Dust separation mechanism, dust separation method, and cleanliness measuring device

Abstract

The present application belongs to the technical field of cleanliness measurement, and discloses a dust isolation mechanism, a dust isolation method and a cleanliness measurement device. The dust isolation mechanism comprises a rack, a first isolation piece and a second isolation piece. The rack is fixedly connected with a three-coordinate moving mechanism. The rack is provided with a first opening hole for avoiding the three-coordinate moving mechanism. The first isolation piece is arranged outside a horizontal moving assembly of the three-coordinate moving mechanism and cooperates with the rack to form a first isolation cavity. The first isolation piece is provided with a second opening hole for avoiding the three-coordinate moving mechanism. The second isolation piece is fixed to an output end of the horizontal moving assembly and covers the second opening hole. A first gap is formed between the second isolation piece and the top of the first isolation piece. The first isolation piece and the second isolation piece can isolate the particulate matters generated when the horizontal moving assembly moves from the product. No new particulate matters are generated when the second isolation piece moves. The present application can isolate part of the particulate matters generated when the three-coordinate moving mechanism moves from the product, thereby reducing the influence of the particulate matters on the detection result.

Description

Technical Field

[0001] This invention relates to the field of cleanliness measurement technology, and in particular to a dust-proof mechanism, a dust-proof method, and a cleanliness measurement device. Background Technology

[0002] When inspecting whether the surface cleanliness of a product meets standards during transport, an XYZ platform, also known as a coordinate measuring machine (CMM), is used to circulate the product. During this movement, the surface cleanliness is checked, ensuring that every surface of the product is inspected. Because surface cleanliness needs to be measured, all spare parts that come into direct or indirect contact with the product must be thoroughly cleaned to remove static particles adhering to their surfaces, preventing them from being dispersed into the air by the platform's airflow and causing dynamic dust generation. Furthermore, the CMM itself generates new particles during movement due to friction, leading to dynamic dust generation. For example, the linear motor module itself does not generate dust, but the guiding mechanical components do. Similarly, ordinary lead screw modules also generate new particles during movement. These particles need to be isolated from the product to minimize their impact on the inspection results.

[0003] Existing technologies primarily use bellows covers and steel belt protective sleeves to enclose the coordinate measuring machine (CMM) moving mechanism, preventing damage from harsh external environments such as dust and extending its service life. However, during the movement of the CMM moving mechanism, the bellows cover and steel belt protective sleeve expand and contract. During this process, and as they age, the bellows cover and steel belt protective sleeve generate particulate matter, which becomes a new source of dust during the CMM's movement. Therefore, there is an urgent need for a dust-proof mechanism, a dust-proof method, and a cleanliness measurement device to solve the aforementioned technical problems. Summary of the Invention

[0004] The purpose of this invention is to provide a dust-proof mechanism, a dust-proof method, and a cleanliness measurement device, which can isolate some of the particulate matter generated by the coordinate measuring machine during its movement from the product, thereby reducing the impact of particulate matter on the test results.

[0005] To achieve this objective, the present invention adopts the following technical solution: On the one hand, a dust-proof mechanism is provided, comprising: A frame is fixedly connected to a three-coordinate moving mechanism, and the frame is provided with a first opening to avoid the three-coordinate moving mechanism; The first isolation member is provided outside the horizontal moving component of the three-coordinate moving mechanism and forms a first isolation cavity with the frame. The first isolation member is provided with a second opening to avoid the three-coordinate moving mechanism. A second isolator is fixed to the output end of the horizontal moving component and covers the second opening, and a first gap exists between the top of the second isolator and the top of the first isolator.

[0006] In some possible implementations, the second isolator is sleeved outside and fixed to the output end of the horizontal moving component, and the second isolator covers the second opening.

[0007] In some possible implementations, the dust-proof mechanism further includes a third isolation member, which is sleeved on the vertical moving component of the three-coordinate moving mechanism and fixed to the output end of the vertical moving component. The bottom surface of the third isolation member is lower than the top surface of the second isolation member, and there is a second gap between the inner wall of the third isolation member and the outer wall of the second isolation member.

[0008] In some possible implementations, the second isolator includes a sleeve portion and a cover portion, the sleeve portion being sleeved and snapped onto the output end of the horizontal moving component, the cover portion being disposed around the outer edge of one end of the sleeve portion, and the inner wall of the third isolator having the second gap between it and the outer wall of the sleeve portion.

