conveying device

Abstract

The present application relates to a carrier device, and is a carrier device for a substrate, comprising: a main body portion having an internal space, the internal space being constituted by a front portion connecting a load port on which a container containing a substrate is placed and extending in a device width direction, a rear portion connecting a load lock module provided to a processing device and opposing the front portion in a device depth direction, a bottom portion on which a substrate carrier robot is placed, a top portion opposing the bottom portion, and a pair of side portions opposing each other in the device width direction; and a structure body, the structure body being provided to the bottom portion and having a support table fixing the carrier robot and a structure feature portion extending in the device width direction, an opening portion being provided to the side portion, the structure feature portion having a continuous surface continuous with a side surface of the support table extending in the device width direction.

Description

Technical Field

[0001] This disclosure relates to a conveying device. Background Technology

[0002] For example, Patent Document 1 discloses an EFEM (Equipment Front End Module) device for transferring transported items between the device and the processing unit using a transport robot installed inside the housing.

[0003] Patent Document 1: International Publication No. 2022 / 197951

[0004] In this type of EFEM handling equipment, there are high requirements for reducing the floor space occupied by the equipment on site.

[0005] Furthermore, as shown in Patent Document 1, it is known that during maintenance of a handling robot, the robot is replaced from the front side of the housing (load port side). In this case, the load port needs to be removed, which can lead to deterioration in the workability of the replacement or setup.

[0006] On the other hand, when the robot is replaced from the side of the housing, the footprint in the longitudinal direction of the device increases because a guide structure for the replacement operation needs to be installed inside the housing. Summary of the Invention

[0007] As can be seen from the above, the technology disclosed herein provides a handling device for moving substrates into and out of a processing device for processing substrates, which can reduce the footprint of the device and efficiently replace the handling robot.

[0008] One aspect of this disclosure is a transport device for moving substrates into and out of a processing apparatus for processing substrates, comprising: a main body having an internal space, the internal space being a front portion extending in the width direction of the apparatus and connected to a load port for holding a container for holding the substrates; a rear portion connecting to a load locking module provided in the processing apparatus and opposite to the front portion in the depth direction of the apparatus; a bottom portion for holding a transport robot for transporting the substrates; a top portion opposite to the bottom portion; and a pair of side portions opposite to each other in the width direction of the apparatus; and a structure provided in the bottom portion having a support platform for fixing the transport robot and a structural feature portion extending in the width direction of the apparatus, the side portions having openings, and the structural feature portion having a continuous surface continuous with the side surface of the support platform extending in the width direction of the apparatus.

[0009] According to this disclosure, a handling device for moving substrates into and out of a processing apparatus for processing substrates can reduce the footprint of the apparatus and efficiently replace handling robots. Attached Figure Description

[0010] Figure 1 This is a top view showing an outline of a wafer processing system equipped with the handling apparatus according to the first embodiment.

[0011] Figure 2 This is a side sectional view of the conveying device, showing what it looks like when the door is closed.

[0012] Figure 3 This is a side sectional view of the conveying device, showing what the door looks like when it is open.

[0013] Figure 4 This is a side view of the conveying device.

[0014] Figure 5 It is a top-view sectional view of the conveying device.

[0015] Figure 6 This is a cross-sectional view of the load port.

[0016] Figure 7 This is a side view of the rear of the load port.

[0017] Figure 8 It is a 3D diagram of a transport robot.

[0018] Figure 9 It is a 3D view of the transport robot and the support platform.

[0019] Figure 10 This is an enlarged view of the lower part of the main body.

[0020] Figure 11 It is in the conveying device and Figure 2 and Figure 3 The images show cross-sectional views of different parts.

[0021] Figure 12 This is a 3D diagram of the robot's changer.

[0022] Figure 13 This is the front view of the robot changer.

[0023] Figure 14 This is a rear view of the robot changer.

[0024] Figure 15 This is a side view used to illustrate the position of the robot changer relative to the robot and the support platform.

[0025] Figure 16 This is a top view used to illustrate the position of the robot changer relative to the robot and the support platform.

[0026] Figure 17This is an explanatory diagram showing the robot being moved out of the main body.

[0027] Figure 18 This is an explanatory diagram showing the robot being moved out of the main body.

[0028] Figure 19 This is an explanatory diagram showing a portion of the configuration of the transport robot changer according to the second embodiment. Detailed Implementation

[0029] Hereinafter, the conveying device according to this embodiment will be described with reference to the accompanying drawings. Furthermore, in this specification and the drawings, elements with substantially the same functional configuration are omitted from repeated description by using the same symbols. In the drawings, the X direction is the direction in which the load ports 101 are arranged side-by-side, i.e., the width direction of the device. The Y direction is the direction in which the front wall 121 and rear wall 122 of the main body 102 of the conveying device 20 are arranged side-by-side, i.e., the depth direction of the device; the negative side of the Y direction is the front side, and the positive side of the Y direction is the rear side. The Z direction is the vertical direction.

[0030] (First Implementation)

[0031] <Wafer Processing System 1>

[0032] Figure 1 This is a top view showing an outline of the wafer processing system 1 equipped with the transport device 20 according to the first embodiment.

[0033] like Figure 1 As shown, the wafer processing system 1 includes a processing unit 10 and a transport unit 20. The processing unit 10 and the transport unit 20 are arranged adjacent to each other.

[0034] The processing apparatus 10 is an apparatus for processing a semiconductor wafer (hereinafter referred to as "wafer") W, which serves as a substrate, and includes, for example, a processing module 30 and a vacuum transport module 40.

[0035] For example, multiple processing modules 30 are provided. Each processing module 30 processes the wafer W under a reduced pressure atmosphere, i.e., a vacuum atmosphere. The processing modules 30 perform processes such as film deposition, etching, and impurity diffusion. In addition, each processing module 30 has a vacuum processing chamber 31 in which the above-mentioned processes are performed on the wafer W under a vacuum atmosphere. Each vacuum processing chamber 31 is connected to the vacuum transport chamber 41 of the vacuum transport module 40 (described later) via a gate valve G1.

[0036] The vacuum transport module 40 has a vacuum transport chamber 41 that maintains a vacuum atmosphere inside the chamber. The vacuum transport chamber 41 is configured to be airtight, for example, it is generally polygonal in top view (the example in the figure is a quadrilateral shape). The vacuum transport chamber 41, which is connected to each processing module 30, is also connected to the load locking module 50 described later. Specifically, the vacuum transport chamber 41 is connected to the load locking chamber 51 of the load locking module 50, which is described later, via a gate valve (not shown). A transport mechanism 42 for transporting wafers W is provided inside the vacuum transport chamber 41. The vacuum transport module 40 uses the transport mechanism 42 to move wafers W between the vacuum processing chamber 31 and the load locking chamber 51 and the vacuum transport chamber 41.

[0037] Additionally, in the processing device 10, a load locking module 50 is provided at the end on the side of the conveying device 20. For example, multiple load locking modules 50 are provided.

[0038] Each load locking module 50 is used to transfer the wafer W between a vacuum atmosphere and a non-reduced pressure atmosphere, i.e., an atmospheric pressure atmosphere. Each load locking module 50 has a load locking chamber 51, which is configured to switch between an atmospheric pressure atmosphere and a vacuum atmosphere. The load locking chamber 51 is configured to connect the vacuum transport module 40 and the transport device 20.

[0039] The transport device 20 is used to move wafers W into and out of the processing device 10. Specifically, the transport device 20 is configured to transfer wafers W between the container holding multiple wafers W, i.e., the FOUP (Front-Opening Unified Pod) 900, and the processing device 10 without exposing the wafers W to the external atmosphere. The transport device 20 has a load port 101 and a main body 102, also known as an EFEM device.

