A high-precision laser lens debugging method

Abstract

The application relates to the technical field of optical lens adjustment, and particularly provides a high-precision laser lens debugging method, which comprises prism debugging, dichroic mirror debugging, front lens barrel debugging, prism path lens debugging and dichroic mirror path lens debugging. The method takes the mechanical reference surface of the main support as a reference, converts the mechanical reference into observable and quantifiable optical imaging reference through a double-light-path interferometer, adjusts the prism, the dichroic mirror, the front lens barrel, the first lens and the second lens according to the optical imaging reference, so that the overall optical path deviation value reaches the level of seconds compared with the theoretical value, and the assembly requirement of the high-precision laser optical system is met.

Description

Technical Field

[0001] This invention relates to the field of optical lens assembly and adjustment technology, and in particular to a high-precision laser lens adjustment method. Background Technology

[0002] With the rapid development of optical systems such as laser detection, the requirements for optical path concentricity and relative positional accuracy of various optical components in laser lenses are constantly increasing. Some high-precision laser lenses require optical path coaxiality and component tilt accuracy to reach the arcsecond level. For laser lenses that include prisms, dichroic mirrors, and multiple lenses, not only must the eccentricity and tilting errors of the lenses themselves be strictly controlled, but the optical paths between each lens group must also be controlled within the set deviations.

[0003] Currently, the conventional optical lens assembly method in the industry mostly uses tooling for positioning and threaded clamping to complete lens assembly. During the assembly process, errors accumulate step by step, making it difficult to achieve arcsecond-level concentricity control for the eccentricity and tilt accuracy of a single lens, and it is also difficult to guarantee the optical path correlation between different lens groups. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a high-precision laser lens adjustment method that can achieve lens assembly with concentricity at the arcsecond level and ensure the optical path correlation between multiple lens groups.

[0005] This invention is implemented as follows: This invention provides a high-precision laser lens adjustment method, including prism adjustment, dichroic mirror adjustment, front lens barrel adjustment, prism path lens adjustment, and dichroic mirror path lens adjustment; The prism adjustment includes the following steps: Step S11: Fix the first flat plate to the end face of the first lens barrel, and leave a gap between the first flat plate and the first lens barrel; Step S12: Install the fixture on the first fixture mounting hole and clamp the fixture with the three-jaw chuck of the dual-path interferometer; Step S13: Turn the dual-path interferometer to the empty objective lens, turn on the visible light source, insert a piece of paper into the slit, and observe the image that disappears on the computer software interface. This is the prism reflection image. Place the second flat plate on the front end of the main support. The brightest cross image that appears on the computer software interface is the flat plate reflection image. Repeatedly remove and place the second flat plate until the position of the cross image on the computer software interface remains unchanged. Set the coordinate position initialization on the computer software interface, remove the second flat plate and the piece of paper, and adjust the second set screw to make the prism reflection image coincide with the red cross on the software interface. Step S14: Place the second flat plate again, set the coordinate initialization in the computer software interface, remove the second flat plate, adjust the pitch knob of the air-floating stage of the dual-beam interferometer so that the prism reflection image coincides with the red cross on the software interface, observe the value on the software interface, if the value is less than the set threshold, inject glue into the first glue groove, and after the glue has cured, remove the second set screw. The dichroic mirror adjustment includes the following steps: Step S21: Fix the third flat plate in the groove, and leave a gap between the third flat plate and the first through hole. The dual-path interferometer is rotated to the empty objective lens and switched to a 780nm light source. Step S22: Insert a piece of paper into the gap and observe the image that disappears on the computer software interface. This image is the reflection image from the dichroic mirror. Step S23: Place the second flat plate on the front end of the main support, initialize the coordinate settings in the software interface, remove the second flat plate and the paper, and adjust the third top screw so that the image reflected by the dichroic mirror coincides with the red cross on the software interface. Step S24: Place the second flat plate again, initialize the coordinate settings in the software interface, remove the second flat plate, adjust the pitch knob of the air-floating stage of the dual-path interferometer to make the dichroic mirror reflection image coincide with the red cross, observe the value on the software interface, if the value is less than the set threshold, inject glue into the second glue groove, and after the glue has cured, remove the third set screw. The front lens barrel adjustment includes the following steps: Step S31: Rotate the dual-path interferometer to the F100 objective lens, turn on the visible light source, calibrate the tilt and coaxiality, and then install the front lens barrel into the front lens barrel mounting hole of the main support. Step S32: Using transmitted light, control the lifting platform of the dual-path interferometer to move up and down to find the focal image of the front lens barrel. In the computer software interface, set the corresponding reference lens and measurement unit, and adjust the first set screw so that the focal image coincides with the red cross on the software interface. Measure the deviation between the front lens barrel's transmitted focal point and the air-bearing stage's rotation axis. If the deviation is less than the set threshold, inject glue into the gap between the front lens barrel and the main support and into the third glue groove. After the glue has cured, remove the main support. Prism path lens adjustment includes the following steps: Step S41: Remove the first flat plate, the third flat plate, and the tooling from the main support, install the tooling in the second tooling mounting hole, and clamp the tooling with the three-jaw chuck of the dual-path interferometer. Step S42: The dual-path interferometer is switched to the F100 objective lens, and the reflected light source is turned on. After calibrating the tilt and coaxiality, glue is applied to the inner wall of the first lens barrel, and the first lens is placed in. The lifting platform is moved up and down to find the reflected image on the side of the first lens. The reflected image on the side of the first lens is adjusted to coincide with the red cross on the software interface until the deviation between the measured reflected image on the side of the first lens and the rotation axis of the air-bearing stage is less than the set threshold. After the glue has cured, the main support is removed. The adjustment of a dichroic mirror path lens includes the following steps: Step S51: Install the fixture into the third fixture mounting hole and clamp the fixture with the three-jaw chuck of the dual-path interferometer. Step S52: Rotate the dual-path interferometer to the F100 objective lens, and calibrate and calibrate the tilt and coaxiality of the tooling center line. Apply glue to the inner wall of the first light-transmitting hole of the dichroic mirror holder, and place the second lens in. Move the lifting platform up and down to find the reflected image on the side of the second lens image, and adjust the reflected image on the side of the second lens image to coincide with the red cross on the software interface until the deviation value between the measured reflected image on the side of the second lens image and the rotation axis of the air-bearing stage is less than the set threshold. After the glue has cured, screw the pressure ring on the dichroic mirror holder.

