High-density DLC vacuum coating equipment

Abstract

The application discloses a high-density DLC vacuum coating equipment and relates to the technical field of coating equipment.The technical scheme is as follows: a base is arranged with a vacuum coating machine body; a door-shaped frame is arranged on the base; a vacuum coating box with an open material placement bottom plate is fixedly installed on the door-shaped frame; a material placement bottom plate and a driving assembly for controlling lifting are arranged below the vacuum coating box on the base to control the opening and closing of the open material placement bottom plate of the vacuum coating box; and a sealing element is arranged on the base to seal the joint of the bottom plate and the vacuum coating box when the open bottom plate is closed.The application aims to provide a high-density DLC vacuum coating equipment.

Description

Technical Field

[0001] This invention relates to the field of coating equipment technology, and more specifically, to a high-density DLC vacuum coating equipment. Background Technology

[0002] DLC (Diamond-Like Carbon) vacuum coating technology has become an important development direction in the field of surface engineering in recent years. The DLC films prepared using this technology possess excellent properties such as high hardness, low coefficient of friction, excellent wear resistance, and chemical stability, and are widely used in cutting tools, molds, automotive parts, and medical devices. DLC vacuum coating equipment is the core equipment for realizing this technology, and its performance directly determines the coating quality and production efficiency.

[0003] Chinese utility model patent CN222935498U discloses a DLC vacuum coating equipment that can improve the density of the coating. The equipment includes a substrate, with a DLC vacuum coating machine body mounted on top of the substrate. A DLC vacuum coating chamber is connected to one side of the DLC vacuum coating machine body. A feeding / discharging mechanism is also provided on the top of the substrate. This mechanism includes an adjustment box, which is fixedly connected to the substrate. A stepper motor is fixedly mounted on the material placement base plate inside the adjustment box. A one-way threaded rod is fixedly mounted on the output shaft of the stepper motor, and an adjusting screw is threaded onto the surface of the one-way threaded rod. By controlling the forward and reverse rotation of the stepper motor, the height of the chamber base can be adjusted to facilitate material feeding and unloading. In addition, the equipment also includes a cooling mechanism that can blow air onto the workpiece to accelerate its cooling.

[0004] However, in actual use, there will inevitably be a gap between the base and the coating chamber, and the DLC vacuum coating process usually requires 10... -3 The coating process is carried out in a high vacuum environment of Pa or even higher. If the seal between the base and the chamber is not tight when the base is raised and lowered and then repositioned, it will directly destroy the vacuum environment inside the chamber, leading to the introduction of impurity gases during the coating process, which will seriously affect the density and adhesion of the DLC film.

[0005] Therefore, a new technical solution is urgently needed to solve the above-mentioned technical problems. Summary of the Invention

[0006] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a high-density DLC vacuum coating equipment.

[0007] The above-mentioned technical objective of the present invention is achieved through the following technical solution: a high-density DLC vacuum coating equipment, comprising a base, a vacuum coating machine body disposed on the base, a gantry frame disposed on the base, a vacuum coating chamber with an open bottom fixedly mounted on the gantry frame, a material placement base plate and a drive assembly for controlling the lifting and lowering of the vacuum coating chamber disposed on the base below the vacuum coating chamber, so as to control the opening and closing of the opening of the material placement base plate of the vacuum coating chamber, and a sealing element disposed on the base for sealing the connection between the base plate and the vacuum coating chamber when the opening of the base plate is closed.

[0008] The invention is further configured such that: a sliding groove extending in a horizontal direction is formed on the surface of the base; the driving assembly includes two sliding blocks slidably connected in the sliding groove; a hinge rod is hinged to the surface of the sliding block; the other ends of the two hinge rods are respectively hinged to the bottom of the material placement base plate; and a driving component is also included for driving the two sliding blocks to move closer or further apart.

[0009] The present invention is further configured such that: the driving component includes a threaded rod rotatably connected in the sliding groove, the surface of the driving rod is provided with threads of opposite directions that are respectively threaded to two sliding blocks, and a motor for driving the threaded rod is also provided on one side of the base.