[0040] The load port 101 is configured to accommodate FOUP900, for example, multiple FOUP900s can be arranged along the width direction (X direction) of the device (5 in the example in the figure).

[0041] The main body 102 is disposed on the rear side (positive side in the Y direction) of the load port 101. Specifically, the main body 102 is configured to be adjacent to the load port 101 on the rear side. Furthermore, a load locking chamber 51 is connected to the main body 102, specifically, for example, on its rear side (positive side in the Y direction). The interior of the main body 102 is under atmospheric pressure. Additionally, a handling robot 110 for handling and supporting the wafer W is disposed inside the main body 102. Through this handling robot 110, the wafer W can be transferred between the FOUP 900 placed on the load port 101 and the load locking chamber 51.

[0042] At least one control device C is provided in the wafer processing system 1 described above. The control device C processes computer-executable commands that cause the wafer processing system 1 to execute the various processes described herein. The control device C can be configured to control various elements of the wafer processing system 1 to execute the various processes described herein. In one embodiment, part or all of the control device C may be included in the wafer processing system 1. The control device C may include a processing unit, a storage unit, and a communication interface. The control device C is implemented, for example, by a computer. The processing unit can be configured to read a program from the storage unit that provides logic or routines capable of performing various control actions, and to perform various control actions by executing the read program. The program can be pre-stored in the storage unit or retrieved via a medium when needed. The retrieved program is stored in the storage unit and read from and executed by the processing unit. The medium can be various computer-readable storage media, or a communication line connected to the communication interface, and can be temporary or non-temporary. The processing unit can be a CPU (Central Processing Unit) or one or more circuits. The storage unit may include RAM (Random Access Memory), ROM (Read Only Memory), HDD (Hard Disk Drive), SSD (Solid State Drive), or a combination thereof. The communication interface may communicate with the wafer processing system 1 via communication lines such as LAN (Local Area Network).

[0043] <Wafer Processing>

[0044] Next, the wafer processing performed by the wafer processing system 1 configured as described above will be explained. Furthermore, the following wafer processing is performed under the control of the control device C.

[0045] First, wafer W is taken out of FOUP900 by handling robot 110 and moved into load locking chamber 51 of load locking module 50.

[0046] Next, the load locking chamber 51 is sealed and becomes a vacuum atmosphere.

[0047] Then, the gate valve (not shown) on the vacuum transport chamber 41 side of the load locking chamber 51 is opened, and the wafer W is moved from the load locking chamber 51 to the vacuum transport chamber 41 by the transport mechanism 42.

[0048] Next, after closing the aforementioned gate valve, the gate valve G1 of the processing module 30 for target processing is opened. Then, the wafer W is moved by the transport mechanism 42 into the vacuum processing chamber 31 of the target processing module 30. Afterwards, the gate valve G1 is closed, and the wafer W undergoes the desired processing in the processing module 30.

[0049] After the desired processing is completed, wafer W is returned from vacuum processing chamber 31 to FOUP900 in the reverse order of its transfer from FOUP900 to vacuum processing chamber 31. Thus, a series of wafer processing steps are completed.

[0050] <Transportation Device 20>

[0051] Figure 2 and Figure 3 These are side sectional views of the conveying device 20. Figure 2 This shows what door 180 looks like when it is closed, as described later. Figure 3 The following shows what door 180 looks like when it is open. Figure 4 This is a side view of the conveying device 20. Figure 5 This is a top sectional view of the conveying device 20. Figure 6 This is a cross-sectional view of load port 101. Figure 7 This is a side view of the rear side of load port 101. Figure 8 This is a 3D view of the transport robot 110. Figure 9 This is a 3D view of the transport robot 110 and the support platform 240. Figure 10 This is an enlarged view of the lower part of the main body 102. Figure 11 It is in the conveying device 20 and Figure 2 and Figure 3 The images show cross-sectional views of different parts.

[0052] like Figures 2-5 As shown, the conveying device 20 has the aforementioned load port 101 and main body 102, and also has a lower receiving part 103 for accommodating various components.

[0053] The main body 102 has a shell 120 with a generally rectangular parallelepiped shape. The shell 120 has a front wall 121 as the front part, a rear wall 122 as the rear part, a pair of side walls 123 as the side parts, a bottom wall 124 as the bottom, and a top wall 125 as the top.

[0054] When viewed from above, the front wall 121 extends along the width direction (X direction) of the device on the front side (negative side in the Y direction) of the main body 102. The front wall 121 includes an upper front wall 121A on the upper side and a lower front wall 121B on the lower side. The lower front wall 121B is configured to protrude further forward than the upper front wall 121A.

[0055] The upper front wall 121A connects the load port 101 and the lower receiving portion 103. The lower receiving portion 103 is disposed below the load port 101. An opening 126 for the load port 101 is provided in the upper front wall 121A. In addition, an opening 127 is provided in the upper front wall 121A as a loading and unloading outlet for the wafer W relative to the lower receiving portion 103.

[0056] The rear wall 122 faces the front wall 121 in the longitudinal direction of the device and extends along the width direction of the device on the rear side (Y-direction positive side) of the main body 102 when viewed from above. The load locking module 50 is connected to the rear wall 122. An opening 128 is provided in the rear wall 122 at a position corresponding to the load locking chamber 51. The opening 128 is located in the rear wall 122 at a position in the vertical direction that is approximately the same as the junction position within the load locking chamber 51. The junction position within the load locking chamber 51 refers to the vertical position of the wafer W when it is transferred between the load locking chamber 51 and the handling robot 110.

[0057] A pair of sidewalls 123 are opposite each other in the width direction of the device and extend along the depth direction of the device when viewed from above. Each sidewall 123 is provided with an opening 129 for maintaining the main body 102. The opening 129 is configured to be large enough to allow the transport robot 110 to be moved in and out, as will be described later. A door 130 is provided in the opening 129 for opening and closing.

[0058] The bottom wall 124 and the top wall 125 are opposite each other in the vertical direction and extend in the horizontal direction (X direction and Y direction), respectively.

[0059] The main body 102 has an internal space consisting of a front wall 121, a rear wall 122, a side wall 123, a bottom wall 124, and a top wall 125. The internal space is divided vertically into a lower transport space S1 and an upper receiving space S2 by a partition 131 provided between the bottom wall 124 and the top wall 125. As will be described later, purified gas is supplied from the receiving space S2 to the transport space S1, and an opening 132 for supplying the gas is provided in the partition 131.

[0060] like Figure 6 and Figure 7 As shown, the load port 101 has a connecting plate 140, an isolation cover 150, and a main cover 151.

[0061] When connected to the main body 102, the connecting plate 140 is mounted on the front of the upper front wall 121A in a manner that covers the opening 126. The upper side of the connecting plate 140 protrudes further than the upper part of the main cover 151. On the upper side of the connecting plate 140, above the isolation cover 150 and the main cover 151, an opening 141 is provided as the loading and unloading outlet for the wafer W. The lower side of the connecting plate 140 extends to cover the rear of the isolation cover 150 and the rear of the main cover 151. On the lower side of the connecting plate 140, a slit 142 is provided in the vertical direction for raising and lowering the arm 192 of the moving mechanism 190 (described later).

[0062] The isolation cover 150 forms a receiving space S3 between itself and the front of the connecting plate 140 to accommodate the moving mechanism 190 (described later). Furthermore, the isolation cover 150 covers the slit 142 from the front. By providing the isolation cover 150, gas leakage from the transport space S1 of the main body 102 to the outside of the transport device 20 can be prevented.

[0063] The main cover 151 forms a receiving space S4 between the connecting plate 140 and the isolation cover 150 to accommodate the retraction mechanism 170 (described later). Furthermore, the main cover 151 covers both the retraction mechanism 170 and the isolation cover 150. In this embodiment, the main cover 151 covers the front and top walls of the isolation cover 150, but not the bottom wall.

