Method for operating a multi-path process gas cabinet integrated purification and pressure regulation

Abstract

The application discloses a multi-path process gas cabinet integrated purification and pressure regulating operation method, and relates to the technical field of semiconductor manufacturing equipment, and comprises the following steps: collecting the instantaneous pressure change data of the multi-path process gas cabinet in the blowing operation stage, recording the pressure increase value and fluctuation amplitude interval within every 5 milliseconds, and synchronously acquiring the flow rate change trend at the corresponding moment, and forming a pressure change track through continuous recording. The application can maintain the one-way advancing state of the gas, reduce the local backflow phenomenon, and simultaneously reduce the disturbance of the pressure fluctuation on the purification process through the delay release control and the periodic reset control in the blowing end stage, so that the clean gas inlet state of the purifier inlet area is maintained and the blowing operation stability is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, specifically to a method for integrated purification and pressure regulation operation of multi-channel process gas cabinets. Background Technology

[0002] Multi-channel process gas cabinet integrated purification and pressure regulation operation refers to the operation of multiple different gases (such as those required for various semiconductor processes) in a single unit. , , , , Each gas (e.g., gas, etc.) is introduced into the same cabinet through independent gas pipelines. Within this cabinet, each gas undergoes high-purity purification, and the output pressure is precisely controlled by a pressure regulating component. Combined with shared or partially shared purging, venting, and safety interlocking systems, multiple gases can be centrally processed and operated collaboratively within the same physical space. During operation, each gas channel is independent to avoid cross-contamination, while a unified control system (such as a PLC) centrally schedules the process, ensuring that each gas is stably output to the equipment according to process requirements. In abnormal situations, automatic isolation, purging, and safe venting are achieved, thereby improving gas purity stability, reducing system complexity, and enhancing overall safety and operational efficiency.

[0003] The existing technology has the following shortcomings: During the purging operation of the multi-channel process gas cabinet, when the purging gas source pressure controlled by the system fluctuates significantly in a short period of time, it will disturb the originally stable unidirectional flow state in the pipeline, forming an unstable gas backflow phenomenon at a local structural location. This backflow phenomenon will carry back the residual process gas that has been replaced downstream and feed it back to the purifier inlet area, causing the purifier inlet to be impacted by contamination. This will lead to a sudden drop in the purifier's adsorption or filtration performance in a short period of time, ultimately affecting the overall gas purification effect and the purity stability of subsequent process gases.

[0004] The information disclosed in the background section is only intended to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide a method for integrated purification and pressure regulation operation of multi-channel process gas cabinets to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a multi-channel process gas cabinet integrated purification and pressure regulation operation method, comprising the following steps: The instantaneous pressure change data of the multi-channel process gas cabinet during the purging operation phase is collected, the pressure increase value and fluctuation range are recorded every 5 milliseconds, and the flow rate change trend at the corresponding moment is obtained simultaneously. The pressure change trajectory is formed by continuous recording. Based on the pressure change trajectory, the purge gas input process is controlled in segments and progressively. The instantaneous high pressure input is adjusted to a pressure injection mode that increases step by step at fixed time intervals, and the pressure increase of each stage is limited to a set threshold range. For the pressure injection process after segmented progressive control, the rhythm of different time nodes in the gas propulsion process is adjusted. By setting the start time difference of each time node, the unidirectional gas propulsion rhythm is maintained. By maintaining the unidirectional propulsion rhythm, the discharge stage of the purging process is controlled by delaying the release, and the residual gas that has moved downstream is gradually discharged in a time-sharing manner to reduce negative pressure fluctuations during the discharge process. After the delayed release control is completed, the entire purging process is periodically reset and regulated. At the end of each purging, a stable maintenance phase is introduced to maintain the pressure within a constant range for a preset duration in order to eliminate backflow and maintain a clean air intake state at the purifier inlet.

[0007] Preferably, to meet the requirement of continuous recording of pressure change behavior during the purging phase, the instantaneous pressure change process is collected in time segments and a continuous change relationship is constructed. The steps are as follows: The pressure increase value during the purging phase is recorded periodically at fixed time intervals, and the pressure increase value corresponding to each time node is numbered and labeled in chronological order. Match the pressure fluctuation range at the same time point, divide the pressure fluctuation range according to the preset format, and establish a one-to-one correspondence with the corresponding time point. The pressure increase value and the pressure fluctuation range are correlated, and the two types of data at the same time point are combined, recorded, and arranged continuously in chronological order. By integrating continuously changing sets, the data combinations corresponding to each time point are uniformly collected and a pressure change trajectory covering the entire purging process is generated.

