Device for detecting azimuth deviation of diamond wire slicer and adjusting method

Abstract

The application provides a detection device and adjustment method for surface orientation deviation of a diamond wire slicing machine, and belongs to the technical field of semiconductor processing. The device comprises a mounting assembly, a moving assembly and a detection assembly. The mounting assembly is used for fixing and mounting the entire detection device at the bottom of the workbench of the diamond wire slicing machine. The moving assembly is arranged below the mounting assembly. The detection assembly comprises a position adjustment mechanism and a detection mechanism. The position adjustment mechanism is arranged below the moving assembly, and the detection mechanism is arranged at one end of the position adjustment mechanism. The position adjustment mechanism is used for adjusting the position of the detection mechanism, and the moving assembly is used for driving the detection mechanism to move forward and backward for detection of the surface orientation deviation. Therefore, without trial cutting of the crystal bar, the mounting assembly, the moving assembly and the detection assembly are used to realize accurate detection of the surface orientation deviation of the workbench, so as to ensure the processing stability and consistency of the slicing machine during long-term operation.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and specifically to a device and method for detecting and adjusting the orientation deviation of a diamond wire slicer. Background Technology

[0002] After replacing the guide rail slider on the diamond wire slicing machine, the orientation of the worktable needs to be adjusted and calibrated to ensure that the accuracy of subsequent crystal ingot slicing meets the requirements. The currently common industry method for calibration is as follows: first, a trial cut is performed on the crystal ingot. After the cut, the orientation parameters of the cut crystal ingot are measured using an orientation measuring device to determine the deviation of the worktable orientation after the guide rail replacement. Then, the installation position of the worktable is adjusted based on the test results. This calibration method typically requires repeating the "trial cut-test-adjustment" cycle 2-3 times. Multiple trial cuts not only cause significant losses of raw materials such as crystal ingots and cutting fluid, but also consume additional manpower and equipment time, resulting in high calibration costs and low efficiency. Furthermore, repeated calibration increases the risk of orientation deviations, making it difficult for the machine to process products with high orientation specifications, ultimately affecting product quality and production delivery efficiency. Summary of the Invention

[0003] In view of this, the present invention provides a detection device and adjustment method for the orientation deviation of a diamond wire slicer, so as to solve the technical problem that the existing debugging method requires trial cutting of the crystal rod, which causes losses of production materials, manpower and equipment.

[0004] The technical solution adopted by this invention to solve its technical problem is:

[0005] A detection device for the orientation deviation of a diamond wire slicer includes a mounting component, a moving component, and a detection component. The mounting component is used to fix the entire detection device on the bottom of the worktable of the diamond wire slicer. The moving component is located below the mounting component. The detection component includes a position adjustment mechanism and a detection mechanism. The position adjustment mechanism is located below the moving component, and the detection mechanism is located at one end of the position adjustment mechanism. The position adjustment mechanism is used to adjust the position of the detection mechanism, and the moving component is used to drive the detection mechanism to move back and forth to detect the orientation deviation.

[0006] Preferably, the moving component includes a guide rail, a slider, a lead screw, and a drive motor; the guide rail is disposed at the bottom of the mounting component, and the length direction of the guide rail is parallel to the Y-axis direction of the worktable; the lead screw is disposed between the guide rails, the slider is threadedly connected to the lead screw, and the output shaft of the drive motor is connected to one end of the lead screw, so as to drive the lead screw to rotate through the drive motor, thereby causing the slider to move back and forth along the guide rail.

[0007] Preferably, the position adjustment mechanism includes a lateral adjustment module and a longitudinal adjustment module; the lateral adjustment module and the longitudinal adjustment module are arranged in a cross structure, and the detection mechanism is disposed at one end of the lateral adjustment module so as to adjust the lateral position of the detection mechanism by the lateral adjustment module and adjust the longitudinal position of the detection mechanism by the longitudinal adjustment module.

