Lens assembly and exposure device

Abstract

The application discloses a lens assembly and an exposure device. The lens assembly comprises a lens box, a fixing ring, a lens, a first pressing ring and a second pressing ring. The fixing ring is arranged in the lens box, the lens is arranged on the fixing ring, the first pressing ring and the second pressing ring are detachably connected in the lens box, and are arranged on two sides of the fixing ring along the axial direction of the fixing ring, thereby limiting the movement of the fixing ring and the lens along the axial direction of the lens box. The position of the lens is fixed by the fixing ring, the first pressing ring and the second pressing ring, the lens can be fixed by dispensing glue in the circumferential direction, the volatilization of the glue is prevented from being deposited on the surface of the lens, and the light transmittance, the definition and the exposure accuracy of the lens are ensured.

Description

Technical Field

[0001] This invention belongs to the field of exposure device technology, specifically relating to a lens assembly and an exposure device. Background Technology

[0002] In industries such as screen printing and semiconductors, exposure is a crucial step, and the stability of the exposure apparatus significantly impacts the exposure results. Existing exposure apparatuses typically use adhesive bonding to fix lenses within a lens box. However, when the laser passes through the lens box, the temperature inside rises, causing the adhesive to evaporate. This evaporated adhesive settles on the lens surface, reducing the lens's transmittance and increasing stray light, ultimately leading to a decrease in exposure clarity and precision.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0004] The purpose of this invention is to provide a lens assembly that solves the problem that colloids in a lens box easily evaporate and settle on the lens surface.

[0005] To achieve the above objectives, a specific embodiment of the present invention provides a lens assembly, which includes a lens box, a fixing ring, a lens, a first pressure ring, and a second pressure ring. The fixing ring is disposed inside the lens box, the lens is disposed on the fixing ring, and the first and second pressure rings are detachably connected inside the lens box and are respectively disposed on both sides of the fixing ring along the axial direction of the fixing ring, thereby restricting the movement of the fixing ring and the lens along the axial direction of the lens box.

[0006] In one or more embodiments of the present invention, the lens is threadedly connected to the inner ring of the retaining ring.

[0007] In one or more embodiments of the present invention, the retaining ring includes a ring portion and a plurality of boss portions axially protruding from the end face of the ring portion, and the lens is constrained between the plurality of boss portions and a first pressure ring or a second pressure ring.

[0008] In one or more embodiments of the present invention, the boss portion is provided with an arc surface for contacting the lens.

[0009] In one or more embodiments of the present invention, the first pressure ring is threadedly connected to the inner wall of the lens box.

[0010] In one or more embodiments of the present invention, the second pressure ring is threadedly connected to the inner wall of the lens box.

[0011] In one or more embodiments of the present invention, the retaining ring is fixedly connected to the inner wall of the lens box.

[0012] In one or more embodiments of the present invention, the lens assembly further includes a first sealing ring disposed between the first pressure ring and the fixing ring.

[0013] In one or more embodiments of the present invention, the lens assembly further includes a second sealing ring disposed between the second pressure ring and the fixing ring.

[0014] In one or more embodiments of the present invention, the inner diameter of the fixing ring is larger than the inner diameter of the first pressure ring.

[0015] In one or more embodiments of the present invention, the inner diameter of the fixing ring is larger than the inner diameter of the second pressure ring.

[0016] In one or more embodiments of the present invention, the inner diameter of the first pressure ring is equal to the inner diameter of the second pressure ring.

[0017] In one or more embodiments of the present invention, the first pressure ring abuts against the fixed ring along its axial direction.

[0018] In one or more embodiments of the present invention, the second pressure ring abuts against the fixed ring along its axial direction.

[0019] In one or more embodiments of the present invention, a first pressure ring abuts against the lens along its axial direction.

[0020] In one or more embodiments of the present invention, the second pressure ring abuts against the lens along its axial direction.

[0021] In one or more embodiments of the present invention, the lens assembly includes a plurality of fixing rings, a plurality of lenses, a plurality of first pressure rings, and a plurality of second pressure rings arranged in a one-to-one correspondence.

[0022] In another aspect, the present invention provides an exposure apparatus comprising the above-described lens assembly.

[0023] Compared with the prior art, the present invention fixes the position of the lens by fixing ring, first pressure ring and second pressure ring, which can avoid fixing the lens by applying adhesive around the lens, prevent the adhesive from evaporating and settling on the lens surface, and ensure the lens's transmittance, clarity and exposure accuracy. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1This is a schematic diagram of the lens assembly in Embodiment 1 of the present invention;

[0026] Figure 2 This is a schematic diagram of the lens assembly in Embodiment 2 of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the fixing ring and lens in Embodiment 3 of the present invention;

[0028] Figure 4 This is a schematic diagram of the boss portion in Embodiment 3 of the present invention;

[0029] Figure 5 This is a schematic diagram of the exposure apparatus in Embodiment 4 of the present invention.