[0006] Furthermore, in step S11, the first flat sheet is fixed by UV-curing adhesive.

[0007] Furthermore, in step S21, the third flat sheet is fixed by UV-curing adhesive.

[0008] Furthermore, in step S14, after placing the second flat film again, the type of reference lens and the type of measurement unit are selected in the computer software interface, and then the coordinate initialization is set. After the glue has cured, adjust the pitch knob again to make the prism reflection image coincide with the red cross on the software interface. Place the second flat plate. If the value on the software interface is less than the set threshold, remove the second set screw.

[0009] Furthermore, in step S24, after the glue has cured, adjust the pitch knob again so that the reflected image of the dichroic mirror coincides with the red cross on the software interface, place the second flat plate, and if the value on the software interface is less than the set threshold, remove the third set screw.

[0010] Furthermore, in step S32, before measuring the deviation between the front lens barrel's transmission focal point and the air-bearing stage's rotation axis, the type of reference lens and the type of measurement unit are selected in the computer software interface. After the glue has cured, measure the deviation between the front lens barrel's transmission focal point and the air-bearing platform's rotation axis again. If the deviation is less than the set threshold, remove the main support bracket.

[0011] Furthermore, in step S42, after the adhesive has cured, the deviation between the reflected image on the side of the first lens and the rotation axis of the air-bearing platform is measured again. If the deviation is less than the set threshold, the main support is removed.

[0012] Furthermore, in step S52, after the adhesive has cured, the deviation between the reflected image on the side of the second lens and the rotation axis of the air-bearing stage is measured again. If the deviation is less than the set threshold, a pressure ring is screwed onto the dichroic mirror bracket.

[0013] The beneficial effects of this invention are as follows: In this invention, the mechanical reference plane of the main support is used as a reference, and the mechanical reference is transformed into an optical imaging reference that can be directly observed and quantified by using a dual-optical-path interferometer; the assembly of the prism, dichroic mirror, front lens barrel, first lens and second lens are all based on the mechanical reference to complete the parameter adjustment, which can stably control the optical path coaxiality and component tilt accuracy at the arcsecond level, fully adapting to the optical system of high-precision laser lenses. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0015] Figure 1 This is a schematic diagram of the exploded structure of the laser lens in this invention. Figure 1 .

[0016] Figure 2 This is a schematic diagram of the exploded structure of the laser lens in this invention. Figure 2 .

