Semiconductor ultra-pure water purification and polishing equipment

Abstract

The application relates to the technical field of semiconductor ultra-pure water treatment, and discloses a purification and fine treatment equipment for semiconductor ultra-pure water, which comprises a purification tank and a box body fixedly installed in the purification tank, a movable frame is slidably arranged in the box body, the movable frame divides the box body into a liquid inlet cavity and a liquid outlet cavity, a pair of movable pieces are oppositely arranged in the movable frame and form a plurality of purification cavities, and the opposite sides of the pair of movable pieces are respectively formed into cavities; a connecting piece is hinged between each movable piece and the side wall of the box body, so that the movable pieces are close to or away from each other when the movable frame moves; a reverse osmosis membrane is arranged in the plurality of purification cavities, the reverse osmosis membrane is connected between two swing pieces in the same frame body and is in a baffle shape, and a V-shaped piece is connected between the swing piece and the side wall of the cavity; a hydraulic telescopic cylinder drives the movable frame to reciprocatingly move, so that the pair of movable pieces are close to or away from each other, and then the swing pieces swing to compress or expand the reverse osmosis membrane.

Description

Technical Field

[0001] This invention belongs to the technical field of semiconductor ultrapure water treatment, and more specifically, it relates to a purification and fine treatment device for semiconductor ultrapure water. Background Technology

[0002] As semiconductor manufacturing process nodes continue to shrink, the requirements for ultrapure water quality in wafer processing are becoming increasingly stringent, demanding that ultrapure water supply systems possess a high degree of continuity and stability. To meet these requirements, existing ultrapure water preparation systems generally employ multi-stage series processing, typically consisting of multiple independent functional units connected sequentially, such as pretreatment, reverse osmosis, electro-deionization, ultraviolet oxidation, polishing mixed bed, degassing, and terminal ultrafiltration.

[0003] The existing technology for semiconductor ultrapure water treatment still has the following drawbacks: First, in existing technologies, the reverse osmosis unit, which undertakes the main desalination task in the entire treatment process, relies on a high-pressure pump to provide a continuous and stable feed water pressure in order to overcome osmotic pressure and maintain sufficient permeate flux. The high-pressure pump and its associated pressure vessel, control valve group, and instruments constitute a relatively independent power system, increasing the number of devices and energy consumption. In addition, in order to ensure the feed water quality of the reverse osmosis membrane and extend its service life, multiple pretreatment devices such as security filters, softeners, and activated carbon filters must be installed sequentially before the reverse osmosis unit. These pretreatment devices are independent and connected to the reverse osmosis unit through pipelines, resulting in low overall integration and scattered layout of the reverse osmosis related equipment group. This not only increases system resistance loss and floor space but also complicates the control logic of the entire pretreatment and reverse osmosis process, making it difficult to achieve a compact and efficient integrated design.

[0004] Secondly, in existing technologies, a contaminant layer composed of suspended solids, colloids, organic matter, microorganisms, and scaling salts from the raw water inevitably accumulates on the surface of the reverse osmosis membrane. This leads to a decrease in membrane flux, an increase in transmembrane pressure, and a reduction in desalination rate. Currently, cleaning reverse osmosis membranes typically requires shutdown and offline operation, isolating the reverse osmosis unit from the operating process and using chemical agents for circulating or soaking cleaning. This process is lengthy, interrupts system water production during cleaning, and severely impacts the continuous supply of ultrapure water.

[0005] Therefore, in view of this, we have studied and improved the existing structure and its shortcomings, and provided a purification and treatment device for semiconductor ultrapure water, in order to achieve a more practical and valuable purpose. Summary of the Invention

[0006] This invention provides a purification and refining device for semiconductor ultrapure water, which overcomes the above-mentioned defects in the prior art.

[0007] The purpose and effectiveness of the purification and refining equipment for semiconductor ultrapure water of the present invention are achieved by the following specific technical means: A purification and refining device for semiconductor ultrapure water includes a frame, a purification tank is disposed within the frame, and further includes: The housing is fixedly installed inside the purification tank; A movable frame is slidably disposed within the box, dividing the interior of the box into an inlet chamber located above the movable frame and an outlet chamber located below the movable frame; A pair of movable parts are slidably disposed within the movable frame, forming a multi-stage purification chamber between the pair of movable parts and cavities located on opposite sides of the pair of movable parts within the movable frame; A connector is hinged between each of the movable parts and the side wall of the housing, so that the movable parts move closer to or further away from each other as the movable frame moves. A reverse osmosis membrane is disposed within the multi-stage purification chamber; A pair of frames are fixedly connected to a pair of movable parts respectively. Two ornaments are rotatably arranged in each frame. The reverse osmosis membrane is connected between the two ornaments in the same frame and is in a baffle shape. The reverse osmosis membrane has a raw water side and a product water side. The raw water in the multi-stage purification chamber passes through the reverse osmosis membrane under pressure and enters the product water side inside the frame. The V-shaped component has two ends connected to two ornaments within the same frame, and the middle part connected to the side wall of the cavity. A hydraulic telescopic cylinder, the extended end of which is connected to the movable frame, is used to drive the movable frame to reciprocate, so that a pair of movable parts move closer or further apart, thereby causing the swinging part to swing to compress or expand the reverse osmosis membrane; The liquid inlet chamber is connected to the multi-stage purification chamber, the water production side inside the frame is connected to the chamber, and the chamber is connected to the liquid outlet chamber.

