Calibration and synchronous scanning control method and system of compound eye microlens array

Abstract

The application discloses a kind of calibration and synchronous scanning control method and system of compound eye micromirror array, belong to micro-optical scanning control technical field, it includes acquisition each micro mirror unit's calibration light spot position, drive instruction value and response time, constructs unit space calibration mapping relationship and unit time sequence response mapping relationship;Target scanning trajectory is dispersed into target scanning state sequence, generates initial scanning drive sequence;After trial scanning, under the same target state index, pair spatial scanning residual error and time phase residual error, generate drive amplitude correction and trigger timing correction, and the time offset and position offset caused by the two are cross-corrected;Coupling space-time compensation parameters are updated using different motion phase synchronization check points, and micro mirror units exceeding the compensation range are selectively recalibrated.The application can inhibit scanning trajectory dislocation and phase mismatch by the same index double residual error pairing, amplitude-time cross correction and multi-phase check closed loop.

Description

Technical Field

[0001] This invention relates to the field of micro-optical scanning control technology, and in particular to a calibration and synchronous scanning control method and system for a compound eye micromirror array. Background Technology

[0002] The compound eye micromirror array consists of multiple independently deflectable micromirror units. By controlling the deflection state of each micromirror unit, beam scanning, field of view expansion, or light field modulation can be achieved. Due to the differences in fabrication, assembly, and drive response among different micromirror units, array scanning not only needs to ensure that each micromirror unit reaches the predetermined optical position, but also needs to maintain a corresponding time relationship within a uniform scanning cycle.

[0003] Existing technologies typically establish a calibration relationship between the micromirror's driving force and deflection angle by measuring the position of the reflected light spot under different driving conditions, and then calculate the driving force based on the target deflection position. For dynamic scanning, the driving waveform can be corrected by comparing the target trajectory with the actual trajectory, or multiple micromirrors can be phase-synchronized based on the zero-crossing position, response delay, and common clock, and the scanning drift can be corrected using the reference position within the scanning cycle. The above-mentioned calibration, trajectory correction, phase synchronization, and cycle calibration methods have relatively mature applications.

[0004] However, in a compound eye micromirror array, changes in the driving amplitude simultaneously affect the response time of the micromirror reaching the target position, while changes in the trigger time also cause changes in the actual spot position at the corresponding moment during dynamic scanning. If optical position calibration and time synchronization are processed separately, spatial error correction and temporal error correction may interfere with each other, causing trajectory misalignment or phase deviation after repeated compensation; at the same time, it is difficult to distinguish between spatial drift and temporal drift under different motion phases when performing periodic calibration only under a single reference state. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a calibration and synchronous scanning control method and system for compound eye micromirror arrays. Through same-index double residual pairing, amplitude-timing cross correction, and multi-phase verification closed loop, it can suppress scanning trajectory misalignment and phase mismatch.

[0006] The above objectives can be achieved through the following approach: A calibration and synchronous scanning control method for a compound eye micromirror array includes: acquiring the calibration spot position, driving command value, driving command issuance time, and response time of each micromirror unit in the array under multiple calibration driving states; establishing a calibration observation dataset according to the micromirror unit identifier and calibration driving state; determining the optical null position and scanning direction of each micromirror unit based on the calibration observation dataset; constructing a unit spatial calibration mapping relationship between the driving command value and the beam deflection state; and constructing a unit temporal response mapping relationship between the driving state change and the response delay; acquiring the array target scanning trajectory; and discretizing the array target scanning trajectory into target scanning states with target state indices according to a unified scanning time base. Based on the unit spatial calibration mapping relationship and the unit temporal response mapping relationship, the driving command value and initial trigger time of each micromirror unit under each target state index are determined, and an initial scan driving sequence is generated. The initial scan driving sequence is executed, and the actual spot position and actual arrival time of each micromirror unit are synchronously acquired. The actual spot position is matched with the corresponding target scan position according to the same target state index, and the actual arrival time is matched with the corresponding target arrival time, generating a spatiotemporal residual pair composed of spatial scan residual and temporal phase residual. The driving amplitude correction amount is determined according to the spatial scan residual and the unit spatial calibration mapping relationship, and the driving amplitude correction amount is determined according to the temporal phase... The residual and the unit timing response mapping relationship determine the trigger timing correction amount. A first coupling offset is determined based on the change in response arrival time generated by the drive amplitude correction amount through the unit timing response mapping relationship. A second coupling offset is determined based on the scan position change generated by the trigger timing correction amount at the corresponding position on the array target scan trajectory. The trigger timing correction amount is corrected using the first coupling offset, and the drive amplitude correction amount is corrected using the second coupling offset, generating coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index. The drive command value and initial trigger time in the initial scan drive sequence are corrected based on the coupling spatiotemporal compensation parameters. A synchronous scan drive sequence is generated, and a target state index corresponding to different motion phases is selected as a synchronous verification point in each scan cycle. The synchronous scan drive sequence is executed, and the corresponding spatiotemporal residual pairs are regenerated at each synchronous verification point. The coupling spatiotemporal compensation parameters are updated according to the spatiotemporal residual pairs, and the cumulative spatiotemporal deviation of each micromirror unit is determined according to the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is determined as a micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship, and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

[0007] Based on the same inventive concept, this invention also provides a calibration and synchronous scanning control system for a compound eye micromirror array. The system includes: a calibration observation data generation module, used to acquire the calibration spot position, drive command value, drive command issuance time, and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states, and to establish a calibration observation dataset according to the micromirror unit identifier and calibration drive state; and a calibration mapping construction module, used to determine the optical null position and scanning direction of each micromirror unit based on the calibration observation dataset, construct the unit space calibration mapping relationship between the drive command value and the beam deflection state, and construct the drive state change... The module establishes a unit-level temporal response mapping relationship between the unit spatial calibration mapping relationship and the unit-level temporal response mapping relationship; an initial scan sequence generation module is used to acquire the array target scan trajectory, discretize the array target scan trajectory into a target scan state sequence with target state index according to a unified scan time base, determine the drive command value and initial trigger time of each micromirror unit under each target state index based on the unit spatial calibration mapping relationship and the unit temporal response mapping relationship, and generate an initial scan drive sequence; a spatiotemporal residual generation module is used to execute the initial scan drive sequence, synchronously acquire the actual spot position and actual arrival time of each micromirror unit, and generate a target scan drive sequence according to the same target state index. The actual spot position is matched with the corresponding target scanning position, and the actual arrival time is matched with the corresponding target arrival time to generate a spatiotemporal residual pair composed of spatial scanning residual and temporal phase residual; the coupling offset generation module is used to determine the driving amplitude correction amount according to the spatial scanning residual and the unit spatial calibration mapping relationship, determine the trigger timing correction amount according to the temporal phase residual and the unit timing response mapping relationship, determine the first coupling offset amount according to the change in the arrival time of the response generated by the driving amplitude correction amount through the unit timing response mapping relationship, and determine the first coupling offset amount according to the trigger timing correction amount in the array target The scanning position change generated at the corresponding position of the target scanning trajectory determines the second coupling offset; the coupling spatiotemporal compensation module is used to correct the trigger timing correction amount using the first coupling offset and the driving amplitude correction amount using the second coupling offset, generating coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index; the synchronous scanning control module is used to correct the driving command value and initial trigger time in the initial scanning driving sequence according to the coupling spatiotemporal compensation parameters, generate a synchronous scanning driving sequence, and select the target state index corresponding to different motion phases as a synchronization verification point in each scanning cycle;The closed-loop calibration update module is used to execute the synchronous scan drive sequence, regenerate the corresponding spatiotemporal residual pairs at each synchronous verification point, update the coupling spatiotemporal compensation parameters according to the spatiotemporal residual pairs, and determine the cumulative spatiotemporal deviation of each micromirror unit based on the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is identified as a micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship, and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

[0008] Compared with the prior art, the present invention has the following advantages: This invention uses the unit spatial calibration mapping relationship and the unit temporal response mapping relationship of each micromirror unit together to generate the target scanning state, and pairs the spatial scanning residual and the temporal phase residual under the same target state index, so that the spatial deviation and the temporal deviation correspond to the same target scanning state, reducing the compensation deviation caused by the two types of residuals due to the misalignment of the scanning period or the mismatch of the state.