[0008] Preferably, focusing on the dynamic performance of gas propulsion state over time, the flow velocity change trend and pressure change information are synchronously correlated, and the steps are as follows: Acquire the changes in gas propulsion velocity at each time point, and mark and record the changes in propulsion velocity at different time points; Establish a correlation between changes in gas propulsion speed and pressure increase values, and store the two types of data together at the same time point; The changes in gas propulsion speed are arranged in chronological order to form a trend, and adjacent data in the trend are sorted consecutively. By combining the changing trends and pressure change trajectories, multiple types of data at the same point in time are integrated and formed into continuous flow and change information.

[0009] Preferably, based on the phased changes in the pressure injection rhythm during the purging process, the pressure injection process is divided into stages and a progressive relationship is formed, as follows: The purging phase is divided into multiple progressive pressure injection phases at fixed time intervals, and each progressive pressure injection phase is sequentially numbered. Determine the pressure increase range corresponding to each progressive pressure injection stage, and mark the range of the pressure increase range; Arrange the pressure increase intervals to form a progressive relationship, and arrange the intervals step by step in chronological order; The progressive relationship is applied to the pressure injection process, and the pressure increase range corresponding to each stage is called sequentially.

[0010] Preferably, the pressure increase intervals between the progressive pressure injection stages are arranged in a continuously increasing relationship, and the pressure increase value corresponding to the current pressure increase interval is kept stable during the transition between adjacent stages. At the same time, the starting value of the pressure increase interval of the next stage is kept consistent with the ending value of the current stage, forming a continuous transition pressure injection process.

[0011] Preferably, to address the dynamic control requirements of pressure fluctuation range during pressure changes, the pressure increase amplitude is ranged and the stability of the change is maintained. The steps are as follows: Define the pressure increase range for each progressive pressure injection stage, and mark the upper and lower limits of the range. The pressure increase values ​​are continuously recorded and matched with corresponding intervals, and the recorded data are compared with the interval range one by one. Adjust the pressure increase value to keep it within the corresponding range, and perform regression processing on data that exceeds the range; By continuously constraining the pressure increase value through interval changes, the data at each time point are uniformly organized.

[0012] Preferably, based on the requirement for continuity of the time rhythm changes during gas propulsion, the difference in start-up time between different time nodes is adjusted, and the steps are as follows: Divide the time into multiple consecutive advancement time nodes and record the corresponding advancement status, and identify each time node sequentially; Calculate the start time difference between adjacent propulsion time nodes and record the numerical value of the difference; Adjust the difference in start time to form a progressive rhythmic relationship, and arrange the differences progressively in chronological order; The progressive rhythm relationship is used to uniformly schedule the pace of advancement at each time node, and the advancement status is processed in a continuous arrangement.

[0013] Preferably, considering the rhythmic changes during the residual gas emission process, the emission stage is divided into time-segmented release processes to form a continuous release relationship, as follows: The discharge phase is divided into multiple consecutive release periods, and each consecutive release period is numbered and identified. Record the discharge status corresponding to each consecutive release period, and associate the discharge status with the corresponding period for storage; Adjust the release interval between adjacent consecutive release periods, and numerically divide the release interval to form a time series; By arranging the continuous release periods sequentially through changes in release intervals, the residual gas discharge process is organized in segments.

[0014] Preferably, the flow rate change trend in the discharge stage is synchronously matched with the release interval change relationship between each continuous release period, and the release interval is dynamically adjusted according to the flow rate change trend, so that the discharge state between each continuous release period is kept continuous and connected. At the same time, the discharge state in each release period is uniformly collected to form a coherent and consistent continuous release relationship.

[0015] Preferably, considering the need for stable pressure changes at the end of the purging process, the purging process is divided into periods and a stable maintenance phase is introduced, as follows: Divide the purge cycle into multiple continuous cycles and set a stable maintenance phase, and number each purge cycle sequentially. Define a constant pressure range during the stable maintenance phase, and mark and record the range of the constant pressure range; The pressure increase value is controlled to remain within a constant range, and the pressure increase value is matched with the constant range accordingly; By collecting pressure change data during each purging cycle through the stable maintenance phase, the purging process is periodically organized.

