the first and second strip openings, the exhaust area can be increased, making it easier for the gaseous vapor deposition material 50 to be ejected outwards. This reduces the internal pressure of the shell, thus alleviating the problem of excessive internal pressure causing the vapor deposition temperature to rise. This reduces the vapor deposition temperature, thereby reducing the decomposition of the vapor deposition material 50 and improving the film quality.

[0078] In some possible embodiments, the pot body 11 includes a bottom plate and a first side plate surrounding the bottom plate. One end of the first side plate is connected to the bottom plate, and the other end forms a first strip opening. The first side plate and the bottom plate together form a first cavity. The lid 12 includes a top plate and a second side plate surrounding the top plate. One end of the second side plate is connected to the top plate, and the other end forms a second strip opening. The second side plate and the top plate together form a second cavity. The top plate, for example, has a spray hole 13.

[0079] Along the direction close to the first strip opening, the circumferential dimension of the portion of the pot body 11 adjacent to the first strip opening gradually decreases; and / or, along the direction close to the second strip opening, the circumferential dimension of the portion of the lid body 12 adjacent to the second strip opening gradually decreases. Thus, a necked section (such as...) is formed along the arrangement direction of the pot body 11 and the lid body 12 (also the height direction of the crucible 10). Figure 7 and Figure 8 (As shown at point B in the middle) The necking section can be located in the pot body 11, the cover body 12, or both. The circumferential dimension of the necking section adjacent to the ejector hole 13 is smaller, while the circumferential dimension of the necking section farther from the ejector hole 13 is larger, and the circumferential dimension gradually transitions. This can improve the evaporation rate, thereby avoiding the need to increase the evaporation temperature, so as to obtain a matching evaporation rate at a lower evaporation temperature. It can also guide the air, making the gas output from the nozzle 20 more uniform.

[0080] In some possible examples, the circumferential dimension of the portion of the pot body 11 adjacent to the first strip opening gradually decreases along the direction close to the first strip opening. For example, the portion of the pot body 11 adjacent to the first strip opening is funnel-shaped, with the smaller end connected to the shell, for example, the shell is fitted onto the smaller end. In other possible examples, the circumferential dimension of the portion of the lid 12 adjacent to the second strip opening gradually decreases along the direction close to the second strip opening. For example, the portion of the lid 12 adjacent to the second strip opening is funnel-shaped, with the larger end connected to the pot body 11, for example, the larger end is fitted onto the pot body 11. In still other possible examples, the circumferential dimension of the portion of the pot body 11 adjacent to the first strip opening gradually decreases along the direction close to the first strip opening, and the circumferential dimension of the portion of the lid 12 adjacent to the second strip opening gradually decreases along the direction close to the second strip opening.

[0081] In some possible implementations, the first side plate of the pot body 11 includes a first segment and a second segment, which are connected sequentially along the direction away from the bottom plate of the pot body 11. The circumferential dimension of the second segment gradually decreases along the direction away from the bottom plate. The first side plate of the pot body 11 may also include a third segment, which is connected to the end of the second segment away from the first segment. The circumferential dimension of the third segment may be equal along the direction away from the second segment.

[0082] For example, the second segment includes a first plate, a second plate, a third plate, and a fourth plate. The first and second plates are arranged opposite to each other, and the third and fourth plates are arranged opposite to each other and connected to the first and second plates. The first and second plates can be arranged opposite to each other along the width direction of the pot body 11. The first plate 41 and the second plate can be flat plates that are inclined inwards, or the first plate 41 and the second plate 42 can be curved plates that protrude outwards. The third and fourth plates can be arranged parallel to each other, inclined, or curved.

[0083] In some possible implementations, the second side plate of the cover 12 includes a fourth segment and a fifth segment, which are connected sequentially along the direction away from the top plate of the cover 12. The circumferential dimension of the fifth segment gradually decreases along the direction away from the top plate. The second side plate of the cover 12 may also include a sixth segment, which is connected to the end of the fifth segment away from the fourth segment. The circumferential dimension of the sixth segment may be equal along the direction away from the fourth segment.

[0084] For example, the fifth segment includes a fifth plate, a sixth plate, a seventh plate, and an eighth plate. The fifth and sixth plates are arranged opposite to each other, and the seventh and eighth plates are arranged opposite to each other and connected to the fifth and sixth plates. The fifth and sixth plates can be arranged opposite to each other along the width direction of the pot body 11. The fifth and sixth plates can be flat and inclined inwards, or they can be curved plates and protrude outwards. The seventh and eighth plates can be arranged parallel, inclined, or curved.