[0008] Preferably, the lateral adjustment module is a horizontal bar, the longitudinal adjustment module is a vertical bar, and the position adjustment mechanism further includes a locking module; the horizontal bar and the vertical bar are arranged perpendicularly to each other in a cross shape, and the locking module is connected to both the horizontal bar and the vertical bar to lock the horizontal bar and the vertical bar after the position of the detection mechanism is adjusted.

[0009] Preferably, the slider is provided with a locking mechanism for locking the slider.

[0010] Preferably, the testing device is a dial gauge.

[0011] This invention provides a method for adjusting the orientation deviation of a diamond wire slicer, employing the diamond wire slicer orientation deviation detection device described above, and including the following steps:

[0012] S1. Install the detection device under the worktable of the diamond wire slicer and fix the detection device using the mounting components;

[0013] S2. Using the main roller shaft on the left as a reference, the detection mechanism is adjusted to the first position using the position adjustment mechanism, and the detection mechanism is moved back and forth using the moving component to measure the horizontal deviation.

[0014] S3. Adjust the horizontal position of the worktable based on the horizontal deviation;

[0015] S4. After the horizontal deviation is adjusted, use the position adjustment mechanism to adjust the detection mechanism to the second position;

[0016] S5. Control the lifting and lowering of the worktable, and use the moving component to adjust the position of the detection mechanism to measure the vertical deviation;

[0017] S6. Adjust the vertical position of the worktable based on the vertical deviation.

[0018] Preferably, the first position is above the left main roller shaft; the second position is to the right of the left main roller shaft.

[0019] Preferably, in step S2, the step of using the moving component to control the detection mechanism to move back and forth to measure the horizontal deviation specifically includes: using the moving component to move the detection mechanism to the outermost side of the left main roller shaft and recording the outer side data; then moving the detection mechanism to the innermost side of the left main roller shaft and recording the inner side data; and obtaining the horizontal deviation based on the outer side data and the inner side data.

[0020] Preferably, in step S5, the control of the worktable's lifting and lowering, and the adjustment of the detection mechanism's position using the moving component to measure the vertical deviation, specifically includes:

[0021] S51. Use the moving component to control the detection mechanism to move to the outermost edge of the worktable, and control the worktable to rise and fall, and record the maximum value on the outer edge;

[0022] S52. After recording, use the moving component to control the detection mechanism to move to the innermost side of the worktable, and control the worktable to rise and fall, and record the maximum value at the innermost side.

[0023] S53. Determine the vertical deviation of the worktable based on the maximum value on the outer side and the maximum value on the inner side.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] After the diamond wire slicing machine completes the worktable guide rail slider replacement operation, the surface orientation deviation detection device of this invention can be used to detect and calibrate the surface orientation of the worktable. The mounting assembly is fixedly installed at the bottom of the diamond wire slicing machine's worktable to secure the entire detection device for surface orientation deviation detection. After the detection device is fixed, the surface orientation deviation of the worktable is detected using the main roller shaft below the worktable as a reference. First, the position adjustment mechanism is used to adjust the detection mechanism to above the main roller shaft. Then, the moving assembly is used to control the forward and backward movement of the detection mechanism to detect the horizontal deviation of the worktable. Next, the position adjustment mechanism is used to adjust the detection mechanism to the side of the main roller shaft. Then, the moving assembly is used to move the detection mechanism to the outermost side of the worktable, controlling the worktable's rise and fall, and recording the maximum value on the outer side. Finally, the moving assembly is used to move the detection mechanism to the innermost side of the worktable, controlling the worktable's rise and fall, and recording the maximum value on the inner side. The vertical deviation of the worktable can be measured based on the maximum values ​​on the outer and inner sides. Therefore, there is no need to perform trial cutting of the crystal rod. The installation, movement and detection components enable accurate detection of the surface orientation deviation of the worktable, ensuring the long-term processing stability and consistency of the slicing machine. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the detection device for the orientation deviation of the diamond wire slicer according to the present invention.

