An angle compensating device

Abstract

The application discloses an angle compensation device and belongs to the technical field of angle alignment, which comprises a motor, the driving end of the motor is provided with a screw rod, a base, the surface of the base is formed with a plurality of concave arc surfaces, the screw rod is installed in the base, a sliding seat, the sliding seat is connected with the screw rod through a moving block, the moving block is matched with the screw rod, an upper seat, the upper seat is formed with an arc convex, the arc convex is matched with the concave arc surface, the upper seat is connected with the sliding seat through a swing block, a grating ruler, the grating ruler is installed on the side surface of the upper seat, and a reading head, the reading head is installed on the side surface of the base and corresponds to the grating ruler. The angle compensation device can realize the nanometer-level precision angle fine adjustment through the arc surface matched with the real-time angle feedback of the grating ruler, can stably meet the strict requirements of the semiconductor detection field on the angle positioning of the radian table, and effectively improves the accuracy of the subsequent detection process and the product yield.

Description

Technical Field

[0001] This invention belongs to the field of angle alignment technology, and particularly relates to an angle compensation device. Background Technology

[0002] In the semiconductor manufacturing industry, especially in visual inspection applications that require extremely high precision, such as surface defects and pattern alignment, in order to ensure the consistency and repeatability of image acquisition, it is usually necessary to use a specially designed, mechanically precise angle compensation device to perform fine-tuning and compensation operations on the arc stage that carries the wafer.

[0003] Most angle compensation devices currently available on the market or used in existing production lines are primarily designed to achieve coarse, repetitive coordinate positioning of the arc stage. Their internal drive and feedback mechanisms are relatively simple, thus failing to effectively and stably perform high-precision, micro-angle compensation and correction tasks for the arc stage's rotation axis. This critical functional deficiency directly and significantly restricts and affects the arc stage's final overall positioning accuracy and angle consistency during high-speed operation and precision positioning. Consequently, its overall performance in actual industrial production environments often falls short of the stringent technical standards preset based on nanometer or submicron level processes. Specifically, the problem manifests as insufficient control precision in existing compensation devices, making it impossible to reliably and stably ensure that the arc stage's rotational motion precisely meets the extremely precise engineering performance indicator that "for every complete 360-degree mechanical cycle of the drive screw, the corresponding angular displacement of the stage surface is exactly one degree." This, at the microscopic scale, limits the accuracy of subsequent testing processes and product yield. Summary of the Invention

[0004] This invention overcomes the shortcomings of the prior art and provides an angle compensation device to solve the problems existing in the prior art.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: an angle compensation device, comprising...

[0006] An electric motor, wherein a lead screw is provided at the drive end of the motor, and the lead screw is driven;

[0007] A base, the surface of which is formed with several concave arc surfaces, and the lead screw is installed inside the base and passes through the base;

[0008] A sliding seat is connected to the lead screw via a moving block. The moving block cooperates with the lead screw to drive the sliding seat to move along the length of the lead screw.

[0009] The upper seat has an arc-shaped protrusion that fits against the concave arc surface. The upper seat is connected to the sliding seat via a swing block to move the upper seat along the arc direction of the arc-shaped protrusion.

[0010] A scale, which is mounted on the side of the upper seat to swing with the upper seat;

[0011] A reading head is mounted on the side of the base and corresponds to the grid ruler to determine the swing angle of the upper seat.

[0012] In a preferred embodiment of the present invention, a protrusion is provided on the base, and a circular through hole is formed on the protrusion to install the lead screw.

[0013] In a preferred embodiment of the present invention, bearing seats are provided at both ends of the circular through hole to install the lead screw through the bearings.

[0014] In a preferred embodiment of the present invention, a fixed guide block is embedded in the base, and a motion guide block is installed on the upper seat. Both the fixed guide block and the motion guide block are provided with arc-shaped guide grooves to guide the motion of the upper seat.

[0015] In a preferred embodiment of the present invention, an insert is mounted on the sliding seat, and an mounting hole is formed on the insert. The swing block is connected to the insert via a connecting shaft, and the swing block swings with the connecting shaft as the center point.

[0016] In a preferred embodiment of the present invention, a mounting cavity is formed on one side of the sliding seat, and the insert is a cylindrical structure that is clamped and embedded in the mounting cavity.