[0085] Continue reading 1 to 1 Figure 10 The nozzle 20 is disposed within the receiving cavity 14 and extends outward from the ejection hole 13. For example, the nozzle 20 is disposed on the cover 12. The nozzle 20 includes a connecting portion 23 and a head 21. The first end of the connecting portion 23 is provided with a mounting cavity 24. The head 21 is disposed on the connecting portion 23, extends outward from the ejection hole 13, and communicates with the receiving cavity 14 through the connecting portion 23. The head 21 is fixedly connected to the connecting portion 23, extends outward from the ejection hole 13, and communicates with the receiving cavity 14 through the connecting portion 23 to eject the vapor-deposited material 50. The connecting portion 23 is connected to the first driving device 30 so that it is driven by the first driving device 30 to rotate the head 21 within the ejection hole 13.

[0086] Among them, such as Figures 3 to 5 As shown, the head 21 is disposed on the outer peripheral surface of the connecting portion 23. For example, the head 21 and the connecting portion 23 can be an integral structure, and the two can move synchronously. The head 21 and the connecting portion 23 can be cylindrical, and their axes intersect, for example, perpendicularly. For example, the head 21 is cylindrical or elliptical cylindrical, and the head 21 is provided with a first through hole 22, which penetrates two surfaces of the head 21 that are opposite each other along their axes. The first through hole 22 can also extend to the connecting portion 23, for example, penetrating the connecting portion 23, so as to enable communication between the receiving cavity 14 and the outside.

[0087] In some possible examples, the diameters of the first through holes 22 of the multiple nozzles 20 are different. In this way, the diameter of the first through holes 22 at different positions is adapted to the film thickness. By increasing the diameter of some of the first through holes 22, the film thickness at the corresponding position of the first through hole 22 can be increased to adapt to the different thicknesses of different film layers.

[0088] The angles of the first through holes 22 can be different; that is, the axis of the first through hole 22 can be parallel to or intersect the axis of the head 21 where it is located. The first through holes 22 at different angles are processed according to the needs of use. In this way, when all the nozzles 20 are at the same angle, that is, when the axes of the heads 21 of the nozzles 20 are parallel, at least some of the first through holes 22 have different orientations, which makes the spraying direction and spraying range of the vapor-deposited material 50 different, so as to flexibly adjust the vapor deposition range of the nozzles 20 and adjust the uniformity of the overall film layer.

[0089] Continue reading Figure 3 and Figure 4 The connecting part 23 can be cylindrical or elliptical. To facilitate the manufacturing, installation, and connection of the connecting part 23, the side of the connecting part 23 facing away from the head 21 forms a plane. A mounting cavity 24 is provided at the first end of the connecting part 23, and the second end of the connecting part 23 is axially opposite to the first end of the connecting part 23. The mounting cavity 24 can be a groove formed on the end face of the first end of the connecting part 23, or it can be a second through hole penetrating both the first and second ends of the connecting part 23. The mounting cavity 24 can communicate with or be spaced apart from the first through hole 22. The mounting cavity 24 is used to accommodate and connect the rotating shaft 31, so as to rotate synchronously with the rotating shaft 31 to achieve rotation in different directions as needed.

[0090] In some possible examples, one of the opposing surfaces of the mounting cavity 24 and the rotating shaft 31 is provided with a limiting protrusion 25, and the other with a limiting groove 32, the limiting protrusion 25 and the limiting groove 32 being adapted to each other. The limiting protrusion 25 is, for example, a rectangular block, and the limiting groove 32 is adapted to the shape and size of the limiting protrusion 25. In this way, the connecting part 23 and the first driving device 30 are fixedly connected by the mortise and tenon structure formed by the limiting protrusion 25 and the limiting groove 32, so that the nozzle 20 can rotate with the rotating shaft 31. The rotating shaft 31 can also further provide support for the nozzle 20, that is, the nozzle 20 can be directly fixed on the rotating shaft 31 without connecting to the cover 12.

[0091] For example, such as Figure 5 As shown, the inner wall of the mounting cavity 24 is provided with a limiting protrusion 25, which extends to the first end of the connecting portion 23; the outer peripheral surface of the rotating shaft 31 is provided with a limiting groove 32, which extends to one end of the rotating shaft 31 adjacent to the connecting portion 23. In this way, the limiting protrusion 25 and the limiting groove 32 extend to the end faces of the connecting portion 23 and the rotating shaft 31 respectively, so that the limiting protrusion 25 can be inserted into the limiting groove 32 axially, which facilitates the installation between the limiting protrusion 25 and the limiting groove 32.

