Semiconductor high-value waste liquid fine classification collection management and control device

Abstract

The application relates to the field of waste liquid classification, in particular to a fine classification and collection control device for semiconductor high-value waste liquid, which comprises a total washing pool, a recycling washing pool, a branch control valve arranged between the total washing pool and the recycling washing pool, and a plurality of shunt pipes communicated with one side of the total washing pool through connecting heads, a pipeline opening and closing assembly, a piano key interlocking assembly and a pressure-driven triggering assembly are arranged in the branch control valve; the pipeline opening and closing assembly comprises a plurality of plugging blocks matched with the shunt pipes, the plugging blocks are inserted into plugging grooves in the shunt pipe walls, and the plugging blocks are used for controlling the on-off of the shunt pipes. Through the application, when the existing multi-way branch pipes are connected to the shunt valve body, the remaining closed branch pipes continuously feed liquid when a single-way branch pipe is conducted, the pressure in the pipe continuously accumulates, the pipe is prone to leakage and even pipe wall damage, the waste liquid pressure fluctuation is prone to cause valve body misoperation, manual control is prone to cause multi-way simultaneous opening to cause waste liquid flow and other problems.

Description

Technical Field

[0001] This invention relates to the field of waste liquid classification, and in particular to a device for the refined classification, collection and management of high-value semiconductor waste liquid. Background Technology

[0002] Semiconductor manufacturers producing display panels, discrete devices, and optoelectronic devices (with process linewidths ≥ 0.2μm and solvent grades SEMIG1-G3) generate process waste liquids containing high-value organic solvents during core processing steps such as etching, developing, cleaning, and rinsing. Taking isopropanol-containing process waste liquid as an example, this type of waste liquid has the following significant characteristics: Uniform solvent system: The main cleaning solvent used in each section of the semiconductor production line is organic, with the content fluctuating between 20% and 80%, and the water content fluctuating between 20% and 80%, which is fundamentally different from the "multi-component mixture" characteristic of general chemical wastewater. Impurity sources are controllable: Since the entire process is completed in a cleanroom environment and all solvents used are high-purity electronic-grade chemicals, the impurities in the waste liquid mainly come from the process (such as etching solution residue, photoresist residue, metal ion leaching, etc.), and the impurity content is far lower than that of ordinary chemical plant wastewater. The characteristic pollutants are clearly identified: the waste liquid may contain small amounts of NMP, DMSO, sodium hydroxide, etc., and also contains metal and metalloid ions such as sodium, magnesium, lithium, potassium, gallium, arsenic, and boron, as well as inorganic anions such as sulfate and nitrate. Among them, boron is a characteristic pollutant that is unique to and most sensitive to the semiconductor industry. Organic solvents have high recycling value: For example, the above-mentioned electronic-grade IPA has high procurement costs and its content in waste liquid can reach 20% to 80%, which has extremely high economic value for resource recycling.

[0003] Semiconductor manufacturing processes generate various high-value organic waste liquids such as IPA, NMP, PGMEA, and DMSO, along with aqueous and acidic / alkaline waste liquids. Currently, waste liquid pipelines in existing plants generally employ a mixed-discharge model, with various waste liquids flowing into the same pipeline. While the mixed waste liquids can be separated and recovered through downstream processes, this significantly increases the separation difficulty, requiring additional treatment equipment and leading to a continuous increase in energy consumption, reagent costs, and maintenance costs. Implementing refined classification and control at the source of waste liquid generation can reduce the pressure on downstream separation processes and decrease equipment and energy investment.

[0004] For example, in patent application number CN200910220034.0, entitled "Multi-Chemical Classification and Recycling System," a multi-chemical classification and recycling system is described. After the chemicals are used in the process unit, the system automatically classifies and discharges or recycles the various chemicals to be discharged. It is commonly used in semiconductor manufacturing equipment such as developing equipment, cleaning equipment, and etching equipment. This system includes a wastewater collection pipe, a classification discharge pipe, a rotary motor, and a rotary support arm. The wastewater collection pipe is mounted on the rotary support arm, and the rotary support arm is connected to the rotary motor on the classification discharge pipe support arm via bearings. The rotary motor drives the rotary support arm to rotate, causing the wastewater collection pipe to align with the corresponding classification discharge pipe. This invention can overcome the waste from direct discharge and solve the problems of recycling and classifying the discharge of multiple chemicals. However, existing wastewater classification and recycling devices still have some shortcomings.

