Vacuum chamber production transfer with scratch prevention robot

Abstract

The present application belongs to the technical field of vacuum equipment transfer manipulator, and discloses a scratch-proof manipulator for vacuum chamber production and transfer, which comprises a manipulator, a positioning scratch-proof assembly and a reinforcing assembly are installed on the manipulator, and a cleaning assembly is installed on the manipulator. The positioning scratch-proof assembly can accurately adjust the spacing between the clamping pads through the electromagnetic sliding structure, and is suitable for different specifications of vacuum chambers. Meanwhile, the flexible round corner anti-skid clamping pad can stably clamp the workpiece, avoiding surface scratches. The reinforcing assembly relies on the electric guide rail to drive the clamping pad to adaptively fit the chamber profile, forming a multi-point balanced clamping structure with the main clamping pad, dispersing local pressure, and eliminating damage such as indentation, fine scratches, etc. Before clamping operation, the cleaning assembly can remove hard dust and debris on the surface of the chamber through high-absorption cleaning cotton with a micro-adhesive layer, avoiding damage to the paint and finish caused by clamping friction. After cleaning, it can automatically avoid interference with the operation, achieving the effect of preventing scratches during workpiece operation.

Description

Technical Field

[0001] This invention belongs to the field of vacuum equipment transfer robot technology, specifically a scratch-resistant robot for vacuum chamber production transfer. Background Technology

[0002] Vacuum chambers are core components of high-end manufacturing equipment for vacuum coating, semiconductor etching, and precision device packaging. The internal cavity surfaces and outer walls of these chambers require stringent machining precision. The surface micro-smoothness and cleanliness directly affect the ultimate vacuum level achievable by the equipment, further influencing the component processing yield. Vacuum chambers undergo the entire process of production, component assembly, finished product transfer, and loading / unloading on the production line. Workpieces are susceptible to impacts, contamination, and damage. To ensure operational safety and positioning accuracy, the industry commonly employs automated robotic arms for precise chamber handling.

[0003] Publication No. CN120575147B discloses a transfer system for a vacuum coating production line, including a transfer device and multiple process chambers arranged around the transfer device. The transfer device includes a rotating base, multiple transfer manipulators for transferring workpiece carriers, and a rotation drive assembly for driving the rotating base to rotate. The rotating base is rotatably mounted and can move the transfer manipulators to any position in the process chambers by rotation. The transfer manipulators are mounted on the rotating base in a manner that allows their positions to be adjusted around the rotation axis of the rotating base via a position adjustment assembly. This transfer system for the vacuum coating production line has advantages such as simple structure, low manufacturing and maintenance costs, low control difficulty, stable and reliable workpiece carrier transfer, and flexible use.

[0004] In the aforementioned technologies, although the transfer robot can transfer the workpiece by adjusting its position around the rotation axis of the rotating seat through the position adjustment component, the metal arm and hard suction cup of the conventional robot are very easy to scratch the precision surface of the cavity when moving, clamping and sliding, which will cause the machining accuracy of the vacuum chamber to fail to meet the requirements, or even directly scrap it. Summary of the Invention

[0005] To address the problem mentioned in the background art that the edges and corners of conventional robotic arms and hard suction cups are easily scratched on the precision-machined surfaces of the cavity during movement, clamping, and sliding, this invention provides a scratch-resistant robotic arm for vacuum chamber production.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a scratch-resistant robotic arm for vacuum chamber production and transfer, comprising a robotic arm, wherein the robotic arm is equipped with a positioning scratch-resistant component and a reinforcement component, and a cleaning component is installed on the robotic arm; The robotic arm includes a robotic arm rotatably connected to the top of the base, a connecting rod rotatably connected to the robotic arm, and a support plate rotatably connected to the side end of the connecting rod; The positioning and anti-scratch component includes a pair of symmetrically opened sliding openings on the tray. A pair of sliders are slidably connected in the sliding openings. A first clamping pad is fixedly connected to the top of each pair of sliders, and an electromagnetic plate is fixedly connected to the bottom. A pair of bidirectional telescopic rods are fixedly connected between the two electromagnetic plates, and the fixed section of the bidirectional telescopic rods is magnetically attracted or repelled by the electromagnetic plates. The reinforcement component includes a pair of second clamping pads installed between two first clamping pads. Both the second clamping pads and the first clamping pads have corresponding sliding grooves, and a flexible sliding rod is movably connected in two adjacent sliding grooves. The cleaning assembly includes a rotating shaft rotatably connected to the junction of the robotic arm and the connecting rod. A connecting rod is fixedly connected to the side wall of the rotating shaft, and a cleaning cotton is detachably connected to the connecting rod.