[0008] A further technical solution is provided where a raw water tank and a raw water pump are provided at one end of the frame, the inlet end of the raw water pump is connected to the raw water tank, the outlet end of the raw water pump is connected to the inlet pipe at the upper end of the purification tank, and the lower end of the purification tank is provided with an outlet pipe.

[0009] A further technical solution is that a multi-media filter layer is provided in the upper part of the purification tank, and the multi-media filter layer is filled with anthracite, quartz sand and gravel in layers.

[0010] In a further technical solution, the movable frame is provided with a pair of softener cavities and a processing cavity, the processing cavity being located between the pair of softener cavities, and the pair of movable parts being symmetrically slidably arranged inside the processing cavity.

[0011] A further technical solution is that an activated carbon filter assembly is provided at the upper part of the multi-stage purification chamber. The activated carbon filter assembly includes two sets of partitions and multiple activated carbon particles filled between the two sets of partitions. The two sets of partitions are staggered to form a baffle channel. An elastic support is connected between the lowermost partition and the corresponding movable part. The elastic support is a porous elastomer.

[0012] A further technical solution is provided in the middle of the multi-stage purification chamber, the softening component includes a pair of elastic water bladders and a pair of one-way telescopic tubes, the pair of elastic water bladders are respectively located in the upper part of the pair of chambers, each elastic water bladder is connected to the multi-stage purification chamber through the corresponding one-way telescopic tube, one end of the one-way telescopic tube is connected to the middle of the corresponding movable part, and the pair of elastic water bladders are respectively connected to the pair of softener chambers through one-way connecting tubes.

[0013] In a further technical solution, a safety filter assembly is also provided in the middle of the multi-stage purification chamber. The safety filter assembly includes a fine filter element and a pair of U-shaped elements. The fine filter element is fixed in the multi-stage purification chamber and located above the reverse osmosis membrane. The pair of U-shaped elements are respectively arranged on the side of the pair of movable elements that are close to each other. The two ends of the fine filter element are respectively slidably fitted into the pair of U-shaped elements.

[0014] A further technical solution includes a rinsing assembly at the lower part of the multi-stage purification chamber. The rinsing assembly includes a rinsing shell, which is fixed in the middle of the lower part of the multi-stage purification chamber. Multiple water spray heads are provided on both sides of the rinsing shell, and multiple high-pressure spray heads are provided at the upper end of the rinsing shell. Fixing blocks are provided on both sides of the outer surface of the rinsing shell, and multiple guide grooves are provided at intervals on the fixing blocks. The lower part of the multi-stage purification chamber is connected to the outside of the purification tank through a telescopic pipe, and a solenoid valve is installed inside the telescopic pipe.

[0015] In a further technical solution, the upper end of the housing is connected to the inlet chamber via a first one-way valve, the upper end of the movable frame is provided with a through hole, the inlet chamber is connected to the multi-stage purification chamber via the through hole, the chamber is connected to the outlet chamber via a second one-way valve, the outlet chamber is connected to the lower end of the purification tank via a control valve, a water level detector is installed on the side wall of the outlet chamber, and the flushing shell is connected to the outlet chamber via a pressure stabilizing valve.

[0016] In a further technical solution, the hydraulic telescopic cylinder is installed at the lower end of the housing.

[0017] Compared with the prior art, the present invention has the following beneficial effects: This invention utilizes a movable frame housed within a housing and a pair of sliding members within that frame. Each member is hinged to the side wall of the housing. As the movable frame reciprocates, driven by a hydraulic telescopic cylinder, the pair of movable members automatically move closer or further apart. During this closer movement, the volume of the multi-stage purification chamber between the members decreases, increasing the raw water pressure within the chamber. This pressure drives the raw water through the reverse osmosis membrane within the chamber, completing the reverse osmosis filtration. This eliminates the need for a separate high-pressure pump to achieve the required driving pressure for reverse osmosis, significantly improving equipment integration, simplifying system structure, and reducing energy consumption and equipment costs.