[0005] The existing equipment has a diversion component at the machine outlet to collect different waste liquids separately, avoiding chemical reactions and sedimentation problems after the waste liquids are mixed. After multiple branch pipes are connected to the diversion valve body, only one channel is opened to discharge the waste liquid, while the remaining closed branch pipes continue to receive waste liquid. The pressure inside the pipes gradually accumulates, and when the pressure is too high, the branch pipes and valve ports are at risk of pressure overload. When the waste liquid water pressure fluctuates, the valve body is prone to accidental activation. During manual operation, multiple channels may also be opened simultaneously, causing waste liquid cross-flow. The above problems affect the operational stability of the waste liquid diversion device. Summary of the Invention

[0006] In view of this, the purpose of this invention is to propose a refined classification, collection, and control device for high-value semiconductor waste liquid, in order to solve the technical problem in the prior art where "only one channel is opened to discharge waste liquid, resulting in continuous influx of waste liquid, overload of the pipe pressure, and easy mis-activation of the valve body." Furthermore, manual operation may also lead to the simultaneous opening of multiple channels, causing waste liquid cross-contamination.

[0007] To achieve the above objectives, the present invention provides a device for the refined classification, collection and management of high-value semiconductor waste liquid, including a main washing tank, a recycling washing tank, a sub-control valve disposed between the main washing tank and the recycling washing tank, and several diversion pipes connected to one side of the main washing tank via connectors. The sub-control valve is provided with a pipeline opening and closing assembly, a key interlock assembly and a pressure-driven triggering assembly. The pipeline opening and closing assembly includes a plugging block that corresponds to each branch pipe. The plugging block is inserted into the plugging groove on the pipe wall of the branch pipe to control the opening and closing of the branch pipe. The key interlocking assembly includes a sliding key switch plate, on which a toggle block and a locking block are offset. The key interlocking assembly is linked with the pipeline opening and closing assembly to limit only one branch pipe to be open at any given time, while the other branch pipes are closed. The pressure-driven triggering component includes a piston drive structure connected to the diversion pipe, used to drive the corresponding pipeline opening and closing component to operate according to the pressure difference of the waste liquid medium in the diversion pipe.

[0008] Furthermore, the pipeline opening and closing assembly also includes an array of sleeves, which are disposed inside the control valve, and the diversion pipe is correspondingly inserted through the sleeves; The sealing groove is formed on the pipe wall of the diversion pipe and the sleeve, and the sealing block is slidably disposed inside the control valve; A sliding rod is fixedly connected to the outer wall of the sealing block. The sliding rod is sleeved on the retraction shaft, and the retraction shaft is fixedly connected to the inner wall of the sub-control valve.

[0009] Furthermore, the key interlock assembly also includes a lever, which is disposed on one side of the slide bar. A slide rail is provided on the inner wall of the control valve, and the key switch plate is slidably disposed in the slide rail. The toggle blocks on each key switch plate are staggered along the height direction, and the locking blocks are correspondingly staggered. When one of the levers slides and presses against the corresponding lever, it causes the key switch plate to slide along the slide rail, causing the locking block on the key switch plate to block the other levers.

[0010] Furthermore, the key switch board is provided with three parts: the toggle on the first key switch board is located at the top in the height direction, the toggle on the second key switch board is located in the middle in the height direction, and the toggle on the third key switch board is located at the bottom in the height direction.

[0011] Furthermore, the piston drive structure includes a pressure detection tube, a first piston, a drive rod, and a drive ring. The pressure detection tube is fixedly connected to the outer wall of the diverter tube. The first piston is slidably disposed inside the pressure detection tube. One end of the first piston is fixedly connected to the drive rod, and the end of the drive rod is fixedly connected to the drive ring. The drive ring is sleeved on the lever. The drive rod is located inside the pressure detection tube and its rod wall is fitted with a first spring.

[0012] Furthermore, the sub-control valve is also provided with a threshold pressure relief and return assembly. The threshold pressure relief and return assembly includes a threshold pressure relief pipe, a second piston, and a return pipe connector. The threshold pressure relief pipe is connected to the side wall of the pressure detection pipe. The second piston is slidably disposed inside the threshold pressure relief pipe. A second spring is disposed between the second piston and the inner wall of the threshold pressure relief pipe. The return pipe connector is opened on the side wall of the threshold pressure relief pipe. When the pressure inside the closed pipe rises to the threshold, the second piston is pushed by the fluid to one side of the return pipe joint, and the liquid returns to the upstream source through the return pipe connected by the return pipe joint.