[0027] Figure 2 This is a schematic diagram of the structure of the mobile component of the present invention.

[0028] Figure 3 This is a schematic diagram of the detection component of the present invention.

[0029] Figure 4 This is a flowchart of the method for adjusting the orientation deviation of the diamond wire slicer according to the present invention.

[0030] In the figure: worktable 10, main roller 20, mounting assembly 100, moving assembly 200, guide rail 210, slider 220, lead screw 230, drive motor 240, detection assembly 300, position adjustment mechanism 310, crossbar 311, upright 312, locking module 313, mounting base 314, detection mechanism 320. Detailed Implementation

[0031] The technical solutions and effects of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0032] Please refer to Figure 1 A detection device for the orientation deviation of a diamond wire slicer includes a mounting assembly 100, a moving assembly 200, and a detection assembly 300. The mounting assembly 100 is used to fix the entire detection device on the bottom of the worktable 10 of the diamond wire slicer. The moving assembly 200 is located below the mounting assembly 100. The detection assembly 300 includes a position adjustment mechanism 310 and a detection mechanism 320. The position adjustment mechanism 310 is located below the moving assembly 200, and the detection mechanism 320 is located at one end of the position adjustment mechanism 310. The position adjustment mechanism 310 is used to adjust the position of the detection mechanism 320, and the moving assembly 200 is used to drive the detection mechanism 320 to move back and forth to detect the orientation deviation.

[0033] After the diamond wire slicing machine completes the worktable guide rail slider replacement operation, the surface orientation deviation detection device of the present invention can be used to detect and calibrate the surface orientation of the worktable 10. The mounting assembly 100 is fixedly installed on the bottom of the worktable 10 of the diamond wire slicing machine to fix the entire detection device on the worktable 10 for surface orientation deviation detection. After the detection device is fixed, the surface orientation deviation of the worktable 10 is detected using the main roller shaft 20 below the worktable 10 as a reference. First, the position of the detection mechanism 320 is adjusted to above the main roller shaft 20 using the position adjustment mechanism 310. Then, the moving assembly 200 controls the forward and backward movement of the detection mechanism 320, and the horizontal deviation of the worktable 10 is detected through the detection mechanism 320. Next, the position adjustment mechanism 310 is used to adjust the position of the detection mechanism 320 to the side of the main roller 20. Then, the moving component 200 is used to move the detection mechanism 320 to the outermost side of the worktable, and the worktable is raised and lowered to record the maximum value on the outer side. Finally, the moving component 200 is used to move the detection mechanism 320 to the innermost side of the worktable, and the worktable is raised and lowered to record the maximum value on the inner side. The vertical deviation of the worktable 10 can be measured based on the maximum values ​​on the outer and inner sides. Therefore, there is no need to perform trial cutting of the crystal rod. The installation component 100, the moving component 200, and the detection component 300 achieve accurate detection of the surface orientation deviation of the worktable 10, ensuring the processing stability and consistency of the slicing machine during long-term operation.

[0034] In some embodiments, the mounting assembly 100 uses a workpiece plate, which is fixedly mounted to the worktable 10 via a detachable fixing device. For example, the workpiece plate has mounting holes, and the corresponding position on the bottom of the worktable 10 has threaded holes. Bolts are used to pass through the mounting holes and threaded holes to lock the worktable 10 to the mounting assembly 100. Another example is that the bottom of the worktable 10 has a through hole, and the workpiece plate has an inverted T-slot corresponding to the through hole in the worktable 10. A clamping screw passes through the through hole and engages with the inverted T-slot. Tightening the locking nut on top of the clamping screw compresses the spring, generating a large locking force to fix the worktable 10 and the workpiece plate together. Yet another example is that clamping arms are provided on the front and rear sides of the workpiece plate. A hydraulic structure is used to press the clamping arms onto the worktable 10, thereby pressing and fixing the workpiece plate to the bottom of the worktable 10. The above examples are merely illustrations, and the specific structure of the fixing device is not limited here. The workpiece plate can be exactly the same size as the bottom of the worktable 10 to increase the contact area between the workpiece plate and the worktable 10, thereby improving the stability of the moving component 200 and the detection component 300 during operation. Alternatively, the workpiece plate can be set to have the same length as the worktable 10, but a smaller width, with the workpiece plate positioned in the middle of the bottom of the worktable 10. This reduces the manufacturing cost of the mounting component 100 while still fulfilling its functional requirements.

