A high-throughput automatic sample loading device for electron microscopy

Abstract

The application relates to a high-throughput automatic sample loading device for an electron microscope, comprising: a sample tower for multi-azimuth layering storage of a plurality of sample carriers carrying samples; a shell constituting a containing cavity, a bottom wall of the shell being provided with a vertical valve, a side wall being provided with a horizontal valve, a lower portion of the vertical valve being provided with a positioning seat for placing the sample tower; a sample tower clamp jaw for grabbing and placing the sample tower; a vertical movement module for driving the sample tower clamp jaw to move in and out of the vertical valve in the vertical direction, and pressing the sample tower clamp jaw to clamp the sample tower and lift the sample tower into the containing cavity; a carrier clamp hand for clamping and placing the sample carrier; a horizontal movement module for driving the carrier clamp hand to move in and out of the horizontal valve in the horizontal direction to provide the electron microscope with the sample carrier; a rotary movement module for driving the sample tower clamp jaw to move in the circumferential direction; and a vacuum module in communication with the containing cavity for adjusting air pressure, loading a plurality of samples at a time, reducing the number of times of breaking vacuum and replacing samples, and reducing the waiting time of the electron microscope, so as to improve the data collection efficiency.

Description

Technical Field

[0001] This application relates to the field of electron microscopy, and in particular to a high-throughput automated sample loading device for electron microscopy. Background Technology

[0002] Currently, transmission electron microscopy (TEM) uses a sample holder as a carrier to fix and transport samples, which are then manually inserted into the microscope for observation. The sample holder can only transport 1-4 samples at a time, resulting in low throughput that is insufficient for large-scale section analysis experiments, and it also relies on specialized personnel for operation.

[0003] Existing cryo-electron microscopy (cryo-EM) autoloaders have limited capacity, allowing only a maximum of 12 samples to be loaded and stored at a time. In routine operations, after each batch of samples is observed and a sample needs to be changed, the vacuum environment in the sample chamber must be deactivated, and then re-vacuumed and stabilized after the sample change, resulting in a lengthy waiting period. This method not only leads to low overall sample loading efficiency but also easily causes biological sample contamination due to repeated vacuum environment switching, affecting the accuracy of experimental results. These existing technical defects and performance bottlenecks have become key obstacles restricting the iterative upgrading and widespread application of electron microscopes in the field of biological electron microscopy.

[0004] The design of bulk electron microscope sample loading devices adapted for transmission electron microscopy (TEM) has limitations. They can only meet the requirements for the synchronous loading and storage of single or small numbers of samples, and cannot meet the needs of high-throughput continuous detection. Summary of the Invention

[0005] The purpose of this application is to provide a high-throughput automated sample loading device for electron microscopy to solve the above-mentioned problems.

[0006] To achieve the above objectives, a high-throughput automated sample loading device for electron microscopy includes: A sample tower is used to store multiple sample carrier plates that support samples in a multi-directional stack. The shell forms a receiving cavity, the bottom wall of the shell is provided with a vertical valve, the side wall is provided with a horizontal valve, and a positioning seat for placing the sample tower is provided below the vertical valve; The sample tower gripper is used to grip and place the sample tower. A vertical motion module is used to drive the sample column gripper to move vertically in and out of the vertical valve, and press the sample column gripper to hold the sample column and lift it into the receiving cavity; A rotary motion module is used to drive the sample tower grippers to move in the circumferential direction; A plate clamp is used to hold the sample plate. A horizontal motion module is used to drive the plate holder to move horizontally in and out of the horizontal valve to provide the sample plate for the electron microscope; and A vacuum module, which is connected to the containment cavity to regulate air pressure.

[0007] As a preferred option, The sample tower gripper includes a gripper base, a gripper slider, a gripper connecting rod, a gripper return spring, a gripper trigger, a gripper drive, and multiple gripper arms. The gripper base is mounted on the vertical motion module. The gripper slider is slidably disposed on the gripper base. The gripper return spring abuts against the gripper slider and the gripper base to provide a return elastic force. The gripper slider has a shaped groove with a gripper locking position, a gripper transition position, and a gripper unlocking position. The two ends of the gripper connecting rod are respectively provided with a connecting rod pivot portion and a connecting rod sliding portion. The connecting rod pivot portion is pivotally connected to the gripper base, and the connecting rod sliding portion is slidably disposed on the shaped groove. The gripper has a sliding groove; the gripper drive is fixedly connected to the gripper slider, the upper ends of the multiple gripper arms are pivotally connected to the gripper drive, and the lower ends of the multiple gripper arms are free gripping ends; each set of gripper arms has a gripper arm limiting plate on its side, the gripper arm limiting plate is fixedly connected to the gripper seat, the gripper arm limiting plate has a gripper arm positioning groove, the gripper arm positioning groove includes a gripper arm gripping section and a gripper arm releasing section, the middle side of the gripper arm has a gripper arm positioning pin, the gripper arm positioning pin is slidably disposed in the gripper arm positioning groove, and the gripper trigger abuts and drives the gripper drive to slide relative to the gripper seat.

[0008] As a preferred option, The gripper slider is provided with a gripper slider guide rod, the gripper seat is provided with a gripper seat guide hole, the gripper slider guide rod is slidably disposed in the gripper seat guide hole, and the gripper return spring is sleeved on the outside of the gripper slider guide rod.

[0009] As a preferred option, The gripper seat is provided with a gripper trigger mounting part, the gripper trigger mounting part is provided with a gripper trigger mounting hole, the upper end of the gripper trigger can slide through the gripper trigger mounting hole, the side wall of the gripper trigger is provided with a gripper trigger spring boss, and a trigger reset spring is provided between the gripper trigger spring boss and the gripper trigger mounting part.

