A precise drilling tool for CVD upper electrode plate
Patent Information
- Application Number
- CN202611156881.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-31
- Publication Date
- 2026-10-27
Smart Images
Figure CN122975433A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of drilling on CVD upper electrode plates, specifically a precision drilling fixture for CVD upper electrode plates. Background Technology
[0002] The CVD top electrode plate is a core component of semiconductor thin film deposition equipment. The plate is large in size and has numerous high-precision micropores distributed on its surface. These micropores are small in diameter and densely distributed, meaning that drilling precision and the cleanliness of the inner walls directly determine the uniformity of film deposition and the product yield in subsequent processes. Currently, the industry commonly uses traditional vertical drilling machines with simple positioning fixtures for drilling CVD top electrode plates, which presents significant challenges in chip removal and duct cleaning during the process.
[0003] Current processing methods often employ a cooling system where coolant is sprayed from above the drill bit. The coolant, relying on gravity, flows downwards, washing over the drill bit and the machined hole. Fine silicon-based and ceramic debris generated during drilling is easily carried away by the downward-flowing coolant, accumulating at the bottom of the hole and mixing with it to form a viscous paste. This paste easily clogs micropores, increasing cutting resistance and causing precision defects such as scratches on the inner wall of the hole, deviations in hole diameter, and out-of-tolerance hole perpendicularity. In severe cases, it can even lead to drill bit jamming or breakage. Furthermore, the debris accumulated inside the hole and on the surface of the substrate is difficult to clean quickly. After machining a small number of holes, the machine must be stopped and the electrode plate manually wiped clean, significantly reducing continuous processing efficiency.
[0004] Traditional tooling lacks a bottom-up reverse chip flushing structure, making it impossible to flush out residual debris from the bottom of the micro-holes. Relying solely on top spraying of coolant is insufficient to thoroughly remove debris deep within the channels. Furthermore, after the electrode plate is processed, a large amount of coolant mixed with debris remains on the plate surface. The debris adhering to the plate surface can easily cause scratches and increase the burden on subsequent cleaning processes, making it difficult to meet the production requirements for stable batch processing of electrode plates in high-precision CVD.
[0005] Therefore, there is an urgent need to design a precision drilling fixture for CVD upper electrode plates that can reverse chip removal during the drilling process, avoid micropore clogging, and ensure machining accuracy. Summary of the Invention
[0006] The purpose of this invention is to provide a precision drilling fixture for CVD upper electrode plates to solve the problems mentioned in the background art.
[0007] A precision drilling fixture for CVD upper electrode plates includes a storage box, on which multiple evenly distributed lifting slide rods are fixedly installed. A support plate is provided in the middle of the storage box, and a sealing ring is fixedly connected between the support plate and the storage box. A conveying pipe is fixedly installed on one side of the storage box. Multiple first support members are fixedly installed inside the storage box on the side near the conveying pipe, and multiple second support members are fixedly installed inside the storage box on the side away from the conveying pipe. Fixing components are detachably installed on the support plate. A lifting plate is provided above the storage box, and multiple lifting slide rods slide through the lifting plate. Multiple second springs corresponding to the lifting slide rods are fixedly connected between the lifting plate and the storage box. A rotating ring is rotatably installed in the middle of the lifting plate, and a protective component is slidably installed in the middle of the rotating ring. The protective component is fixedly connected to the spindle sleeve of an external drilling machine. A push rod is slidably installed on the lifting plate, and a first spring is fixedly connected between the push rod and the lifting plate.
[0008] Furthermore, the protective component includes a sliding bracket, a connecting housing fixedly installed on the upper end of the sliding bracket, a sealing sleeve fixedly installed on the upper end of the connecting housing, a clamp fixedly installed on the outside of the sealing sleeve, the clamp fixing and locking the sealing sleeve to the spindle sleeve of the external drilling machine, a sealing base plate provided below the sliding bracket, a rubber sleeve fixedly connected between the sealing base plate and the sliding bracket, two mutually symmetrical connecting rods connected on the sealing base plate through ball sockets, two fourth springs corresponding to the connecting rods fixedly connected between the sliding bracket and the sealing base plate, a buffer pad glued to the lower surface of the sealing base plate, and a coolant pipe fixedly installed on the rubber sleeve, the coolant pipe being in fluid communication with the inside of the rubber sleeve.
