A cleaning apparatus for integrated optoelectronic device manufacturing

Abstract

The application discloses a kind of cleaning equipment for integrated optoelectronic device manufacturing, it is related to the technical field of cleaning equipment, including the shell of cleaning equipment, the middle position of the shell is provided with conveying device, the inside of the shell is equipped with the turnover assembly for washing integrated optoelectronic device.The application rotates the body and presses the limiting block, the other end of movable block is raised, so that the integrated optoelectronic device on the upper surface of transmission member is driven to rotate synchronously until the integrated optoelectronic device is turned over, then the hydraulic telescopic rod drives the first clamping member and the second clamping member to descend, so that the integrated optoelectronic device is immersed in water as a whole, then cooperate with the acoustic generator to clean the surface of integrated optoelectronic device, and the integrated optoelectronic device is placed vertically in water, so that the two sides of integrated optoelectronic device are cleaned, and stains also fall downward, without staying on integrated optoelectronic device, avoiding secondary pollution.

Description

Technical Field

[0001] This invention relates to the technical field of cleaning equipment, and more particularly to a cleaning equipment for manufacturing integrated optoelectronic devices. Background Technology

[0002] Integrated optoelectronic devices are core components that integrate optical elements such as lasers, modulators, and detectors with electronic circuits onto a single chip. They utilize photons (rather than electrons) to transmit signals, enabling ultra-high-speed, low-power data processing. Unlike ordinary integrated circuits that only process electrical signals, they are responsible for both photoelectric conversion and optical signal processing, making them core components of modern fiber optic communications, high-speed optical modules in data centers, and lidar.

[0003] Existing cleaning equipment often uses conveyor belts for transport to meet the need for double-sided cleaning. However, the direct contact between the conveyor belt and the lower surface of the device creates an obstruction effect, preventing that surface from being effectively cleaned. Therefore, the device must be flipped over, and both sides must be washed with water and air separately, meaning the same device needs to undergo two independent cleaning processes. This not only significantly increases the total cleaning time but also reduces production efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a cleaning device for manufacturing integrated optoelectronic devices in order to solve the above-mentioned problems.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a housing for a cleaning device, a conveying device is provided in the middle of the housing, a flipping assembly for water washing integrated optoelectronic devices is installed inside the housing, a drying assembly and a laser cleaning assembly are installed at the outlet end of the housing, a sound wave generator is installed in the housing corresponding to the flipping assembly, the laser cleaning assembly can move inside the housing, the bottom of the housing is filled with cleaning fluid, and the cleaning fluid is continuously circulated and filtered to filter out the dirt inside the cleaning fluid; The flipping assembly includes a mounting plate fixedly connected to the outer shell and two sets of sliders slidably disposed with the outer shell. A first clamping member is rotatably disposed between the two sliders. A hydraulic telescopic rod is disposed on the outer wall of each of the two sliders. Two sets of spring telescopic rods are fixedly disposed on the outer wall of the mounting plate. An L-shaped sliding plate is fixedly disposed at the other end of the spring telescopic rod. A second clamping member is slidably disposed on the outer wall of the L-shaped sliding plate to cooperate with the first clamping member. The first clamping member includes a rotating body, with limit posts fixedly provided at both ends of the rotating body, and a C-shaped groove for cooperating with the limit posts on the outer wall of the slider. A first limit rod is fixedly provided at both ends of one side of the rotating body. The second clamping member includes a movable block that slides with an L-shaped sliding plate. The end of the movable block extends beyond the L-shaped sliding plate. Mounting seats are fixedly mounted at both ends of the movable block. The distance between the two mounting seats is equal to the width of the L-shaped sliding plate. Rollers are rotatably mounted at the adjacent ends of the two mounting seats. The maximum distance between the rollers and the movable block is equal to the thickness of the L-shaped sliding plate. A second limiting rod is fixedly mounted on one side of the movable block to cooperate with the first limiting rod. A limiting block is fixedly mounted at the upper end of the movable block. A limiting hole for cooperating with the limiting block is opened on the outer wall of the rotating body. The end of the limiting block is chamfered. When needed, a sound wave generator can also be mounted on the outer wall of the mounting plate. The start-up device of this patent can also be controlled by a computer program. In practical applications, when cleaning integrated optoelectronic devices, the operator activates the hydraulic telescopic rod. The rod extends, causing the slider to move downwards, which in turn moves the first clamping component downwards. This brings the rotating body into contact with the movable block. The limiting block of the movable block enters the limiting hole of the rotating body, thus joining the first and second clamping components together. As the hydraulic telescopic rod continues to extend, the rotating body presses down on the limiting block, changing its pressure. Because the end of the movable block extends beyond the L-shaped sliding plate, it forms an approximate "lever" state, causing the other end of the movable block to tilt upwards. This synchronously rotates the integrated optoelectronic device on the upper surface of the transmission component until it flips over. The hydraulic telescopic rod then lowers the first and second clamping components, immersing the integrated optoelectronic device entirely in water. A sonic generator is then used to clean the surface of the integrated optoelectronic device. Since the device is placed vertically in the water, both sides are cleaned, and dirt falls off without remaining on the device, preventing secondary contamination.