[0017] Figure 3 This is a schematic diagram of the exploded structure of the laser lens in this invention. Figure 3 .

[0018] Figure 4 This is a schematic diagram of the exploded structure of the laser lens in this invention after the various lens groups are hidden.

[0019] Figure 5 This is a schematic diagram of the main support structure in this invention. Figure 1 .

[0020] Figure 6 This is a schematic diagram of the main support structure in this invention. Figure 2 .

[0021] Figure 7 This is a schematic diagram of the main support structure in this invention. Figure 3 .

[0022] Figure 8 This is a schematic diagram of the dichroic mirror support structure in the present invention. Figure 1 .

[0023] Figure 9 This is a schematic diagram of the dichroic mirror support structure in the present invention. Figure 2 .

[0024] Figure 10 This is a schematic diagram of the prism support structure in this invention.

[0025] Figure 11 This is a schematic diagram of the tooling structure in this invention.

[0026] Figure 12 This is a schematic diagram of the front lens barrel structure in this invention.

[0027] Figure 13 This is a diagram showing the state of the prism support during debugging in this invention.

[0028] Figure 14 for Figure 13 Enlarged view of a portion of point A in the middle.

[0029] Figure 15 This is a diagram showing the state of the dichroic mirror support during debugging in this invention.

[0030] Figure 16 for Figure 15 Enlarged view of section B in the middle.

[0031] Figure 17 This is a schematic diagram showing the connection between the tooling and the main support during the adjustment of the prism path lens in this invention.

[0032] Figure 18 This is a schematic diagram showing the connection between the tooling and the main support during the adjustment of the dichroic mirror lens in this invention.

[0033] Figure 19 This is a schematic diagram of the high-precision laser lens debugging process according to the present invention.

[0034] Explanation of the labels in the diagram: 1. Main support; 101. Front lens barrel mounting hole; 102. First side; 103. Second side; 104. Third side; 1041. Second tooling mounting hole; 1042. Third tooling mounting hole; 105. Prism support adjustment area; 1051. First adhesive groove; 106. Dichroic mirror support adjustment area; 1061. Second adhesive groove; 107. Third adhesive groove; 108. First tooling mounting hole; 2. Dichroic mirror support; 201. First light-transmitting hole; 3. Prism support 31. Second light-transmitting hole; 4. Dichroic mirror; 5. Prism; 6. Front lens barrel; 61. Mounting tube; 62. Cemented lens; 63. Retaining ring; 7. First lens; 8. Second lens; 9. First set screw; 10. First lens barrel; 11. Groove; 111. First through hole; 12. Positioning hole; 13. Threaded hole; 14. Cover plate; 15. Tooling sealing cover; 16. Second set screw; 17. Third set screw; 18. First flat plate; 19. Second flat plate; 20. Third flat plate; 21. Tooling. Detailed Implementation