[0009] Furthermore, the fixing component includes a lower fixing plate, an upper fixing plate is provided above the lower fixing plate, the lower fixing plate has a second central groove in the middle, side handles are fixedly installed on both sides of the lower fixing plate, and multiple evenly distributed slots are opened on both sides of the side handles. Grip kits are slidably installed on both sides of the upper fixing plate corresponding to the side handles, and the grip kits are sleeved on the outside of the side handles. Multiple evenly distributed locking clips are fixedly installed on the outer ring of the lower fixing plate, and multiple locking kits that cooperate with the locking clips are fixedly installed on the bearing plate. Multiple evenly distributed overflow grooves are opened on the upper fixing plate.
[0010] Furthermore, both sides of the grip assembly are provided with sliders, which are slidably locked inside the upper fixed plate. On the side of the slider near the grip assembly, multiple evenly distributed locking blocks are fixedly installed. The lower end of the locking blocks is inclined, and the upper end of the locking blocks is horizontal. The shape of the locking slot is the same as that of the locking blocks. Two mutually symmetrical triangular blocks are fixedly installed on both ends of the grip assembly near the slider. On both sides of the slider and the triangular blocks, a matching rod is fixedly installed. The triangular blocks are located below the matching rods. A third spring is fixedly connected between the slider and the upper fixed plate.
[0011] Furthermore, the upper end of the conveying pipe is provided with a liquid inlet, and the lower end of the conveying pipe is provided with a liquid outlet. The liquid inlet is located above the sealing ring, and the liquid outlet is located below the sealing ring. A first check plate for sealing the liquid outlet is slidably installed at the bottom of the storage box, flush with the liquid outlet. Multiple evenly distributed check springs are fixedly installed between the first check plate and the storage box.
[0012] Furthermore, the bearing plate has a first central groove in the middle, and a filter disc component is fixedly installed inside the first central groove. The filter disc component includes an upper sleeve, and a filter sleeve is fixedly installed below the upper sleeve. A second anti-reverse plate is provided inside the filter sleeve, and a plurality of evenly distributed limiting slide rods are fixedly installed on the second anti-reverse plate. The limiting slide rods slide through the filter sleeve.
[0013] Furthermore, the first support member includes a first lifting sleeve, and the second support member includes a second lifting sleeve. A lifting rod is slidably mounted on the upper end of both the first and second lifting sleeves. A support spring is sleeved on the outside of both the first and second lifting sleeves. The two ends of the support spring are respectively fixedly installed on the storage box and the support plate. The first lifting sleeve is fixedly installed inside the storage box. The top end of the lifting rod is rotatably installed on the lower surface of the support plate. Multiple evenly distributed first pressure relief holes are opened on the first lifting sleeve corresponding to the first support member. Multiple evenly distributed first pressure relief holes are opened on the first lifting sleeve, and multiple evenly distributed second pressure relief holes are opened on the second lifting sleeve. The inner diameter of the second pressure relief hole is larger than the inner diameter of the first pressure relief hole.
[0014] Furthermore, multiple evenly distributed pressure relief components are fixedly installed on the outside of the storage box. Each pressure relief component includes a pressure relief housing. A piston is slidably mounted inside the pressure relief housing. A pressure relief spring is fixedly connected between the piston and the pressure relief housing. The pressure relief housing is in fluid communication with the inside of the storage box. An overflow pipe is fixedly installed on the lifting slide rod. The overflow pipe is in fluid communication with the inside of the storage box. The end of the overflow pipe away from the storage box is connected to an external pump body.
[0015] Furthermore, the rubber sleeve is arc-shaped, and the arc formed by the rubber sleeve is convex.