[0009] In some possible implementations, the dust-proof mechanism further includes an exhaust fan fixed to the frame, the sleeve being a hollow tube, one end of which communicates with the inner cavity of the third isolation member, and the other end of which communicates with the first isolation cavity; and / or, When the output end of the horizontal moving component is at its extreme position, the covering portion can cover the entire second opening.

[0010] In some possible implementations, the size of the first gap is less than 20 mm, and the size of the second gap is less than 20 mm.

[0011] In some possible implementations, the dust-proof mechanism further includes a machine cover, which covers the three-coordinate moving mechanism and, together with the frame, forms a second isolation cavity, wherein both the first isolation member and the second isolation member are located within the second isolation cavity; and / or, One end of the second isolator is located inside the first isolation cavity and covers the second opening.

[0012] On the one hand, a dust-proofing method is provided, including: A three-coordinate moving mechanism is mounted on a frame. A first isolating member is placed over the horizontal moving component of the three-coordinate moving mechanism so that the first isolating member and the frame enclose a first isolation cavity. A second isolating member is mounted on the output end of the horizontal moving component, and the second isolating member covers the second opening of the first isolating member, with a first gap between the top of the second isolating member and the first isolating member.

[0013] In some possible implementations, the dust-proofing method further includes: fitting a third isolation member around the vertical moving component of the three-coordinate moving mechanism and installing it at the output end of the vertical moving component, such that the height of the bottom surface of the third isolation member is lower than the height of the top surface of the fitting portion of the second isolation member, and creating a second gap between the inner wall of the third isolation member and the outer wall of the fitting portion; controlling an exhaust fan to exhaust air, so that dust particles enter the frame and are discharged outside the frame through the inner cavity of the third isolation member, the inner cavity of the fitting portion, the first isolation cavity, and the first opening of the frame.

[0014] On the one hand, a cleanliness measuring device is provided, including a three-coordinate moving mechanism and a dust-proofing mechanism as described in any of the above embodiments. The three-coordinate moving mechanism is fixedly connected to the frame. The three-coordinate moving mechanism includes a horizontal moving component. A first isolation member is disposed outside the horizontal moving component, and a second isolation member is fixed to the output end of the horizontal moving component.

[0015] The beneficial effects of this invention are: The dust-proof mechanism provided by this invention includes a frame, a first isolation member, and a second isolation member. The product to be tested is fixed to the output end of a coordinate measuring machine (CMM) moving mechanism. During the movement of the CMM moving mechanism, the first isolation member covers the horizontal moving component of the CMM moving mechanism and forms a first isolation cavity with the frame. This initially isolates the particulate matter generated during the movement of the horizontal moving component from the product, reducing the impact of particulate matter on the product testing results. By providing a second opening in the first isolation member to avoid obstructing the CMM moving mechanism, some particulate matter may fall onto the product through the second opening. The second isolation member moves synchronously with the output end of the horizontal moving component, covering the second opening while moving, further isolating the particulate matter generated during the movement of the horizontal moving component from the product. Furthermore, a first gap exists between the top of the second isolation member and the top of the first isolation member, preventing friction between the second isolation member and the first isolation member during movement, thus preventing the generation of new particulate matter and preventing it from becoming a new dust source during the movement of the CMM moving mechanism. Therefore, this invention can isolate some of the particulate matter generated during the movement of the CMM moving mechanism from the product, reducing the impact of particulate matter on the testing results. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the cleanliness measuring device provided by the present invention; Figure 2 This is a schematic diagram of the cleanliness measuring device (without the cover) and the product provided by this invention; Figure 3 This is a structural schematic diagram of the frame, three-coordinate moving mechanism, and product involved in this invention; Figure 4 This is a cross-sectional view of some of the cleanliness measuring devices and products provided by the present invention; Figure 5 This is a cross-sectional view of the machine cover, first isolation component, second isolation component, third isolation component, particulate matter detection probe, exhaust fan, part of the frame and product involved in this invention.