[0035] Further, please see Figure 2 The moving component 200 includes a guide rail 210, a slider 220, a lead screw 230, and a drive motor 240. The guide rail 210 is disposed at the bottom of the mounting component 100, and its length direction is parallel to the Y-axis direction of the worktable 10. The lead screw 230 is disposed between the guide rails 210. The slider 220 is threadedly connected to the lead screw 230. The output shaft of the drive motor 240 is connected to one end of the lead screw 230, so that the drive motor 240 drives the lead screw 230 to rotate, thereby causing the slider 220 to move back and forth along the guide rail 210. Specifically, when the detection device of the present invention performs surface orientation deviation detection, it is necessary to control the detection component 300 to move back and forth along the length direction of the main roller shaft 20 to detect the positional relationship between the main roller shaft 20 and the worktable 10, thereby obtaining the surface orientation deviation of the worktable 10. By controlling the forward and reverse rotation of the drive motor 240, the lead screw 230 can be driven to rotate forward or reverse, causing the slider 220 to move forward or backward along the guide rail 210. This causes the detection component 300 below the slider 220 to move forward or backward along the length of the main roller shaft 20, thus detecting the distance deviation of the detection mechanism 320 on the outside and inside of the main roller shaft 20, and thereby obtaining the surface orientation deviation of the worktable 10.

[0036] Furthermore, the position adjustment mechanism 310 includes a lateral adjustment module and a longitudinal adjustment module. The lateral and longitudinal adjustment modules are arranged in a cross structure. The detection mechanism 320 is located at one end of the lateral adjustment module, so that the lateral position of the detection mechanism 320 can be adjusted by the lateral adjustment module, and the longitudinal position of the detection mechanism 320 can be adjusted by the longitudinal adjustment module. When it is necessary to detect the horizontal deviation of the worktable 10, the position of the detection mechanism 320 should be above the main roller shaft 20, and then it should be moved back and forth along the length of the main roller shaft 20. Therefore, the position of the detection mechanism 320 is first adjusted to be higher than the height of the main roller shaft 20 by the longitudinal adjustment module, and then the position of the detection mechanism 320 is adjusted to be above the main roller shaft 20 by the lateral adjustment module. When it is necessary to detect the vertical deviation of the worktable 10, the position of the detection mechanism 320 needs to be on the side of the main roller shaft 20. Therefore, the position of the detection mechanism 320 is adjusted to the side of the main roller shaft 20 by the lateral adjustment module. The position adjustment mechanism 310 is further provided with a mounting base 314, which is located on top of the longitudinal adjustment module to fix it to the bottom of the slider 220. As an example, the position adjustment mechanism 310 can adopt a cross slide structure, the lateral adjustment module can adopt a linear guide rail in the X-axis direction, and the longitudinal adjustment module can adopt a linear guide rail in the Z-axis direction. The longitudinal adjustment module and the lateral adjustment module are slidably arranged, and the detection mechanism 320 is slidably arranged with the lateral adjustment module. Thus, the detection mechanism 320 can be controlled manually or automatically to slide left and right along the X-axis or up and down along the Z-axis to achieve the position adjustment of the detection mechanism 320.