[0016] Compared with the prior art, the beneficial effects of the present invention are: 1. By setting up a bearing plate, a first support member and a second support member, this device can pass through the drill hole from below the electrode plate during drilling operations and flush away the debris remaining in the drill hole and on the surface of the electrode plate. This prevents the coolant from carrying debris from top to bottom during drilling and forming a paste that blocks the drill hole under the action of gravity, thus ensuring processing accuracy. 2. By incorporating protective components, this device isolates the drilling location from the external environment during drilling operations, preventing a large amount of coolant from flooding the drill bit and causing interference and splashing between the coolant and the drill bit. Furthermore, the rubber sleeve can prevent the splashing of drilling debris, thus providing good protection. 3. This device, by setting a fixing component, allows for quick release of the electrode plate simply by pulling the handle kit, eliminating the need for cumbersome disassembly operations. Furthermore, the fixing component can form an integral unit with the electrode plate, facilitating the transfer and installation of the electrode plate. 4. By setting a first support member and a second support member, and opening a first pressure relief hole and a second pressure relief hole with different diameters, the rebound rate of the first support member and the second support member is different, which causes the bearing plate to tilt the fixed component and the electrode plate. This can accelerate the return efficiency of the coolant on the electrode plate, improve the potential energy of the coolant during return, and better utilize the kinetic energy generated by the return of the coolant to remove debris from the surface of the electrode plate. 5. This device is equipped with a pressure relief component, which can eliminate the instantaneous kinetic energy brought about by the rapid descent of the support plate and convert it into a continuous positive pressure output, ensuring the stability of the coolant passing through the borehole from below and preventing the sealing position of the device from being damaged by impact. 6. By setting up a filter disc component and a conveying pipeline, this device can not only circulate the coolant inside the storage tank, but also recycle the coolant sprayed during drilling. After being filtered by the filter sleeve, it can also prevent debris from being carried back, reduce losses, and improve utilization. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the lifting plate in this invention; Figure 3 This is a schematic diagram of the protective component in this invention; Figure 4 This is a schematic diagram of the structure of the storage box and the support plate in this invention; Figure 5 This is a schematic diagram of the structure of the fixing component in this invention; Figure 6 This is a schematic diagram of the slider and triangular block in this invention; Figure 7 This is a schematic diagram of the connection structure between the slider and the slot in this invention; Figure 8 This is a cross-sectional view of the storage box in this invention; Figure 9 This is a schematic diagram of the filter disc component in this invention; Figure 10 This is a schematic diagram of the structure of the first support member and the second support member in this invention; Figure 11 This is a schematic diagram of the pressure relief component in this invention.
[0018] In the diagram: 1. Storage box; 2. Fixing component; 3. Lifting plate; 4. Protective component; 11. Lifting slide bar; 12. Bearing plate; 13. Conveying pipe; 14. Pressure relief component; 15. Filter plate component; 16. First support component; 17. Second support component; 21. Lower fixing plate; 22. Upper fixing plate; 31. Rotating ring; 32. Push rod; 33. First spring; 41. Sliding bracket; 42. Connecting housing; 43. Sealing base plate; 44. Rubber sleeve; 45. Coolant pipe; 101. First check plate; 102. Check spring; 111. Second spring; 121. Sealing ring; 122. Locking kit; 123. First central groove; 124. Overflow pipe; 131. Liquid inlet; 132. Liquid outlet. ; 141. Pressure relief housing; 142. Piston; 143. Pressure relief spring; 151. Upper sleeve; 152. Filter sleeve; 153. Second check plate; 154. Limiting slide rod; 161. First lifting sleeve; 162. Lifting rod; 163. Support spring; 164. First pressure relief hole; 165. Second pressure relief hole; 171. Second lifting sleeve; 211. Second center groove; 212. Side grip; 213. Slot; 214. Locking clip; 221. Grip kit; 222. Overflow groove; 223. Slider; 224. Locking block; 225. Triangular block; 226. Matching rod; 227. Third spring; 421. Sealing sleeve; 422. Clamp; 431. Connecting rod; 432. Fourth spring. Detailed Implementation
[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.
[0020] Please see Figure 1-11This invention provides a technical solution for a precision drilling fixture for CVD upper electrode plates: A precision drilling fixture for CVD upper electrode plates includes a storage box 1, on which multiple evenly distributed lifting slide rods 11 are fixedly installed. A support plate 12 is provided in the middle of the storage box 1, and a sealing ring 121 is fixedly connected between the support plate 12 and the storage box 1. A conveying pipe 13 is fixedly installed on one side of the storage box 1. Multiple first support members 16 are fixedly installed inside the storage box 1 on the side close to the conveying pipe 13, and multiple second support members 17 are fixedly installed inside the storage box 1 on the side away from the conveying pipe 13. The storage box 1 is equipped with a detachable fixed component 2. A lifting plate 3 is provided above the storage box 1. Multiple lifting slide rods 11 slide through the lifting plate 3. Multiple second springs 111 corresponding to the lifting slide rods 11 are fixedly connected between the lifting plate 3 and the storage box 1. A rotating ring 31 is rotatably installed in the middle of the lifting plate 3. A protective component 4 is slidably installed in the middle of the rotating ring 31. The protective component 4 is fixedly connected to the spindle sleeve of the external drilling machine. A push rod 32 is slidably installed on the lifting plate 3. A first spring 33 is fixedly connected between the push rod 32 and the lifting plate 3. Multiple evenly distributed pressure relief components 14 are fixedly installed on the outside of the storage box 1.
