Intelligent extraction separation and recycling device of effective components in photoetching developing waste liquid

Abstract

The application provides an intelligent extraction separation and recycling device for effective components in photoetching developing waste liquid, which comprises an extraction tank and a processing mechanism, wherein the bottom end of the extraction tank is provided with supporting legs; the processing mechanism comprises a dispersion assembly and a gap discharging assembly, and the dispersion assembly is arranged on the extraction tank; the intelligent extraction separation and recycling device for effective components in photoetching developing waste liquid has the advantages that the waste liquid and the extraction agent can be simultaneously conveyed into the movable rod by arranging the dispersion assembly, the front pre-mixing and the rear secondary stirring of the liquid medicine are realized by utilizing the turbulence of the cross rod, the mixing efficiency and the uniformity of mixing are improved, meanwhile, the first stirring rod and the second stirring rod are driven to deflect by utilizing the transmission of the reciprocating screw rod, the link plate and the movable rod, the stirring assembly can stir the upper and lower layers, the center and the different areas of the side wall in the stirring cavity, and the mixing uniformity of the photoetching developing waste liquid and the extraction medicine is further improved.

Description

Technical Field

[0001] This invention relates to the field of waste liquid recycling and treatment technology, and in particular to an intelligent extraction, separation and reuse device for effective components in photolithography and developing waste liquid. Background Technology

[0002] Photolithography is a crucial process that transforms the latent image formed by photoresist on a wafer surface after exposure into a visible physical circuit pattern. By utilizing the selective dissolution effect of the developer, the exposed areas of the positive resist or the unexposed areas of the negative resist are removed separately, replicating the precise pattern structure of the photomask and providing a reliable pattern template for subsequent semiconductor processes such as etching, thin film deposition, and ion implantation. The photolithography process continuously generates waste liquid, which still contains a large number of effective functional components. Direct discharge would waste valuable reagent resources; therefore, extraction, separation, and recycling of the developing waste liquid are necessary.

[0003] Currently, existing photolithography wastewater extraction, separation, and reuse devices mainly use mechanical stirring with a stirring shaft to break the interfacial tension between the aqueous wastewater and the organic extraction solvent, promoting thorough mixing and contact between the two phases to ensure the sufficiency and uniformity of the extraction and separation process. However, existing equipment relies solely on a single-shaft stirring structure to complete the mixing and extraction work, which easily leads to problems such as uneven mixing of the media and insufficient mass transfer in certain areas. To ensure the overall extraction and separation effect, the equipment needs to extend the stirring reaction time, resulting in low overall operating efficiency. Summary of the Invention

[0004] The present invention aims to at least partially solve one of the technical problems in the above-mentioned technologies.

[0005] Therefore, one objective of this invention is to provide an intelligent extraction, separation, and reuse device for effective components in photolithography development waste liquid. This device can simultaneously transport the waste liquid and extractant into a movable rod, and utilize the turbulence of the crossbar to achieve pre-mixing of the liquid and secondary stirring afterward, thereby improving mixing efficiency and uniformity.

[0006] To achieve the above objectives, the first aspect of the present invention provides an intelligent extraction, separation, and reuse device for effective components in photolithography development waste liquid, comprising an extraction tank and a processing mechanism, wherein the bottom end of the extraction tank is provided with a support leg; the processing mechanism includes a dispersion component and a gap feeding component, wherein the dispersion component is disposed on the extraction tank, and the output end of the dispersion component extends into the internal cavity of the extraction tank; the gap feeding component is movably connected to the extraction tank through the dispersion component.

[0007] In addition, the intelligent extraction, separation and reuse device for effective components in photolithography development waste liquid proposed above according to the present invention may also have the following additional technical features:

[0008] Specifically, a settling chamber is provided at the bottom of the extraction tank, and a stirring chamber is provided at the top of the extraction tank. The stirring chamber is connected to the settling chamber, and the output end of the dispersion component is located in the stirring chamber.

[0009] Specifically, the dispersion assembly includes a rotating tube, a movable rod, a bushing, multiple sets of stirring components, and a driving assembly. The rotating tube is movably connected to the top of the extraction tank, with one end extending into the stirring chamber. The movable rod is movably connected inside the rotating tube, with both ends extending outwards. The bushing is nested at the bottom protruding end of the movable rod. Multiple sets of stirring components are evenly spaced on the outer wall of the movable rod, with the ends of the stirring components furthest from the movable rod connected to the bushing. The driving assembly is located at the top of the extraction tank and is connected to the rotating tube.