[0007] Preferably, the corners of the tray, the first clamping pad, and the second clamping pad are all designed with rounded corners.

[0008] Preferably, the inner walls of both the first and second clamping pads are provided with anti-slip textures, an arc-shaped electric guide rail is installed in the groove, and the soft slide rod is slidably connected to the electric guide rail.

[0009] Preferably, a micro motor is fixedly connected to the side end of the connecting rod, and the output shaft of the micro motor is fixedly connected to a connecting shaft, which is fixedly connected to the side end of the support plate.

[0010] Preferably, a servo motor is fixedly connected to the top of the rotating shaft via a support frame, and the output shaft of the servo motor is fixedly connected to the rotating shaft.

[0011] Preferably, the connecting rod has a threaded section on the surface of the end away from the rotating shaft, the cleaning cotton is embedded with a bushing, the bushing has a threaded hole on its side end, and the threaded hole is threadedly connected to the threaded section.

[0012] Preferably, the cleaning cotton is made of sponge material, and the surface of the cleaning cotton is coated with a micro-adhesive for adhering to dust.

[0013] Preferably, the slider passes through the slide opening, and the electromagnetic plate and the bidirectional telescopic rod are located at the bottom end of the tray, while the first clamping pad and the second clamping pad are located at the top end of the tray.

[0014] Preferably, the length of the fixed section of the bidirectional telescopic rod is consistent with the workpiece with the smallest diameter.

[0015] Preferably, the included angle of rotation of the cleaning cotton is adapted to the workpiece with the largest diameter, and the two ends of the support frame are used to limit the movement of the cleaning cotton.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: This invention utilizes a positioning anti-scratch component that precisely adjusts the clamping pad spacing via an electromagnetic sliding structure to adapt to vacuum chambers of different specifications. Simultaneously, the flexible, rounded-corner anti-slip pads stably clamp the workpiece, preventing surface scratches. The reinforcement component, driven by an electric guide rail, adaptively conforms to the chamber contour, forming a multi-point balanced clamping structure with the main clamping pad. This disperses localized pressure, preventing damage such as indentations and minor scratches. Before clamping operations, the cleaning component uses highly absorbent cleaning cotton with a micro-adhesive layer to remove hard dust and debris from the chamber surface, preventing damage to the paint and finish surfaces caused by clamping friction. After cleaning, it automatically avoids interfering with operations, achieving a scratch-prevention effect during workpiece movement. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the positioning and anti-scratch component of the present invention; Figure 3 This is a schematic diagram of the bottom of the positioning anti-scratch component of the present invention; Figure 4 For the present invention Figure 3 Enlarged view of point A in the middle; Figure 5 This is a schematic diagram of the installation of the reinforcement component of the present invention; Figure 6 This is a schematic diagram of the cleaning component of the present invention; Figure 7 This is a schematic diagram of the cleaning cotton's working state according to the present invention; Figure 8 This is a schematic diagram of the installation of the cleaning cotton of the present invention.

