Magnetic enhanced atmospheric pressure jet array plasma generation device

Abstract

The application discloses a kind of magnetic enhancement atmospheric pressure jet array plasma generating device, comprising: magnetic field generating component, containing annular magnet, adjusting rod and spacing sleeve;Array electrode component, containing discharge quartz tube and electrode;Mixing gas container contains gas inlet, and one end of quartz tube is connected with mixing gas container.The application generates axial magnetic field by coaxial annular magnet array, uses Lorentz force to constrain charged particle, suppresses diffusion and enhances collision ionization, improves jet length and active particle concentration, avoids the problem that electron drift is opposite and enhancement is inconsistent caused by traditional vertical magnetic field, improves array discharge uniformity and processing area;Adjusting rod and spacing sleeve can flexibly change magnet spacing, realize continuous adjustment of magnetic field configuration and strength;After mixing gas container mixes gas, it is uniformly distributed to each quartz tube, combined with modular electrode design, guarantee jet consistency, realize the stable generation of large-area, high-uniformity plasma jet, compact structure and convenient regulation.

Description

Technical Field

[0001] This invention relates to the field of plasma technology, and in particular to a magnetically enhanced atmospheric pressure jet array plasma generator. Background Technology

[0002] Atmospheric pressure jet plasma (APPJ) is widely used in materials surface treatment, thin film deposition, and other fields due to its advantages such as low operating temperature and good controllability. Traditional plasma jet devices typically consist of a discharge tube, electrode system, gas supply system, and high-frequency high-voltage power supply, relying on the electric field between the electrodes to break down the working gas and form a plasma jet. However, the plasma volume generated by a single jet is small, and the jet length is limited, usually only covering an area of ​​a few square millimeters, which is difficult to meet the needs of large-area processing.

[0003] To address this, researchers proposed a jet array consisting of multiple jet units arranged in parallel to expand the processing area. However, the discharge consistency between the units in the array is poor, and "blind zones" with insufficient plasma coverage easily appear on the processing surface, with a uniformity of only about 30%. At the same time, the high discharge power also limits its application in low-power scenarios.

[0004] Magnetic fields have been proven to enhance plasma performance by altering the trajectories of charged particles, such as increasing the concentration of active particles and jet length. In a single jet, applying an axial magnetic field parallel to the jet direction can radially confine electrons, increasing the probability of collisional ionization. However, when a magnetic field is introduced into a jet array, the local electric field directions of each unit are not entirely consistent due to the often alternating high-voltage-to-ground electrode arrangement. If a conventional magnetic field perpendicular to the electric field is applied, the E×B drift directions of electrons in different units will be opposite, failing to simultaneously enhance all jets in the array and potentially exacerbating discharge inhomogeneities. Furthermore, existing magnetic field enhancement schemes often employ discrete magnets, making it difficult to precisely align the magnetic field direction with each jet direction, and they lack optimized designs that integrate the magnetic field with the jet array and allow for adjustable magnetic field configuration.

[0005] Most existing magnetically enhanced jet devices employ fixed magnetic field structures, making it difficult to optimize magnetic field parameters based on different working gases, discharge powers, and processing distances. Therefore, how to effectively and uniformly apply a magnetic field to the jet array and achieve coordinated magnetic-array control remains a problem to be solved in this field. Summary of the Invention

[0006] In view of the shortcomings of the prior art, the purpose of this invention is to provide a magnetically enhanced atmospheric pressure jet array plasma generator to solve one or more problems in the prior art.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows:

[0008] A magnetically enhanced atmospheric pressure jet array plasma generator includes:

[0009] A magnetic field generating component, configured to form a magnetic field, includes annular magnets and adjusting rods evenly distributed along the axis, with spacer sleeves provided between the annular magnets, and the adjusting rods evenly distributed along the outer circumference of the annular magnet rings and passing through the spacer sleeves;

[0010] An array electrode assembly configured to form a plasma jet from discharge gas includes a discharge quartz tube and electrodes, wherein the discharge quartz tube is axially and uniformly distributed within the annular magnet ring and engages with the electrodes;

[0011] A gas mixing container, configured for uniformly mixing discharge gas, includes an inlet head, one end of which is connected to the gas mixing container and communicates with the inlet head.

[0012] Furthermore, the magnetic field generating component also includes a first clamping plate and a second clamping plate respectively disposed at the upper and lower ends of the annular magnet which are uniformly distributed axially.

[0013] Furthermore, the array electrode assembly also includes an insulating ring, with its two sides respectively abutting against the upper annular magnet and the first clamping plate.

[0014] Furthermore, the array electrode assembly also includes an electrode stage, with the two sides of the electrode stage respectively abutting against the lower annular magnet and the second clamping plate.