[0010] Specifically, a cavity is provided in the middle of the movable rod, and multiple crossbars are arranged at equal intervals in the cavity.

[0011] Specifically, the bushing is provided with multiple water outlet holes at equal intervals, and the water outlet holes are connected to the cavity.

[0012] Specifically, the stirring assembly includes a first stirring rod and a second stirring rod, wherein the first stirring rod is movably connected to the outer wall of the rotating tube; the second stirring rod is movably connected to the outer wall of the bushing, and one end of the second stirring rod away from the bushing is connected to the other end of the first stirring rod.

[0013] Specifically, the drive assembly includes a bracket, a drive component, a reciprocating screw, a first pulley, and a second pulley. The bracket is disposed at the top of the extraction tank; the drive component is disposed on the bracket; the reciprocating screw is movably connected to the top of the extraction tank, and one end of the reciprocating screw extends through the bracket and is connected to the output end of the drive component; the first pulley is nested on the outer wall of the reciprocating screw; the second pulley is nested on the outer wall of the rotating tube, and the second pulley is connected to the first pulley via a belt.

[0014] Specifically, the gap feeding assembly includes a connecting plate and a sealing element, wherein the connecting plate is sleeved on the movable rod, and the end of the connecting plate away from the movable rod is connected to the reciprocating lead screw; the sealing element is disposed at the bottom end of the movable rod.

[0015] Specifically, the sealing element includes a first sealing plate, a support shaft, and a second sealing plate, wherein the first sealing plate is disposed at the bottom end of the movable rod; the support shaft is disposed at the end of the first sealing plate away from the movable rod; and the second sealing plate is disposed at the end of the support shaft away from the first sealing plate.

[0016] Specifically, the first sealing plate and the second sealing plate are arranged vertically parallel to each other, and the first sealing plate and the second sealing plate are adapted to the connecting openings of the stirring chamber and the settling chamber.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. By setting up a dispersion component, waste liquid and extractant can be simultaneously transported into the moving rod. The turbulence of the crossbar is used to achieve pre-mixing of the liquid and secondary stirring afterward, which improves the mixing efficiency and uniformity.

[0019] 2. By setting up a stirring assembly, the reciprocating screw drives the connecting plate to move, which in turn drives the movable rod to move, thereby causing the first and second stirring rods to deflect. This allows the stirring assembly to stir different areas inside the stirring chamber, including the upper and lower layers, the center, and the side walls, further improving the mixing uniformity of the photolithography development waste liquid and the extraction reagent.

[0020] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:

[0022] Figure 1 This is a schematic diagram of the overall structure of an intelligent extraction, separation and reuse device for effective components in photolithography development waste liquid according to an embodiment of the present invention.

[0023] Figure 2 A front view schematic diagram of an intelligent extraction, separation and reuse device for effective components in photolithography development waste liquid according to an embodiment of the present invention;

[0024] Figure 3 A schematic diagram of the main cross-section of an intelligent extraction, separation and reuse device for effective components in photolithography development waste liquid according to an embodiment of the present invention.

[0025] Figure 4 This is a schematic diagram of the overall structure of the intelligent extraction, separation and reuse device for effective components in photolithography development waste liquid according to an embodiment of the present invention.

[0026] Figure 5 for Figure 3 Enlarged structural diagram at point A in the middle.

[0027] Reference numerals: 1. Extraction tank; 11. Support leg; 12. Stirring chamber; 13. Settling chamber; 2. Processing mechanism; 21. Dispersion assembly; 211. Rotating tube; 212. Movable rod; 2121. Cavity; 2122. Crossbar; 213. Bushing; 2131. Water outlet; 214. Stirring assembly; 2141. First stirring rod; 2142. Second stirring rod; 215. Drive assembly; 2151. Bracket; 2152. Drive component; 2153. Reciprocating screw; 2154. First pulley; 2155. Second pulley; 22. Gap feeding assembly; 221. Connecting plate; 222. Seal; 2221. First sealing plate; 2222. Support shaft; 2223. Second sealing plate. Detailed Implementation

[0028] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0029] The following describes, with reference to the accompanying drawings, an intelligent extraction, separation, and reuse device for effective components in photolithography and development waste liquid according to an embodiment of the present invention.

[0030] like Figures 1-5 As shown, an intelligent extraction, separation and reuse device for effective components in photolithography development waste liquid according to an embodiment of the present invention may include an extraction tank 1 and a processing mechanism 2.