[0017] In a preferred embodiment of the present invention, there are two concave arc surfaces formed on both sides of the base, and the number of arc protrusions is the same as that of the concave arc surfaces, and they are formed on the side of the upper seat.

[0018] In a preferred embodiment of the present invention, a circuit board is mounted on one side of the base, and the circuit board is electrically connected to the motor and the reading head.

[0019] In a preferred embodiment of the present invention, the base is connected to the housing of the motor via a plurality of connecting rods.

[0020] This invention addresses the shortcomings of the prior art and has the following beneficial effects:

[0021] The angle compensation device of this invention uses a motor to drive a lead screw to rotate, causing a moving block and a sliding seat to move linearly along the length of the lead screw. During the movement of the sliding seat, a swing block drives the upper seat, allowing the upper seat to swing precisely along the arc direction by utilizing the fit between the arc-shaped protrusion and the concave arc surface of the base. Combined with real-time position detection by a scale and reading head, the actual swing angle of the upper seat can be directly read. After the angle signal is fed back to the control terminal, the motor's driving action can be precisely corrected, ultimately achieving high-precision micro-angle compensation for the upper seat. Compared to traditional coarse-grained angle compensation structures, this device, through arc-shaped surface fitting guidance and real-time angle feedback from the scale, can achieve nanometer-level precision angle fine-tuning, stably meeting the stringent requirements for arc stage angle positioning in the semiconductor testing field, effectively improving the accuracy of subsequent testing processes and product yield. Attached Figure Description

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0023] Figure 1 This is a schematic diagram of the overall structure of a preferred embodiment of the present invention;

[0024] Figure 2 This is a top view of a preferred embodiment of the present invention;

[0025] Figure 3 for Figure 2 Sectional view of plane AA;

[0026] Figure 4 This is an exploded view of a preferred embodiment of the present invention;

[0027] Figure 5 for Figure 4 Enlarged view of section B;

[0028] Figure 6 This is a schematic diagram of the base structure of a preferred embodiment of the present invention;

[0029] In the diagram: 10, Motor; 11, Lead screw; 20, Base; 201, Concave arc surface; 30, Sliding seat; 301, Mounting cavity; 31, Moving block; 40, Upper seat; 401, Arc-shaped protrusion; 41, Swing block; 50, Grid ruler; 60, Reading head; 70, Protrusion block; 701, Circular through hole; 80, Bearing seat; 90, Fixed guide block; 100, Moving guide block; 110, Arc-shaped guide groove; 120, Embedded part; 130, Connecting shaft; 140, Circuit board; 150, Connecting rod. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention.

[0031] This embodiment provides an angle compensation device. The device drives a lead screw 11 to rotate via a motor 10, causing a moving block 31 and a sliding seat 30 to move linearly along the length of the lead screw 11. During the movement of the sliding seat 30, a swing block 41 drives an upper seat 40, allowing the upper seat 40 to swing precisely along the arc direction through the contact between the arc protrusion 401 and the concave arc surface 201 of the base 20. Combined with the real-time position detection of the grating ruler 50 and the reading head 60, the actual swing angle of the upper seat 40 can be directly read. After the angle signal is fed back to the control terminal, the driving action of the motor 10 can be precisely corrected, ultimately achieving high-precision micro-angle compensation for the upper seat 40. Compared to traditional coarse-grained angle compensation structures, this device, through arc-surface contact guidance and real-time angle feedback from the grating ruler 50, can achieve nanometer-level precision angle fine-tuning, stably meeting the stringent requirements for arc stage angle positioning in the semiconductor testing field, effectively improving the accuracy of subsequent testing processes and product yield.

[0032] Combination Figures 1 to 6 As shown, the angle compensation device disclosed in this embodiment mainly comprises a motor 10, a base 20, a sliding seat 30, an upper seat 40, a high-precision scale 50, and a matching reading head 60. Specifically, the output drive end of the motor 10 is directly coaxially connected to a lead screw 11, which can accurately and directly drive the lead screw 11 to rotate around its axis after the motor 10 starts. The base 20 serves as the main support and guide body of the device, and its interior is machined with a cavity 301 for mounting the lead screw 11. A bearing seat 80 is used to install the bearing for positioning the lead screw 11. At the same time, the top upper surface of the base 20 is machined to form a continuous concave arc surface 201. The lead screw 11 is installed through the main body of the base 20 along its axial direction, and both ends are reliably supported.