[0009] This invention determines the first coupling offset based on the change in the arrival time of the response generated by the drive amplitude correction, and determines the second coupling offset based on the change in the scan position generated by the trigger timing correction. The drive amplitude correction and the trigger timing correction are cross-corrected so that position compensation and time compensation are no longer independent control processes. This can suppress trajectory misalignment and phase mismatch caused by one type of correction introducing another type of deviation.

[0010] This invention utilizes synchronous verification points corresponding to different motion phases to continuously update the coupling spatiotemporal compensation parameters, and identifies micromirror units that exceed the compensation range based on the cumulative spatiotemporal deviation formed by multiple scanning cycles. Only the corresponding micromirror units are recalibrated, thereby correcting position drift and time drift during continuous scanning and reducing the impact of changes in the state of a single micromirror unit on the overall synchronous scanning of the array. Attached Figure Description

[0011] Figure 1 This is a schematic flowchart of a calibration and synchronous scanning control method for a compound eye micromirror array according to an embodiment of the present invention.

[0012] Figure 2 This is a schematic diagram illustrating the micromirror unit calibration observation and the construction of spatial and temporal calibration mapping relationships in an embodiment of the present invention.

[0013] Figure 3 This is a schematic diagram of array target scanning trajectory discretization and initial scanning drive sequence generation according to an embodiment of the present invention.

[0014] Figure 4 This is a schematic diagram of target state index matching and spatiotemporal residual pair generation in an embodiment of the present invention.

[0015] Figure 5 This is a schematic diagram of the drive amplitude correction, trigger timing correction and coupling offset cross correction in an embodiment of the present invention.

[0016] Figure 6 This is a schematic diagram of the synchronous scanning drive sequence and the setting of synchronous verification points for different motion phases in an embodiment of the present invention.

[0017] Figure 7 This is a schematic diagram of the calibration and synchronous scanning control system for a compound eye micromirror array according to an embodiment of the present invention. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Reference Figure 1 One embodiment of the present invention proposes a calibration and synchronous scanning control method for a compound eye micromirror array. By using the same index double residual pairing, amplitude-time cross correction and multi-phase verification closed loop, it is possible to suppress scanning trajectory misalignment and phase mismatch.

[0020] The method described in this embodiment specifically includes: S1. Obtain the calibration spot position, drive command value, drive command issuance time and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states, and establish a calibration observation dataset according to the micromirror unit identifier and calibration drive state; In one embodiment of the present invention, step S1 includes the following steps: A calibration reference plane with a defined spatial positional relationship to the compound eye micromirror array is set, and a calibration coordinate system is established on the calibration reference plane; Drive commands are issued to each micromirror unit according to multiple calibration drive states. The time of issuance of each drive command is recorded through a unified clock domain, and the position sequence of the light spot formed by the corresponding micromirror unit on the calibration reference plane is continuously acquired. The calibration spot position that matches the corresponding calibration driving state is determined from the spot position sequence, and the moment when the spot enters the corresponding calibration position range is determined as the response moment; The calibration spot position, the drive command value, the drive command issuance time, and the response time corresponding to the same micromirror unit and the same calibration drive state are associated to establish a calibration observation dataset.

[0021] Specifically, such as Figure 2 As shown, the calibration reference plane is set in the reflected optical path of the compound eye micromirror array. Its axial distance from the array mounting reference plane is determined by mechanical measurement and optical alignment after installation and remains unchanged during subsequent calibration. The calibration coordinate system is established with the preset reference point of the calibration reference plane as the origin, and with the reference plane's horizontal and vertical directions respectively... shaft and Axis. The micromirror unit adopts To provide a unique identifier, , This indicates the number of micromirror units contained in the compound eye micromirror array. A setting is configured for each micromirror unit. Each calibration drive state covers a predetermined working scan range. The number of states and the interval between adjacent drives are determined based on the effective output range, scan angle range, and calibration accuracy requirements of the drive controller.

[0022] micromirror unit The Each calibrated drive state is recorded as the drive command value. The time when the drive command is issued is recorded as The spot position acquisition device continuously outputs a sequence of spot positions according to a unified clock domain, with each sampling position represented by two-dimensional coordinates. (This is in contrast to the previous sentence.) The position of the calibration spot corresponding to each calibration drive state is represented as follows: ; The determination relationship for whether the light spot enters the calibration position range is as follows: ; In the formula, Indicates time Micromirror units collected Corresponding to the position of the light spot; This indicates the calibration position tolerance, expressed in millimeters, and is determined based on the spatial resolution, repeatability error, and calibration acceptance requirements of the spot position acquisition device. When the spot first meets the above position range, the corresponding sampling time is recorded as the response time. .

[0023] The observation information corresponding to the same micromirror unit and the same calibration drive state is encapsulated into a calibration observation record: ; This leads to the formation of a calibration observation dataset: ; The calibration observation dataset is indexed in two layers according to the micromirror unit identifier and calibration driving state, so that the spatial response data and time response data of the same micromirror are in one-to-one correspondence, and provides a common calibration basis for spatial mapping and time-series mapping to step S2.

[0024] For example, adopting The compound eye micromirror array is explained, including the number of micromirror units. Each micromirror unit is set Each calibration drive state is used to select the micromirror unit. As a representative example, the axial distance between the calibration reference plane and the array mounting reference plane is... ,against Set the driver command value to , , , and The five calibration drive states. The repeatability error of the spot position acquisition device after equipment calibration is less than [a certain value]. The calibration position tolerance is determined based on the spatial resolution of the light spot position acquisition device and the calibration acceptance requirements. When to Issue the 4th calibration drive status At the same time, a unified clock records the moment when the drive command is issued. The spot position acquisition device continuously obtains , , and The positions of the calibration spot, among which the position of the calibration spot that matches the fourth calibration drive state is determined as follows: The data is backfilled according to the calibrated spot position vector structure as follows: ; the light spot is When it first entered Center, radius The calibration position range is used to determine the response time. The micromirror unit identifier, calibration drive status, drive command value, calibration spot position, drive command issuance time, and response time are filled back into the calibration observation record structure to obtain: For example, the calibration spot positions corresponding to the other four calibration drive states of the third micromirror unit are respectively , , and Corresponding formation , , and Similarly, for the remaining 15 micromirror units, five calibration drive states were acquired, resulting in a total of [data / data]. Record the calibration observations and follow the microscope unit labeling. and calibration drive state Backfill the calibration observation dataset: ;in The corresponding calibration spot position is Therefore, the calibration spot position vector, a single calibration observation record, and the calibration observation dataset are all filled with actual data according to the aforementioned definition, forming the input for step S2 to construct the unit spatial calibration mapping relationship and the unit temporal response mapping relationship.

[0025] S2. Based on the calibration observation dataset, determine the optical null position and scanning direction of each micromirror unit, construct the unit spatial calibration mapping relationship between the driving command value and the beam deflection state, and construct the unit timing response mapping relationship between the driving state change and the response delay. In one embodiment of the present invention, step S2 includes the following steps: Based on the spatial relationship between the calibration reference plane and the compound eye micromirror array, the positions of each calibration spot are converted into corresponding beam deflection states; The optical null position and scanning direction of the corresponding micromirror unit are determined according to the beam deflection state corresponding to multiple calibration driving states, and the driving command value and the beam deflection state are sequentially associated according to the scanning direction to construct a reversible spatial calibration mapping relationship of the unit within the working scanning range. Calculate the response delay between the response time and the drive command issuance time under the same calibration drive state, and associate the response delay with the drive command value and the drive change between adjacent calibration drive states to construct the unit timing response mapping relationship.

[0026] Specifically, such as Figure 2 As shown, for each micromirror unit, from the calibration observation dataset According to Extract all calibration records. Use the calibration spot position corresponding to the reference drive state as the optical zero point. When the drive command value includes a zero drive state, the spot position corresponding to the zero drive state is taken as the optical zero position; when the drive command range does not include a zero drive state, the reference drive state in the middle of the working scan range is taken as the optical zero position.

[0027] The scanning direction is determined based on the positions of the calibrated light spots at both ends of the working scanning range: ; In the formula, Indicates micromirror unit The unit scan direction vector.