[0017] In the picture: 1. Frame; 11. First opening; 2. First isolation element; 21. Second opening; 3. Second isolation element; 31. Sleeve part; 32. Cover part; 4. Third isolation element; 5. Exhaust fan; 6. Cover; 10. First isolation chamber; 20. Second isolation chamber; 100. Three-coordinate moving mechanism; 101. Horizontal moving assembly; 1011. First moving part; 1012. Second moving part; 1013. Support assembly; 10131. Support; 102. Vertical moving assembly; 1021. T-shaped seat; 10211. Horizontal part; 10212. Vertical part; 200. Particulate matter detection probe; 1000, Products. Detailed Implementation

[0018] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0019] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0020] In the description of this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0021] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] like Figures 1 to 5 As shown, the present invention provides a dust-proof mechanism, including a frame 1, a first isolation member 2, and a second isolation member 3. The frame 1 is fixedly connected to a three-coordinate moving mechanism 100, as shown in the figure. Figure 4 As shown, the frame 1 has a first opening 11 to avoid the coordinate measuring machine 100; the first isolation member 2 covers the horizontal moving component 101 of the coordinate measuring machine 100 and forms a first isolation cavity 10 with the frame 1, and the first isolation member 2 has a second opening 21 to avoid the coordinate measuring machine 100; the second isolation member 3 is fixed to the output end of the horizontal moving component 101 and covers the second opening 21, and there is a first gap between the top of the second isolation member 3 and the first isolation member 2. Optionally, in this embodiment, as... Figure 3 and Figure 4 As shown, the three-coordinate moving mechanism 100 includes a horizontal moving component 101 and a vertical moving component 102. The horizontal moving component 101 includes a first moving part 1011 and a second moving part 1012. The first moving part 1011 is fixed to the frame 1 and can drive the second moving part 1012 to move along the X direction. The output end of the second moving part 1012 is connected to a support component 1013. The vertical moving component 102 is fixed to the support component 1013 and can drive the vertical moving component 102 to move along the Y direction. The output end of the vertical moving component 102 can drive the product 1000 to move along the Z direction. Optionally, the first opening 11 is used to avoid the vertical moving component 102, the second opening 21 is used to avoid the support component 1013, and the second isolator 3 is fixed to the support component 1013.

[0023] The product 1000 to be tested is fixed at the output end of the coordinate measuring machine 100. During the movement of the coordinate measuring machine 100, since the first isolation member 2 is covered outside the horizontal moving component 101 of the coordinate measuring machine 100 and forms a first isolation cavity 10 with the frame 1, the particles generated during the movement of the horizontal moving component 101 can be initially isolated from the product 1000, reducing the impact of particles on the detection results of the product 1000. By setting a second opening 21 in the first isolation member 2 to avoid the coordinate measuring machine 100, since some particles may fall onto the product 1000 through the second opening 21, by setting a second isolation member 3, the second isolation member 3 can move synchronously with the output end of the horizontal moving component 101, covering the second opening 21 while moving, thereby achieving further isolation between the particles generated during the movement of the horizontal moving component 101 and the product 1000. Furthermore, a first gap exists between the top of the second isolation member 3 and the top of the first isolation member 2, preventing the second isolation member 3 from generating friction with the first isolation member 2 during movement. This prevents the generation of new particulate matter and avoids it becoming a new dust source during the movement of the coordinate measuring machine 100. Therefore, this invention can isolate some of the particulate matter generated by the coordinate measuring machine 100 during its movement from the product 1000, reducing the impact of particulate matter on the detection results.

[0024] Optionally, in this embodiment, the dust-proof mechanism further includes a cover 6, which covers the coordinate measuring machine 100 and forms a second isolation cavity 20 with the frame 1. The first isolation member 2 and the second isolation member 3 are both located within the second isolation cavity 20. By providing the cover 6, the entire coordinate measuring machine 100 and the product 1000 can be isolated from the external environment, which can refer to a cleanroom, preventing dust and other particulate matter from adhering to the product 1000 and affecting the test results. Optionally, the cover 6 includes four first side plates and one first top plate. The four first side plates are respectively fixed around the first top plate and are all fixed to the frame 1. Furthermore, in this embodiment, as... Figure 4 As shown, the particulate matter detection probe 200 of the cleanliness measurement device is inserted through and fixed to the first top plate. The particulate matter detection probe 200 is used to detect the surface cleanliness of the product 1000.

[0025] Optionally, in this embodiment, one end of the second isolator 3 is located inside the first isolation cavity 10 and covers the second opening 21. This arrangement improves the performance of blocking particulate matter and saves the vertical space occupied by the first isolator 2 and the second isolator 3. In other embodiments, one end of the second isolator 3 is located outside the first isolator 2 and covers the second opening 21.

[0026] Optionally, in this embodiment, the second isolator 3 is sleeved outside and fixed to the output end of the horizontal moving assembly 101, and the second isolator 3 covers the second opening 21. Sleeving the second isolator 3 outside the output end of the horizontal moving assembly 101 facilitates determining the installation position of the second isolator 3 during installation, and also covers the output end of the horizontal moving assembly 101, reducing the possibility of particulate matter generated by the horizontal moving assembly 101 passing through the output end outside the first isolator 2 and contacting the product 1000, thus affecting the test results.

