A centralized water-cooling thermal management system suitable for surface vacuum coating production line

Abstract

The application relates to the field of mechanical engineering, and particularly discloses a centralized water-cooling heat management system suitable for a surface vacuum coating production line, which comprises a disturbance correlation module, a cold quantity gap module, a transition water supply module and a gap correction module.The disturbance correlation module extracts the pressure drop depth of a mother pipe and the temperature deviation recovery time lag through time domain alignment, and forms a disturbance correlation mapping table.The cold quantity gap module captures a fast cooling request event to determine a cold quantity gap value and a cold storage intervention order.The transition water supply module drives a cold storage cold release branch and a bypass valve in advance to establish a transition water supply mode through pressure lifting and cold quantity pre-feeding to offset the disturbance.The gap correction module generates a gap correction coefficient according to the water supply temperature residual error of a constant temperature cavity, and corrects the subsequent cold quantity gap value.The back-off control module executes a fast cooling valve staged closing sequence and a cold storage tank energy storage backwater curve in an opening cavity permission interval, and backs off to a conventional constant pressure water supply mode.The temperature disturbance to the constant temperature cavity is greatly reduced while the fast cooling speed is ensured.

Description

Technical Field

[0001] This invention relates to the field of mechanical engineering, and more specifically to a centralized water-cooled thermal management system suitable for surface vacuum coating production lines. Background Technology

[0002] In dual-chamber or multi-chamber alternating vacuum coating production lines, one chamber is in the evaporation or sputtering stage, requiring the substrate stage or chamber wall to be maintained at an extremely stable process temperature; while the other chamber has just completed coating and needs to be rapidly cooled by a large flow of cooling water to facilitate the opening of the chamber and the loading and unloading of workpieces. The two chambers share a centralized chiller unit and water supply network. When the cooling valve of the rapid cooling chamber is suddenly fully opened, a large amount of chilled water rushes into this branch, causing the pressure of the water supply header to drop instantaneously and the water supply temperature to rise rapidly in a short time. Even if the system is regulated by a PID constant pressure variable frequency pump and chiller unit, it is still impossible to avoid the water supply temperature disturbance caused by thermal inertia. This small but steep water temperature fluctuation is enough to change the substrate surface temperature, leading to changes in the film deposition rate, causing film thickness drift and inconsistencies in optical or electrical properties.

[0003] Most existing centralized systems rely solely on real-time return water temperature feedback to adjust chiller load, lacking a multi-step coordinated strategy that utilizes feedforward information from the process sequence to coordinate the release of cold from the storage tank, the action of the bypass valve, and the preloading of the chiller. This lag-based regulation method cannot proactively compensate for the impending drop in main pipe pressure and the instantaneous rise in temperature at the moment the rapid cooling valve opens, making it difficult to completely isolate disturbances in the constant temperature chamber while ensuring rapid cooling speed.

[0004] Therefore, there is an urgent need for a collaborative control method that can combine process stage indicators to achieve feedforward cooling capacity prediction and proactive establishment of transition water supply mode, so as to ensure the long-term stability of the constant temperature chamber process temperature while maintaining rapid cooling efficiency.

[0005] Therefore, the present invention provides a centralized water-cooled thermal management system suitable for surface vacuum coating production lines. Summary of the Invention

[0006] The purpose of this invention is to provide a centralized water-cooled thermal management system suitable for surface vacuum coating production lines, so as to solve the above-mentioned background problems.

[0007] The objective of this invention can be achieved through the following technical solution: a centralized water-cooled thermal management system suitable for surface vacuum coating production lines, comprising the following modules:

[0008] Disturbance correlation module: Acquire process stage identifiers for multiple chambers, capture fast cooling valve opening event signals, collect main pipe pressure sequence and constant temperature chamber temperature sequence, perform time domain alignment and feature extraction, obtain main pipe pressure drop depth and temperature deviation recovery time delay, and generate disturbance correlation mapping table according to chamber operating conditions.

[0009] Cold capacity gap module: Reads the process stage identifiers of each chamber in real time, identifies rapid cooling request event signals, predicts water supply fluctuation characteristics by combining the disturbance correlation mapping table, performs swing deviation analysis based on water supply fluctuation characteristics, and determines the cold capacity gap value and the order of cold storage intervention.

[0010] Transitional water supply module: By using the cold capacity gap value and the priority of cold storage intervention, the cold storage and cold release branch is driven in advance and the opening of the main pipe bypass is adjusted to establish a transitional water supply mode;

[0011] Gap Correction Module: In transitional water supply mode, continuously monitor the temperature value of the constant temperature chamber water supply, analyze the degree of deviation, perform reverse compensation, and convert it into gap correction coefficients and map them to the disturbance correlation mapping table;

[0012] The reversal control module continuously monitors the chamber temperature of the rapid cooling chamber to determine whether it has entered the permitted opening range. If it has, it uses the gap correction coefficient and disturbance correlation mapping table to generate a rapid cooling valve graded closing sequence and a cold storage tank energy storage return curve and implements them to smoothly revert from the transition water supply mode to the conventional constant pressure water supply mode.

[0013] Furthermore, the process of obtaining the pressure drop depth of the main pipe is as follows:

[0014] The alignment reference point for obtaining the rapid cooling valve opening event signal is the alignment zero point. Based on the alignment zero point, the main pipe pressure sequence and the constant temperature chamber temperature sequence are extracted to obtain the steady-state sequence before the event and the response sequence after the event.

[0015] The arithmetic mean of the main pipe pressure sequence segments in the pre-event steady-state sequence is used to obtain the steady-state pressure baseline value.

[0016] Traverse the main pipe pressure sequence segments in the response sequence after the event, extract the minimum water supply pressure value, calculate the difference between the steady-state pressure benchmark value and the minimum water supply pressure value, and obtain the main pipe pressure drop depth of the fast cooling valve opening event.

[0017] Furthermore, the process of obtaining the temperature deviation recovery time lag is as follows:

[0018] The arithmetic mean of the isothermal cavity temperature sequence segments in the pre-event steady-state sequence is calculated to obtain the steady-state temperature reference value. The maximum and minimum values ​​of the isothermal cavity temperature sequence segments are read and the difference is calculated as the pre-steady-state temperature amplitude.

[0019] Centered on the steady-state temperature reference value, and with the previous steady-state temperature amplitude as the interval width, a previous steady-state temperature envelope interval is constructed to search for the temperature recovery time and the temperature deviation start time. The difference between the temperature recovery time and the temperature deviation start time is used as the temperature deviation recovery time lag of the fast cooling valve opening event.