[0010] The present invention is further configured such that: the sealing element includes connecting rods respectively vertically arranged on the two sliding blocks, and the top ends of the two connecting rods are respectively provided with sealing rings in the shape of semi-circular rings. When the two sliding blocks move towards each other, the two sealing rings can engage with each other to form a complete annular sealing ring, which is fitted on the outside of the connection between the bottom plate and the vacuum coating box.

[0011] The present invention is further configured such that rubber sealing gaskets are provided on the inner circumferential wall and both end surfaces of the sealing ring.

[0012] The present invention is further configured such that: the diameter of the material placement base plate is equal to the inner diameter of the bottom opening of the vacuum coating chamber, and an abutment ring is provided on the circumferential side wall of the material placement base plate; when the material placement base plate is embedded into the vacuum coating chamber, the abutment ring abuts against the bottom of the vacuum coating chamber.

[0013] The present invention is further configured such that: a cooling assembly is provided on the base surface below the material placement plate; the cooling assembly includes a guide column; a cooling plate is provided on the top of the guide column; a cooling cavity is formed in the cooling plate; and an inlet pipe and an outlet pipe connected to the cooling cavity are provided on the guide column.

[0014] The present invention is further configured such that: the bottom of the material placement base plate is provided with a cooling groove adapted to the shape of the cooling plate, and after the driving component drives the material placement base plate to descend, the cooling plate is inserted into the cooling groove.

[0015] The present invention has the following beneficial effects: the bottom of the vacuum coating chamber is suspended in the air by the gantry frame, and with the material placement base plate that can be raised and lowered freely, the operator does not need to climb or reach into the chamber to operate when picking up or putting down the workpiece. He only needs to control the base plate to lower the position to easily place or take down the workpiece, which significantly reduces the difficulty of operation and labor intensity. In addition, the sealing component actively seals the connection when the base plate rises to close the opening of the chamber, ensuring that the cavity can be stably maintained in a high vacuum environment, thus ensuring the high density and high adhesion of the DLC film layer from the source. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of this embodiment; Figure 2 This is a partial structural diagram of this embodiment; Figure 3 This is a schematic diagram of the material placement base plate in this embodiment; Figure 4 This is a schematic diagram of the cooling assembly in this embodiment.

[0017] Figure Descriptions: 1. Base; 2. Vacuum coating machine body; 3. Gantry frame; 4. Vacuum coating chamber; 5. Material placement base plate; 6. Sliding groove; 7. Sliding block; 8. Hinge rod; 9. Threaded rod; 10. Motor; 11. Liquid inlet pipe; 12. Liquid outlet pipe; 13. Connecting rod; 14. Sealing ring; 15. Abutment ring; 16. Rubber sealing ring; 17. Rubber sealing gasket; 18. Guide column; 19. Cooling plate; 20. Cooling groove. Detailed Implementation

[0018] The present invention will be further described in detail below with reference to the accompanying drawings.

[0019] Identical parts are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to directions in the accompanying drawings, while the terms "bottom surface," "top surface," "inner," and "outer" refer to directions toward or away from the geometric center of a specific part, respectively.

[0020] like Figure 1-4As shown, a high-density DLC vacuum coating equipment includes a base 1, a vacuum coating machine body 2 mounted on the base 1, a gantry frame 3 mounted on the base 1, and a vacuum coating chamber 4 with an open bottom fixedly mounted on the gantry frame 3. A material placement base plate 5 and a drive assembly for controlling the lifting and lowering of the controller are located below the vacuum coating chamber 4 on the base 1 to control the opening and closing of the opening of the material placement base plate 5 in the vacuum coating chamber 4. A sealing element is also provided on the base 1 to seal the connection between the material placement base plate 5 and the vacuum coating chamber 4 when the opening is closed. The specific structure of the vacuum coating machine body 2 and the vacuum coating chamber 4 involved in this embodiment, as well as their vacuum coating working principle, are common knowledge in the art and will not be described in detail here.