[0015] Furthermore, the device also includes a support assembly, which includes a base and a vertically arranged pole relative to the base.

[0016] Furthermore, the support assembly also includes a carrier body movably fitted to the upright, the gas mixing container being connected to the carrier body and located at the bottom of the carrier body; and the air inlet head penetrating the surface of the carrier body.

[0017] Furthermore, the gas mixing container is also provided with an extension edge, and the adjusting rod is vertically inserted through the extension edge, the first clamping piece, the insulating ring, and the electrode platform.

[0018] Furthermore, the two ends of the adjusting rod are respectively connected to the second clamping plate and the carrier.

[0019] Furthermore, one end of the discharge quartz tube extends downward through the second clamping piece.

[0020] Furthermore, the electrode is one of a single ring, a double ring, or a needle-ring.

[0021] Compared with the prior art, the beneficial technical effects of the present invention are as follows:

[0022] This invention generates an axial magnetic field parallel to the jet direction through a coaxially arranged annular magnet array. The Lorentz force is used to radially confine charged particles in the plasma, effectively suppressing radial diffusion and enhancing impact ionization. This simultaneously increases the length of all jets and the concentration of active particles in the array, avoiding the problems of opposite electron drift and inconsistent enhancement caused by differences in the electric field direction of each unit in traditional vertical magnetic fields. This significantly improves the uniformity of array discharge and the processing area. The adjusting rod and spacer sleeve can flexibly change the magnet spacing, achieving continuous adjustment of the magnetic field configuration and intensity to adapt to different working gases and process parameters, overcoming the poor adaptability of fixed magnetic field structures. The mixing container premixes the discharge gas and distributes it evenly to each discharge quartz tube. Combined with a modular electrode design, this further ensures the consistency of the initial generation of each jet. Overall, it achieves stable generation of large-area, highly uniform plasma jets, with a compact structure and convenient control. Attached Figure Description

[0023] Figure 1 A schematic diagram of a magnetically enhanced atmospheric pressure jet array plasma generator according to an embodiment of the present invention is shown.

[0024] Figure 2 The diagram shows a cross-sectional view of a magnetically enhanced atmospheric pressure jet array plasma generator according to an embodiment of the present invention, in the AA direction.

[0025] The following are labels in the attached diagram: 1. Magnetic field generating component; 11. Ring magnet; 12. Adjusting rod; 13. First clamping piece; 14. Second clamping piece; 15. Spacer sleeve; 2. Array electrode assembly; 21. Discharge quartz tube; 22. Electrode; 23. Insulating ring; 24. Electrode stage; 3. Gas mixing container; 31. Gas inlet head; 32. Extension edge; 4. Support assembly; 41. Base; 42. Upright pole; 43. Bearing body; 5. Moving mechanism. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this invention clearer, the following detailed description of a magnetically enhanced atmospheric pressure jet array plasma generator proposed by this invention, in conjunction with the accompanying drawings and specific embodiments, will provide a more comprehensive understanding. The advantages and features of this invention will become clearer from the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, used only to facilitate and clearly illustrate the purpose of the embodiments of this invention. Please refer to the accompanying drawings to make the objectives, features, and advantages of this invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this invention, should still fall within the scope of the technical content disclosed in this invention.

[0027] Please refer to the following: Figures 1 to 2 The magnetically enhanced atmospheric pressure jet array plasma generator of this embodiment includes:

[0028] The magnetic field generating component 1 is configured to generate an axial magnetic field parallel to the axis of the discharge quartz tube 21 to radially confine charged particles in the plasma. It includes annular magnets 11 and adjusting rods 12 that are uniformly distributed axially. The annular magnets 11 are preferably circular magnets made of neodymium iron boron permanent magnets. Multiple annular magnets 11 are coaxial and arranged along the axial direction. Spacer sleeves 15 are also provided between the annular magnets 11. The adjusting rods 12 are uniformly distributed along the outer circumference of the annular magnet ring and pass through the spacer sleeves 15, that is, they are arranged at equal angular intervals around the outer edge of the annular magnets 11 to provide uniform axial clamping force.

[0029] Furthermore, the magnetic field generating component 1 also includes a first clamping plate 13 and a second clamping plate 14 respectively disposed at the upper and lower ends of the axially uniformly distributed annular magnets 11. In this embodiment, the first clamping plate 13 and the second clamping plate 14 are both annular flat plates, respectively disposed above the uppermost annular magnet 11 and below the lowermost annular magnet 11, and are locked to the adjusting rod 12 by nuts. The two cooperate to axially clamp the multiple annular magnets 11 into a whole. Preferably, the adjusting rod 12 is an externally threaded screw structure. By operating the adjusting rod 12, the relative distance between the first clamping plate 13 and the second clamping plate 14 can be changed, thereby adjusting the spacing between the annular magnets 11. In addition, to achieve magnetic field strength adjustment, the thickness of the spacer sleeve 15 can also be changed to obtain the required magnetic field configuration and strength.