[0064] The bottom wall of the isolation cover 150 and the bottom wall of the main cover 151 form the bottom surface of the load port 101. A sliding member 152 is provided on the bottom surface of the load port 101. When the load port 101 is installed on the main body 102, the sliding member 152 slides on the top of the first receiving portion 103A (described later) of the lower receiving portion 103. Furthermore, when the load port 101 is connected to the main body 102, the sliding member 152 is detached from the top of the first receiving portion 103A.

[0065] In addition, the load port 101 has a worktable 160 and a forward / backward mechanism 170.

[0066] The worktable 160 includes a mounting surface 160a for housing the FOUP 900 of the wafer W. Specifically, the upper surface of the worktable 160 is the mounting surface 160a of the FOUP 900. The worktable 160 supports the FOUP 900 on the mounting surface 160a. The FOUP 900 mounted on the mounting surface 160a is arranged such that its cover 901 faces the opening 141 of the connecting plate 140. The worktable 160 is disposed on the upper surface of the main cover 151.

[0067] The worktable 160 is provided with a nozzle 161 for supplying gas to the FOUP 900. Specifically, the nozzle 161 supplies an inert gas such as nitrogen into the FOUP 900 placed on the worktable 160. The nozzle 161 is movable via a forward / reverse mechanism 170, and specifically, it is movable together with the worktable 160, which is also movable via the forward / reverse mechanism 170. Furthermore, the nozzle 161 protrudes from the bottom of the worktable 160, with its lower part protruding into the aforementioned receiving space S4.

[0068] The retraction mechanism 170 causes the worktable 160 to move forward and backward in the horizontal direction. Specifically, the retraction mechanism 170 moves forward and backward relative to the opening 141 by moving the worktable 160 back and forth. More specifically, the retraction mechanism 170 moves the worktable 160 between a forward position and a rearward position. The forward position is the position where the FOUP900 is transferred between the externally mounted transport device and the worktable 160. The rearward position is the position for transferring the wafer W between the FOUP900 and the main body 102 via the opening 141.

[0069] The retraction mechanism 170 includes, for example, a guide 171 and a support member 172. The guide 171 guides the worktable 160 to move in the depth direction of the device. Specifically, the guide 171 guides the support member 172, which supports the worktable 160, to move in the rear-forward direction. In the support member 172, the worktable 160 is connected to the upper end, and the lower end is connected to the guide 171 in a manner that allows it to move in the depth direction of the device along which the guide 171 extends. Furthermore, the retraction mechanism 170 is housed within the aforementioned housing space S4.

[0070] Additionally, load port 101 has a door 180 and a moving mechanism 190.

[0071] Door 180 opens and closes to opening 141. Door 180 is configured to unlock the cover 901 of FOUP 900 while retaining the cover 901. With the door 180 holding the unlocked cover 901, the cover 901 is opened by opening door 180. When door 180 is opened and closed, it moves within main body 102 (specifically within transport space S1).

[0072] The moving mechanism 190 functions as a lifting mechanism to open, close, and raise / lower the door 180 and the cover 901. The moving mechanism 190 includes, for example, an actuator 191, an arm 192, and a lifting body 193.

[0073] Actuator 191 drives the lifting and lowering of door 180. Specifically, actuator 191 drives the lifting body 193, which supports door 180 via arm 192, to lift and lower. Actuator 191 is configured to extend vertically (Z direction) inside load port 101. Actuator 191 can be an electro-pneumatic actuator such as a cylinder, or an electromechanical actuator.

[0074] Arm 192 supports door 180 and is driven by actuator 191. Arm 192, for example... Figure 7 A pair of arms 192 are arranged along the width direction (X direction) of the device. The upper end of each arm 192 is connected to a door 180 located inside the main body 102 (specifically inside the transport space S1), and the lower end of each arm 192 is connected via a lifting body 193 to an actuator 191 located inside the load port 101, i.e., outside the main body 102. In order to enable the arms 192 to rise and fall in this connected state, a slit 142 is provided on the upper front wall 121A of the main body 102 as described above. That is, a slit 142 is provided on the upper front wall 121A of the main body 102, and the slit 142 is configured to allow the arm 192 to be inserted and to pass through when the arm 192 rises and falls. For example, a slit 142 is provided for each arm 192.

[0075] The lifting body 193 moves up and down along the actuator 191, that is, it moves in the vertical direction.

[0076] The moving mechanism 190 is configured to allow the door 180 to move in the longitudinal direction (Y direction) of the device. For example, the arm 192 supporting the door 180 is connected to the lifting body 193 in a manner that allows it to move in the back-and-forth direction.

[0077] The moving mechanism 190 is housed in the housing space S4 of the main cover 151. Specifically, the housing space S4 houses the portion of the moving mechanism 190 located outside the main body 102, namely the actuator 191, a part of the arm 192, and the lifting body 193 of the moving mechanism 190.

[0078] In addition, the moving mechanism 190 also has an actuator (not shown) that drives the door 180 to move back and forth. The moving mechanism 190 is controlled by a control device C. Specifically, the aforementioned actuator and actuator 191 of the moving mechanism 190 are controlled by the control device C.

[0079] like Figures 2-4 As shown, the lower receiving section 103 has multiple receiving sections stacked in the vertical direction, such as the upper first receiving section 103A and the lower second receiving section 103B.

[0080] The first receiving section 103A houses a functional expansion module, which comprises at least one of a measurement module for performing measurements related to the film on the wafer W, an inspection module for inspecting defects in the wafer W, and an alignment module for adjusting the orientation position of the wafer W. The opening 127 is provided in the upper front wall 121A of the main body 102 at a position corresponding to the first receiving section 103A.

[0081] The measurement or inspection module housed in the first housing section 103A includes, for example, a mounting stage (not shown) that holds the wafer W and is configured to move in a horizontal direction, and an imaging unit (not shown) that captures images of the wafer W placed on the mounting stage and moving horizontally. Alternatively, or in addition to this module, the measurement or inspection module may also include a module configured to capture images of the wafer W, supported by a handling robot 110 inserted through the opening 127 and moving horizontally, using the imaging unit (not shown).

[0082] The second housing section 103B houses electrical components, including a power supply unit. The second housing section 103B does not have an opening like the opening 127. That is, in both the first housing section 103A and the second housing section 103B, only the upper first housing section 103A has an opening that serves as the loading / unloading outlet for the wafer W.

[0083] The main body 102 has a door 200 and a lifting mechanism 210.

[0084] Door 200 opens and closes the opening 128 of the rear wall 122. Lifting mechanism 210 raises and lowers door 200 to open and close opening 128. Door 200 and lifting mechanism 210 are located inside the main body 102 (specifically inside the transport space S1).

[0085] Additionally, the lifting mechanism 210 has an actuator (not shown) that drives the door 200 to rise and fall. The lifting mechanism 210 is controlled by a control device C, specifically, the aforementioned actuator of the lifting mechanism 210 is controlled by the control device C.

[0086] Furthermore, as described above, the main body 102 includes a transport robot 110 that supports and transports the wafer W. Specifically, the transport robot 110 transports the wafer W between the opening 141 and the opening 128. The transport robot 110 is housed within the transport space S1 and placed on the bottom wall 124.

[0087] like Figure 8 and Figure 9 As shown, the handling robot 110 has a horizontal arm 220 and a vertical multi-joint arm 230 as handling arms.

[0088] The horizontal arm 220 is configured to transport the wafer W in a horizontal direction. The horizontal arm 220 is, for example, a multi-jointed arm, having a fork 221, a first arm 222, and a second arm 223.

[0089] The fork-shaped member 221 supports the wafer W at its front end. The fork-shaped member 221 is rotatably connected to the front end of the first arm 222 at its base end with an axis extending in the vertical direction (Z direction) (hereinafter referred to as the "vertical axis") as the center.