[0028] The signed displacement of the calibrated spot relative to the optical null position along the scanning direction is taken as the beam deflection state quantity: ; In the formula, Indicates micromirror unit In the The beam deflection state quantities under the calibrated driving state are expressed in millimeters. To convert them to the corresponding beam deflection angle, the axial distance between the calibrated reference plane and the array is used. calculate: ; The drive command value and the beam deflection state quantity are associated in ascending order of the drive command, and a unit space calibration mapping relationship is formed between adjacent calibration points using piecewise interpolation: ; In the formula, Indicates micromirror unit The unit space calibration mapping relationship; Indicates the value of the driver instruction; This represents the corresponding beam deflection state. Within the working scanning range, a monotonically changing calibration segment is selected according to the scanning direction, so that... It has the corresponding inverse mapping This is used in step S3 to inversely calculate the drive command value based on the target scanning state.

[0029] Response latency is calculated based on the response time and the drive command issuance time in the same calibration record: ; In the formula, This represents the response delay, in seconds. The change in drive speed between adjacent calibration drive states is expressed as: ; By associating the drive command value, drive change, and response delay, a unit timing response mapping relationship is formed: ; In the formula, Indicates micromirror unit The unit time-series response mapping relationship is determined. The mapping relationship can be achieved by using a calibration lookup table in conjunction with adjacent record interpolation. The interpolation method is determined by the calibration point density and the continuity of the response curve, without changing the response relationship of the calibration data itself.

[0030] For example, in step S1 Calibration observation data of compound eye micromirror array, selecting micromirror units As a representative, The drive instruction values ​​corresponding to each calibrated drive state are as follows: , , , and The corresponding calibrated spot positions are as follows: , , , and The calibration spot position vector structure defined in step S1 is filled in as follows: ; ; ; ; ; in zero-drive state corresponding As a micromirror unit The optical null point, i.e. The scanning direction is calculated based on the calibration spot positions corresponding to the first and fifth calibration drive states. ;Will and Substituting, we get: ; ; The positions of the five calibrated light spots are respectively along... Project and retain until The beam deflection state variables are obtained as follows: , , , and Therefore, the micromirror unit Cell space calibration mapping relationship within the current working scan range Backfilling was performed according to the 5 sets of calibration points: ; ; ; ; This forms a sequential mapping between drive command values ​​and beam deflection state variables. The five calibration points remain monotonic as the drive command value increases, therefore Has an inverse mapping within the current working scan range For example, when the beam deflection state quantity is At that time, it is possible to Interpolation is performed within the corresponding interval to provide a mapping basis for the reverse calculation of the drive command value in step S3. In terms of time response, it follows the drive command issuance time of step S1, which calibrates the drive state in step S4. and response time Based on the response delay calculation relationship, we get: ; The response delays for the remaining four calibrated drive states are obtained in the same manner as follows: , , and Therefore, the response delays corresponding to the five calibrated drive states are as follows: For adjacent calibration drive states, the drive change is calculated according to... Calculation. For example, the change in drive speed in the fourth calibration drive state relative to the third calibration drive state is: ; Similarly, the drive change of the 2nd, 3rd, and 5th calibration drive states relative to their respective previous calibration drive states is all 100. Therefore, the unit timing response mapping relationship is backfilled according to the correspondence between drive command value, drive change, and response delay. : ; ; ; Thus, the following is formed: Wherein, the first calibration drive state serves as the starting state of the current calibration sequence, and the corresponding response delay is... It does not participate in the calculation of changes driven by adjacent states. Ultimately, the micromirror unit... Forming unit space calibration mapping relationship Mapping relationship between unit timing response The remaining 15 micromirror units in the array are formed according to the same data structure and calculation process. and This serves as the input for generating the initial scan drive sequence in step S3.

[0031] S3. Obtain the array target scanning trajectory, discretize the array target scanning trajectory into a target scanning state sequence with target state index according to a unified scanning time base, determine the driving command value and initial trigger time of each micromirror unit under each target state index based on the unit space calibration mapping relationship and the unit timing response mapping relationship, and generate the initial scanning driving sequence. In one embodiment of the present invention, step S3 includes the following steps: Obtain the target scanning range, scanning direction, and scanning period, and generate the array target scanning trajectory; The array target scanning trajectory is discretized according to the unified scanning time base, and a target state index and target arrival time are configured for the target scanning position corresponding to each discrete time, thereby generating the target scanning state sequence. The scanning positions of each target are converted to the local scanning coordinates of the corresponding micromirror unit, and the corresponding driving command values ​​are calculated in reverse according to the unit space calibration mapping relationship; The response delay of the corresponding drive instruction value is determined according to the unit timing response mapping relationship, and the initial triggering time is determined by using the response delay relative to the target arrival time; The initial scan drive sequence is generated by arranging the drive instruction values ​​and the initial trigger time according to the target state index.

[0032] Specifically, such as Figure 3 As shown, the array target scanning trajectory is determined by the target scanning range, scanning direction, and scanning period given by the scanning control task. A unified scanning time base is a hardware clock shared by the scanning controller and the spot position acquisition device. The scanning period is denoted as... The discrete time interval is denoted as The number of discrete states is determined by the scan period and time interval. The target arrival time corresponding to each target state is represented as follows: ; In the formula, Indicates the start time of the current scan cycle; Indicates the target state index.

[0033] The target scan status record is represented as follows: ; In the formula, Indicates the target state index The corresponding target scan position. All target scan states are arranged in index order to form a target scan state sequence: ; Different micromirror units have different array mounting positions and local scanning directions, so the array target scanning position is transformed to the micromirror unit local scanning coordinates. The coordinate transformation is expressed as: ; In the formula, Indicates micromirror unit Corresponding local scan location; This represents the local coordinate rotation matrix determined by the array mounting calibration; This indicates the position of the local coordinate origin of the micromirror unit in the array scan coordinate system. Parameter and This information is derived from the array assembly and calibration results.

[0034] The target beam deflection state quantity is obtained by projecting the local scan position along the scan direction: ; The initial drive instruction value is determined using the inverse mapping established in step S2: ; The driving changes corresponding to adjacent target states are: ; Then, the corresponding response delay is obtained through the unit timing response mapping relationship: ; To ensure the light spot arrives at the target time Upon reaching the target state, the driver instructions need to be sent out in advance with the corresponding response delay. Therefore, the initial trigger time is: ; The initial scan drive record is obtained by combining the micromirror unit identifier, target state index, drive command value, and initial trigger time: ; The initial scan drive records corresponding to each micromirror unit and each target state index are sorted according to the target state index to form the initial scan drive sequence. .

[0035] For example, following steps S1 and S2 Compound eye micromirror array, with micromirror units As a representative example, the array target scanning trajectory employs a single-cycle round-trip linear scan, with the reference plane... The scanning range in the direction is to ,forward Depend on Scan to ,back Depend on return The scanning cycle is The discrete time interval of the unified scan time base is taken as... The start time of the current scan cycle is taken as Therefore, the target state index is formed. There are a total of 65 target scanning states.

[0036] Indexed by target state Using the target arrival time as an example, the relationship is calculated: Substitute , and ,get: The target position is determined according to each scan cycle in the first half of the scan period. move ,therefore The corresponding target scan location is: The following was obtained by backfilling according to the target scan status record structure: Similarly, scan the initial state. correspond , reversing state correspond Scan completed correspond All 65 target scan states are arranged according to their target state indices, and the target scan state sequence is then filled in: ;Right now: For micromirror units The array assembly and calibration resulted in the local scan coordinate direction being consistent with the array scan coordinate direction. Take a two-dimensional identity matrix, the local coordinate origin of the micromirror element corresponds to... Based on the local scan coordinate transformation relationship: The micromirror unit obtained from step S2 is then used. Scan direction Projecting the local scan position along the scanning direction: The unit space calibration mapping relationship established in step S2 is followed by the following steps. ,exist to Within the interval, the beam deflection state quantity is changed from Increase to The corresponding local drive-position transformation relationship is as follows: every 100 drive units correspond to... Therefore, according to the inverse mapping relationship: Substitute get: To calculate the driving change of the current driving state relative to the previous target state, continue taking... The corresponding target scan location is: The following is obtained through the same coordinate transformation and projection process along the scanning direction: ; Reuse Inversely calculate the drive instruction value of the previous target state: Therefore, the relationship between changes driven by adjacent target states is as follows: ; Set the current driver instruction value and driving change Input the unit timing response mapping relationship established in step S2: ;according to Interpolate the calibration response records adjacent to the current driving state to obtain the response delay corresponding to the current target state: The target light spot needs to be Upon reaching the corresponding target scanning position, the relationship is calculated based on the initial trigger time: The micromirror unit identifier, target state index, initial drive command value, and initial trigger time are then backfilled according to the initial scan drive record structure. For example, for adjacent target states Obtained using the same process and the corresponding initial trigger time, and form ;for The target scanning location is ,according to get And further form Similarly, for the micromirror unit... All 65 target states and the remaining 15 micromirror units sequentially complete target position transformation, scan direction projection, drive command value inversion, drive change calculation, response delay determination, and initial trigger time calculation, ultimately forming the initial scan drive sequence: ;in With target scanning status Maintaining the same target state index 24 enables step S4 to match the actual spot position and the actual arrival time based on the same target state index.