[0018] This invention connects the reverse osmosis membrane to two movable components within the same frame in a baffled configuration. A V-shaped component is connected to both ends of these components and to the side wall of the chamber. During the relative movement of the movable components, the frame moves with them, and the movable components oscillate under the elastic force of the V-shaped component, thereby compressing or expanding the reverse osmosis membrane. In the filtration stage, the reverse osmosis membrane is compressed, reducing the distance between adjacent membrane surfaces and increasing the membrane stacking density per unit volume, thus improving the removal efficiency of dissolved total solids, colloids, organic matter, bacteria, and viruses from the raw water. In the cleaning stage, the reverse osmosis membrane is expanded, increasing the distance between membrane surfaces, which facilitates uniform flow of flushing water across the membrane surface, enhancing the online self-cleaning effect. This allows the reverse osmosis membrane to restore flux without shutdown, ensuring the continuity of ultrapure water production.

[0019] This invention utilizes a single hydraulic telescopic cylinder as a drive source to simultaneously move the movable frame and a pair of moving parts. This not only achieves reverse osmosis filtration pressurization and reverse osmosis membrane compression and deployment, but also coordinates the squeezing and injection of softener elastic water bladders, the cleaning of fine filter elements by U-shaped parts, and high-pressure rinsing of the flushing shell. By integrating multiple functions such as filtration, dosing, and cleaning into the same power system, it reduces independent drive devices and external pipelines, further improving the integration and automation level of the equipment, reducing maintenance complexity, and making the equipment operation more stable and reliable. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0022] Figure 1 This is a schematic diagram of the first isometric structure of the present invention; Figure 2 This is a schematic diagram of the second isometric structure of the present invention; Figure 3 This is a front view structural diagram of the present invention; Figure 4 This is an isometric structural diagram of the purification tank in this invention; Figure 5 This is a front view schematic diagram of the purification tank in this invention; Figure 6 for Figure 5 Schematic diagram of the cross-sectional structure at point AA; Figure 7 This is a cross-sectional view of the multi-level processing components in this invention. Figure 8 for Figure 7 A magnified schematic diagram of the local structure at point C; Figure 9 This is a top view of the purification tank in this invention. Figure 10 for Figure 9 Schematic diagram of the cross-sectional structure at point BB.

[0023] Explanation of reference numerals in the attached figures: Frame 10, Raw water tank 11, Purification tank 12, Inlet pipe 13, Outlet pipe 14, Multi-media filter layer 15, Box body 16, Movable frame 17, Treatment chamber 18, Softener chamber 19, Liquid inlet chamber 20, Liquid outlet chamber 21, Movable part 22, Connector 23, Multi-stage purification chamber 24, Chamber body 25, Partition 26, Activated carbon granules 27, Elastic water bladder 28, One-way telescopic pipe 29, One-way connecting pipe 30, Fine filter element 31, U-shaped element 32, Elastic support element 33, Frame body 34, Ornament 35, Reverse osmosis membrane 36, V-shaped element 37, Flushing shell 38, Spray head 39, Fixing block 40, Guide channel 41, Telescopic pipe 42, First one-way valve 43, Through hole 44, Second one-way valve 45, Control valve 46, Water level detector 47, Hydraulic telescopic cylinder 48, Pressure stabilizing valve 49, High-pressure nozzle 50, Raw water pump 51. Detailed Implementation

[0024] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0025] In the description of this invention, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0027] As attached Figure 1 To be continued Figure 10 As shown: This invention provides an embodiment of a purification and refining equipment for semiconductor ultrapure water. See attached document Figure 1 To be continued Figure 6 The system includes a frame 10, with a raw water tank 11 at one end. Multiple purification tanks 12 are installed inside the frame 10, and the multiple purification tanks 12 sequentially perform primary purification, secondary purification, and tertiary purification on the raw water. Among them, the upper part of the purification tank 12 that performs primary purification is provided with a multi-media filter layer 15, which is filled with anthracite, quartz sand, and gravel in layers. The middle part of the purification tank 12 is provided with a multi-stage treatment component.

[0028] Preferred options are shown in Annex 5 to Annex 6. Figure 8The multi-stage treatment assembly includes a housing 16, which is fixedly installed in the middle of the purification tank 12. A movable frame 17 is vertically slidably arranged inside the housing 16, dividing the interior of the housing 16 into an upper inlet chamber 20 and a lower outlet chamber 21. Inside the movable frame 17 are a pair of softener chambers 19 and a treatment chamber 18, with the treatment chamber 18 located between the pair of softener chambers 19. A pair of movable members 22 are symmetrically slidably arranged inside the treatment chamber 18, dividing the interior of the treatment chamber 18 into a multi-stage purification chamber 24 and a pair of chambers 25. The multi-stage purification chamber 24 is located between the pair of movable members 22, and the pair of chambers 25 are located on opposite sides of the pair of movable members 22. A connecting member 23 is rotatably connected between the opposite sides of the pair of movable members 22 and the side walls of the housing 16. One end of the connecting member 23 is rotatably connected to the movable member 22, and the other end of the connecting member 23 is rotatably connected to the side wall of the housing 16.