[0031] The bottom of the extraction tank 1 is provided with a support leg 11.

[0032] It should be noted that at least three sets of support legs 11 are provided in this embodiment, and the support legs 11 are arranged at equal intervals on the bottom periphery of the extraction tank 1, which can support the extraction tank 1, reduce the vibration and displacement generated during equipment operation, and improve stability.

[0033] The processing mechanism 2 includes a dispersing component 21 and a gap feeding component 22. The dispersing component 21 is disposed on the extraction tank 1, and the output end of the dispersing component 21 extends into the internal cavity of the extraction tank 1. The gap feeding component 22 is movably connected to the extraction tank 1 through the dispersing component 21.

[0034] It should be noted that the dispersion component 21 described in this embodiment can fully disperse and mix the waste liquid and the extraction agent, thereby improving the extraction reaction efficiency of the effective components in the waste liquid. At the same time, the intermittent feeding component 22 can work together with the dispersion component 21 to quantitatively discharge the waste liquid after extraction, thereby improving the stirring effect.

[0035] Specifically, in actual operation, the extraction tank 1 is first supported by the support leg 11 to prevent the tank from shifting or shaking. Then, the photolithography development waste liquid to be treated and the matching extraction reagent are introduced into the internal chamber of the extraction tank 1. The dispersion component 21 is started. The output end of the dispersion component 21 can stir and mix the waste liquid and extraction reagent in the extraction tank 1, so that the waste liquid and extraction reagent can be fully contacted, thereby improving the extraction reaction rate.

[0036] Meanwhile, during the stirring process of the dispersing component 21, the intermittent feeding component 22 can move synchronously with the dispersing component 21 to discharge the extracted mixed waste liquid, thereby carrying out the subsequent extraction and separation of effective components of the photolithography and development waste liquid.

[0037] In one embodiment of the present invention, such as Figure 2 As shown, a settling chamber 13 is provided at the bottom of the extraction tank 1, and a stirring chamber 12 is provided at the top of the extraction tank 1. The stirring chamber 12 is connected to the settling chamber 13, and the output end of the dispersing component 21 is located in the stirring chamber 12.

[0038] It should be noted that, in this embodiment, the extraction tank 1 is provided with an inlet pipe on one end of the side wall corresponding to the stirring chamber 12, which can introduce the photolithography development waste liquid to be treated into the stirring chamber 12. At the same time, the bottom end of the extraction tank 1 is provided with a drain pipe, which, with the cooperation of an external conveying device, can discharge the effective ingredient liquid and impurity waste liquid after the stratification in the settling chamber 13.

[0039] Specifically, after the photolithography development waste liquid to be treated is transported to the stirring chamber 12 through the inlet pipe, the dispersion component 21 is started. At this time, the dispersion component 21 can stir and mix the waste liquid and extraction reagent in the chamber. After stirring, the mixed reagent can flow downward into the settling chamber 13 and settle naturally in the settling chamber 13, so as to achieve the separation of effective components and waste impurities. After the stratification operation is completed, the stratified reagent and impurity waste liquid are discharged through the drain pipe at the bottom of the extraction tank 1 by the external conveying equipment, thereby realizing the separation, collection and subsequent reuse of effective components.

[0040] In one embodiment of the present invention, such as Figure 3As shown, the dispersion assembly 21 includes a rotating tube 211, a movable rod 212, a bushing 213, multiple sets of stirring assemblies 214, and a drive assembly 215. The rotating tube 211 is movably connected to the top of the extraction tank 1, and one end of the rotating tube 211 extends into the stirring chamber 12. The movable rod 212 is movably connected to the rotating tube 211, and both ends of the movable rod 212 extend through it. The bushing 213 is nested at the bottom of the movable rod 212. Multiple sets of stirring assemblies 214 are evenly spaced on the outer wall of the movable rod 212, and the ends of the multiple sets of stirring assemblies 214 away from the movable rod 212 are connected to the bushing 213. The drive assembly 215 is located at the top of the extraction tank 1 and is connected to the rotating tube 211.

[0041] It should be noted that the movable rod 212 described in this embodiment is rotatably connected to the extraction tank 1 through a bearing. It is powered by the drive assembly 215, which can drive the rotating tube 211 to rotate, thereby driving the movable rod 212, the bushing 213 and multiple sets of stirring assemblies 214 to rotate synchronously, so as to stir and mix the photolithography development waste liquid and the extraction reagent in the cavity.