[0037] S4. Execute the initial scanning drive sequence, synchronously collect the actual spot position and actual arrival time of each micromirror unit, match the actual spot position with the corresponding target scanning position according to the same target state index, and match the actual arrival time with the corresponding target arrival time to generate a spatiotemporal residual pair composed of spatial scanning residual and temporal phase residual. In one embodiment of the present invention, step S4 includes the following steps: The initial scan drive sequence is executed, and the actual spot trajectory of each micromirror unit is acquired according to the unified scan time base; Establish a time matching interval centered on the target arrival time corresponding to each target state index, and determine the actual spot position and actual arrival time of the corresponding target state index from the actual spot trajectory; Calculate the positional difference between the actual spot position and the corresponding target scanning position to generate a spatial scanning residual; Calculate the time difference between the actual arrival time and the corresponding target arrival time to generate a time phase residual; The spatial scan residuals belonging to the same micromirror unit and having the same target state index are paired with the temporal phase residuals to generate the spatiotemporal residual pairs.

[0038] Specifically, such as Figure 4 As shown, the initial scan drive sequence is executed. At that time, the drive controller sends drive commands to the corresponding micromirror unit according to the initial trigger time in each record, and the spot position acquisition device continuously acquires the actual spot trajectory according to a unified clock. Target State Index The corresponding time matching interval is represented as follows: ; In the formula, The time matching half-width is determined by comprehensively considering the spot sampling period, the maximum response delay fluctuation measured during the calibration phase, and the time interval between adjacent target states, and restricts the overlap of the effective matching ranges corresponding to different target state indices.

[0039] Within the time matching interval, the distance between the actual light spot and the target scanning position is used as the basis for spatial matching to determine the corresponding actual sampling point: ; The corresponding sampling point location and time are respectively determined as the actual spot location and actual arrival time: ; ; The spatial scan residual is expressed as: ; In the formula, Indicates micromirror unit In the target state index The two-dimensional spatial scanning residual is shown in millimeters.

[0040] The time phase residual is expressed as: ; In the formula, This indicates that the actual arrival time was later than the target arrival time. This indicates that the actual arrival time was earlier than the target arrival time.

[0041] Spatial scan residuals and temporal phase residuals are paired only when the micromirror unit identifier and the target state index are both consistent, forming a spatiotemporal residual pair: ; This avoids cross-pairing spatial and temporal errors between adjacent scan states.

[0042] For example, the micromirror unit in step S3 In the target state index The scan data below, the target scan location is The target arrival time is Based on the response delay fluctuation range statistically analyzed during the calibration phase and the relationship between adjacent target states... The time interval, time matching half-width First, the effective matching range corresponding to target state index 24 is determined according to the time matching interval calculation relationship: Therefore, sampling times are selected only from the actual light spot trajectories. to The light spot sampling points between them participate in the matching of target state index 24. Three consecutive representative sampling points are used. , and The actual sampled data are as follows: ; ; All three sampling times mentioned above meet the requirements. The Euclidean distance between the actual spot position and the target scanning position is calculated separately. Sampling points The corresponding distance is: ; sampling points The corresponding distance is: ; sampling points The corresponding distance is: Therefore, the three candidate distances are substituted into the actual sampling point selection relationship: Therefore, The corresponding sampling results are determined as the actual spot position and actual arrival time corresponding to target state index 24: ; Further calculation of spatial scan residuals: The time phase residual is: Finally, follow the same micromirror unit labeling. Pairing the two types of residuals with the same target state index 24 yields: Therefore, the time matching interval First, the candidate sampling range of the actual light spot trajectory is defined, and then... The actual sampling point with the smallest distance from the target scanning position is determined from the candidate sampling points, so that the spatial scanning residual and the temporal phase residual both originate from the same actual sampling point.

[0043] S5. Determine the driving amplitude correction amount based on the spatial scanning residual and the unit spatial calibration mapping relationship; determine the trigger timing correction amount based on the time phase residual and the unit timing response mapping relationship; determine the first coupling offset amount based on the change in the arrival time of the response generated by the driving amplitude correction amount through the unit timing response mapping relationship; and determine the second coupling offset amount based on the change in the scanning position generated by the trigger timing correction amount at the corresponding position of the array target scanning trajectory. In one embodiment of the present invention, step S5 includes the following steps: The spatial scanning residual is projected along the scanning direction of the corresponding micromirror unit, and the projected spatial scanning residual is converted into a driving amplitude correction amount according to the unit spatial calibration mapping relationship. The time phase residual is converted into a trigger timing correction amount according to the unit timing response mapping relationship; Substitute the driving state after applying the driving amplitude correction into the unit timing response mapping relationship to determine the change in response delay relative to the original correction, and generate the first coupling offset. Based on the target scan position change relationship between the corresponding target state index and its adjacent target state indices, the time shift corresponding to the trigger timing correction amount is converted into a scan position change amount, and a second coupling offset is generated.

[0044] Specifically, such as Figure 5 As shown, the spatial scanning residual is first projected along the scanning direction of the micromirror unit to eliminate minor detection deviations that are orthogonal to the main scanning direction and not within the current single-axis drive compensation range. The projected spatial scanning residual is expressed as: ; Determine the local drive-position transition slope within the current working space based on the cell space calibration mapping relationship: ; In the formula, and Indicates the adjacent calibration drive values ​​surrounding the current drive operating point; This indicates the amount of change in scan position corresponding to a unit drive change.

[0045] The basic drive amplitude correction is expressed as: ; The negative sign indicates that the corresponding driving amount is reduced when the actual spot moves beyond the target position along the positive scanning direction.

[0046] Regarding the time phase residual, with the objective of shifting the actual arrival time toward the target arrival time, the basic trigger timing correction is expressed as: ; When the driving amplitude changes, the dynamic response delay of the micromirror also changes with the driving state. By re-inputting the corrected driving state into the cell timing response mapping relationship, the amplitude-corrected response delay is obtained: ; In the formula, This represents the actual change in drive amplitude between two adjacent target states after applying the base drive amplitude correction. The first coupling offset is defined as the change in response delay: ; The first coupling offset characterizes the collateral effect on the arrival time of the response when the driving amplitude is changed to correct the spatial position.

[0047] When the trigger timing changes, the array target scanning trajectory still changes along the time axis; therefore, the corresponding time shift is mapped to a spatial position shift. Target State Index The local scanning speed in the vicinity is determined based on the state of adjacent targets: ; The second coupling offset caused by the basic trigger timing correction is expressed as: ; Then, the corresponding scalar scan position changes are obtained along the micromirror scanning direction: ; The second coupling offset characterizes the incidental effect on the dynamic scanning position when the trigger time is changed to correct the time phase, and is used in step S6 to further correct the driving amplitude correction amount.

[0048] For example, the micromirror unit in step S4 In the target state index The resulting spatiotemporal residual pairs Micromirror unit The scanning direction is Therefore, the projection of the spatial scanning residual along the scanning direction is: Current initial drive instruction value Located in step S2 middle to Within the calibration interval, therefore, take the two adjacent calibration drive values ​​that surround the current operating point. and The corresponding spatial calibration result is: , Therefore, based on the relationship calculated according to the local drive-position transition slope, the following can be obtained: per drive unit; therefore, the basic drive amplitude correction is: The time phase residual is The basic trigger timing correction is: After applying the basic drive amplitude correction, the drive state corresponding to target state index 24 changes from... Revised to: Following step S3, the initial drive instruction value corresponding to target state index 23 is... In this representative calculation, target state index 23 did not generate a spatial correction that would require further changes to the current driving relationship, therefore its driving state remained at 70. This yields the adjacent driving changes after applying the base driving amplitude correction: The corrected driving state and adjacent driving changes are input into the unit timing response mapping relationship established in step S2: ;because The time-series response mapping table formed by the observation data is calibrated using step S2, and interpolation is performed between adjacent records. Therefore, As input to the query, after performing interpolation in the current work interval, the following result is obtained: The response delay before correction has been obtained in step S3. Therefore, the first coupling offset is: For the second coupling offset, it follows the target scan positions corresponding to target state indices 23, 24, and 25 in step S3: ; ; Discrete interval of unified scan time base Therefore, the local scan speed near target state index 24 is: Adjust the base trigger timing amount Convert to The relationship is calculated according to the second coupling offset: ; and then along the micromirror unit Projecting along the scanning direction: Therefore, the micromirror unit The basic driving amplitude correction is obtained under target state index 24. Basic trigger timing correction amount First coupling offset and the second coupling offset The second coupling offset along the scanning direction is This serves as the input for amplitude-timing crossover correction in step S6.

