A partitioned temperature-controlled diamond deposition apparatus

Abstract

The application discloses a kind of partition temperature control diamond deposition equipment, it is related to diamond deposition technical field, including deposition chamber, the bottom of deposition chamber is equipped with multiple mounting plate, mounting plate is equipped with annular cylinder, annular cylinder two ends are equipped with water inlet pipe and drain pipe respectively, annular cylinder is equipped with adjusting piece on the side close to drain pipe, adjusting piece is equipped with intercommunicating piece between side annular cylinder.The utility model through installing rotating structure by rotating rod, rotating plate, threaded cylinder and threaded block in intercepting plate, then installing response structure by extruding cylinder and extruding rod in the top of intercepting plate, deflection is carried out using response structure adjustment rotating structure, when water level in drain pipe reduces, response structure drives rotating structure to deflect and opens intercommunication pipe, so that part of inside drain pipe water flow flows into outside adjacent annular cylinder, to reduce the cooling effect of outside annular cylinder in turn, temperature regulation inside deposition chamber is facilitated, while reducing water resource waste.

Description

Technical Field

[0001] This invention relates to the field of diamond deposition technology, specifically to a zoned temperature-controlled diamond deposition device. Background Technology

[0002] Temperature-controlled deposition of diamond zones is a core advanced technology in the field of CVD diamond preparation. It breaks the limitation of uniform temperature of the entire substrate in the traditional deposition process. By independently controlling the temperature of different areas of the substrate stage, it solves the industry pain points of poor uniformity of large-size diamond film growth and inconsistent crystal quality in different areas.

[0003] Currently, the cooling control methods of existing zoned temperature-controlled deposition equipment are relatively simple, mainly relying on manual or electronically controlled valves to individually control the cooling water flow rate of each cooling annulus. By changing the water flow rate and volume, heat dissipation efficiency is adjusted, thereby achieving temperature control. However, this structure has significant drawbacks in practical use: Firstly, each cooling annulus requires an independent control valve, resulting in a complex overall structure, numerous parts, and high assembly and maintenance costs. Secondly, existing valves can only achieve single adjustment of water flow rate and volume, failing to achieve the circulation and reuse of cooling water or adaptive allocation. When high-intensity cooling is not required in certain areas, cooling water will continue to be discharged in one direction, resulting in a large waste of water resources and poor energy efficiency. Furthermore, manual control is highly lagging, unable to quickly adapt and adjust according to real-time temperature changes in the deposition chamber, and lacks sufficient temperature control accuracy and automation. Summary of the Invention

[0004] The purpose of this invention is to provide a zoned temperature-controlled diamond deposition device to solve the problems mentioned in the background art, such as the single temperature control method, serious waste of water resources, cumbersome structure, and inability to adaptively adjust according to the deposition temperature in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a zoned temperature-controlled diamond deposition device, comprising a deposition chamber, wherein multiple mounting plates are installed at the bottom of the deposition chamber, an annular cylinder is installed inside the mounting plates, an inlet pipe and a drain pipe are respectively installed at both ends of the annular cylinder, an adjusting component is installed on the side of the annular cylinder near the drain pipe, and a connecting component is installed between the adjusting component and the side annular cylinder.

[0006] Preferably, the adjusting component includes an intercepting plate. An intercepting plate is installed on both the upper and lower sides of the annular cylinder near the drain pipe. The connecting component communicates with the inner intercepting plate. A bearing is installed on the upper surface of the lower intercepting plate. A rotating component is installed inside the bearing. The rotating component is in rotatable contact with the connecting component. A control component is installed at the top inside the intercepting plate. The control component is in contact with the rotating component.

[0007] Preferably, the rotating component includes a rotating rod rotatably connected to a bearing, a rotating plate is mounted on the annular surface of the rotating rod, the rotating plate is in rotatable contact with the connecting component, a threaded cylinder is mounted on the upper end of the rotating rod, a threaded block is threadedly connected inside the threaded cylinder, and the control component is connected to the threaded block.