[0018] In the picture: 1. Robotic arm; 101. Base; 102. Robotic arm; 103. Linkage rod; 104. Support plate; 105. Micro motor; 106. Connecting shaft; 2. Positioning and anti-scratch assembly; 201. Slide opening; 202. Slider; 203. Electromagnetic plate; 204. First clamping pad; 205. Bidirectional telescopic rod; 3. Reinforcing assembly; 301. Soft sliding rod; 302. Second clamping pad; 303. Slide groove; 4. Cleaning assembly; 401. Rotating shaft; 402. Servo motor; 403. Connecting rod; 404. Cleaning cotton; 405. Bushing; 406. Screw hole; 407. Threaded section; 408. Support frame. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] like Figures 1 to 8 As shown, the present invention provides a scratch-resistant robotic arm for vacuum chamber production and transfer, including a robotic arm 1, a positioning scratch-resistant component 2 and a reinforcement component 3 installed on the robotic arm 1, and a cleaning component 4 installed on the robotic arm 1; The robotic arm 1 includes a robotic arm 102 rotatably connected to the top of the base 101, a connecting rod 103 rotatably connected to the robotic arm 102, and a support plate 104 rotatably connected to the side end of the connecting rod 103. The positioning anti-scratch component 2 includes a pair of sliding openings 201 symmetrically opened on the tray 104. A pair of sliders 202 are slidably connected in the sliding openings 201. A first clamping pad 204 is fixedly connected to the top of each pair of sliders 202, and an electromagnetic plate 203 is fixedly connected to the bottom. A pair of bidirectional telescopic rods 205 are fixedly connected between the two electromagnetic plates 203, and the fixed section of the bidirectional telescopic rods 205 is magnetically attracted or repelled by the electromagnetic plates 203. The reinforcement component 3 includes a pair of second clamping pads 302 installed between two first clamping pads 204. Each of the second clamping pads 302 and the first clamping pads 204 has a corresponding groove 303. A soft sliding rod 301 is movably connected in two adjacent grooves 303. The cleaning component 4 includes a rotating shaft 401 rotatably connected to the junction of the robotic arm 102 and the connecting rod 103. A connecting rod 403 is fixedly connected to the side wall of the rotating shaft 401, and a cleaning cotton 404 is detachably connected to the connecting rod 403.

[0021] The corners of the tray 104, the first clamping pad 204, and the second clamping pad 302 are all rounded. The inner walls of the first clamping pad 204 and the second clamping pad 302 are provided with anti-slip textures. An arc-shaped electric guide rail is installed in the slide groove 303, and the soft slide rod 301 is slidably connected to the electric guide rail. A micro motor 105 is fixedly connected to the side end of the connecting rod 103. The output shaft of the micro motor 105 is fixedly connected to the connecting shaft 106, and the connecting shaft 106 is fixedly connected to the side end of the tray 104. A servo motor 402 is fixedly connected to the top of the rotating shaft 401 through the support frame 408, and the output shaft of the servo motor 402 is fixedly connected to the rotating shaft 401.

[0022] The above solution allows for flexible adjustment of the relative position and spacing between a pair of first clamping pads 204 based on the specific specifications of the vacuum chamber by using the positioning anti-scratch component 2. Specifically, by energizing the electromagnetic plate 203 and controlling its magnetism, the electromagnetic plate 203 can be precisely pushed to slide inside the sliding opening 201, thereby achieving precise adjustment of the clamping spacing between the two first clamping pads 204. This design enables the robot arm 1 to easily adapt to vacuum chambers of different sizes and models, greatly enhancing its versatility and flexibility. In addition, the first clamping pad 204 itself is made of a flexible material with good cushioning performance, with rounded corners and fine anti-slip textures on the inner wall. This combination design ensures that the clamping pads provide sufficient and uniform clamping force when clamping the vacuum chamber, ensuring that the chamber is stable and does not slip during transportation, while effectively avoiding the risk of scratches that may be caused by direct contact between traditional hard structures and the chamber surface, achieving the dual goals of stable clamping and surface protection. The reinforcement component 3 further enhances the reliability and safety of clamping. This component can smoothly drive the soft slide bar 301 to slide in the groove 303 provided by the adjacent first clamping pad 204 and second clamping pad 302 through the built-in electric guide rail. This action can dynamically adjust the relative position of the two second clamping pads 302 according to the actual contour of the vacuum chamber being clamped, so that the second clamping pads 302 can closely and conformally contact and support the side surface of the vacuum chamber. In this way, the second clamping pads 302 and the first clamping pad 204 work together to form a uniform and stable multi-point clamping layout at multiple key force points in the chamber. This multi-point balanced force distribution method effectively disperses local pressure and avoids indentation or minor scratch damage on the surface of the vacuum chamber due to excessive concentration of clamping force, ensuring the integrity of the chamber structure during transportation. The cleaning component 4 adds a crucial pre-processing step to the entire transfer process. Before the robotic arm 1 performs the clamping and transfer operation, the servo motor 402 can be started to drive the rotating shaft 401 to rotate, thereby driving the connecting rod 403 and the cleaning cotton 404 at its end to rotate to the clamping surface area of ​​the vacuum chamber. The cleaning cotton 404 is made of highly absorbent sponge material with a micro-adhesive layer coated on the surface. Before the clamping action begins, the cleaning cotton 404 will perform a thorough wipe on the surface of the chamber, effectively adhering to and removing small hard particles such as debris and dust attached to the surface. This step is crucial, as it can prevent these particles from being clamped between the clamping pad and the surface of the chamber during the clamping process, and thus causing scratches on the high-precision surface of the chamber due to friction during subsequent transfer movement. After cleaning is completed, the servo motor 402 drives the cleaning cotton 404 to rotate away from the clamping working area again, ensuring that it will not interfere with the subsequent normal clamping and transfer operation, realizing a seamless connection and switching between cleaning and transfer functions. This robotic arm 1, through the coordinated work of the positioning and anti-scratch component 2, the reinforcement component 3, and the cleaning component 4, constructs a comprehensive protection system from pre-treatment before clamping, adaptive adjustment of buffering during clamping, to reinforcement after clamping. This significantly reduces the probability of scratches, abrasions, or pressure damage during the entire production and transfer process of the vacuum chamber. It is also highly adjustable and can adapt to the transfer needs of vacuum chambers of different specifications, ensuring the surface quality of the workpiece while ensuring efficient and stable transfer.