[0016] The technical effects and advantages provided by the present invention in the above technical solution are as follows: This invention enables the purging gas to maintain a stable unidirectional flow during the purging process by segmenting and progressively adjusting the pressure change process during the purging stage and continuously controlling the start-up time difference between different time nodes. This reduces the probability of backflow disturbances occurring in local areas. At the same time, residual gas in the purging stage can be gradually discharged in a continuous progressive rhythm, preventing residual gas from returning to the purifier inlet area and thus maintaining a stable and clean gas intake state during the purification operation.

[0017] This invention reduces pressure fluctuations at the end of the purging process by introducing a stable maintenance phase and keeping the pressure within a constant range, thereby weakening the backflow tendency of residual gas during the discharge phase. At the same time, by periodically resetting and regulating the entire purging process, a stable progress state can be maintained during the purging operation, thereby improving the purification stability of the multi-channel process gas cabinet during long-term purging operation. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a flowchart of the method for integrated purification and pressure regulation operation of multi-channel process gas cabinets according to the present invention. Detailed Implementation

[0020] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, they are provided so that the description of this disclosure will be more complete and fully convey the concept of the exemplary embodiments to those skilled in the art.

[0021] This invention provides, for example Figure 1 The multi-channel process gas cabinet integrated purification and pressure regulation operation method shown includes the following steps: The instantaneous pressure change data of the multi-channel process gas cabinet during the purging operation phase is collected, the pressure increase value and fluctuation range are recorded every 5 milliseconds, and the flow rate change trend at the corresponding moment is obtained simultaneously. The pressure change trajectory is formed by continuous recording. During the purging operation of a multi-channel process gas cabinet, to avoid gas flow disturbances caused by instantaneous pressure changes during the purging phase, it is necessary to continuously collect and dynamically record the pressure changes during the purging phase. By correlating the flow changes at different time points, a pressure change trajectory reflecting the entire pressure change process is formed, thus providing continuous flow reference information for subsequent purging rhythm control. The specific steps are as follows: For the gas delivery process after the multi-channel process gas cabinet enters the purging operation state, the instantaneous pressure change data at the initial stage of purging is continuously collected. When the purging gas enters the initial stage, the pressure increase value corresponding to each time point is recorded in real time at a fixed collection interval of 5 milliseconds, and the pressure fluctuation range at the same time point is recorded simultaneously. The pressure increase value is used to reflect the pressure change rate after the purging gas enters at the current moment, and the pressure fluctuation range is used to characterize the duration of pressure change within the same stage. By continuously recording the pressure increase value and pressure fluctuation range at multiple time points, an initial pressure change data set corresponding to the purging operation process is formed, thereby providing continuous pressure change information for subsequent flow state analysis.

[0022] By utilizing data from each time point in the initial pressure change dataset, the velocity change trend during the purging process is synchronously acquired. Within each 5-millisecond acquisition cycle, the gas propulsion velocity change at the corresponding time point is continuously recorded, and the velocity change trend is arranged in chronological order with the pressure increase value. The velocity change trend reflects the flow change state of the purging gas during propulsion, while the pressure increase value reflects the pressure propulsion state at the corresponding moment. By correlating and recording the velocity change trend and pressure increase value at the same time point, dynamic flow change information corresponding to different purging stages can be formed. This allows for the continuous change relationship between the gas propulsion state and pressure changes during the purging process, thereby enabling continuous tracking of the internal flow state changes during the purging stage.

[0023] Based on the established correlation between velocity change trends and pressure increase values, the instantaneous pressure change behavior during the purging process is continuously recorded. At different time points, the pressure fluctuation ranges are arranged progressively in chronological order, and the velocity change trends at the corresponding time points are synchronously recorded in the same recording process, thus forming a pressure change trajectory covering the entire purging phase. The pressure change trajectory reflects the dynamic correlation between the direction of pressure change, the rate of pressure change, and the gas propulsion state during the purging process. Simultaneously, during continuous recording, the pressure change span between different time points is continuously compared. When a rapid change in pressure increase value occurs between adjacent time points, the corresponding time point is marked as the pressure mutation trigger moment, and the velocity change trend corresponding to the pressure mutation trigger moment is recorded synchronously, so that the pressure mutation area can be focused on for adjustment during subsequent purging control.