[0029] Preferred options are shown in the appendix. Figure 5 To be continued Figure 7 The upper part of the multi-stage purification chamber 24 is equipped with an activated carbon filter assembly, the middle part of the multi-stage purification chamber 24 is equipped with a softening assembly and a safety filter assembly, and the lower part of the multi-stage purification chamber 24 is equipped with a reverse osmosis assembly and a flushing assembly.

[0030] Preferred options are shown in the appendix. Figure 6 Appendix Figure 7 The activated carbon filter assembly includes two sets of baffles 26, which are vertically spaced above a pair of movable parts 22. The two sets of baffles 26 are staggered and form a baffle channel in the upper part of the multi-stage purification chamber 24. The baffle channel in the upper part of the multi-stage purification chamber 24 is filled with multiple activated carbon particles 27. An elastic support 33 is connected between the lower end of the bottom baffle 26 and the corresponding movable part 22. The elastic support 33 is a porous elastomer. The upper end of the elastic support 33 abuts against the lower end of the bottom baffle 26, and the lower end of the elastic support 33 is fixedly connected to the upper end of the corresponding movable part 22. The multiple activated carbon particles 27 are supported by the bottom baffle 26 and the elastic support 33.

[0031] Preferred options are shown in the appendix. Figure 6 To be continued Figure 10 The softening component includes a pair of elastic water bladders 28, each located in the upper part of a pair of cavities 25. Each pair of elastic water bladders 28 is connected to the middle of a multi-stage purification chamber 24 via a one-way telescopic tube 29. One end of the one-way telescopic tube 29 is connected to the middle of a corresponding movable part 22. Each pair of elastic water bladders 28 is connected to a pair of softener cavities 19 via a one-way connecting tube 30. Each softener cavity 19 has a replenishment port at its upper end for manual replenishment of softener.

[0032] Preferred options are shown in the appendix. Figure 6 Appendix Figure 7 The safety filtration assembly includes a fine filter element 31, which is fixed in the middle of the multi-stage purification chamber 24. The fine filter element 31 is located below the output end of the one-way telescopic tube 29. A U-shaped element 32 is provided on one side of the middle of a pair of movable parts 22 that are close to each other. The two ends of the fine filter element 31 slide within the pair of U-shaped elements 32 respectively.

[0033] Preferred options are shown in the appendix. Figure 6 To be continued Figure 8 The reverse osmosis assembly includes a pair of frames 34, which are fixedly connected to the lower part of a pair of movable parts 22. Each frame 34 has two rotatable members 35 rotatably mounted at its upper and lower ends. The two rotatable members 35 in each frame 34 are rotatably connected to the end wall of the multi-stage purification chamber 24 near the center. The other ends of the two rotatable members 35 in each frame 34 are connected to the lower side wall of the chamber 25 by a V-shaped member 37. The two ends of the V-shaped member 37 are connected to the other ends of the two rotatable members 35 in the same frame 34, and the middle of the V-shaped member 37 is connected to the lower side wall of the chamber 25. Multiple reverse osmosis membranes 36 are connected between the two rotatable members 35 in the same frame 34. The reverse osmosis membranes 36 are in a baffled shape, which is a corrugated shape with alternating bends along the water flow direction, forming a tortuous product water flow channel between adjacent reverse osmosis membranes 36.

[0034] Preferred options are shown in the appendix. Figure 6 To be continued Figure 8 The rinsing assembly includes a rinsing shell 38, which is fixed in the lower middle of the multi-stage purification chamber 24. Multiple water spray heads 39 are respectively provided on both sides of the rinsing shell 38, and multiple high-pressure spray heads 50 are provided at the upper end of the rinsing shell 38. A fixing block 40 is respectively provided on both sides of the outer side of the rinsing shell 38. Multiple guide grooves 41 are provided at intervals on the upper part of the fixing block 40 away from the rinsing shell 38. The upper side of the fixing block 40 slides in contact with the lower side of the frame 34. A telescopic pipe 42 is provided to connect the lower part of the multi-stage purification chamber 24 to the outside of the purification tank 12. A solenoid valve is installed in the telescopic pipe 42.