[0023] like Figure 8 As shown, the connecting rod 403 has a threaded section 407 on the surface of the end away from the rotating shaft 401. The cleaning cotton 404 has a bushing 405 embedded inside. The bushing 405 has a screw hole 406 on its side end, and the screw hole 406 is threadedly connected to the threaded section 407. The cleaning cotton 404 is made of sponge material, and the surface of the cleaning cotton 404 is coated with a micro-adhesive for adhering to dust.

[0024] Using the above solution: when the cleaning cotton 404 wears out and becomes saturated with adhesive after long-term use, resulting in a decrease in cleaning effect, it is not necessary to replace the entire cleaning component 4. Simply unscrew the old cleaning cotton 404 and tighten the new cleaning cotton 404 by aligning it with the threaded section 407 of the connecting rod 403 through the screw hole 406 on the bushing 405. This convenient operation effectively reduces the cost and time of equipment maintenance. The threaded connection also ensures that the cleaning cotton 404 remains stable during wiping and will not loosen or shift, thus ensuring the reliability of the cleaning operation.

[0025] like Figures 1 to 7 As shown, the slider 202 passes through the slide opening 201, and the electromagnetic plate 203 and the bidirectional telescopic rod 205 are located at the bottom of the support plate 104. The first clamping pad 204 and the second clamping pad 302 are located at the top of the support plate 104. The length of the fixed section of the bidirectional telescopic rod 205 is consistent with the workpiece with the smallest diameter. The rotation angle of the cleaning cotton 404 is adapted to the workpiece with the largest diameter. The two ends of the support frame 408 are used to limit the cleaning cotton 404.

[0026] The above solution is adopted as follows: When the robot arm 1 clamps vacuum chamber workpieces of different diameters, the bidirectional telescopic rod 205 can adaptively adjust the distance between the two sliders 202 according to the workpiece diameter, driving the first clamping pad 204 and the second clamping pad 302 to clamp the workpiece from both sides. The adaptation range is wider, and there is no need to change the corresponding clamps for different sizes of workpieces, which effectively improves the versatility of the robot arm 1. The clamping and positioning structure consists of the positioning and anti-scratch component 2 and the reinforcement component 3. The cleaning cotton 404 can maintain its contact with the side wall of the workpiece while the workpiece rotates to complete the full circumference cleaning. The support frame 408 at both ends can prevent the cleaning cotton 404 from axially shifting during the cleaning process, ensuring the cleaning effect on the outer wall of the workpiece. The cleaning execution structure is the cleaning component 4. The device can simultaneously complete the cleaning of dust and debris on the surface of the workpiece during the transfer and clamping of the workpiece, without the need for additional cleaning procedures, thus improving the processing and transfer efficiency of the vacuum chamber.