[0006] Furthermore, the air-drying assembly includes a filter box installed on the outer wall of the housing. An air inlet pipe and an air outlet pipe are installed at the upper end of the filter box. The lower end of the air inlet pipe is located at the lower end of the filter box, and the lower end of the air outlet pipe is located at the upper end of the filter box. An upper air guide box is installed at the end of the air outlet pipe. An air blowing plate is fixedly connected to the outer wall of the upper air guide box. A wind pump is installed in the middle of the air inlet pipe. A lower air guide box is installed at the upper end of the air inlet pipe. The water-absorbing component is evenly installed on the outer wall of the lower air guide box. Fixed pipes are installed on both sides of the lower air guide box, and multiple sets of air inlets are opened on the upper surface of the fixed pipes. The water-absorbing component includes an air guide pipe that penetrates the outer shell and is fixedly connected to the lower air guide box. A first sprocket is rotatably connected to the middle position of the air guide pipe. The first sprocket is meshed with a chain. A first fixing rod is fixedly installed on the outer wall of the first sprocket. A first support plate is fixedly installed at the end of the air guide pipe. Multiple air inlets are opened at the upper end of the first support plate. Multiple rubber columns are fixedly installed at the upper end of the first support plate. Rubber columns are also fixedly installed on the upper surface of the fixing pipe. In practical applications, when the integrated optoelectronic device is moved to the position of the drying assembly, the air pump starts, increasing the air pressure inside the upper air guide box. Air from inside the upper air guide box enters the air blowing plate and is discharged from the air nozzle on the outer wall of the air blowing plate, thus blowing air onto the upper surface of the integrated optoelectronic device and drying it. At the same time, the start of the air pump creates negative pressure inside the lower air guide box and the filter box, which in turn creates negative pressure inside the water suction component and the fixing pipe. As a result, the air inlet on the upper surface of the fixing pipe draws air from the bottom of the integrated optoelectronic device. Meanwhile, the first tray is connected to the lower air guide box through the air guide pipe, and the negative pressure inside the first tray also draws air from the bottom of the integrated optoelectronic device through the air inlet. By blowing air from above and drawing air from below, the air flow above and below the integrated optoelectronic device is changed, thereby accelerating the drying of the outer surface of the integrated optoelectronic device.