[0008] Preferably, the control component includes a compression cylinder, which is installed inside the upper interceptor plate. The compression cylinder is filled with refrigerant, and a piston is slidably connected inside the opening of the compression cylinder. A compression rod is installed on the side of the piston facing the opening of the compression cylinder, and the end of the compression rod away from the piston is connected to a threaded block.

[0009] Preferably, the connecting element includes a connecting pipe, one side of the annular cylinder is connected to the connecting pipe, the end of the connecting pipe away from the inner interceptor plate is connected to the outer annular cylinder, a conical ring is installed inside the connecting pipe, a movable plug is slidably connected inside the conical ring, a sealing element is installed on the side of the movable plug away from the interceptor plate, the end of the sealing element away from the conical ring is installed inside the connecting pipe, and the sealing element is slidably connected to the side of the adjacent annular cylinder near the water inlet pipe.

[0010] Preferably, the sealing element includes a conical block slidably connected within a conical ring, a retaining member is installed at the end of the conical block away from the conical ring, a sealing plate is installed on the side of the retaining member away from the conical block, and the sealing plate extends into an adjacent annular cylinder.

[0011] Preferably, the supporting member includes a mounting bracket installed inside the connecting pipe. A supporting cylinder is installed on the side of the mounting bracket facing the conical block. A first supporting rod is inserted into the supporting cylinder. The end of the first supporting rod away from the supporting cylinder is connected to the conical block. An elastic element is installed inside the supporting cylinder on the first supporting rod. The end of the elastic element away from the first supporting rod is installed inside the supporting cylinder. A second supporting rod is installed at the end of the first supporting rod away from the conical block. The end of the second supporting rod away from the first supporting rod passes through the elastic element and is connected to the sealing plate.

[0012] Preferably, a main inlet pipe and a main outlet pipe are installed on the lower surface of the sedimentation chamber, and multiple inlet pipes are connected to the main inlet pipe, and multiple outlet pipes are connected to the main outlet pipe.

[0013] Preferably, the refrigerant inside the extrusion cylinder can expand and contract with the temperature change of the deposition chamber, driving the piston and extrusion rod to move back and forth, providing automatic driving power for the angle adjustment of the rotating parts, and realizing temperature-linked flow control regulation.

[0014] Preferably, the elastic element always provides elastic clamping force to the first abutting rod, which drives the conical block to fit against the conical ring to achieve sealing and plugging under normal conditions, and can adaptively retract and open under water pressure to realize automatic start and stop control of water flow reuse.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. An adaptive rotation adjustment structure, consisting of a rotating rod, rotating plate, threaded cylinder, and threaded block, is installed in the interceptor plate cavity inside the annular cylinder. This is combined with a temperature-sensing drive structure composed of an extrusion cylinder, refrigerant, piston, and extrusion rod. Utilizing the physical properties of refrigerant's thermal expansion and contraction, the structure precisely responds to temperature changes within the deposition chamber, automatically driving the extrusion rod to extend and retract, thereby causing the rotating rod and rotating plate to deflect at an angle. No manual operation or additional electrical control equipment is required. When the water temperature in the drain pipe on one side decreases and the heat dissipation demand weakens, the temperature-sensing structure automatically drives the rotating plate to deflect, gradually opening the connecting pipe passage. This allows the cooling water after heat exchange in the inner annular cylinder to be introduced into the adjacent outer annular cylinder through the connecting pipe, providing auxiliary cooling to the outer area. No new cooling water supply is required. This system can precisely adapt to the cooling needs of different areas of the deposition chamber, achieving zoned differentiated temperature control and improving the uniformity of diamond deposition temperature. It also effectively reduces the use of new cooling water, significantly reducing water waste and improving the energy efficiency of the equipment. 2. By setting an adaptive sealing and linkage structure inside the connecting pipe, consisting of a conical block, a conical ring, a supporting cylinder, a first supporting rod, an elastic element, and a sealing plate, the continuous pressing force of the elastic element achieves a normal sealing of the connecting pipe, preventing arbitrary water flow from affecting the accuracy of zone temperature control. When water flows from the inner annular cylinder to the outer annular cylinder through the connecting pipe, the water pressure adaptively drives the sealing structure to operate, causing the sealing plate to temporarily block the water inlet passage of the outer annular cylinder. This prioritizes the reuse of the heat exchange water discharged from the inner side for cooling and heat dissipation, preventing the outer annular cylinder from continuously receiving fresh low-temperature cooling water. This effectively achieves the recycling and reuse of cooling water, further reducing water consumption. At the same time, the precise water flow distribution weakens the heat dissipation intensity of the outer annular cylinder, matching the temperature control requirements of the sedimentation chamber zones. This solves the technical problems of traditional equipment, such as single temperature control, high energy and water consumption, and lagging control, significantly improving the automation control accuracy and production practicality of the equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the assembly of multiple annular cylinders according to the present invention; Figure 3 This is a cross-sectional view of the annular cylinder of the present invention at the rotating plate; Figure 4 This is an assembly diagram of the rotating plate, rotating rod, threaded cylinder, extrusion rod, and extrusion cylinder of the present invention; Figure 5 This is a cross-sectional view of the connecting pipe of the present invention.