[0027] Working principle and usage process of this invention: First, based on the specifications and dimensions of the vacuum chamber to be transferred, the operator needs to make a preliminary pre-adjustment to the spacing of the first clamping pad 204 to ensure that the clamping structure can adapt to the specific diameter of the current workpiece. This adjustment process is achieved by controlling the electromagnetic properties of the electromagnetic plate 203: by changing the magnetic poles of the electromagnetic plate 203, the magnetic force generated by it is used to smoothly push the electromagnetic plate 203 along the preset sliding groove 201. The movement of the electromagnetic plate 203 will synchronously drive the slider 202 rigidly connected to it, thereby adjusting the spatial position of the first clamping pad 204 fixed on the slider 202, thus adjusting it to a preliminary spacing that adapts to the diameter of the current chamber. This core spacing adjustment function is guaranteed by the structural design of the positioning and anti-scratch component 2, which realizes flexible and precise adjustment of the clamping width. After completing the preliminary spacing setting, the operator needs to move the robotic arm 102 precisely to the predetermined work position where the vacuum chamber to be transferred is located. Then, the servo motor 402 is started, driving the connected rotating shaft 401 to start rotating at a constant speed. The rotation of the rotating shaft 401 will The connecting rod 403 and the cleaning cotton 404 at its end are rotated smoothly until the cleaning cotton 404 is accurately positioned in front of the surface to be clamped in the vacuum chamber. Then, the robotic arm 102 is driven to move slowly and smoothly so that the special micro-adhesive layer on the surface of the cleaning cotton 404 can fully and evenly adhere to the outer surface of the chamber. During this process, the cleaning cotton 404 will move continuously and completely along the surface of the chamber, thereby completing a full wiping operation on the outer wall of the chamber. This set of surface cleaning actuators is defined as cleaning component 4. The core purpose of this cleaning process is to effectively capture and remove various contaminants such as hard metal shavings and dust particles that are pre-attached to the surface of the chamber by utilizing the adhesive properties of the micro-adhesive layer. By removing these potentially harmful particles in advance, it is possible to fundamentally avoid the relative movement of these hard particles between the clamping pad and the surface of the chamber due to pressure during the subsequent clamping and pressurization process, which could scratch or wear the precision surface of the chamber, thus ensuring that the surface quality of the workpiece remains consistent before and after transfer. After the cleaning process is completely finished and the cleaning structure is completely reset, the servo motor 402 starts to rotate in reverse with precision, and drives the cleaning cotton 404 to smoothly detach from the workpiece clamping area at a uniform speed, completely clearing the clamping work space and freeing up a sufficient and unobstructed work area for the subsequent precise clamping operation in the vacuum chamber. Then the equipment enters the attitude adjustment stage, and the micro motor 105 starts synchronously, precisely driving the pallet 104 carrying the workpiece to finely adjust the tilt angle, so that the angle of the pallet 104 is completely adapted to the external contour of the vacuum chamber, ensuring the stability of the workpiece placement. After the angle adjustment is completed, the equipment clamping and positioning system is officially started. The electric guide rail is powered on and runs, driving the soft slide bar 301 to slide linearly along the slide groove 303 with high precision. It precisely controls the spatial position of the second clamping pad 302, so that the clamping pad completely fits the contour of the other side of the vacuum chamber, and builds a stable auxiliary clamping fulcrum. Relying on the structural support of the reinforcement component 3, the bidirectional telescopic rod 205 carries out fine-tuning operations to precisely adjust the clamping distance of the first clamping pad 204, so that the first clamping pad 204 and the second clamping pad 302 can work together precisely. Two sets of clamping pads apply force simultaneously from multiple directions to form a uniform and stable multi-point wrapping clamping of the vacuum chamber, preventing problems such as clamping deviation and loosening. After the workpiece is confirmed to be firmly clamped, the robot arm 1 of the entire transfer main equipment drives the robot arm 102 to move, smoothly and safely transferring the vacuum chamber to the preset target position. Throughout the operation, the two sets of flexible clamping pads, combined with the balanced clamping force precisely controlled by the control system, can effectively disperse the pressure on the workpiece surface, avoid the problem of local stress concentration, and prevent damage such as scratches and indentations on the surface of the chamber, thus comprehensively ensuring the integrity and processing quality of the workpiece in the vacuum chamber. When the cleaning cotton 404 wears out or its micro-adhesive layer reaches saturation due to long-term use, its maintenance and replacement process is designed to be extremely simple and quick. Operators do not need to use complicated tools or perform cumbersome steps. They only need to unscrew the old cleaning cotton 404, and then align the new cleaning cotton 404 with the threaded section 407 at its end and the screw hole 406 on the connecting rod 403 and tighten it. The entire replacement operation can be easily completed. This simple and efficient design not only significantly reduces the difficulty and time cost of maintenance operations, but also ensures that the performance of the cleaning component 4 is always maintained at its best, thereby effectively ensuring the continuous operating efficiency of the equipment and the stability of the overall production process.