[0035] Preferred options are shown in the appendix. Figure 6 To be continued Figure 10The upper end of the housing 16 is provided with a first one-way valve 43. The upper part of the purification tank 12 is connected to the inlet chamber 20 through the first one-way valve 43. The upper middle of the movable frame 17 is provided with a through hole 44. The inlet chamber 20 is connected to the upper part of the multi-stage purification chamber 24 through the through hole 44. The lower part of the multi-stage purification chamber 24 is connected to the lower part of a pair of chambers 25 through the interior of two frames 34 respectively. The lower part of the chamber 25 is connected to the outlet chamber 21 and is provided with a second one-way valve 45. The outlet chamber 21 is connected to the lower part of the purification tank 12 and is provided with a control valve 46. A water level detector 47 is installed on the side wall of the outlet chamber 21. The water level detector 47 is in sliding contact with the outside of the movable frame 17. The flushing shell 38 is connected to the outlet chamber 21 and is provided with a pressure stabilizing valve 49.

[0036] Preferred options are shown in the appendix. Figure 1 To be continued Figure 10 The purification tank 12 has an inlet pipe 13 at its upper end and an outlet pipe 14 at its lower end. A hydraulic telescopic cylinder 48 is installed at the lower end of the housing 16, and the extended end of the hydraulic telescopic cylinder 48 is connected to the movable frame 17. A raw water pump 51 is also installed at one end of the frame 10. The inlet end of the raw water pump 51 is connected to the raw water tank 11, and the outlet end of the raw water pump 51 is connected to the inlet pipe 13.

[0037] Specific usage of this invention: Raw water first enters the raw water tank 11 for buffer storage, and is then pumped by the raw water pump 51 at a stable flow rate through the inlet pipe 13 to the upper part of the purification tank 12. The multi-media filter layer 15 set in the upper part of the purification tank 12 is filled with layers of anthracite, quartz sand and gravel. When the raw water passes through this multi-media filter layer 15, large particulate impurities such as suspended solids, silt, rust and colloids in the water are intercepted layer by layer, thereby effectively reducing the turbidity of the raw water and providing good inlet conditions for subsequent purification treatment.

[0038] Subsequently, the raw water, after being treated by the multi-media filter layer 15, enters the inlet chamber 20 at the top of the housing 16 through the first one-way valve 43. The raw water in the inlet chamber 20 flows into the upper part of the multi-stage purification chamber 24 through the through-hole 44 in the middle of the upper end of the movable frame 17. Two sets of baffles 26 are installed at the top of the multi-stage purification chamber 24, vertically spaced and staggered, thus forming a baffle channel at the top of the multi-stage purification chamber 24. The baffle channel is filled with multiple activated carbon particles 27. The raw water flows in a tortuous manner within the baffle channel, prolonging the contact time with the activated carbon particles 27, allowing the activated carbon particles 27 to fully adsorb residual chlorine, organic matter, color, and some odors in the raw water, thereby protecting the downstream reverse osmosis membrane 36 from oxidative damage and improving the activated carbon adsorption and purification effect. The elastic support 33 is a porous elastomer. Its lower end is fixed to the movable part 22, and its upper end abuts against the lower end of the lowest partition 26. During the movement of the movable part 22, the elastic support 33 always maintains contact with the partition 26 due to its own elastic deformation, forming a stable support for the partition 26 and the activated carbon particles 27 above it, preventing the activated carbon particles 27 from moving down into the middle of the multi-stage purification chamber 24. At the same time, the porous structure of the elastic support 33 allows water to pass through without affecting the downward flow of water.

[0039] The raw water continues to flow downwards to the softening component area in the middle of the multi-stage purification chamber 24. At this time, the control system controls the hydraulic telescopic cylinder 48 to retract, which drives the movable frame 17 to move downwards. The movable frame 17 then drives a pair of movable parts 22 to move downwards. Since one end of the connecting piece 23 is rotatably connected to the side wall of the housing 16 and the other end is rotatably connected to the movable part 22, the pair of movable parts 22 are pulled downwards by the rotation of the two connecting pieces 23, causing them to move away from each other. The moving parts 22 squeeze the two elastic water bladders 28 located in the upper part of the chamber 25. The softening agent in the elastic water bladders 28 is transported to the middle of the multi-stage purification chamber 24 through the one-way telescopic tube 29 and mixes with the raw water, thereby reducing the hardness of the raw water and preventing scale-forming substances such as calcium, magnesium, barium, and strontium from depositing on the surface of the subsequent reverse osmosis membrane 36, ensuring the long-term stable operation of the reverse osmosis membrane 36. When the softening agent in the elastic water bladders 28 is insufficient, it can be manually replenished through the replenishment port at the upper end of the softening agent chamber 19.

[0040] After softening, the raw water continues to flow into the safety filtration component area. The fine filter element 31 is fixed in the middle of the multi-stage purification chamber 24. When the raw water passes through the fine filter element 31, large particles such as filter media debris and resin particles that may have leaked from the previous stage are intercepted, preventing these particles from scratching or clogging the reverse osmosis membrane 36, and ensuring the cleanliness of the water entering the reverse osmosis component.