[0035] Please see Figures 1 to 19 This invention provides a high-precision laser lens debugging method. The laser lens 100 in this embodiment includes: a main support 1, a dichroic mirror support 2, a prism support 3, a dichroic mirror 4, a prism 5, a front lens barrel 6, a first lens 7, and a second lens 8. As shown in the figure, the prism support 3 is L-shaped, and its two sides are in contact with the first side 102 and the second side 103 of the main support 1, respectively. In this embodiment, the front lens barrel 6 is a pre-assembled component. The front lens barrel 6 includes a mounting cylinder 61, a plurality of cemented lenses 62 disposed in the mounting cylinder 61, and a fixing ring 63 for fixing the cemented lenses 62 in the mounting cylinder 61. A spacer 64 is provided between two adjacent cemented lenses 62. The dichroic mirror holder 2 has a square shape and an inclined mounting groove 202 is provided on the dichroic mirror holder 2 for mounting the dichroic mirror 4; the two sides of the dichroic mirror holder 2 are in contact with the first side 102 and the second side 103 of the main body holder 1, respectively. The main support 1 is provided with a receiving groove, and the dichroic mirror support 2 and the prism support 3 are located in the receiving groove; The dichroic mirror 4 and the prism 5 are respectively connected to the dichroic mirror support 2 and the prism support 3; The front end of the main support 1 is provided with a front lens barrel mounting hole 101 for mounting the front lens barrel 6, and there is a gap between the outer wall of the front lens barrel 6 and the inner wall of the front lens barrel mounting hole 101. The side of the main support 1 is provided with a plurality of first set screws 9 for adjusting the front lens barrel 6. The first side 102 of the main support 1 is provided with a first lens barrel 10 and a groove 11. The first lens barrel 10 is used to install the first lens 7. The groove 11 is provided with a first through hole 111. The dichroic mirror support 2 is provided with a first light-transmitting hole 201. The second lens 8 is installed in the first light-transmitting hole 201, and the first light-transmitting hole 201 enables the second lens 8 to be connected to the light path of the dichroic mirror 4. The first light-transmitting hole 201 is connected to the first through hole 111. The prism support 3 is provided with a second light-transmitting hole 31, which enables the prism 5 to be connected to the light path of the first lens 7. The first side 102 and the second side 103 of the main body bracket 1 are each provided with a prism bracket adjustment area 105 and a dichroic mirror bracket adjustment area 106. The first side 102 and the second side 103 are perpendicular to each other. Each prism bracket adjustment area 105 is provided with a second set screw 16, and each dichroic mirror bracket adjustment area 106 is provided with a third set screw 17. The first set screw 9, the second set screw 16 and the third set screw 17 are screws or tension bolts with springs. The prism support 3 is mounted inside the main support 1 via a second set screw, and the dichroic mirror support 2 is mounted inside the main support 1 via a third set screw. The prism support adjustment area 105 also has several first glue grooves 1051 for fixing the prism support 3. After the prism support 3 is adjusted, glue is injected into the first glue grooves 1051 to fix the prism support 3. The dichroic mirror support adjustment area 106 also has several second glue grooves 1061 for fixing the dichroic mirror support 2. After the dichroic mirror support 2 is adjusted, glue is injected into the second glue grooves 1061 to fix the dichroic mirror support 2. Similarly, on the outer wall of the main support 1, a third glue groove 107 communicating with the front lens barrel mounting hole 101 is also provided. After the front lens barrel 6 is adjusted, glue is injected into the third glue groove 107 to fix the front lens barrel 6. The rear end of the main support 1 is provided with a first tooling mounting hole 108, which is coaxial with the front lens barrel mounting hole 101. The third side 104 of the main support 1 is provided with a second tooling mounting hole 1041 and a third tooling mounting hole 1042, which are opposite to the first side 102. The second tooling mounting hole 1041 is coaxial with the first lens barrel 10, and the third tooling mounting hole 1042 is coaxial with the first through hole 111. 08. The second tooling mounting hole 1041 and the third tooling mounting hole 1042 are both countersunk hole structures, as shown in the figure. They include a positioning hole 12 and a threaded hole 13. The three positioning holes 12 are coaxial with the corresponding front lens barrel mounting hole 101, the first lens barrel 10 and the first through hole 111. The outer wall of the tooling is provided with a positioning surface that matches the positioning hole 12. When the tooling 21 is installed in the first tooling mounting hole 108, the second tooling mounting hole 1041 or the third tooling installation, the positioning surface is embedded in the positioning hole 12.

[0036] In this embodiment, there is also a cover plate 14 for closing the receiving groove and a tooling sealing cover 15 for closing the tooling mounting hole. The debugging method includes prism debugging, dichroic mirror debugging, front lens barrel debugging, prism path lens debugging, and dichroic mirror path lens debugging; in this invention, the dual-path interferometer used is a dual-path interferometer manufactured by Fuzhou Huayou Optical Instrument Co., Ltd.

[0037] In the following debugging steps, the first flat sheet, the second flat sheet, and the third flat sheet are flat glass.

[0038] The adjustment of prism 5 includes the following steps: Step S11: Fix the first flat plate 18 to the end face of the first lens barrel 10, and leave a gap between the first flat plate and the first lens barrel 10, such as... Figure 14 As shown; More specifically, after cleaning the end face of the first lens barrel 10 and the first plate 18, apply a small amount of glue to the end face of the first lens barrel 10, place the first plate on it, and irradiate it with an ultraviolet lamp for 5-10 seconds to prevent the first plate from falling off.

