Diamond dressing disc

Abstract

A diamond dressing disc is disclosed. The diamond dressing disc includes a substrate and a plurality of diamond pieces. The diamond pieces are fixed on the substrate, and each of the diamond pieces includes a base and a plurality of diamond towers extending upwardly from the base. Each of the diamond towers has a multi-layer body structure including at least a top platform, a middle platform, and a bottom surface, and a first side surface is formed between the top platform and the middle platform, and a second side surface is formed between the middle platform and the bottom surface. In some embodiments, the heights of all the diamond tower tips on the same diamond piece are substantially uniform, and the height difference is preferably controlled within plus or minus 5 microns to provide a uniform polishing pad dressing effect. When the top platform is worn out, the diamond towers can be exposed to the next layer of platform by flattening processing for subsequent continuous dressing, thereby prolonging the service life of the diamond dressing disc and reducing the use cost.

Description

Technical Field

[0001] This invention relates to a diamond dressing disk, and more particularly to a diamond dressing disk with a multi-layer main structure array as the grinding structure. Background Technology

[0002] Chemical mechanical polishing (CMP) is a common polishing method in various industries. CMP processes can be used to polish the surfaces of various materials, including ceramics, silicon, glass, quartz, and metal chips. Furthermore, with the rapid development of integrated circuits (ICs), CMP is a common wafer (wafer) planarization technology in semiconductor processes because it can achieve large-area planarization. As the linewidth of circuits shrinks according to Moore's Law, the requirements for CMP become increasingly stringent, and the number of passes required increases.

[0003] In the CMP (Chemical Mechanical Polishing) process for semiconductors, a polishing pad is used to contact the wafer (or other semiconductor components), and polishing slurry is used as needed. The polishing pad removes impurities or uneven structures from the wafer surface through chemical reactions and physical mechanical forces. For example, a wafer freshly diced from an ingot must be polished on a polishing pad due to its rough surface; a wafer that has just completed one layer of circuitry also needs polishing to planarize the dielectric or conductive layers deposited on it, paving the way for the next layer. Polishing slurry, containing chemicals and abrasive particles, is dripped onto the polishing pad and flows continuously, gradually planarizing the rough wafer surface as CMP progresses.

[0004] After a period of use, the grinding effect and efficiency will decrease due to the accumulation of grinding debris (such as material removed from the wafer and grinding particles in the grinding fluid) on the surface of the grinding pad. At this time, a diamond dressing disc (or pad conditioner) can be pressed onto the surface of the grinding pad and rotated to dress the surface of the grinding pad, so that it has the ability to cut and remove the grinding debris, remove the microparticles remaining on it, and make it asperity again, and maintain it in the best grinding state.

[0005] The basic structure of a diamond dressing disc consists of multiple diamond abrasive grains fixed to the mating surface of a disc-shaped or ring-shaped metal substrate. Structurally, traditional diamond dressing discs use a metal substrate as the main body, and utilize electroplated, sintered, or hard-bonded metal binder layers to fix the diamonds. The distribution of the diamond apex height on the diamond dressing disc controls the depth distribution of the diamond penetration into the abrasive pad, affecting various CMP performance characteristics, thus making it a key consumable for controlling CMP performance. Due to the varying sizes and significant differences in apex heights of the diamond abrasive grains, coupled with their irregular shapes and often fractured surfaces, the sharpness of the cutting on the abrasive pad is difficult to control, resulting in uneven size and distribution of fibers on the abrasive pad, which easily affects the efficiency and yield of CMP.

[0006] In addition, the bonding strength between the diamond abrasive grains and the base on its base is also a factor to be considered, because the two are made of different materials. If the bonding strength is insufficient, the diamond abrasive grains may peel off and scratch the wafer during the grinding process.

[0007] As mentioned above, the distribution of the diamond abrasive grain apex height on the diamond dressing disc, as well as the bonding strength between the diamond abrasive grain and its base, affects the dressing effect of the grinding pad and has a crucial impact on the efficiency and yield of CMP. Summary of the Invention

[0008] One of the main objectives of this invention is to provide a diamond dressing disc that can solve the problems mentioned in the prior art.

[0009] This invention provides a diamond dressing disc, comprising a substrate and a plurality of diamond sheets. The diamond sheets are fixed to the substrate. Each diamond sheet includes a base and a plurality of diamond towers, with the diamond towers extending upward from the base. Each diamond tower has a multi-layered main structure. The multi-layered main structure includes at least a top platform, a middle platform, a bottom surface, a first side surface between the top platform and the middle platform, and a second side surface between the middle platform and the bottom surface.

[0010] In some embodiments, the diamond towers are arranged in a multi-tower combination, and in the multi-tower combination, multiple diamond towers share a base.

[0011] In some embodiments, the diamond towers are arranged in a single-tower assembly, and in the single-tower assembly, each diamond tower is independently set on the base.

[0012] In some embodiments, the angle between the first side and the opposite first side is between 60 degrees and 120 degrees.

[0013] In some embodiments, the width of the top platform is between 0.03 mm and 0.1 mm.

[0014] In some embodiments, the total height of the diamond tower is between 0.5 mm and 3 mm.

[0015] In some embodiments, the apex height of all diamond towers on the same diamond sheet is substantially the same.

[0016] In some embodiments, the difference in apex height among all diamond towers on the same diamond sheet is within ± 5 µm.

[0017] In some embodiments, the diamond tower is integrally formed with the diamond sheet by laser processing (e.g., laser engraving).

[0018] In some embodiments, the diamond sheet is a single-crystal diamond sheet or a polycrystalline diamond sheet, and the diamond sheet is formed by chemical vapor deposition or high temperature and high pressure method.

[0019] In some embodiments, the diamond sheet is round, square, or rectangular.

[0020] In some embodiments, the diamond towers are arranged in a periodic or quasi-periodic pattern on the diamond sheet.

[0021] In some embodiments, the arrangement pattern includes a radial arrangement, a spiral arrangement, a rectangular arrangement, or a honeycomb arrangement.

[0022] In some embodiments, the diamond sheets are equidistantly arranged along the circumference of the substrate, or are arranged in a spiral.

[0023] In some embodiments, diamond dressing discs are used in chemical mechanical polishing processes.

[0024] In some embodiments, the top platform, the middle platform, and the bottom surface are substantially parallel to each other.

[0025] In some embodiments, the width of the top platform is smaller than the width of the middle platform, and the width of the middle platform is smaller than the width of the bottom surface.

[0026] In some embodiments, the main body of the diamond tower gradually converges from the bottom towards the top platform.

[0027] In some embodiments, the first side is the periphery connecting the top platform and the periphery of the middle platform.

[0028] In some embodiments, the second side is the periphery connecting the intermediate platform and the periphery of the bottom surface.

[0029] In some embodiments, the top platform and the middle platform are located at different heights.

[0030] In some embodiments, the top platform, the middle platform, and the center of the bottom surface are coaxially arranged in a top view.

[0031] In some embodiments, the bottom surface is the upper surface of the base.

[0032] In some embodiments, the multi-layer main structure is a two-layer main structure, a three-layer main structure, or a more multi-layer main structure.

[0033] This invention provides a diamond dressing disc, comprising a substrate and a plurality of diamond sheets. The diamond sheets are fixed to the substrate. Each diamond sheet includes a base and a plurality of diamond towers, with the diamond towers extending upward from the base. Each diamond tower has a multi-layered main structure. The multi-layered main structure is configured to provide uniform roughness regeneration to the grinding pad. Spaces for discharging grinding debris are formed between the diamond towers.