[0037] Further, please see Figure 3The horizontal adjustment module is a horizontal bar 311, the vertical adjustment module is a vertical bar 312, and the position adjustment mechanism also includes a locking module 313. The horizontal bar 311 and the vertical bar 312 are arranged perpendicularly to each other in a cross shape. The locking module 313 is connected to both the horizontal bar 311 and the vertical bar 312 to lock the horizontal bar 311 and the vertical bar 312 after the position of the detection mechanism 320 is adjusted. Specifically, the locking module 313 is respectively sleeved on the horizontal bar 311 and the vertical bar 312. When adjusting the position of the detection mechanism 320, the locking module 313 is first loosened, then the position of the horizontal bar 311 and the vertical bar 312 is moved so that the detection mechanism 320 at one end of the horizontal bar 311 reaches the designated position, and then the locking module 313 is locked to fix the position of the detection mechanism 320 in the X-axis and Z-axis directions. In some embodiments, the crossbar 311 can move up and down along the upright 312 to adjust the position of the detection mechanism 320 in the Z-axis direction. The crossbar 311 is designed as a telescopic structure, and the position of the detection mechanism 320 in the X-axis direction is adjusted by controlling the extension and retraction of the crossbar 311. The mounting base 314 is located at the top of the upright 312 and can employ a magnetic structure to adhere to the bottom of the slider 220, thereby facilitating the installation between the moving component 200 and the detection component 300.

[0038] Furthermore, when performing vertical direction detection, the detection device of the present invention needs to move the detection mechanism 320 to the outermost or innermost side of the worktable 10, and then control the worktable 10 to rise and fall, recording the maximum value detected by the detection mechanism 320 on the outermost or innermost side, and determining the vertical direction deviation based on the maximum value on the outermost and innermost side. Since the detection mechanism 320 moves back and forth via a slider 220 connected to it, the slider 220 may slide due to vibration or inertia when the worktable 10 is raised and lowered, causing the detection mechanism 320 to move and thus affecting its detection accuracy. Therefore, the present invention provides a locking mechanism on the slider 220. When performing vertical direction detection, when the detection mechanism 320 moves to the outermost or innermost side of the worktable 10, the locking mechanism is opened to lock the slider 220, preventing it from moving along the guide rail 210, thereby fixing the detection mechanism 320 in the outermost or innermost position. Then, the worktable 10 is raised and lowered to detect the accurate vertical direction deviation. In some embodiments, the slider 220 has a threaded hole, and the locking mechanism is a set screw. The set screw is inserted into the threaded hole, and by tightening it, its end directly presses against the side wall of the guide rail 210, locking the slider 220 by friction. In other embodiments, the locking mechanism can also be designed as a clamping member. The clamping member is connected to the slider 220 and is located between the slider 220 and the guide rail 210. By tightening screws or other means, the clamping member presses against the guide rail 210, thereby locking the slider 220.

[0039] Furthermore, the detection mechanism 320 is a dial indicator. A clamping sleeve is provided at one end of the crossbar 311. After passing the dial indicator's probe through the clamping sleeve, rotating the knob fixes the dial indicator to one end of the crossbar 311. The dial indicator's probe makes gentle contact with the surface of the main roller shaft 20. By moving the dial indicator, minute displacement deviations between the probe and the main roller shaft 20 can be detected, thereby enabling the detection of the surface orientation deviation of the worktable 10.

[0040] Please refer to Figure 4 The present invention also provides a method for adjusting the orientation deviation of a diamond wire slicer, which uses the diamond wire slicer orientation deviation detection device as described above, and includes the following steps:

[0041] S1. Install the detection device under the worktable 10 of the diamond wire slicer and fix the detection device using the mounting assembly 100;

[0042] S2. Using the main roller 20 on the left as a reference, the detection mechanism 320 is adjusted to the first position by the position adjustment mechanism 310, and the detection mechanism 320 is moved back and forth by the moving component 200 to measure the horizontal deviation.