[0013] Furthermore, the elastic coefficient of the second spring is greater than that of the first spring, so that under normal conditions, the waste liquid pressure will preferentially push the first piston to trigger the pipeline to open, rather than pushing the second piston to open and release pressure.

[0014] Furthermore, a connecting block is fixedly connected to one side of the outer wall of each key switch plate, and a connecting block is correspondingly provided on the inner wall of the control valve. A third spring is provided between the connecting block and the connecting block for resetting the key switch plate after sliding.

[0015] Furthermore, a door panel is bolted to one side of the outer wall of the sub-control valve, and a sliding groove is provided on the door panel. One end of the lever passes through the sliding groove and is exposed outside the sub-control valve. The control valve is a modular integrated structure, which can be disassembled and assembled by bolting the door panel to the valve body, and is installed as a whole at the machine outlet position.

[0016] Furthermore, the pressure-driven triggering component uses the different fluid pressures generated by different media waste liquids in the diversion pipe to drive the corresponding pipeline opening and closing components to operate, thereby realizing the automatic identification and diversion of different types of waste liquids.

[0017] The beneficial effects of this invention are: 1. This invention uses a key interlock component and a pressure-driven trigger component installed in the control valve. Different media in the waste liquid in the diversion pipe generate different fluid pressures, which act on the piston drive structure and automatically drive the corresponding pipe opening and closing components. At the same time, the toggle block and locking block set off on the key switch plate slide in conjunction with the key switch plate when a single lever slides. The locking block mechanically holds the other levers, realizing a pure mechanical interlock where only a single diversion pipe is open at the same time and the other diversion pipes are closed. Compared with the diversion method of manual control or electronic detection, this invention can realize automatic identification and diversion conduction based on the pressure of the waste liquid medium without manual operation. The mechanical limit structure ensures single-path conduction, effectively avoiding the cross-flow and mixing of waste liquid caused by the simultaneous opening of multiple paths. The overall reliability is high, the structure is simple, and it is suitable for corrosive waste liquid environments. 2. This invention utilizes a threshold pressure relief and reflux assembly. The threshold pressure relief pipe is connected to the side wall of the pressure detection pipe. A second spring is installed between the second piston and the inner wall of the threshold pressure relief pipe. When the pressure in the closed pipeline rises above the spring force threshold of the second spring, the second piston is pushed by the fluid to one side of the reflux pipe connector. The waste liquid in the closed pipeline returns to the upstream source through the reflux pipe connector and its connected reflux pipe, achieving automatic pressure relief and reflux. This invention enables waste liquid to automatically reflux to the upstream source when the pressure in the closed pipeline is too high, eliminating the need for an additional independent pressure relief valve. This helps avoid pipeline overload. The pressure-relieved waste liquid flows back to the corresponding upstream tank, preventing waste liquid waste and mixing with other waste liquids. Furthermore, the sub-control valve uses a modular integrated structure and is installed at the machine outlet, requiring no modification to the original main pipeline, resulting in minimal modification and convenient installation. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the waste liquid fine classification, collection and control device in this invention; Figure 2 This is another schematic diagram of the waste liquid fine classification, collection and control device in this invention; Figure 3 This is a schematic diagram of the waste liquid classification and control valve in this invention; Figure 4 This is a schematic diagram of the internal structure of the waste liquid classification and control valve in this invention; Figure 5 This is another schematic diagram of the internal structure of the waste liquid classification and control valve in this invention; Figure 6 This is a schematic diagram of the waste liquid classification and control valve control assembly in this invention; Figure 7 This is another schematic diagram of the waste liquid classification and control valve control component in this invention; Figure 8 This is a schematic diagram of the pressure drive component in this invention.

[0020] The diagram is marked as follows: 1. Main washing tank; 2. Recycling washing tank; 3. Sub-control valve; 301. Slide rail; 302. Sleeve; 303. Connecting block; 4. Door panel; 401. Slide groove; 5. Connector; 501. Diverter pipe; 6. Pressure detection pipe; 601. First piston; 602. Drive rod; 603. First spring; 7. Threshold pressure relief pipe; 701. Second piston; 702. Second spring; 703. Return pipe connector; 8. Toggle lever; 9. Key switch plate; 901. Toggle block; 902. Locking block; 10. Drive ring; 11. Sealing block; 12. Slide rod; 13. Retraction shaft; 14. Connecting block; 15. Third spring. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments.