[0034] This invention provides a diamond dressing disc for dressing chemical mechanical polishing (CMP) pads, comprising a substrate and multiple diamond sheets. The diamond sheets are fixed to the substrate. Each diamond sheet includes a base and multiple diamond towers, with the diamond towers extending upwards from the base. Each diamond tower has a multi-layered main structure. The multi-layered main structure includes a top platform and at least one intermediate platform. When the top platform wears down, the diamond sheet can be leveled to expose the intermediate platforms for subsequent dressing. The apex height of all diamond towers on the same diamond sheet is consistent to provide a uniform dressing effect on the polishing pad. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the specific embodiments of the present invention or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. The drawings described below are only some specific embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0036] Figure 1 This is a top view of the diamond dressing disc according to an embodiment of the present invention;

[0037] Figure 2 yes Figure 1 Side view of the diamond dressing disc along the tangent direction of AA;

[0038] Figure 3 This is a top view of a diamond sheet according to an embodiment of the present invention;

[0039] Figure 4 This is a top view of a diamond sheet according to another embodiment of the present invention;

[0040] Figure 5 yes Figure 3 or Figure 4 A magnified top view within the dashed box;

[0041] Figure 6yes Figure 3 or Figure 4 A magnified side view along the tangent of line BB;

[0042] Figure 7 yes Figure 6 A partially enlarged side view of half of the (hypothetical single tower);

[0043] Figure 8 This is a top view of a diamond sheet according to an embodiment of the present invention;

[0044] Figure 9 This is a top view of a diamond sheet according to another embodiment of the present invention;

[0045] Figure 10 yes Figure 8 or Figure 9 A magnified top view within the dashed box;

[0046] Figure 11 yes Figure 8 or Figure 9 A partially enlarged side view along the CC tangent direction;

[0047] Figure 12 yes Figure 11 A partially enlarged side view of half of the (hypothetical single tower);

[0048] Figure 13 This is a top view of a diamond sheet according to an embodiment of the present invention;

[0049] Figure 14 This is a top view of a diamond sheet according to another embodiment of the present invention;

[0050] Figure 15 yes Figure 13 or Figure 14 A magnified top view within the dashed box;

[0051] Figure 16 yes Figure 13 or Figure 14 A partially enlarged side view along the tangent direction of DD;

[0052] Figure 17 yes Figure 16 A partially enlarged side view of half of the (hypothetical single tower);

[0053] Figure 18 This is a top view of a diamond sheet according to an embodiment of the present invention;

[0054] Figure 19 This is a top view of a diamond sheet according to another embodiment of the present invention;

[0055] Figure 20 yes Figure 18 or Figure 19A magnified top view within the dashed box;

[0056] Figure 21 yes Figure 18 or Figure 19 A partially enlarged side view along the tangent direction of EE;

[0057] Figure 22 This is a top view of a diamond sheet according to an embodiment of the present invention;

[0058] Figure 23 This is a top view of a diamond sheet according to another embodiment of the present invention;

[0059] Figure 24 yes Figure 22 or Figure 23 A magnified top view within the dashed box;

[0060] Figure 25 yes Figure 22 or Figure 23 A magnified side view along the FF tangent direction. Detailed Implementation

[0061] To make the features and advantages of the embodiments of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following description contains specific information related to exemplary embodiments of the present invention. The accompanying drawings and detailed descriptions in the embodiments of the present invention are merely exemplary embodiments. However, the embodiments of the present invention are not limited to these exemplary embodiments. Other variations and embodiments of the present invention will be apparent to those skilled in the art. Unless otherwise stated, the same or corresponding components in the drawings may be indicated by the same or corresponding reference numerals. Furthermore, the drawings and illustrations in the embodiments of the present invention are generally not drawn to scale and are not intended to correspond to actual relative dimensions.

[0062] For the purposes of consistency and ease of understanding, the same features are indicated by reference numerals in the exemplary drawings (although this is not the case in some examples). However, features in different embodiments may differ in other respects, and therefore should not be narrowly limited to the features shown in the drawings.

[0063] The terms "first," "second," and "third," etc., used in the specification and accompanying drawings of the embodiments of this invention are used to distinguish different objects, regions, levels, or steps, and are not used to describe a specific order (unless expressly required by the claims). Furthermore, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.

[0064] The terms "connection" or "coupling" used in the embodiments of this invention do not imply that there can be no spaced objects between the objects. That is, the connection or coupling between two objects can mean that the two objects are directly connected / coupled to each other, or that they are connected / coupled to each other through other objects.

[0065] In all descriptions related to specific numerical values ​​in the embodiments of this invention, although not directly described, they all contain the meaning of "approximately," that is, these specific numerical values ​​will cover the possible numerical error range, used to indicate possible unintended effects and deviations in process or material selection. The numerical error range may include numerical changes that do not significantly change the material structure, properties, or effects, for example, a range of 0% to 10% deviation, which is clear to those skilled in the art.

[0066] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0067] This invention relates to a diamond dressing disk, particularly a diamond dressing disk employing a multi-cone, multi-layer main structure array as its grinding structure, which is used in chemical mechanical polishing processes as a pad conditioner or a diamond dressing disk. The diamond dressing disk of this invention, through its multi-cone, multi-layer main structure design, provides excellent dressing effects for the polishing pad and helps extend the pad's service life.

[0068] In chemical mechanical polishing (CMP) processes, the design of diamond dressing discs places certain requirements on the shape and arrangement of the polishing structure to ensure that the flatness and uniformity of the polishing pad can be maintained during the polishing process.

[0069] Regarding the shape of the grinding structure, the requirements include: (1) Sharpness: The grinding structure must have appropriate sharpness to effectively remove abrasive material from the surface of the grinding pad and maintain the flatness and surface roughness of the grinding pad; (2) Uniformity: The shape of the grinding structure should be kept uniform in order to avoid uneven roughness distribution on the surface of the grinding pad due to shape differences.

[0070] Regarding the arrangement of the grinding structures, the requirements include: (1) uniform distribution: the grinding structures should be evenly distributed on the diamond sheet to ensure that the grinding pad obtains a uniform dressing effect and avoid local over-dressing or under-dressing; (2) spacing control: the spacing between adjacent grinding structures should be appropriately controlled to ensure the dressing effect and avoid mutual interference between grinding structures; (3) height consistency: the height of the apex of each grinding structure should be kept consistent so that the leveling difference of the diamond tip is controlled within a small range.

[0071] The diamond dressing disc of this invention includes a base for each diamond sheet and multiple diamond towers extending upward from the base, with each diamond tower having a multi-layered main structure. In a preferred embodiment of the invention, the multiple diamond towers are arranged in a multi-tower combination, that is, multiple diamond towers share a base. This multi-tower combination structure allows for a larger bonding area between the diamond towers and the base, thereby improving the bonding strength between the diamond towers and the base and effectively reducing the risk of the diamond towers peeling off during the grinding process. Specific forms of multi-tower combinations include, but are not limited to, combinations of two towers, three towers, four towers, or more towers; the invention does not limit the number of tower combinations. In another embodiment, each diamond tower can also be independently arranged on the base, forming a single conical tower structure to configure a higher density of contact points per unit area. Regardless of whether a multi-tower combination structure or a single conical tower structure is used, each diamond tower has a multi-layered main structure, allowing the diamond sheet to be recycled and reused after the first layer is worn away.

[0072] The diamond tower of this invention adopts a multi-layer main structure design, unlike the existing technology which only uses a single-layer cone design. The multi-layer main structure refers to the diamond tower's main body having multiple platforms at different heights, connected by side connections. In a preferred embodiment of this invention, the multi-layer main structure can be a double-layer, triple-layer, or more-layer main structure. A double-layer main structure has a top platform and intermediate platforms; a triple-layer main structure has a top platform, a first intermediate platform, and a second intermediate platform; and so on for multi-layer main structures, each having a top platform and multiple intermediate platforms. When the uppermost platform wears down due to long-term use, the diamond sheets can be recycled and leveled before being processed to the next platform, allowing for continued use. The more layers, the more times the diamond sheets can be recycled and reused, extending their service life. However, increasing the number of layers also increases process complexity; therefore, the number of layers should be appropriately selected based on actual application needs, process capabilities, and cost considerations.