[0090] The first arm 222 is rotatably connected to the front end of the second arm 223 with its base side as the center of the vertical axis.

[0091] The second arm 223 is rotatably connected to the front end of the vertical multi-joint arm 230 with the vertical axis as the center.

[0092] The vertical multi-joint arm 230 is composed of a multi-joint arm and is configured to at least allow the horizontal arm 220 to be raised and lowered. In this embodiment, the vertical multi-joint arm 230 is configured to allow the horizontal arm 220 to move in the vertical direction (Z direction) and the device width direction (X direction). The vertical multi-joint arm 230 has an arm 231 that is rotatable in the vertical direction and a base 232 that is connected to the arm 231 and fixed to the support platform 240 described later.

[0093] Arm 231 includes, for example, a first arm 231A and a second arm 231B.

[0094] The first arm 231A is connected to the horizontal arm 220 at its front end. In addition, the first arm 231A is rotatably connected to the front end of the second arm 231B at its base end with a shaft (hereinafter referred to as the "front and rear shaft") extending in the longitudinal direction of the device as the center.

[0095] The second arm 231B is rotatably connected to the upper end of the base 232 with its front and rear axes on its base side as the center.

[0096] The base 232 supports the horizontal arm 220 via the arm 231. The base 232 has a pair of plate-like members 233 and a bottom member 234.

[0097] A pair of plate-shaped members 233 are arranged in the longitudinal direction (Y direction) of the device. Specifically, of the pair of plate-shaped members 233, the first plate-shaped member 233A is arranged in front (negative side of the Y direction), and the second plate-shaped member 233B is arranged in the rear (positive side of the Y direction). The second arm 231B is supported between the first plate-shaped member 233A and the second plate-shaped member 233B.

[0098] The plate-shaped member 233 extends vertically within the transport space S1. Furthermore, when viewed in the depth direction of the device, the plate-shaped member 233 is approximately an isosceles triangle, comprising a pair of long sides extending vertically and a short side connecting the pair of long sides. In this embodiment, the second plate-shaped member 233B has an inner opening, but this is not a limitation.

[0099] A transport support 235 is provided at the lower front part of the first plate-shaped member 233A. The transport support 235 is a handle that supports the transport robot changer 300 when the transport robot 110 is changed using the transport robot changer 300 described later. The transport support 235 protrudes from the front of the first plate-shaped member 233A in the longitudinal direction (Y direction) of the device and extends in the width direction (X direction) of the device.

[0100] The bottom member 234 is configured to connect the lower end of the first plate-shaped member 233A to the lower end of the second plate-shaped member 233B. For example... Figure 9 As shown, a positioning structure for positioning the transport robot 110 is formed on the bottom surface of the bottom member 234. For example, multiple, such as two, positioning pins 236 are provided on the bottom member 234. The positioning pins 236 are inserted into pin holes 241 provided in the support platform 240 (described later). Alternatively, although not shown, the positioning pins can be provided on the support platform 240 side, and pin holes can be provided on the bottom surface side of the bottom member 234, with the positioning pins on the support platform 240 side inserted into the pin holes on the bottom surface side of the bottom member 234. Furthermore, the positioning structure of the transport robot 110 is not limited to this embodiment, and any structure other than positioning pins can be used.

[0101] like Figure 2 , Figure 3 and Figure 5 As shown, the main body 102 has a support platform 240 and an exhaust box 250 as a pair of exhaust sections. The support platform 240 and the exhaust box 250 constitute the structure of this disclosure, and the exhaust box 250 constitutes the structural feature of this disclosure.

[0102] A support platform 240 and a pair of exhaust boxes 250 are disposed on the bottom wall 124 and arranged in the width direction (X direction) of the device. Specifically, the pair of exhaust boxes 250 are arranged on both sides of the support platform 240 in the width direction of the device. The front side (negative side in the Y direction) of the support platform 240 extending in the width direction of the device is continuous with the front side of the exhaust boxes 250. In addition, the rear side (positive side in the Y direction) of the support platform 240 extending in the width direction of the device is continuous with the rear side of the exhaust boxes 250. That is, the front and rear sides of the exhaust boxes 250 form structural feature parts by forming continuous surfaces with the front and rear sides of the support platform 240, respectively.

[0103] The support platform 240 fixes and supports the handling robot 110. For example... Figure 9 As shown, on the top of the support platform 240, there are multiple, for example two, pin holes 241 provided at positions corresponding to the positioning pins 236 of the transport robot 110. When the transport robot 110 is placed on the support platform 240, the positioning pins 236 are inserted into the pin holes 241. Thus, the transport robot 110 is fixed in the desired position relative to the support platform 240.

[0104] like Figure 10 As shown, in the transport robot 110 supported by the support platform 240, the transport support member 235 protrudes forward (negative side in the Y direction) from the front of the support platform 240. Therefore, the lower region of the front wall 121 corresponding to the transport support member 235, namely the lower front wall 121B, is configured to protrude further forward than the upper front wall 121A. Thus, even with the transport support member 235 provided, the transport support member 235 can be accommodated while minimizing the wafer transport distance between the FOUP 900 of the transport device 20 and the load locking chamber 51. A first lower space T1, which is part of the space formed by the transport support member 235, is formed below the plate-shaped member 233 on which the transport support member 235 is provided. For example, as Figure 10 As shown, the first lower space T1 is formed by the space surrounded by the transport support 235, the lower front wall 121B, the first plate-shaped member 233A and the support platform 240, and the bottom wall 124.

[0105] Furthermore, in the transport robot 110 supported by the support platform 240, the second plate-shaped member 233B is configured to protrude further rearward (positive side in the Y direction) than the rear of the support platform 240. As a result, a second lower space T2 is formed below the plate-shaped member 233, which is part of the space formed by the second plate-shaped member 233B protruding from the support platform 240. For example, as... Figure 10 As shown, the second lower space T2 is formed by a space surrounded by a second plate-shaped member 233B protruding from the support platform 240, a rear wall 122, the support platform 240, and a bottom wall 124.

[0106] Furthermore, although not shown in the figure, the first lower space T1 and the second lower space T2 can also be arranged in opposite directions in the longitudinal direction (Y direction) of the conveying device 20. That is, the conveying support 235 can also be provided on the second plate member 233B instead of the first plate member 233A. In this case, a lower front wall 121B that protrudes forward is not formed at the lower part of the front wall 121, but a lower rear wall that protrudes backward is formed at the lower part of the rear wall 122. In this case, the first lower space T1 is formed by the space surrounded by the conveying support 235, the protruding lower rear wall, the second plate member 233B and the support platform 240, and the bottom wall 124. On the other hand, the second lower space T2 is formed by the space surrounded by a surface that does not protrude forward but is continuous with the upper front wall 121A, the first plate member 233A and the support platform 240, and the bottom wall 124.

[0107] In this way, by forming a first lower space T1 by protruding the lower part forward or backward in at least one wall (front wall 121 or rear wall 122), the width in the depth direction of the device can be minimized, and the structural feature can be used as a guide when the handling robot is replaced, thus ensuring the operability of the replacement operation.

[0108] Furthermore, although not shown in the figure, in the longitudinal direction (Y direction) of the transport device 20, the first lower space T1 may not be formed, and a second lower space T2 may be provided in all cases. That is, the transport support member 235 may not be formed, and the first plate-shaped member 233A and the second plate-shaped member 233B may be configured to protrude further into the longitudinal direction of the device than the support platform 240. In this case, the lower part of the front wall 121 and the rear wall 122 may not protrude forward or backward. As a result, the increase in the number of components such as the transport support member 235 in the transport robot 110 can be suppressed, and the structural feature part can be used as a guide part when changing the transport robot, thus ensuring the ease of changeover.