[0022] It should be noted that, unless otherwise defined, the technical or scientific terms used in this invention should have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0023] The first aspect of this invention proposes a device for the refined classification, collection, and management of high-value semiconductor waste liquid, such as... Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 As shown, it includes a main washing tank 1, a recycling washing tank 2, a sub-control valve 3 located between the main washing tank 1 and the recycling washing tank 2, and several diversion pipes 501 connected to one side of the main washing tank 1 through a connector 5. The sub-control valve 3 is equipped with a pipeline opening and closing assembly, a key interlock assembly and a pressure-driven trigger assembly. The pipeline opening and closing assembly includes a plugging block 11 that corresponds to each branch pipe 501. The plugging block 11 is inserted into the plugging groove on the pipe wall of the branch pipe 501 and is used to control the opening and closing of the branch pipe 501. The key interlock assembly includes a sliding key switch plate 9, on which a toggle block 901 and a locking block 902 are offset. The key interlock assembly is linked with the pipeline opening and closing assembly to limit only one branch pipe 501 to be open at the same time, while the other branch pipes 501 are closed. The pressure-driven triggering component includes a piston drive structure connected to the diversion pipe 501, which is used to drive the pipe opening and closing component of the corresponding pipe to operate according to the pressure difference of the waste liquid medium in the diversion pipe 501.

[0024] In this embodiment, under normal operating conditions, there is no waste liquid pressure in each diversion pipe 501, each sealing block 11 is inserted into the sealing groove, all three diversion pipes 501 are closed, the key switch plate 9 is also stopped in the initial position, and the locking block 902 does not block any lever 8. When waste liquid is introduced into a certain diversion pipe 501, as the waste liquid flows along the pipe, the pressure will be transmitted from the pipe wall of the diversion pipe 501 into the pressure detection pipe 6, pressing against the first piston 601 inside. When the waste liquid pressure is large enough to exceed the elastic force of the first spring 603, the first piston 601 will push the drive rod 602 forward. The drive ring 10 at the end of the drive rod 602 is fitted onto the lever 8, directly pushing the lever 8 forward. As soon as the lever 8 moves, it first touches the lever block 901 on the key switch plate 9, pushing the key switch plate 9 out along the slide rail 301. The locking block 902 on the plate moves to the bottom of the other two levers 8, firmly blocking them and preventing them from moving. At the same time, the levers 8 drive the slide bar 12 to slide along the shrink shaft 13, and the sealing block 11 is pulled out of the sealing groove. This branch pipe 501 is now open, and the waste liquid flows into the recycling washing tank 2. Because the levers 8 are locked, the sealing blocks 11 remain inserted in the sealing groove, and the pipes remain closed. In this way, only one pipe is in operation at any given time, while the other pipes are completely sealed, preventing the waste liquid from mixing together. If a closed pipe continues to receive waste liquid, the pressure will rise higher and higher. When the pressure exceeds the elastic force of the second spring 702, the second piston 701 will be pushed open, and the waste liquid will flow back to the upstream waste liquid source through the return pipe joint 703, automatically releasing the pressure and preventing the pipe from bursting. Once the waste liquid is drained and the pressure disappears, the first spring 603 pushes the first piston 601 back, the lever 8 retracts, the third spring 15 springs the key switch plate 9 back to its original position, the locking block 902 is released, the sealing block 11 is reinserted into the sealing groove, and all pipelines are restored to closure. Different types of waste liquids have different densities and pressures. Whichever pipeline has enough pressure to trigger the condition first will be opened. The system automatically identifies the type of waste liquid, eliminating the need for workers to manually tighten valves and preventing the wrong pipeline from being opened.

[0025] As one implementation method, such as Figure 2 , Figure 3 As shown, the pipeline opening and closing assembly also includes an array of sleeves 302, which are disposed inside the control valve 3, and the diversion pipe 501 is correspondingly inserted into the sleeve 302. The sealing groove is formed on the pipe wall of the diversion pipe 501 and the sleeve 302, and the sealing block 11 is slidably disposed in the control valve 3; A slide rod 12 is fixedly connected to the outer wall of the sealing block 11. The slide rod 12 is sleeved on the retraction shaft 13, and the retraction shaft 13 is fixedly connected to the inner wall of the sub-control valve 3.