[0073] In this embodiment of the invention, "recycling diamond sheets" refers to the overall recycling of the diamond dressing disc mounted on the substrate and the leveling of the diamond tower, and does not mean removing the diamond sheets from the substrate and then processing them.

[0074] The following embodiments will be described in detail using a double-layer main structure as an example, but the present invention is not limited to a double-layer main structure, and a main structure with three or more layers is also within the scope of the present invention.

[0075] Figure 1 This is a top view of the diamond dressing disc according to an embodiment of the present invention. Figure 2 yes Figure 1 Side view of the diamond dressing disc along the AA tangent. (See also...) Figure 1 and Figure 2 The diamond dressing disc 100 of this embodiment includes a substrate 110, a plurality of diamond sheets 120, and a plurality of supports 130. The diamond sheets 120 are generated by chemical vapor deposition (CVD) or other high-temperature, high-pressure methods, but the present invention is not limited thereto; the diamond sheets 120 can also be generated by other suitable processes. The diamond sheets 120 can be single-crystal diamond sheets, polycrystalline diamond sheets, or a combination of both. The substrate 110 can be a stainless steel disc, or any material suitable for attaching, fixing, or bonding the diamond sheets, such as other metallic or ceramic materials, but the present invention is not limited thereto.

[0076] In this embodiment, the diamond sheet 120 is attached and fixed to the substrate 110 using a support 130. However, in other embodiments, the diamond sheet 120 may also be fixed to the substrate 110 without a support, for example, by directly attaching the diamond sheet 120 to the substrate 110 with an adhesive layer (e.g., resin, epoxy resin or other suitable adhesive material), or by fixing it to the substrate 110 through other structures or components. The present invention does not limit the method of fixing the diamond sheet 120 to the substrate 110.

[0077] The diamond sheet 120 and the support 130 (or adhesive layer) can be collectively referred to as a polishing unit. In this embodiment, there are 12 polishing units, which are equidistantly arranged in a ring along the circumference of the substrate 110. However, the invention is not limited to this. In other embodiments, the number of polishing units can be adjusted according to actual needs, such as 8, 10, 16 or other appropriate numbers, and the polishing units can also adopt other arrangements, such as concentric circles, spirals or irregular arrangements.

[0078] Generally, a larger number of grinding units increases the contact area with the grinding pad, which helps improve dressing efficiency and uniformity. Conversely, a smaller number of grinding units reduces the manufacturing cost of the diamond dressing disc and decreases the contact pressure per unit area, making it suitable for applications with lower requirements for grinding pad wear. Furthermore, the arrangement of the grinding units also affects the dressing effect of the grinding pad. For example, a ring arrangement allows for more uniform dressing, while a spiral arrangement facilitates the flow of the polishing fluid and chip removal. Therefore, the number and arrangement of the grinding units in this invention can be appropriately selected and adjusted according to the desired dressing effect, the characteristics of the grinding pad, and process requirements.

[0079] Figure 3 and Figure 4 These are top views of diamond sheets according to different embodiments of the present invention. Figure 5 yes Figure 3 or Figure 4 Enlarged top view within the dashed box. Figure 6 yes Figure 3 or Figure 4 A magnified side view along the tangent of line BB. Figure 7 yes Figure 6 A partially enlarged side view of half of the (hypothetical single tower).

[0080] Please see Figures 3 to 7 In this embodiment, each diamond sheet 320, 420 includes a base BA and multiple diamond towers DT2 (cones). The diamond towers DT2 have a "double-tower combination (double-cone) double-layer main structure". Unlike the design of a single cone set independently, the double-tower combination structure of the present invention consists of two diamond towers DT2 sharing a base BA. The main body (cone) of the diamond tower DT2 extends upward from the shared base BA, so that a large bonding area is formed between the two diamond towers DT2 and the base BA, thereby improving the bonding strength between the diamond towers DT2 and the base BA, and effectively reducing the risk of the diamond towers DT2 peeling off during the grinding process.

[0081] Furthermore, a recessed space SP is formed between the two diamond towers DT2 in the dual-tower combination structure. This recessed space SP facilitates the flow of polishing fluid and the removal of polishing debris, thereby improving the efficiency of polishing pad dressing. Moreover, because the dual-tower combination structure occupies a relatively small area, a larger number of diamond towers DT2 can be arranged per unit area, which helps to increase the contact point density between the diamond sheet and the polishing pad, thus achieving a more uniform dressing effect.

[0082] It is worth noting that the diamond tower DT2 of this invention adopts a "double-layer main structure" design, which differs from the existing technology that only uses a single-layer cone design. The double-layer main structure gives each diamond tower DT2 a top platform 701 and a middle platform 702. The top platform 701 and the middle platform 702 are located at different heights. When the first layer (top platform 701) wears down due to long-term use, the diamond sheets 320 and 420 can be recycled and leveled onto the second layer (middle platform 702), allowing the diamond sheets 320 and 420 to be reused, thereby extending their service life and reducing consumable costs. This double-layer structure design allows for adjustment of the insertion depth into the grinding pad according to actual needs and provides the possibility of recycling and reusing the diamond sheets 320 and 420. In other words, there is a predetermined height difference between the top platform 701 and the middle platform 702, so that when the top platform 701 wears down, the middle platform 702 can gradually participate in the dressing process to maintain the stability of the dressing contact state.

[0083] In this embodiment, each diamond sheet 320, 420 can be manufactured using a vapor phase method or a high-temperature, high-pressure method, such as chemical vapor deposition diamond (CVDD). Alternatively, a single-crystal or polycrystalline diamond sheet can be formed using chemical vapor deposition (CVD), and then each diamond tower DT2 can be engraved on the diamond sheet 320, 420 using laser processing. However, the present invention does not limit the manufacturing method of the diamond sheet 320, 420 and the diamond tower DT2.

[0084] Using laser processing to form diamond towers DT2 allows for better control over the shape, size, and position of each diamond tower DT2, ensuring consistent vertex height and improving the uniformity of the grinding pad dressing. In other words, the vertex height of all diamond towers on the same diamond sheet is essentially the same. For example, in some embodiments, the diamond towers are formed integrally with the diamond sheet through laser processing (e.g., laser engraving) or other suitable processes, and the difference in vertex height among all diamond towers is within ±5µm. That is, using laser processing to form diamond towers allows for vertex height accuracy control within ±5µm. In some embodiments, vertex height accuracy can reach within ±2µm. In some embodiments, depending on the laser processing equipment technology, vertex height accuracy can reach within ±1µm, and with continuous advancements in processing equipment, even higher accuracy requirements can be achieved. This invention does not limit the specific numerical value of vertex height accuracy. The shape of the diamond sheet can be circular, square, or rectangular, but this invention is not limited to these; the diamond sheet can also be elliptical, polygonal, or other suitable shapes. Among them, round diamond sheets can work in conjunction with the rotation of the diamond dressing disc to achieve a more uniform dressing effect on the polishing pad; square or rectangular diamond sheets are beneficial to increasing the arrangement density of diamond sheets on the substrate and can simplify the manufacturing process.