[0033] As a key transmission and motion component, the sliding seat 30 is connected to the lead screw 11 at its bottom via a moving block 31. The moving block 31 has an internal threaded hole that matches the thread parameters of the lead screw 11, thus forming a highly efficient threaded transmission pair with the lead screw 11. When the motor 10 drives the lead screw 11 to rotate forward or reverse, the moving block 31 will generate a precise linear displacement along the axial direction of the lead screw 11 due to the threaded engagement, thereby driving the sliding seat 30, which is fixedly connected to it, to perform reciprocating linear motion precisely along the length direction of the lead screw 11.

[0034] In this embodiment, the upper seat 40 is located above the sliding seat 30 and is the final actuator for its swinging motion. On the bottom surface of the upper seat 40 facing the base 20, an arc-shaped protrusion 401 matching the concave arc surface 201 is machined. This arc-shaped protrusion 401 and the concave arc surface 201 of the base 20 are highly compatible in shape and size, directly contacting each other and forming a sliding pair, allowing the upper seat 40 to smoothly slide relative to the base 20 along a predetermined arc trajectory. Simultaneously, the upper seat 40 is connected to the lower sliding seat 30 via a hinged swing block 41. One end of the swing block 41 is hinged to the sliding seat 30, and the other end is connected to the upper seat 40, forming a movable connection mechanism. Therefore, when the sliding seat 30 moves horizontally in a straight line under the drive of the lead screw 11, it will convert the straight line motion into a push-pull action through the swing block 41, thereby driving the upper seat 40 to swing precisely along the arc direction defined by the concave arc surface 201 with the contact point between its arc protrusion 401 and the concave arc surface 201 of the base 20 as the swing center, producing a precise pitch or yaw motion.

[0035] To achieve precise feedback and closed-loop control of angular position, a high-precision grating ruler 50 is securely mounted on the side facade of the upper seat 40. This means that the grating ruler 50 will move completely with the upper seat 40, replicating any swing displacement of the upper seat 40 in real time. Correspondingly, the reading head 60 is securely mounted on the side bracket of the base 20. Its mounting position is calibrated to ensure a constant and minimal reading gap with the grating ruler 50, which swings with the upper seat 40, and is directly aligned with the scale area of ​​the grating ruler 50. During device operation, the reading head 60 can continuously and in real time scan and read the grating signal generated by position changes on the grating ruler 50, thereby instantly and accurately detecting the specific position of the grating ruler 50 (i.e., the upper seat 40), and finally calculating and outputting the precise value of the current actual swing angle of the upper seat 40, providing core feedback data for the system's angle compensation control.

[0036] Specifically, in this embodiment, an upwardly protruding protrusion 70 is constructed on the base 20. A circular through hole 701 is provided at the center of the protrusion 70. The lead screw 11 is finally installed and precisely positioned in the device by passing through this circular through hole 701. To ensure the smooth and stable operation of the lead screw 11, bearing seats 80 are firmly installed at both ends of the circular through hole 701. High-precision rolling bearings are respectively installed inside these two symmetrically arranged bearing seats 80. In this way, the entire lead screw 11 is reliably and rotatably supported on the structure of the protrusion 70 through these bearings at both ends. This bearing support design fundamentally ensures the high stability of the lead screw 11 during the entire rotational movement, thereby effectively avoiding any unexpected movement or offset of the lead screw 11 in the radial direction. This plays a crucial role in maintaining and improving the positioning accuracy of the entire system.

[0037] In this embodiment, a fixed guide block 90 is embedded and installed on the base 20, while a motion guide block 100 is installed at the corresponding position on the upper seat 40. Both guide blocks are machined with arc-shaped guide grooves 110: the arc-shaped guide grooves 110 are consistent with the curvature of the concave arc surface 201 and the arc-shaped protrusion 401. These two arc-shaped guide grooves 110 are strictly aligned and cooperate with each other during assembly, forming a set of guiding and limiting systems. During the entire process of the upper seat 40 performing the swinging action, this system can further precisely guide and mechanically constrain its motion trajectory, thereby ensuring that the swinging path of the upper seat 40 always strictly follows the preset arc curve. This design effectively prevents any directional deviation that may occur during the swinging process, significantly improving the overall accuracy and reliability of the entire mechanism when performing angle compensation.