[0030] The device further includes an array electrode assembly 2, configured to form a plasma jet from the discharge gas, comprising a discharge quartz tube 21 and electrodes 22. The discharge quartz tube 21 is axially and uniformly distributed within the ring of the annular magnet 11 and engages with the electrodes 22. In this embodiment, the upper end of the discharge quartz tube 21 is the gas inlet, and the lower end is the jet outlet. The electrodes 22 engage with the discharge quartz tube 21 to generate a strong electric field when energized, ionizing the working gas flowing through the discharge quartz tube 21.

[0031] Furthermore, the array electrode assembly 2 also includes an insulating ring 23 and an electrode platform 24. The insulating ring 23 is disposed between the upper annular magnet 11 and the first clamping piece 13, with its two sides abutting against the upper end face of the uppermost annular magnet 11 and the lower surface of the first clamping piece 13, thereby radially positioning the upper part of the discharge quartz tube 21 and achieving electrical insulation between the quartz tubes and between the quartz tubes and the clamping piece. The electrode platform 24 is disposed between the lower annular magnet 11 and the second clamping piece 14, with its two sides abutting against the lower end face of the lowermost annular magnet 11 and the upper surface of the second clamping piece 14, respectively. Preferably, the electrode platform 24 has mounting holes corresponding to the number and position of the discharge quartz tubes 21, for supporting the electrodes 22 and fixing the lower part of the discharge quartz tubes 21 to maintain stability.

[0032] Furthermore, the electrode 22 can be any one of a single ring, a double ring, or a needle-ring design to meet different discharge requirements. Specifically, when a single ring electrode is used, only one ring electrode is provided on the outer side of the discharge quartz tube 21. When a double ring electrode is used, two ring electrodes are axially spaced on the outer side of the discharge quartz tube 21, with the upper ring electrode connected to high voltage and the lower ring electrode grounded. When a needle-ring electrode is used, a needle-shaped high-voltage electrode is inserted into the center of each discharge quartz tube 21, and a ring-shaped grounding electrode is fitted onto the outer wall of the discharge quartz tube 21 near the lower outlet. This replaceable modular electrode design allows the device to flexibly adapt to different process conditions.

[0033] The device also includes a gas mixing container 3, configured to uniformly mix the discharge gas. The gas mixing container 3 is a hollow cavity, including an inlet head 31 for connecting to an external gas source pipeline. Multiple outlets are evenly distributed at the bottom of the gas mixing container 3. One end of the discharge quartz tube 21 is connected to the gas mixing container 3 via an outlet and communicates with the inlet head 31, so that the working gas entering through the inlet head 31 is mixed within the gas mixing container 3 and evenly distributed to each of the discharge quartz tubes 21. A radially outwardly extending edge 32 is also formed around the bottom periphery of the gas mixing container 3, and multiple through holes are formed on the edge 32.

[0034] The device further includes a support assembly 4, which includes a base 41 and a vertically arranged upright 42 relative to the base 41. The base 41 provides the mounting foundation for the entire device, and the upright 42 is vertically fixed to the base 41. The support assembly 4 also includes a carrier body 43 movably fitted to the upright 42. The gas mixing container 3 is connected to the carrier body 43 and located at the bottom of the carrier body 43. The air inlet head 31 extends through the surface of the carrier body 43 to facilitate connection with a gas pipeline. Preferably, the carrier body 43 has mounting holes corresponding to the plate for connecting the adjusting rod 12.

[0035] Furthermore, the adjusting rod 12 is vertically inserted through corresponding through holes in the extension edge 32, the first clamping piece 13, the insulating ring 23, and the electrode platform 24. The lower end of the adjusting rod 12 is preferably fixedly connected to the second clamping piece 14 using a locking nut or similar workpiece, while the upper end of the adjusting rod 12 is locked to the support body 43 using an adjusting nut or similar workpiece. Then, by rotating the adjusting nut, the adjusting rod 12 can be moved axially relative to the support body 43, thereby driving the second clamping piece 14 to rise or fall, compressing or releasing each of the annular magnets 11, achieving synchronous adjustment of the spacing between adjacent annular magnets 11, ensuring uniform clamping force while maintaining magnetic field stability.

[0036] Furthermore, the lower end of the discharge quartz tube 21, i.e. the jet outlet end, extends out after passing through the through holes opened on the electrode stage 24 and the second clamping plate 14 in sequence, so that the plasma jet can be smoothly sprayed downward onto the sample surface.