[0041] Raw water continues to flow downwards into the reverse osmosis component area at the bottom of the multi-stage purification chamber 24. At this time, the control system extends the hydraulic telescopic cylinder 48, which drives the movable frame 17 upwards. Due to the action of the first one-way valve 43, the raw water in the inlet chamber 20 cannot flow back upwards to the upper part of the purification tank 12. The upward movement of the movable frame 17 exerts a squeezing effect on the raw water in the inlet chamber 20, causing more raw water to enter the multi-stage purification chamber 24 through the through-hole 44, thereby increasing the water pressure within the multi-stage purification chamber 24. Simultaneously, the upward movement of the movable frame 17 drives a pair of movable parts 22 upwards. Under the rotational pushing action of a pair of connecting parts 23, the pair of movable parts 22 move closer together, further pressurizing the raw water in the multi-stage purification chamber 24, causing the raw water at the bottom of the multi-stage purification chamber 24 to pass through the reverse osmosis membrane 36 and enter the frame 34 under higher pressure. During this process, the reverse osmosis membrane 36 removes dissolved total solids, colloids, organic matter, bacteria, and viruses from the raw water, achieving efficient desalination and purification.

[0042] The permeable water in the frame 34 then flows to the lower part of the cavity 25 and flows downward into the outlet cavity 21 through the second one-way valve 45. The second one-way valve 45 only allows water to flow unidirectionally from the cavity 25 to the outlet cavity 21, preventing the permeable water in the outlet cavity 21 from flowing back into the cavity 25. The water level in the outlet cavity 21 gradually rises. When the water level reaches the installation position of the water level detector 47, the control valve 46 opens, and the permeable water in the outlet cavity 21 flows downward into the lower part of the purification tank 12 through the control valve 46, and is finally discharged through the outlet pipe 14. When the water level in the outlet cavity 21 drops to the position of the water level detector 47, the control valve 46 closes, thereby maintaining the permeable water in the outlet cavity 21 at the set water level height. Since the reverse osmosis filtration process is completed during the extension stroke of the hydraulic telescopic cylinder 48 and paused during the contraction stroke, the produced water is generated periodically and intermittently. During the filtration pause, the outlet chamber 21 continues to supply water downstream through the intermittent opening of the control valve 46, which plays a buffering and regulating role, so that the water output from the lower part of the purification tank 12 remains relatively stable.

[0043] The permeate water discharged from the lower part of the purification tank 12 via the outlet pipe 14 first enters the SA tower for deep silica removal. The SA tower is filled with a strong base anion exchange resin, which adsorbs weak acid ions such as silicate and borate ions in the water through ion exchange. Simultaneously, during SA tower regeneration, the regenerated solution is heated to fully dissolve and remove the silica adsorbed on the resin, significantly improving silica removal efficiency and regeneration stability, and reducing dependence on sodium hydroxide quality. After treatment by the SA tower, the silica concentration in the permeate water decreases from 1.5 μg / L before the modification to below 0.15 μg / L, with a target of 0.1 μg / L, achieving a removal rate exceeding 90%. Subsequently, the permeate water enters a dedicated boron removal resin bed for deep boron removal. This resin bed is filled with boron-selective resin or a dedicated boron removal resin, which has a high selective adsorption capacity for boron in the water, causing the effluent boron concentration to stably decrease from 10 ng / L before the modification to below 5 ng / L, with a target as low as 3 ng / L or even 1 ppt, achieving a removal rate exceeding 50%. The dedicated boron removal resin bed can be configured in parallel with one in operation and one on standby, switching to regeneration after saturation, with regeneration waste liquid collected and treated centrally. After the above-mentioned deep desiliconization and boron removal, the permeate enters the subsequent polishing system or permeate tank. Due to the significant reduction in boron and silicon concentrations at the front end, the processing load of the subsequent polishing system can be effectively reduced, and the service life of the polishing resin can be extended. Overall, this not only ensures that the key indicators of ultrapure water meet more stringent standards, but also improves the stability and economy of system operation.

[0044] Simultaneously, a pair of movable parts 22 move closer together, causing a pair of frames 34 to move closer together. The movement of the frames 34 causes the rotating ornaments 35 at their upper and lower ends to move. Since the two ends of the V-shaped part 37 are connected to one end of the two ornaments 35 within the same frame 34, and the middle of the V-shaped part 37 is connected to the lower side wall of the cavity 25, when the frame 34 moves, the V-shaped part 37 elastically pulls on one end of the two ornaments 35 within the same frame 34, causing the two ornaments 35 within the same frame 34 to move closer together and swing. The swinging of the two ornaments 35 compresses the baffled reverse osmosis membrane 36, reducing the distance between adjacent membrane surfaces of the corrugated reverse osmosis membrane 36, thereby increasing the stacking density of the membrane surface per unit volume and improving the removal efficiency of the reverse osmosis membrane 36 for raw water.