[0092] In other examples, the end where the mounting cavity 24 and the rotating shaft 31 are connected can also be made into a matching irregular shape, such as a rectangular cross-section. In this way, the rotation shaft 31 can drive the nozzle 20 to rotate by matching the shapes of the rotating shaft 31 and the mounting cavity 24.

[0093] Continue reading Figures 1 to 10The first driving device 30 is mounted on the crucible 10, for example, and is fixedly connected to the cover 12. The first driving device 30 may be mounted on the side wall of the second cavity and extend out of the cover 12. The first driving device 30 is, for example, a micro motor, and the rotating shaft 31 of the first driving device 30 is connected to the nozzle 20 to drive the nozzle 20 to rotate within the ejection hole 13.

[0094] In some possible examples, the rotation shaft 31 of the first drive device 30 can be controllably rotated within the range of -45° to +45°, causing the nozzle 20 to rotate, thereby changing the spray direction of the vapor deposition material 50 in the nozzle 20 and the vapor deposition range of the nozzle 20. This allows for adjustment of the nozzle 20 angle as needed, improving the uniformity of film formation. The first drive device 30 is also connected to a control device located outside the crucible 10, which controls the first drive device 30, i.e., the first drive device 30 drives the nozzle 20 to rotate according to the electrical control signal from the control device.

[0095] In some possible examples, the crucible 10 is provided with multiple ejection holes 13, each ejection hole 13 corresponding to a nozzle 20, and each nozzle 20 is connected to a first driving device 30. Thus, the multiple first driving devices 30 and the multiple nozzles 20 are connected in a one-to-one correspondence, and each nozzle 20 is driven by a separate first driving device 30, thereby allowing each nozzle 20 to rotate independently. Figure 6 As shown, each nozzle 20 can rotate at different angles as needed, thereby improving film quality. Figure 1 As shown, multiple nozzles 20 are arranged sequentially along the length of crucible 10, and multiple first driving devices 30 are arranged sequentially along the length of crucible 10 and located on the same side of crucible 10.

[0096] In some possible implementations, a single control device is provided, with each first drive device 30 connected to the control device to achieve common control of multiple nozzles 20. In other possible implementations, multiple control devices are provided, with each first drive device 30 connected to a corresponding control device to achieve individual control of each nozzle 20.

[0097] See Figures 8 to 10 The linear evaporation source also includes an angle plate 40 and a second driving device. The angle plate 40 is mounted on the crucible 10 and protrudes from the nozzle 20. The angle plate 40 has a limiting orifice located above the nozzle 20 to limit the evaporation range of the nozzle 20. The second driving device is connected to the angle plate 40 to drive the angle plate 40 to move relative to the crucible 10. The evaporation material 50 is ejected through the limiting orifice. By adjusting the position of the angle plate 40 through the second driving device, thereby adjusting the position of the limiting orifice, the film formation position and area of ​​the evaporation material 50 can be adjusted.

[0098] Angle plate 40 is mounted on nozzle 20, with a limiting orifice above nozzle 20. Angle plate 40 can move relative to crucible 10 along the width direction of crucible 10, thus changing the film formation position by moving the limiting orifice along the width direction of crucible 10. Angle plate 40 can also move to both sides of crucible 10, thereby increasing or decreasing the size of the limiting orifice and changing the film formation area.

[0099] In some possible implementations, such as Figure 10 As shown, the angle plate 40 includes a first plate body 41 and a second plate body 42, which are respectively disposed on both sides of the crucible 10 and extend along the length direction of the linear evaporation source; a limiting opening is formed between the first plate body 41 and the second plate body 42, and at least one of the first plate body 41 and the second plate body 42 is connected to the second driving device for transmission.

[0100] like Figure 10 As shown, the extending directions of the first plate 41 and the second plate 42 can be consistent with the length direction of the linear evaporation source, which is also the length direction of the crucible 10. The first plate 41 and the second plate 42 are arranged opposite each other, for example, along the width direction of the linear evaporation source, and at least a portion of the first plate 41 and the second plate 42 are spaced apart to form a limiting opening.

[0101] In some possible examples, the first plate 41 and the second plate 42 are spaced apart and independent of each other, one of the first plate 41 and the second plate 42 is fixedly connected to the crucible 10, and the other of the first plate 41 and the second plate 42 is connected to the second driving device; or, both the first plate 41 and the second plate 42 are connected to the second driving device. In other possible examples, the first plate 41 and the second plate 42 are in contact and interconnected, and one or both of the first plate 41 and the second plate 42 are connected to the second driving device.