[0109] Furthermore, although not shown in the figure, in the longitudinal direction (Y direction) of the conveying device 20, a second lower space T2 may not be formed, and a first lower space T1 may be provided in all cases. That is, conveying support members 235 may be provided on both the first plate member 233A and the second plate member 233B.

[0110] like Figure 2 , Figure 3 and Figure 5 As shown, the exhaust box 250 is configured to receive the descending gas flow into the transport space S1. In this embodiment, the gas flowing into the exhaust box 250 can also return to the containment space S2 via the return passage B described later.

[0111] Alternatively, it can be discharged outside the main body 102 (specifically, for example, a clean room equipped with a conveying device 20) without returning to the containment space S2 via the return passage B. In this case, a fan filter unit (not shown) can also be installed in the exhaust box 250.

[0112] As described above, the front of the support platform 240 is continuous with the front of the exhaust box 250, and the rear of the support platform 240 is continuous with the rear of the exhaust box 250. Therefore, Figure 10 The first lower space T1 and the second lower space T2 shown also extend to a position opposite to the exhaust box 250.

[0113] like Figure 2 and Figure 3 As shown, the main body 102 has a fan filter unit (FFU) 260 as an air supply unit.

[0114] FFU260 supplies purified gas, i.e., gas filtered of particulate and / or molecular pollutants, from above to below the transport space S1. FFU260 is disposed in the aforementioned receiving space S2, for example supported by partition wall 131. As described above, an opening 132 is formed in partition wall 131, through which FFU260 supplies purified gas to the transport space S1.

[0115] In this embodiment, one end of a supply pipe 270 that supplies an inert gas such as nitrogen to the containment space S2 can be connected to the main body 102. A gas supply mechanism 271 is connected to the other end of the supply pipe 270. The gas supply mechanism 271 includes, for example, an inert gas supply source, a switching valve for switching the inert gas supply operation / stop, and a flow regulating valve for adjusting the inert gas flow rate.

[0116] Because of the supply pipe 270 as described above, in this embodiment, the FFU 260 is able to supply purified inert gas to the containment space S2.

[0117] In this embodiment, such as Figure 11 As shown, a fan installed inside the FFU260 creates a downward airflow within the transport space S1, enabling the inert gas to circulate within the main body 102. The inert gas can circulate, for example, through a circulation path formed by the transport space S1, the containment space S2, and the return passage B. Specifically, the purified inert gas is discharged downwards from the containment space S2 through the opening 132 towards the transport space S1 by the FFU260, reaching the lower end of the transport space S1, and then returning to the containment space S2 via the return passage B through the exhaust box 250.

[0118] In addition, as mentioned above, the internal gas can be discharged to the outside of the device via the exhaust box 250 without circulating the internal gas of the housing 120.

[0119] Furthermore, when the return path B is provided, the transport space S1 and the receiving space S2 are configured to extend in the vertical direction, and their arrangement can be arbitrarily set. For example, the return path B can be provided along the rear of the front wall 121 of the main body 102, or as follows: Figure 11 It is shown to be disposed inside the column 133 that constitutes the main body 102.

[0120] When the column 133, which constitutes the main body 102, is located inside the main body 102, the floor area of ​​the main body 102 (EFEM device) can be reduced. Therefore, in this conveying device 20, when the front and rear of the exhaust box 250 form continuous surfaces with the front and rear of the support platform 240, respectively, the floor area reduction effect can be further improved.

[0121] Alternatively, in the above example, the inert gas is circulated within the main body 102, but instead, dry air can also be circulated. In this case, for example, dry air is supplied from the gas supply mechanism 271 to the containment space S2 via the supply pipe 270.

[0122] <Transportation Robot Changer 300>

[0123] During the maintenance of the aforementioned handling robot 110, the handling robot 110 is replaced using a handling robot changer. Figures 12-14 These are, respectively, a 3D view, a front view, and a rear view of the material handling robot changer 300. Figure 15 and Figure 16 These are diagrams illustrating the position of the handling robot changer 300 relative to the handling robot 110 and the support platform 240.

[0124] like Figures 12-14 As shown, the handling robot changer 300 has a lifting section 310 and a guide roller section 320. The lifting section 310 is configured to support the handling robot 110 and move up and down freely. The guide roller section 320 is configured to support the lifting section 310 and move freely in the horizontal direction.

[0125] The lifting unit 310 has a pair of support frames 311, a vertical frame 312, a lifting mechanism 313, a guide plate 314, and a guide member 315.

[0126] A pair of support frames 311 are arranged in the longitudinal direction (Y direction) of the device. Specifically, of the pair of support frames 311, the first support frame 311A ​​is positioned at the front (negative side of the Y direction), and the second support frame 311B is positioned at the rear (positive side of the Y direction). Furthermore, the first support frame 311A ​​and the second support frame 311B extend in the width direction (X direction) of the device and have a length sufficient to support the handling robot 110. Figure 15 and Figure 16 As shown, the first support frame 311A ​​supports the transport support 235, and the second support frame 311B supports the bottom surface of the second plate-shaped member 233B.

[0127] like Figures 12-14 As shown, the vertical frame 312 is supported by a pair of support frames 311 and extends in the vertical direction (Z direction).

[0128] The lifting mechanism 313 raises and lowers a pair of support frames 311 and a vertical frame 312. The configuration of the lifting mechanism 313 is arbitrary. For example, the lifting mechanism 313 may have a screw (not shown) that allows the operator to manually raise and lower the pair of support frames 311 and the vertical frame 312. Or, for example, the lifting mechanism 313 may have an actuator (not shown) that automatically raises and lowers the pair of support frames 311 and the vertical frame 312.

[0129] The guide plate 314 is disposed on the lower vertical frame 322 of the guide roller section 320 (described later) and extends in the vertical direction. In the guide plate 314, slits 316 for raising and lowering the guide member 315 extend in the vertical direction, for example, and are provided at two locations.

[0130] A guide member 315 is disposed on the vertical frame 312. Furthermore, the guide member 315 is configured to hold the guide plate 314 via a slit 316. In this configuration, when the pair of support frames 311 and the vertical frame 312 are raised or lowered by the lifting mechanism 313, the guide member 315 guides the pair of support frames 311 and the vertical frame 312 in the vertical direction along the slit 316, thereby causing the pair of support frames 311 and the vertical frame 312 to move in the vertical direction.

[0131] The guide roller section 320 has a pair of horizontal frames 321, a lower vertical frame 322, and an upper vertical frame 323.

[0132] A pair of horizontal frames 321 are arranged in the longitudinal direction (Y direction) of the device. In addition, the pair of horizontal frames 321 extend in the width direction (X direction) of the device and support the first support frame 311A ​​and the second support frame 311B.

[0133] Multiple, for example, two wheels 324 are provided on the bottom surface of each horizontal frame 321. With this structure, the handling robot changer 300 is configured to move freely in the width direction (X direction) of the device. For example, the operator can move the handling robot changer 300 manually, or it can be moved automatically by a moving mechanism (not shown).

[0134] Multiple rollers 325, for example two, are provided on the inner side of each horizontal frame 321. The rollers 325 protrude slightly from the inner side of the horizontal frame 321.

[0135] The lower vertical frame 322 is supported by a pair of horizontal frames 321 and extends in the vertical direction. In addition, the upper vertical frame 323 is supported by the lower vertical frame 322 and extends in the vertical direction.

[0136] like Figure 15 and Figure 16 As shown, when the transport robot changer 300 moves in the device width direction (X direction), the first support frame 311A ​​and the horizontal frame 321 move in the first lower space T1, and the second support frame 311B and the horizontal frame 321 move in the second lower space T2. Furthermore, since the sides (front and rear) of the exhaust box 250 are formed by continuous surfaces (structural features) that are continuous with the sides (front and rear) of the support platform 240, the roller 325, by abutting against the continuous surface, can guide the movement of the transport robot changer 300 in the device width direction without the need for additional guide structures.