[0027] Optionally, in this embodiment, the dust-proofing mechanism further includes a third isolation member 4. The third isolation member 4 is sleeved outside the vertical moving component 102 of the three-coordinate moving mechanism 100 and fixed to the output end of the vertical moving component 102. The height of the bottom surface of the third isolation member 4 is lower than the height of the top surface of the second isolation member 3, and there is a second gap between the inner wall of the third isolation member 4 and the outer wall of the second isolation member 3. With this configuration, when the output end of the vertical moving component 102 moves, the third isolation member 4 can move vertically relative to the second isolation member 3. The third isolation member 4 can isolate the particulate matter generated when the output end of the vertical moving component 102 moves from the product 1000, reducing the impact of particulate matter on the detection results of the product 1000. The height of the bottom surface of the third isolation member 4 is lower than the height of the top surface of the second isolation member 3, so that the third isolation member 4 and the second isolation member 3 partially overlap, resulting in a good isolation effect. A second gap exists between the inner wall of the third isolator 4 and the outer wall of the second isolator 3, preventing friction between the third isolator 4 and the second isolator 3 during vertical movement, thus preventing the generation of new particulate matter and its emergence as a new dust source during the movement of the three-coordinate moving mechanism 100. Furthermore, when the output end of the vertical moving assembly 102 is at its upper limit position, the height of the bottom surface of the third isolator 4 is also lower than the height of the top surface of the second isolator 3. Optionally, as... Figure 5 As shown, the third spacer 4 is a hollow tube, and the second gap between the inner wall of the third spacer 4 and the outer peripheral wall of the sleeve portion 31 is an annular gap. Furthermore, as... Figure 4 As shown, the output end of the vertical moving component 102 is connected to a T-shaped seat 1021. The T-shaped seat 1021 includes a horizontal part 10211 and a vertical part 10212. The vertical part 10212 is fixed to the bottom end of the horizontal part 10211, and the top end of the third isolator 4 is fixed to the bottom end of the horizontal part 10211. The top end of the horizontal part 10211 is used to snap the product 1000.

[0028] Optionally, in this embodiment, as Figure 2 , Figure 4 and Figure 5As shown, the second isolating member 3 includes a sleeve portion 31 and a covering portion 32. The sleeve portion 31 is sleeved and snapped onto the output end of the horizontal moving assembly 101, and the covering portion 32 is disposed around the outer edge of one end of the sleeve portion 31. A second gap exists between the inner wall of the third isolating member 4 and the outer wall of the sleeve portion 31. The sleeve portion 31 snaps onto the output end of the horizontal moving assembly 101, which saves the installation structure required for installing the sleeve portion 31 at the output end of the horizontal moving assembly 101, thus facilitating installation. Specifically, as... Figure 3 As shown, the support assembly 1013 includes a support 10131, and the sleeve portion 31 is sleeved and snapped onto the outer wall of the support 10131. Optionally, the first isolation member 2 includes four second side plates and a second top plate. The four second side plates are respectively fixed around the second top plate and are all fixed to the frame 1. This arrangement simplifies the structure of the first isolation member 2 and facilitates processing and manufacturing. Specifically, the second top plate has a through hole, and the bottom of the second top plate has an annular protrusion. The annular protrusion surrounds the outer periphery of the through hole, and the through hole and the inner cavity of the annular protrusion together form a second opening 21. There is a first gap between the bottom wall of the annular protrusion and the top wall of the covering portion 32.

[0029] Optionally, in this embodiment, as Figure 4 As shown, the dust-proofing mechanism also includes an exhaust fan 5, which is fixed to the frame 1. The sleeve part 31 is a hollow tube, with one end of the sleeve part 31 communicating with the inner cavity of the third isolation member 4 and the other end of the sleeve part 31 communicating with the first isolation cavity 10. This configuration increases the opening area at the top of the sleeve part 31. When the exhaust fan 5 exhausts air, the dust particles generated by the three-coordinate moving mechanism 100 can pass through the inner cavity of the third isolation member 4, the inner cavity of the sleeve part 31, the first isolation cavity 10, and the first opening 11 into the frame 1 and then out of the frame 1 to the external environment, preventing the dust particles from floating. This configuration, with a fan inside the frame 1, prevents the dust particles from floating in the inner cavity of the third isolation member 4 and also prevents the dust particles in the first isolation cavity 10 from floating. It has a high degree of integration and further reduces the impact of particulate matter on the detection results of the product 1000.