[0045] As the pair of movable parts 22 approach each other, they release the pressure on the two elastic water bladders 28. The elastic water bladders 28 then return to their original shape due to their own elasticity. At this time, the one-way connecting pipe 30 replenishes the softener in the softener chamber 19 into the elastic water bladders 28, preparing for the next softener injection. This cycle repeats, with the reciprocating movement of the movable parts 22 achieving both the squeezing and automatic replenishment of the elastic water bladders 28, ensuring a continuous and stable addition of softener. When the softener in the softener chamber 19 is depleted to a low level, it is manually replenished through the replenishment port.

[0046] In addition, the movement of a pair of movable parts 22 brings a pair of U-shaped parts 32 closer together. The pair of U-shaped parts 32 clean the two ends of the fine filter element 31 respectively, remove impurities that may accumulate at the two ends of the fine filter element 31, maintain the fine filtration effect of the fine filter element 31, and extend its service life.

[0047] During the reverse osmosis filtration process, some impurities and concentrated water remain in the lower part of the multi-stage purification chamber 24. When flushing is required, the control system controls the hydraulic telescopic cylinder 48 to retract, which in turn moves the movable frame 17 downwards. The downward movement of the movable frame 17 compresses the permeate in the outlet chamber 21, increasing the water pressure. When the pressure reaches the set value, the pressure regulating valve 49 opens, and the high-pressure permeate enters the flushing shell 38. Part of the high-pressure water in the flushing shell 38 is flushed through the two spray nozzles 39 on both sides to remove deposits from the reverse osmosis membranes 36 in the two frames 34; the other part of the high-pressure water is sprayed upwards through the high-pressure nozzle 50 to clean the fine filter element 31 and restore its filtration performance.

[0048] As the movable frame 17 moves downward, it also drives a pair of movable parts 22 downward. Under the rotational pulling action of a pair of connecting parts 23, the pair of movable parts 22 move away from each other. The moving parts 22 move away from each other, causing a pair of frame bodies 34 to move away from each other. At this time, under the elastic pushing action of the V-shaped part 37, the two swinging parts 35 within the same frame body 34 swing away from each other, thereby unfolding the baffled reverse osmosis membrane 36. After the reverse osmosis membrane 36 unfolds, the distance between adjacent membrane surfaces increases, which is conducive to the uniform flow of flushing water on the membrane surface, improves the self-cleaning effect of the reverse osmosis membrane 36, and extends the service life of the reverse osmosis membrane 36.

[0049] Impurities and a small amount of raw water deposited in the lower part of the multi-stage purification chamber 24 are guided by the guide channel 41 and collected below the frame 34. At this time, the solenoid valve in the telescopic pipe 42 opens, discharging the impurities and a small amount of raw water below the frame 34. After the sewage discharge is completed, the solenoid valve closes. Through the above flushing and sewage discharge process, the cleanliness of the reverse osmosis components and fine filter elements is effectively maintained, ensuring the long-term efficient and stable operation of the equipment.

[0050] The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the invention to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical application of the invention, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A purification and refining device for semiconductor ultrapure water, comprising a frame (10), wherein a purification tank (12) is disposed within the frame (10), characterized in that, Also includes: The housing (16) is fixedly installed inside the purification tank (12); The movable frame (17) is slidably disposed inside the box (16) and divides the interior of the box (16) into an inlet chamber (20) located above the movable frame (17) and an outlet chamber (21) located below the movable frame (17); A pair of movable parts (22) are slidably disposed within the movable frame (17), and a multi-stage purification chamber (24) is formed within the movable frame (17) between the pair of movable parts (22) and a cavity (25) located on opposite sides of the pair of movable parts (22); Connector (23), each of the movable parts (22) is hinged to the side wall of the box (16), so that the movable parts (22) move closer to or further away from each other as the movable frame (17) moves; A reverse osmosis membrane (36) is disposed within the multi-stage purification chamber (24); A pair of frames (34) are fixedly connected to a pair of movable parts (22) respectively. Two ornaments (35) are rotatably arranged in each frame (34). The reverse osmosis membrane (36) is connected between the two ornaments (35) in the same frame (34) and is in a baffle shape. The reverse osmosis membrane (36) has a raw water side and a product water side. The raw water in the multi-stage purification chamber (24) passes through the reverse osmosis membrane (36) under pressure and enters the product water side inside the frame (34). V-shaped part (37) is connected at both ends to two ornaments (35) in the same frame (34) and in the middle to the side wall of the cavity (25); A hydraulic telescopic cylinder (48) is connected to the movable frame (17) at its extended end. The movable frame (17) is used to drive the movable frame (17) to move back and forth, so that a pair of movable parts (22) move closer or further apart, thereby driving the swinging part (35) to swing to compress or expand the reverse osmosis membrane (36). The liquid inlet chamber (20) is connected to the multi-stage purification chamber (24), the water production side inside the frame (34) is connected to the chamber (25), and the chamber (25) is connected to the liquid outlet chamber (21).

