Vacuum high-temperature powder vibration coating equipment

Abstract

The present application is a vacuum high-temperature powder vibration coating equipment, which is characterized in that a vibration conveying groove is arranged in a vacuum furnace cavity, a powder feeder is arranged above the vacuum furnace cavity at the feeding end of the vibration conveying groove, the discharge port at the lower end of the powder feeder is aligned with the feeding end of the vibration conveying groove, the vacuum furnace cavity is connected with a vacuum pump through a pipeline, a material collecting box is arranged on the vacuum furnace cavity below the discharge end of the vibration conveying groove, a plurality of reaction cycle units are arranged on the vacuum furnace cavity between the feeding end and the discharge end of the vibration conveying groove, each reaction cycle unit comprises a heater and a plurality of gas inlets for introducing reaction gas or inert gas, and electric valves are respectively arranged on the pipeline between the discharge port at the lower end of the powder feeder and the vacuum furnace cavity and the vacuum pump. The present application has the following advantages: the reaction is carried out under vacuum, which can effectively improve the uniformity of the coating, improve the density, and reduce the pollution to the powder; the heating device can meet the temperature conditions of some ALD reactions, and the appropriate temperature range can make the reaction faster and more sufficient.

Description

Technical Field

[0001] This invention relates to a vacuum high-temperature powder vibration coating equipment, belonging to the technical field of coating equipment. Background Technology

[0002] Powder coating technology can significantly improve the electrical conductivity, thermal conductivity, weather resistance and chemical stability of powder materials, and is widely used in the lithium battery, catalyst and pharmaceutical industries.

[0003] However, due to the characteristics of powder agglomeration and large surface area, there is a lack of low-cost, high-yield powder coating technology and equipment in the current technology.

[0004] Existing technologies include coating processes performed under normal pressure. However, ALD reactions typically involve a precursor (commonly TMA) and an oxygen source (H2O or O3). Reaction under normal pressure is problematic because the presence of oxygen in the air means that the TMA reacts directly with the air during CVD, leading to inaccurate control of the coating thickness and poor coating density. Furthermore, the CVD reaction generates a significant amount of alumina dust, contaminating the powder to be coated. Additionally, the presence of other gaseous elements, moisture, or impurities in the air at normal pressure can further contaminate the powder. Moreover, the slower diffusion rate of reactant gases at normal pressure results in uneven distribution of these gases on the powder, causing uneven coating and a risk of missed areas. On the other hand, the powder adsorbs gases, moisture, or other impurities from the air. These moisture and impurities act as "bridges" between powder particles (adsorbed water molecules form hydrogen bonds), causing powder particles to clump together and agglomerate. Summary of the Invention

[0005] The present invention proposes a vacuum high-temperature powder vibration coating equipment, which aims to overcome the above-mentioned shortcomings of the existing technology, improve the uniformity and density of the coating, reduce the contamination of the powder, and improve the ALD reaction rate and completeness.

[0006] The technical solution of this invention is a vacuum high-temperature powder vibration coating equipment that utilizes spatial displacement atomic layer deposition coating technology to achieve batch coating of powder.

[0007] Specifically, its structure includes a powder feeder, a vacuum furnace chamber, a vibrating conveyor trough, a vacuum pump, and a receiving box. The vibrating conveyor trough is arranged along its length inside the vacuum furnace chamber. A powder feeder is installed on the vacuum furnace chamber above the feed end of the vibrating conveyor trough. The discharge port at the lower end of the powder feeder is aligned with the feed end of the vibrating conveyor trough. The vacuum furnace chamber is connected to the vacuum pump through a pipe. A receiving box is installed on the vacuum furnace chamber below the discharge end of the vibrating conveyor trough. Several reaction cycle units are provided on the vacuum furnace chamber between the feed end and the discharge end of the vibrating conveyor trough. Each reaction cycle unit includes a heater and several air inlets. The heater is located at the end of the reaction cycle unit near the powder feeder. The air inlets are used to introduce reaction gas or inert gas. Electric valves are respectively installed on the discharge port at the lower end of the powder feeder and on the pipe between the vacuum furnace chamber and the vacuum pump. In the above structure, the powder feeder is used to load the powder to be coated; the vacuum furnace provides the vacuum environment required for powder coating; the vacuum pump evacuates the vacuum furnace and removes residual reaction gases; the vibrating conveyor can use a set frequency to vibrate and transport the powder from the feed port to the receiving box, and disperse the powder to prevent agglomeration; the receiving box collects the coated powder, and two electric valves are used to control the feeding speed and the vacuuming speed, respectively.