[0042] Specifically, the drive component 215 drives the rotating tube 211 to rotate, which in turn drives the movable rod 212 to rotate. When the movable rod 212 rotates, it drives the bushing 213 and multiple sets of stirring components 214 to rotate, thereby stirring and mixing the photolithography development waste liquid and extraction reagent in the inlet cavity.

[0043] In one embodiment of the present invention, such as Figure 1 and Figure 4 As shown, a cavity 2121 is provided in the middle of the movable rod 212, and multiple crossbars 2122 are arranged at equal intervals inside the cavity 2121.

[0044] It should be noted that the top end described in this embodiment is equipped with a rotary joint, which is configured with two connecting pipes. One connecting pipe can be connected to an external extraction liquid storage device for conveying extraction reagents, and the other connecting pipe can be connected to an external waste liquid conveying device through a three-way valve for introducing photolithography development waste liquid to be treated.

[0045] In one embodiment of the present invention, such as Figures 3-5 As shown, the bushing 213 has multiple water outlet holes 2131 at equal intervals, and the water outlet holes 2131 are connected to the cavity 2121.

[0046] It should be noted that the water outlet 2131 described in this embodiment adopts an equally spaced opening form, which allows the extractant to be evenly sprayed from the water outlet 2131 into the stirring chamber 12, thereby increasing the diffusion range of the liquid and improving the extraction uniformity and extraction efficiency of the effective components of the photolithography development waste liquid.

[0047] Specifically, this device can realize two independent and switchable waste liquid feeding operations. One is to directly transport the photolithography and development waste liquid into the stirring chamber 12 through the liquid inlet pipe on the side wall of the tank. At this time, the extractant is transported into the movable rod 212 through the rotary joint. The extractant flows into the bushing 213 under the action of gravity and is then sprayed into the stirring chamber 12 in a radial pattern through multiple water outlet holes 2131. With the synchronous rotation and stirring of the stirring assembly 214, the premixed solution is stirred and mixed, so that the photolithography and development waste liquid and the extractant can fully contact and react to complete the extraction of effective components.

[0048] Another method involves simultaneously conveying the photolithography development waste liquid and the extraction reagent into the cavity 2121 of the movable rod 212. As the reagent flows within the cavity 2121, it collides with the crossbar 2122, creating turbulence. This allows the waste liquid and the extraction reagent to be premixed within the cavity 2121. The premixed reagent continues to flow downwards along the cavity 2121 and is discharged through the water outlet 2131. At this point, a secondary stirring is performed by the rotating stirring component 214, further improving the uniformity of the reagent mixture and enhancing the contact effect between the waste liquid and the extraction reagent, ensuring that the effective components in the photolithography development waste liquid can be fully extracted.

[0049] In one embodiment of the present invention, such as Figures 3-5 As shown, the stirring assembly 214 includes a first stirring rod 2141 and a second stirring rod 2142. The first stirring rod 2141 is movably connected to the outer wall of the rotating tube 211, and the second stirring rod 2142 is movably connected to the outer wall of the bushing 213. The end of the second stirring rod 2142 away from the bushing 213 is connected to the other end of the first stirring rod 2141.

[0050] It should be noted that the first stirring rod 2141 and the second stirring rod 2142 described in this embodiment are connected by a hinge. During the stirring operation, the first stirring rod 2141 and the second stirring rod 2142 can swing in the stirring chamber 12 to stir the waste liquid in different areas, so that the waste liquid and the extraction agent are fully mixed.

[0051] In one embodiment of the present invention, such as Figures 3-5As shown, the drive assembly 215 includes a bracket 2151, a drive member 2152, a reciprocating screw 2153, a first pulley 2154, and a second pulley 2155. The bracket 2151 is disposed at the top of the extraction tank 1, the drive member 2152 is disposed on the bracket 2151, the reciprocating screw 2153 is movably connected to the top of the extraction tank 1, and one end of the reciprocating screw 2153 extends through the bracket 2151 and is connected to the output end of the drive member 2152. The first pulley 2154 is nested on the outer wall of the reciprocating screw 2153, and the second pulley 2155 is nested on the outer wall of the rotating tube 211, and the second pulley 2155 is connected to the first pulley 2154 via a belt.