[0021] This device can directly upgrade existing drilling machines. In actual use, the original tooling is disassembled, and then the storage box 1 is fixedly installed on the drilling machine's base. The protective component 4 is fixedly connected to the spindle sleeve on the drilling machine's spindle box. At this time, the drill bit is located inside the protective component 4. Then, the fixing component 2 is removed from the support plate 12, and the upper electrode plate to be processed is placed inside the fixing component 2. After fixing the electrode plate with the fixing component 2, it is reinstalled on the support plate 12. At this time, the weight of the support plate 12, the electrode plate, and the fixing component 2 is supported by multiple first support members 16 and second support members 17.
[0022] When the spindle box of the external drilling machine rises and falls, it will drive the entire rotating ring 31 and the lifting plate 3 to rise and fall. During processing, the outermost ring is drilled first, then the machine moves inward by one unit and drills another ring of holes until the entire electrode plate is drilled. The rotating ring 31, in conjunction with the sliding of the protective component 4, can realize the drilling operation of the entire electrode plate.
[0023] When the spindle box and drill bit descend, the lifting plate 3 descends along the lifting slide rod 11, and the second spring 111 is compressed. Before the drill bit contacts the electrode plate, the bottom end of the push rod 32 contacts the support plate 12. As the spindle box continues to descend, the push rod 32 pushes the support plate 12 to overcome the thrust of the first support member 16 and the second support member 17, causing the support plate 12 to move downward until the first support member 16 and the second support member 17 are compressed to their limit. The support plate 12, the fixing component 2, and the electrode plate then move to their maximum position. When the spindle box continues to descend, the drill bit will contact the electrode plate to perform drilling. After drilling is completed, the spindle box will drive the drill bit to rise, and the drill bit will come out of the hole. At this time, under the elastic force of the first spring 33, the push rod 32 will still press the bearing plate 12 tightly to prevent the electrode plate from moving and damaging the drill bit when it comes out. As the spindle box continues to rise, the first spring 33 loses its elastic force on the push rod 32. Under the action of the second spring 111, the lifting plate 3 will be reset, and then the next drilling operation will be performed.
[0024] The storage tank 1 is filled with coolant. When the spindle box drives the support plate 12 to descend, the support plate 12 compresses the space inside the storage tank 1, allowing the coolant inside the storage tank 1 to flow through the drill hole to the top of the electrode plate, which has a flushing effect. The coolant moves from bottom to top, which can effectively remove the heat and debris generated by drilling. This prevents some fine debris from being mixed with the coolant and forming a paste when the coolant is sprayed from above during drilling, thus avoiding clogging the drill bit or affecting the machining accuracy. Furthermore, as the support plate 12 and the electrode plate continue to descend, the coolant inside the storage tank 1 will continue to flow into the top of the electrode plate. Since the top of the electrode plate is slightly curved, the coolant will carry debris and overflow from the electrode plate, eventually settling between the storage tank 1 and the sealing ring 121.
[0025] The pressure relief component 14 includes a pressure relief housing 141, a piston 142 is slidably mounted inside the pressure relief housing 141, a pressure relief spring 143 is fixedly connected between the piston 142 and the pressure relief housing 141, the pressure relief housing 141 is in fluid communication with the inside of the storage tank 1, an overflow pipe 124 is fixedly mounted on the lifting slide rod 11, the overflow pipe 124 is in fluid communication with the inside of the storage tank 1, and the end of the overflow pipe 124 away from the storage tank 1 is connected to an external pump body.
[0026] When drilling begins, before any holes are formed on the electrode plate, the spindle box lowers the bearing plate 12 and the electrode plate, which compresses the internal space of the storage tank 1. When positive pressure forms inside the storage tank 1, the coolant pushes multiple pistons 142 to move and compress the pressure relief spring 143, releasing the positive pressure. During drilling, coolant is sprayed from the drill bit position in real time. The sprayed coolant eventually flows into the storage tank 1 and the sealing ring 121 for storage, and finally flows back into the storage tank 1 through the delivery pipe 13, forming a closed loop. Because the coolant is sprayed from the drill bit position in real time, the total amount of coolant inside the storage tank 1 increases with each drilling operation, preventing the storage tank 1 from bursting. During each drilling operation, the external water pump is turned on to draw a portion of the coolant to maintain the liquid level balance in the system and ensure stable and reliable cooling and flushing effects for subsequent drilling operations. Furthermore, this device is equipped with a pressure relief component 14. When there are fewer holes drilled on the electrode plate, the support plate 12 descends, causing most of the positive pressure generated inside the storage tank 1 to be absorbed by the pressure relief spring 143. At the same time, the coolant inside the storage tank 1 will also flow through a few holes to the top of the electrode plate due to the positive pressure, preventing the sudden formation of excessive positive pressure that could damage the device's sealing structure or cause the coolant jet from the holes to splash onto external equipment due to excessive flow rate. The pressure relief spring 143 can stably output positive pressure, thereby providing a low-speed and stable flushing effect on the holes, resulting in higher cleaning efficiency and better stability.