[0017] In the diagram: 1. Sedimentation chamber, 2. Main inlet pipe, 3. Main outlet pipe, 4. Mounting plate, 5. Annular cylinder, 6. Drainage pipe, 7. Inlet pipe, 8. Connecting pipe, 9. Interceptor plate, 10. Rotating plate, 11. Rotating rod, 12. Threaded cylinder, 13. Extrusion rod, 14. Extrusion cylinder, 15. Bearing, 16. Conical ring, 17. Conical block, 18. Supporting cylinder, 19. Mounting bracket, 20. Second supporting rod, 21. Sealing plate. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1-5 This invention provides a technical solution: a zoned temperature-controlled diamond deposition device, comprising a deposition chamber 1, multiple mounting plates 4 installed at the bottom of the deposition chamber 1, an annular cylinder 5 installed inside the mounting plates 4, an inlet pipe 7 and a drain pipe 6 installed at both ends of the annular cylinder 5 respectively, and intercepting plates 9 installed on both the upper and lower sides of the end of the annular cylinder 5 near the drain pipe 6, a bearing 15 installed on the upper surface of the lower intercepting plate 9, a rotating rod 11 installed inside the bearing 15, a rotating plate 10 installed on the annular surface of the rotating rod 11, a threaded cylinder 12 installed at the upper end of the rotating rod 11, a threaded block threadedly connected inside the threaded cylinder 12, and an extrusion plate installed inside the upper intercepting plate 9. The extrusion cylinder 14 is filled with refrigerant, which expands when heated. A piston is slidably connected inside the extrusion cylinder 14. An extrusion rod 13 is installed on the side of the piston facing the opening of the extrusion cylinder 14. The end of the extrusion rod 13 away from the piston is connected to a threaded block. A connecting pipe 8 is connected to one side of the annular cylinder 5. The end of the connecting pipe 8 away from the inner interceptor plate 9 is connected to the outer annular cylinder 5. The connecting pipe 8 is installed on the side of the annular pipe close to the water inlet pipe 7. A main water inlet pipe 2 and a main water outlet pipe 3 are installed on the lower surface of the sedimentation chamber 1. Multiple water inlet pipes 7 are connected to the main water inlet pipe 2, and multiple water outlet pipes 6 are connected to the main water outlet pipe 3.

[0020] By installing a rotating structure consisting of a rotating rod 11, a rotating plate 10, a threaded cylinder 12, and a threaded block inside the interceptor plate 9, and then installing an induction structure consisting of a squeezing cylinder 14 and a squeezing rod 13 at the top inside the interceptor plate 9, the rotating structure is deflected by the induction structure. When the water level in the drain pipe 6 decreases, the induction structure drives the rotating structure to deflect and opens the connecting pipe 8, allowing some of the water in the inner drain pipe 6 to flow into the adjacent outer annular cylinder 5, thereby reducing the cooling effect of the outer annular cylinder 5, facilitating temperature control inside the sedimentation chamber 1, and reducing water waste.