[0052] It should be noted that the driving component 2152 described in this embodiment is preferably a servo motor, which can drive the reciprocating lead screw 2153 to rotate, thereby driving the rotating tube 211, the movable rod 212 and the stirring assembly 214 to rotate, so as to realize the stirring and extraction operation of the medicine liquid.

[0053] Specifically, by activating the drive unit 2152, the drive unit 2152 will drive the reciprocating screw 2153 to rotate. When the reciprocating screw 2153 rotates, it will drive the first pulley 2154 to rotate, which in turn will drive the second pulley 2155 and the rotating tube 211 to rotate via the belt. When the rotating tube 211 rotates, it will drive the stirring assembly 214 to rotate, thereby realizing the stirring operation.

[0054] In one embodiment of the present invention, such as Figures 3-5 As shown, the gap feeding assembly 22 includes a connecting plate 221 and a sealing element 222. The connecting plate 221 is sleeved on the movable rod 212, and the end of the connecting plate 221 away from the movable rod 212 is connected to the reciprocating screw 2153. The sealing element 222 is provided at the bottom end of the movable rod 212.

[0055] It should be noted that the connecting plate 221 described in this embodiment is meshed with the reciprocating screw 2153. At the same time, the connecting plate 221 is rotatably connected to the movable rod 212 through the bearing. During operation, the rotation of the reciprocating screw 2153 can drive the connecting plate 221 to move up and down, thereby driving the movable rod 212 and the seal 222 to move, periodically closing and opening the communication channel between the stirring chamber 12 and the stationary chamber 13.

[0056] In one embodiment of the present invention, such as Figures 3-5 As shown, the seal 222 includes a first sealing plate 2221, a support shaft 2222, and a second sealing plate 2223. The first sealing plate 2221 is disposed at the bottom end of the movable rod 212, the support shaft 2222 is disposed at the end of the first sealing plate 2221 away from the movable rod 212, and the second sealing plate 2223 is disposed at the end of the support shaft 2222 away from the first sealing plate 2221.

[0057] It should be noted that the first sealing plate 2221, the support shaft 2222 and the second sealing plate 2223 described in this embodiment are integrated into a single structure. The support shaft 2222 can support the first sealing plate 2221 and the second sealing plate 2223 to maintain a fixed distance between them, thereby achieving intermittent feeding.

[0058] In one embodiment of the present invention, such as Figures 3-5 As shown, the first sealing plate 2221 and the second sealing plate 2223 are arranged in parallel vertically, and the first sealing plate 2221 and the second sealing plate 2223 are adapted to the connecting openings of the stirring chamber 12 and the settling chamber 13.

[0059] It should be noted that the first sealing plate 2221 and the second sealing plate 2223 described in this embodiment can move with the movable rod 212 to open and close the communication channel between the stirring chamber 12 and the settling chamber 13.

[0060] Specifically, when the reciprocating lead screw 2153 rotates, it drives the connecting plate 221 to move up and down through meshing. During the displacement process, the connecting plate 221 drives the movable rod 212 to move. During the movement process, the movable rod 212 drives the second stirring rod 2142 to move synchronously, so that the second stirring rod 2142 pushes the first stirring rod 2141 to deflect, thereby realizing the stirring of the waste liquid in the central area, side wall area and different areas of the upper and lower layers in the stirring chamber 12, ensuring that the photolithography development waste liquid and the extraction reagent are mixed evenly.

[0061] Meanwhile, during the lifting and lowering of the movable rod 212, the sealing element 222 will move. When the sealing element 222 moves upward, the mixed liquid stirred in the stirring chamber 12 can flow into the space between the first sealing plate 2221 and the second sealing plate 2223. Furthermore, the reciprocating screw 2153 continues to rotate, and the connecting plate 221 drives the movable rod 212 and the sealing element 222 to move downward. At this time, the mixed liquid located between the first sealing plate 2221 and the second sealing plate 2223 will flow into the lower settling chamber 13 for natural settling. At the same time, the first sealing plate 2221 will block the cavity connection opening, isolating the stirring chamber 12 and the settling chamber 13 from each other, realizing simplified loading and ensuring that the photolithography development waste liquid and the extraction reagent are mixed evenly.

[0062] In summary, the intelligent extraction, separation, and reuse device for effective components in photolithography development waste liquid of the present invention, by setting up a dispersion component, can simultaneously transport the waste liquid and the extractant into the movable rod. Utilizing the turbulence of the crossbar, it achieves pre-mixing of the solution and secondary stirring afterward, improving mixing efficiency and uniformity. At the same time, by using the transmission of the reciprocating screw, connecting plate, and movable rod, the first and second stirring rods are driven to deflect, causing the stirring component to stir different areas inside the stirring chamber, including the upper and lower layers, the center, and the side walls, further improving the mixing uniformity of the photolithography development waste liquid and the extraction agent.