[0007] Furthermore, the conveying device includes a water-absorbing component and a transmission component, which are connected by a chain; The transmission component includes a mounting post fixedly installed inside the housing, a second sprocket rotatably mounted at the middle position of the mounting post, the second sprocket meshing with a chain, a second fixing rod fixedly mounted on the outer wall of the second sprocket, a second support plate fixedly mounted at the end of the mounting post, a rubber post fixedly mounted on the upper surface of the second support plate, rubber sleeves fitted on the outer walls of the first and second fixing rods respectively, an internal gear fixedly mounted on the outer wall of the first second sprocket, a spur gear meshing with the internal part of the internal gear, and the middle position of the spur gear connected to the motor output shaft; In practical applications, when it is necessary to move the integrated optoelectronic device, the motor is started. The motor output shaft drives the spur gear to rotate, the spur gear drives the internal gear to rotate, the internal gear drives the internal gear to rotate, and the internal gear drives the first second sprocket to rotate. The second sprocket drives the other second sprockets and the first sprocket to rotate via a chain. The second sprocket and the first sprocket drive the second fixed rod and the first fixed rod to rotate respectively. When the second fixed rod rotates from one side of the second support plate to the other side, the integrated optoelectronic device moves forward one step towards the discharge end, realizing the movement of the integrated optoelectronic device. At the same time, the outer walls of the second fixed rod and the first fixed rod are respectively covered with rubber sleeves to prevent damage to the surface of the integrated optoelectronic device when in contact.

[0008] Furthermore, the spring telescopic rod includes a guide cylinder fixed to the outer wall of the mounting plate, a guide rod slidably disposed at one end of the guide cylinder, the guide rod being fixedly connected to the L-shaped sliding plate, a piston being fixedly disposed at the end of the guide rod, a plurality of through holes being evenly opened around the periphery of the piston, a return spring being disposed inside the guide cylinder, and waterproof rubber being disposed between the guide cylinder and the guide rod. In practical applications, when the L-shaped slide is squeezed, the L-shaped slide will push the guide rod to move, and the guide rod will push the piston to move. The piston is provided with a through hole on its periphery. The through hole can maintain the pressure balance at both ends of the piston, which facilitates the movement of the piston. At the same time, it can maintain the sealing of the inside of the guide cylinder to prevent water stains from entering and corroding the parts.

[0009] Compared with the prior art, the present invention has the following beneficial effects: The rotating body presses down on the limiting block, changing the pressure of the limiting block. Since the end of the movable block exceeds the L-shaped sliding plate, the movable block forms an almost "lever" state, causing the other end of the movable block to tilt up. This synchronously drives the integrated optoelectronic device on the upper surface of the transmission component to rotate until the integrated optoelectronic device flips over. Then, the hydraulic telescopic rod drives the first and second clamping parts to descend, immersing the integrated optoelectronic device entirely in water. Subsequently, in conjunction with the sound wave generator, the surface of the integrated optoelectronic device is cleaned. Since the integrated optoelectronic device is placed vertically in the water, both sides of the integrated optoelectronic device are cleaned. At the same time, the dirt will fall downwards and will not remain on the integrated optoelectronic device, avoiding secondary pollution. When the integrated optoelectronic device is moved to the position of the drying assembly, the air pump starts, increasing the air pressure inside the upper air guide box. Air from inside the upper air guide box enters the air blowing plate and is discharged from the air nozzle on the outer wall of the air blowing plate, thus blowing air onto the upper surface of the integrated optoelectronic device and drying it. At the same time, the start of the air pump creates negative pressure inside the lower air guide box and the filter box, which in turn creates negative pressure inside the water suction component and the fixing tube. As a result, the air inlet on the upper surface of the fixing tube draws air from the bottom of the integrated optoelectronic device. Meanwhile, the first tray is connected to the lower air guide box through the air guide pipe, and the negative pressure inside the first tray also draws air from the bottom of the integrated optoelectronic device through the air inlet. By blowing air from above and drawing air from below, the air flow above and below the integrated optoelectronic device is changed, thereby accelerating the drying of the outer surface of the integrated optoelectronic device. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the overall structure proposed in this invention; Figure 2 This is a schematic diagram of the internal structure of the outer shell proposed in this invention; Figure 3 This is a schematic diagram of the flip-up component structure proposed in this invention; Figure 4 This is a schematic diagram of the second clamping member structure proposed in this invention; Figure 5 This is a schematic diagram of the air-drying component structure proposed in this invention; Figure 6 This is a schematic diagram of the water-absorbing component structure proposed in this invention; Figure 7 This is a schematic diagram of the transmission component structure proposed in this invention; Figure 8 This is a schematic diagram of the internal gear mounting position proposed in this invention; Figure 9 This is a schematic diagram of the spring telescopic rod structure proposed in this invention.