[0010] As a preferred option, The vertical motion module includes a vertical motor, a vertical lead screw and nut assembly, and a vertical mounting base. The vertical lead screw and nut assembly includes a vertical lead screw that is vertically disposed on the housing and partially inserted into the receiving cavity, and a vertical nut disposed on the vertical lead screw. The vertical mounting base is disposed on the vertical nut. The vertical motor is disposed on the outside of the housing and is connected to the vertical lead screw for transmission. The sample tower grippers are mounted on the vertical mounting base.

[0011] As a preferred option, The rotary motion module includes a rotary motor, a ball spline shaft, a drive gear, a driven gear, and a rotary shaft. The ball spline shaft is rotatably mounted on the housing and extends into the receiving cavity, parallel to the vertical lead screw. The rotary motor is located on the outside of the housing and is drivenly connected to the ball spline shaft. The drive gear is located on the ball spline shaft and can slide along the axial direction of the ball spline shaft while rotating with it. The rotary shaft is rotatably mounted on the vertical mounting base. The driven gear is fixed to the rotary shaft. The drive gear and the driven gear are drivenly engaged. The sample tower grippers are mounted on the rotary shaft.

[0012] As a preferred option, The horizontal motion module includes a horizontal motor, a horizontal lead screw and nut assembly, and a horizontal mounting base. The horizontal lead screw and nut assembly includes a horizontal lead screw horizontally disposed on the housing and partially inserted into the receiving cavity, and a horizontal nut disposed on the horizontal lead screw. The horizontal mounting base is disposed on the horizontal nut. The horizontal motor is disposed on the outside of the housing and is connected to the horizontal lead screw for transmission. The carrier plate clamp is mounted on the horizontal mounting base.

[0013] As a preferred option, The carrier plate gripper includes a gripper vacuum motor, a gripper screw and nut assembly, a gripper base, and two gripper fingers. The gripper base is mounted on the horizontal motion module. The gripper screw and nut assembly includes a gripper screw located on the gripper base and a gripper nut located on the gripper screw. The two gripper fingers are symmetrically arranged on both sides of the gripper screw, and the middle part of each gripper finger is pivotally connected to the gripper base. The gripper nut is connected to the rear end of each of the two gripper fingers via two gripper connecting rods. The front end of each gripper finger is a free gripping end. The gripper vacuum motor is connected to the gripper screw. The gripper screw drives the free gripping end of the gripper fingers to open or close to grip the sample carrier plate.

[0014] Preferably, the device also includes a number identification module, which is located on the outside of the housing. The housing has a transparent window, through which the number identification module identifies the number of the sample carrier plate held in the carrier plate clamp.

[0015] Preferably, the device also includes a device support structure disposed on the bottom surface of the housing.

[0016] Compared with the prior art, the embodiments of this application have at least the following beneficial effects: Loading multiple samples at once reduces the number of vacuum breaking and sample changing operations and electron microscope waiting time, thus improving data collection efficiency; This reduces the frequency of sample switching between atmospheric and vacuum environments, protects the samples, reduces external environmental contamination, and improves the accuracy of data collection. Attached Figure Description

[0017] Figure 1 A perspective view of an embodiment of a high-throughput automated sample loading device for electron microscopy, according to this application, is shown mounted on an electron microscopy system.

[0018] Figure 2 A perspective view of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0019] Figure 3 A perspective view (with the front cover removed) of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application is shown.

[0020] Figure 4 A perspective view of a sample column of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0021] Figure 5 A perspective view of the tower cover of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0022] Figure 6 A perspective view of a sample carrier plate according to one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0023] Figure 7 A perspective view of the sample column gripper of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0024] Figure 8 A cross-sectional view of the sample column gripper of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0025] Figure 9 It shows Figure 8 Enlarged view of section I in the middle.

[0026] Figure 10 The image shows a front view of the gripper slider of the sample column gripper of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application.

[0027] Figure 11 A perspective view of the gripper linkage of the sample column gripper of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0028] Figure 12 A perspective view of the gripper drive of the sample column gripper according to one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0029] Figure 13 The image shows a front view of the gripper seat of the sample column gripper according to one embodiment of a high-throughput automated sample loading device for electron microscopy.

[0030] Figure 14 The image shows a bottom view of the gripper seat of the sample column gripper according to one embodiment of a high-throughput automated sample loading device for electron microscopy.

[0031] Figure 15 A top view of the gripper seat of the sample column gripper of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0032] Figure 16 The image shows a front view of the gripper arm limiting plate (one of the embodiments) of a sample column gripper for an electron microscope according to one of the present application.

[0033] Figure 17 A perspective view of the gripper arm limiting plate (second of two) of the sample column gripper of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0034] Figure 18 , 19 Figures 20, 21, and 22 show a schematic diagram of the process of clamping and releasing the sample column by the sample column grippers of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application.

[0035] Figure 23 The image shows a front view (with the front cover removed) of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application.

[0036] Figure 24 A partial perspective view of the vertical motion module and the rotary motion module of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown. Figure 25 A perspective view of a portion of the structure of a rotary motion module of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown in this application. Figure 26 A perspective view of a plate holder of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0037] Figure 27 A partial front view (with top cover removed) of a plate holder of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application is shown.

[0038] Figure 28A perspective view of a portion of the structure of a horizontal motion module according to one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0039] Figure 29 A perspective view of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0040] Figure 30 A perspective view of a positioning base of one embodiment of a high-throughput automated sample loading device for electron microscopy is shown.

[0041] Figure 31 This paper shows a perspective view of the device support structure of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application.