[0043] S3. Adjust the horizontal position of the worktable 10 based on the horizontal deviation;

[0044] S4. After the horizontal deviation adjustment is completed, use the position adjustment mechanism 310 to adjust the detection mechanism 320 to the second position;

[0045] S5. Control the lifting and lowering of the worktable 10, and use the moving component 200 to adjust the position of the detection mechanism 320 to measure the vertical deviation;

[0046] S6. Adjust the vertical position of the worktable 10 based on the vertical deviation.

[0047] In a diamond wire slicing machine, the main roller is a key component for winding and driving the diamond wire. Its installation accuracy directly determines the slicing quality. During assembly, the main roller itself serves as a high-precision reference component. After replacing the guide rail slider, the core purpose of adjusting the diamond wire slicing machine is to restore the movement trajectory of the worktable 10, ensuring it remains absolutely parallel to the main roller shaft 20. Ultimately, the crystal rod is fed while fixed on the worktable, contacting the high-speed running wire mesh to complete the cutting. Therefore, the main roller is the ultimate reference for all adjustments. Thus, when using the aforementioned detection device for detection and adjustment, the main roller shaft 20 on the left side is used as the reference for detection. Specifically, the entire detection device is first fixed below the worktable 10 of the diamond wire slicing machine using the mounting assembly 100. Then, using the main roller 20 on the left as a reference, the detection mechanism 320 is adjusted to the first position using the position adjustment mechanism 310, and the moving component 200 is used to control the forward and backward movement of the detection mechanism 320 to measure the horizontal deviation; the horizontal position of the worktable 10 is adjusted based on the horizontal deviation; after the horizontal deviation is adjusted, the detection mechanism 320 is adjusted to the second position using the position adjustment mechanism 310; the worktable 10 is controlled to rise and fall, and the position of the detection mechanism 320 is adjusted using the moving component 200 to measure the vertical deviation; the vertical position of the worktable 10 is adjusted based on the vertical deviation. This, combined with the standardized operating steps of "measurement-calculation-adjustment-retest," completes the precise calibration of the surface orientation, allowing for debugging without trial cutting.

[0048] Furthermore, when detecting the horizontal deviation of the worktable 10, the measurement concerns whether the worktable 10 is tilted in the horizontal plane. This invention uses the left main roller shaft 20 as a reference and determines the position by comparing the outer and inner position readings at the same height. Therefore, the first position is above the left main roller shaft 20. When detecting the vertical deviation of the worktable 10, the measurement concerns whether the worktable 10 tilts or shifts during lifting and lowering. Therefore, the second position is to the right of the left main roller shaft 20.

[0049] Further, in step S2, the method of controlling the detection mechanism to move back and forth using the moving component to measure the horizontal deviation specifically includes: using the moving component 200 to move the detection mechanism 320 to the outermost side of the left main roller 20 and recording the outer data; then moving the detection mechanism 320 to the innermost side of the left main roller 20 and recording the inner data; and obtaining the horizontal deviation based on the outer and inner data. Since the worktable moves up and down during operation, it is relatively stationary in the horizontal plane, and thus the deviation relative to the main roller 20 reference, i.e., the horizontal deviation of the worktable 10, can be measured by moving the detection mechanism 320 back and forth. Specifically, first, the position of the detection mechanism 320, i.e., the dial indicator, is adjusted using the crossbar 311 and the vertical bar 312, so that the dial indicator is positioned above the main roller shaft 20 on the left. Then, the drive motor 240 is started to control the lead screw 230 to rotate, causing the slider 220 to move along the guide rail 210, moving the dial indicator to the outermost side of the main roller shaft 20, with the dial indicator's measuring rod making appropriate contact with and gently pressing against the surface of the main roller shaft 20. Next, the dial indicator's bezel is adjusted to zero. Immediately afterward, the drive motor 240 is started in reverse to control the lead screw 230 in reverse, causing the slider 220 to move along the guide rail 210, moving the dial indicator to the innermost side of the main roller shaft 20, and the value is recorded. Finally, the horizontal deviation is obtained based on the outer and inner data, and adjustments are made based on this deviation. For example, the outer value is 0mm, and the inner value is 1mm. Loosen the six M12 screws on the worktable, adjust the upper set screw on the outer side of the worktable downwards by 0.5mm, and tighten the screw with a 150N torque wrench; the horizontal adjustment is now complete. The speed of slider 220 should be controlled at 500-600mm / min.