[0026] In this embodiment, the diversion pipe 501 is inserted into the sleeve 302, which positions the diversion pipe 501 in place, preventing the pipeline from deviating. The sealing groove is simultaneously opened on the pipe walls of the diversion pipe 501 and the sleeve 302, and the grooves of the two pipe walls are interconnected. When the sealing block 11 is inserted, it is equivalent to passing through both pipe walls at the same time, making it less prone to leakage. The sliding rod 12 is fitted onto the retraction shaft 13 and can only slide straight back and forth along the direction of the shaft. The sealing block 11 is inserted and removed back and forth with the sliding rod 12, and the direction is always straight, without being crooked, so it will not get stuck in the groove. The insertion and removal action is stable and reliable.

[0027] As one implementation method, such as Figure 3 , Figure 4 As shown, the piano key interlock assembly also includes a lever 8, which is located on one side of the slide bar 12. The inner wall of the control valve 3 is provided with a slide rail 301, and the piano key switch plate 9 is slidably disposed in the slide rail 301. The toggle blocks 901 on each key switch plate 9 are staggered along the height direction, and the locking blocks 902 are correspondingly staggered. When one of the levers 8 slides and presses against the corresponding lever 901, it causes the key switch plate 9 to slide along the slide rail 301, so that the locking block 902 on the key switch plate 9 abuts against the other levers 8.

[0028] In this embodiment, the lever 8 and the slide bar 12 are integrated. When the lever 8 slides forward, the slide bar 12 slides forward as well, and the blocking block 11 retracts accordingly. This is the opening action. The lever blocks 901 are staggered in height, so each lever 8 can only touch the corresponding lever block 901 at its own height and cannot touch the lever blocks 901 on other key switch plates 9. Therefore, it will not accidentally open other pipelines. The locking blocks 902 are also staggered. Once a key switch plate 9 is pushed out, the locking block 902 on it falls exactly on the movement path of the other levers 8, blocking the bottom of the other levers 8. The other levers 8 cannot move even if they want to. The one-to-one opening and multiple locking is achieved entirely by mechanical hard-pressing, without the need for electricity, and has high reliability.

[0029] As one implementation method, such as Figure 4 As shown, the key switch plate 9 has three parts. The toggle block 901 on the first key switch plate 9 is located at the top in the height direction, the toggle block 901 on the second key switch plate 9 is located in the middle in the height direction, and the toggle block 901 on the third key switch plate 9 is located at the bottom in the height direction.

[0030] In this embodiment, the three key switch plates 9 correspond to the three diverter pipes 501, and the three toggle blocks 901 are installed at the upper, middle and lower heights respectively. Each lever 8 only contacts the corresponding toggle block 901 at the corresponding height. The three paths do not interfere with each other. The staggered arrangement of the heights allows the three key switch plates 9 to be installed side by side in the valve body, which does not take up space and has a small overall size, which can fit perfectly into the narrow position of the machine outlet.

[0031] As one implementation method, such as Figure 5 , Figure 6 As shown, the piston drive structure includes a pressure detection tube 6, a first piston 601, a drive rod 602, and a drive ring 10. The pressure detection tube 6 is fixedly connected to the outer wall of the diverter tube 501. The first piston 601 is slidably disposed inside the pressure detection tube 6. One end of the first piston 601 is fixedly connected to the drive rod 602, and the end of the drive rod 602 is fixedly connected to the drive ring 10. The drive ring 10 is sleeved on the lever 8. The drive rod 602 is located inside the pressure detection tube 6 and the rod wall is fitted with a first spring 603.

[0032] In this embodiment, the pressure detection tube 6 is directly connected to the diversion tube 501. The pressure of the waste liquid is directly transmitted into the pressure detection tube 6 and acts on the first piston 601. After the first piston 601 is pushed, it pushes the drive rod 602 forward. The drive ring 10 is sleeved on the lever 8, which converts the fluid pressure into the linear motion of the lever 8, triggering the opening and closing of the pipeline. The first spring 603 is used for reset. As soon as the waste liquid pressure disappears, it pushes the first piston 601 back to its original position, and the pipeline closes again. The first spring 603 of each pipeline can be equipped with different elastic forces to match the pressure characteristics of different waste liquids, so that whichever pipeline has enough waste liquid pressure to trigger the condition will be opened.