[0063] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0064] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0065] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A smart extraction, separation, and reuse device for effective components in photolithography development waste liquid, characterized in that, include: Extraction tanks and processing equipment, wherein, The bottom of the extraction tank is provided with support legs; The processing mechanism includes a dispersing component and a gap feeding component, wherein... The dispersion component is disposed on the extraction vessel, and the output end of the dispersion component extends into the internal chamber of the extraction vessel; The intermittent feeding assembly is movably connected to the extraction tank via the dispersion assembly.

2. The intelligent extraction, separation, and reuse device for effective components in photolithography and developing waste liquid according to claim 1, characterized in that, The bottom of the extraction tank has a settling chamber, and the top of the extraction tank has a stirring chamber. The stirring chamber is connected to the settling chamber, and the output end of the dispersion component is located in the stirring chamber.

3. The intelligent extraction, separation, and reuse device for effective components in photolithography and development waste liquid according to claim 2, characterized in that, The dispersion assembly includes a rotating tube, a movable rod, a bushing, multiple sets of stirring components, and a driving component, wherein, The rotating tube is movably connected to the top of the extraction tank, and one end of the rotating tube extends through into the stirring chamber; The movable rod is movably connected inside the rotating tube, and both ends of the movable rod extend through the rod. The bushing is nested at the bottom protruding end of the movable rod; Multiple sets of the stirring components are equally spaced on the outer wall of the movable rod, and the ends of the multiple sets of stirring components away from the movable rod are connected to the bushing. The drive assembly is located at the top of the extraction tank and is connected to the rotating tube.

4. The intelligent extraction, separation, and reuse device for effective components in photolithography and development waste liquid according to claim 3, characterized in that, The movable rod has a cavity in the middle, and multiple crossbars are arranged at equal intervals in the cavity.

5. The intelligent extraction, separation, and reuse device for effective components in photolithography and developing waste liquid according to claim 4, characterized in that, The bushing has multiple water outlet holes at equal intervals, and the water outlet holes are connected to the cavity.

6. The intelligent extraction, separation, and reuse device for effective components in photolithography and developing waste liquid according to claim 5, characterized in that, The stirring assembly includes a first stirring rod and a second stirring rod, wherein... The first stirring rod is movably connected to the outer wall of the rotating tube; The second stirring rod is movably connected to the outer wall of the bushing, and the end of the second stirring rod away from the bushing is connected to the other end of the first stirring rod.

7. The intelligent extraction, separation, and reuse device for effective components in photolithography and developing waste liquid according to claim 6, characterized in that, The drive assembly includes a bracket, a drive component, a reciprocating lead screw, a first pulley, and a second pulley, wherein... The support is disposed at the top of the extraction tank; The drive component is mounted on the bracket; The reciprocating lead screw is movably connected to the top of the extraction tank, and one end of the reciprocating lead screw extends through the bracket and is connected to the output end of the drive component; The first pulley is nested on the outer wall of the reciprocating lead screw; The second pulley is nested on the outer wall of the rotating tube, and the second pulley is connected to the first pulley via a belt.

8. The intelligent extraction, separation, and reuse device for effective components in photolithography and development waste liquid according to claim 7, characterized in that, The gap feeding assembly includes a connecting plate and a sealing element, wherein... The connecting plate is sleeved on the movable rod, and the end of the connecting plate away from the movable rod is connected to the reciprocating lead screw; The seal is located at the bottom end of the movable rod.

9. The intelligent extraction, separation, and reuse device for effective components in photolithography and development waste liquid according to claim 8, characterized in that, The sealing element includes a first sealing plate, a support shaft, and a second sealing plate, wherein... The first sealing plate is disposed at the bottom end of the movable rod; The support shaft is located at the end of the first sealing plate away from the movable rod; The second sealing plate is disposed at the end of the support shaft away from the first sealing plate.

10. The intelligent extraction, separation, and reuse device for effective components in photolithography and development waste liquid according to claim 9, characterized in that, The first sealing plate and the second sealing plate are arranged vertically parallel to each other, and the first sealing plate and the second sealing plate are adapted to the connecting openings of the stirring chamber and the settling chamber.

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