[0042] Figure 32 The diagram shows a front view of the device support structure of one embodiment of a high-throughput automated sample loading device for electron microscopy according to this application.

[0043] Figure label: 100. High-throughput automated sample loading device; 200. Electron microscopy system; 1. Sample tower; 11. Tower base; 111. Carrier plate groove; 12. Tower base cover; 121. Gripper groove; 122. Trigger positioning hole; 13. Sample carrier plate; 131. Sample placement position; 132. Carrier plate positioning groove; 133. Carrier plate number. 2. Housing; 21. Receiving cavity; 22. Vertical valve; 221. Vertical valve drive mechanism; 23. Horizontal valve; 231. Horizontal valve drive mechanism; 24. Positioning seat; 241. Positioning seat bracket; 242. Positioning seat base plate; 2421. Positioning seat limiting groove; 243. Positioning seat support plate; 25. Numbering identification module; 251. Transparent window; 26. Device support structure; 261. Support upper seat; 262. Upper slider; 263. Support threaded shaft; 264. Support spring; 265. Spring pressure plate; 266. Lower slider; 267. Support base; 3. Sample tower gripper; 31. Gripper seat; 310. Gripper seat mounting hole; 311. Gripper seat guide hole; 312. Gripper trigger mounting part; 3121. Gripper trigger mounting hole; 32. Gripper slider; 321. Irregular groove; 3211. Gripper locking position; 3212. Gripper transition position; 3213. Gripper unlocking position; 322. Gripper slider guide rod; 323. Slider fixing post; 3231. First fixing pin hole; 33. Gripper return spring; 34. Gripper connecting rod; 341 342. Linkage pivot, 35. Linkage sliding part, 36. Gripper drive, 351. Gripper arm mounting part, 352. Drive fixing hole, 3521. Second fixing pin hole, 36. Gripper trigger, 361. Gripper trigger spring boss, 362. Trigger return spring, 363. Trigger anti-dislodgement part, 37. Gripper arm, 371. Gripper arm positioning pin, 38. Gripper arm limiting plate, 381. Gripper arm positioning groove, 3811. Gripper arm gripping section, 3812. Gripper arm releasing section; 4. Vertical motion module; 41. Vertical motor; 42. Vertical lead screw and nut assembly; 421. Vertical lead screw; 422. Vertical nut; 43. Vertical mounting base. 5. Rotary motion module; 51. Rotary motor; 52. Ball spline shaft; 53. Drive gear; 54. Driven gear; 55. Rotary shaft; 56. Intermediate gear. 6. Carrier plate gripper; 61. Gripper vacuum motor; 62. Gripper screw and nut assembly; 621. Gripper screw; 622. Gripper nut; 63. Gripper base; 64. Gripper finger; 641. Gripper finger pivot shaft; 65. Gripper connecting rod; 66. Carrier plate retainer. 7. Horizontal motion module; 71. Horizontal motor; 72. Horizontal lead screw and nut pair; 721. Horizontal lead screw; 722. Horizontal nut; 73. Horizontal mounting base. 8. Vacuum module; 81. Molecular pump; 82. Vacuum gauge. Detailed Implementation

[0044] The technical solution of this application will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this application and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not all of them.

[0045] This application defines certain directional terms. Unless otherwise stated, the directional terms used, such as "up," "down," "left," "right," "inner," and "outer," are used for ease of understanding and therefore do not constitute a limitation on the scope of protection of this application.

[0046] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0047] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0048] Reference Figure 1 A perspective view of a high-throughput automated sample loading device 100 for electron microscopy, according to this application, installed in an electron microscopy system 200 is shown. (Refer to...) Figures 2 to 3 As shown, a high-throughput automated sample loading device for electron microscopy according to this application is illustrated, comprising: a sample column 1, a shell 2, a sample column gripper 3, a vertical motion module 4, a rotary motion module 5, a carrier plate gripper 6, a horizontal motion module 7, and a vacuum module 8.

[0049] Reference Figures 4 to 6 As shown, sample tower 1 is used for multi-directional stacking and storage of multiple sample carrier plates that hold samples. In a specific implementation, as... Figure 4 As shown, the sample tower 1 includes a tower base 11 and a tower base cover 12 located at the upper end of the tower base 11. The tower base 11 has 13 vertically stacked carrier plate slots 111 arranged in a row every 90° along the circumference. Each carrier plate slot 111 holds one sample carrier plate 13, meaning the sample tower 1 can hold 52 sample carrier plates 13. Figure 5 As shown, the upper cover 12 of the tower base has four gripper grooves 121, and the center of the upper cover 12 of the tower base has a trigger positioning hole 122. Figure 6 As shown, each sample carrier plate 13 has 10 sample placement positions 131, and the sample tower 1 can hold 520 samples at a time. There are two carrier plate positioning slots 132 on both sides of the sample carrier plate 13, and the surface of the sample carrier plate 13 is marked with a carrier plate number 133.

[0050] Reference Figure 2 and 3As shown, the interior of the housing 2 forms a receiving cavity 21, which is used to accommodate and install the vertical motion module 4, the rotary motion module 5, and the horizontal motion module 7. A vertical valve 22 is provided on the bottom wall of the housing 2, and a horizontal valve 23 is provided on the side wall of the housing 2. The housing 2 is provided with a vertical valve drive mechanism 221 for opening and closing the vertical valve 22, and a horizontal valve drive mechanism 231 for opening and closing the horizontal valve 23. The vertical valve drive mechanism 221 and the horizontal valve drive mechanism 231 are preferably pneumatic drive assemblies, which have the advantages of stable operation, low vibration, and cleanliness. The horizontal valve 23 is used to communicate with the electron microscope sample chamber, through which the sample carrier plate 13 is fed into the electron microscope sample chamber. A positioning seat 24 for placing the sample tower 1 is provided below the vertical valve 22, and the vertical valve 22 allows the sample tower 1 to pass through.