[0049] S6. Use the first coupling offset to correct the trigger timing correction amount, and use the second coupling offset to correct the drive amplitude correction amount, to generate coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index. In one embodiment of the present invention, step S6 includes the following steps: The trigger timing correction amount is corrected using the first coupling offset; The driving amplitude correction is corrected using the second coupling offset. The corrected driving amplitude correction and the corrected trigger timing correction are associated as the coupled spatiotemporal compensation parameters.

[0050] Specifically, such as Figure 5 As shown, the first coupling offset reflects the additional response delay change caused by the adjustment of the drive amplitude. Therefore, subtracting this change from the basic trigger timing correction amount yields the cross-corrected trigger timing correction amount: ; The second coupling offset reflects the additional spatial movement caused by the trigger timing adjustment on the dynamic scan trajectory. Therefore, according to the drive-position conversion slope of the current working interval in step S5, the second coupling offset is converted into an equivalent drive change and subtracted from the basic drive amplitude correction. ; In the formula, This indicates the amount of drive amplitude correction after cross-correction; This indicates the amount of trigger timing correction after cross-correction.

[0051] The two are associated with the same micromirror unit identifier and the same target state index, forming a coupled spatiotemporal compensation parameter: ; All micromirror units under all target state indices A set of coupled spatiotemporal compensation parameters corresponding to the current scan cycle is formed and output to step S7.

[0052] For example, taking the calculation result from step S5, The base trigger timing correction under target state index 24 is: The first coupling offset is Therefore, the trigger timing correction amount after cross-correction is: The basic drive amplitude correction is The second coupling offset is The current drive-position transition slope is per drive unit, therefore: The final result is: Compared to correcting only the spatial residual and the temporal phase residual separately, The effect of amplitude correction on response time was further considered. Changes and timing corrections affect the scan position The changes serve as direct input for step S7 to correct the initial scan drive sequence.

[0053] S7. Correct the drive command value and initial trigger time in the initial scan drive sequence according to the coupling spatiotemporal compensation parameter, generate a synchronous scan drive sequence, and select the target state index corresponding to different motion phases as a synchronous verification point in each scan cycle. In one embodiment of the present invention, step S7 includes the following steps: The drive amplitude correction amount corresponding to each target state index is superimposed on the corresponding drive command value, and the initial trigger time is adjusted according to the corresponding trigger timing correction amount to obtain the corrected drive command value and the corrected trigger time. Arrange the corrected drive instruction values ​​and the corrected trigger times according to the target state index to generate the synchronous scan drive sequence; Determine the target state indices corresponding to the scan start phase, scan reversal phase, and scan end phase from the target scan state sequence, and select at least two target state indices belonging to different motion phases as the synchronization verification points.

[0054] Specifically, such as Figure 6 As shown, for the initial scan drive sequence Each driver record in the file is based on the same and Read the corresponding spatiotemporal compensation parameters The corrected driver instruction value is represented as follows: ; The corrected trigger time is represented as follows: ; This results in a synchronous scan-driven record: ; All synchronous scan drive records are arranged according to the target state index and micromirror unit identifier to form a synchronous scan drive sequence. .

[0055] Synchronization checkpoints are scanned from the target state sequence. The selection process avoids using a single fixed scan position as the sole calibration benchmark, instead covering different motion phases within a single scan cycle. The set of synchronous calibration points is represented as follows: ; In the formula, This indicates the target state index corresponding to the scan start phase; The target state index indicates the reversal phase where the scanning direction changes; This indicates the target state index corresponding to the phase at the end of the scan. During actual operation, at least two target state indices corresponding to different motion phases must be retained. The location of the verification point is determined based on the target scan trajectory itself, therefore the scan trajectory and scan cycle are not changed additionally.

[0056] For example, following the foregoing Round-trip scan cycle, target state index range is 0 to 64, scan start position is located at Forward scan arrive A reversal occurred afterward, and the scan ended at the location... Therefore, the set of synchronization verification points is: ;for and The initial drive command value is 80, and the drive amplitude correction amount after cross-correction is... ,get: The initial trigger time is The trigger timing correction amount after cross-correction is ,therefore: The corresponding synchronous scan driver record is: The remaining records in the array use the corresponding The corrections are completed, and the synchronous scan drive sequence is formed according to the target state index. The scan controller synchronously outputs a verification trigger flag when indices 0, 32, and 64 are reached, providing an index basis for regenerating the spatiotemporal residual pairs of different time phases in step S8.

[0057] S8. Execute the synchronous scan drive sequence, regenerate the corresponding spatiotemporal residual pairs at each synchronous verification point, update the coupling spatiotemporal compensation parameters according to the spatiotemporal residual pairs, and determine the cumulative spatiotemporal deviation of each micromirror unit according to the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is determined as a micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

[0058] In one embodiment of the present invention, step S8 includes the following steps: During the execution of the synchronous scanning drive sequence, the actual spot position and actual arrival time corresponding to each synchronous check point are obtained respectively, and the spatial scanning residual and temporal phase residual corresponding to each synchronous check point are regenerated. According to the target state index corresponding to the synchronization verification point, each spatial scan residual and each temporal phase residual are paired to obtain a verification spatiotemporal residual pair; Based on the multiple spatiotemporal residual pairs corresponding to different motion phases, determine the spatial residual change and temporal residual change within the same scan cycle; The driving amplitude correction, the trigger timing correction, the first coupling offset, and the second coupling offset are re-determined using the spatial residual change and the temporal residual change, and updated coupling spatiotemporal compensation parameters are generated and used in the next scan cycle. The spatial scanning residuals and temporal phase residuals of each micromirror unit at the synchronous verification point are collected in the order of scanning cycle to generate a unit spatiotemporal deviation sequence. Based on the unit spatiotemporal deviation sequence, the cumulative spatial deviation and the cumulative temporal deviation are determined respectively, and the cumulative spatiotemporal deviation is generated; The accumulated spatiotemporal deviation is compared with the compensable range corresponding to the coupled spatiotemporal compensation parameter. When the same micromirror unit exceeds the compensable range within a consecutive preset number of scanning cycles, the corresponding micromirror unit is determined as a micromirror unit to be recalibrated. The calibration observation data is re-established only for the micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship and unit temporal response mapping relationship are updated based on the re-established calibration observation data, thereby updating the corresponding coupling spatiotemporal compensation parameters.

[0059] Specifically, in the When executing the synchronous scan drive sequence in each scan cycle, only in the set of synchronous check points Extract the verification data at the corresponding time point, and continue to use the spatiotemporal residual pair structure defined in step S4. Micromirror unit In the index verification and scan cycle The following is a representation of the spatiotemporal residual pairs of the verification: The verification index for any two different motion phases. and The spatial residual variation is expressed as: ; The time residual change is expressed as: ; Using the current residuals at each verification point and the residual changes between different motion phases, the incremental correction amount corresponding to each verification point is re-determined according to the spatial residual projection, driving amplitude conversion, time phase conversion, and two types of coupling offset calculation relationships in step S5. Then, the updated coupling spatiotemporal compensation parameters are formed according to the cross-correction relationship in step S6. The update process uses the established... and We will not reintroduce independent prediction models.

[0060] To determine whether the existing calibration mapping and compensation parameters are still within a valid range, the verification residuals are collected within a fixed-length scan cycle window. The spatial deviation for each scan cycle is expressed as: ; The time deviation for each scan cycle is expressed as: ; In the formula, This indicates the number of synchronization checkpoints used in the current scan cycle.