[0020] Furthermore, the process of predicting the characteristics of water supply fluctuations is as follows:

[0021] Read the process stage identifier of each chamber, identify the rapid cooling request event signal and obtain the chamber operating condition combination corresponding to this rapid cooling request event. Use it as an index key to retrieve the disturbance association mapping table and obtain the corresponding typical temperature deviation recovery time delay and typical main pipe pressure drop depth.

[0022] The typical temperature deviation recovery time lag corresponding to this rapid cooling request event is directly taken as the duration of the water supply temperature.

[0023] The central controller calls the pre-built pressure-temperature disturbance transmission model, inputs the typical main pipe pressure drop depth corresponding to this rapid cooling request event into the pressure-temperature disturbance transmission model, and outputs the water supply temperature deviation that this rapid cooling request event will cause.

[0024] The duration of the water supply temperature and the magnitude of the water supply temperature deviation are used as the characteristics of water supply fluctuation in this rapid cooling request event.

[0025] Furthermore, the process of identifying the fast cooling request event signal is as follows:

[0026] The chambers whose process stages are vapor deposition or sputtering are marked as constant temperature chambers, and the chambers whose process stages are vapor deposition and will enter the rapid cooling stage after the vapor deposition stage are marked as potential rapid cooling chambers.

[0027] The remaining execution time is calculated by subtracting the duration of the vapor deposition stage in the potential fast cooling cavity from the already executed duration.

[0028] The chamber number of the potential fast cooling chamber, the chamber number of the constant temperature chamber, and the process stage of the constant temperature chamber are combined to obtain the chamber condition combination to be matched at the current moment. This combination is used as an index key to retrieve the typical temperature deviation recovery time delay from the disturbance association mapping table.

[0029] When the remaining execution time drops to less than or equal to the typical temperature recovery time lag, it is determined that an impending fast cooling request event signal has been captured.

[0030] Furthermore, the process of performing oscillation deviation analysis is as follows:

[0031] Calculate the current thermal margin of the thermostatic cavity and compare the water supply temperature deviation of this rapid cooling request event with the current thermal margin of the thermostatic cavity.

[0032] When the deviation of the supply water temperature is greater than the current heat capacity margin, the excess temperature runout is obtained by subtracting the current heat capacity margin from the deviation of the supply water temperature; the excess temperature runout is combined with the mass flow rate of the constant temperature cavity cooling water and the specific heat capacity of the cooling water to calculate the cooling capacity gap value.

[0033] If the cold energy deficit is less than or equal to the rated maximum cooling capacity of the cold storage tank, the cold storage intervention priority is to activate only the cold storage and cooling branch; if the cold energy deficit is greater than the rated maximum cooling capacity of the cold storage tank, the cold storage intervention priority is to first activate the cold storage and cooling branch to release all the cold energy and generate the main bypass valve.

[0034] Furthermore, the process of mapping to the perturbation association mapping table is as follows:

[0035] The deviation of the monitored constant temperature chamber water supply temperature value is analyzed and converted into a gap correction coefficient. The gap correction coefficient is then bound to the chamber operating condition combination corresponding to the current rapid cooling request event and stored in the disturbance event history database. When the number of gap correction coefficients stored under the same chamber operating condition combination is greater than or equal to two, the arithmetic mean is calculated to obtain the gap correction coefficient corresponding to the chamber operating condition combination.

[0036] Furthermore, the process of converting to gap correction coefficients is as follows:

[0037] The average unsuppressed disturbance power was calculated by combining the temperature of the constant temperature chamber supply water with the mass flow rate of the constant temperature chamber cooling water.

[0038] If the cooling capacity deficit is greater than zero, the average unsuppressed disturbance power is calculated as a ratio to the cooling capacity deficit, and the deficit correction coefficient is obtained by adding 1 to the ratio. If the cooling capacity deficit is zero, the deficit correction coefficient is directly assigned the value of 1.

[0039] Furthermore, the process of generating the rapid cooling valve staged closing sequence is as follows:

[0040] The total duration of the rapid cooling valve staged shutdown sequence is obtained by multiplying the gap correction coefficient of this rapid cooling request event with the typical temperature deviation recovery time delay; the total duration is then calculated by ratio to the fixed sampling period of the temperature transmitter and rounded down to obtain the number of shutdown stages M.

[0041] Furthermore, the process of generating the energy storage return water curve for the cold storage tank is as follows:

[0042] If the cold storage intervention order is to only activate the cold storage and release branch, then the first treatment curve and the second treatment curve will form the cold storage tank energy storage return water curve.

[0043] If the cold storage intervention sequence is to first activate the cold storage and release branch to release all the cold and generate the main pipe bypass valve, then the first segment processing curve and the second segment processing curve constitute the cold storage tank energy storage return water curve; and obtain the main pipe bypass valve opening degree, and use the total duration of the rapid cooling valve staged closing sequence as the benchmark to linearly close the main pipe bypass opening degree to the fully closed state.

[0044] The beneficial effects of this invention are as follows:

[0045] 1. Acquire process stage identifiers for multiple chambers, capture rapid cooling valve opening event signals, collect main pipe pressure sequences and constant temperature chamber temperature sequences, perform time-domain alignment and feature extraction to obtain the main pipe pressure drop depth and temperature deviation recovery lag, and generate a disturbance correlation mapping table according to chamber operating conditions; quantify the pressure drop and temperature recovery characteristics of rapid cooling disturbances under different operating conditions, making the characteristics of rapid cooling disturbances predictable and providing reasonable data; read the process stage identifiers of each chamber in real time, identify rapid cooling request event signals, predict water supply fluctuation characteristics based on the disturbance correlation mapping table, perform swing deviation analysis based on water supply fluctuation characteristics, determine the cooling capacity gap value and the priority of cold storage intervention; use process timing to predict the cooling capacity gap and the priority of cold storage intervention in advance, turning passive post-event adjustment into proactive pre-event cooling replenishment, and completely isolate the temperature disturbance of the constant temperature chamber.

[0046] 2. Based on the cold capacity gap value and the priority of cold storage intervention, the cold storage and release branch is driven in advance and the bypass opening of the main pipe is adjusted to establish a transitional water supply mode. Before the rapid cooling valve is opened, a high-pressure, low-temperature water supply reserve is actively established to instantly offset the pressure drop and water temperature rise of the main pipe, ensuring that the precision coating process is undisturbed. In the transitional water supply mode, the temperature value of the constant temperature chamber is continuously monitored to analyze the degree of deviation and perform reverse compensation, which is then converted into a gap correction coefficient and mapped to the disturbance correlation mapping table. The residual temperature deviation is compensated online and a gap correction coefficient closed-loop optimization estimate is generated to eliminate individual differences and continuously improve the long-term control accuracy. The chamber temperature of the rapid cooling chamber is continuously monitored to determine whether it has entered the chamber opening permission range. If it has, the gap correction coefficient and the disturbance correlation mapping table are used to generate a rapid cooling valve staged closing sequence and a cold storage tank energy storage return curve and implement them to smoothly return the transitional water supply mode to the conventional constant pressure water supply mode. The transitional mode is smoothly exited through staged valve closure and cold storage return curve, eliminating valve closure water hammer and residual temperature peaks, achieving system uninterrupted recovery and automatic energy storage. Attached Figure Description

[0047] The invention will now be further described with reference to the accompanying drawings.