[0028] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0029] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A scratch-resistant robotic arm for vacuum chamber production and transfer, comprising a robotic arm (1), characterized in that: The robotic arm (1) is equipped with a positioning and anti-scratch component (2) and a reinforcement component (3), and a cleaning component (4) is also installed on the robotic arm (1). The robotic arm (1) includes a robotic arm (102) rotatably connected to the top of the base (101), a connecting rod (103) rotatably connected to the robotic arm (102), and a support plate (104) rotatably connected to the side end of the connecting rod (103). The positioning anti-scratch component (2) includes a pair of sliding openings (201) symmetrically opened on the tray (104). A pair of sliders (202) are slidably connected in the sliding openings (201). A first clamping pad (204) is fixedly connected to the top of each pair of sliders (202), and an electromagnetic plate (203) is fixedly connected to the bottom. A pair of bidirectional telescopic rods (205) are fixedly connected between the two electromagnetic plates (203), and the fixed section of the bidirectional telescopic rod (205) is magnetically attracted or repelled by the electromagnetic plate (203). The reinforcement component (3) includes a pair of second clamping pads (302) installed between two first clamping pads (204). The second clamping pads (302) and the first clamping pads (204) are each provided with corresponding sliding grooves (303). A soft sliding rod (301) is movably connected in two adjacent sliding grooves (303). The cleaning component (4) includes a rotating shaft (401) rotatably connected to the junction of the robotic arm (102) and the connecting rod (103). A connecting rod (403) is fixedly connected to the side wall of the rotating shaft (401), and a cleaning cotton (404) is detachably connected to the connecting rod (403).

2. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The corners of the tray (104), the first clamp (204), and the second clamp (302) are all rounded.

3. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The inner walls of the first clamping pad (204) and the second clamping pad (302) are provided with anti-slip textures. An arc-shaped electric guide rail is installed in the slide groove (303), and the soft slide rod (301) is slidably connected to the electric guide rail.

4. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: A micro motor (105) is fixedly connected to the side end of the connecting rod (103), and the output shaft of the micro motor (105) is fixedly connected to the connecting shaft (106), and the connecting shaft (106) is fixedly connected to the side end of the support plate (104).

5. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The top of the rotating shaft (401) is fixedly connected to a servo motor (402) via a support frame (408), and the output shaft of the servo motor (402) is fixedly connected to the rotating shaft (401).

6. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The connecting rod (403) has a threaded section (407) on the surface of the end away from the rotating shaft (401). The cleaning cotton (404) has a bushing (405) embedded in it. The bushing (405) has a screw hole (406) on its side end, and the screw hole (406) is threadedly connected to the threaded section (407).

7. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The cleaning cotton (404) is made of sponge material, and the surface of the cleaning cotton (404) is coated with micro-adhesive for adhering to dust.

8. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The slider (202) passes through the slide opening (201), and the electromagnetic plate (203) and the bidirectional telescopic rod (205) are located at the bottom of the support plate (104), while the first clamping pad (204) and the second clamping pad (302) are located at the top of the support plate (104).

9. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 1, characterized in that: The length of the fixed section of the bidirectional telescopic rod (205) is consistent with that of the workpiece with the smallest diameter.

10. The anti-scratch robotic arm for vacuum chamber production transfer according to claim 5, characterized in that: The included angle of the cleaning cotton (404) is adapted to the workpiece with the largest diameter, and the two ends of the support frame (408) are used to limit the cleaning cotton (404).

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