[0021] The vacuum coating chamber is suspended at the bottom by the portal frame 3, and with the freely movable material placement base plate, operators do not need to climb or reach into the chamber to place or remove workpieces. They only need to control the base plate to lower to the lowest position to easily place or remove the workpieces, significantly reducing the difficulty and labor intensity of operation. Furthermore, the sealing components actively seal the joints when the base plate rises to close the chamber opening, ensuring that the cavity can be stably maintained at 10°C. -3 The high vacuum environment above Pa ensures the high density and high adhesion of the DLC film layer from the source.

[0022] The base 1 has a horizontally extending sliding groove 6 on its surface. The drive assembly includes two sliding blocks 7 that are slidably connected in the sliding groove 6. The surface of the sliding block 7 is hinged with a hinge rod 8. The other ends of the two hinge rods 8 are respectively hinged to the bottom of the material placement base plate 5. It also includes a drive component for driving the two sliding blocks 7 to move closer or further away.

[0023] The driving component includes a threaded rod 9 rotatably connected to the sliding groove 6. The surface of the driving rod is provided with threads of opposite directions that are threaded to two sliding blocks 7 respectively. A motor 10 for driving the threaded rod 9 is also provided on one side of the base 1. The two sliding blocks 7 are driven to move closer or further apart by the motor 10, and under the action of the two hinged rods 8, the lifting and lowering of the material placement base plate 5 is controlled, thereby controlling the opening and closing of the bottom opening of the vacuum coating chamber 4.

[0024] The sealing element includes connecting rods 13 vertically mounted on two sliding blocks 7. The top of each connecting rod 13 has a semi-circular sealing ring 14. When the two sliding blocks 7 move towards each other, the two sealing rings 14 engage to form a complete annular sealing ring, which is fitted onto the outside of the connection between the base plate and the vacuum coating chamber 4. As the sliding blocks 7 move towards each other, driving the base plate to rise to the closed position, the two semi-circular sealing rings connected to the sliding blocks 7 synchronously close, ultimately fitting precisely onto the outside of the connection gap between the base plate and the chamber when the base plate reaches its highest position. This linkage design eliminates the need for a separate drive source for the sealing element, simplifying the structure, reducing costs, and ensuring precise timing.

[0025] The diameter of the material placement base plate 5 is equal to the inner diameter of the bottom opening of the vacuum coating chamber 4. An abutment ring 15 is provided on the circumferential side wall of the material placement base plate 5. When the material placement base plate 5 is embedded into the vacuum coating chamber 4, the abutment ring 15 abuts against the bottom of the vacuum coating chamber 4. A rubber sealing ring 16 is provided on the surface of the abutment ring 15. When the material placement base plate 5 is embedded into the bottom opening of the vacuum coating chamber 4, the rubber sealing ring 16 abuts against the bottom of the vacuum coating chamber, thereby improving its sealing effect.

[0026] Rubber sealing gaskets 17 are provided on the inner circumference of the sealing ring 14 and on both end surfaces. When the two sealing rings 14 are closed to form an annular sealing ring, the rubber gasket on the inner wall of the sealing ring 14 is attached to the outer wall between the material placement base plate 5 and the abutment ring 15, thereby effectively sealing the gap between the two. At the same time, the rubber sealing gaskets 17 at the ends of the two sealing rings 14 abut against each other, thereby ensuring the sealing effect between the ends of the two sealing rings 14.

[0027] A cooling assembly is installed on the surface of the base 1 below the material placement base plate 5. The cooling assembly includes a guide column 18, with a cooling plate 19 on top of the guide column 18. A cooling chamber is formed inside the cooling plate 19. An inlet pipe 11 and an outlet pipe 12 connected to the cooling chamber are provided on the guide column 18. Coolant enters the cooling chamber through the inlet pipe 11 and is discharged through the outlet pipe 12. After the coating is completed, the base plate is lowered to a low position so that the workpiece is close to or in contact with the cooling plate 19, and the heat is quickly removed by the circulating coolant in the cooling chamber.