[0048] Figure 1 This is a functional module diagram of a centralized water-cooled thermal management system applicable to a surface vacuum coating production line according to the present invention;

[0049] Figure 2 This is a logic diagram for determining the cold capacity gap value and the order of cold storage intervention in this invention;

[0050] Figure 3 This is a flowchart of a centralized water-cooling thermal management method applicable to surface vacuum coating production lines in this invention. Detailed Implementation

[0051] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0052] Example 1

[0053] like Figures 1-2 As shown, a centralized water-cooled thermal management system suitable for surface vacuum coating production lines includes:

[0054] Disturbance correlation module: Acquire process stage identifiers for multiple chambers, capture fast cooling valve opening event signals, collect main pipe pressure sequence and constant temperature chamber temperature sequence, perform time domain alignment and feature extraction, obtain main pipe pressure drop depth and temperature deviation recovery time delay, and generate disturbance correlation mapping table according to chamber operating conditions.

[0055] The process stage identifier is synchronously read from the programmable logic controllers of each of the multiple chambers via industrial Ethernet. The process stage identifier includes: process stage (evaporation stage, sputtering stage, rapid cooling stage or workpiece pick-and-place stage), process stage execution time, and process stage duration.

[0056] Meanwhile, the pressure transmitter installed on the main water supply pipe of the centralized chiller unit continuously collects the water supply pressure value of the main water supply pipe at a fixed sampling period, and arranges them in time sequence to generate the main pipe pressure sequence.

[0057] The temperature transmitter installed on the water supply branch pipe of the constant temperature cavity continuously collects the water supply temperature value of the constant temperature cavity at a fixed sampling period, and arranges them in time sequence to generate the temperature sequence of the constant temperature cavity.

[0058] Continuously monitor the valve position limit switch to obtain the rapid cooling valve opening event signal, and record the timestamp of the rapid cooling valve opening event signal as the alignment reference point;

[0059] It should be noted that the valve position limit switch is installed on the quick-cooling valve, which is used to control the flow of cooling water into the quick-cooling chamber;

[0060] Whenever the rapid cooling valve opening event signal is triggered, the main pipe pressure sequence and the constant temperature chamber temperature sequence are time-domain aligned with the alignment reference point as the alignment zero point.

[0061] The specific method for performing time-domain alignment is as follows:

[0062] Starting from the zero alignment point, the initial boundary is obtained by searching backward along the time axis with a fixed sampling duration. The interval from the initial boundary to the zero alignment point is marked as the pre-steady-state interval. Based on the pre-steady-state interval, segments of the main pipe pressure sequence and the isothermal cavity temperature sequence are extracted from the interval as the pre-steady-state sequence of the event.

[0063] Simultaneously, starting from the zero alignment point, a fixed sampling duration is used to search along the time axis in the positive direction to obtain the termination boundary. The interval from the zero alignment point to the termination boundary is marked as the post-response interval. Based on the post-response interval, segments of the main pipe pressure sequence and the isothermal chamber temperature sequence are extracted from the interval as the post-event response sequence.

[0064] The fixed sampling duration is an integer multiple of the fixed sampling period of the temperature transmitter in the disturbance correlation module;

[0065] The arithmetic mean of the main pipe pressure sequence segments in the pre-event steady-state sequence is used to obtain the steady-state pressure baseline value.

[0066] Traverse the main pipe pressure sequence segments in the response sequence after the event, extract the minimum water supply pressure value, calculate the difference between the steady-state pressure benchmark value and the minimum water supply pressure value, and obtain the main pipe pressure drop depth of the fast cooling valve opening event.

[0067] The arithmetic mean of the isothermal cavity temperature sequence segments in the pre-event steady-state sequence is calculated to obtain the steady-state temperature reference value.

[0068] The maximum and minimum values ​​of the isothermal cavity water supply temperature are read from the isothermal cavity temperature sequence segment in the pre-event steady-state sequence, and the difference is calculated as the pre-steady-state temperature amplitude.

[0069] Centered on the steady-state temperature reference value, and with the amplitude of the previous steady-state temperature as the interval width, a pre-steady-state temperature envelope interval is constructed. From the temperature sequence of the isothermal cavity in the post-event response sequence, a sampling point search is performed with zero alignment. The moment when the isothermal cavity water supply temperature value first deviates from the pre-steady-state temperature envelope interval is recorded as the temperature deviation start time. From the temperature deviation start time, a sampling point search is continued. The moment when the isothermal cavity water supply temperature value re-enters the pre-steady-state temperature envelope interval and does not deviate from the pre-steady-state temperature envelope interval again until the end of the post-event response sequence is recorded as the temperature recovery time.

[0070] The difference between the temperature recovery time and the temperature deviation start time is taken as the temperature deviation recovery time lag of the rapid cooling valve opening event;

[0071] The chamber number of the rapid cooling chamber, the chamber number of the constant temperature chamber, and the process stage of the constant temperature chamber at the moment the rapid cooling valve opening event occur are collectively defined as a chamber operating condition combination.

[0072] The pressure drop depth and temperature deviation recovery time lag of the main pipe during the rapid cooling valve opening event are combined with the chamber operating conditions to form a disturbance event record, which is then stored in the disturbance event history database.

[0073] When the number of disturbance event records belonging to the same chamber operating condition combination in the disturbance event history database reaches 10, the arithmetic mean of the pressure drop depth of all main pipes under the same chamber operating condition combination is calculated to obtain the typical pressure drop depth of the main pipes corresponding to the chamber operating condition combination.

[0074] Meanwhile, the arithmetic mean of all temperature deviation recovery delays under the same chamber operating condition combination is calculated to obtain the typical temperature deviation recovery delay corresponding to the chamber operating condition combination;

[0075] Using the chamber operating condition combination as the index key and the typical main pipe pressure drop depth and typical temperature deviation recovery time lag corresponding to the chamber operating condition combination as the key value, a mapping record is constructed; the mapping records corresponding to all chamber operating condition combinations are summarized to generate a mapping table with the chamber operating condition combination as the index and the typical main pipe pressure drop depth and typical temperature deviation recovery time lag as the data fields, which is the disturbance association mapping table.