[0030] Optionally, when the output end of the horizontal moving component 101 is at its extreme position, the second isolator 3 can cover the entire second opening 21. This configuration ensures that the second isolator 3 always covers the entire second opening 21, improving the isolation effect. In other embodiments, when the output end of the horizontal moving component 101 is at its extreme position, the second isolator 3 can cover a portion of the second opening 21.

[0031] Optionally, the size of the first gap is less than 20mm, that is, Figure 5 L1 is less than 20mm, and the size of the second gap is less than 20mm, that is, Figure 5The first gap is less than 20mm. This smaller gap prevents friction between the top of the second separator 3 and the top of the first separator 2, making it difficult for particles to enter the second separator 20 from the first separator 10. Similarly, the second gap is less than 20mm. This smaller gap prevents friction between the inner wall of the third separator 4 and the outer wall of the second separator 3, making it difficult for particles to enter the second separator 20 from the inner cavity of the third separator 4.

[0032] The present invention also provides a dust-proofing method, comprising: The coordinate measuring machine 100 is mounted on the frame 1. The first isolation member 2 is placed over the horizontal moving component 101 of the coordinate measuring machine 100 so that the first isolation member 2 and the frame 1 enclose to form a first isolation cavity 10. The second isolation member 3 is mounted on the output end of the horizontal moving component 101, and the second isolation member 3 covers the second opening 21 of the first isolation member 2, and there is a first gap between the top of the second isolation member 3 and the first isolation member 2.

[0033] By using the above-mentioned dust-proofing method, some of the particulate matter generated by the coordinate measuring machine 100 during its movement can be isolated from the product 1000, thereby reducing the impact of particulate matter on the test results.

[0034] Optionally, the dust isolation method further includes: fitting a third isolation member 4 around the vertical moving component 102 of the coordinate measuring machine 100 and installing it at the output end of the vertical moving component 102, such that the height of the bottom surface of the third isolation member 4 is lower than the height of the top surface of the fitting portion 31 of the second isolation member 3, and creating a second gap between the inner wall of the third isolation member 4 and the outer wall of the fitting portion 31; controlling the exhaust fan 5 to exhaust air, allowing dust particles to enter the frame 1 and exit the frame 1 through the inner cavity of the third isolation member 4, the inner cavity of the fitting portion 31, the first isolation cavity 10, and the first opening 11 of the frame 1. Through the above arrangement, the third isolation member 4 can isolate the particles generated when the output end of the vertical moving component 102 moves from the product 1000, reducing the impact of particles on the detection results of the product 1000. The exhaust fan 5 can prevent the floating of dust particles in the inner cavity of the third isolation member 4 and also prevent the floating of dust particles in the first isolation cavity 10, further reducing the impact of particles on the detection results of the product 1000.

[0035] For example, the dust-proofing method specifically includes: S1. While assembling the three-coordinate moving mechanism 100, the second isolation member 3 is installed at the output end of the horizontal moving component 101, and the third isolation member 4 is sleeved on the outside of the vertical moving component 102 of the three-coordinate moving mechanism 100 and installed at the output end of the vertical moving component 102. Then, the three-coordinate moving mechanism 100 is installed on the frame 1. S2. The first isolation member 2 is placed over the horizontal moving component 101 of the three-coordinate moving mechanism 100 so that the first isolation member 2 and the frame 1 enclose to form the first isolation cavity 10. S3. The machine cover 6 is placed outside the three-coordinate moving mechanism 100 and the product 1000 and is enclosed with the frame 1 to form a second isolation cavity 20; S4. Control the exhaust fan 5 to exhaust the dust particles through the inner cavity of the third isolation member 4, the inner cavity of the sleeve portion 31 of the second isolation member 3, the first isolation cavity 10 and the first opening 11 of the frame 1, so that the dust particles enter the frame 1 and are discharged outside the frame 1.