[0027] The protective component 4 includes a sliding bracket 41, a connecting housing 42 fixedly installed on the upper end of the sliding bracket 41, a sealing sleeve 421 fixedly installed on the upper end of the connecting housing 42, a clamp 422 fixedly installed on the outside of the sealing sleeve 421, the clamp 422 fixing and locking the sealing sleeve 421 to the spindle sleeve of the external drilling machine, a sealing base plate 43 is provided below the sliding bracket 41, a rubber sleeve 44 is fixedly connected between the sealing base plate 43 and the sliding bracket 41, the rubber sleeve 44 is arc-shaped and the arc formed by the rubber sleeve 44 is convex, two mutually symmetrical connecting rods 431 are connected to the sealing base plate 43 through ball sockets, two fourth springs 432 corresponding to the connecting rods 431 are fixedly connected between the sliding bracket 41 and the sealing base plate 43, a buffer pad is glued to the lower surface of the sealing base plate 43, a coolant pipe 45 is fixedly installed on the rubber sleeve 44, and the coolant pipe 45 is in fluid communication with the inside of the rubber sleeve 44.
[0028] When the spindle box descends, the entire clamp 422 descends. This descent of the clamp 422 causes the sealing sleeve 421, connecting housing 42, and sliding bracket 41 to descend as a whole. As the sliding bracket 41 descends, it drives the sealing base plate 43 to descend via the fourth spring 432 until the sealing base plate 43 is in contact with the surface of the electrode plate. At this point, the drill bit is in contact with the surface of the electrode plate. As the spindle box continues to press down, the drill bit will drill a hole in the surface of the electrode plate. Meanwhile, under the continuous downward pressure of the spindle sleeve and spindle box, the sliding bracket 41 will compress the rubber sleeve 44. The rubber sleeve 44 is convex and can deform outwards during compression, preventing the rubber sleeve 44 from deforming. The inward deformation is interfered with by the high-speed rotating drill bit. At the same time, the reaction force generated by its elastic deformation presses the sealing base plate 43 tightly against the surface of the electrode plate. Combined with the elastic force of the fourth spring 432, a reliable sealing environment can be formed to prevent coolant from interfering with the drill bit and causing coolant splashing when the electrode plate and the support plate 12 are pressed down. The coolant pipe 45 is connected to an external coolant pump to spray coolant onto the drill bit. The coolant will be blocked inside the rubber sleeve 44 before the drilling is completed. The ball socket connection between the connecting rod 431 and the sealing base plate 43 can make the sealing base plate 43 fit well against the surface of the electrode plate, ensuring the tightness of the seal.
[0029] After a drilling operation is completed, the spindle box drives the sliding bracket 41 and the sealing base plate 43 to reset. The rubber sleeve 44 returns to its original state and releases the pressure on the sealing base plate 43. Under the elastic force of the rubber sleeve 44 and the fourth spring 432, the sealing base plate 43 separates from the electrode plate surface, making it easier to perform the next drilling operation. This achieves a continuous and efficient automated processing flow. The coolant will flow out from the rubber sleeve 44, and the drilled hole will also be cleaned from bottom to top by the positive pressure coolant inside the storage tank 1, preventing the coolant above from carrying debris and forming a paste that blocks the hole.
[0030] It should be noted that during drilling operations, the spindle box, spindle sleeve, and drill bit may rotate to some extent when changing the drilling position. At this time, the sealing sleeve 421 will slide with the spindle sleeve to eliminate the stress caused by the rotation. In addition, the spindle sleeve will not rotate actively in the drilling machine, but the connection between the drill bit and the spindle inside the spindle box is driven to rotate.
[0031] The fixing component 2 includes a lower fixing plate 21, an upper fixing plate 22 above the lower fixing plate 21, a second central groove 211 in the middle of the lower fixing plate 21, side grips 212 fixedly installed on both sides of the lower fixing plate 21, and multiple evenly distributed slots 213 on both sides of the side grips 212. Grip kits 221 are slidably installed on both sides of the upper fixing plate 22 corresponding to the side grips 212. The grip kits 221 are sleeved on the outside of the side grips 212. Multiple evenly distributed locking clips 214 are fixedly installed on the outer ring of the lower fixing plate 21. Multiple locking kits 122 that cooperate with the locking clips 214 are fixedly installed on the bearing plate 12. Multiple evenly distributed overflow grooves 222 are opened on the upper fixing plate 22.