[0051] The sample column gripper 3 is used to grip and release the sample column 1. The sample column 1 is gripped by pressing the sample column gripper 3, and the sample column 1 is released by pressing the sample column gripper 3 again.

[0052] In one specific embodiment of this application, reference is made to Figures 7 to 9 As shown, the sample tower gripper 3 includes: a gripper base 31, a gripper slider 32, a gripper return spring 33, a gripper connecting rod 34, a gripper drive component 35, a gripper trigger component 36, and four gripper arms 37. The gripper base 31 is mounted on the vertical motion module 4 and moves up and down under the drive of the vertical motion module 4. The gripper slider 32 is slidably disposed on the gripper base 31, and the gripper return spring 33 abuts against the gripper slider 32 and the gripper base 31 to provide a return elastic force. Figure 10 As shown, the gripper slider 32 is provided with an irregularly shaped groove 321, which has a gripper locking position 3211, a gripper transition position 3212, and a gripper unlocking position 3213. Figure 11 As shown, the gripper link 34 has a link pivot portion 341 and a link sliding portion 342 at both ends. Figure 8 As shown, the connecting rod pivot portion 341 is pivotally connected to the gripper seat 31, and the connecting rod sliding portion 342 is slidably disposed in the irregularly shaped groove 321. Figure 12 As shown, the gripper drive 35 has a cross-shaped structure and four gripper arm mounting parts 351.

[0053] The gripper drive unit 35 is fixedly connected to the gripper slider 32, specifically, as follows: Figure 10 As shown, the lower end face of the gripper slider 32 is provided with a slider fixing post 323, and the slider fixing post 323 is provided with a first fixing pin hole 3231, as shown. Figure 12As shown, the gripper drive 35 is provided with a drive fixing hole 352, and the side wall of the drive fixing hole 352 is provided with a second fixing pin hole 3521. The slider fixing post 323 is inserted into the drive fixing hole 352, and the gripper drive 35 and the gripper slider 32 are fixedly connected by a fixing pin passing through the first fixing pin hole 3231 and the second fixing pin hole 3521.

[0054] like Figure 7 and 12 As shown, the upper ends of the four gripper arms 37 are pivotally connected to the gripper drive unit 35, and the lower ends of the four gripper arms 37 are free gripping ends.

[0055] like Figure 7 , 8 As shown in Figures 13, 16, and 17, each gripper arm 37 has gripper arm limiting plates 38 on both sides. The gripper arm limiting plates 38 are fixedly connected to the gripper seat 31, and the gripper arm limiting plates 38 are provided with gripper arm positioning grooves 381. Figure 13 As shown, the gripper arm limiting plate 38 and the gripper seat 31 are integrally connected, as shown in the figure. Figure 16 and 17 The image shows that the gripper arm limiting plate 38 is fixedly installed on the gripper seat 31 by screws.

[0056] like Figure 8 , 13 As shown in Figures 16 and 17, the gripper arm positioning groove 381 includes a gripper arm gripping section 3811 and a gripper arm releasing section 3812. A gripper arm positioning pin 371 is provided on the middle side of the gripper arm 37. The gripper arm positioning pin 371 is slidably disposed in the gripper arm positioning groove 381. The gripper trigger member 36 abuts against the gripper drive member 35 and slides relative to the gripper seat 31.

[0057] like Figure 18 , 19 As shown in Figure 20, when the sample tower gripper 3 is in the released state, the sample tower gripper 3 moves down, the gripper trigger 36 abuts against the sample tower 1 to trigger the gripper slider 32 to slide relative to the gripper seat 31, the connecting rod sliding part 342 slides out of the gripper unlock position 3213 and slides to the gripper transition position 3212, under the elastic force of the gripper reset spring 33, the connecting rod sliding part 342 slides into the gripper locking position 3211, so that the gripper arm positioning pin 371 slides from the gripper arm release section 3812 to the gripper arm gripping section 3811, and the free gripping end of the gripper arm 37 clamps the sample tower 1.

[0058] like Figure 21 and 22As shown, when the sample tower 1 is held by the sample tower 3, the sample tower 3 and the sample tower 1 move downwards. The sample tower 1 descends to the positioning seat 24 and is restricted from moving. The sample tower 3 continues to move downwards. The cleaver trigger 36 abuts against the sample tower 1 to trigger the cleaver slider 32 to slide relative to the cleaver seat 31. The connecting rod sliding part 342 slides out of the cleaver locking position 3211 and slides to the cleaver transition position 3212. Under the elastic force of the cleaver reset spring 33, the connecting rod sliding part 342 slides to the cleaver unlocking position 3213, so that the cleaver arm positioning pin 371 slides from the cleaver arm gripping section 3811 to the cleaver arm releasing section 3812. The free gripping end of the cleaver arm 37 releases the sample tower 1.

[0059] The sample tower clamps in this application adopt a downward mechanical clamping method, which ensures stable and reliable clamping, reduces the number of electrically charged devices in the containment cavity, lowers the outgassing rate of parts in the containment cavity, reduces the vacuuming time of the device, and improves the operational safety performance of the equipment.

[0060] In this embodiment, there are four gripper arms 37, which correspond one-to-one with the four gripper slots 121 provided on the upper cover 12 of the tower base. In other embodiments, the number of gripper arms 37 can be two, three, five, or six or more.