[0011] In the diagram: 1. Outer shell; 2. Water absorption component; 201. Air guide pipe; 202. First sprocket; 203. First fixing rod; 204. First support plate; 2041. Rubber column; 2042. Air inlet; 3. Flip assembly; 301. Mounting plate; 302. Spring telescopic rod; 3021. Guide cylinder; 3022. Return spring; 3023. Guide rod; 3024. Piston; 3025. Through hole; 303. L-shaped sliding plate; 304. Slider; 305. Second clamping component; 3051. Movable block; 3052. Second limit rod; 3053. Installation... 3054. Mounting base; 3055. Roller; 3056. Limiting block; 306. First clamping component; 3061. Rotating body; 3062. First limiting rod; 3063. Limiting post; 307. Hydraulic telescopic rod; 4. Laser cleaning assembly; 5. Air drying assembly; 501. Lower air guide box; 502. Fixing pipe; 503. Upper air guide box; 504. Air blowing plate; 505. Filter box; 6. Transmission component; 601. Mounting post; 602. Second sprocket; 603. Second support plate; 604. Second fixing rod; 605. Internal gear; 606. Spur gear; 7. Chain. Detailed Implementation

[0012] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0013] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0014] Reference Figure 1-9A cleaning device for manufacturing integrated optoelectronic devices includes a housing 1, a conveying device in the middle of the housing 1, a flipping assembly 3 for washing integrated optoelectronic devices with water installed inside the housing 1, a drying assembly 5 and a laser cleaning assembly 4 installed at the outlet end of the housing 1, a sound wave generator installed in the housing 1 corresponding to the flipping assembly 3, the laser cleaning assembly 4 being movable inside the housing 1, and a cleaning liquid filled at the bottom of the housing 1, while the cleaning liquid is continuously circulated and filtered to filter out dirt inside the cleaning liquid. The flipping assembly 3 includes a mounting plate 301 fixedly connected to the outer shell 1 and two sets of sliders 304 slidably disposed with the outer shell 1. A first clamping member 306 is rotatably disposed between the two sliders 304. A hydraulic telescopic rod 307 is respectively disposed on the outer wall of the two sliders 304. Two sets of spring telescopic rods 302 are fixedly disposed on the outer wall of the mounting plate 301. An L-shaped sliding plate 303 is fixedly disposed at the other end of the spring telescopic rod 302. A second clamping member 305 that works in conjunction with the first clamping member 306 is slidably disposed on the outer wall of the L-shaped sliding plate 303. The first clamping member 306 includes a rotating body 3061, with limit posts 3063 fixedly provided at both ends of the rotating body 3061, and a C-shaped groove for use with the limit posts 3063 on the outer wall of the slider 304. A first limit rod 3062 is fixedly provided at both ends of one side of the rotating body 3061. The second clamping member 305 includes a movable block 3051 that slides with the L-shaped slide plate 303. The end of the movable block 3051 extends beyond the L-shaped slide plate 303. Mounting seats 3053 are fixedly mounted at both ends of the movable block 3051. The distance between the two mounting seats 3053 is equal to the width of the L-shaped slide plate 303. Rollers 3054 are rotatably mounted at adjacent ends of the two mounting seats 3053. The maximum distance between the rollers 3054 and the movable block 3051 is equal to the thickness of the L-shaped slide plate 303. The movable block 3051 has equal degrees of movement. A second limiting rod 3052 is fixedly provided on one side of the movable block 3051 to cooperate with the first limiting rod 3062. A limiting block 3055 is fixedly provided at the upper end of the movable block 3051. A limiting hole is opened on the outer wall of the rotating body 3061 to cooperate with the limiting block 3055. The end of the limiting block 3055 is chamfered. When needed, a sound wave generator can also be installed on the outer wall of the mounting plate 301. The start-up device of this patent can also be controlled by computer program setting. In practical applications, when cleaning integrated optoelectronic devices, the operator activates the hydraulic telescopic rod 307. The hydraulic telescopic rod 307 extends, causing the slider 304 to move downwards. The slider 304 then moves the first clamping member 306 downwards, causing the rotating body 3061 to contact the movable block 3051. The limiting block 3055 of the movable block 3051 enters the limiting hole of the rotating body 3061, thus joining the first clamping member 306 and the second clamping member 305 together. As the hydraulic telescopic rod 307 continues to extend, the rotating body 3061 presses down on the limiting block 3055, changing the pressure on the limiting block 3055. Due to the end of the movable block 3051... The end of the movable block 3051 extends beyond the L-shaped sliding plate 303, thus forming an approximate "lever" state. This causes the other end of the movable block 3051 to tilt upwards, thereby synchronously driving the integrated optoelectronic device on the upper surface of the transmission component 6 to rotate until the integrated optoelectronic device flips 90 degrees. Subsequently, the hydraulic telescopic rod 307 drives the first clamping component 306 and the second clamping component 305 to descend, causing the integrated optoelectronic device to be completely submerged in water. Then, in conjunction with the sound wave generator, the surface of the integrated optoelectronic device is cleaned. Since the integrated optoelectronic device is placed vertically in the water, both sides of the integrated optoelectronic device are cleaned. At the same time, the dirt will fall downwards and will not remain on the integrated optoelectronic device, avoiding secondary pollution.