[0039] Step S12: Install the fixture on the first fixture mounting hole 108, and clamp the fixture with the three-jaw chuck of the dual-optical-path interferometer; at this time, the main support is in an upright state. Step S13: Switch the dual optical path interferometer to the empty objective lens, turn on the visible light source, insert a piece of paper at the slit, and the disappearing image observed on the computer software interface is the prism reflection image. Place the second flat plate at the front end of the main support 1, and the brightest cross image appearing on the computer software interface is the flat plate reflection image. Take and place the second flat plate multiple times until the position of the cross image on the computer software interface remains unchanged or the position variation is less than the variation specified in the process. Perform coordinate position initialization on the computer software interface, remove the second flat plate 19 and the paper sheet. After the coordinate position initialization is set, the cross image turns into a red cross image (that is, the red cross image is formed by fitting with the software supporting the dual optical path interferometer). At this time, adjust the second jackscrew to make the prism reflection image coincide with the red cross on the software interface; Step S14: Place the second flat plate again. To prevent a slight deviation between the position of the cross image appearing this time and the previous cross image, set the coordinate initialization again in the computer software interface, remove the second flat plate, adjust the pitch knob of the air floatation stage of the dual optical path interferometer to make the prism reflection image coincide with the red cross on the software interface, observe the value on the software interface, and if the value is less than the set threshold, inject glue into the first dispensing tank, and unload the second jackscrew after the glue is cured. In step S14, the set threshold is 10". Compared with the flat plate reflection image, the energy of the prism reflection image is weaker, and the computer can identify the flat plate reflection image with stronger energy. Therefore, the prism reflection image is adjusted to coincide with the red cross, and the read value is the deviation value.

[0040] The debugging of the dichroic mirror includes the following steps: Step S21: Fix the third flat plate 20 in the groove 11, and a slit is reserved between the third flat plate and the first through hole 111, as shown in Figure 16 the figure, the dual optical path interferometer is switched to the empty objective lens and switched to a 780nm light source; More specifically, after the end face of the groove 11 and the third flat plate 20, a small amount of glue is applied to the end face of the groove 11, then the third flat plate 20 is placed, and irradiated with an ultraviolet lamp for 5-10 seconds, so that the third flat plate 20 will not fall off.

[0041] Step S22: Insert a piece of paper at the slit, and the disappearing image observed on the computer software interface is the reflection image of the dichroic mirror; Step S23: Place the second flat plate at the front end of the main support 1, and the brightest cross image appearing on the computer software interface is the flat plate reflection image. Take and place the second flat plate multiple times until the position of the cross image on the computer software interface remains unchanged or the position variation is less than the variation specified in the process. Perform coordinate initialization on the software interface. After the coordinate position initialization is set, the cross image turns into a red cross image, remove the second flat plate and the paper sheet, adjust the third jackscrew to make the dichroic mirror reflection image coincide with the red cross on the software interface; Step S24: Place the second flat plate again. To prevent slight deviations between the current cross image and the previous cross image, reset the coordinates in the computer software interface. Remove the second flat plate and adjust the pitch knob of the dual-path interferometer's air-bearing stage to align the dichroic mirror reflection image with the red cross. Observe the value on the software interface. If the value is less than the set threshold, inject glue into the second glue tank. After the glue cures, remove the third set screw. In step S24, the set threshold is 10″. Compared to the flat plate reflection image, the dichroic mirror reflection image has weaker energy. The computer can recognize the stronger flat plate reflection image, so the dichroic mirror reflection image is adjusted to align with the red cross, and the read value is the deviation value.

[0042] The front lens barrel adjustment includes the following steps: Step S31: The dual-path interferometer is switched to the F100 objective lens, the visible light source is turned on, and after calibrating the tilt and coaxiality, the front lens tube 6 is installed in the front lens tube mounting hole 101 of the main support 1. In this step, calibrating the tilt refers to the degree of tilt between the normal of the second flat surface and the optical axis, and calibrating the coaxiality refers to the coaxiality between the central axis of the main support and the rotation axis of the air-bearing stage.

[0043] In step S31, the tilt calibration specifically involves placing the second flat plate, clicking "Measure Current Row" in the software interface to measure the tilt degree between the normal to the surface of the second flat plate and the optical axis. After the measurement is completed, adjust the two pitch knobs of the dual-path interferometer's air-bearing stage so that the reflected image of the second flat plate coincides with the red crosshair, indicating that the tilt calibration has been completed. The coaxial calibration process is as follows: Remove the second flat plate, place the standard sphere on it, rotate the dual-path interferometer to the F100 objective lens, move the lifting platform up and down to find the cat's eye image of the standard sphere, move the lifting platform down to find the center image of the standard sphere, click to measure the current row, measure the coaxiality between the central axis of the main support and the rotation axis of the air-bearing platform, and adjust the two translation knobs of the air-bearing platform to make the center image of the sphere coincide with the red cross. Step S32: Using transmitted light, control the lifting platform of the dual-path interferometer to move up and down to find the focal image of the front lens barrel 6. In the computer software interface, set the corresponding reference lens type to F100, select the measurement unit as "″", which is the second in angle measurement unit (also known as arcsecond), and adjust the first set screw 9 so that the focal image coincides with the red cross on the software interface. Measure the deviation value between the transmitted focal point of the front lens barrel 6 and the rotation axis of the air-bearing stage. If the deviation value is less than the set threshold, inject glue into the gap between the front lens barrel 6 and the main support 1 and into the third glue groove. After the glue cures, remove the main support 1. In step S32, the set threshold is 15″.