[0061] Furthermore, such as Figure 10 and 15 As shown, the upper end of the gripper slider 32 is provided with a gripper slider guide rod 322, and the gripper seat 31 is provided with a gripper seat guide hole 311. The gripper slider guide rod 322 is slidably disposed in the gripper seat guide hole 311. The gripper return spring 33 is sleeved on the outside of the gripper slider guide rod 322 and abuts against the gripper slider 32 and the gripper seat 31. In this embodiment, there are two gripper slider guide rods 322, which improves the stability of the relative sliding between the gripper slider 32 and the gripper seat 31.

[0062] like Figure 15 As shown, the upper end of the gripper seat 31 is also provided with a gripper seat mounting hole 310 for mounting the gripper seat 31 to the vertical motion module 4.

[0063] Furthermore, in this embodiment, as Figure 8 , 9As shown in Figure 14, the gripper base 31 is provided with a gripper trigger mounting part 312, and the gripper trigger mounting part 312 is provided with a gripper trigger mounting hole 3121. The upper end of the gripper trigger 36 can slide through the gripper trigger mounting hole 3121. The side wall of the gripper trigger 36 is provided with a gripper trigger spring boss 361, and a trigger reset spring 362 is provided between the gripper trigger spring boss 361 and the gripper trigger mounting part 312. The upper end of the gripper trigger 36 is provided with a trigger anti-disengagement part 363 to prevent the gripper trigger from disengaging from the gripper trigger mounting hole 3121. During operation, the lower end of the gripper trigger 36 inserts into the trigger positioning hole 122 of the tower base cover 12. The gripper trigger spring boss 361 is limited by the trigger positioning hole 122. The gripper trigger 36 first overcomes the elastic force of the trigger reset spring 362, causing the upper end of the gripper trigger 36 to slide along the gripper trigger mounting hole 3121 and abut against the driving gripper drive 35. This causes the gripper slider 32 and the gripper drive 35 to move relative to the gripper base 31, thereby clamping or releasing the sample tower 1. When the sample tower gripper 3 clamps the sample tower 1, the trigger reset spring 362 provides a downward elastic force to the tower base cover 12 of the sample tower 1, making the sample tower 1 clamped more stably and improving the safety of the working process.

[0064] In some other embodiments, the upper end of the gripper trigger 36 is fixedly or detachably connected to the gripper drive 35 to achieve abutment drive.

[0065] The vertical motion module 4 is used to drive the sample tower clamp 3 to move in the vertical direction to enter and exit the receiving cavity 21 through the vertical valve 22, and to press the sample tower clamp 3 to clamp or release the sample tower 1. When the sample tower clamp 3 clamps the sample tower 1, it lifts the sample tower 1 into the receiving cavity 21.

[0066] In one specific embodiment of this application, such as Figure 23 and 24 As shown, the vertical motion module 4 includes a vertical motor 41, a vertical lead screw and nut assembly 42, and a vertical mounting base 43. The vertical lead screw and nut assembly 42 includes a vertical lead screw 421 vertically disposed on the housing 2 and partially inserted into the receiving cavity 21, and a vertical nut 422 disposed on the vertical lead screw 421. The vertical mounting base 43 is disposed on the vertical nut 422. The vertical motor 41 is disposed on the outside of the housing 2 and is drivenly connected to the vertical lead screw 421. In this embodiment, the vertical motor 41 is connected to the vertical lead screw 421 through a synchronous belt assembly. The sample tower gripper 3 is mounted on the vertical mounting base 43. Specifically, the gripper seat 31 of the sample tower gripper 3 is mounted to the vertical mounting base 43.

[0067] The rotary motion module 5 is used to drive the sample tower gripper 3 to move in the circumferential direction. Since the sample tower 1 has multiple rows of sample carrier plates 13 stacked vertically along the circumference, in order for the carrier plate gripper 6 to grasp the target sample carrier plate 13, the rotary motion module 5 drives the sample tower gripper 3 to move in the circumferential direction.

[0068] In one specific embodiment of this application, such as Figures 23 to 25 As shown, the rotary motion module 5 includes a rotary motor 51, a ball spline shaft 52, a drive gear 53, a driven gear 54, and a rotary shaft 55. The ball spline shaft 52 is rotatably mounted on the housing 2 and extends into the receiving cavity 21. The ball spline shaft 52 is parallel to the vertical lead screw 421. The rotary motor 51 is located on the outside of the housing 2 and is connected to the ball spline shaft 52. The drive gear 53 is located on the ball spline shaft 52 and can slide along the axial direction of the ball spline shaft 52 while rotating with it. The rotary shaft 55 is rotatably mounted on the vertical mounting base 43. The driven gear 54 is sleeved on the rotary shaft 55. The drive gear 53 and the driven gear 54 are engaged in a transmission. The sample tower gripper 3 is mounted on the rotary shaft 55 and rotates under the drive of the rotary shaft 55. To ensure smooth transmission between the drive gear 53 and the driven gear 54, an intermediate gear 56 is provided between them.

[0069] like Figure 23 As shown, the plate holder 6 is used to hold the sample plate 13, including picking up the sample plate 13 from the sample tower 1 and placing the sample plate 13 back into the sample tower 1. A horizontal motion module 7 is used to drive the plate holder 6 to move horizontally through the horizontal valve 23 into and out of the receiving cavity 21 to provide the sample plate for the electron microscope. The horizontal motion module 7 is installed perpendicularly and orthogonally to the vertical motion module 4 in the receiving cavity 21 of the housing 2. During inspection, the horizontal valve 23 is opened and connected to the electron microscope sample cavity. The horizontal motion module 7 drives the plate holder 6 to pick up the sample plate 13 from the sample tower 1 and deliver it into the electron microscope sample cavity. After inspection, the horizontal motion module 7 drives the plate holder 6 to remove the sample plate 13 from the electron microscope sample cavity and place it back into the sample tower 1.