[0085] Regarding the arrangement of the diamond towers on the diamond sheet, the diamond towers in this embodiment of the invention can adopt various periodic or quasi-periodic arrangement patterns according to actual application requirements. Periodic arrangement refers to the diamond towers being repeatedly arranged at fixed intervals and in a regular pattern, such as radial, rectangular, spiral, or honeycomb arrangements. Quasi-periodic arrangement refers to the diamond towers being arranged with local regularity but presenting an overall non-completely repeating pattern, such as a gradient arrangement with unequal intervals or a mixed arrangement. Regardless of the arrangement method, the purpose is to ensure that the diamond towers are evenly distributed on the diamond sheet to ensure a uniform dressing effect on the polishing pad, while also considering the flow of polishing fluid and the removal of polishing debris. Therefore, this invention does not limit the arrangement of the diamond towers; any periodic or quasi-periodic arrangement pattern that achieves the above objectives falls within the scope of this invention.

[0086] In this embodiment, the diamond towers DT2 can be arranged radially or rectangularly on the diamond sheets 320 and 420, such as... Figure 3 and Figure 4As shown, but the present invention is not limited thereto, the diamond towers DT2 can also be arranged in other ways. A radial arrangement allows the diamond towers DT2 to be evenly distributed along the rotation direction of the diamond dressing disc, which helps to achieve uniform dressing of the grinding pad; a rectangular regular arrangement is beneficial for controlling the spacing between adjacent diamond towers DT2 and can simplify process design. In this embodiment, the diamond towers DT2 are arranged in an array pattern, but in other embodiments, the diamond towers DT2 can also be arranged in other patterns.

[0087] On the other hand, such as Figures 5 to 7 As shown, the diamond tower DT2 is a conical structure with a "double-tower combination (double-cone) double-layer main body structure". Unlike the existing technology that uses a pyramid-shaped (quadrilateral pyramid) design, the diamond tower DT2 of this invention is conical with a continuous and smooth side profile. The conical shape has no sharp edges, which can reduce stress concentration caused by sharp edges during the grinding process, thereby reducing the risk of breakage or chipping of the diamond tower DT2.

[0088] For more details, please refer to the following: Figures 5 to 7 Each diamond tower DT2 has a main body (cone) comprising a top platform 701, a middle platform 702, a bottom surface 703, a side surface 704 (hereinafter referred to as the first side surface) between the top platform 701 and the middle platform 702, and a side surface 705 (hereinafter referred to as the second side surface) between the middle platform 702 and the bottom surface 703. The bottom surface 703 is located on the upper surface of the base BA, and the main body of the diamond tower DT2 extends upward from the bottom surface 703. The top platform 701, the middle platform 702, and the bottom surface 703 are substantially parallel to each other and are located at different heights. The width W1 of the top platform 701 is smaller than the width W2 of the middle platform 702, and the width W2 of the middle platform 702 is smaller than the width W3 of the bottom surface 703, causing the main body of the diamond tower DT2 to gradually converge from the bottom surface 703 towards the top platform 701.

[0089] The first side 704 connects the periphery of the top platform 701 to the periphery of the middle platform 702; the second side 705 connects the periphery of the middle platform 702 to the periphery of the bottom surface. In a top-down view (e.g.) Figure 5 The top platform 701, the middle platform 702, and the bottom surface 703 are arranged coaxially.

[0090] Furthermore, the included angle A between the first side 704 and the opposite first side 704 is between 60 degrees and 120 degrees. When the included angle A is too small, the structural strength of the diamond tower DT2 may be insufficient, making it more prone to breakage or chipping during grinding; when the included angle A is too large, the tip of the diamond tower DT2 may be too flat, resulting in a decrease in cutting sharpness and thus affecting the dressing effect on the grinding pad. Therefore, controlling the included angle A between 60 degrees and 120 degrees achieves a better balance between structural strength and cutting sharpness.

[0091] The length L1 of the diamond tower DT2 along the tangent direction of BB (i.e., the side length of the combined tower) is between 0.73 mm and 0.968 mm. The length L1 affects the distribution density of the diamond tower DT2 on the diamond sheets 320 and 420. When the length L1 is too small, the spacing between adjacent diamond towers DT2 may be too tight, which is not conducive to the flow of polishing fluid and the removal of polishing debris. When the length L1 is too large, the distribution density of the diamond tower DT2 may be insufficient, resulting in a reduced number of contact points with the polishing pad, thus affecting the uniformity of dressing. Therefore, controlling the length L1 between 0.73 mm and 0.968 mm ensures that the diamond tower DT2 has an appropriate distribution density while maintaining smooth flow of polishing fluid and chip removal.

[0092] The width W1 of the top platform of the DT2 diamond grinding wheel is between 0.03mm and 0.1mm. The top platform is the part of the DT2 diamond grinding wheel that actually contacts the grinding pad, and its width affects the contact area and unit contact pressure. When the top platform width W1 is too small, the contact area with the grinding pad is small, which may lead to excessive unit contact pressure, causing excessive wear or damage to the grinding pad. When the top platform width W1 is too large, the cutting sharpness of the DT2 diamond grinding wheel may decrease, affecting the finishing effect on the grinding pad surface. Therefore, controlling the top platform width W1 between 0.03mm and 0.1mm achieves a better balance between contact area and cutting sharpness, allowing the grinding pad to achieve an appropriate finishing effect.

[0093] Furthermore, unlike existing technologies that group diamond tips into different groups based on their vertex height, with each group having a different vertex height, the diamond dressing disc 100 of this invention features all diamond towers DT2 on the same diamond sheet 320 and 420 at the same vertex height, designed to be of equal height. The total height (including the main body of the diamond tower DT2 and its base BA) H is between 0.5mm and 3mm. This equal-height design ensures consistent contact depth between each diamond tower DT2 and the polishing pad, preventing some diamond towers DT2 from over-penetrating or failing to contact the polishing pad due to height differences. This ensures a uniform dressing effect on the polishing pad and improves the yield of the chemical mechanical polishing process.

[0094] However, the aforementioned dimensional parameters are only preferred embodiments of the present invention, and the present invention is not limited thereto. The dimensional parameters can be appropriately adjusted according to actual application requirements, grinding pad characteristics and process conditions.

[0095] Figure 8 and Figure 9 These are top views of diamond sheets according to different embodiments of the present invention. Figure 10 yes Figure 8 or Figure 9 Enlarged top view within the dashed box. Figure 11 yes Figure 8 or Figure 9 A magnified side view along the CC tangent direction. Figure 12 yes Figure 11 A partially enlarged side view of half of the (hypothetical single tower).

[0096] Please see Figures 8 to 12 In this embodiment, each diamond sheet 820 and 920 includes a base BA and multiple diamond towers DT3 (cones). The diamond towers DT3 have a "three-tower combination (three-cone) double-layer main structure," with the main body (cone) of the diamond tower DT3 extending upward from the shared base BA. Compared to the aforementioned double-tower combination structure, the three-tower combination structure of this embodiment uses three diamond towers DT3 sharing a single base BA, resulting in a larger bonding area between the three diamond towers DT3 and BA. This further enhances the bonding strength between the diamond towers DT3 and the base BA, and more effectively reduces the risk of the diamond towers DT3 peeling off during the grinding process.

[0097] Furthermore, the three diamond towers (DT3) in the three-tower combination structure are arranged in a triangular configuration. This configuration distributes the forces borne by the diamond towers (DT3) during grinding in three directions, resulting in better structural stability and resistance to lateral forces compared to the linear configuration of the two-tower combination structure. Moreover, the three diamond towers (DT3) in the three-tower combination structure form a recessed space (SP), which facilitates the flow of grinding fluid and the removal of grinding debris. Since the recessed space (SP) formed by the three-tower configuration is wider than that of the two-tower configuration, it further improves the efficiency of grinding fluid flow and debris removal.