[0044] Prism path lens adjustment includes the following steps: Step S41: Remove the first flat piece, the third flat piece, and the tooling from the main support 1, and install the tooling in the second tooling mounting hole 1041 (e.g., Figure 17 (The instrument is positioned such that) the three-jaw chuck of the dual-path interferometer clamps the fixture; to more clearly demonstrate the connection between the fixture and the main support, Figure 17 The diagram in the image hides the already adjusted prism, dichroic lens, and front mirror group; Step S42: The dual-path interferometer is switched to the F100 objective lens, and the reflected light source is turned on. After calibrating the tilt and coaxiality, glue is applied to the inner wall of the first lens barrel 10, and the first lens 7 is placed in. The lifting platform is moved up and down to find the reflected image on the side of the first lens 7, and the reflected image on the side of the first lens 7 is adjusted to coincide with the red cross on the software interface until the deviation between the measured reflected image on the side of the first lens 7 and the rotation axis of the air-bearing stage is less than the set threshold. After the glue cures, the main support 1 is removed. When adjusting the reflected image on the side of the first lens 7, tweezers can be used to fix it in the inner wall of the first lens barrel and move the first lens to achieve the adjustment purpose. In step S42, the set threshold is 15″.

[0045] In step S42, calibrating tilt refers to the degree of tilt between the normal of the flat surface and the optical axis, and calibrating coaxiality refers to the coaxiality between the central axis of the first lens barrel and the rotation axis of the air-bearing stage.

[0046] The tilt calibration is performed as follows: Place a flat plate on the first lens tube, and click "Measure Current Row" in the software interface to measure the tilt between the normal to the flat plate surface and the optical axis. After the measurement is completed, adjust the two pitch knobs of the dual-path interferometer's air-bearing stage so that the reflected image of the second flat plate coincides with the red crosshair. The specific steps for calibrating the coaxiality are as follows: Remove the flat plate, place the standard sphere on the first lens tube, rotate the dual-path interferometer to the F100 objective lens, move the lifting platform up and down to find the cat's eye image of the standard sphere, move the lifting platform down to find the center image of the standard sphere, click to measure the current row to measure the coaxiality between the central axis of the first lens tube and the rotation axis of the air-bearing stage, and adjust the two translation knobs of the air-bearing stage to make the center image of the sphere coincide with the red cross. The adjustment of a dichroic mirror path lens includes the following steps: Step S51: Install the tooling into the third tooling mounting hole 1042 (e.g.) Figure 18 (As shown), and clamp the fixture with the three-jaw chuck of the dual-path interferometer; to more clearly demonstrate the connection between the fixture and the main support, Figure 18 The diagram in the image conceals the already adjusted prism, dichroic lens, front lens group, and first lens; Step S52: Rotate the dual-path interferometer to the F100 objective lens, and after calibrating the tilt and coaxiality, apply glue to the inner wall of the first light-transmitting hole 201 of the dichroic mirror holder 2, and place the second lens 8. Move the lifting platform up and down to find the reflected image on the side of the second lens 8, and adjust the reflected image on the side of the second lens 8 to coincide with the red cross on the software interface until the measured deviation between the reflected image on the side of the second lens 8 and the rotation axis of the air-bearing stage is less than the set threshold. After the glue has cured, screw the pressure ring 63 onto the dichroic mirror holder 2. When adjusting the side of the second lens 8, the second lens can be gently moved with a cotton swab to achieve the adjustment purpose. In step S52, the set threshold is 20″.

[0047] In step S52, calibrating the tilt refers to the degree of tilt between the normal of the flat surface and the optical axis, and calibrating the coaxiality refers to the coaxiality between the central axis of the first light-transmitting hole and the rotation axis of the air-bearing platform.