[0024] By utilizing the established pressure change trajectory, the continuity of pressure changes during the purging process is dynamically organized, and a corresponding trajectory change sequence is generated according to the purging operation time sequence. During the generation of the trajectory change sequence, the pressure increase value, pressure fluctuation range, and flow velocity change trend corresponding to the pressure change trigger moment are synchronously collected, thereby forming dynamic record information that can reflect the changes in the internal flow state throughout the purging process. Subsequently, by continuously recording the pressure change trajectory in different purging stages, abnormal pressure change areas can be quickly identified in subsequent purging operations, and the gas propulsion state at the corresponding time nodes can be continuously adjusted, thereby reducing the probability of local backflow phenomena within the purging stage and maintaining a stable propulsion state during the purification operation.

[0025] Based on the pressure change trajectory, the purge gas input process is controlled in segments and progressively. The instantaneous high pressure input is adjusted to a pressure injection mode that increases step by step at fixed time intervals, and the pressure increase of each stage is limited to a set threshold range. During the purging operation of a multi-channel process gas cabinet, to reduce pressure surges caused by instantaneous high-pressure input, segmented progressive control of the purging gas input process is necessary. This involves staged processing of the pressure change behavior along the pressure change trajectory, adjusting the original continuous rapid injection state to a step-by-step pressure injection state at fixed time intervals. This maintains a stable purging process and reduces the probability of flow disturbances in localized areas. The specific steps are as follows: To address the changes in pressure increments along the pressure change trajectory, the purge gas input process is divided into stages. The entire purge gas input stage is divided into multiple progressive pressure injection stages at fixed time intervals, and the pressure increment for each progressive pressure injection stage is recorded independently. Each progressive pressure injection stage corresponds to a fixed pressure increase interval, which advances sequentially according to the purge operation time. Simultaneously, during the stage division process, the trigger times for pressure abrupt changes in the pressure change trajectory are extracted synchronously, and the pressure increment values ​​corresponding to these trigger times are used as reference information for transitions between progressive pressure injection stages. This avoids continuous and rapid pressure changes during the purge gas input process.

[0026] By utilizing the pressure boost intervals within the progressive pressure injection stages, the purge gas input process is controlled step-by-step. Within each fixed time interval, purge gas is only allowed to be input according to the pressure boost interval corresponding to the current progressive pressure injection stage. After the current progressive pressure injection stage ends, it enters the next progressive pressure injection stage in a preset order. The pressure boost intervals between adjacent progressive pressure injection stages maintain a progressive relationship. Simultaneously, during the step-by-step pressure injection process, the flow velocity change trend in the pressure change trajectory is synchronized. When the flow velocity change trend at the current time point shows a propulsion speed fluctuation, the pressure boost amplitude of the current progressive pressure injection stage is maintained within the current pressure boost interval to reduce the probability of rapid flow changes during the purge propulsion process, thereby maintaining a continuous and stable state of the purge gas propulsion rhythm.

[0027] To address the progressive pressure changes during the step-by-step pressure injection process, the pressure increase in each stage is controlled and limited. Within each fixed time interval, a threshold range is set for the pressure increase, and the pressure increase in the current stage is continuously restricted to within this threshold range. The threshold ranges are arranged sequentially according to the purging operation time. Simultaneously, as the pressure increase changes, the pressure fluctuation range in the pressure trajectory is compared synchronously. When the pressure fluctuation range at the current time point approaches the range corresponding to the pressure mutation trigger moment, the current stage is maintained within the current pressure increase range to reduce flow disturbances caused by rapid pressure changes and maintain unidirectional flow during the purging process.

[0028] By utilizing a defined pressure increase range, a continuous progressive pressure injection state is formed throughout the entire purging gas input process. At different fixed time intervals, the pressure increase range in the corresponding progressive pressure injection stage is continuously advanced in chronological order, and the pressure increase value, flow rate change trend, and pressure fluctuation range in each progressive pressure injection stage are recorded simultaneously, thus forming progressive pressure change information covering the entire purging process. Subsequently, by continuously maintaining the progressively increasing pressure injection method, the impact of instantaneous high-pressure input on the purging operation process can be reduced, and a stable progress state can be maintained in the purging stage, thereby reducing the probability of gas backflow in local areas and ensuring a continuous and stable input state in the purification operation stage.