[0070] In one specific embodiment of this application, such as Figure 23 , 26As shown in Figure 27, the carrier plate gripper 6 includes a gripper vacuum motor 61, a gripper screw and nut assembly 62, a gripper base 63, and two gripper fingers 64. The gripper base 63 is fixed to the horizontal motion module 7 and enters and exits the receiving cavity 21 through the horizontal valve 23 under the drive of the horizontal motion module 7. The gripper screw and nut assembly 62 includes a gripper screw 621 disposed on the gripper base 63 and a gripper nut 622 disposed on the gripper screw 621. The two gripper fingers 64 are symmetrically disposed on both sides of the gripper screw 621, and the middle part of the gripper fingers 64 is pivotally connected to the gripper base 63. Specifically, as shown in Figure 27... Figure 27 As shown, the gripper finger 64 has a gripper finger pivot shaft 641 in the middle, which is mounted on the gripper base 63. The gripper finger 64 pivots around the gripper finger pivot shaft 641. The gripper nut 622 is connected to the rear ends of the two gripper fingers 64 respectively through two gripper connecting rods 65. The front end of the gripper finger 64 is a free gripping end. The gripper vacuum motor 61 is connected to the gripper screw 621 and drives the gripper screw 621 to rotate, causing the gripper nut 622 to slide along the gripper screw 621. The gripper screw 621 drives the rear end of the gripper finger 64 to rotate around the gripper finger pivot shaft 641. The free gripping end of the gripper finger 64 opens or closes to grip the sample carrier plate 13.

[0071] Preferred, such as Figure 26 As shown, the gripper base 63 is also provided with a carrier plate holder 66, which is used to limit and hold the sample carrier plate 13.

[0072] In one specific embodiment of this application, such as Figure 23 , 26 As shown in Figures 27 and 28, the horizontal motion module 7 includes a horizontal motor 71, a horizontal lead screw and nut assembly 72, and a horizontal mounting base 73. The horizontal lead screw and nut assembly 72 includes a horizontal lead screw 721 horizontally disposed on the housing 2 and partially inserted into the receiving cavity 21, and a horizontal nut 722 disposed on the horizontal lead screw 721. The horizontal mounting base 73 is disposed on the horizontal nut 722. The horizontal motor 71 is disposed on the outside of the housing 2 and is connected to the horizontal lead screw 721 for transmission, driving the horizontal lead screw to rotate. Under the drive of the horizontal lead screw 721, the horizontal nut 722 drives the horizontal mounting base 73 to translate horizontally. The carrier plate gripper 6 is mounted on the horizontal mounting base 73. Specifically, the gripper vacuum motor 61 and the gripper base 63 are fixedly mounted on the horizontal mounting base 73.

[0073] The vertical motor 41, horizontal motor 71, and rotary motor 51 are all placed outside the receiving cavity 21, which improves the cleanliness of the receiving cavity 21, reduces the risk of sample contamination, reduces the outgassing rate of the parts in the receiving cavity 21, and reduces the vacuuming time of the device.

[0074] The vacuum module 8 is connected to the receiving cavity 21 to regulate the air pressure. In one specific embodiment of this application, as shown... Figure 2 As shown, the vacuum module includes a mechanical pump (not shown), a molecular pump 81, and a vacuum gauge 82. There can be one or more molecular pumps 81. Both the mechanical pump (not shown) and the molecular pump 81 are connected to the receiving cavity 21 and are used to evacuate the receiving cavity 21. The vacuum gauge 82 is used to monitor the air pressure in the receiving cavity 21 in real time. When evacuation is required, the vertical valve 22 and the horizontal valve 23 are closed, forming a closed chamber in the receiving cavity 21, and the vacuum module 8 is activated to evacuate the receiving cavity 21.

[0075] Because the high-throughput automated sample loading device used for electron microscopy delivers the sample carrier plate 13 into the electron microscope sample chamber under vacuum, the electron microscope does not need to break the vacuum and can maintain a vacuum state for detection, which greatly shortens the detection time and improves the data acquisition efficiency.

[0076] Reference Figure 29 As shown, the high-throughput automated sample loading device for electron microscopy also includes a number identification module 25. The number identification module 25 is located on the outside of the housing 2. The housing 2 has a transparent window 251. The number identification module 25 identifies the number of the sample carrier plate 13 held in the carrier plate clamp 6 through the transparent window 251 and transmits the detected information to the electron microscopy system.

[0077] Reference Figure 30 As shown, the positioning seat 24 includes a positioning seat bracket 241, a positioning seat base plate 242, and a positioning seat support plate 243. The positioning seat bracket 241 has a U-shaped structure and is installed on the housing 2 by screws. The positioning seat base plate 242 is installed on the positioning seat bracket 241 and is provided with a positioning seat limiting groove 2421. The positioning seat support plate 243 is slidably disposed in the positioning seat limiting groove 2421. The positioning seat support plate 243 is used to support the sample tower 1, and the positioning seat support plate 243 is positioned by sliding.