[0137] The inner width (distance between inner sides) L1 of a pair of support frames 311 is the same as the inner width L1 of a pair of horizontal frames 321. The inner width L1 is greater than the width L2 of the support platform 240 (width L2 of the exhaust box 250) by the amount by which the large roller 325 protrudes from the inner side of the horizontal frame 321.

[0138] <How to Replace the Handling Robot 110>

[0139] Next, the replacement method of the handling robot 110 using the handling robot changer 300 configured as described above will be explained. Figure 17 This is an explanatory diagram showing how the transport robot 110 is moved out of the main body 102. Figure 18 This is an explanatory diagram showing how the transport robot 110 is moved out of the main body 102.

[0140] First, open the door 130 of the main body 102, as follows: Figure 17As shown in (a), the transfer robot changer 300 enters the main body 102 from the trolley 400 through the opening 129. The structure of the trolley 400 is arbitrary, but it is configured to carry the transfer robot changer 300. At this time, with the roller 325 abutting against the side of the exhaust box 250, the transfer robot changer 300 is moved to the negative side in the X direction.

[0141] Next, as Figure 17 As shown in (b), the transfer robot changer 300 is moved further to the negative side in the X direction and positioned at the corresponding position on the support platform 240. At this time, since the side of the exhaust box 250 is continuous with the side of the support platform 240, the roller 325 abuts against the side of the support platform 240 from the side of the exhaust box 250, guiding the transfer robot changer 300 and enabling smooth movement of the transfer robot changer 300. Furthermore, to ensure that the transfer robot changer 300 stops properly at the corresponding position on the support platform 240, a stop (not shown) can be provided on the bottom wall 124 of the main body 102.

[0142] Next, the lifting mechanism 313 raises and lowers a pair of support frames 311, which in turn support the handling robot 110.

[0143] Next, as Figure 17 As shown in (c), the transfer robot changer 300 is moved to the positive side in the X direction, and is removed from the main body 102 through the exhaust box 250. Then, as... Figure 18 As shown, the transport robot changer 300 supporting the transport robot 110 is placed on the trolley 400. As described above, the transport robot 110 is removed.

[0144] Furthermore, the standby space for the trolley 400 is included in the space where the door 130 opens and closes. Therefore, there is no need to separately ensure space for replacing the handling robot 110, which reduces the footprint of the device.

[0145] When a new transport robot 110 is moved into the main body 102, the operation is performed in the opposite direction to the operation of removing the transport robot 110. That is, the transport robot changer 300 supporting the new transport robot 110 is moved into the main body 102 and further moved to the negative side in the X direction, positioning it in the corresponding position on the support platform 240. Next, the support frame 311 is raised and lowered by the lifting mechanism 313, transferring the new transport robot 110 and placing it on the support platform 240. At this time, by inserting the positioning pin 236 of the new transport robot 110 into the pin hole 241 of the support platform 240, the new transport robot 110 can be fixed in the desired position on the support platform 240. Next, the empty transport robot changer 300 is moved to the positive side in the X direction and removed from the main body 102.

[0146] Thus, the replacement of a series of handling robots 110 using the handling robot changer 300 is completed.

[0147] In addition, in this embodiment, the transport robot 110 is moved forward and backward from the positive side of the X direction of the main body 102 to replace the transport robot 110, but the same applies when replacing the transport robot 110 from the negative side of the X direction of the main body 102.

[0148] <Main Effects of This Implementation>

[0149] As described above, the handling device 20 reduces the footprint of the device and allows for efficient replacement of the handling robot 110, thereby improving productivity. Details are described below.

[0150] In conventional handling devices, when maintaining the handling robot, it is known that the handling robot is replaced from the front of the main body (EFEM unit).

[0151] For example, even in the transport device 20 of this embodiment, when the transport robot 110 is replaced from the front side (negative side in the Y direction) of the main body 102 as in the conventional manner, a track is still required to guide the transport robot changer 300. Furthermore, since the track is located in front of the main body 102 each time the transport robot 110 is replaced, additional space is needed for the track, preventing a reduction in the device's footprint. Additionally, when the track is separated from the main body 102, the time cost increases due to the high requirement for relative positional accuracy. Furthermore, for example, when replacing the transport robot 110 from the front side of the main body 102 as in the conventional manner, the load port 101 needs to be removed. In this case, when connecting the load port 101 to the main body 102, a repositioning is required. Moreover, this results in a teaching operation for the OHT (Overhead Hoist Transport) device with the FOUP 900 placed on the load port 101, deteriorating workability.

[0152] For example, when replacing the handling robot 110 from the front of the main body 102 as before, it is also necessary to remove the lower housing 103. In this case, since the lower housing 103 contains the power supply unit, processing in the wafer processing system 1 needs to be stopped, resulting in downtime.

[0153] Based on the above, when the handling robot 110 is replaced from the front side of the main body 102, the robot replacement workability deteriorates and productivity deteriorates significantly.

[0154] On the other hand, when the transport robot 110 is replaced from the side of the main body 102, a space is required to transport the transport robot 110 into the housing via a guide rail structure, which cannot balance the operability of robot replacement with the reduction of floor space.

[0155] However, according to this embodiment, the main body 102 has a support platform 240 and an exhaust box 250, and has a structural feature where the sides (front and rear) of the support platform 240 and the sides (front and rear) of the exhaust box 250 are continuous. Therefore, the continuous surface formed by the sides of the support platform 240 and the sides of the exhaust box 250 can function as a guide for the movement of the transport robot changer 300 in the device width direction. In other words, the main body 102 has a structure that integrates the device frame (the sides of the support platform 240 and the sides of the exhaust box 250) with the guide of the transport robot changer 300.

[0156] In addition, since an opening 129 is formed on the side wall 123 of the main body 102, the transport robot 110 and the transport robot changer 300 can be moved into and out of the main body 102 through the opening 129.

[0157] With the above-described structure, the main body 102 allows the transport robot 110 and the transport robot changer 300 to be moved in and out from the side (X direction) of the main body 102 for changing the transport robot 110. Therefore, according to this embodiment, since the continuous surface formed by the side of the support platform 240 and the side of the exhaust box 250 functions as a guide for the movement of the transport robot changer 300 in the width direction, even when changing the transport robot 110 from the side of the main body 102, the track required for conventional transport robot changes is not needed. Thus, by performing robot changing operations from the side of the main body 102, the footprint of the transport device 20 can be reduced while ensuring high workability (productivity).

[0158] Furthermore, in conventional handling devices, most of them house a handling robot consisting only of a horizontal multi-joint arm within the main body (EFEM device). In this case, the arm constituting the horizontal multi-joint arm is relatively long in the horizontal direction, and the range of motion of the handling robot extends in the horizontal direction (X and Y directions). Therefore, in conventional handling devices, a large space is required in the depth direction (Y direction).

[0159] In contrast, in the handling device 20 of this embodiment, the handling robot 110 can be selectively composed of a handling robot having a vertical multi-joint arm 230. In this case, the range of motion of the vertical multi-joint arm 230 extends in the vertical direction (Z direction) and the device width direction (X direction), thus reducing the length of the main body 102 in the device depth direction (Y direction). In addition, the horizontal arm 220 supported by the vertical multi-joint arm 230 moves in the horizontal direction, but the first arm 222 and the second arm 223 constituting the horizontal arm 220 are relatively short, which also reduces the length of the main body 102 in the device depth direction (Y direction).

[0160] Therefore, in the handling device 20 of this embodiment, when the handling robot 110 is equipped with a handling robot having a vertical multi-joint arm 230, the length of the main body 102 in the device depth direction can be reduced, and the device floor area can be further reduced.