[0048] The tilt calibration process involves placing a flat plate on the groove, clicking "Measure Current Row" in the software interface, and measuring the tilt between the normal to the flat plate surface and the optical axis. After measurement, adjust the two pitch knobs of the dual-path interferometer's air-bearing stage to align the reflected image of the second flat plate with the red crosshair. The specific steps for calibrating the coaxiality are as follows: Remove the flat plate, place the standard sphere at the first light-transmitting aperture, rotate the dual-path interferometer to the F100 objective lens, move the lifting platform up and down to find the cat's-eye image of the standard sphere, move the lifting platform down to find the center image of the standard sphere, click to measure the current row to measure the coaxiality between the central axis of the first light-transmitting aperture and the rotation axis of the air-bearing stage, and adjust the two translation knobs of the air-bearing stage to make the center image of the sphere coincide with the red cross. Specifically, in step S11, the first flat sheet is fixed by UV-curing adhesive.

[0049] Specifically, in step S21, the third flat sheet is fixed by UV-curing adhesive.

[0050] Specifically, in step S14, after placing the second flat film again, first select the reference lens type as inf in the computer software interface, select the measurement angle unit as "″, and then set the coordinate initialization. After the glue has cured, adjust the pitch knob again to make the prism reflection image coincide with the red cross on the software interface. Place the second flat plate. If the value on the software interface is less than the set threshold, remove the second set screw.

[0051] Specifically, in step S24, after the glue has cured, adjust the pitch knob again so that the reflected image of the dichroic mirror coincides with the red cross on the software interface, place the second flat plate, and if the value on the software interface is less than the set threshold, remove the third set screw.

[0052] Specifically, in step S32, before measuring the deviation between the front lens barrel's transmission focal point and the air-bearing stage's rotation axis, the reference lens type is selected as F100 and the measurement unit type is selected as "″ in the computer software interface. After the glue has cured, measure the deviation between the transmission focal point of the front lens barrel 6 and the rotation axis of the air-bearing stage again. If the deviation is less than the set threshold, remove the main support 1.

[0053] Specifically, in step S42, after the adhesive has cured, the deviation between the reflected image on the side of the first lens 7 and the rotation axis of the air-bearing platform is measured again. If the deviation is less than the set threshold, the main support 1 is removed.

[0054] Specifically, in step S52, after the adhesive has cured, the deviation between the reflected image on the side of the second lens 8 and the rotation axis of the air-floating stage is measured again. If the deviation is less than the set threshold, the pressure ring 63 is screwed onto the dichroic mirror bracket 2.