[0015] Furthermore, the air-drying assembly 5 includes a filter box 505 installed on the outer wall of the housing 1. An air inlet pipe and an air outlet pipe are installed at the upper end of the filter box 505. The lower end of the air inlet pipe is located at the lower end of the filter box 505, and the lower end of the air outlet pipe is located at the upper end of the filter box 505. An upper air guide box 503 is installed at the end of the air outlet pipe. An air blowing plate 504 is fixedly connected to the outer wall of the upper air guide box 503. An air pump is installed in the middle of the air inlet pipe. A lower air guide box 501 is installed at the upper end of the air inlet pipe. The water-absorbing component 2 is evenly installed on the outer wall of the lower air guide box 501. Fixed pipes 502 are installed on both sides of the lower air guide box 501, and multiple sets of air inlets are opened on the upper surface of the fixed pipes 502. The water-absorbing component 2 includes an air pipe 201 that penetrates the outer shell 1 and is fixedly connected to the lower air box 501. A first sprocket 202 is rotatably connected to the middle position of the air pipe 201. The first sprocket 202 is meshed with the chain 7. A first fixing rod 203 is fixedly installed on the outer wall of the first sprocket 202. A first support plate 204 is fixedly installed at the end of the air pipe 201. A plurality of air inlets 2042 are opened at the upper end of the first support plate 204. A plurality of rubber pillars 2041 are fixedly installed at the upper end of the first support plate 204. Rubber pillars 2041 are also fixedly installed on the upper surface of the fixing pipe 502. In practical applications, when the integrated optoelectronic device is moved to the position of the drying assembly 5, the air pump starts, thereby increasing the air pressure inside the upper air guide box 503. The air inside the upper air guide box 503 enters the air blowing plate 504 and is discharged from the air nozzle on the outer wall of the air blowing plate 504, thereby blowing air onto the upper surface of the integrated optoelectronic device and drying it. After the air pump starts, it also creates a negative pressure inside the lower air guide box 501 and the filter box 505, which in turn creates a negative pressure inside the water suction component 2 and the fixing pipe 502. As a result, the air inlet on the upper surface of the fixing pipe 502 draws air from the bottom of the integrated optoelectronic device. At the same time, the first support plate 204 is connected to the lower air guide box 501 through the air guide pipe 201. As a result, a negative pressure is also created inside the first support plate 204, so the air inlet 2042 also draws air from the bottom of the integrated optoelectronic device. By blowing air from the top and sucking air from the bottom of the integrated optoelectronic device, the air flow between the top and bottom of the integrated optoelectronic device is changed, thereby accelerating the drying of the outer surface of the integrated optoelectronic device.