[0102] See Figure 8 Each nozzle 20 has its first through-hole 22 pointing vertically upwards, allowing the vapor-deposited material 50 to be sprayed upwards in a fan shape onto the target substrate 60. (See also...) Figure 9 By adjusting the angle plate 40, the fan-shaped shape of the vapor-deposited material 50 can be restricted and controlled.

[0103] The linear evaporation source provided in this embodiment includes a crucible 10, a nozzle 20, a first driving device 30, and a control device. The crucible 10 has a receiving cavity 14 and an ejection hole 13 communicating with the receiving cavity 14. The nozzle 20 is disposed in the receiving cavity 14 and extends out of the ejection hole 13. The first driving device 30 is disposed on the crucible 10 and includes a rotating shaft 31, which is tractively connected to the nozzle 20 to drive the nozzle 20 to rotate within the ejection hole 13. The control device is connected to the first driving device 30 to control the first driving device 30 to drive the nozzle 20 to rotate. The nozzle 20 is driven by the first driving device 30 and controlled by the control device, and can rotate within the ejection hole 13 of the crucible 10, so that the ejection direction and ejection range of the vapor deposition material 50 in the receiving cavity 14 are different, flexibly adjusting the vapor deposition range of the nozzle 20 and adjusting the uniformity of the overall film layer.

[0104] The embodiments or implementation methods described in this specification are presented in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. The terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with an embodiment or example that are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0105] Finally, it should be noted that other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein, and is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. A linear evaporation source, characterized in that, include: A crucible having a receiving cavity and an ejection port communicating with the receiving cavity; A nozzle is disposed within the receiving cavity and extends outward from the ejection orifice; A first driving device is disposed on the crucible. The first driving device includes a rotating shaft, which is throttlely connected to the nozzle to drive the nozzle to rotate within the ejection orifice. A control device is connected to the first drive device to control the first drive device to drive the nozzle to rotate.

2. The linear evaporation source according to claim 1, characterized in that, The nozzle includes: The connecting part has a mounting cavity at its first end; A head is disposed on the connecting part, the head extends out of the ejection hole, and communicates with the receiving cavity through the connecting part; The mounting cavity and the rotating shaft have a limiting protrusion on one of their opposing surfaces and a limiting groove on the other, with the limiting protrusion and the limiting groove being compatible with each other.

3. The linear evaporation source according to claim 2, characterized in that, The inner wall of the mounting cavity is provided with the limiting protrusion, which extends to the first end of the connecting portion; The outer circumferential surface of the rotating shaft is provided with the limiting groove, which extends to one end of the rotating shaft adjacent to the connecting part.

4. The linear evaporation source according to claim 2, characterized in that, The head is provided with a first through hole, which extends to the connecting part and penetrates the connecting part.

5. The linear evaporation source according to claim 2, characterized in that, The crucible is provided with a plurality of ejection holes, each ejection hole is provided with a corresponding nozzle, and each nozzle is connected to a first driving device.

6. The linear evaporation source according to claim 5, characterized in that, The first through-holes of the multiple nozzles have different diameters.

7. The linear evaporation source according to any one of claims 1-5, characterized in that, The crucible includes: The pot body has a first cavity and a first strip-shaped opening communicating with the first cavity; A lid is attached to the pot body. The lid has the ejection hole and is equipped with the first driving device. The lid has a second cavity and a second strip opening that communicates with the second cavity. The second strip opening is opposite to and communicates with the first strip opening. Wherein, along the direction close to the first strip opening, the circumferential dimension of the pot body near the first strip opening gradually decreases; and / or, along the direction close to the second strip opening, the circumferential dimension of the cover body near the second strip opening gradually decreases.

8. The linear evaporation source according to any one of claims 1-5, characterized in that, The linear evaporation source also includes: An angle plate is placed over the crucible and protrudes from the nozzle. The angle plate has a limiting orifice located above the nozzle to limit the vapor deposition range of the nozzle. The second driving device is connected to the angle plate to drive the angle plate to move relative to the crucible.

9. The linear evaporation source according to claim 8, characterized in that, The angle plate includes a first plate and a second plate, which are respectively disposed on both sides of the crucible and extend along the length direction of the linear evaporation source; The limiting opening is formed between the first plate and the second plate, and at least one of the first plate and the second plate is connected to the second driving device in a transmission manner.

10. A vapor deposition apparatus, characterized in that, Includes the linear evaporation source as described in any one of claims 1-9.

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