[0029] For the pressure injection process after segmented progressive control, the rhythm of different time nodes in the gas propulsion process is adjusted. By setting the start time difference of each time node, the unidirectional gas propulsion rhythm is maintained. During the purging operation of a multi-channel process gas cabinet, the purging gas is prone to localized flow turbulence during the propulsion phase due to variations in the input rhythm at different time points. To maintain a continuous unidirectional propulsion state during the purging phase, it is necessary to rhythmically adjust the pressure injection process after segmented progressive control. By continuously controlling the start-up time difference at different time points, the purging gas can form a continuous progressive flow rhythm during propulsion, thereby reducing the probability of reverse flow in local areas. The specific steps are as follows: For the pressure injection process after segmented progressive control, the gas propulsion state at different time points is divided into time segments. The entire purging propulsion stage is divided into multiple continuous propulsion time points according to a fixed propulsion cycle. The pressure increase value, flow velocity change trend, and pressure fluctuation range corresponding to each continuous propulsion time point are recorded synchronously. Each continuous propulsion time point corresponds to an independent gas propulsion state. At the same time, during the time segmentation process, the propulsion interval between adjacent continuous propulsion time points is continuously recorded, and the start time difference information corresponding to different propulsion stages is formed. This yields a time propulsion change relationship covering the entire purging process, which is used to maintain the continuous rhythmic change state in the subsequent propulsion process.

[0030] By utilizing the start-up time difference information corresponding to each continuous propulsion time node, the rhythmic changes in the gas propulsion process are progressively adjusted. During the startup of each continuous propulsion time node, the start-up time difference between the current time node and the next time node is limited and controlled to maintain a fixed progressive interval between adjacent continuous propulsion time nodes. Simultaneously, during the progressive adjustment process, the flow velocity change trend at the current time node is synchronously acquired. When the flow velocity change trend corresponding to the current time node shows a change in propulsion speed, the start-up time difference of the next time node is delayed and adjusted, and the gas propulsion state in the current continuous propulsion time node is maintained to continue operating. This avoids abrupt changes in propulsion rhythm between different propulsion stages and reduces the probability of local disturbances during purging propulsion.

[0031] To maintain the unidirectional propulsion rhythm during the purging and propulsion phase, the opening time difference is progressively arranged in chronological order between different consecutive propulsion time nodes. The gas propulsion state corresponding to each opening time difference is recorded synchronously. The opening time difference is used to control the rhythmic change interval between different propulsion phases, and the gas propulsion state is used to reflect the flow propulsion direction at the current time node. Simultaneously, during the maintenance of the unidirectional propulsion rhythm, the pressure fluctuation amplitude range is continuously compared. When the pressure fluctuation amplitude range in the current consecutive propulsion time node approaches the change range corresponding to the pressure change trigger time, the current opening time difference is delayed and the propulsion frequency of the next consecutive propulsion time node is reduced, thereby slowing down the flow change rate in the propulsion phase and maintaining the continuous propulsion of gas in a fixed direction.

[0032] By maintaining a continuous unidirectional propulsion rhythm, the gas flow state throughout the purging process is continuously monitored. During operation at different continuous propulsion time points, the start-up time difference, flow velocity change trend, and pressure increase value at the corresponding time points are synchronously collected, forming rhythmic change information covering the entire purging process. Subsequently, by continuously controlling the start-up time difference between different time points, the purging gas can form a stable and progressive continuous flow state during the propulsion process, thereby reducing the probability of backflow disturbances in local areas and maintaining a stable unidirectional propulsion state during the purification operation phase.

[0033] By maintaining the unidirectional propulsion rhythm, the discharge stage of the purging process is controlled by delaying the release, and the residual gas that has moved downstream is gradually discharged in a time-sharing manner to reduce negative pressure fluctuations during the discharge process. During the purging operation of a multi-channel process gas cabinet, negative pressure fluctuations can easily occur during the gas discharge phase due to rapid changes in the discharge rhythm. This can cause residual gas that has already moved downstream to flow back. To maintain a stable discharge state during the purging phase, it is necessary to rely on maintaining a unidirectional propulsion rhythm and implementing delayed release control during the discharge phase. By progressively adjusting the release timing of different discharge phases, residual gas is discharged gradually in stages, thereby reducing flow disturbance during the discharge phase. The specific steps are as follows: For the gas propulsion process under unidirectional propulsion rhythm maintenance, the residual gas that has moved downstream is divided into time periods. The entire discharge stage is divided into multiple continuous release periods according to a fixed discharge cycle. The pressure increase, flow rate change trend, and start time difference corresponding to each continuous release period are recorded synchronously. Each continuous release period corresponds to an independent residual gas discharge state. At the same time, during the time period division process, the release interval between adjacent continuous release periods is continuously recorded to form delayed release change information corresponding to different discharge stages. This results in a time period change relationship covering the entire purging and discharge process, which is used to maintain a continuous and progressive release state in the subsequent discharge process.