[0078] Reference Figure 31 and 32As shown, the high-throughput automated sample loading device for electron microscopy also includes a device support structure 26, located below the housing 2, for supporting the housing 2. The device support structure 26 includes an upper support seat 261, an upper slider 262, a support threaded shaft 263, a support spring 264, a spring pressure plate 265, a lower slider 266, and a support base 267. The upper support seat 261 contacts the bottom surface of the housing 2, providing stable support and leveling for the sample loading device. The upper slider 262 is horizontally slidable on the upper support seat 261, and the lower slider 266 is vertically movable on the support base 267. The upper end of the support spring 264 is connected to the upper slider 262; the lower end of the support threaded shaft 263 is connected to the lower slider 266; the spring pressure plate 265 is threaded to the support threaded shaft 263; and the lower end of the support spring 264 is sleeved on the support threaded shaft 263 and supported by the spring pressure plate 265. Through the combined movement of the upper and lower sliders, the support point can move freely in the plane, thus adapting to the support requirements of different positions at the bottom of the device. A support spring 264 is mounted on the support threaded shaft 263. By turning and adjusting the installation position of the spring pressure plate 265, the preload of the support spring 264 can be controlled, thereby adjusting the magnitude of the support force and the vertical height of the upper support base, thus better adapting to the docking electron microscope and improving the vacuum stability in the containment cavity.

[0079] When using the high-throughput automated sample loading device for electron microscopy, the device is installed on the microscope, and the horizontal valve 23 is connected to the inlet and outlet of the sample chamber of the electron microscope. The workflow is as follows: (1) Place the sample tower 1 on the positioning seat 24, close the horizontal valve 23, open the vertical valve 22, and drive the sample tower gripper 3 to move downward and pass through the vertical valve 22. By pressing the sample tower gripper 3, the sample tower 1 is grabbed. The vertical motion module 4 drives the sample tower gripper 3 to lift the sample tower 1 to the predetermined height in the receiving cavity 21.

[0080] (2) Close the vertical valve 22 and the vacuum module 8 will start working. Specifically, first start the mechanical pump to pump the pressure in the containment chamber 21 to about 10 Pa, and then start the molecular pump 81 until the pressure in the containment chamber drops to about.

[0081] (3) The horizontal motion module 7 drives the plate clamp 6 to move horizontally, clamp the target sample plate 13 from the sample tower 1, and transfer the sample plate 13 to the numbering and identification module 25 for numbering and identification.

[0082] (4) The horizontal valve 23 is opened, and the horizontal motion module 7 continues to smoothly send the sample carrier plate 13 into the electron microscope sample chamber. The carrier plate clamp 6 is docked with the electron microscope sample stage. Then it exits the electron microscope sample chamber and closes the horizontal valve 23, waiting for the electron microscope to complete the observation.

[0083] (5) After the test is completed, open the horizontal valve 23, the plate holder 6 re-enters the electron microscope sample chamber, take out the sample plate 13 and put it back in the corresponding position of the sample tower 1.

[0084] (6) Start the vertical motion module 4 to move the sample tower 1 one layer upward in the vertical direction, so that the next layer of sample carrier plate 13 reaches the clamping position. Repeat steps (3) to (5) until all sample carrier plates 13 in the current column have been observed.

[0085] (7) Start the rotating motion module 5, drive the sample tower 1 to rotate 90°, switch to the next column of carrier plates, and repeat steps (3) to (6) until all sample carrier plates 13 are observed.

[0086] (8) Close the horizontal valve 23 and open the vertical valve 22. The vertical motion module 4 drives the sample tower gripper 3 to move the sample tower downward and pass through the vertical valve 22. By cooperating with the positioning seat 24, the sample tower gripper 3 is pressed to release the sample tower 1, and the entire automatic sample loading process ends.

[0087] This application enables single-time centralized loading and stable storage of samples, reducing frequent sample changes and vacuum start-stop operations, significantly shortening the sample change interval, improving the efficiency of continuous data acquisition, effectively breaking through the limitations of traditional equipment, and laying a technical foundation for the long-term development and high-throughput scientific research applications of volume electron microscopy technology.

[0088] Although this application has been described in detail above with general descriptions, specific embodiments, and experiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of this application fall within the scope of protection claimed in this application.

Claims

1. A high-throughput automated sample loading device for electron microscopy, characterized in that, include: Sample tower (1), used for multi-directional stacked storage of multiple sample carrier plates (13) that carry samples; The shell (2) forms a receiving cavity (21). The bottom wall of the shell (2) is provided with a vertical valve (22) and the side wall is provided with a horizontal valve (23). Below the vertical valve (22) is a positioning seat (24) for placing the sample tower (1). Sample tower gripper (3) is used to grip and place the sample tower (1); The vertical motion module (4) is used to drive the sample tower gripper (3) to move in and out of the vertical valve (22) in the vertical direction, and press the sample tower gripper (3) to hold the sample tower (1) and lift it into the receiving cavity (21); A rotary motion module (5) is used to drive the sample tower gripper (3) to move in the circumferential direction; A plate clamp (6) is used to hold the sample plate (13). Horizontal motion module (7) for driving the plate holder (6) to move horizontally in and out of the horizontal valve (23) to provide the sample plate (13) for the electron microscope; and A vacuum module (8) is connected to the containment cavity (21) to regulate air pressure.