[0032] Both sides of the grip assembly 221 are provided with sliders 223. The sliders 223 are slidably locked inside the upper fixed plate 22. On the side of the slider 223 near the grip assembly 221, a number of evenly distributed locking blocks 224 are fixedly installed. The lower end of the locking block 224 is inclined and the upper end of the locking block 224 is horizontal. The shape of the slot 213 is the same as that of the locking block 224. Two mutually symmetrical triangular blocks 225 are fixedly installed on both ends of the grip assembly 221 near the slider 223. On the sides of the slider 223 and the triangular blocks 225 respectively, a mating rod 226 is fixedly installed. The triangular blocks 225 are located below the mating rod 226. A third spring 227 is fixedly connected between the slider 223 and the upper fixed plate 22.
[0033] Please see Figure 5 and Figure 6 When installing the electrode plate, first pull the handle assembly 221 upwards. At this time, the side handle 212 will lose its restraint on the upper fixing plate 22, and the handle assembly 221 and the upper fixing plate 22 can be directly lifted off the side handle 212. Then, place the electrode plate in the second center groove 211 of the lower fixing plate 21, with the center groove of the electrode plate aligned with the second center groove 211. The electrode plate is supported by the lower fixing plate 21. Then, put the upper fixing plate 22 back in its original position. At this time, the locking block 224 will move to both sides and compress the first electrode plate under the pushing action of the locking groove 213. The three springs 227 are in place until the upper fixed plate 22 descends to its maximum position. At this time, the slider 223 is reset under the elastic force of the third spring 227, which drives the locking block 224 to re-enter the slot 213, thereby firmly locking the upper fixed plate 22 onto the lower fixed plate 21. After the electrode plate is installed, hold the side handle 212 and lift the entire fixing component 2 and the electrode plate together and place them on the support plate 12. Then rotate the fixing component 2 so that the locking clip 214 slides into the locking kit 122, completing the quick clamping and fixing of the electrode plate.
[0034] When the electrode plate needs to be removed, simply pull the handle assembly 221 upwards. The handle assembly 221 will then lift the triangular block 225. Due to the gravity of the electrode plate and the gravity of the upper and lower fixed plates 22 and 21, the slider 223 has the potential energy to maintain its original position. When the triangular block 225 rises, it will push the slider 223 to move away from the side handle 212, thereby causing the locking block 224 to lose its engagement with the slot 213. Then, the upper fixed plate 22 can be easily removed along with the electrode plate, enabling quick disassembly and replacement of the workpiece.
[0035] The first support member 16 includes a first lifting sleeve 161, and the second support member 17 includes a second lifting sleeve 171. A lifting rod 162 is slidably mounted on the upper end of both the first and second lifting sleeves 161 and 171. A support spring 163 is sleeved on the outside of both the first and second lifting sleeves 161. The two ends of the support spring 163 are respectively fixedly installed on the storage box 1 and the support plate 12. The first lifting sleeve 161 is fixedly installed inside the storage box 1. The top end of the lifting rod 162 is rotatably mounted on the lower surface of the support plate 12. The first lifting sleeve 161 corresponding to the first support member 16 has multiple evenly distributed first pressure relief holes 164, and the second lifting sleeve 171 has multiple evenly distributed second pressure relief holes 165. The inner diameter of the second pressure relief hole 165 is larger than the inner diameter of the first pressure relief hole 164.
[0036] When the support plate 12 is driven to descend, the lifting rod 162 moves downward accordingly and slides into the corresponding first lifting sleeve 161 and second lifting sleeve 171. At this time, the coolant inside the first lifting sleeve 161 and second lifting sleeve 171 is compressed and discharged into the storage tank 1 through the first pressure relief hole 164 and the second pressure relief hole 165, respectively. After one drilling is completed, the support plate 12 loses downward pressure. At this time, under the action of the support spring 163, the lifting rod 162 returns to its original position, drawing the external coolant back into the first lifting sleeve 161 and second lifting sleeve 171. However, because the inner diameter of the first pressure relief hole 164 is smaller than that of the second pressure relief hole 165, The coolant reflux speed inside the first lifting sleeve 161 is less than that inside the second lifting sleeve 171, which leads to a difference in the reset speed of the corresponding lifting rod 162. This causes the reset speed of the side of the bearing plate 12 closer to the conveying pipe 13 to be less than that of the side closer to the second support member 17. The bearing plate 12 tilts, allowing the coolant above the sealing ring 121 to flow into the conveying pipe 13 for collection along the tilt direction. Setting the tilted reflux allows the electrode plate surface to have a larger slope, giving the coolant higher flow potential energy, thus better carrying away debris from the electrode plate surface, improving reflux efficiency, and preventing debris accumulation from affecting processing accuracy and the service life of the electrode plate.