[0016] Furthermore, the conveying device includes a water-absorbing component 2 and a transmission component 6, which are connected by a chain 7; The transmission component 6 includes a mounting post 601 fixedly installed inside the housing 1. A second sprocket 602 is rotatably installed at the middle position of the mounting post 601. The second sprocket 602 is meshed with the chain 7. A second fixing rod 604 is fixedly installed on the outer wall of the second sprocket 602. A second support plate 603 is fixedly installed at the end of the mounting post 601. A rubber post 2041 is also fixedly installed on the upper surface of the second support plate 603. Rubber sleeves are respectively fitted on the outer walls of the first fixing rod 203 and the second fixing rod 604. An internal gear 605 is fixedly installed on the outer wall of the first second sprocket 602. A spur gear 606 is meshed with the internal part of the internal gear 605. The middle position of the spur gear 606 is connected to the motor output shaft. In practical applications, when it is necessary to move the integrated optoelectronic device, the motor is started. The motor output shaft drives the spur gear 606 to rotate, which in turn drives the internal gear 605 to rotate. The internal gear 605 drives the first second sprocket 602 to rotate. The second sprocket 602 drives the other second sprockets 602 and the first sprocket 202 to rotate via the chain 7. The second sprockets 602 and the first sprocket 202 drive the second fixed rod 604 and the first fixed rod 203 to rotate, respectively. When the second fixed rod 604 rotates from one side of the second support plate 603 to the other side, the integrated optoelectronic device moves forward one step towards the discharge end, thus realizing the movement of the integrated optoelectronic device. At the same time, the outer walls of the second fixed rod 604 and the first fixed rod 203 are respectively covered with rubber sleeves to prevent damage to the surface of the integrated optoelectronic device when in contact.

[0017] Furthermore, the spring telescopic rod 302 includes a guide cylinder 3021 fixed to the outer wall of the mounting plate 301. A guide rod 3023 is slidably provided at one end of the guide cylinder 3021. The guide rod 3023 is fixedly connected to the L-shaped sliding plate 303. A piston 3024 is fixedly provided at the end of the guide rod 3023. Multiple sets of through holes 3025 are evenly opened around the periphery of the piston 3024. A return spring 3022 is provided inside the guide cylinder 3021. Waterproof rubber is provided between the guide cylinder 3021 and the guide rod 3023. In practical applications, when the L-shaped slide plate 303 is squeezed, the L-shaped slide plate 303 will push the guide rod 3023 to move, and the guide rod 3023 will push the piston 3024 to move. The piston 3024 is provided with a through hole 3025 on its periphery. The through hole 3025 can maintain the pressure balance at both ends of the piston 3024, which facilitates the movement of the piston 3024. At the same time, it maintains the sealing of the inside of the guide cylinder 3021 to prevent water stains from entering and corroding the parts.

[0018] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A cleaning device for manufacturing integrated optoelectronic devices, characterized in that, The equipment includes a housing (1) for cleaning equipment, a conveying device is provided in the middle of the housing (1), a flipping assembly (3) for water washing integrated optoelectronic devices is installed inside the housing (1), a drying assembly (5) and a laser cleaning assembly (4) are installed at the outlet end of the housing (1), and a sound wave generator is installed on the housing (1) at the position corresponding to the flipping assembly (3). The flipping assembly (3) includes a mounting plate (301) fixedly connected to the outer shell (1) and two sets of sliders (304) slidably disposed with respect to the outer shell (1). A first clamping member (306) is rotatably disposed between the two sliders (304). A hydraulic telescopic rod (307) is respectively disposed on the outer wall of the two sliders (304). Two sets of spring telescopic rods (302) are fixedly disposed on the outer wall of the mounting plate (301). An L-shaped sliding plate (303) is fixedly disposed at the other end of the spring telescopic rod (302). A second clamping member (305) is slidably disposed on the outer wall of the L-shaped sliding plate (303) to cooperate with the first clamping member (306). The conveying device includes a water-absorbing component (2) and a transmission component (6), which are connected by a chain (7).

2. The cleaning equipment for manufacturing integrated optoelectronic devices according to claim 1, characterized in that, The first clamping member (306) includes a rotating body (3061), with limit posts (3063) fixedly installed at both ends of the rotating body (3061). The outer wall of the slider (304) is provided with a C-shaped groove for use with the limit posts (3063). A first limit rod (3062) is fixedly installed at both ends of one side of the rotating body (3061).