[0076] Cold capacity gap module: Reads the process stage identifiers of each chamber in real time, identifies rapid cooling request event signals, predicts water supply fluctuation characteristics by combining the disturbance correlation mapping table, performs swing deviation analysis based on water supply fluctuation characteristics, and determines the cold capacity gap value and the order of cold storage intervention.

[0077] The central controller continuously obtains the process stage identifiers of each chamber from the programmable logic controllers of each chamber in the vacuum coating production line via industrial Ethernet.

[0078] The central controller marks any chamber in which the process stage is either vapor deposition or sputtering as a constant temperature chamber, and marks any chamber in which the process stage is vapor deposition and which will enter the rapid cooling stage after the vapor deposition stage as a potential rapid cooling chamber.

[0079] The remaining execution time is calculated by subtracting the duration of the vapor deposition stage in the potential fast cooling cavity from the already executed duration.

[0080] The central controller combines the chamber number of the potential rapid cooling chamber, the chamber number of the constant temperature chamber, and the process stage of the constant temperature chamber to obtain the chamber operating condition combination to be matched at the current moment.

[0081] Using the current chamber operating condition combination to be matched as the index key, retrieve the corresponding typical temperature deviation recovery time delay and typical main pipe pressure drop depth from the disturbance association mapping table;

[0082] The remaining execution time of the potential fast cooling cavity is compared with the corresponding typical temperature deviation recovery time delay. When the remaining execution time drops to less than or equal to the typical temperature deviation recovery time delay, it is determined that the fast cooling request event signal that is about to occur has been captured. The capture time of the fast cooling request event signal is recorded, and the potential fast cooling cavity is marked as the fast cooling cavity of this fast cooling request event.

[0083] At the moment the rapid cooling request event signal is captured, the chamber number of the constant temperature chamber, the chamber number of the rapid cooling chamber, and the process stage of the constant temperature chamber are locked together as the chamber condition combination corresponding to this rapid cooling request event. Then, the disturbance association mapping table is retrieved again using the chamber condition combination corresponding to this rapid cooling request event as the index key to obtain the typical temperature deviation recovery time delay and the typical main pipe pressure drop depth corresponding to this rapid cooling request event.

[0084] The typical temperature deviation recovery time lag corresponding to this rapid cooling request event is directly taken as the duration of the water supply temperature.

[0085] The central controller calls the pre-built pressure-temperature disturbance transmission model, takes the typical main pipe pressure drop depth corresponding to this rapid cooling request event as the input quantity into the pressure-temperature disturbance transmission model, and outputs the water supply temperature deviation caused by this rapid cooling request event.

[0086] The duration of the water supply temperature and the magnitude of the water supply temperature deviation are used as the characteristics of water supply fluctuations in this rapid cooling request event;

[0087] It should be noted that the pressure-temperature disturbance transmission model is constructed as follows: Based on the historical database of disturbance events, all disturbance event records belonging to the same chamber operating condition combination are extracted. For each disturbance event record, according to its corresponding fast cooling valve opening event, the maximum deviation of the constant temperature chamber water supply temperature value relative to the steady-state temperature reference value in the constant temperature chamber temperature sequence segment within the post-event response sequence is obtained from the disturbance association module. The pressure drop depth of the main pipe for each disturbance event record under the same chamber operating condition combination is used as the independent variable, and the corresponding maximum deviation value extracted above is used as the dependent variable. The linear mapping function between the pressure drop depth of the main pipe and the maximum deviation value is obtained by least squares fitting. This linear mapping function is the pressure-temperature disturbance transmission model.

[0088] The central controller reads the upper limit of the allowable temperature deviation of the thermostatic cavity in the process stage of the current rapid cooling request event from the programmable logic controller of the thermostatic cavity. The upper limit of the allowable temperature deviation of the thermostatic cavity is the maximum positive deviation of the thermostatic cavity water supply temperature from the steady-state temperature reference value that can be guaranteed to ensure the coating quality in the current process stage.

[0089] Based on the capture time of the fast cooling request event, the constant temperature cavity water supply temperature sequence is obtained by backtracking for a fixed sampling time from the capture time, and the arithmetic average is calculated as the real-time steady-state temperature reference value.

[0090] The fixed sampling duration is an integer multiple of the fixed sampling period of the temperature transmitter in the disturbance correlation module;

[0091] The real-time supply water temperature of the thermostatic cavity at the moment of capturing the rapid cooling request event is obtained, and the absolute difference between it and the real-time steady-state temperature reference value is calculated to obtain the current temperature deviation. The difference between the upper limit of the allowable temperature deviation of the thermostatic cavity and the current temperature deviation is calculated to obtain the current heat capacity margin of the thermostatic cavity.

[0092] Among them, the current heat capacity margin represents the positive oscillation of the water supply temperature that the thermostatic cavity can still withstand;

[0093] Compare the estimated supply water temperature deviation of this rapid cooling request event with the current thermal capacity margin of the thermostatic chamber;

[0094] When the deviation of the water supply temperature is less than or equal to the current heat capacity margin, it indicates that the heat capacity of the constant temperature cavity itself is sufficient to resist the upcoming temperature disturbance. At this time, the cold energy gap value is set to zero, and the cold storage intervention priority is set to no operation.

[0095] When the deviation of the water supply temperature is greater than the current heat capacity margin, the deviation of the water supply temperature is subtracted from the current heat capacity margin to obtain the excess temperature fluctuation that needs to be suppressed by the external cold source.

[0096] The central controller obtains the mass flow rate of the cooling water in the constant temperature chamber measured in real time by the flow transmitter installed on the water supply branch pipe of the constant temperature chamber, and calls up the specific heat capacity constant of the cooling water. It multiplies the excess temperature swing by the mass flow rate of the cooling water in the constant temperature chamber and then by the specific heat capacity constant of the cooling water to calculate the additional cooling power value required to completely offset the excess temperature swing. This cooling power value is the cooling gap value.

[0097] Obtain the rated maximum cooling capacity of the cold storage tank as indicated on the factory nameplate, and compare the cooling capacity gap value with the rated maximum cooling capacity of the cold storage tank.

[0098] If the cold energy deficit is less than or equal to the rated maximum cold energy release power of the cold storage tank, the cold energy storage intervention priority is to only activate the cold energy storage and cold energy release branch, which alone provides the cold energy power equal to the cold energy deficit.

[0099] If the cold energy deficit is greater than the rated maximum cooling capacity of the cold storage tank, the cold storage intervention priority is to first start the cold storage cooling branch to release the full amount of cold energy and generate the main bypass valve. Specifically, the cold storage cooling branch is started first and the cold storage cooling branch releases the full amount of cold energy according to the rated maximum cooling capacity of the cold storage tank. At the same time, the bypass auxiliary cold energy power is calculated based on the difference between the cold energy deficit and the rated maximum cooling capacity of the cold storage tank. The main bypass valve is adjusted to introduce an additional low-temperature chilled water flow that matches the bypass auxiliary cold energy power as the driving strategy for the main bypass valve.