[0038] In addition, an embedded component is installed on the sliding seat 30. This embedded component 120 has a pre-drilled circular mounting hole. One end of the swing block 41 is rotatably connected to the mounting hole on the embedded component 120 via a connecting shaft 130. This design allows the swing block 41 to perform adaptive swinging within a certain range, with the connecting shaft 130 as its central pivot. This degree of freedom is crucial, cleverly adapting to the difference in motion between the linear reciprocating motion of the sliding seat 30 and the arc swinging motion required by the upper seat 40. Through this adaptive swinging, the motion difference generated between different motion modes is effectively absorbed, ensuring a smooth and stable motion transmission process from the sliding seat 30 to the upper seat 40, completely avoiding any possible jamming or interference.

[0039] To ensure the long-term stability of the aforementioned motion transitions, the slide seat 30 has a built-in mounting cavity 301 machined on its side. The aforementioned insert 120 is designed as a cylindrical structure, and its installation method is not a simple placement, but rather a reliable clamping and fixing strategy that securely embeds and locks it within the mounting cavity 301. This robust mounting structure not only ensures the positional stability of the insert 120 itself during long-term operation, but more importantly, it ensures that the connecting shaft 130, as the core of rotation, can maintain extremely high positional accuracy. This fundamentally avoids any slight positional deviation of the connecting shaft 130 during frequent movements, thereby guaranteeing the durable and precise operating performance of the entire guiding and oscillating mechanism.

[0040] In this embodiment, two concave arc surfaces 201 are designed, which are symmetrically and precisely formed on the two side surfaces of the base 20. Correspondingly, the number of arc protrusions 401 is exactly the same as that of the concave arc surfaces 201, also two, which are precisely formed on the two side positions of the upper seat 40. This symmetrical arc surface fitting structure on both sides can effectively further improve the stability and balance of the upper seat 40 during the entire swinging motion, thereby fundamentally avoiding the phenomenon of unilateral tilting or wobbling that may occur during operation, and ensuring smooth and reliable operation. In addition, a circuit board 140 integrating control functions is firmly installed on one side of the base 20. This circuit board 140 is connected to the motor 10 and the high-precision reading head 60 through wires. During operation, the reading head 60 is responsible for real-time detection and acquisition of precise angular position signals, and then transmits these key detection signals to the circuit board 140 for processing. Upon receiving a signal, the circuit board 140 immediately performs rapid calculations and comparisons based on a pre-set angle target value, and then outputs a corresponding, precisely adjusted drive control signal to the motor 10. Through this complete closed-loop signal control process, real-time and precise correction and compensation of angle deviations are achieved, greatly improving the system's control accuracy. Simultaneously, the base 20 is connected to the motor 10's housing via several connecting rods 150, thus stably fixing the motor 10 to the end position of the base 20. This design not only ensures the stability of the installation but, more importantly, ensures extremely high coaxiality between the motor 10's drive output end and the transmission lead screw 11, significantly reducing errors and losses during transmission, thereby comprehensively improving the transmission accuracy and reliability of the entire system.

[0041] The specific operating mechanism and implementation method of the angle compensation device in this embodiment can be described in detail as follows: First, when the lead screw 11 moves accurately by 1mm in the straight direction (the linear motion lead of the lead screw 11 has been precisely set to 1mm), the precise adjustment and correction of the built-in grid ruler 50 compensation mechanism ensures that the arc platform installed above the lead screw 11 can achieve precise swing on its upper surface, and the angle value of this swing is exactly adjusted to 1 degree. In this embodiment, the lead screw 11 itself has a linear structure, and its main body maintains a linear motion state, but only the upper surface of the lead screw 11 is performing a curved motion trajectory. Further analysis shows that within the standard cycle of one complete rotation of the motor 10, without compensation intervention, the actual swing angle that the upper seat 40 can achieve is not exactly 1 degree, but an infinite non-repeating decimal, which theoretically cannot be accurately represented by a finite decimal or fraction. To address this technical challenge, this embodiment innovatively introduces a highly efficient compensation mechanism. This mechanism, through a preset algorithm and physical structure adjustment, forces the upper surface of the upper seat 40 to precisely achieve a 1-degree swing angle at the end of each revolution of the motor 10. The specific implementation of this compensation effect relies on the following rigorously derived calculation formula:

[0042]

[0043] Where D is the feed amount of the lead screw 11; L is the distance from the inner center of the upper seat 40 to the center of the upper surface circle; is the angle of rotation of the upper surface after being fed by the lead screw 11; k is the compensation coefficient.