3. The cleaning equipment for manufacturing integrated optoelectronic devices according to claim 2, characterized in that, The second clamping member (305) includes a movable block (3051) that slides with the L-shaped slide plate (303). The end of the movable block (3051) extends beyond the L-shaped slide plate (303). Mounting seats (3053) are fixedly mounted at both ends of the movable block (3051). The distance between the two mounting seats (3053) is equal to the width of the L-shaped slide plate (303). Rollers (3055) are rotatably mounted at adjacent ends of the two mounting seats (3053). 54), the limit distance between the roller (3054) and the movable block (3051) is equal to the thickness of the L-shaped slide plate (303). A second limiting rod (3052) is fixedly provided on one side of the movable block (3051) to cooperate with the first limiting rod (3062). A limiting block (3055) is fixedly provided at the upper end of the movable block (3051). A limiting hole is opened on the outer wall of the rotating body (3061) to cooperate with the limiting block (3055).

4. The cleaning equipment for manufacturing integrated optoelectronic devices according to claim 1, characterized in that, The air-drying assembly (5) includes a filter box (505) installed on the outer wall of the outer shell (1). An air inlet pipe and an air outlet pipe are installed at the upper end of the filter box (505). An upper air guide box (503) is installed at the end of the air outlet pipe. An air blowing plate (504) is fixedly connected to the outer wall of the upper air guide box (503). A wind pump is installed in the middle of the air inlet pipe. A lower air guide box (501) is installed at the upper end of the air inlet pipe. The water-absorbing component (2) is evenly installed on the outer wall of the lower air guide box (501). Fixed pipes (502) are installed on both sides of the lower air guide box (501) on the water-absorbing component (2). Multiple sets of air inlets are opened on the upper surface of the fixed pipe (502).

5. The cleaning equipment for manufacturing integrated optoelectronic devices according to claim 1, characterized in that, The water-absorbing component (2) includes an air pipe (201) that penetrates the outer shell (1) and is fixedly connected to the lower air box (501). A first sprocket (202) is rotatably connected to the middle position of the air pipe (201). The first sprocket (202) is meshed with the chain (7). A first fixing rod (203) is fixedly installed on the outer wall of the first sprocket (202). A first support plate (204) is fixedly installed at the end of the air pipe (201). A plurality of air inlets (2042) are opened at the upper end of the first support plate (204). A plurality of rubber columns (2041) are fixedly installed at the upper end of the first support plate (204). Rubber columns (2041) are also fixedly installed on the upper surface of the fixing pipe (502).

6. The cleaning equipment for manufacturing integrated optoelectronic devices according to claim 1, characterized in that, The transmission component (6) includes a mounting post (601) fixedly installed inside the housing (1). A second sprocket (602) is rotatably installed at the middle position of the mounting post (601). The second sprocket (602) meshes with the chain (7). A second fixing rod (604) is fixedly installed on the outer wall of the second sprocket (602). A second support plate (603) is fixedly installed at the end of the mounting post (601). A rubber post (2041) is also fixedly installed on the upper surface of the second support plate (603). Rubber sleeves are respectively fitted on the outer walls of the first fixing rod (203) and the second fixing rod (604). An internal gear (605) is fixedly installed on the outer wall of the first second sprocket (602). A spur gear (606) is meshed with the inside of the internal gear (605). The middle position of the spur gear (606) is connected to the motor output shaft.

7. The cleaning equipment for manufacturing integrated optoelectronic devices according to claim 1, characterized in that, The spring telescopic rod (302) includes a guide cylinder (3021) fixed to the outer wall of the mounting plate (301). A guide rod (3023) is slidably provided at one end of the guide cylinder (3021). The guide rod (3023) is fixedly connected to the L-shaped sliding plate (303). A piston (3024) is fixedly provided at the end of the guide rod (3023). Multiple sets of through holes (3025) are evenly opened on the periphery of the piston (3024). A return spring (3022) is provided inside the guide cylinder (3021).

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