[0030] Explanation of main reference numerals: 1. Lens box; 2. Fixing ring; 21. Ring part; 22. Boss part; 221. Curved surface; 3. Lens; 4. First pressure ring; 5. Second pressure ring; 6. First sealing ring; 7. Second sealing ring; 8. Laser; 9. Reflector; 10. DMD. Detailed Implementation

[0031] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0032] In the description of this invention, it should be understood that the terms "top", "bottom", "upper", "lower", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0033] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] Example 1

[0035] Reference Figure 1As shown, this embodiment provides a lens assembly, which includes a lens box 1, a fixing ring 2, a lens 3, a first pressure ring 4, and a second pressure ring 5. The fixing ring 2, lens 3, first pressure ring 4, and second pressure ring 5 are all disposed within the lens box 1. The lens 3 is mounted on the fixing ring 2, and the first pressure ring 4 and second pressure ring 5 are detachably connected to the lens box 1. The first pressure ring 4, fixing ring 2, and second pressure ring 5 are arranged sequentially along the axial direction of the lens box 1, that is, the first pressure ring 4 and second pressure ring 5 are respectively located on both sides of the fixing ring 2 along its axial direction. This restricts the movement of the fixing ring 2 and lens 3 along the axial direction of the lens box 1, fixing the positions of the fixing ring 2 and lens 3 and preventing them from moving arbitrarily during operation.

[0036] According to the above structural design, after fixing the position of the lens 3 by using the fixing ring 2, the first pressure ring 4 and the second pressure ring 5, it is possible to avoid applying adhesive to fix the lens 3 in the circumference of the lens 3. In this way, when the light passes through the lens box 1 and causes the temperature inside the lens box 1 to rise, the adhesive will not evaporate, thereby preventing the evaporated adhesive from settling on the surface of the lens 3 and ensuring the light transmittance, clarity and exposure accuracy of the lens 3.

[0037] Reference Figure 1 As shown, in this embodiment, the inner ring of the fixing ring 2 is provided with a first internal thread, and the lens 3 is provided with a first external thread in the circumferential direction. The lens 3 can be threaded onto the inner ring of the fixing ring 2 through the cooperation of the first internal thread and the first external thread, so as to facilitate the installation and removal of the fixing ring 2 and the lens 3.

[0038] Furthermore, refer to Figure 1 As shown, the retaining ring 2 is fixedly connected to the inner wall of the lens box 1 to restrict the rotation of the retaining ring 2 when the lens 3 is screwed onto it. Specifically, the lens box 1 and the retaining ring 2 can be fixed together by integral molding.

[0039] In other embodiments, depending on the material of the retaining ring 2, it can be fixed inside the lens box 1 by processes such as fusion welding or welding. Alternatively, the retaining ring 2 can be fixed inside the lens box 1 by installing bolts radially from the outside of the lens box 1.

[0040] Reference Figure 1 As shown, in this embodiment, the outer ring of the first pressure ring 4 is provided with a second external thread, and the corresponding part of the inner wall of the lens box 1 is provided with a second internal thread. The first pressure ring 4 is detachably connected to the inner wall of the lens box 1 through the cooperation of the second external thread and the second internal thread.

[0041] Similarly, the outer ring of the second pressure ring 5 is provided with a third external thread, and the corresponding part of the inner wall of the lens box 1 is provided with a third internal thread. The second pressure ring 5 is detachably connected to the inner wall of the lens box 1 through the cooperation of the third external thread and the third internal thread.

[0042] Reference Figure 1 As shown, in this embodiment, lens 3 is a convex lens 3, the inner diameter of the first pressure ring 4 is equal to the inner diameter of the second pressure ring 5, and the inner diameter of the fixing ring 2 is greater than the inner diameters of the first pressure ring 4 and the second pressure ring 5. Both the first pressure ring 4 and the second pressure ring 5 abut against lens 3 along their axial direction.

[0043] Specifically, on the side near lens 3, the edge of the inner ring of the first retaining ring 4 abuts against lens 3. Similarly, on the other side near lens 3, the edge of the inner ring of the second retaining ring 5 abuts against lens 3.

[0044] Furthermore, the first pressure ring 4 and the second pressure ring 5 abut against the fixed ring 2 along their respective axial directions.

[0045] Reference Figure 1 As shown, the lens assembly in this embodiment also includes a first sealing ring 6 and a second sealing ring 7. The first sealing ring 6 is disposed between the first pressure ring 4 and the fixed ring 2. The lens assembly also includes a second sealing ring 7 disposed between the second pressure ring 5 and the fixed ring 2. The first sealing ring 6 and the second sealing ring 7 can seal the gap between the fixed ring 2 and the first pressure ring 4 and the second pressure ring 5, preventing dust and other particles in the lens box 1 from entering the gap between the fixed ring 2 and the first pressure ring 4 and the second pressure ring 5.