[0008] Preferably, each reaction cycle unit includes a uniformly distributed air inlet, through which an inert gas, reactant gas A, an inert gas, reactant gas B, and an inert gas are sequentially introduced from the side of the air inlet closest to the heater to the other side. The heater is used to heat the powder to the temperature required for the reaction, and the inert gas is used to isolate reactant gas A and reactant gas B to prevent CVD reaction from occurring.

[0009] Preferably, a number of supporting springs connect the vibrating conveyor trough to the bottom of the vacuum furnace cavity. Two vibrators are installed below the vacuum furnace cavity, and each vibrator is connected to the two sides of the bottom of the vibrating conveyor trough via a vibrating connecting rod passing through the bottom of the vacuum furnace cavity. A sealing bellows is installed on the vibrating connecting rod on the outer side of the vacuum furnace cavity. The supporting springs support the vibrating conveyor trough and prevent the vibration mechanism from affecting the vacuum furnace cavity; the sealing bellows provide a sealing effect when the vibrating connecting rod passes through the outer wall of the vacuum furnace cavity; the vibrators control the vibration frequency and amplitude direction of the vibrating conveyor trough. By controlling the vibration frequency, amplitude, and vibration direction of the vibrating conveyor trough with two vibrators, the powder is dispersed in the vibrating conveyor trough and thrown forward at a certain forward throwing angle. During the forward vibration and dispersion process, the powder passes under each reaction cycle unit, is heated, and periodically coated with atomic layers of reactant gas A and reactant gas B on its surface, achieving periodic spatial atomic layer deposition coating.

[0010] Advantages of this invention: The structure is reasonably designed, and the reaction is carried out under vacuum. Compared with the reaction under normal pressure in the prior art, it can effectively improve the uniformity of the coating, improve the density, and reduce the contamination of the powder. It is also preferably equipped with a heating device to meet the requirement that some ALD reactions can only be carried out under certain temperature conditions, and the appropriate temperature range can make the ALD reaction faster and more complete. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of the vacuum high-temperature powder vibration coating equipment of the present invention.

[0012] Figure 2 yes Figure 1 A schematic diagram of a reaction cycle unit.

[0013] In the diagram, 1 is the powder feeder, 2 is the electric valve, 3 is the vacuum furnace chamber, 4 is the vibrating conveyor, 5 is the support spring, 6 is the vibrating connecting rod, 7 is the sealing bellows, 8 is the vibrator, 9 is the vacuum pump, 10 is the receiving box, 11 is the reaction cycle unit, 12 is the heater, and 13 is the air inlet. Detailed Implementation

[0014] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0015] like Figure 1 As shown, a vacuum high-temperature powder vibration coating equipment includes a powder feeder 1, a vacuum furnace chamber 3, a vibration conveying trough 4, a vacuum pump 9, and a receiving box 10. The vibration conveying trough 4 is arranged along its length inside the vacuum furnace chamber 3. The powder feeder 1 is installed on the vacuum furnace chamber 3 above the feeding end of the vibration conveying trough 4. The lower end of the powder feeder 1 is aligned with the feeding end of the vibration conveying trough 4. The vacuum furnace chamber 3 is connected to the vacuum pump 9 through a pipe. The receiving box 10 is installed on the vacuum furnace chamber 3 below the discharging end of the vibration conveying trough 4. Several reaction cycle units 11 are provided on the vacuum furnace chamber 3 between the feeding end and the discharging end of the vibration conveying trough 4. Each reaction cycle unit 11 includes a heater 12 and several air inlets 13. The heater 12 is located at the end of the reaction cycle unit 11 near the powder feeder 1. The air inlets 13 are used to introduce reaction gas or inert gas. Electric valves 2 are respectively provided on the lower end of the powder feeder 1 and the pipe between the vacuum furnace chamber 3 and the vacuum pump 9.

[0016] In the above structure, the powder feeder 1 is used to load the powder to be coated; the vacuum furnace 3 provides the vacuum environment required for powder coating; the vacuum pump 9 evacuates the vacuum furnace 3 into a vacuum and removes the residual reaction gas; the vibrating conveyor 4 can use a set frequency to vibrate and transport the powder from the feed port to the receiving box 10, and make the powder spread to prevent agglomeration; the receiving box 10 collects the coated powder, and two electric valves 2 are used to control the feeding speed and the vacuuming speed, respectively.