[0055] While specific embodiments of the present invention have been described above, those skilled in the art should understand that the specific embodiments described are merely illustrative and not intended to limit the scope of the present invention. Equivalent modifications and variations made by those skilled in the art in accordance with the spirit of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A high-precision laser lens adjustment method, characterized in that: This includes prism adjustment, dichroic mirror adjustment, front lens barrel adjustment, prism path lens adjustment, and dichroic mirror path lens adjustment; The prism adjustment includes the following steps: Step S11: Fix the first flat plate to the end face of the first lens barrel, and leave a gap between the first flat plate and the first lens barrel; Step S12: Install the fixture on the first fixture mounting hole and clamp the fixture with the three-jaw chuck of the dual-path interferometer; Step S13: Turn the dual-path interferometer to the empty objective lens, turn on the visible light source, insert a piece of paper into the slit, and observe the image that disappears on the computer software interface. This is the prism reflection image. Place the second flat plate on the front end of the main support. The brightest cross image that appears on the computer software interface is the flat plate reflection image. Repeatedly remove and place the second flat plate until the position of the cross image on the computer software interface remains unchanged. Set the coordinate position initialization on the computer software interface, remove the second flat plate and the piece of paper, and adjust the second set screw to make the prism reflection image coincide with the red cross on the software interface. Step S14: Place the second flat plate again, set the coordinate initialization in the computer software interface, remove the second flat plate, adjust the pitch knob of the air-floating stage of the dual-beam interferometer so that the prism reflection image coincides with the red cross on the software interface, observe the value on the software interface, if the value is less than the set threshold, inject glue into the first glue groove, and after the glue has cured, remove the second set screw. The dichroic mirror adjustment includes the following steps: Step S21: Fix the third flat plate in the groove, and leave a gap between the third flat plate and the first through hole. The dual-path interferometer is rotated to the empty objective lens and switched to a 780nm light source. Step S22: Insert a piece of paper into the gap and observe the image that disappears on the computer software interface. This image is the reflection image from the dichroic mirror. Step S23: Place the second flat plate on the front end of the main support, initialize the coordinate settings in the software interface, remove the second flat plate and the paper, and adjust the third top screw so that the image reflected by the dichroic mirror coincides with the red cross on the software interface. Step S24: Place the second flat plate again, initialize the coordinate settings in the software interface, remove the second flat plate, adjust the pitch knob of the air-floating stage of the dual-path interferometer to make the dichroic mirror reflection image coincide with the red cross, observe the value on the software interface, if the value is less than the set threshold, inject glue into the second glue groove, and after the glue has cured, remove the third set screw. The front lens barrel adjustment includes the following steps: Step S31: Rotate the dual-path interferometer to the F100 objective lens, turn on the visible light source, calibrate the tilt and coaxiality, and then install the front lens barrel into the front lens barrel mounting hole of the main support. Step S32: Using transmitted light, control the lifting platform of the dual-path interferometer to move up and down to find the focal image of the front lens barrel. In the computer software interface, set the corresponding reference lens and measurement unit, and adjust the first set screw so that the focal image coincides with the red cross on the software interface. Measure the deviation between the front lens barrel's transmitted focal point and the air-bearing stage's rotation axis. If the deviation is less than the set threshold, inject glue into the gap between the front lens barrel and the main support and into the third glue groove. After the glue has cured, remove the main support. Prism path lens adjustment includes the following steps: Step S41: Remove the first flat plate, the third flat plate, and the tooling from the main support, install the tooling in the second tooling mounting hole, and clamp the tooling with the three-jaw chuck of the dual-path interferometer. Step S42: The dual-path interferometer is switched to the F100 objective lens, and the reflected light source is turned on. After calibrating the tilt and coaxiality, glue is applied to the inner wall of the first lens barrel, and the first lens is placed in. The lifting platform is moved up and down to find the reflected image on the side of the first lens. The reflected image on the side of the first lens is adjusted to coincide with the red cross on the software interface until the deviation between the measured reflected image on the side of the first lens and the rotation axis of the air-bearing stage is less than the set threshold. After the glue has cured, the main support is removed. The adjustment of a dichroic mirror path lens includes the following steps: Step S51: Install the fixture into the third fixture mounting hole and clamp the fixture with the three-jaw chuck of the dual-path interferometer. Step S52: Rotate the dual-path interferometer to the F100 objective lens, and after calibrating the tilt and coaxiality, apply glue to the inner wall of the first light-transmitting hole of the dichroic mirror holder, and place the second lens in. Move the lifting platform up and down to find the reflected image on the side of the second lens, and adjust the reflected image on the side of the second lens to coincide with the red cross on the software interface until the deviation between the measured reflected image on the side of the second lens and the rotation axis of the air-bearing stage is less than the set threshold. After the glue has cured, screw the pressure ring on the dichroic mirror holder.

2. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S11, the first flat sheet is fixed by UV-curing adhesive.

3. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S21, the third flat sheet is fixed by UV-curing adhesive.

4. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S14, after placing the second flat film again, first select the type of reference lens and the type of measurement unit in the computer software interface, and then set the coordinate initialization. After the glue has cured, adjust the pitch knob again to make the prism reflection image coincide with the red cross on the software interface. Place the second flat plate. If the value on the software interface is less than the set threshold, remove the second set screw.

5. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S24, after the glue has cured, adjust the pitch knob again so that the reflected image of the dichroic mirror coincides with the red cross on the software interface, place the second flat plate, and if the value on the software interface is less than the set threshold, remove the third set screw.

6. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S32, before measuring the deviation between the front lens barrel's transmission focal point and the air-bearing stage's rotation axis, the type of reference lens and the type of measurement unit are selected in the computer software interface. After the glue has cured, measure the deviation between the front lens barrel's transmission focal point and the air-bearing platform's rotation axis again. If the deviation is less than the set threshold, remove the main support bracket.

7. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S42, after the adhesive has cured, the deviation between the reflected image on the side of the first lens and the rotation axis of the air-bearing platform is measured again. If the deviation is less than the set threshold, the main support is removed.

8. The high-precision laser lens adjustment method as described in claim 1, characterized in that: In step S52, after the adhesive has cured, the deviation between the reflected image on the side of the second lens and the rotation axis of the air-bearing stage is measured again. If the deviation is less than the set threshold, a pressure ring is screwed onto the dichroic mirror bracket.

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