[0021] A conical ring 16 is installed inside the connecting pipe 8. A movable plug is slidably connected inside the conical ring 16. A conical block 17 is slidably connected to the side of the movable plug away from the interceptor plate 9. An installation bracket 19 is installed inside the connecting pipe 8. A support cylinder 18 is installed on the side of the installation bracket 19 facing the conical block 17. A first support rod is inserted into the support cylinder 18. The end of the first support rod away from the support cylinder 18 is connected to the conical block 17. An elastic element, which is a spring, is installed inside the support cylinder 18. The elastic element is in a normal state. The end of the elastic element away from the first support rod is installed inside the support cylinder 18. A second support rod 20 is installed at the end of the first support rod away from the conical block 17. The end of the second support rod 20 away from the first support rod passes through the elastic element and is fitted with a sealing plate 21. The sealing plate 21 extends into the annular cylinder 5.

[0022] By installing a sealing structure consisting of a conical block 17, a sealing plate 21, a retaining cylinder 18, a first retaining rod, and an elastic element inside the connecting pipe 8, the connecting pipe 8 is sealed using the sealing structure. When water flows from the inner annular cylinder 5 into the outer connecting pipe 8 through the connecting pipe 8, the sealing structure intercepts the water inlet pipe 7 installed on the outer annular cylinder 5, thereby ensuring that the water discharged from the inner annular cylinder 5 is used preferentially, thus reducing water consumption and mitigating heat dissipation.

[0023] Working principle: Water from drain pipe 6 is discharged through drain manifold 3. When the deposition chamber 1 begins to heat up and deposit diamond, water is supplied to multiple inlet pipes 7 through inlet manifold 2. First, when the temperature of the innermost part of the deposition chamber 1 increases, the water flow in the innermost annular cylinder 5 cools the innermost part of the deposition chamber 1. When the temperature of the innermost part decreases too quickly, causing the water flow to pass through the interceptor plate 9 and fail to raise the coolant in the extrusion cylinder 14 to a sufficient temperature, the volume of coolant in the extrusion cylinder 14 decreases. At this time, the piston in the extrusion cylinder 14 rises, and the piston moves upward, driving the extrusion rod 13 to move upward. The threaded block moves upward. Since the threaded block is threadedly connected inside the threaded cylinder 12, the upward movement of the threaded block causes the threaded cylinder 12 to rotate. The rotation of the threaded cylinder 12 causes the rotating plate 10 to rotate through the rotating rod 11. The rotation of the rotating plate 10 opens the connecting pipe 8. At this time, the water discharged from the inner annular cylinder 5 can enter the outer annular cylinder through the connecting pipe 8. The water flows through the conical ring 16 and pushes the conical block 17. The conical block 17 pushes the sealing plate 21 into the outer annular cylinder 5 through the first abutting rod and the second abutting rod 20. At this time, it is convenient for the water in the inner annular cylinder 5 to enter the outer annular cylinder 5 preferentially.

[0024] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0025] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only for the purpose of helping to understand the method and core ideas of the present invention. The above descriptions are only preferred embodiments of the present invention. It should be noted that due to the limitations of textual expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of the present invention, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of the present invention.

Claims

1. A zoned temperature-controlled diamond deposition apparatus, comprising a deposition chamber (1), characterized in that: The sedimentation chamber (1) is equipped with multiple mounting plates (4) at the bottom. An annular cylinder (5) is installed inside the mounting plate (4). A water inlet pipe (7) and a drain pipe (6) are installed at both ends of the annular cylinder (5). An adjusting component is installed on the side of the annular cylinder (5) near the drain pipe (6). A connecting component is installed between the adjusting component and the side annular cylinder (5).