[0044] In practical use, the angle compensation device of this embodiment can calculate the required theoretical feed amount of the lead screw 11 based on the preset target swing angle and the above formula. The circuit board 140 outputs a drive signal to control the motor 10 to drive the lead screw 11 to rotate, which drives the sliding seat 30 to make linear motion. Then, the swing block 41 converts it into the swing motion of the upper seat 40 along the concave arc surface 201. During the movement, the grating ruler 50 swings synchronously with the upper seat 40. The reading head 60 collects the position signal of the grating ruler 50 in real time and transmits it to the circuit board 140. After the circuit board 140 calculates the current actual swing angle of the upper seat 40, it compares it with the target angle to obtain the deviation value. Then, based on the deviation value, it controls the motor 10 to correct the feed amount of the lead screw 11. Through closed-loop feedback correction, the angle deviation is gradually eliminated, and finally high-precision angle compensation is achieved.

[0045] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. An angle compensation device, characterized in that, include A motor (10) is provided with a lead screw (11) at its driving end, and the lead screw (11) is driven. The base (20) has several concave arc surfaces (201) formed on its surface. The lead screw (11) is installed inside the base (20) and passes through the base (20). A sliding seat (30) is connected to the lead screw (11) via a moving block (31). The moving block (31) cooperates with the lead screw (11) to drive the sliding seat (30) to move along the length direction of the lead screw (11). Upper seat (40), on which an arc-shaped protrusion (401) is formed, the arc-shaped protrusion (401) is in contact with the concave arc surface (201), the upper seat (40) is connected to the sliding seat (30) through a swing block (41) so as to move the upper seat (40) along the arc direction of the arc-shaped protrusion (401); A grid ruler (50) is mounted on the side of the upper seat (40) to swing with the upper seat (40); A reading head (60) is mounted on the side of the base (20) and corresponds to the grid ruler (50) to determine the swing angle of the upper seat (40).

2. The angle compensation device according to claim 1, characterized in that, The base (20) is provided with a protrusion (70) and a circular through hole (701) is formed on the protrusion (70) to install the lead screw (11).

3. The angle compensation device according to claim 2, characterized in that, Both ends of the circular through hole (701) are provided with bearing seats (80) to install the lead screw (11) through the bearings.

4. The angle compensation device according to claim 1, characterized in that, A fixed guide block (90) is embedded in the base (20), and a motion guide block (100) is installed on the upper seat (40). Both the fixed guide block (90) and the motion guide block (100) are provided with arc-shaped guide grooves (110) to guide the motion of the upper seat (40).

5. An angle compensation device according to claim 1, characterized in that, An insert (120) is mounted on the sliding seat (30), and an installation hole is formed on the insert (120). The swing block (41) is connected to the insert (120) through a connecting shaft (130), and the swing block (41) swings with the connecting shaft (130) as the center point.

6. An angle compensation device according to claim 5, characterized in that, The sliding seat (30) has a mounting cavity (301) on one side, and the insert (120) is a cylindrical structure that is clamped and embedded in the mounting cavity (301).

7. An angle compensation device according to claim 1, characterized in that, The number of concave arc surfaces (201) is two and they are formed on both sides of the base (20). The number of arc protrusions (401) is the same as the number of concave arc surfaces (201) and they are formed on the side of the upper seat (40).

8. An angle compensation device according to claim 1, characterized in that, A circuit board (140) is installed on one side of the base (20), and the circuit board (140) is electrically connected to the motor (10) and the reading head (60).

9. An angle compensation device according to claim 1, characterized in that, The base (20) is connected to the housing of the motor (10) via several connecting rods (150).

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