[0017] In the specific design, each reaction cycle unit 11 includes 5 evenly distributed air inlets 13, and inert gas, reaction gas A, inert gas, reaction gas B and inert gas are sequentially introduced into the 5 air inlets 13 from the side closest to the heater 12 to the other side.

[0018] Heater 12 is used to heat the powder to the temperature required for the reaction, and inert gas is used to isolate reactant gas A and reactant gas B to prevent CVD (chemical vapor deposition) reaction. The number of reaction cycle units 11 can be set according to the actual required coating thickness of the powder.

[0019] Several supporting springs 5 ​​are connected between the vibrating conveyor trough 4 and the bottom of the vacuum furnace cavity 3. Two vibrators 8 are installed below the vacuum furnace cavity 3. The two vibrators 8 are connected to the bottom sides of the vibrating conveyor trough 4 through a vibrating connecting rod 6 that passes through the bottom of the vacuum furnace cavity 3. A sealing bellows 7 is installed on the vibrating connecting rod 6 on the outer part of the vacuum furnace cavity 3.

[0020] The support spring 5 is used to support the vibrating conveyor trough 4 and prevent the vibration mechanism from affecting the vacuum furnace cavity 3; the sealing bellows 7 is used to seal when the vibrating connecting rod 6 passes through the outer wall of the vacuum furnace cavity 3; the vibrator 8 is used to control the vibration frequency and amplitude direction of the vibrating conveyor trough 4.

[0021] Two vibrators 8 control the vibration frequency, amplitude, and direction of the vibrating conveyor 4, causing the powder to be dispersed within the vibrating conveyor 4 and thrown forward at a certain forward throwing angle. During the forward vibration and dispersion process, the powder passes under each reaction cycle unit 11, is heated, and periodically coated with atomic layers of reactive gas A and reactive gas B on its surface, achieving periodic spatial atomic layer deposition coating.

[0022] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0023] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the protection scope of the present invention.

Claims

1. A vacuum high-temperature powder vibration coating equipment, characterized in that, The system includes a powder feeder (1), a vacuum furnace chamber (3), a vibrating conveyor trough (4), a vacuum pump (9), and a receiving box (10). The vibrating conveyor trough (4) is arranged along its length inside the vacuum furnace chamber (3). The powder feeder (1) is installed on the vacuum furnace chamber (3) above the feeding end of the vibrating conveyor trough (4). The lower outlet of the powder feeder (1) is aligned with the feeding end of the vibrating conveyor trough (4). The vacuum furnace chamber (3) is connected to the vacuum pump (9) through a pipe. The receiving box (10) is installed on the vacuum furnace chamber (3) below the discharge end of the vibrating conveyor trough (4). 0), The vacuum furnace chamber (3) between the feed end and the discharge end of the vibrating conveyor (4) is provided with several reaction cycle units (11). Each reaction cycle unit (11) includes a heater (12) and several air inlets (13). The heater (12) is located at one end of the reaction cycle unit (11) near the powder feeder (1). The air inlets (13) are used to introduce reaction gas or inert gas. Electric valves (2) are respectively provided on the pipeline between the discharge port at the lower end of the powder feeder (1) and the vacuum furnace chamber (3) and the vacuum pump (9).

2. The vacuum high-temperature powder vibration coating equipment as described in claim 1, characterized in that, Each of the aforementioned reaction cycle units (11) includes (5) uniformly distributed air inlets (13), and (5) inlets (13) from the side of the air inlet (13) closest to the heater (12) to the other side, respectively, introduce inert gas, reaction gas A, inert gas, reaction gas B and inert gas.

3. The vacuum high-temperature powder vibration coating equipment as described in claim 1, characterized in that, Several supporting springs (5) are connected between the vibrating conveying trough (4) and the bottom of the vacuum furnace cavity (3). Two vibrators (8) are installed below the vacuum furnace cavity (3). The two vibrators (8) are connected to the bottom sides of the vibrating conveying trough (4) through a vibrating connecting rod (6) that passes through the bottom of the vacuum furnace cavity (3). A sealing bellows (7) is installed on the vibrating connecting rod (6) on the outer part of the vacuum furnace cavity (3).

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