[0098] On the other hand, this embodiment also adopts a double-layer main structure design, so that each diamond tower DT3 has a top platform 1201 and a middle platform 1202. When the first layer (top platform 1201) is worn out due to long-term use, the diamond sheets 820 and 920 can be recycled and leveled and processed to the second layer (middle platform 1202), so that the diamond sheets 820 and 920 can be used for subsequent use, thereby extending the service life of the diamond sheets 820 and 920 and reducing the cost of consumables.

[0099] In this embodiment, each diamond sheet 820 and 920 can be manufactured using a vapor phase method or a high-temperature, high-pressure method, such as chemical vapor deposition diamond (CVDD). Alternatively, a single-crystal or polycrystalline diamond sheet can be formed using chemical vapor deposition (CVD), and then diamond towers DT3 can be engraved on the diamond sheets 820 and 920 using laser processing. However, this invention does not limit the manufacturing method of the diamond sheets 820 and 920 and the diamond towers DT3. The shape of the diamond sheet can be circular, square, or rectangular, but this invention is not limited to these shapes; the diamond sheet can also be elliptical, polygonal, or other suitable shapes. The diamond towers DT3 can be arranged radially or in a regular rectangular pattern on the diamond sheets 820 and 920, such as... Figure 8 and Figure 9 As shown, the present invention is not limited thereto, and the diamond tower DT3 can also be arranged in other ways. In this embodiment, the diamond tower DT3 is arranged in an array pattern, but in other embodiments, the diamond tower DT3 can also be arranged in other patterns.

[0100] For more details, please refer to the following: Figures 10 to 12 The diamond tower DT3 is a cone-shaped structure with a "three-tower combination (three-cone) double-layer main body." Each diamond tower DT3's main body (cone) has a top platform 1201, a middle platform 1202, a bottom surface 1203, a first side surface 1204 between the top platform 1201 and the middle platform 1202, and a second side surface 1205 between the middle platform 1202 and the bottom surface 1203. The bottom surface 1203 is located on the upper surface of the base BA, and the main body of the diamond tower DT3 extends upwards from the bottom surface 1203. The angle A between the first side surface 1204 and the opposite first side surface 1204 is between 60 degrees and 120 degrees.

[0101] The length L1 of the diamond tower DT3 along the tangent direction of CC (i.e., the side length of the composite tower) ranges from 0.73mm to 0.968mm. The width W1 of the top platform of the diamond tower DT3 ranges from 0.03mm to 0.1mm. All diamond towers DT3 on the same diamond sheet 820 and 920 have the same vertex height, designed to be of equal height, with the total height H ranging from 0.5mm to 3mm.

[0102] Other features of the three-tower combination structure in this embodiment that are the same as or similar to the two-tower combination structure can be found in the following reference. Figures 3 to 7 The examples provide sufficient teaching, suggestions and implementation instructions, which will not be repeated here.

[0103] Figure 13 and Figure 14These are top views of diamond sheets according to different embodiments of the present invention. Figure 15 yes Figure 13 or Figure 14 Enlarged top view within the dashed box. Figure 16 yes Figure 13 or Figure 14 A magnified side view along the tangent direction of DD. Figure 17 yes Figure 16 A partially enlarged side view of half of the (hypothetical single tower).

[0104] Please see Figures 13 to 17 In this embodiment, each diamond sheet 1320 and 1420 includes a base BA and multiple diamond towers DT4 (cones). The diamond towers DT4 have a "four-tower combination (four-cone) double-layer main structure," with the main body (cone) of the diamond tower DT4 extending upward from the shared base BA. Compared to the aforementioned double-tower combination structure and triple-tower combination structure, the four-tower combination structure of this embodiment uses four diamond towers DT4 sharing a single base BA, resulting in a larger bonding area between the four diamond towers DT4 and the base BA, thereby further enhancing the bonding strength between the diamond towers DT4 and the base BA.

[0105] Furthermore, the four diamond towers DT4 of the four-tower combination structure are arranged in a rectangular configuration (e.g., Figure 15 As shown in the diagram, this configuration allows the forces exerted on the diamond towers (DT4) during grinding to be evenly distributed in four directions. Compared to the linear configuration of a dual-tower combination structure and the triangular configuration of a three-tower combination structure, it offers better structural stability and resistance to multi-directional lateral forces. Furthermore, the four diamond towers (DT4) in the four-tower combination structure form grooved spaces (SP), and because the grooved spaces (SP) formed by the four-tower configuration are distributed in a cross shape, the grinding fluid can flow in multiple directions, further improving the efficiency of grinding fluid distribution and chip removal.

[0106] On the other hand, this embodiment also adopts a double-layer main structure design, so that each diamond tower DT4 has a top platform 1701 and a middle platform 1702. When the first layer (top platform 1701) is worn out due to long-term use, the diamond sheets 1320 and 1420 can be recycled and leveled and processed to the second layer (middle platform 1702), so that the diamond sheets 1320 and 1420 can be used for subsequent use, thereby extending the service life of the diamond sheets 1320 and 1420 and reducing the cost of consumables.

[0107] In this embodiment, each diamond sheet 1320, 1420 can be manufactured using a vapor phase method or a high-temperature, high-pressure method, such as chemical vapor deposition diamond (CVDD). Alternatively, a single-crystal or polycrystalline diamond sheet can be formed using chemical vapor deposition (CVD), and then diamond towers DT4 can be engraved on the diamond sheets 1320, 1420 using laser processing. However, this invention does not limit the manufacturing method of the diamond sheets 1320, 1420 and the diamond towers DT4. The shape of the diamond sheet can be circular, square, or rectangular, but this invention is not limited to these shapes; the diamond sheet can also be elliptical, polygonal, or other suitable shapes. The diamond towers DT4 can be arranged radially or in a regular rectangular pattern on the diamond sheets 1320, 1420, such as... Figure 13 and Figure 14 As shown, the present invention is not limited thereto, and the diamond tower DT4 can also be arranged in other ways. In this embodiment, the diamond tower DT4 is arranged in an array pattern, but in other embodiments, the diamond tower DT4 can also be arranged in other patterns.

[0108] For more details, please refer to the following: Figures 15 to 17 The diamond tower DT4 is a cone-shaped structure with a "four-tower combination (four-cone) double-layer main body." Each diamond tower DT4's main body (cone) has a top platform 1701, a middle platform 1702, a bottom surface 1703, a first side surface 1704 between the top platform 1701 and the middle platform 1702, and a second side surface 1705 between the middle platform 1702 and the bottom surface 1703. The bottom surface 1703 is located on the upper surface of the base BA, and the main body of the diamond tower DT4 extends upwards from the bottom surface. The angle A between the first side surface 1704 and the opposite first side surface 1704 is between 60 degrees and 120 degrees. The length L1 of the diamond tower DT4 along the tangent direction DD (i.e., the side length of the combined tower) is between 0.73 mm and 0.968 mm. The width W1 of the top platform of the diamond tower DT4 is between 0.03 mm and 0.1 mm. All diamond towers DT4 on the same diamond sheet 1320 and 1420 have the same vertex height, which is designed to be of equal height, with the total height H ranging from 0.5mm to 3mm.

[0109] Other features of the four-tower combination structure in this embodiment that are the same as or similar to the two-tower combination structure and the three-tower combination structure can be found in the following references. Figures 3 to 12 The examples provide sufficient teaching, suggestions and implementation instructions, which will not be repeated here.

[0110] Figure 18 and Figure 19 These are top views of diamond sheets according to different embodiments of the present invention. Figure 20 yes Figure 18 or Figure 19 Enlarged top view within the dashed box. Figure 21 yes Figure 18 or Figure 19 A magnified side view along the tangent of EE.