[0034] By utilizing the delayed release variation information corresponding to the continuous release period, delayed release control is implemented for the discharge stage during the purging process. During the start of each continuous release period, the release interval between the current continuous release period and the next continuous release period is limited and adjusted to maintain a progressive and delayed relationship between adjacent continuous release periods. Simultaneously, during the delayed release control process, the flow rate change trend in the current continuous release period is synchronously acquired. When the flow rate change trend in the current continuous release period shows a change in propulsion speed, the release interval of the next continuous release period is extended, and the residual gas discharge state in the current continuous release period is maintained continuously. This avoids abrupt changes in discharge rhythm between different discharge stages and reduces the probability of instantaneous negative pressure changes during the discharge process.

[0035] For the continuous release period after delayed release control, the negative pressure change during the purging and discharge stage is progressively adjusted. Between different continuous release periods, the release intervals are progressively arranged in chronological order, and the pressure fluctuation range corresponding to each release interval is synchronously recorded. The release interval is used to control the progressive release rhythm between different discharge stages, and the pressure fluctuation range is used to reflect the negative pressure change during the current continuous release period. At the same time, during the progressive adjustment process, the pressure fluctuation range during the current continuous release period is continuously compared. When the current pressure fluctuation range approaches the change range corresponding to the pressure change trigger moment, the release interval during the current continuous release period is continuously delayed, and the discharge propulsion frequency in the next continuous release period is reduced, thereby slowing down the rate of negative pressure change during the discharge stage and maintaining the continuous discharge of residual gas in a fixed direction.

[0036] By utilizing the progressively arranged release intervals, the residual gas release status throughout the entire purging and discharge process is continuously organized. During operation in different continuous release periods, the release intervals, flow rate trends, pressure increase values, and pressure fluctuation ranges in the corresponding continuous release periods are synchronously collected, forming delayed release change information covering the entire purging and discharge process. Subsequently, by continuously maintaining the progressive release status in a time-segmented manner, the residual gas that has moved downstream can be gradually discharged according to a continuous progressive rhythm, thereby reducing the probability of negative pressure fluctuations during the discharge process and maintaining a stable unidirectional discharge status during the purging operation phase.

[0037] After the delayed release control is completed, the entire purging process is periodically reset and regulated. A stable maintenance phase is introduced at the end of each purging to maintain the pressure in a constant range for a preset duration in order to eliminate the backflow trend and maintain the clean air intake state at the purifier inlet. During the purging operation of a multi-channel process gas cabinet, the final stage of the purging process is prone to backflow due to persistent residual pressure changes, which can affect the clean air intake status of the purifier inlet area. To reduce flow disturbance at the end of the purging stage, the entire purging process needs to be periodically reset and controlled. This is achieved by introducing a stabilization phase at the end of each purging, maintaining the pressure within a constant range for a preset duration. This gradually weakens the backflow driving force at the end of the purging stage and maintains a stable air intake status during purification operation. The specific steps are as follows: To address the delayed release changes during the purging process, the entire purging process is divided into multiple continuous purging cycles based on a fixed operating cycle. A corresponding stable maintenance phase is established at the end of each continuous purging cycle, with each stable maintenance phase corresponding to an independent pressure maintenance state. Simultaneously, during the cycle division process, the pressure increase, pressure fluctuation range, and flow velocity change trend are recorded concurrently within each continuous purging cycle, generating periodic change information corresponding to different continuous purging cycles. This yields a periodic change relationship covering the entire purging process, used to maintain a continuous and constant propulsion state in subsequent stable maintenance phases.

[0038] By utilizing the pressure increase value in the periodic variation information, the pressure change state during the stabilization and maintenance phase is adjusted within a constant range. During the start of each stabilization and maintenance phase, the pressure change state in the current continuous purging cycle is continuously restricted within the corresponding constant range, and the pressure increase value within the constant range is continuously maintained. The constant range is used to control the pressure change range in the final stage of purging. Simultaneously, during the maintenance of the constant range, the flow velocity change trend in the current stabilization and maintenance phase is synchronously acquired. When the current flow velocity change trend shows a change in propulsion speed, the pressure increase value in the current constant range is gradually reduced and the pressure duration in the current stabilization and maintenance phase is extended, thereby reducing the flow change rate in the final stage of purging and maintaining the continuous propagation of residual gas in a fixed direction.