2. The purification and refining equipment for semiconductor ultrapure water as described in claim 1, characterized in that, One end of the frame (10) is provided with a raw water tank (11) and a raw water pump (51). The inlet end of the raw water pump (51) is connected to the raw water tank (11), and the outlet end of the raw water pump (51) is connected to the inlet pipe (13) at the upper end of the purification tank (12). The lower end of the purification tank (12) is provided with an outlet pipe (14).

3. The purification and refining equipment for semiconductor ultrapure water as described in claim 2, characterized in that, The upper part of the purification tank (12) is provided with a multi-media filter layer (15), which is filled with anthracite, quartz sand and gravel in layers.

4. The purification and refining equipment for semiconductor ultrapure water as described in claim 1, characterized in that, The movable frame (17) is provided with a pair of softener cavities (19) and a processing cavity (18). The processing cavity (18) is located between the pair of softener cavities (19). The pair of movable parts (22) are symmetrically slidably arranged inside the processing cavity (18).

5. The purification and refining equipment for semiconductor ultrapure water as described in claim 1, characterized in that, An activated carbon filter assembly is provided at the upper part of the multi-stage purification chamber (24). The activated carbon filter assembly includes two sets of partitions (26) and multiple activated carbon particles (27) filled between the two sets of partitions (26). The two sets of partitions (26) are staggered to form a baffle channel. An elastic support (33) is connected between the lowermost partition (26) and the corresponding movable part (22). The elastic support (33) is a porous elastomer.

6. The purification and refining equipment for semiconductor ultrapure water as described in claim 4, characterized in that, A softening component is provided in the middle of the multi-stage purification chamber (24). The softening component includes a pair of elastic water bladders (28) and a pair of one-way telescopic tubes (29). The pair of elastic water bladders (28) are located in the upper part of the pair of chambers (25). Each elastic water bladder (28) is connected to the multi-stage purification chamber (24) through the corresponding one-way telescopic tube (29). One end of the one-way telescopic tube (29) is connected to the middle of the corresponding movable part (22). The pair of elastic water bladders (28) are connected to the pair of softener chambers (19) through one-way connecting tubes (30).

7. The purification and refining equipment for semiconductor ultrapure water as described in claim 1, characterized in that, A safety filter assembly is also provided in the middle of the multi-stage purification chamber (24). The safety filter assembly includes a fine filter element (31) and a pair of U-shaped elements (32). The fine filter element (31) is fixed in the multi-stage purification chamber (24) and located above the reverse osmosis membrane (36). The pair of U-shaped elements (32) are respectively arranged on the side of the pair of movable elements (22) that are close to each other. The two ends of the fine filter element (31) are respectively slidably fitted in the pair of U-shaped elements (32).

8. The purification and refining equipment for semiconductor ultrapure water as described in claim 1, characterized in that, The lower part of the multi-stage purification chamber (24) is provided with a flushing assembly, which includes a flushing shell (38). The flushing shell (38) is fixed in the middle of the lower part of the multi-stage purification chamber (24). Multiple water spray heads (39) are provided on both sides of the flushing shell (38). Multiple high-pressure spray heads (50) are provided at the upper end of the flushing shell (38). Fixing blocks (40) are provided on the outer sides of the flushing shell (38). Multiple guide grooves (41) are provided on the fixing blocks (40) at intervals. The lower part of the multi-stage purification chamber (24) is connected to the outside of the purification tank (12) through a telescopic pipe (42). A solenoid valve is installed in the telescopic pipe (42).

9. The purification and refining equipment for semiconductor ultrapure water as described in claim 8, characterized in that, The upper end of the housing (16) is connected to the liquid inlet chamber (20) through the first one-way valve (43). The upper middle of the movable frame (17) is provided with a through hole (44). The liquid inlet chamber (20) is connected to the multi-stage purification chamber (24) through the through hole (44). The chamber (25) is connected to the liquid outlet chamber (21) through the second one-way valve (45). The liquid outlet chamber (21) is connected to the lower end of the purification tank (12) through the control valve (46). A water level detector (47) is installed on the side wall of the liquid outlet chamber (21). The flushing shell (38) is connected to the liquid outlet chamber (21) through the pressure stabilizing valve (49).

10. The purification and refining equipment for semiconductor ultrapure water as described in claim 1, characterized in that, The hydraulic telescopic cylinder (48) is installed at the lower end of the housing (16).

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