[0161] In this embodiment, the range of motion of the vertical articulated arm 230 of the handling robot 110 extends in both the vertical (Z-direction) and the device width (X-direction). That is, the space above the exhaust box 250 is included within the range of motion of the vertical articulated arm 230, on the outer side (positive and negative sides in the X-direction) of the vertical articulated arm 230 and the support platform 240 in the device width direction. In other words, when the handling robot 110 employs the vertical articulated arm 230, compared to a handling robot composed only of horizontal articulations, the range of motion in both the vertical (Z-direction) and device width (X-direction) directions is expanded, creating a component placement restriction area (=operation area) in the lateral regions of the handling robot 110, such as the space above the exhaust box 250, where it is impossible to install relatively large components.

[0162] In this embodiment, in the EFEM device employing the vertical articulated arm 230 in the handling robot 110, the main body 102 has a support platform 240 and an exhaust box 250, and has a structural feature where the sides (front and rear) of the support platform 240 and the sides (front and rear) of the exhaust box 250 are continuous. Therefore, without the need for additional guiding structures, the handling robot 110 can be effectively moved in and out from the side of the main body 102 by utilizing the component placement restriction area (the space above the exhaust box 250). Thus, the replacement method for the handling robot 110 disclosed herein achieves a greater reduction in floor space when the handling robot 110 has the vertical articulated arm 230.

[0163] According to this embodiment, in the main body 102, the lower front wall 121B can be configured to protrude further forward (to the negative side of the Y direction) than the upper front wall 121A, forming a first lower space T1. In other words, the space between the upper front wall 121A and the longitudinal direction of the transport robot 110 can be reduced, thereby reducing the overall footprint of the main body 102.

[0164] Furthermore, the position of the transport support 235 in front of the first plate-shaped member 233A of the transport robot 110 is not limited to the lower part; it can also be provided at the upper part. However, when the transport support 235 is provided at the lower part, the vertical length of the lower front wall 121B (first lower space T1) can be reduced, and the vertical length of the upper front wall 121A can be increased, thereby increasing the component storage space outside the transport space S1. In other words, the number of components that need to be arranged in the transport space S1 can be reduced, thus helping to reduce the device footprint of the transport device 20.

[0165] Furthermore, according to this embodiment, in the handling robot changer 300, since rollers 325 are provided on the inner side of the horizontal frame 321, the horizontal frame 321 can be installed close to the side of the support platform 240 and the side of the exhaust box 250. In this case, the support frame 311 can be installed close to the plate member 233, so when the handling robot 110 is supported by the support frame 311, the bending stress applied to the handling robot 110 can be suppressed to a smaller extent, which is advantageous in terms of the strength of the handling robot 110.

[0166] Furthermore, according to this embodiment, since the handling robot 110 is replaced from the side (X direction) of the main body 102, it is not necessary to remove the load port 101 as in the past, and the previously required repositioning of the load port 101 and teaching of the OHT device are avoided. Therefore, the handling robot 110 can be replaced easily.

[0167] Furthermore, since it is not necessary to remove the lower housing section 103 as before, the wafer processing system 1 can be stopped during the replacement of the handling robot 110, thus avoiding the downtime that was previously common. Therefore, product productivity can be improved.

[0168] As described above, according to this embodiment, the footprint of the handling device 20 can be reduced, while the handling robot 110 can be replaced efficiently and the handling robot 110 can be maintained appropriately.

[0169] (Second Implementation)

[0170] Figure 19 This is an explanatory diagram showing a portion of the structure of the handling robot changer 300 according to the second embodiment.

[0171] When replacing the transport robot 110 using the transport robot changer 300, in the first embodiment, the side of the exhaust box 250 has a continuous surface, i.e., a structural feature portion, that is, a surface that is continuous with the side of the support platform 240. Therefore, the side of the exhaust box 250 can function as a guide for movement of the transport robot changer 300 in the width direction of the device. On the other hand, in the second embodiment, the inner side of the main body 102 in the device depth direction, i.e., the rear of the lower front wall 121B and the front of the rear wall 122 of the main body 102, has a structural feature portion consisting of surfaces (opposing surfaces) that are parallel to the side of the support platform 240 at a certain distance. Therefore, the rear of the lower front wall 121B and the front of the rear wall 122 of the main body 102 can be used as guides for movement of the transport robot changer 300 in the width direction of the device.

[0172] In addition, such as Figure 19 As shown, the handling robot changer 300 of the second embodiment has a pair of support frames 330 instead of a pair of support frames 311 of the first embodiment, and also has a pair of horizontal frames 340 instead of a pair of horizontal frames 321 of the first embodiment.

[0173] A pair of support frames 330 are arranged in the longitudinal direction (Y direction) of the device. Specifically, in the pair of support frames 330, the first support frame 330A is arranged in front (negative side of the Y direction), and the second support frame 330B is arranged in the rear (positive side of the Y direction). In addition, the first support frame 330A and the second support frame 330B extend in the width direction (X direction) of the device and have a length sufficient to support the handling robot 110. The first support frame 330A supports the handling support member 235, and the second support frame 330B supports the bottom surface of the second plate-shaped member 233B.

[0174] A pair of horizontal frames 340 are arranged in the depth direction (Y direction) of the device. In addition, the pair of horizontal frames 340 extend in the width direction (X direction) of the device and support the first support frame 330A and the second support frame 330B.

[0175] Multiple, for example two, wheels 341 are provided on the bottom surface of each horizontal frame 340. With this structure, the transport robot changer 300 is configured to move freely in the width direction (X direction) of the device.

[0176] Multiple rollers, such as two rollers, are provided on the outer side of each horizontal frame 340. The rollers 342 protrude slightly from the outer side of the horizontal frame 340.

[0177] When the handling robot changer 300 moves in the width direction (X direction) of the device, the first support frame 330A and the horizontal frame 340 move in the first lower space T1, and the second support frame 330B and the horizontal frame 340 move in the second lower space T2. Furthermore, in the first lower space T1, the roller 342 abuts against the rear of the lower front wall 121B, and in the second lower space T2, the roller 342 abuts against the front of the rear wall 122.

[0178] The outer width (distance between outer sides) L3 of a pair of support frames 330 is the same as the outer width L3 of a pair of horizontal frames 340. The outer width L3 is greater than the inner width of the main body 102 in the longitudinal direction of the device (the distance between the rear of the lower front wall 121B and the front of the rear wall 122) L4 by the amount by which the small roller 342 protrudes from the outer side of the horizontal frame 340.

[0179] Furthermore, in this embodiment, the first lower space T1 and the second lower space T2 constitute the structural feature portion of this disclosure. Additionally, the rear side of the front wall 121 and the front side of the rear wall 122 of the main body 102 respectively constitute opposing surfaces in this disclosure.

[0180] According to this embodiment, the rear of the lower front wall 121B and the front of the rear wall 122 of the main body 102 can function as guides for the movement of the transport robot changer 300 in the device width direction. Therefore, in the second embodiment, the same effects as in the first embodiment described above can also be enjoyed.

[0181] <Other variations>

[0182] In the first and second embodiments, the handling robot 110 has a first plate-shaped member 233A and a second plate-shaped member 233B. However, the first plate-shaped member 233A can also be provided on both sides in the depth direction of the device, and the second plate-shaped member 233B can also be provided on both sides in the width direction of the device.

[0183] When the handling robot 110 has a pair of first plate-shaped members 233A, the handling robot 110 has a pair of handling support members 235, forming a first lower space T1 on both sides in the width direction of the device.

[0184] When the handling robot 110 has a pair of second plate-shaped members 233B, the pair of second plate-shaped members 233B are configured to protrude further into the width direction of the device than the support platform 240, forming a second lower space T2 on both sides in the width direction of the device.