[0037] Optionally, in actual use, this device is also equipped with a mass flow meter and a pulse-modulated high-frequency high-voltage power supply. The mass flow meter is installed on the pipeline between the gas source and the aforementioned gas inlet head 31 to precisely control the flow rate of the working gas. The output terminal of the high-frequency high-voltage power supply is configured to be electrically connected to the electrode 22, with a preferred frequency of 5-20kHz, voltage of 0-30kV, and pulse repetition frequency of 1-1000Hz. In addition, a known moving mechanism 5 is also configured on the base 41. The moving mechanism 5 is configured to place the sample to be processed and can move the sample along the horizontal X and Y directions to adjust the relative position of the sample with respect to the outlet of each discharge quartz tube 21, thereby achieving uniform plasma processing of different areas.

[0038] The following describes the specific working process of a magnetically enhanced atmospheric pressure jet array plasma generator according to this embodiment:

[0039] First, a suitable working gas (such as argon, helium, nitrogen, or a mixture thereof) is selected according to the processing technology. After setting the flow rate through a mass flow meter, the gas enters the mixing container 3 through the inlet 31, where it is fully mixed and evenly distributed into each of the discharge quartz tubes 21. A high-frequency, high-voltage power supply is then connected, creating an electric field between the electrodes 22 to break down the working gas and generate plasma. Under the combined action of the airflow and the electric field, the plasma is ejected from the lower end of the discharge quartz tubes 21, forming a plasma jet. Simultaneously, the annular magnet 11 generates an axial magnetic field consistent with the jet direction inside the discharge quartz tubes 21 and in its outlet region. Under the influence of the magnetic field, electrons and ions in the plasma are radially constrained by the Lorentz force, effectively suppressing radial diffusion and forcing charged particles to accelerate axially, thereby increasing the probability of collision and ionization between electrons and neutral gas molecules and improving discharge uniformity. By rotating the adjusting nut on the adjusting rod 12 to change the magnet spacing, the magnetic field configuration can be flexibly adjusted. Simultaneously, combined with independent adjustment of power supply parameters and gas flow rate, multi-dimensional and high-precision control of plasma characteristics can be achieved.

[0040] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A magnetically enhanced atmospheric pressure jet array plasma generator, characterized in that, include: A magnetic field generating component (1) is configured to form a magnetic field, including annular magnets (11) and adjusting rods (12) evenly distributed in the axial direction. A spacer sleeve (15) is also provided between the annular magnets (11). The adjusting rods (12) are evenly distributed along the outer circumference of the annular magnets (11) and pass through the spacer sleeves (15). The array electrode assembly (2) is configured to form a plasma jet from the discharge gas, including a discharge quartz tube (21) and an electrode (22), wherein the discharge quartz tube (21) is axially uniformly distributed within the ring of the annular magnet (11) and is fitted to the electrode (22). A gas mixing container (3) is configured to uniformly mix discharge gas, including an inlet head (31), one end of which is connected to the gas mixing container (3) and in communication with the inlet head (31).

2. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 1, characterized in that: The magnetic field generating component (1) also includes a first clamping plate (13) and a second clamping plate (14) respectively disposed at the upper and lower ends of the annular magnet (11) which are uniformly distributed in the axial direction.

3. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 2, characterized in that: The array electrode assembly (2) further includes an insulating ring (23), the two sides of which abut against the upper annular magnet (11) and the first clamping piece (13), respectively.

4. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 3, characterized in that: The array electrode assembly (2) further includes an electrode stage (24), with the two sides of the electrode stage (24) abutting against the lower annular magnet (11) and the second clamping plate (14), respectively.

5. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 4, characterized in that: The device also includes a support assembly (4), which includes a base (41) and a vertical pole (42) arranged relative to the base (41).

6. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 5, characterized in that: The support assembly (4) also includes a carrier (43) that is movably fitted to the upright (42), the gas mixing container (3) is connected to the carrier (43) and located at the bottom of the carrier (43); the air inlet (31) extends through the surface of the carrier (43).

7. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 6, characterized in that: The gas mixing container (3) is also provided with an extension edge (32), and the adjusting rod (12) is vertically inserted through the extension edge (32), the first clamping piece (13), the insulating ring (23) and the electrode platform (24).

8. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 7, characterized in that: The two ends of the adjusting rod (12) are respectively connected to the second clamping piece (14) and the carrier (43).

9. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 8, characterized in that: One end of the discharge quartz tube (21) also extends downward through the second clamping piece (14).

10. The magnetically enhanced atmospheric pressure jet array plasma generator as described in claim 9, characterized in that: The electrode (22) is one of single ring, double ring, or needle-ring.

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