[0033] As one implementation method, such as Figure 6 , Figure 7 As shown, the sub-control valve 3 is also provided with a threshold pressure relief and return assembly. The threshold pressure relief and return assembly includes a threshold pressure relief pipe 7, a second piston 701 and a return pipe connector 703. The threshold pressure relief pipe 7 is connected to the side wall of the pressure detection pipe 6. The second piston 701 is slidably disposed in the threshold pressure relief pipe 7. A second spring 702 is disposed between the second piston 701 and the inner wall of the threshold pressure relief pipe 7. The return pipe connector 703 is opened on the side wall of the threshold pressure relief pipe 7. When the pressure inside the closed pipeline rises to the threshold, the second piston 701 is pushed by the fluid to one side of the return pipe joint 703, and the liquid returns to the upstream source through the return pipe connected by the return pipe joint 703.

[0034] In this embodiment, when a certain branch pipe 501 is locked and closed, but waste liquid is still continuously flowing into it, the pressure inside the pipe will gradually increase. The pressure is transmitted into the pressure detection pipe 6 and then pushes against the second piston 701. When the pressure is high enough to overpower the second spring 702, the second piston 701 is pushed towards the tail of the threshold pressure relief pipe 7. Once the second piston 701 slides past the opening of the return pipe connector 703, the return pipe connector 703 is connected to the inner cavity of the pressure detection pipe 6. The waste liquid in the closed pipe returns to the upstream waste liquid source along the return pipe connector 703 and the return pipe, and the pressure is released. This prevents the pipe and valve from bursting. The released waste liquid returns to its corresponding upstream tank along the original path, ensuring that no waste liquid is wasted and that it does not mix with other waste liquids.

[0035] As one implementation method, such as Figure 6 As shown, the elastic coefficient of the second spring 702 is greater than that of the first spring 603, so that under normal conditions, the waste liquid pressure will preferentially push the first piston 601 to trigger the pipeline to open, rather than pushing the second piston 701 to open and release pressure.

[0036] In this embodiment, the two springs have different elastic forces, forming a two-stage trigger: the first stage is a lower waste liquid pressure, which is only enough to push the first piston 601 to open the corresponding pipeline for normal drainage; the second stage is a higher pressure, which is enough to push the second piston 701 to open the pressure relief and return channel. During normal drainage, the waste liquid pressure is only enough to reach the first stage, and the pipeline is opened normally without accidentally triggering the pressure relief. Only when the pipeline is locked and the pressure reaches the second stage will the pressure relief channel open. The two-stage triggers do not interfere with each other.

[0037] As one implementation method, such as Figure 3 , Figure 4 As shown, a connecting block 14 is fixedly connected to one side of the outer wall of each key switch plate 9, and a connecting block 303 is correspondingly provided on the inner wall of the control valve 3. A third spring 15 is provided between the connecting block 303 and the connecting block 14 for resetting the key switch plate 9 after sliding.

[0038] In this embodiment, the third spring 15 is sandwiched between the connecting block 303 and the connecting block 14, and is specifically responsible for springing the key switch plate 9 back to its original position. When the waste liquid in the conductive path is drained, the pressure disappears, and the lever 8 moves backward, the third spring 15 pushes the key switch plate 9 back along the slide rail 301, the locking block 902 comes out from the bottom of the other levers 8, the interlock is released, and all pipelines are restored to a state where they can be triggered.

[0039] As one implementation method, such as Figure 1 , Figure 2As shown, a door panel 4 is bolted to one side of the outer wall of the sub-control valve 3. A slide groove 401 is provided on the door panel 4. One end of the lever 8 passes through the slide groove 401 and is exposed outside the sub-control valve 3. The sub-control valve 3 is a modular integrated structure. It can be disassembled and assembled by bolting the door panel 4 to the valve body. The whole assembly is installed at the machine outlet position.

[0040] As one implementation method, such as Figure 1 , Figure 2 As shown, a door panel 4 is bolted to one side of the outer wall of the control valve 3. A slide groove 401 is provided on the door panel 4, and one end of the lever 8 passes through the slide groove 401 and is exposed outside the control valve 3. The control valve 3 is a modular integrated structure. It can be disassembled and assembled by bolting the door plate 4 to the valve body, and is installed as a whole at the machine outlet position.