[0111] Please see Figures 18 to 21 In this embodiment, each diamond sheet 1820 and 1920 includes a base BA and multiple diamond towers DT5 (pointed cones). The diamond towers DT5 are in the form of a "single-stone double-layered conical tower structure," with the main body of each diamond tower DT5 extending upward from the base BA. Unlike the existing technology that uses a single cone design in the shape of a pyramid (quadrilateral pyramid), the single-stone double-layered conical tower structure in this embodiment adopts a conical shape with a continuous and smooth side profile, which can reduce stress concentration caused by sharp edges during the grinding process.

[0112] Furthermore, this embodiment also adopts a double-layer main structure design, unlike the existing technology which only uses a single-layer cone design. Each diamond tower DT5 has a top platform 2101 and a middle platform 2102. When the first layer (top platform 2101) wears down due to long-term use, the diamond sheets 1820 and 1920 can be recycled and leveled onto the second layer (middle platform 2102), allowing the diamond sheets 1820 and 1920 to be reused. Compared to the aforementioned multi-tower combination (double-tower, triple-tower, quadruple-tower) structure, each diamond tower DT5 in the single double-layer conical tower structure is independently set on the base BA, allowing for a higher density of diamond tower DT5s per unit area. This increases the number of contact points with the grinding pad, helping to improve the uniformity of dressing. In addition, the gaps between the individual conical towers are evenly distributed, which is beneficial for the flow of the grinding fluid and the discharge of grinding debris.

[0113] In this embodiment, each diamond sheet 1820 and 1920 can be manufactured using a vapor phase method or a high-temperature, high-pressure method, such as chemical vapor deposition diamond (CVDD). Alternatively, a single-crystal or polycrystalline diamond sheet can be formed using chemical vapor deposition (CVD), and then each diamond tower DT5 can be engraved on the diamond sheet 1820 and 1920 using laser processing. However, this invention does not limit the manufacturing method of the diamond sheets 1820 and 1920 and the diamond tower DT5. The shape of the diamond sheet can be circular or square, such as... Figure 18 and Figure 19 As shown, but the present invention is not limited thereto.

[0114] In this embodiment, the square diamond sheets 1820 and 1920 can be 6.5mm × 6.5mm in size, but the present invention is not limited thereto, and the size of the diamond sheets 1820 and 1920 can be adjusted according to actual application requirements. The diamond towers DT5 can be arranged radially, spirally, or rectangularly on the circular diamond sheet 1820; and can be arranged rectangularly on the square diamond sheet 1920.

[0115] Unlike existing designs that distribute diamond tips according to their apex height in the central and surrounding areas, the diamond turrets DT5 of this invention are uniformly distributed on the diamond sheets 1820 and 1920, and all DT5 turrets have the same apex height, designed to be of equal height. The spacing between the DT5 turrets can be adjusted according to the actual application conditions of chemical mechanical polishing (e.g., considering the polishing fluid flow rate). In this embodiment, the diamond turrets DT5 are arranged in an array pattern, but in other embodiments, the diamond turrets DT5 can be arranged in other patterns.

[0116] For more details, please refer to the following: Figure 20 and Figure 21 The DT5 diamond tower is a cone-shaped structure with a single-piece, double-layer conical design. Each DT5 diamond tower's main body (cone) has a top platform 2101, a middle platform 2102, a bottom surface 2103, a first side surface 2104 between the top platform 2101 and the middle platform 2102, and a second side surface 2105 between the middle platform 2102 and the bottom surface 2103. The bottom surface 2103 is located on the upper surface of the base BA, and the main body of the DT5 diamond tower extends upwards from the bottom surface 2103. The angle A between the first side surface 2104 and the opposite first side surface 2104 is between 60 degrees and 120 degrees. The width W1 of the top platform 2101 of the DT5 diamond tower is between 0.03 mm and 0.1 mm. All DT5 diamond towers on the same diamond sheet have the same apex height, designed to be of equal height, with a total height H between 0.5 mm and 3 mm.

[0117] Other features of the single-column double-layer conical tower structure in this embodiment that are the same as or similar to the double-tower combined structure, the triple-tower combined structure, and the four-tower combined structure can be found in reference. Figures 3 to 17 The examples provide sufficient teaching, suggestions and implementation instructions, which will not be repeated here.

[0118] Figure 22 and Figure 23 These are top views of diamond sheets according to different embodiments of the present invention. Figure 24 yes Figure 22 or Figure 23 Enlarged top view within the dashed box. Figure 25 yes Figure 22 or Figure 23A magnified side view along the FF tangent direction.

[0119] Please see Figures 22 to 25 In this embodiment, each diamond sheet 2220, 2320 includes a base BA and multiple diamond towers DT6 (cones). The diamond tower DT6 has a "single-piece double-layer hexagonal pyramid structure," with the main body of each diamond tower DT6 extending upward from the base BA. Compared to the aforementioned single-piece double-layer conical tower structure, the main body of the diamond tower DT6 in this embodiment is hexagonal pyramidal. Unlike the pyramidal (quadrilateral pyramid) structure used in the prior art, the hexagonal pyramid structure of this invention has six sides and six edges, providing multi-directional cutting capabilities during the grinding process. The hexagonal pyramid structure allows for a closer arrangement of the hexagonal base on the diamond sheets 2220, 2320, reducing the gaps between the bases BA compared to the conical tower structure and effectively utilizing the area of ​​the diamond sheets 2220, 2320. Furthermore, the six edges of the hexagonal pyramid provide multi-directional cutting capabilities during the grinding process, facilitating uniform dressing of the grinding pad.

[0120] On the other hand, this embodiment also adopts a double-layer main structure design, so that each diamond tower DT6 has a top platform 2501 and a middle platform 2502. When the first layer (top platform 2501) is worn out due to long-term use, the diamond sheets 2220 and 2320 can be recycled and leveled and processed to the second layer (middle platform 2502), so that the diamond sheets 2220 and 2320 can be used for subsequent use, thereby extending the service life of the diamond sheets 2220 and 2320 and reducing the cost of consumables.

[0121] In this embodiment, each diamond sheet 2220, 2320 can be manufactured using a vapor phase method or a high-temperature, high-pressure method, such as chemical vapor deposition diamond (CVDD). Alternatively, a single-crystal or polycrystalline diamond sheet can be formed using chemical vapor deposition (CVD), and then each diamond tower DT6 can be engraved on the diamond sheet 2220, 2320 using laser processing. However, this invention does not limit the manufacturing method of the diamond sheets 2220, 2320 and the diamond tower DT6. The shape of the diamond sheet can be circular or square, such as... Figure 23 and Figure 24As shown, but the invention is not limited thereto. In this embodiment, the size of the square diamond sheet 2320 can be 6.5mm × 6.5mm, but the invention is not limited thereto, and the size of the diamond sheet 2320 can be adjusted according to actual application requirements. The diamond towers DT6 can be arranged radially, spirally, or rectangularly on the circular diamond sheet 2220; on the square diamond sheet 2320, they can be arranged rectangularly or honeycombly. The honeycomb arrangement allows for a closer configuration between the hexagonal pyramid towers, effectively utilizing the area of ​​the diamond sheets 2220 and 2320. The spacing between the diamond towers DT6 can be adjusted according to the actual application conditions of chemical mechanical polishing (e.g., considering the polishing fluid flow rate). In this embodiment, the diamond towers DT6 are arranged in an array pattern, but in other embodiments, the diamond towers DT6 can also be arranged in other patterns.