2. The zoned temperature-controlled diamond deposition equipment according to claim 1, characterized in that: The adjusting component includes an interceptor plate (9). An interceptor plate (9) is installed on both the upper and lower sides of the end of the annular cylinder (5) near the drain pipe (6). The connecting component communicates with the inner interceptor plate (9). A bearing (15) is installed on the upper surface of the lower interceptor plate (9). A rotating component is installed inside the bearing (15). The rotating component is in rotational contact with the connecting component. A control component is installed at the top inside the interceptor plate (9). The control component is in contact with the rotating component.

3. The zoned temperature-controlled diamond deposition equipment according to claim 2, characterized in that: The rotating component includes a rotating rod (11), which is rotatably connected to a bearing (15). A rotating plate (10) is mounted on the annular surface of the rotating rod (11). The rotating plate (10) is in rotatable contact with the connecting component. A threaded cylinder (12) is mounted on the upper end of the rotating rod (11). A threaded block is threadedly connected inside the threaded cylinder (12). The control component is connected to the threaded block.

4. The zoned temperature-controlled diamond deposition equipment according to claim 3, characterized in that: The control component includes a compression cylinder (14), which is installed inside the upper interceptor plate (9). The compression cylinder (14) is filled with refrigerant. A piston is slidably connected inside the opening of the compression cylinder (14). A compression rod (13) is installed on the side of the piston facing the opening of the compression cylinder (14). The end of the compression rod (13) away from the piston is connected to a threaded block.

5. A zoned temperature-controlled diamond deposition apparatus according to claim 3, characterized in that: The connecting component includes a connecting pipe (8), one side of the annular cylinder (5) is connected to the connecting pipe (8), one end of the connecting pipe (8) away from the inner interceptor plate (9) is connected to the outer annular cylinder (5), a conical ring (16) is installed inside the connecting pipe (8), a movable plug is slidably connected inside the conical ring (16), a sealing component is installed on the side of the movable plug away from the interceptor plate (9), one end of the sealing component away from the conical ring (16) is installed inside the connecting pipe (8), and the sealing component is slidably connected to the side of the adjacent annular cylinder (5) near the water inlet pipe (7).

6. The zoned temperature-controlled diamond deposition equipment according to claim 5, characterized in that: The sealing component includes a conical block (17) which is slidably connected within a conical ring (16). A retaining member is installed at one end of the conical block (17) away from the conical ring (16). A sealing plate (21) is installed on the side of the retaining member away from the conical block (17). The sealing plate (21) extends into the adjacent annular cylinder (5).

7. A zoned temperature-controlled diamond deposition apparatus according to claim 6, characterized in that: The abutment includes a mounting bracket (19), which is installed inside the connecting pipe (8). A abutment cylinder (18) is installed on the side of the mounting bracket (19) facing the conical block (17). A first abutment rod is inserted into the abutment cylinder (18). The end of the first abutment rod away from the abutment cylinder (18) is connected to the conical block (17). An elastic element is installed inside the abutment cylinder (18) on the first abutment rod. The end of the elastic element away from the first abutment rod is installed inside the abutment cylinder (18). A second abutment rod (20) is installed at the end of the first abutment rod away from the conical block (17). The end of the second abutment rod (20) away from the first abutment rod passes through the elastic element and is connected to the sealing plate (21).

8. The zoned temperature-controlled diamond deposition equipment according to claim 1, characterized in that: The sedimentation chamber (1) is equipped with a water inlet main pipe (2) and a water outlet main pipe (3) on its lower surface. Multiple water inlet pipes (7) are connected to the water inlet main pipe (2), and multiple water outlet pipes (6) are connected to the water outlet main pipe (3).

9. A zoned temperature-controlled diamond deposition apparatus according to claim 4, characterized in that: The refrigerant inside the extrusion cylinder (14) can expand and contract with the temperature change of the deposition chamber (1), driving the piston and extrusion rod (13) to move back and forth, providing automatic driving power for the angle adjustment of the rotating parts.

10. A zoned temperature-controlled diamond deposition apparatus according to claim 7, characterized in that: The elastic element always provides elastic clamping force to the first abutting rod. Under normal conditions, it drives the conical block (17) to fit against the conical ring (16) to achieve sealing and plugging. Under the action of water pressure, it can adaptively retract and open.

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