[0039] For the pressure change process under constant range maintenance, the preset duration of the stable maintenance phase is progressively adjusted. Between different continuous purging cycles, the preset duration of the corresponding stable maintenance phase is progressively arranged in chronological order, and the pressure fluctuation amplitude range corresponding to each preset duration is synchronously recorded. The preset duration is used to control the continuous stable maintenance state in the final stage of purging, and the pressure fluctuation amplitude range is used to reflect the pressure change state in the current stable maintenance phase. At the same time, during the progressive adjustment process, the pressure fluctuation amplitude range in the current stable maintenance phase is continuously compared. When the current pressure fluctuation amplitude range is close to the change range corresponding to the pressure change trigger moment, the preset duration of the current stable maintenance phase is continuously extended, and the pressure propulsion frequency in the next continuous purging cycle is reduced, thereby slowing down the pressure change rate in the final stage of purging and weakening the backflow trend of residual gas in the final stage of purging.

[0040] By utilizing the preset duration after progressive arrangement, the periodic reset state throughout the entire purging process is continuously organized. During different continuous purging cycles, the constant range, pressure increase value, flow rate change trend, and pressure fluctuation range in the corresponding stable maintenance phase are synchronously collected, forming periodic reset change information covering the entire purging process. Subsequently, by continuously maintaining the constant range state in the stable maintenance phase, the pressure change in the final stage of purging can be kept in a continuous and stable state, thereby reducing the probability of backflow disturbance of residual gas in the final stage of purging and keeping the purifier inlet area in a clean air intake state at all times.

[0041] This invention enables the purging gas to maintain a stable unidirectional flow during the purging process by segmenting and progressively adjusting the pressure change process during the purging stage and continuously controlling the start-up time difference between different time nodes. This reduces the probability of backflow disturbances in local areas. At the same time, residual gas in the purging stage can be gradually discharged in a continuous progressive rhythm, which can prevent residual gas from returning to the purifier inlet area, thereby maintaining a stable and clean gas intake state during the purification operation.

[0042] This invention reduces pressure fluctuations at the end of the purging process by introducing a stable maintenance phase and keeping the pressure within a constant range, thereby weakening the backflow tendency of residual gas during the discharge phase. At the same time, by periodically resetting and regulating the entire purging process, a stable progress state can be maintained during the purging operation, thereby improving the purification stability of the multi-channel process gas cabinet during long-term purging operation.

[0043] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A method for integrated purification and pressure regulation operation of multi-channel process gas cabinets, characterized in that, Includes the following steps: The instantaneous pressure change data of the multi-channel process gas cabinet during the purging operation phase is collected, the pressure increase value and fluctuation range are recorded every 5 milliseconds, and the flow rate change trend at the corresponding moment is obtained simultaneously. The pressure change trajectory is formed by continuous recording. Based on the pressure change trajectory, the purge gas input process is controlled in segments and progressively. The instantaneous high pressure input is adjusted to a pressure injection mode that increases step by step at fixed time intervals, and the pressure increase of each stage is limited to a set threshold range. For the pressure injection process after segmented progressive control, the rhythm of different time nodes in the gas propulsion process is adjusted. By setting the start time difference of each time node, the unidirectional gas propulsion rhythm is maintained. By maintaining the unidirectional propulsion rhythm, the discharge stage of the purging process is controlled by delaying the release, and the residual gas that has moved downstream is gradually discharged in a time-sharing manner to reduce negative pressure fluctuations during the discharge process. After the delayed release control is completed, the entire purging process is periodically reset and adjusted. At the end of each purging, a stable maintenance phase is introduced to maintain the pressure within a constant range for a preset duration.

2. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 1, characterized in that, To meet the requirement of continuous recording of pressure change behavior during the purging phase, the instantaneous pressure change process is collected in time segments and a continuous relationship is constructed. The steps are as follows: The pressure increase value during the purging phase is recorded periodically at fixed time intervals, and the pressure increase value corresponding to each time node is numbered and labeled in chronological order. Match the pressure fluctuation range at the same time point, divide the pressure fluctuation range according to the preset format, and establish a one-to-one correspondence with the corresponding time point. The pressure increase value and the pressure fluctuation range are correlated, and the two types of data at the same time point are combined, recorded, and arranged continuously in chronological order. By integrating continuously changing sets, the data combinations corresponding to each time point are uniformly collected and a pressure change trajectory covering the entire purging process is generated.

3. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 2, characterized in that, Focusing on the dynamic changes in gas propulsion state over time, the flow velocity change trend and pressure change information are synchronously correlated and processed. The steps are as follows: Acquire the changes in gas propulsion velocity at each time point, and mark and record the changes in propulsion velocity at different time points; Establish a correlation between changes in gas propulsion speed and pressure increase values, and store the two types of data together at the same time point; The changes in gas propulsion speed are arranged in chronological order to form a trend, and adjacent data in the trend are sorted consecutively. By combining the changing trends and pressure change trajectories, multiple types of data at the same point in time are integrated and formed into continuous flow and change information.

4. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 3, characterized in that, Based on the phased changes in the pressure injection rhythm during the purging process, the pressure injection process is divided into stages and a progressive relationship is formed. The steps are as follows: The purging phase is divided into multiple progressive pressure injection phases at fixed time intervals, and each progressive pressure injection phase is sequentially numbered. Determine the pressure increase range corresponding to each progressive pressure injection stage, and mark the range of the pressure increase range; Arrange the pressure increase intervals to form a progressive relationship, and arrange the intervals step by step in chronological order; The progressive relationship is applied to the pressure injection process, and the pressure increase range corresponding to each stage is called sequentially.

5. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 4, characterized in that, The pressure increase intervals between the progressive pressure injection stages are arranged in a continuously increasing relationship. When switching between adjacent stages, the pressure increase value corresponding to the current pressure increase interval is kept stable. At the same time, the starting value of the pressure increase interval of the next stage is kept consistent with the ending value of the current stage, forming a continuous transition pressure injection process.

6. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 4, characterized in that, To address the need for dynamic control of pressure fluctuations, the pressure increase range is ranged and the stability of the change is maintained. The steps are as follows: Define the pressure increase range for each progressive pressure injection stage, and mark the upper and lower limits of the range. The pressure increase values ​​are continuously recorded and matched with corresponding intervals, and the recorded data are compared with the interval range one by one. Adjust the pressure increase value to keep it within the corresponding range, and perform regression processing on data that exceeds the range; By continuously constraining the pressure increase value through interval changes, the data at each time point are uniformly organized.

7. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 6, characterized in that, Based on the requirement for continuity of time rhythm changes during gas propulsion, the start-up time difference between different time nodes is adjusted, and the steps are as follows: Divide the time into multiple consecutive advancement time nodes and record the corresponding advancement status, and identify each time node sequentially; Calculate the start time difference between adjacent propulsion time nodes and record the numerical value of the difference; Adjust the difference in start time to form a progressive rhythmic relationship, and arrange the differences progressively in chronological order; The progressive rhythm relationship is used to uniformly schedule the pace of advancement at each time node, and the advancement status is processed in a continuous arrangement.

8. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 7, characterized in that, Considering the rhythmic changes during the residual gas emission process, the emission stage is divided into time-segmented release processes to form a continuous release relationship. The steps are as follows: The discharge phase is divided into multiple consecutive release periods, and each consecutive release period is numbered and identified. Record the discharge status corresponding to each consecutive release period, and associate the discharge status with the corresponding period for storage; Adjust the release interval between adjacent consecutive release periods, and numerically divide the release interval to form a time series; By arranging the continuous release periods sequentially through changes in release intervals, the residual gas discharge process is organized in segments.

9. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 8, characterized in that, To address the changing relationship of release intervals between consecutive release periods, the flow rate change trend during the discharge phase is synchronously matched, and the release interval is dynamically adjusted according to the flow rate change trend, so that the discharge status between consecutive release periods remains continuous. At the same time, the discharge status in each release period is uniformly collected to form a coherent and consistent continuous release relationship.

10. The integrated purification and pressure regulation operation method for multi-channel process gas cabinets according to claim 8, characterized in that, Based on the need for stable pressure changes during the final stage of purging, the purging process is divided into periods and a stable maintenance phase is introduced. The steps are as follows: Divide the purge cycle into multiple continuous cycles and set a stable maintenance phase, and number each purge cycle sequentially. Define a constant pressure range during the stable maintenance phase, and mark and record the range of the constant pressure range; The pressure increase value is controlled to remain within a constant range, and the pressure increase value is matched with the constant range accordingly; By collecting pressure change data during each purging cycle through the stable maintenance phase, the purging process is periodically organized.

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