[0061] In length of Within the continuous scanning period window, spatial deviation and temporal deviation accumulate: ; ; The cumulative spatiotemporal bias is expressed as: ; The compensable range is jointly determined by the remaining reversible drive range of the current cell space calibration mapping and the allowable trigger time adjustment range of the scan controller, and is expressed as: ; In the formula, This indicates the maximum spatial deviation that the current micromirror can correct with the remaining driving margin; This indicates the maximum time deviation that the current trigger control configuration can correct. If or If the current scan cycle exceeds the compensable range, it is determined that the current scan cycle is beyond the compensable range. The threshold for the number of consecutive scan cycles exceeding the limit is determined based on the array scan stability acceptance record and on-site operation procedures to avoid single-cycle acquisition disturbances directly triggering recalibration.

[0062] All micromirror units that meet the continuous out-of-limit condition form a set of micromirror units to be recalibrated: ; against The micromirror units in the array re-execute the calibration acquisition process corresponding to step S1, reconstructing only the calibration observation records of the corresponding micromirror units, and re-execute the spatial mapping and temporal mapping construction process corresponding to step S2 based on the new calibration records. (The array did not enter...) The micromirror units retain the original unit space calibration mapping relationship and unit timing response mapping relationship, thereby avoiding the need to perform a full recalibration of the entire array due to the drift of a small number of micromirrors.

[0063] For example, the set of synchronization verification points formed in step S7 With micromirror unit and The continuous scanning results are explained below. The synchronous scanning trajectory corresponds to the scan start phase, scan reversal phase, and scan end phase at target state indices 0, 32, and 64. First, in the... Within each scan cycle, for The actual spot positions and actual arrival times of the three synchronization check points are collected. Using the same target state index matching method as in step S4, the spatial scan residuals corresponding to the three synchronization check points are obtained as follows: , and The time phase residuals are respectively , and Therefore, the three spatiotemporal residual pairs for verification are backfilled as follows: ; ; ; scan the starting phase and scanning commutation phase Taking [a specific example], the relationship between the spatial residual changes between different motion phases is calculated as follows: Substituting the spatial scan residuals corresponding to the two check points, we get: The corresponding time residual change is: Then scan the commutation phase. and the end phase of the scan Calculations yielded the following: ; Therefore, it can be seen that during the same scanning cycle, when moving from the initial phase to the reversing phase, the spatial residual increases along the positive scanning direction, and the temporal phase residual increases. When moving from the commutation phase to the end phase, both the spatial residual and the temporal phase residual undergo reverse changes. Based on the three verification spatiotemporal residual pairs and the aforementioned residual changes, the controller continues to call the calculation relationships of spatial residual projection, drive amplitude conversion, trigger timing conversion, first coupling offset, and second coupling offset from step S5, and then re-determines the coupling spatiotemporal compensation parameters for the corresponding verification state according to the cross-correction relationship in step S6. Since the relevant calculation relationships and numerical conversion processes have already been defined and exemplified in steps S5 and S6, here the newly acquired verification spatiotemporal residual pairs are directly used to replace the original spatiotemporal residual pairs to perform the same calculations, and the resulting updated coupling spatiotemporal compensation parameters are written into the compensation record of the corresponding target state index in the next scan cycle. Further calculations are performed in the first scan cycle... Spatial deviation. Number of current synchronization checkpoints. The modulus squares of the spatial scan residuals at the three verification points are as follows: ; ; Substitute the formula for calculating the spatial deviation of a single scan cycle: The time phase residuals of the three synchronization check points are respectively , and Therefore, the time deviation is: In the subsequent second and third scan cycles, the residuals of the three synchronous verification points were collected and the root mean square was calculated in the same manner. The second scan cycle yielded... , The third scan cycle yielded , The continuous scan period window length The cumulative spatial deviation is calculated based on the continuous periodic statistical configuration used during array synchronous scanning stability acceptance. Therefore, the cumulative spatial deviation for the third scanning cycle is: The corresponding cumulative time deviation is: Backfilling according to the cumulative spatiotemporal deviation structure yields: ;according to The remaining reversible drive range of the current unit space calibration mapping and the remaining trigger timing adjustment range of the scan controller are used to determine the maximum compensable deviation in space. Maximum compensable deviation in time Therefore, the corresponding compensable range is: ;because: ; ;therefore Micromirror unit Continue using the current cell space calibration mapping relationship Unit timing response mapping relationship The updated coupling spatiotemporal compensation parameters are not included in the set of micromirror units to be recalibrated. Then, the micromirror units that have experienced continuous shifts are considered. Explain the recalibration and determination process. Based on... Determining the remaining drive margin from the current drive operating position to the spatial calibration mapping boundary Determined based on the remaining trigger timing adjustment range of the scan controller. ,therefore: The continuous periodic statistical window is also taken as follows. Within five consecutive scan cycles, the root mean square (RMS) calculation method for the aforementioned three synchronization checkpoints was used to obtain... The single scan period spatial deviations are as follows: , , , and The time deviation of a single scan cycle is as follows: , , , and For example, the spatial residual amplitudes of the three verification points in the third scan cycle are all... The time phase residuals are all ,therefore: ; At the end of the third scan cycle, window accumulation is performed on scan cycles 1 through 3, and the accumulated spatial deviation is: The cumulative time deviation is: ;therefore: ;because and The third scan cycle is recorded as the first judgment cycle exceeding the compensable range. After the fourth scan cycle ends, the continuous cycle window shifts forward by one cycle, accumulating the results for the second to fourth scan cycles: ; Therefore, we can conclude that: The cumulative spatial deviation and the cumulative temporal deviation still exceed [a certain threshold]. and Therefore, the fourth scan cycle is recorded as the second consecutive exceedance determination cycle. After the fifth scan cycle, window accumulation is performed on the third to fifth scan cycles: ; Therefore, we can conclude that: At this point, the 3rd, 4th, and 5th scan cycles form three consecutive judgment cycles exceeding the compensable range, reaching the number of consecutive over-limit cycles (3) set according to the array operation acceptance procedure. Therefore, Write the set of micromirror units to be recalibrated. Backfill according to the set structure: The controller is only for In Repeat step S1 to perform the calibration and acquisition process again, and re-acquire the data. The calibration spot position, drive command value, drive command issuance time, and response time are recorded under five calibration drive states. Using the updated calibration observation records, the spatial and temporal calibration processes in step S2 are re-executed to generate updated calibration data. and ; then based on the updated and Re-execute the coupling compensation calculations in steps S5 and S6, and update... The corresponding coupling spatiotemporal compensation parameters. Waiting to enter Each micromirror unit continues to maintain its current spatial calibration mapping relationship, temporal response mapping relationship, and coupling spatiotemporal compensation parameters, thereby completing continuous processing of multi-motion phase synchronization verification, cross-scan cycle cumulative deviation determination, and selective recalibration of micromirror units beyond the compensation range.

[0064] Based on the same inventive concept, as shown in the figure, the present invention also provides a calibration and synchronous scanning control system for a compound eye micromirror array, the system comprising: The calibration observation data generation module is used to obtain the calibration spot position, drive command value, drive command issuance time and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states, and to establish a calibration observation dataset according to the micromirror unit identifier and calibration drive state. The calibration mapping construction module is used to determine the optical null position and scanning direction of each micromirror unit based on the calibration observation dataset, construct the unit spatial calibration mapping relationship between the driving command value and the beam deflection state, and construct the unit temporal response mapping relationship between the driving state change and the response delay. The initial scan sequence generation module is used to acquire the array target scan trajectory, discretize the array target scan trajectory into a target scan state sequence with target state index according to a unified scan time base, determine the drive command value and initial trigger time of each micromirror unit under each target state index based on the unit space calibration mapping relationship and the unit time response mapping relationship, and generate the initial scan drive sequence. The spatiotemporal residual generation module is used to execute the initial scan drive sequence, synchronously acquire the actual spot position and actual arrival time of each micromirror unit, match the actual spot position with the corresponding target scan position according to the same target state index, and match the actual arrival time with the corresponding target arrival time to generate a spatiotemporal residual pair composed of spatial scan residual and temporal phase residual; The coupling offset generation module is used to determine the driving amplitude correction amount based on the spatial scan residual and the unit spatial calibration mapping relationship, determine the trigger timing correction amount based on the time phase residual and the unit timing response mapping relationship, determine the first coupling offset amount based on the change in the arrival time of the response generated by the driving amplitude correction amount through the unit timing response mapping relationship, and determine the second coupling offset amount based on the change in the scan position generated by the trigger timing correction amount at the corresponding position of the array target scan trajectory. The coupling spatiotemporal compensation module is used to correct the trigger timing correction amount using the first coupling offset and correct the driving amplitude correction amount using the second coupling offset, thereby generating coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index. The synchronous scanning control module is used to correct the driving command value and initial trigger time in the initial scanning driving sequence according to the coupling spatiotemporal compensation parameters, generate a synchronous scanning driving sequence, and select the target state index corresponding to different motion phases as a synchronous verification point in each scanning cycle. The closed-loop calibration update module is used to execute the synchronous scan drive sequence, regenerate the corresponding spatiotemporal residual pairs at each synchronous verification point, update the coupling spatiotemporal compensation parameters according to the spatiotemporal residual pairs, and determine the cumulative spatiotemporal deviation of each micromirror unit according to the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is identified as a micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship, and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