[0185] The embodiments disclosed herein should be considered illustrative rather than restrictive in all respects. The above embodiments may be omitted, substituted, or modified in various ways without departing from the appended claims and their spirit. For example, the constituent elements of the above embodiments can be combined arbitrarily. From such arbitrary combinations, it is of course possible to obtain the effects and functions related to each constituent element involved in the combination, and to obtain other effects and functions that are obvious to those skilled in the art from the description herein.

[0186] Furthermore, the effects described in this specification are illustrative or exemplary only and are not restrictive. That is, the technology involved in this disclosure, in addition to or in lieu of the effects described above, can achieve other effects that are obvious to those skilled in the art from the description in this specification.

[0187] In addition, the following configuration examples also fall within the technical scope of this disclosure.

[0188] (1) A conveying device for moving substrates into and out of a processing device for processing substrates, comprising:

[0189] The main body has an internal space comprising a front portion extending in the width direction of the device and connected to a load port for holding a container containing the substrate; a rear portion opposite to the front portion in the depth direction of the device and connected to a load locking module disposed in the processing device; a bottom portion for holding a handling robot for transporting the substrate; a top portion opposite to the bottom portion; and a pair of side portions opposite each other in the width direction of the device.

[0190] The structure is a structure provided at the bottom, and has a support platform for fixing the transport robot, and structural features extending in the width direction of the device.

[0191] An opening is provided on the aforementioned side.

[0192] The aforementioned structural feature has a continuous surface that is continuous with the side of the support platform that extends in the width direction of the device.

[0193] (2) A conveying device for moving substrates into and out of a processing device for processing substrates, comprising:

[0194] The main body has an internal space comprising a front portion extending in the width direction of the device and connected to a load port for holding a container containing the substrate; a rear portion opposite to the front portion in the depth direction of the device and connected to a load locking module disposed in the processing device; a bottom portion for holding a handling robot for transporting the substrate; a top portion opposite to the bottom portion; and a pair of side portions opposite each other in the width direction of the device.

[0195] The structure is a structure provided at the bottom, and has a support platform for fixing the transport robot, and structural features extending in the width direction of the device.

[0196] An opening is provided on the aforementioned side.

[0197] The aforementioned structural feature has a facing surface that is parallel to the side of the support platform extending in the width direction of the device at a predetermined distance.

[0198] (3) The conveying device described in (1) or (2) above, wherein,

[0199] The aforementioned opening is for loading or unloading the aforementioned handling robot.

[0200] (4) According to the conveying device described in (1) above, wherein,

[0201] The continuous surface of the aforementioned structural feature is formed by an exhaust section into which gas flows in from the aforementioned internal space.

[0202] (5) According to the conveying device described in (2) above, wherein,

[0203] The opposing surfaces of the aforementioned structural feature are formed by the lower inner surfaces of the aforementioned front part and the aforementioned rear part.

[0204] (6) The conveying device described in any one of (1) to (5) above, wherein,

[0205] The aforementioned handling robot has a handling support member protruding from the side of the handling robot into the depth of the device.

[0206] The lower part of the aforementioned front or rear portion protrudes into the depth of the device at a position corresponding to the transport support member.

[0207] (7) The conveying device described in any one of (1) to (5) above, wherein,

[0208] The aforementioned handling robot protrudes and extends further into the depth of the device than the aforementioned support platform.

[0209] (8) The conveying device described in any one of (1) to (7) above, wherein,

[0210] The above-mentioned handling robot has the following characteristics:

[0211] The horizontal arm is configured to transport the aforementioned substrate in a horizontal direction; and

[0212] The vertical multi-joint arm is configured to enable the aforementioned horizontal arm to be raised and lowered.

[0213] (9) The conveying device described in (8) above, wherein,

[0214] The above-mentioned vertical multi-joint arm has:

[0215] The arm is configured to rotate in both the vertical direction and the width direction of the device; and

[0216] The base is connected to the aforementioned arm and fixed to the aforementioned support platform.

[0217] (10) The conveying device described in any one of (1) to (9) above, wherein,

[0218] The aforementioned handling robot has a handling support protruding from the side of the handling robot into the depth of the device.

[0219] (11) The conveying device described in any one of (1) to (10) above, wherein,

[0220] The support platform is provided with a positioning structure for fixing the position of the transport robot relative to the support platform.

[0221] Explanation of reference numerals in the attached figures

[0222] 10…processing device; 20…transfer device; 50…load locking module; 101…load port; 102…main body; 121…front wall; 122…rear wall; 123…side wall; 124…bottom wall; 125…top wall; 129…opening; 110…transfer robot; 240…support platform; 250…exhaust box; 900…FOUP; S1…transfer space; S2…reception space; T1…first lower space; T2…second lower space; W…wafer.

Claims

1. A conveying apparatus for moving substrates into and out of a processing apparatus for processing substrates, comprising: The main body has an internal space comprising a front portion extending in the width direction of the device and connected to a load port for holding a container containing the substrate; a rear portion opposite to the front portion in the depth direction of the device and connected to a load locking module disposed in the processing device; a bottom portion for holding a handling robot for transporting the substrate; a top portion opposite to the bottom portion; and a pair of side portions opposite each other in the width direction of the device. The structure is a structure provided at the bottom, and has a support platform for fixing the transport robot, and structural features extending in the width direction of the device. An opening is provided on the aforementioned side. The aforementioned structural feature has a continuous surface that is continuous with the side of the support platform that extends in the width direction of the device.

2. A conveying apparatus for moving substrates into and out of a processing apparatus for processing substrates, comprising: The main body has an internal space comprising a front portion extending in the width direction of the device and connected to a load port for holding a container containing the substrate; a rear portion opposite to the front portion in the depth direction of the device and connected to a load locking module disposed in the processing device; a bottom portion for holding a handling robot for transporting the substrate; a top portion opposite to the bottom portion; and a pair of side portions opposite each other in the width direction of the device. The structure is a structure provided at the bottom, and has a support platform for fixing the transport robot, and structural features extending in the width direction of the device. An opening is provided on the aforementioned side. The aforementioned structural feature has a facing surface that is parallel to the side of the support platform extending in the width direction of the device at a predetermined distance.

3. The conveying device according to claim 1 or 2, wherein, The aforementioned opening is for loading or unloading the aforementioned handling robot.

4. The conveying device according to claim 1, wherein, The continuous surface of the aforementioned structural feature is formed by an exhaust section into which gas flows in from the aforementioned internal space.

5. The conveying device according to claim 2, wherein, The opposing surfaces of the aforementioned structural feature are formed by the lower inner surfaces of the aforementioned front part and the aforementioned rear part.

6. The conveying device according to claim 1 or 2, wherein, The aforementioned handling robot has a handling support member protruding from the side of the handling robot into the depth of the device. The lower part of the aforementioned front or rear portion protrudes into the depth of the device at a position corresponding to the transport support member.

7. The conveying device according to claim 1 or 2, wherein, The aforementioned handling robot protrudes and extends further into the depth of the device than the aforementioned support platform.

8. The conveying device according to claim 1 or 2, wherein, The above-mentioned handling robot has the following characteristics: The horizontal arm is configured to transport the aforementioned substrate in a horizontal direction; and The vertical multi-joint arm is configured to enable the aforementioned horizontal arm to be raised and lowered.

9. The conveying device according to claim 8, wherein, The above-mentioned vertical multi-joint arm has: The arm is configured to rotate in both the vertical direction and the width direction of the device; and The base is connected to the aforementioned arm and fixed to the aforementioned support platform.

10. The conveying device according to claim 1 or 2, wherein, The aforementioned handling robot has a handling support protruding from the side of the handling robot into the depth of the device.

11. The conveying device according to claim 1 or 2, wherein, The support platform is provided with a positioning structure for fixing the position of the transport robot relative to the support platform.

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