[0100] The technical solution of this invention is as follows: Acquire process stage identifiers for multiple chambers, capture rapid cooling valve opening event signals, collect the main pipe pressure sequence and the constant temperature chamber temperature sequence, perform time-domain alignment and feature extraction to obtain the main pipe pressure drop depth and temperature deviation recovery lag, and generate a disturbance correlation mapping table according to chamber operating conditions; quantify the pressure drop and temperature recovery characteristics of rapid cooling disturbances under different operating conditions, making the characteristics of rapid cooling disturbances predictable and providing reasonable data; read the process stage identifiers of each chamber in real time, identify rapid cooling request event signals, predict water supply fluctuation characteristics based on the disturbance correlation mapping table, perform swing deviation analysis based on water supply fluctuation characteristics, determine the cooling capacity gap value and the priority of cold storage intervention; use the process sequence to predict the cooling capacity gap and the priority of cold storage intervention in advance, transforming passive post-event adjustment into proactive pre-event cooling replenishment, and completely isolating the temperature disturbance of the constant temperature chamber.

[0101] Example 2

[0102] Please see Figure 1 As shown, a centralized water-cooled thermal management system suitable for surface vacuum coating production lines includes:

[0103] Transitional water supply module: Based on the cold capacity gap and the priority of cold storage intervention, the cold storage and cold release branch is activated in advance and the opening of the main pipe bypass is adjusted to establish a transitional water supply mode;

[0104] The central controller sets the typical main pipe pressure drop depth for this rapid cooling request event as the short-term pressure rise target value that the main water supply pipe needs to achieve in the transition water supply mode;

[0105] The central controller simultaneously reads the cold capacity deficit value and the cold storage intervention priority corresponding to this rapid cooling request event, and determines the driving strategy of the cold storage and release branch and the main bypass valve based on the cold storage intervention priority.

[0106] When the cold storage intervention priority is to only activate the cold storage and cold release branch, the central controller generates a control command for the cold storage and cold release branch, so that the output of the cold storage and cold release branch is equal to the cold capacity deficit value, and simultaneously controls the pressure of the main water supply pipe to reach the short-term pressure rise target value.

[0107] When the priority of cold storage intervention is to first start the cold storage and release branch to release all the cold and generate the drive strategy of the main pipe bypass valve, a comprehensive cold release command is generated; the opening of the main pipe bypass valve of the cold storage and release branch and the main pipe bypass valve is adjusted to meet the cold capacity gap value, and the pressure of the main water supply pipe is simultaneously made to reach the short-term pressure rise target value.

[0108] During the period when the remaining execution time of the vapor deposition stage in the potential rapid cooling chamber has not yet reached zero and the rapid cooling valve opening event has not yet been triggered, the central controller establishes a water supply state in the main water supply pipe where the actual water supply pressure is higher than the conventional constant pressure water supply pressure and the water supply temperature is lower than the conventional constant temperature water supply temperature by driving the cold storage and release branch and the main pipe bypass valve in advance. This water supply state is the transition water supply mode.

[0109] When the vapor deposition stage of the potential rapid cooling chamber ends, the process stage switches to the rapid cooling stage, and the rapid cooling valve performs a full opening action when the rapid cooling valve opening event signal is captured.

[0110] It should be noted that, because the main water supply pipe was already in transitional water supply mode before the rapid cooling valve opening event signal occurred, the actual water supply pressure corresponding to the short-term pressure rise target value pre-established in the main water supply pipe offset the pressure drop depth of the main pipe caused by the full opening of the rapid cooling valve. The cooling power pre-injected in the main water supply pipe, equal to the cooling capacity gap value, offset the instantaneous rise in the constant temperature chamber water supply temperature caused by the return water from the rapid cooling chamber flowing into the return water main pipe. Thus, at the same moment the rapid cooling valve opening event occurred, the pressure drop in the main pipe and the instantaneous rise in the constant temperature chamber water supply temperature were suppressed. After the rapid cooling valve opening event occurred, the central controller continued to maintain the transitional water supply mode, maintaining the current control state of the cold storage and release branch and the main pipe bypass valve until subsequent steps adjusted the transitional water supply mode according to the temperature change of the rapid cooling chamber.

[0111] Gap Correction Module: In transitional water supply mode, continuously monitor the temperature value of the constant temperature chamber water supply, analyze the degree of deviation, perform reverse compensation, and convert it into gap correction coefficients and map them to the disturbance correlation mapping table;

[0112] In the transitional water supply mode, the central controller continuously collects the water supply temperature value of the constant temperature chamber at a fixed sampling period of the temperature transmitter.

[0113] The central controller retrieves the real-time steady-state temperature reference value of the thermostatic cavity, which was calculated and stored at the moment the rapid cooling request event signal was captured.

[0114] The difference between the real-time collected constant temperature chamber water supply temperature value and the real-time steady-state temperature reference value is calculated and recorded as the constant temperature chamber water supply temperature residual.

[0115] The central controller reads the residual temperature of the constant temperature chamber water supply. When the residual temperature of the constant temperature chamber water supply is positive, it generates a cooling compensation command to drive the semiconductor cooling chip to cool the cooling water in the constant temperature chamber water supply branch pipe to offset the positive temperature deviation.

[0116] When the residual temperature difference of the constant temperature chamber water supply is negative, the central controller generates a heating compensation command to drive the electric heating element to heat up the cooling water in the constant temperature chamber water supply branch pipe to offset the negative temperature deviation.

[0117] It is understood that a constant temperature branch rapid temperature adjustment unit is installed on the water supply branch pipe of the constant temperature cavity. The constant temperature branch rapid temperature adjustment unit is composed of an electric heating element and a semiconductor cooling chip. Both the electric heating element and the semiconductor cooling chip are in thermal contact with the flowing cooling water, and the temperature response time of the constant temperature branch rapid temperature adjustment unit is less than the fixed sampling period.

[0118] The central controller integrates the absolute value of the residual temperature of the constant temperature chamber water supply from the moment the rapid cooling valve opening event signal is captured by the transition water supply module to the current sampling moment to obtain the cumulative amount of temperature residual.

[0119] The average temperature residual is obtained by dividing the accumulated temperature residual by the integral time from the moment the fast cooling valve opens to the current sampling moment.

[0120] During the integration period, the central controller synchronously collects the mass flow rate of the cooling water in the constant temperature chamber measured by the flow transmitter on the water supply branch pipe of the constant temperature chamber, and calculates the arithmetic mean of the mass flow rate of the cooling water in the constant temperature chamber during the integration period as the average mass flow rate of the cooling water in the constant temperature chamber.