[0050] Further, in step S5, the control table 10 is raised and lowered, and the position of the detection mechanism 320 is adjusted using the moving component 200 to measure the vertical deviation, specifically including:

[0051] S51. Use the moving component 200 to control the detection mechanism 320 to move to the outermost side of the worktable 10, and control the worktable 10 to rise and fall, and record the maximum value on the outer side.

[0052] S52. After recording, use the moving component 200 to control the detection mechanism 320 to move to the innermost side of the worktable 10, and control the worktable 10 to rise and fall, and record the maximum value of the inner side.

[0053] S53. Determine the vertical deviation of the worktable 10 based on the maximum value on the outer side and the maximum value on the inner side.

[0054] After the horizontal deviation of the worktable 10 is adjusted, the vertical deviation of the worktable 10 is then detected and adjusted. First, the positions of the crossbar 311 and the vertical bar 312 need to be adjusted so that the dial indicator moves to the right side of the left main roller shaft, and the measuring rod of the dial indicator maintains a position of gentle contact with the side of the main roller shaft. Then, the drive motor 240 is started to control the lead screw 230 to rotate, driving the slider 220 to move along the guide rail 210, so that the dial indicator is located at the outermost edge of the worktable 10. Next, the slider 220 is locked using the locking mechanism, and the worktable is manually raised and lowered on the operation screen to select and record the maximum value measured by the dial indicator. Next, the drive motor 240 is started to control the lead screw 230 to reverse, driving the slider 220 to move along the guide rail 210, so that the dial indicator is located at the innermost edge of the worktable 10, and the slider 220 is locked using the locking mechanism. The worktable is manually raised and lowered on the operation screen to select and record the maximum value measured by the dial indicator. During the lifting and lowering of the worktable, the maximum value measured by the dial indicator is actually the position where the dial indicator is closest to the side of the main roller shaft. Selecting the maximum value on the outer side and the maximum value on the inner side establishes a baseline. When there is no deviation in the vertical direction of the worktable 10, it theoretically means that the worktable 10 is parallel to this baseline; therefore, the maximum values ​​on the outer and inner sides are the same. The vertical deviation of the worktable can then be determined based on the difference between the outer and inner maximum values. This difference is the adjustment distance. When adjusting the vertical direction of the worktable 10, the screws on the worktable 10 need to be loosened, and the left and right set screws adjusted according to the adjustment distance. After adjustment, repeat the above steps until the values ​​of the outer and inner maximum values ​​are consistent, then tighten the worktable screws to complete the vertical adjustment of the worktable 10.

[0055] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the invention. Those skilled in the art will understand that implementing all or part of the above-described embodiments and making equivalent changes in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A device for detecting the orientation deviation of a diamond wire slicer, characterized in that, The device includes a mounting component, a moving component, and a detection component. The mounting component is used to fix the entire detection device to the bottom of the worktable of the diamond wire slicer. The moving component is located below the mounting component. The detection component includes a position adjustment mechanism and a detection mechanism. The position adjustment mechanism is located below the moving component, and the detection mechanism is located at one end of the position adjustment mechanism. The position adjustment mechanism is used to adjust the position of the detection mechanism, and the moving component is used to drive the detection mechanism to move back and forth to detect the surface orientation deviation.