[0037] The upper end of the conveying pipe 13 is provided with an inlet 131 and the lower end of the conveying pipe 13 is provided with an outlet 132. The inlet 131 is located above the sealing ring 121 and the outlet 132 is located below the sealing ring 121. The bottom of the storage tank 1 is flush with the outlet 132 and a first check plate 101 for sealing the outlet 132 is slidably installed. Multiple evenly distributed check springs 102 are fixedly installed between the first check plate 101 and the storage tank 1. The middle part of the bearing plate 12 has a first central groove 123. A filter disc component 15 is fixedly installed inside the first central groove 123. The filter disc component 15 includes an upper sleeve 151. A filter sleeve 152 is fixedly installed below the upper sleeve 151. A second check plate 153 is provided inside the filter sleeve 152. Multiple evenly distributed limiting slide rods 154 are fixedly installed on the second check plate 153. The limiting slide rods 154 slide through the filter sleeve 152.
[0038] Please see Figure 8 and Figure 9 When the support plate 12 is pressed down, positive pressure is generated inside the storage box 1. Under the action of positive pressure, the second check plate 153 is pushed upward and moves from the inside of the filter sleeve 152 to the inside of the upper sleeve 151. At this time, the filter sleeve 152 is in an open state. The positive pressure can push the coolant through the filter sleeve 152 and then through the first central groove 123 and finally through the small hole on the electrode plate to flow to the outside of the storage box 1, thereby realizing the flushing and chip removal of the processing area.
[0039] Synchronously, when positive pressure is generated inside the storage tank 1, the first check plate 101 is pushed tightly against the outside of the outlet 132 under the action of the check spring 102 and the positive pressure, thereby preventing coolant leakage from the outlet 132 and ensuring that the coolant is discharged through the small holes of the electrode plate. When the support plate 12 rises, the pressure inside the storage tank 1 decreases and turns into negative pressure. Under the action of negative pressure, the second check plate 153 descends and seals the filter holes on the filter sleeve 152, preventing liquid from flowing back from the small holes of the electrode plate. At the same time, the first check plate 101 compresses the check spring 102 under the action of negative pressure. At this time, the outlet 132 opens, and the liquid enters the delivery pipe 13 from the inlet 131 under the action of negative pressure, and finally flows back to the inside of the storage tank 1 from the outlet 132, realizing the recycling and reuse of coolant. In addition, the filter sleeve 152 can also filter debris, preventing debris from entering the inside of the storage tank 1 and causing blockage or wear.
[0040] The above description is merely a preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and its improved concepts, should be covered within the scope of protection of the present invention.
Claims
1. A precision drilling fixture for CVD upper electrode plates, comprising a storage box (1), characterized in that: The storage box (1) is provided with multiple evenly arranged lifting slide rods (11), and a bearing plate (12) is assembled in the middle of the storage box (1). The bearing plate (12) and the storage box (1) are sealed together by a sealing ring (121). A conveying pipe (13) is provided on one side of the storage box (1). Several first support members (16) are arranged on the side of the inner cavity of the box close to the conveying pipe (13), and several second support members (17) are arranged on the side away from the conveying pipe (13). A fixing component (2) is detachably assembled on the bearing plate (12). A lifting plate (3) is provided above the storage box (1), and all the lifting slide rods (11) slide through the lifting plate (3). Multiple sets of second springs (111) are matched between the lifting plate (3) and the storage box (1). A rotating ring (31) is rotatably mounted at the center of the lifting plate (3). A protective component (4) is slidably mounted inside the rotating ring (31). The protective component (4) is connected to the spindle sleeve of the drilling machine. A push rod (32) is slidably mounted on the lifting plate (3). A first spring (33) is connected between the push rod (32) and the lifting plate (3).