[0121] The central controller multiplies the average temperature residual by the average mass flow rate of the constant temperature chamber cooling water, and then multiplies it by the specific heat capacity constant of the cooling water to calculate the average unsuppressed disturbance power.

[0122] If the cold energy gap value in the cold energy gap module is greater than zero, the average unsuppressed disturbance power is calculated as a ratio to the cold energy gap value, and the gap correction coefficient is obtained by adding 1 to the ratio calculation result.

[0123] If the cold air gap is zero, the gap correction factor is directly assigned a value of 1;

[0124] It should be noted that the physical meaning of the gap correction coefficient is: it represents the ratio between the cold energy gap value injected by the transition water supply mode established by the advance drive of the cold storage and release branch and the main bypass valve in this rapid cooling request event, and the average unsuppressed disturbance power that is still not eliminated in the constant temperature chamber after compensation by the constant temperature branch rapid temperature adjustment unit after the rapid cooling valve opening event. This ratio is used as a multiplicative factor and fed back to the cold energy gap prediction link for subsequent rapid cooling request events for the same chamber operating condition combination, so as to adjust the benchmark of the cold energy gap value calculated under the subsequent same chamber operating condition combination.

[0125] The central controller binds the notch correction coefficient to the chamber operating condition combination corresponding to the current rapid cooling request event and stores it in the disturbance event history database. When the number of notch correction coefficients stored under the same chamber operating condition combination is greater than or equal to two, the central controller calculates the arithmetic mean of all notch correction coefficients to obtain the notch correction coefficient corresponding to the chamber operating condition combination.

[0126] When the central controller subsequently executes the cooling capacity gap module for the same chamber operating condition combination, the central controller reads the gap correction coefficient corresponding to the chamber operating condition combination from the disturbance event history database, and multiplies the cooling capacity gap value calculated based on the cooling capacity gap module by the gap correction coefficient to correct the cooling capacity gap value and obtain the corrected cooling capacity gap value.

[0127] Back-off control module: continuously monitors the chamber temperature of the rapid cooling chamber to determine whether it has entered the permitted opening range. If it has, it uses the gap correction coefficient and disturbance correlation mapping table to generate a rapid cooling valve graded closing sequence and a cold storage tank energy storage return curve and implements it to smoothly return the transition water supply mode to the normal constant pressure water supply mode.

[0128] The central controller continuously reads the chamber temperature of the rapid cooling chamber from the programmable logic controller of the rapid cooling chamber;

[0129] The central controller compares the chamber temperature of the rapid cooling chamber with the opening permit temperature pre-stored in the programmable logic controller of the rapid cooling chamber. When the chamber temperature of the rapid cooling chamber is less than or equal to the opening permit temperature, the central controller determines that the rapid cooling chamber has entered the opening permit range and initiates the rollback control process from the transition water supply mode to the normal constant pressure water supply mode.

[0130] Among them, the permissible opening temperature is the highest chamber temperature that is allowed to be opened for workpiece handling operations as specified in the process specifications of the vacuum coating production line.

[0131] The central controller reads the notch correction coefficient bound to the chamber operating condition combination corresponding to the current rapid cooling request event from the disturbance event history database, and reads the typical temperature deviation recovery time delay of the current rapid cooling request event; the notch correction coefficient and the typical temperature deviation recovery time delay are multiplied to calculate the total duration of the rapid cooling valve staged closing sequence;

[0132] It should be noted that the physical meaning of the total duration is as follows: it represents the reasonable duration that the rapid cooling valve should maintain after correcting the temperature disturbance recovery benchmark duration under historical operating conditions based on the actual disturbance intensity of this rapid cooling event; the typical temperature deviation recovery lag reflects the time scale of the isothermal chamber temperature deviation and recovery after the rapid cooling valve is opened under the chamber operating condition combination; and the gap correction coefficient quantifies the proportion of additional disturbance remaining due to the predicted deviation of the cooling capacity gap. Multiplying the two is essentially matching the rhythm of the rapid cooling valve's staged closure with the duration of the system's thermal and pressure fluctuation process that was actually caused by this rapid cooling and was not completely suppressed after compensation, ensuring that the valve closing process will not cause pressure backflow due to being too fast, nor will it introduce new residual temperature peaks due to being too slow, so that the main pipe can transition smoothly.

[0133] The central controller acquires the current status of the transition water supply mode, which includes: the current real-time cooling power of the cold storage and cooling branch, the main bypass valve opening degree, the current actual water supply pressure of the main water supply pipe, and the real-time steady-state temperature reference value of the constant temperature chamber.

[0134] The total duration of the rapid cooling valve's graded closing sequence is calculated by ratioing it to the fixed sampling period of the temperature transmitter in the disturbance correlation module and then rounded down to obtain the number of closing stages, M. The number of closing stages, M, refers to the steps required for the rapid cooling valve to go through in the entire continuous process from fully open to fully closed.

[0135] The central controller generates a graded closing sequence for the rapid cooling valve based on its full opening degree, full closing degree, and the number M of closing positions.

[0136] It is understandable that the rapid cooling valve's graded closing sequence consists of M closing positions arranged sequentially. The first closing position sets the target opening of the rapid cooling valve to the first step opening that linearly decreases from the fully open opening. The Mth closing position sets the target opening of the rapid cooling valve to the fully closed opening. The holding time of each closing position is a fixed sampling period.

[0137] The central controller reads the priority of cold storage intervention corresponding to this rapid cooling request event;

[0138] If the cold storage intervention order is to only activate the cold storage release branch, the central controller generates the cold storage tank energy storage return water curve. The cold storage tank energy storage return water curve consists of the first segment processing curve and the second segment processing curve, specifically:

[0139] The first processing curve linearly decays the cooling power of the cold storage and cooling release branch to zero within the total duration of the rapid cooling valve staged closure sequence; the second processing curve linearly adjusts the cooling power to a negative value, the absolute value of which is equal to the target cooling power of the cold storage tank. The target cooling power is determined by the standard power value of the centralized chiller unit for cold storage tank under normal constant pressure water supply mode, and this standard power value is pre-stored in the central controller.

[0140] The duration of the second processing curve is calculated by the central controller by dividing the rated cold storage capacity of the cold storage tank by the target cold storage power; the rated cold storage capacity of the cold storage tank is obtained by the central controller reading the rated cold storage capacity indicated on the factory nameplate of the cold storage tank.

[0141] If the cold storage intervention sequence is to first activate the cold storage and release branch to release all cold water and generate the drive strategy for the main bypass valve, the central controller generates the cold storage tank energy storage return water curve and simultaneously generates the main bypass valve closing sequence, specifically:

[0142] The first processing curve linearly decays the cooling power of the cold storage and cooling release branch to zero within the total duration of the rapid cooling valve staged closure sequence; the second processing curve linearly adjusts the cooling power to a negative value, the absolute value of which is equal to the target cooling power of the cold storage tank.