[0065] Based on the same inventive concept, such as Figure 7 As shown, the present invention also provides a calibration and synchronous scanning control system for a compound eye micromirror array, the system comprising: The calibration observation data generation module is used to obtain the calibration spot position, drive command value, drive command issuance time and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states, and to establish a calibration observation dataset according to the micromirror unit identifier and calibration drive state. The calibration mapping construction module is used to determine the optical null position and scanning direction of each micromirror unit based on the calibration observation dataset, construct the unit spatial calibration mapping relationship between the driving command value and the beam deflection state, and construct the unit temporal response mapping relationship between the driving state change and the response delay. The initial scan sequence generation module is used to acquire the array target scan trajectory, discretize the array target scan trajectory into a target scan state sequence with target state index according to a unified scan time base, determine the drive command value and initial trigger time of each micromirror unit under each target state index based on the unit space calibration mapping relationship and the unit time response mapping relationship, and generate the initial scan drive sequence. The spatiotemporal residual generation module is used to execute the initial scan drive sequence, synchronously acquire the actual spot position and actual arrival time of each micromirror unit, match the actual spot position with the corresponding target scan position according to the same target state index, and match the actual arrival time with the corresponding target arrival time to generate a spatiotemporal residual pair composed of spatial scan residual and temporal phase residual; The coupling offset generation module is used to determine the driving amplitude correction amount based on the spatial scan residual and the unit spatial calibration mapping relationship, determine the trigger timing correction amount based on the time phase residual and the unit timing response mapping relationship, determine the first coupling offset amount based on the change in the arrival time of the response generated by the driving amplitude correction amount through the unit timing response mapping relationship, and determine the second coupling offset amount based on the change in the scan position generated by the trigger timing correction amount at the corresponding position of the array target scan trajectory. The coupling spatiotemporal compensation module is used to correct the trigger timing correction amount using the first coupling offset and correct the driving amplitude correction amount using the second coupling offset, thereby generating coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index. The synchronous scanning control module is used to correct the driving command value and initial trigger time in the initial scanning driving sequence according to the coupling spatiotemporal compensation parameters, generate a synchronous scanning driving sequence, and select the target state index corresponding to different motion phases as a synchronous verification point in each scanning cycle. The closed-loop calibration update module is used to execute the synchronous scan drive sequence, regenerate the corresponding spatiotemporal residual pairs at each synchronous verification point, update the coupling spatiotemporal compensation parameters according to the spatiotemporal residual pairs, and determine the cumulative spatiotemporal deviation of each micromirror unit according to the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is identified as a micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship, and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

[0066] All equivalent changes and modifications made in accordance with the teachings of this invention are still within the scope of this invention. Those skilled in the art will readily conceive of other embodiments of this invention upon considering the specification and the disclosure of practical truth. This application is intended to cover any variations, uses, or adaptations of this invention that follow the general principles of this invention and include common knowledge or conventional techniques in the art not described herein.

Claims

1. A method for calibration and synchronous scanning control of a compound eye micromirror array, characterized in that, The method includes: The calibration spot position, drive command value, drive command issuance time and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states are obtained, and a calibration observation dataset is established according to the micromirror unit identifier and calibration drive state. Based on the calibration observation dataset, the optical null position and scanning direction of each micromirror unit are determined, the unit spatial calibration mapping relationship between the driving command value and the beam deflection state is constructed, and the unit temporal response mapping relationship between the driving state change and the response delay is constructed. The array target scanning trajectory is acquired, and the array target scanning trajectory is discretized into a target scanning state sequence with target state index according to a unified scanning time base. Based on the unit space calibration mapping relationship and the unit timing response mapping relationship, the driving command value and initial trigger time of each micromirror unit under each target state index are determined, and an initial scanning driving sequence is generated. The initial scanning drive sequence is executed, and the actual spot position and actual arrival time of each micromirror unit are acquired synchronously. The actual spot position is matched with the corresponding target scanning position according to the same target state index, and the actual arrival time is matched with the corresponding target arrival time to generate a spatiotemporal residual pair composed of spatial scanning residual and temporal phase residual. The driving amplitude correction amount is determined based on the spatial scan residual and the unit spatial calibration mapping relationship. The trigger timing correction amount is determined based on the time phase residual and the unit timing response mapping relationship. The first coupling offset amount is determined based on the change in the arrival time of the response generated by the driving amplitude correction amount through the unit timing response mapping relationship. The second coupling offset amount is determined based on the change in the scan position generated by the trigger timing correction amount at the corresponding position of the array target scan trajectory. The first coupling offset is used to correct the trigger timing correction amount, and the second coupling offset is used to correct the drive amplitude correction amount, thereby generating coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index; The driving command value and initial trigger time in the initial scan driving sequence are corrected according to the coupling spatiotemporal compensation parameters to generate a synchronous scan driving sequence, and the target state index corresponding to different motion phases is selected as the synchronization verification point in each scan cycle. The synchronous scan drive sequence is executed, and corresponding spatiotemporal residual pairs are regenerated at each synchronous verification point. The coupling spatiotemporal compensation parameters are updated according to the spatiotemporal residual pairs. The cumulative spatiotemporal deviation of each micromirror unit is determined according to the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is determined as a micromirror unit to be recalibrated. The corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

2. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 1, characterized in that, The process involves acquiring the calibration spot position, drive command value, drive command issuance time, and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states, and establishing a calibration observation dataset according to the micromirror unit identifier and calibration drive state, including: A calibration reference plane with a defined spatial positional relationship to the compound eye micromirror array is set, and a calibration coordinate system is established on the calibration reference plane; Drive commands are issued to each micromirror unit according to multiple calibration drive states. The time of issuance of each drive command is recorded through a unified clock domain, and the position sequence of the light spot formed by the corresponding micromirror unit on the calibration reference plane is continuously acquired. The calibration spot position that matches the corresponding calibration driving state is determined from the spot position sequence, and the moment when the spot enters the corresponding calibration position range is determined as the response moment; The calibration spot position, drive command value, drive command issuance time and response time corresponding to the same micromirror unit and the same calibration drive state are associated to establish a calibration observation dataset.

3. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 2, characterized in that, The process of determining the optical null position and scanning direction of each micromirror unit based on the calibration observation dataset, constructing a unit spatial calibration mapping relationship between the driving command value and the beam deflection state, and constructing a unit temporal response mapping relationship between the driving state change and the response delay includes: Based on the spatial relationship between the calibration reference plane and the compound eye micromirror array, the positions of each calibration spot are converted into corresponding beam deflection states; The optical null position and scanning direction of the corresponding micromirror unit are determined according to the beam deflection state corresponding to multiple calibration driving states, and the driving command value and the beam deflection state are sequentially associated according to the scanning direction to construct a reversible spatial calibration mapping relationship of the unit within the working scanning range. Calculate the response delay between the response time and the drive command issuance time under the same calibration drive state, and associate the response delay with the drive command value and the drive change between adjacent calibration drive states to construct a unit timing response mapping relationship.

4. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 3, characterized in that, The process of acquiring the array target scanning trajectory involves discretizing the array target scanning trajectory into a target scanning state sequence with target state indices according to a unified scanning time base. Based on the unit spatial calibration mapping relationship and the unit temporal response mapping relationship, the driving command value and initial trigger time of each micromirror unit under each target state index are determined, and an initial scanning driving sequence is generated, including: Obtain the target scanning range, scanning direction, and scanning period, and generate the array target scanning trajectory; The array target scanning trajectory is discretized according to the unified scanning time base, and a target state index and target arrival time are configured for the target scanning position corresponding to each discrete time, thereby generating the target scanning state sequence. The scanning positions of each target are converted to the local scanning coordinates of the corresponding micromirror unit, and the corresponding driving command values ​​are calculated in reverse according to the unit space calibration mapping relationship; The response delay of the corresponding drive instruction value is determined according to the unit timing response mapping relationship, and the initial triggering time is determined by using the response delay relative to the target arrival time; The initial scan drive sequence is generated by arranging the drive instruction values ​​and the initial trigger time according to the target state index.

5. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 4, characterized in that, The initial scan drive sequence is executed, synchronously acquiring the actual spot position and actual arrival time of each micromirror unit. The actual spot position is matched with the corresponding target scan position according to the same target state index, and the actual arrival time is matched with the corresponding target arrival time, generating a spatiotemporal residual pair composed of spatial scan residual and temporal phase residual, including: The initial scan drive sequence is executed, and the actual spot trajectory of each micromirror unit is acquired according to the unified scan time base; Establish a time matching interval centered on the target arrival time corresponding to each target state index, and determine the actual spot position and actual arrival time of the corresponding target state index from the actual spot trajectory; Calculate the positional difference between the actual spot position and the corresponding target scanning position to generate a spatial scanning residual; Calculate the time difference between the actual arrival time and the corresponding target arrival time to generate a time phase residual; The spatial scan residuals belonging to the same micromirror unit and having the same target state index are paired with the temporal phase residuals to generate the spatiotemporal residual pairs.

6. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 5, characterized in that, The generation of coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index includes: The spatial scanning residual is projected along the scanning direction of the corresponding micromirror unit, and the projected spatial scanning residual is converted into a driving amplitude correction amount according to the unit spatial calibration mapping relationship. The time phase residual is converted into a trigger timing correction amount according to the unit timing response mapping relationship; Substitute the driving state after applying the driving amplitude correction into the unit timing response mapping relationship to determine the change in response delay relative to the original correction, and generate the first coupling offset. Based on the target state index and the target scan position change relationship between the corresponding target state index and its adjacent target state index, the time shift corresponding to the trigger timing correction amount is converted into a scan position change amount to generate a second coupling offset. The trigger timing correction is corrected using the first coupling offset, and the drive amplitude correction is corrected using the second coupling offset. The corrected drive amplitude correction and the corrected trigger timing correction are associated as the coupling spatiotemporal compensation parameter.

7. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 6, characterized in that, The step of correcting the drive command value and initial trigger time in the initial scan drive sequence according to the coupling spatiotemporal compensation parameters to generate a synchronous scan drive sequence, and selecting the target state index corresponding to different motion phases as the synchronization verification point in each scan cycle, includes: The drive amplitude correction amount corresponding to each target state index is superimposed on the corresponding drive command value, and the initial trigger time is adjusted according to the corresponding trigger timing correction amount to obtain the corrected drive command value and the corrected trigger time. Arrange the corrected drive instruction values ​​and the corrected trigger times according to the target state index to generate the synchronous scan drive sequence; Determine the target state indices corresponding to the scan start phase, scan reversal phase, and scan end phase from the target scan state sequence, and select at least two target state indices belonging to different motion phases as the synchronization verification points.

8. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 7, characterized in that, The execution of the synchronous scan drive sequence, regenerating corresponding spatiotemporal residual pairs at each of the synchronous check points, and updating the coupled spatiotemporal compensation parameters based on the spatiotemporal residual pairs include: During the execution of the synchronous scanning drive sequence, the actual spot position and actual arrival time corresponding to each synchronous check point are obtained respectively, and the spatial scanning residual and temporal phase residual corresponding to each synchronous check point are regenerated. According to the target state index corresponding to the synchronization verification point, each spatial scan residual and each temporal phase residual are paired to obtain a verification spatiotemporal residual pair; Based on the multiple spatiotemporal residual pairs corresponding to different motion phases, determine the spatial residual change and temporal residual change within the same scan cycle; The driving amplitude correction, trigger timing correction, first coupling offset, and second coupling offset are re-determined using the spatial residual change and the temporal residual change, and updated coupling spatiotemporal compensation parameters are generated and used in the next scan cycle.

9. The calibration and synchronous scanning control method for a compound eye micromirror array according to claim 8, characterized in that, The step of determining the cumulative spatiotemporal deviation of each micromirror unit based on the update results of multiple scanning cycles, and determining the corresponding micromirror unit as a micromirror unit to be recalibrated when the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, includes: The spatial scanning residuals and temporal phase residuals of each micromirror unit at the synchronous verification point are collected in the order of scanning cycle to generate a unit spatiotemporal deviation sequence. Based on the unit spatiotemporal deviation sequence, the cumulative spatial deviation and the cumulative temporal deviation are determined respectively, and the cumulative spatiotemporal deviation is generated; The accumulated spatiotemporal deviation is compared with the compensable range corresponding to the coupled spatiotemporal compensation parameter. When the same micromirror unit exceeds the compensable range within a consecutive preset number of scanning cycles, the corresponding micromirror unit is determined as a micromirror unit to be recalibrated. The calibration observation data is re-established only for the micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship and unit temporal response mapping relationship are updated based on the re-established calibration observation data, thereby updating the corresponding coupling spatiotemporal compensation parameters.

10. A calibration and synchronous scanning control system for a compound eye micromirror array, characterized in that, The system includes: The calibration observation data generation module is used to obtain the calibration spot position, drive command value, drive command issuance time and response time of each micromirror unit in the compound eye micromirror array under multiple calibration drive states, and to establish a calibration observation dataset according to the micromirror unit identifier and calibration drive state. The calibration mapping construction module is used to determine the optical null position and scanning direction of each micromirror unit based on the calibration observation dataset, construct the unit spatial calibration mapping relationship between the driving command value and the beam deflection state, and construct the unit temporal response mapping relationship between the driving state change and the response delay. The initial scan sequence generation module is used to acquire the array target scan trajectory, discretize the array target scan trajectory into a target scan state sequence with target state index according to a unified scan time base, determine the drive command value and initial trigger time of each micromirror unit under each target state index based on the unit space calibration mapping relationship and the unit time response mapping relationship, and generate the initial scan drive sequence. The spatiotemporal residual generation module is used to execute the initial scan drive sequence, synchronously acquire the actual spot position and actual arrival time of each micromirror unit, match the actual spot position with the corresponding target scan position according to the same target state index, and match the actual arrival time with the corresponding target arrival time to generate a spatiotemporal residual pair composed of spatial scan residual and temporal phase residual; The coupling offset generation module is used to determine the driving amplitude correction amount based on the spatial scan residual and the unit spatial calibration mapping relationship, determine the trigger timing correction amount based on the time phase residual and the unit timing response mapping relationship, determine the first coupling offset amount based on the change in the arrival time of the response generated by the driving amplitude correction amount through the unit timing response mapping relationship, and determine the second coupling offset amount based on the change in the scan position generated by the trigger timing correction amount at the corresponding position of the array target scan trajectory. The coupling spatiotemporal compensation module is used to correct the trigger timing correction amount using the first coupling offset and correct the driving amplitude correction amount using the second coupling offset, thereby generating coupling spatiotemporal compensation parameters for each micromirror unit under the corresponding target state index. The synchronous scanning control module is used to correct the driving command value and initial trigger time in the initial scanning driving sequence according to the coupling spatiotemporal compensation parameters, generate a synchronous scanning driving sequence, and select the target state index corresponding to different motion phases as a synchronous verification point in each scanning cycle. The closed-loop calibration update module is used to execute the synchronous scan drive sequence, regenerate the corresponding spatiotemporal residual pairs at each synchronous verification point, update the coupling spatiotemporal compensation parameters according to the spatiotemporal residual pairs, and determine the cumulative spatiotemporal deviation of each micromirror unit according to the update results of multiple scan cycles. When the cumulative spatiotemporal deviation of any micromirror unit exceeds the corresponding compensation range, the corresponding micromirror unit is identified as a micromirror unit to be recalibrated, and the corresponding unit spatial calibration mapping relationship, unit timing response mapping relationship, and coupling spatiotemporal compensation parameters are updated for the micromirror unit to be recalibrated.

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