2. The high-throughput automated sample loading device for electron microscopy according to claim 1, characterized in that, The sample tower gripper (3) includes a gripper base (31), a gripper slider (32), a gripper return spring (33), a gripper connecting rod (34), a gripper drive (35), a gripper trigger (36), and multiple gripper arms (37). The gripper base (31) is mounted on the vertical motion module (4). The gripper slider (32) is slidably disposed on the gripper base (31). The gripper return spring (33) abuts against the gripper slider (32) and the gripper base. (31) provides a reset elastic force, the gripper slider (32) is provided with an irregular groove (321), the irregular groove (321) has a gripper locking position (3211), a gripper transition position (3212) and a gripper unlocking position (3213), the two ends of the gripper connecting rod (34) are respectively provided with a connecting rod pivot part (341) and a connecting rod sliding part (342), the connecting rod pivot part (341) is pivotally connected to the gripper seat (31), and the connecting rod sliding part (342) is pivotally connected to the gripper seat (31). The gripper is slidably disposed in the irregular groove (321); the gripper drive (35) is fixedly connected to the gripper slider (32), the upper ends of the plurality of gripper arms (37) are pivotally connected to the gripper drive (35), and the lower ends of the plurality of gripper arms (37) are free gripping ends; each set of gripper arms (37) is provided with a gripper arm limiting plate (38) on the side, the gripper arm limiting plate (38) is fixedly connected to the gripper seat (31), and the gripper arm limiting plate (38) is fixedly connected to the gripper seat (31). The gripper arm positioning groove (381) is provided. The gripper arm positioning groove (381) includes a gripper arm gripping section (3811) and a gripper arm releasing section (3812). A gripper arm positioning pin (371) is provided on the middle side of the gripper arm (37). The gripper arm positioning pin (371) is slidably disposed in the gripper arm positioning groove (381). The gripper trigger (36) abuts and drives the gripper drive (35) to slide relative to the gripper seat (31).

3. The high-throughput automated sample loading device for electron microscopy according to claim 2, characterized in that, The gripper slider (32) is provided with a gripper slider guide rod (322), the gripper seat (31) is provided with a gripper seat guide hole (311), the gripper slider guide rod (322) is slidably disposed in the gripper seat guide hole (311), and the gripper reset spring (33) is sleeved on the outside of the gripper slider guide rod (322).

4. The high-throughput automated sample loading device for electron microscopy according to claim 2, characterized in that, The gripper seat (31) is provided with a gripper trigger mounting part (312), the gripper trigger mounting part (312) is provided with a gripper trigger mounting hole (3121), the upper end of the gripper trigger (36) can slide through the gripper trigger mounting hole (3121), the side wall of the gripper trigger (36) is provided with a gripper trigger spring boss (361), and a trigger reset spring (362) is provided between the gripper trigger spring boss (361) and the gripper trigger mounting part (312).

5. The high-throughput automated sample loading device for electron microscopy according to claim 1, characterized in that, The vertical motion module (4) includes a vertical motor (41), a vertical lead screw and nut assembly (42), and a vertical mounting base (43). The vertical lead screw and nut assembly (42) includes a vertical lead screw (421) vertically disposed in the housing (2) and partially inserted into the receiving cavity (21) and a vertical nut (422) disposed on the vertical lead screw (421). The vertical mounting base (43) is disposed on the vertical nut (422). The vertical motor (41) is disposed on the outside of the housing (2) and is connected to the vertical lead screw (421) for transmission. The sample tower gripper (3) is mounted on the vertical mounting base (43).

6. The high-throughput automated sample loading device for electron microscopy according to claim 5, characterized in that, The rotary motion module (5) includes a rotary motor (51), a ball spline shaft (52), a drive gear (53), a driven gear (54), and a rotary shaft (55). The ball spline shaft (52) is rotatably mounted on the housing (2) and extends into the receiving cavity (21) parallel to the vertical lead screw (421). The rotary motor (51) is located on the outside of the housing (2) and is connected to the ball spline shaft (52) for transmission. The drive gear (53) is located on the ball spline shaft (52) and can slide along the axial direction of the ball spline shaft (52) while rotating with the ball spline shaft (52). The rotary shaft (55) is rotatably mounted on the vertical mounting base (43). The driven gear (54) is fixed to the rotary shaft (55). The drive gear (53) and the driven gear (54) are in transmission engagement. The sample tower gripper (3) is mounted on the rotary shaft (55).

7. The high-throughput automated sample loading device for electron microscopy according to claim 1, characterized in that, The horizontal motion module (7) includes a horizontal motor (71), a horizontal lead screw and nut assembly (72), and a horizontal mounting base (73). The horizontal lead screw and nut assembly (72) includes a horizontal lead screw (721) horizontally disposed on the housing (2) and partially inserted into the receiving cavity (21) and a horizontal nut (722) disposed on the horizontal lead screw (721). The horizontal mounting base (73) is disposed on the horizontal nut (722). The horizontal motor (71) is disposed on the outside of the housing (2) and is connected to the horizontal lead screw (721) for transmission. The carrier plate clamp (6) is mounted on the horizontal mounting base (73).

8. The high-throughput automated sample loading device for electron microscopy according to claim 7, characterized in that, The carrier plate gripper (6) includes a gripper vacuum motor (61), a gripper screw and nut assembly (62), a gripper base (63), and two gripper fingers (64). The gripper base (63) is mounted on the horizontal motion module (7). The gripper screw and nut assembly (62) includes a gripper screw (621) located on the gripper base (63) and a gripper nut (622) located on the gripper screw (621). The two gripper fingers (64) are symmetrically arranged on the gripper screw (621). The two sides of the clamping fingers (64) are pivotally connected to the clamping base (63) in the middle. The clamping nut (622) is connected to the rear end of the two clamping fingers (64) respectively through two clamping connecting rods (65). The front end of the clamping fingers (64) is a free clamping end. The clamping vacuum motor (61) is connected to the clamping screw (621). The clamping screw (621) drives the free clamping end of the clamping fingers (64) to open or close to clamp the sample carrier plate (13).

9. The high-throughput automated sample loading device for electron microscopy according to claim 1, characterized in that, It also includes a number identification module (25), which is located on the outside of the housing (2). The housing (2) has a transparent window (251), through which the number identification module (25) identifies the number of the sample carrier plate (13) held in the carrier plate clamp (6).

10. The high-throughput automated sample loading device for electron microscopy according to claim 1, characterized in that, Also includes The device support structure (26) is located on the bottom surface of the housing (2).

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