[0122] For more details, please refer to the following: Figure 24 and Figure 25 The DT6 diamond tower is a hexagonal pyramid with a "single-piece, double-layered hexagonal pyramid structure." Each DT6 diamond tower's main body (hexagonal pyramid) has a top platform 2501, a middle platform 2502, a bottom surface 2503, a first side surface 2504 between the top platform 2501 and the middle platform 2502, and a second side surface 2505 between the middle platform 2502 and the bottom surface 2503. The bottom surface 2503 is located on the upper surface of the base BA, and the main body of the DT6 diamond tower extends upwards from the bottom surface 2503. In a top-down view, the centers of the top platform 2501, the middle platform 2502, and the bottom surface 2503 are coaxially aligned. The angle A between the first side surface 2504 and its opposite side surface 2504 is between 60 degrees and 120 degrees. The width W1 of the top platform of the DT6 diamond tower is between 0.03 mm and 0.1 mm. All diamond towers DT6 on the same diamond sheet 2220 and 2320 have the same vertex height, which is designed to be of equal height, with the total height H ranging from 0.5mm to 3mm.

[0123] Other features of the single-tower double-layer hexagonal pyramidal tower structure in this embodiment that are the same as or similar to the single-tower double-layer conical tower structure, double-tower combined structure, triple-tower combined structure, and quadruple-tower combined structure can be found in reference. Figures 3 to 21 The examples provide sufficient teaching, suggestions and implementation instructions, which will not be repeated here.

[0124] It should be understood that although the foregoing embodiments disclose a double-layer main structure for multi-tower combinations (double-tower, triple-tower, quad-tower) and a single double-layer conical tower (cone, hexagonal pyramid) structure, the present invention is not limited thereto. In other embodiments, the multi-tower combination may also adopt a five-tower combination, a six-tower combination, or other numbers of multi-tower combination double-layer main structures; the single double-layer conical tower may also adopt an octagonal pyramid or other polygonal pyramid shape. The present invention does not limit the number of tower combinations or the shape of the conical tower. Generally speaking, when the number of tower combinations increases, the bonding area between the diamond tower and the base increases accordingly, and the bonding strength also improves accordingly; the single conical tower structure can be configured with a higher density of contact points per unit area. Therefore, the number of tower combinations and the shape of the conical tower can be appropriately selected according to factors such as the desired bonding strength, chip removal efficiency, contact point density, and process requirements.

[0125] It should be understood that although the diamond tower disclosed in the foregoing embodiments adopts a double-layer main structure, the present invention is not limited thereto. In other embodiments, the diamond tower may also adopt a multi-layer main structure with three or more layers, each layer having a platform. When the upper platform wears out, it can be sequentially leveled and processed to the lower platform for subsequent use. The more layers there are, the more times the diamond sheets can be recycled and reused, but the process complexity also increases accordingly. Therefore, the number of layers can be appropriately selected according to actual application needs, process capabilities, and cost considerations.

[0126] Furthermore, the multi-layered main structure of this invention provides the possibility of recycling and reusing diamond sheets. When the top platform of the diamond tower wears down to a predetermined degree due to long-term use—for example, the width W1 of the top platform expands to nearly the width W2 of the middle platform due to wear, or the height of the top platform decreases to a predetermined threshold due to wear—the diamond sheet can be removed from the substrate for recycling. The recycling process involves flattening the upper surface of the diamond sheet to the height of the middle platform, exposing the middle platform as a new grinding contact surface. Flattening can be performed using laser cutting, mechanical grinding, or other suitable processing methods. After flattening, the diamond sheet can be reattached to the substrate, using the middle platform as a new top platform to continue dressing the grinding pad. If the diamond tower uses a three- or more-layered main structure, the diamond sheets can be sequentially flattened to the middle platforms of each layer, allowing for multiple recycling and reuse. This design significantly extends the service life of the diamond dressing disc, reduces the consumable costs of chemical mechanical polishing processes, and reduces waste generation, aligning with environmental protection and sustainable development trends.

[0127] The diamond dressing disk of this invention can be used for pad dressing in chemical mechanical polishing (CMP) processes, serving as a pad conditioner or a diamond dressing disk. In CMP processes, the surface of the polishing pad gradually glazes and accumulates polishing debris, leading to a decrease in polishing efficiency. The diamond dressing disk of this invention uses a diamond tower with a multi-layered main structure to dress the surface of the polishing pad, enabling uniform asperity regeneration and restoring its polishing capability.

[0128] Roughness regeneration refers to the process of reforming the surface of a polishing pad through the cutting action of diamond towers, resulting in a new micro-roughness structure. Specifically, the top platforms of each diamond tower contact the polishing pad surface during the dressing process and cut away the planarization layer and accumulated polishing debris, simultaneously forming a new micro-roughness structure on the pad surface – this is the effect of roughness regeneration. The micro-roughness structure on the polishing pad surface increases the number of contact points between the pad and the wafer and provides space for polishing fluid retention, contributing to improved efficiency and uniformity in chemical mechanical polishing.

[0129] In the diamond dressing disc of this invention, the apex heights of all diamond towers on the same diamond sheet are essentially the same. This ensures that each diamond tower cuts the same depth of cut to the polishing pad, thereby achieving a uniform roughness regeneration effect on the polishing pad. If the apex heights of the diamond towers are inconsistent, the diamond tower with the higher apex will over-cut the polishing pad, while the diamond tower with the lower apex may fail to effectively contact the polishing pad surface, resulting in uneven roughness distribution on the polishing pad surface and affecting the yield of chemical mechanical polishing. Therefore, the equal-height design of this invention ensures that each diamond tower provides a uniform dressing effect to the polishing pad.

[0130] Furthermore, spaces are formed between the diamond towers in this embodiment of the invention, serving as channels for the discharge of grinding debris. In the multi-tower assembly structure, recessed spaces are formed between multiple diamond towers sharing a common base; in the single-tower structure, gaps are formed between adjacent diamond towers. These recessed spaces or gaps allow for the flow of polishing fluid and help to remove grinding debris generated during the dressing process from the surface of the polishing pad, preventing the accumulation of grinding debris on the surface of the polishing pad and affecting the polishing quality. Therefore, the multi-layer main structure of this embodiment of the invention is configured to provide uniform roughness regeneration to the polishing pad, and the spaces formed between the diamond towers for the discharge of grinding debris effectively improve the efficiency and quality of chemical mechanical polishing pad dressing.

[0131] On the other hand, the multi-layered main structure of this invention provides each diamond dressing disc with a top platform and at least one intermediate platform. When the top platform wears out due to long-term use, the diamond sheet can be recycled and leveled onto the intermediate platform, allowing it to be used for further dressing. This design effectively extends the service life of the diamond dressing disc and reduces the consumable costs of the chemical mechanical polishing process.

[0132] Furthermore, the multi-layered main structure of this invention allows the diamond dressing disc to provide different dressing geometries at different wear stages. In the first wear stage, the top platform serves as the first dressing geometry to dress the polishing pad; when the top platform wears to a predetermined degree, the diamond sheet can be processed (e.g., leveled) to expose the middle platform, which then serves as the second dressing geometry to continue dressing the polishing pad. This design extends the effective service life of the diamond dressing disc's dressing function. The type, size, and arrangement rules of the platforms in different layers can be the same or different, and this invention does not limit this; however, the apex height of all diamond dressing discs on the same diamond sheet should preferably be kept consistent to ensure the uniformity of the dressing effect.