[0028] The bottom of the material placement base plate 5 is provided with a cooling groove 20 adapted to the shape of the cooling plate 19. After the drive assembly drives the material placement base plate 5 to descend, the cooling plate 19 is inserted into the cooling groove 20. After the base plate descends, the cooling plate 19 can be embedded in the groove. The contact area between the cooling plate 19 and the base plate is much larger than that of simple flat contact, the heat exchange area is significantly increased, and the cooling efficiency is further improved.

[0029] The specific embodiments are merely illustrative of the present invention and are not intended to limit the invention. After reading this specification, those skilled in the art can make modifications to these embodiments without contributing any inventive step, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A high-density DLC vacuum coating equipment, characterized in that: The system includes a base (1), on which a vacuum coating machine body (2) is mounted. A gantry frame (3) is also mounted on the base (1). A vacuum coating chamber (4) with an open bottom is fixedly mounted on the gantry frame (3). A material placement base plate (5) and a drive assembly for controlling the lifting of the controller are provided on the base (1) below the vacuum coating chamber (4) to control the opening and closing of the opening of the material placement base plate (5) of the vacuum coating chamber (4). A sealing element is also provided on the base (1) to seal the connection between the material placement base plate (5) and the vacuum coating chamber (4) when the bottom plate closes the opening.

2. The high-density DLC vacuum coating equipment according to claim 1, characterized in that: The base (1) has a sliding groove (6) extending in the horizontal direction on its surface. The drive assembly includes two sliding blocks (7) that are slidably connected in the sliding groove (6). The surface of the sliding block (7) is hinged with a hinge rod (8). The other ends of the two hinge rods (8) are respectively hinged to the bottom of the material placement base plate (5). It also includes a drive component for driving the two sliding blocks (7) to move closer or further away.

3. The high-density DLC vacuum coating equipment according to claim 2, characterized in that: The driving component includes a threaded rod (9) rotatably connected in a sliding groove (6). The surface of the driving rod is provided with threads of opposite directions that are threaded to two sliding blocks (7). A motor (10) for driving the threaded rod (9) is also provided on one side of the base (1).

4. The high-density DLC vacuum coating equipment according to claim 3, characterized in that: The sealing element includes connecting rods (13) that are vertically mounted on the two sliding blocks (7). The top ends of the two connecting rods (13) are respectively provided with semi-circular sealing rings (14). When the two sliding blocks (7) move towards each other, the two sealing rings (14) can engage with each other to form a complete annular sealing ring, which is fitted on the outside of the connection between the bottom plate and the vacuum coating box (4).

5. The high-density DLC vacuum coating equipment according to claim 4, characterized in that: The inner circumference of the sealing ring (14) and the surfaces of both ends are provided with rubber sealing gaskets (17).

6. The high-density DLC vacuum coating equipment according to claim 5, characterized in that: The diameter of the material placement base plate (5) is equal to the inner diameter of the bottom opening of the vacuum coating box (4). The material placement base plate (5) is provided with an abutment ring (15) on its circumferential side wall. When the material placement base plate (5) is embedded into the vacuum coating box (4), the abutment ring (15) abuts against the bottom of the vacuum coating box (4).

7. The high-density DLC vacuum coating equipment according to claim 6, characterized in that: A cooling assembly is provided on the surface of the base (1) below the material placement base plate (5). The cooling assembly includes a guide column (18), a cooling plate (19) is provided on the top of the guide column (18), a cooling cavity is provided in the cooling plate (19), and an inlet pipe (11) and an outlet pipe (12) connected to the cooling cavity are provided on the guide column (18).

8. The high-density DLC vacuum coating equipment according to claim 7, characterized in that: The bottom of the material placement base plate (5) is provided with a cooling groove (20) adapted to the shape of the cooling plate (19). After the driving component drives the material placement base plate (5) to descend, the cooling plate (19) is inserted into the cooling groove (20).

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