2. The precision drilling fixture for CVD upper electrode plates according to claim 1, characterized in that: The protective component (4) includes a sliding bracket (41), the upper end of which is fixedly connected to a housing (42), and a sealing sleeve (421) is provided at the top of the housing (42). A clamp (422) is fitted on the outside of the sealing sleeve (421) to lock it with the spindle sleeve of the drilling machine. A sealing base plate (43) is arranged below the sliding bracket (41), and the two are connected by an outwardly convex arc-shaped rubber sleeve (44). Two connecting rods (431) are symmetrically assembled on the sealing base plate (43) through a ball socket structure. Two sets of fourth springs (432) are fitted between the sliding bracket (41) and the sealing base plate (43). A buffer pad is pasted on the lower surface of the sealing base plate (43), and the rubber sleeve (44) is connected to the coolant pipe (45) to achieve fluid supply.
3. The precision drilling fixture for CVD upper electrode plates according to claim 1, characterized in that: The fixing component (2) is composed of a lower fixing plate (21) and an upper fixing plate (22); the lower fixing plate (21) has a second central groove (211) in the center, and side grips (212) are symmetrically arranged on both sides. Multiple sets of slots (213) are opened on the outer wall of the side grips (212); the upper fixing plate (22) slides and fits the grip kit (221) at the position corresponding to the side grips (212); the lower fixing plate (21) has locking clips (214) evenly arranged on the outer ring, and the carrier plate (12) is equipped with locking kits (122) to achieve snap-fit positioning; the upper fixing plate (22) has several overflow grooves (222) on its surface.
4. The precision drilling fixture for CVD upper electrode plates according to claim 3, characterized in that: The grip assembly (221) has sliding blocks (223) on both sides. Multiple locking blocks (224) are fixed inside the slider (223). The upper and lower ends of the locking blocks (224) are horizontal and inclined, respectively, and match the shape of the locking slot (213). Triangular blocks (225) are symmetrically arranged at both ends of the grip assembly (221). A matching rod (226) is fixed at the corresponding position of the slider (223). The triangular blocks (225) are placed below the matching rod (226). A third spring (227) is assembled between the slider (223) and the upper fixing plate (22).
5. The precision drilling fixture for CVD upper electrode plates according to claim 1, characterized in that: The upper and lower ends of the conveying pipe (13) are respectively provided with an inlet (131) and an outlet (132). The inlet (131) is located above the sealing ring (121), and the outlet (132) is located below the sealing ring (121). The bottom of the inner cavity of the storage box (1) is slidably fitted with a first anti-reverse plate (101) corresponding to the position of the outlet (132). Multiple anti-reverse springs (102) are arranged between the first anti-reverse plate (101) and the inner wall of the storage box (1).
6. The precision drilling fixture for CVD upper electrode plates according to claim 1, characterized in that: The bearing plate (12) has a first central groove (123) in the center, and a filter disc component (15) is fixedly installed in the groove. The filter disc component (15) includes an upper sleeve (151) and a filter sleeve (152). A second anti-reverse plate (153) is movably arranged inside the filter sleeve (152). The second anti-reverse plate (153) is connected to multiple limiting slide rods (154), and the limiting slide rods (154) slide through the filter sleeve (152).
7. The precision drilling fixture for CVD upper electrode plates according to claim 1, characterized in that: The first support member (16) and the second support member (17) adopt the structure of the first lifting sleeve (161) and the second lifting sleeve (171) respectively. The upper end of both sleeves is slidably equipped with lifting rods (162), and the outer side of the sleeve is fitted with support springs (163). The two ends of the support springs (163) abut against the storage box (1) and the bearing plate (12) respectively. The top end of the lifting rod (162) is rotatably connected to the bottom surface of the bearing plate (12). The first lifting sleeve (161) has several first pressure relief holes (164) on its cylinder wall, and the second lifting sleeve (171) has several second pressure relief holes (165) on its cylinder wall. The diameter of the second pressure relief hole (165) is larger than the diameter of the first pressure relief hole (164).
8. The precision drilling fixture for CVD upper electrode plates according to claim 1, characterized in that: The outer wall of the storage box (1) is uniformly equipped with multiple pressure relief components (14). Each pressure relief component (14) includes a pressure relief shell (141). A piston (142) is slidably mounted inside the pressure relief shell (141). A pressure relief spring (143) is connected between the piston (142) and the pressure relief shell (141). The inner cavity of the pressure relief shell (141) is in fluid communication with the inside of the storage box (1). An overflow pipe (124) is connected to the lifting slide rod (11). One end of the overflow pipe (124) is connected to the storage box (1), and the other end is connected to a fluid pump body.
9. The precision drilling fixture for CVD upper electrode plates according to claim 2, characterized in that: The rubber sleeve (44) has an overall convex arc-shaped structure.