[0036] The present invention also provides a cleanliness measuring device, including a three-coordinate moving mechanism 100 and the aforementioned dust-proofing mechanism. The three-coordinate moving mechanism 100 is fixedly connected to the frame 1. The three-coordinate moving mechanism 100 includes a horizontal moving component 101, a first isolation member 2 covering the horizontal moving component 101, and a second isolation member 3 fixed to the output end of the horizontal moving component 101. Through the above-mentioned cleanliness measuring device, some particulate matter generated by the three-coordinate moving mechanism 100 during its movement can be isolated from the product 1000, reducing the influence of particulate matter on the detection results. Furthermore, optionally, the first moving component 1011 of the horizontal moving component 101 includes a lead screw structure, a linear motor, or a cylinder to drive the second moving component 1012 to move along the Y direction. The second moving component 1012 of the horizontal moving component 101 includes a lead screw structure, a linear motor, or a cylinder to drive the vertical moving component 102 to move along the Y direction. The vertical moving component 102 includes a lead screw structure, a linear motor, or a cylinder to drive the T-shaped seat 1021 to move along the Z direction.

[0037] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A dust-proof mechanism, characterized in that, include: A frame is fixedly connected to a three-coordinate moving mechanism, and the frame is provided with a first opening to avoid the three-coordinate moving mechanism; The first isolation member is provided outside the horizontal moving component of the three-coordinate moving mechanism and forms a first isolation cavity with the frame. The first isolation member is provided with a second opening to avoid the three-coordinate moving mechanism. A second isolator is fixed to the output end of the horizontal moving component and covers the second opening, and a first gap exists between the top of the second isolator and the top of the first isolator.

2. The dust-proof mechanism according to claim 1, characterized in that, The second isolator is sleeved outside the output end of the horizontal moving component and fixed to the output end of the horizontal moving component, and the second isolator covers the second opening.

3. The dust-proof mechanism according to claim 2, characterized in that, The dust-proof mechanism further includes a third isolation component, which is sleeved on the vertical moving component of the three-coordinate moving mechanism and fixed to the output end of the vertical moving component. The height of the bottom surface of the third isolation component is lower than the height of the top surface of the second isolation component, and there is a second gap between the inner wall of the third isolation component and the outer wall of the second isolation component.

4. The dust-proof mechanism according to claim 3, characterized in that, The second isolating member includes a sleeve portion and a covering portion. The sleeve portion is sleeved and snapped onto the output end of the horizontal moving component. The covering portion is disposed around the outer edge of one end of the sleeve portion. The inner wall of the third isolating member and the outer wall of the sleeve portion have the second gap.

5. The dust-proof mechanism according to claim 4, characterized in that, The dust-proof mechanism further includes an exhaust fan fixed to the frame. The sleeve is a hollow tube, one end of which communicates with the inner cavity of the third isolation member, and the other end of which communicates with the first isolation cavity; and / or, When the output end of the horizontal moving component is at its extreme position, the covering portion can cover the entire second opening.

6. The dust-proof mechanism according to claim 3, characterized in that, The size of the first gap is less than 20 mm, and the size of the second gap is less than 20 mm.

7. The dust-proof mechanism according to claim 1, characterized in that, The dust-proof mechanism also includes a machine cover, which is provided outside the three-coordinate moving mechanism and forms a second isolation cavity with the machine frame. The first isolation component and the second isolation component are both located inside the second isolation cavity. And / or, One end of the second isolator is located inside the first isolation cavity and covers the second opening.

8. A dust-proofing method, characterized in that, include: A three-coordinate moving mechanism is mounted on a frame. A first isolating member is placed over the horizontal moving component of the three-coordinate moving mechanism so that the first isolating member and the frame enclose a first isolation cavity. A second isolating member is mounted on the output end of the horizontal moving component, and the second isolating member covers the second opening of the first isolating member, with a first gap between the top of the second isolating member and the first isolating member.

9. The dust-proofing method according to claim 8, characterized in that, The dust-proofing method further includes: fitting a third isolation component outside the vertical moving component of the three-coordinate moving mechanism and installing it at the output end of the vertical moving component, such that the height of the bottom surface of the third isolation component is lower than the height of the top surface of the fitting portion of the second isolation component, and creating a second gap between the inner wall of the third isolation component and the outer wall of the fitting portion; controlling the exhaust fan to exhaust air, so that dust particles enter the frame and are discharged outside the frame through the inner cavity of the third isolation component, the inner cavity of the fitting portion, the first isolation cavity, and the first opening of the frame.

10. A cleanliness measuring device, characterized in that, The system includes a three-coordinate moving mechanism and a dust-proofing mechanism as described in any one of claims 1-7. The three-coordinate moving mechanism is fixedly connected to the frame. The three-coordinate moving mechanism includes a horizontal moving component. A first isolation member is disposed outside the horizontal moving component, and a second isolation member is fixed to the output end of the horizontal moving component.

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