[0133] The diamond towers (pointed cones) of the "multi-cone multi-layer main structure array" and "single multi-cone tower structure" of the present invention have at least the following advantages: (1) The bonding strength of the multi-tower combined cones can effectively reduce the risk of the diamond tower peeling off during the grinding process, thereby avoiding the detached diamond tower from scratching the wafer surface; the single multi-cone tower structure can be configured with a high density of contact points per unit area, which helps to improve the uniformity of finishing; (2) The depth of the multi-layer cone structure into the grinding pad can be adjusted according to actual needs. If only the first layer of cones is used, the diamond sheet can be recycled and leveled to the second layer of cones for subsequent use, thereby extending the service life of the diamond sheet and reducing the cost of consumables. This is an advantage that the existing single-layer cone structure does not have. (3) Since the diamond towers are formed on the diamond sheet by laser processing (e.g., laser engraving) or other appropriate processes, the height of the apex of each diamond tower can be kept consistent. Unlike the existing technology that divides the diamond cones into different groups according to the height of the apex, the equal height design of this invention can ensure that the contact depth between each diamond tower and the grinding pad is consistent, thereby improving the grinding pad repair. (4) The groove space or gap formed between the multi-tower combination or between the single conical towers helps the flow of polishing fluid and the discharge of polishing debris, which can improve the efficiency of polishing pad dressing; (5) The multi-tower combination structure can distribute the force borne by the diamond tower during the polishing process in multiple directions, and has better structural stability and resistance to lateral forces; (6) The conical or hexagonal pyramidal design of the present invention is different from the pyramidal (quadrilateral pyramid) design used in the prior art. The conical shape has a continuous and smooth side profile, which can reduce stress concentration; the hexagonal pyramidal shape can provide multi-directional cutting capabilities and effectively utilize the diamond sheet area.

[0134] Regarding the impact of the multi-layer main structure of this invention on the service life of diamond dressing discs, compared to the single-layer conical structure used in the prior art, the multi-layer main structure of this invention can extend the service life of diamond dressing discs. Specifically, the existing single-layer conical diamond tower only has a single tip (top platform). When this tip wears down due to long-term use to the point that it can no longer effectively dress the grinding pad, the entire diamond sheet must be scrapped and replaced. In contrast, the multi-layer main structure of this invention provides each diamond tower with two usable layers: a top platform and a middle platform. When the first layer (top platform) wears down, the diamond sheet can be recycled and leveled to the second layer (middle platform), allowing the diamond sheet to be used again. Therefore, under the same grinding conditions, the multi-layer main structure of this invention can extend the service life of diamond dressing discs compared to the existing single-layer structure. Taking a double-layer main structure as an example, due to the two usable layers of the top platform and the middle platform, the service life of the diamond sheet can be extended to approximately twice. If a three-layer or more multi-layer main structure is used, the service life can be further extended. This extended service life can effectively reduce the consumable cost of diamond dressing discs and reduce downtime required to replace diamond dressing discs, which helps to improve the overall efficiency and economic benefits of chemical mechanical polishing processes.

[0135] In summary, the diamond dressing disc of the present invention has been fully and clearly described. It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included within the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

[0136] It should also be noted that any numerical values ​​mentioned in this invention are not intended to limit the invention to only the specified numerical values. Those skilled in the art will understand that there are permissible errors in each numerical value / composition ratio. As long as they do not significantly affect the results / functions to be achieved in each embodiment, any value that is close to the disclosed numerical range is considered to be within the scope disclosed in this invention.

Claims

1. A diamond dressing disc, comprising: substrate; as well as Multiple diamond sheets are fixed on the substrate, wherein each diamond sheet includes a base and multiple diamond towers, and the diamond towers extend upward from the base; Each of the diamond towers has a multi-layered main structure, which includes at least a top platform, a middle platform, a bottom surface, a first side surface between the top platform and the middle platform, and a second side surface between the middle platform and the bottom surface.

2. The diamond dressing disc according to claim 1, characterized in that, The diamond tower is in the shape of a cone, a hexagonal pyramid, or other polygonal pyramids.

3. The diamond dressing disc according to claim 1, characterized in that, The diamond towers are arranged in a multi-tower combination, and in the multi-tower combination, multiple diamond towers share the base.

4. The diamond dressing disc according to claim 1, characterized in that, The diamond towers are arranged in a single-tower assembly, and in the single-tower assembly, each diamond tower is independently set on the base.

5. The diamond dressing disc according to claim 1, characterized in that, The angle between the first side and the opposite first side is between 60 degrees and 120 degrees.

6. The diamond dressing disc according to claim 1, characterized in that, The width of the top platform is between 0.03 mm and 0.1 mm.

7. The diamond dressing disc according to claim 1, characterized in that, The total height of the diamond tower is between 0.5 mm and 3 mm.

8. The diamond dressing disc according to claim 1, characterized in that, The apex height of all the diamond towers on the same diamond sheet is substantially the same.

9. The diamond dressing disc according to claim 1, characterized in that, The height difference of the apex of all the diamond towers on the same diamond sheet is within ± 5 μm.

10. The diamond dressing disc according to claim 1, characterized in that, The diamond tower is integrally formed with the diamond sheet through laser processing.

11. The diamond dressing disc according to claim 1, characterized in that, The diamond sheet is a single-crystal diamond sheet or a polycrystalline diamond sheet, and the diamond sheet is formed by chemical vapor deposition or high temperature and high pressure method.

12. The diamond dressing disc according to claim 1, characterized in that, The diamond sheet is round, square, or rectangular.

13. The diamond dressing disc according to claim 1, characterized in that, The diamond towers are arranged in a periodic or quasi-periodic pattern on the diamond sheets.

14. The diamond dressing disc according to claim 13, characterized in that, The arrangement pattern includes radial arrangement, spiral arrangement, rectangular arrangement or honeycomb arrangement.

15. The diamond dressing disc according to claim 1, characterized in that, The diamond sheets are equidistantly arranged along the circumference of the substrate, or arranged in a spiral.

16. The diamond dressing disc according to claim 1, characterized in that, The diamond dressing disc is used in chemical mechanical polishing processes.

17. The diamond dressing disc according to claim 1, characterized in that, The top platform, the middle platform, and the bottom surface are substantially parallel to each other.

18. The diamond dressing disc according to claim 1, characterized in that, The width of the top platform is smaller than the width of the middle platform, and the width of the middle platform is smaller than the width of the bottom surface.

19. The diamond dressing disc according to claim 18, characterized in that, The main body of the diamond tower gradually tapers from the bottom surface toward the top platform.

20. The diamond dressing disc according to claim 1, characterized in that, The first side connects the periphery of the top platform to the periphery of the middle platform.

21. The diamond dressing disc according to claim 1, characterized in that, The second side connects the periphery of the intermediate platform to the periphery of the bottom surface.

22. The diamond dressing disc according to claim 1, characterized in that, The top platform and the middle platform are located at different heights.

23. The diamond dressing disc according to claim 1, characterized in that, In a top-down view, the top platform, the middle platform, and the center of the bottom surface are coaxially arranged.

24. The diamond dressing disc according to claim 1, characterized in that, The bottom surface is located on the upper surface of the base.

25. The diamond dressing disc according to claim 1, characterized in that, The multi-layer main structure can be a two-layer main structure, a three-layer main structure, or a more multi-layer main structure.

26. A diamond dressing disc, comprising: substrate; as well as Multiple diamond sheets are fixed on the substrate, wherein each diamond sheet includes a base and multiple diamond towers, and the diamond towers extend upward from the base; Each of the diamond towers has a multi-layer main structure, which includes a top platform and at least one intermediate platform. In this case, the apex height of all the diamond towers on the same diamond sheet is consistent.

27. A diamond dressing disc, comprising: substrate; as well as Multiple diamond sheets are fixed on the substrate, wherein each diamond sheet includes a base and multiple diamond towers, and the diamond towers extend upward from the base; Each of the diamond towers has a multi-layer main structure, which includes a top platform and at least one intermediate platform. When the top platform wears out, the diamond sheet can be leveled to expose the middle platform. In this case, the apex height of all the diamond towers on the same diamond sheet is consistent.

28. The diamond dressing disc according to any one of claims 1 to 27, wherein, There is a predetermined height difference between the top platform and the at least one intermediate platform in the multi-layer main structure.

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