[0041] In this embodiment, the control valve 3 is a modular unit, with the door plate 4 bolted to the valve body. When maintenance is required, simply unscrew the bolts on the door plate 4, remove the door plate 4, and the key interlock assembly, pipeline opening and closing assembly, and pressure drive trigger assembly inside are all exposed for easy maintenance. The entire valve body is installed at the machine outlet position. Only the two ends of several branch pipes 501 need to be connected to the drain outlet of the main washing tank 1 and the connection head of the recovery washing tank 2, respectively. There is no need to change the original main pipeline in the plant area, so the modification is small and it can be used immediately after installation. The slide groove 401 also guides the sliding of the lever 8, ensuring that the lever 8 always moves along the groove and avoids deviation.

[0042] As one implementation method, such as Figure 5 , Figure 6 As shown, the pressure-driven triggering component uses the different fluid pressures generated by different media waste liquids in the diversion pipe 501 to drive the corresponding pipeline opening and closing components to operate, thereby realizing the automatic identification and diversion of different types of waste liquids.

[0043] In this embodiment, different types of waste liquids have different densities and flow characteristics, resulting in different pressures within the pipeline. Based on these physical properties, the triggering conditions of each piston drive structure are set to match the pressure of the corresponding waste liquid. The waste liquid itself opens the corresponding pipeline, while other pipelines without waste liquid have no pressure, the pistons remain stationary, and the pipelines remain closed. The entire system relies entirely on the pressure of the waste liquid itself for identification and diversion, without electronic sensors or electrical control systems. It is a purely mechanical structure, corrosion-resistant, and durable, making it well-suited for the humid and corrosive environment of semiconductor wet processing workshops. (It should be noted that this device can also be equipped with an online detection unit as an auxiliary monitoring method. The online detection unit is a moisture sensor or refractive index sensor, arranged at the outlet section of each diversion pipe or the inlet of the recycling washing tank. Taking the IPA organic waste liquid pipeline as an example, IPA waste...) The refractive index of the liquid is within a fixed range. When water-based waste liquid is mixed in, the refractive index of the mixture will change significantly. A moisture sensor or refractive index sensor can determine whether water-based waste liquid has been mixed into the organic waste liquid by detecting the moisture content or refractive index characteristic signal of the waste liquid in real time. The online detection unit (moisture sensor or refractive index sensor) is set in the main waste liquid pipeline to collect the moisture or refractive index characteristic signal of the waste liquid online and transmit the signal to the controller. The controller is electrically connected to a multi-way reversing valve. The controller determines whether water-based waste liquid has been mixed into high-value organic waste liquid based on the received characteristic signal, and outputs a control signal to drive the multi-way reversing valve to complete the pipeline reversal and guide the waste liquid into the corresponding collection container. Furthermore, the controller can also be connected to an alarm device. When an abnormal and continuous exceedance of waste liquid components is detected, or when the valve malfunctions, the alarm device is triggered to issue an alarm signal.

[0044] It should be emphasized that this online detection unit is only used for purity monitoring and alarm, and does not participate in the opening and closing control of the multi-way valve. The flow diversion and conduction of the multi-way valve is still completed by a purely mechanical pressure triggering structure.

[0045] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the invention (including the claims) is limited to these examples; within the framework of the invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in the details for the sake of brevity.

[0046] This invention is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A refined classification, collection, and control device for high-value semiconductor waste liquid, comprising a main washing tank (1), a recycling washing tank (2), a control valve (3) disposed between the main washing tank (1) and the recycling washing tank (2), and a plurality of diversion pipes (501) connected to one side of the main washing tank (1) via connectors (5), characterized in that: The sub-control valve (3) is equipped with a pipeline opening and closing assembly, a piano key interlock assembly and a pressure drive trigger assembly; The pipeline opening and closing assembly includes a plugging block (11) that corresponds to each branch pipe (501). The plugging block (11) is inserted into the plugging groove on the pipe wall of the branch pipe (501) to control the opening and closing of the branch pipe (501). The key interlock assembly includes a sliding key switch plate (9), on which a toggle block (901) and a lock block (902) are offset. The key interlock assembly is linked with the pipeline opening and closing assembly to limit only one branch pipe (501) to be open at the same time, while the other branch pipes (501) are closed. The pressure-driven triggering component includes a piston drive structure connected to the diversion pipe (501), which is used to drive the pipe opening and closing component of the corresponding pipe to operate according to the pressure difference of the waste liquid medium in the diversion pipe (501).

2. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 1, characterized in that, The pipeline opening and closing assembly also includes an array of sleeves (302), which are disposed inside the control valve (3), and the diversion pipe (501) is correspondingly inserted inside the sleeve (302); The sealing groove is formed on the pipe wall of the diversion pipe (501) and the sleeve (302), and the sealing block (11) is slidably disposed in the control valve (3); The outer wall of the sealing block (11) is fixedly connected to a slide rod (12), which is sleeved on the shrink shaft (13). The shrink shaft (13) is fixedly connected to the inner wall of the control valve (3).

3. The semiconductor high-value waste liquid refined classification, collection, and management device according to claim 2, characterized in that, The key interlock assembly also includes a lever (8), which is located on one side of the slide bar (12). The inner wall of the control valve (3) is provided with a slide rail (301), and the key switch plate (9) is slidably located in the slide rail (301). The toggle blocks (901) on each key switch plate (9) are staggered along the height direction, and the locking blocks (902) are correspondingly staggered. When one of the levers (8) slides and presses the corresponding lever (901), it causes the key switch plate (9) to slide along the slide rail (301), so that the locking block (902) on the key switch plate (9) abuts against the other levers (8).

4. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 3, characterized in that, The key switch board (9) is provided with three pieces. The toggle block (901) on the first key switch board (9) is located at the top in the height direction, the toggle block (901) on the second key switch board (9) is located in the middle in the height direction, and the toggle block (901) on the third key switch board (9) is located at the bottom in the height direction.

5. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 3, characterized in that, The piston drive structure includes a pressure detection tube (6), a first piston (601), a drive rod (602), and a drive ring (10). The pressure detection tube (6) is fixedly connected to the outer wall of the diverter tube (501). The first piston (601) is slidably disposed inside the pressure detection tube (6). One end of the first piston (601) is fixedly connected to the drive rod (602). The end of the drive rod (602) is fixedly connected to the drive ring (10). The drive ring (10) is sleeved on the lever (8). The drive rod (602) is fitted with a first spring (603) on the rod wall inside the pressure detection tube (6).

6. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 5, characterized in that, The sub-control valve (3) is also provided with a threshold pressure relief return assembly, which includes a threshold pressure relief pipe (7), a second piston (701) and a return pipe connector (703). The threshold pressure relief pipe (7) is connected to the side wall of the pressure detection pipe (6). The second piston (701) is slidably disposed in the threshold pressure relief pipe (7). A second spring (702) is disposed between the second piston (701) and the inner wall of the threshold pressure relief pipe (7). The return pipe connector (703) is opened on the side wall of the threshold pressure relief pipe (7). When the pressure in the closed pipeline rises to the threshold, the second piston (701) is pushed by the fluid to one side of the return pipe joint (703), and the liquid returns to the upstream source through the return pipe connected by the return pipe joint (703).

7. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 6, characterized in that, The elastic coefficient of the second spring (702) is greater than that of the first spring (603), so that under normal conditions, the waste liquid pressure will preferentially push the first piston (601) to trigger the pipeline to open, rather than push the second piston (701) to open and release pressure.

8. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 3, characterized in that, A connecting block (14) is fixedly connected to one side of the outer wall of each key switch plate (9), and a connecting block (303) is correspondingly provided on the inner wall of the sub-control valve (3). A third spring (15) is provided between the connecting block (303) and the connecting block (14) for resetting the key switch plate (9) after sliding.

9. The semiconductor high-value waste liquid refined classification, collection, and management device according to claim 5, characterized in that, A door panel (4) is bolted to one side of the outer wall of the sub-control valve (3). A sliding groove (401) is provided on the door panel (4). One end of the lever (8) passes through the sliding groove (401) and is exposed outside the sub-control valve (3). The sub-control valve (3) is a modular integrated structure. It can be disassembled and assembled by bolting the door plate (4) to the valve body, and is installed as a whole at the machine outlet position.

10. The semiconductor high-value waste liquid fine classification, collection and management device according to claim 1, characterized in that, The pressure-driven triggering component uses the different fluid pressures generated by different media waste liquids in the diversion pipe (501) to drive the corresponding pipeline opening and closing components to operate, thereby realizing the automatic identification and diversion of different types of waste liquids.

Images