2. The detection device for the orientation deviation of a diamond wire slicer according to claim 1, characterized in that, The moving component includes a guide rail, a slider, a lead screw, and a drive motor; the guide rail is disposed at the bottom of the mounting component, and the length direction of the guide rail is parallel to the Y-axis direction of the worktable; the lead screw is disposed between the guide rails, the slider is threadedly connected to the lead screw, and the output shaft of the drive motor is connected to one end of the lead screw, so as to drive the lead screw to rotate through the drive motor, thereby causing the slider to move back and forth along the guide rail.

3. The detection device for the orientation deviation of a diamond wire slicer according to claim 1, characterized in that, The position adjustment mechanism includes a lateral adjustment module and a longitudinal adjustment module; the lateral adjustment module and the longitudinal adjustment module are arranged in a cross structure, and the detection mechanism is located at one end of the lateral adjustment module so as to adjust the lateral position of the detection mechanism by the lateral adjustment module and adjust the longitudinal position of the detection mechanism by the longitudinal adjustment module.

4. The detection device for the orientation deviation of a diamond wire slicer according to claim 3, characterized in that, The lateral adjustment module is a horizontal bar, the longitudinal adjustment module is a vertical bar, and the position adjustment mechanism also includes a locking module; the horizontal bar and the vertical bar are arranged perpendicularly to each other in a cross shape, and the locking module is connected to both the horizontal bar and the vertical bar to lock the horizontal bar and the vertical bar after the position of the detection mechanism is adjusted.

5. The detection device for the orientation deviation of a diamond wire slicer according to claim 2, characterized in that, The slider is equipped with a locking mechanism to lock the slider in place.

6. The detection device for the orientation deviation of a diamond wire slicer according to any one of claims 1-5, characterized in that, The testing institution is a dial gauge.

7. A method for adjusting the orientation deviation of a diamond wire slicer, characterized in that, The detection device for the orientation deviation of a diamond wire slicer as described in any one of claims 1-6 includes the following steps: S1. Install the detection device under the worktable of the diamond wire slicer and fix the detection device using the mounting components; S2. Using the main roller shaft on the left as a reference, the detection mechanism is adjusted to the first position using the position adjustment mechanism, and the detection mechanism is moved back and forth using the moving component to measure the horizontal deviation. S3. Adjust the horizontal position of the worktable based on the horizontal deviation; S4. After the horizontal deviation is adjusted, use the position adjustment mechanism to adjust the detection mechanism to the second position; S5. Control the lifting and lowering of the worktable, and use the moving component to adjust the position of the detection mechanism to measure the vertical deviation; S6. Adjust the vertical position of the worktable based on the vertical deviation.

8. The method for adjusting the orientation deviation of a diamond wire slicer according to claim 7, characterized in that, The first position is above the left main roller shaft; the second position is to the right of the left main roller shaft.

9. The method for adjusting the orientation deviation of a diamond wire slicer according to claim 8, characterized in that, In step S2, the step of using a moving component to control the detection mechanism to move back and forth to measure the horizontal deviation specifically includes: using the moving component to move the detection mechanism to the outermost side of the left main roller shaft and recording the outer side data; then moving the detection mechanism to the innermost side of the left main roller shaft and recording the inner side data; and obtaining the horizontal deviation based on the outer side data and the inner side data.

10. The method for adjusting the orientation deviation of a diamond wire slicer according to claim 9, characterized in that, In step S5, the control table is raised and lowered, and the position of the detection mechanism is adjusted using the moving component to measure the vertical deviation, specifically including: S51. Use the moving component to control the detection mechanism to move to the outermost edge of the worktable, and control the worktable to rise and fall, and record the maximum value on the outer edge; S52. After recording, use the moving component to control the detection mechanism to move to the innermost side of the worktable, and control the worktable to rise and fall, and record the maximum value at the innermost side. S53. Determine the vertical deviation of the worktable based on the maximum value on the outer side and the maximum value on the inner side.

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