[0143] The process of generating the main bypass valve closing sequence is as follows: obtain the main bypass opening degree of the main bypass valve, and linearly close it to the fully closed state based on the total duration of the rapid cooling valve stage closing sequence.

[0144] If the priority of the cold storage intervention corresponding to this rapid cooling request event is to only activate the cold storage and release branch, then the central controller will simultaneously execute the rapid cooling valve staged shutdown sequence and the cold storage tank energy storage return curve.

[0145] If the priority of the cold storage intervention corresponding to this rapid cooling request event is to first start the cold storage and release branch to release all the cold and generate the main bypass valve, then the central controller will simultaneously execute the rapid cooling valve staged closing sequence, the cold storage tank energy storage return water curve, and the main bypass valve closing sequence.

[0146] Understandably, as the rapid cooling valve is closed in stages, the opening of the rapid cooling valve gradually decreases, the flow rate of cooling water into the rapid cooling chamber decreases steadily, and the short-term pressure rise in the main water supply pipe pre-established by the transition water supply mode subsides smoothly, avoiding the pressure backflow that may be caused by the sudden full closure of the rapid cooling valve. At the same time, the controlled attenuation of the cooling power of the cooling power release branch in the energy storage return curve of the cold storage tank, in conjunction with the gradual introduction of the cold storage power, suppresses the residual temperature peak of the water supply that may be caused by the change of the return water temperature in the rapid cooling chamber and the switching of the cold storage tank's operating conditions.

[0147] When the rapid cooling valve's graded closing sequence is executed to the Mth closing stage and the rapid cooling valve reaches the fully closed opening, the cooling power of the cold storage and cooling release branch has completed the transition to the target cold storage power according to the cold storage tank's energy storage return water curve, and the main bypass valve's main bypass opening has been adjusted to the fully closed state as needed, the central controller will restore the target water supply pressure of the variable frequency pump in the centralized chiller unit to the normal constant pressure water supply pressure setting value, and restore the chiller unit's outlet water temperature setting value to the normal constant temperature water supply temperature setting value;

[0148] It should be noted that the setpoints for the conventional constant pressure water supply and the conventional constant temperature water supply are read by the central controller from the controller of the centralized chiller unit.

[0149] At this point, the main water supply pipe has completely reverted from the transitional water supply mode to the conventional constant pressure water supply mode. The water supply temperature of the constant temperature chamber is maintained within the range consistent with the real-time steady-state temperature reference value after continuous compensation by the constant temperature branch rapid temperature adjustment unit.

[0150] The technical solution of this invention is as follows: Based on the cold capacity gap value and the priority of cold storage intervention, the cold storage and cold release branch is driven in advance and the bypass opening of the main pipe is adjusted to establish a transitional water supply mode; before the rapid cooling valve is opened, a high-pressure and low-temperature water supply reserve is actively established to instantly offset the pressure drop of the main pipe and the water temperature rise, ensuring that the precision coating process is undisturbed; in the transitional water supply mode, the temperature value of the constant temperature chamber is continuously monitored to analyze the degree of deviation and perform reverse compensation, and is converted into a gap correction coefficient and mapped to the disturbance correlation mapping table; residual temperature deviation is compensated online and a gap correction coefficient closed-loop optimization estimate is generated to eliminate individual differences and continuously improve long-term control accuracy; the chamber temperature of the rapid cooling chamber is continuously monitored to determine whether it has entered the chamber opening permission range. If it has, the gap correction coefficient and the disturbance correlation mapping table are used to generate a rapid cooling valve graded closing sequence and a cold storage tank energy storage return curve and implement it, so that the transitional water supply mode smoothly returns to the conventional constant pressure water supply mode; through graded valve closing and cold storage return curve, the transitional mode is smoothly exited, eliminating valve closing water hammer and residual temperature peaks, realizing system disturbance-free recovery and automatic energy storage.

[0151] Example 3

[0152] Please see Figure 3 As shown, a centralized water-cooled thermal management method suitable for surface vacuum coating production lines includes the following steps:

[0153] Step 1: Obtain process stage identifiers for multi-chamber units, capture the rapid cooling valve opening event signal, collect the main pipe pressure sequence and the constant temperature chamber temperature sequence, perform time-domain alignment and feature extraction, obtain the main pipe pressure drop depth and temperature deviation recovery time delay, and generate a disturbance correlation mapping table according to the chamber operating conditions.

[0154] Step 2: Read the process stage identifiers of each chamber in real time, identify the rapid cooling request event signal, predict the water supply fluctuation characteristics by combining the disturbance correlation mapping table, perform swing deviation analysis based on the water supply fluctuation characteristics, and determine the cooling capacity gap value and the priority of cold storage intervention.

[0155] Step 3: Based on the cold capacity deficit and the priority of cold storage intervention, activate the cold storage and release branch in advance and adjust the bypass opening of the main pipe to establish a transitional water supply mode;

[0156] Step 4: In the transition water supply mode, continuously monitor the water supply temperature value of the constant temperature chamber, analyze the degree of deviation, perform reverse compensation, and convert it into a gap correction coefficient to be mapped to the disturbance correlation mapping table.

[0157] Step 5: Continuously monitor the chamber temperature of the rapid cooling chamber to determine whether it has entered the permissible opening range. If it has, use the gap correction coefficient and disturbance correlation mapping table to generate the rapid cooling valve graded closing sequence and the cold storage tank energy storage return curve and implement them to smoothly return the transition water supply mode to the conventional constant pressure water supply mode.

[0158] The foregoing has provided a detailed description of one embodiment of the present invention, but this description is merely a preferred embodiment and should not be construed as limiting the scope of the invention. All equivalent variations and modifications made within the scope of the present invention should still fall within the scope of the present invention.

Claims

1. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines, characterized in that: Includes the following modules: Disturbance correlation module: Acquire process stage identifiers for multiple chambers, capture fast cooling valve opening event signals, collect main pipe pressure sequence and constant temperature chamber temperature sequence, perform time domain alignment and feature extraction, obtain main pipe pressure drop depth and temperature deviation recovery time delay, and generate disturbance correlation mapping table according to chamber operating conditions. Cold capacity gap module: Reads the process stage identifiers of each chamber in real time, identifies rapid cooling request event signals, predicts water supply fluctuation characteristics by combining the disturbance correlation mapping table, performs swing deviation analysis based on water supply fluctuation characteristics, and determines the cold capacity gap value and the order of cold storage intervention. Transitional water supply module: By using the cold capacity gap value and the priority of cold storage intervention, the cold storage and cold release branch is driven in advance and the opening of the main pipe bypass is adjusted to establish a transitional water supply mode; Gap Correction Module: In transitional water supply mode, continuously monitor the temperature value of the constant temperature chamber water supply, analyze the degree of deviation, perform reverse compensation, and convert it into gap correction coefficients and map them to the disturbance correlation mapping table; The reversal control module continuously monitors the chamber temperature of the rapid cooling chamber to determine whether it has entered the permitted opening range. If it has, it uses the gap correction coefficient and disturbance correlation mapping table to generate a rapid cooling valve graded closing sequence and a cold storage tank energy storage return curve and implements them to smoothly revert from the transition water supply mode to the conventional constant pressure water supply mode.

2. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of obtaining the pressure drop depth of the main pipe is as follows: The alignment reference point for obtaining the rapid cooling valve opening event signal is the alignment zero point. Based on the alignment zero point, the main pipe pressure sequence and the constant temperature chamber temperature sequence are extracted to obtain the steady-state sequence before the event and the response sequence after the event. The arithmetic mean of the main pipe pressure sequence segments in the pre-event steady-state sequence is used to obtain the steady-state pressure baseline value. Traverse the main pipe pressure sequence segments in the response sequence after the event, extract the minimum water supply pressure value, calculate the difference between the steady-state pressure benchmark value and the minimum water supply pressure value, and obtain the main pipe pressure drop depth of the fast cooling valve opening event.

3. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of obtaining the temperature recovery time lag is as follows: The arithmetic mean of the isothermal cavity temperature sequence segments in the pre-event steady-state sequence is calculated to obtain the steady-state temperature reference value. The maximum and minimum values ​​of the isothermal cavity temperature sequence segments are read and the difference is calculated as the pre-steady-state temperature amplitude. Centered on the steady-state temperature reference value, and with the previous steady-state temperature amplitude as the interval width, a previous steady-state temperature envelope interval is constructed to search for the temperature recovery time and the temperature deviation start time. The difference between the temperature recovery time and the temperature deviation start time is used as the temperature deviation recovery time lag of the fast cooling valve opening event.

4. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of predicting water supply fluctuation characteristics is as follows: Read the process stage identifier of each chamber, identify the rapid cooling request event signal and obtain the chamber operating condition combination corresponding to this rapid cooling request event. Use it as an index key to retrieve the disturbance association mapping table and obtain the corresponding typical temperature deviation recovery time delay and typical main pipe pressure drop depth. The typical temperature deviation recovery time lag corresponding to this rapid cooling request event is directly taken as the duration of the water supply temperature. The central controller calls the pre-built pressure-temperature disturbance transmission model, inputs the typical main pipe pressure drop depth corresponding to this rapid cooling request event into the pressure-temperature disturbance transmission model, and outputs the water supply temperature deviation that this rapid cooling request event will cause. The duration of the water supply temperature and the magnitude of the water supply temperature deviation are used as the characteristics of water supply fluctuation in this rapid cooling request event.

5. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 4, characterized in that: The process of identifying fast cooling request event signals is as follows: The chambers whose process stages are vapor deposition or sputtering are marked as constant temperature chambers, and the chambers whose process stages are vapor deposition and will enter the rapid cooling stage after the vapor deposition stage are marked as potential rapid cooling chambers. The remaining execution time is calculated by subtracting the duration of the vapor deposition stage in the potential fast cooling cavity from the already executed duration. The chamber number of the potential fast cooling chamber, the chamber number of the constant temperature chamber, and the process stage of the constant temperature chamber are combined to obtain the chamber condition combination to be matched at the current moment. This combination is used as an index key to retrieve the typical temperature deviation recovery time delay from the disturbance association mapping table. When the remaining execution time drops to less than or equal to the typical temperature recovery time lag, it is determined that an impending fast cooling request event signal has been captured.

6. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of performing swing deviation analysis is as follows: Calculate the current thermal margin of the thermostatic cavity and compare the water supply temperature deviation of this rapid cooling request event with the current thermal margin of the thermostatic cavity. When the deviation of the supply water temperature is greater than the current heat capacity margin, the excess temperature runout is obtained by subtracting the current heat capacity margin from the deviation of the supply water temperature; the excess temperature runout is combined with the mass flow rate of the constant temperature cavity cooling water and the specific heat capacity of the cooling water to calculate the cooling capacity gap value. If the cold energy deficit is less than or equal to the rated maximum cooling capacity of the cold storage tank, the cold storage intervention priority is to activate only the cold storage and cooling branch; if the cold energy deficit is greater than the rated maximum cooling capacity of the cold storage tank, the cold storage intervention priority is to first activate the cold storage and cooling branch to release all the cold energy and generate the main bypass valve.

7. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of mapping to the perturbation association mapping table is as follows: The deviation of the monitored constant temperature chamber water supply temperature value is analyzed and converted into a gap correction coefficient. The gap correction coefficient is then bound to the chamber operating condition combination corresponding to the current rapid cooling request event and stored in the disturbance event history database. When the number of gap correction coefficients stored under the same chamber operating condition combination is greater than or equal to two, the arithmetic mean is calculated to obtain the gap correction coefficient corresponding to the chamber operating condition combination.

8. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 7, characterized in that: The process of converting to gap correction coefficient is as follows: The average unsuppressed disturbance power was calculated by combining the temperature of the constant temperature chamber supply water with the mass flow rate of the constant temperature chamber cooling water. If the cooling capacity deficit is greater than zero, the average unsuppressed disturbance power is calculated as a ratio to the cooling capacity deficit, and the deficit correction coefficient is obtained by adding 1 to the ratio. If the cooling capacity deficit is zero, the deficit correction coefficient is directly assigned the value of 1.

9. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of generating the rapid cooling valve staged closure sequence is as follows: The total duration of the rapid cooling valve staged shutdown sequence is obtained by multiplying the gap correction coefficient of this rapid cooling request event with the typical temperature deviation recovery time delay; The total duration is calculated as a ratio to the fixed sampling period of the temperature transmitter, and then rounded down to obtain the number of shut-off positions, M.

10. A centralized water-cooled thermal management system suitable for surface vacuum coating production lines according to claim 1, characterized in that: The process of generating the energy storage return water curve of the cold storage tank is as follows: If the cold storage intervention order is to only activate the cold storage and release branch, then the first treatment curve and the second treatment curve will form the cold storage tank energy storage return water curve. If the cold storage intervention sequence is to first activate the cold storage and release branch to release all the cold and generate the main pipe bypass valve, then the first segment processing curve and the second segment processing curve constitute the cold storage tank energy storage return water curve; and obtain the main pipe bypass valve opening degree, and use the total duration of the rapid cooling valve staged closing sequence as the benchmark to linearly close the main pipe bypass opening degree to the fully closed state.

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