[0046] Example 2

[0047] Reference Figure 2 As shown, this embodiment provides a lens assembly, which differs from Embodiment 1 in that: the lens assembly in this embodiment includes a lens box 1, multiple fixing rings 2, multiple lenses 3, multiple first pressure rings 4, and multiple second pressure rings 5. The multiple fixing rings 2, multiple lenses 3, multiple first pressure rings 4, and multiple second pressure rings 5 ​​are arranged in a one-to-one correspondence with each other, that is, the assembly is divided into multiple lens groups according to one fixing ring 2, one lens 3, one first pressure ring 4, and one second pressure ring 5, and the multiple lens groups are distributed at intervals within the lens box 1.

[0048] Example 3

[0049] Reference Figure 3 As shown, this embodiment provides a lens assembly, which differs from the first embodiment in that: the fixing ring 2 in this embodiment includes a ring portion 21 and a plurality of boss portions 22 protruding axially from the end face of the ring portion 21. The lens 3 is restricted between the plurality of boss portions 22 and the first pressure ring 4, or is restricted between the plurality of boss portions 22 and the second pressure ring 5.

[0050] Preferably, the fixing ring 2 is provided with three or more bosses 22.

[0051] Furthermore, refer to Figure 4 As shown, in this embodiment, at the part where the boss portion 22 contacts the lens 3, a contact surface is formed on the boss portion 22. The contact surface is an arc surface 221, which is adapted to the shape of the surface of the lens 3, thereby closely fitting the surface of the lens 3, increasing the contact area between the boss portion 22 and the lens 3, and ensuring that the boss portion 22 can stably support the lens 3.

[0052] In other embodiments, if a protective structure for protecting the lens 3 and for contacting the boss portion 22 is mounted on the surface of the lens 3, the shape of the contact surface on the boss portion 22 needs to be adapted to the surface of the protective structure.

[0053] Example 4

[0054] Reference Figure 5 As shown, this embodiment provides an exposure apparatus, which includes a laser 8, a reflector 9, a DMD 10 (digital micromirror), and a lens assembly arranged sequentially along the optical path. The lens assembly is the same as that in any one of embodiments one through three. The reflector 9 reflects the laser emitted by the laser 8 to the DMD 10, and the DMD 10 then reflects the laser to the lens 3 of the lens assembly. The laser passes through the lens 3 and is projected onto the corresponding workpiece.

[0055] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0056] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A lens assembly, characterized in that, The lens assembly includes: Lens box (1); A fixing ring (2) is provided inside the lens box (1); Lens (3) is disposed on the fixing ring (2); The first pressure ring (4) and the second pressure ring (5) are detachably connected to the lens box (1) and are respectively disposed on both sides of the fixing ring (2) along the axial direction of the fixing ring (2), thereby restricting the movement of the fixing ring (2) and the lens (3) along the axial direction of the lens box (1).

2. The lens assembly according to claim 1, characterized in that, The lens (3) is threaded to the inner ring of the fixing ring (2).

3. The lens assembly according to claim 1, characterized in that, The fixing ring (2) includes a ring portion (21) and a plurality of boss portions (22) protruding axially from the end face of the ring portion (21). The lens (3) is constrained between the plurality of boss portions (22) and the first pressure ring (4) or the second pressure ring (5).

4. The lens assembly according to claim 3, characterized in that, The boss portion (22) is provided with an arc surface (221) for contacting the lens (3).

5. The lens assembly according to claim 1, characterized in that, The first pressure ring (4) is threadedly connected to the inner wall of the lens box (1); and / or, The second pressure ring (5) is threadedly connected to the inner wall of the lens box (1); and / or, The fixing ring (2) is fixedly connected to the inner wall of the lens box (1).

6. The lens assembly according to claim 1, characterized in that, The lens assembly further includes a first sealing ring (6) disposed between the first pressure ring (4) and the fixing ring (2); and / or, The lens assembly also includes a second sealing ring (7) disposed between the second pressure ring (5) and the fixing ring (2).

7. The lens assembly according to claim 1, characterized in that, The inner diameter of the fixing ring (2) is larger than the inner diameter of the first pressure ring (4); and / or, The inner diameter of the fixing ring (2) is larger than the inner diameter of the second pressure ring (5); and / or, The inner diameter of the first pressure ring (4) is equal to the inner diameter of the second pressure ring (5).

8. The lens assembly according to claim 1, characterized in that, The first pressure ring (4) abuts against the fixed ring (2) along its axial direction; and / or, The second pressure ring (5) abuts against the fixed ring (2) along its axial direction; and / or, The first pressure ring (4) abuts against the lens (3) along its axial direction; and / or, The second pressure ring (5) abuts against the lens (3) along its axial direction.

9. The lens assembly according to claim 1, characterized in that, The lens assembly includes multiple fixing rings (2), multiple lenses (3), multiple first pressure rings (4), and multiple second pressure rings (5) arranged in a one-to-one correspondence.

10. An exposure apparatus, characterized in that, The exposure apparatus includes a lens assembly as described in any one of claims 1 to 9.

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